TW201408472A - Imprint method, and imprinting device - Google Patents
Imprint method, and imprinting device Download PDFInfo
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- TW201408472A TW201408472A TW102124509A TW102124509A TW201408472A TW 201408472 A TW201408472 A TW 201408472A TW 102124509 A TW102124509 A TW 102124509A TW 102124509 A TW102124509 A TW 102124509A TW 201408472 A TW201408472 A TW 201408472A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/10—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation for articles of indefinite length
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0822—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using IR radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0833—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using actinic light
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Thermal Sciences (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
本發明是有關於一種壓印方法及壓印裝置。 The present invention relates to an imprint method and an imprint apparatus.
壓印方法作為可低價且大量製造細微之凹凸構造的技術而備受矚目。壓印方法是一邊使例如外周具有凹凸圖案之輪狀的模具(所謂的凹版輥輪)旋轉，一邊將凹版輥輪之凹凸圖案連續地轉印至成形材料之層的表面(例如參照專利文獻1)。 The imprint method has attracted attention as a technique for manufacturing a fine concavo-convex structure at a low cost and in a large amount. In the embossing method, the concave-convex pattern of the gravure roll is continuously transferred to the surface of the layer of the molding material while rotating a wheel-shaped mold having a concave-convex pattern on the outer circumference (so-called gravure roll) (for example, see Patent Document 1) ).
圖11是習知壓印裝置的側視圖。玻璃片1及成形材料之層利用轉印輥輪3與凹版輥輪4夾著送出，凹版輥輪4之凹凸圖案轉印至成形材料之層。成形材料之層是利用施加於玻璃片1之張力而緊貼著凹版輥輪4，一邊與凹版輥輪4一起旋轉一邊慢慢硬化，而形成凹凸層。凹凸層是藉由通過分離輥輪5與凹版輥輪4之間，與凹版輥輪4分離。如此一來，可獲得以玻璃片及凹凸層構成的積層板。 Figure 11 is a side elevational view of a conventional imprint apparatus. The glass sheet 1 and the layer of the molding material are conveyed by the transfer roller 3 and the intaglio roller 4, and the concave-convex pattern of the gravure roller 4 is transferred to the layer of the molding material. The layer of the molding material is pressed against the gravure roll 4 by the tension applied to the glass sheet 1, and is gradually hardened together with the gravure roll 4 to form an uneven layer. The uneven layer is separated from the intaglio roller 4 by passing between the separation roller 5 and the intaglio roller 4. In this way, a laminate having a glass sheet and a concavo-convex layer can be obtained.
專利文獻1：國際公開2010/090085號 Patent Document 1: International Publication No. 2010/090085
一直以來，如圖11所示，玻璃片1有時會因轉印輥輪3或分離輥輪5而彎曲變形，使得玻璃片1破損。 As shown in FIG. 11, the glass sheet 1 may be bent and deformed by the transfer roller 3 or the separation roller 5, so that the glass sheet 1 is broken.
本發明有鑑於上述課題，目的為提供一種壓印方法及壓印裝置，其可減少玻璃片的破損。 The present invention has been made in view of the above problems, and an object thereof is to provide an imprint method and an imprint apparatus which can reduce breakage of a glass piece.
為了解決上述課題，本發明之一態樣的壓印方法，是具有：使玻璃片於平坦狀態通過複數組旋轉輥輪與軋輥之間，且使環設於複數前述旋轉輥輪之環帶狀的模具進行輪轉的工程；前述玻璃片及前述模具是於***一組旋轉輥輪與軋輥之間後，至從另一組旋轉輥輪與軋輥之間送出的期間，夾著成形材料之層，使前述模具之凹凸圖案轉印至該成形材料之層。 In order to solve the above problems, an imprint method according to an aspect of the present invention has a method in which a glass sheet is passed between a plurality of rotating rolls and a roll in a flat state, and a ring is provided in a ring shape of the plurality of rotating rolls. The mold is rotated; the glass sheet and the mold are inserted between a set of rotating rollers and the rolls, and between the other set of rotating rolls and the rolls, sandwiching the layer of the forming material, The concave-convex pattern of the mold is transferred to a layer of the shaped material.
又，本發明之另一態樣的壓印裝置，是具有：複數組使玻璃片於平坦狀態通過之成組的旋轉輥輪及軋輥；及環設於複數前述旋轉輥輪，進行輪轉之環帶狀的模具；前述玻璃片及前述模具是於***一組旋轉輥輪與軋輥之間後，至從另一組旋轉輥輪與軋輥之間送出的期間，夾著成形材料之層，使前述模具之凹凸圖案轉印至該成形材 料之層。 Further, another aspect of the present invention provides an imprint apparatus having a plurality of rotating rolls and rolls through which a plurality of sheets pass in a flat state; and a loop provided on a plurality of the rotating rolls to perform a ring of rotation a strip-shaped mold; the glass sheet and the mold are inserted between a set of rotating rolls and rolls, and between the other set of rotating rolls and the rolls, sandwiching the layer of the forming material, The concave and convex pattern of the mold is transferred to the formed material The layer of material.
根據本發明，可提供一種壓印方法及壓印裝置，其可減少玻璃片的破損。 According to the present invention, an imprint method and an imprint apparatus can be provided which can reduce breakage of a glass sheet.
1、11‧‧‧玻璃片 1, 11‧‧‧ glass pieces
3‧‧‧轉印輥輪 3‧‧‧Transfer roller
4‧‧‧凹版輥輪 4‧‧‧gravure roller
5、22‧‧‧分離輥輪 5, 22‧‧‧ Separation roller
10、10A‧‧‧壓印裝置 10, 10A‧‧‧ Imprinting device
12‧‧‧玻璃保護片 12‧‧‧glass protection film
13‧‧‧凹凸保護片 13‧‧‧ Bump protection sheet
15‧‧‧成形材料之層、第1成形材料之層 15‧‧‧Layer of forming material, layer of first forming material
16‧‧‧第2成形材料之層 16‧‧‧The second layer of forming material
17‧‧‧凹凸層、第1凹凸層 17‧‧‧ Concave layer, first concavo-convex layer
18‧‧‧第2凹凸層 18‧‧‧2nd uneven layer
19、19A‧‧‧積層板 19, 19A‧‧‧ laminate
21‧‧‧捲出輥輪 21‧‧‧Rolling roller
23‧‧‧回收輥輪 23‧‧‧Recycling roller
24‧‧‧陸續送出輥輪 24‧‧‧Continuous delivery of rollers
25‧‧‧重合輥輪 25‧‧‧Reclosing roller
26‧‧‧捲取輥輪 26‧‧‧Winding roller
31‧‧‧塗布器、第1塗布器 31‧‧‧applicator, first applicator
32‧‧‧第2塗布器 32‧‧‧2nd applicator
33‧‧‧模具、第1模具 33‧‧‧Mold, first mold
34‧‧‧第2模具 34‧‧‧2nd mould
35‧‧‧光源 35‧‧‧Light source
41、42‧‧‧旋轉輥輪 41, 42‧‧‧Rotating roller
43、44‧‧‧軋輥 43, 44‧‧‧ rolls
45‧‧‧導引輥輪 45‧‧‧Guide roller
46‧‧‧送出輥輪 46‧‧‧Send the roller
51~54‧‧‧輔助輥輪 51~54‧‧‧Auxiliary roller
圖1是本發明之第1實施形態的壓印裝置的側視圖。 Fig. 1 is a side view of an imprint apparatus according to a first embodiment of the present invention.
圖2是沿著圖1之II-II線的剖面圖。 Figure 2 is a cross-sectional view taken along line II-II of Figure 1.
圖3是沿著圖1之III-III線的剖面圖。 Figure 3 is a cross-sectional view taken along line III-III of Figure 1.
圖4是沿著圖1之IV-IV線的剖面圖。 Figure 4 is a cross-sectional view taken along line IV-IV of Figure 1.
圖5是沿著圖1之V-V線的剖面圖。 Figure 5 is a cross-sectional view taken along line V-V of Figure 1.
圖6是本發明之第2實施形態的壓印裝置的側視圖。 Fig. 6 is a side view of the imprint apparatus according to the second embodiment of the present invention.
圖7是沿著圖6之VII-VII線的剖面圖。 Fig. 7 is a cross-sectional view taken along line VII-VII of Fig. 6.
圖8是沿著圖6之VIII-VIII線的剖面圖。 Figure 8 is a cross-sectional view taken along line VIII-VIII of Figure 6.
圖9是沿著圖6之IX-IX線的剖面圖。 Figure 9 is a cross-sectional view taken along line IX-IX of Figure 6.
圖10是沿著圖6之X-X線的剖面圖。 Figure 10 is a cross-sectional view taken along line X-X of Figure 6.
圖11是習知壓印裝置的側視圖。 Figure 11 is a side elevational view of a conventional imprint apparatus.
以下，將參照圖示，針對用以實施本發明之形態作說明。於各圖示中，同一或相對應之構成是附註同一或相對應的符號來省略說明。 Hereinafter, the mode for carrying out the invention will be described with reference to the drawings. In the respective drawings, the same or corresponding components are denoted by the same or corresponding reference numerals, and the description is omitted.
