TW201434071A - Manufacturing method of electron emitting source and cathode using the same - Google Patents
Manufacturing method of electron emitting source and cathode using the same Download PDFInfo
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本發明是有關於一種電子發射源的製造方法，特別是指一種用於場發射照明光源與顯示器之電子發射源的製造方法及其陰極板的製造方法。 The present invention relates to a method of fabricating an electron emission source, and more particularly to a method of fabricating an electron emission source for a field emission illumination source and a display, and a method of fabricating the same.
電子發射源通常應用於場發射顯示器(FED)、穿透式電子顯微鏡(TEM)或場發射照明光源等設備中。所述電子發射源包括一個陽極板，以及一個可對該陽極板之一螢光粉層發射電子而使該螢光粉層受激發光的陰極板。 Electron emission sources are commonly used in devices such as field emission displays (FEDs), transmission electron microscopes (TEMs), or field emission illumination sources. The electron emission source includes an anode plate, and a cathode plate that emits electrons from one of the phosphor layers of the anode plate to cause the phosphor layer to be excited.
參閱圖1，一般陰極板的製造方法，通常是先將數個奈米碳管91均勻地混合於一導電膠92中而得到一奈米碳管塗膠93，接著將該奈米碳管塗膠93塗布於一板材94上，最後燒結該板材94即製作完成。由於所述奈米碳管91的導電性佳、長徑比大且材料特性穩定，加上其尖端表面積小而能集中電場，因而適合作為電子發射端。 Referring to FIG. 1, a general method for manufacturing a cathode plate is generally to first uniformly mix a plurality of carbon nanotubes 91 in a conductive paste 92 to obtain a carbon nanotube coating 93, and then apply the carbon nanotubes. The glue 93 is applied to a sheet 94, and finally the sheet 94 is sintered. Since the carbon nanotube 91 has good conductivity, large aspect ratio, and stable material properties, and has a small tip surface area and can concentrate an electric field, it is suitable as an electron-emitting end.
但前述的製造方法，在實際應用上卻不易得到穩定的電子發射源。這是因為將所述奈米碳管91均勻混合 於該導電膠92的作法，往往使得大部份的所述奈米碳管91被包覆在該導電膠92內，而露出於該導電膠92之外的所述奈米碳管91的密度低。因此，所述奈米碳管91無法有效地作為電子發射端，不僅材料的使用效率低而浪費材料，同時還會降低電流-電壓特性(Current-Voltage Characteristic)，使得一般陰極板在使用上，往往需要較高的起始電壓才會開始產生電流，故場發射效果不佳。 However, the aforementioned manufacturing method is not easy to obtain a stable electron emission source in practical use. This is because the carbon nanotubes 91 are uniformly mixed. In the practice of the conductive paste 92, a majority of the carbon nanotubes 91 are coated in the conductive paste 92, and the density of the carbon nanotubes 91 exposed outside the conductive paste 92 is increased. low. Therefore, the carbon nanotubes 91 cannot be effectively used as an electron-emitting end, and not only the material is inefficiently used, but also the material is wasted, and the current-voltage characteristic is also lowered, so that the general cathode plate is used. It is often necessary to have a higher starting voltage to start generating current, so the field emission effect is not good.
因此，本發明之目的，即在提供一種材料使用效率高且場發射效果優異的電子發射源的製造方法及其陰極板的製造方法。 Accordingly, an object of the present invention is to provide a method for producing an electron-emitting source having high material use efficiency and excellent field emission effect, and a method for producing the cathode plate.
於是，本發明電子發射源的製造方法，該電子發射源包括相間隔的一陰極板與一陽極板，而該製造方法包含：(A)將一導電膠層設置於一第一板材上；(B)以噴砂法將奈米碳管噴灑而固定於該導電膠層上；(C)對該第一板材進行熱處理，而可得到該電子發射源的陰極板；及(D)在一第二板材上披覆一螢光粉層，而可得到該電子發射源的陽極板。 Therefore, the electron emission source of the present invention comprises a cathode plate and an anode plate, and the manufacturing method comprises: (A) disposing a conductive adhesive layer on a first plate; B) spraying a carbon nanotube by sand blasting to be fixed on the conductive adhesive layer; (C) heat treating the first plate to obtain a cathode plate of the electron emission source; and (D) in a second A phosphor layer is coated on the sheet to obtain an anode plate of the electron emission source.
