TW201249662A - Nozzle plate structure - Google Patents

Abstract

A nozzle plate structure for use in a piezoelectric inkjet print head is disclosed and comprises a plurality of nozzles, a plurality of positioning holes and a plurality of first air vents. The plurality of nozzles are placed in relatively two lines, the plurality of positioning holes are disposed in the two opposite sides of the plurality of nozzles and the plurality of first air vents are disposed in first position, wherein the first position is between the two relatively nozzles, and each first air vent is placed in equal distance from one nozzle to the adjacent nozzle.

Description

201249662 六、發明說明： 【發明所屬之技術頜域】 [0001] 本案係關於--種喷孔片結構，尤指一種適用於壓電喷墨 頭之喷孔片結構。 【先前技術】 [0002] 隨著喷墨技術的進步，噴墨技術不再只是應用在傳統列 印市場上，近年更應用於平面顯示器以及半導體產業的 製程技術中’然而’為了降低成本以及節省製程時間， ^ 紛紛尋求新的喷墨技術，這之中最被廣為應用的，就是 壓電式喷墨技術° [0003] 請參閱第一圖A ’其係為習知喷墨頭多層結構於切割前之 平面示意圖，如圖所示，習知喷墨頭多層結構1主要由多 層不鏽鋼板件以高溫擴散接合技術堆疊而成，進而形成 喷墨頭多層結構1之微結構，其中噴墨頭多層結構1係具 有複數個喷墨單元丨〇〇。一般來說，習知噴墨頭多層結構 通常具有128個喷孔111，且均分成兩排並差排分布。其 Ο 單排喷孔的間距為丨.016 mm，故其喷印解析度為5〇 dpi [0004]請參閱第一圖B，母一噴墨單元1〇〇係由噴孔層、中間 流道層102、連通層103、壓力腔層1〇4以及致動層1〇5依 序往上堆疊至所形成，其中，每一喷墨單元1〇〇的喷孔層 101可構成一喷孔片，中間流道層1〇2可由複數個板件 102a-102f以及每一板件間夾持一乾膜層1〇6所堆疊而成 ，連通層103則可由入口流道層103a、出入孔層1〇3b， 以及兩者間夾持乾膜層106所堆疊設置而成。且於堆疊完 1002035161-0 100120787 表單編號A0101 第3頁/共25頁 201249662 成後，連通層103之入口流道層i〇3a將埃# 液流入的入液流道107、令間流道層】〇2及入口流H供墨 】〇3a將堆疊形成供儲存墨液的儲液室 108、壓力腔層二 將堆叠形成塵力腔體】09、連通層103以及中間流道層i〇4 】〇2將堆#形成出液流道11()以及喷孔層i()i形成 喷出的噴孔111。 土 [0005] [0006] 請續參閱第H由於習知噴墨單元刚係由多層不絲 鋼板件所堆“成，制此種方式在製作残鋼板件時 需具備良好的尺寸精度，在組裝時也需將組裝誤差控制 在一定範©内’如此才不致使與喷孔m對應之出液流道 11〇產生堵塞之情況。以及，—般在製造喷孔lu時由於 喷孔層101的厚度較薄（通常約為25um)，且喷孔丨^直秤 相當小（約為3〇ura)，通常會採用微電鑄鎳或鎳鈷合金等 方法製作，或者也可使用聚醯亞胺（P〇lyimide，薄 片以準分子雷射加工而製成。至於其他層因開孔尺寸相 對較大，所以一般會適當厚度的不鏽鋼雙面蝕刻製程來 製作’以降低成本。 以及’第-圖B所示之喷墨單元100主要是使用金屬融接 接合製程來組裝的，其做法是先在各不鏽鋼板件表面上 鍵金，再依照方向順序將各板件疊加起來，接著進行熱 壓以使每兩板制的金原子擴散，最終達成融接動= k種組裝方式雖然有接合強度極佳的優點，但卻需要在 無氧的環境下，以500至lOOOh高溫來進行所以設備 建立較困難且昂貴，同時輔助熱壓的治具也須慎選，： 則容易變形、變質，甚至崩裂，且此高溫製程夾具崩裂 100120787 表單編號A0101 第4頁/共25頁 1002035161-0 201249662 [0007] Ο [0008] ❹ [0009] [0010] [0011] 或沾粘嚴重，所以耗損速率極快，除了治具替換費用佔 成本高以外，在大量生產下品質也極不穩定。再者，金 價曰漸昂貴、融接製程不易批次化、以及表面處理不當 容易影響融接效果及良率等，這些都墊高了習知使用金 屬融接生產噴墨單元的製造成本。 【發明内容】 本案之主要目的在於提供一種噴孔片結構，俾解決習知 噴墨頭多層結構於進行熱壓接合製程時，因喷孔層與不 鏽鋼層之間的貼附不夠緊密，而易產生氣泡之接著不良 的情形，進而導致其噴墨功能受損，或是使用壽命減短 等缺失。 為達上述目的，本案之一較廣義實施態樣為提供一種喷 孔片結構，適用於壓電喷墨頭，該噴孔片結構上至少包 括：複數個噴孔，其係以雙排並列之方式對應排列；複 數個疋位孔，設置於複數個噴孔之兩相對側；以及複數 個第一逃氣孔，設置於第一位置，該第一位置係設置於 雙排並列之複數個喷孔之間，且每一第一逃氣孔係與兩 相鄰並列之喷孔等距設置。根據本案之構想，其中第一逃氣孔之寬度係以20-50um為 較佳。 根據本案之構想，其中喷孔片結構更包含複數個第二逃 氣孔，且第二逃氣孔係設置於第二位置，介於複數個噴 孔及複數個定位孔之間。 根據本案之構想，其中複數個第二逃氣孔係為複數個水 100120787 表單編號A0101 第5頁/共25頁 1002035161-0 201249662 平設置之溝槽狀鏤空結構。 [0012] 根據本案之構想，其中第二逃氣孔之長度係實質上大於 定位孔之直徑，且第二逃氣孔之寬度係以UO-SOOum為 較佳。 [0013] 根據本案之構想，其中複數個第二位置係為環繞定位孔 之周圍。201249662 VI. Description of the Invention: [Technical Jaw Domain of the Invention] [0001] The present invention relates to a structure of a orifice sheet, and more particularly to a structure of a orifice sheet suitable for a piezoelectric inkjet head. [Prior Art] [0002] With the advancement of inkjet technology, inkjet technology is no longer only used in the traditional printing market. In recent years, it has been applied to the process technology of flat panel display and semiconductor industry. However, in order to reduce cost and save Process time, ^ have sought new inkjet technology, the most widely used one is piezoelectric inkjet technology. [0003] Please refer to Figure A', which is a conventional inkjet head multilayer structure. Schematic diagram before cutting, as shown in the figure, the conventional ink jet head multilayer structure 1 is mainly formed by stacking a plurality of stainless steel plate members by a high temperature diffusion bonding technique, thereby forming a microstructure of the ink jet head multilayer structure 1 in which ink is ejected. The head multilayer structure 1 has a plurality of ink jet units 丨〇〇. In general, the conventional ink jet head multi-layer structure generally has 128 orifices 111 and is divided into two rows and arranged in a row. The spacing between the single row of orifices is 016.016 mm, so the resolution of the printing is 5〇dpi [0004] Please refer to the first figure B. The mother-inkjet unit 1 is made up of the orifice layer and the intermediate flow. The channel layer 102, the communication layer 103, the pressure chamber layer 1〇4, and the actuation layer 1〇5 are sequentially stacked up to form, wherein the orifice layer 101 of each inkjet unit 1〇〇 can constitute an orifice. The intermediate flow channel layer 1〇2 may be formed by stacking a plurality of plate members 102a-102f and a dry film layer 1〇6 between each plate member, and the communication layer 103 may be formed by the inlet flow channel layer 103a and the inlet and outlet layers. 