TW201418741A - Triaxial magnetic field sensor with fluxguide - Google Patents
Triaxial magnetic field sensor with fluxguide Download PDFInfo
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- TW201418741A TW201418741A TW101140722A TW101140722A TW201418741A TW 201418741 A TW201418741 A TW 201418741A TW 101140722 A TW101140722 A TW 101140722A TW 101140722 A TW101140722 A TW 101140722A TW 201418741 A TW201418741 A TW 201418741A
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Abstract
Description
本發明係關於一種測量磁場之儀器，尤指一種具有磁通導引器之三軸磁場感測裝置。
The present invention relates to an apparatus for measuring a magnetic field, and more particularly to a three-axis magnetic field sensing apparatus having a flux guide.
按，一般我們常利用指南針來對一觀察點測量其磁場方向(如地磁的南北向)，但是此種手段無法測量出磁場強度。因此有人設計出一種磁場感測裝置，不僅可以測量出觀察點的磁場方向，也可以測量出該觀察點在各個軸向的磁場分量。
請參閱美國專利US6304082，該專利所揭露的三軸磁場感測裝置，係將三個單軸磁場感測裝置，分別設於三個不同位置，而可分別測量出X軸、Y軸、Z軸的磁場分量，最後可以得到一觀察點的磁場方向及各軸向的磁場分量。但，此種三軸磁場感測裝置的設計，對於各個軸向所測得的場點，其位置均不相同，進而造成該三軸磁場感測裝置所測得的結果，並非實際觀察點在各軸向的磁場分量。再者，此種感測裝置的三個單軸磁場感測裝置之校準，需要三個互相正交的基準平面，組裝的成本偏高。
接著，請再參閱美國專利US7358722，該專利所揭露的三軸磁場感測裝置，係基於單一基準平面的矽晶片，運用微機電加工技術以非等向蝕刻技術定義斜面，將二個單軸磁場感測裝置放置於斜面上，消除其X軸或Y軸磁場分量來得到Z軸分量，另在基準平面上放置X軸與Y軸磁場感測裝置，構成三個軸向的磁場分量測定。但此種三軸磁場感測裝置，不僅在正交角度的控制上具有難度之外，各磁場感測裝置對各軸向所測得的場點，其位置均不相同，造成此種三軸磁場感測裝置所測量的結果，也並非實際觀察點於各軸向的磁場分量。
Press, generally we use the compass to measure the direction of the magnetic field (such as the north-south direction of geomagnetism) for an observation point, but this method can not measure the strength of the magnetic field. Therefore, a magnetic field sensing device has been designed, which can not only measure the magnetic field direction of the observation point, but also measure the magnetic field component of the observation point in each axial direction.
Please refer to US Pat. No. 6,304,082, which discloses a three-axis magnetic field sensing device in which three single-axis magnetic field sensing devices are respectively disposed at three different positions, and the X-axis, the Y-axis, and the Z-axis are respectively measured. The magnetic field component can finally obtain the magnetic field direction of an observation point and the magnetic field component of each axial direction. However, the design of the three-axis magnetic field sensing device has different positions for the measured points of the respective axial directions, and thus the result measured by the three-axis magnetic field sensing device is not the actual observation point. The magnetic field component of each axial direction. Moreover, the calibration of the three single-axis magnetic field sensing devices of such a sensing device requires three mutually orthogonal reference planes, and the assembly cost is high.
Next, please refer to US Pat. No. 7,537,722, the three-axis magnetic field sensing device disclosed in the patent is based on a single reference plane germanium wafer, using microelectromechanical processing technology to define the slope by non-isotropic etching technique, and two uniaxial magnetic fields. The sensing device is placed on the inclined surface, the X-axis or Y-axis magnetic field component is eliminated to obtain the Z-axis component, and the X-axis and Y-axis magnetic field sensing devices are placed on the reference plane to form three axial magnetic field components. However, the three-axis magnetic field sensing device not only has difficulty in the control of the orthogonal angle, but the position of the field points measured by the magnetic field sensing devices for each axial direction is different, resulting in such a three-axis. The result measured by the magnetic field sensing device is also not the actual magnetic field component of each axial point.
