201243391 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種光學元件、其製造方法以及投影 設備，特別是指一種用於反射光線、調整光路的立體光學 元件、其製造方法以及具有該立體光學元件的投影設備。 【先前技術】 對於目前投影設備而言，其中對於照明光源及投影光 源是必須分開，以利於其投影較清晰，但事實上卻仍存在 有缺點。已知稜鏡組是被廣泛應用於投影機中，用於將照 明及投影光路分開。參閱圖1，一種投影機2的稜鏡組1包 含：兩個稜鏡11、二個各別彼覆在兩個棱鏡11之一相向的 結合面111上的抗反射薄膜12，以及數個位於抗反射薄膜 12之間的間隔體13。所述抗反射薄膜12都包括數層上下 堆疊的膜層（圖1只示意一層）。所述間隔體13將兩個稜鏡 11分隔開，使兩稜鏡11間存有一空氣層14。 使用時，投影機2的照明光線首先被投影機2之一反 射件21反射而朝右側的稜鏡η入射，光線被抗反射薄膜 12與空氣層14間的界面全反射而射向投影機2的一個數位 微鏡褒置 22 (Digital Micromirror Device,簡稱 DMD)，一部 分光線進入該數位微鏡裝置22成為照明光源，另外被反射 出的光線通過兩個棱鏡11往下朝一圖未示出的投影鏡頭入 射’成為投影光源（也稱為成像光源 參閱圖2，為另一種形式的投影機2’，同樣配合該稜鏡 組1使用，其光線路徑與圖1相反；其光線先由下往上通 201243391 過兩個棱鏡11並朝該數位微鏡裝置22’（DMD)入射成為照 明光源，另一部分光線被DMD反射並在右側稜鏡u全反 射而往右前進，成為投影光源。 無論是圖1或圖2的投影機2、2,，都使用相同結構的 稜鏡組1，而稜鏡組1在製造時，必需將研磨後的兩個稜鏡 11以球狀的間隔體13間隔，經過對位調整後將其膠合固定 ，但一般而言，稜鏡u形狀不像長方體、正方體或板狀物 等物體為規則設計，所以兩稜鏡丨丨對貼結合時，稜鏡丨丨不 易夾持與對位，組裝較困難。而且稜鏡11對貼結合前，必 需用特殊失持治具固定稜鏡11並在其結合面111作鍍膜加 工以形成抗反射薄膜12，受限於稜鏡n的不規則形狀以及 必需配合特殊治具，所以稜鏡u鍍膜時的設置密度受限， 無法一次對大量稜鏡U鍍膜，造成鍍膜成本高、各稜鏡n 的品質變異較大。 【發明内容】 因此’本發明之目的，即在提供一種容易製造、能大 面積鍍膜而降低鍍膜成本，而且品質變異小的立體光學元 件、其製造方法，以及具有該立體光學元件的投影設備。 於是’本發明立體光學元件包含：兩個相對應並彼此 間隔的稜鏡組，以及一個位在所述兩棱鏡組之間的間隔體 。每一稜鏡組都包括：一基板、一抗反射薄膜，以及一稜 鏡。該基板包括一朝向另一稜鏡組的結合面，以及一相反 於該結合面的稜鏡安裝面。該抗反射薄膜位於基板的結合 面上，並包括數層堆疊的薄膜層。該稜鏡鄰近該基板的棱 201243391 鏡安裝面。所述間隔體位於兩個稜鏡組的抗反射薄膜之間 〇 需要說明的是，所述稜鏡「鄰近」該基板的稜鏡安裝 面’是指該稜鏡可以直接固定於該稜鏡安裝面上，或者該 棱鏡也可以透過一層折射率匹配層而間接固定在基板上。 本發明立體光學元件的製造方法，包含： (A) 製備兩個基板單元，在每一基板單元的基板的結合 面上披覆數層薄膜層而形成所述抗反射薄膜； (B) 使所述兩基板單元以抗反射薄膜呈相對應，並在所 述兩基板單元的抗反射薄膜之間設置該間隔體； (C) 使所述兩基板單元透過間隔體而互相疊合； (D) 將所述兩基板單元及間隔體膠合固定；及 (E) 將兩個棱鏡各別鄰近所述兩基板單元的基板的稜鏡 安裝面而固定。 本發明投影設備除了包含該立體光學元件之外，還包 含：一光源、一個設置在該立體光學元件的其中一個稜鏡 組的一侧的數位微鏡裝置，以及一個投影鏡頭；該立體光 學元件的其中一個稜鏡組將該光源的光線朝該數位微鏡裝 置反射’該數位微鏡裝置將該稜鏡組反射而來的光線再度 反射而使光線通過所述兩棱鏡組而朝該投影鏡頭入射。 更進一步地，該投影設備還可以包含一個設置在該立 體光學元件的一側的反射件，該光源的光線可以先朝該反 射件入射’並受該反射件反射之後再朝該立體光學元件的 其中一個稜鏡組入射》 201243391 也就是說’所述稜鏡組接收到的「光源的光線」可以 是「由該光源直接射向該稜鏡組的光線（此時可以省略該反 射件）」，也可以是「由該光源發出且受到該反射件反射後才 射向該稜鏡組的光線（如本發明第一實施例的圖3所示）」， 這兩種光線都可以視為「該光源的光線」。 此外，本發明之投影設備的光路也可以如下述方式進 行：該光源的光線通過所述兩稜鏡組而朝該數位微鏡裝置 入射，該數位微鏡裝置將入射而來的光線朝其中一個稜鏡 組反射，該棱鏡組再將該數位微鏡裝置反射而來的光線再 度反射而朝該投影鏡頭入射。 本發明之功效：藉由基板提供全内反射功能，在水平 的基板披覆抗反射薄膜可以一次大面積鍍膜、降低各個光 學元件的膜層變異，維持穩定品質。而且將兩個稜鏡各別 固疋在兩基板的平面狀的稜鏡安裝面，容易對位與固定， 達到易於製造、降低製造成本等功效。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之三個實施例的詳細說明中將可清楚 的呈現。在本發明被詳細描述前，要注意的是，在以下的 說明内容中，類似的元件是以相同的編號來表示。 參閱圖3,本發明立體光學元件之第一實施例，可應用 於一投影設備3中，所述投影設備3除了包含該立體光學 元件之外’還包含一光源33、一反射件31、一數位微鏡裝 置（DMD)32 ’以及—投影鏡頭34，當然、，該投影設備3還 201243391 包含濾光片…等元件，但由於非本發明的重點，不在此說 明。 而本發明立體光學元件包含兩個相對應並彼此間隔的 棱鏡組4，以及一個位在兩稜鏡組4之間的間隔體44。每 一個棱鏡組4都包括一基板41、41，、一抗反射薄膜（anti_ reflection coating)42，以及一稜鏡43。需要說明的是，當本 實施例之兩個稜鏡組4裝設於投影設備3内的相對位置時（ 如圖3中所示的概約互呈左右兩側），其中所謂右側的棱鏡 組4是指靠近或鄰近該反射件31、該數位微鏡裝置32，而 所s胃左側的稜鏡組4是指遠離該反射件31、該數位微鏡裝 置32 ;該右側稜鏡組4的基板41與該左側的稜鏡組4的基 板41’功能略有不同，因此以不同元件編號表示。 所述基板41、41，皆為透明板片狀的玻璃基板，且兩者 功能不同；其中若該基板41為能產生全内反射（T〇ul Internal Reflection，簡稱TIR)作用，使入射而來的光線角 度大於臨界角即發生全反射，出射光線（例如受該數位微鏡 裝置32反射而朝下行進的光線）小於臨界角即發生穿透則 可為一種全内反射平板（TIR plate);而該基板41’主要供光 線穿透通過，該基板41’與該基板41作為全内反射平板的 功能略有不同，但在實施時不需限制基板41及基板41，的 主要功能如前述，因為當本發明的設置方向改變時，該基 板41’可作為全内反射平板，該基板41可供光線通過。 所述兩稜鏡組4的基板41、41’都包括一結合面411， 以及一相反於該結合面411的棱鏡安裝面412，並使該基板 201243391 41、4 Γ都以結合面411互呈面對面的相對應位置，並相隔 有適當間隔；所述基板41、41’的厚度可以為〇.5釐米 、0.7mm、1.0mm，或1.0mm以上，但不限於此。 所述抗反射薄膜42彼覆在所述兩個稜鏡組4的基板41 、41’的結合面411上’該抗反射薄膜42包括數層上下堆疊 的薄膜層421(圖3僅示意兩層），並且可以為兩種或兩種以 上不同材料的膜層周期性堆疊而成。利用相鄰膜層的折射 率高低變化’達到抗反射效果。由於抗反射薄膜42的多層 堆疊結構為已知技術，不再說明。 所述稜鏡43固定地結合在所述兩個稜鏡組4的基板41 、41’的稜鏡安裝面412上，所述稜鏡43的折射率可以與該 等基板41、41’相同或不同，藉此改變光線產生全反射的臨 界角。本發明之稜鏡43的主要功能與習知稜鏡組的稜鏡是 不同的，習知稜鏡是作為全内反射稜鏡，但本發明是利用 如圖3中该基板41提供全内反射功能，該稜鏡43則用於 光程補償，達到補正像散、減少像差的效果。 所述間隔體44是固定在所述兩個稜鏡組4的抗反射薄 膜42之間且同時只貼置於所述兩個稜鏡組4的兩個抗反 射薄膜42的相對應處；該間隔體44包括數個彼此間隔排 列且由玻璃材t成的間隔部441，但不限於上述形態與材料 例如也可以使用光纖管或光阻材料或其它。藉由該間隔 體44將兩個稜鏡組4隔開，進而形成—個位於兩抗反射薄 膜之間的工氣層42〇，作為使光線產生全反射的界面。 S氣層420的厚度等於兩抗反射薄膜42的間距，也等於 201243391 是間隔體44的直徑，約為5微米（//m)〜2〇微米，在此範 圍内’能提供較佳的全反射作用。 本發明使用時，當光源33發出的光線A1首先被投影 设備3之反射件31反射’則反射光線A2射向右側的稜鏡 組4時’就受到該右側稜鏡組4的基板41上的抗反射薄膜 42與空風層420的界面全反射成為反射光線A3，所述反射 光線A3再朝該數位微鏡裝置32入射而成為照明光線A3， 另有部分光線受到該數位微鏡裝置32反射並向下通過該兩 稜鏡組4而朝該投影鏡頭34入射，成為投影光線A4，而且 投影光線A4通過兩稜鏡組4時，藉由兩棱鏡組4的抗反射 薄膜42的抗反射作用’使大部分的光線向外穿透射出，減 少界面間的光線多重反射，如此可以避免被界面反射的光 線與向外射出的光線產生干擾，因此能減少雜光、提升效 率〇 需要說明的是，雖然本實施例是透過該反射件31使該 光源33的光線朝該立體光學元件入射，但實施時也可以適 當地調整該光源33位置而使其光線直接朝該立體光學元件 入射’此時可省略設置該反射件31。 參閱圖4’在應用上，本發明立體光學元件也可以增加 設置一個場透鏡（field lens) 47，該場透鏡47可為一個凸透 鏡’並位於所述右側的稜鏡組4的稜鏡43及該數位微鏡裝 置32之間’用於將該基板41反射而來的光線A3以及由該 數位微鏡裝置32反射出去的投影光線A4聚光，藉此改變 光線角度，使光線角度變小，達到聚光、提高效率的目的 10 201243391 。