TW201208996A

TW201208996A - Locking mechanism, workpiece locking method and workpiece locking status cancelation method

Info

Publication number: TW201208996A
Application number: TW100119281A
Authority: TW
Inventors: Yasutomo Okajima; Kenichiro Ikeda
Original assignee: Mitsuboshi Diamond Ind Co Ltd
Priority date: 2010-08-31
Filing date: 2011-06-01
Publication date: 2012-03-01
Also published as: TWI465407B; JP2012054279A; KR101277133B1; CN102399054A; JP5158157B2; KR20120021180A; CN102399054B

Abstract

The present invention provides a locking mechanism, a workpiece locking method using the same and a workpiece locking status cancelation method, which can firmly lock a sheet-like workpiece in an upright manner. An extrusion frame 72 is formed as a circular shape to extrude the outer edge of a workpiece 3. A plurality of pressing members 73 are formed by elastic members such as springs and connected with the corresponding corners of four corners of the extrusion frame 72. A plurality of movable clamping parts 61 (61a to 61c) are moved toward or away from the extrusion frame 72. A locked clamping part 62 is fixed adjacent to the extrusion frame 72. In addition, each of the plurality of movable clamping parts 61 and the locked clamping part 62 are disposed along the extrusion frame 72. Therefore, the outer periphery of the workpiece 3 is firmly clamped by the plurality of movable clamping parts 61 and the locked clamping part 62 with the extrusion frame 72.

Description

201208996 六、發明說明：【發明所屬之技術領域】本發明係關於—種將平板狀之工件以立起姿勢固定之固定機構、以及該固定機構對工件之固定方法及工^㈣固定方法。【先前技術】先前’眾所周知有如下基板分斷裝置，其將形成有劃線之母基板以水平狀態固定，並且藉由分別配置於母基板之上下方之分斷單元沿著劃線使母基板分斷（例如專利文獻先行技術文獻專利文獻 [專利文獻1]曰本專利特開2006_28962S號公報【發明内容】 [發明所欲解決之問題] 如此’專利文獻1中，僅記載了將平板狀之工件以水平狀態固定之技術’對於將該工件以立起姿勢固定之技術則沒有任何e載。其結果為’ 僅應用專利文獻！所記載之工件之固疋技術’則會產生無法將立起姿勢之卫件良好地固定之問題。因此，本發明《目的在於提供一種將平&狀之工件以立起姿勢良好地固^之固定機構、以及該固定機構對工件之固定方法及工件之解除固定方法。 [解決問題之技術手段] I5649l.doc 201208996 為了解決上述問題，技術方案丨之發明為一種固定機構，其特徵在於，其係以立起姿勢固定平板狀之工件者，且包含：擠壓部，其擠壓上述工件之外緣部；及複數個夾持部，其各自夾持配置於與上述擠壓部之間之上述工件之上述外緣部；上述擠壓部包含：環狀之擠壓框；及施壓構件，其藉由對上述擠壓框賦予施壓力而將上述工件之上述外緣部固定於上述擠壓框與各夾持部之間；且上述複數個失持部之各個沿著上述擠壓框而設置。而且，技術方案2之發明如技術方案丨之固定機構，其中上述複數個夾持部中之一部分為向相對於上述擠壓框接近或離開之方向進退之可動夾持部。而且，技術方案3之發明如技術方案2之固定機構，其中上述複數個夾持部中之其餘部分為固定於上述擠壓框附近之固定夾持部。而且，技術方案4之發明如技術方案1至3中任一項之固定機構，其中上述工件包含：環狀體，其於平板之中央形成有開口；片材體，其以覆蓋上述環狀體之上述開口之方式安裝；及脆性材料基板，其以位於上述開口上之方式貼附於上述片材體。而且，技術方案5之發明為一種工件之固定方法，其特徵在於，其係將平板狀之工件固定於固定機構者，上述固定機構包含：擠壓部，其擠壓上述工件之外緣部；及複數個夾持部，其各自夾持配置於與上述擠壓部之間之上述工件之上述外緣部；上述擠壓部包含：環狀之擠壓框；及施壓 156491.doc 201208996 構件，其藉由對上述擠壓框賦予施壓力而將上述工件之上述外緣部固定於上述擠壓框與各夾持部之間；上述複數個夾持部包含：可動夾持部，其向相對於上述擠壓框接近或離開之方向進退；a固定夾持部，其固定於上述擠壓框附近；上述複數個夾持部之各個沿著上述擠壓框而設置；且，上述工件之固定方法包含下述步驟：a)使上述工件呈立起姿勢並移動至上述固；t機構附近；b)使各可動炎持部向自上述擠壓框離開之方向移動；c)使上述擠壓框向與由上述施壓構件對上述擠壓框施磨之施a方向相反之方向移動；句藉由使上述較夾持部相對於上述工件㈣性地移動，將上述工件之上述外緣部抵接於上述固定夾持部；e)於執行上述步驟d)之後，使各可動夾持部向接近於上述_ 之方向移動，藉此將上述工件之上述外緣部抵接於各可動夾持部；及f)於執行上述步驟e)之後，使上述擠壓框向上述施麼方向移動，藉此使立起姿勢之上述工件由上述固定機而且’技術方案6之發明為-種工件之解除固定方法，其 ^在於’其係解除被固定於固定機構之平板狀之工件之固疋者’上述固定機構包令傅L 3 .