為了讓三軸磁場感測裝置所測量的結果，為觀察點在各軸向的磁場分量，以解決先前技術所述不足之處。爰此，本發明者認為磁場感測裝置對各個軸向的測量結果，最少要有二個軸向的場點係在同一位置，且應使用同一基準平面作三軸正交組裝，才有辦法提升整體的磁場測量結果，所以提出一種具有磁通導引器之三軸磁場感測裝置，該磁場感測裝置包括：
一電路板。
一磁通導引器(fluxguide)：
該磁通導引器為一柱體，該磁通導引器相反二外側方分別設一第一及第二磁場感測器，且該第一及第二磁場感測器與該磁通導引器之距離相等，一第一假想平面分別通過該第一及第二磁場感測器之感測軸及該磁通導引器之軸心；該磁通導引器相反二外側方分別設一第三及第四磁場感測器，且該第三及第四磁場感測器與該磁通導引器之距離相等，一第二假想平面分別通過該第三及第四磁場感測器之感測軸及該磁通導引器之軸心，且該第一假想平面垂直該第二假想平面；一第三及第四假想平面分別通過該磁通導引器之二端，且平行該電路板，任取二磁場感測器均位於該第三或第四假想平面，其餘二磁場感測器均位於該第三或第四假想平面。
一控制單元組：
該控制單元組分別電性連接該第一至第四磁場感測器，該控制單元組可供分別控制該第一至第四磁場感測器之感測方向。
其中，藉由該第一假想平面垂直該第二假想平面，而可定出一X軸及一Y軸分別通過該磁通導引器，且相交於該磁通導引器，且一Z軸通過該磁通導引器之軸心。
利用本發明之磁場感測裝置，可藉由該控制單元組來決定測量X軸及Y軸的磁場強度，或是Z軸之磁場強度，例如欲測量Z軸的磁場強度時，該控制單元組控制該第一及第二磁場感測器之感測方向相反，且該第三及第四磁場感測器之感測方向相反，所以測量時，各磁場感測器在Z軸上所測量的磁場分量會相加，而在X軸及Y軸上的磁場分量會互相抵銷，而剩下Z軸的磁場分量。
同理，欲測量X軸及Y軸的磁場時，該控制單元組會控制該第一及第二磁場感測器的感測方向相同，且該第三及第四磁場感測器的感測方向相同，此時各磁場感測器在X軸及Y軸所測量的結果會相加，Z軸的磁場分量會相互抵銷，而剩下X軸及Y軸的磁場分量。
並且，藉由該第一至第四磁場感測器的位置配置，會使得該磁場感測裝置在X軸及Y軸所測得的場點，會位在同一場點，也因此，使得該磁場感測裝置所測量的結果，會比較貼近實際觀察點的磁場方向及在各個軸向的磁場分量，以解決先前技術所述不足之處。
In order to make the result measured by the three-axis magnetic field sensing device, it is to observe the magnetic field component of each point in each axial direction to solve the deficiencies described in the prior art. Therefore, the inventors believe that the magnetic field sensing device should have at least two axial field points at the same position for each axial measurement, and the same reference plane should be used for three-axis orthogonal assembly. To improve the overall magnetic field measurement result, a three-axis magnetic field sensing device with a magnetic flux guide is proposed, and the magnetic field sensing device includes:
A circuit board.
A flux guide:
The magnetic flux guide is a cylinder, and the first and second magnetic field sensors are respectively disposed on opposite outer sides of the magnetic flux guide, and the first and second magnetic field sensors and the magnetic flux guide The first imaginary plane passes through the sensing axis of the first and second magnetic field sensors and the axis of the magnetic flux guide respectively; the magnetic flux guides are respectively disposed on opposite outer sides of the magnetic flux guides a third and fourth magnetic field sensor, wherein the third and fourth magnetic field sensors are equidistant from the magnetic flux guide, and a second imaginary plane passes through the third and fourth magnetic field sensors respectively a sensing axis and an axis of the flux guide, and the first imaginary plane is perpendicular to the second imaginary plane; a third and fourth imaginary plane respectively pass through the two ends of the flux guide and are parallel The circuit board, any two magnetic field sensors are located in the third or fourth imaginary plane, and the remaining two magnetic field sensors are located in the third or fourth imaginary plane.
A control unit group:
The control unit group is electrically connected to the first to fourth magnetic field sensors respectively, and the control unit group is configured to respectively control the sensing directions of the first to fourth magnetic field sensors.
Wherein, the first imaginary plane is perpendicular to the second imaginary plane, and an X-axis and a Y-axis are respectively passed through the flux guide, and intersect with the flux guide, and a Z-axis Through the axis of the flux guide.
With the magnetic field sensing device of the present invention, the magnetic field strength of the X-axis and the Y-axis or the magnetic field strength of the Z-axis can be determined by the control unit group, for example, when the magnetic field strength of the Z-axis is to be measured, the control unit group Controlling the sensing directions of the first and second magnetic field sensors to be opposite, and the sensing directions of the third and fourth magnetic field sensors are opposite, so when measuring, the magnetic field sensors are measured on the Z axis. The magnetic field components are added, and the magnetic field components on the X and Y axes cancel each other out, leaving the magnetic field component of the Z axis.