1〇3b, and the sandwiched dry film layer 106 are stacked between the two. After stacking 1002035161-0 100120787 Form No. A0101 Page 3 / Total 25 Page 201249662, the inlet flow channel layer i〇3a of the communication layer 103 will flow into the liquid flow channel 107 and the interflow channel layer. 〇2 and inlet flow H ink supply 〇3a will be stacked to form a reservoir 108 for storing ink, the pressure chamber layer 2 will be stacked to form a dust chamber 09, the communication layer 103 and the intermediate channel layer i〇4 The crucible 2 forms the liquid discharge channel 11 () and the orifice layer i () i to form the discharge orifice 111. Soil [0005] [0006] Please continue to refer to the H. Because the conventional inkjet unit is made of a multi-layered non-filament steel sheet, it is required to have good dimensional accuracy when manufacturing the residual steel sheet. It is also necessary to control the assembly error within a certain range. Thus, the clogging of the liquid discharge channel 11 corresponding to the injection hole m is not caused. And, in the case of manufacturing the injection hole lu, the orifice layer 101 is Thinner (usually about 25um), and the orifice 丨 直 straight scale is quite small (about 3 〇 ura), usually made by micro-electroforming nickel or nickel-cobalt alloy, or you can also use polyimine (P〇lyimide, the sheet is made by excimer laser processing. As the other layers are relatively large in opening size, a stainless steel double-sided etching process of appropriate thickness is generally used to make 'to reduce cost.' The ink jet unit 100 shown in B is mainly assembled by using a metal fusion bonding process by first bonding gold on the surface of each stainless steel plate, and then superimposing the plates in the order of direction, followed by hot pressing. Spread the gold atoms of every two plates, In the end, the fusion method is achieved. Although the k-type assembly method has the advantage of excellent joint strength, it needs to be carried out in an oxygen-free environment at a high temperature of 500 to 1000 hours, so that the equipment establishment is difficult and expensive, and at the same time, the auxiliary hot pressing is performed. It must also be carefully selected: it is easy to deform, deteriorate, or even crack, and this high temperature process fixture is cracked 100120787 Form No. A0101 Page 4 / Total 25 Page 1002035161-0 201249662 [0007] Ο [0008] ❹ [0009] [0010 [0011] Or the adhesion is severe, so the rate of wear is extremely fast, in addition to the high cost of fixture replacement, the quality is also extremely unstable under mass production. Moreover, the price of gold is becoming more expensive, and the melting process is not easy to batch. And the improper surface treatment is easy to affect the fusion effect and the yield, etc., which raises the manufacturing cost of the conventional ink-jet unit using metal fusion. SUMMARY OF THE INVENTION The main object of the present invention is to provide a nozzle structure.俾When the conventional multilayer structure of the ink jet head is subjected to the thermocompression bonding process, the adhesion between the orifice layer and the stainless steel layer is not tight enough, and the bubble is likely to be bad. Further, the inkjet function is impaired, or the service life is shortened, etc. In order to achieve the above object, one of the more general embodiments of the present invention provides a nozzle structure suitable for a piezoelectric inkjet head. The sheet structure comprises at least: a plurality of nozzle holes arranged in parallel in a double row; a plurality of clamping holes arranged on opposite sides of the plurality of nozzle holes; and a plurality of first escape holes arranged in the first a position, the first position is disposed between the plurality of nozzle holes arranged in parallel in the double row, and each of the first escape holes is equidistantly disposed with two adjacent parallel nozzle holes. According to the concept of the present case, the first escape Preferably, the width of the air hole is 20-50 um. According to the concept of the present invention, the orifice structure further includes a plurality of second escape holes, and the second escape hole is disposed at the second position, and the plurality of holes and Between multiple positioning holes. According to the concept of the present case, the plurality of second escape holes are a plurality of waters. 100120787 Form No. A0101 Page 5 of 25 1002035161-0 201249662 Flat grooved hollow structure. [0012] According to the concept of the present invention, the length of the second escape hole is substantially larger than the diameter of the positioning hole, and the width of the second escape hole is preferably UO-SOOum. [0013] According to the concept of the present invention, the plurality of second positions are around the circumference of the positioning holes.