圖1是本發明之第1實施形態的壓印裝置的側視圖。圖 2~圖5是本發明之第1實施形態的壓印方法的說明圖。圖2是沿著圖1之II-II線的剖面圖，圖3是沿著圖1之III-III線的剖面圖，圖4是沿著圖1之IV-IV線的剖面圖，圖5是沿著圖1之V-V線的剖面圖。 Fig. 1 is a side view of an imprint apparatus according to a first embodiment of the present invention. Figure 2 to 5 are explanatory views of the imprint method according to the first embodiment of the present invention. Figure 2 is a cross-sectional view taken along line II-II of Figure 1, Figure 3 is a cross-sectional view taken along line III-III of Figure 1, and Figure 4 is a cross-sectional view taken along line IV-IV of Figure 1, Figure 5 It is a cross-sectional view taken along line VV of Fig. 1.
壓印裝置10是將凹凸層17(參照圖5)連續地或間歇地形成於帶狀的玻璃片11上。玻璃片11及凹凸層17構成積層板19。凹凸層17具有凸部為周期性地排列的凹凸圖案。 The imprint apparatus 10 is formed by continuously or intermittently forming the uneven layer 17 (see FIG. 5) on the strip-shaped glass sheet 11. The glass sheet 11 and the uneven layer 17 constitute a laminated board 19. The uneven layer 17 has a concave-convex pattern in which the convex portions are periodically arranged.
作為玻璃片11的玻璃，可舉例例如，無鹼玻璃、硼矽酸鹽玻璃、鈉鈣玻璃、以其他氧化矽為主成份的氧化物系玻璃等。 Examples of the glass of the glass sheet 11 include an alkali-free glass, a borosilicate glass, a soda-lime glass, and an oxide-based glass mainly composed of cerium oxide.
從可撓性之觀點來看，玻璃片11之厚度例如為0.3mm以下，宜為0.2mm以下，更宜為0.1mm以下，更進一步宜為0.05mm以下。又，從玻璃成形性之觀點來看，玻璃片11之厚度宜為0.0001mm以上，更宜為0.001mm以上，更進一步宜為0.005mm以上。 The thickness of the glass piece 11 is, for example, 0.3 mm or less, preferably 0.2 mm or less, more preferably 0.1 mm or less, and still more preferably 0.05 mm or less from the viewpoint of flexibility. Further, the thickness of the glass piece 11 is preferably 0.0001 mm or more, more preferably 0.001 mm or more, and still more preferably 0.005 mm or more from the viewpoint of glass formability.
壓印裝置10為輥輪對輥輪(roll-to-roll)方式，具有例如捲出輥輪21、分離輥輪22、回收輥輪23、陸續送出輥輪24、重合輥輪25及捲取輥輪26。 The imprint apparatus 10 is a roll-to-roll type having, for example, a roll-out roll 21, a separation roll 22, a take-up roll 23, a continuous take-up roll 24, a coincident roll 25, and a take-up Roller 26.
於捲出輥輪21裝設有：將玻璃片11及玻璃保護片12重疊、渦旋狀地捲繞的玻璃輥輪。玻璃保護片12是以樹脂薄膜、紙等所構成，防止玻璃面附著異物(例如灰塵)或損傷。捲出輥輪21旋轉時，玻璃片11及玻璃保護片12會從玻璃輥輪陸續送出。 A glass roller that winds the glass sheet 11 and the glass protective sheet 12 in a spiral shape is attached to the winding roller 21. The glass protective sheet 12 is made of a resin film, paper, or the like, and prevents foreign matter (for example, dust) or damage from adhering to the glass surface. When the take-up roller 21 rotates, the glass sheet 11 and the glass protective sheet 12 are successively fed out from the glass roller.
玻璃輥輪之最外層宜為玻璃保護片12。當捲出輥輪21暫時停止時，防止玻璃片11附著異物(例如灰塵)或損傷。 The outermost layer of the glass roller is preferably a glass protective sheet 12. When the unwinding roller 21 is temporarily stopped, the glass sheet 11 is prevented from adhering to foreign matter (for example, dust) or damage.
玻璃保護片12可附有黏著劑，與玻璃片11接合，亦可未接合僅接觸。 The glass protective sheet 12 may be attached with an adhesive, joined to the glass sheet 11, or may be joined without being joined.
玻璃保護片12於分離輥輪22與玻璃片11分離前，可保護玻璃片11中形成成形材料之層15的面。 The glass protective sheet 12 protects the surface of the glass sheet 11 from which the layer 15 of the molding material is formed before the separation roller 22 is separated from the glass sheet 11.
分離輥輪22是將從玻璃輥輪陸續送出之玻璃片11及玻璃保護片12分離。藉由玻璃保護片12沿著分離輥輪22彎曲變形，可順利地進行分離。玻璃保護片12具有黏著層時，因黏著層與玻璃片慢慢地剝離，故可減輕剝離所需的力。 The separation roller 22 separates the glass sheet 11 and the glass protection sheet 12 which are successively fed out from the glass roller. By the glass protective sheet 12 being bent and deformed along the separation roller 22, the separation can be smoothly performed. When the glass protective sheet 12 has an adhesive layer, since the adhesive layer and the glass piece are gradually peeled off, the force required for peeling can be reduced.
回收輥輪23是將與玻璃片11分離的玻璃保護片12捲取。 The recovery roller 23 winds up the glass protective sheet 12 separated from the glass sheet 11.
於陸續送出輥輪24裝設有：將凹凸保護片13渦旋狀地捲繞的保護片輥輪。陸續送出輥輪24旋轉時，凹凸保護片13會從保護片輥輪陸續送出。凹凸保護片13是以樹脂薄膜、紙等所構成。 A protective sheet roller in which the unevenness protection sheet 13 is spirally wound is attached to the successive delivery roller 24. When the roller 24 is continuously rotated, the unevenness preventing sheet 13 is successively fed out from the protective sheet roller. The unevenness protection sheet 13 is composed of a resin film, paper, or the like.
重合輥輪25是使從保護片輥輪陸續送出之凹凸保護片13與積層板19重合。因藉由凹凸保護片13沿著重合輥輪25彎曲變形，凹凸保護片13與積層板19慢慢地合併，故可抑制重合時的皺折或空氣進入等。 The registration roller 25 overlaps the unevenness protection sheet 13 which is successively fed out from the protective sheet roller and the laminated board 19. Since the unevenness protection sheet 13 is bent and deformed along the overlap roller 25, the unevenness protection sheet 13 and the laminate 19 are gradually combined, so that wrinkles or air intrusion during the overlap can be suppressed.
凹凸保護片13可附有黏著劑，與積層板19接合，亦可未接合僅接觸。 The unevenness protection sheet 13 may be attached with an adhesive, joined to the laminated board 19, or may be joined without being joined.
凹凸保護片13覆蓋積層板19之凹凸層17，防止凹凸層17附著異物(例如灰塵)或損傷。 The unevenness protection sheet 13 covers the uneven layer 17 of the laminate 19 to prevent foreign matter (for example, dust) or damage from adhering to the uneven layer 17.
捲取輥輪26將積層板19及凹凸保護片13重疊捲取，製成製品捲。製品捲之最外層宜為凹凸保護片13。製品捲之最外層為玻璃片時，製品捲於保管時可利用別的保護片覆蓋著。 The winding roller 26 overlaps and winds the laminated plate 19 and the unevenness preventing sheet 13 to form a product roll. The outermost layer of the product roll is preferably an unevenness protection sheet 13. When the outermost layer of the product roll is a glass piece, the product roll can be covered with another protective sheet during storage.
壓印裝置10例如為光壓印裝置，更具有：塗布器31、環帶狀的模具33、光源35、複數(例如2個)旋轉輥輪41、42、複數(例如2個)軋輥43、44、導引輥輪45、送出輥輪46、複數(例如2個)輔助輥輪51、52。 The imprint apparatus 10 is, for example, a photo imprint apparatus, and further includes an applicator 31, a belt-shaped mold 33, a light source 35, a plurality of (for example, two) rotating rolls 41, 42, and a plurality of (for example, two) rolls 43, 44. Guide roller 45, delivery roller 46, and a plurality of (for example, two) auxiliary rollers 51, 52.
塗布器31是於玻璃保護片12分離後，將成形材料塗布於玻璃片11上，如圖2所示地形成成形材料之層15。塗布器31可舉例模具塗布機、輥輪塗布機、凹版塗布機、噴塗機、注流塗布機、刮刀塗布機等。 The applicator 31 applies a molding material to the glass sheet 11 after the glass protective sheet 12 is separated, and forms a layer 15 of a molding material as shown in Fig. 2 . The applicator 31 can be exemplified by a die coater, a roll coater, a gravure coater, a spray coater, a jet coater, a knife coater, and the like.
為了提升玻璃面與成形材料的緊密性，玻璃片11亦可是預先施以表面處理的玻璃。表面處理可舉例底塗處理、臭氧處理、電漿蝕刻處理等。底塗處理是使用矽烷耦合劑、矽氮烷聚合物等。 In order to improve the tightness of the glass surface and the molding material, the glass sheet 11 may also be a glass which has been subjected to surface treatment in advance. The surface treatment can be exemplified by a primer treatment, an ozone treatment, a plasma etching treatment, and the like. The primer treatment is a decane coupling agent, a decazane polymer or the like.