擠壓部，其擠壓上述工件之外緣部；及複數個夾持邻， ° ，、各自夾持配置於與上述擠壓 4之間之上述工件之μ 4卜緣部’·上述擠壓部包含：環狀之擠屋框；及施壓構件， '、稭由對上述擠壓框賦予施壓力而將上述工株夕μ、+，Λ 4 “緣部固定於上述擠壓框與各夾持部之間，上述複數個夾持犬孖。卩包含：可動夹持部，其 156491.doc 201208996 上述擠壓框接近或離開之方向進退；及固定夾持部，其固定於上述擠壓框附近；且，上述工件之解除固定方法包含下述步驟：a)於上述工件之上述外緣部抵接於上述複數個可動夾持部及上述固定夾持部之狀態下，使上述擠壓框向與由上述施壓構件對上述擠壓框施塵之施壓方向相反之方向移動，而將由上述固定機構對上述工件之固定解除：b) 於上述工件之上述外緣部抵接於上述固定夾持部之狀態 y，於執行上述步驟a)之後，使各可動夾持部向自上述擠壓框離開之方向移動；e)藉由使上述固定夾持部相對於上述工件相對性地移動，而使上述工件之上述外緣部自上述固疋夾持部離開；及d)使上述工件自上述固定機構離開。 [發明之效果] 根據技術方案⑴中任一項之發明，工件之外緣部能夠由複數個夾持部與擠壓部良好地夾持。因此，能夠良好地固定立起姿勢之工件。特別是根據技術方案2之發明，藉由使可動夾持部相對於擠壓框接近及離開，能夠容易地切換使呈立起姿勢之工件為可夾持之狀態之操作、及使以立起姿勢夾持之工件為夾持解除狀態之操作。特別是根據技術方案3之發明，固定夹持部固定於擠壓框附近。藉此’以固定爽持部之位置為基準而可容易地執行工件相對於固定機構之定位。因此，藉由使用固定失持部及可動夾持部而能夠良好地執行工件之固定及解除固定。特別是根據技術方案4之發明，脆性材料基板貼附於片材 156491.doc 201208996 體。因此，即便工件為古加马立起姿勢’亦可切實地將脆性材料基板固定。特別是根據技術方案5及6之發明，能夠良好地執行由固疋機構固疋立起姿勢之卫件之動作、及將由岐機構固定之工件之固定解除之動作。【實施方式】以下，-邊參照附圖-邊對本發明之實施形態詳細進行說明。 <1·整體構成> 圖1及圖2分別係表示本發明之實施形態中之基板分斷裝置1之構成之一例之前視圖及後視圖。圖3係表示工件3之構成之-例之前視圖。基板分斷裝h係將形成有劃線8之脆性材料基板7(參照圖3)沿著劃線8分斷（切斷）之裝置。如圖1及圖2所示，基板分斷裳以主要包含變換姿勢單元 10、主體單兀40、搬送單元5〇、非接觸保持單元8〇、分斷單元85及控制單元90 » 另外’圖1及以後之各Η中，為了明確該等部分之方向關係，視需要適當標註以Ζ軸方向為鉛垂方向、以χγ平面為水平面之ΧΥΖ正交座標系。變換姿勢單元10將平板狀之工件3之姿勢於水平姿勢及立起姿勢之間進行變換，並且將呈立起姿勢之工件3交接給搬送單元50。此外，變換姿勢單元1〇相對於主體單元4〇而固定。此處，如圖3所示，固定於搬送單元5〇且由分斷單元85 156491.doc 201208996 進行分斷處理之工件3主要包含切割環4、切割片5及脆性材料基板7。切割環4(環狀體）係由不鏽鋼等金屬形成之平板。如圖！及圖2所示，藉由切割環4之外緣部心由固定機構6〇夾持而將工件3固定於固定機構6〇上。而且，如圖3所示，於切割環4之中央附近形成有開口仆。進而’於切割環4之外緣部4说置有缺口々。藉由檢測該缺口 4c之位置來檢測工件3之旋轉角度。切割片5(片材體）以覆蓋切割環4之開口仆之方式相對於切割環4而安裝。而且，脆性材料基板7以位於開口朴上之方式貼附於切割片5。因此，即便使工件3為立起姿勢，亦可切實地將脆性材料基板7固定。此處，本實施形態中，作為切割片5，亦可使用例如樹脂製之黏著片材。脆性材料基板7係例如玻璃基板或陶瓷基板等那樣由脆性材料形成之基板。如圖3所示，於脆性材料基板7上形成有複數個劃線8及複數個電子零件9。劃線8係形成於脆性材料基板7之表面上之切割紋（縱向紋路）。此處’藉由例如使燒結金剛石製之劃線輪（省略圖示）壓接於脆性材料基板7之表面並轉動而形成劃線8。而且，對形成有複數個劃線8之脆性材料基板7賦予應力，並沿著各劃線8將脆性材料基板7分斷，由此獲得複數個電子零件 9(例如複數個液晶顯示裝置）。另外，本實施形態中，將工件3(以及切割環4、切割片5 及脆性材料基板7)之主面3a、3b中之未形成劃線8之面稱為 156491.doc201208996 VI. OBJECTS OF THE INVENTION: 1. Field of the Invention The present invention relates to a fixing mechanism for fixing a flat workpiece in a standing posture, and a fixing method and a fixing method for the workpiece to the workpiece. [Prior Art] Previously, there is known a substrate breaking device which fixes a mother substrate on which a scribe line is formed in a horizontal state, and a mother substrate along a scribe line by a breaking unit respectively disposed above and below the mother substrate In the patent document 1, only the flat shape is described in the patent document 1 [Patent Document 1] Patent Document 1 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-28962S. The technique of fixing the workpiece in a horizontal state does not have any e-loading technique for fixing the workpiece in a standing posture. As a result, the application of the solid-state technology of the workpiece described in the patent document only results in the inability to stand up. The problem that the posture guard is well fixed. Therefore, the present