TW201402268A - A machine tool's vibrating deck - Google Patents
A machine tool's vibrating deck Download PDFInfo
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- TW201402268A TW201402268A TW101125328A TW101125328A TW201402268A TW 201402268 A TW201402268 A TW 201402268A TW 101125328 A TW101125328 A TW 101125328A TW 101125328 A TW101125328 A TW 101125328A TW 201402268 A TW201402268 A TW 201402268A
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本發明係有關於一種工具機振動載台，更詳而言之，是一種在氣浮環境下帶動例如為工作台或刀具主軸的加工器件振動的工具機振動載台。 The present invention relates to a machine tool vibration stage, and more particularly to a machine tool vibration stage that drives a machining device such as a table or a tool spindle in an air floating environment.
按，傳統工具機通常會具有傳動機構，以讓工具機的工作台移動，而使料件和切削刀具之間進行相對運動，以對料件進行切削。常見的工具機傳動機構係使用導螺桿，並用線性馬達驅使導螺桿旋轉，使與導螺桿接觸耦合的機構進行直線運動，而達成傳動的效果，使工作台直線移動。導螺桿與耦合機構間通常會透過撓性連軸器完成連接，當撓性連軸器撓性變形到一定程度時，導螺桿才能將力量傳遞至耦合機構，故會有力量傳遞延遲的問題。 Press, the conventional machine tool usually has a transmission mechanism to move the table of the machine tool, and the relative movement between the material member and the cutting tool is performed to cut the material. The common machine tool transmission mechanism uses a lead screw, and uses a linear motor to drive the lead screw to rotate, so that the mechanism that is in contact with the lead screw is linearly moved, and the effect of the transmission is achieved, so that the table moves linearly. The lead screw and the coupling mechanism are usually connected through a flexible coupling. When the flexible coupling is flexibly deformed to a certain extent, the lead screw can transmit the force to the coupling mechanism, so there is a problem of power transmission delay.
此外，導螺桿與耦合機構間的接觸面會存在有摩擦力，使得導螺桿的溫度會隨著傳動進行時間的增加而逐漸升高，當導螺桿溫度增高時，受到熱脹冷縮效應的影響，導螺桿會發生形變，使得導螺桿每轉行進的距離改變，進而影響到工具機的加工精度。再者，導螺桿與耦合機構間的摩擦力，還會使工作台的移動速度受到限制，而無法進行例如對硬脆材料的高速加工，且因摩擦力的存在，使得工具機運作時會產生令人無法接 受的振動與噪音，並且工具機的能耗也無法有效降低。 In addition, there is friction between the contact surface between the lead screw and the coupling mechanism, so that the temperature of the lead screw will gradually increase as the transmission time increases. When the temperature of the lead screw increases, it is affected by the thermal expansion and contraction effect. The lead screw will be deformed, so that the distance traveled by the lead screw per revolution changes, which in turn affects the machining accuracy of the machine tool. Moreover, the friction between the lead screw and the coupling mechanism also limits the moving speed of the table, and it is impossible to perform high-speed machining such as hard and brittle materials, and the frictional force causes the machine to operate. Unreachable The vibration and noise are affected, and the energy consumption of the machine tool cannot be effectively reduced.
另外，習知的工具機振動輔助加工方向，通常設計沿著刀具主軸方向或與工作台平面垂直的方向上，而罕見於刀具主軸垂直的平面方向進行高速同步換向振動。如使用銑刀與雕刻刀具加工時，其切削作用方向常需延伸於工作台平面。例如一般振動加工的旋轉主軸將振動子安裝於馬達內側，或與馬達樞軸直接連結，或經皮帶等傳動系與振動源耦合牽制等。但其形制會限制其振動方向(例Z方向)與切削方向(X-Y方向)互為垂直，須透過刀具端面的特殊幾何形狀(如錐狀、圓球狀刀尖)來轉換振動方向，勢必影響輔助振動的作用。且旋轉軸馬達受限於振動子的供電方式通常無法提供高轉速，而且還有散熱不易及所需之耦合機構複雜，組裝精密度、與維修困難等問題。 In addition, the conventional machine tool vibration assists the machining direction, usually in the direction of the tool spindle or in the direction perpendicular to the table plane, and the high-speed synchronous commutation vibration is rare in the plane direction perpendicular to the tool spindle. When milling cutters and engraving tools are used, the cutting action direction often needs to extend to the table plane. For example, a general rotating shaft for vibration processing mounts a vibrator on the inside of the motor, or directly connected to the motor pivot, or is coupled to a vibration source via a transmission system such as a belt. However, its shape will limit its vibration direction (such as the Z direction) and the cutting direction (XY direction) perpendicular to each other. The special geometry of the tool end face (such as the tapered shape, the ball-shaped tool tip) must be used to change the vibration direction, which will inevitably affect The role of auxiliary vibration. Moreover, the rotary shaft motor is limited by the power supply mode of the vibrator, and generally cannot provide high rotation speed, and there are problems such as difficulty in heat dissipation and complicated coupling mechanism required, assembly precision, and maintenance difficulty.
基於前述，如何提供一種工具機載台，以降低能耗並在低振動與噪音的情況下提供高速加工，又具可交換性與可攜性，可降低習知旋轉主軸的建置之精密度要求、與具拆卸、維護保養成本優勢等，為所屬技術領域人士所迫切需要解決的問題。 Based on the foregoing, how to provide a tool machine platform to reduce energy consumption and provide high-speed machining under low vibration and noise, and also has interchangeability and portability, which can reduce the precision requirements of the conventional rotating spindle. With the advantages of disassembly, maintenance cost, etc., it is an urgent problem to be solved by those skilled in the art.
鑒於上述先前技術之種種問題，本發明之主要目的在於提供一種工具機振動載台，以在低耗能、低振動與低噪音的情況下對料件進行高速加工。 In view of the above problems of the prior art, it is a primary object of the present invention to provide a machine tool vibration stage for high speed machining of material parts with low energy consumption, low vibration and low noise.
為達到上述目的以及其它目的，本發明提供一種工具機振動載台，係用以連接氣體供應源，而讓加工器件在氣浮狀態下 振動，具有振動平板、氣浮平台、氣體接收道、多個致動器以及回位彈性體。振動平板係供設置加工器件。氣浮平台係供置放該振動平板。氣體接收道係設於振動平板或氣浮平台，以接收氣體供應源的氣體，而在振動平板與氣浮平台間形成氣浮膜。多個致動器係分別設於氣浮平台不同方向的側邊，以分別在不同方向致動振動平板。回位彈性體兩端係分別接觸氣浮平台側邊與振動平板，以提供彈性力使受致動的振動平板回位。 In order to achieve the above and other objects, the present invention provides a machine tool vibration stage for connecting a gas supply source and allowing the processing device to be in an air floating state. Vibration, with vibrating plate, air floating platform, gas receiving channel, multiple actuators and return elastomer. The vibrating plate is used to set the processing device. The air floating platform is for placing the vibration plate. The gas receiving channel is disposed on the vibrating plate or the air floating platform to receive the gas of the gas supply source, and forms an air floating film between the vibrating plate and the air floating platform. A plurality of actuators are respectively disposed on the sides of the air floating platform in different directions to respectively actuate the vibrating plate in different directions. The two ends of the returning elastic body respectively contact the side of the air floating platform and the vibrating plate to provide an elastic force to return the actuated vibrating plate.