當然’該場透鏡47不限於凸透鏡，當使用凹透鏡時可以 達到不同的效果。 參閱圖5，此外’本發明立體光學元件也可以應用在另 一種形式的投影設備3’中，該投影設備3,不具有如圖3之 反射件31，而該光源33的光線B1先由下往上通過所述兩 個稜鏡組4並朝該數位微鏡裝置32,入射而成為照明光線 B1 ’ 一部分光線B2被該數位微鏡裝置32,反射而出，並且 爻到該右側稜鏡組4全反射而朝該投影鏡頭34入射，成為 投影光線B3。也就是說，相對於圖3將照明光線全反射的 設計，圖5是將投影光線全反射的設計。 參閱圖3、6、7,本發明立體光學元件的製造方法的第 一實施例，包含： (1)進行步驟51 :首先製作兩個基板單元4〇，所述兩基 板單元40都包括一基板41(41’）及一抗反射薄膜“，實際 上就是指前述兩個稜鏡組4的基板41、41，及抗反射薄膜 42,兩個基板單元4〇的製造過程相同都是利用蒸鑛或滅 錄方式纟基板41、41’的結合面411鍍著數層周期性堆 疊的薄膜層421而構成所述抗反射薄膜42。 ⑺進订步驟52 :在其中一個基板單元4〇的抗反射薄膜 42表面塗布-膠體45，且膠體45塗布在抗反射薄膜42的 四周緣，本實施例的膠體45為熱固化膠，具體例為紫外光 固化膠(UV膠)但不限於此。需要說明的是，圖7將膠體 示意繪出’圖3則省略。 (3)進仃步驟53 :在膠體45上設置間隔體44，本實施 11 201243391 例的間隔體44是採用玻璃材製成直徑約為5〜脚m的球 體，並使玻螭球彼此間隔且均勻地排列在抗反射薄膜42四 周緣表面。 需要說明的是，上述步驟52、53的精神在於：使兩個 基板單元40以其抗反射薄膜42呈相對應，並在所述兩個 杬反射薄膜42之間設置所述間隔體44，但其進行方式不限 於本實施例所揭露的方式。 (4) 進行步驟54 ··將兩個基板單元4〇疊置並壓合，此過 程是將另一個未塗布有膠體45的基板單元4〇的抗反射薄 臈42朝向間隔體44而設置在間隔體44上，將兩基板單元 40透過間隔體44而互相壓合，使膠體45同時接觸到兩個 基板單元40的抗反射薄膜42 ^接著利用紫外光照射使膠體 45固化’即可將兩個基板單元4〇及間隔體44膠合固定， 同時因為間隔體44的存在，使兩抗反射薄膜42間形成該 空氣層420。 (5) 進行步驟55 :將二個稜鏡43各別膠合固定在兩基板 41、41’的稜鏡安裝面412上，即完成本發明立體光學元件 的製作。需要說明的是’兩基板單元40與稜鏡43也可以 利用插件方式放入投影設備3的支架内，因此稜鏡43也可 以不用先膠合固定在基板41、41’上，但稜鏡43必定是鄰 近基板41、41’的稜鏡安裝面412而設置。 值得一提的是，本發明在水平的基板41、41’上鍍膜比 起以往在形狀立體的稜鏡上鍍膜要容易許多，因此本發明 抗反射薄膜42可以使用蒸鑛、濺鑛方式作大面積鍍膜，進201243391 6. Technical Field of the Invention The present invention relates to an optical element, a method of manufacturing the same, and a projection apparatus, and more particularly to a stereoscopic optical element for reflecting light, adjusting an optical path, a method of manufacturing the same, and having A projection device for the stereoscopic optical element. [Prior Art] For the current projection device, the illumination source and the projection light source must be separated to facilitate the clear projection, but in fact there are still disadvantages. Groups of tantalum are known to be widely used in projectors to separate illumination and projection paths. Referring to FIG. 1, a group 1 of a projector 2 includes two cymbals 11, two anti-reflection films 12 respectively covering the opposing bonding faces 111 of one of the two prisms 11, and a plurality of The spacer 13 between the antireflection films 12. The anti-reflection film 12 includes a plurality of layers stacked on top of each other (only one layer is shown in Fig. 1). The spacer 13 separates the two turns 11 such that an air layer 14 is present between the two turns 11. In use, the illumination light of the projector 2 is first reflected by the reflector 21 of the projector 2 and is incident toward the right side ,η, and the light is totally reflected by the interface between the anti-reflection film 12 and the air layer 14 and is directed to the projector 2 A digital micromirror device 22 (DMD), a part of the light enters the digital micromirror device 22 as an illumination source, and the reflected light passes through the two prisms 11 downwards to a projection not shown in the figure. The lens incident 'becomes a projection light source (also referred to as an imaging light source, see Fig. 2, which is another form of projector 2'), which is also used in conjunction with the cymbal group 1, the light path is opposite to that of Fig. 1; the light is first from bottom to top. Passing through the two prisms 11 through 201243391 and entering the digital micromirror device 22' (DMD) as an illumination source, the other part of the light is reflected by the DMD and is totally reflected on the right side 而u and proceeds to the right to become a projection light source. 1 or 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2, 2 After the alignment After the whole, it is glued and fixed, but in general, the shape of the 稜鏡u is not designed like a rectangular parallelepiped, a cube or a plate, so the two 稜鏡丨丨 稜鏡丨丨 结合 结合 结合In the alignment, assembly is difficult. Before the 稜鏡11 pair is bonded, it is necessary to fix the 稜鏡11 with a special loss-holding jig and apply a coating process on the bonding surface 111 to form the anti-reflection film 12, which is limited by 稜鏡n. Irregular shape and special fixtures are required, so the density of the coating during 镀u coating is limited, and it is impossible to apply a large amount of 稜鏡U coating at a time, resulting in high coating cost and large variation in quality of each 。