TW201321743A - Automatic visual inspection device - Google Patents
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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Abstract
Description
本發明是關於自動檢查形成於玻璃或半導體晶圓等的檢查對象物上的電路圖案等的缺陷的技術。
The present invention relates to a technique for automatically inspecting a defect such as a circuit pattern formed on an inspection object such as a glass or a semiconductor wafer.
例如半導體元件(semiconductor device)在一片晶圓上排列形成有複數個份的電路圖案，並切出成個片而被製造。各個電路圖案為配線或成膜形成幾層成層狀，是否有配線的短路或斷線、異物的混入等的缺陷是在進行了各層的電路圖案形成後全數被進行檢查。(例如專利文獻1)
[專利文獻1] 日本國特開2008-224303號公報For example, a semiconductor device is formed by arranging a plurality of circuit patterns on a wafer and cutting them into individual pieces to be manufactured. Each of the circuit patterns is formed by laminating a plurality of layers in a wiring or film formation, and whether or not a defect such as a short circuit or a disconnection of a wiring or a foreign matter is mixed is inspected after the formation of the circuit pattern of each layer. (for example, Patent Document 1)
[Patent Document 1] Japanese Patent Laid-Open Publication No. 2008-224303
半導體元件等為了增加每單位時間的製造數量，檢查裝置也被要求高的產量(throughput)。因此，為了縮短每一片基板所花費的檢查時間，移動平台的高速化或配置複數個攝影部的形態被想出。但是，即使是使移動平台高速化，在攝影機(camera)的影像取得後，到可取得下一個影像為止的時間仍成為瓶頸，對於高速化仍有界限。
圖10是在習知的技術中的時序圖(time chart)中，透過攝影指示以攝影機拍攝，以時間序列顯示轉送資料的樣子之圖。對攝影機進行攝影指示後，成為攝影機可拍攝的狀態(在圖中記載為攝影ON)，在此期間使閃光燈發光(在圖中記載為ON)，若攝影機的攝影結束(在圖中成為攝影OFF的話)，由攝影機將影像資料轉送到外部機器或緩衝記憶體等。攝影機常被使用一般普及的通用性高的攝影機，但這種攝影機為無儲存拍攝的影像的功能，或在影像資料的轉送中僅記憶一片下一個影像的程度。因此，配合可連續轉送影像資料的間隔Td，以同程度的間隔T1逐次進行了攝影。因此連續攝影時，間隔T1成為時間縮短的瓶頸。
另一方面，為了縮短檢查時間，配置複數個攝影部的形態(例如以兩台攝影機同時取得兩個電路圖案)也被想出，但是當檢查對象物小，彼此的攝影部的間隔無法被縮短時，無法同時拍攝複數個電路，無法依照期待進行時間縮短。
再者，當為了對應多品種而具備複數個攝影倍率不同的物鏡時，因透鏡個數增加，故成為成本上升的因素，為了使檢查品質一致，需補正複數個攝影部的機台差異(machine difference)，也有更成為成本上升的因素的課題。
因此本發明其目的為提供一種自動外觀檢查裝置，攝影機的處理能力可不受到限制而縮短檢查時間。
為了解決以上的課題，記載於申請專利範圍第1項之發明為一種自動外觀檢查裝置，為檢測形成於檢查對象物的圖案的缺陷的檢查對象物檢查裝置，其特徵包含:
承載前述檢查對象物之台部；
使前述台部掃描移動於規定的方向之掃描平台部；
朝前述檢查對象物照射照明光之照明部；
以被由前述照明部照射並藉由前述檢查對象物反射的光或透過前述檢查對象物的光當作觀察光進行導光之鏡筒部；
安裝於前述鏡筒部並拍攝前述觀察光之攝影部；
一邊使前述掃描平台部移動，一邊使前述照明部發光，進行前述觀察光的攝影之控制部；以及
根據預先登記的檢查條件，進行前述被拍攝的前述檢查對象物的影像的好壞判斷之檢查部，
在前述掃描平台部包含有計測前述台部的現在位置之位置計測手段，
在前述鏡筒部包含有使前述觀察光一部分透過，並且改變角度使其一部分反射之光分支手段，
在前述鏡筒部安裝有複數個前述攝影部，以便能各自拍攝藉由前述光分支手段分支的光，
前述控制部包含:
每一前述攝影逐次改變使用於前述攝影的攝影部而進行攝影的功能。
因使用上述發明的裝置，故觀察光被分支且可藉由複數個攝影部同時進行攝影，即使藉由與閃光發光連動而處於具有複數個的攝影部之中的一個在處理中無法進行下一個攝影的狀態，也能以另一攝影部攝影。
記載於申請專利範圍第2項之發明為一種自動外觀檢查裝置，為檢測形成於檢查對象物的圖案的缺陷的檢查對象物檢查裝置，其特徵包含:
承載前述檢查對象物之台部；
使前述台部掃描移動於規定的方向之掃描平台部；
朝前述檢查對象物照射照明光之照明部；
以被由前述照明部照射並藉由前述檢查對象物反射的光或透過前述檢查對象物的光當作觀察光進行導光之鏡筒部；
安裝於前述鏡筒部並拍攝前述觀察光之攝影部；
一邊使前述掃描平台部移動，一邊使前述照明部發光，進行前述觀察光的攝影之控制部；以及
根據預先登記的檢查條件，進行前述被拍攝的前述檢查對象物的影像的好壞判斷之檢查部，
在前述掃描平台部包含有計測前述台部的現在位置之位置計測手段，
在前述鏡筒部包含有改變前述觀察光的角度或方向並使其反射之光反射手段，
在前述鏡筒部安裝有複數個前述攝影部，以便能各自拍攝藉由前述光反射手段反射的光，
前述控制部包含:
每一前述攝影與前述攝影連動並變更前述光反射手段的反射方向，並且逐次改變使用於前述攝影的攝影部而進行攝影的功能。
因使用上述發明的裝置，故觀察光切換方向且可藉由具有複數個的攝影部之中任一個攝影，即使藉由與閃光發光連動而處於具有複數個的攝影部之中的一個在處理中無法進行下一個攝影的狀態，也能切換攝影方向，以另一攝影部攝影。
記載於申請專利範圍第3項之發明為記載於申請專利範圍第2項之自動外觀檢查裝置，其中在前述鏡筒部更安裝有使前述光反射手段的位置或角度變更之致動器部(actuator part)，
前述控制部與前述攝影連動並驅動致動器部，進行前述攝影。
若使用上述發明的裝置，可藉由致動器部控制光反射手段的位置或角度，可防止光反射手段的位置或角度的偏移。
記載於申請專利範圍第4項之發明為記載於申請專利範圍第3項之自動外觀檢查裝置，其中即使前述致動器部在前述攝影中，光反射手段的該位置或該角度也處於移動狀態。
若使用上述發明的裝置，在攝影的前後，光反射手段的位置或角度也持續變化，可消除起因於使其靜止或再度移動所生的慣性力，可減少成為連續攝影的瓶頸的時間。
記載於申請專利範圍第5項之發明為記載於申請專利範圍第4項之自動外觀檢查裝置，其中前述攝影中的致動器部的移動速度比非攝影時的該移動速度慢。
若使用上述發明的裝置，在攝影的前後，光反射手段的位置或角度也持續變化，也可一邊減輕起因於使其靜止或再度移動所生的慣性力，一邊減輕攝影時的影像模糊。
記載於申請專利範圍第6項之發明為記載於申請專利範圍第3項至第5項中任一項之自動外觀檢查裝置，其中在前述致動器部或前述光反射手段安裝有檢測現在位置的位置檢測器或檢測現在角度的角度檢測器，
根據該位置檢測器或該角度檢測器的資訊進行前述攝影。
若使用上述發明的裝置，可管理藉由鏡筒內的前述光反射手段反射的觀察光的角度，可防止檢查對象物的被檢查區域偏離攝影部的視野。
記載於申請專利範圍第7項之發明為記載於申請專利範圍第1項至第6項中任一項之自動外觀檢查裝置，其中照射前述照明光的照明部為照射閃光燈的閃光燈部，
前述攝影是藉由閃光燈的發光而進行。
若使用上述發明的裝置，因可比較容易地照射發光能量高的閃光，故即使是使用於攝影的攝影機使用通用性高的廉價的攝影機的情形，也能適用本發明。In order to increase the number of manufacturing per unit time, the inspection device is also required to have a high throughput. Therefore, in order to shorten the inspection time required for each substrate, the speed of the mobile platform is increased or a configuration in which a plurality of imaging units are arranged is conceived. However, even if the mobile platform is speeded up, the time until the next image can be acquired after the acquisition of the image of the camera becomes a bottleneck, and there is still a limit to the speed.
Fig. 10 is a view showing a state in which a transfer data is displayed in time series by a photographing instruction through a photographing instruction in a time chart in the prior art. When the camera is instructed to shoot, it is in a state where the camera can be photographed (in the figure, it is described as "ON"). During this period, the flash is illuminated (indicated as ON in the figure), and the camera is finished (the image is turned OFF in the figure). In the case of a camera, the image data is transferred to an external device or a buffer memory. Cameras are often used with highly versatile cameras that are generally popular, but such cameras are capable of storing images that are not stored, or that are only one of the next images in the transfer of image data. Therefore, with the interval Td at which the image data can be continuously transferred, photographing is sequentially performed at the same interval T1. Therefore, at the time of continuous shooting, the interval T1 becomes a bottleneck for shortening the time.
On the other hand, in order to shorten the inspection time, a configuration in which a plurality of imaging units are arranged (for example, two circuit patterns are simultaneously acquired by two cameras) has been conceived. However, when the inspection object is small, the interval between the imaging units cannot be shortened. When a plurality of circuits cannot be taken at the same time, the time cannot be shortened as expected.