另外，工具機振動載台復可包括多個分別對應一個致動器而設置的抵靠墊，致動器的致動端係透過所對應的抵靠墊間接抵靠振動平板的側邊，以分別在不同方向致動該振動平板。抵靠墊可具有光滑表面，以與所對應致動器的致動端面滑動接觸。抵靠墊也可為僅能傳遞軸向力的軸向壓縮彈性體。抵靠墊係可分別設於振動平板不同方向的側邊。致動器係可為超音波線性致動器。氣浮平台多個方向的側邊形成有側壁，各該側壁具有供穿過致動器的穿孔，以使各方向致動器的致動端得穿過氣浮平台的側壁，進入由氣浮平台與側壁所構成的內部空間。各該通氣溝槽係可由放射狀氣道連通，且分佈係可呈矩形環狀、或圓形環狀。氣浮平台頂面係可由石材或陶瓷材料所構成。本發明工具機振動載台可具有多個分設於各該致動器對向側的回位彈性體，以提供彈性力而使振動平板回位。 In addition, the machine tool vibration carrier may include a plurality of abutting pads respectively disposed corresponding to one actuator, and the actuating end of the actuator is indirectly opposed to the side of the vibrating plate through the corresponding abutting pads to respectively The vibrating plate is actuated in different directions. The abutment pad can have a smooth surface for sliding contact with the actuating end face of the corresponding actuator. The abutment pad can also be an axially compressing elastomer that can only transmit axial forces. The abutment pads can be respectively disposed on the sides of the vibrating plate in different directions. The actuator system can be an ultrasonic linear actuator. The sides of the air floating platform are formed with side walls in a plurality of directions, each of the side walls having a through hole for passing through the actuator, so that the actuating end of each direction actuator passes through the side wall of the air floating platform to enter the air floatation The internal space formed by the platform and the side walls. Each of the venting grooves may be connected by a radial air passage, and the distribution may be a rectangular ring shape or a circular ring shape. The top surface of the air floating platform may be composed of stone or ceramic material. The machine tool vibrating stage of the present invention may have a plurality of returning elastic bodies disposed on opposite sides of each of the actuators to provide an elastic force to return the vibrating plate.
再者，本發明復提供一種工具機振動載台，係用以連接氣體供應源，而讓加工器件在氣浮狀態下振動，具有振動平板、 氣浮平台、氣體接收道、多個電磁致動器以及回位彈簧。振動平板係供設置加工器件，在不同方向的側邊可具有多個磁性墊。氣浮平台係可供擺放振動平板。氣體接收道係設於振動平板或氣浮平台，以接收氣體供應源的氣體，而可在振動平板與氣浮平台間形成氣浮膜。多個電磁致動器係可分別設於氣浮平台不同方向的側邊，並分別對應一個磁性墊而設置，各該電磁致動器係透過對所對應的磁性墊施加磁力，而分別在不同的方向致動振動平板。 Furthermore, the present invention provides a machine tool vibration stage for connecting a gas supply source, and allowing the processing device to vibrate in an air floating state, having a vibration plate, Air floating platform, gas receiving channel, multiple electromagnetic actuators and return springs. The vibrating plate is provided with a processing device, and a plurality of magnetic pads may be provided on the sides in different directions. The air floating platform is suitable for placing a vibrating plate. The gas receiving channel is disposed on the vibrating plate or the air floating platform to receive the gas of the gas supply source, and an air floating film can be formed between the vibrating plate and the air floating platform. A plurality of electromagnetic actuators may be respectively disposed on sides of different directions of the air floating platform, and respectively disposed corresponding to one magnetic pad, and each of the electromagnetic actuators transmits magnetic force to the corresponding magnetic pad, and is different The direction of the vibration plate is actuated.
此外，本發明復提供一種工具機振動載台，係用以連接氣體供應源，而讓加工器件在氣浮狀態下振動，具有第一振動平板、第二振動平板、氣浮平台、多個氣體接收道以及多個致動器。第一振動平板係供設置該加工器件。第二振動平板係供置放該第一振動平板，第二振動平板的側邊具有推抵塊。氣浮平台係可供置放第二振動平板。多個氣體接收道係分別設於第一振動平板、第二振動平板或氣浮平台，以接收氣體供應源的氣體，而在第一振動平板與第二振動平板、和第二振動平板與氣浮平台間形成氣浮膜。多個致動器的致動端係分別連接第一、第二振動平板，以在不同的方向分別致動第一、第二振動平板，推抵塊係在第二振動平板致動方向推抵與第一振動平板連接的致動器。 In addition, the present invention provides a machine tool vibration stage for connecting a gas supply source, and allowing the processing device to vibrate in an air floating state, having a first vibrating plate, a second vibrating plate, an air floating platform, and a plurality of gases. The receiving track and the plurality of actuators. The first vibrating plate is provided for the processing device. The second vibrating plate is configured to place the first vibrating plate, and the side of the second vibrating plate has a pushing block. The air floating platform is for placing a second vibrating plate. The plurality of gas receiving channels are respectively disposed on the first vibrating plate, the second vibrating plate or the air floating platform to receive the gas of the gas supply source, and the first vibrating plate and the second vibrating plate, and the second vibrating plate and the gas An air floating film is formed between the floating platforms. Actuating ends of the plurality of actuators are respectively connected to the first and second vibrating plates to respectively actuate the first and second vibrating plates in different directions, and the pushing block is pushed in the second vibrating plate actuating direction An actuator coupled to the first vibrating plate.
其中，工具機振動載台復可具有第一彈性體及第二彈性體，第一彈性體兩端分別可連接第一振動平板與第二振動平 板，以提供彈性力使在第二振動平板上致動後的第一振動平板回位。第二彈性體兩端分別可連接第二振動平板與氣浮平台，以提供彈性力使在氣浮平台上致動後的第二振動平板回位。第二振動平板的推抵塊可具有孔槽，係供穿過與第一振動平板連接致動器的致動端。上述平台通氣溝槽與平板通氣溝槽的分佈係呈矩形環狀、或圓形環狀。 Wherein, the vibration machine of the machine tool can have a first elastic body and a second elastic body, and the two ends of the first elastic body can be respectively connected to the first vibration plate and the second vibration flat The plate is configured to provide an elastic force to return the first vibrating plate that is actuated on the second vibrating plate. The second vibrating plate and the air floating platform are respectively connected to the two ends of the second elastic body to provide an elastic force to return the second vibrating plate after being actuated on the air floating platform. The push block of the second vibrating plate may have a slot for passing through an actuating end of the actuator coupled to the first vibrating plate. The distribution of the platform ventilation groove and the flat ventilation groove is a rectangular ring shape or a circular ring shape.
此外，第一振動平板、第二振動平板與氣浮平台係由石材或陶瓷材料所構成。工具機振動載台復可包括多條通氣溝槽，各該通氣溝槽係分別設於該第一振動平板、第二振動平板或氣浮平台，並分別與氣體接收道連通，以接收氣體而在第一振動平板與第二振動平板間、及第二振動平板與氣浮平台間形成氣浮膜。 Further, the first vibrating plate, the second vibrating plate, and the air floating platform are made of stone or ceramic material. The tool vibration table can include a plurality of ventilation grooves, each of the ventilation grooves being respectively disposed on the first vibrating plate, the second vibrating plate or the air floating platform, and respectively communicating with the gas receiving channel to receive the gas. An air floating film is formed between the first vibrating plate and the second vibrating plate, and between the second vibrating plate and the air floating platform.