本發明之功效在於：透過噴砂法將奈米碳管噴灑而固定於該導電膠層上的創新製法，使所述奈米碳管能露出於該導電膠層之外，因而可有效地利用所述奈米碳管之尖端表面，以集中電場而作為電子發射端，不僅大幅提升材料的使用效率，也確實提升該陰極板的電流-電壓特性，並具有優異的場發射效果。 The invention has the following effects: an innovative manufacturing method for spraying a carbon nanotube by a sand blasting method and fixing the same on the conductive adhesive layer, so that the carbon nanotube can be exposed outside the conductive adhesive layer, thereby effectively utilizing the The tip surface of the carbon nanotubes, with the concentrated electric field as the electron-emitting end, not only greatly improves the use efficiency of the material, but also enhances the current-voltage characteristics of the cathode plate and has an excellent field emission effect.
1‧‧‧電子發射源 1‧‧‧Electronic emission source
2‧‧‧陰極板 2‧‧‧ cathode plate
21‧‧‧第一板材 21‧‧‧ first plate
211‧‧‧第一面 211‧‧‧ first side
22‧‧‧導電膠層 22‧‧‧ Conductive adhesive layer
23‧‧‧奈米碳管 23‧‧‧Nano Carbon Tube
3‧‧‧陽極板 3‧‧‧Anode plate
31‧‧‧第二板材 31‧‧‧Second plate
311‧‧‧第二面 311‧‧‧ second side
32‧‧‧螢光粉層 32‧‧‧Fluorescent powder layer
S01~S04‧‧‧步驟 S01~S04‧‧‧Steps
本發明之其他的特徵及功效，將於參照圖式的實施方式中清楚地呈現，其中：圖1是一般陰極板的製造方法之一步驟流程示意圖；圖2是一電子發射源的側視示意圖，該電子發射源係使用本發明電子發射源的製造方法之一較佳實施例所製成的；圖3是該較佳實施例之一步驟流程方塊圖；圖4是該較佳實施例之一步驟流程示意圖；圖5是一電流-電壓特性曲線圖，說明該較佳實施例與一般製造方法所製成的電子發射源在電流-電壓特性上的差異；及圖6是一輝度-電壓特性曲線圖，說明應用該較佳實施例所製成的電子發射源的場發射顯示器(FED)，在其陰極板之導電膠層上設置奈米碳管的數量不同所造成輝度-電壓特性的差異。 Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: FIG. 1 is a schematic flow diagram of one step of a method for manufacturing a general cathode plate; FIG. 2 is a side view of an electron emission source. The electron emission source is produced by using a preferred embodiment of the method for fabricating the electron emission source of the present invention; FIG. 3 is a block diagram of a step of the preferred embodiment; FIG. 4 is a block diagram of the preferred embodiment. 1 is a schematic flow chart; FIG. 5 is a current-voltage characteristic diagram illustrating the difference in current-voltage characteristics of the electron-emitting source produced by the preferred embodiment and the general manufacturing method; and FIG. 6 is a luminance-voltage A characteristic diagram illustrating a field emission display (FED) to which an electron emission source fabricated by using the preferred embodiment is applied, and a luminance-voltage characteristic caused by a difference in the number of carbon nanotubes disposed on a conductive adhesive layer of a cathode plate thereof difference.
