201211558 六、發明說明： 【發明所屬之技術領域】 本發明關於一種用於電路板測試之莰備與方缶 【先前技術】 ▲ 美國專利編號US 2008/0272793 A1中搞— 試無組件式的電路板之指狀物測試器，=一種用於測 試指狀物，該等測試指狀物各具有一測試2至少兩個測 t探針之上具有有一光學侦測裝置二且在每-:二探針中至少一接觸尖端的位置。該_裝：偵測該測 ，元件的-相機模組，其上附著一鏡筒二、有如同感 ^鏡，用於聚焦要被測試之電路板的表^筒包含一 二在該相機模組之另一端處，一鏡面安==組 二反射的光線至該相機模二光學 此，置用於偵測關於該測試探針之探針尖端的位置。依 式，即可達到該探針尖端之準確定位。 置亦^用一光學㈣裝置來檢查測試探針之探針尖端的位 愚示於美國專利編號US 2005/0083038 Α1。 龙美國專利編號US 2008/0272792 Α1中描述_種方法， 偟中要被測試的電路板被光學地掃描，藉此所產生該等影 、CAD負料進行比較。藉此代表有可能修正cAD資料 的錯誤’並相對應地正確設錢㈣f路板測試點，其 真正的電路板中已在型式上及/或種類上（經由孔、墊區域） 偏離該CAD資料。 201211558 在歐洲專利EP 1 186 898Β1中描述 試的方法，其中㈣發生電路板贱 ^於電路制 t 域中彼此位置靠近的電路板測試點 == 斷路。剩餘的電路板測試點即被電 ^州專利ΕΡ 1 623 242 Β1揭示一種使用指狀物測試器 =式非組件式電路板的方法。該等個別的測試指狀物具 有探針尖端。藉㈣轉針尖端接_料職之電路板 的表面之時間與位置，即可判定它們的位準。然後所判定 的位準用於㈣其它的接觸㈣。此方法特财利於並非 完全平坦之電路板，特別是軟性電路板。 CANON公司具有產品商標名稱為digisupER 27AF、DIGISUPER 86AF 及 DIGISUPER 100AF 鏡片，用 於藉助相位而利用一自動聚焦裝置之HDTV(High201211558 VI. Description of the Invention: [Technical Field] The present invention relates to a device and a method for testing a circuit board [Prior Art] ▲ US Patent No. US 2008/0272793 A1 - Test a componentless circuit a finger tester for a board, = a test finger, each of which has a test 2 at least two test probes having an optical detection device 2 above and at each: - two At least one of the probes contacts the position of the tip. The _ loading: detecting the test, the component-camera module, to which a lens barrel is attached, and the mirror is used to focus on the circuit board to be tested, and the camera module includes one or two in the camera module. At the other end, a mirrored surface == group two reflected light to the camera mode optically, which is used to detect the position of the probe tip with respect to the test probe. According to the formula, the accurate positioning of the probe tip can be achieved. The position of the probe tip of the test probe is also checked by an optical (4) device. U.S. Patent No. US 2005/0083038 Α1. Long US Patent No. US 2008/0272792 Α1 describes a method in which a circuit board to be tested is optically scanned, whereby the shadows and CAD negatives produced are compared. This means that it is possible to correct the error of the cAD data' and correspondingly set the money (4) f-board test point, the true circuit board has been deviated from the CAD data on the type and / or type (via the hole, pad area) . A method of testing is described in the European Patent No. EP 1 186 8 981, wherein (d) circuit board 发生 ^ board test points in the circuit t domain are located close to each other == open circuit. A method of using a finger tester = a non-component circuit board is disclosed in the patent document ΕΡ 1 623 242 Β1. These individual test fingers have a probe tip. By means of (4) the time and position of the surface of the circuit board of the turn-on pin, the position of the board can be judged. The level determined is then used for (iv) other contacts (4). This method is particularly advantageous for boards that are not completely flat, especially for flexible boards. CANON has product names under the trade names digispiER 27AF, DIGISUPER 86AF and DIGISUPER 100AF lenses for HDTV (High) using an autofocus device with phase
Definition TV，高晝質電視）照相，可進行被動式自動聚焦 (參照 www.canon.com/bctv/faq/aft.html 中所述「TTL· 次級 影像註冊相位偵測系統」(TTL Secondary Image RegistrationDefinition TV, high-definition TV) for passive autofocus (refer to “TTL· Secondary Image Registration Phase Detection System” (www.canon.com/bctv/faq/aft.html)
Phase-Detection System))。 歐洲專利EP 1 122 546 A2揭示一種使用電性接觸指狀 物與光學偵測裝置進行電路板測試的設備。該光學偵測裝 置包含在其上安裝有一鏡面的外殼，一相機與一光源’及 一加長的鏡筒。該光學偵測裝置樞軸式地固定於一測試頭。 【發明内容】 201211558 本發明基於上述這樣的問題發明出的設備，其可使得 電路板的測試可更有效率，特別是甚至更快及/或更為準 確。 具有與申請專利範圍第！項相關特徵的設備，旅藉由 f有財請專雜圍第19 __徵的方法可解決該問 題。較佳地發明在相關的申請專利範圍附屬項中提出。 根據本發明之電路板測試設備包含 .-測試區域，其中可放置要被測試的一電路板’ -至少一横樑，其配置與該測試區域有一距離並與其大 致平行， -至少-滑塊’其可沿著該橫樑移動， —光學_裝置’其安裝在該滑塊上， -一旋轉裴置，用於環繞大致垂直於該測試區域的一旋 轉轴來旋轉該光學偵測t置。 該光學偵測裝置具有一光學偵測元件，其位在一鏡筒 端處女裝在該鏡筒上、在最遠離該偵測元件的末端 處為一鏡面，以將光線由該偵測元件導引至該測試區域， 或由該測試區域導引至該偵測元件，且該鏡筒包含至少一 光學元件’用於將該偵測元件聚焦到位在該測試區域中一 電路板的表面上。 此設備之特徵在於該偵測裝置具有一自動聚焦裝置， 藉以將該偵測元件自動地聚焦至位在該測試區域中一電路 板的表面上。 由該光學偵測元件記錄的影像之品質可透過使用自動 201211558 聚焦裝置而顯著地改善。依此方式’可能更快速地掃描該 等個別影像，及/或掃描要測試之電路板的一較大區域。如 此對於電路板測試方法可顯著地增加其效率。此外，透過 具有一自動聚焦裝置’亦可能對於並非完全平坦的電路板 進行可靠的光學掃描。因此’根據本發明之設備亦適用於 測試組件式電路板（等於組合件）。再者，由於聚焦係可自動 地調整，通常具有某種程度起伏的軟性電路板即可可靠地 進行光學掃描。Phase-Detection System)). European Patent EP 1 122 546 A2 discloses an apparatus for conducting circuit board testing using electrical contact fingers and optical detection means. The optical detecting device includes a housing having a mirror surface mounted thereon, a camera and a light source' and an elongated lens barrel. The optical detecting device is pivotally fixed to a test head. SUMMARY OF THE INVENTION 201211558 The present invention is based on the above-described problems, which enable the testing of circuit boards to be more efficient, especially even faster and/or more accurate. Has the same scope as the patent application! For the equipment related to the feature, the brigade can solve the problem by using the method of the 19th __. Preferred inventions are set forth in the dependent claims. A circuit board test apparatus according to the invention comprises a test area in which a circuit board to be tested can be placed - at least one beam, the configuration being at a distance from and substantially parallel to the test area, - at least - a slider It can be moved along the beam, an optical device is mounted on the slider, a rotating device for rotating the optical detection t about a rotation axis substantially perpendicular to the test region. The optical detecting device has an optical detecting component, which is located at the end of the lens barrel and is a mirror surface on the lens barrel at the end farthest from the detecting component to guide light from the detecting component. Leading to the test area, or from the test area to the detecting component, and the lens barrel includes at least one optical element 'for focusing the detecting element on a surface of a circuit board in the test area. The apparatus is characterized in that the detecting means has an autofocus means for automatically focusing the detecting element on a surface of a circuit board in the test area. The quality of the image recorded by the optical detection element can be significantly improved by using the automatic 201211558 focusing device. In this way, it is possible to scan the individual images more quickly and/or scan a larger area of the board to be tested. This can significantly increase the efficiency of the board test method. In addition, it is also possible to perform reliable optical scanning of a board that is not completely flat by having an autofocus device. Thus the device according to the invention is also suitable for testing modular circuit boards (equal to the assembly). Moreover, since the focusing system can be automatically adjusted, a flexible circuit board having a certain degree of undulation can be reliably optically scanned.