n. Therefore, the object of the present invention is to provide a three-dimensional optical element which is easy to manufacture, can be coated with a large area, which reduces the cost of plating, and which has a small variation in quality, a method for producing the same, and a projection apparatus having the same. The stereoscopic optical element comprises: two corresponding groups of 稜鏡 and spaced apart from each other, and a spacer between the two prism groups. Each group includes: a substrate An anti-reflective film, and a substrate, the substrate includes a bonding surface facing the other group, and a mounting surface opposite to the bonding surface. The anti-reflection film is located on the bonding surface of the substrate and includes a plurality of stacked film layers adjacent to the rim of the substrate 201243391 mirror mounting surface. The spacers are located between the anti-reflective films of the two sets of rafts, it should be noted that the 稜鏡 "adjacent" The crucible mounting surface of the substrate means that the crucible can be directly fixed to the crucible mounting surface, or the prism can be indirectly fixed to the substrate through a refractive index matching layer. The manufacturing method of the stereoscopic optical element of the present invention, The method comprises the following steps: (A) preparing two substrate units, coating a plurality of thin film layers on a bonding surface of the substrate of each substrate unit to form the anti-reflection film; (B) causing the two substrate units to be in an anti-reflection film Correspondingly, the spacer is disposed between the anti-reflection films of the two substrate units; (C) the two substrate units are superposed on each other through the spacer; (D) the two substrate units and the spacers Fixing together; and (E) the two prisms adjacent to the respective mounting surface of the substrate Prism two substrate unit is fixed. The projection apparatus of the present invention comprises, in addition to the stereoscopic optical element, a light source, a digital micromirror device disposed on one side of one of the group of the stereoscopic optical elements, and a projection lens; the stereoscopic optical element One of the sets of rays reflects the light of the light source toward the digital micromirror device. The digital micromirror device reflects the light reflected from the set of rays again to pass the light through the two prism sets toward the projection lens. Incident. Further, the projection apparatus may further comprise a reflecting member disposed on one side of the stereoscopic optical element, the light of the light source may be incident on the reflective member first and reflected by the reflective member and then toward the stereoscopic optical element. One of the groups is incident. 201243391 means that the "light of the light source" received by the group can be "the light that is directly directed toward the group by the source (the reflector can be omitted at this time)" It may also be "light emitted from the light source and reflected by the reflector to be directed to the group (as shown in FIG. 3 of the first embodiment of the present invention)", both of which can be regarded as " The light of the light source." In addition, the optical path of the projection apparatus of the present invention may also be performed in such a manner that light of the light source is incident on the digital micromirror device through the two sets of micro-mirrors, and the digital micro-mirror device directs the incident light toward the one. The group of reflections reflects the light reflected by the digital micromirror device and is incident on the projection lens. The effect of the invention is that by providing the total internal reflection function of the substrate, the antireflection film coated on the horizontal substrate can be coated on a large area at a time, and the film layer variation of each optical element can be reduced to maintain stable quality. Moreover, the two crucibles are fixed to the planar crucible mounting surface of the two substrates, which are easy to align and fix, and are easy to manufacture and reduce the manufacturing cost. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the embodiments of the invention. Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals. Referring to FIG. 3, a first embodiment of a stereoscopic optical component of the present invention can be applied to a projection device 3. The projection device 3 includes a light source 33, a reflective member 31, and a The digital micromirror device (DMD) 32' and the projection lens 34, of course, the projection device 3 also includes 201243391 elements such as filters, but are not described herein because they are not the focus of the present invention. The stereoscopic optical element of the present invention comprises two prism groups 4 corresponding to each other and spaced apart from each other, and a spacer 44 positioned between the two groups 4. Each of the prism groups 4 includes a substrate 41, 41, an anti-reflecting coating 42, and a crucible 43. It should be noted that when the two groups 4 of the embodiment are installed in the relative positions in the projection device 3 (as shown in FIG. 3, the left and right sides are mutually adjacent), wherein the so-called right prism group 4 means near or adjacent to the reflecting member 31, the digital micromirror device 32, and the scorpion group 4 on the left side of the stomach is away from the reflecting member 31, the digital micromirror device 32; The substrate 41 and the substrate 41' of the left side group 4 have slightly different functions, and thus are denoted by different component numbers. The substrates 41 and 41 are all transparent plate-shaped glass substrates, and the functions of the two are different. If the substrate 41 is capable of generating total internal reflection (TIR), the incident is incident. The total ray angle is greater than the critical angle, that is, total reflection occurs, and the emitted light (for example, the light that is reflected by the digital micromirror device 32 and travels downward) is smaller than the critical angle, that is, the penetration may be a total internal reflection plate (TIR plate); The substrate 41' is mainly used for light to pass through. The substrate 41' and the substrate 41 have slightly different functions as the total internal reflection plate. However, the main functions of the substrate 41 and the substrate 41 are not limited in implementation, as described above. Since the substrate 41' can serve as a total internal reflection plate when the orientation of the present invention is changed, the substrate 41 can pass light. The substrates 41, 41' of the two sets 4 each include a joint surface 411, and a prism mounting surface 412 opposite to the joint surface 411, and the substrates 201243391 41, 4Γ are mutually joined by the joint surface 411. The face-to-face corresponding positions are spaced apart from each other; the thickness of the substrate 41, 41' may be 〇.5 cm, 0.7 mm, 1.0 mm, or 1.0 mm or more, but is not limited thereto. The anti-reflection film 42 covers the bonding surface 411 of the substrates 41 and 41' of the two groups 4, and the anti-reflection film 42 includes a plurality of layers 421 stacked on top of each other (FIG. 3 only shows two layers). And can be formed by periodically stacking layers of two or more different materials. The antireflection effect is achieved by using the change in the refractive index of the adjacent film layers. Since the multilayer stack structure of the anti-reflection film 42 is a known technique, it will not be described. The crucible 43 is fixedly coupled to the crucible mounting surface 412 of the substrate 41, 41' of the two crucible groups 4, and the crucible 43 may have the same refractive index as the substrates 41, 41' or Different, thereby changing the critical angle at which the light produces total reflection. The main function of the crucible 43 of the present invention is different from that of the conventional crucible group. The conventional crucible is used as a total internal reflection crucible, but the present invention utilizes the substrate 41 as shown in Fig. 3 to provide total internal reflection. Function, the 稜鏡43 is used for optical path compensation to achieve the effect of correcting astigmatism and reducing aberrations. The spacer 44 is fixed between the anti-reflection films 42 