Similarly, when measuring the magnetic fields of the X-axis and the Y-axis, the control unit group controls the sensing directions of the first and second magnetic field sensors to be the same, and the sensing of the third and fourth magnetic field sensors The directions are the same. At this time, the results measured by the magnetic field sensors on the X-axis and the Y-axis are added together, and the magnetic field components of the Z-axis are offset each other, leaving the magnetic field components of the X-axis and the Y-axis.
Moreover, by the positional arrangement of the first to fourth magnetic field sensors, the field points measured by the magnetic field sensing device on the X-axis and the Y-axis are at the same field, and thus The results measured by the magnetic field sensing device compare the magnetic field direction close to the actual observation point with the magnetic field component in each axial direction to solve the deficiencies described in the prior art.
以下藉由圖式之輔助，說明本發明之構造、特點與實施例，俾使貴審查人員對於本發明有更進一步之瞭解。
請參閱第五圖所示，本發明係關於一種具有磁通導引器之三軸磁場感測裝置，該磁場感測裝置(A)包括：
一電路板(1)：
請參閱第五圖所示，該電路板(1)係提供固定各磁場感測器(3~6)與磁通導引器(2)，且該電路板(1)的形狀不拘，較佳為以X軸及Y軸為對稱軸之板體(X軸及Y軸之定義見後述)，而第五圖係呈現該電路板(1)之形狀較佳為十字形，可縮小該磁場感測裝置(A)整體體積。且，該電路板(1)之材質較佳係為玻璃布(fiberglass)基板，該玻璃布基板可為：玻璃布環氧樹脂(glass-reinforced epoxy)、或玻璃布聚四氟乙烯(glass-reinforced PTFE)，而可減少該磁場感測裝置(A)之厚度、重量、並維持足夠剛性。該電路板(1)之厚度應足夠維持剛性，以利定義各磁場感測器(3~6)與該磁通導引器(2)組裝所需的基準平面，進而使該磁場感測裝置(A)具有三軸正交感測的性能。
一磁通導引器(fluxguide)(2)：
請參閱第一圖至第五圖所示，該磁通導引器(2)設於該電路板(1)一側，該磁通導引器(2)之形狀為柱體，較佳為以X軸、Y軸、Z軸為對稱軸之方柱體、稜柱體或圓柱體(X軸、Y軸、Z軸之定義見後述)。該磁通導引器(2)之高度應大於寬度，以提昇Z軸磁通之導引效果。該磁通導引器(2)之材質為具有高磁透率及低磁滯的軟磁材料，例如鎳鋅鐵氧軟磁材料(Ni-Zn ferrite)。該磁通導引器(2)可供將外加磁場的Z軸磁場分量偏向為X軸或Y軸分量。
請再配合參閱第七圖所示，該磁通導引器(2)相反二外側方分別設一第一及第二磁場感測器(3、4)，且該第一及第二磁場感測器(3、4)與該磁通導引器(2)之距離相等，一第一假想平面(X)分別通過該第一及第二磁場感測器(3、4)之感測軸及該磁通導引器之軸心(Z)；該磁通導引器(2)相反二外側方分別設一第三及第四磁場感測器(5、6)，且該第三及第四磁場感測器(5、6)與該磁通導引器(2)之距離相等，一第二假想平面(Y)分別通過該第三及第四磁場感測器(5、6)之感測軸及該磁通導引器之軸心(Z)，且該第一假想平面(X)垂直該第二假想平面(Y)；一第三及第四假想平面(m、n)分別通過該磁通導引器(2)之二端部，且分別平行該電路板(1)，任取二磁場感測器位於該第三或第四假想平面(m、n)，其餘二磁場感測器位於該第三或第四假想平面(m、n)。其中，該第一至第四假想平面(X、Y、m、n)係用於表示各磁場感測器(3~6)於該磁通導引器(2)外側方之配置位置。
藉由該第一假想平面(X)垂直該第二假想平面(Y)，而可定出一X軸及一Y軸分別通過該磁通導引器(2)，且相交於該磁通導引器(2)，並可定出一Z軸通過該磁通導引器之軸心(Z)，且分別垂直該X軸及該Y軸。其中，由於第五圖係本發明之俯視圖，故該第一及第二假想平面(X、Y)為一虛線。