相較於先前技術，本發明所提供的工具機振動載台係具有氣浮平台，可對振動平板提供氣浮力，使致動器對振動平板的致動僅需克服氣體粘滯摩擦力，是以，致動器僅提供微小力量就能使振動平板致動，進而可對硬脆材料進行高速加工，且振動平板振動時並不會與氣浮平台接觸而發生摩擦碰撞，故本發明工具機振動載台在運作時並不會導致過大的振動、噪音與能耗。另外，本發明的工具機振動載台得以直接與傳統的工具機主軸結合，以進行多維度短行程的高速往復振動，而可對硬脆材料進行高速高品質加工。 Compared with the prior art, the vibration machine of the machine tool provided by the invention has an air floating platform, which can provide air buoyancy force to the vibration plate, so that the actuation of the vibration plate by the actuator only needs to overcome the gas friction friction force. Therefore, the actuator can only actuate the vibration plate by providing a small force, and the high-speed machining of the hard and brittle material can be performed, and the vibration plate does not contact the air floating platform to generate a frictional collision when the vibration plate vibrates, so the machine tool of the invention The vibrating stage does not cause excessive vibration, noise and energy consumption during operation. In addition, the machine tool vibrating stage of the present invention can be directly combined with a conventional machine tool main shaft to perform high-speed reciprocating vibration of a multi-dimensional short stroke, and can perform high-speed and high-quality processing on hard and brittle materials.
以下係藉由特定的具體實施例說明本發明之技術內容，熟悉此技術之人士可由本說明書所揭示之內容輕易地了解本發明之其他優點與功效。本發明亦可藉由其他不同的具體實施例加以施行或應用。本說明書中的各項細節亦可基於不同觀點與應用，在不悖離本發明之精神下，進行各種修飾與變更。 The technical contents of the present invention are described below by way of specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the disclosure of the present specification. The invention may also be embodied or applied by other different embodiments. The details of the present invention can be variously modified and changed without departing from the spirit and scope of the invention.
為降低工具機振動載台的能耗與噪音，並使工具機振動載台能提供高速加工，本發明係提供一種新式的工具機振動載台，可連接例如為氣體壓縮機的氣體供應源，而讓加工器件在氣浮狀態下振動，以對料件進行加工。所述的加工器件可為工作台或切削刀具，其中工作台具有例如T型槽、鳩尾槽的夾持機構，用以夾持料件。 In order to reduce the energy consumption and noise of the vibration platform of the machine tool and to enable the machine tool vibration stage to provide high speed machining, the present invention provides a new type of machine tool vibration stage, which can be connected to a gas supply source such as a gas compressor. The processing device is vibrated in an air floating state to process the material. The processing device may be a work table or a cutting tool, wherein the work table has a clamping mechanism such as a T-shaped groove and a dovetail groove for holding the material.
請參閱圖1至圖3，係為本發明工具機振動載台第一實施例之示意圖。如圖1所示，本發明第一實施例中的工具機振動載台1具有振動平板11、氣浮平台12、第一抵靠墊13、第二抵靠墊14、第一回位彈性體15與第二回位彈性體16。振動平板11的頂面係可鎖附加工器件，因而振動平板11振動時可同步帶動加工器件振動，用以對料件進行直接切削(例如銑削或研磨)或在加工時提供振動而輔助料屑的排除。氣浮平台12的側邊係形成具有外露開口的平台氣體接收道121，以接收氣體供應源(圖未示)的氣體，氣體供應源的氣體輸出口係與平台氣體接收道121的開口接合，以使氣體供應源的輸出氣體進 入平台氣體接收道121。平台氣體接收道121係在氣浮平台12內部延伸，以將所接收的氣體送到氣浮平台12中的適當地方。 Please refer to FIG. 1 to FIG. 3 , which are schematic views of the first embodiment of the vibration loading stage of the machine tool of the present invention. As shown in FIG. 1 , the machine tool vibration stage 1 in the first embodiment of the present invention has a vibration plate 11 , an air floating platform 12 , a first abutment pad 13 , a second abutment pad 14 , and a first return elastic body 15 . The second return elastic body 16. The top surface of the vibrating plate 11 can lock the additional device, so that the vibrating plate 11 can synchronously drive the vibration of the processing device to directly cut the material (such as milling or grinding) or provide vibration during processing to assist the chip. Exclusion. The side of the air floating platform 12 forms a platform gas receiving channel 121 having an exposed opening for receiving a gas of a gas supply source (not shown), and the gas output port of the gas supply source is engaged with the opening of the platform gas receiving channel 121, In order to make the output gas of the gas supply source The platform gas receiving channel 121 is entered. The platform gas receiving passage 121 extends inside the air floating platform 12 to deliver the received gas to an appropriate place in the air floating platform 12.
如圖2所示，氣浮平台12的頂面係形成有多條相連通的平台通氣溝槽122，於圖2中，平台通氣溝槽122係由呈放射狀的氣道連通，但不以此為限。振動平板11的底面係置於氣浮平台12的頂面，並壓覆於所有平台通氣溝槽122上方，以遮蔽各該平台通氣溝槽122而造成氣密效果。如圖3所示，平台氣體接收道121係與至少一條平台通氣溝槽122相連通，以對各該平台通氣溝槽122提供氣體，當每一平台通氣溝槽122的空間被充滿氣體時，會在振動平板11與氣浮平台12間形成氣浮膜，而對振動平板11的底面多個部位提供氣浮力，使振動平板11能由氣浮平台12浮起而達到氣浮狀態，此時，振動平板11與氣浮平台12之間僅存在微小的氣體粘滯摩擦力，故只要施加極微小的力量就能推動振動平板11，讓振動平板11相對氣浮平台12運動，故振動平板11的振動毋須耗費過多的能量。 As shown in FIG. 2, the top surface of the air floating platform 12 is formed with a plurality of communicating platform venting grooves 122. In FIG. 2, the platform venting grooves 122 are connected by a radial air passage, but Limited. The bottom surface of the vibrating plate 11 is placed on the top surface of the air floating platform 12 and is pressed over all the platform ventilation grooves 122 to shield each of the platform ventilation grooves 122 to cause an airtight effect. As shown in FIG. 3, the platform gas receiving channel 121 is in communication with at least one platform venting groove 122 to provide gas to each of the platform venting grooves 122. When the space of each platform venting groove 122 is filled with gas, An air floating film is formed between the vibrating plate 11 and the air floating platform 12, and air buoyancy is provided to a plurality of portions of the bottom surface of the vibrating plate 11, so that the vibrating plate 11 can be floated by the air floating platform 12 to reach an air floating state. There is only a slight gas viscous friction between the vibrating plate 11 and the air floating platform 12, so that the vibration plate 11 can be pushed by the application of a very small force, and the vibrating plate 11 is moved relative to the air floating platform 12, so the vibrating plate 11 The vibration does not require excessive energy.
各該平台通氣溝槽122係均勻分散地分佈在氣浮平台12的頂面，且由呈放射狀的氣道連通，該些平台通氣溝槽122可依據振動平板11底面的形狀，而分佈成矩形環狀、或圓形環狀，以對振動平板11底面的大部分區域提供氣浮力，使浮起的振動平板11不發生傾斜，而使料件的加工品質維持最佳。 Each of the platform venting grooves 122 is uniformly distributed and distributed on the top surface of the air floating platform 12, and is connected by a radial air passage. The platform venting grooves 122 may be distributed in a rectangular shape according to the shape of the bottom surface of the vibration plate 11. The annular or circular ring shape provides air buoyancy to most of the bottom surface of the vibrating plate 11, so that the floating vibrating plate 11 does not tilt, and the processing quality of the material is maintained optimally.
