35982twf.doc/n 201223616 v 〆〆 >^ v 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種滤材洩漏檢測裝置及爐材洩漏檢 測方法，且特別是有關於一種能夠提高檢測速度及辨識率 的濾材洩漏檢測裝置及濾材洩漏檢測方法。 【先前技術】35982twf.doc/n 201223616 v 〆〆>^ v VI. Description of the Invention: [Technical Field] The present invention relates to a filter material leakage detecting device and a furnace material leak detecting method, and particularly relates to a capable A filter material leakage detecting device and a filter material leakage detecting method for improving the detection speed and the recognition rate. [Prior Art]
PiC者人類工業技術的演進，許多新型態的實驗、工廠 的製造程序，都需要越來越高的潔淨度，其他甚至是為了 居住的環境或是安全的考量，都希望能夠儘可能地減少室 内空氣中的汙染物。為了因應各種環境下的需求，許多空 氣過濾材料陸續被開發出來，藉此以提供初級微粒(mgh Efficiency Particulate Air，HEPA)之潔淨空氣，或是更高潔 淨度的超微粉塵顆粒空氣（Ultra_L〇w particul a ' ULPA)。 ， ^於㈣的優劣將會對生產或是安全造成極大的影 :’為了二升濾材的可靠度，必須對濾材是否茂漏加以檢 測。但，在習知的檢測方式中，檢測人 2數ϋ的方式錢材表面附近進行掃描的= 測人員在長時間的作業下，其峨漏的辨檢 至約6〇%左右。因此，如何開發出一種辨識产t认下降 間更短之騎茂漏檢測裝置及檢測方法d檢測時 達成的目標之一。 耳馬研發者所亟 201223616 35982twf.doc/n 此外，在美國專利號 US 6,177,678、US 7,334,490 B2、PiC people's evolution of human industrial technology, many new state experiments, factory manufacturing procedures, need more and more cleanliness, others, even for living environment or safety considerations, hope to be as much as possible Contaminants in the indoor air. In order to meet the needs of various environments, many air filtration materials have been developed to provide clean air of primary particulates (HEPA) or ultra-fine dust particles of higher purity (Ultra_L〇) w particul a 'ULPA). ^ The advantages and disadvantages of (4) will have a great impact on production or safety: 'In order to ensure the reliability of the two-liter filter material, it is necessary to check whether the filter material is leaking. However, in the conventional detection method, the detection of the number of people in the vicinity of the surface of the money material is scanned. Under the long-term operation, the detection of the leak is about 6%. Therefore, how to develop one of the goals achieved in the detection of the shorter leakage detection device and the detection method d detection. The ear horse developer's office 201223616 35982twf.doc/n In addition, in the US patent number US 6,177,678, US 7,334,490 B2
US 4,494,403、US 7,201，039 B2、US 7,21〇,363 B2、US 7,669,490 B2、US 7,649,174 B2、US 4,772,789、US 4,612,797、US 5,001，346、US 6，177,678 B1、美國專利公 開號US 2006/027301 A1以及行政院勞工委員會勞工安全 衛生研究所委託研究報告之岡亭式氣罩設計規範研究中亦 提出了多種濾材洩漏檢測裝置及方法。 【發明内容】 本發明提出一種濾材洩漏檢測裝置，其可節省針對濾 材進行檢測時所需時間，且其辨識度高。 〜 本發明提出一種遽材洩漏檢測裝置，此方法可節省針 對濾材進行檢測時所需時間且辨識度高。 本發明提出另一種濾材洩漏檢測裝置，此方法亦可節 省針對濾材進行檢測時所需時間且辨識度亦高。 本發明提出一種濾材洩漏檢測裝置，此裝置包括氣膠 供應單it、料固定單元以及職單元。轉供應單元具 ^氣膠輸出端’此⑽供應單元適於供應轉至氣膠輸^ 端:渡材峡單元將；*材於氣·丨端。測漏單元包 描模組、影賴取單元以及觸單元。掃描模組提供 掃描光線並使掃描光線在與濾材平行之平面上移動，當遽 =有破孔時，氣職破孔使掃減線在對應於破 3位置被散射。影像擷取單元齡餘之料。判斷單 凡.、衫像擷取單元連接’其巾_單元減影像並從影像 2Ο 1 223 6 1 6 35982twf；doc/n 中判斷出掃=光線被散射的位置。 …本發明提出-種濾材洩漏檢測方法 ，此方法包括提供 暴慮材的—側。利用測漏單S於滤材的另-側檢測遽 材疋^漏’而咖單元包括掃描馳、影賴取單元以 及判it單=。掃純喊供縣光線並使赖光線在與濾、 材平行之平Φ上移動，當義具有破孔時，氣膠從破孔茂 漏而使掃描光線在對應於破孔的位置被健。影像擷取單 元擷，4材之f彡像。判斷單元與影像擷取單元連接，其中 判斷單元接收影像並從影像巾騎崎描光線被散射的位 置。 /本發明提ih另-鶴材㈣檢難置，此方法包括提 ，氣膠至濾、材的—側。於濾材的另—側提供掃描光線並使 在與遽材平行之平面上移動，錢材具有破孔 時’氣膠彻^孔茂漏而使掃描光線在對應於破孔的位置被 ，射。於騎的另-側娜騎之影像。從影像中判斷出 掃描光線被散射的位置。 在本發明之一實施例中，上述之掃描模組沿著第一方 向移動’而第-方向實質上垂直於掃描光線的傳遞方向。 務機ί本發明之―實施射’上述之掃描模吨括線性位 移機構以及光源。線性位移機構沿著第一方向移動，而第 二方向實質上垂直於掃描光線的傳遞方向。辆配置於線 性位移機構上以提供掃描光線。 在本發明之—實施财，上述之掃描光料雷射光。 