成形材料包含光硬化性樹脂。光硬化性樹脂可使用用於光壓印方法之一般性樹脂。光硬化樹脂是以單體、光聚合開始劑等所構成。作為單體，若是基聚合型，有丙烯酸單體、乙烯基單體等，若是離子聚合型，有環氧樹脂單體乙烯醚單體等。光硬化樹脂是準備成液狀狀態，例如圖2所示地塗布於玻璃片11上。成形材料亦可包含金 屬氧化物之粒子等。 The molding material contains a photocurable resin. As the photocurable resin, a general resin used in a photoimprint method can be used. The photocurable resin is composed of a monomer, a photopolymerization initiator, and the like. Examples of the monomer include an acrylic monomer, a vinyl monomer, and the like, and an ionic polymerization type, such as an epoxy resin monomer vinyl ether monomer. The photocurable resin is prepared in a liquid state, and is applied to the glass sheet 11 as shown in, for example, FIG. The forming material can also contain gold It is an oxide particle or the like.
模具33於外周具有：轉印至成形材料之層15的表面的凹凸圖案。為了提升模具表面與成形材料的脫模性，模具33亦可預先施以脫模處理。脫模處理可舉例例如氟塗布處理、矽氧塗布處理等。 The mold 33 has a concave-convex pattern that is transferred to the surface of the layer 15 of the molding material on the outer circumference. In order to improve the mold release property of the mold surface and the molding material, the mold 33 may be subjected to a mold release treatment in advance. The mold release treatment can be exemplified by, for example, a fluorine coating treatment, a silicone coating treatment, or the like.
模具33是環設於複數旋轉輥輪41、42及複數輔助輥輪51、52來進行輪轉。模具33是以例如金屬(例如鎳、鉻)、或樹脂(例如聚碳酸酯、環狀烯烴樹脂)所構成，具有可撓性。又，亦可未有全部或一部分複數輔助輥輪51、52。 The mold 33 is looped on the plurality of rotating rolls 41, 42 and the plurality of auxiliary rolls 51, 52 for rotation. The mold 33 is made of, for example, a metal (for example, nickel or chromium) or a resin (for example, polycarbonate or a cyclic olefin resin) and has flexibility. Further, all or a part of the plurality of auxiliary rollers 51, 52 may not be provided.
模具33是將使用主模而成型之帶狀板的兩端部熔接而製成，可複製好幾次。複製方法例如有壓印法、電鑄法等。主模是以例如光微影法或電子束微影法等將基材加工而製成。 The mold 33 is formed by welding both end portions of a strip-shaped plate molded using a master mold, and can be reproduced several times. The copying method is, for example, an imprint method, an electroforming method, or the like. The master mold is produced by processing a substrate such as photolithography or electron beam lithography.
光源35將光照射於夾在玻璃片11與模具33之間的成形材料之層15，使成形材料之層15固化(硬化)。成形材料之層15固化而形成的凹凸層17具有：模具33之凹凸圖案大略反轉的凹凸圖案。 The light source 35 illuminates the layer 15 of the molding material sandwiched between the glass sheet 11 and the mold 33 to cure (harden) the layer 15 of the molding material. The uneven layer 17 formed by curing the layer 15 of the molding material has a concave-convex pattern in which the concave-convex pattern of the mold 33 is substantially reversed.
使光硬化樹脂硬化的光，可舉例紫外光、可見光、紅外光等。紫外光的光源可舉例紫外線螢光燈、紫外線LED、低壓水銀燈、高壓水銀燈、超高壓水銀燈、氙燈、碳弧燈等。可見光的光源可使用可見光螢光燈、可見光白熾燈、可見光LED等。 Examples of the light which hardens the photohardenable resin include ultraviolet light, visible light, infrared light, and the like. The ultraviolet light source can be exemplified by an ultraviolet fluorescent lamp, an ultraviolet LED, a low pressure mercury lamp, a high pressure mercury lamp, an ultra high pressure mercury lamp, a xenon lamp, a carbon arc lamp, and the like. As the light source of visible light, a visible light fluorescent lamp, a visible light incandescent lamp, a visible light LED, or the like can be used.
於光壓印方法中，玻璃片11及模具33至少之一 可為以光透過性材料所構成。從光源35發射的光，例如透過透明的玻璃片11，射入成形材料之層15。又，從光源35射出的光亦可透過透明的模具33，射入成形材料之層15。 In the photo imprint method, at least one of the glass sheet 11 and the mold 33 It can be made of a light transmissive material. Light emitted from the light source 35, for example, is transmitted through the transparent glass sheet 11 into the layer 15 of the shaped material. Further, the light emitted from the light source 35 can also be transmitted through the transparent mold 33 and into the layer 15 of the molding material.
於光壓印方法中，可在室溫成型，模具33與玻璃片11之線膨脹係數差所造成的偏差不易發生，轉印準確度良好。又，為了促進硬化反應，亦可加熱成形材料之層15。 In the photoimprint method, it can be molded at room temperature, and the deviation caused by the difference in linear expansion coefficient between the mold 33 and the glass sheet 11 is less likely to occur, and the transfer accuracy is good. Further, in order to promote the hardening reaction, the layer 15 of the molding material may be heated.
如圖3所示，一組的旋轉輥輪41及軋輥43從軋輥43側，依序夾著玻璃片11、成形材料之層15及模具33送出。旋轉輥輪41及軋輥43可相對地接合、分離，旋轉輥輪41及軋輥43任一可利用液壓氣缸等向另一推壓。旋轉輥輪41及軋輥43至少之一可為利用橡膠來包覆金屬輥輪外周的輥輪。利用橡膠會彈性變形，可抑制灰塵等異物捲入所造成的應力集中或玻璃片11之厚度偏差等所造成的應力集中。旋轉輥輪41及軋輥43任一可伴隨著：另一利用旋轉馬達等而旋轉驅動的旋轉，而從動性地旋轉。旋轉輥輪41及軋輥43任一從動性地旋轉時，旋轉輥輪41及軋輥43之間的圓周速度差小，切應力小。 As shown in Fig. 3, a group of rotating rolls 41 and rolls 43 are fed from the roll 43 side, in this order, by sandwiching the glass sheet 11, the layer 15 of the molding material, and the mold 33. The rotating roller 41 and the roller 43 can be relatively joined and separated, and any one of the rotating roller 41 and the roller 43 can be pressed to the other by a hydraulic cylinder or the like. At least one of the rotating roller 41 and the roller 43 may be a roller that coats the outer circumference of the metal roller with rubber. The rubber is elastically deformed, and it is possible to suppress stress concentration due to stress concentration caused by foreign matter such as dust or the thickness deviation of the glass sheet 11. Any one of the rotating roller 41 and the roller 43 may be driven to rotate in a rotationally driven manner by a rotary motor or the like. When either of the rotating roller 41 and the roller 43 is driven to rotate, the circumferential speed difference between the rotating roller 41 and the roller 43 is small, and the shear stress is small.
玻璃片11及模具33是於***一組旋轉輥輪41與軋輥43之間後，至從另一組旋轉輥輪42及軋輥44之間送出的期間，如圖4所示，利用玻璃片11之張力及模具33之張力而夾著成形材料之層15，與成形材料之層15整體地移動。在該期間，成形材料之層15接受來自光源35的光而慢慢地硬化，形成凹凸層17。玻璃片11的張力方向為玻璃片 11的移動方向。又，模具33的張力方向為模具33的移動方向(輪轉方向)。 The glass sheet 11 and the mold 33 are inserted between the set of the rotating rolls 41 and the rolls 43, and are sent out from between the other set of the rotating rolls 42 and the rolls 44, as shown in Fig. 4, using the glass sheets 11 The tension and the tension of the mold 33 sandwich the layer 15 of the molding material and move integrally with the layer 15 of the molding material. During this period, the layer 15 of the molding material is slowly cured by receiving light from the light source 35 to form the uneven layer 17. The tension direction of the glass sheet 11 is a glass piece The direction of movement of 11. Further, the tension direction of the mold 33 is the moving direction (rotation direction) of the mold 33.
另一組旋轉輥輪42及軋輥44從軋輥44側，依序夾著玻璃片11、凹凸層17及模具33送出。旋轉輥輪42及軋輥44可相對地接合、分離，旋轉輥輪42及軋輥44任一可利用液壓氣缸等向另一推壓。旋轉輥輪42及軋輥44至少之一可為利用橡膠來包覆金屬輥輪外周的輥輪。旋轉輥輪42及軋輥44任一可伴隨著：另一利用旋轉馬達等而旋轉驅動的旋轉，而從動性地旋轉。旋轉輥輪42及軋輥44任一從動性地旋轉時，旋轉輥輪42與軋輥44之間的圓周速度差小，切應力小。 The other set of the rotary rolls 42 and the rolls 44 are fed from the side of the roll 44, and the glass piece 11, the uneven layer 17 and the mold 33 are sequentially sandwiched. The rotating roller 42 and the roller 44 can be relatively engaged and disengaged, and any of the rotating roller 42 and the roller 44 can be pressed against the other by a hydraulic cylinder or the like. At least one of the rotating roller 42 and the roller 44 may be a roller that coats the outer circumference of the metal roller with rubber. Any one of the rotating roller 42 and the roller 44 may be driven to rotate in synchronization with another rotation by a rotary motor or the like. When either of the rotating roller 42 and the roller 44 is driven to rotate, the circumferential speed difference between the rotating roller 42 and the roller 44 is small, and the shear stress is small.