另外，振動平板11底面與氣浮平台12頂面的表面平坦度 可限制小於6~10微米/公尺，較佳地，3~5微米/公尺，以增加振動平板11與氣浮平台12間的氣密性，而使振動平板11的氣浮效果更好，因此，振動平板11的底面與氣浮平台12的頂面可選用不易受力或受溫度影響而局部變形的石材或陶瓷材料所構成，或由噴塗熱熔射陶瓷形成具備真平面度之材料所構成，所述的石材係例如為花崗岩石。氣浮平台12第一、第二方向的側邊係分別設有第一、第二致動器124、125，以分別在第一、第二方向提供振動平板11高振盪頻率的振動能量，因為振動平板11係為浮起狀態，故在振動時氣浮平台12並不會對其產生接觸摩擦力，故各該致動器124、125僅需提供極小的能量就能致動振動平板11，因而本發明的工具機振動載台有節約能耗的有益功效，且可對刀具或料件進行高頻微振幅振動，使刀具快速撞擊並迅速脫離料件表面，刀具離開料件後會形成供切削液滲入的空間，以提高刀具的散熱效果，使原本連續切屑變成斷續的切屑，或使切屑變薄進而降低切削力。 In addition, the surface flatness of the bottom surface of the vibrating plate 11 and the top surface of the air floating platform 12 It can be limited to less than 6~10 micrometers/meter, preferably 3~5 micrometers/meter, to increase the airtightness between the vibrating plate 11 and the air floating platform 12, and the air floating effect of the vibrating plate 11 is better. Therefore, the bottom surface of the vibrating plate 11 and the top surface of the air floating platform 12 may be made of stone or ceramic material which is not easily stressed or locally deformed by temperature, or a material having a true flatness formed by spraying the thermal spray ceramic. The stone material is, for example, a granite stone. The first side and the second side of the air floating platform 12 are respectively provided with first and second actuators 124 and 125 to respectively provide vibration energy of the vibration plate 11 at a high oscillation frequency in the first and second directions, because The vibrating plate 11 is in a floating state, so that the air floating platform 12 does not generate contact friction force when vibrating, so each of the actuators 124, 125 only needs to provide a small amount of energy to actuate the vibrating plate 11, Therefore, the vibration machine of the machine tool of the invention has the beneficial effect of saving energy, and the high-frequency micro-amplitude vibration of the tool or the material member can make the tool quickly collide and quickly disengage from the surface of the material, and the tool will be formed after leaving the material. The space in which the cutting fluid penetrates to improve the heat dissipation effect of the tool, so that the original continuous chips become intermittent chips, or the chips are thinned to reduce the cutting force.
所述第一、第二致動器124、125係例如為超音波線性致動器，以利用超音波線性致動器具有穩定20kHz至40kHz間的振動頻率、低振幅(3至50μm)與控制性佳的優異致動特性。 The first and second actuators 124, 125 are, for example, ultrasonic linear actuators for utilizing an ultrasonic linear actuator to stabilize a vibration frequency between 20 kHz and 40 kHz, low amplitude (3 to 50 μm) and control Excellent actuation characteristics.
此外，本發明工具機振動載台是由致動器直接致動振動平板，而無需透過導螺桿或其它傳動機構，故傳統工具機傳動機構所存在的背隙問題就不復存在，因而本發明的工具機振動載台可在從微米至數十微米的短行程傳動進行精密定位，故可對 硬脆材料進行高速的微細加工，且只需設置致動器就能致動振動平板，故本發明的工具機振動載台構造簡單，具有維護保養成本低廉的有益效果，得以直接與傳統的工具機主軸結合，主軸轉速的提升不再受限於振動機構的牽制，具備較佳地可交換性與可攜性。亦即，本發明的工具機振動載台可附加於一般傳統工具機，使對硬脆材之加工速度得以提升，並具更高加工面品質，更可配合影像處理的技術進行自動化雕刻工作。 In addition, the vibrating stage of the machine tool of the present invention directly activates the vibrating plate by the actuator without passing through the lead screw or other transmission mechanism, so the backlash problem existing in the transmission mechanism of the conventional machine tool no longer exists, and thus the present invention The machine tool vibration stage can be precisely positioned in short-stroke transmission from micron to tens of microns, so it can be The hard and brittle material is subjected to high-speed micro-machining, and the vibrating plate can be actuated by simply setting an actuator. Therefore, the vibrating table of the machine tool of the present invention has a simple structure and has the advantages of low maintenance cost, and can be directly matched with the conventional tool. The combination of the machine spindle and the increase of the spindle speed are no longer limited by the pinning mechanism, and have better interchangeability and portability. That is, the vibrating stage of the machine tool of the present invention can be attached to a general conventional machine tool, so that the processing speed of the hard and brittle material can be improved, and the quality of the processing surface can be improved, and the image processing technology can be used for the automatic engraving work.
由上可知，振動平板11與氣浮平台12間的氣浮膜，係由形成於氣浮平台12的平台氣體接收道121與平台通氣溝槽122所達成。但應說明的是，亦可在振動平板上形成氣體接收道與通氣溝槽，以取代上述的平台氣體接收道與平台通氣溝槽，復請參閱圖5，如圖5所示，振動平板11具有相連通的平板通氣溝槽111與平板氣體接收道112，以在振動平板11與氣浮平台12之間形成氣浮膜，因為振動平板通常較氣浮平台的體積小，因而形成通氣溝槽與氣體接收道，在振動平板會比氣浮平台簡單。 As can be seen from the above, the air floating film between the vibrating plate 11 and the air floating platform 12 is realized by the platform gas receiving passage 121 formed on the air floating platform 12 and the platform ventilation groove 122. However, it should be noted that a gas receiving channel and a venting groove may be formed on the vibrating plate to replace the above-mentioned platform gas receiving channel and the platform venting groove. Referring to FIG. 5, as shown in FIG. 5, the vibrating plate 11 is shown. The plate venting groove 111 and the flat gas receiving channel 112 are connected to form an air floating film between the vibration plate 11 and the air floating platform 12, because the vibration plate is generally smaller than the air floating platform, thereby forming a vent groove With the gas receiving channel, the vibrating plate will be simpler than the air floating platform.
氣浮平台12在多個方向的側邊上形成有側壁，所形成的側壁設有分別供穿過各該致動器124、125的穿孔123，以使各該致動器124、125的致動端，能進入由氣浮平台12與側壁所構成的內部空間中，以進行振動平板11的致動。第一、第二抵靠墊13、14係分別對應第一、第二致動器124、125而設置。第一致動器124的致動端係透過第一抵靠墊13抵靠於振 動平板11的一側邊壁面，而在第一方向致動振動平板11。同理，透過第二抵靠墊14，第二致動器125的致動端可間接抵靠振動平板11的另一側邊壁面，而在第二方向致動振動平板11，故本實施例的振動平板11及鎖附於其上的加工器件可在兩個方向上振動，以對料件進行兩個維度的切削加工。 The air floating platform 12 is formed with side walls on the sides of the plurality of directions, and the formed side walls are provided with through holes 123 respectively for passing through the respective actuators 124, 125 to cause the actuators 124, 125. The movable end can enter the inner space formed by the air floating platform 12 and the side wall to perform the actuation of the vibrating plate 11. The first and second abutting pads 13, 14 are disposed corresponding to the first and second actuators 124, 125, respectively. The actuating end of the first actuator 124 is transmitted through the first abutment pad 13 against the vibration The one side wall of the flat plate 11 is moved, and the vibrating plate 11 is actuated in the first direction. Similarly, through the second abutment pad 14, the actuating end of the second actuator 125 can indirectly abut against the other side wall surface of the vibrating plate 11 and actuate the vibrating plate 11 in the second direction, so the embodiment The vibrating plate 11 and the processing device attached thereto are vibrated in two directions to perform two-dimensional cutting of the material.