在本發明之-實施例巾，上述之_位於轉供應單 201223616 35982twf.doc/n 元與影像擷取單元之間。 進月之實施例中’上述之滤、材茂漏檢測裝置可 操取單元配置於位移機構 ，、象擷取早7C與濾材之間的相對位置。 亓盘2發明之—實施例巾，^述之平面位於影像擷取單 兀與濾材之間。 刹田二/上述’由於本發明所提出之紐、力漏檢測裝置是 ©光束在與濾材平行之平面上移動以檢測出破孔所 、位置，因此本發明之濾材洩漏檢測裝置可節省進行檢 測所需的時間，且JL辨:含,,..,. 八辨减度同。此外，本發明所提出之濾 >曳漏檢測方法亦可節省進行檢酬需的_且不易發生 因檢测人員體力（精神)下降而導致辨識度變低的問題。 為讓本發明之上述特徵和優點能更明顯易懂，下文特 舉實施例，並配合所附圖式作詳細說明如下。 【實施方式】 圖1為本發明一實施例之濾材洩漏檢測裝置示意圖。 凊參照圖1，本實施例之濾材洩漏檢測裝置1000可包括氣 膠供應單元100、濾材固定單元200以及測漏單元3〇〇。氣 膠供應單元100具有氣膠輸出端l〇〇a，此氣膠供應單元100 適於供應氣膠(圖1中未繪示)至氣膠輸出端l〇〇a。在本實 施例中’氣膠可為懸浮在空氣中的液膠或固膠。 本實施例之氣膠供應單元100可包括風管11()、氣流 產生單元120、第一過濾單元130、第二過濾單元132、第 201223616 35982twf.doc/n 二過滹單元134、第四過渡單元136、第一整流單元i4〇、 第二整流單元142以及微粒產生單元150。氣流產生單元 120逡過第一過濾單元13〇、第二過濾單元132、第三過濾 單元134以及第四過遽單元136提供乾淨的氣流F至風管 110中。此乾淨的氣流F經過第一整流單元140以及第二 整流單元142後呈現均勻的分佈，以和微粒產生單元15〇 所產生的微粒（圖1中未繪示)混合成均勻的氣膠(圖丨中未 蝓示）。值得一提的是，在本實施例中，第二整流單元142 的使用可避免氣流F在靠近氣體輸出端i〇〇a產生紊流而影 響檢測結果。 本實施例之濾材固定單元200將濾材210固定於氣膠 輸出端100a。舉例而言，如圖1所示，濾材固定元件2〇〇 可直接施壓於濾材210之邊框210a上，藉此方式可將濾材 210固定於氣體輸出端i〇〇a。然，本發明並不以此為限， 在其他實施例中，亦可藉由其它方式將濾材210固定於氣 膠輸出端100a。 本實施例之測漏單元300可包括掃描模組310、影像 擷取單元320以及判斷單元330。圖2為圖1之部份區域 放大示意圖。請同時參照圖1及圖2，本實施例之掃描模 組310提供掃描光線L，並使掃描光線L在與濾材210平 行之平面P上移動。當濾材210具有破孔Η時，氣膠X從 破孔Η洩漏，而使掃描光線L在對應於破孔Η的位置κ 被散射。舉例而言，濾材210是位於χ-y平面，掃描光線 L在與χ-y平面平行之平面p上移動，當濾材21〇具有破 35982twf.doc/n 201223616 而使掃描光線L在對應 孔H時，氣膠X從破孔H茂漏， 於破孔Η的位置Κ被散射。US 4, 494, 403, US 7,201, 039 B2, US 7, 21 〇, 363 B2, US 7, 669, 490 B2, US 7, 649, 174 B2, US 4, 772, 789, US 4, 612, 797, US 5, 001, 346, US 6, 177, 678 B1, US Patent Publication No. US 2006/ 027301 A1 and the research report on the design of the Okin-type hoods commissioned by the Institute of Labor Safety and Health of the Executive Yuan Labor Committee also proposed a variety of filter leakage detection devices and methods. SUMMARY OF THE INVENTION The present invention provides a filter material leakage detecting device which can save time required for detecting a filter material and has high visibility. ~ The present invention proposes a coffin leakage detecting device which can save time and high recognition for detecting the filter material. The present invention proposes another filter material leakage detecting device, which can also save time required for detecting the filter material and has high recognition. The invention provides a filter material leakage detecting device, which comprises a gas supply supply unit, a material fixing unit and a job unit. The supply unit has a gas-capacitor output terminal. This (10) supply unit is suitable for supply to the gas-gel conveyor terminal: the Ducaoxia unit will be installed; The leak detection unit encapsulates the module, the capture unit, and the touch unit. The scanning module provides scanning light and moves the scanning light in a plane parallel to the filter material. When 遽 = there is a hole, the venting hole causes the sweep line to be scattered corresponding to the broken position. The image capture unit is the remainder of the material. Judging the single. The shirt is connected to the picking unit. The towel_unit subtracts the image and judges from the image 2Ο 1 223 6 1 6 35982twf; doc/n the position where the light is scattered. The present invention proposes a filter material leak detection method which includes providing the side of the storm material. The leak detection sheet S is used to detect the material on the other side of