由上述可知，本發明所指之各磁場感測器(3~6)，不限均設於該磁通導引器(2)之上端或下端，亦可為該第一及第二磁場感測器(3、4)位於該磁通導引器(2)之上端，且該第三及第四磁場感測器(5、6)位於該磁通導引器(2)之下端，或者該第一及第三磁場感測器(3、5)位於該磁通導引器(2)之上端，且該第二及第四磁場感測器(4、6)位於該磁通導引器(2)之下端等，均落入本發明欲保障之範圍。
並且，為配合該電路板(1)之形狀為十字形，該磁通導引器(2)較佳係設於該電路板(1)中央，而各磁場感測器(3~6)較佳係設於該電路板(1)各端部之上方，藉以縮小該磁場感測裝置(A)整體體積。
一控制單元組(7)：
請參閱第六圖所示，該控制單元組(7)分別電性連接該第一至第四磁場感測器(3~6)，該控制單元組(7)可供分別控制該第一至第四磁場感測器(3~6)之感測方向。
首先，請參閱第二圖配合第五圖及第六圖所示，欲使用該磁場感測裝置(A)量測觀察點分別在該X軸及該Y軸上的磁場分量時，先利用該控制單元組(7)分別控制該第一至第四磁場感測器(3~6)，使該第一及第二磁場感測器(3、4)的感測方向相同，且該第三及第四磁場感測器(5、6)的感測方向相同。
由圖式中可知，該磁場感測裝置(A)在該Z軸上所感測得的磁場分量會被相互抵銷，而在該X軸上所感測的磁場分量會相互加成，所以具有較佳的感測響應，其感測響應為個別磁場感測器(3、4)所測得的2倍；同理，該磁場感測裝置(A)也會在該Y軸上具有較佳的感測響應。
請參閱第一圖配合第五圖及第六圖所示，欲使用該磁場感測裝置(A)量測該觀察點在該Z軸的磁場分量時，先利用該控制單元組(7)分別控制該第一至第四磁場感測器(3~6)，使該第一及第二磁場感測器(3、4)的感測方向相反，且該第三及該第四磁場感測器(5、6)的感測方向相反。
由圖式中可知，該磁場感測裝置(A)在該X軸及該Y軸所測得的磁場分量會被相互抵銷，而只剩下該Z軸上的磁場分量，所以該磁場感測裝置(A)在該Z軸上的感測響應會是個別磁場感測器(3~6)的4倍。
縱上所述，本發明之該磁場感測裝置(A)不僅具有較佳的感測響應外，並由於各磁場感測器(3~6)以該磁通導引器(2)為中心進行配置，所以在該X軸及該Y軸所測得的場點(P1)，其位置係相同，且該磁通導引器(2)會通過該場點(P1)，而在該Z軸所測得的場點(P2)也會被該磁通導引器(2)通過，也因此，該磁場感測裝置(A)所測量的結果，較貼近實際觀察點的位置，且具有較佳的感測響應。
以下係說明該控制單元組切換各磁場感測器(3~6)之感測方向的方法：
1.請參閱第六圖配合第一圖、第二圖、第五圖所示，該控制單元組(7)包括四電子開關分別電性連接該第一至第四磁場感測器(3~6)之電壓輸出端，以供切換各磁場感測器(3~6)之輸出極性，藉以達成切換感測方向之目的。
2.請參閱第六圖配合第一圖、第二圖、第五圖所示，以控制單元組(7)切換各磁場感測器(3~6)的感測方向，另一可行的方法為，當各磁場感測器(3~6)係以交流磁場激發的相位決定其輸出的正負方向，則將各磁場感測器(3~6)的激發方向切換即可達成切換感測方向的目的。
3.請參閱第六圖配合第一圖、第二圖、第五圖所示，以控制單元組(7)切換各磁場感測器(3~6)的感測方向，另一可行的方法為，先將各磁場感測器(3~6)的輸出訊號以數字讀出，再將讀出之數字作相加或相減，即可達到切換感測方向的目的。
請參閱第三圖配合第四圖及第七圖所示，該磁場感測裝置(A)更進一步可以實施為：該第四假想平面(n)位於該第三假想平面(m)上方，該第一至第四磁場感測器(3~6)分別位於該第三假想平面(m)，各磁場感測器(3~6)上方且位於該第四假想平面(n)，分別更設另一相同單元之第一至第四磁場感測器(3A、4A)(圖式僅呈現另一相同單元之第一及第二磁場感測器)，且分別電性連接該控制單元組(7)。藉由上述之構造，讓該磁場感測裝置(A)在測量時，在該X軸、該Y軸、該Z軸所測量出的場點(P3)，均位在同一位置，此外，由於增加磁場感測器，使得該磁場感測裝置(A)在各個軸向的感測響應也因而提升。
此外，該磁場感測裝置(A)還可以實施為：該第一至第四磁場感測器(3~6)為一異向磁阻(AMR)，藉由該異向磁阻的特性，可以提高磁場解析度，在該磁場感測裝置(A)整體的特徵尺寸小於5mm時，具有較佳的感測結果；該第一至第四磁場感測器(3~6)亦可為一巨磁阻(GMR)，藉由該巨磁阻的特性，可以降低該磁場感測裝置(A)的消耗功率，此外在該磁場感測裝置(A)整體的特徵尺寸大於5mm時，具有較佳的感測結果；該第一至第四磁場感測器(3~6)亦可為通量閘(fluxgate)，藉由通量閘的特性，可以減少該磁場感測裝置(A)整體所需的訊號輸出入端點數，此外在該磁場感測裝置(A)整體的特徵尺寸大於5mm時，具有較佳的感測結果。
綜上所述，本發明確實符合產業利用性，且未於申請前見於刊物或公開使用，亦未為公眾所知悉，且具有非顯而易知性，符合可專利之要件，爰依法提出專利申請。
惟上述所陳，為本發明在產業上一較佳實施例，舉凡依本發明申請專利範圍所作之均等變化，皆屬本案訴求標的之範疇。
The construction, features and embodiments of the present invention are illustrated by the accompanying drawings, which will be further understood by the review.
