201221901 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種表面形狀之評價方法及表面形狀之評 價裝置。 【先前技術】 作為對物體之表面形狀進行檢查之方法，存在如下之方 法：將具有週期性之明暗之條紋圖案（例如，長條狀之黑 圖案部以固定間隔排列之圖案）照射至被檢查物體，基於 在被檢查物體之表面上反射而形成之反射像之明暗週期的 偏移，對被檢查物體之表面形狀進行評價（例如，參照專 利文獻1)。然而，若將此種方法應用於如板玻璃之透明板 狀體中’則不僅拍攝由透明板狀體之表面產生之反射像， 而且亦同時拍攝由透明板狀體之背面產生之反射像。以 下’將由透明板狀體等被檢查物體之表面產生之反射像稱 為表面反射像，將由透明板狀體等被檢查物體之背面產生 之反射像稱為背面反射像。 圖3 4係表示表面反射像與背面反射像同時形成之狀況之 說明圖。如圖34所示，自條紋圖案上之點5發出之光於被 评價物體3之表面3a上反射，經由光程8並經過透鏡中心3〇 而成像於相機之受光面7上之拍攝點1〇。又，透過被評價 物體3之光於被評價物體3之背面讣上反射，從而經由光程 9並經過透鏡中心30而成像於受光面7上之拍攝點丨i。 此處，存在如下之情形：藉由條紋圖案之週期或寬度， 對所拍攝之圖像信號產生以下所示之問題。圖35係模式性 157408.doc 201221901 地表示相機輸出之圖像信號例之波形圖。圖35(a)係表示 表面反射像之圖像信號，圖35(B)係表示背面反射像之圖 像信號。X ’較低之位準係表示基於條紋圖案中之暗部之 圖像信號之位準’較高之位準係表示基於條紋圖案中之明 部之圖像信號之位準。若條紋圖案巾之暗部之寬度較寬， 則存在如下之情形：圓像信號中之較低之位準之部分的寬 度亦變大’從而表面反射像之圖像信號中之較低之位準與 背面反射像之圖像信號中之較低之位準重疊。於是，自相 機輸出之圖像信號成為如圖35(c)所示之信號，從而可基 於與原本必需之表面反射像之圖像信號（參照圖35(八乃不同 之“號進行表面形狀之檢查。 又，如圖36所示，即便條紋圖案中之暗部之寬度充分 窄，於表面反射像之圖像信號中之暗部之位置、與背面反 射像之圖像信號中之暗部之位置之差了近似於條紋圖案之 明暗之週期之整數倍時，亦自相機輸出如圖36(c)所示之 圖像信號。再者，圖36(A)係表示表面反射像之圖像信 號，圖36(B)係表示背面反射像之圖像信號。於該情形 時亦存在如下之問題：基於與表面反射像之圖像信號不 同之信號進行表面形狀之檢查，從而無法進行準確之表面 形狀之評價。 提出有減小背面反射像之影響而不使表面形狀之評價之 精度下降之表面形狀之評價方法（例如’參照專利文獻2)。 圖37係表示用以對專利文獻2所記載之板玻璃等被評價物 體之表面平坦度進行評價的評價裝置之概要之模式圖。 157408.doc 201221901 如圖37所示，評價裝置以如下之方式構成：藉由作為拍 攝機構之CCD(Charge Coupled Device，電荷耦合器件）相 機2,而拍攝映射於搭載在載置台（未圖示）上之作為檢查對 象之板玻璃等被評價物體3之表面3a上的條紋圖案丨。條紋 圖案1 6又置於光源（未圖示）之發光面。圖3 8係表示條紋圖案 1之一例之說明圖。於圖38中，Li表示暗部之寬度，^表 示明部之寬度^ LfL2相當於明暗之週期。於在透明樹脂 膜上著色黑色部分而實現條紋圖案1之情形時，明部相當 於透明部分’暗部相當於黑色部分。 於專利文獻2所記載之表面形狀之評價方法中，作為第1 步驟，執行決定適於被評價物體3之條紋圖案1之條紋圖案 決定步驟，接著，於第2步驟中執行表面形狀檢查步驟， 該表面形狀檢查步驟係使用第1步驟中所決定之條紋圖案 1，基於由條紋圖案1之被評價物體3產生之反射像而藉由 圖像解析對被評價物體3之表面形狀進行評價。再者，於 第2步驟中’僅使用第1步驟中所決定之由條紋圖案1之被 β平4貝物體3之表面3a及背面3b產生之反射像中之由被評價 物體3之表面3a產生之反射像。 圖39係表示專利文獻2所記載之決定條紋圖案之處理之 一例的流程圖。於該處理中，首先預備針對每1張印刷有 不同之圖案之複數個條紋圖案（步驟S3丨）。即，準備條紋 之週期或明部及暗部之寬度不同之複數個條紋圖案。條紋 圖案係例如藉由利用噴墨印刷對透明樹脂膜印刷圖案而形 成。接著，將1個條紋圖案貼附於光源（步驟S32) ^而且， 157408.doc 201221901 藉由CCD相機2拍攝由被評價物體3產生之條紋圖案之反射 像（步驟S33)。 接著，執行圖像解析處理（步驟S34)，該圖像解析處理 係運算裝置（例如，電腦）4輸入藉由CCD相機2所拍攝之圖 像之圖像信號，並根據圖像解析處理程式對圖像信號進行 解析。於圖像解析處理中，判斷CCD相機2之輸出信號即 自CCD相機2所輸入之圖像信號是否處於如圖40(C)所示之 狀態。具體而言’判斷與表面反射像及背面反射像之2個 暗部對應之圖案之位置是否處於不重疊之狀態。於圖像信 號不表示此種狀態之情形（NG之情形）時，將另一條紋圖案 貼附於光源，再次執行步驟S32、S33之處理。 若運算裝置4確認出於圖像信號中與表面反射像與背面 反射像之2個暗部對應之圖案之位置處於不重疊之狀熊， 則此時將貼附於光源之條紋圖案決定作於被評價物體3之 表面形狀之評價中使用之條紋圖案丨（步驟S37)。由以上方 式，作為適於被評價物體3之表面形狀之評價之條紋圖案 1 ’係決定於藉由CCD相機2所獲得之圖像信號中以分離^ 方式所設定之具有明暗之圖案的條紋圖案1q 圖40(C)係表示使用第！步驟中所決定之條紋圖案^之 形時之CCD相機2的輸出信號例之波形圖。 丹考，圖4〇( 係表示表面反射像之圖像信號，圖4〇(B)係表示背 像之圖像信號。 面 於專利文獻2所記載之 度（相當於信號寬度Wt、 ......八吗系之暗部 W2)與明暗之週期(相當於 157408.doc 201221901 Τ!、TO最佳化’藉此於CCD相機2輸出之圖像信號中，表 面反射像中之暗部與背面反射像中之暗部以不重合之方式 得以調整（參照圖40(C))。因此’於利用運算裝置4之圖像 解析時’可容易地僅抽選表面反射像之圖像信號，從而可 實施精密之表面形狀評價。即’可由廉價之裝置構成去除 背面反射像之影響，而高精度地對表面形狀進行評價。 [先行技術文獻] [專利文獻] [專利文獻1]日本專利特開平11-148813號（段落0082-0083、 圖24) [專利文獻2]日本專利特開2005-345383號公報（段落〇〇2〇_ 0024、圖 3) 【發明内容】 [發明所欲解決之問題] 然而’於專利文獻2所§己載之表面形狀之評價方法中， 為決定如可使基於表面反射像之暗部與基於背面反射像之 暗部適當地背離之條紋圖案’只要無法一次性地決定，則 必須進行複數次將條紋圖案貼附於光源之作業，從而於實 際上實施表面形狀檢查之前之準備作業上費時費力。又， 若參照圖40(C)所示之例’則鄰接之2個低位準之部分中之 位準更低者與基於表面反射像之暗部對應，但於背面反射 之光束較多之情形時’ 2個低位準之位準差變小而難以僅 抽選表面反射像之圖像信號’結果存在表面形狀之評價之 精度下降之可能性》又，於被評價物體之板厚為〇 5 mma 157408.doc -7- 201221901 下之較薄之情形時，存在條紋圖案中之鄰接之條紋重疊而 被觀察到之可能性。產生如下問題：基於與表面反射像之 圖像信號不同之信號進行表面形狀之檢查，從而無法進行 準確之表面形狀之評價。 因此，本發明之目的在於提供一種準備作業不費時費力 而可減小由與被評價物體之第丨表面對向之第2表面產生之 反射像的影響、且可高精度地對被評價物體之表面形狀進 行評價的表面形狀之評價方法及表面形狀之評價裝置。 [解決問題之技術手段] 本發明之表面形狀之評價方法係將具有週期性之明暗之 圖案照射至被評價物體之第1表面上， 接党於上述第1表面上反射之圖案而獲得受光圖像， 為檢測受光圖像之明暗週期相對於照射於上述第1表面 上之圖案之明暗週期之偏移，將受光圖像之與照射於上述 第1表面上之圖案之明暗週期對應的區域之明暗之信號平 均化， 並基於經平均化之信號對上述第丨表面之表面形狀進行 評價者， 且於與上述第1表面對向之第2表面上，配置抑制到達該 第2表面上之光之反射之反射抑制層。 於本發明之表面形狀之評價方法令，較佳為基於經平均 化之信號，對受光圖像之明暗週期自照射於上述第丨表面 上之圖案之明暗週期之偏移部分進行偵測，以及對自照射 於上述第1表面上之圖案之明暗週期之偏移量進行測定， 157408.doc 201221901 面 並基於測定結果對上述被評價物體之上述第丨表面之表 形狀進行評價。 評價 於本發明之表面形狀之評價方法中，較佳為根據經平均 化之信號中之振幅較大之部分與其附近之振幅較小之部分 之差，對上述被評價物體之上述第丨表面之表面形狀進^ 於本發明之表面形狀之評價方法巾，較佳為❹經上述 平均化之信號之增減之絕對值或平方值作為上述偏移量。 本發明之其他態樣之表面形狀之評價方法係經由相機觀 測形成由被評價物體之第1表面之複數個地點產生之各觀 測反射像者，即可特定位置且移動速度為已知之運動之亮 點或物點的基準體之上述各觀測反射像， 獲得各觀測反射像相對於上述第丨表面為理想平面之情 形時之各理想反射像之偏移量， 使用上述各偏移量、上述基準體之位置資訊及上述相機 之透鏡中心位置資訊而求出上述第i表面之波紋形狀之傾 斜度， 將上述第1表面大致為平坦之情形作為約束條件’對上 述第1表面之波紋形狀之傾斜度進行積分，並對上述第1表 面之波紋形狀進行評價者， 且於與上述第1表面對向之第2表面上，配置抑制到達該 第2表面上之光之反射之反射抑制層。 本發明之另一態樣之表面形狀之評價方法係經由相機觀 測形成由被評價物體之第丨表面之複數個地點產生之各觀 157408.doc 201221901 測反射像者，即可特定位置且具有週期性之明暗之圖案的 基準體之上述各觀測反射像， 獲得各觀測反射像相對於上述第1表面為理想平面之情 形時之各理想反射像之偏移量， 使用上述各偏移量、上述基準體之位置資訊及上述相機 之透鏡中心位置資訊而求出上述第丨表面之波紋形狀之傾 斜度， 將上述第1表面大致為平坦之情形作為約束條件，對上 述第1表面之波紋形狀之傾斜度進行積分，並對上述第1表 面之波紋形狀進行評價者， 且於與上述第1表面對向之第2表面上，配置抑制到達該 第2表面上之光之反射之反射抑制層。 於本發明之表面形狀之評價方法中，較佳為上述反射抑 制層為液體、黏性體、或膜。 於本發明之表面形狀之評價方法中，較佳為上述液體為 水。 本發明之表面形狀之評價裝置包括：光源，其將具有週 期性之明暗之圖案照射至被評價物體之第1表面上； 受光機構，其接受於上述第丨表面上反射之圖案而獲得 受光圖像；及 評價機構，其基於由上述受光機構產生之受光圖像之明 暗週期相對於自上述光源照射之圖案之明暗週期之偏移， 對上述第1表面之表面形狀進行評價； 上述評價機構包括：平均化機構，其將受光圖像之與照 157408.doc •10- 201221901 射於上述第1表面上之圖案之明暗週期對應的區域之明暗 之信號平均化；及 處理機構’其基於上述平均化機構輸出之經平均化之信 號’輸出用以特定上述第1表面上之表面形狀之變形部位 與變形量之信號； 且於與上述第1表面對向之第2表面上，配置有抑制到達 該第2表面上之光之反射之反射抑制層。 本發明之其他態樣之表面形狀之評價裝置包括：基準 體’其係形成由被評價物體之第1表面之複數個地點產生 之各觀測反射像者，即可特定位置且移動速度為已知之運 動之亮點或物點； 相機’其獲得由上述基準體之上述第1表面產生之各觀 測反射像；及 運算機構，其算出上述相機所獲得之各觀測反射像相對 於上述第1表面為理想平面之情形時之各理想反射像之偏 移量，使用上述各偏移量、上述基準體之位置資訊及上述 相機之透鏡中心位置資訊而求出上述第1表面之波紋形狀 之傾斜度，將上述第1表面大致為平坦之情形作為約束條 件’對上述第1表面之波紋形狀之傾斜度進行積分，並求 出上述第1表面之波紋形狀； 且於與上述第1表面對向之第2表面上，配置有抑制到達 該第2表面上之光之反射之反射抑制層。 本發明之另一態樣之表面形狀之評價裝置包括：基準 體，其係形成由被評價物體之第1表面之複數個地點產生 157408.doc -11 - 201221901 之各觀測反射像’即可特定位置且具有週期性之明暗之圖 案； 相機，其獲得由上述基準體之第#面產生之各觀測反 射像；及 運算機構，其算出上述相機所獲得之各觀測反射像相對 於上述第1表面為理想平面之情形時之各理想反射像之偏 移量，使用上述各偏移量、上述基準體之位置資訊及上述 相機之透鏡中心位置資訊求出上述第丨表面之波紋形狀之 傾斜度，將上述第1表面大致為平坦之情形作為約束條 件，對上述第1表面之波紋形狀之傾斜度進行積分，並求 出上述第1表面之波紋形狀； 且於與上述第1表面對向之第2表面上，配置有抑制到達 該第2表面上之光之反射之反射抑制層。 於本發明之表面形狀之評價裝置中’較佳為上述反射抑 制層為液體、黏性體、或膜。 於本發明之表面形狀之評價裝置中，較佳為上述液體為 水。 [發明之效果] 於本發明中，配置有抑制到達與被評價物體之第丨表面 對向之第2表面上之光之反射之反射抑制層，因此可減小 由與第1表面對向之第2表面產生之反射像之影響而高精户 地對被評價物體之表面形狀進行評價。 【實施方式】 以下，參照圖式對本發明之實施形態進行說明。 157408.doc •12· 201221901 圖1 (A)及（B)係表示入射至被評價物體3之光與於被評價 物體3之表面3a及背面3b上反射之光的關係之說明圖。此 處’作為被評價物體3，例舉折射率（絕對折射率：以下之 折射率亦相同）為1.5之板玻璃。於圖1 (A)中，表示折射率 大致為1.0之存在於空氣中之被評價物體3之例。入射至被 評價物體3之光束於被評價物體3之表面3a上反射而作為光 A反射，但一部分行進至被評價物體3之内部，而較多之光 束於被評價物體3之背面3b反射。而且，較多之光束作為 光B自被評價物體3之表面3a射出。 然而’如圖1(B)所示’於在被評價物體3之背面3b上， 配置有折射率大致為1.5之反射抑制層20之情形時，較多 行進於被評價物體3之内部之光束不會於被評價物體3之背 面3b反射，而自被評價物體3之背面3b入射至反射抑制層 20。因此，光B之量較少。換言之’被評價物體3之背面3b 上之反射光幾乎不會自被評價物體3之表面3a射出。 再者，於圖1(A)及（B)中，表示較厚之被評價物體3，但 若將光A設為來自條紋圖案之光’則於被評價物體3為板厚 為0.5 mm以下之較薄之板玻璃之情形時，在圖i(A)所示之 例中’存在條紋圖案中之鄰接之條紋重疊而被觀察到之可 能性。即，存在如下之可能性：於被評價物體3之表面3a 上反射之光之條紋圖案、與於背面3b上反射之光之條故圖 案重疊而被觀察到。然而，於圖1(B)所示之例申，被評價 物體3之背面3b上之反射光幾乎不會自被評價物體3之表面 3a射出，因此鄰接之條紋重疊而不會被觀察到 '或被評價 157408.doc -13- 201221901 物體3之背面3b上之反射光之影響即背面反射像之影響（重 疊之程度）減小。 於本發明中，利用圖1 (B)所例示之關係，減小背面反射 像之影響’藉此可高精度地對表面形狀進行評價。 圖2(A)〜(C)係模式性地表示對在本發明之被評價物體3 上反射之條紋圖案進行拍攝之相機輸出的圖像信號例之波 形圖。圖2(A)係表示表面反射像之圖像信號，圖2(B)係表 示背面反射像之圖像信號。又，低位準係表示基於條紋圖 案中之暗部t圖像信號之位$，高位準係表示基於條紋圖 案中之明部之圖像信號之位準。 又，圖2(C)係表示表面反射像與背面反射像重疊之圖像 信號。於本發明中，如圖2(B)所示，背面反射像之高位準 與低位準之差變小，因此圖2(〇所示之波形變得近似於圖 2⑷所示之波形。再者’於圖”所示之先前例中，圖 35(C)所示之波形與圖35(八）所示之波形之差異較大。 即’於本發明中’即便直接使用相機輸出之圖像信號而 進行被評價物體3之表面形狀之評價處理，亦係實施背面 反射：之影響已被排除之評價…無須進行用以決定如 於先則例中所說明之適當之條紋圖案之處理。 圖3⑷係將用以對作為被評價物體之—例之板玻璃等被 評價物體之表面的平坦度進行評價之評價裝置與被評價物 體一併表示之模式圖。如圖3⑷所示，評價裝置係以如下 之方式構成：#由作為拍攝機構之咖相機2，而拍攝映 射於作為評價對象之板玻璃等被評價物體3之表面3a上的 157408.doc 201221901 條紋圖案1。條紋圖案丨設置於光源（未圖示）之發光面。 又’於被評價物體3之背面3,上，折射率近似於被評價物 體3之折射率之反射抑制層2〇以與背面扑相接之方式而配 置。 反射抑制層20除了可使用例如以水（折射率為丨33)、苯 甲醚（折射率為1.52)、乙醇（折射率為136)為首之液體外， 還可使用折射率為1.4〜i.5之植物性或礦物性之潤滑油等黏 性體。又，作為反射抑制層2〇，亦可使用聚乙烯系或聚胺 基曱酸酯系等折射率為1.5〜1.6之合成樹脂等其他材質者。 可由單獨之材料形成反射抑制層2〇，亦可組合複數個材料 形成反射抑制層20。組合材料並無特別限定。例如，即便 單獨為折射率相對於被評價物體之折射率大幅不同之材 料，亦可組合複數個材料而設為與被評價物體之折射率相 同之折射率。 藉由CCD相機2所拍攝之圖像取入至個人電腦等運算裝 置4中，從而藉由運算裝置4進行圖像解析。 再者，此處例示CCD相機2，但亦可使用面陣相機、線 陣相機、視訊相機、靜態相機等任一方式之相機來代替 CCD相機2。又，只要為排列有光感測器者等可特定反射 像者，則亦可使用任一受光裝置。 以CCD相機2之光轴、與條紋圖案1(具體而言，存在條 紋圖案1之平面）之法線自被評價物體3之表面3a之法線方 向呈相同之角度0丨之方式，設置CCD相機2與條紋圖案i。 角度較佳為〇°<θ1$45。，尤佳為 157408.doc •15· 201221901 圖3(B)係表示圖3(A)所示之評價裝置之立體圖。如圖 3(B)所示，於評價裝置中，光係自發光面設置有條紋圖案 1之光源100照射至被評價物體3。 再者，於圖3中，表示以與被評價物體3之背面3b之整體 相接之方式設置有反射抑制層20之構成，但反射抑制層2〇 只要設置於至少照射有來自光源1 〇〇之由條紋圖案1產生之 光之部位的背面3b上即可。 (實施形態1) 首先，對本實施形態中使用之表面形狀之評價方法之前 提進行說明。圖4係用以說明表面形狀之評價方法之說明 圖。 來自光源100之由條紋圖案1產生之光照射至被評價物體 3，藉由CCD相機2之拍攝元件接受來自被評價物體3之表 面3a上之反射光。再者，於本說明書中，「來自光源1〇〇 之由條紋圖案1產生之光」係表示已通過條紋圖案1之光， 以下將照射有已通過條紋圖案丨之光之情形表達為「照射 有條紋圖案1」。 又’於本實施形態中，來自被評價物體3之背面3b之反 射光幾乎不會入射至CCD相機2。 運算裝置4係基於根據受光之電信號（圖像信號）而對表 面形狀進行評價。若被評價物體3之表面完全平坦，則根 據圖像信號獲得之明暗之對比度之狀態與為已知之條紋圖 案1之對比度之狀態一致。於圖4(A)中，表示CCD相機2之 受光圖案（圖像）、CCD相機2之拍攝元件之像素排列及表示 157408.doc -16· 201221901 來自拍攝元件之明暗之圖像信號之一例。於被評價物體3 中無表面變形之情形時，如圖像信號之最初之3個檢測區 域所例示般未出現對比度變化（參照圖4(A))。 然而’於由來自被評價物體3之表面變形部分之反射光 產生之圖像信號中，產生對比度變化。即，由來自被評價 物體3之表面變形部分之受光產生之式樣與來自非變形部 分之式樣相比，放大或縮小。例如，於放大之情形時，對 比度變大’但存在式樣自檢測區域露出之情形。 藉此，如圖4(B)所示，原本之最大值部分12〇&與最小值 部分120b無法進入同一檢測區域中，從而檢測區域中之對 比度變小。對比度係使用各檢測區域中之圖像信號之最大 值a及最小值b，而定義為（a_b)/(a+b)。又，於縮小之情形 時，無法藉由拍攝元件完全解像，從而如圖4(c)所示般對 比度變小。因此，藉由將圖像信號之白部分與黑部分之 差、與基準值進行比較，而可評價於被評價物體3上是否 有表面變形。 再者於無圖案之放大或縮小之情形時，亦存在圖像信 號中之明部分之值下降’或暗部分之值上升之情形。於該 情形時，#由將特定之大小之檢測區域中之明部分與暗部 刀之差與基準值進行比較，亦可評價於被評價物體上是 否有表面變形。於圖4⑷中，網格部分係亮度下降之白部 刀且於包含此部分之檢測區域中，檢測區域内之對比度 變小0 然而’即便發生例如使圖案產生放大之表面應變，若放 157408.doc •17- 201221901 大之態樣與檢測區域之關係不同，則檢測區域内之對比度 亦不同。作為一例，圖4(D)所示之圖案與圖4(E)所示之圖 案以相同之方式放大，但由於向檢測區域之進入方法不 同’因此於檢測區域内之對比度中存在差。原本，於圖像 信號成為如圖4(D)所示之情形與成為如圖4(E)所示之情形 時，應獲得相同之評價結果，但若欲僅基於檢測區域内之 對比度之相異而對表面形狀進行評價’則存在成為不同之 結果之可能性。即，就欲僅基於檢測區域内之對比度之相 異而進行表面形狀之評價而言，存在極限。 於本實施形態中，可如以下說明般基於檢測區域内之對 比度之相異，以高精度對表面形狀進行評價，結果可擴大 應變之可檢測範圍。 圖5係表示條紋圖案丨之一例之說明圖。於圖$中，係 表不暗部之寬度，L2係表示明部之寬度。Li+L2相當於明 暗之週期（Ι/f)。週期之倒數為圖案之空間頻率卜以下， 將空間頻率f稱為基本頻率，將其倒數稱為基本週期。再 者於在透明樹脂膜上著色黑色部分而實現條紋圖案j之 隋形時，明部相當於透明部分’暗部相當於黑色部分。作 為例’週期（Ι/f)為1.0 mm左右，暗部之寬度L丨為1〇〇叫 左右》 圖6係表7F藉由運算裝置4而實現之功能區塊之例的方塊 輪於圖3所不之運算裝置4中，輸入電路41自CCD相機2 儲表不明暗之受光圖案之圖像信號，並將該圖像信號存 •於記憶體42。陰影校正電路43對記憶㈣内之圖像信號 1574〇8.^0c -18- 201221901 進行陰影校正，去除光源100之光量分佈對CCD相機2之拍 攝所造成之影響。平均化電路44對陰影校正後之各檢測區 域内之各像素之明暗進行平均化濾光處理，從而向最大值 抽選電路45及最小值抽選電路46輸出經平均化之值。 用以平均化之檢測區域相當於圖案之基本頻率之倒數 (基本週期）。因此，平均化電路44由以各基本週期為單位 將圖像信號平均化之積分型之濾光器等構成。最大值抽選 電路45輸出平均化電路44之輸出之最大值’最小值抽選電 路46輸出平均化電路44之輸出之最小值。而且，差運算電 路47輸出最大值抽選電路45之輸出值與最小值抽選電路46 之輸出值之差、及表示檢測區域之位置之信號。該等最大 值及最小值對相當於假設在被評價物體3上之波紋之週期 之區域進行抽選。例如’該區域之寬度為基本週期之2〜1〇 倍。 其次’參照圖7之說明圖、圖8之流程圖、及圖9之說明 圖對表面形狀之評價裝置之動作進行說明。 圖7係表示與條紋圖案1對應之CCD相機2之拍攝面之狀 況的說明圖。然而’於圖7中，僅表示CCD相機2之拍攝面 之像素中之E0〜E4列的像素。又，於本實施形態中，以條 紋圖案1之基本週期與CCD相機2之5像素對應之方式設定 有光學系統。因此，此處用以平均化之檢測區域由5像素 構成。 圖8係表示評價裝置之動作之流程圖。利用CCD相機2之 拍攝（具體而言為圖像信號）於運算裝置4中，係經由輸入電 157408.doc •19· 201221901 路41輸入至記憶體42。陰影校正電路43求出對在該時間點 作為對象之檢測區域之前後數個區域（包含作為對象之檢 測區域）之各像素的圖像信號之平均值（步驟su)。例如， 於將圖7所示之E1行之c區域作為檢測區域之情形時，求出 E1行之b、c、d區域之各像素之平均值。藉由該處理，獲 得與該檢測區域周邊之背景之光量分佈圖像（陰影圖像）對 應者。當然，可進一步擴張獲取平均值之對象區域，亦可 將E1行之前後之行之區域包含於獲取平均值的對象區域 内。 陰影校正電路43進一步以所獲得之平均值對各像素之圖 像信號進行除法運算（步驟S11)。其結果， 之面上之位置而於發光量中存在差異，發光量之差先異^白0 攝所造成之影響亦得以減小。 再者，陰影校正之方法並不限定於上述方法。例如，亦 可使用如下之方法。 ⑴於上述方法中，使用各區域内之各像素之圖像信號 中之中間值來代替獲取各區域内之各像素之平均。 (2) 於上述方法中，根據各圖像信號對平均值進行減法 運算來代替以所獲得之平均值除以各圖像信號。 (3) 藉由無須每次對各檢測區域求出用以陰影校正之平 均值’而直接接受來自光源100之光等方法，肖先求出陰 影圖像。而且，於對各檢測區域進行陰影校正時，使用2 求出之陰影圖像之圖像信冑而進行除法運算處理或減法運 算處理。 I57408.doc •20- 201221901 圖9(A)〜9(C)係表示對受光圖案之明暗進行表示之圖像 仏號及經平均化之信號的一例之波形圖。於圖9(A)〜9(c) 之左側，表示對受光圖案之明暗進行表示之圖像信號之一 例。於本實施形態中，設置有陰影校正電路43，因此，具 體而言，表示陰影校正電路43之輸出信號。於被評價物體 3為平坦之情形時，對受光圖案發生放大或縮小，因此， 如圖9(A)所示，受光圖案之週期與基本週期一致。 若於被評價'物體3之表面上有凹凸，則藉由折射作用而 於由CCD相機2產生之受光圖案中出現圖案之放大或縮 小例如，來自表面為凸之部分之透過光係發生圖案之放 大，來自為凹之部分之透過光係發生圖案之縮小。其結 果’如圖9(B)及9(C)之左側所示，受光圖案之週期自基本 週期偏移。藉此，若可檢測出受光圖案之圖案週期自基本 週期偏移，則可檢測出於被評價物體3之表面上有凹凸。 因此，平均化電路44為檢測受光圖案之週期自基本週期 之偏移’進行如將檢測區域中之經陰影校正之各像素之明 暗平均化的遽光處理（步驟S12)。於本實施形態令，由盘 條紋圖案！之基本週期對應之5像素構⑴個檢測區域，因 此，平均化電路44對5像素將圖像信號平均化。於圖 和⑹之右侧，表示平均化電路44之輸出信號例。於 受光圖案之週期與基本週期一致時，平均化電路44輸出如 圖9⑷之右側所示般值為固定之信號作為將 號平均化之結果。 於在被評價物體3之表面上有凸部分之情形時，在平均 157408.doc •21 · 201221901 化電路44之輸入信號中，出現如圖9(B)之左側所示般山部 分與谷部分變寬之信號。又，於在被評價物體3之表面上 有凹部分之情形時，出現如圖9(C)之左侧所示般山部分與 谷部分變窄之信號。若輸入如圖9(A)所示般山部分及谷部 分未發生變化之信號，則平均化電路44輸出固定之特定 值，但於輸入對如圖9(B)之左側所示之受光圖案存在放大 之情形時之信號時，平均化電路44如圖9(B)之右側所示般 相對於特定值輸出產生有凹凸之信號。 又，於輸入對如圖9(C)之左側所示之受光圖案存在縮小 之情形時之信號時，如圖9(C)之右側所示，相對於特定值 亦輸出產生有凹凸之信號。於平均化電路44之輸入信號 中，山部分與谷部分之變寬或變窄之程度越大、即被評價 物體3之表面3a上之凹凸之程度越大，平均化電路44之輸 出信號之凹凸之程度越大。 於本實施形態中，為對平均化電路44之輸出進行評價 設置有最大值抽選電路45、最小值抽選電路仆及差運 路47。最大值抽選電路45輸入來自平均化電路44之各檢3 區域内之經平均化之信號，並抽選該區域中之最大值 驟SU”最大值抽選電路45係例如由輸出_檢測區域即』 本週期中之最大值之滤光器構成…最小值抽選電削 輸入來自平均化電路44之各檢測區域内之經平均化之1 號，並抽選該區域中之最小值（步驟su)。 ㈣係例如由輸出-檢測區域即基本週期中 光器構成。 1 I57408.doc -22- 201221901 差運算電路47對最大值抽選電路45之輸出與最小值抽選 電路46之輸出之差進行運算（步驟S14)。差運算之對象為 一檢測區域内、或附近之複數個檢測區域（相當於玻璃之 波紋之數個波長之範圍）。例如，為鄰接之2個或3個檢測 區域。於將鄰接之2個檢測區域作為差運算對象之情形 時，2個檢測區域内之最大值與最小值之差自差運算電路 47輸出。 當然，平均化電路44使用之檢測區域之尺寸與差運算電 路47使用之祀圍之尺寸可存在各種不同。例如，差運算電 路47亦可設為針對平均化電路44使用之檢測區域之2〜1〇倍 之大小的範圍求出最大值與最小值之差。又，亦可使最大 值抽選電路45及最小值抽選電路46之對象區域與平均化電 路44使用之檢測區域不同。 而且’輸出作為運算結果之差信號、及表示此時作為對 象之檢測區域之位置之位置信號。如圖9(a)所示，於在被 3平價物體3之表面3a上無應變之情形時，平均化電路44之 輸出成為固定’因此差運算電路47輸出之差信號表示值 0 °然而’於在被評價物體3之表面3a上有凹凸之情形時， 差信號表示非0之值《而且，差信號之值與凹凸之程度對 應。因此，基於差運算電路47輸出之差信號之值及位置信 號’可特定被評價物體3之表面3a之變形量及變形部位。 換言之’可基於差運算電路47輸出之差信號之值及位置信 號’進行被評價物體3之表面形狀之評價（步驟S15)。 再者，步驟S15之表面形狀之評價亦可由檢查者執行， 157408.doc -23· 201221901 但亦可於運算裝置4中包含決定基於差信號之值與位置信 號之評價結果並輪出之評價功能。利用評價功能之評價結 果之輸出係例如為畫面顯示或印刷輸出。X，評價功能係 如下之功能：例如，將差信號之值與預先決定之閾值進行 比較，於超過閾值之情形時，將有缺點之内容與表示被評 價物體3之表面3a上之對應位置之資料一併輸出。 又，例如，即便於如圖4(D)及4(E)所示之情形時，若設 為差運算電路47將遍及附近之複數個檢測區域、或超過檢 測區域之範圍作為運算對象之範圍而輸出最小值與最大= 之差，則於圖4(D)及圖4(E)所示之情形時亦輸出相同之差 k號。藉此，根據本發明之方法，可進而擴大凹凸之可檢 測範圍。 又，於在被評價物體3之表面形狀中有變化而無受光圖 案之放大或縮小之情形時，在自CCD相機2輸出之圖像信 號中之明部分之值下降或暗部分之值上升時，於藉由平均 化電路44所平均化之信號中亦出現凹凸。因此藉由本實 施形態之方法，亦檢測出此種表面形狀之變化。 再者，平均化電路44、最大值抽選電路45、最小值抽選 電路46及差運算電路47可逐次地對存儲於記憶體42之與被 評價物體3之特定區域内之整個面對應之圖像信號進行處 理，亦可對s己憶體42内之2維圖像進行總括處理。又，可 輸出區域内之明暗之標準偏差來代替將表示檢測區域内之 明暗之信號平均化之方法，亦可獲取經平均化處理之信號 之微分而對被評價物體3之表面形狀進行評價。 157408.doc •24· 201221901 [例1] 其次，對將利用表面粗糙度形狀測定機（商品名： surfC0m)之測定結果' 與本實施形態之評價裝置之評價進 行比較之結果進行說明。圖10(A)〜10(E)係表示將5張板玻 璃作為樣品A〜E，而分別對一剖面藉由表面粗糙度形狀測 定機測定單面之表面形狀之結果。各樣品A〜E係厚度為〇 7 mm、300 mm見方之板玻璃。又，於作為被評價物體之各 木η 〇口 A〜E上，有半間距為1 〇〜15 mm左右之波紋。 圖11(A)〜11(E)係表示於將樣品與光軸傾斜3〇0， CCD相機2中使用f25之透鏡且光闌為F16等條件下之平均 化電路44的輸出。所使用之條紋圖案i係白黑間距為6 mm，且於圖像上 mm(l/f=6 mm)，於樣品面上}像素大於j 1間距成為5像素左右。獲得圖1(E)所示之結果之 各個樣品A〜E係與獲得圖1 (^⑷〜丨〇(E)所示之結果之各個樣 品A〜E相同者。 如上所述，於圖Π(Α)〜1 1(e)中，在受光圖案之週期與 基本週期偏移之部分、即與板玻璃之表面之有凹凸之部位 對應之部分上出現山部分或谷部分^實際上，根據板玻璃 之表面形狀與圖案之相位之關係，板玻璃之表面之凹部分 與圖U(A)〜11(E)中之山部分對應或與谷部分對應。然 而’無論於與山部分對應之情形或於與谷部分對應之情 形’在山部分與谷部分之差之絕對值、與板玻璃之表面的 凹凸之程度之間均存在相關。 又’圖11(A)〜11(E)係表示對樣品之帶狀之一區域之受 157408.doc •25- 201221901 光圖案的週期與基本週期偏移之部分之分佈，而可基於此 T分佈直接評價對其剖面之表面平坦度。而且，若設為輸 出對樣品之整個剖面之分佈，則可直接對樣品之整個面之 表面平坦度進行評價。 圖u係表示形狀值與測定值之相關之說明圖。作為形狀 值使用各樣品之表面形狀之相鄰之凸部與凹部的差中之 最大值（真值）°又’作為測定值，使用在上述實施形態之 評價裝置中，自差運算電路47對各樣品所輸出之差信號中 之最大值。如圖12所示，形狀值與測定值緊密相關。相關 係數為0.81。 (實施形態2) ‘ 圖13係表示本發明之表面形狀之評價裝置之第2實施形· 態的構成例之構成圖。再者，於本實施形態中，表示作為 表面形狀之評價裝置之波紋形狀之測定裝置。如圖13所 示，測岑裝置包括·· CCD相機2,其接受自移動之亮點6發 出且於作為被評價物體3之板玻璃之表面上反射之光而形 成反射像，及計舁機等運算裝置4，其輸入由CCD相機2產 生之反射像之軌跡而算出波紋形狀。 再者，此處例示CCD相機2 ’但亦可使用面陣相機、線 陣相機、視訊相機、靜態相機等任一方式者來代替c C D相 機2。又，若為排列有光感測器者等可特定亮點6之反射像 者，則亦可使用任一受光裝置。 圖14係表示本實施形態之表面形狀之評價方法之概略步 驟的流程圖。如圖14所示，於本發明之表面形狀之評價方 157408.doc -26- 201221901 法中’首先藉由CCD相機2接受移動速度為已知之移動之 亮點6之於被評價物體3的表面上之反射光，並獲得移動之 反射像（步驟S21)。於在被評價物體3之表面上有波紋之情 形時，藉由CCD相機2拍攝之觀測反射像之軌跡自完全無 波紋之理想平面賦予之理想反射像之軌跡偏移。即，相對 於理想平面賦予之理想反射像之軌跡先行或延遲。 