the filter material, and the coffee unit includes the scanning unit, the image capturing unit, and the judgment unit. The sweep sweeps the light for the county and moves the light on the flat Φ parallel to the filter and the material. When the hole has a broken hole, the gas glue leaks from the hole and the scanning light is vibrated at the position corresponding to the hole. Image capture unit 撷, 4 material f 彡 image. The judging unit is connected to the image capturing unit, wherein the judging unit receives the image and rides the position where the light is scattered from the image towel. / The present invention mentions ih another - crane material (four) inspection difficult, this method includes lifting, gas glue to the side of the filter, material. Scanning light is provided on the other side of the filter material and is moved in a plane parallel to the coffin. When the money material has a broken hole, the gas is leaked and the scanning light is emitted at a position corresponding to the broken hole. The image of the other side of the ride. The position where the scanning light is scattered is judged from the image. In one embodiment of the invention, the scanning module is moved along the first direction and the first direction is substantially perpendicular to the direction of transmission of the scanning ray. The "scanning" of the present invention includes a linear displacement mechanism and a light source. The linear displacement mechanism moves in a first direction, and the second direction is substantially perpendicular to the direction of transmission of the scanning ray. The vehicle is configured on a linear displacement mechanism to provide scanning light. In the present invention, the above-described scanning material laser light is used. In the embodiment of the present invention, the above-mentioned _ is located between the transfer order 201223616 35982 twf.doc/n and the image capturing unit. In the embodiment of the invention, the above-mentioned filter and material leakage detecting device can be arranged in the displacement mechanism, and the relative position between the 7C and the filter material can be taken. Inventive disk 2 invention - the embodiment of the towel, the plane described is located between the image capturing unit and the filter material.刹田二/ The above 'Because the neon and force leak detecting device proposed by the present invention is that the light beam moves on a plane parallel to the filter material to detect the location and location of the hole, the filter leakage detecting device of the present invention can save detection The time required, and JL identification: contains,,..,. In addition, the filtering > leakage detecting method proposed by the present invention can also save the problem of performing the checking and is less prone to the problem that the recognition degree is lowered due to the decrease in the physical strength (spirit) of the detecting person. The above described features and advantages of the present invention will become more apparent from the description of the appended claims. [Embodiment] FIG. 1 is a schematic view of a filter material leakage detecting device according to an embodiment of the present invention. Referring to Fig. 1, the filter leakage detecting device 1000 of the present embodiment may