Referring to FIG. 5, the present invention relates to a three-axis magnetic field sensing device having a flux guide, the magnetic field sensing device (A) comprising:
A circuit board (1):
Referring to FIG. 5, the circuit board (1) provides a fixed magnetic field sensor (3~6) and a magnetic flux guide (2), and the shape of the circuit board (1) is not limited, preferably. The plate body having the X axis and the Y axis as the axis of symmetry (the definition of the X axis and the Y axis is described later), and the fifth figure shows that the shape of the circuit board (1) is preferably a cross shape, which can reduce the magnetic field feeling. Measuring device (A) overall volume. Moreover, the material of the circuit board (1) is preferably a fiberglass substrate, which may be: glass-reinforced epoxy, or glass cloth PTFE (glass- Reinforced PTFE) reduces the thickness, weight, and rigidity of the magnetic field sensing device (A). The thickness of the circuit board (1) should be sufficient to maintain rigidity to define a reference plane required for assembling the magnetic field sensors (3~6) and the flux guide (2), thereby making the magnetic field sensing device (A) Performance with three-axis orthogonal sensing.
A flux guide (2):
Referring to the first to fifth figures, the flux guide (2) is disposed on one side of the circuit board (1), and the flux guide (2) is in the shape of a cylinder, preferably A square cylinder, a prism, or a cylinder with the X-axis, the Y-axis, and the Z-axis as the axis of symmetry (the definitions of the X-axis, the Y-axis, and the Z-axis are described later). The height of the flux guide (2) should be greater than the width to improve the guiding effect of the Z-axis flux. The flux guide (2) is made of a soft magnetic material having a high magnetic permeability and a low hysteresis, such as a nickel-zinc ferrite material. The flux guide (2) is adapted to bias the Z-axis magnetic field component of the applied magnetic field to an X-axis or a Y-axis component.
Please refer to the seventh figure, the first and second magnetic field sensors (3, 4) are respectively disposed on opposite outer sides of the magnetic flux guide (2), and the first and second magnetic fields are sensed. The distance between the detectors (3, 4) and the flux guide (2) is equal, and a first imaginary plane (X) passes through the sensing axes of the first and second magnetic field sensors (3, 4), respectively. And a shaft center (Z) of the flux guide; a third and fourth magnetic field sensors (5, 6) respectively disposed on opposite outer sides of the flux guide (2), and the third and The fourth magnetic field sensor (5, 6) is equidistant from the magnetic flux director (2), and a second imaginary plane (Y) passes through the third and fourth magnetic field sensors (5, 6), respectively. a sensing axis and an axis (Z) of the flux guide, and the first imaginary plane (X) is perpendicular to the second imaginary plane (Y); a third and fourth imaginary plane (m, n) Passing through the two ends of the flux guide (2) and respectively paralleling the circuit board (1), any two magnetic field sensors are located in the third or fourth imaginary plane (m, n), and the other two A magnetic field sensor is located in the third or fourth imaginary plane (m, n). The first to fourth imaginary planes (X, Y, m, n) are used to indicate the positions of the magnetic field sensors (3 to 6) on the outer side of the flux guide (2).
By the first imaginary plane (X) perpendicular to the second imaginary plane (Y), an X-axis and a Y-axis are respectively passed through the flux guide (2) and intersected with the flux guide The inducer (2) can define a Z-axis passing through the axis (Z) of the flux guide, and perpendicular to the X-axis and the Y-axis, respectively. Here, since the fifth drawing is a plan view of the present invention, the first and second imaginary planes (X, Y) are a broken line.
It can be seen from the above that the magnetic field sensors (3~6) referred to in the present invention are not limited to be disposed at the upper end or the lower end of the magnetic flux guide (2), and may also be the first and second magnetic field senses. a detector (3, 4) is located at an upper end of the flux guide (2), and the third and fourth magnetic field sensors (5, 6) are located at a lower end of the flux guide (2), or The first and third magnetic field sensors (3, 5) are located at the upper end of the magnetic flux guide (2), and the second and fourth magnetic field sensors (4, 6) are located at the magnetic flux guide The lower end of the device (2) and the like are all within the scope of the present invention.