於本實施例中，各該抵靠墊13、14係具有光滑表面131、141，如圖2所示，以分別與所對應第一、第二致動器124、125的致動端面滑動接觸。當僅第一致動器124對振動平板11致動時，第二抵靠墊14的光滑表面141可在平行於第二致動器125致動端表面的第一方向上，相對第二致動器125的致動端表面順暢滑動，同理，當第一致動器124不致動而第二致動器125致動時，第一抵靠墊13的光滑表面可在第二方向上，相對第一致動器124的致動端表面順暢滑動。是以，各該抵靠墊13、14的光滑表面131、141可避免各該致動器124、125致動時彼此發生干涉。但不以此為限，於其它實施型態中，亦可選擇軸向壓縮彈性體作為各該抵靠墊13、14，而分別供第一、第二致動器124、125接觸抵靠，藉由軸向壓縮彈性體可傳遞軸向力無法傳遞側向力的特性，使得振動平板11的振動力量無法透過各該抵靠墊13、14，而分別傳遞到第一、第二致動器124、125的致動端，藉以避免各該致動器124、125致動時彼此發生干涉。 In the present embodiment, each of the abutments 13 and 14 has smooth surfaces 131, 141, as shown in FIG. 2, in sliding contact with the actuating end faces of the corresponding first and second actuators 124, 125, respectively. When only the first actuator 124 actuates the vibrating plate 11, the smooth surface 141 of the second abutment pad 14 can be in a first direction parallel to the actuation end surface of the second actuator 125, relative to the second actuation The actuating end surface of the device 125 slides smoothly. Similarly, when the first actuator 124 is not actuated and the second actuator 125 is actuated, the smooth surface of the first abutment pad 13 can be in the second direction, relative to The actuation end surface of the actuator 124 slides smoothly. Thus, the smooth surfaces 131, 141 of each of the abutments 13, 14 prevent each of the actuators 124, 125 from interfering with each other upon actuation. However, not limited thereto, in other embodiments, an axial compression elastic body may be selected as each of the abutting pads 13 and 14, and the first and second actuators 124 and 125 are respectively contacted and abutted. The axial compression elastic body can transmit the characteristic that the axial force cannot transmit the lateral force, so that the vibration force of the vibration plate 11 cannot be transmitted to the first and second actuators 124 through the respective abutment pads 13 and 14, respectively. The actuating end of 125 acts to avoid interference with each other when the actuators 124, 125 are actuated.
此外，若振動平板11側邊的壁面具有光滑表面，則可省 略上述抵靠墊13、14的設置，各該致動器124、125的致動端可直接抵靠到振動平板11的側邊壁面，以在不發生干涉的情況下分別在不同方向驅使振動平板11移動。 In addition, if the wall surface on the side of the vibrating plate 11 has a smooth surface, it can be omitted. Slightly the arrangement of the abutting pads 13, 14, the actuating ends of the actuators 124, 125 can directly abut against the side wall surface of the vibrating plate 11 to drive the vibrating plate in different directions without interference. 11 moves.
第一、第二回位彈性體15、16係分別設於第一、第二致動器124、125的對向側，各該回位彈性體15、16兩端分別連接氣浮平台12與振動平板11側邊壁面，振動平板11進行兩個維度的振動時會讓各該回位彈性體15、16變形，進而產生彈性恢復力，當各該致動器124、125停止致動後，各該回位彈性體15、16的彈性恢復力會促使振動平板11回復初始位置，如此振動平板11即完成一個振動循環，等待各該致動器124、125的下一次致動。 The first and second returning elastic bodies 15 and 16 are respectively disposed on opposite sides of the first and second actuators 124 and 125, and the two ends of the returning elastic bodies 15 and 16 are respectively connected to the air floating platform 12 and When the vibrating plate 11 vibrates in two dimensions, the vibrating plate 11 deforms each of the returning elastic bodies 15 and 16 to generate an elastic restoring force. When the actuators 124 and 125 stop actuating, The elastic restoring force of each of the returning elastic bodies 15, 16 causes the vibrating plate 11 to return to the initial position, so that the vibrating plate 11 completes a vibration cycle, waiting for the next actuation of each of the actuators 124, 125.
另外，應說明的是，本發明工具機振動載台所設置的回位彈性體數量不以上述者為限，仍可依情況適度增減，舉例而言，請參照圖4，如圖所示，本發明工具機振動載台僅設置一個板片形式的回位彈性體15’，回位彈性體15’兩端係分別接觸氣浮平台12與振動平板11，而在各該致動器124、125致動時產生兩個維度的彈性恢復力，進而使受各該致動器124、125致動後的振動平板11，能受彈性恢復力的作用回復初始位置。 In addition, it should be noted that the number of the returning elastic bodies provided by the vibrating stage of the machine tool of the present invention is not limited to the above, and may be appropriately increased or decreased according to the situation. For example, please refer to FIG. 4, as shown in the figure. The vibrating stage of the machine tool of the present invention is only provided with a returning elastic body 15' in the form of a plate, and the two ends of the returning elastic body 15' are respectively in contact with the air floating platform 12 and the vibrating plate 11, and in each of the actuators 124, When the actuator is actuated, two dimensional elastic restoring forces are generated, so that the vibrating plate 11 actuated by the respective actuators 124, 125 can be restored to the initial position by the elastic restoring force.
復請參閱圖6，係本發明第一實施例工具機振動載台之致動器另一實施態樣示意圖。本實施型態僅說明與前述工具機振動載台不同結構與作用之處，作用相同或近似的元件，以相同 的元件符號表示。本實施型態的工具機振動載台1是以第一、第二磁性墊13’、14’取代前述的第一、第二抵靠墊13、14，且使用具有電磁線圈的第一、第二電磁致動器124’、125’取代前述的第一、第二致動器124、125。各該磁性墊13’、14’係分別附著於振動平板11的一側邊，使得可分別對應第一、第二電磁致動器124’、125’而設置，第一、第二電磁致動器124’、125’可分別透過流經電磁線圈的交流電流產生磁吸力與磁推力，以透過接觸或非接觸地方式驅使所對應的磁性墊13’、14’帶動振動平板11進行多維度地往復運動，如此亦能達成分別在不同方向驅動振動平板11的效果。亦即，第一、第二電磁致動器124’、125’可分別提供不同方向的磁推力以致動振動平板11，也可分別提供不同方向的磁吸力以吸回致動後的振動平板11。 Referring to FIG. 6, a schematic diagram of another embodiment of an actuator for a vibration stage of a machine tool according to a first embodiment of the present invention is shown. This embodiment only describes the different structures and functions of the above-mentioned machine tool vibration carrier, and the same or similar components have the same Symbolic representation of components. The machine tool vibrating stage 1 of the present embodiment replaces the first and second abutting pads 13, 14 with the first and second magnetic pads 13', 14', and uses the first and second with electromagnetic coils. The electromagnetic actuators 124', 125' replace the aforementioned first and second actuators 124, 125. Each of the magnetic pads 13', 14' is attached to one side of the vibrating plate 11, respectively, so as to be respectively provided corresponding to the first and second electromagnetic actuators 124', 125', the first and second electromagnetic actuations The currents 124' and 125' respectively generate magnetic attraction and magnetic thrust through the alternating current flowing through the electromagnetic coil, so as to drive the corresponding magnetic pads 13', 14' to drive the vibrating plate 11 to multi-dimensionally through contact or non-contact. The reciprocating motion can also achieve the effect of driving the vibrating plate 11 in different directions. That is, the first and second electromagnetic actuators 124', 125' may respectively provide magnetic thrusts in different directions to actuate the vibrating plate 11, or may respectively provide magnetic directions in different directions to suck back the actuated vibrating plate 11 .
各該磁性墊13’、14’係分別隔開第一、第二電磁致動器124’、125’有預定距離，請參照圖5，以使振動平板11能受第一、第二電磁致動器124’、125’的磁力影響而在所述的預定距離中移動。 Each of the magnetic pads 13', 14' is separated from the first and second electromagnetic actuators 124', 125' by a predetermined distance. Please refer to FIG. 5, so that the vibrating plate 11 can be subjected to the first and second electromagnetic processes. The magnetic force of the actuators 124', 125' is moved to move within the predetermined distance.
