TW201400699A - 振動發電裝置 - Google Patents

振動發電裝置 Download PDF

Info

Publication number: TW201400699A
Authority: TW; Taiwan
Prior art keywords: vibration power; power generating; cantilever; generating element; cantilever portion
Prior art date: 2012-06-21

Application number

TW102107900A

Other languages

English (en)

Chinese (zh)

Inventor

Norihiro Yamauchi

Junya Ogawa

Koji Goto

Yu Wakasa

Koichi Aizawa

Original Assignee

Panasonic Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2012-06-21

Filing date

2013-03-06

Publication date

2014-01-01

2013-03-06 Application filed by Panasonic Corp filed Critical Panasonic Corp

2014-01-01 Publication of TW201400699A publication Critical patent/TW201400699A/zh

Links

238000006243 chemical reaction Methods 0.000 claims abstract description 23
239000012530 fluid Substances 0.000 claims description 52
230000003247 decreasing effect Effects 0.000 claims 1
239000007788 liquid Substances 0.000 abstract description 4
230000005611 electricity Effects 0.000 abstract description 2
239000000758 substrate Substances 0.000 description 119
239000010408 film Substances 0.000 description 106
239000010410 layer Substances 0.000 description 77
238000004519 manufacturing process Methods 0.000 description 45
238000000034 method Methods 0.000 description 40
238000010248 power generation Methods 0.000 description 34
229910052751 metal Inorganic materials 0.000 description 18
239000002184 metal Substances 0.000 description 18
238000005530 etching Methods 0.000 description 16
239000013078 crystal Substances 0.000 description 13
239000000463 material Substances 0.000 description 13
229910052732 germanium Inorganic materials 0.000 description 10
GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 10
238000000206 photolithography Methods 0.000 description 8
238000006073 displacement reaction Methods 0.000 description 7
229910000449 hafnium oxide Inorganic materials 0.000 description 6
WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 6
229920002120 photoresistant polymer Polymers 0.000 description 5
238000001020 plasma etching Methods 0.000 description 5
238000003860 storage Methods 0.000 description 5
KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 4
238000005229 chemical vapour deposition Methods 0.000 description 4
238000009413 insulation Methods 0.000 description 4
230000007246 mechanism Effects 0.000 description 4
229910052707 ruthenium Inorganic materials 0.000 description 4
238000004544 sputter deposition Methods 0.000 description 4
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
239000000853 adhesive Substances 0.000 description 3
230000001070 adhesive effect Effects 0.000 description 3
230000015572 biosynthetic process Effects 0.000 description 3
239000011521 glass Substances 0.000 description 3
239000000395 magnesium oxide Substances 0.000 description 3
CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 3
238000000059 patterning Methods 0.000 description 3
229920005989 resin Polymers 0.000 description 3
239000011347 resin Substances 0.000 description 3
239000002356 single layer Substances 0.000 description 3
239000010409 thin film Substances 0.000 description 3
238000011144 upstream manufacturing Methods 0.000 description 3
229910052726 zirconium Inorganic materials 0.000 description 3
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
239000002313 adhesive film Substances 0.000 description 2
229910052782 aluminium Inorganic materials 0.000 description 2
238000005520 cutting process Methods 0.000 description 2
238000010894 electron beam technology Methods 0.000 description 2
239000003822 epoxy resin Substances 0.000 description 2
239000007789 gas Substances 0.000 description 2
229910052746 lanthanum Inorganic materials 0.000 description 2
229910052745 lead Inorganic materials 0.000 description 2
229910052758 niobium Inorganic materials 0.000 description 2
229910017604 nitric acid Inorganic materials 0.000 description 2
230000002093 peripheral effect Effects 0.000 description 2
229920000647 polyepoxide Polymers 0.000 description 2
230000008569 process Effects 0.000 description 2
229910018125 Al-Si Inorganic materials 0.000 description 1
229910018520 Al—Si Inorganic materials 0.000 description 1
229910004298 SiO 2 Inorganic materials 0.000 description 1
229910004121 SrRuO Inorganic materials 0.000 description 1
229910002367 SrTiO Inorganic materials 0.000 description 1
229910004166 TaN Inorganic materials 0.000 description 1
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000000576 coating method Methods 0.000 description 1
230000007423 decrease Effects 0.000 description 1
238000000151 deposition Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
239000007772 electrode material Substances 0.000 description 1
230000007613 environmental effect Effects 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
238000003306 harvesting Methods 0.000 description 1
229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
230000006872 improvement Effects 0.000 description 1
229910052738 indium Inorganic materials 0.000 description 1
239000012212 insulator Substances 0.000 description 1
229910052741 iridium Inorganic materials 0.000 description 1
229910052748 manganese Inorganic materials 0.000 description 1
239000007769 metal material Substances 0.000 description 1
229910052750 molybdenum Inorganic materials 0.000 description 1
230000003647 oxidation Effects 0.000 description 1
238000007254 oxidation reaction Methods 0.000 description 1
239000002245 particle Substances 0.000 description 1
229920000307 polymer substrate Polymers 0.000 description 1
230000004044 response Effects 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
238000003980 solgel method Methods 0.000 description 1
238000000992 sputter etching Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1
229910052715 tantalum Inorganic materials 0.000 description 1
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
229910052718 tin Inorganic materials 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1
238000003466 welding Methods 0.000 description 1

Classifications

- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/185—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators using fluid streams
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
- H02N2/188—Vibration harvesters adapted for resonant operation
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/304—Beam type
- H10N30/306—Cantilevers

Landscapes

Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Micromachines (AREA)

TW102107900A 2012-06-21 2013-03-06 振動發電裝置 TW201400699A (zh)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2012140199A JP2014007798A (ja)	2012-06-21	2012-06-21	振動発電装置

Publications (1)

Publication Number	Publication Date
TW201400699A true TW201400699A (zh)	2014-01-01

Family

ID=49768359

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW102107900A TW201400699A (zh)	2012-06-21	2013-03-06	振動發電裝置

Country Status (3)

Country	Link
JP (1)	JP2014007798A (ja)
TW (1)	TW201400699A (ja)
WO (1)	WO2013190744A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2017098304A (ja) *	2015-11-18	2017-06-01	京セラ株式会社	圧電デバイス、センサ装置および発電装置
US11105231B1 (en) *	2017-11-30	2021-08-31	United Services Automobile Association (Usaa)	Vehicle liquid monitoring system and method
WO2021216870A1 (en)	2020-04-22	2021-10-28	University of Arkansas Technology Ventures	Device for ambient thermal and vibration energy harvesting

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2001275370A (ja) *	2000-03-27	2001-10-05	Toto Ltd	圧電水力発電装置
JP2006023287A (ja) *	2004-06-08	2006-01-26	Shinshu Univ	圧電体を用いたジャーク（加加速度）の測定方法
JP2006226221A (ja) *	2005-02-18	2006-08-31	Univ Nagoya	発電装置

2012
- 2012-06-21 JP JP2012140199A patent/JP2014007798A/ja active Pending
2013
- 2013-03-01 WO PCT/JP2013/001274 patent/WO2013190744A1/ja active Application Filing
- 2013-03-06 TW TW102107900A patent/TW201400699A/zh unknown

Also Published As

Publication number	Publication date
JP2014007798A (ja)	2014-01-16
WO2013190744A1 (ja)	2013-12-27

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JP5658757B2 (ja)	2015-01-28	振動発電素子およびそれを用いた振動発電装置
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US20130127295A1 (en)	2013-05-23	Piezoelectric micro power generator and fabrication method thereof
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