透過使用一自動聚焦裝置’即可至少存取該偵測元件 與該掃描表面之間的相對距離。因此，即可決定在該掃描 區域處要測試之電路板的位準。類似於歐洲專利EP 1 623 242 B1中揭示的利用測試指狀物接觸電路板測試點的方 法’這允許依照藉助於該光學偵測裝置所決定之位準來控 制。因為使用這種光學摘測裝置’在該電路板上不同點處 的位準可被非常快速地偵測’並可產生該電路板及/或組合 件之位準的樣式模蜇’用於控制該電性接觸之接觸指狀物 的移動。此模型例如可藉由一或多個樣條函數來表示。根 據本發明之光學偵測裝置亦適合配合美國專利編號US 2008/0272793 Al、US 2005/0083038 Al、US 2008/0272792 A1與歐洲專利編號EP i 186 898 B1中所揭示之該等方法 來使用。 根據本發明另—種態樣，其可單獨執行或是結合於 述之本發明㈣樣來執行，該光學勤禮置亦如此安裝 該'月塊上’、中該旋轉轴位在靠近於包含該光學偵測褒 201211558 之單元的重心’該鏡筒在其中包含有該等光學it件。「靠近」 代表該旋轉轴與該重心之間的距離並未超過此單元之整體 長度的1G/。|較佳地是不大於此單元之整體長度的5%。 因為該光學_裝置通常為此單it中最重的it件，該旋轉 軸被發現是在該光學仙m置附近，或甚至通過該光學偵 測裝置。因為此單S的重量主要集中在該光學偵測裝置 中，整個慣性力矩較小，因此該重量的一大部份非常靠近 於該旋轉軸。這代表此單元（以下稱之為光學測試指狀物） 可以非常快速地旋轉，並精確地旋轉到所需要的位置處。 較佳地是，此光學測試指狀物具有其本身的旋轉裝 置，其僅致動該光學測試指狀物，而不會致動任何用於電 性接觸一電路板測試點的任何電性測試指狀物。 該設備可具有複數個電性測試指狀物，及一或多個光 學偵測指狀物。較佳地是，其具有兩個光學偵測指狀物， 其中在每一例中安裝一光學偵測指狀物，藉以掃描要測試 之一電路板或組合件的一侧。該設備亦可能僅具有一個或 複數個光學測試指狀物。然後要測試之電路板的電性測試 可在一不同的測試設備中進行。 該自動聚焦裝置較佳地是一主動式自動聚焦t置，其 具有一光源可放射被導引至該電路板的某個區域上之光 線。此光線被稱為前導光線。自該電路板反射的該前導光 線由該光學元件偵測到’並在一控制單元中進行分析。該 分析例如藉由偵測在該影像中一特定圖樣或藉由具有某種 光學特性的影像來進行’例如像是在該圖樣中一預定的間 201211558 隔（等於三角測量）或是一預定的對比。此對比例如可由一頻 率分析所發現，例如傅立葉分析，其中被強調的對比經由 某個較高頻率之成分來決定。 亦有可能藉助於周遭光線來偵測某些光學特性，例如 像是對比或相位。因為為此目的不需要前導光源，此被稱 之為被動式自動聚焦。 該偵測裝置可具有一光源來照射該電路板的一預定區 域。此光源可獨立地於該自動聚焦裝置中被具有，並可為 例如放射白光的一發光二極體。此光源較佳地是安裝在該 偵測元件旁，藉以透過一分光鏡供給到由該偵測元件通到 該測試區域的一光線路徑當中。該偵測元件較佳地是位在 此光線路徑之直線延伸上該分光鏡的後方，所以該偵測元 件可被供給出現在該分光鏡前方之光線的大約50%。該光 源及該自動聚焦裝置之任何其它前導光源之光線藉由鏡 面、棱鏡或類似者導引到該分光鏡，並由該處通過該鏡筒 到另一鏡面，藉此該等光線射線被導引到要測試之電路板 或組合件上。 較佳地是該光學偵測元件、該前導光源與該照明光源 被整合成一單一本體，較佳地是一塑膠或鋁質本體。 根據本發明之光學測試指狀物或使用這種光學測試指 狀物測試電路板之設備可依以下方式使用，即在該光學測 試指狀物移動期間，後者被保持在定焦，所以在到達要測 試的點時，該光學測試指狀物已經聚焦，且該光學測試可 以沒有延遲地進行。於該測試指狀物的移動期間之聚焦較 201211558 佳地是藉由—封_㈣㈣來 【實施方式] 本發明將在以下藉由示例及藉助圖式來詳細闡釋，其 中· ，據本發明之用於電路板夠試㈣備（測試設備1)可 :心狀物測試器i(第5圖），其具有複數個電性接觸指狀 物^用於電性接觸一測試中裝置2。接觸指狀物3之每-者文裝在滑塊4上，其可沿著—或多個橫樑5移動。橫 樑5橫跨-測試區域6，其中具有有安裝⑽7用於安裝測 試中裝置2。橫樑5配置成大致平行於測試區域6，並可具 有一往復運動裝置’所以它們可在平行於_區域6的一 平面上與它們的縱轴呈直角地移動。橫樑5亦有可能為不 可移動。然、後較佳地是在每—滑塊4上具有_旋轉裝置， 其邊夠壤繞與測試區域6大致為直角的_旋轉軸來旋轉該 等電性接觸指狀物，所㈣等個㈣接觸指狀物可以通過 鄰接於橫樑5的一區域之上。 不論指狀物測試器1的設計為何，測試區域6中任何 需要的點皆可由一電性接觸指狀物3接觸。 滑塊4較佳地是使用具有長期穩定度之高精度球型的 線性導軌來安裝在橫樑5上。這些可具有陶瓷滾珠軸承。 該驅動裝置較佳地是一線性馬達。這允許滑塊有相當快速 與精確的移動，並憑藉此將接觸指狀物3定位。 較佳地是電性接觸指狀物3之旋轉裝置之旋轉軸亦安 201211558 裝在一精密的滾珠軸承上。 、除了使用一精密滚珠軸承將該等滑塊安裝在該等橫樑 上並安裝該旋轉裝置的該旋轉軸之外，亦可能使用空氣軸 承來安裝這些元件。 根據本發明之測試設備1除了電性接觸指狀物3之 外’具有至少一個光學測試指狀物8(第1·4圖）’且較佳地 是複數個。 光學測試指狀物8用於測試中裝置2的光學掃描。就 像是電性接觸指狀物3之一者，其藉由一旋轉裝置被可旋 轉式地安裝在該等滑塊4之一上。滑塊4與光學測試指狀 物8之旋轉裝置被設計成實際上類似於電性接觸指狀物3 之滑塊4與該等旋轉裝置。 光學測試指狀物8具有一光學偵測裝置9、一管狀鏡筒 10與一鏡面11(第3、4圖）。附著於鏡筒1〇之一端的為光 學偵測裝置9。在鏡筒1〇的另一端處為鏡面u。鏡筒1〇 具有鏡面11之末端被稱之為自由端12。 在本具體實施例中，鏡筒1〇之長度為370 mm。在本 發明的内谷中’鏡筒10較佳地長度為至少150 mm，更佳 地是至少200 mm，最佳地是至少300 mm。鏡筒10愈長， 由一光學測试指狀物8所覆蓋的面積亦會愈大。但是，鏡 筒10可能不具任何所需的長度，因為非常長的鏡筒在當光 學測试指狀物8環繞該垂直旋轉軸旋轉時即增加其慣性力 矩。再者，一非常長的鏡筒10將使得鏡筒10之自由端在 測試區域6之上的定位更加困難，因為即使是在該旋轉裳 201211558 置之旋轉角度中有非常小的公差皆會造成鏡筒10之自由端 處有大的轉向。 鏡筒1 〇由一或多個銘質或纖維強化塑膠之管狀段構 成。在本具體實施例中，鏡筒10具有三個管狀段，其直徑 朝向該自由端變小。 鏡面11被安裝在與鏡筒1〇隔開的—鏡面支架13中， 其中鏡面11配置成相對於鏡筒10之縱向轴呈4〇到55度 的角度。在鏡面支架13中…開口或孔洞14相對於鏡: U之反射面而構成（第1圖）。該鏡筒不需要配置成精確地 平打於要測試的該電路板。在本具體實施例中鏡筒 自由端12的方向上朝向該電路板傾斜大約5度。所以來白 該鏡筒之光線射_大約直角撞擊料路板，該鏡面傾斜 安裝在鏡筒10中鄰接於鏡面u的是一顯微鏡 15。顯f鏡片系統15包含複數個鏡片，較佳地是由塑^ 的放大率。 、有-咖，藉此裝置達到強, 一管透鏡16大致位在鏡筒10之縱向中心處。利田 透鏡16,顯微鏡片系統15 ”用1 裝置”-光學偵測元件Γ7上擬_重現在〜 管透鏡16可由-或多個個職片構成。就像 片系統⑴管透鏡16較佳地是由塑膠鏡片形成 ^ 個別鏡片之重量較低。 乂該奏 鏡筒10之縱向軸18代表街於顯微鏡片系統15、警$ 201211558 鏡16與光學偵測元件17之光學軸。因此這三個元件相對 於彼此在一直線上對準。 光學偵測裝置9具有一基座本體19，其由輕量材料製 成’例如鋁或塑膠。在基座本體19中形成的是一中央鏡筒 孔20。如此基座本體19連接至鏡筒i〇 ’使得鏡筒孔2〇呈 現與光學軸18共心。鏡筒孔20為一速續的通孔。光學偵 測元件17位在鏡筒孔20中與鏡筒10踉離最遠的側邊上。 光學偵測元件17可為一影像感測器’特別是一 CCD (Charge-coupled device，電荷耦合元件）感測器’或是一相 機模組’其具有這種影像感測器及其它電子組件用於影像 處理。光學偵測元件17連接至一微處理器控制單元，其可 為一早晶片系統或是'一電腦。該微處理器控制早元包含用 於自動影像處理由該光學偵測元件所產生的該等影像之軟 形成在鏡筒孔20相對於光學偵測元件17的側邊上、 基座本體19上的為一凸緣21，用於連接光學偵測裝置9 至鏡筒10。此凸緣21形成光學偵測裝置9的光學輸入。 與鏡筒孔20呈直角益鄰接於該光學輸入的是一光學通 道22,其具有一長方形或正方形橫戴面，並由基座本體 的一邊緣區域延伸到鏡筒孔20當中。 引入到此光學通道22中的為位於鄰接鏡筒孔2〇的一 照明孔23。 形成在照明孔23相對於鏡筒孔20的側邊上為一前導 光線孔24 ’其亦通到光學通道22當中。前導光線孔24、 12 201211558 照明孔23與鏡筒孔20配置成彼此平行。於基座本體19之 後緣處引進的為一後前導光線孔25，其與光學軸18呈直 角，並於一端處開放進入到前導光線孔24。後前導光線孔 25合併到較小直徑的一前導光線供給孔26，其以直角在基 座本體19中導引與夾持一前導光源28的一腔室27 一樣 遠。該前導光源為一發光二極體或一半導體雷射。該前導 光源較佳地是放射某種顏色的光線。在一原变中，一前導 光源其係使用玫射紅光。 在光學通道22與鏡清孔20相交的區域中具有一分光 鏡29，其变式為具有一二角基座的—平直棱鏡。該三角基 座的形狀為一等邊三角形’其具有一底側39與兩邊侧，該 等兩個邊側定義45度角。底側39被覆有一半反射鏡。該 半反射鏡例如為一薄銀所被覆。底側39配置成與光學軸U 及光學通道22之縱向轴呈45度角。與該光學軸呈45度的 有鏡面的底侧39之配置的效果為沿著光學軸18被導引通 過該鏡筒並撞擊在該分光鏡上的一光線射線集中可以其光 線強度的50%之直線來通過後者。 鄰接於分光鏡29的底侧39為一第一進給棱鏡30。該 第一進給稜鏡為一具有一正方形基座的一傾斜棱鏡’所以 其側面可配合與分光鏡29之底側39齊平。第一進給稜鏡 30配置有朝向光學偵測裝置9之光學輸入的一基底，而另 一基底與照明孔23齊平。相對於底側39的側面設計成第 一鏡面表面40。此第一鏡面表面40由一介電質鏡面被覆構 成，其對於來自前導光源28的光線(此處為紅光)為透明， 13 201211558 並對於其餘的波長範圍皆具有良好的反射特性。 一第二進給稜鏡31配置成平行於該第一進給稜鏡。第 二進給稜鏡31具有與第一進給稜鏡30相同的型式，其中 第二進給稜鏡31具有一側面與第一進給稜鏡30的第一鏡 面表面40為齊平。兩個進給棱鏡30、31之每一者都將它 們的基底配置在—共通平面上。該第二進給稜鏡配置有與 前導光線孔24齊平的一基底面。第二進給稜鏡31相對於 鏡面表面40的侧面設計成第二鏡面表面41。此第二鏡面表 面41包含幾乎可完全反射光線的一銀所被覆。 具有部份透明的鏡面之基底側39、第一鏡面表面40 與第二鏡面表面41係配置成彼此平行，所以在每一例中， 匕們被安果^成與光學通道22的縱向軸呈45度角。 分光鏡29與兩個進給稜鏡30、31之每一者都由一光 子透月材料t成’特別是玻璃或像是聚碳齡旨的透明塑膠。 &在照明孔23中的為-光源32與-物鏡33。光源32 具有-放射自麵發光二極體 ，其中光源32配置成來自該 光源的光線朝向第—進給稜鏡3G輻射。此光線通過安裝在 第-進給稜鏡30旁的物鏡33。物鏡33可聚焦光線。在第 -鏡=表Φ 40處’該光線朝向分光鏡29的基底側％反射。 來自分光鏡29的基底侧39冑來自光源32 #光線之光線強 度的5〇%沿著光學轴18被反射到鏡筒10 f中。此光線用 於照明：試中的該I置，因此稱之為照明光線。 在刚導光線供給孔26的角落區域與光學偵測裝置9的 角落區域+後μ導光線孔通到前導光線孔當中， 201211558 在每一例中有一第一鏡面34與一第二鏡面35。如此對準兩 個鏡面34、35，使得來自前導光源28的光線被導引通過前 導光線供給孔26、後前導光線孔25與前導光線孔24到第 二進給稜鏡31處。 