複數旋轉輥輪41、42及複數軋輥43、44可為相同外徑，亦可為相異外徑。 The plurality of rotating rolls 41, 42 and the plurality of rolls 43, 44 may have the same outer diameter or may be different outer diameters.
導引輥輪45是對應於玻璃輥輪之輪徑，將從玻璃輥輪陸續送出的玻璃片11進行方向轉換，使玻璃片11於平坦狀態***旋轉輥輪41與軋輥43之間。玻璃片11的方向轉換，是利用玻璃片11沿著導引輥輪45彎曲變形而進行。 The guide roller 45 is a wheel diameter corresponding to the glass roller, and the glass piece 11 successively fed out from the glass roller is direction-converted, and the glass piece 11 is inserted between the rotating roller 41 and the roll 43 in a flat state. The direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roller 45.
送出輥輪46是將積層板19於平坦狀態從旋轉輥輪42與軋輥44之間送出，對應製品捲的輪徑，將積層板19進行方向轉換。積層板19的方向轉換，是利用積層板19沿著送出輥輪46彎曲變形而進行。 The delivery roller 46 feeds the laminated plate 19 from between the rotary roller 42 and the roller 44 in a flat state, and the laminated plate 19 is direction-converted in accordance with the wheel diameter of the product roll. The direction change of the laminated plate 19 is performed by bending and deforming the laminated plate 19 along the delivery roller 46.
接著，針對上述構成之壓印裝置10的動作(壓印方法)作說明。壓印裝置10的各種動作，是在以微電腦等所構成之控制器的控制下來進行。於以下的說明中，為了 方便，主要著重於玻璃片11的一部分，說明壓印裝置10的各種動作。 Next, the operation (imprint method) of the imprint apparatus 10 having the above configuration will be described. The various operations of the imprint apparatus 10 are performed under the control of a controller constituted by a microcomputer or the like. In the following description, in order to Conveniently, the main focus is on a portion of the glass sheet 11, illustrating various actions of the imprint apparatus 10.
首先，捲出輥輪21旋轉，玻璃片11及玻璃保護片12從玻璃輥輪連續地陸續送出。玻璃片11及玻璃保護片12藉由通過分離輥輪22及導引輥輪45之間而分離。 First, the take-up roller 21 is rotated, and the glass sheet 11 and the glass protective sheet 12 are continuously fed out from the glass roller. The glass sheet 11 and the glass protective sheet 12 are separated by passing between the separation roller 22 and the guide roller 45.
導引輥輪45對應於玻璃輥輪之輪徑，將玻璃片11進行方向轉換，使玻璃片11於平坦狀態***一組的旋轉輥輪41與軋輥43之間。玻璃片11的方向轉換，是利用玻璃片11沿著導引輥輪45彎曲變形而進行。 The guide roller 45 corresponds to the wheel diameter of the glass roller, and the glass sheet 11 is direction-converted so that the glass sheet 11 is inserted between the set of rotating rollers 41 and the rolls 43 in a flat state. The direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roller 45.
接著，如圖2所示，塗布器31將成形材料塗布於玻璃片11上，形成成形材料之層15。 Next, as shown in FIG. 2, the applicator 31 applies a molding material onto the glass sheet 11 to form a layer 15 of a molding material.
接著，如圖3所示，旋轉輥輪41及軋輥43從軋輥43側，依序夾著玻璃片11、成形材料之層15及模具33送出。 Next, as shown in FIG. 3, the rotating roller 41 and the roll 43 are sequentially fed from the side of the roll 43 with the glass sheet 11, the layer 15 of the molding material, and the mold 33.
如圖1所示，玻璃片11及成形材料之層15是於平坦狀態***一組的旋轉輥輪41與軋輥43之間。另一方面，模具33一邊沿著旋轉輥輪41彎曲變形，以使空氣不進入其與成形材料之層15之間，一邊***旋轉輥輪41及軋輥43之間，與成形材料之層15密接。 As shown in Fig. 1, the glass sheet 11 and the layer 15 of the forming material are interposed between a group of rotating rolls 41 and rolls 43 in a flat state. On the other hand, the mold 33 is bent and deformed along the rotating roller 41 so that air does not enter between the layer 15 and the layer 15 of the molding material, and is inserted between the rotating roller 41 and the roller 43 to be in close contact with the layer 15 of the molding material. .
如圖4所示，玻璃片11及模具33於***一組旋轉輥輪41與軋輥43之間後，至從另一組旋轉輥輪42及軋輥44之間送出的期間，利用玻璃片11之張力及模具33之張力而夾著成形材料之層15，與成形材料之層15整體地移動。在該期間，成形材料之層15接受來自光源35的光而慢慢地硬 化，形成凹凸層17。 As shown in FIG. 4, after the glass sheet 11 and the mold 33 are inserted between the set of rotating rolls 41 and the rolls 43, and are sent out from between the other set of rotating rolls 42 and the rolls 44, the glass sheets 11 are used. The tension and the tension of the mold 33 sandwich the layer 15 of the molding material and move integrally with the layer 15 of the molding material. During this period, the layer 15 of molding material receives light from the light source 35 and slowly hardens The uneven layer 17 is formed.
接著，旋轉輥輪42及軋輥44從軋輥44側，依序夾著玻璃片11、凹凸層17及模具33送出。 Next, the rotating roller 42 and the roll 44 are fed from the side of the roll 44, and the glass piece 11, the uneven layer 17 and the mold 33 are sequentially sandwiched.
如圖1所示，玻璃片11及凹凸層17是於平坦狀態從旋轉輥輪42與軋輥44之間送出。另一方面，模具33沿著旋轉輥輪42彎曲變形，以讓其與凹凸層17順利地分離。 As shown in FIG. 1, the glass piece 11 and the uneven layer 17 are sent out between the rotating roller 42 and the roll 44 in a flat state. On the other hand, the mold 33 is bent and deformed along the rotating roller 42 to be smoothly separated from the uneven layer 17.
依此，如圖5所示，可獲得包含玻璃片11及凹凸層17之積層板19。 Accordingly, as shown in FIG. 5, the laminated plate 19 including the glass sheet 11 and the uneven layer 17 can be obtained.
接著，送出輥輪46及重合輥輪25使積層板19與凹凸保護片13重合。凹凸保護片13是以樹脂薄膜、紙等所構成。凹凸保護片13與積層板19之凹凸層17重疊，防止凹凸層17附著異物(例如灰塵)或損傷。 Next, the delivery roller 46 and the superposition roller 25 superimpose the laminated plate 19 and the unevenness protection sheet 13. The unevenness protection sheet 13 is composed of a resin film, paper, or the like. The unevenness protection sheet 13 overlaps with the uneven layer 17 of the laminated board 19, and prevents the foreign matter (for example, dust) or damage from adhering to the uneven layer 17.
送出輥輪46將積層板19於平坦狀態從旋轉輥輪42與軋輥44之間送出，對應於製品捲的輪徑，將積層板19進行方向轉換。 The delivery roller 46 feeds the laminated plate 19 from between the rotary roller 42 and the roller 44 in a flat state, and the laminated plate 19 is direction-converted in accordance with the wheel diameter of the product roll.
接著，捲取輥輪26將積層板19及凹凸保護片13重疊、捲取，製成製品捲。 Next, the winding roller 26 superimposes and winds the laminated plate 19 and the unevenness protection sheet 13 to form a product roll.
積層板19是使用時從製品捲陸續送出，切斷成特定大小，使用於例如液晶面板或有機EL面板等光學面板的製造。凹凸保護片13可於光學面板之製造工程的途中與積層板19分離，而不成為光學面板的構成零件。 The laminated board 19 is produced by being successively sent out from the product roll at the time of use, and cut into a specific size, and is used for an optical panel such as a liquid crystal panel or an organic EL panel. The unevenness protection sheet 13 can be separated from the laminated board 19 in the middle of the manufacturing process of the optical panel, and does not become a constituent part of the optical panel.
積層板19使用於光學面板時，可使用為蛾眼型防反射板、偏光板、微透鏡陣列板、扁豆狀透鏡板等。又，積層板19亦可使用於免疫分析晶片、DNA分析晶片、 DNA分離晶片、微反應器等的製造，並無特別地限定積層板19的用途。 When the laminate 19 is used for an optical panel, a moth-eye type antireflection sheet, a polarizing plate, a microlens array plate, a lenticular lens plate, or the like can be used. Moreover, the laminate 19 can also be used for immunoassay wafers, DNA analysis wafers, The production of the DNA separation wafer, the microreactor, and the like is not particularly limited to the use of the laminate 19.
如以上說明，根據本實施形態，如圖1所示地玻璃片11於平坦狀態通過複數組旋轉輥輪41、42與軋輥43、44之間。因此，因模具33之凹凸圖案轉印時、或模具33與凹凸層17分離時，易碎的玻璃片11保持著平坦，故可抑制玻璃片11的破損。 As described above, according to the present embodiment, as shown in Fig. 1, the glass sheet 11 passes between the plurality of rotating rolls 41, 42 and the rolls 43, 44 in a flat state. Therefore, when the concave-convex pattern of the mold 33 is transferred or the mold 33 is separated from the uneven layer 17, the fragile glass sheet 11 is kept flat, so that the breakage of the glass sheet 11 can be suppressed.