[0014] 根據本案之構想，其中喷孔片結構更包含複數個第三逃 氣孔，設置於噴孔片結構之大區域面積’且第三逃氣孔 之寬度係以50-1 OOum為較佳。 [0015] 根據本案之構想，其中第三逃氣孔係為斜向之鏤空溝槽 結構。 [0016] 根據本案之構想，其中噴孔片之邊緣係為方形鋸齒狀邊 緣。 [00Π]根據本案之構想，其中喷孔片之邊緣係為梯形鋸齒狀邊 緣。 〇 [0018]根據本案之構想，其中噴孔片之邊緣係具有複數個鏤空 溝槽。 【實施方式】 [0019]體現本案特徵與優點的一些典型實施例將在後段的說明 中詳細敘述。應理解的是本案能夠在不同的態樣上具有 各種的變化，其皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 [0020] 請參閲第四圖，其係為本案第— 較佳實施例之噴孔片結 100120787 表單編號如I卯 第6頁/共25頁 1002035161-0 201249662 構之結構示意圖。如圖所示，本案噴孔片4係適用一壓電 噴墨頭（未圖示）’且具有複數個噴孔41以及複數個定位 孔45，其中該複數個喷孔41係以雙排並列之方式對應排 列，複數個定位孔45則設置於該複數個喷孔41之兩相對 侧，用以供喷孔片4與複數個不鏽鋼板結構（未圖示）相互 定位用，以進行熱壓接合製程。 [0021] Ο 於本實施例中，噴孔片4更包含複數個第一逃氣孔42，其 係設置於第一位置’以本實施例為例，第一位置係為該 雙排並列之複數個喷孔41之間，且每一第一逃氣孔42與 兩相鄰且並列設置之喷孔41之間係為等距設置，舉例來 說，第一逃氣孔42a與喷孔41a之間的垂直距離!^係與第 一逃氣孔42a與喷孔41b之間垂直距離L2相等，以及，第 一逃氣孔42b與喷孔4lb之間的垂直距離L3亦與第—逃氣 孔42b與喷孔41c之間的垂直距離L4相等。以及，由於第 一逃氣孔42係設置於複數個喷孔41之間，因而為了避免 第一逃氣孔42的尺寸過大而導致複數個喷孔41產生串通 ο [0022] (Cross-talk)之機率，第一逃氣孔42之寬度係以 20-50um為較佳，但不以此為限。 以及，噴孔片4更可包含複數個第二逃氣孔43，且其係設 置於第二位置。於本實施例中，第二位置係介於複數個 喷孔41及定位孔45之間。該定位孔45因需與定位治具之 定位銷（未圖示）相互緊配，故其周圍極易因定位拉扯而 產生浮起之現象，為解決此現象，第二逃氣孔43係彳採 取孔控較長且寬度較寬之鏤空溝槽，使定位孔45周園之 氣泡可由此第二逃氣孔43而輕易逸散’進而解決該浮起 100120787 表單編號A0101 第7頁/共25頁 1002035161-0 201249662 之現象，同時亦使該氣泡不會擴散至複數個噴孔41處， 藉此以增強隔離阻絕之效果。以本實施例為例，第二逃 氣孔43之長度係實質上大於該定位孔45之直徑，且該第 二逃氣孔43之寬度係以100-500um為較佳，但不以此為 限。 [0023] [0024] [0025] 除了前述第一位置及第二位置可能產生氣泡之外，喷孔 片4於進行熱壓接合過程中，亦容易在複數個喷孔41外之 大面積區域產生氣泡，故於一些實施例中，喷孔片4亦可 設置複數個第三逃氣孔44，且由於此複數個第三逃氣孔 44係設置於喷孔片4之大區域面積位置，故其寬度以 50-1 00um為較佳’且不以此為限，以輔助大面積之氣泡 可由此較寬之第三逃氣孔44而逸散。 以及’在喷孔片4要進行熱壓接合製成之前，若其邊緣原 先即有變形’或是於接合時因碰撞而使邊緣產生浮起的 話’亦極易於其邊緣產生氣泡。未解決噴孔片4邊緣產生 氣泡之問題’於本實施例中’係採用方形鋸齒狀邊緣4〇 ，如第四圖所示，本實施例之方形鋸齒狀邊緣係以長度 500 um、寬度250 um之尺寸為較佳，但不以此為限。藉由 此具有一定長度及寬度大小之方形鑛齒狀邊緣，以增 加喷孔片4與乾膜（未圖示）之接合界面的周長，如此使得 喷孔片4可更緊密地咬合其乾膜（未圖示），進而可減少其 邊緣浮起而產生氣泡之情形。 請參閱第五圖，其係為本案第二較佳實施例之噴孔片結 構之結構示意圖。如圖所示，本案噴孔片5同樣適用一壓 電噴墨頭（未圖示），且具有複數個喷孔51以及複數個定 100120787 表單編號A010〗 第8頁/共25頁 1002035161-0 201249662 ) 位孔55，其中該複數個噴孔51及定位孔55之設置方式係 與前述實施例相仿，故於此不再贅述。於本實施例中， 喷孔片5具有複數個設置於第一位置之第一逃氣孔52，其 中第一位置同樣為介於複數個喷孔51及定位孔55之間， 惟於本實施例中，複數個第一逃氣孔52更可以環繞喷孔 51之方式而設置’且每一第一逃氣孔52與兩相鄰且並列 权置之喷孔51之間係為等距設置’意即第一逃氣孔52a與 喷孔51a之間的垂直距離L5係與第一逃氣孔52a與喷孔 51b之間垂直距離L6相等，以及，第一逃氣孔52b與噴孔 5lb之間的垂直距離L7亦與第一逃氣孔52b與喷孔51c之 間的垂直距離L8相等。 [0026] ) 以及，喷孔片5亦具有複數個設置於第二位置之第二逃氣 孔53。且於本實施例中，第二位置係為環繞於定位孔55 之周圍，意即複數個第二逃氣孔53係環繞於定位孔55而 設置，且不以此為限。藉此，喷孔片5可透過環繞於定位 孔55設置之複數個第二逃氣孔53以形成一不連續之環狀 鏤空結構，進而可阻隔定位孔55周圍產生之浮起氣泡往 外擴散之情形。 [0027] 與前述實施例相似地，喷孔片5更可具有複數個設置於大 區域面積之第三逃氣孔54，然而，於本實施例中，第三 逃氣孔54係可採用斜向設計，意即第三逃氣孔54係可為 一斜向之鏤空溝槽結構，但不以此為限。藉由此斜向設 計之第三逃氣孔54更可加強喷孔片5之結構強度，進而可 減少喷孔片5遭受意外彎折、變形或斷裂之情形。 [0028] 此外，請續參閱第五圖，於本實施例中，噴孔片5之邊緣 100120787 表單編號A0101 第9頁/共25頁 1002035161-0 201249662 係為梯形鋸齒狀邊緣50，該梯形鋸齒狀邊緣5〇同樣具有 可使噴孔片5與乾膜（未圖示）之接合界面的周長增加，而 使喷孔片5可緊密地咬合該乾膜，以減少邊緣浮起產生氣 泡之優點，除此之外，該梯形之型態更具有不易變形之 優點。 [0029] [0030] [0031] 由此可見，喷孔片5之複數個第一逃氣孔52、複數個第二 逃氣孔53、複數個第三逃氣孔54以及其邊緣5〇所設置之 位置、結構或大小係可具有多種變化，其係可依據實際 施作情形而任施變化’並可藉由多樣之變化以減少喷孔 0 片5於不同區域產生氣泡之情形’並不以前述實施例之位 置、型態或大小為限。 請參閱第六圖A，其係為本案第三較佳實施例之喷孔片結 構及與其接合之不鑛鋼層之結構示意圖。如圖所示，本 實施例之喷孔片6同樣適用一壓電噴墨頭（未圖示），且噴 孔片6係透過定位治具8於其兩側進行定位夾持，進而可 使該喷孔片6與其下之不鏽鋼層7彼此袓互定位，以利後 續進行之熱壓接合製程。至於喷孔片6則同樣具有複數個 〇 喷孔61以及複數個定位孔65，且該複數個喷孔61及定位 孔65之設置方式係與前述實施例相仿，故於此不再贅述 。惟於本實施例中，喷孔片6之尺寸係較前述實施例小， 藉由此縮小之尺寸，一方面可降低喷孔片6之材料成本， 另一方面則具有可避開設置於喷孔片6下的壓電噴墨頭之 多層結構中之供液孔（未圖示）的鏤空結構’進而可大幅 減少氣泡產生之機率。 請參閱第六圖Β，其係為第六圖Α所示之喷孔片結構之結 100120787 表單編號A0I01 第10頁/共25頁 1002035161-0 201249662 構示意圖。如圖所示，雖本實施例之喷孔片結構6尺寸相 較於習知喷孔片已顯著縮減，然而，其同樣需要解決部 分區域仍會產生之氣泡的問題。故於本實施例中，喷孔 片結構6同樣具有複數個第一逃氣孔62 '複數個第二逃氣 孔63以及複數個第三逃氣孔64，其中第一逃氣孔62及第 三逃氣孔64所設置之位置、特徵及大小係與前述實施例 相仿’於此不再贅述。惟於本實施例中，複數個第二逃 氣孔63所設置之方式係與前述實施例有部分差異，其雖 同樣設置於介於該複數個噴孔61及定位孔65之間的第二 ) 位置，然而，該複數個第二逃氣孔63之型態係為複數個 水平設置之溝槽狀鏤空結構，藉由此複數個水平且不連 續之第二逃氣孔63之密佈設置方式，以阻擋定位孔65周 圍產生之氣泡朝鄰近之喷孔62擴散之可能性。 [〇〇32]以及，以本實施例為例，由於喷孔片6之長度及寬度均已 大幅縮小，故喷孔片6之邊緣係可採取另—設計，以減少 其邊緣接合而產生氣泡之問題。舉例來說，鄰近於喷孔 ) 片6之邊緣60處係可設置複數個長條形並列之鏤空溝槽 60a，但不以此為限，藉此以使喷孔片6在與其乾膜（未圖 示）接合時’其邊緣60仍可維持完整而不產生浮起的情形 ，同時也可避免噴孔片6因其邊緣60距離喷孔61太近而會 產生漏墨之問題。此外，這些設置於邊緣6〇之複數個鐘 空溝槽60a更具有強化喷孔片6的結構強度之功能其係 可分散應力’進而使得喷孔片6於外力作用下時，不易因 應力而產生變形。 闺，综上所述’本案適用於壓電嘴墨頭之噴孔片結構藉由 100120787 表單編號A0101 第11頁/共25頁 1002035161-0 201249662 複數個設置於第一位置之第一逃氣孔、複數個設置於第 二位置之第二逃氣孔、複數個第三逃氣孔以及具有可使 其邊緣易於咬合之結構等，使喷孔片上不同區域產生之 氣泡藉由可前述結構而逸散，以使壓電喷墨頭不會因氣 泡產生而導致其喷墨功能受損，進而更可延長其使用壽 命。 [0034] 本案得由熟知此技術之人士任施匠思而為诸般修飾，然 皆不脫如附申請專利範圍所欲保護者。 【圖式簡單說明】 [0035] 第一圖A :其係為習知喷墨頭多層結構於切割前之平面示 意圖。 [0036] 第一圖B :其係為第一圖A所示之喷墨單元之A-A剖面圖。 [0037] 第二圖：其係為習知喷墨頭多層結構之熱壓接合示意圖 [0038] 第三圖：其係為習知喷墨頭多層結構產生之氣泡相對於 喷孔層之位置示意圖。 [0039] 第四圖：其係為本案第一較佳實施例之噴孔片結構之結 構示意圖。 [0040] 第五圖：其係為本案第二較佳實施例之喷孔片結構之結 構示意圖。 [0041] 第六圖A :其係為本案第三較佳實施例之喷孔片結構及與 其接合之不鏽鋼層之結構示意圖。 [0042] 100120787 第六圖B:其係為第六圖A所示之噴孔片結構之結構示音 表單編號A0101 第12頁/共25頁 1002035161-0 201249662 圖。 【主要元件符號說明】 [0043] 喷墨頭多層結構：1 [0044] 喷墨單元：100 [0045] 喷孔層：101 [0046] 定位孔：101a、102g、24a、25a [0047] 中間流道層：102[0014] According to the concept of the present invention, the orifice structure further comprises a plurality of third escape holes, the large area of the orifice structure is disposed, and the width of the third escape hole is preferably 50-1 00 um. [0015] According to the concept of the present invention, the third escape hole is an oblique hollow groove structure. [0016] According to the concept of the present invention, the edges of the orifice sheet are square serrated edges. [00Π] According to the concept of the present invention, the edges of the orifice sheet are trapezoidal serrated edges. [0018] According to the concept of the present invention, the edges of the orifice sheet have a plurality of hollowed-out grooves. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and the description and illustration are in the nature of [0020] Please refer to the fourth figure, which is a schematic diagram of the structure of the orifice plate knot 100120787 of the first preferred embodiment of the present invention, such as I 卯 page 6 / total 25 pages 1002035161-0 201249662. As shown in the figure, the orifice sheet 4 of the present invention is applied to a piezoelectric inkjet head (not shown) and has a plurality of orifices 41 and a plurality of positioning holes 45, wherein the plurality of orifices 41 are juxtaposed in a double row. Correspondingly, a plurality of positioning holes 45 are disposed on opposite sides of the plurality of nozzle holes 41 for mutually positioning the orifice plate 4 and a plurality of stainless steel plate structures (not shown) for hot pressing. Bonding process. [0021] In the present embodiment, the orifice sheet 4 further includes a plurality of first escape holes 42 which are disposed at the first position. In this embodiment, the first position is a plurality of parallel rows. Between the nozzle holes 41, and between each of the first escape holes 42 and the two adjacent and juxtaposed spray holes 41 are arranged equidistantly, for example, between the first escape hole 42a and the spray hole 41a. The vertical distance!^ is equal to the vertical distance L2 between the first escape hole 42a and the spray hole 41b, and the vertical distance L3 between the first escape hole 42b and the spray hole 41b is also the same as the first escape hole 42b and the spray hole 41c. The vertical distance between them is equal to L4. And, since the first escape hole 42 is disposed between the plurality of injection holes 41, in order to prevent the size of the first escape hole 42 from being excessively large, the plurality of injection holes 41 are caused to collide. [0022] (Cross-talk) probability The width of the first escape hole 42 is preferably 20-50 um, but not limited thereto. Further, the orifice sheet 4 may further include a plurality of second escape holes 43 which are disposed in the second position. In this embodiment, the second position is between the plurality of nozzle holes 41 and the positioning holes 45. The positioning hole 45 needs to be closely matched with the positioning pin (not shown) of the positioning fixture, so that the surrounding portion is easily floated due to the positioning and pulling. To solve this phenomenon, the second escape hole 43 is taken. The hollow groove with long hole length and wide width enables the bubble of the positioning hole 45 to be easily dissipated by the second escape hole 43 to solve the floating 100120787. Form No. A0101 Page 7 / Total 25 Page 1002035161 The phenomenon of -0 201249662 also makes the bubble not spread to a plurality of nozzle holes 41, thereby enhancing the effect of isolation and blocking. For example, the length of the