of the two groups 4 and at the same time only the two anti-reflection films 42 of the two groups 4 are placed; The spacer 44 includes a plurality of spacers 441 which are arranged at intervals and are formed of a glass material t. However, the above-described configuration and material are, for example, a fiber tube or a photoresist material or the like. The two groups 4 are separated by the spacer 44 to form a gas layer 42A between the two anti-reflection films as an interface for causing total reflection of light. The thickness of the S gas layer 420 is equal to the spacing of the two anti-reflective films 42 and is equal to 201243391 being the diameter of the spacer 44, which is about 5 micrometers (//m) to 2 micrometers, and within this range can provide a better overall Reflection. When the present invention is used, when the light ray A1 emitted from the light source 33 is first reflected by the reflecting member 31 of the projection device 3, then the reflected ray A2 is directed to the dam group 4 on the right side, and is received on the substrate 41 of the right cymbal group 4. The interface between the anti-reflection film 42 and the air-blast layer 420 is totally reflected as reflected light A3, and the reflected light A3 is incident on the digital micro-mirror device 32 to become the illumination light A3, and part of the light is received by the digital micro-mirror device 32. Reflecting and passing downward through the two groups 4, the projection lens 34 is incident on the projection lens 34, and becomes the projection light A4, and when the projection light A4 passes through the two groups 4, the antireflection of the antireflection film 42 by the two prism groups 4 The function 'translates most of the light out and reduces the multiple reflections of light between the interfaces. This avoids interference between the light reflected by the interface and the light emitted outward. This can reduce stray light and improve efficiency. In this embodiment, the light of the light source 33 is incident on the stereoscopic optical element through the reflector 31. However, the position of the light source 33 can be appropriately adjusted to directly direct the light toward the optical element 33. Body enters the optical element 'In this case the reflecting member 31 may be provided will be omitted. Referring to FIG. 4', in application, the stereoscopic optical element of the present invention may also be provided with a field lens 47, which may be a convex lens 'and located on the right side of the crucible 4 of the crucible 4 and The light micro-mirror device 32 converges the light A3 reflected by the substrate 41 and the projection light A4 reflected by the digital micro-mirror device 32, thereby changing the light angle to make the light angle smaller. To achieve the purpose of collecting light and improving efficiency 10 201243391 . Of course, the field lens 47 is not limited to a convex lens, and different effects can be achieved when a concave lens is used. Referring to FIG. 5, in addition, the stereoscopic optical element of the present invention can also be applied to another type of projection apparatus 3'. The projection apparatus 3 does not have the reflection member 31 of FIG. 3, and the light B1 of the light source 33 is first Upward through the two groups 4 and toward the digital micromirror device 32, incident into the illumination light B1 'a portion of the light B2 is reflected by the digital micromirror device 32, and is picked up to the right side group 4 is totally reflected and enters the projection lens 34 to become the projected light B3. That is to say, the design of totally reflecting the illumination light with respect to Fig. 3, Fig. 5 is a design for totally reflecting the projection light. Referring to Figures 3, 6, and 7, a first embodiment of a method of fabricating a stereoscopic optical element of the present invention comprises: (1) performing step 51: first fabricating two substrate units 4, both of which comprise a substrate 41 (41') and an anti-reflection film "actually refers to the substrates 41, 41 of the two groups 4, and the anti-reflection film 42, and the manufacturing process of the two substrate units 4 is the same using steaming Or the combination