因此，根據所獲得之觀測反射像相對於由理想平面產生 之理想反射像之偏移（先行資訊或延遲資訊），算出被評價 物體3之表面之波紋形狀之傾斜度（微分值）（步驟S22)。而 且，將被評價物體3之表面大致為平面之情形作為約束條 件，藉由積分運算獲得波紋形狀（步驟S23)。 其次’參照圖15〜圖20之說明圖，對圖13所示之裝置及 圖14所示之表面形狀之評價方法進行說明。 圖15係表示被評價物之波紋形狀之測定狀況之說明圖。 如圖15所示’亮點6之反射像19成像於CCD相機2之受光元 件之受光面7上。自亮點6射出之光經由光程8並於被評價 物體3之表面上反射而到達受光面7。再者，此處係以亮點 6以特定之固定速度進行移動之情形為例。 如上所述，於在板玻璃表面上有波紋之情形時，所獲得 之觀測反射像（反射像19)之各時刻之位置相對於由在理想 表面上反射之光產生之理想反射像之位置先行或延遲。圖 16係表示反射像19之軌跡相對於由理想平面產生之理想反 射像（反射像26)先行之狀況的說明圖。又，圖17係表示反 射像19之軌跡相對於由理想平面產生之反射像26延遲之狀 157408.doc •27· 201221901 況的說明圖。於圖16及圖17中，由實線表示之光程8A表示 實際之光程。自亮點6射出之光於在板玻璃表面之反射點 12上反射後，經由CCD相機2之透鏡中心30到達受光面7而 形成反射像19。 由虛線表示之光程8B係表示如下之光程：於板玻璃表面 為理想平面之情形時，自亮點6射出之光於在板玻璃表面 之反射點13上反射後，經由CCD相機2之透鏡中心30到達 受光面7。於該情形時，在受光面7上形成圖16及圖17所示 之反射像26。然而，反射像26係於假設板玻璃表面為理想 平面之情形時形成之像，而並非現實中形成者。 亮點6係以特定之速度進行移動，因此若板玻璃表面為 理想表面，則反射像26於受光元件之受光面7上亦以特定 速度進行移動。若已決定亮點6之移動速度，則運算裝置4 於各時刻内，可識別由在理想表面上反射之光產生之反射 像26之位置。運算裝置4可識別由在理想表面上反射之光 產生之反射像26之位置，因此可可知實際上所獲得之反射 像19之位置自反射像26之偏移量（先行量或延遲量）。 圖1 8係表示反射像19之軌跡相對於由理想平面產生之反 射像26先行之情形時之先行程度、與波紋形狀的傾斜度 (微分值）之關係之說明圖。又，圖19係反射像19之轨跡相 對於由理想平面產生之反射像26延遲之情形時之延遲程 度、與波紋形狀的傾斜度（微分值）之關係之說明圖。 於圖18及圖19中，α為將自透鏡中心30於光程8B上延伸 之向量作為基準之情形時之自透鏡中心30於光程8A上延伸 157408.doc • 28 · 201221901 之向里形成的角度。β為將自透鏡中心30於光程8B上延伸 之向量作為基準之情形時之自透鏡中心3〇向鉛垂下方延伸 之向量形成的角度。γ為將自亮點6向鉛垂下方延伸之向量 作為基準之情形時之自亮點6於光程8Α上延伸之向量形成 的角度。而且，δ為將反射點12之垂線向量作為基準之情 形時之反射點12上的波紋表面之法線向量形成的角度（法 線向量之傾斜度）。 任一角度均設為於自作為基準之向量向逆時針方向傾斜 之情形時取正值。因此，於圖18所示之狀況時為α<〇、 δ<〇 ’於圖19所示之狀況時為α>〇、δ>〇。 [數1] Λ Οί — β + γ δ== —2~~ ⑴ 法線向量之傾斜度δ係如（1)式般表示。若將波紋形狀以 成為Z=f(x)之函數表達，則波紋形狀之傾斜度（微分 值）=tan5係以（2)式表示。X轴及z軸如圖2〇所示般獲取， x=〇之點係例如設定於被評價物體3之表面之左端。 [數2] f1 (χ)= = tan5 (2) dx 因此，波紋形狀z如（3)式般求出。於（3)式中，c為積分 常數。若將用作平板顯示器所用之玻璃基板之板玻璃假設 作被評價物體3，則板玻璃之表面形狀雖可能有細微之波 紋但大致為平坦。因此，可考慮為（4)式所示之關係成立。 157408.doc -29- 201221901 即，附加板玻璃表面上之波紋之平均值為〇之條件。於 是’（3)式中之積分常數c能夠以滿足（4)式之約束條件之方 式決定。然而，於（4)式中，將理想表面設為ζ=〇之平 [數3] z=Jf (x)dx+c ο) [數4]201221901 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an evaluation method of a surface shape and an evaluation device for a surface shape. [Prior Art] As a method of inspecting the surface shape of an object, there is a method of irradiating a stripe pattern having periodic light and dark (for example, a pattern in which long black pattern portions are arranged at regular intervals) to be inspected The object is evaluated for the surface shape of the object to be inspected based on the shift of the light-dark period of the reflection image formed by reflection on the surface of the object to be inspected (for example, refer to Patent Document 1). However, if such a method is applied to a transparent plate such as a plate glass, not only the reflection image generated by the surface of the transparent plate-like body but also the reflection image generated by the back surface of the transparent plate-like body is simultaneously taken. The reflection image generated by the surface of the object to be inspected such as a transparent plate-like body is referred to as a surface reflection image, and the reflection image generated by the back surface of the object to be inspected such as a transparent plate-like body is referred to as a back reflection image. Fig. 3 is an explanatory view showing a state in which a surface reflection image and a back reflection image are simultaneously formed. As shown in FIG. 34, the light emitted from the point 5 on the stripe pattern is reflected on the surface 3a of the object 3 to be evaluated, and is imaged on the light receiving surface 7 of the camera via the optical path 8 and passing through the center of the lens 3〇. 1〇. Further, the light transmitted through the object 3 is reflected on the back surface of the object 3 to be imaged, and is imaged on the light receiving surface 7 via the optical path 9 through the lens center 30. Here, there is a case where the following problem is caused to the captured image signal by the period or width of the stripe pattern. Fig. 35 is a schematic diagram showing an example of an image signal of a camera output 157408.doc 201221901. Fig. 35(a) shows an image signal of a surface reflection image, and Fig. 35(B) shows an image signal of a back reflection image. The lower level of X ' indicates that the level of the image signal based on the dark portion in the stripe pattern is higher. The level of the image indicates the level of the image signal based on the bright portion of the stripe pattern. If the width of the dark portion of the stripe pattern towel is wide, there is a case where the width of the lower portion of the circular image signal is also increased, and thus the lower level of the image signal of the surface reflection image is present. It overlaps with the lower level of the image signal of the back reflection image. Therefore, the image signal output from the camera becomes a signal as shown in FIG. 35(c), and can be based on an image signal of a surface reflection image which is originally necessary (refer to FIG. 35 (the same as the "No." Further, as shown in Fig. 36, even if the width of the dark portion in the stripe pattern is sufficiently narrow, the difference between the position of the dark portion in the image signal of the surface reflection image and the position of the dark portion in the image signal of the back reflection image When an integer multiple of the period of the light and dark of the stripe pattern is approximated, the image signal as shown in Fig. 36(c) is also output from the camera. Further, Fig. 36(A) shows an image signal of the surface reflection image. 36(B) is an image signal indicating a back reflection image. In this case, there is also a problem that the surface shape is inspected based on a signal different from the image signal of the surface reflection image, so that an accurate surface shape cannot be performed. Evaluation method for evaluating the surface shape which reduces the influence of the back reflection image without deteriorating the accuracy of the evaluation of the surface shape (for example, 'refer to Patent Document 2). Fig. 37 shows the record for the patent document 2 A schematic diagram of an outline of an evaluation apparatus for evaluating the surface flatness of an object to be evaluated, such as a plate glass. 157408.doc 201221901 As shown in FIG. 37, the evaluation apparatus is configured as follows: CCD (Charge Coupled) as a photographing mechanism In the camera 2, the camera 2 captures a stripe pattern 映射 on the surface 3a of the object 3 to be evaluated, such as a plate glass to be inspected, which is mounted on a mounting table (not shown). Fig. 3 is an explanatory view showing an example of the stripe pattern 1. In Fig. 38, Li indicates the width of the dark portion, and ^ indicates the width of the bright portion ^LfL2 corresponds to the period of the light and dark. When the black stripe portion is colored on the transparent resin film to realize the stripe pattern 1, the bright portion corresponds to the transparent portion, and the dark portion corresponds to the black portion. In the method for evaluating the surface shape described in Patent Document 2, as the first step, Performing a stripe pattern determining step suitable for the stripe pattern 1 of the object 3 to be evaluated, and then performing a surface shape checking step in the second step, the surface shape detecting In the step, the surface pattern of the object 3 to be evaluated is evaluated by image analysis based on the reflection pattern generated by the object 3 to be evaluated by the stripe pattern 1 using the stripe pattern 1 determined in the first step. In the two steps, 'only the reflection image generated by the surface 3a of the object 3 to be evaluated among the reflection images generated by the surface 3a and the back surface 3b of the β-flat object 3 of the stripe pattern 1 determined in the first step is used. 39 is a flowchart showing an example of processing for determining a stripe pattern described in Patent Document 2. In this processing, first, a plurality of stripe patterns having different patterns are printed for each sheet (step S3). A plurality of stripe patterns having different periods of stripes or different widths of the bright portion and the dark portion are prepared. The stripe pattern is formed, for example, by printing a pattern on a transparent resin film by inkjet printing. Next, one stripe pattern is attached to the light source (step S32). Further, 157408.doc 201221901 captures the reflected image of the stripe pattern generated by the object 3 to be evaluated by the CCD camera 2 (step S33). Next, an image analysis process (step S34) is performed, in which the arithmetic device (for example, a computer) 4 inputs an image signal of an image captured by the CCD camera 2, and according to the image analysis processing program pair The image signal is parsed. In the image analysis processing, it is judged whether or not the output signal of the CCD camera 2, that is, the image signal input from the CCD camera 2, is in a state as shown in Fig. 40(C). Specifically, it is judged whether or not the positions of the patterns corresponding to the two dark portions of the surface reflection image and the back reflection image are not overlapped. When the image signal does not indicate such a state (in the case of NG), another stripe pattern is attached to the light source, and the processing of steps S32, S33 is performed again. When the arithmetic unit 4 confirms that the position of the pattern corresponding to the two dark portions of the surface reflection image and the back reflection image in the image signal is not overlapping, the stripe pattern attached to the light source is determined to be The stripe pattern 使用 used in the evaluation of the surface shape of the object 3 is evaluated (step S37). In the above manner, the stripe pattern 1' which is suitable for the evaluation of the surface shape of the object 3 to be evaluated is determined by the stripe pattern having a pattern of light and dark which is set in the separation mode by the image signal obtained by the CCD camera 2. 1q Figure 40 (C) shows the use of the first! A waveform diagram of an output signal of the CCD camera 2 when the stripe pattern is determined in the step. Dan Kao, Fig. 4〇 (shows the image signal of the surface reflection image, and Fig. 4 (B) shows the image signal of the back image. The degree described in Patent Document 2 (corresponds to the signal width Wt, .. ....The dark part of the eight-line system W2) and the period of light and dark (equivalent to 157408.doc 201221901 Τ!, TO optimization), in the image signal output by the CCD camera 2, the dark part of the surface reflection image The dark portion in the back reflection image is adjusted so as not to overlap (see FIG. 40(C)). Therefore, the image signal of the surface reflection image can be easily extracted only when the image is analyzed by the operation device 4, so that The surface shape evaluation is performed in a precise manner, that is, the surface shape can be evaluated with high precision by the effect of removing the back surface reflection image by an inexpensive device. [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 11 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2005-345383 (paragraph 〇〇2〇_0024, FIG. 3) [Disclosure] [Problems to be Solved by the Invention] However, the surface shape of § pp. In the valence method, in order to determine that the stripe pattern of the dark portion based on the surface reflection image and the dark portion based on the back reflection image may be appropriately deviated, it is necessary to perform the operation of attaching the stripe pattern to the light source a plurality of times. Therefore, it takes time and effort to perform the preparation work before the surface shape inspection is actually performed. Further, if the example shown in FIG. 40(C) is referred to, the lower of the two lower level portions adjacent to the surface is based on the surface. The dark portion of the reflection image corresponds, but when there are many light beams reflected on the back surface, the positional difference of the two low levels becomes small, and it is difficult to extract only the image signal of the surface reflection image. As a result, the accuracy of the evaluation of the surface shape is lowered. Possibility, in the case where the thickness of the object to be evaluated is thinner than 〇5 mma 157408.doc -7-201221901, there is a possibility that the adjacent stripes in the stripe pattern overlap and are observed. Problem: The surface shape is inspected based on a signal different from the image signal of the surface reflection image, so that accurate surface shape evaluation cannot be performed. Therefore, the present invention An object of the present invention is to provide a preparation operation that can reduce the influence of a reflection image generated on a second surface opposed to a second surface of an object to be evaluated without time and effort, and can accurately evaluate the surface shape of the object to be evaluated. [Evaluation method of surface shape and apparatus for evaluating surface shape] [Technical means for solving the problem] The method for evaluating the surface shape of the present invention irradiates a pattern having periodic light and dark onto the first surface of the object to be evaluated, Obtaining a light receiving image on the pattern reflected on the first surface, and detecting the shift of the light-dark period of the light-receiving image with respect to the light-dark period of the pattern irradiated on the first surface, and irradiating the light-receiving image with the light-emitting image 1 averaging the signal of the brightness of the area corresponding to the light and dark period of the pattern on the surface, and evaluating the surface shape of the second surface based on the averaged signal, and on the second surface opposite to the first surface Further, a reflection suppressing layer that suppresses reflection of light reaching the second surface is disposed. Preferably, the method for evaluating the shape of the surface of the present invention is based on the averaging signal, detecting the light-dark period of the light-receiving image from the offset portion of the light-dark period of the pattern irradiated on the second surface, and The amount of shift from the light-dark period of the pattern irradiated on the first surface was measured, and the surface shape of the second surface of the object to be evaluated was evaluated based on the measurement result on the surface of 157408.doc 201221901. In