invention has an object of providing a fixing mechanism for fixing a flat and a workpiece in a standing posture, a fixing method of the fixing mechanism to the workpiece, and a workpiece Lifting the fixing method. [Technical means to solve the problem] I5649l.doc 201208996 In order to solve the above problem, the invention of the technical solution is a kind of The fixed mechanism is characterized in that it fixes a flat workpiece in an upright posture, and includes: a pressing portion that presses an outer edge portion of the workpiece; and a plurality of clamping portions each sandwiched and disposed The outer edge portion of the workpiece between the pressing portion and the pressing portion; the pressing portion includes: an annular pressing frame; and a pressing member that applies the pressing force to the pressing frame to apply the workpiece The outer edge portion is fixed between the pressing frame and each of the clamping portions; and each of the plurality of missing portions is provided along the pressing frame. Further, the invention of claim 2 is as a fixing mechanism of the technical solution. And a part of the plurality of clamping portions is a movable clamping portion that advances and retreats in a direction approaching or departing from the pressing frame. The invention of claim 3 is the fixing mechanism of the second aspect, wherein the plurality of The remaining portion of the nip portion is a fixed nip portion that is fixed to the vicinity of the squeezing frame. The invention of claim 4, wherein the workpiece comprises: a ring shape An opening is formed in a center of the flat plate; a sheet body is attached to cover the opening of the annular body; and a brittle material substrate is attached to the sheet body so as to be located on the opening. The invention of claim 5 is a method for fixing a workpiece, which is characterized in that a flat-shaped workpiece is fixed to a fixing mechanism, and the fixing mechanism includes: a pressing portion that presses an outer edge portion of the workpiece; a plurality of clamping portions each sandwiching the outer edge portion of the workpiece disposed between the pressing portion; the pressing portion comprising: an annular pressing frame; and pressing a member 156491.doc 201208996 The outer edge portion of the workpiece is fixed between the pressing frame and each of the clamping portions by applying a pressing force to the pressing frame; the plurality of clamping portions include: a movable clamping portion that faces oppositely Advancing and retreating in a direction in which the extrusion frame approaches or exits; a fixed clamping portion fixed in the vicinity of the pressing frame; each of the plurality of clamping portions being disposed along the pressing frame; and the workpiece The fixing method comprises the steps of: a) causing the workpiece to be in an upright position and moving to the