Moreover, in order to match the shape of the circuit board (1) to a cross shape, the magnetic flux guide (2) is preferably disposed in the center of the circuit board (1), and each magnetic field sensor (3~6) is compared. Preferably, the system is disposed above each end of the circuit board (1) to reduce the overall volume of the magnetic field sensing device (A).
A control unit group (7):
Referring to the sixth figure, the control unit group (7) is electrically connected to the first to fourth magnetic field sensors (3~6), respectively, and the control unit group (7) is respectively capable of controlling the first to The sensing direction of the fourth magnetic field sensor (3~6).
First, referring to the second figure, in conjunction with the fifth and sixth figures, when the magnetic field sensing device (A) is used to measure the magnetic field components of the observation point on the X-axis and the Y-axis, the first use The control unit group (7) controls the first to fourth magnetic field sensors (3-6), respectively, so that the sensing directions of the first and second magnetic field sensors (3, 4) are the same, and the third And the sensing directions of the fourth magnetic field sensors (5, 6) are the same.
As can be seen from the figure, the magnetic field components sensed by the magnetic field sensing device (A) on the Z-axis are offset by each other, and the magnetic field components sensed on the X-axis are mutually additive, so Good sensing response, the sensing response is twice as measured by the individual magnetic field sensors (3, 4); for the same reason, the magnetic field sensing device (A) will also have better on the Y axis. Sensing response.
Referring to the first figure, in conjunction with the fifth and sixth figures, when the magnetic field sensing device (A) is used to measure the magnetic field component of the observation point in the Z-axis, the control unit group (7) is used first. Controlling the first to fourth magnetic field sensors (3-6) such that sensing directions of the first and second magnetic field sensors (3, 4) are opposite, and the third and fourth magnetic fields are sensed The sensing directions of the devices (5, 6) are opposite.
As can be seen from the figure, the magnetic field component measured by the magnetic field sensing device (A) on the X axis and the Y axis is offset by each other, and only the magnetic field component on the Z axis remains, so the magnetic field sense The sensing response of the measuring device (A) on the Z-axis is four times that of the individual magnetic field sensors (3~6).
In the above, the magnetic field sensing device (A) of the present invention not only has a better sensing response, but also because each magnetic field sensor (3-6) is centered on the magnetic flux guide (2). The configuration is such that the field point (P1) measured on the X-axis and the Y-axis is in the same position, and the flux guide (2) passes through the field point (P1), and in the Z The field point (P2) measured by the axis is also passed by the flux guide (2), and therefore, the result measured by the magnetic field sensing device (A) is closer to the actual observation point and has Better sensing response.
The following describes the method for the control unit group to switch the sensing directions of the magnetic field sensors (3~6):
1. Referring to the sixth figure, together with the first figure, the second figure, and the fifth figure, the control unit group (7) includes four electronic switches electrically connected to the first to fourth magnetic field sensors respectively (3~). 6) The voltage output terminal is used to switch the output polarity of each magnetic field sensor (3~6), so as to achieve the purpose of switching the sensing direction.
2. Please refer to the sixth figure in conjunction with the first, second and fifth figures, and switch the sensing directions of the magnetic field sensors (3~6) with the control unit group (7). Another feasible method Therefore, when the magnetic field sensors (3~6) determine the positive and negative directions of the output by the phase excited by the alternating magnetic field, the excitation direction of each magnetic field sensor (3~6) can be switched to achieve the switching sensing direction. the goal of.
3. Please refer to the sixth figure in conjunction with the first, second and fifth figures to switch the sensing direction of each magnetic field sensor (3~6) with the control unit group (7). Another feasible method Therefore, the output signals of the magnetic field sensors (3~6) are first read out by digital, and then the read numbers are added or subtracted to achieve the purpose of switching the sensing direction.
Referring to the third figure, in conjunction with the fourth and seventh figures, the magnetic field sensing device (A) is further implemented to: the fourth imaginary plane (n) is located above the third imaginary plane (m), The first to fourth magnetic field sensors (3-6) are respectively located in the third imaginary plane (m), above the magnetic field sensors (3~6) and in the fourth imaginary plane (n), respectively The first to fourth magnetic field sensors (3A, 4A) of another identical unit (the figure only presents the first and second magnetic field sensors of another identical unit), and are electrically connected to the control unit group respectively ( 7). According to the above configuration, when the magnetic field sensing device (A) is measured, the field points (P3) measured on the X axis, the Y axis, and the Z axis are all in the same position, and The magnetic field sensor is increased such that the sensing response of the magnetic field sensing device (A) in each axial direction is thus increased.