一孔洞36位在第二鏡面35與第二進給稜鏡31之間的 區域中。 孔洞36具有一孔洞圖樣，例如像是兩個圓形隔膜開 口，所以來自該前導光線之光線射線的一錐體，例如形成 兩個圓形光線射線集中。在本發明之範圍内，在該孔洞中 亦可具有其它圖樣與結構，例如像是十字、直線或類似的 圖樣。該前導光線自孔洞36抵達，並到達第二進給棱鏡 31。來自第二進給稜鏡31相對於第一進給棱鏡30的一邊 界表面，該光線朝向分光鏡29反射，其中其(該光線)在分 光鏡29與第一進給稜鏡30之間的該邊界面處被反射到鏡 筒10當中。 因此兩個進給稜鏡30、31協同於型式為一棱鏡的分光 鏡29，依此方式該前導光線或照明光線被供給到光學偵測 元件17之光線路徑當中，到達鏡筒10之自由端12處的鏡 面11。此光線由鏡面11導引朝向測試區域6。 此光學偵測裝置9在型式上非常小型。有助於此小型 設計的是分光鏡29、第一進給棱鏡30與第二進給稜鏡31 的特殊配置，其可允許要被偵測的光線之光線路徑通到光 學偵測元件17，來自光源32的照明光線與來自前導光源 28的前導光線之特殊配置，彼此之間有儘可能最窄的空 15 201211558 間，甚至部份交叉，並經由鏡筒ίο供給到該光線路徑中。 此小型設計亦使得光學偵測裝置9的重量可能很輕。光學 偵測裝置9的一功能性原型之重量為220公克。 由於事實上光學偵測元件17位在光學軸18上，來自 該鏡筒的光線以直線通過分光鏡29，所以在該分光鏡處僅 損失50%的光線強度。原則上，亦可能將該光學偵測元件 配置在該前導光線或該照明光線之光線路徑的區域中。雖 然在此例中，在該光學偵測元件處的光線強度將會更為急 劇地降低。 在本具體實施例中，包含光學偵測裝置9與鏡筒10的 光學測試指狀物8藉由一轉環裝置37(第1圖）固定至一滑 塊的旋轉裝置38(未示於第1圖）。轉環裝置37用於環繞平 行於測試區域6的一轴心旋轉光學測試指狀物8,所以自由 端12可用與測試區域6之間變化的間隙配置。該轉環裝置 具有一調整元件，所以光學測試指狀物8可在電子控制之 下被旋轉。 在操作時，首先前導光源28用於產生由孔洞36形成 並被導引到測試中裝置2之前導光線。該光線圖樣由測試 中裝置2反射，該反射光線的一部份由鏡面11導引到光學 偵測裝置9，在該處其由光學偵測元件17偵測到。在本具 體實施例中，孔洞36具有兩個圓形隔膜開口，其可產生兩 束的光線射線。前導光源28與分光鏡29之間延伸的距離 位在光學偵測元件Π之後的遠處。該前導光源的再生不會 因此發生在光學偵測元件17的表面上，所以該等兩束光線 201211558 ^線產生兩個隔開、模糊的圓形光點仏、微(第6_圖) 在光學偵測树17的感光表面上。兩個光點·、之 門的中〜到中心之距離為測試中裝置2與光學摘測元件^ =直接測量的距離。第的圖顯示測試中装置與光學偵測元 Η7之最適距離下的兩個光點。在第仍圖中，兩個光點 42a、42b之中心到中心距離為3贿。在第如圖中測試 中裝置2自該最適距離偏離_Q2mm，所以兩個光點d 似配置成彼此靠近。在第&圖中，測試中裝置2相對於 該最適距離偏離+0.2 mm，所以兩個光點423、仙彼此更 遠離。因為光點42a、42b之距離由它們的中心或重心進行 測量’兩個光科需要描_成在光學_元件17上具有一 尖銳邊緣。 -最適距離為光學偵測裝置9與測試中裝置2之間的 距離，其可允許該測試中裝置藉由光源32的照明光線而尖 銳地描繪在光學偵測元件17上。 使用此測量程序，其對應於一三角測量，重要的是前 導光源28、職巾裝置2與光學彻j元件17之_光學路 徑可與由光源32到測試中裝置2與光學偵測元件17之光 學路徑適當地區分。在本具體實施财，該前導光線的光 學路徑比該照明光線的光學路徑要長。所以光學偵測裝置9 所需要之整體間隙可保持很小，該前導光線之光學路徑與 鏡面34、35及與第二鏡面表面41有角度。 光點42a、42b之距離不僅是測試中裝置2的位置與該 最適位置之偏差的測量，亦指出該測試中裝置必須被移動 17 201211558 來到達該最適位置的方向。因此，光學測試指狀物8可用 有目的之方式被旋轉朝向該最適位置。此可允許測試指狀 物8與測試中裴置2分別進行非常快速的最適對準。已經 顯示出光學測試指狀物8可以如此快速地調整，使其能夠 在一封閉控制迴路中被導引。此可用於例如將該光學測試 指狀物在其移動期間維持在聚焦，所以在到達要測試的點 時’光學測試可以沒有延遲地開始。 因此’前導光源28、孔洞36、光學偵測裝置9與轉環 裝置連同該微處理器控制單元形成一主動式自動聚焦裝 置。 …、 如果光學測試指狀物8被最適地定位，因此光學偵測 元件17與照明光源32被準確地聚焦，則前導光源28被關 閉，而光源32被開啟以產生該照明光線。該照明光線被供 給到該鏡筒，由鏡面11導引到測試中裝置2上，而該照明 光線的一部份由鏡面11被導引回到光學偵測裝置9，並到 達光學偵測元件17上。光學偵測元件17產生該測試中裝 置的一影像。由於該自動聚焦事先就進行，該影像非常鮮 明與精確。利用一原型，測試中裝置的〇.5 mmx〇 5 之 目標區域將用一百萬像素的解析度以彩色掃描。焦點深度 大約為3 μιη。此代表該自動聚焦必須在最高+/_〖5 的 公差下操作以產生正確的影像。利用該原型，可得到大約 0.5 μιη之聚焦精度。 該原型的光學偵測元件17產生具有1292 χ 964個影像 點之影像。在聚焦時，僅使用例如1292 χ 2〇〇個影像點之 201211558 為了 狀 區段。此小影像區段可比整個影像更為快速地處理 追蹤測試中裝置中任何+/-20 μιη的起伏，該光學測試^ 物需要僅旋轉通過+/_ 50 mrad的角度。 曰 電略 可 實際上整個可能的旋轉範圍可允許自由端12輿兮 板的距離有+/_ 〇.5 mm的變化。利用該自動聚焦襄置1 解決距離在大約+/- 0.25 mm到大約+/- 〇·3 mm之在 化。大約0.25 mm的距離變化對應於大約+/_ 〇 7 μ _ mrad ^ 旋轉範圍。在這樣小的角度變化之内，不會發生可^。 測量的失真° 使用光學測試指狀物8’測試中裝置2之相當大的p 、 可用高速與高精度進行光學掃描。 、區域 如果光學測試指狀物8之旋轉角度被確定，則由〜 定基準點到該掃描表面之距離可藉由簡單的三角學轉預 計算。藉此方式，於利用光學測試指狀物8的光學掃.來 間，除了該測試中裝置的精確影像之外，其高度輪期 被確定。 1 依此方式掃描的一電路板或組合件可由電性接觸指狀 物3而非常快速與可靠地接觸，因為不僅是位置，且該等 電路板測試點的型式與關及該f路板之高度輪廓亦可由 該記錄的資料得知。 卜由於該等影像之高解析度，該電路板之初步光 子'則試可能已經完成，所以在該電路板中特定的缺陷可被 光子地侦測。原則上，亦可能使用光學測試指狀物8來進 们·電路板或組合件之習知純粹的光學檢測。但是，由於 201211558 利用該高解析度光學測試指狀物（1292 x 964個影像點）所 產生的大里資料，較較佳地是僅選擇性地測試該電路板的 特定區段。 光學測試指狀物8特別適用於測試中的輪廓狀部份的 光學掃描，該等部份例如像是軟性電路板，其永遠在測試 或組合的一個方向上配置有某種程度的起伏。 第5圖所示的設備為一指狀物測試器，其具有複數個 電性接觸指狀物3與一光學測試指狀物8。在本發明的範園 内，亦可能裝設一測試設備，其僅具有—個或複數個光學 測试指狀物8，該指狀物就像是一習知的指狀物測試器般橫 跨一測試中的裝置之上。 由於該滑塊與該旋轉裝置之精密安襞，該光學測試指 狀物可非常迅速與精密地移動。尤其是，其可非常快速地 加速與減速。 該前導光源較佳地是一彩色發光二極體，特別是發出 、、工色光線的一發光一極體。如此可使該前導光線立即被看 到，並可與該照明光線區別。該光線圖樣之尺寸係製造為 其與該測試中裝置的結構無關。這代表該圖樣之該等個別 元件必須確實地大於該測試中裝置的結構。除了偵測在該 光線圖樣中預定的形狀，亦可能偵測其它實體參數，例如 像是該光線圖樣中的對比。如果例如產生一長條狀的光線 圖樣’則可使用一傅立葉分析來決定該頻率分佈。高頻率 的大部份代表一高的對比度。如果偵測到高頻率的某個部 份’這代表該測試中裝置上的圖樣具有—預定的高對比， 20 201211558 且光學測試指狀物8被精確地聚焦。 在以上的具體實施例中’該聚焦藉由旋轉光學測試指 狀物8來設定。由於該光學測試指狀物之大的長度，所以 紅轉角度的變化很少有任何失真。在本發明的範圍内，除 了一轉環裝置之外，仍亦有可能具有其它元件來調整聚 焦。例如光學偵測元件17可具有一調整元件，其能夠改變 光學偵測元件17的軸向位置。藉此方式’可改變光學偵測 元件17與測試中裝置2之間的光學路徑之長度。該測試中 裝置的高度亦可藉助於光學偵測元件17之移動來決定。 聚焦亦可藉由一可適當調整的物鏡來實現。但是，較 佳地是具有該物鏡之可調整鏡片儘可能靠近光學偵測裝置 9之基座本體19或位在其中，因為該相關的調整機構可能 使得整個光學偵測裝置9相當地重。 該轉環裝置之機構較佳地是一馬達，其驅動一在具有 固體接合點的四連桿上作用之偏心輪。這種轉環機構僅會 非常小的轉動，並允許該旋轉角度有非常精確的設定。 在以上的具體實施例中，該照明光源被整合在該光學 偵測裝置中。在本發明之範圍内，亦可能使用與該^學二 測裝置隔開的一照明裝置。這種照明裝置例如可^干一 學測試指狀物8之自由端12上。較佳地是其型式為戶2光 暗視場照明，其儘可能產生無摻雜陰影之光線，&中 複數個光源被配置成環繞光學測試指狀物8之孔、;同W 個圓形上。 21 201211558 【圖式簡單說明】 第1圖為一連同該旋轉裝置之一部分的光學測試指狀 物透視圖。 第2圖為第1圖之光學測試指狀物不具有一轉向鏡的 前視圖。 第3圖為第1圖之光學測試指狀物沿著根據第2圖之 線A-A的縱向截面下視圖。 第4圖為第3圖之光學測試指狀物的偵測裝置放大圖。 第5圖為使用一光學測試指狀物之電路板測試設備的 不意圖。 第6a-6c圖分別為由一偵測元件偵測到前導光線之光 線圖樣。 【主要元件符號說明】 1 指狀物測試器 2 測試中裝置 3 接觸指狀物 4 滑塊 5 橫樑 6 測試區域 7 安裝元件 8 光學測試指狀物 9 光學偵測裝置 10 鏡阂 22 201211558 11 鏡面 12 自由端 13 鏡面支架 14 孔洞 15 顯微鏡片系統 16 管透鏡 17 光學偵測元件 18 光學軸 19 基座本體 20 鏡筒孔 21 凸緣 22 光學通道 23 照明孔 24 前導光線孔 25 後前導光線孔 26 前導光線供給孔 27 腔室 28 前導光源 29 分光鏡 30 第一進給稜鏡 31 第二進給稜鏡 32 光源 33 物鏡 34 第一鏡面 23 201211558 35 第二鏡面 36 孔洞 37 轉環裝置 38 旋轉裝置 39 底側 40 第一鏡面表面 41 第二鏡面表面 42a 光點 42b 光點 24At least the relative distance between the detecting element and the scanning surface can be accessed by using an autofocus device. Therefore, the level of the board to be tested at the scan area can be determined. A method of contacting a test board with a test finger as disclosed in European Patent No. EP 1 623 242 B1, which allows control in accordance with the level determined by means of the optical detection device. Because the use of such optical pick-up devices 'levels at different points on the board can be detected very quickly 'and can produce the pattern of the board and / or assembly level pattern ' for control The movement of the contact fingers of the electrical contact. This model can be represented, for example, by one or more spline functions. The optical detection device according to the invention is also suitable for use in conjunction with such methods as disclosed in U.S. Patent No. US 2008/0272793 Al, US 2005/0083038 Al, US 2008/0272792 A1 and European Patent No. EP 186 898 B1. According to another aspect of the present invention, it may be performed separately or in combination with the fourth aspect of the present invention, and the optical device is also mounted on the 'month block', and the rotating axis position is close to the inclusion. The center of gravity of the unit of the optical detection 褒201211558 'the lens barrel contains the optical components therein. "Close" means that the distance between