In addition, when there are a plurality of objective lenses having different imaging magnifications in response to a plurality of types, the number of lenses increases, which causes a cost increase. In order to match the inspection quality, it is necessary to correct the difference of the plurality of imaging units. Difference), there is also a problem that is a factor that increases costs.
SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide an automatic visual inspection apparatus in which the processing capability of a camera can be shortened without limitation.
In order to solve the above problems, the invention of the first aspect of the invention is an automatic visual inspection device, which is an inspection object inspection device for detecting a defect formed in a pattern of an inspection object, and includes:
a table portion carrying the aforementioned inspection object;
Scanning the platform portion that moves the table portion in a predetermined direction;
Illuminating the illumination unit with illumination light toward the inspection object;
a lens barrel portion that is guided by the illumination unit and that reflects light by the inspection object or light that has passed through the inspection object as light for observation;
a photographing portion mounted on the barrel portion and photographing the observation light;
The control unit that emits the observation light while causing the illumination unit to emit light while moving the scanning platform unit, and performs the inspection of the quality of the image to be inspected by the pre-registered inspection condition. unit,
The scanning platform unit includes a position measuring means for measuring a current position of the table portion,
The lens barrel portion includes a light branching means for transmitting a part of the observation light and changing an angle to partially reflect it.
A plurality of the image capturing portions are attached to the barrel portion so as to be able to respectively capture light branched by the light branching means.
The aforementioned control unit includes:
Each of the aforementioned photographs sequentially changes the function of photographing used in the photographing portion of the photographing described above.
Since the apparatus of the above invention is used, the observation light is branched and can be simultaneously photographed by a plurality of photographing sections, and even one of the plurality of photographing sections by the flash light emission cannot be processed in the next one. The state of photography can also be photographed in another photography department.
The invention described in the second aspect of the patent application is an automatic visual inspection device, which is an inspection object inspection device for detecting a defect formed in a pattern of an inspection object, and includes:
a table portion carrying the aforementioned inspection object;
Scanning the platform portion that moves the table portion in a predetermined direction;
Illuminating the illumination unit with illumination light toward the inspection object;
a lens barrel portion that is guided by the illumination unit and that reflects light by the inspection object or light that has passed through the inspection object as light for observation;
a photographing portion mounted on the barrel portion and photographing the observation light;
The control unit that emits the observation light while causing the illumination unit to emit light while moving the scanning platform unit, and performs the inspection of the quality of the image to be inspected by the pre-registered inspection condition. unit,
The scanning platform unit includes a position measuring means for measuring a current position of the table portion,
The lens barrel portion includes a light reflecting means for changing the angle or direction of the observation light and reflecting it.
a plurality of the photographing portions are attached to the barrel portion so as to be able to respectively capture light reflected by the light reflecting means.
The aforementioned control unit includes:
Each of the above-described photographing changes the direction of reflection of the light reflecting means in conjunction with the photographing, and sequentially changes the photographing portion used for the photographing to perform photographing.
Since the apparatus of the above invention is used, the light switching direction can be observed and any one of the plurality of imaging units can be photographed, and even one of the plurality of imaging units can be processed in conjunction with the flash illumination. It is impossible to perform the next shooting state, and it is also possible to switch the shooting direction and take another photography unit.
The invention of the third aspect of the invention is the automatic visual inspection device according to the second aspect of the invention, wherein the actuator unit is further provided with an actuator unit for changing the position or angle of the light reflecting means. Effort part),
The control unit drives the actuator unit in conjunction with the photographing to perform the photographing.
According to the apparatus of the above invention, the position or angle of the light reflecting means can be controlled by the actuator portion, and the displacement of the position or angle of the light reflecting means can be prevented.
The invention of claim 4 is the automatic visual inspection device according to the third aspect of the invention, wherein the position or the angle of the light reflecting means is in a moving state even if the actuator portion is in the photographing. .
According to the apparatus of the above invention, the position or angle of the light reflecting means is continuously changed before and after the photographing, and the inertial force generated by the stationary or re-moving can be eliminated, and the time required for the bottleneck of continuous photographing can be reduced.