參閱圖2、3、4，本發明電子發射源的製造方法之一較佳實施例，用於製造一電子發射源1。該電子發射源1包括相間隔的一個陰極板2與一個陽極板3。該陰極板2包括一個具有一朝向該陽極板3的第一面211的第一板材21、一個設置於該第一板材21之第一面211上的導電膠層22，以及數個插設固定於該導電膠層22上的奈米碳管23。該陽極板3包括一個具有一朝向該陰極板2的第 二面311的第二板材31，以及一個設置於該第二板材31之第二面311上的螢光粉層32。 Referring to Figures 2, 3 and 4, a preferred embodiment of the method of fabricating an electron-emitting source of the present invention is used to fabricate an electron-emitting source 1. The electron emission source 1 includes a cathode plate 2 and an anode plate 3 which are spaced apart from each other. The cathode plate 2 includes a first plate 21 having a first surface 211 facing the anode plate 3, a conductive adhesive layer 22 disposed on the first surface 211 of the first plate 21, and a plurality of inserts and fixings. The carbon nanotube 23 on the conductive adhesive layer 22. The anode plate 3 includes a first portion facing the cathode plate 2 The second plate 31 of the two sides 311 and a phosphor layer 32 disposed on the second surface 311 of the second plate 31.
而本發明電子發射源的製造方法，包含以下步驟： The method for manufacturing the electron emission source of the present invention comprises the following steps:
步驟S01，將該導電膠層22設置於該第一板材21的第一面211上。具體而言，先使用一溶劑(圖未示)與一導電膠(圖未示)均勻混合後，再使用網印(Screen Printing)方式將所述導電膠塗布於該第一面211上，待所述導電膠乾燥固化後，便可得到本實施例所述的導電膠層22。當然，除了網印方式之外，還可使用噴印(Inkjet Printing)、轉印(Transfer Printing)、沾印(Dip Printing)等方式塗布所述導電膠，但不限於前述之舉例。 In step S01, the conductive adhesive layer 22 is disposed on the first surface 211 of the first plate member 21. Specifically, a solvent (not shown) is uniformly mixed with a conductive paste (not shown), and then the conductive paste is applied to the first surface 211 by using a screen printing method. After the conductive adhesive is dried and cured, the conductive adhesive layer 22 described in this embodiment can be obtained. Of course, in addition to the screen printing method, the conductive paste may be applied by means of Inkjet Printing, Transfer Printing, Dip Printing, or the like, but is not limited to the foregoing examples.
在實施上，該第一板材21可為玻璃、金屬板、塑膠板或陶瓷板等，所述導電膠的材料可為銀膠，而所述溶劑的材料可為鄰苯二甲酸二丁酯(Dibutyl Phthalate，簡稱DBP)，當然實施時所選用的材料乃依需求而定，同樣也不限於前述之舉例。 In practice, the first plate 21 may be glass, metal plate, plastic plate or ceramic plate, etc., the material of the conductive glue may be silver glue, and the material of the solvent may be dibutyl phthalate ( Dibutyl Phthalate (DBP for short), of course, the materials selected for implementation are on demand, and are not limited to the above examples.
步驟S02，以噴砂法將所述奈米碳管23噴灑而固定於該導電膠層22上。具體而言，使用一噴砂機(圖未示)透過高壓空氣吹送所述奈米碳管23，並經由該噴砂機之一噴砂口(圖未示)噴灑所述奈米碳管23，進而使所述奈米碳管23插置固定於該導電膠層22上。需要說明的是，於圖式中，所述奈米碳管23是筆直地插置固定於該導電膠 層22，但實際上所述奈米碳管23不以筆直狀為必要，即所述奈米碳管23也可為彎曲狀，此時所述彎曲狀的奈米碳管23是一端***於該導電膠層22內，而突出於該導電膠層22之外的另一端也可能為彎曲狀。因此，只要固定於該導電膠層22上的所述奈米碳管23，其大部分的部位都露出於該導電膠層22之外，就能達成本發明改良之目的，而所述奈米碳管23的形貌並不限於圖式中所揭露的形式。 In step S02, the carbon nanotubes 23 are sprayed by sandblasting and fixed on the conductive adhesive layer 22. Specifically, the carbon nanotube 23 is blown through a high-pressure air using a sand blasting machine (not shown), and the carbon nanotube 23 is sprayed through a blasting port (not shown) of the blasting machine, thereby The carbon nanotubes 23 are inserted and fixed on the conductive adhesive layer 22. It should be noted that, in the drawing, the carbon nanotube 23 is directly inserted and fixed to the conductive adhesive. Layer 22, but in fact the carbon nanotubes 23 are not necessarily in a straight shape, that is, the carbon nanotubes 23 may also be curved, in which case the curved carbon nanotubes 23 are inserted at one end. The other end of the conductive adhesive layer 22, which protrudes beyond the conductive adhesive layer 22, may also be curved. Therefore, as long as most of the carbon nanotubes 23 fixed on the conductive adhesive layer 22 are exposed outside the conductive adhesive layer 22, the purpose of the improvement of the present invention can be achieved. The morphology of the carbon tube 23 is not limited to the form disclosed in the drawings.