the axis of rotation and the center of gravity does not exceed 1 G/ of the overall length of the unit. | preferably no more than 5% of the overall length of the unit. Since the optical_device is usually the heaviest one of the single it, the axis of rotation is found to be near the optical, or even through the optical detection device. Since the weight of the single S is mainly concentrated in the optical detecting device, the entire moment of inertia is small, so that a large portion of the weight is very close to the rotating shaft. This means that this unit (hereinafter referred to as an optical test finger) can be rotated very quickly and precisely rotated to the desired position. Preferably, the optical test finger has its own rotating device that only actuates the optical test finger without actuating any electrical test for electrically contacting a circuit board test point. Finger. The device can have a plurality of electrical test fingers and one or more optical detection fingers. Preferably, it has two optical detection fingers, wherein in each case an optical detection finger is mounted to scan one side of a circuit board or assembly to be tested. The device may also have only one or a plurality of optical test fingers. The electrical test of the board to be tested can then be performed in a different test equipment. The autofocus device is preferably an active autofocus t-set having a light source that emits light that is directed onto a region of the circuit board. This light is called the leading ray. The leading light reflected from the board is detected by the optical component and analyzed in a control unit. The analysis is performed, for example, by detecting a particular pattern in the image or by an image having certain optical characteristics, such as, for example, a predetermined interval of 201211558 (equal to triangulation) or a predetermined one in the pattern. Compared. This comparison can be found, for example, by a frequency analysis, such as a Fourier analysis, where the emphasized contrast is determined by a component of a higher frequency. It is also possible to detect certain optical properties, such as contrast or phase, by means of ambient light. Since no leading light source is required for this purpose, this is referred to as passive autofocus. The detecting device can have a light source to illuminate a predetermined area of the circuit board. This light source can be independently provided in the autofocus device and can be, for example, a light emitting diode that emits white light. Preferably, the light source is mounted adjacent to the detecting element, and is supplied through a beam splitter to a light path leading from the detecting element to the test area. Preferably, the detecting element is located behind the beam path of the light path, so that the detecting element can be supplied to about 50% of the light appearing in front of the beam splitter. The light source and the light of any other leading light source of the autofocus device are guided to the beam splitter by a mirror, a prism or the like, and pass therethrough to the other mirror surface, whereby the light rays are guided Lead to the board or assembly to be tested. Preferably, the optical detecting component, the pre-light source and the illumination source are integrated into a single body, preferably a plastic or aluminum body. An optical test finger or apparatus for testing a circuit board using such an optical test finger can be used in such a manner that during the movement of the optical test finger, the latter is maintained at a fixed focus, so upon arrival At the point to be tested, the optical test finger has been focused and the optical test can be performed without delay. The focus during the movement of the test finger is better than that of 201211558. The present invention will be explained in detail below by way of example and with the aid of the drawings, wherein For the board test (4) preparation (test equipment 1) can be: heart tester i (figure 5), which has a plurality of electrical contact fingers ^ for electrical contact with a test device 2. Each of the contact fingers 3 is mounted on a slider 4 which is movable along - or a plurality of beams 5. The cross beam 5 spans the test area 6 with mounting (10) 7 for mounting the in-test device 2. The beams 5 are arranged substantially parallel to the test area 6 and may have a reciprocating means 'so they are movable at right angles to their longitudinal axes on a plane parallel to the - area 6. It is also possible that the beam 5 is not movable. And preferably, there is a _rotating device on each of the sliders 4, the sides of which are rotated around the _rotating axis substantially perpendicular to the test area 6 to rotate the electrical contact fingers, (four), etc. (d) The contact fingers may pass over an area of the beam 5. Regardless of the design of the finger tester 1, any desired point in the test area 6 can be contacted by an electrical contact finger 3. The slider 4 is preferably mounted on the beam 5 using a linear guide having a high-precision spherical shape with long-term stability. These can have ceramic ball bearings. The drive is preferably a linear motor. This allows for a relatively quick and precise movement of the slider and by which the contact fingers 3 are positioned. Preferably, the rotating shaft of the rotating device of the electrical contact finger 3 is mounted on a precision ball bearing. In addition to using a precision ball bearing to mount the sliders on the beams and mounting the rotating shaft of the rotating device, it is also possible to use air bearings to mount these components. The test apparatus 1 according to the present invention has at least one optical test finger 8 (Fig. 1-4)' and is preferably plural in addition to the electrical contact fingers 3. The optical test finger 8 is used for optical scanning of the device 2 under test. As one of the electrical contact fingers 3, it is rotatably mounted on one of the sliders 4 by a rotating device. The