The invention of claim 5 is the automatic visual inspection device according to the fourth aspect of the invention, wherein the moving speed of the actuator unit in the photographing is slower than the moving speed in the non-photographing.
According to the apparatus of the above invention, the position or angle of the light reflecting means is continuously changed before and after the photographing, and the image blurring at the time of photographing can be reduced while reducing the inertial force caused by the stationary or re-moving.
The invention of claim 6 is the automatic visual inspection device according to any one of claims 3 to 5, wherein the actuator portion or the light reflecting means is mounted with the detection current position. Position detector or angle detector that detects the current angle,
The aforementioned photographing is performed based on the information of the position detector or the angle detector.
According to the apparatus of the above aspect of the invention, the angle of the observation light reflected by the light reflecting means in the lens barrel can be managed, and the inspection target area of the inspection object can be prevented from deviating from the visual field of the imaging unit.
The invention of claim 7, wherein the illumination unit that illuminates the illumination light is a flash unit that illuminates the flash lamp, in the automatic visual inspection device according to any one of the first to sixth aspects of the invention.
The aforementioned photographing is performed by the light emission of the flash lamp.
According to the apparatus of the above aspect of the invention, since the flash of high illuminating energy can be relatively easily irradiated, the present invention can be applied even in the case where a camera used for photographing uses a low-cost camera having high versatility.
【發明的功效】
攝影機的處理能力可不受到限制而縮短檢查時間。[Effect of the invention]
The processing power of the camera can be shortened without limitation.
針對用以實施本發明的形態，一邊使用圖一邊進行說明。在以下的說明中本發明的檢查對象物是根據在半導體晶圓10形成有複數個電路圖案的例子進行說明。
圖1是顯示體現本發明的形態的一例之斜視圖。以下在各圖中設正交座標系的3軸為X、Y、Z，設XY平面為水平面，設Z方向為鉛直方向。特別是Y方向是以箭頭的方向為裏側，表現其反方向為跟前側，Z方向是以箭頭的方向為上，表現其反方向為下。而且，以Z軸為旋轉中心的旋轉方向是以θ方向表現。
自動外觀檢查裝置1包含如下構件而構成:安裝於裝置基座11之上的運送部2；朝檢查對象物照射光之閃光燈部3；安裝於裝置基座11之鏡筒部4；拍攝藉由鏡筒部4導光的觀察光之攝影部5；控制部9。各構成零件透過未圖示的裝置框架(apparatus frame)或固定托架(fixed bracket)等而被安裝，以便配置於圖示於圖1的位置。
運送部2包含如下構件而構成:安裝於裝置基座11之上的X軸平台21；安裝於X軸平台21上之Y軸平台22；安裝於Y軸平台22上之旋轉平台23；安裝於旋轉平台23上之台部25。
X軸平台21可使安裝於其上的Y軸平台22移動於X方向，Y軸平台22可使安裝於其上的旋轉平台23移動於Y方向，旋轉平台23可使安裝於其上的台部25旋轉於θ方向。此外，X軸平台21、Y軸平台22、旋轉平台23構成本發明的掃瞄平台部。
台部25在表面形成有溝或孔，前述溝或孔經由開關控制用閥連接於真空源。承載於台部25的半導體晶圓10透過負壓吸附保持，以便在台部25的移動中不會位置偏移。
X軸平台21包含X軸位置檢測器而構成，可取得安裝於X軸平台21上的Y軸平台22的X方向的現在位置資訊。同樣地，Y軸平台22包含Y軸位置檢測器而構成，可取得安裝於Y軸平台22上的旋轉平台23的Y方向的現在位置資訊。進而旋轉平台23包含旋轉角度檢測器而構成，可取得安裝於旋轉平台23上的台部25的θ方向的現在角度資訊。
運送部2因成如上述的構成，故可使承載於台部25上的半導體晶圓10移動於XY方向，或使其旋轉於θ方向，進而使其掃描移動於規定的方向。而且，可取得台部的XY方向的現在位置資訊與旋轉角度資訊。
閃光燈部3包含同軸落射照明(coaxial episcopic illumination)31與照明發光裝置31s而構成，可在極短時間使高光量的光發光(所謂的閃光發光)。同軸落射照明31被安裝於詳細於後述的鏡筒部4，可透過鏡筒部4內的半鏡(half mirror)等在與觀察光同軸的光程(optical path)朝半導體晶圓10約略垂直地照射光。
而且，閃光燈部3也可以藉由環型照明33與照明發光裝置33s、面發光型照明35與照明發光裝置35s等構成，可與同軸落射照明31及照明發光裝置31s代替或併用而使用。環型照明33被安裝於鏡筒部4的外側，可斜斜地朝半導體晶圓10照射照明光。
面發光型照明35被埋入安裝於台部25，由半導體晶圓10的底面朝上方照射照明光。
鏡筒部4成能以被由閃光燈部3朝半導體晶圓10照射且藉由半導體晶圓10反射或透過半導體晶圓10的光當作觀察光而導光的構造。
在鏡筒部4於觀察光被導光的路徑的途中包含有光分支手段45，可使觀察光一部分透過，並且改變角度使其一部分反射。而且，鏡筒部4適宜包含攝影用鏡42而構成，成可改變觀察光的方向而導光的構造。
光分支手段45可舉例說明半鏡或分光器(beam splitter)等的光學元件。
攝影部5是在鏡筒部4安裝有複數台攝影機51a、51b，可藉由各個攝影機51a、51b拍攝被導光、分支的觀察光而構成。而且，在鏡筒部4安裝有物鏡55a、55b，能以規定的觀察倍率拍攝前述觀察光。
攝影機51a、51b可舉例說明CCD(Charge Coupled Device:電荷耦合元件)或CMOS(Complementary Metal Oxide Semiconductor:互補金氧半導體)、使用其他的攝影元件的攝影機，若是以拍攝的影像當作影像信號，可輸出到控制部9的話即可。而且，攝影機51a、51b為可進行高感度攝影者較佳。據此，即使觀察光40v藉由光分支手段45分支成兩個觀察光45v1、45v2，各自的光量與分支前的觀察光40v比較變成一半，也能充分地攝影。或者攝影機51a、51b的感度維持不變，增加閃光燈的發光能量並確保觀察光的亮度也可以。
圖2是顯示體現本發明的形態的一例之系統構成圖。如圖2所示，上述的運送部2、閃光燈部3、攝影部5的各機器與控制部9的各機器連接。
在控制部9連接包含有:控制用電腦90、資訊輸入手段91、資訊輸出手段92、警告手段93、資訊記錄手段94、機器控制單元95。
控制用電腦90可舉例說明微電腦、個人電腦、工作站(work station)等的搭載有數值運算單元者。資訊輸入手段91可舉例說明鍵盤或滑鼠或開關等。資訊輸出手段92可舉例說明影像顯示顯示器或燈等。
發出警告手段93可舉例說明蜂鳴器(buzzer)或揚聲器(speaker)、燈等可提醒作業者的裝置。資訊記錄手段94可舉例說明記憶卡(memory card)或資料碟(data disk)等的半導體記錄媒體或磁記錄媒體或光磁記錄媒體等。機器控制單元95可舉例說明可程式控制器(programmable controller)或被稱為運動控制器(motion controller)的機器等。
由攝影機51a、51b輸出的影像信號經由影像處理單元96被輸入到控制用電腦90。影像處理單元96一般被稱為GPU(Graphic Processing Unit:圖形處理單元)，可舉例說明設置於控制用電腦90的外部的形態者、連接於控制用電腦90的框體內的形態者、利用控制用電腦90的影像處理部者等。
被輸入到影像處理單元96的觀察影像如在後述詳細說明的，可藉由控制用電腦90進行好壞判斷(亦即檢查)。
機器控制單元95與X軸平台21、Y軸平台22、旋轉平台23連接。而且，機器控制單元95與閃光燈部3的照明發光裝置31s、33s、35s連接。照明發光裝置31s、33s、35s中的照明的光量調節的方式可舉例說明調節施加的電壓或電流，或調節電壓或電流的施加時間的方式，根據來自機器控制單元95的發光指令信號，閃光燈以預先設定的條件發光。
機器控制單元95與其他的控制機器(未圖示)連接，可藉由對該等控制機器給予控制用信號，使各機器動作或使其靜止。
[動作流程]
圖3是顯示體現本發明的形態的一例之流程圖。在圖3中為了檢查半導體晶圓10全面，以各攝影機進行攝影的一連串的流程是以每一步驟顯示。首先將半導體晶圓10承載於自動外觀檢查裝置1的台部25(s101)，讀出預先登記的檢查條件等(s102)。其次，朝形成於半導體晶圓10上的基準標記10m的讀取位置移動(s103)，進行對準(alignment)(s104)。
接著，使台部25朝第一列的計測開始位置移動(s107)，以規定的速度移動掃描平台部2，開始台部25的移動(s108)。一邊移動台部25，一邊根據由掃描平台部的前述X軸位置檢測器及Y軸位置檢測器取得的台部的現在位置資訊，判斷是否為應以攝影機1拍攝的位置(s110)，若為攝影機1的攝影位置，則使閃光燈發光並以攝影機1進行攝影(s112)，繼續台部25的移動。而且，判斷前述台部的現在位置資訊是否為應以攝影機2拍攝的位置(s114)，若為攝影機2的攝影位置，則使閃光燈發光並以攝影機2進行攝影(s115)，繼續台部25的移動。另一方面，前述台部的現在位置資訊若不是以任一台攝影機拍攝的位置，則仍舊繼續台部25的移動。
然後根據前述台部的現在位置資訊判斷第一列的攝影是否結束了(s116)，若判斷為第一列的攝影結束了，則使台部的移動停止(s117)。另一方面，若判斷為第一列的攝影未結束，則重複上述步驟s110~s116。
其次，判斷是否以上述一列的攝影結束所有的攝影(s118)，若判斷為所有的攝影結束，則由台部25取出檢查對象。另一方面，若判斷為以前述步驟s118未結束所有的攝影，則使台部25朝下一列的計測開始位置移動，重複上述一連串的攝影步驟(s107~118)。
[時序圖]
圖4是顯示體現本發明的形態的一例之時序圖，為時間序列地顯示使用圖1~圖3說明的自動外觀檢查裝置1的各部動作之圖。圖中的橫軸是表示時間t，附加虛線當作輔助線，以使各時刻中的各部動作的前後狀態明確。前述同一條虛線上是意味著同一時刻。
根據前述台部的現在位置資訊，攝影指示為每一間隔T2被發出。首先，使用於攝影的攝影機切換到攝影機51a(亦即攝影機1)側，攝影指示一被發出，就藉由攝影機1進行攝影。在攝影機1的攝影中閃光燈發光，攝影機1的攝影結束後，影像資料被轉送。
在攝影機1的資料轉送中，接著使用於攝影的攝影機被切換到攝影機51b(亦即攝影機2)側。然後，攝影指示一被發出，就藉由攝影機2進行攝影。在攝影機2的攝影中閃光燈發光，攝影機2的攝影結束後，影像資料被轉送。在攝影機2的資料轉送中，接著使用於攝影的攝影機被切換到攝影機1側。藉由重複該一連串的動作，可每一間隔T2進行連續攝影，與習知的攝影間隔T1比較，能以一半的時間進行連續攝影。進而若增加攝影機的台數，則可縮短連續攝影的間隔。此時攝影機51a、51b使用與以往相同的攝影機，攝影機的處理能力可不受到限制而縮短檢查時間。