In addition, the magnetic field sensing device (A) may be implemented such that the first to fourth magnetic field sensors (3-6) are an anisotropic magnetoresistance (AMR), and by the characteristics of the anisotropic magnetoresistance, The magnetic field resolution can be improved, and when the characteristic size of the magnetic field sensing device (A) is less than 5 mm, the sensing result is better; the first to fourth magnetic field sensors (3-6) can also be one. Giant magnetoresistance (GMR), by which the power consumption of the magnetic field sensing device (A) can be reduced, and when the characteristic size of the magnetic field sensing device (A) is greater than 5 mm, Good sensing result; the first to fourth magnetic field sensors (3~6) can also be fluxgates, and the magnetic field sensing device (A) can be reduced by the characteristics of the flux gate The required signal is outputted to the number of terminals, and further, when the characteristic size of the magnetic field sensing device (A) is larger than 5 mm, the sensing result is better.
In summary, the present invention is indeed in line with industrial utilization, and is not found in publications or publicly used before application, nor is it known to the public, and has non-obvious knowledge, conforms to patentable requirements, and patents are filed according to law. .
However, the above description is a preferred embodiment of the invention in the industry, and all the equivalent changes made according to the scope of the patent application of the present invention belong to the scope of the claim.
(A)．．．磁場感測裝置(A). . . Magnetic field sensing device
(1)．．．電路板(1). . . Circuit board
(2)．．．磁通導引器(2). . . Flux guide
(3)．．．第一磁場感測器(3). . . First magnetic field sensor
(3A)．．．第一磁場感測器(3A). . . First magnetic field sensor
(4)．．．第二磁場感測器(4). . . Second magnetic field sensor
(4A)．．．第二磁場感測器(4A). . . Second magnetic field sensor
(5)．．．第三磁場感測器(5). . . Third magnetic field sensor
(6)．．．第四磁場感測器(6). . . Fourth magnetic field sensor
(7)．．．控制單元組(7). . . Control unit group
(X)．．．第一假想平面(X). . . First imaginary plane
(Y)．．．第二假想平面(Y). . . Second imaginary plane
(Z)．．．磁通導引器之軸心(Z). . . Axis of flux guide
(m)．．．第三假想平面(m). . . Third imaginary plane
(n)．．．第四假想平面(n). . . Fourth imaginary plane
(P1)．．．場點(P1). . . Site
(P2)．．．場點(P2). . . Site
(P3)．．．場點(P3). . . Site
第一圖係本發明於測量Z軸的磁場分量時，X-Z平面的磁場方向示意圖，其中第一及第二磁場感測器的箭頭方向代表其感測方向。
第二圖係本發明於測量X軸的磁場分量時，X-Z平面的磁場方向示意圖，其中第一及第二磁場感測器的箭頭方向代表其感測方向。
第三圖係本發明的磁場感測器為八個，且於測量Z軸磁場分量時，X-Z平面的磁場方向示意圖，其中第一及第二磁場感應器的箭頭方向代表其感測方向。
第四圖係本發明的磁場感測器為八個，且於測量X軸磁場分量時，X-Z平面的磁場方向示意圖，其中第一及第二磁場感應器的箭頭方向代表其感測方向。
第五圖係對本發明由俯視觀看之示意圖
第六圖係本發明之控制單元組與各感測器連接示意圖
第七圖係本發明之各假想平面與磁通導引器位置配置示意圖
The first figure is a schematic diagram of the magnetic field direction of the XZ plane when the magnetic field component of the Z-axis is measured, wherein the direction of the arrow of the first and second magnetic field sensors represents the sensing direction thereof.
The second figure is a schematic diagram of the magnetic field direction of the XZ plane when the magnetic field component of the X-axis is measured, wherein the direction of the arrow of the first and second magnetic field sensors represents the sensing direction thereof.
The third figure is a schematic diagram of the magnetic field direction of the XZ plane when the magnetic field sensor of the present invention is eight, and the direction of the arrow of the first and second magnetic field sensors represents the sensing direction.
The fourth figure is a schematic diagram of the magnetic field direction of the XZ plane when the magnetic field sensor of the present invention is eight, and the direction of the arrow of the first and second magnetic field sensors represents the sensing direction thereof.
5 is a schematic view of the present invention in a plan view. FIG. 6 is a schematic view showing the connection between the control unit group and the sensors of the present invention. FIG. 7 is a schematic diagram showing the positional arrangement of the imaginary planes and the flux guides of the present invention.