second escape hole 43 is substantially larger than the diameter of the positioning hole 45, and the width of the second escape hole 43 is preferably 100-500 um, but not limited thereto. [0025] [0025] In addition to the foregoing first position and the second position, air bubbles may be generated, and the orifice sheet 4 is also easily produced in a large area outside the plurality of nozzle holes 41 during the thermocompression bonding process. In some embodiments, the orifice sheet 4 can also be provided with a plurality of third escape holes 44, and since the plurality of third escape holes 44 are disposed at a large area of the orifice sheet 4, the width thereof is It is preferable to use 50-1 00 um, and not limited thereto, to assist the large-area bubble to escape from the wider third escape hole 44. And "Before the orifice sheet 4 is to be subjected to thermocompression bonding, if the edge is originally deformed" or if the edge is caused to float by the collision during the joining, it is also extremely easy to generate bubbles at the edge. The problem of generating bubbles at the edge of the orifice sheet 4 is not solved. In the present embodiment, a square serrated edge 4 is used. As shown in the fourth figure, the square serrated edge of the embodiment has a length of 500 um and a width of 250. The size of um is preferred, but not limited thereto. By means of a square ore-like edge having a certain length and width, the circumference of the joint interface between the orifice sheet 4 and the dry film (not shown) is increased, so that the orifice sheet 4 can be more tightly engaged. The film (not shown) can further reduce the situation in which the edges are floated to generate bubbles. Please refer to the fifth figure, which is a structural schematic view of the structure of the orifice sheet of the second preferred embodiment of the present invention. As shown in the figure, the orifice sheet 5 of the present invention is also applicable to a piezoelectric ink jet head (not shown), and has a plurality of nozzle holes 51 and a plurality of fixed 100120787 form numbers A010〗 Page 8 / Total 25 pages 1002035161-0 201249662) The position hole 55, wherein the plurality of nozzle holes 51 and the positioning holes 55 are arranged in a manner similar to the foregoing embodiment, and therefore will not be described herein. In this embodiment, the orifice sheet 5 has a plurality of first escape holes 52 disposed in the first position, wherein the first position is also between the plurality of nozzle holes 51 and the positioning holes 55, but in this embodiment. The plurality of first air venting holes 52 may be disposed around the nozzle hole 51 and each of the first air venting holes 52 is equidistantly disposed between the two adjacent and juxtaposed orifices 51. The vertical distance L5 between the first escape hole 52a and the spray hole 51a is equal to the vertical distance L6 between the first escape hole 52a and the spray hole 51b, and the vertical distance L7 between the first escape hole 52b and the spray hole 51b. It is also equal to the vertical distance L8 between the first escape hole 52b and the injection hole 51c. And the orifice sheet 5 also has a plurality of second escape holes 53 disposed at the second position. In this embodiment, the second position is surrounded by the positioning hole 55, that is, the plurality of second air holes 53 are disposed around the positioning hole 55, and are not limited thereto. Thereby, the orifice sheet 5 can pass through the plurality of second escape holes 53 disposed around the positioning hole 55 to form a discontinuous annular hollow structure, thereby preventing the floating bubbles generated around the positioning hole 55 from spreading outward. . [0027] Similarly to the foregoing embodiment, the orifice sheet 5 may further have a plurality of third escape holes 54 disposed in a large area, however, in the embodiment, the third escape hole 54 may adopt an oblique design. That is, the third escape hole 54 can be an oblique hollow structure, but not limited thereto. The structural strength of the orifice