又，本實施形態之玻璃片11中形成凹凸層17之面相反側的面，亦可設置支持玻璃片11的支持片。支持片是可剝離地與玻璃片11接合。支持片是以例如基材及基材上所形成之黏著層所構成，利用黏著層的黏著力與玻璃片11接合。基材可使用例如聚乙烯、聚丙烯、聚氯乙烯、聚苯乙烯、不飽和聚酯、醯胺、聚醯亞胺、聚醯亞胺等同聚物、共聚物等。黏著層的黏著劑可使用例如乙酸乙烯酯系、縮醛系、丙烯酸系、醯胺系、不飽和聚酯系、聚氨酯系、橡膠系等。支持片於通過複數組旋轉輥輪41、42與軋輥43、44之間的期間，增強玻璃片11，抑制玻璃片11的破損。支持片亦可從例如捲出輥輪21所裝設之玻璃輥輪，與玻璃片11一起陸續送出，與玻璃片11一起以捲取輥輪26捲取。又，支持片可僅以黏著性的樹脂薄膜構成，支持片的構成並無特別地限定。 Further, in the glass sheet 11 of the present embodiment, a surface on the opposite side to the surface on which the uneven layer 17 is formed may be provided with a support sheet for supporting the glass sheet 11. The support sheet is detachably joined to the glass sheet 11. The support sheet is composed of, for example, an adhesive layer formed on a substrate and a substrate, and bonded to the glass sheet 11 by the adhesive force of the adhesive layer. As the substrate, for example, polyethylene, polypropylene, polyvinyl chloride, polystyrene, unsaturated polyester, decylamine, polyimide, polyimine, or the like can be used. As the adhesive for the adhesive layer, for example, a vinyl acetate type, an acetal type, an acrylic type, a guanamine type, an unsaturated polyester type, a polyurethane type, a rubber type or the like can be used. The support sheet reinforces the glass sheet 11 while suppressing breakage of the glass sheet 11 while passing between the plurality of rotating rolls 41, 42 and the rolls 43, 44. The support sheet can also be fed out together with the glass sheet 11 from, for example, a glass roll mounted on the take-up roll 21, and taken up by the take-up roll 26 together with the glass piece 11. Further, the support sheet may be formed only of an adhesive resin film, and the configuration of the support sheet is not particularly limited.
圖6是本發明之第2實施形態的壓印裝置的側視圖。圖7~圖10是本發明之第2實施形態的壓印方法的說明圖。圖7 是沿著圖6之VII-VII線的剖面圖，圖8是沿著圖6之VIII-VIII線的剖面圖，圖9是沿著圖6之IX-IX線的剖面圖，圖10是沿著圖6之X-X線的剖面圖。 Fig. 6 is a side view of the imprint apparatus according to the second embodiment of the present invention. 7 to 10 are explanatory views of the imprint method according to the second embodiment of the present invention. Figure 7 5 is a cross-sectional view taken along line VIII-VIII of FIG. 6, FIG. 9 is a cross-sectional view taken along line VIII-VIII of FIG. 6, and FIG. 9 is a cross-sectional view taken along line IX-IX of FIG. A cross-sectional view taken along line XX of Fig. 6.
壓印裝置10A是將第1凹凸層17及第2凹凸層18(參照圖10)連續地或間歇地形成於玻璃片11上。第1凹凸層17及第2凹凸層18是夾著玻璃片11相互形成於相反側。以玻璃片11及第1凹凸層17及第2凹凸層18構成積層板19A。第1凹凸層17及第2凹凸層18具有凸部為周期性地排列的凹凸圖案。第1凹凸層17之凹凸圖案與第2凹凸層18之凹凸圖案可為相同圖案，亦可為相異圖案。 In the imprint apparatus 10A, the first uneven layer 17 and the second uneven layer 18 (see FIG. 10) are formed continuously or intermittently on the glass sheet 11. The first uneven layer 17 and the second uneven layer 18 are formed on the opposite side of each other with the glass sheet 11 interposed therebetween. The laminated sheet 19A is constituted by the glass sheet 11, the first uneven layer 17 and the second uneven layer 18. The first uneven layer 17 and the second uneven layer 18 have a concave-convex pattern in which the convex portions are periodically arranged. The concave-convex pattern of the first uneven layer 17 and the concave-convex pattern of the second uneven layer 18 may be the same pattern or may be a different pattern.
壓印裝置10A為輥輪對輥輪(roll-to-roll)方式，具有例如：捲出輥輪21、分離輥輪22、2個回收輥輪23、2個陸續送出輥輪24、重合輥輪25及捲取輥輪26。 The imprint apparatus 10A is a roll-to-roll type, and has, for example, a reeling roller 21, a separation roller 22, two recovery rollers 23, two successive delivery rollers 24, and a reclosing roller. Wheel 25 and take-up roller 26.
於捲出輥輪21裝設有：將玻璃片11及2片玻璃保護片12重疊、渦旋狀地捲繞的玻璃輥輪。玻璃保護片12是於分離輥輪22及導引輥輪45與玻璃片11分離前，保護玻璃片11中形成第1成形材料之層15及第2成形材料之層16的面。 A glass roller that winds the glass sheet 11 and the two glass protective sheets 12 in a spiral shape is attached to the winding roller 21. The glass protective sheet 12 protects the surface of the glass sheet 11 in which the layer 15 of the first molding material and the layer 16 of the second molding material are formed before the separation roller 22 and the guide roller 45 are separated from the glass sheet 11.
又，捲出輥輪21所裝設之玻璃輥輪亦可是將玻璃片11及1片玻璃保護片12重疊、渦旋狀地捲繞的玻璃輥輪。 Further, the glass roller to which the take-up roller 21 is attached may be a glass roller in which the glass sheet 11 and the one glass protective sheet 12 are stacked and spirally wound.
捲取輥輪26將積層板19A及2片凹凸保護片13重疊、捲取，製成製品捲。 The winding roller 26 overlaps and winds the laminated plate 19A and the two unevenness preventing sheets 13 to form a product roll.
壓印裝置10A例如為光壓印裝置，更具有：第1 塗布器31、第2塗布器32、第1模具33、第2模具34、光源35、複數(例如2個)旋轉輥輪41、42、複數(例如2個)軋輥43、44、導引輥輪45、送出輥輪46、複數(例如4個)輔助輥輪51~54。 The imprint apparatus 10A is, for example, a photo imprint apparatus, and has: 1st The applicator 31, the second applicator 32, the first mold 33, the second mold 34, the light source 35, a plurality of (for example, two) rotating rolls 41, 42, a plurality of (for example, two) rolls 43, 44, and a guide roll The wheel 45, the delivery roller 46, and a plurality of (for example, four) auxiliary rollers 51 to 54.
第1塗布器31及第2塗布器32是於玻璃保護片12分離後，將成形材料塗布於玻璃片11的兩側，如圖7所示形成第1成形材料之層15及第2成形材料之層16。第1成形材料之層15及第2成形材料之層16包含有光硬化性樹脂。 After the glass protector 12 is separated, the first applicator 31 and the second applicator 32 apply a molding material to both sides of the glass sheet 11, and form a layer 15 of the first molding material and a second molding material as shown in FIG. Layer 16. The layer 15 of the first molding material and the layer 16 of the second molding material contain a photocurable resin.
第1模具33具有轉印至第1成形材料之層15表面的凹凸圖案。同樣地，第2模具34具有轉印至第2成形材料之層16表面的凹凸圖案。為了提升模具表面與成形材料的脫模性，第1模具33及第2模具34亦可是預先施以脫模處理的輥輪。 The first mold 33 has a concavo-convex pattern transferred onto the surface of the layer 15 of the first molding material. Similarly, the second mold 34 has a concavo-convex pattern transferred to the surface of the layer 16 of the second molding material. In order to improve the mold release property of the mold surface and the molding material, the first mold 33 and the second mold 34 may be rollers that have been subjected to a release treatment in advance.
第1模具33為環帶狀，環設於複數旋轉輥輪41、42及複數輔助輥輪51、52來進行輪轉。又，亦可未有全部或一部分複數輔助輥輪51、52。 The first die 33 is in the form of an endless belt, and is provided on the plurality of rotating rolls 41 and 42 and the plurality of auxiliary rolls 51 and 52 to perform the rotation. Further, all or a part of the plurality of auxiliary rollers 51, 52 may not be provided.
第2模具34為環帶狀，環設於複數旋轉輥輪43、44及複數輔助輥輪53、54來進行輪轉。又，亦可未有全部或一部分複數輔助輥輪53、54。 The second die 34 is in the form of an endless belt, and is provided in a plurality of rotating rolls 43 and 44 and a plurality of auxiliary rolls 53 and 54 for rotation. Further, all or a part of the plurality of auxiliary rollers 53 and 54 may not be provided.