再者，即使是為了對應品種而具備複數個攝影倍率不同的物鏡55a、55b的情形，也無須對應攝影機台數份而增加各個物鏡的個數。因此增加物鏡造成的成本上升因素消失。再者，與以複數台攝影機和複數個物鏡構成檢查裝置的形態比較，起因於物鏡的個別差異(individual difference)被拍攝的電路圖案相互的失真(distortion)或像差(aberration)消失，容易使檢查品質一致。而且，也無須另外進行用以使檢查品質一致的影像補正，可消除各種成本上升因素。
[另一形式1]
在上述的說明中舉例說明了藉由光分支手段45使觀察光分支，使用複數台攝影機拍攝檢查對象物的形態。但是，以配置光反射手段47，改變光反射手段47的位置或角度，切換觀察光被導光的角度，以取代光分支手段45之形態也可以。圖5是顯示體現本發明的形態的另一例之斜視圖，顯示具備另一形態的鏡筒部4a的自動外觀檢查裝置1a，以取代使用圖1說明的自動外觀檢查裝置1的鏡筒部4。以下針對鏡筒部4a就與鏡筒部4的相異點進行說明，針對其他的共通點則省略記載。
在鏡筒部4於觀察光被導光的路徑的途中具備有光反射手段47，可改變觀察光的方向(亦即角度)並使其反射。光反射手段47可使其位置或角度變更而配置，可切換成以符號47圖示的位置，與以虛線表示的待避位置47a而配置。例如如圖5所示，若光反射手段47與觀察光的光軸交叉而配置成傾斜45°的話，則被導光於Z方向的觀察光改變90°方向，被導光於X方向，觀察光藉由攝影機51b拍攝。另一方面，若配置於光反射手段與觀察光的光軸不交叉的待避位置47a的話，則被導光於Z方向的觀察光原封不動地被導光於Z方向，觀察光藉由攝影機51b拍攝。
光反射手段47可舉例說明鏡子(mirror)或稜鏡(prism)等的光學元件，若為改變入射的光的方向並反射者即可。光反射手段47透過鏡筒部4a與鉸鏈(hinge)安裝，以便一端成為轉動中心，與安裝於鏡筒部4a的致動器部60的可動構件可轉動地連結。於是，可透過致動器部60的ON/OFF動作切換於以符號47表示的位置與以符號47a表示的位置。
或者，光反射手段47在使安裝角度固定的狀態下安裝於致動器部60的可動構件，可透過致動器部60的ON/OFF動作，在X方向切換位置而安裝也可以。致動器部60與機器控制單元95連接，可根據來自機器控制單元95的指令信號進行ON/OFF動作而構成。
[另一形式2]
致動器部60不被限定於直動式，也可以為旋轉式，若為可藉由改變光反射手段47的位置、角度或方向而改變被導光的觀察光40v的方向的話即可。而且，也可適宜增加攝影機的台數而配置。
圖6A是顯示體現本發明的形態的再另一例之斜視圖，顯示使用旋轉式的致動器部60a與兩台攝影機51a、51b的形態。圖6B是顯示體現本發明的形態的再另一例之俯視圖，為平面視圖6A中的箭視A-A部之剖面圖。
觀察光通過鏡筒部4b的開口部40h，被導光到光反射手段48。光反射手段48與安裝於鏡筒部4b的旋轉式的致動器部60a連結，使其旋轉於箭頭60v的方向。顯示現在的狀態為被導光於Z方向的觀察光40v改變角度成以箭頭48v表示的方向且被導光於X方向箭頭側，藉由反射鏡43a反射而被導光於Z方向上，藉由攝影機51a攝影的樣子。而且，在旋轉式致動器部60a安裝有未圖示的角度檢測器67(所謂的旋轉式編碼器(rotary encoder))，可取得旋轉式致動器部60a的角度資訊。因成如圖6A、圖6B所示的形態，故光反射手段48更進一步旋轉，若被反射的觀察光48v朝反射鏡43b的方向，則觀察光40v被導光到與X方向箭頭相反側，藉由反射鏡43b反射而被導光於Z方向上，可藉由攝影機51b觀察。而且，光反射手段48更進一步旋轉，若再度被反射的觀察光48v朝反射鏡43a的方向，則可藉由攝影機51a觀察，可藉由重複上述一連串的動作，適用本發明而重複觀察。
圖7是體現本發明的形態的再另一例之時序圖，為時間序列地顯示使用圖6A、圖6B說明的自動外觀檢查裝置的各部動作之圖。圖中的橫軸是表示時間t，為了使各時刻中的各部動作的前後狀態明確起見，附加虛線當作輔助線。前述同一虛線上是意味著同一時刻。
根據前述台部的現在位置資訊，攝影指示每一間隔T2被發出。首先，使用於攝影的攝影機切換到攝影機51a(亦即攝影機1)側，攝影指示一被發出，就藉由攝影機1進行攝影。在攝影機1的攝影中閃光燈發光，攝影機1的攝影結束後，攝影資料被轉送。
在攝影機1的資料轉送中，接著使用於攝影的攝影機被切換到攝影機51b(亦即攝影機2)側。然後，攝影指示一被發出，就藉由攝影機2進行攝影。在攝影機2的攝影中閃光燈發光，攝影機2的攝影結束後，影像資料被轉送。在攝影機2的資料轉送中，被切換到接著使用於攝影的攝影機1側。藉由重複該一連串的動作，可每一間隔T2進行連續攝影，與習知的攝影間隔T1比較，能以1/2的時間進行連續攝影。進而若增加攝影機的台數，則可縮短連續攝影的間隔。
再者，在致動器部60、60a的可動構件或安裝於其前頭的光反射手段47安裝編碼器部65，以便能檢測出致動器部60、60a或光反射手段47的現在位置、現在角度或方向較佳。
編碼器部65可舉例說明在延伸於一方向的棒狀、帶狀(ribbon)的構件刻有多數個光學的或電磁的細孔(所謂的開縫(slit))之線性標度(linear scale)，或在圓板或圓筒狀的構件刻有同樣的開縫之旋轉式編碼器等。
若為使用了如上述的光反射手段48的形態，則可防止因使用光分支手段45並增加攝影機的台數的形態而產生的觀察光的光量降低。因此，無須提高攝影機的感度，或使用發光能量更高的閃光燈，可使用和以往相同的感度的攝影機，與相同的發光能量的閃光燈而縮短檢查時間。
[另一形式3]
圖8是體現本發明的形態的再另一例之時序圖，與使用圖7說明的時序圖一樣，為時間序列地顯示自動外觀檢查裝置的各部動作之圖。在該形態中與使用圖7說明的自動外觀檢查裝置不同，在鏡筒部本體40之中用以改變觀察光的方向的光反射手段48在閃光燈的發光時不成為完全停止狀態，位置一點一點地改變。亦即光反射手段48藉由致動器部60a持續移動，在未使其完全停止的狀態下，透過各自的觀察攝影機進行攝影。若針對具體的鏡子的位置、角度一邊圖示，一邊說明，則顯示於圖8的虛線A的軌跡是顯示光反射手段48以一定的轉速旋轉的狀態。亦即不會朝攝影機1、2側靜止，而是持續移動。此時，照明光因使用發光時間極短的閃光燈，故能當作無觀察影像的模糊來處理。據此，為了嚴密地切換觀察光的方向，無須使致動器部60a完全停止，為了等候停止或使其再度移動所施加的慣性的影響減少，給予致動器部60a的負擔也被減輕。因此，能以更高速進行連續攝影。
此情形，閃光燈發光時的致動器部60a的移動速度哪種程度會被容許呢是藉由閃光燈發光時的致動器部60a的移動距離或角度，亦即藉由可當作在實際的觀察影像無模糊而處理的程度而決定。也就是說閃光燈發光時間極短的情形，或切換的攝影機台數少且可拉長攝影的間隔的情形，致動器部60a既以與閃光發光時也以與閃光非發光時相同的移動速度使其驅動的話也可以。
另一方面，需要所切換的攝影機台數多而縮短攝影的間隔的情形，或若因與閃光燈發光時間的關係，既以與閃光發光時也以與閃光非發光時相同的移動速度使致動器部60a驅動而在觀察影像產生模糊的情形，與閃光非發光時比較，若減緩閃光發光時的致動器部60a的移動速度而進行的話即可。若針對具體的鏡子的位置、角度一邊圖示，一邊說明的話，圖8的實線B所示的軌跡是表示一邊使轉速變化，一邊使光反射手段48旋轉的狀態。也就是說光反射手段48雖然透過攝影機1、2進行攝影的瞬間朝向攝影機1、2側，但通過其前後且未完全靜止，與閃光非發光時(亦即非觀察時)比較，減速且持續旋轉。然後在攝影的前後的減速區間以外進行加速後以等速旋轉，再度於攝影前減速之一連串的動作被重複。
(實施例一)
以下顯示使用圖1~圖7說明的體現本發明的形態的再另一例中的實施例。
攝影部5的攝影機51a、51b是使用以具有像素間距(pixel pitch)5微米的格子狀像素的黑白CMOS當作攝影元件之最大框速率(maximum frame rate)140fps的電子快門(electronic shutter)式攝影機。在攝影機51a、51b，在觀察對象物10w的移動方向排列有約1600像素，在與移動方向正交的方向也排列有約1600像素的區域感測器(area sensor)被使用。而且，物鏡的倍率被設定，以便在觀察對象物10w的移動方向得到4.0mm的長度的觀察區域。然後，觀察對象物10w每次移動3.0mm，就使照明發光，以攝影機51a、51b交互進行攝影。此時使觀察對象物10w移動的掃瞄平台部被設定為720mm/sec。於是，照明部3被以240Hz重複發光。這種形態的情形若是習知的技術，則無法以框速率140fps的攝影機進行附帶影像轉送的連續攝影，惟藉由適用本發明，因能以實質120fps進行攝影與影像轉送，故可對應。
此外，照明部3使用如下的形態更佳:使用利用鹵素或氙燈(xenon lamp)的閃光燈。若為閃光燈，則可在非常少的時間內比較容易地照射發光能量高的(例如對攝影必要充分的能量半值寬3μsec的)閃光。於是，即使是使用快門速度慢不適合高感度攝影的通用性高的廉價的攝影機的情形，也能充分得到被照射的光的能量。因此，可連續拍攝以高速移動的檢查對象物，可適用本發明而進行自動外觀檢查。
而且，因以半鏡將觀察光2分支並以兩台攝影機觀察，故令閃光燈的光量為通常的兩倍而照射。據此，以各自的攝影機觀察的光量變成與通常一樣。
若著眼於此時的影像模糊，在閃光燈發光的時間:3μsec的時候，觀察對象物10w移動的距離為2.16μm，該量相當於攝影的模糊。該影像模糊對觀察視野全體的長度:4.0mm為約1/1850，若換算成攝影元件的像素，則成為約0.86像素份。該影像模糊量也取決於多麼緻密地觀察觀察對象，惟例如若設當作觀察對象的最小的線寬為22μm(亦即10像素份)以上，則可當作大致不被視為問題的程度，在適用本發明上不成為問題。另一方面，即使當作觀察對象的最小的線寬未滿22μm，也可藉由使影像處理或檢查演算法適當化而適用本發明。
在以上的說明中是針對在規定的攝影時間內閃光燈成為發光狀態的例子進行了說明。但是，本發明不被限定於這種形態，以照射照明光僅規定的時間內，在此期間瞬間地進行攝影的形態也可以，可藉由如下述的實施例使其體現。
圖9是體現本發明的形態的變形例中的時序圖，為使用圖7而顯示的形態的變形例。亦即在該變形例中，攝影指示成為ON狀態後，照明僅規定時間成為ON狀態，在此期間攝影被瞬間地進行。若顯示具體例的話，將攝影機的電子快門設定於1/100,000sec(亦即攝影時間為10μsec)~1/500,000sec(亦即攝影時間為2μsec)，攝影指示成為ON狀態後，使前述快門時間的攝影所需的光量的照明發光1/100秒(亦即10msec)~1/1000秒(亦即1msec)左右，在此期間以攝影機進行攝影。於是，可適用本發明進行自動外觀檢查。
若著眼於此時的影像模糊，在閃光燈發光的時間:2μsec的時候，觀察對象物10w移動的距離為1.44μm，該量相當於攝影的模糊。該影像模糊對觀察視野全體的長度:4.0mm為約1/2780，若換算成攝影元件的像素，則成為約0.57像素份。而且，在閃光燈發光的時間:10μsec的時候，觀察對象物10w移動的距離為7.2μm，該量相當於攝影的模糊。該影像模糊對觀察視野全體的長度:4.0mm為約1/560，若換算成攝影元件的像素，則成為約1.44像素份。該影像模糊量也取決於多麼緻密地觀察觀察對象，惟例如若設當作觀察對象的最小的線寬為15~72μm(亦即10像素份)以上，則可當作大致不被視為問題的程度，在適用本發明上不成為問題。另一方面，即使當作觀察對象的最小的線寬未滿15~72μm，也可藉由使影像處理或檢查演算法適當化而適用本發明。
(實施例二)
以下顯示使用圖6A、圖6B、圖7說明的體現本發明的形態的再另一例中的實施例。
當使用兩台攝影機51a、51b時，使旋轉式致動器部60a驅動，使光反射手段48以每秒120轉(亦即7200rpm)旋轉。然後錯開半週期且重複進行攝影。據此，變成與如下相同:各個攝影機51a、51b分別一邊被以120fps攝影，實際的攝影一邊被以240fps重複。
(實施例三)
以下顯示使用圖8說明的體現本發明的形態的再另一例中的實施例。
當攝影機為兩台攝影機且以120fps進行攝影時，一邊以3倍速的每秒360轉(亦即21600rpm)使旋轉式致動器旋轉，一邊以減速狀態的每秒30轉(亦即1800rpm)使其旋轉僅攝影角度的前後10度份，每一該前後10度當作加減速區域。據此，攝影中的鏡子轉速減少到1/4，影像模糊的量也被減少。進而若一邊提高未攝影的時候的轉速，一邊降低攝影中的鏡子轉速而構成的話，則影像模糊的量更被減少。
(攝影機台數的增加例)
在上述的說明中雖然舉例說明了使用兩台攝影機的形態，但本發明也能適用於使用兩台以上的台數的攝影機的形態。例如除了使用圖6A、圖6B所示的形態外，也在光反射手段48旋轉了90度的Y方向箭頭側及其相反側各自配置攝影用鏡子及攝影機。據此，在光反射手段48的轉速(720rpm)與攝影速率(120fps)原封不動下使用合計4台的攝影機，可進行實質480fps的攝影。此外，此時閃光燈是以480fps使其發光。
而且，當在攝影的前後使旋轉角度減速時，可藉由令在上述規定為每10度的角度為每5度而適用本發明。
另一方面，若為半鏡分支，則可藉由更進一步使一次被分支的光分支，將觀察光分支導光到4台攝影機。然後若以通常的4倍的光量使閃光燈發光，以480fps進行閃光發光的話，則可適用本發明。The embodiment for carrying out the invention will be described with reference to the drawings. In the following description, the inspection object of the present invention will be described based on an example in which a plurality of circuit patterns are formed on the semiconductor wafer 10.