sheet 5 can be further enhanced by the third escape hole 54 which is obliquely designed, thereby reducing the accidental bending, deformation or breakage of the orifice sheet 5. [0028] In addition, please refer to the fifth figure. In this embodiment, the edge of the orifice sheet 5 is 100120787, the form number A0101, page 9 / 25 pages 1002035161-0 201249662 is a trapezoidal jagged edge 50, the trapezoidal sawtooth The edge 5〇 also has an increase in the circumference of the joint interface between the orifice sheet 5 and the dry film (not shown), so that the orifice sheet 5 can tightly engage the dry film to reduce the floating of the edge to generate bubbles. Advantages, in addition to this, the trapezoidal shape is more resistant to deformation. [0030] [0031] Thus, the position of the plurality of first escape holes 52, the plurality of second escape holes 53, the plurality of third escape holes 54, and the edge 5 thereof of the orifice sheet 5 is set. , structure or size system can have a variety of changes, which can be changed according to the actual application situation, and can be reduced by various changes to reduce the occurrence of bubbles in different regions of the orifice 0. The position, type or size of the example is limited. Please refer to FIG. 6A, which is a schematic structural view of the structure of the orifice sheet of the third preferred embodiment of the present invention and the non-mineral steel layer joined thereto. As shown in the figure, the orifice sheet 6 of the present embodiment is also applicable to a piezoelectric inkjet head (not shown), and the orifice sheet 6 is positioned and clamped on both sides thereof through the positioning fixture 8 to The orifice sheet 6 and the underlying stainless steel layer 7 are mutually aligned with each other to facilitate the subsequent hot press bonding process. The orifice sheet 6 also has a plurality of orifices 61 and a plurality of positioning holes 65, and the plurality of orifices 61 and the positioning holes 65 are arranged in a manner similar to the foregoing embodiment, and thus will not be described again. However, in the present embodiment, the size of the orifice sheet 6 is smaller than that of the foregoing embodiment, and by this reduced size, the material cost of the orifice sheet 6 can be reduced on the one hand, and the sprayable sheet 6 can be prevented from being placed on the other hand. The hollow structure of the liquid supply hole (not shown) in the multilayer structure of the piezoelectric ink jet head under the orifice sheet 6 can further reduce the probability of bubble generation. Please refer to the sixth figure, which is the knot of the orifice structure shown in the sixth figure. 100120787 Form No. A0I01 Page 10 of 25 1002035161-0 201249662 Structure diagram. As shown, although the size of the orifice sheet structure 6 of the present embodiment has been significantly reduced as compared with the conventional orifice sheet, it is also necessary to solve the problem of bubbles which are still generated in a portion of the area. Therefore, in the embodiment, the orifice structure 6 also has a plurality of first escape holes 62 ′ 2 second escape holes 63 and a plurality of third escape holes 64 , wherein the first escape holes 62 and the third escape holes 64 . The positions, features and sizes are similar to those of the previous embodiments, and will not be described again. However, in this embodiment, the plurality of second escape holes 63 are disposed in a manner different from the foregoing embodiment, and are also disposed in the second between the plurality of nozzle holes 61 and the positioning holes 65. Position, however, the pattern of the plurality of second escape holes 63 is a plurality of horizontally arranged groove-shaped hollow structures, whereby the plurality of horizontal and discontinuous second escape holes 63 are arranged in a dense manner to block The possibility of bubbles generated around the positioning holes 65 diffusing toward the adjacent orifices 62. [〇〇32] And, in the embodiment, as the length and width of the orifice sheet 