TW201338108A - 半導體封裝件及其製法 - Google Patents

半導體封裝件及其製法 Download PDF

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TW201338108A
TW201338108A TW101107849A TW101107849A TW201338108A TW 201338108 A TW201338108 A TW 201338108A TW 101107849 A TW101107849 A TW 101107849A TW 101107849 A TW101107849 A TW 101107849A TW 201338108 A TW201338108 A TW 201338108A
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substrate
semiconductor package
recess
encapsulant
semiconductor
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TWI459521B (zh
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許聰賢
方顥儒
鍾興隆
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矽品精密工業股份有限公司
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Priority to CN2012100745778A priority patent/CN103311225A/zh
Priority to US13/457,995 priority patent/US8766416B2/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/552Protection against radiation, e.g. light or electromagnetic waves
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/552Protection against radiation, e.g. light or electromagnetic waves
    • H01L23/556Protection against radiation, e.g. light or electromagnetic waves against alpha rays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15158Shape the die mounting substrate being other than a cuboid
    • H01L2924/15159Side view
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

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  • Computer Hardware Design (AREA)
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  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
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Abstract

一種半導體封裝件及其製法,該半導體封裝件係包括:基板、半導體晶片、封裝膠體與金屬層,該基板係具有相對之第一表面與第二表面,且該基板內部並具有接地層,又該第二表面具有外露該接地層之凹部,該半導體晶片係設於該基板之第一表面上,且該封裝膠體係形成於該基板之第一表面上,用以包覆該半導體晶片,而該金屬層則包覆該封裝膠體與基板,且延伸至該凹部,以電性連接該接地層。本發明能有效增加線路的可佈局空間,進而增進線路佈局的彈性。

Description

半導體封裝件及其製法
本發明係有關於一種半導體封裝件及其製法,尤指一種具有電磁屏蔽功能之半導體封裝件及其製法。
隨著半導體技術的演進,電子產品已開發出各種不同封裝產品型態,而為提升整體電性品質,許多電子產品已具有電磁屏蔽之功能,以防止電磁干擾(Electromagnetic Interference,簡稱EMI)產生。
如第1A與1B圖所示者係第5,166,772號美國專利之具有電磁屏蔽功能之半導體封裝件的剖視圖。如圖所示,其係先於基板10上接置並電性連接半導體晶片11,接著,於該基板10上設置罩蓋該半導體晶片11的網狀金屬罩蓋12,再以封裝膠體13將該網狀金屬罩蓋12及半導體晶片11完全包覆,該網狀金屬罩蓋12係藉由電鍍通孔(plated through hole,簡稱PTH)14以進行接地。
惟,該電鍍通孔14係佔用許多基板10空間,使得該基板10的線路佈局範圍減少並受到限制,進而降低整體線路佈局的彈性。
因此,如何避免上述習知技術中之種種問題,俾有效節省基板空間,並增進整體線路佈局的彈性,實已成為目前亟欲解決的課題。
有鑒於上述習知技術之缺失,本發明提供一種半導體封裝件,係包括:具有相對之第一表面與第二表面的基板,該基板內部並具有接地層,且該第二表面具有外露該接地層之凹部;設於該基板之第一表面上的半導體晶片;形成於該基板之第一表面上的封裝膠體,用以包覆該半導體晶片;以及包覆該封裝膠體與基板的金屬層,且其延伸至該凹部,以電性連接該接地層。
所述之半導體封裝件之凹部係位於該第二表面的角落或邊緣。
於本發明之半導體封裝件中,該半導體晶片係以打線或覆晶方式電性連接該基板。
本發明復提供一種半導體封裝件之製法,係包括以下步驟:(A)提供一基板,係具有相對之第一表面與第二表面,該基板內部並具有接地層,於該基板之第一表面上設置有半導體晶片,於該基板之第一表面上形成有包覆該半導體晶片的封裝膠體,且該基板之第二表面形成有外露該接地層之凹部;以及(B)形成包覆該封裝膠體與基板的金屬層,該金屬層並延伸至該凹部,以電性連接該接地層。
於前述之半導體封裝件之製法中,該步驟(A)係包括:提供一基板,係具有相對之第一表面與第二表面,該基板內部並具有接地層;於該基板之第二表面形成外露該接地層之凹部;於該基板之第一表面上接置半導體晶片;以及於該基板之第一表面上形成包覆該半導體晶片的封裝膠體。
依上述之半導體封裝件之製法,該凹部係位於該第二表面的角落或邊緣。
所述之半導體封裝件之製法中,形成該凹部的方式係為機械或雷射鑽孔。
於本發明之半導體封裝件之製法中,該半導體晶片係以打線或覆晶方式電性連接該基板。
又於上述之半導體封裝件之製法中,形成該金屬層的方式係為濺鍍。
於前述之半導體封裝件中,該基板係為封裝基板或電路板。
由上可知,因為本發明係於基板的下表面形成有凹槽,以使該基板內部的接地層外露,再使後續形成之用以電磁屏蔽的金屬層經由該凹槽直接連接該接地層,以達成接地之目的,所以本發明無須設置接地專用之電鍍通孔,故可有效節省基板空間,並使整體線路佈局更具有彈性。
以下藉由特定的具體實施例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點及功效。
須知,本說明書所附圖式所繪示之結構、比例、大小等,均僅用以配合說明書所揭示之內容,以供熟悉此技藝之人士之瞭解與閱讀,並非用以限定本發明可實施之限定條件,故不具技術上之實質意義,任何結構之修飾、比例關係之改變或大小之調整,在不影響本發明所能產生之功效及所能達成之目的下,均應仍落在本發明所揭示之技術內容得能涵蓋之範圍內。同時,本說明書中所引用之如「內部」、「角落」、「邊緣」、「上」及「一」等之用語,亦僅為便於敘述之明瞭,而非用以限定本發明可實施之範圍,其相對關係之改變或調整,在無實質變更技術內容下,當亦視為本發明可實施之範疇。
請參閱第2A至2E圖,係本發明之半導體封裝件及其製法的剖視圖。
如第2A圖所示,提供一基板20,係具有相對之第一表面20a與第二表面20b,該基板20內部並具有接地層(ground layer)201;其中,該基板20係可藉由壓合複數介電層與線路層而形成、或者可藉由堆疊形成介電層與線路層方式而形成,惟此為所屬技術領域之通常知識者所能瞭解,故不在此加以贅述與圖示;此外,該基板20可為封裝基板或電路板。
如第2B至2C圖所示,利用機械鑽頭21於該基板20之第二表面20b形成外露該接地層201之凹部200;其中,該凹部200係位於該第二表面20b的角落或邊緣,且形成該凹部200的方式亦可為雷射鑽孔,但不以此為限。
如第2D圖所示,於該基板20之第一表面20a上接置半導體晶片22,並於該基板20之第一表面20a上形成包覆該半導體晶片22的封裝膠體23;其中,該半導體晶片22除了以打線方式電性連接該基板20之外,亦可採用覆晶(flip chip)方式,但不以此為限。
如第2E圖所示,形成包覆該封裝膠體23與基板20的金屬層24,且該金屬層24延伸至該凹部200,並電性連接該接地層201;其中,形成該金屬層24的方式係為濺鍍,但不以此為限。
要補充說明的是,本發明之實施亦可先接置該半導體晶片22並形成該封裝膠體23之後,再形成該凹部200。
本發明復提供一種半導體封裝件,係包括:基板20,係具有相對之第一表面20a與第二表面20b,該基板20內部並具有接地層201,且該第二表面20b具有外露該接地層201之凹部200;半導體晶片22,係設於該基板20之第一表面20a上;封裝膠體23,係形成於該基板20之第一表面20a上,且包覆該半導體晶片22;以及金屬層24,係包覆該封裝膠體23與基板20,且延伸至該凹部200,並電性連接該接地層201。
於本發明之半導體封裝件中,該凹部200係位於該第二表面20b的角落或邊緣。
所述之半導體封裝件中,該半導體晶片22係以打線或覆晶方式電性連接該基板20。
又於前述之半導體封裝件中,該基板20係為封裝基板或電路板。
綜上所述,由於本發明係於基板的下表面形成有凹槽,以使該基板內部的接地層外露,再使後續形成之用以電磁屏蔽的金屬層經由該凹槽直接連接該接地層,以達成接地之目的,因此本發明無須設置接地專用之電鍍通孔,故可有效節省基板空間,並使整體線路佈局更具有彈性。
上述實施例係用以例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修改。因此本發明之權利保護範圍,應如後述之申請專利範圍所列。
10,20...基板
11,22...半導體晶片
12...網狀金屬罩蓋
13,23...封裝膠體
14...電鍍通孔
20a...第一表面
20b...第二表面
200...凹部
201...接地層
21...機械鑽頭
24...金屬層
第1A與1B圖係第5,166,772號美國專利之具有電磁屏蔽功能之半導體封裝件的剖視圖;以及
第2A至2E圖係本發明之半導體封裝件及其製法的剖視圖。
20...基板
20a...第一表面
20b...第二表面
200...凹部
201...接地層
22...半導體晶片
23...封裝膠體
24...金屬層