slider 4 and the rotating means of the optical test finger 8 are designed to be substantially similar to the slider 4 of the electrical contact finger 3 and the rotating means. The optical test finger 8 has an optical detecting device 9, a tubular lens barrel 10 and a mirror surface 11 (Figs. 3 and 4). Attached to one end of the lens barrel 1 is an optical detecting device 9. At the other end of the lens barrel 1 is a mirror surface u. The end of the lens barrel 1 having the mirror surface 11 is referred to as a free end 12. In the present embodiment, the length of the lens barrel 1 is 370 mm. The lens barrel 10 in the inner valley of the present invention preferably has a length of at least 150 mm, more preferably at least 200 mm, and most preferably at least 300 mm. The longer the lens barrel 10 is, the larger the area covered by an optical test finger 8. However, the lens barrel 10 may not have any desired length because the very long lens barrel increases its inertial moment as the optical test finger 8 rotates about the vertical axis of rotation. Moreover, a very long lens barrel 10 will make the positioning of the free end of the lens barrel 10 above the test area 6 more difficult, because even a very small tolerance in the rotation angle of the rotating skirt 201211558 will result in There is a large turn at the free end of the lens barrel 10. The lens barrel 1 is made up of one or more tubular segments of the name or fiber reinforced plastic. In the present embodiment, the lens barrel 10 has three tubular sections whose diameter becomes smaller toward the free end. The mirror 11 is mounted in a mirror holder 13 spaced apart from the barrel 1 , wherein the mirror 11 is disposed at an angle of 4 to 55 degrees with respect to the longitudinal axis of the barrel 10. In the mirror holder 13, the opening or the hole 14 is formed with respect to the reflecting surface of the mirror: U (Fig. 1). The barrel does not need to be configured to accurately tap the board to be tested. In the present embodiment, the direction of the free end 12 of the barrel is inclined toward the board by about 5 degrees. Therefore, the light of the lens barrel is _ approximately right angle impact on the material path plate, and the mirror surface is inclined. The microscope 10 is mounted adjacent to the mirror surface u in the lens barrel 10. The f-lens system 15 comprises a plurality of lenses, preferably of magnification. There is a coffee, whereby the device is strong, and a tube lens 16 is located substantially at the longitudinal center of the lens barrel 10. Litian lens 16, microscope system 15" with 1 device" - optical detection element Γ7 on the _reproduced ~ tube lens 16 can be composed of - or a plurality of jobs. Like the sheet system (1) the tube lens 16 is preferably formed of a plastic lens ^ the individual lenses have a lower weight. The longitudinal axis 18 of the lens barrel 10 represents the optical axis of the microscope system 15, the alarm $201211558 mirror 16 and the optical detecting element 17. Thus the three elements are aligned in line with respect to each other. The optical detecting device 9 has a base body 19 made of a lightweight material such as aluminum or plastic. Formed in the base body 19 is a central barrel bore 20. Thus, the base body 19 is coupled to the barrel i 〇 ' such that the barrel hole 2 〇 appears concentric with the optical axis 18. The barrel hole 20 is a quick through hole. The optical detecting element 17 is positioned on the side of the barrel hole 20 that is furthest from the barrel 10. The optical detecting component 17 can be an image sensor 'especially a CCD (Charge-coupled device) sensor or a camera module having the image sensor and other electronic components Used for image processing. The optical detecting component 17 is coupled to a microprocessor control unit which can be an early wafer system or a computer. The microprocessor control element includes soft formation of the image generated by the optical detecting component for automatic image processing on the side of the lens barrel hole 20 relative to the optical detecting element 17, on the base body 19. It is a flange 21 for connecting the optical detecting device 9 to the lens barrel 10. This flange 21 forms the optical input of the optical detection device 9. Adjacent to the lens aperture 20, adjacent to the optical input is an optical channel 22 having a rectangular or square cross-section and extending from an edge region of the base body into the barrel bore 20. Introduced into this optical passage 22 is an illumination hole 23 located adjacent to the barrel hole 2''. Formed on the side of the illumination aperture 23 relative to the barrel bore 20 is a leading light aperture 24' which also passes into the optical channel 22. Leading light holes 24, 12 201211558 The lighting holes 23 and the barrel holes 20 are arranged in parallel with each other. Introduced at the trailing edge of the base body 19 is a rear leading light aperture 25 that is at right angles to the optical axis 18 and that opens into the leading light aperture 24 at one end. The rear leading light apertures 25 merge into a smaller diameter of a leading light supply aperture 26 which is directed at a right angle in the base body 19 as far as a chamber 27 holding a leading light source 28. The lead light source is a light emitting diode or a semiconductor laser. The leading light source is preferably a light that emits a certain color. In a prototype, a front light source uses a laser red light. In the region where the optical passage 22 intersects the mirror clearing hole 20, there is a beam splitter 29 which is a straight prism having a two-corner base. The triangular base is shaped as an equilateral triangle 'having a bottom side 39 and two sides, the two sides defining a 45 degree angle. The bottom side 39 is covered with a half mirror. The half mirror is covered, for example, by a thin silver. The bottom side 39 is disposed at an angle of 45 degrees to the longitudinal axes of the optical axis U and the