surface 411 of the substrate 117, 41' is plated with a plurality of periodically stacked film layers 421 to form the anti-reflection film 42. (7) Substituting step 52: anti-reflection film on one of the substrate units 4 The surface is coated with a colloid 45, and the colloid 45 is coated on the periphery of the antireflection film 42. The colloid 45 of the present embodiment is a thermosetting adhesive, and the specific example is a UV curable adhesive (UV adhesive), but is not limited thereto. Yes, Fig. 7 shows the colloid in a schematic manner. Fig. 3 is omitted. (3) Step 53: A spacer 44 is provided on the colloid 45. The spacer 44 of the embodiment 201243391 is made of a glass material and has a diameter of about 5~foot m spheres and make the glass balls spaced and evenly spaced Arranged on the peripheral edge surface of the anti-reflection film 42. It should be noted that the spirit of the above steps 52, 53 is to make the two substrate units 40 correspond to the anti-reflection film 42 and to the two anti-reflection films 42. The spacers 44 are disposed between them, but the manner of performing the same is not limited to the manner disclosed in the embodiment. (4) Performing step 54 · stacking and pressing the two substrate units 4, this process is another The anti-reflection sheet 42 of the substrate unit 4 that is not coated with the colloid 45 is disposed on the spacer 44 toward the spacer 44, and the two substrate units 40 are pressed against each other through the spacer 44, so that the colloid 45 simultaneously contacts the two. The anti-reflection film 42 of the substrate unit 40 is then cured by ultraviolet light to cure the colloid 45, so that the two substrate units 4 and the spacer 44 can be glued and fixed, and at the same time, due to the presence of the spacer 44, the anti-reflection film 42 is interposed. The air layer 420 is formed. (5) Step 55 is performed: the two crucibles 43 are separately glued and fixed on the crucible mounting surface 412 of the two substrates 41, 41', thereby completing the fabrication of the stereoscopic optical element of the present invention. 'two substrates The unit 40 and the cassette 43 can also be inserted into the holder of the projection device 3 by means of a plug-in. Therefore, the crucible 43 can also be fixed to the substrate 41, 41' without first bonding, but the crucible 43 must be adjacent to the substrate 41, 41'. It is noted that the mounting surface 412 of the crucible is provided. It is worth mentioning that the coating on the horizontal substrate 41, 41' of the present invention is much easier than that of the conventional three-dimensional coating on the crucible. Therefore, the antireflection film 42 of the present invention can be Use steaming or splashing to make large-area coatings.
S 12 201243391 而縮短製程時間並降低製造成本。而所謂的大面積錄膜， 應用到本發明製造方法中’可以一次完成多組光學元件的 製作。 參閱圖8'9,圖8為一個俯視示意圖，其中的虛線框 圍界定出九個正方形區域，每一個區域代表一個本發明立 體光學元件所預定成型的截面積大小。在製造上，只要選 用面積較大的大型基板410鍍上大面積抗反射薄膜42，，接 著在抗反射薄膜42’上的預定位置（也就是圖8虛線位置）塗 膠並設置間隔體44，再將另一個表面具有抗反射薄膜42，的 大型基板410與該設有間隔體44的大型基板410膠黏貼合 ，最後沿著圖中的虛線位置切割而得到數個光學元件的離 形，並在每個離形的兩片基板上各別黏貼稜鏡，即可一次 製成數個光學元件。 綜上所述，藉由基板41、41，取代習知稜鏡來提供全内 反射功能，在水平基板41、41’彼覆抗反射薄膜42不需要 任何特殊治具，而且可以一次大面積鍍膜、降低各個光學 元件的膜層變異，維持穩定品質。而且將兩個稜鏡43各別 固定在兩基板41、41，的平面狀的稜鏡安裝面412,比起傳 統直接將兩個稜鏡對貼結合的製作方式，具有容易對位與 固定、易於製造、降低製造成本等優點。 參閱圖10、11，本發明立體光學元件之第二實施例， 與該第一實施例不同的地方在於：本實施例的間隔體44是 由光阻材料製成並呈現薄膜狀，此為一種ph〇t〇 spacer的形 式。本實施例的製造方法與該第一實施例大致相同，以下 13 201243391 僅說明不同的地方：本實施例的間隔體44是利用光微影蝕 刻方式製成，當包含有基板41、41，及抗反射薄膜42的兩 個基板單元40成型後，先在其中一個基板單元4〇的抗反 射薄膜42表面塗布一個由光阻材料製成的間隔層44，，接 著將一個具有數個鏤空孔461的光罩46遮擋在間隔層44, 上方並照光，再以蝕刻液蝕刻移除該間隔層44，受到光照的 部位，該間隔層44’未照光的部位即留在抗反射薄膜42表 面成為間隔體44，接著在間隔體44表面塗uv膠，再將另 一基板單元40膠合固定，並進行後續貼合稜鏡的作業。 參閱圖12,本發明立體光學元件之第三實施例，與該 第一實施例大致相同，不同的地方在於：本實施例的兩個 稜鏡組4都還包括一個位於其基板41、41’及稜鏡43之間 的折射率匹配層48，所述折射率匹配層48是由一折射率匹 配液（refractive index matching oil)形成，該折射率匹配液的 材料通常為矽油類的油或凝膠（Gel)，其折射率約在 1.38~1.62之間，黏度大約為5〇〇〇〜u〇〇〇〇〇cps之間。當然 ，實施時也可以使用其它材料的折射率匹配液，只要其折 射率與所述基板41、41’及稜鏡43的折射率接近即可。 