vicinity of the solid; t mechanism; b) moving each movable inflammatory portion away from the extrusion frame; c) causing the squeezing The pressing frame is moved in a direction opposite to a direction in which the pressing member is applied to the pressing frame; and the outer edge of the workpiece is moved by moving the relatively clamping portion relative to the workpiece (four) Abutting the movable nip portion; e) moving the movable nip portion in a direction close to the _ after performing the step d), thereby abutting the outer edge portion of the workpiece to each movable portion After the step e) is performed, the pressing frame is moved in the direction of the application, whereby the workpiece in the standing posture is made of the fixing device and the invention of the sixth aspect The method for releasing the workpiece is to fix the fixing member of the flat-shaped workpiece fixed to the fixing mechanism. The fixing mechanism encloses the pressing portion, which presses the outer edge portion of the workpiece. ; and a plurality of clamping neighbors, °, , The self-clamping portion of the workpiece disposed between the extrusion 4 and the extrusion 4 includes: an annular squeezing frame; and a pressing member, ', the straw is pressed against the extrusion frame When the pressure is applied, the edge of the worker, μμ, +, Λ 4, is fixed between the pressing frame and each of the nip portions, and the plurality of licking dogs are held.卩 : 可 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 156 Step: a) in the state in which the outer edge portion of the workpiece abuts against the plurality of movable clamping portions and the fixed clamping portion, the pressing frame is applied to the pressing frame by the pressing member The moving direction of the dust is reversed, and the fixing of the workpiece is released by the fixing mechanism: b) the state y of the outer edge portion of the workpiece abutting the fixed nip portion is performed, and the above step a) is performed Thereafter, each movable nip portion is moved in a direction away from the extrusion frame; e) the relative rim portion of the workpiece is moved from the solid by moving the fixed nip portion relative to the workpiece The 疋 gripping portion is separated; and d) the workpiece is separated from the fixing mechanism. According to the invention of any one of the aspects of the invention, the outer edge portion of the workpiece can be satisfactorily sandwiched between the plurality of nip portions and the pressing portion. Therefore, the workpiece in the standing posture can be well fixed. In particular, according to the invention of claim 2, by moving the movable nip portion close to and away from the pressing frame, it is possible to easily switch the operation of the workpiece in the standing posture to the nipable state, and to raise the movable nip portion. The workpiece held by the