Fig. 1 is a perspective view showing an example of a mode embodying the present invention. Hereinafter, in each of the figures, the three axes of the orthogonal coordinate system are X, Y, and Z, and the XY plane is a horizontal plane, and the Z direction is a vertical direction. In particular, the Y direction is the inner side of the arrow direction, and the reverse direction is the front side, and the Z direction is the direction of the arrow, and the reverse direction is the lower side. Further, the rotation direction with the Z axis as the center of rotation is expressed in the θ direction.
The automatic visual inspection device 1 includes a transport unit 2 that is attached to the apparatus base 11 , a flash unit 3 that emits light toward the inspection object, and a lens barrel unit 4 that is attached to the apparatus base 11; The photographing unit 5 that observes the light guided by the barrel portion 4; the control unit 9. Each component is attached through an apparatus frame (not shown), a fixed bracket, or the like so as to be placed at the position shown in FIG.
The transport unit 2 includes: an X-axis platform 21 mounted on the device base 11; a Y-axis platform 22 mounted on the X-axis platform 21; a rotating platform 23 mounted on the Y-axis platform 22; The table portion 25 on the table 23 is rotated.
The X-axis stage 21 can move the Y-axis stage 22 mounted thereon in the X direction, and the Y-axis stage 22 can move the rotating platform 23 mounted thereon in the Y direction, and the rotating platform 23 can be mounted on the stage The portion 25 is rotated in the θ direction. Further, the X-axis stage 21, the Y-axis stage 22, and the rotating platform 23 constitute the scanning platform portion of the present invention.
The table portion 25 is formed with a groove or a hole on the surface, and the groove or hole is connected to the vacuum source via a switch control valve. The semiconductor wafer 10 carried on the stage portion 25 is held by the negative pressure adsorption so as not to be displaced in the movement of the stage portion 25.
The X-axis stage 21 includes an X-axis position detector, and can obtain current position information in the X direction of the Y-axis stage 22 mounted on the X-axis stage 21. Similarly, the Y-axis stage 22 includes a Y-axis position detector, and the current position information in the Y direction of the rotating platform 23 mounted on the Y-axis stage 22 can be obtained. Further, the rotating platform 23 includes a rotation angle detector, and can obtain current angle information in the θ direction of the table portion 25 attached to the rotating platform 23.
Since the transport unit 2 has the above configuration, the semiconductor wafer 10 placed on the stage portion 25 can be moved in the XY direction or rotated in the θ direction, and the scan can be moved in a predetermined direction. Moreover, the current position information and the rotation angle information in the XY direction of the table portion can be obtained.
The flash unit 3 includes a coaxial episcopic illumination 31 and an illumination light-emitting device 31s, and can emit light of a high light amount (so-called flash light emission) in a very short time. The coaxial epi-illumination illumination 31 is attached to the barrel portion 4, which will be described later in detail, and can be passed through a half mirror or the like in the barrel portion 4 so that an optical path coaxial with the observation light is approximately perpendicular to the semiconductor wafer 10. Ground light.
Further, the flash unit 3 may be configured by the ring type illumination 33, the illumination light-emitting device 33s, the surface-emission type illumination 35, the illumination light-emitting device 35s, or the like, and may be used instead of or in combination with the coaxial epi-illumination device 31 and the illumination light-emitting device 31s. The ring type illumination 33 is attached to the outside of the barrel portion 4, and illuminates the semiconductor wafer 10 obliquely with illumination light.
The surface-emitting illumination 35 is embedded in the stage portion 25, and the illumination light is emitted upward from the bottom surface of the semiconductor wafer 10.
The barrel portion 4 is configured to be guided by light that is irradiated to the semiconductor wafer 10 by the flash unit 3 and that is reflected by or transmitted through the semiconductor wafer 10 as light.
The lens branching unit 4 includes a light branching means 45 in the middle of observing the path in which the light is guided, and allows a part of the observation light to be transmitted, and the angle is changed to partially reflect it. Further, the barrel portion 4 is preferably configured to include a photographic mirror 42, and is configured to change the direction of the observation light to guide light.
The optical branching means 45 can exemplify an optical element such as a half mirror or a beam splitter.
In the photographing unit 5, a plurality of cameras 51a and 51b are attached to the barrel portion 4, and each of the cameras 51a and 51b can image the light guided and branched. Further, the objective lenses 55a and 55b are attached to the barrel portion 4, and the observation light can be imaged at a predetermined observation magnification.
The cameras 51a and 51b can be exemplified by a CCD (Charge Coupled Device), a CMOS (Complementary Metal Oxide Semiconductor), or a camera using another imaging element, and if the captured image is used as an image signal, It is sufficient if it is output to the control unit 9. Further, it is preferable that the cameras 51a and 51b are high-sensitivity photographers. According to this, even if the observation light 40v is branched into the two observation lights 45v1 and 45v2 by the light branching means 45, the amount of light is half as compared with the observation light 40v before the branching, and the image can be sufficiently captured. Alternatively, the sensitivity of the cameras 51a, 51b may be maintained, and the illuminating energy of the flash lamp may be increased to ensure the brightness of the observed light.
Fig. 2 is a system configuration diagram showing an example of a mode embodying the present invention. As shown in FIG. 2, each of the above-described transport unit 2, the flash unit 3, and the photographing unit 5 is connected to each device of the control unit 9.
The control unit 9 is connected to include a control computer 90, an information input means 91, an information output means 92, a warning means 93, an information recording means 94, and a machine control unit 95.
The control computer 90 can be exemplified by a numerical calculation unit equipped with a microcomputer, a personal computer, a work station, or the like. The information input means 91 can exemplify a keyboard or a mouse or a switch. The information output means 92 can exemplify an image display display or a lamp or the like.
The warning means 93 can exemplify a device such as a buzzer or a speaker, a lamp, or the like that can alert the operator. The information recording means 94 can be exemplified by a semiconductor recording medium such as a memory card or a data disk, a magnetic recording medium, a magneto-optical recording medium or the like. The machine control unit 95 can exemplify a programmable controller or a machine called a motion controller.
The video signals output from the cameras 51a and 51b are input to the control computer 90 via the image processing unit 96. The image processing unit 96 is generally referred to as a GPU (Graphic Processing Unit), and can be exemplified by a form of the outside of the control computer 90 and a form connected to the inside of the control computer 90. The image processing unit of the computer 90 or the like.
The observation image input to the image processing unit 96 can be judged by the control computer 90 (i.e., inspection) as will be described later in detail.
The machine control unit 95 is connected to the X-axis stage 21, the Y-axis stage 22, and the rotating platform 23. Further, the machine control unit 95 is connected to the illumination light-emitting devices 31s, 33s, and 35s of the flash unit 3. The manner of adjusting the amount of illumination of the illumination in the illumination lighting devices 31s, 33s, 35s may exemplify the manner of adjusting the applied voltage or current, or adjusting the application time of the voltage or current, according to the illumination command signal from the machine control unit 95, the flash The pre-set conditions are illuminated.
The machine control unit 95 is connected to another control device (not shown), and the respective devices can be operated or quenched by giving control signals to the control devices.
[Action flow]
Fig. 3 is a flow chart showing an example of a mode embodying the present invention. In FIG. 3, in order to inspect the semiconductor wafer 10 in its entirety, a series of processes for photographing with each camera are displayed in each step. First, the semiconductor wafer 10 is placed on the stage portion 25 of the automatic visual inspection device 1 (s101), and the inspection conditions and the like registered in advance are read (s102). Next, the reading position of the reference mark 10m formed on the semiconductor wafer 10 is moved (s103), and alignment is performed (s104).
Next, the table portion 25 is moved toward the measurement start position of the first row (s107), the scanning platform portion 2 is moved at a predetermined speed, and the movement of the table portion 25 is started (s108). While moving the table portion 25, it is determined whether or not the position to be captured by the camera 1 is based on the current position information of the table portion obtained by the X-axis position detector and the Y-axis position detector of the scanning platform portion (s110). At the photographing position of the camera 1, the flash is illuminated and photographed by the camera 1 (s112), and the movement of the table portion 25 is continued. Further, it is judged whether or not the current position information of the table portion is a position to be photographed by the camera 2 (s114), and if it is the photographing position of the camera 2, the flash is illuminated and photographed by the camera 2 (s115), and the table portion 25 is continued. mobile. On the other hand, if the current position information of the table portion is not the position photographed by any of the cameras, the movement of the table portion 25 is continued.
Then, it is judged whether or not the photographing of the first column is completed based on the current position information of the table portion (s116), and if it is determined that the photographing of the first row is completed, the movement of the table portion is stopped (s117). On the other hand, if it is determined that the photographing of the first column is not completed, the above steps s110 to s116 are repeated.
Next, it is judged whether or not all the photographs have been completed by the above-described photographing (s118), and if it is determined that all the photographing is completed, the inspection unit is taken out by the table portion 25. On the other hand, if it is determined that all the photographing has not been completed in the above-described step s118, the table portion 25 is moved to the measurement start position of the next row, and the series of photographing steps (s107 to 118) are repeated.