在實施上，所述奈米碳管23的長度為5~20μm，直徑為5~20nm，並且該噴砂口的空氣壓力在1~5kg/cm2。當空氣壓力小於1 kg/cm2時，所述奈米碳管23無法穩固地固定於該導電膠層22上而容易脫落。當空氣壓力大於5 kg/cm2時，經由該噴砂口而噴出的所述奈米碳管23的數量過多，如此一來，會因為所述奈米碳管23密度過高而在噴灑的過程相互碰撞，進而損失動能而無法有效***於該導電膠層22內，相對地便會使所述奈米碳管23露出於該導電膠層22的部位過少而影響電流-電壓特性。 In practice, the carbon nanotubes 23 have a length of 5 to 20 μm, a diameter of 5 to 20 nm, and an air pressure of the blasting port of 1 to 5 kg/cm 2 . When the air pressure is less than 1 kg/cm 2 , the carbon nanotubes 23 cannot be firmly fixed to the conductive adhesive layer 22 and are easily peeled off. When the air pressure is greater than 5 kg/cm 2 , the number of the carbon nanotubes 23 ejected through the blasting port is excessive, and thus, the spraying process may be caused because the density of the carbon nanotubes 23 is too high. Collision with each other and loss of kinetic energy cannot be effectively inserted into the conductive paste layer 22, and the portion where the carbon nanotubes 23 are exposed to the conductive paste layer 22 is relatively small, thereby affecting current-voltage characteristics.
進一步說明的是，在使用上，可以在該第一板材21的後方或下方設置一個漏斗狀的座體，藉此收集吹送所述奈米碳管23過程中，掉落於該第一板材21之外的奈米碳管23，並回收再利用以減少材料的浪費而節省成本。 Further, in use, a funnel-shaped seat body may be disposed behind or below the first plate member 21, thereby collecting and blowing the carbon nanotubes 23, and dropping on the first plate member 21. The carbon nanotubes 23 are recycled and reused to reduce material waste and save costs.
步驟S03，對該第一板材21進行熱處理，而可得到該電子發射源1的陰極板2。具體而言，本實施例以燒結方式，並在壓力為1x10-2 Torr的真空環境下，先以10℃/min的加熱速率由室溫加熱至150℃後維持10分鐘， 接著再以10℃/min的加熱速率由150℃加熱至400℃後維持10分鐘，最後自然降溫至室溫。 In step S03, the first plate member 21 is subjected to heat treatment to obtain the cathode plate 2 of the electron emission source 1. Specifically, the present embodiment is heated in a vacuum atmosphere at a pressure of 1×10 −2 Torr at a heating rate of 10° C./min from room temperature to 150° C. for 10 minutes, followed by 10° C. The heating rate of /min was maintained from 150 ° C to 400 ° C for 10 minutes and finally cooled to room temperature.
步驟S04，在該第二板材31上披覆該螢光粉層32，而可得到該電子發射源1的陽極板3。具體而言，可使用塗敷、網印、噴印等方式將螢光粉披覆於該第二板材31上，即可得到該螢光粉層32。在實施上，該第二板材31為玻璃，所述螢光粉的材料可依需求選擇單色或多色螢光材料等。 In step S04, the phosphor layer 32 is coated on the second plate 31 to obtain the anode plate 3 of the electron emission source 1. Specifically, the phosphor powder layer 32 can be obtained by coating the phosphor powder on the second plate material 31 by coating, screen printing, printing or the like. In practice, the second plate member 31 is glass, and the material of the phosphor powder may be selected from a single color or a multi-color fluorescent material or the like according to requirements.