posture is an operation of the clamp release state. Particularly according to the invention of claim 3, the fixed nip portion is fixed near the extrusion frame. Thereby, the positioning of the workpiece relative to the fixing mechanism can be easily performed based on the position of the fixed holding portion. Therefore, the fixing and releasing of the workpiece can be satisfactorily performed by using the fixed missing portion and the movable holding portion. In particular, according to the invention of claim 4, the brittle material substrate is attached to the sheet 156491.doc 201208996. Therefore, the brittle material substrate can be reliably fixed even if the workpiece is in the Gujia Ma posture. In particular, according to the inventions of claims 5 and 6, it is possible to satisfactorily perform the operation of the guard which is fixed by the fixing mechanism and the movement of the workpiece fixed by the jaw mechanism. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. <1. Overall configuration> Fig. 1 and Fig. 2 are a front view and a rear view, respectively, showing an example of the configuration of the substrate breaking device 1 in the embodiment of the present invention. Fig. 3 is a front view showing an example of the construction of the workpiece 3. The substrate breaking device h is a device for cutting (cutting) the brittle material substrate 7 (see Fig. 3) on which the scribe line 8 is formed along the scribe line 8. As shown in FIG. 1 and FIG. 2, the substrate is divided into a main body including a change posture unit 10, a main body unit 40, a transport unit 5A, a non-contact holding unit 8A, a breaking unit 85, and a control unit 90. In each of the following 1 and later, in order to clarify the directional relationship of these parts, the ΧΥΖ orthogonal coordinate system with the Ζ 平面 plane as the vertical direction and the χ γ plane as the horizontal plane is appropriately labeled as needed. The change posture unit 10 converts the posture of the flat workpiece 3 between the horizontal posture and the standing posture, and delivers the workpiece 3 in the standing posture to the transport unit 50. Further, the transformation posture unit 1〇 is fixed with respect to the main body unit 4〇. Here, as shown in Fig. 3, the workpiece 3 fixed to the transport unit 5 and partitioned by the breaking unit 85 156491.doc 201208996 mainly includes a cutting ring 4, a dicing sheet 5, and a brittle material substrate 7. The cutting ring 4 (annular body) is a flat plate formed of a metal such as stainless steel. As shown! As shown in Fig. 2, the workpiece 3 is fixed to the fixing mechanism 6 by the clamping of the outer edge of the cutting ring 4 by the fixing mechanism 6?. Further, as shown in FIG. 3, an opening servant is formed in the vicinity of the center of the cutting ring 4. Further, a notch 置 is formed on the outer edge portion 4 of the dicing ring 