本實施例的製造方法與該第一實施例大致相同，不同 的地方在於：要將本實施例的稜鏡43固定在該基板41、 41’上時，必需先將基板41、41，及稜鏡43各別利用治具夾 固，並於基板41、41，的稜鏡安裝面412塗布該折射率匹配 液，接著再將稜鏡43朝基板41、41，之塗布有油液的稜鏡 安裝面412壓合固定’所述折射率匹配液可以流動填滿於S 12 201243391 shortens process time and reduces manufacturing costs. The so-called large-area recording film is applied to the manufacturing method of the present invention, and the production of a plurality of optical elements can be completed at one time. Referring to Fig. 8'9, Fig. 8 is a top plan view in which the dashed line defines nine square areas, each of which represents the cross-sectional area of a preformed optical element of the present invention. In manufacturing, as long as a large-area large substrate 410 is selected to be coated with a large-area anti-reflection film 42, then a predetermined position (that is, a dotted line position in FIG. 8) is applied to the anti-reflection film 42' and a spacer 44 is provided. Further, the large substrate 410 having the anti-reflection film 42 on the other surface is glued to the large substrate 410 provided with the spacer 44, and finally cut along the dotted line in the figure to obtain the shape of the plurality of optical elements, and A plurality of optical components can be fabricated at a time by attaching each of the two separate substrates. In summary, the substrate 41, 41 is used instead of the conventional cymbal to provide the total internal reflection function, and the anti-reflection film 42 on the horizontal substrate 41, 41' does not require any special jig, and can be coated at a large area. Reduce the film variation of each optical component and maintain stable quality. Moreover, the two cymbals 43 are respectively fixed to the planar cymbal mounting surface 412 of the two substrates 41, 41, which is easier to align and fix than the conventional method of directly combining the two cymbals. Easy to manufacture, reduce manufacturing costs and other advantages. Referring to Figures 10 and 11, a second embodiment of the stereoscopic optical element of the present invention is different from the first embodiment in that the spacer 44 of the present embodiment is made of a photoresist material and has a film shape. Ph〇t〇spacer form. The manufacturing method of this embodiment is substantially the same as that of the first embodiment. The following 13 201243391 only describes the difference: the spacer 44 of the present embodiment is formed by photolithography, and includes the substrates 41 and 41, and After the two substrate units 40 of the anti-reflection film 42 are formed, a spacer layer 44 made of a photoresist material is first coated on the surface of the anti-reflection film 42 of one of the substrate units 4, and then one has a plurality of hollow holes 461. The reticle 46 is shielded from the spacer layer 44 and illuminated, and then etched away by the etching solution to remove the spacer layer 44, and the portion of the spacer layer 44' that is not illuminated remains on the surface of the anti-reflection film 42. The body 44 is then coated with uv glue on the surface of the spacer 44, and the other substrate unit 40 is glued and fixed, and the subsequent bonding operation is performed. Referring to FIG. 12, a third embodiment of the stereoscopic optical element of the present invention is substantially the same as the first embodiment, except that the two sets 4 of the present embodiment further include a substrate 41, 41' And an index matching layer 48 between the crucibles 43, the index matching layer 48 is formed of a refractive index matching oil, and the material of the index matching liquid is usually an oil of eucalyptus oil or condensation. Gel has a refractive index of about 1.38~1.62 and a viscosity of about 5〇〇〇~u〇〇〇〇〇cps. Of course, it is also possible to use an index matching liquid of other materials as long as the refractive index thereof is close to the refractive indices of the substrates 41, 41' and 稜鏡43. The manufacturing method of this embodiment is substantially the same as that of the first embodiment, except that when the crucible 43 of the embodiment is fixed on the substrate 41, 41', the substrate 41, 41, and the edge must be first. The mirrors 43 are each clamped by the jig, and the refractive index matching liquid is applied to the crucible mounting surface 412 of the substrates 41 and 41, and then the crucible 43 is applied to the substrates 41 and 41 with the oil. The mounting surface 412 is press-fitted. The refractive index matching liquid can be filled and filled.