optical channel 22. The effect of the configuration of the mirrored bottom side 39, which is 45 degrees from the optical axis, is that 50% of the intensity of the light is concentrated along a portion of the ray that is directed through the barrel along the optical axis 18 and impinges on the beam splitter. The straight line passes through the latter. The bottom side 39 adjacent to the beam splitter 29 is a first feed prism 30. The first feed cymbal is a slanted prism having a square base so that its side can fit flush with the bottom side 39 of the beam splitter 29. The first feed port 30 is provided with a substrate facing the optical input of the optical detecting device 9, and the other substrate is flush with the illumination hole 23. The first mirror surface 40 is designed with respect to the side of the bottom side 39. The first mirror surface 40 is constructed of a dielectric mirror surface that is transparent to light from the front light source 28 (here red light), 13 201211558 and has good reflection properties for the remaining wavelength ranges. A second feed port 31 is configured to be parallel to the first feed port. The second feed cassette 31 has the same pattern as the first feed cassette 30, wherein the second feed cassette 31 has a side that is flush with the first mirror surface 40 of the first feed cassette 30. Each of the two feed prisms 30, 31 has their bases disposed on a common plane. The second feed port is provided with a base surface that is flush with the leading light hole 24. The second feed weir 31 is designed as a second mirror surface 41 with respect to the side of the mirror surface 40. This second mirrored surface 41 contains a silver coating that almost completely reflects light. The base side 39, the first mirror surface 40 and the second mirror surface 41 having a partially transparent mirror are arranged parallel to each other, so in each case, we are 45 with the longitudinal axis of the optical channel 22. Degree angle. Each of the beam splitter 29 and the two feed cassettes 30, 31 is formed of a photo-transparent moon material t, in particular glass or a transparent plastic such as a polycarbonate. & in the illumination hole 23 are - the light source 32 and the - objective lens 33. Light source 32 has a self-emissive light emitting diode, wherein light source 32 is configured such that light from the source radiates toward first-feed 稜鏡3G. This light passes through the objective lens 33 mounted beside the first feed nip 30. The objective lens 33 can focus the light. At the first mirror = table Φ 40, the light is reflected toward the base side of the beam splitter 29. From the substrate side 39 of the beam splitter 29, 〇% of the light intensity from the light source 32 #ray is reflected along the optical axis 18 into the lens barrel 10f. This light is used for illumination: the I placed in the test, so it is called illumination light. In the corner region of the light guiding supply hole 26 and the corner region of the optical detecting device 9 + the rear light guiding hole are passed into the leading light hole, 201211558 has a first mirror surface 34 and a second mirror surface 35 in each case. The two mirrors 34, 35 are aligned such that light from the leading light source 28 is directed through the leading light supply aperture 26, the rear leading light aperture 25 and the leading light aperture 24 to the second feed aperture 31. A hole 36 is located in the region between the second mirror 35 and the second feed port 31. The aperture 36 has a pattern of holes, such as, for example, two circular diaphragm openings, such that a cone of light rays from the leading light, for example, forms two circular rays of light. Within the scope of the invention, other patterns and structures may also be present in the hole, such as, for example, a cross, a straight line or the like. The leading light arrives from the aperture 36 and reaches the second feed prism 31. From a boundary surface of the second feed cassette 31 with respect to the first feed prism 30, the light is reflected toward the beam splitter 29, wherein it (the light) is between the beam splitter 29 and the first feed cassette 30 This boundary surface is reflected into the lens barrel 10. Therefore, the two feed ports 30, 31 cooperate with the beam splitter 29 of the type which is a prism. In this way, the leading or illumination light is supplied into the light path of the optical detecting element 17 to reach the free end of the lens barrel 10. The mirror 11 at 12 places. This light is directed by the mirror 11 towards the test area 6. This optical detecting device 9 is very small in type. Contributing to this small design is a special configuration of the beam splitter 29, the first feed prism 30 and the second feed cassette 31, which allows the light path of the light to be detected to pass to the optical detection element 17, The special configuration of the illumination light from the light source 32 and the leading light from the leading light source 28 is between the narrowest possible gaps 15 201211558, even partially intersected, and supplied to the light path via the lens barrel ίο. This small design also makes the optical detecting device 9 light in weight. A functional prototype of the optical detection device 9 weighs 220 grams. Since the optical detecting element 17 is actually positioned on the optical axis 18, the light from the lens barrel passes through the beam splitter 29 in a straight line, so that only 50% of the light intensity is lost at the beam splitter. In principle, it is also possible to arrange the optical detection element in the region of the leading light or the ray path of the illumination light. Although in this case, the intensity of light at the optical detecting element will be more drastically reduced. In the present embodiment, the optical test finger 8 including the optical detecting device 9 and the lens barrel 10 is fixed to a slider rotating device 38 by a rotating ring device 37 (Fig. 1) (not shown) 1 picture). The swivel