4. The angle of rotation of the workpiece 3 is detected by detecting the position of the notch 4c. The dicing sheet 5 (sheet body) is mounted relative to the cutting ring 4 in such a manner as to cover the opening of the cutting ring 4. Further, the brittle material substrate 7 is attached to the dicing sheet 5 so as to be located on the opening. Therefore, even if the workpiece 3 is in the standing posture, the brittle material substrate 7 can be reliably fixed. Here, in the present embodiment, as the dicing sheet 5, for example, an adhesive sheet made of resin may be used. The brittle material substrate 7 is a substrate made of a brittle material such as a glass substrate or a ceramic substrate. As shown in Fig. 3, a plurality of scribe lines 8 and a plurality of electronic components 9 are formed on the brittle material substrate 7. The scribe line 8 is a cut line (longitudinal grain) formed on the surface of the brittle material substrate 7. Here, the scribe line 8 is formed by, for example, pressing a scribing wheel made of sintered diamond (not shown) against the surface of the brittle material substrate 7 and rotating it. Further, stress is applied to the brittle material substrate 7 on which the plurality of scribe lines 8 are formed, and the brittle material substrate 7 is divided along the scribe lines 8, thereby obtaining a plurality of electronic components 9 (for example, a plurality of liquid crystal display devices). Further, in the present embodiment, the surface of the main surface 3a, 3b of the workpiece 3 (and the dicing ring 4, the dicing sheet 5, and the brittle material substrate 7) where the scribe line 8 is not formed is referred to as 156491.doc

S 201208996 第1主面3a，且將形成有劃線8之面稱為第2主面3b » 如圖1及圖2所示，主體單元40被用作將變換姿勢單元 10、非接觸保持單元80及分斷單元85等單元、以及複數個旋轉致動器41 (41 a〜41 c)固定之固定部。此處，各旋轉致動器41(41a〜41c)根據壓縮空氣之供給狀態而使軸（旋轉軸，省略圖示）旋轉。藉此，安裝於軸上之搖桿42(42a〜42c)擺動，並抵接於對應之夾持部61(6la〜61c)之抵接部63(參照圖8)。另外’對於夾持部61 (61 a〜61 c)之硬體構成於下文中闡述。搬送單元50設置成能夠沿著固定於主體單元4〇上之一對導件43、44行進。搬送單元50將平板狀之工件3以立起姿勢保持，並且使該工件3相對於變換姿勢單元1〇及主體單元4〇移動。此處，搬送單元50之保持可藉由對工件3之外緣部私進行接觸保持而實現。如此，搬送單元50不僅搬送工件3(搬送功能），亦可藉由對包含脆性材料基板7之工件3之外緣部钝也進行接觸保持而將平板狀之工件3以立起姿勢之狀態予以固定（保持功能）。即，搬送單元50亦可用作「保持單元」。而且，本實施形態令，搬送工件3時，搬送單元50移動，但變換姿勢單元職主體單元4()靜止。因此，本實施形態中，亦可將變換姿勢單元1()及主體單元佩稱為「固定側單元」。如圖2所示，非接觸保持單元8〇以與位於分斷位置p2〇之搬送單元50對向之方式設置對由搬送單元5〇之固定機構 I5649I.doc 201208996 6〇接觸保❸卜料4a<^3進行料觸保持。如此’由對呈立起姿勢之平板狀之工件3之外緣部4a進行接觸保持」之搬送單元5〇(保持單元）以及對工件3之第^ 主面3a進仃「非接觸保持」之非接觸保持單元晴成保持裝置。刀斷單元85將由搬送單元5〇保持之工件3之脆性材料基板7沿著劃線8分斷。此處，分斷單元85對脆性材料基板7 賦予應力’使垂直裂縫自形成有劃線8之脆性材料基板7之主面成長至其相反侧之主面為止，由此將脆性材料基板7 分斷。控制單元90對變換姿勢f元1〇、纟體單元4〇、搬送翠元 5〇、非接觸保持單元80及分斷單元85中所包含之各要素之動作進行控制，並且實現資料運算。如圖丨及圖2所示，控制單元9〇主要包含ROM 91、RAM 92及CPU 93 » ROM(Read Only Memory，唯讀記憶體）91為所謂之非揮發性之記憶部’例如儲存有程式91a。另外，作為11〇1^91，亦可使用自由讀寫之非揮發性記憶體即快閃記憶體。 RAM(Random Access Memory，隨機存取記憶體）92為揮發性之記憶部’例如儲存有用於CPU 93之運算之資料。 CPU(Central Processing Unit，中央處理單元）93以特定之時點執行依照R Ο Μ 91之程式91 a進行控制（例如複數個旋轉致動器41(41&〜41(〇及複數個擠壓用氣缸37(37&〜37(1)之驅動控制等）。