include a gas supply unit 100, a filter fixing unit 200, and a leak detecting unit 3A. The gas supply unit 100 has a gas gel output end 10a, and the gas supply unit 100 is adapted to supply a gas gel (not shown in FIG. 1) to the gas gel output end 10a. In the present embodiment, the gas gel may be a liquid glue or a solid glue suspended in the air. The gas supply unit 100 of the present embodiment may include a duct 11 (), an air flow generating unit 120, a first filter unit 130, a second filter unit 132, a 201223616 35982 twf.doc/n two pass unit 134, and a fourth transition. The unit 136, the first rectifying unit i4, the second rectifying unit 142, and the particle generating unit 150. The airflow generating unit 120 bypasses the first filter unit 13A, the second filter unit 132, the third filter unit 134, and the fourth filter unit 136 to provide a clean airflow F into the duct 110. The clean airflow F is uniformly distributed after passing through the first rectifying unit 140 and the second rectifying unit 142, and is mixed with the particles (not shown in FIG. 1) generated by the particle generating unit 15 to form a uniform gas gel. Not shown in the menu). It is worth mentioning that, in the present embodiment, the use of the second rectifying unit 142 prevents the airflow F from generating turbulence near the gas output end i〇〇a and affecting the detection result. The filter medium fixing unit 200 of the present embodiment fixes the filter medium 210 to the gas gel output end 100a. For example, as shown in Fig. 1, the filter element fixing member 2 can be directly pressed against the frame 210a of the filter member 210, whereby the filter member 210 can be fixed to the gas output end i〇〇a. However, the present invention is not limited thereto. In other embodiments, the filter medium 210 may be fixed to the gas output end 100a by other means. The leak detecting unit 300 of the embodiment may include a scanning module 310, an image capturing unit 320, and a determining unit 330. Figure 2 is an enlarged schematic view of a portion of the area of Figure 1. Referring to FIG. 1 and FIG. 2 simultaneously, the scanning module 310 of the present embodiment provides the scanning light L and moves the scanning light L on the plane P parallel to the filter material 210. When the filter material 210 has a broken hole, the gas gel X leaks from the hole hole, and the scanning light L is scattered at a position κ corresponding to the hole hole. For example, the filter material 210 is located in the χ-y plane, and the scanning light L moves on a plane p parallel to the χ-y plane. When the filter material 21 has a break of 35982 twf.doc/n 201223616, the scanning light L is in the corresponding hole H. At the time, the gas gel X leaks from the hole H and is scattered at the position of the hole.
更詳細地說，本實施例之掃描模組Μ0可沿著第-方 向移動’而第-方向實質上垂直於掃描光線L的傳遞方 向。舉例而言’掃描模組310可沿著y方向移動，而y方 向實質上垂直於掃描光線L的傳遞方向(例如負χ方向）。 進-步地說，本實施例之掃描模組則可包括線性位移機 構312以及光源314。線性位移機構312沿著第一方向移 動，而第一方向實質上垂直於掃描光線^的傳遞方向，光 源314配置於線性位移機構312上以提供掃描光線L。舉 例而έ，本貫施例之線性位移機構312可架設在沿著y方 向延伸的軌道Sy上，而光源314配置於線性位移機構上 312並向負χ方向發出掃描光線L。此線性位移機構312 會順著轨道Sy在y方向上移動’而使朝負χ方向傳遞之 掃描光線L可掃過整個與濾材210所在平面(例如x_y平面) 平行之平面P。在本實施例中，線性位移機構312例如為 電動載台’光源314例如為雷射二極體，掃描光線l例如 為雷射光。 本實施例之影像擷取單元320適於擷取濾材210之影 像。在本實施例中，濾材210位於氣體供應單元1〇〇與影 像擷取單元320之間，掃描光線L所在之平面P位於濾材 21〇與影像擷取單元320之間。