the evaluation method of the surface shape of the present invention, it is preferable that the second surface of the object to be evaluated is the difference between the portion of the averaged signal having a larger amplitude and the portion having a smaller amplitude in the vicinity thereof. The method for evaluating the surface shape of the surface of the present invention is preferably such that the absolute value or the square value of the increase or decrease of the signal averaged by the above is used as the offset. The method for evaluating the surface shape of another aspect of the present invention is to observe each of the observed reflection images generated by a plurality of points on the first surface of the object to be evaluated via a camera, and the specific position and the moving speed are known as the highlights of the motion. Or each of the observed reflection images of the reference object of the object point, and obtaining an offset amount of each of the ideal reflection images when the observed reflection image is an ideal plane with respect to the second pupil surface, and using the offset amount and the reference body The positional information and the lens center position information of the camera determine the inclination of the corrugated shape of the i-th surface, and the inclination of the corrugated shape of the first surface is determined as a constraint condition when the first surface is substantially flat The integration is performed, and the corrugated shape of the first surface is evaluated, and a reflection suppressing layer that suppresses reflection of light reaching the second surface is disposed on the second surface facing the first surface. Another aspect of the method for evaluating the shape of the surface of the present invention is to observe a reflection image formed by a plurality of locations on the surface of the third surface of the object to be evaluated, which is a specific position and has a period. The above-mentioned observed reflection images of the reference body of the pattern of the darkness and the darkness obtain the offset amount of each of the ideal reflection images when the observed reflection image is an ideal plane with respect to the first surface, and the above-described respective offset amounts are used. Obtaining the inclination of the corrugated shape of the second surface by the position information of the reference body and the lens center position information of the camera, and setting the first surface to be substantially flat, and the corrugation shape of the first surface The inclination is integrated, and the corrugated shape of the first surface is evaluated, and a reflection suppressing layer that suppresses reflection of light reaching the second surface is disposed on the second surface facing the first surface. In the evaluation method of the surface shape of the present invention, it is preferred that the reflection inhibiting layer is a liquid, a viscous body, or a film. In the evaluation method of the surface shape of the present invention, it is preferred that the liquid is water. The surface shape evaluation apparatus of the present invention includes: a light source that irradiates a pattern having periodic light and darkness onto the first surface of the object to be evaluated; and a light receiving mechanism that receives the pattern reflected on the surface of the second surface to obtain a light receiving pattern And an evaluation mechanism that evaluates a surface shape of the first surface based on a shift of a light-dark period of the light-receiving image generated by the light-receiving mechanism with respect to a pattern illuminated from the light source; the evaluation mechanism includes : an averaging mechanism that averages the light and dark signals of the light-receiving image and the region corresponding to the light-dark period of the pattern on the first surface; and the processing mechanism' The averaged signal outputted by the chemical means outputs a signal for specifying a deformation portion and a deformation amount of the surface shape on the first surface; and the second surface facing the first surface is arranged to suppress the arrival A reflection suppressing layer that reflects light on the second surface. The apparatus for evaluating the surface shape of another aspect of the present invention includes a reference body that forms each of the observed reflection images generated by a plurality of points on the first surface of the object to be evaluated, that is, a specific position and a moving speed is known. a bright spot or an object point of motion; a camera that obtains each of the observed reflected images generated by the first surface of the reference body; and an arithmetic unit that calculates that each of the observed reflected images obtained by the camera is ideal for the first surface The amount of deviation of each ideal reflection image in the case of a plane, and the inclination of the corrugation shape of the first surface is obtained by using the above-described respective offset amounts, the position information of the reference body, and the lens center position information of the camera. When the first surface is substantially flat, the inclination of the corrugated shape of the first surface is integrated as a constraint condition, and the corrugated shape of the first surface is obtained; and the second surface is opposed to the first surface. On the surface, a reflection suppressing layer that suppresses reflection of light reaching the second surface is disposed. An apparatus for evaluating a surface shape according to another aspect of the present invention includes: a reference body which is formed to generate an observation reflection image 157408.doc -11 - 201221901 from a plurality of locations on the first surface of the object to be evaluated. a position and a periodic light and dark pattern; a camera that obtains each of the observed reflection images generated by the first surface of the reference body; and an arithmetic unit that calculates each of the observed reflection images obtained by the camera with respect to the first surface The deviation amount of each ideal reflection image in the case of an ideal plane is obtained by using the above-described respective offset amounts, the position information of the reference body, and the lens center position information of the camera to determine the inclination of the corrugated shape of the second surface. When the first surface is substantially flat, the inclination of the corrugated shape of the first surface is integrated, and the corrugated shape of the first surface is obtained; and the first surface is opposed to the first surface. On the surface of the second surface, a reflection suppressing layer that suppresses reflection of light reaching the second surface is disposed. In the evaluation device for the surface shape of the present invention, it is preferable that the reflection suppressing layer is a liquid, a viscous body, or a film. In the evaluation device for the surface shape of the present invention, it is preferred that the liquid is water. [Effects of the Invention] In the present invention, since the reflection suppressing layer that suppresses the reflection of light on the second surface opposed to the second surface of the object to be evaluated is disposed, it is possible to reduce the contrast with the first surface. The surface shape of the object to be evaluated is evaluated in a high-precision manner by the influence of the reflection image generated on the second surface. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. 157408.doc • 12· 201221901 Fig. 1 (A) and (B) are explanatory views showing the relationship between the light incident on the object 3 to be evaluated and the light reflected on the surface 3a and the back surface 3b of the object 3 to be evaluated. Here, as the object 3 to be evaluated, a plate glass having a refractive index (absolute refractive index: the same refractive index is also the same) is 1.5. In Fig. 1(A), an example of the object 3 to be evaluated which is present in the air having a refractive index of approximately 1.0 is shown. The light beam incident on the object 3 to be evaluated is reflected on the surface 3a of the object 3 to be evaluated and reflected as light A, but a part of the light travels inside the object 3 to be evaluated, and a large number of light beams are reflected on the back surface 3b of the object 3 to be evaluated. Further, a large number of light beams are emitted as light B from the surface 3a of the object 3 to be evaluated. However, as shown in FIG. 1(B), when the reflection suppressing layer 20 having a refractive index of approximately 1.5 is disposed on the back surface 3b of the object 3 to be evaluated, a large amount of light beam traveling inside the object 3 to be evaluated is disposed. It is not reflected on the back surface 3b of the object 3 to be evaluated, but is incident on the reflection suppressing layer 20 from the back surface 3b of the object 3 to be evaluated. Therefore, the amount of light B is small. In other words, the reflected light on the back surface 3b of the object 3 to be evaluated is hardly emitted from the surface 3a of the object 3 to be evaluated. Further, in FIGS. 1(A) and 1(B), the object 3 to be evaluated is thick, but if the light A is light from the stripe pattern, the object to be evaluated 3 has a thickness of 0.5 mm or less. In the case of a thinner plate glass, in the example shown in Fig. i(A), there is a possibility that adjacent stripes in the stripe pattern overlap and are observed. That is, there is a possibility that the stripe pattern of light reflected on the surface 3a of the object 3 to be evaluated and the strip reflected on the back surface 3b overlap and are observed. However, in the example shown in Fig. 1(B), the reflected light on the back surface 3b of the object 3 to be evaluated is hardly emitted from the surface 3a of the object 3 to be evaluated, so that the adjacent stripes overlap and are not observed. Or evaluated 157408.doc -13- 201221901 The effect of the reflected light on the back surface 3b of the object 3, that is, the influence of the back reflection image (the degree of overlap) is reduced. In the present invention, the influence of the back surface reflection image is reduced by the relationship illustrated in Fig. 1(B), whereby the surface shape can be evaluated with high precision. Figs. 2(A) to 2(C) are diagrams schematically showing an example of an image signal output from a camera that images a stripe pattern reflected on the object 3 to be evaluated of the present invention. Fig. 2(A) shows an image signal of a surface reflection image, and Fig. 2(B) shows an image signal of a back reflection image. Further, the low level indicates the bit $ based on the dark portion t image signal in the stripe pattern, and the high level indicates the level of the image signal based on the bright portion in the stripe pattern. Further, Fig. 2(C) shows an image signal in which the surface reflection image and the back reflection image are superimposed. In the present invention, as shown in Fig. 2(B), the difference between the high level and the low level of the back reflection image becomes small, so that the waveform shown in Fig. 2 (〇 is approximated to the waveform shown in Fig. 2 (4). In the previous example shown in 'Figure', the waveform shown in Fig. 35(C) differs greatly from the waveform shown in Fig. 35(8). That is, in the present invention, even if the image output by the camera is directly used. The evaluation of the surface shape of the object 3 to be evaluated by the signal is also an evaluation of the effect of back reflection: the exclusion has been excluded... the processing for determining the appropriate stripe pattern as described in the previous example is not required. 3(4) is a schematic diagram showing an evaluation device for evaluating the flatness of the surface of the object to be evaluated such as plate glass as an object to be evaluated, together with the object to be evaluated. As shown in Fig. 3 (4), the evaluation device is In the following manner, the 153408.doc 201221901 stripe pattern 1 on the surface 3a of the object 3 to be evaluated such as the sheet glass to be evaluated is photographed by the coffee camera 2 as the photographing means. The stripe pattern 丨 is set in the light source. (not shown) The light-emitting surface is disposed on the back surface 3 of the object 3 to be evaluated, and the reflection suppression layer 2 having a refractive index close to the refractive index of the object 3 to be evaluated is disposed in contact with the back surface. For example, a liquid having a refractive index of 1.4 to 1.5 can be used, and a liquid such as water (refractive index: 丨33), anisole (refractive index: 1.52), or ethanol (refractive index: 136) can be used. In addition, as the reflection inhibiting layer 2, other materials such as a synthetic resin such as a polyethylene or a polyamino phthalate having a refractive index of 1.5 to 1.6 may be used. The material forms the reflection suppressing layer 2, and a plurality of materials may be combined to form the reflection suppressing layer 20. The composite material is not particularly limited. For example, even if the refractive index is substantially different from the refractive index of the object to be evaluated, The plurality of materials are combined to have a refractive index equal to the refractive index of the object to be evaluated. The image captured by the CCD camera 2 is taken into the arithmetic unit 4 such as a personal computer, and the image is analyzed by the arithmetic unit 4. Again Here, the CCD camera 2 is exemplified, but a camera of any type such as an area array camera, a line camera, a video camera, or a still camera may be used instead of the CCD camera 2. Further, it may be specified as long as the photosensors are arranged. Any one of the light-receiving devices can be used. The method of evaluating the surface 3a of the object 3 from the optical axis of the CCD camera 2 and the normal to the stripe pattern 1 (specifically, the plane of the stripe pattern 1) The CCD camera 2 and the stripe pattern i are arranged in such a manner that the line direction is at the same angle 0. The angle is preferably 〇° <θ1$45. More preferably 157408.doc •15· 201221901 Fig. 3(B) is a perspective view showing the evaluation apparatus shown in