Claims (9)

  1. 一種半導體封裝件,係包括:基板,係具有相對之第一表面與第二表面,該基板內部並具有接地層,且該第二表面具有外露該接地層之凹部;半導體晶片,係設於該基板之第一表面上;封裝膠體,係形成於該基板之第一表面上,且包覆該半導體晶片;以及金屬層,係包覆該封裝膠體與基板,且延伸至該凹部,以電性連接該接地層。
  2. 如申請專利範圍第1項所述之半導體封裝件,其中,該凹部係位於該第二表面的角落或邊緣。
  3. 如申請專利範圍第1項所述之半導體封裝件,其中,該基板係為封裝基板或電路板。
  4. 一種半導體封裝件之製法,係包括以下步驟:(A)提供一基板,係具有相對之第一表面與第二表面,該基板內部並具有接地層,於該基板之第一表面上設置有半導體晶片,於該基板之第一表面上形成有包覆該半導體晶片的封裝膠體,且該基板之第二表面形成有外露該接地層之凹部;以及(B)形成包覆該封裝膠體與基板的金屬層,且該金屬層延伸至該凹部,以電性連接該接地層。
  5. 如申請專利範圍第4項所述之半導體封裝件之製法,其中,該步驟(A)係包括:提供一基板,係具有相對之第一表面與第二表面,該基板內部並具有接地層;於該基板之第二表面形成外露該接地層之凹部;於該基板之第一表面上接置半導體晶片;以及於該基板之第一表面上形成包覆該半導體晶片的封裝膠體。
  6. 如申請專利範圍第4項所述之半導體封裝件之製法,其中,該凹部係位於該第二表面的角落或邊緣。
  7. 如申請專利範圍第4項所述之半導體封裝件之製法,其中,形成該凹部的方式係為機械或雷射鑽孔。
  8. 如申請專利範圍第4項所述之半導體封裝件之製法,其中,形成該金屬層的方式係為濺鍍。
  9. 如申請專利範圍第4項所述之半導體封裝件之製法,其中,該基板係為封裝基板或電路板。
TW101107849A 2012-03-08 2012-03-08 半導體封裝件及其製法 TWI459521B (zh)

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