[Timing chart]
4 is a timing chart showing an example of an embodiment of the present invention, and is a view showing the operation of each unit of the automatic visual inspection device 1 described with reference to FIGS. 1 to 3 in time series. In the figure, the horizontal axis represents the time t, and the dotted line is used as the auxiliary line so that the state before and after the operation of each part at each time is clear. The same dotted line above means the same moment.
According to the current position information of the aforementioned table, the photographing instruction is issued for each interval T2. First, the camera used for photographing is switched to the side of the camera 51a (i.e., the camera 1), and the photographing instruction is issued, and the photographing is performed by the camera 1. The flash light is emitted during the shooting of the camera 1, and after the shooting of the camera 1 is completed, the image data is transferred.
In the data transfer of the camera 1, the camera used for photography is switched to the side of the camera 51b (i.e., the camera 2). Then, as soon as the photographing instruction is issued, photographing is performed by the camera 2. The flash light is emitted during the shooting of the camera 2, and after the photographing of the camera 2 is completed, the image data is transferred. In the data transfer of the camera 2, the camera used for photography is switched to the camera 1 side. By repeating the series of operations, continuous shooting can be performed at every interval T2, and continuous shooting can be performed in half the time as compared with the conventional photographing interval T1. Further, if the number of cameras is increased, the interval of continuous shooting can be shortened. At this time, the cameras 51a and 51b use the same camera as in the related art, and the processing capability of the camera can be shortened without limitation.
Further, even in the case where the objective lenses 55a and 55b having different imaging magnifications are provided for the corresponding varieties, the number of the respective objective lenses is not required to be increased in accordance with the number of the cameras. Therefore, the cost increase factor caused by the increase of the objective lens disappears. Further, compared with the configuration in which the plurality of cameras and the plurality of objective lenses constitute the inspection device, the distortion or aberration of the circuit patterns which are caused by the individual differences of the objective lenses disappears, and it is easy to make Check the quality is consistent. Moreover, it is not necessary to separately perform image correction for matching the inspection quality, and various cost increase factors can be eliminated.
[Another form 1]
In the above description, the observation light is branched by the light branching means 45, and the inspection object is imaged by using a plurality of cameras. However, by arranging the light reflecting means 47, the position or angle of the light reflecting means 47 is changed, and the angle at which the observation light is guided is switched so as to replace the form of the light branching means 45. Fig. 5 is a perspective view showing another example of the embodiment of the present invention, showing an automatic visual inspection device 1a including a lens barrel portion 4a of another embodiment, in place of the lens barrel portion 4 of the automatic visual inspection device 1 described with reference to Fig. 1 . . Hereinafter, the difference between the barrel portion 4a and the barrel portion 4 will be described, and the other common points will not be described.
The lens tube portion 4 is provided with a light reflecting means 47 in the middle of observing the path in which the light is guided, and the direction (i.e., the angle) of the observation light can be changed and reflected. The light reflecting means 47 can be arranged such that its position or angle is changed, and can be switched to a position indicated by a symbol 47 and arranged at a to-be-avoided position 47a indicated by a broken line. For example, as shown in FIG. 5, when the light reflecting means 47 is arranged to be inclined by 45 degrees when intersecting with the optical axis of the observation light, the observation light guided in the Z direction is changed by 90°, and is guided in the X direction. Light is taken by the camera 51b. On the other hand, when the position where the light reflecting means and the optical axis of the observation light do not intersect with each other, the observation light guided in the Z direction is guided in the Z direction as it is, and the observation light is guided by the camera 51b. Shooting.
The light reflecting means 47 can be exemplified by an optical element such as a mirror or a prism, and it is only necessary to change the direction of the incident light and reflect it. The light reflecting means 47 is attached to the hinge through the barrel portion 4a so that one end thereof becomes a center of rotation and is rotatably coupled to the movable member of the actuator portion 60 attached to the barrel portion 4a. Then, the ON/OFF operation of the actuator unit 60 is switched to the position indicated by the symbol 47 and the position indicated by the symbol 47a.
Alternatively, the light reflecting means 47 may be attached to the movable member of the actuator portion 60 in a state where the mounting angle is fixed, and may be mounted by switching the position in the X direction by the ON/OFF operation of the actuator portion 60. The actuator unit 60 is connected to the machine control unit 95, and can be configured to perform an ON/OFF operation based on a command signal from the machine control unit 95.
[Another form 2]
The actuator unit 60 is not limited to the direct-acting type, and may be of a rotary type. The direction of the light-guiding observation light 40v may be changed by changing the position, angle or direction of the light reflecting means 47. Further, it is also possible to arrange the number of cameras as appropriate.
Fig. 6A is a perspective view showing still another example of the embodiment of the present invention, showing a form in which a rotary actuator portion 60a and two cameras 51a and 51b are used. Fig. 6B is a plan view showing still another example of the embodiment of the present invention, which is a cross-sectional view taken along line AA of the plan view 6A.
The observation light passes through the opening 40h of the barrel portion 4b, and is guided to the light reflecting means 48. The light reflecting means 48 is coupled to the rotary actuator portion 60a attached to the barrel portion 4b so as to rotate in the direction of the arrow 60v. The current state is that the observation light 40v guided in the Z direction is changed in the direction indicated by the arrow 48v and guided on the X-direction arrow side, and is reflected by the mirror 43a to be guided in the Z direction. The image taken by the camera 51a. Further, an angle detector 67 (a so-called rotary encoder) (not shown) is attached to the rotary actuator unit 60a, and angle information of the rotary actuator unit 60a can be obtained. The light reflecting means 48 is further rotated in the form shown in Figs. 6A and 6B. When the reflected observation light 48v is directed in the direction of the mirror 43b, the observation light 40v is guided to the side opposite to the X direction arrow. It is reflected by the mirror 43b and guided in the Z direction, and can be observed by the camera 51b. Further, the light reflecting means 48 is further rotated, and if the reflected light 48v which is reflected again is directed in the direction of the mirror 43a, it can be observed by the camera 51a, and the present invention can be repeatedly observed by repeating the above-described series of operations.
Fig. 7 is a timing chart showing still another example of the embodiment of the present invention, and is a view showing the operation of each unit of the automatic visual inspection device described with reference to Figs. 6A and 6B in time series. The horizontal axis in the figure indicates the time t, and a dotted line is used as an auxiliary line in order to make the state before and after the operation of each unit at each time clear. The same dotted line above means the same moment.
According to the current position information of the aforementioned table, the photographing instruction is issued every interval T2. First, the camera used for photographing is switched to the side of the camera 51a (i.e., the camera 1), and the photographing instruction is issued, and the photographing is performed by the camera 1. The flash light is emitted during the shooting of the camera 1, and the photographing data is transferred after the photographing of the camera 1 is completed.
In the data transfer of the camera 1, the camera used for photography is switched to the side of the camera 51b (i.e., the camera 2). Then, as soon as the photographing instruction is issued, photographing is performed by the camera 2. The flash light is emitted during the shooting of the camera 2, and after the photographing of the camera 2 is completed, the image data is transferred. In the data transfer of the camera 2, it is switched to the side of the camera 1 which is then used for photography. By repeating the series of operations, continuous photographing can be performed every interval T2, and continuous photographing can be performed in 1/2 time as compared with the conventional photographing interval T1. Further, if the number of cameras is increased, the interval of continuous shooting can be shortened.
Further, the encoder portion 65 is attached to the movable member of the actuator portions 60, 60a or the light reflecting means 47 attached to the front end thereof so that the current position of the actuator portion 60, 60a or the light reflecting means 47 can be detected, The angle or direction is now better.
The encoder portion 65 can exemplify a linear scale in which a plurality of optical or electromagnetic pores (so-called slits) are engraved in a rod-shaped, ribbon-shaped member extending in one direction. ), or a circular encoder or a cylindrical member with the same slit rotary encoder or the like.
In the form of the light reflection means 48 as described above, it is possible to prevent a decrease in the amount of light of the observation light caused by the use of the light branching means 45 and the increase in the number of cameras. Therefore, it is possible to shorten the inspection time by using a camera having the same sensitivity as the conventional one without using a flash having a higher luminous energy, and using a flash of the same luminous energy.
[Another form 3]
Fig. 8 is a timing chart showing still another example of the embodiment of the present invention, and is a view showing the operation of each unit of the automatic visual inspection device in time series, similarly to the timing chart described with reference to Fig. 7 . In this embodiment, unlike the automatic visual inspection device described with reference to Fig. 7, the light reflecting means 48 for changing the direction of the observation light in the barrel portion main body 40 does not become completely stopped at the time of light emission of the flash lamp, and the position is a little Change a little. In other words, the light reflecting means 48 is continuously moved by the actuator portion 60a, and is photographed through the respective observation cameras without being completely stopped. When the position and angle of the specific mirror are illustrated, the trajectory shown by the broken line A in FIG. 8 is a state in which the light reflecting means 48 is rotated at a constant number of revolutions. That is, it will not be stationary toward the cameras 1, 2, but will continue to move. At this time, since the illumination light uses a flash having a very short lighting time, it can be handled as blur without observing the image. According to this, in order to strictly switch the direction of the observation light, it is not necessary to completely stop the actuator portion 60a, and the influence of the inertia applied to stop or re-shift is reduced, and the burden on the actuator portion 60a is also reduced. Therefore, continuous shooting can be performed at a higher speed.
In this case, the extent to which the moving speed of the actuator portion 60a when the flash is illuminated is allowed to be the moving distance or angle of the actuator portion 60a when the flash is illuminated, that is, by being practical. It is determined by observing the degree to which the image is processed without blurring. That is to say, in the case where the flash light-emitting time is extremely short, or the number of switched cameras is small and the interval of photographing can be lengthened, the actuator portion 60a is the same moving speed as when the flash is illuminated and when the flash is not illuminated. It can also be driven.