需要說明的是，該陰極板2與該陽極板3的製造順序可以對調，即在實施上可以先進行步驟S04後再進行步驟S01~S03，或者同時製造該陰極板2與該陽極板3，因而不限於本實施例所揭露的順序。 It should be noted that the manufacturing sequence of the cathode plate 2 and the anode plate 3 can be reversed, that is, the step S04 can be performed before the steps S01 to S03, or the cathode plate 2 and the anode plate 3 can be simultaneously manufactured. Therefore, it is not limited to the order disclosed in the embodiment.
以下透過實驗結果說明本發明的功效。實驗例1~3是依據本發明製作步驟所製成的電子發射源1，其中，實驗例1的陰極板2之導電膠層22其100%的表面積設置有所述奈米碳管23，實驗例2的導電膠層22其35.78%的表面積設置有所述奈米碳管23，實驗例3的導電膠層22其19.64%的表面積設置有所述奈米碳管23。而比較例則是使用一般陰極板的製造方法，將奈米碳管混入導電膠中，再將導電膠塗布於一板材上並經燒結而製成。比較例的奈米碳管大部分被包覆於導電膠內，且露出於導電膠之外的奈米碳管的數量較少。 The effects of the present invention are illustrated below by experimental results. Experimental Examples 1 to 3 are electron-emitting sources 1 produced according to the fabrication steps of the present invention, wherein the conductive adhesive layer 22 of the cathode plate 2 of Experimental Example 1 is provided with the carbon nanotubes 23 at a surface area of 100%. The conductive adhesive layer 22 of Example 2 was provided with the carbon nanotube 23 of 35.78% of its surface area, and the conductive adhesive layer 22 of Experimental Example 3 was provided with the carbon nanotube 23 of 19.64% of its surface area. In the comparative example, a general cathode plate manufacturing method is used, in which a carbon nanotube is mixed into a conductive paste, and then the conductive paste is coated on a plate and sintered. Most of the carbon nanotubes of the comparative example were coated in the conductive paste, and the number of carbon nanotubes exposed outside the conductive paste was small.
參閱圖2、5，圖5為實驗例1~3與比較例的電流-電壓特性曲線圖。由圖5可知，實驗例1~3的起始 電壓分別約為600、650、700伏特(V)，而比較例即使在電壓大於750伏特的情況下，其所產生的電流量極低，並且遠低於實驗例1~3。 2 and 5, FIG. 5 is a graph showing current-voltage characteristics of Experimental Examples 1 to 3 and Comparative Examples. As can be seen from Fig. 5, the start of the experimental examples 1 to 3 The voltages were approximately 600, 650, and 700 volts (V), respectively, and the comparative example produced an extremely low amount of current even at voltages greater than 750 volts, and was much lower than Experimental Examples 1-3.
進一步比較實驗例1~3可知，實驗例1的導電膠層22的表面上設置有奈米碳管23的數量最高，其起始電壓最低。而在相同工作電壓下，例如700伏特，實驗例1所產生的電流也最高，其電流-電壓特性也最優異。 Further, in Comparative Examples 1 to 3, the number of the carbon nanotubes 23 provided on the surface of the conductive adhesive layer 22 of Experimental Example 1 was the highest, and the initial voltage was the lowest. At the same operating voltage, for example, 700 volts, the experimental example 1 produced the highest current and the most excellent current-voltage characteristics.