詳言之，本實施例之影像 擷取單元320可配合掃描光線L移動的速率來擷取濾材 21〇及掃描光線L之影像，進而判斷出濾材210上是否有 201223616 35982twf.doc/n 破孔H及破孔H所在的位置。舉例而言，若掃描光線L 在y方向的寬度(未繪示）為2.2釐米，且以每秒60釐米的 速率在與滤材所在平面(例如χ-y平面）平行之平面p上移 動時，影像擷取單元320可以每秒30幅的速率擷取濾材 210及掃描光線L之影像。換言之，當掃描光線L每移動 2釐米（小於掃描光線L寬度2.2爱米)影像擷取單元320即 擷取一張濾'材210及掃描光線l的影像。如此一來，影像 擷取單元320便可擷取到掃描光線l掃過整個與濾材210 平行之平面P的影像，進而使得本實施例之濾材洩漏檢測 裝置1000的辨識度高。值得一提的是，一般而言，滤材 210中破孔Η(缺陷）多由碰撞所引起且其直徑大於〇 4釐 米，而本實施例之濾材洩漏檢測裝置1〇〇〇可偵測直徑大於 0.4釐米的破孔Η且其辨識度可大於95%。。 本貫施例之渡材洩漏檢測裝置1〇〇〇可進一步包括位 移機構400,其中影像擷取單元320配置於此位移機構4〇〇 上以s周整影像擷取單元320與遽材210之間的相對位置。 詳言之，本實施例之位移機構4〇〇可包括一條沿著χ方向 延伸的執道Sx以及兩條相互平行且沿著ζ方向延伸的軌道 Szl以及Sz2 ’其中執道Sx架在執道Szl以及Sz2上，且 軌道Sx可藉由轨道Szl以及Sz2在z方向上移動。在本實 施例中，影像擷取單元320是架設在執道Sx上，因此影 像擷取單元320除了可藉由軌道Sx在χ方向上移動外， 亦可藉由軌道Szl以及Sz2在ζ方向上移動。這樣一來， 當濾材210的大小或架設位置改變時，影像擷取單元32〇 35982twf.doc/n 201223616 便可藉由位移機構400調整與濾材210之間的相對位置， 以使濾材210及掃描光線L之影響可完整地為影像擷取單 元320所接收。 本實施例之判斷單元330與影像擷取單元320連接， 其中判斷單元330接收影像並從影像中判斷出掃描光線L 被散射的位置K。舉例而言，本實施例之影像擷取單元 320(例如攝錄影機)可擷取掃描光線L掃過與濾材21〇平行 之平面P的所有影像，並將此影像傳送到判斷單元33〇(例 如電腦）中。此影像經判斷單元330利用影像方法處理後， 便可取出這些畫面中較亮的點（即掃描光線L被氣膠χ所 散射的的位置Κ)，進而判斷出氣膠X洩漏的位置（即濾材 210中破孔Η的位置）。值得一提的是，在本實施例中，影 像擷取單元320例如為攝錄影機，其焦距可被適當地設計 以獲得合適的工作距離(即濾材210到影像擷取單元32〇的 距離），並減少因像差問題而導致的破孔Η位置誤判的機 率。舉例而言，本實施例之影像擷取單元32〇的焦距可為 80釐米，但本發明不以此為限。 圖3為本實施例之濾材洩漏檢測方法流程示意圖。請 同時參照圖2及圖3，本實施例之濾材洩漏檢測方法可包 括下列步驟··請參考圖2,提供氣膠X至濾材210的一側 210a(步驟S100)。於濾材210的另一側210b提供掃描光綠 L並使掃描光線L在與濾材210平行之平面p上移動(步驟 S110)，當濾材210具有破孔Η時，氣膠X從破孔Ή洩漏 而使掃描光線L在對應於破孔Η的位置κ被散射。於、廣 11 201223 616 35982twf.d〇c/n 材210的另一側210b擷取濾材210之影像(步驟S120)。從 影像中判斷出掃描光線L被散射的位置κ(步驟sl30)。值 得一提，前述之步驟S10〇、S11〇之順序可以對調。詳言 之，可先進行步驟S110，再進行步驟1〇〇，當然，亦可先 進行步驟sioo，再進行步驟S110。 更砰、，，田地說，如圖2及圖4中所示，本實施例之濾利 洩漏檢測方法可包括下列步驟：提供氣膠X至濾材210 ^ 一側,210a(步驟S200)。利用測漏單元3〇〇於濾材21〇的另In more detail, the scanning module Μ0 of the present embodiment can be moved along the first direction and the first direction is substantially perpendicular to the transmission direction of the scanning ray L. For example, the scanning module 310 can be moved in the y direction, and the y direction is substantially perpendicular to the direction of transmission of the scanning ray L (e.g., the negative χ direction). Further, the scanning module of this embodiment may include a linear displacement mechanism 312 and a light source 314. The linear displacement mechanism 312 is moved in a first direction, and the first direction is substantially perpendicular to the direction of transmission of the scanning ray, and the light source 314 is disposed on the linear displacement mechanism 312 to provide the scanning ray L. For example, the linear displacement mechanism 312 of the present embodiment can be mounted on the track Sy extending in the y direction, and the light source 314 is disposed on the linear displacement mechanism 312 and emits the scanning light L in the negative direction. The linear displacement mechanism 312 moves along the track Sy in the y direction so that the scanning ray L transmitted in the negative χ direction can sweep across the entire plane P parallel to the plane of the filter material 210 (e.g., x_y plane). In the present embodiment, the linear displacement mechanism 312 is, for example, an electric stage. The light source 314 is, for example, a laser diode, and the scanning light l is, for example, laser light. The image capturing unit 320 of this embodiment is adapted to capture an image of the filter material 210. In