On the other hand, there is a need for a large number of cameras to be switched to shorten the interval of photographing, or, if it is related to the flashing time of the flash, to be actuated at the same moving speed as when the flash is illuminated or when the flash is not illuminated. When the device 60a is driven to cause blurring of the observed image, it may be performed by slowing down the moving speed of the actuator portion 60a at the time of flash light emission as compared with the case of flashing non-lighting. When the position and angle of the specific mirror are illustrated, the trajectory indicated by the solid line B in FIG. 8 indicates a state in which the light reflecting means 48 is rotated while changing the number of revolutions. In other words, the light reflecting means 48 is directed toward the cameras 1 and 2 while passing through the cameras 1, 2, but is not completely still before and after the light reflecting means 48, and decelerates and continues compared with when the flash is not illuminated (that is, when not observed). Rotate. Then, after the acceleration is performed outside the deceleration interval before and after the shooting, the rotation is performed at a constant speed, and the series of operations before the deceleration before the shooting is repeated.
(Embodiment 1)
Hereinafter, an embodiment in still another example of the embodiment of the present invention described with reference to Figs. 1 to 7 will be described.
The cameras 51a and 51b of the photographing unit 5 are electronic shutter type cameras using a black and white CMOS having a grid-like pixel of 5 μm in pixel pitch as a maximum frame rate of 140 fps of the photographing element. . In the cameras 51a and 51b, about 1600 pixels are arranged in the moving direction of the observation object 10w, and an area sensor having about 1600 pixels arranged in the direction orthogonal to the moving direction is used. Further, the magnification of the objective lens is set so as to obtain an observation area having a length of 4.0 mm in the moving direction of the observation object 10w. Then, the observation object 10w is moved by 3.0 mm each time, and the illumination is illuminated, and the cameras 51a and 51b perform imaging in an interactive manner. At this time, the scanning platform portion that moves the observation object 10w is set to 720 mm/sec. Then, the illumination unit 3 is repeatedly illuminated at 240 Hz. In this case, if it is a conventional technique, it is not possible to perform continuous shooting with image transfer at a frame rate of 140 fps. However, by applying the present invention, it is possible to perform photography and video transfer at substantially 120 fps.
Further, the illumination unit 3 is preferably in the form of using a flash lamp using a halogen or a xenon lamp. In the case of a flash lamp, it is possible to relatively easily illuminate a flash having a high luminescence energy (for example, a half-value of energy necessary for photography is 3 μsec wide) in a very small amount of time. Therefore, even in the case of using an inexpensive camera which is not suitable for high-sensitivity photography with a high shutter speed, the energy of the irradiated light can be sufficiently obtained. Therefore, the inspection object that moves at a high speed can be continuously photographed, and the automatic visual inspection can be performed by applying the present invention.
Further, since the observation light 2 is branched by a half mirror and observed by two cameras, the amount of light of the flash lamp is doubled as usual. According to this, the amount of light observed by the respective cameras becomes the same as usual.
When the image blurring at this time is focused on, when the flash light is emitted for 3 μsec, the distance at which the observation object 10w moves is 2.16 μm, which corresponds to blurring of photography. The length of the image blur is about 1/1850 for the entire length of the observation field of view, and is about 0.86 pixel parts when converted into a pixel of the imaging element. The amount of image blurring also depends on how closely the object is observed. For example, if the minimum line width to be observed is 22 μm (that is, 10 pixels) or more, it can be regarded as a degree that is not considered to be a problem. It is not a problem in applying the present invention. On the other hand, even if the minimum line width to be observed is less than 22 μm, the present invention can be applied by adapting an image processing or an inspection algorithm.
In the above description, an example has been described in which the flash is in a light-emitting state within a predetermined shooting time. However, the present invention is not limited to such a form, and the form in which the illumination light is irradiated for only a predetermined period of time and the photographing is instantaneously performed may be performed by the following embodiment.
Fig. 9 is a timing chart showing a modification of the embodiment of the present invention, and is a modification of the form shown in Fig. 7; That is, in this modification, after the photographing instruction is turned on, the illumination is turned ON only for a predetermined period of time, and the photographing is instantaneously performed during this period. If a specific example is displayed, set the electronic shutter of the camera to 1/100,000 sec (that is, the shooting time is 10 μsec) to 1/500,000 sec (that is, the shooting time is 2 μsec), and the shutter time is set after the shooting instruction is turned ON. The illumination required for the photography is illuminated for 1/100 second (ie, 10 msec) to 1/1000 second (ie, 1 msec), during which time the camera is photographed. Thus, the present invention can be applied to perform an automatic visual inspection.
When the image blurring at this time is focused on, when the flash light is emitted for 2 μsec, the distance of the observation object 10w is 1.44 μm, which corresponds to blurring of photography. The length of the image blur is about 1/2780 for the entire length of the observation field of view, and is about 0.57 pixel parts when converted into pixels of the imaging element. Further, at the time when the flash light is emitted: 10 μsec, the distance at which the observation object 10w moves is 7.2 μm, which corresponds to blurring of photography. The length of the image blur to the entire field of view is 4.0 mm, which is about 1/560. When converted to pixels of the image pickup element, it is about 1.44 pixels. The amount of image blurring also depends on how closely the object is observed. For example, if the minimum line width to be observed is 15 to 72 μm (that is, 10 pixels) or more, it can be regarded as substantially not considered a problem. The extent of this is not a problem in the application of the present invention. On the other hand, even if the minimum line width to be observed is less than 15 to 72 μm, the present invention can be applied by adapting the image processing or the inspection algorithm.
(Embodiment 2)
Hereinafter, an embodiment in still another example of the embodiment of the present invention described with reference to FIGS. 6A, 6B, and 7 will be described.
When the two cameras 51a, 51b are used, the rotary actuator portion 60a is driven to rotate the light reflecting means 48 at 120 revolutions per second (i.e., 7200 rpm). Then stagger the half cycle and repeat the photography. According to this, it is the same as the following: Each of the cameras 51a and 51b is photographed at 120 fps, and the actual photographing side is repeated at 240 fps.
(Embodiment 3)
An embodiment of still another example embodying the embodiment of the present invention described with reference to Fig. 8 will be described below.
When the camera is two cameras and photographed at 120 fps, the rotary actuator is rotated at 360 rpm (that is, 21600 rpm) at 3 times speed, and 30 revolutions per second (ie, 1800 rpm) in the decelerated state. The rotation is only 10 degrees before and after the photographic angle, and each of the front and rear 10 degrees is regarded as an acceleration/deceleration region. According to this, the mirror rotation speed in photography is reduced to 1/4, and the amount of image blur is also reduced. Further, when the rotation speed at the time of photographing is increased and the mirror rotation speed during shooting is lowered, the amount of image blurring is further reduced.
(Example of increase in the number of cameras)
In the above description, the form in which two cameras are used has been exemplified, but the present invention is also applicable to a form in which two or more cameras are used. For example, in addition to the form shown in FIGS. 6A and 6B, a mirror for photography and a camera are disposed on the side of the Y-direction arrow on which the light reflecting means 48 is rotated by 90 degrees and on the opposite side. As a result, a total of four cameras can be used with the rotation speed (720 rpm) of the light reflecting means 48 and the shooting rate (120 fps) as they are, and imaging of substantially 480 fps can be performed. In addition, the flash is illuminated at 480 fps.
Further, when the rotation angle is decelerated before and after the photographing, the present invention can be applied by making the angle defined for every 10 degrees to be 5 degrees.
On the other hand, if it is a half mirror branch, the branching light can be branched to four cameras by further branching the branched light. Then, if the flash lamp is illuminated with a normal amount of light of four times and the flash light is emitted at 480 fps, the present invention can be applied.
1、1a．．．自動外觀檢查裝置1, 1a. . . Automatic visual inspection device
2．．．掃描平台部2. . . Scanning platform
3．．．照明部3. . . Lighting department
4、4a、4b．．．鏡筒部4, 4a, 4b. . . Tube barrel
5．．．攝影部5. . . Department of Photography
9．．．控制部9. . . Control department
10．．．檢查對象物(晶圓)10. . . Inspection object (wafer)
10m．．．基準標記10m. . . Benchmark mark
10p．．．電路圖案10p. . . Circuit pattern
10v．．．箭頭10v. . . arrow
10w．．．觀察對象物10w. . . Observing object
11．．．裝置框架11. . . Device frame
21．．．X軸平台twenty one. . . X-axis platform
22．．．Y軸平台twenty two. . . Y-axis platform
23．．．旋轉平台twenty three. . . Rotating platform
25．．．台部25. . . Taiwan Department
31．．．同軸落射照明(正反射光)31. . . Coaxial epi-illumination (positive reflection)
31s、33s、35s．．．照明發光裝置31s, 33s, 35s. . . Illumination lighting device
33．．．環型照明(斜光反射光)33. . . Ring illumination (oblique light)
35．．．面發光型照明(透射光)35. . . Surface-illuminated illumination (transmitted light)
40．．．鏡筒部本體40. . . Lens barrel body
40h．．．開口部40h. . . Opening
40v．．．觀察光40v. . . Observation light
41．．．照明用半鏡41. . . Half mirror for illumination
42．．．攝影用鏡42. . . Photographic mirror
43a、43b．．．反射鏡43a, 43b. . . Reflector
45．．．光分支手段(半鏡等)45. . . Light branching means (half mirror, etc.)
45v1、45v2．．．箭頭(分支後的方向)45v1, 45v2. . . Arrow (direction after branching)
47．．．光反射手段(鏡子等)47. . . Light reflection means (mirror, etc.)