光源35將光照射於夾在玻璃片11與第1模具33之間的第1成形材料之層15，使第1成形材料之層15硬化。又，光源35將光照射於夾在玻璃片11與第2模具34之間的第2成形材料之層16，使第2成形材料之層16硬化。 The light source 35 irradiates light to the layer 15 of the first molding material sandwiched between the glass sheet 11 and the first mold 33, and cures the layer 15 of the first molding material. Further, the light source 35 irradiates light onto the layer 16 of the second molding material sandwiched between the glass sheet 11 and the second mold 34 to cure the layer 16 of the second molding material.
從光源35發射的光，依序透過透明的第2模具 34、第2成形材料之層16及透明的玻璃片11，射入第1成形材料之層15。又，亦可是從光源35發射的光，依序透過透明的第1模具33、第1成形材料之層15及透明的玻璃片11，射入第2成形材料之層16。又，亦可使用複數光源。 The light emitted from the light source 35 is sequentially transmitted through the transparent second mold 34. The layer 16 of the second molding material and the transparent glass sheet 11 are incident on the layer 15 of the first molding material. Further, the light emitted from the light source 35 may sequentially pass through the transparent first mold 33, the layer 15 of the first molding material, and the transparent glass sheet 11, and may enter the layer 16 of the second molding material. Also, a complex light source can be used.
如圖8所示，一組旋轉輥輪41及軋輥43從軋輥43側，依序夾著第2模具34、第2成形材料之層16、玻璃片11、第1成形材料之層15及第1模具33送出。 As shown in Fig. 8, a group of rotating rolls 41 and rolls 43 are sandwiched between the second mold 34, the layer 16 of the second molding material, the glass sheet 11, the layer 15 of the first molding material, and the first step from the side of the roll 43. 1 mold 33 is sent out.
如圖9所示，玻璃片11及第1模具33是於***一組旋轉輥輪41與軋輥43之間後，至從另一組旋轉輥輪42及軋輥44之間送出的期間，利用玻璃片11之張力及第1模具33之張力而夾著第1成形材料之層15，與第1成形材料之層15整體地移動。在該期間，第1成形材料之層15接受來自光源35的光而慢慢地硬化，形成第1凹凸層17。玻璃片11的張力方向為玻璃片11的移動方向。第1模具33的張力方向為第1模具33的移動方向(輪轉方向)。 As shown in Fig. 9, the glass piece 11 and the first die 33 are inserted between the set of rotating rolls 41 and the rolls 43, and are fed between the other set of rotating rolls 42 and the rolls 44, using glass. The tension of the sheet 11 and the tension of the first mold 33 sandwich the layer 15 of the first molding material, and move integrally with the layer 15 of the first molding material. During this period, the layer 15 of the first molding material receives light from the light source 35 and is gradually cured to form the first uneven layer 17. The direction of tension of the glass sheet 11 is the moving direction of the glass sheet 11. The tension direction of the first die 33 is the moving direction (rotation direction) of the first die 33.
同樣地，玻璃片11及第2模具34是於***一組旋轉輥輪41與軋輥43之間後，至從另一組旋轉輥輪42及軋輥44之間送出的期間，利用玻璃片11之張力及第2模具34之張力而夾著成第2形材料之層16，與第2成形材料之層16整體地移動。在該期間，第2成形材料之層16接受來自光源35的光而慢慢地硬化，形成第2凹凸層18。玻璃片11的張力方向為玻璃片11的移動方向。第2模具34的張力方向為第2模具34的移動方向(輪轉方向)。 Similarly, the glass piece 11 and the second die 34 are inserted between the set of rotating rolls 41 and the rolls 43 and are fed between the other set of rotating rolls 42 and the rolls 44, and the glass sheets 11 are used. The tension and the tension of the second mold 34 sandwich the layer 16 of the second material and move integrally with the layer 16 of the second molding material. During this period, the layer 16 of the second molding material receives light from the light source 35 and is gradually cured to form the second uneven layer 18. The direction of tension of the glass sheet 11 is the moving direction of the glass sheet 11. The tension direction of the second mold 34 is the moving direction (rotation direction) of the second mold 34.
另一組旋轉輥輪42及軋輥44從軋輥44側，依序 夾著第2模具34、第2凹凸層18、玻璃片11、第1凹凸層17及第1模具33送出。 Another set of rotating roller 42 and roller 44 are from the side of the roll 44, in order The second mold 34, the second uneven layer 18, the glass sheet 11, the first uneven layer 17 and the first mold 33 are sandwiched.
導引輥輪45是對應於玻璃輥輪之輪徑，將從玻璃輥輪陸續送出的玻璃片11進行方向轉換，使玻璃片11於平坦狀態***旋轉輥輪41與軋輥43之間。玻璃片11的方向轉換，是利用玻璃片11沿著導引輥輪45彎曲變形而進行。 The guide roller 45 is a wheel diameter corresponding to the glass roller, and the glass piece 11 successively fed out from the glass roller is direction-converted, and the glass piece 11 is inserted between the rotating roller 41 and the roll 43 in a flat state. The direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roller 45.
送出輥輪46是將積層板19A於平坦狀態從旋轉輥輪42與軋輥44之間送出，對應於製品捲的輪徑，將積層板19A進行方向轉換。積層板19A的方向轉換，是利用積層板19A沿著送出輥輪46彎曲變形而進行。 The delivery roller 46 feeds the laminated plate 19A between the rotary roller 42 and the roller 44 in a flat state, and the laminated plate 19A is direction-converted in accordance with the wheel diameter of the product roll. The direction change of the laminated plate 19A is performed by bending and deforming the laminated plate 19A along the delivery roller 46.
接著，針對上述構成之壓印裝置10A的動作(壓印方法)作說明。壓印裝置10A的各種動作，是在以微電腦等所構成之控制器的控制下來進行。於以下的說明中，為了方便，主要著重於玻璃片11的一部分，說明壓印裝置10A的各種動作。 Next, the operation (imprint method) of the imprint apparatus 10A having the above configuration will be described. The various operations of the imprint apparatus 10A are performed under the control of a controller constituted by a microcomputer or the like. In the following description, for the sake of convenience, mainly focusing on a part of the glass sheet 11, various operations of the imprint apparatus 10A will be described.
首先，捲出輥輪21旋轉，玻璃片11及玻璃保護片12從玻璃輥輪連續地陸續送出。玻璃片11及玻璃保護片12藉由通過分離輥輪22及導引輥輪45之間而分離。 First, the take-up roller 21 is rotated, and the glass sheet 11 and the glass protective sheet 12 are continuously fed out from the glass roller. The glass sheet 11 and the glass protective sheet 12 are separated by passing between the separation roller 22 and the guide roller 45.
導引輥輪45對應於玻璃輥輪之輪徑，將玻璃片11進行方向轉換，使玻璃片11於平坦狀態***一組的旋轉輥輪41與軋輥43之間。玻璃片11的方向轉換，是利用玻璃片11沿著導引輥輪45彎曲變形而進行。 The guide roller 45 corresponds to the wheel diameter of the glass roller, and the glass sheet 11 is direction-converted so that the glass sheet 11 is inserted between the set of rotating rollers 41 and the rolls 43 in a flat state. The direction change of the glass sheet 11 is performed by bending and deforming the glass sheet 11 along the guide roller 45.
接著，如圖7所示，第1塗布器31及第2塗布器32將成形材料塗布於玻璃片11的兩側，形成第1成形材料之 層15、第2成形材料之層16。 Next, as shown in FIG. 7, the first applicator 31 and the second applicator 32 apply a molding material to both sides of the glass sheet 11, thereby forming a first molding material. Layer 15, layer 16 of the second molding material.
接著，如圖8所示，一組旋轉輥輪41及軋輥43從軋輥43側，依序夾著第2模具34、第2成形材料之層16、玻璃片11、第1成形材料之層15及第1模具33送出。 Next, as shown in FIG. 8, a group of rotating rolls 41 and rolls 43 are sequentially sandwiched between the second mold 34, the layer 16 of the second molding material, the glass sheet 11, and the layer 15 of the first molding material from the side of the roll 43. And the first mold 33 is sent out.
如圖6所示，玻璃片11及第1成形材料之層15是於平坦狀態***一組的旋轉輥輪41與軋輥43之間。另一方面，第1模具33一邊沿著旋轉輥輪41彎曲變形，以使空氣不進入其與第1成形材料之層15之間，一邊***旋轉輥輪41及軋輥43之間，與第1成形材料之層15密接。 As shown in Fig. 6, the glass sheet 11 and the layer 15 of the first molding material are interposed between a group of rotating rolls 41 and rolls 43 in a flat state. On the other hand, the first die 33 is bent and deformed along the rotating roller 41 so that air is not inserted between the rotating roller 41 and the roll 43 while entering the first molding material. The layer 15 of the forming material is in close contact.
如圖9所示，玻璃片11及第1模具33於***一組旋轉輥輪41與軋輥43之間後，至從另一組旋轉輥輪42及軋輥44之間送出的期間，利用玻璃片11之張力及第1模具33之張力而夾著第1成形材料之層15，與第1成形材料之層15整體地移動。在該期間，第1成形材料之層15接受來自光源35的光而慢慢地硬化，形成第1凹凸層17。 As shown in Fig. 9, after the glass piece 11 and the first die 33 are inserted between the pair of rotating rolls 41 and the rolls 43, and are fed from between the other set of rotating rolls 42 and the rolls 44, the glass sheets are used. The tension of 11 and the tension of the first mold 33 sandwich the layer 15 of the first molding material, and move integrally with the layer 15 of the first molding material. During this period, the layer 15 of the first molding material receives light from the light source 35 and is gradually cured to form the first uneven layer 17.