the present embodiment, the filter material 210 is located between the gas supply unit 1A and the image capturing unit 320, and the plane P where the scanning light L is located is located between the filter material 21〇 and the image capturing unit 320. In detail, the image capturing unit 320 of the present embodiment can capture the image of the filter material 21〇 and the scanning light L according to the rate at which the scanning light L moves, and further determine whether the filter material 210 has 201223616 35982twf.doc/n. H and the location where the hole H is located. For example, if the width of the scanning light L in the y direction (not shown) is 2.2 cm and moves at a rate of 60 cm per second on a plane p parallel to the plane of the filter medium (for example, the χ-y plane) The image capturing unit 320 can capture the image of the filter material 210 and the scanning light L at a rate of 30 frames per second. In other words, when the scanning light L is moved by 2 cm (less than the scanning light L width of 2.2 meters), the image capturing unit 320 captures an image of the filtering material 210 and the scanning light l. In this way, the image capturing unit 320 can capture the image of the scanning light ray l across the entire plane P parallel to the filter material 210, thereby making the filter material leakage detecting device 1000 of the present embodiment highly recognizable. It is worth mentioning that, in general, the broken holes (defects) in the filter material 210 are mostly caused by collisions and the diameter thereof is larger than 〇4 cm, and the filter material leakage detecting device 1 of the present embodiment can detect the diameter. A hole larger than 0.4 cm and its identification can be greater than 95%. . The material leakage detecting device 1 of the present embodiment may further include a displacement mechanism 400, wherein the image capturing unit 320 is disposed on the displacement mechanism 4〇〇 to complete the image capturing unit 320 and the coffin 210 Relative position between. In detail, the displacement mechanism 4 of the present embodiment may include a road Sx extending along the χ direction and two tracks Szl and Sz2 extending parallel to each other and extending along the ζ direction. On Szl and Sz2, the track Sx can be moved in the z direction by the tracks Szl and Sz2. In this embodiment, the image capturing unit 320 is mounted on the road Sx. Therefore, the image capturing unit 320 can be moved in the χ direction by the track Sx, and can also be in the ζ direction by the tracks Sz1 and Sz2. mobile. In this way, when the size or the erection position of the filter material 210 is changed, the image capturing unit 32 〇 35982 twf.doc / n 201223616 can adjust the relative position with the filter material 210 by the displacement mechanism 400, so that the filter material 210 and the scanning The effect of the light ray L can be completely received by the image capturing unit 320. The determining unit 330 of the embodiment is connected to the image capturing unit 320, wherein the determining unit 330 receives the image and determines from the image the position K at which the scanning light L is scattered. For example, the image capturing unit 320 (for example, a video camera) of the embodiment can capture all the images of the