6 have been greatly reduced, the edge of the orifice sheet 6 can be additionally designed to reduce the edge joint and generate bubbles. The problem. For example, a plurality of elongated parallel juxtaposed grooves 60a may be disposed at the edge 60 of the sheet 6 adjacent to the orifice, but not limited thereto, so that the orifice sheet 6 is in its dry film ( Not shown) when the joint is engaged, the edge 60 can remain intact without causing floating, and at the same time, the problem that the orifice sheet 6 can leak ink due to the edge 60 being too close to the orifice 61 can be avoided. In addition, the plurality of bell-grooves 60a disposed at the edge 6〇 further have the function of strengthening the structural strength of the orifice sheet 6, which is capable of dispersing the stresses, thereby making the orifice sheet 6 less susceptible to stress when subjected to an external force. Deformation occurs.闺, in summary, the present case applies to the orifice nozzle structure of the piezoelectric nozzle ink head by 100120787 Form No. A0101 Page 11 / Total 25 pages 1002035161-0 201249662 A plurality of first escape holes arranged in the first position, a plurality of second escape holes disposed in the second position, a plurality of third escape holes, and a structure capable of making the edges thereof easy to be engaged, so that bubbles generated in different regions on the orifice plate can be dissipated by the foregoing structure, The piezoelectric ink jet head is not damaged by the generation of air bubbles, thereby further prolonging its service life. [0034] The present invention has been modified by those skilled in the art, and is not intended to be protected by the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS [0035] Fig. A is a plan view showing a multilayer structure of a conventional ink jet head before cutting. [0036] First FIG. B is a cross-sectional view taken along line A-A of the ink jet unit shown in FIG. [0037] The second figure is a schematic diagram of the thermocompression bonding of the conventional ink-jet head multilayer structure. [0038] The third figure is a schematic diagram of the position of the bubble generated by the conventional ink-jet head multilayer structure with respect to the orifice layer. . [0039] Figure 4 is a schematic view showing the structure of the orifice sheet structure of the first preferred embodiment of the present invention. [0040] Fig. 5 is a schematic view showing the structure of the orifice sheet structure of the second preferred embodiment of the present invention. [0041] Fig. 6A is a schematic view showing the structure of the orifice sheet structure and the stainless steel layer joined thereto in the third preferred embodiment of the present invention. [0042] 100120787 Figure 6B: Structure of the structure of the orifice sheet structure shown in Figure 6A. Form No. A0101 Page 12 of 25 1002035161-0 201249662 Figure. [Main Component Symbol Description] [0043] Inkjet Multilayer Structure: 1 [0044] Inkjet Cell: 100 [0045] Perforation Layer: 101 [0046] Positioning Holes: 101a, 102g, 24a, 25a [0047] Intermediate Flow Road layer: 102

[0048] 板件：102a-102f [0049] 連通層：103 [0050] 入口流道層：103a [0051] 出入孔層：103b [0052] 壓力腔層：104 [0053] 致動層：105[0048] Plate: 102a-102f [0049] Connecting layer: 103 [0050] Inlet runner layer: 103a [0051] Access hole layer: 103b [0052] Pressure chamber layer: 104 [0053] Actuating layer: 105

[0054] 乾膜層：106 [0055] 入液流道：107 [0056] 儲液室：108 [0057] 壓力腔體：109 [0058] 出液流道：110 [0059] 喷？L : 111、41、41a、41b、41c、51、51a、51b、 51c ' 61 100120787 表單編號A0101 第13頁/共25頁 1002035161-0 201249662 [0060] 上壓板：20 [0061] 定位治具：21、8 [0062] 定位銷：210 [0063] 橡膠層：24 [0064] 托盤：25 [0065] 作業台：26 [0066] 喷孔區域：31 [0067] 定位子L : 321、322、45 ' 55、65 [0068] 鎖接孔：331、332[0054] Dry film layer: 106 [0055] Liquid inlet channel: 107 [0056] Liquid storage chamber: 108 [0057] Pressure chamber: 109 [0058] Outlet flow channel: 110 [0059] Spray? L : 111, 41, 41a, 41b, 41c, 51, 51a, 51b, 51c ' 61 100120787 Form No. A0101 Page 13 of 25 1002035161-0 201249662 [0060] Upper platen: 20 [0061] Positioning jig: 21, 8 [0062] Locating Pin: 210 [0063] Rubber Layer: 24 [0064] Tray: 25 [0065] Workbench: 26 [0066] Spray Hole Area: 31 [0067] Positioner L: 321, 322, 45 ' 55,65 [0068] Locking holes: 331,332