Fig. 3(A). As shown in Fig. 3(B), in the evaluation apparatus, the light source 100 in which the light-based surface is provided with the stripe pattern 1 is irradiated onto the object 3 to be evaluated. In addition, in FIG. 3, the reflection suppression layer 20 is provided so as to be in contact with the entire back surface 3b of the object 3 to be evaluated, but the reflection suppression layer 2 is provided to be irradiated with at least the light source 1 〇〇. The back surface 3b of the portion of the light generated by the stripe pattern 1 may be used. (Embodiment 1) First, a method of evaluating the surface shape used in the present embodiment will be described. Fig. 4 is an explanatory view for explaining a method of evaluating the surface shape. The light generated by the stripe pattern 1 from the light source 100 is irradiated onto the object 3 to be evaluated, and the reflected light from the surface 3a of the object 3 to be evaluated is received by the imaging element of the CCD camera 2. In the present specification, the "light generated by the stripe pattern 1 from the light source 1" indicates the light that has passed through the stripe pattern 1, and the following is the case where the light that has passed through the stripe pattern is irradiated as "irradiation." Striped pattern 1". Further, in the present embodiment, the reflected light from the back surface 3b of the object 3 to be evaluated is hardly incident on the CCD camera 2. The arithmetic unit 4 evaluates the surface shape based on the electric signal (image signal) received by light. If the surface of the object 3 to be evaluated is completely flat, the state of contrast between the light and dark obtained according to the image signal coincides with the state of the contrast of the known stripe pattern 1. Fig. 4(A) shows an example of a light receiving pattern (image) of the CCD camera 2, a pixel arrangement of the imaging elements of the CCD camera 2, and an image signal indicating the brightness of the imaging element from 157408.doc -16·201221901. When there is no surface deformation in the object 3 to be evaluated, the contrast change does not occur as exemplified in the first three detection areas of the image signal (refer to Fig. 4(A)). However, a contrast change occurs in the image signal generated by the reflected light from the surface deformed portion of the object 3 to be evaluated. That is, the pattern of light reception from the surface deformed portion of the object 3 to be evaluated is enlarged or reduced as compared with the pattern from the non-deformed portion. For example, in the case of amplification, the contrast becomes larger, but there is a case where the pattern is exposed from the detection area. Thereby, as shown in Fig. 4(B), the original maximum value portion 12〇& and the minimum value portion 120b cannot enter the same detection area, so that the contrast degree in the detection area becomes small. The contrast is defined as (a_b) / (a + b) using the maximum value a and the minimum value b of the image signals in the respective detection areas. Further, in the case of reduction, the imaging element cannot be completely resolved, so that the contrast is small as shown in Fig. 4(c). Therefore, it is possible to evaluate whether or not there is surface deformation on the object 3 to be evaluated by comparing the difference between the white portion and the black portion of the image signal with the reference value. Furthermore, in the case of no enlargement or reduction of the pattern, there is also a case where the value of the bright portion of the image signal decreases or the value of the dark portion rises. In this case, # is compared with the reference value by comparing the difference between the bright portion and the dark portion of the detection area of a specific size, and it is also possible to evaluate whether or not there is surface deformation on the object to be evaluated. In Fig. 4(4), the mesh portion is a white knife with a reduced brightness, and in the detection region including the portion, the contrast in the detection region becomes smaller. However, even if a surface strain such as an enlarged image is generated, if 157408 is placed. Doc •17- 201221901 The contrast between the large and the detection areas is different, and the contrast in the detection area is also different. As an example, the pattern shown in Fig. 4(D) is enlarged in the same manner as the pattern shown in Fig. 4(E), but there is a difference in the contrast in the detection area due to the difference in the method of entering the detection area. Originally, when the image signal becomes as shown in Fig. 4(D) and becomes the case shown in Fig. 4(E), the same evaluation result should be obtained, but if it is to be based only on the contrast phase in the detection area The evaluation of the surface shape is different, and there is a possibility that it becomes a different result. That is, there is a limit in the evaluation of the surface shape based on the difference in contrast in the detection area. In the present embodiment, the surface shape can be evaluated with high precision based on the difference in the contrast in the detection area as described below, and as a result, the detectable range of strain can be expanded. Fig. 5 is an explanatory view showing an example of a stripe pattern 丨. In Figure $, the width of the dark portion is not shown, and L2 is the width of the bright portion. Li+L2 is equivalent to the period of light and dark (Ι/f). The reciprocal of the period is below the spatial frequency of the pattern, the spatial frequency f is referred to as the fundamental frequency, and the reciprocal is referred to as the basic period. Further, when the black portion is colored on the transparent resin film to realize the ridge shape of the stripe pattern j, the bright portion corresponds to the transparent portion, and the dark portion corresponds to the black portion. As an example, the period (Ι/f) is about 1.0 mm, and the width L丨 of the dark portion is about 1 》. FIG. 6 is a block diagram of the example of the functional block realized by the arithmetic unit 4 in Table 7F. In the arithmetic unit 4, the input circuit 41 stores an image signal of the light receiving pattern which is not clear from the CCD camera 2, and stores the image signal in the memory 42. The shading correction circuit 43 performs shading correction on the image signal 1574〇8.^0c -18- 201221901 in the memory (4) to remove the influence of the light amount distribution of the light source 100 on the photographing of the CCD camera 2. The averaging circuit 44 performs averaging filtering on the brightness of each pixel in each detection area after shading correction, and outputs the averaged value to the maximum value drawing circuit 45 and the minimum value drawing circuit 46. The detection area used for averaging corresponds to the reciprocal (basic period) of the fundamental frequency of the pattern. Therefore, the averaging circuit 44 is constituted by an integral type filter or the like which averages image signals in units of basic periods. The maximum value of the output of the averaging circuit 44 is outputted by the maximum value decimation circuit 45, and the minimum value of the output of the averaging circuit 44 is selected. Further, the difference operation circuit 47 outputs a difference between the output value of the maximum value drawing circuit 45 and the output value of the minimum value drawing circuit 46, and a signal indicating the position of the detection area. These maximum and minimum values are equivalent to the selection of the region of the period of the ripple on the object 3 to be evaluated. For example, the width of the area is 2 to 1 times the basic period. Next, the operation of the surface shape evaluation device will be described with reference to the explanatory diagram of Fig. 7, the flowchart of Fig. 8, and the description of Fig. 9. Fig. 7 is an explanatory view showing a state of the imaging surface of the CCD camera 2 corresponding to the stripe pattern 1. However, in Fig. 7, only the pixels of the E0 to E4 columns in the pixels of the imaging plane of the CCD camera 2 are shown. Further, in the present embodiment, the optical system is set so that the basic period of the stencil pattern 1 corresponds to five pixels of the CCD camera 2. Therefore, the detection area used for averaging here is composed of 5 pixels. Fig. 8 is a flow chart showing the operation of the evaluation device. The imaging by the CCD camera 2 (specifically, an image signal) is input to the memory device 42 via the input device 157408.doc • 19· 201221901. The shading correction circuit 43 obtains an average value of the image signals of the respective pixels of the subsequent regions (including the detection region as the target) before the detection region as the target at the time point (step su). For example, when the area c of the E1 line shown in Fig. 7 is used as the detection area, the average value of each pixel of the b, c, and d areas of the E1 line is obtained. By this processing, the light quantity distribution image (shadow image) corresponding to the background around the detection area is obtained. Of course, the area of the object that obtains the average value can be further expanded, and the area of the line before and after the E1 line can be included in the object area where the average value is obtained. The shading correction circuit 43 further divides the image signal of each pixel by the obtained average value (step S11). As a result, there is a difference in the amount of luminescence from the position on the surface, and the influence of the difference in the amount of luminescence is also reduced. Furthermore, the method of shading correction is not limited to the above method. For example, the following method can also be used. (1) In the above method, an intermediate value in an image signal of each pixel in each area is used instead of obtaining an average of each pixel in each area. (2) In the above method, the average value is subtracted from each image signal instead of dividing the obtained average value by each image signal. (3) A method of directly receiving light from the light source 100 without obtaining an average value for shading correction for each detection area, and obtaining a shadow image first. Further, when shading correction is performed for each detection area, the image processing of the shadow image obtained by 2 is used to perform division processing or subtraction processing. I57408.doc • 20-201221901 FIGS. 9(A) to 9(C) are waveform diagrams showing an example of an image apostrophe and an averaged signal indicating the brightness of the light receiving pattern. On the left side of Figs. 9(A) to 9(c), an example of an image signal indicating the brightness of the light receiving pattern is shown. In the present embodiment, since the shading correction circuit 43 is provided, the output signal of the shading correction circuit 43 is specifically shown. When the object 3 to be evaluated is flat, the light receiving pattern is enlarged or reduced. Therefore, as shown in Fig. 9(A), the period of the light receiving pattern coincides with the basic period. If there is unevenness on the surface of the object 3 to be evaluated, the pattern is enlarged or reduced in the light-receiving pattern generated by the CCD camera 2 by the refraction action, for example, the transmitted light system from the surface is convex. Zooming in, the pattern from the transmitted light system that is a concave portion is reduced. As a result, as shown on the left side of Figs. 9(B) and 9(C), the period of the light receiving pattern is shifted from the basic period. Thereby, if it is detected that the pattern period of the light receiving pattern is shifted from the basic period, it is possible to detect that there is unevenness on the surface of the object 3 to be evaluated. Therefore, the averaging circuit 44 performs the calendering process of averaging the shading corrected pixels in the detection area for detecting the deviation of the period of the light receiving pattern from the fundamental period (step S12). In this embodiment, the stripe pattern is made from the disc! The basic period corresponds to 5 pixels (1) detection areas, and therefore, the averaging circuit 44 averages the image signals for 5 pixels. On the right side of the figure and (6), an example of the output signal of the averaging circuit 44 is shown. When the period of the light receiving pattern coincides with the basic period, the averaging circuit 44 outputs a signal having a fixed value as shown on the right side of Fig. 9 (4) as a result of averaging the numbers. In the case where there is a convex portion on the surface of the object 3 to be evaluated, in the input signal of the average 157408.doc • 21 · 201221901 circuit 44, the mountain portion and the valley portion appear as shown on the left side of FIG. 9(B). The signal of widening. Further, in the case where there is a concave portion on the surface of the object 3 to be evaluated, a signal in which the mountain portion and the valley portion are narrowed as shown on the left side of Fig. 9(C) appears. If a signal indicating that the mountain portion and the valley portion have not changed as shown in FIG. 9(A) is input, the averaging circuit 44 outputs a fixed specific value, but inputs a light receiving pattern as shown on the left side of FIG. 9(B). When there is a signal in the case of amplification, the averaging circuit 44 outputs a signal having irregularities with respect to a specific value as shown on the right side of Fig. 9(B). Further, when a signal is applied to the case where the light receiving pattern shown on the left side of Fig. 9(C) is reduced, as shown on the right side of Fig. 9(C), a signal having irregularities is also output with respect to the specific value. In the input signal of the averaging circuit 44, the greater the degree of widening or narrowing of the mountain portion and the valley portion, that is, the greater the degree of unevenness on the surface 3a of the object 3 to be evaluated, the output signal of the averaging circuit 44 The greater the degree of unevenness. In the present embodiment, the output of the averaging circuit 44 is evaluated. The maximum value drawing circuit 45, the minimum value drawing circuit servant, and the differential path 47 are provided. The maximum value drawing circuit 45 inputs the averaged signal from each of the detection regions of the averaging circuit 44, and draws the maximum value in the region. SU" The maximum value selection circuit 45 is, for example, an output_detection region. The filter of the maximum value in the period constitutes a minimum value of the selected electric shaving input from the averaging number 1 in each detection area of the averaging circuit 44, and the minimum value in the area is selected (step su). For example, it is composed of an output-detection region, that is, a basic period illuminator. 