參閱圖2、6，圖6為應用實驗例1~3所製成的場發射顯示器(FED)的輝度-電壓特性曲線圖。由圖6可知，實驗例1~3都可達到一定的輝度，其中又以實驗例1為最佳。這是因為實驗例1的陰極板2的導電膠層22的表面上設置奈米碳管23的數量多，故實驗例1的陰極板2所產生的電流也多，進而能以較多的電子去轟擊實驗例1的陽極板3之螢光粉層32，因此實驗例1的陽極板3的發光亮度最高。另一方面，要達到相同的發光亮度時，實驗例1的所需要的操作電壓最低。然而，比較例在所提供的電壓值內皆無法有效地量測出輝度值，請再參閱圖5，這是因為比較例的陰極板所產生的電流過低，因而無法有足夠的電子去轟擊陽極板的螢光粉層，故在此無法量測出比較例的輝度值。 Referring to Figures 2 and 6, Figure 6 is a graph showing the luminance-voltage characteristics of a field emission display (FED) fabricated using Experimental Examples 1 to 3. It can be seen from Fig. 6 that the experimental examples 1 to 3 can achieve a certain luminance, and the experimental example 1 is the best. This is because the number of the carbon nanotubes 23 provided on the surface of the conductive paste layer 22 of the cathode plate 2 of Experimental Example 1 is large, so that the cathode plate 2 of Experimental Example 1 generates a large amount of electric current, and thus more electrons can be used. The phosphor powder layer 32 of the anode plate 3 of Experimental Example 1 was bombarded, so that the anode plate 3 of Experimental Example 1 had the highest luminance. On the other hand, in order to achieve the same luminance, the required operating voltage of Experimental Example 1 was the lowest. However, the comparative example cannot effectively measure the luminance value within the supplied voltage value. Please refer to FIG. 5 again, because the current generated by the cathode plate of the comparative example is too low, so that there is not enough electron to bombard. Since the phosphor layer of the anode plate was used, the luminance value of the comparative example could not be measured here.
參閱圖2、3、4，由以上說明可知，相較於一般陰電極的奈米碳管大部分都被包覆於導電膠層內，導致的材料使用效率差與場發射效果不佳等問題，本發明以噴砂法將奈米碳管23噴灑而固定於該導電膠層22上，前述 創新的製法可使所述奈米碳管23的局部部位插置固定於該導電膠層22上，而所述奈米碳管23的大部分的部位都露出於該導電膠層22之外，且所述奈米碳管23是筆直地插置，因而可有效地利用所述奈米碳管23之尖端表面以集中局部的電場而作為電子發射端，不僅大幅提升材料的使用效率，其起始電壓較低也確實提升該陰極板2的電流-電壓特性，並具有優異的場發射效果。 Referring to Figures 2, 3 and 4, it can be seen from the above description that most of the carbon nanotubes compared with the conventional cathode electrode are coated in the conductive adhesive layer, resulting in poor material use efficiency and poor field emission effect. The present invention sprays the carbon nanotube 23 on the conductive adhesive layer 22 by sandblasting, the foregoing In an innovative method, a portion of the carbon nanotube 23 is inserted and fixed on the conductive adhesive layer 22, and a majority of the portion of the carbon nanotube 23 is exposed outside the conductive adhesive layer 22. And the carbon nanotubes 23 are inserted straight, so that the tip surface of the carbon nanotubes 23 can be effectively utilized to concentrate the local electric field as the electron emission end, which not only greatly improves the use efficiency of the material, but also The lower initial voltage also improves the current-voltage characteristics of the cathode plate 2 and has an excellent field emission effect.
惟以上所述者，僅為本發明之較佳實施例而已，當不能以此限定本發明實施之範圍，即大凡依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾，皆仍屬本發明專利涵蓋之範圍內。 The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications made by the patent application scope and patent specification content of the present invention, All remain within the scope of the invention patent.
1‧‧‧電子發射源 1‧‧‧Electronic emission source
2‧‧‧陰極板 2‧‧‧ cathode plate
21‧‧‧第一板材 21‧‧‧ first plate
211‧‧‧第一面 211‧‧‧ first side
22‧‧‧導電膠層 22‧‧‧ Conductive adhesive layer
23‧‧‧奈米碳管 23‧‧‧Nano Carbon Tube
3‧‧‧陽極板 3‧‧‧Anode plate
31‧‧‧第二板材 31‧‧‧Second plate
311‧‧‧第二面 311‧‧‧ second side
32‧‧‧螢光粉層 32‧‧‧Fluorescent powder layer
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