47a．．．光反射手段(待避位置)47a. . . Light reflection means (to be avoided)
48．．．光反射手段48. . . Light reflection means
48v．．．箭頭(反射的方向)48v. . . Arrow (direction of reflection)
51a、51b．．．攝影機51a, 51b. . . camera
55a、55b．．．物鏡55a, 55b. . . Objective lens
57a、57b．．．攝影視野57a, 57b. . . Photography field of view
60．．．致動器部60. . . Actuator section
60a．．．致動器部(旋轉式)60a. . . Actuator section (rotary)
60v．．．箭頭(旋轉方向)60v. . . Arrow (rotation direction)
65．．．編碼器部65. . . Encoder unit
67．．．角度檢測器67. . . Angle detector
90．．．控制用電腦90. . . Control computer
91．．．資訊輸入手段91. . . Information input means
92．．．資訊輸出手段92. . . Information output means
93．．．警告手段93. . . Warning means
94．．．資訊記錄手段94. . . Information recording means
95．．．機器控制單元95. . . Machine control unit
96．．．影像處理單元96. . . Image processing unit
T1、T2、Td．．．間隔T1, T2, Td. . . interval
圖1是顯示體現本發明的形態的一例之斜視圖。
圖2是顯示體現本發明的形態的一例之系統構成圖。
圖3是顯示體現本發明的形態的一例之流程圖。
圖4是顯示體現本發明的形態的一例之時序圖。
圖5是顯示體現本發明的形態的另一例之斜視圖。
圖6A是顯示體現本發明的形態的再另一例之斜視圖。
圖6B是顯示體現本發明的形態的再另一例之剖面圖。
圖7是體現本發明的形態的再另一例之時序圖。
圖8是體現本發明的形態的再另一例之時序圖。
圖9是體現本發明的形態的變形例中的時序圖。
圖10是習知技術中的時序圖。Fig. 1 is a perspective view showing an example of a mode embodying the present invention.
Fig. 2 is a system configuration diagram showing an example of a mode embodying the present invention.
Fig. 3 is a flow chart showing an example of a mode embodying the present invention.
Fig. 4 is a timing chart showing an example of a mode embodying the present invention.
Fig. 5 is a perspective view showing another example of the embodiment embodying the present invention.
Fig. 6A is a perspective view showing still another example of the embodiment of the present invention.
Fig. 6B is a cross-sectional view showing still another example of the embodiment of the present invention.
Fig. 7 is a timing chart showing still another example of the embodiment of the present invention.
Fig. 8 is a timing chart showing still another example of the embodiment of the present invention.
Fig. 9 is a timing chart showing a modification of the embodiment of the present invention.
Figure 10 is a timing diagram in the prior art.
1．．．自動外觀檢查裝置1. . . Automatic visual inspection device
2．．．掃描平台部2. . . Scanning platform
3．．．照明部3. . . Lighting department
4．．．鏡筒部4. . . Tube barrel
5．．．攝影部5. . . Department of Photography
10．．．檢查對象物(晶圓)10. . . Inspection object (wafer)
11．．．裝置框架11. . . Device frame
21．．．X軸平台twenty one. . . X-axis platform
22．．．Y軸平台twenty two. . . Y-axis platform
23．．．旋轉平台twenty three. . . Rotating platform
25．．．台部25. . . Taiwan Department
31．．．同軸落射照明(正反射光)31. . . Coaxial epi-illumination (positive reflection)
33．．．環型照明(斜光反射光)33. . . Ring illumination (oblique light)
35．．．面發光型照明(透射光)35. . . Surface-illuminated illumination (transmitted light)
40．．．鏡筒部本體40. . . Lens barrel body
40v．．．觀察光40v. . . Observation light
41．．．照明用半鏡41. . . Half mirror for illumination
42．．．攝影用鏡42. . . Photographic mirror
45．．．光分支手段(半鏡等)45. . . Light branching means (half mirror, etc.)
45v1、45v2．．．箭頭(分支後的方向)45v1, 45v2. . . Arrow (direction after branching)
51a、51b．．．攝影機51a, 51b. . . camera
55a、55b．．．物鏡55a, 55b. . . Objective lens
57a、57b．．．攝影視野57a, 57b. . . Photography field of view
Claims (7)
承載該檢查對象物之台部；
使該台部掃描移動於規定的方向之掃描平台部；
朝該檢查對象物照射照明光之照明部；
以被由該照明部照射並藉由該檢查對象物反射的光或透過該檢查對象物的光當作觀察光進行導光之鏡筒部；
安裝於該鏡筒部並拍攝該觀察光之攝影部；
一邊使該掃描平台部移動，一邊使該照明部發光，進行該觀察光的攝影之控制部；以及
根據預先登記的檢查條件，進行該被拍攝的該檢查對象物的影像的好壞判斷之檢查部，
在該掃描平台部包含有計測該台部的現在位置之位置計測手段，
在該鏡筒部包含有使該觀察光一部分透過，並且改變角度使其一部分反射之光分支手段，
在該鏡筒部安裝有複數個該攝影部，以便能各自拍攝藉由該光分支手段分支的光，
該控制部包含:
每一該攝影逐次改變使用於該攝影的攝影部而進行攝影的功能。An automatic visual inspection device for inspecting an object to be inspected for defects in a pattern of an inspection object includes:
a table portion carrying the object to be inspected;
Scanning the platform portion to scan the platform portion in a predetermined direction;
Illuminating the illumination object with the illumination light toward the inspection object;
a lens barrel portion that is guided by the illumination unit and that reflects light by the inspection object or light that has passed through the inspection object as light for observation;
a photographing portion mounted on the barrel portion and photographing the observation light;
a control unit that performs illumination of the illumination light while moving the illumination unit, and performs imaging of the observation light; and performs inspection of the image quality of the image to be inspected based on the inspection condition registered in advance. unit,
The scanning platform unit includes a position measuring means for measuring the current position of the table portion,
The lens barrel portion includes a light branching means for transmitting a part of the observation light and changing an angle to partially reflect it.
A plurality of the photographing portions are mounted on the barrel portion so as to be able to respectively capture light branched by the light branching means.
The control section contains:
Each of the photographs sequentially changes the function of photographing used in the photographing portion of the photographing.
承載該檢查對象物之台部；
使該台部掃描移動於規定的方向之掃描平台部；
朝該檢查對象物照射照明光之照明部；
以被由該照明部照射並藉由該檢查對象物反射的光或透過該檢查對象物的光當作觀察光進行導光之鏡筒部；
安裝於該鏡筒部並拍攝該觀察光之攝影部；
一邊使該掃描平台部移動，一邊使該照明部發光，進行該觀察光的攝影之控制部；以及
根據預先登記的檢查條件，進行該被拍攝的該檢查對象物的影像的好壞判斷之檢查部，
在該掃描平台部包含有計測該台部的現在位置之位置計測手段，
在該鏡筒部包含有改變該觀察光的角度或方向並使其反射之光反射手段，
在該鏡筒部安裝有複數個該攝影部，以便能各自拍攝藉由該光反射手段反射的光，
該控制部包含:
每一該攝影與該攝影連動並變更該光反射手段的反射方向，並且逐次改變使用於該攝影的攝影部而進行攝影的功能。An automatic visual inspection device for inspecting an object to be inspected for defects in a pattern of an inspection object includes:
a table portion carrying the object to be inspected;
Scanning the platform portion to scan the platform portion in a predetermined direction;
Illuminating the illumination object with the illumination light toward the inspection object;
a lens barrel portion that is guided by the illumination unit and that reflects light by the inspection object or light that has passed through the inspection object as light for observation;
a photographing portion mounted on the barrel portion and photographing the observation light;
a control unit that performs illumination of the illumination light while moving the illumination unit, and performs imaging of the observation light; and performs inspection of the image quality of the image to be inspected based on the inspection condition registered in advance. unit,
The scanning platform unit includes a position measuring means for measuring the current position of the table portion,
The lens barrel portion includes a light reflecting means for changing the angle or direction of the observation light and reflecting it.
A plurality of the photographing portions are mounted on the barrel portion so as to be able to respectively capture light reflected by the light reflecting means.
The control section contains:
Each of the photographing moves in conjunction with the photographing, changes the direction of reflection of the light reflecting means, and sequentially changes the photographing portion used for the photographing to perform photographing.
該控制部與該攝影連動並驅動致動器部，進行該攝影。The automatic visual inspection device according to claim 2, wherein an actuator portion for changing a position or an angle of the light reflecting means is further attached to the barrel portion.
The control unit drives the actuator unit in conjunction with the photographing to perform the photographing.
根據該位置檢測器或該角度檢測器的資訊進行該攝影。The automatic visual inspection device according to any one of claims 3 to 5, wherein a position detector for detecting a current position or an angle detector for detecting a current angle is mounted on the actuator portion or the light reflecting means ,
The photographing is performed based on the information of the position detector or the angle detector.
該攝影是藉由閃光燈的發光而進行。The automatic visual inspection device according to any one of the items 1 to 6, wherein the illumination portion that illuminates the illumination light is a flash unit that illuminates the flash.
This photography is performed by the illumination of the flash lamp.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011251203A JP5854501B2 (en) | 2011-11-17 | 2011-11-17 | Automatic visual inspection equipment |
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| Publication Number | Publication Date |
|---|---|
| TW201321743A true TW201321743A (en) | 2013-06-01 |
| TWI586959B TWI586959B (en) | 2017-06-11 |
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| TW101132684A TWI586959B (en) | 2011-11-17 | 2012-09-07 | Automatic appearance inspection device |
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| Country | Link |
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| JP (1) | JP5854501B2 (en) |
| CN (1) | CN104024835B (en) |
| TW (1) | TWI586959B (en) |
| WO (1) | WO2013073459A1 (en) |
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Also Published As
| Publication number | Publication date |
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| JP5854501B2 (en) | 2016-02-09 |
| CN104024835B (en) | 2016-02-24 |
| WO2013073459A1 (en) | 2013-05-23 |
| JP2013104860A (en) | 2013-05-30 |
| CN104024835A (en) | 2014-09-03 |
| TWI586959B (en) | 2017-06-11 |
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