1 I57408.doc -22- 201221901 The difference operation circuit 47 calculates the difference between the output of the maximum value drawing circuit 45 and the output of the minimum value drawing circuit 46 (step S14). The object of the difference operation is a plurality of detection areas (corresponding to a range of wavelengths of the corrugation of the glass) in or near the detection area. For example, it is two or three adjacent detection areas. When the detection area is the difference calculation target, the difference between the maximum value and the minimum value in the two detection areas is output from the difference operation circuit 47. Of course, the size of the detection area used by the averaging circuit 44 The size of the range used by the difference operation circuit 47 may vary. For example, the difference operation circuit 47 may be set to a maximum value and a minimum value for a range of 2 to 1 times the detection area used by the averaging circuit 44. Further, the target area of the maximum value drawing circuit 45 and the minimum value drawing circuit 46 may be different from the detection area used by the averaging circuit 44. Further, 'the output is a difference signal as a result of the operation, and the object is represented at this time. The position signal of the position of the detection area. As shown in Fig. 9(a), when there is no strain on the surface 3a of the object 3 of the 3 parity, the output of the averaging circuit 44 becomes fixed 'so the difference operation circuit 47 outputs The difference signal indicates a value of 0 °. However, when there is unevenness on the surface 3a of the object 3 to be evaluated, the difference signal indicates a value other than 0. Moreover, the value of the difference signal corresponds to the degree of the unevenness. Therefore, based on the difference operation The value of the difference signal output from the circuit 47 and the position signal 'specifically specify the amount of deformation and the deformation of the surface 3a of the object 3 to be evaluated. In other words, the difference signal output from the difference operation circuit 47 can be used. And the position signal 'evaluating the surface shape of the object 3 to be evaluated (step S15). Further, the evaluation of the surface shape of step S15 can also be performed by the examiner, 157408.doc -23·201221901 but also in the arithmetic device 4. The evaluation function that determines the evaluation result based on the value of the difference signal and the position signal is included. The output of the evaluation result by the evaluation function is, for example, a screen display or a print output. X, the evaluation function is as follows: for example, the difference is The value of the signal is compared with a predetermined threshold value, and when the threshold value is exceeded, the content of the defect is output together with the data indicating the corresponding position on the surface 3a of the object 3 to be evaluated. Further, for example, even as shown in the figure In the case of 4(D) and 4(E), if the difference operation circuit 47 sets the range of the detection area over the vicinity or the range beyond the detection area as the range of the calculation target, the minimum value and the maximum value are output. In the case of the difference shown in Fig. 4 (D) and Fig. 4 (E), the same difference k is also output. Thereby, according to the method of the present invention, the detectable range of the unevenness can be further expanded. Further, when there is a change in the surface shape of the object 3 to be evaluated without enlarging or reducing the light receiving pattern, when the value of the bright portion of the image signal output from the CCD camera 2 decreases or the value of the dark portion rises, Concavities and convexities also appear in the signals averaged by the averaging circuit 44. Therefore, the change in the shape of the surface is also detected by the method of the embodiment. Furthermore, the averaging circuit 44, the maximum value drawing circuit 45, the minimum value drawing circuit 46, and the difference arithmetic circuit 47 can sequentially image the entire surface of the memory 42 corresponding to the specific area of the object 3 to be evaluated. The signal is processed, and the 2-dimensional image in the suffix 42 can also be collectively processed. Further, instead of the method of averaging the signals indicating the shading in the detection area, the standard deviation of the brightness in the output area can be used, and the surface shape of the object 3 to be evaluated can be evaluated by obtaining the differentiation of the averaged signal. 157408.doc •24·201221901 [Example 1] Next, a result of comparing the measurement result of the surface roughness shape measuring machine (trade name: surfC0m) with the evaluation of the evaluation device of the present embodiment will be described. Figs. 10(A) to 10(E) show the results of measuring the surface shape of one surface by a surface roughness shape measuring machine using five sheets of glass as samples A to E. Each sample A to E was a plate glass having a thickness of 〇 7 mm and 300 mm square. Further, on each of the wood η ports A to E which are the objects to be evaluated, there are corrugations having a half pitch of about 1 〇 to 15 mm. 11(A) to 11(E) show the output of the averaging circuit 44 under the condition that the sample is tilted by 3 〇 0 with respect to the optical axis, the lens of f25 is used in the CCD camera 2, and the aperture is F16. The stripe pattern i used is a white-black pitch of 6 mm and mm (l/f=6 mm) on the image, and the pixel on the sample surface is larger than the j 1 pitch to about 5 pixels. Each of the samples A to E obtained as a result shown in Fig. 1(E) was identical to each of the samples A to E obtained as a result of the results shown in Fig. 1 (^(4) to 丨〇(E). As described above, in Fig. (Α)~1 1(e), in the portion where the period of the light-receiving pattern is shifted from the basic period, that is, the portion corresponding to the uneven portion of the surface of the plate glass, the mountain portion or the valley portion appears. The relationship between the surface shape of the plate glass and the phase of the pattern, the concave portion of the surface of the plate glass corresponds to the mountain portion in Figs. U(A) to 11(E) or corresponds to the valley portion. However, 'corresponding to the mountain portion In the case of the situation corresponding to the valley portion, there is a correlation between the absolute value of the difference between the mountain portion and the valley portion and the degree of the unevenness of the surface of the sheet glass. Further, 'Fig. 11(A) to 11(E) The distribution of the period of the 157408.doc •25-201221901 light pattern with respect to the basic period offset is indicated for one of the strips of the sample, and the surface flatness of the section can be directly evaluated based on the T distribution. If the distribution is set to the distribution of the entire profile of the sample, the entire sample can be directly The surface flatness is evaluated. Fig. u is an explanatory diagram showing the relationship between the shape value and the measured value. As the shape value, the maximum value (true value) of the difference between the convex portion and the concave portion of the surface shape of each sample is used. Further, as the measured value, the maximum value of the difference signals outputted from the respective samples by the self-interference calculation circuit 47 in the evaluation apparatus of the above-described embodiment is used. As shown in Fig. 12, the shape value is closely related to the measured value. (Embodiment 2) Fig. 13 is a configuration diagram showing a configuration example of a second embodiment of the surface shape evaluation device of the present invention. Further, in the present embodiment, evaluation as a surface shape is shown. A device for measuring the shape of a corrugated shape of a device. As shown in Fig. 13, the measuring device includes a CCD camera 2 which is formed by a bright spot 6 emitted from the movement and formed by light reflected on the surface of the plate glass of the object 3 to be evaluated. The reflection image and the arithmetic unit 4 such as a metering machine input a trajectory of the reflected image generated by the CCD camera 2 to calculate a corrugated shape. Here, the CCD camera 2' is exemplified here, but an area array camera may be used. The c-camera 2 can be replaced by any of a matrix camera, a video camera, a still camera, etc. Further, any of the light-receiving devices can be used as long as the reflection image of the bright spot 6 can be specified by a photosensor or the like. Fig. 14 is a flow chart showing the outline of the method for evaluating the surface shape of the present embodiment. As shown in Fig. 14, in the method of evaluating the surface shape of the present invention, 157408.doc -26-201221901, the first method is CCD camera. 2 accepting the reflected light on the surface of the object 3 to be evaluated with the moving speed of the known moving point 6 and obtaining the moving reflected image (step S21). When there is ripple on the surface of the object 3 to be evaluated, The trajectory of the observed reflected image taken by the CCD camera 2 is offset from the trajectory of the ideal reflected image given by the ideal plane without the corrugation. That is, the trajectory of the ideal reflected image given by the ideal plane is advanced or delayed. Therefore, the inclination (differential value) of the corrugation shape of the surface of the object 3 to be evaluated is calculated based on the obtained deviation of the observed reflection image with respect to the ideal reflection image generated by the ideal plane (previous information or delay information) (step S22) ). Further, a case where the surface of the object 3 to be evaluated is substantially flat is used as a constraint condition, and a corrugated shape is obtained by an integral operation (step S23). Next, the apparatus shown in Fig. 13 and the method of evaluating the surface shape shown in Fig. 14 will be described with reference to the explanatory drawings of Figs. 15 to 20 . Fig. 15 is an explanatory view showing the measurement state of the corrugated shape of the object to be evaluated. As shown in Fig. 15, the reflection image 19 of the bright spot 6 is formed on the light receiving surface 7 of the light receiving element of the CCD camera 2. The light emitted from the bright spot 6 is reflected by the optical path 8 on the surface of the object 3 to be evaluated, and reaches the light receiving surface 7. Further, here, a case where the bright spot 6 is moved at a specific fixed speed is taken as an example. As described above, when there is a corrugation on the surface of the plate glass, the position of each of the observed reflection images (reflection images 19) obtained is advanced with respect to the position of the ideal reflection image generated by the light reflected on the ideal surface. Or delayed. Fig. 16 is an explanatory view showing a state in which the trajectory of the reflected image 19 is advanced with respect to the ideal reflected image (reflected image 26) generated by the ideal plane. Further, Fig. 17 is an explanatory view showing a state in which the trajectory of the reflection image 19 is delayed with respect to the reflection image 26 generated by the ideal plane, 157408.doc • 27·201221901. In Figs. 16 and 17, the optical path 8A indicated by a solid line indicates the actual optical path. The light emitted from the bright spot 6 is reflected on the reflection point 12 on the surface of the plate glass, and then reaches the light receiving surface 7 via the lens center 30 of the CCD camera 2 to form the reflection image 19. The optical path 8B indicated by the broken line indicates the optical path as follows: when the surface of the plate glass is a perfect plane, the light emitted from the bright spot 6 is reflected by the reflection point 13 on the surface of the plate glass, and then passes through the lens of the CCD camera 2. The center 30 reaches the light receiving surface 7. In this case, the reflection image 26 shown in Figs. 16 and 17 is formed on the light receiving surface 7. However, the reflection image 26 is formed by an image formed on the assumption that the surface of the plate glass is a perfect plane, and is not formed in reality. The bright spot 6 is moved at a specific speed. Therefore, if the surface of the plate glass is an ideal surface, the reflection image 26 is also moved at a specific speed on the light receiving surface 7 of the light receiving element. If the moving speed of the bright spot 6 has been determined, the arithmetic unit 4 can recognize the position of the reflected image 26 generated by the light reflected on the ideal surface at each time. The arithmetic unit 4 can recognize the position of the reflected image 26 generated by the light reflected on the ideal surface, so that the position of the reflected image 19 actually obtained from the reflected image 26 (the amount of advance or the amount of delay) can be known. Fig. 18 is an explanatory diagram showing the relationship between the degree of advancement and the inclination (differential value) of the corrugated shape when the trajectory of the reflected image 19 is advanced with respect to the reflected image 26 generated by the ideal plane. Further, Fig. 19 is an explanatory diagram showing the relationship between the degree of delay in the case where the trajectory of the reflected image 19 is delayed with respect to the reflected image 26 generated by the ideal plane, and the inclination (differential value) of the corrugated shape. In FIGS. 18 and 19, α is a direction in which the lens center 30 extends over the optical path 8A from the lens center 30 as a reference when the vector extending from the lens center 30 on the optical path 8B is used as a reference. Angle. β is an angle formed by a vector extending from the center 3〇 of the lens toward the lower side when the vector extending from the lens center 30 on the optical path 8B is used as a reference. γ is an angle formed by a vector extending from the bright spot 6 on the optical path 8Α when the vector extending from the bright point 6 to the lower side is used as a reference. Further, δ is an angle (inclination of the normal vector) formed by the normal vector of the corrugated surface on the reflection point 12 when the vertical line vector of the reflection point 12 is used as a reference. Any angle is set to a positive value when the vector as the reference is tilted in the counterclockwise direction. Therefore, it is α in the situation shown in Fig. 18. <〇, δ <〇 ' is α> 〇, δ > 于 in the case shown in Fig. 19 . [Equation 1] Λ Οί — β + γ δ== —2~~ (1) The inclination δ of the normal vector is expressed as in the equation (1). If the corrugated shape is expressed as a function of Z = f(x), the inclination (differential value) = tan5 of the corrugated shape is expressed by the formula (2). The X-axis and the z-axis are obtained as shown in FIG. 2A, and the point of x=〇 is set, for example, at the left end of the surface of the object 3 to be evaluated. [Equation 2] f1 (χ) = = tan5 (2) dx Therefore, the corrugated shape z is obtained as in the equation (3). In the formula (3), c is an integral constant. If the plate glass used as the glass substrate used for the flat panel display is assumed to be the object 3 to be evaluated, the surface shape of the plate glass may have a fine waviness but is substantially flat. Therefore, it can be considered that the relationship shown by the formula (4) holds. 