device 37 is used to rotate the optical test finger 8 about an axis that is parallel to the test area 6, so that the free end 12 can be configured with a varying gap from the test area 6. The swivel device has an adjustment element so that the optical test finger 8 can be rotated under electronic control. In operation, the lead light source 28 is first used to create a light guided by the aperture 36 and directed to the device 2 under test. The ray pattern is reflected by the device 2 under test, and a portion of the reflected light is directed by the mirror 11 to the optical detecting device 9 where it is detected by the optical detecting element 17. In the present embodiment, the aperture 36 has two circular diaphragm openings that produce two beams of light. The distance between the leading light source 28 and the beam splitter 29 is located far behind the optical detecting element. The regeneration of the pre-light source does not occur on the surface of the optical detecting element 17, so that the two beams of light 201211558^ line produce two spaced, blurred circular spots, micro (figure_figure) Optically detecting the photosensitive surface of the tree 17. The distance from the center to the center of the two light points, the gate is the distance directly measured by the device 2 and the optical pick-up component ^ = in the test. The first figure shows the two spots at the optimum distance between the device under test and the optical detector Η7. In the still picture, the center-to-center distance of the two spots 42a, 42b is 3 bribes. In the test in the figure, the device 2 deviates from the optimum distance by _Q2 mm, so the two spots d are arranged to be close to each other. In the & diagram, the device 2 under test deviates by +0.2 mm from the optimum distance, so the two spots 423 and the celestial are further apart from each other. Since the distances of the spots 42a, 42b are measured by their center or center of gravity, the two light families need to have a sharp edge on the optical element 17. The optimum distance is the distance between the optical detection device 9 and the device under test 2, which allows the device under test to be sharply depicted on the optical detection element 17 by the illumination of the light source 32. Using this measurement procedure, which corresponds to a triangulation, it is important that the optical path of the pre-light source 28, the towel unit 2 and the optical element 17 can be from the source 32 to the device 2 under test and the optical detection element 17. The optical path is properly differentiated. In this embodiment, the optical path of the leading light is longer than the optical path of the illumination. Therefore, the overall gap required for the optical detecting device 9 can be kept small, and the optical path of the leading light is at an angle to the mirror faces 34, 35 and the second mirror surface 41. The distance between the spots 42a, 42b is not only a measure of the deviation of the position of the device 2 in the test from the optimum position, but also indicates that the device must be moved 17 201211558 to reach the direction of the optimum position. Thus, the optical test finger 8 can be rotated in a purposeful manner toward the optimum position. This allows the test finger 8 to be very quickly aligned optimally with the test set 2, respectively. It has been shown that the optical test finger 8 can be adjusted so quickly that it can be guided in a closed control loop. This can be used, for example, to maintain the optical test finger in focus during its movement so that the optical test can begin without delay when the point to be tested is reached. Thus, the 'preamble light source 28, the apertures 36, the optical detecting means 9 and the swivel means together with the microprocessor control unit form an active autofocus means. ..., if the optical test finger 8 is optimally positioned so that the optical detection element 17 and the illumination source 32 are accurately focused, the pre-light source 28 is turned off and the source 32 is turned on to produce the illumination. The illumination light is supplied to the lens barrel, and is guided by the mirror 11 to the testing device 2, and a portion of the illumination light is guided back to the optical detecting device 9 by the mirror 11 and reaches the optical detecting component. 17 on. Optical detection component 17 produces an image of the device under test. Since the auto focus is performed in advance, the image is very sharp and precise. Using a prototype, the target area of the device.5 mmx〇 5 in the test will be scanned in color with a resolution of one megapixel. The depth of focus is approximately 3 μηη. This means that the auto focus must be operated with a tolerance of up to +/_ 〖5 to produce the correct image. With this prototype, a focusing accuracy of about 0.5 μm can be obtained. The prototype optical detection element 17 produces an image having 1292 964 964 image points. When focusing, only 201211558, for example, 1292 χ 2 影像 image points, is used for the segment. This small image segment can process any +/- 20 μm fluctuations in the device under tracking test more quickly than the entire image, which needs to be rotated only through an angle of +/_ 50 mrad.曰 曰 可 Actually the entire possible range of rotation allows the distance of the free end 12 有 plate to have a change of +/_ 〇.5 mm. With this autofocus device 1, the distance between approximately +/- 0.25 mm and approximately +/- 〇·3 mm is resolved. A change in distance of approximately 0.25 mm corresponds to a range of approximately +/_ 〇 7 μ _ mrad ^ rotation. Within such a small angle change, it does not happen. Measured Distortion ° Using the optical test finger 8' to test the considerable p of the device 2, optical scanning is possible with high speed and high precision. Area If the angle of rotation of the optical test finger 8 is determined, the distance from the reference point to the scanning surface can be pre-calculated by simple trigonometry. In this way, the optical rotation of the optical test finger 8 is utilized, except for the precise image of the device in the test, the height cycle is determined. 