scanning light L across the plane P parallel to the filter material 21〇, and transmit the image to the determining unit 33〇. (such as a computer). After the image is processed by the judging unit 330 by using the image method, the brighter points of the images (ie, the position where the scanning light L is scattered by the gas capsule) can be taken out, thereby determining the position where the gas gel X leaks (ie, the filter material). The location of the broken hole in 210)). It should be noted that in the embodiment, the image capturing unit 320 is, for example, a video camera, and the focal length thereof can be appropriately designed to obtain a suitable working distance (ie, the distance between the filter material 210 and the image capturing unit 32〇). ), and reduce the chance of misjudging the location of the broken hole caused by the aberration problem. For example, the focal length of the image capturing unit 32 of the embodiment may be 80 cm, but the invention is not limited thereto. FIG. 3 is a schematic flow chart of the filter material leakage detecting method according to the embodiment. Referring to Fig. 2 and Fig. 3 together, the filter material leakage detecting method of the present embodiment may include the following steps. Referring to Fig. 2, the side of the gas material X to the filter material 210 is provided 210a (step S100). The scanning light green L is provided on the other side 210b of the filter material 210 and the scanning light L is moved on a plane p parallel to the filter material 210 (step S110). When the filter material 210 has a broken hole, the gas gel X leaks from the broken hole. The scanning light L is scattered at a position κ corresponding to the broken hole. The other side 210b of Yu, Guang 11 201223 616 35982 twf.d〇c/n material 210 captures an image of the filter material 210 (step S120). The position κ at which the scanning light L is scattered is judged from the image (step sl30). It is worth mentioning that the order of the aforementioned steps S10〇, S11〇 can be reversed. In detail, step S110 may be performed first, and then step 1 is performed. Of course, step sioo may be performed first, and then step S110 is performed. More specifically, it is said that, as shown in Figs. 2 and 4, the filter leakage detecting method of the present embodiment may include the steps of providing the gas gel X to the filter 210 side, 210a (step S200). Using the leak detecting unit 3 to smash the filter material 21〇
一側'21〇b檢測濾材210是否洩漏(步驟S210)，而測漏單天 300可包括掃描模組31〇、影像擷取單元32〇以及判斷單亓 330。掃描模組31〇提供掃描光線l並使掃描光線[在輿 ，材210平行之平面P上移動，當濾材210具有破孔Η時， 氣體X從破孔Η漏而使掃描光線L在對應於破孔Η的 ，置二被散射。影像搁取單元320榻取濾、材21〇之影像。 j斷單凡330與影像擷取單元32〇連接，其中判斷單元33( 接收影像並郷像巾輯ώ掃描錢L被散㈣位置。透 =述之紐我漏檢測方法，可節省針對濾材21Q進行賴 =所需時間’且其辨識度高。此外，亦不易發生因檢淚 人員，力（精神)下降而導致辨識度變低的問題。 上所述，由於本發明所提出之濾材洩漏檢測裝置是 才沾描光束在與渡材平行之平面·移動以檢測出破孔戶/ί 測所ΐ置’因此本發明之·茂漏檢測裝置可節省進行杨 /、J所需的時間，且装^古 具辨識度同。此外，本發明所提出之_ 茂漏檢測方法亦可節省進行檢測所需的時間且不易發社 12 35982twf.d〇c/n 201223616 因檢測人員體力（精神)下降而導致辨識度變低的問題。 雖然本發明已以實施方式揭露如上，然其並非用以限 定本發明’任何所屬技術領域中具有通常知識者，在不脫 離本發明之精神和範圍内，當可作些許之更動與潤飾，故 本發明之保護範圍當視後附之申請專利範圍所界定者為 準。 I 【圖式簡單說明】 圖1為本發明一實施例之濾材洩漏檢測裝置示意圖。 圖2為本發明一實施例之部分濾材洩漏檢測裝置示意 圖。 圖3、圖4為本發明一實施例之濾'材汽漏檢測方法流 程示意圖。 