157408.doc -29- 201221901 That is, the average value of the ripple on the surface of the additional plate glass is the condition of 〇. Then, the integral constant c in the equation (3) can be determined in accordance with the constraint of the formula (4). However, in equation (4), the ideal surface is set to ζ=〇平 [number 3] z=Jf (x)dx+c ο) [number 4]
Jf(x) dx=〇 (4) 具體而言，進行如下之處理。運算裝置4自CCD相機2輸 入各時刻之受光面7上之反射像19,並獲得各時刻之反射 像19之位置資訊。又，亮點6之移動速度為預先決定之固 定速度’因此亦可識別各時刻之亮點6之位置及由理想平 面產生之反射像26之位置資訊。反射像19、26之在受光面 7上之位置與板玻璃表面上之反射點12、13之位置對應。 又，透鏡中心30之位置亦為已決定者。可識別各時刻之 亮點6之位置’且各時刻之反射點丨2、丨3之位置可根據反 射像19、26之在受光面7上之位置決定，又，透鏡中心3〇 之位置亦為已知’因此運算裝置4可算出各時刻之各角度 α、β、γ。因此’可基於（1)式計算各時刻之3。再者，各時 刻之反射點12之位置為（2)式〜(4)式中之X之值。 由於已算出各時刻之δ，因此運算裝置4可容易地算出各 時刻之tan5(=f’（x))之值。設為各時刻之f，(x)如、 f(x2)、f'(x3)、…、f'(xn)般獲得n個，並將δ(χ)以如下之 方式定義。 157408.doc -30- 201221901 Δ(χ1)=(Γ(χ1)+Γ(χ2))χ(χ2-χ1)/2 Δ(χ2)=(Γ(χ2)+Γ(χ3))χ(χ3-χ2)/2 Δ(χ(η-1))=(Γ(χ(η-1)) + Γ(χη))χ(χη-χ(η-1))/2 波紋形狀可藉由對f，(x)進行數值積分而求出。具體而 言’運算裝置4藉由算出f(xn)=A(xl)+A(x2)+ +Δ<χ<η_ 1)) ’而獲得各χ之波紋之高度。 以此方式所獲得之波紋形狀並非一定滿足（4)式，彳θ運 算裝置4藉由以 C=-(f(xl)+f(x2))x(x2-xl)/2 -(f(x2)+f(x3))x(x3-x2)/2 參 -(f(x(n-l))+f(xn))x(xn_x(n· ι))/2 之方式決定（3)式中之積分常數C，而可獲得滿足（4)式之波 紋形狀。 [例2] 其次’表示藉由本實施形態之方法，將板玻璃作為被評 價物體而進行實測之例。於該例中，使用圖21所示之光學 系統位置關係。於圖21中，a為被評價物體3(於該例中為 板玻璃）之端部與自CCD相機2之透鏡中心30垂下之垂線之 間之距離’ b為被評價物體3之寬度，c為自條紋圖案上之 點垂下之垂線與自透鏡中心30垂下之垂線之間之距離，h 為透鏡中心30距理想平面（板玻璃之表面之波紋之平均平 面）之高度。 157408.doc •31 - 201221901 於模擬中，設為亮點6、理想平面及透鏡中心3〇之位置 關係已知。具體而言，設為a=45〇 mm、b=250 mm、 c=1300 mm、h=28.43 mm。 又’由以具有振幅ai、a2、波長、L2i(5)式表示之函 數來表達被評價物體3之表面之波紋形狀。 [數5] z=a,sin[lM] +a2Sin^ (5) 圖22(A)係表示於（5)式中，設為a丨=〇 〇〇〇〇5 、l1：;=10 mm、as-O.O mm、[2=2〇 〇 mm之情形時之波紋形狀之波形 圖。圖22(B)係表示於將具有圖21所示之位置關係之光學 系統及具有圖22(A)所示之表面形狀之被評價物作為對 象而實施上述測定方法時所得之波紋形狀的波形圖。圖 22(B)所示之波紋形狀大致與圖22(A)所示之波紋形狀一 致，即，確認藉由本發明之方法可準確地測定波紋形狀。 圖23(A)係表示於式中’設為ai = 〇 〇〇〇〇5 mm ^ Li = l 〇 mm a2-〇,〇〇〇〇5 mm、l2=2〇 〇出爪之情形時之波紋形狀之 波形圖。圖23(B)係表示於將具有圖2丨所示之位置關係之 光學系統、及具有圖23(A)所示之表面形狀之被評價物作 為對象而實施上述測定方法時所得的波紋形狀之波形圖。 圖23(B)所示之波紋形狀大致與圖23(a)所示之波紋形狀一 致’即’確認藉由本發明之方法可準確地測定表面形狀。 又，於本發明之表面形狀之評價方法中，只要可進行基 於觀測值之角度算出計算及用以積分之加法減法運算處理 157408.doc •32· 201221901 即可’因此運算裝置4之運算量並不多。 圖24係表示移動之亮點6之一實現例之說明圖。於該例 中’使來自雷射光源21之光於可移動之鏡22上反射，從而 使反射光照射至螢幕23上。於以此方式之情形時，可將反 射光之螢幕23上之照射點用作亮點ό。此處，若以於螢幕 23上焭點6以等速進行移動之方式使鏡22移動，則實現以 等速進行移動之亮點6。再者，於圖24中，表示鏡22進行 移動之形態，但實際上可使用如多面鏡之旋轉鏡與校正鏡 來代替鏡22進行移動之形態，而容易地實現鏡移動。 再者，於上述實施形態中，對將以等速進行移動之亮點 6用作可形成由被評價物體3之表面上之複數個地點產生之 各反射像19的基準體且位置可特定之基準體之例進行了說 明。然而，若已預先決定移動速度，則即便亮點6之移動 速度並非等速亦可應用本發明。又，作為基準體.，並不限 疋於以此方式作成之亮點6，亦可使用自身進行移動之物 理性之點（物點）。 作為物點，例如可使用該者進行移動之點光源、或置於 照明環境下之可移動之點。於作為物點使用移動之點光源 之情形時，反射像19成為明點，於作為物點使用置於照明 %境下之可移動之點之情形時，反射像19成為暗點。再 者，亮點及物點並非數學性之含義之點，現實中成為具有 某種程度之寬度之區域。 於上述實施形態中，對測定一維之波紋形狀之情形進行 了說明，但於遍及被評價物體3之整個表面測定波紋形狀 157408.doc •33- 201221901 之情形時，例如，如圖25所示，只要使被評價物體3於與 光程8正交之方向上移動#可。而且，運算裝置績被評價 物體3之表面之各行（於圖25中為以虛線間表示之假設之各 行）實施上述運算。再者，於圖25中’表示被評價物體3進 行移動之情形，但亦可使亮點6於與光程8正交之方向上移 動。 圖2 6係表示本發明之其他實施形態之表面形狀之評價裝 置的概略構成例之構成圖。於本實施形態中，作為可形成 由作為被評價物體3之板玻璃之表面上之複數個地點產生 的各反射像19之基準體且位置可特定之基準體，可使用亮 度間距為已知之條紋圖案丨來代替進行移動之亮點6。來自 條紋圖案1之各低亮度部分62之光之由板玻璃表面產生的 反射像於藉由CCD相機2拍攝後，輸入至運算裝置4。 因於條紋圖案1中亮度間距為已知，故運算裝置4可識別 被評價物體3之受光面7上之由理想平面產生之反射像26的 各位置。運算裝置4基於實際之反射像19之位置自由理想 平面產生之反射像26的各位置之偏移，藉由上述運算算出 波紋形狀。如上所述，即便使用條紋圖案1之空間資訊（與 各低亮度部分62對應之反射像19、26之位置資訊）來代替 移動之亮點6之時間資訊（各時刻之反射像19、26之位置資 訊）’亦可測定板玻璃表面之波紋形狀。 [例3] 其次，表示藉由本實施形態之方法將板玻璃作為被評價 物而進行實測之例。於該例中，使用圖21所示之光學系統 157408.doc •34· 201221901 位置關係’具體而言’使用圖26所示之裝置。於圖21中， a為被評價物體3之端部與自透鏡中心3〇垂下之垂線之間之 距離，b為被評價物體3之寬度，c為亮點6與透鏡中心3〇之 間之距離，h為透鏡中心30距理想平面（被評價物體3之表 面之波紋之平均平面）之高度。 設為條紋圖案1之設置位置、理想平面、及透鏡中心3〇 之位置關係為已知。具體而言，設為a=225 mm、b=3〇〇 mm、c=750 mm、h=60 mm。又，將所使用之條紋圖案1之 高亮度部及低亮度部之丨週期設為丨因此，於被評價 物體3之中心上，1週期為〇5 mm。而且，對相機2而 言，使用光闌為F16、焦點距離為55 _之透鏡。條纹圖 案1之像素解析度約成為〇·〇9 mm，於被評價物體3之中心 上像素解析度約成為〇.〇4 mm，條紋圖案1之1週期相當 於11〜12像素。 田 圖27(A)係表示藉由表面粗糙度形狀測定機對被評價物 體3之表面形狀進行測定之結果。χ，圖27(b)係表示對相 同之被評價物體3實施本實施形態之方法而所獲得之表面 形狀。圖27(B)所示之表面形狀大致與圖27(A)所示之表面 形狀-致’因此可知藉由本發明可準確地測定表面形狀。 於對圖10所示之各形狀之樣品之表面形狀進行測定之例 中’在各樣品中存在半間距為10〜15 mm左右之波纹，與 此相對’於如圖案之白黑之1間距為6麵之兩者比較接近 之條件下進行測定。 於此種條件中， 基本週期之偏移量與表面形狀之間存 157408.doc •35- 201221901 在直接相關，因此對於凹凸之位準存在較高之相關。因 此，於對圖10所示之各形狀之樣品之表面形狀進行測定的 例中认為在樣品面上1像素成為1 mm左右，但即便於此 種解像度較低之條件下，亦可充分地對凹凸位準進行評 價。 另方面，如上述例（獲得圖27(B)所示之波形之例），於 被評價物體3之中心上之丨週期為如〇 5 〇^1等之充分小於波 紋之半間距的情形時，無須算出如已進行說明之最大值與 最小值之差，而表面形狀之變化之絕對值（波紋形狀之傾 斜度之絕對值）對自基本週期之偏移量之絕對值亦存在相 關。藉此，於此種情形時，使自根據圖像所算出之基本週 期之偏移量之絕對值以峰值為單位正負反轉而進行積分， 藉此可算出表面形狀。根據此種算出方法，計算得以簡 化。再者，以峰值為單位進行正負反轉之原因在於，將以 絕對值獲得之資料恢復至與原本之凹凸有關之資料。又， 即便使用偏移量之平方值來代替偏移量之絕對值，值雖不 同，但亦可獲得相同之結果。 [例4] 圖28(B)係表示以與例3相同之條件拍攝圖像之情形時之 明暗週期自基本週期產生的偏移量之絕對值。然而，於該 例中，運算裝置4以基本週期實施平滑化處理而算出經平 均化之值，並將所算出之值、與作為5週期之平均之陰影 信號的差之絕對值作為明暗週期自基本週期產生之偏移量 之絕對值。即，將經平均化之信號之增減之絕對值作為明 157408.doc -36- 201221901 暗週期自基本週期之偏移量。 於藉由被評價物體3之變形產生自基本週期之偏移時， 亦存在如下任-種可能性：藉由圖案之相位，而於平滑化 寬度上明亮之部分較多之情形、與黑暗之部分較多之情 形因此’以對任一種之情形均可進行評價之方式獲取絕 對值。® 28(A)係表示藉由表面㈣度形狀敎機對被評 價物體3之表面形狀進行測定，並算出其微分之絕對值之 結果 ° 又，圖29(A)係表示利用表面粗糙度形狀測定機之被評 價物體3之表面形狀之測定結果。圖29(B)係表示以極小值 為單位將圖29(A)所示之結果正負反轉，並藉由對該結果 進仃積分而獲得之形狀。由於兩者之形狀極其相似，因此 可知藉由以峰值為單位使自基本週期之偏移量之絕對值 (或平方值）正負反轉而進行積分，可對表面形狀進行評 價。 如以上說明’於本實施形態中，基於由來自被評價物體 3之表面3a之反射光產生之受光圖像之明暗週期自基本週 期的偏移，對被評價物體3之表面形狀進行評價，因此可 於短時間内更高精度地對表面形狀之應變等進行評價。 又’將與受光圖像之基本週期對應之區域之明暗平均化， 並基於經平均化之信號對被評價物體3之表面形狀進行評 價’藉此可擴大應變等之可檢測範圍。 又，於被評價物體3之背面3b上，配置有抑制到連該背 面3b上之光之反射之反射抑制層20，因此可使用背面反射 157408.doc -37- 201221901 像之影響得以減小之來自CCD相機2之圖像信號，更高精 度地對被評價物體3之表面形狀進行評價。 [實施例] 以下，對具體之實施例進行說明。 (實施例1) 圖3 0係表示評價裝置之第1實施例之模式圖。於本實施 例中，評價裝置設置於用作作為被評價物體之一例之玻璃 基板之板玻璃300的搬送路徑上。又，於搬送路徑上，設 置有用以搬送板玻璃300之複數個驅動輥2〇1、202、203。 光源（未圖示）設置於如向任一個以上之驅動報之正上方照 射條紋圖案1之位置上。於圖3 0中，例示設置於對驅動報 202之正上方照射光之位置上之情形。再者，於本實施例 及以下之實施例中，板玻璃3〇〇之折射率設為15。 於驅動輥202之附近’設置有對驅動輥202喷射水滴之喷 水裝置210。自喷水裝置210所喷射之水滴附著於驅動輥 202之表面上。驅動輥202以附著有水滴之狀態進行旋轉， 因此於照射有條紋圖案1之位置上，成為在板玻璃3〇〇之背 面3b上存在水之狀態。因此，於照射有光之位置上，可實 現相當於圖1(B)所示之狀態之狀態。 由此，連接於CCD相機2之運算裝置4執行步驟sil~S15 之處理（參照圖8)或步驟S21〜S23之處理（參照圖14)，藉此 不會受到背面反射像之影響，而可高精度地對板玻璃3〇〇 之表面形狀進行評價。 再者，評價裝置設置於板玻璃300之搬送路徑上，但於 157408.doc -38· 201221901 本實施例中’在搬送板玻璃300時執行評價之情形並非必 需，而亦可於板玻璃300載置於載置台等之狀態（靜止之狀 態）下進行評價。 又，亦可藉由其他機構使水附著於驅動輥2〇2之表面上 來代替自喷水裝置210將水滴喷射至驅動輥202之表面上。 例如，亦可使可包含水分之構件（例如，海綿）與驅動輥2〇2 接觸。又，於在板玻璃300靜止之狀態下實施評價之情形 時，亦可使可包含水分之構件與板玻璃3〇〇之評價部位之 背面接觸。 (實施例2) 圖3 1係表不評價裝置之第2實施例之模式圖。於本實施 例中，評價裝置設置於作為被評價物體之一例之板玻璃 300之搬送路徑上。又，於搬送路徑上，設置有用以搬送 板玻璃300之複數個驅動輥.221、222、223。於光源（未圖 示）照射條紋圖案i之位置之背面（具體而言，搬送之板玻璃 3〇〇之背面側）上，設置有水蒸氣環境22〇。例如，設置有 以板玻璃300之背面暴露於水蒸氣十之方式形成之水蒸氣 室。 因此，於照射有用於評價之光之位置上，成為在板玻璃 300之背面3b上存在水之狀態。因此，於照射有光之位置 上’可實現相當於圖1(B)所示之狀態之狀態。由此，連接 於CCD相機2之運算裝置4執行步驟sn〜S15之處理（參照圖 8)藉此不會又到是面反射像之影響，而可高精度地對板 玻璃300之表面形狀進行評價。 157408.doc •39- 201221901 再者，評價裝置係設置於板玻璃300之搬送路徑上，但 於本實施例中，在板玻璃300搬送時執行評價之情形並非 必需，亦可於載置板玻璃300之狀態（靜止之狀態）下進行評 價。. 又’於水蒸氣室内充滿有水蒸氣或熱氣，但若為折射率 近似於板玻璃300之折射率之值之液體，則亦可充滿水以 外之液體氣化而成者。 (實施例3) 圖3 2係表示評價裝置之第3實施例之模式圖。於本實施 例中，評價裝置亦設置於作為被評價物體之一例之板玻璃 300之搬送路徑上。又，於搬送路徑上，設置有用以搬送 板玻璃300之複數個驅動輥231、232、233。光源（未圖示） 設置於如向任一個以上之驅動輥之正上方照射條紋圖案i 之位置上。於圖32中，例示設置於向驅動輥232之正上方 照射光之位置上之情形。 例如，金屬製之驅動輥232之外周圍由折射率為15〜16 之合成樹脂232a被覆。又，亦可將驅動輥232本身之材質 設為聚胺基甲酸醋等合成樹脂。於第3實施例中，在照射 有條紋圖案k位置上’亦成為折射率與板玻璃鳩之制 率大致相等之反射抑制層（於本實施例中為合成樹脂2 與板玻璃遍之背面3b相接之狀態。因此，於照射有條紋 圖案!之位置上’可實現相當於圖1(B)所示之狀態之狀 態。 由此，連接於CCD相機2之運算裝置4執行步驟川〜⑴ 157408.doc -40- 201221901 之處理（參照圖8)，藉此不會受到背面反射像之影響，而可 高精度地對板玻璃300之表面形狀進行評價。 (實施例4) 圖33係表示評價裝置之第4實施例之立體圖。於本實施 例中’在板玻璃300之評價部位（相當於照射有條紋圖案i 之位置）之背面上，貼附有折射率為1.5左右之膜（薄片） 241。作為膜241，例如可使用FUJICOPIAN公司製造之 FIXFILM-PTG。 再者’作為第3貫施例之合成樹脂232a，亦可使用 FUJICOPIAN公司製造之FIXFILM-PTG。 於第4實施例中’在照射有條紋圖案1之位置上，亦成為 在板玻璃300之背面3b上相接有折射率與板玻璃3〇〇之折射 率大致相等之反射抑制層（於本實施例中為薄片241)的狀 態。由此，連接於CCD相機2之運算裝置4執行步驟 S11〜S15之處理（參照圖8)，藉此不會受到背面反射像之影 響，而可高精度地對板玻璃300之表面形狀進行評價。 再者，於上述實施形態及實施例中，作為反射抑制層例 示了各種材質者，但可於本發明中使用之反射抑制層只要 為折射率近似於被評價物體3之折射率之物質，則並不限 定於此。 又，最佳為，反射抑制層之折射率與被評價物體3之折 射率相同，但若運算裝置4可根據來自CCD相機2之圖像信 號區別表面反射像之暗部與明部，則㈣折射率亦可不相 同，例如折射率之差只要為0.2以下即可。 157408.doc -41 - 201221901 又’於上述實施形態及實施例中，被評價物體3係例如 用作使用於液晶顯示器或電漿顯示器等平板顯示器、及太 陽電池之玻璃基板之板玻璃，但亦可於使用於汽車、船 舶、飛機、建築物等之窗玻璃等之板玻璃（素板）或樹脂板 等被評價物體之評價中應用本發明。 詳細且參照特定之實施態樣對本發明進行了說明，但業 者應明瞭可不脫離本發明之範圍與精神而施加各種修正或 變更。 本申請案係基於2010年7月12日申請之曰本專利申請 2010-157449者’其内容係作為參照併入本文。 [產業上之可利用性] 本發明可於對被評價物體之表面之平坦度進行評價時較 佳應用。 【圖式簡單說明】 圖1 (A)及（B)係表示入射至被評價物體之光與於被評價 物體之表面及背面上反射之光之關係的說明圖。 圖2(A)〜(C)係模式性地表示相機輸出之圖像信號例之波 形圖。 圖3(A)及（B)係將用以對被評價物體之表面之平坦度進 行評價之評價裝置與被評價物體一併表示之模式圖及立體 圖。 圖4(A)〜(E)係用以說明表面形狀之評價方法之說明圖。 圖5係表示條紋圖案之一例之說明圖。 圖6係表示藉由運算裝置而實現之功能區塊之例之方塊 157408.doc •42· 201221901 圖。 圖7係表示與條紋圖案對應之拍攝面之狀況之㈣圖。 圖8係表示本發明之-態樣之表面形狀之評價方法的流 程圖。 圖9(A)〜(C)係表示對受光圖案之明暗進行表示之圖像信 號及經平均化之彳g滅之一例的波形圖。 圖10(A)〜(E)係表示對各樣品之一剖面，#由表面粗糙 度形狀測定機測定單面之表面形狀之結果之說明圖。 圖11(A)〜(E)係表示平均化電路對各樣品之輸出之說明 圖。 圖12係表示形狀值與測定值之相關之說明圖。 圖13係表示本發明之表面形狀之評價裝置之其他構成例 的構成圖。 圖14係表示本發明之一態樣之表面形狀之評價方法的概 略步驟之流程圖。 圖15係表示被評價物之波紋形狀之測定狀況之說明圖。 圖16係表示所觀測到之反射像之軌跡相對於由理想平面 產生之反射像先行的狀況之說明圖。 圖Π係表示所觀測到之反射像之軌跡相對於由理想平面 產生之反射像延遲的狀況之說明圖。 圖18係表示所觀測到之反射像之軌跡相對於由理想平面 產生之反射像先行的情形時之先行程度、與波紋形狀之傾 斜度之關係之說明圖。 圖19係表示所觀測到之反射像之軌跡相對於由理想平面 157408.doc -43- 201221901 產生之反射像延遲的情形時之延遲程度、與波紋形狀之傾 斜度之關係之說明圖。 圖20係表示X軸及z軸之定義之說明圖。 圖21係表示於模擬中所用之光學系統之說明圖。 .圖22(A)及（B)係表示波紋形狀之一例、及藉由本發明之 一態樣之表面形狀之評價方法的模擬所獲得之波紋形狀之 說明圖。 圖23(A)及（B)係表示波紋形狀之其他例、及藉由本發明 之一態樣之表面形狀之評價方法的模擬所獲得之波紋形狀 之說明圖。 圖24係表示移動之亮點之一實現例之說明圖。 圖25係表示遍及被評價物之整個表面之波紋形狀之測定 的一實施例之說明圖。 圖26係表示本發明之其他實施形態之波紋形狀之測定裝 置的概略構成例之構成圖。 圖27(A)係表示藉由表面粗糙度形狀測定機測定被評價 物體之表面形狀之結果，圖27(B)係表示於例2中，對相同 之被評價物實施本發明之方法而所獲得之表面形狀的說明 圖。 圖28(A)係表示藉由表面粗糙度形狀測定機測定被評價 物體之表面形狀並算出其微分之絕對值之結果，圖28(B) 係表示於例3中，自已拍攝圖像之情形時之基本週期產生 之偏移量的絕對值之說明圖。 圖29(A)係表示利用表面粗糙度形狀測定機之被評價物 157408.doc 201221901 體之表面形狀之敎結果，圖29(B)係表示以極小值為單 位對圖28⑻所示之結果進行正負反轉並藉由對其進 分所獲得之形狀之說明圖。 圖30係表示評價裝置之第】實施例之模式圖。 圖31係表示評價裝置之第2實施例之模式圖。 圖32係表示評價裝置之第3實施例之模式圖。 圖33係表示評價装置之第4實施例之立體圖。 圖34係表示表面反射像與背面反射像_形成之狀況之 圖3 5(A)〜(C)係表示相機輸出之圖像信號例之波形圖。 圖3 6(A)〜(C)係表示相機輸出之圖像信號例之波形圖。 圖37係將先前之評價裝置 圖38係表示條紋圖案之—例之說明圖。 圖39係表示決定條紋圖宰 未 < 晁理之一例之流程圖。 圖40(Α)〜(〇係表示CCD相機 々日俄之輸出^唬例之波形圖 【主要兀件符號說明】 條紋圖案 2 C C D相機 3 被評價物體 3a 表面 3b 背面 4 運算裝置 5 條紋圖案上之點 157408.doc •45 201221901 47 62 100 120a 120b 201 、 202 、 203 、 221 、 222 、 6 7 8、8A、8B、9 10、11 12、13 19 ' 26 20 21 22 23 30 41 42 43 44 45 46 党點 受光面 光程 拍攝點 反射點 反射像 反射抑制層 雷射光源 鏡 螢幕 透鏡中心 輸入電路 記憶體 陰影校正電路 平均化電路 最大值抽選電路 最小值抽選電路 差運算電路 低亮度部分 光源 最大值部分 最小值部分 驅動輥 223 、 231 、 232 、 233 157408.doc -46- 201221901 210 喷水裝置 220 水蒸氣環境 232a 合成樹脂 241 膜（薄片） 300 板玻璃 A、B 光 C 積分常數 Li 暗部之寬度 l2 明部之寬度 Sll〜S37 步驟 T 差 T, ' T2 週期 Wj ' w2 信號寬度 θ^α'β'γ'δ 角度 1/f 明暗之週期 157408.doc •47-Jf(x) dx=〇 (4) Specifically, the following processing is performed. The arithmetic unit 4 receives the reflected image 19 on the light receiving surface 7 at each time from the CCD camera 2, and obtains positional information of the reflected image 19 at each time. Further, the moving speed of the bright spot 6 is a predetermined fixed speed', so that the position of the bright spot 6 at each time and the positional information of the reflected image 26 generated by the ideal plane can be recognized. The position of the reflection images 19, 26 on the light receiving surface 7 corresponds to the position of the reflection points 12, 13 on the surface of the plate glass. Also, the position of the lens center 30 is also determined. The position of the bright spot 6 at each time can be recognized, and the positions of the reflection points 丨2 and 丨3 at each time can be determined according to the position of the reflection images 19 and 26 on the light-receiving surface 7, and the position of the lens center 3〇 is also It is known that the arithmetic unit 4 can calculate the angles α, β, and γ at the respective times. Therefore, 3 of each time can be calculated based on the formula (1). Further, the position of the reflection point 12 at each moment is the value of X in the equations (2) to (4). Since δ at each time has been calculated, the arithmetic unit 4 can easily calculate the value of tan5 (=f'(x)) at each time. It is assumed that f at each time, (x) is obtained as in the case of f(x2), f'(x3), ..., f'(xn), and δ(χ) is defined as follows. 157408.doc -30- 201221901 Δ(χ1)=(Γ(χ1)+Γ(χ2))χ(χ2-χ1)/2 Δ(χ2)=(Γ(χ2)+Γ(χ3))χ(χ3 -χ2)/2 Δ(χ(η-1))=(Γ(χ(η-1)) + Γ(χη))χ(χη-χ(η-1))/2 The shape of the corrugation can be f, (x) is obtained by numerical integration. Specifically, the arithmetic unit 4 obtains the height of the ripple of each turn by calculating f(xn) = A(xl) + A(x2) + + Δ < χ < η_ 1))'. The shape of the corrugation obtained in this way does not necessarily satisfy the formula (4), and the 彳θ operation device 4 by C=-(f(xl)+f(x2))x(x2-xl)/2 -(f( X2)+f(x3))x(x3-x2)/2 --(f(x(nl))+f(xn))x(xn_x(n· ι))/2 In the integral constant C in the middle, a corrugated shape satisfying the formula (4) can be obtained. [Example 2] Next, the example in which the sheet glass was measured as an object to be evaluated by the method of the present embodiment was shown. In this example, the optical system positional relationship shown in Fig. 21 is used. In Fig. 21, a is the distance between the end of the object 3 to be evaluated (in this example, the plate glass) and the perpendicular line hanging from the lens center 30 of the CCD camera 2, and b is the width of the object 3 to be evaluated, c The distance between the perpendicular line hanging from the point on the stripe pattern and the perpendicular line hanging from the center 30 of the lens, h is the height of the lens center 30 from the ideal plane (the average plane of the corrugations of the surface of the sheet glass). 