又，如圖6所示，玻璃片11及第2成形材料之層16是於平坦狀態***一組的旋轉輥輪41與軋輥43之間。另一方面，第2模具34一邊沿著軋輥43彎曲變形，以使空氣不進入其與第2成形材料之層16之間，一邊***旋轉輥輪41及軋輥43之間，與第2成形材料之層16密接。 Further, as shown in FIG. 6, the glass sheet 11 and the layer 16 of the second molding material are interposed between the rotating roller 41 and the roller 43 in a flat state. On the other hand, the second mold 34 is bent and deformed along the roll 43 so that air does not enter between the rotating roll 41 and the roll 43 while the air does not enter between the layer 16 of the second molding material, and the second molding material. The layer 16 is in close contact.
如圖9所示，玻璃片11及第2模具34於***一組旋轉輥輪41與軋輥43之間後，至從另一組旋轉輥輪42及軋輥44之間送出的期間，利用玻璃片11之張力及第2模具34之張力而夾著第2成形材料之層16，與第2成形材料之層16 整體地移動。在該期間，第2成形材料之層16接受來自光源35的光而慢慢地硬化，形成第2凹凸層18。 As shown in Fig. 9, after the glass piece 11 and the second die 34 are inserted between the pair of rotating rolls 41 and the rolls 43, and are fed from between the other set of rotating rolls 42 and the rolls 44, the glass sheets are used. The tension of 11 and the tension of the second mold 34 sandwich the layer 16 of the second molding material and the layer 16 of the second molding material. Move as a whole. During this period, the layer 16 of the second molding material receives light from the light source 35 and is gradually cured to form the second uneven layer 18.
接著，旋轉輥輪42及軋輥44從軋輥44側，依序夾著第2模具34、第2凹凸層18、玻璃片11、第1凹凸層17及第1模具33送出。 Then, the rotating roller 42 and the roller 44 are sequentially fed from the side of the roll 44 with the second die 34, the second uneven layer 18, the glass piece 11, the first uneven layer 17 and the first die 33.
玻璃片11及第1凹凸層17是於平坦狀態從旋轉輥輪42與軋輥44之間送出。另一方面，第1模具33沿著旋轉輥輪42彎曲變形，以讓其與第1凹凸層17順利地分離。 The glass sheet 11 and the first uneven layer 17 are fed from between the rotating roller 42 and the roll 44 in a flat state. On the other hand, the first die 33 is bent and deformed along the rotating roller 42 so as to be smoothly separated from the first uneven layer 17 .
玻璃片11及第2凹凸層18是於平坦狀態從旋轉輥輪42與軋輥44之間送出。另一方面，第2模具34沿著旋轉輥輪44彎曲變形，以讓其與第2凹凸層18順利地分離。 The glass sheet 11 and the second uneven layer 18 are fed from between the rotating roller 42 and the roll 44 in a flat state. On the other hand, the second die 34 is bent and deformed along the rotating roller 44 so as to be smoothly separated from the second uneven layer 18.
依此，如圖10所示，可獲得包含玻璃片11、第1凹凸層17及第2凹凸層18之積層板19A。 Accordingly, as shown in FIG. 10, the laminated plate 19A including the glass sheet 11, the first uneven layer 17, and the second uneven layer 18 can be obtained.
接著，送出輥輪46及重合輥輪25使積層板19A與從2個保護片輥輪陸續送出之凹凸保護片13重合。凹凸保護片13是以樹脂薄膜、紙等所構成。2片凹凸保護片13覆蓋第1凹凸層17及第2凹凸層18，防止第1凹凸層17及第2凹凸層18附著異物(例如灰塵)或損傷。 Next, the delivery roller 46 and the overlap roller 25 superimpose the laminated plate 19A on the unevenness protection sheet 13 which is successively fed from the two protective sheet rollers. The unevenness protection sheet 13 is composed of a resin film, paper, or the like. The two unevenness-protecting sheets 13 cover the first uneven layer 17 and the second uneven layer 18, and prevent foreign matter (for example, dust) or damage from adhering to the first uneven layer 17 and the second uneven layer 18.
送出輥輪46將積層板19A於平坦狀態從旋轉輥輪42與軋輥44之間送出，對應於製品捲的輪徑，將積層板19A進行方向轉換。 The delivery roller 46 feeds the laminated plate 19A between the rotary roller 42 and the roller 44 in a flat state, and the laminated plate 19A is direction-converted in accordance with the wheel diameter of the product roll.
接著，捲取輥輪26將積層板19A及夾著積層板19A之2片凹凸保護片13重疊、捲取，製成製品捲。 Then, the winding roller 26 overlaps and winds up the laminated plate 19A and the two unevenness preventing sheets 13 sandwiching the laminated board 19A to form a product roll.
又，凹凸保護片13的個數可為1個。例如，渦旋 地捲繞時，可只有積層板19A之徑方向外側層的第1凹凸層17與凹凸保護片13重疊。1個凹凸保護片13可保護第1凹凸層17及第2凹凸層18兩者，製品捲的輪徑變小，製品捲的保管會變得容易。又，例如，渦旋地捲繞時，可只有積層板19A之內側層的第2凹凸層18與凹凸保護片13重疊。此時，製品捲以專用的保護片覆蓋來保管。 Further, the number of the unevenness protection sheets 13 may be one. For example, vortex At the time of the ground winding, only the first uneven layer 17 of the outer layer in the radial direction of the laminated plate 19A may overlap with the uneven protective sheet 13. The one unevenness protection sheet 13 can protect both the first uneven layer 17 and the second uneven layer 18, and the diameter of the product roll can be reduced, and the storage of the product roll can be facilitated. Further, for example, when the vortex is wound, only the second uneven layer 18 on the inner layer of the laminated plate 19A may be overlapped with the uneven protective sheet 13. At this time, the product roll is covered with a dedicated protective sheet and stored.
如以上說明，根據本實施形態，與第1實施形態相同，如圖6所示地玻璃片11於平坦狀態通過複數組旋轉輥輪41、42與軋輥43、44之間。因此，因第1模具33及第2模具34之凹凸圖案轉印時、或第1模具33及第2模具34與第1凹凸層17及第2凹凸層18分離時，易碎的玻璃片11保持著平坦，故可抑制玻璃片11的破損。 As described above, according to the present embodiment, as in the first embodiment, as shown in Fig. 6, the glass piece 11 passes between the plurality of rotating rolls 41, 42 and the rolls 43, 44 in a flat state. Therefore, when the concave-convex pattern of the first mold 33 and the second mold 34 is transferred, or when the first mold 33 and the second mold 34 are separated from the first uneven layer 17 and the second uneven layer 18, the fragile glass sheet 11 is broken. Since it is kept flat, the breakage of the glass piece 11 can be suppressed.
又，根據本實施形態，第1成形材料之層15及第2成形材料之層16夾著玻璃片11相互於相反側而形成，因此，成形材料硬化時，玻璃片11不易彎曲。又，將第1凹凸層17與第1模具33分離之力，以及將第2凹凸層18與第2模具34分離之力相互地作用於相反方向，因此，使玻璃片11的狀態安定。又，因第1凹凸層17與第2凹凸層18同時地形成，故異於分別形成的情況，不需調整位置。 Further, according to the present embodiment, the layer 15 of the first molding material and the layer 16 of the second molding material are formed on the opposite sides of each other with the glass sheet 11 interposed therebetween. Therefore, when the molding material is cured, the glass sheet 11 is less likely to be bent. Further, the force for separating the first uneven layer 17 from the first die 33 and the force for separating the second uneven layer 18 from the second die 34 are mutually opposed to each other, so that the state of the glass piece 11 is stabilized. Further, since the first uneven layer 17 and the second uneven layer 18 are simultaneously formed, it is not necessary to adjust the position when they are formed separately.
以上，利用第1~第2實施形態說明壓印方法及壓印裝置，但本發明並不限定於上述實施形態。記載於專利請求範圍之本發明要旨的範圍內，可作各式各樣的變形、變更。 The imprint method and the imprint apparatus have been described above using the first to second embodiments, but the present invention is not limited to the above embodiment. Various modifications and changes can be made without departing from the spirit and scope of the invention.
例如，上述實施形態之壓印裝置，是輥輪對輥 輪方式，但本發明不限定於此。例如，壓印裝置可不於捲取輥輪捲取積層板，而利用切斷器切斷成特定的大小。不於捲取輥輪捲取積層板時，積層板可不沿著送出輥輪彎曲變形。又，壓印裝置亦可將凹凸層形成於：從玻璃成形裝置(例如)連續地供給之玻璃片上，來取代將凹凸層形成於：從玻璃輥輪陸續送出之玻璃片上。 For example, the imprint apparatus of the above embodiment is a roller-to-roller Wheel mode, but the invention is not limited thereto. For example, the embossing device may not take up the laminate by the take-up roller, but cut it to a specific size by the cutter. When the laminate is not taken up by the take-up roller, the laminate may not be bent and deformed along the delivery roller. Further, the imprint apparatus may be formed by forming a concavo-convex layer on a glass sheet continuously supplied from a glass forming apparatus (for example) instead of forming the uneven layer on a glass sheet which is successively fed from a glass roll.