復請參閱圖6至圖9，係為本發明工具機振動載台第二實施例之示意圖。本實施例之工具機振動載台係大致與前述實施例之作用相同，故不另重覆其相同作用之處，而僅說明不同結構與作用之處，以使本實施例的特點更易於了解。 Referring to FIG. 6 to FIG. 9 , it is a schematic diagram of a second embodiment of the vibration loading stage of the machine tool of the present invention. The vibrating stage of the machine tool of the embodiment is substantially the same as that of the foregoing embodiment, so that the same functions and the same functions are not repeated, and only the different structures and functions are explained, so that the features of the embodiment are easier to understand. .
如圖6所示，本發明第二實施例的工具機振動載台2係用 以連接氣體供應源，而讓加工器件在氣浮狀態下振動。工具機振動載台2由上而下依序疊設有第一振動平板21、第二振動平板22與氣浮平台23。第一振動平板21的頂面係具有螺孔，以供鎖附加工器件，關於加工器件，復請參閱圖9、圖10。如圖9所示，第一振動平板所鎖附的加工器件為例如銑刀的切削刀具3。如圖10所示，第一振動平板所鎖附的加工器件為具有T型槽夾持機構的工作台4。 As shown in FIG. 6, the machine tool vibration stage 2 of the second embodiment of the present invention is used. To connect the gas supply source, the processing device is vibrated in an air floating state. The machine vibrating stage 2 is sequentially provided with a first vibrating plate 21, a second vibrating plate 22 and an air floating platform 23 from top to bottom. The top surface of the first vibrating plate 21 has a screw hole for locking the additional device. For the processing device, please refer to FIG. 9 and FIG. As shown in Fig. 9, the processing device to which the first vibrating plate is attached is a cutting tool 3 such as a milling cutter. As shown in FIG. 10, the processing device to which the first vibrating plate is attached is a table 4 having a T-slot clamping mechanism.
如圖7所示，第二振動平板22具有推抵塊221與平板氣體接收道222，平板氣體接收道222係延伸至第二振動平板22的外壁面，以形成氣體接收口，進而接收氣體供應源所供應的氣體，第二振動平板22頂面係形成由呈放射狀的氣道連通的多條平板通氣溝槽223，第一振動平板21的底面係置於第二振動平板22的頂面，以覆蓋所有形成於第二振動平板22頂面的平板通氣溝槽223，平板氣體接收道222係在第二振動平板22內部延伸，並穿過至少一條平板通氣溝槽223，進而與所有平板通氣溝槽223連通，以在第一振動平板21置於第二振動平板22時，對各該平板通氣溝槽223的內部空間充填氣體。如圖8所示，當每一平板通氣溝槽223被充滿氣體時，會對上方覆蓋的第一振動平板21提供氣浮力，使第一振動平板21能浮起而離開第二振動平板22以達到氣浮狀態，此時，第一振動平板21與第二振動平板22之間僅存在氣體粘滯摩擦力，因而只要微小力量就能讓第一振動平板21相對第二振動平板22 移動。 As shown in FIG. 7, the second vibrating plate 22 has a pushing block 221 and a flat gas receiving passage 222, and the flat gas receiving passage 222 extends to the outer wall surface of the second vibrating plate 22 to form a gas receiving port, thereby receiving a gas supply. The gas supplied from the source, the top surface of the second vibrating plate 22 forms a plurality of flat plate ventilation grooves 223 which are communicated by the radial air passages, and the bottom surface of the first vibrating plate 21 is placed on the top surface of the second vibrating plate 22, To cover all of the flat venting grooves 223 formed on the top surface of the second vibrating plate 22, the flat gas receiving passage 222 extends inside the second vibrating plate 22 and passes through at least one flat venting groove 223 to ventilate with all the plates. The grooves 223 are in communication to fill the inner space of each of the flat vent grooves 223 with gas when the first vibrating plate 21 is placed on the second vibrating plate 22. As shown in FIG. 8, when each of the flat ventilation grooves 223 is filled with gas, air buoyancy is provided to the first vibrating plate 21 covered above, so that the first vibrating plate 21 can float and leave the second vibrating plate 22 to When the air floating state is reached, at this time, only the gas viscous frictional force exists between the first vibrating plate 21 and the second vibrating plate 22, so that the first vibrating plate 21 can be made to oppose the second vibrating plate 22 with a small force. mobile.
氣浮平台23具有平台氣體接收道231，平台氣體接收道231係延伸至氣浮平台23的外壁面，以形成氣體接收口，進而接收氣體供應源的氣體，氣浮平台23頂面係形成由呈放射狀的氣道連通的多條平台通氣溝槽232，平台氣體接收道231係穿過至少一條平台通氣溝槽232，故可對所有平台通氣溝槽232充填氣體。當每一平台通氣溝槽232的內部空間被充滿氣體時，會對上方的第二振動平板22提供氣浮力，使第二振動平板22能浮起而達到氣浮狀態，此時，第二振動平板22與氣浮平台23之間僅存在微小的氣體粘滯摩擦力，只要微小力量就能讓第二振動平板22相對氣浮平台23移動。 The air floating platform 23 has a platform gas receiving passage 231 extending to the outer wall surface of the air floating platform 23 to form a gas receiving port, thereby receiving gas of the gas supply source, and the top surface of the air floating platform 23 is formed by A plurality of platform venting channels 232 are provided in a radial airway communication, and the platform gas receiving channels 231 are passed through at least one of the platform venting grooves 232 so that all of the platform venting grooves 232 can be filled with gas. When the inner space of each platform ventilation groove 232 is filled with gas, the upper second vibration plate 22 is provided with air buoyancy, so that the second vibration plate 22 can float to reach the air floating state, and at this time, the second vibration There is only a slight gas viscous friction between the flat plate 22 and the air floating platform 23, and the second vibration plate 22 can be moved relative to the air floating platform 23 as long as a small force is generated.
如圖7所示，氣浮平台23於第一、第二方向的側邊形成有側壁，該些側壁分別設有第一致動器211與第二致動器225，第一、第二致動器211、225的致動端係分別連接第一、第二振動平板21、22的側邊，以分別在第一、第二方向上致動第一、第二振動平板21、22。前述第二振動平板22的推抵塊221係具有供穿過第一致動器211的孔槽2211，而可在第二方向上推抵第一致動器211，進而帶動第一振動平板21在第二方向上運動。當平台通氣溝槽232充滿氣體時，第二振動平板22就可自氣浮平台23浮起，此刻運行第二致動器225就可帶動第二振動平板22在第二方向上直線運動，此時，推抵塊221會在第二方向對第一致動器211的側邊施加力量，而使 與第一致動器211連接的第一振動平板21，跟第二振動平板22同步在第二方向上運動。當平板通氣溝槽223充滿氣體時，第一振動平板21就可自第二振動平板22浮起，此時運行第一致動器211，就可直接帶動第一振動平板21在第一方向相對第二振動平板22直線運動，但不會對第二振動平板22造成影響。 As shown in FIG. 7, the air floating platform 23 is formed with side walls on the sides of the first and second directions, and the side walls are respectively provided with a first actuator 211 and a second actuator 225, first and second The actuating ends of the actuators 211, 225 are coupled to the sides of the first and second vibrating plates 21, 22, respectively, to actuate the first and second vibrating plates 21, 22 in the first and second directions, respectively. The pushing block 221 of the second vibrating plate 22 has a hole 2211 for passing through the first actuator 211, and can be pushed against the first actuator 211 in the second direction, thereby driving the first vibrating plate 21 Move in the second direction. When the platform ventilation groove 232 is filled with gas, the second vibration plate 22 can float from the air floating platform 23, and the second actuator 225 can drive the second vibration plate 22 to move linearly in the second direction. When the pushing block 221 applies force to the side of the first actuator 211 in the second direction, The first vibrating plate 21 connected to the first actuator 211 moves in the second direction in synchronization with the second vibrating plate 22. When the flat ventilation groove 223 is filled with gas, the first vibration plate 21 can be floated from the second vibration plate 22, and when the first actuator 211 is operated, the first vibration plate 21 can be directly driven in the first direction. The second vibrating plate 22 moves linearly, but does not affect the second vibrating plate 22.