157408.doc •31 - 201221901 In the simulation, the positional relationship between the bright point 6, the ideal plane, and the center of the lens is known. Specifically, it is set to a = 45 〇 mm, b = 250 mm, c = 1300 mm, and h = 28.43 mm. Further, the corrugated shape of the surface of the object 3 to be evaluated is expressed by a function having an amplitude of ai, a2, a wavelength, and L2i (5). [Equation 5] z=a, sin[lM] + a2Sin^ (5) Fig. 22(A) is expressed in the formula (5), and is set to a丨=〇〇〇〇〇5, l1:;=10 mm Waveform of the corrugated shape in the case of as-OO mm and [2=2〇〇mm. FIG. 22(B) shows a waveform of a corrugated shape obtained by performing the above-described measuring method on an optical system having the positional relationship shown in FIG. 21 and an object to be evaluated having the surface shape shown in FIG. 22(A). Figure. The corrugated shape shown in Fig. 22(B) is substantially the same as the corrugated shape shown in Fig. 22(A), i.e., it is confirmed that the corrugated shape can be accurately determined by the method of the present invention. Figure 23(A) shows the case where 'ai is set to ai = 〇〇〇〇〇5 mm ^ Li = l 〇mm a2-〇, 〇〇〇〇5 mm, l2=2 Waveform of the corrugated shape. Fig. 23(B) shows a corrugated shape obtained by performing the above-described measuring method on an optical system having the positional relationship shown in Fig. 2A and an object to be evaluated having the surface shape shown in Fig. 23(A). Waveform diagram. The corrugated shape shown in Fig. 23(B) is substantially the same as the corrugated shape shown in Fig. 23(a), i.e., it is confirmed that the surface shape can be accurately measured by the method of the present invention. Further, in the method for evaluating the surface shape of the present invention, the calculation calculation based on the observation angle and the addition subtraction processing 157408.doc • 32·201221901 based on the integral can be performed, so that the calculation amount of the arithmetic unit 4 is not much. Fig. 24 is an explanatory view showing an example of the realization of one of the bright points 6 of the movement. In this example, the light from the laser light source 21 is reflected on the movable mirror 22, so that the reflected light is irradiated onto the screen 23. In the case of this mode, the illumination point on the screen 23 of the reflected light can be used as a bright spot. Here, if the mirror 22 is moved so that the click point 6 on the screen 23 moves at a constant speed, the bright spot 6 that moves at a constant speed is realized. Further, although Fig. 24 shows a mode in which the mirror 22 is moved, actually, a mirror such as a polygon mirror and a correction mirror can be used instead of the lens 22 to move, and the mirror movement can be easily realized. Further, in the above-described embodiment, the bright spot 6 that moves at a constant speed is used as a reference for forming a reference body of each of the reflected images 19 generated by a plurality of points on the surface of the object 3 to be evaluated, and the position can be specified. The example of the body is explained. However, if the moving speed has been determined in advance, the present invention can be applied even if the moving speed of the bright spot 6 is not constant speed. Further, as the reference body, it is not limited to the bright spot 6 created in this way, and the point of physicality (object point) for moving itself can be used. As the object point, for example, a point light source for moving the person or a movable point in a lighting environment can be used. When a moving point light source is used as the object point, the reflection image 19 becomes a bright point, and when the object point is moved to a point where it is placed under the illumination %, the reflection image 19 becomes a dark point. Furthermore, the highlights and objects are not mathematically meaningful, and in reality they become areas of a certain degree of breadth. In the above embodiment, the case where the one-dimensional corrugated shape is measured has been described. However, when the corrugated shape 157408.doc • 33 - 201221901 is measured over the entire surface of the object 3 to be evaluated, for example, as shown in FIG. As long as the object 3 to be evaluated is moved in the direction orthogonal to the optical path 8, #可可. Further, the arithmetic unit performs the above calculation on each line of the surface of the evaluation object 3 (in FIG. 25, the lines of the assumptions indicated by the broken lines). Further, in Fig. 25, 'the object to be evaluated 3 is moved, but the bright spot 6 may be moved in the direction orthogonal to the optical path 8. Fig. 2 is a configuration diagram showing a schematic configuration example of a surface shape evaluation device according to another embodiment of the present invention. In the present embodiment, as a reference body which can form a reference body of each of the reflection images 19 which are generated at a plurality of points on the surface of the plate glass of the object 3 to be evaluated, and a position where the position can be specified, a stripe having a known luminance interval can be used. The pattern 丨 is used instead of the bright spot 6 for moving. The reflection from the surface of the plate glass of the light from each of the low-luminance portions 62 of the stripe pattern 1 is imaged by the CCD camera 2, and then input to the arithmetic unit 4. Since the luminance pitch in the stripe pattern 1 is known, the arithmetic unit 4 can recognize the respective positions of the reflected image 26 generated by the ideal plane on the light receiving surface 7 of the object 3 to be evaluated. The arithmetic unit 4 calculates the shape of the corrugation by the above calculation based on the deviation of each position of the reflected image 26 generated by the ideal ideal plane based on the position of the actual reflected image 19. As described above, even if the spatial information of the stripe pattern 1 (the positional information of the reflected images 19 and 26 corresponding to the respective low-luminance portions 62) is used instead of the time information of the moving bright spot 6 (the position of the reflected images 19 and 26 at each time) Information) 'The corrugated shape of the surface of the plate glass can also be determined. [Example 3] Next, an example in which the plate glass was used as an object to be evaluated by the method of the present embodiment was shown. In this example, the optical system 157408.doc • 34· 201221901 positional relationship 'specifically' is used as shown in Fig. 21. In Fig. 21, a is the distance between the end of the object 3 to be evaluated and the perpendicular line hanging from the center 3 of the lens, b is the width of the object 3 to be evaluated, and c is the distance between the bright spot 6 and the center 3 of the lens. , h is the height of the lens center 30 from the ideal plane (the average plane of the corrugations of the surface of the object 3 to be evaluated). It is known that the positional relationship of the stripe pattern 1, the ideal plane, and the position of the lens center 3〇 are known. Specifically, it is set to a = 225 mm, b = 3 〇〇 mm, c = 750 mm, and h = 60 mm. Further, the 丨 period of the high luminance portion and the low luminance portion of the stripe pattern 1 to be used is 丨, so that the period of the object 3 is 〇5 mm in one cycle. Further, for the camera 2, a lens having a pupil of F16 and a focal length of 55 _ is used. The pixel resolution of the fringe pattern 1 is approximately 〇·〇9 mm, and the pixel resolution at the center of the object 3 to be evaluated is approximately 〇.〇4 mm, and the period of the stripe pattern 1 is equivalent to 11 to 12 pixels. Field Figure 27 (A) shows the results of measuring the surface shape of the object 3 to be evaluated by a surface roughness shape measuring machine. That is, Fig. 27(b) shows the surface shape obtained by carrying out the method of the present embodiment on the same object 3 to be evaluated. The surface shape shown in Fig. 27(B) is substantially the same as the surface shape shown in Fig. 27(A). Therefore, it is understood that the surface shape can be accurately measured by the present invention. In the example of measuring the surface shape of the samples of the respective shapes shown in FIG. 10, 'there is a corrugation having a half-pitch of about 10 to 15 mm in each sample, and the distance between the white and the black of the pattern is The measurement was carried out under conditions in which the 6 faces were relatively close. In this condition, the offset between the fundamental period and the surface shape is directly related, so there is a high correlation with the level of the bump. Therefore, in the example of measuring the surface shape of the sample of each shape shown in FIG. 10, it is considered that the number of pixels on the sample surface is about 1 mm, but even under such a condition that the resolution is low, it is sufficient. The unevenness level was evaluated. On the other hand, as in the above example (the example of the waveform shown in Fig. 27(B) is obtained), the 丨 period at the center of the object 3 to be evaluated is such that 〇5 〇^1 or the like is sufficiently smaller than the half pitch of the corrugations. There is no need to calculate the difference between the maximum value and the minimum value as explained, and the absolute value of the change in the surface shape (the absolute value of the inclination of the corrugation shape) is also related to the absolute value of the offset from the basic period. Therefore, in this case, the absolute value of the shift amount from the basic period calculated from the image is integrated by the positive and negative inversion of the peak value, whereby the surface shape can be calculated. According to this calculation method, the calculation is simplified. Furthermore, the reason for positive and negative reversal in units of peaks is that the data obtained in absolute value is restored to the information relating to the original unevenness. Further, even if the square value of the offset is used instead of the absolute value of the offset, the values are different, but the same result can be obtained. [Example 4] Fig. 28(B) shows the absolute value of the shift amount from the basic period in the case where the image is taken under the same conditions as in Example 3. However, in this example, the arithmetic unit 4 performs the smoothing process at the basic cycle to calculate the averaged value, and the absolute value of the difference between the calculated value and the shadow signal which is the average of five cycles is taken as the light-dark period. The absolute value of the offset produced by the basic period. That is, the absolute value of the increase and decrease of the averaged signal is taken as the offset from the basic period of the dark period 157408.doc -36- 201221901. In the case where the deformation of the object 3 to be evaluated is generated from the shift of the fundamental period, there is also a possibility that, by the phase of the pattern, the portion of the smoothing width is more bright, and the darkness is In some cases, the absolute value is obtained in such a way that any of the cases can be evaluated. ® 28 (A) shows the surface shape of the object 3 to be evaluated by the surface (four) degree shape, and the result of the absolute value of the differential is calculated. FIG. 29(A) shows the shape of the surface roughness. The measurement result of the surface shape of the object 3 to be evaluated by the measuring machine. Fig. 29(B) shows the shape obtained by inverting the result shown in Fig. 29(A) in units of minimum values and obtaining the result by integrating the result. Since the shapes of the two are extremely similar, it is understood that the surface shape can be evaluated by integrating the absolute value (or the square value) of the offset from the basic period in units of peaks. As described above, in the present embodiment, the surface shape of the object 3 to be evaluated is evaluated based on the shift of the light-dark period of the light-receiving image generated by the reflected light from the surface 3a of the object 3 to be evaluated from the fundamental period. The strain of the surface shape and the like can be evaluated with higher precision in a short time. Further, the brightness of the region corresponding to the fundamental period of the light receiving image is averaged, and the surface shape of the object 3 to be evaluated is evaluated based on the averaged signal', whereby the detectable range of strain or the like can be expanded. Further, on the back surface 3b of the object 3 to be evaluated, the reflection suppressing layer 20 for suppressing the reflection of the light on the back surface 3b is disposed. Therefore, the influence of the back surface reflection 157408.doc -37-201221901 can be reduced. The image signal from the CCD camera 2 evaluates the surface shape of the object 3 to be evaluated with higher precision. [Examples] Hereinafter, specific examples will be described. (Embodiment 1) FIG. 3 is a schematic view showing a first embodiment of an evaluation apparatus. In the present embodiment, the evaluation device is provided on a transport path of the plate glass 300 serving as a glass substrate as an example of the object to be evaluated. Further, a plurality of driving rollers 2, 1, 202, and 203 for transporting the sheet glass 300 are provided on the transport path. A light source (not shown) is disposed at a position where the stripe pattern 1 is illuminated directly above any one of the drive reports. In Fig. 30, a case where the light is irradiated directly above the drive signal 202 is exemplified. Further, in the present embodiment and the following examples, the refractive index of the sheet glass 3 was set to 15. A water spouting device 210 for ejecting water droplets to the driving roller 202 is provided in the vicinity of the driving roller 202. The water droplets ejected from the water spray device 210 are attached to the surface of the driving roller 202. Since the driving roller 202 rotates in a state in which water droplets adhere thereto, water is present on the back surface 3b of the sheet glass 3 at