另外，對於變換姿勢單元10、搬送單元50、非接觸保持 •10· 156491.docS 201208996 The first main surface 3a, and the surface on which the scribe line 8 is formed is referred to as the second main surface 3b. As shown in FIGS. 1 and 2, the main body unit 40 is used as the transformation posture unit 10 and the non-contact holding unit. A unit such as 80 and the breaking unit 85, and a fixed portion in which a plurality of rotary actuators 41 (41 a to 41 c) are fixed. Here, each of the rotary actuators 41 (41a to 41c) rotates the shaft (rotation shaft, not shown) in accordance with the supply state of the compressed air. Thereby, the rocker 42 (42a to 42c) attached to the shaft swings and abuts against the abutting portion 63 (see Fig. 8) of the corresponding sandwiching portion 61 (6a to 61c). Further, the hard body configuration for the grip portion 61 (61 a to 61 c) is explained below. The transport unit 50 is provided to be able to travel along one of the guide members 43, 44 fixed to the main body unit 4''. The transport unit 50 holds the flat workpiece 3 in an upright posture, and moves the workpiece 3 relative to the transformation posture unit 1A and the main unit 4〇. Here, the holding of the transport unit 50 can be achieved by privately holding and holding the outer edge of the workpiece 3. In this way, the transport unit 50 not only transports the workpiece 3 (transport function), but also brings the flat workpiece 3 into a standing posture by bluntly holding the outer edge portion of the workpiece 3 including the brittle material substrate 7. Fixed (hold function). That is, the transport unit 50 can also be used as a "holding unit". Further, in the present embodiment, when the workpiece 3 is transported, the transport unit 50 moves, but the shift posture unit main unit 4 () is stationary. Therefore, in the present embodiment, the conversion posture unit 1 () and the main unit may be referred to as "fixed side units". As shown in FIG. 2, the non-contact holding unit 8 is disposed opposite to the transport unit 50 located at the breaking position p2, and is attached to the fixing mechanism I5649I.doc 201208996 6 of the transport unit 5〇</RTI>;^3 to maintain the material touch. In this way, the transport unit 5 (holding unit) is held in contact with the outer edge portion 4a of the flat workpiece 3 in a standing posture, and the "non-contact holding" is performed on the main surface 3a of the workpiece 3. The non-contact holding unit is clear to the holding device. The knife breaking unit 85 divides the brittle material substrate 7 of the workpiece 3 held by the conveying unit 5〇 along the scribe line 8. Here, the breaking unit 85 applies stress 'to the brittle material substrate 7' so that the vertical crack grows from the main surface of the brittle material substrate 7 on which the scribe line 8 is formed to the main surface on the opposite side thereof, thereby dividing