所述平板通氣溝槽223與平台通氣溝槽232的分佈形狀係呈矩形環狀、或圓形環狀，俾使分別對第一振動平板21與第二振動平板22提供氣浮力的範圍最大化，而令浮起後的第一、第二振動平板21、22不會發生傾斜而影響料件的加工精度。另外，第二振動平板22與氣浮平台23頂面的表面平坦度可限制小於6~10微米/公尺，較佳地，小於3~5微米/公尺，以使氣浮效果更好，因此，第二振動平板22與氣浮平台23的頂面可選用不易受力或受溫度影響而局部變形的石材或陶瓷材料所構成。 The distribution shape of the flat ventilation groove 223 and the platform ventilation groove 232 is a rectangular ring shape or a circular ring shape, so as to maximize the range of providing air buoyancy to the first vibration plate 21 and the second vibration plate 22, respectively. Therefore, the first and second vibrating plates 21 and 22 after the floating are not inclined, which affects the processing accuracy of the material. In addition, the surface flatness of the top surface of the second vibrating plate 22 and the air floating platform 23 can be limited to less than 6-10 micrometers/meter, preferably less than 3 to 5 micrometers/meter, so that the air floatation effect is better. Therefore, the top surface of the second vibrating plate 22 and the air floating platform 23 may be formed of a stone or ceramic material that is not easily stressed or locally deformed by temperature.
由上可知，第一、第二致動器211、225可分別帶動第一振動平板21在第一、第二方向上直線運動，故本發明實施例的第一振動平板21及鎖附於其上的加工器件可在兩個方向上振動，以對料件進行兩個維度的切削加工。第一振動平板21與第二振動平板22間的氣浮膜，係由形成於第二振動平板22的平板氣體接收道222與平板通氣溝槽223所達成。但應說明的是，亦可選擇在第一振動平板上形成氣體接收道與通氣溝 槽，以取代上述第二振動平板的平板氣體接收道與平板通氣溝槽。第二振動平板22與氣浮平台23間的氣浮膜，係由形成於氣浮平台23的平台氣體接收道231與平台通氣溝槽232所達成。但應說明的是，亦可選擇在第二振動平板上形成氣體接收道與通氣溝槽，以取代上述氣浮平台的平台氣體接收道與平台通氣溝槽。 As can be seen from the above, the first and second actuators 211 and 225 can respectively drive the first vibrating plate 21 to move linearly in the first and second directions. Therefore, the first vibrating plate 21 of the embodiment of the present invention and the first vibrating plate 21 thereof are attached thereto. The upper processing device can vibrate in two directions to perform two-dimensional machining of the material. The air floating film between the first vibrating plate 21 and the second vibrating plate 22 is realized by the flat gas receiving passage 222 formed on the second vibrating plate 22 and the flat plate venting groove 223. However, it should be noted that it is also possible to form a gas receiving channel and a ventilation groove on the first vibrating plate. a groove to replace the flat gas receiving passage of the second vibrating plate and the flat plate vent groove. The air floating film between the second vibrating plate 22 and the air floating platform 23 is realized by the platform gas receiving passage 231 formed on the air floating platform 23 and the platform ventilation groove 232. However, it should be noted that a gas receiving channel and a venting groove may be formed on the second vibrating plate instead of the platform gas receiving channel and the platform venting groove of the air floating platform.
於本實施例中，工具機振動載台2復具有呈片狀的第一彈性體212及第二彈性體226。第一彈性體212的兩端係分別連接第一振動平板21與第二振動平板22，以提供彈性力使在第二振動平板22上致動後的第一振動平板21，沿著第二振動平板22相對於第一振動平板21的內壁面224回到初始位置，內壁面224係沿著第一方向延伸。同理，第二彈性體226的兩端係分別連接第二振動平板22與氣浮平台23，以提供彈性力使在氣浮平台23上致動後的第二振動平板22，沿著氣浮平台23相對於第二振動平板22的內壁面233回到初始位置回位，內壁面233係沿著第二方向延伸。上述彈性體212、226的形體不以圖7所示者為限，仍可使用其它不同幾何形狀之彈性體，以達成相同彈性回位的功能。 In the present embodiment, the machine tool vibrating stage 2 has a first elastic body 212 and a second elastic body 226 in a sheet shape. The two ends of the first elastic body 212 are respectively connected to the first vibrating plate 21 and the second vibrating plate 22 to provide an elastic force to actuate the first vibrating plate 21 after being actuated on the second vibrating plate 22 along the second vibration. The flat plate 22 returns to the initial position with respect to the inner wall surface 224 of the first vibrating plate 21, and the inner wall surface 224 extends in the first direction. Similarly, the two ends of the second elastic body 226 are respectively connected to the second vibrating plate 22 and the air floating platform 23 to provide an elastic force to cause the second vibrating plate 22 after being actuated on the air floating platform 23 along the air flotation. The platform 23 returns to the initial position with respect to the inner wall surface 233 of the second vibrating plate 22, and the inner wall surface 233 extends in the second direction. The shape of the above-mentioned elastic bodies 212, 226 is not limited to that shown in Fig. 7, and other elastic bodies of different geometric shapes can be used to achieve the same elastic return function.
應說明的是，第一、第二振動平板21、22可分別透過其它的機制回位，例如可透過第一、第二致動器211、225的牽引，故於其它實施例中，可省略第一、第二彈性體212、226的設置。 It should be noted that the first and second vibrating plates 21 and 22 can be returned through other mechanisms, for example, through the traction of the first and second actuators 211 and 225, so in other embodiments, the ellipse may be omitted. The arrangement of the first and second elastomers 212, 226.
綜上所述，本發明工具機振動載台的振動平板係氣浮於氣浮平台上方，使致動器對振動平板的致動不受接觸摩擦力的影響，是以，僅需微小力量就能使振動平板致動，進而可對硬脆材料進行高速加工。振動平板振動時並不會與氣浮平台接觸而發生摩擦，故本發明工具機振動載台在運作時的振動、噪音與能耗很低，是以，本發明的工具機振動載台對所屬領域技術問題的解決具有顯著的功效。 In summary, the vibrating plate of the vibrating stage of the machine tool of the present invention floats above the air floating platform, so that the actuation of the vibrating plate by the actuator is not affected by the contact friction force, so that only a small force is required. The vibrating plate can be actuated, and the hard and brittle material can be processed at a high speed. When the vibrating plate vibrates, the friction does not come into contact with the air floating platform, so the vibration, noise and energy consumption of the vibrating stage of the machine tool of the present invention are low, so that the vibrating stage of the machine tool of the present invention belongs to The solution to the technical problems in the field has significant effects.
上述實施例僅例示性說明本發明之原理及功效，而非用於限制本發明。任何熟習此項技術之人士均可在不違背本發明之精神及範疇下，對上述實施例進行修飾與改變。因此，本發明之權利保護範圍，應如後述之申請專利範圍。 The above embodiments are merely illustrative of the principles and effects of the invention and are not intended to limit the invention. Modifications and variations of the above-described embodiments can be made by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of the claims of the present invention should be as described in the following claims.