1 A circuit board or assembly scanned in this manner can be contacted very quickly and reliably by the electrical contact fingers 3, since not only the position, but also the type of the test points of the circuit board and the circuit board The height profile can also be known from the recorded data. Due to the high resolution of the images, the initial photon of the board may have been completed, so that specific defects in the board can be detected photon. In principle, it is also possible to use optical test fingers 8 for the conventional pure optical inspection of circuit boards or assemblies. However, since 201211558 utilizes the large-scale data generated by the high-resolution optical test fingers (1292 x 964 image points), it is preferred to selectively test only certain sections of the board. The optical test fingers 8 are particularly suitable for optical scanning of contoured portions of the test, such as, for example, flexible circuit boards, which are always configured with some degree of undulation in one direction of testing or combination. The device shown in Figure 5 is a finger tester having a plurality of electrical contact fingers 3 and an optical test finger 8. In the context of the present invention, it is also possible to install a test device having only one or a plurality of optical test fingers 8, which are like a conventional finger tester. Above the device under test. Due to the precision of the slider and the rotating device, the optical test finger can be moved very quickly and precisely. In particular, it accelerates and decelerates very quickly. The pre-light source is preferably a color light-emitting diode, in particular, a light-emitting diode that emits light. This allows the leading light to be immediately seen and distinguishable from the illumination. The size of the ray pattern is made independent of the structure of the device under test. This means that the individual components of the pattern must be significantly larger than the structure of the device under test. In addition to detecting a predetermined shape in the ray pattern, it is also possible to detect other physical parameters, such as contrasts in the ray pattern. If, for example, a long strip of ray pattern is produced, a Fourier analysis can be used to determine the frequency distribution. Most of the high frequencies represent a high contrast ratio. If a certain portion of the high frequency is detected 'this means that the pattern on the device in the test has a predetermined high contrast, 20 201211558 and the optical test finger 8 is accurately focused. In the above specific embodiment, the focus is set by rotating the optical test finger 8. Due to the large length of the optical test fingers, there is little distortion in the change in the angle of red turn. Within the scope of the present invention, in addition to a swivel device, it is also possible to have other components to adjust the focus. For example, the optical detecting element 17 can have an adjusting element that can change the axial position of the optical detecting element 17. In this way, the length of the optical path between the optical detecting element 17 and the device under test can be changed. The height of the device in this test can also be determined by the movement of the optical detecting element 17. Focusing can also be achieved by an appropriately adjustable objective lens. Preferably, however, the adjustable lens having the objective lens is as close as possible to or within the base body 19 of the optical detection device 9, as the associated adjustment mechanism may cause the entire optical detection device 9 to be relatively heavy. The mechanism of the swivel device is preferably a motor that drives an eccentric that acts on a four link having a solid joint. This swivel mechanism only rotates very little and allows for a very precise setting of this angle of rotation. In the above specific embodiment, the illumination source is integrated in the optical detection device. It is also possible within the scope of the invention to use a lighting device that is separate from the device. Such a lighting device, for example, can be used to test the free end 12 of the test finger 8. Preferably, it is a type 2 light dark field illumination, which produces as much undoped shadow light as possible, and a plurality of light sources are configured to surround the holes of the optical test finger 8; Formally. 21 201211558 [Simple description of the drawings] Figure 1 is a perspective view of an optical test finger along with a portion of the rotating device. Figure 2 is a front elevational view of the optical test finger of Figure 1 without a turning mirror. Fig. 3 is a longitudinal cross-sectional view of the optical test finger of Fig. 1 taken along line A-A according to Fig. 2. Figure 4 is an enlarged view of the detecting device of the optical test finger of Figure 3. Figure 5 is a schematic illustration of a circuit board test apparatus using an optical test finger. Figure 6a-6c shows the light pattern of the leading light detected by a detecting component. [Main component symbol description] 1 Finger tester 2 Test device 3 Contact finger 4 Slider 5 Beam 6 Test area 7 Mounting component 8 Optical test finger 9 Optical detection device 10 Mirror 22 201211558 11 Mirror 12 free end 13 mirror bracket 14 hole 15 microscope system 16 tube lens 17 optical detection element 18 optical axis 19 base body 20 barrel hole 21 flange 22 optical channel 23 illumination hole 24 leading light hole 25 rear leading light hole 26 Leading light supply hole 27 Chamber 28 Leading light source 29 Beam splitter 30 First feed 稜鏡 31 Second feed 稜鏡 32 Light source 33 Objective lens 34 First mirror 23 201211558 35 Second mirror 36 Hole 37 Rotary device 38 Rotating device 39 bottom side 40 first mirror surface 41 second mirror surface 42a light spot 42b light spot 24