the position where the stripe pattern 1 is irradiated. Therefore, the state corresponding to the state shown in Fig. 1(B) can be achieved at the position where the light is irradiated. Thereby, the arithmetic unit 4 connected to the CCD camera 2 performs the processing of steps sil to S15 (see FIG. 8) or the processing of steps S21 to S23 (refer to FIG. 14), thereby being not affected by the back reflection image. The surface shape of the sheet glass was evaluated with high precision. Further, the evaluation device is disposed on the transport path of the plate glass 300, but in the present embodiment, the case where the evaluation is performed when the plate glass 300 is conveyed is not necessary, but may be performed on the plate glass 300. The evaluation was performed in a state (stationary state) placed on a stage or the like. Further, instead of the water spray device 210, water droplets may be sprayed onto the surface of the drive roller 202 by other means for attaching water to the surface of the drive roller 2''. For example, a member (for example, a sponge) that can contain moisture can also be brought into contact with the driving roller 2〇2. Further, when the evaluation is carried out while the plate glass 300 is stationary, the member which can contain moisture may be brought into contact with the back surface of the evaluation portion of the sheet glass. (Embodiment 2) Fig. 3 is a schematic view showing a second embodiment of the non-evaluation device. In the present embodiment, the evaluation device is installed on the transport path of the plate glass 300 as an example of the object to be evaluated. Further, a plurality of driving rollers .221, 222, and 223 for transporting the sheet glass 300 are provided on the transport path. A water vapor environment 22 is provided on the back surface of the position where the light source (not shown) illuminates the stripe pattern i (specifically, the back side of the sheet glass 3 to be conveyed). For example, a water vapor chamber formed by exposing the back surface of the sheet glass 300 to water vapor is provided. Therefore, in the position where the light for evaluation is irradiated, water is present on the back surface 3b of the plate glass 300. Therefore, the state corresponding to the state shown in Fig. 1(B) can be realized at the position where the light is irradiated. Thereby, the arithmetic unit 4 connected to the CCD camera 2 performs the processing of steps sn to S15 (refer to FIG. 8), whereby the surface shape of the plate glass 300 can be accurately performed without being affected by the surface reflection image. Evaluation. 157408.doc • 39- 201221901 Furthermore, the evaluation device is disposed on the transport path of the plate glass 300. However, in the present embodiment, it is not necessary to perform evaluation when the plate glass 300 is transported, and it is also possible to mount the plate glass. The evaluation was performed under the state of 300 (state of rest). Further, the steam chamber is filled with water vapor or hot gas, but if the liquid has a refractive index close to the refractive index of the plate glass 300, it may be vaporized with a liquid other than water. (Embodiment 3) Fig. 3 is a schematic view showing a third embodiment of the evaluation apparatus. In the present embodiment, the evaluation device is also disposed on the transport path of the plate glass 300 as an example of the object to be evaluated. Further, a plurality of driving rollers 231, 232, and 233 for transporting the sheet glass 300 are provided on the transport path. A light source (not shown) is provided at a position where the stripe pattern i is irradiated directly above any one or more of the driving rollers. In Fig. 32, a case where the light is irradiated directly above the driving roller 232 is exemplified. For example, the periphery of the metal driving roller 232 is covered with a synthetic resin 232a having a refractive index of 15 to 16. Further, the material of the driving roller 232 itself may be a synthetic resin such as polyurethane. In the third embodiment, at the position where the stripe pattern k is irradiated, the reflection suppressing layer which is substantially equal in refractive index to the sheet glass crucible (in the present embodiment, the synthetic resin 2 and the plate glass are over the back surface 3b). Therefore, the state corresponding to the state shown in Fig. 1(B) can be realized at the position where the stripe pattern is irradiated! Thus, the arithmetic unit 4 connected to the CCD camera 2 executes the procedure~(1) 157408.doc -40 - 201221901 (refer to FIG. 8), the surface shape of the plate glass 300 can be evaluated with high precision without being affected by the back reflection image. (Embodiment 4) FIG. A perspective view of a fourth embodiment of the evaluation apparatus. In the present embodiment, a film having a refractive index of about 1.5 is attached to the back surface of the evaluation portion of the plate glass 300 (corresponding to the position where the stripe pattern i is irradiated). 241. As the film 241, for example, FIXFILM-PTG manufactured by FUJICOPIAN Co., Ltd. can be used. Further, as the synthetic resin 232a of the third embodiment, FIXFILM-PTG manufactured by FUJICOPIAN Co., Ltd. can be used. In the fourth embodiment, Striped in the illumination At the position of the pattern 1, a state in which the reflection suppressing layer (the sheet 241 in the present embodiment) having a refractive index substantially equal to the refractive index of the plate glass 3 is joined to the back surface 3b of the plate glass 300. As a result, the arithmetic unit 4 connected to the CCD camera 2 performs the processing of steps S11 to S15 (see FIG. 8), whereby the surface shape of the plate glass 300 can be evaluated with high precision without being affected by the back surface reflection image. In the above-described embodiments and examples, various materials are exemplified as the reflection suppressing layer. However, the reflection suppressing layer which can be used in the present invention is a substance having a refractive index close to the refractive index of the object 3 to be evaluated. Further, it is preferable that the refractive index of the reflection suppressing layer is the same as the refractive index of the object 3 to be evaluated, but the arithmetic unit 4 can distinguish the dark portion of the surface reflection image from the image signal from the CCD camera 2 and In the bright part, the refractive index may be different, for example, the difference in refractive index may be 0.2 or less. 157408.doc -41 - 201221901 Further, in the above embodiments and examples, the object 3 to be evaluated is used, for example. It is used for flat panel displays such as liquid crystal displays or plasma displays, and glass sheets for glass substrates of solar cells, but can also be used for sheet glass (plain board) or resin used for window glass of automobiles, ships, airplanes, buildings, etc. The present invention is applied to the evaluation of the object to be evaluated, etc. The present invention has been described in detail with reference to the specific embodiments thereof, and it is understood that various modifications and changes may be made without departing from the scope and spirit of the invention. The application of the present application is hereby incorporated by reference in its entirety in its entirety in its entirety in its entirety in [Industrial Applicability] The present invention is preferably applied when evaluating the flatness of the surface of an object to be evaluated. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 (A) and (B) are explanatory views showing the relationship between light incident on an object to be evaluated and light reflected on the surface and the back surface of the object to be evaluated. 2(A) to 2(C) are diagrams schematically showing an example of an image signal output by a camera. 3(A) and 3(B) are a schematic view and a perspective view showing an evaluation device for evaluating the flatness of the surface of the object to be evaluated together with the object to be evaluated. 4(A) to (E) are explanatory views for explaining a method of evaluating the surface shape. Fig. 5 is an explanatory view showing an example of a stripe pattern. Fig. 6 is a block diagram showing an example of a functional block realized by an arithmetic unit 157408.doc • 42· 201221901. Fig. 7 is a (four) diagram showing the state of the photographing surface corresponding to the stripe pattern. Fig. 8 is a flow chart showing a method of evaluating the surface shape of the present invention. Figs. 9(A) to 9(C) are waveform diagrams showing an example of an image signal indicating the brightness of the light receiving pattern and an averaged 彳g. Figs. 10(A) to 10(E) are explanatory views showing the results of measuring the surface shape of one surface by a surface roughness measuring machine for one of the cross sections of each sample. 11(A) to (E) are explanatory views showing the output of the averaging circuit for each sample. Fig. 12 is an explanatory view showing the relationship between the shape value and the measured value. Fig. 13 is a view showing the configuration of another configuration example of the surface shape evaluation device of the present invention. Fig. 14 is a flow chart showing the outline of the evaluation method of the surface shape of one aspect of the present invention. Fig. 15 is an explanatory view showing the measurement state of the corrugated shape of the object to be evaluated. Fig. 16 is an explanatory view showing a state in which the trajectory of the observed reflected image is advanced with respect to the reflected image generated by the ideal plane. The diagram is an explanatory diagram showing a state in which the observed trajectory of the reflected image is delayed with respect to the reflected image generated by the ideal plane. Fig. 18 is an explanatory view showing the relationship between the degree of advancement of the observed trajectory of the reflected image with respect to the case where the reflected image generated by the ideal plane is advanced, and the inclination of the corrugated shape. Fig. 19 is an explanatory view showing the relationship between the degree of delay in the case where the observed trajectory of the reflected image is delayed with respect to the reflected image generated by the ideal plane 157408.doc - 43 - 201221901, and the inclination of the corrugated shape. Fig. 20 is an explanatory view showing the definition of the X-axis and the z-axis. Fig. 21 is an explanatory view showing an optical system used in the simulation. Fig. 22 (A) and (B) are explanatory views showing an example of a corrugated shape and a corrugated shape obtained by simulation of a method for evaluating the surface shape of an aspect of the present invention. Figs. 23(A) and (B) are explanatory views showing a corrugated shape obtained by simulation of another example of a corrugated shape and a method for evaluating a surface shape according to an aspect of the present invention. Fig. 24 is an explanatory view showing an example of the realization of one of the bright points of the movement. Fig. 25 is an explanatory view showing an embodiment of measurement of a corrugated shape over the entire surface of the object to be evaluated. Fig. 26 is a block diagram showing a schematic configuration example of a measuring device for a corrugated shape according to another embodiment of the present invention. Fig. 27(A) shows the result of measuring the surface shape of the object to be evaluated by the surface roughness shape measuring machine, and Fig. 27(B) shows the method of the present invention for the same object to be evaluated in the example 2(B). An illustration of the surface shape obtained. Fig. 28(A) shows the result of measuring the surface shape of the object to be evaluated by the surface roughness shape measuring machine and calculating the absolute value of the differential, and Fig. 28(B) shows the case where the image was taken in Example 3. An explanatory diagram of the absolute value of the offset generated by the basic period of time. Fig. 29(A) shows the results of the surface shape of the object to be evaluated by the surface roughness shape measuring machine 157408.doc 201221901, and Fig. 29(B) shows the result shown in Fig. 28(8) in units of minimum values. An illustration of the shape obtained by positive and negative reversal and obtained by subdivision. Fig. 30 is a schematic view showing a first embodiment of the evaluation apparatus. Fig. 31 is a schematic view showing a second embodiment of the evaluation apparatus. Fig. 32 is a schematic view showing a third embodiment of the evaluation apparatus. Figure 33 is a perspective view showing a fourth embodiment of the evaluation device. Fig. 34 is a view showing a state in which a surface reflection image and a back reflection image are formed. Fig. 35 (A) to (C) are waveform diagrams showing an example of an image signal output from a camera. Fig. 3 (A) to (C) are waveform diagrams showing an example of an image signal output from a camera. Fig. 37 is an explanatory view showing an example of a stripe pattern in the prior evaluation apparatus. Fig. 39 is a flow chart showing an example of determining a stripe pattern and not treating it. Figure 40 (Α)~(〇 indicates the output of the CCD camera 々日俄^唬 Example waveform description [main description of the symbol] Stripe pattern 2 CCD camera 3 evaluated object 3a surface 3b back 4 arithmetic device 5 stripe pattern Point 157408.doc •45 201221901 47 62 100 120a 120b 201 , 202 , 203 , 221 , 222 , 6 7 8 , 8A , 8B , 9 10 , 11 12 , 13 19 ' 26 20 21 22 23 30 41 42 43 44 45 46 Party point light surface path shooting point reflection point reflection image reflection suppression layer laser light source mirror screen lens center input circuit memory shading correction circuit averaging circuit maximum sampling circuit minimum sampling circuit difference operation circuit low brightness part of the light source maximum Value partial minimum portion drive roller 223, 231, 232, 233 157408.doc -46- 201221901 210 water spray device 220 water vapor environment 232a synthetic resin 241 film (sheet) 300 plate glass A, B light C integral constant Li dark portion Width l2 Width of the bright part S11~S37 Step T Difference T, 'T2 Period Wj ' w2 Signal width θ^α'β'γ'δ Angle 1/f Period of darkening 157408.doc •47-