【主要元件符號說明】 1000 :濾材洩漏檢測裝置 # 1〇〇:氣膠供應單元 100a :氣膠輸出端 110 :風管 ll〇a :上半段部分 110b :下半段部分 120 :氣流產生單元12〇 130、132、134、136 :過濾單元 140、142 :整流單元 13 201223616 35982twf.doc/n 150 :微粒產生單元 200 :濾材固定單元 210 :濾材 21〇a :濾材之邊框 300 :測漏單元 310 :掃描模組 312 :線性位移機構 314 :光源 320 :影像擷取單元 330 :判斷單元 400 :位移機構 ,F :氣流 ,L :掃描光線 P :平面 Η :破孔 X :氣膠 Κ :位置One side '21〇b detects whether the filter material 210 leaks (step S210), and the leak detection single day 300 may include a scanning module 31〇, an image capturing unit 32〇, and a determination unit 330. The scanning module 31 provides the scanning light l and causes the scanning light to move [on the plane P parallel to the material 210. When the filter material 210 has a broken hole, the gas X leaks from the broken hole and the scanning light L corresponds to If the hole is broken, the second is scattered. The image taking unit 320 takes the image of the filter and the material 21〇. j is disconnected from the image capturing unit 32〇, wherein the judging unit 33 (receives the image and scans the image of the towel and scans the money L is scattered (four) position. Through the description of the new leak detection method, can save the filter 21Q The problem is that the required time is high and the degree of recognition is high. In addition, the problem of low visibility due to a decrease in force (spirit) is also less likely to occur. As described above, the filter material leakage detection proposed by the present invention The device only scans the light beam in a plane parallel to the cross material and moves to detect the broken hole/measurement device. Therefore, the leak detection device of the present invention can save the time required for performing the Yang/J, and In addition, the leak detection method proposed by the present invention can also save the time required for detection and is not easy to be sent. 12 35982twf.d〇c/n 201223616 Due to the physical strength (mental) decline of the test personnel The problem of the degree of recognition is low. Although the invention has been disclosed in the above embodiments, it is not intended to limit the invention to those skilled in the art, without departing from the spirit and scope of the invention. Can do some The scope of protection of the present invention is defined by the scope of the appended claims. I [Simplified Schematic] FIG. 1 is a schematic diagram of a filter material leakage detecting device according to an embodiment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 3 and FIG. 4 are schematic diagrams showing a flow chart of a method for detecting a steam leak of a filter material according to an embodiment of the present invention. [Description of Main Component Symbols] 1000: Filter Material Leakage Detection Device # 1 〇〇: gas supply unit 100a: gas gel output end 110: air duct ll〇a: upper half section 110b: lower half section 120: airflow generating unit 12〇130, 132, 134, 136: filtering unit 140, 142: rectification unit 13 201223616 35982twf.doc/n 150: particle generation unit 200: filter material fixing unit 210: filter material 21〇a: filter material frame 300: leak detection unit 310: scan module 312: linear displacement mechanism 314: light source 320 : image capturing unit 330 : judging unit 400 : displacement mechanism, F : air flow, L : scanning light P : plane Η : broken hole X : gas plastic Κ : position
Sy、Szl、Sz2、Sx :軌道 S100、S110、S120、S130、S200、S210 :步驟 x、y、z :方向Sy, Szl, Sz2, Sx: tracks S100, S110, S120, S130, S200, S210: steps x, y, z: direction