TW201400699A - 振動發電裝置 - Google Patents
振動發電裝置 Download PDFInfo
- Publication number
- TW201400699A TW201400699A TW102107900A TW102107900A TW201400699A TW 201400699 A TW201400699 A TW 201400699A TW 102107900 A TW102107900 A TW 102107900A TW 102107900 A TW102107900 A TW 102107900A TW 201400699 A TW201400699 A TW 201400699A
- Authority
- TW
- Taiwan
- Prior art keywords
- vibration power
- power generating
- cantilever
- generating element
- cantilever portion
- Prior art date
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 23
- 239000012530 fluid Substances 0.000 claims description 52
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 abstract description 4
- 230000005611 electricity Effects 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 119
- 239000010408 film Substances 0.000 description 106
- 239000010410 layer Substances 0.000 description 77
- 238000004519 manufacturing process Methods 0.000 description 45
- 238000000034 method Methods 0.000 description 40
- 238000010248 power generation Methods 0.000 description 34
- 229910052751 metal Inorganic materials 0.000 description 18
- 239000002184 metal Substances 0.000 description 18
- 238000005530 etching Methods 0.000 description 16
- 239000013078 crystal Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 229910052732 germanium Inorganic materials 0.000 description 10
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 10
- 238000000206 photolithography Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 7
- 229910000449 hafnium oxide Inorganic materials 0.000 description 6
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 229910052707 ruthenium Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 239000002313 adhesive film Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910004121 SrRuO Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 229910004166 TaN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/185—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators using fluid streams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
- H02N2/188—Vibration harvesters adapted for resonant operation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/304—Beam type
- H10N30/306—Cantilevers
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012140199A JP2014007798A (ja) | 2012-06-21 | 2012-06-21 | 振動発電装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW201400699A true TW201400699A (zh) | 2014-01-01 |
Family
ID=49768359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102107900A TW201400699A (zh) | 2012-06-21 | 2013-03-06 | 振動發電裝置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2014007798A (ja) |
TW (1) | TW201400699A (ja) |
WO (1) | WO2013190744A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017098304A (ja) * | 2015-11-18 | 2017-06-01 | 京セラ株式会社 | 圧電デバイス、センサ装置および発電装置 |
US11105231B1 (en) * | 2017-11-30 | 2021-08-31 | United Services Automobile Association (Usaa) | Vehicle liquid monitoring system and method |
WO2021216870A1 (en) | 2020-04-22 | 2021-10-28 | University of Arkansas Technology Ventures | Device for ambient thermal and vibration energy harvesting |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001275370A (ja) * | 2000-03-27 | 2001-10-05 | Toto Ltd | 圧電水力発電装置 |
JP2006023287A (ja) * | 2004-06-08 | 2006-01-26 | Shinshu Univ | 圧電体を用いたジャーク(加加速度)の測定方法 |
JP2006226221A (ja) * | 2005-02-18 | 2006-08-31 | Univ Nagoya | 発電装置 |
-
2012
- 2012-06-21 JP JP2012140199A patent/JP2014007798A/ja active Pending
-
2013
- 2013-03-01 WO PCT/JP2013/001274 patent/WO2013190744A1/ja active Application Filing
- 2013-03-06 TW TW102107900A patent/TW201400699A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
JP2014007798A (ja) | 2014-01-16 |
WO2013190744A1 (ja) | 2013-12-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5658757B2 (ja) | 振動発電素子およびそれを用いた振動発電装置 | |
JP5611565B2 (ja) | 圧電振動発電機及びこれを用いた発電装置 | |
US20130127295A1 (en) | Piezoelectric micro power generator and fabrication method thereof | |
KR101366735B1 (ko) | 발전 디바이스 및 그것을 사용한 발전 모듈 | |
KR101466781B1 (ko) | 진동 발전 소자 및 이를 구비한 진동 발전 장치 | |
CN102859862B (zh) | 振动发电器件 | |
JP2010136542A (ja) | 圧電型発電機およびその製造方法 | |
JP2013172523A (ja) | 振動発電素子およびそれを用いた振動発電装置 | |
JP2011152010A (ja) | 発電デバイス | |
TW201400699A (zh) | 振動發電裝置 | |
JP2014230426A (ja) | 発電装置 | |
TWI455471B (zh) | 振動發電裝置及其製造方法 | |
TW201406039A (zh) | 發電模組及利用此發電模組之空調管理系統 | |
TW201400700A (zh) | 發電裝置及發電模組 | |
TW201405103A (zh) | 流量感測器及利用此感測器之空調管理系統 | |
KR102011804B1 (ko) | 멤스 압전센서, 멤스 압전센서를 이용한 에너지 저장장치, 그리고 그 제조 방법 | |
JP2011125071A (ja) | 発電デバイス | |
WO2014020786A1 (ja) | 発電デバイス | |
JP2016058534A (ja) | 発電装置 |