[0069] 易產生氣泡之區域：A、B、C、D[0069] Areas susceptible to bubble generation: A, B, C, D

[0070] 喷孔片：4、5、6 [0071] 方形鋸齒狀邊緣：40 [0072] 第一逃氣孔：42、42a、42b、52、52a、52b、62 [0073] 第二逃氣孔：43、53、63 [0074] 第三逃氣孔：44、54、64 [0075] 梯形鋸齒狀邊緣：50 [0076] 不鏽鋼層：7 [0077] 邊緣：60 [0078] 鏤空溝槽：60a 100120787 表單編號A0101 第14頁/共25頁 1002035161-0 201249662 [0079]距離：LI、L2、L3、L4、L5、L6、L7、L8 100120787 表單編號A0101 第15頁/共25頁 1002035161-0Perforated sheet: 4, 5, 6 [0071] Square serrated edge: 40 [0072] First escape hole: 42, 42a, 42b, 52, 52a, 52b, 62 [0073] Second escape hole: 43, 53, 63 [0074] Third escape hole: 44, 54, 64 [0075] Trapezoidal jagged edge: 50 [0076] Stainless steel layer: 7 [0077] Edge: 60 [0078] Hollow groove: 60a 100120787 Form No. A0101 Page 14 of 25 1002035161-0 201249662 [0079] Distance: LI, L2, L3, L4, L5, L6, L7, L8 100120787 Form No. A0101 Page 15 of 25 1002035161-0

Claims (1)

201249662 七、申請專利範圍： 1 . 一種噴孔片結構，適用於一壓電喷墨頭，該喷孔片結構上 至少包括： 複數個喷孔，其係以雙排並列之方式對應排列； 複數個定位孔，設置於該複數個喷孔之兩相對侧；以及 複數個第一逃氣孔，設置於第一位置，該第一位置係設 置於該雙排並列之該複數個喷孔之間，且每一該第一逃氣 孔係與兩相鄰並列之該喷孔等距設置。 2.如申請專利範圍第1項所述之喷孔片結構，其中該第一逃 氣孔之寬度係以20-50um為較佳。 3 .如申請專利範圍第1項所述之喷孔片結構，其中該喷孔片 結構更包含複數個第二逃氣孔，且該第二逃氣孔係設置於 第二位置，介於該複數個喷孔及該複數個定位孔之間。 4 .如申請專利範圍第3項所述之喷孔片結構，其中該複數個 第二逃氣孔係為複數個水平設置之溝槽狀鏤空結構。 5 .如申請專利範圍第3項所述之喷孔片結構，其中該第二逃 氣孔之長度係實質上大於該定位孔之直徑，且該第二逃氣 孔之寬度係以1 00-500um為較佳。 6 .如申請專利範圍第3項所述之喷孔片結構，其中該複數個 第二位置係為環繞該定位孔之周圍。 7 .如申請專利範圍第1項所述之喷孔片結構，其中該喷孔片 結構更包含複數個第三逃氣孔，設置於該喷孔片結構之大 區域面積，且該第三逃氣孔之寬度係以50-1 00um為較佳 〇 8 .如申請專利範圍第7項所述之喷孔片結構，其中該第三逃 100120787 表單編號A0101 第16頁/共25頁 1002035161-0 201249662 氣孔係為一斜向之鏤空溝槽結構。 9 .如申請專利範圍第1項所述之喷孔片結構，其中該喷孔片 之邊緣係為方形鋸齒狀邊緣。 10 .如申請專利範圍第1項所述之喷孔片結構，其中該噴孔片 之邊緣係為梯形鑛齒狀邊緣。 11 .如申請專利範圍第1項所述之喷孔片結構，其中該喷孔片 之邊緣係具有複數個鏤空溝槽。 1002035161-0 100120787 表單編號A0101 第17頁/共25頁201249662 VII. Patent application scope: 1. A perforated film structure, suitable for a piezoelectric inkjet head, the spray orifice structure comprises at least: a plurality of orifices, which are arranged in parallel in a double row; Positioning holes are disposed on opposite sides of the plurality of nozzle holes; and a plurality of first air escaping holes are disposed at the first position, the first position being disposed between the plurality of nozzle holes juxtaposed by the double row, And each of the first escape holes is equidistant from the two adjacent nozzle holes. 2. The orifice structure according to claim 1, wherein the width of the first escape hole is preferably 20-50 um. 3. The orifice sheet structure of claim 1, wherein the orifice sheet structure further comprises a plurality of second escape holes, and the second escape hole is disposed at the second position, between the plurality of Between the orifice and the plurality of locating holes. 4. The orifice structure of claim 3, wherein the plurality of second escape holes are a plurality of horizontally disposed grooved hollow structures. 5. The orifice structure according to claim 3, wherein the length of the second escape hole is substantially larger than the diameter of the positioning hole, and the width of the second escape hole is 100-500 um. Preferably. 6. The orifice structure of claim 3, wherein the plurality of second locations surround the periphery of the locating aperture. 7. The orifice structure according to claim 1, wherein the orifice structure further comprises a plurality of third escape holes, a large area of the orifice structure, and the third escape hole. The width is preferably 50-1 00 um. The orifice structure as described in claim 7, wherein the third escape 100120787 form number A0101 page 16 / total 25 page 1002035161-0 201249662 vent It is an oblique hollow structure. 9. The orifice structure of claim 1, wherein the edge of the orifice sheet is a square serrated edge. 10. The orifice structure of claim 1, wherein the edge of the orifice sheet is a trapezoidal ore-like edge. 11. The orifice structure of claim 1, wherein the edge of the orifice sheet has a plurality of hollowed-out grooves. 1002035161-0 100120787 Form No. A0101 Page 17 of 25