又，上述實施形態之壓印裝置是光壓印裝置，但亦可為熱壓印裝置。於該情況下，成形材料是包含熱可塑性樹脂來取代光硬化性樹脂。熱可塑性樹脂可使用用於熱壓印法之一般性樹脂，可舉例例如丙烯酸樹脂、聚碳酸酯樹脂、烯烴系樹脂等。熱可塑性樹脂亦可準備成溶液的形態，塗布於玻璃片上進行乾燥。又，熱可塑性樹脂亦可加熱軟化後，再塗布於玻璃片上進行冷卻。於熱壓印法中，藉由加熱使包含熱可塑性樹脂的成形材料之層軟化，將模具壓附至已軟化之成形材料之層的表面，再冷卻成形材料之層使其固化，藉此，形成凹凸層。加熱源可使用照射加熱光的光源(例如鹵素燈、雷射光)、加熱器等。加熱溫度是熱可塑性樹脂的玻璃轉移溫度以上。壓附模具之工程與加熱成形材料之層的工程，任一工程皆可在前面，亦可同時地進行。亦可利用加熱模具，將成形材料之層加熱。 Further, the imprint apparatus of the above embodiment is a photo imprint apparatus, but may be a thermal imprint apparatus. In this case, the molding material contains a thermoplastic resin instead of the photocurable resin. As the thermoplastic resin, a general resin used for the hot stamping method can be used, and examples thereof include an acrylic resin, a polycarbonate resin, and an olefin resin. The thermoplastic resin may also be prepared in the form of a solution and applied to a glass sheet for drying. Further, the thermoplastic resin may be softened by heating and then applied to a glass piece for cooling. In the hot stamping method, a layer of a molding material containing a thermoplastic resin is softened by heating, a mold is pressed onto a surface of a layer of the softened molding material, and a layer of the molding material is cooled and solidified. A textured layer is formed. As the heating source, a light source (for example, a halogen lamp or a laser beam) that irradiates the heating light, a heater, or the like can be used. The heating temperature is equal to or higher than the glass transition temperature of the thermoplastic resin. The engineering of the die-casting mold and the layer of the heat-molding material can be carried out either in the front or simultaneously. The layer of the shaped material can also be heated using a heated mold.
又，上述實施形態的玻璃輥輪是將玻璃片及玻璃保護片重疊、渦旋狀地捲繞，但亦可僅將玻璃片渦旋狀地捲繞。於該情況下，不須分離輥輪及回收輥輪。 Further, in the glass roller of the above-described embodiment, the glass piece and the glass protective sheet are wound and spirally wound, but only the glass piece may be wound in a spiral shape. In this case, it is not necessary to separate the roller and the recovery roller.
又，上述實施形態的製品捲是將積層板及凹凸保護片重疊、渦旋狀地捲繞，但亦可僅將積層板渦旋狀地捲繞。於該情況下，不須陸續送出輥輪及重合輥輪。 Further, in the product roll of the above-described embodiment, the laminated sheet and the uneven protective sheet are stacked and spirally wound, but the laminated sheet may be wound only in a spiral shape. In this case, it is not necessary to continuously send the roller and the reel roller.
又，上述實施形態的塗布器是將成形材料塗布於玻璃片上，但亦可將成形材料塗布於模具上。成形材料之層是於轉印工程中夾在玻璃片與模具之間，使模具之凹凸圖案轉印至成形材料之層。 Further, in the applicator of the above embodiment, the molding material is applied to the glass sheet, but the molding material may be applied to the mold. The layer of the molding material is sandwiched between the glass sheet and the mold in the transfer process, and the concave and convex pattern of the mold is transferred to the layer of the molding material.
本申請案是基於在2012年7月10日日本專利局申請之特願2012-154509號，主張優先權，引用特願2012-154509號之全內容至本申請案。 The present application is based on Japanese Patent Application No. 2012-154509, filed on Jul. 10, 2012, the priority of which is hereby incorporated by reference.
10‧‧‧壓印裝置 10‧‧‧ Imprinting device
11‧‧‧玻璃片 11‧‧‧Stainless glass
12‧‧‧玻璃保護片 12‧‧‧glass protection film
13‧‧‧凹凸保護片 13‧‧‧ Bump protection sheet
21‧‧‧捲出輥輪 21‧‧‧Rolling roller
22‧‧‧分離輥輪 22‧‧‧Separation roller
23‧‧‧回收輥輪 23‧‧‧Recycling roller
24‧‧‧陸續送出輥輪 24‧‧‧Continuous delivery of rollers
25‧‧‧重合輥輪 25‧‧‧Reclosing roller
26‧‧‧捲取輥輪 26‧‧‧Winding roller
31‧‧‧塗布器 31‧‧‧Applicator
33‧‧‧模具 33‧‧‧Mold
35‧‧‧光源 35‧‧‧Light source
41、42‧‧‧旋轉輥輪 41, 42‧‧‧Rotating roller
43、44‧‧‧軋輥 43, 44‧‧‧ rolls
45‧‧‧導引輥輪 45‧‧‧Guide roller
46‧‧‧送出輥輪 46‧‧‧Send the roller
51、52‧‧‧輔助輥輪 51, 52‧‧‧Auxiliary roller
Claims (6)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012154509A JP2015167152A (en) | 2012-07-10 | 2012-07-10 | Imprint method, and imprint device |
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| Publication Number | Publication Date |
|---|---|
| TW201408472A true TW201408472A (en) | 2014-03-01 |
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| TW102124509A TW201408472A (en) | 2012-07-10 | 2013-07-09 | Imprint method, and imprinting device |
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| Country | Link |
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| JP (1) | JP2015167152A (en) |
| TW (1) | TW201408472A (en) |
| WO (1) | WO2014010516A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI603376B (en) * | 2014-07-15 | 2017-10-21 | 佳能股份有限公司 | Imprint apparatus, and method of manufacturing article |
| TWI698320B (en) * | 2015-06-23 | 2020-07-11 | 日商東麗股份有限公司 | Method and device for manufacturing surface structure film |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6535535B2 (en) * | 2015-07-29 | 2019-06-26 | 東芝機械株式会社 | Film pattern transfer apparatus and film pattern transfer method |
| IL270791B2 (en) * | 2017-05-25 | 2023-10-01 | Magic Leap Inc | Double-sided imprinting |
| CA3078774A1 (en) | 2017-10-26 | 2019-05-02 | Magic Leap, Inc. | Augmented reality display having liquid crystal variable focus element and roll-to-roll method and apparatus for forming the same |
| JP7413097B2 (en) * | 2019-03-25 | 2024-01-15 | フタムラ化学株式会社 | Method for producing a thin plate-like laminate having a film-like resin layer |
| KR20210146332A (en) * | 2019-03-25 | 2021-12-03 | 후타무라 가가쿠 가부시키가이샤 | Method for producing a thin plate-like laminate having a film-like resin layer |
| JP7413096B2 (en) * | 2019-03-25 | 2024-01-15 | フタムラ化学株式会社 | Manufacturing device for thin plate-like laminate having film-like resin layer |
| CN111016209A (en) * | 2020-01-03 | 2020-04-17 | 邢尔路 | Novel hollowed-out ground mat processing device and process |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH11203730A (en) * | 1998-01-12 | 1999-07-30 | Sony Corp | Production of information recording medium and apparatus for production of information recording medium |
| JP2010137358A (en) * | 2007-04-12 | 2010-06-24 | Kyowa Hakko Chemical Co Ltd | Method and apparatus for forming pattern |
| JP4406452B2 (en) * | 2007-09-27 | 2010-01-27 | 株式会社日立製作所 | Belt-shaped mold and nanoimprint apparatus using the same |
| JP5065880B2 (en) * | 2007-12-27 | 2012-11-07 | 株式会社日立産機システム | Fine structure transfer apparatus and fine structure transfer method |
| CN102574327B (en) * | 2009-10-21 | 2014-09-03 | 旭硝子株式会社 | Imprint mold, production method thereof, imprint device, and imprint method |
| US20120301569A1 (en) * | 2010-01-19 | 2012-11-29 | Hitachi Industrial Equipement Systems Co., Ltd. | Pattern transferring apparatus and pattern transferring method |
-
2012
- 2012-07-10 JP JP2012154509A patent/JP2015167152A/en active Pending
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2013
- 2013-07-04 WO PCT/JP2013/068430 patent/WO2014010516A1/en active Application Filing
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI603376B (en) * | 2014-07-15 | 2017-10-21 | 佳能股份有限公司 | Imprint apparatus, and method of manufacturing article |
| US10372033B2 (en) | 2014-07-15 | 2019-08-06 | Canon Kabushiki Kaisha | Imprint apparatus, and method of manufacturing article |
| TWI698320B (en) * | 2015-06-23 | 2020-07-11 | 日商東麗股份有限公司 | Method and device for manufacturing surface structure film |
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| JP2015167152A (en) | 2015-09-24 |
| WO2014010516A1 (en) | 2014-01-16 |
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