S 14 201243391 基板41、41’及稜鏡43之間的空隙，並藉由折射率匹配液 本身的黏度及表面張力將基板41、41’及棱鏡43吸附固定 。另外’也可以利用橡膠襯套套在所述基板41、41，及棱鏡 43之間，用於將折射率匹配液密封在其中。 藉由在製作過程中導入折射率匹配液，可以將所述基 板41、41’及稜鏡43間的空氣排出，降低因基板41、41，及 稜鏡43間的空氣所造成光在介面上的能量損失（亦即菲涅爾 損失（Fresnel loss))。 惟以上所述者’僅為本發明之實施例而已，當不能以 此限定本發明實施之範圍’即大凡依本發明申請專利範圍 及發明說明内谷所作之簡单的等效變化與修飾，皆仍屬本 發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一種已知投影機的部分元件的示意圖； 圖2是另一種已知投影機的部分元件的示意圖； 圖3是一示意圖，顯示本發明立體光學元件之一第一 實施例與一投影設備的其它元件的相對關係； 圖4是一類似圖3的示意圖，主要顯示本發明立體光 學元件可增加設置一個場透鏡； 圖5是一類似圖3的示意圖，主要顯示本發明立體光 學元件的另一種應用方式； 圖ό是一流程方塊圖，顯示本發明立體光學元件的製 造方法之一第一實施例； 圖7是該製造方法中的各步驟的流程示意圖； 15 201243391 圖8是一俯視示意圖，顯示在一個大面積抗反射薄膜 上區隔出數個方形區域，每—個區域代表一個本發明立體 光學元件所預定成型的截面積大小； 圖9是一側視示意圖 作多組本發明立體光學元件 圖1 〇是一示意圖，顯 實施例； ’顯示利用大面積製程可同時製 ’圖中虛線顯示切割處； 不本發明立體光學元件之一第二 11 疋一 的製造方法 艾驟流程示意圖，顯示本發明立體光學元, 圖1 ,-個第二實施例的部分步驟；及 第三實二是一示意圖，主要顯示本發明立體光學元件之 16 201243391 【主要元件符號說明】 3、3 ’----投影設備 421 · ......薄膜層 31... ……反射件 43.·· ......稜鏡 32、 32’ ·數位微鏡裝置 44··· ……間隔體 33·.· ......光源 44，·· ……間隔層 34.·· ……投影鏡頭 441 · ……間隔部 4 .... ......稜鏡組 45··· ……膠體 40·.· ……基板單元 46··· ……光罩 41、 41’ ·基板 461 · ……鏤空孔 410 · ……大型基板 47… ......%透鏡 411 · ……結合面 48·.· ......折射率匹配層 412 · ……稜鏡安裝面 51〜 55 ··步驟 42、 42’ ·抗反射薄膜 A1〜 A4 ·光線 420 · ……空氣層 B1〜 B 3 .光線 17S 14 201243391 The gap between the substrates 41, 41' and the crucible 43 is adsorbed and fixed by the substrates 41, 41' and the prism 43 by the viscosity and surface tension of the index matching liquid itself. Alternatively, a rubber bushing may be interposed between the substrates 41, 41 and the prism 43 for sealing the index matching liquid therein. By introducing the refractive index matching liquid during the production process, the air between the substrates 41, 41' and the crucible 43 can be discharged, and the light caused by the air between the substrates 41, 41 and the crucible 43 can be reduced at the interface. Energy loss (ie Fresnel loss). However, the above description is only an embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the invention in accordance with the scope of the invention and the invention. All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a part of components of a known projector; FIG. 2 is a schematic view showing another part of a known projector; FIG. 3 is a schematic view showing one of the stereoscopic optical elements of the present invention. FIG. 4 is a schematic view similar to FIG. 3, mainly showing a stereoscopic optical element of the present invention in which a field lens can be additionally provided; FIG. 5 is a schematic view similar to FIG. Another application mode of the stereoscopic optical element of the present invention; FIG. 7 is a flow block diagram showing a first embodiment of the manufacturing method of the stereoscopic optical element of the present invention; FIG. 7 is a schematic flow chart of each step in the manufacturing method; 201243391 FIG. 8 is a top plan view showing a plurality of square regions on a large-area anti-reflection film, each of which represents a cross-sectional area of a stereoscopic optical component of the present invention; FIG. 9 is a side view. Schematic diagram of a plurality of sets of stereoscopic optical components of the present invention. FIG. 1 is a schematic view showing an embodiment; 'displaying a large-area process can simultaneously The dotted line in the figure shows the cut portion; the manufacturing method of the second one of the stereoscopic optical elements of the present invention is not shown in the drawings, and the partial steps of the stereoscopic optical element of the present invention, FIG. 1 and the second embodiment are shown; And the third real two is a schematic diagram mainly showing the stereo optical component of the present invention 16 201243391 [main component symbol description] 3, 3 '----projection device 421 · ... film layer 31 ... ...reflector 43.··...稜鏡32, 32' ·Digital micromirror device 44···...spacer 33·.·...light source 44,··...interval Layer 34.·· . Projection lens 441 · ... spacer 4 .... ...... 稜鏡 group 45··· ...... colloid 40·.·...... substrate unit 46··· ...... Photomask 41, 41', substrate 461, ... hollow hole 410, ... large substrate 47... ...... % lens 411 · ... bonding surface 48 ·.. ... refractive index matching layer 412 · ...... 稜鏡 mounting surface 51 to 55 · · Step 42, 42' · Anti-reflection film A1 ~ A4 · Light 420 · ... Air layer B1 ~ B 3 . Light 17