1‧‧‧工具機振動載台 1‧‧‧Tool machine vibration stage
11‧‧‧振動平板 11‧‧‧Vibration plate
111‧‧‧平板通氣溝槽 111‧‧‧ flat ventilation trench
112‧‧‧平板氣體接收道 112‧‧‧ flat gas receiving channel
12‧‧‧氣浮平台 12‧‧‧Air floating platform
121‧‧‧平台氣體接收道 121‧‧‧ platform gas receiving channel
122‧‧‧平台通氣溝槽 122‧‧‧ platform ventilation trench
123‧‧‧穿孔 123‧‧‧Perforation
124‧‧‧第一致動器 124‧‧‧First actuator
125‧‧‧第二致動器 125‧‧‧Second actuator
13‧‧‧第一抵靠墊 13‧‧‧First cushion
131‧‧‧光滑表面 131‧‧‧Smooth surface
14‧‧‧第二抵靠墊 14‧‧‧Second cushion
141‧‧‧光滑表面 141‧‧‧Smooth surface
15‧‧‧第一回位彈性體 15‧‧‧First Return Elastomer
15’‧‧‧回位彈性體 15'‧‧‧Return elastomer
16‧‧‧第二回位彈性體 16‧‧‧Second Return Elastomer
2‧‧‧工具機振動載台 2‧‧‧Tool machine vibration stage
21‧‧‧第一振動平板 21‧‧‧First vibrating plate
211‧‧‧第一致動器 211‧‧‧First actuator
212‧‧‧第一彈性體 212‧‧‧First Elastomer
22‧‧‧第二振動平板 22‧‧‧Second vibrating plate
221‧‧‧推抵塊 221‧‧ ‧ push block
2211‧‧‧孔槽 2211‧‧‧ hole slot
222‧‧‧平板氣體接收道 222‧‧‧ flat gas receiving channel
223‧‧‧平板通氣溝槽 223‧‧‧ flat ventilation trench
224‧‧‧內壁面 224‧‧‧ inner wall
225‧‧‧第二致動器 225‧‧‧second actuator
226‧‧‧第二彈性體 226‧‧‧Second elastomer
23‧‧‧氣浮平台 23‧‧‧Air floating platform
231‧‧‧平台氣體接收道 231‧‧‧ platform gas receiving channel
232‧‧‧平台通氣溝槽 232‧‧‧ platform ventilation trench
233‧‧‧內壁面 233‧‧‧ inner wall
3‧‧‧切削刀具 3‧‧‧Cutting tools
4‧‧‧工作台 4‧‧‧Workbench
圖1：係本發明工具機振動載台第一實施例之立體圖。 Figure 1 is a perspective view of a first embodiment of a vibrating stage of the machine tool of the present invention.
圖2：係圖1之工具機振動載台之部分構件分解圖。 Fig. 2 is an exploded view of a part of the vibration stage of the machine tool of Fig. 1.
圖3：係圖1之工具機振動載台以AA線段截切的剖面圖。 Figure 3 is a cross-sectional view of the machine tool vibrating stage of Figure 1 taken along line AA.
圖4：係本發明第一實施例工具機振動載台之回位彈性體另一實施態樣示意圖。 Fig. 4 is a schematic view showing another embodiment of the returning elastic body of the vibrating stage of the machine tool according to the first embodiment of the present invention.
圖5：係本發明工具機振動載台之在振動平板形成通氣溝槽與平板氣體接收道的示意圖。 Figure 5 is a schematic view showing the vibrating plate of the machine tool of the present invention forming a venting groove and a flat gas receiving passage on the vibrating plate.
圖6：係本發明第一實施例工具機振動載台之致動器另一實施態樣示意圖。 Fig. 6 is a view showing another embodiment of an actuator for a vibration stage of a machine tool according to a first embodiment of the present invention.
圖7：係本發明工具機振動載台第二實施例之分解圖。 Figure 7 is an exploded view of a second embodiment of the vibrating stage of the machine tool of the present invention.
圖8：係圖7之工具機振動載台之組合圖。 Figure 8 is a combination diagram of the vibration stage of the machine tool of Figure 7.
圖9：係圖8之工具機振動載台以BB線段截切的剖面圖。 Figure 9 is a cross-sectional view of the machine tool vibrating stage of Figure 8 taken along line BB.
圖10：係圖8之工具機振動載台之第一使用狀態示意圖。 Figure 10 is a schematic view showing the first use state of the vibration stage of the machine tool of Figure 8.
圖11：係圖8之工具機振動載台之第二使用狀態示意圖。 Figure 11 is a schematic view showing the second state of use of the vibration stage of the machine tool of Figure 8.
1‧‧‧工具機振動載台 1‧‧‧Tool machine vibration stage
11‧‧‧振動平板 11‧‧‧Vibration plate
12‧‧‧氣浮平台 12‧‧‧Air floating platform
121‧‧‧平台氣體接收道 121‧‧‧ platform gas receiving channel
123‧‧‧穿孔 123‧‧‧Perforation
124‧‧‧第一致動器 124‧‧‧First actuator
125‧‧‧第二致動器 125‧‧‧Second actuator
13‧‧‧第一抵靠墊 13‧‧‧First cushion
14‧‧‧第二抵靠墊 14‧‧‧Second cushion
15‧‧‧第一回位彈性體 15‧‧‧First Return Elastomer
16‧‧‧第二回位彈性體 16‧‧‧Second Return Elastomer
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101125328A TWI480122B (en) | 2012-07-13 | 2012-07-13 | A machine tool's vibrating deck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101125328A TWI480122B (en) | 2012-07-13 | 2012-07-13 | A machine tool's vibrating deck |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201402268A true TW201402268A (en) | 2014-01-16 |
| TWI480122B TWI480122B (en) | 2015-04-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101125328A TWI480122B (en) | 2012-07-13 | 2012-07-13 | A machine tool's vibrating deck |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI480122B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110238666A (en) * | 2019-06-17 | 2019-09-17 | 苏州峰之建精密设备有限公司 | Simple automatic adjusument platform |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4575942A (en) * | 1982-10-18 | 1986-03-18 | Hitachi, Ltd. | Ultra-precision two-dimensional moving apparatus |
| US4716482A (en) * | 1986-02-14 | 1987-12-29 | Hewlett-Packard Company | Head actuator limit stop assembly for a disk memory drive |
| JP2005103923A (en) * | 2003-09-30 | 2005-04-21 | Ooike Co Ltd | Oscillation apparatus |
| CN100394156C (en) * | 2005-05-23 | 2008-06-11 | 苏州试验仪器总厂 | Triaxiality and six degrees of freedom test bench for airdriven vibration, transportation bump, and slant swing |
| WO2009130953A1 (en) * | 2008-04-25 | 2009-10-29 | 国際計測器株式会社 | Electrodynamic vibration test equipment |
| US8643252B2 (en) * | 2010-05-11 | 2014-02-04 | Canon Kabushiki Kaisha | Vibration wave actuator |
| CN202052929U (en) * | 2011-03-30 | 2011-11-30 | 安徽理工大学 | Three-dimensional parallel vibration casting machine |
| CN202195878U (en) * | 2011-07-23 | 2012-04-18 | 浙江大学 | Tricomponent standard vibration table based on locking type decoupling device |
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2012
- 2012-07-13 TW TW101125328A patent/TWI480122B/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110238666A (en) * | 2019-06-17 | 2019-09-17 | 苏州峰之建精密设备有限公司 | Simple automatic adjusument platform |
| CN110238666B (en) * | 2019-06-17 | 2024-04-05 | 苏州峰之建精密设备有限公司 | Simple self-adaptive adjusting platform |
Also Published As
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| TWI480122B (en) | 2015-04-11 |
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