(A)．．．磁場感測裝置(A). . . Magnetic field sensing device
(1)．．．電路板(1). . . Circuit board
(2)．．．磁通導引器(2). . . Flux guide
(3)．．．第一磁場感測器(3). . . First magnetic field sensor
(4)．．．第二磁場感測器(4). . . Second magnetic field sensor
(5)．．．第三磁場感測器(5). . . Third magnetic field sensor
(6)．．．第四磁場感測器(6). . . Fourth magnetic field sensor
(X)．．．第一假想平面(X). . . First imaginary plane
(Y)．．．第二假想平面(Y). . . Second imaginary plane
Claims (10)
一電路板；
一磁通導引器(fluxguide)：該電路板一側鄰接該磁通導引器，該磁通導引器為一柱體，該磁通導引器相反二外側方分別設一第一及第二磁場感測器，且該第一及第二磁場感測器與該磁通導引器之距離相等，一第一假想平面分別通過該第一及第二磁場感測器之感測軸及該磁通導引器之軸心；該磁通導引器相反二外側方分別設一第三及第四磁場感測器，且該第三及第四磁場感測器與該磁通導引器之距離相等，一第二假想平面分別通過該第三及第四磁場感測器之感測軸及該磁通導引器之軸心，且該第一假想平面垂直該第二假想平面；一第三及第四假想平面分別通過該磁通導引器之二端，且平行該電路板，任取二磁場感測器均位於該第三或第四假想平面，其餘二磁場感測器均位於該第三或第四假想平面；
一控制單元組：分別電性連接該第一至第四磁場感測器，該控制單元組可供分別控制該第一至第四磁場感測器之感測方向。A magnetic field sensing device having a flux guide, comprising:
a circuit board;
a flux guide: one side of the circuit board abuts the magnetic flux guide, the magnetic flux guide is a cylinder, and the magnetic flux guides respectively have a first side opposite to the outer side a second magnetic field sensor, wherein the first and second magnetic field sensors are equidistant from the magnetic flux guide, and a first imaginary plane passes through the sensing axes of the first and second magnetic field sensors respectively And the axis of the flux guide; the third and fourth magnetic field sensors are respectively disposed on opposite outer sides of the flux guide, and the third and fourth magnetic field sensors and the magnetic flux guide The second imaginary plane passes through the sensing axis of the third and fourth magnetic field sensors and the axis of the magnetic flux guide, and the first imaginary plane is perpendicular to the second imaginary plane. a third and fourth imaginary plane respectively pass through the two ends of the flux guide, and parallel to the circuit board, and any two magnetic field sensors are located in the third or fourth imaginary plane, and the remaining two magnetic fields are sensed The devices are all located in the third or fourth imaginary plane;
A control unit group is electrically connected to the first to fourth magnetic field sensors respectively, and the control unit group is configured to respectively control the sensing directions of the first to fourth magnetic field sensors.
The magnetic field sensing device with a magnetic flux guide according to claim 1, wherein the circuit board has a cross shape, and the magnetic flux guide is disposed at a center of the circuit board, and each magnetic field sensor is separately provided. Above each end of the board.
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| Application Number | Priority Date | Filing Date | Title |
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| TW101140722A TWI457583B (en) | 2012-11-02 | 2012-11-02 | Three - axis magnetic field sensing device with magnetic flux guide |
| CN201310504793.6A CN103809133A (en) | 2012-11-02 | 2013-10-23 | Three axis magnetic field sensing device with flux guide |
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| CN106483479A (en) * | 2015-08-31 | 2017-03-08 | 张庆瑞 | Single bridges magnetic field sensor |
| CN107561462A (en) * | 2017-09-05 | 2018-01-09 | 重庆金山医疗器械有限公司 | The full attitude sensing system of capsule and space magnetic field detection means based on variation magnetic field |
| CN109061528B (en) * | 2018-08-02 | 2020-08-18 | 华中科技大学 | Three-axis planar magnetic sensor based on giant magneto-impedance effect |
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| JP4936299B2 (en) * | 2000-08-21 | 2012-05-23 | メレクシス・テクノロジーズ・ナムローゼフェンノートシャップ | Magnetic field direction detection sensor |
| CN101034730A (en) * | 2002-10-18 | 2007-09-12 | 雅马哈株式会社 | Manufacturing method for magnetic sensor |
| CN103257325A (en) * | 2007-03-23 | 2013-08-21 | 旭化成微电子株式会社 | Magnetic sensor and sensitivity measuring method |
| JP5292726B2 (en) * | 2007-06-13 | 2013-09-18 | ヤマハ株式会社 | Magnetic sensor and manufacturing method thereof |
| KR101235524B1 (en) * | 2009-03-26 | 2013-02-20 | 아이치 세이코우 가부시키가이샤 | Magnetic detection device |
| US8390283B2 (en) * | 2009-09-25 | 2013-03-05 | Everspin Technologies, Inc. | Three axis magnetic field sensor |
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