the brittle material substrate 7 Broken. The control unit 90 controls the operations of the respective elements included in the transformation posture f element 1〇, the body unit 4〇, the transport Cuiyuan 5〇, the non-contact holding unit 80, and the breaking unit 85, and realizes data calculation. As shown in FIG. 2 and FIG. 2, the control unit 9A mainly includes a ROM 91, a RAM 92, and a CPU 93. The ROM (Read Only Memory) 91 is a so-called non-volatile memory unit, for example, a program is stored. 91a. In addition, as the 11〇1^91, a non-volatile memory that is freely readable and writable, that is, a flash memory can also be used. A RAM (Random Access Memory) 92 is a volatile memory unit. For example, data for calculation by the CPU 93 is stored. The CPU (Central Processing Unit) 93 performs control according to the program 91 a of the R Μ 91 at a specific time (for example, a plurality of rotary actuators 41 (41 & 〜41 (〇 and a plurality of cylinders for squeezing) 37 (37&~37 (1) drive control, etc.). In addition, the change posture unit 10, the transport unit 50, and the non-contact hold • 10·156491.doc

S 201208996 單元80以及分斷單元85之詳細硬體構成於下文中闡述。 <2.變換姿勢單元之構成> 圖4及圖5是分別表示變換姿勢單元丨〇之構成之一例之側視圖及俯視圖。此處，變換姿勢單元丨〇如上所述，執行變換工件3之姿勢之動作、及將工件3交接給搬送單元5〇之動作。如圖4及圖5所示’變換姿勢單元10主要包含複數個支持部ll(lla〜lid)、複數個定位把手i3(13a~13d)、交接部2〇、擺動部30及擠壓部35。複數個（本實施形態中為4個）支持部ii(iia〜lld)支持交接給變換姿勢單元10之工件3。如圖4及圖5所示，各支持部 ll(lla~l Id)固定於可將工件3之切割環4之外緣部4a支持之位置、且不與交接部20之升降台21相干擾之位置。而且’如圖4及圖5所示，各支持部u(iia〜lid)於其前端具有設置成自由轉動之滾珠12(12a〜12d)。藉此，各滾珠 12(12a〜12d)可點支持工件3並旋轉。因此，由各支持部 ll(lla〜lid)支持之工件3之位置能夠容易且靈活地變換。此處，由複數個支持部11(11 a〜lid)支持之工件3亦可例如自未圖示之搬送機械手交接給變換姿勢單元1〇。而且，基板分斷裝置1之作業人員（以下，簡稱為「作業人員」）亦可將工件3載置於複數個支持部11上。如圖4及圖5所示，複數個（本實施形態中為4個）定位把手 13(13a〜13d)與對應之把持爪23(23a〜23d)鄰接設置。各定位把手13(13a〜13 d)藉由設置於基部20a上之移動機構（省略圖 156491.doc 201208996 示）而沿著對應之支臂26(26a〜26d)之長度方向進退。藉此，各疋位把手13(13&〜13(1)以使由各支持部11(11卜11(1)支持之工件3之位置為所期望之範圍之方式，將工件3(更具體而吕為切割片5)之外緣部4a向朝向升降台21之中心21a之方向擠壓。工件確認感測器15檢測工件3是否支持於複數個支持部 11。如圖5所示’工件綠認感測器丨5固定於與支持部1丨b鄰接、且不與交接部20之升降台2 1相干擾之位置。作為工件確認感測器15，亦可使用例如以非接觸來檢測有無工件3 之接近感測器。乂接部20保持呈水平姿勢且由複數個支持部丨丨支持之工件3。而且，交接部20於其與搬送單元5〇之間交接藉由擺動 3〇而呈立起姿勢之工件3。如圖4及圖5所示，交接部20 主要包含升降台21、複數個把持爪23(23a〜23d)、複數個吸附部25(25a〜25d)及交接用氣缸28。如圖5所示，升降台21具有自中心21a向外側呈放射狀延伸之複數個（本實施形態中為4根）支臂26(26a〜26d)。升降台 21防止由把持爪23及吸附部25保持之工件3發生變形。複數個（本實施形態中為4個）把持爪23(23a〜23d)(複數個把持部）把持於水平姿勢及立起姿勢之間進行變換姿勢之工件3(更具體而言為切割環4)之外緣部4a。如圖4及圖5所示’各把持爪23(23a〜23d)設置於對應之支臂26(26a〜26d) 之前端27(27a〜27d)附近。此處，如圖4所示，各定位把手13( 13a〜l：3d)之上端附近（為 156491.docThe detailed hardware configuration of the S 201208996 unit 80 and the breaking unit 85 is set forth below. <2. Configuration of Transformation Posture Unit> Figs. 4 and 5 are a side view and a plan view showing an example of the configuration of the transformation posture unit 分别. Here, the transformation posture unit 执行 performs an operation of changing the posture of the workpiece 3 and an operation of transferring the workpiece 3 to the transport unit 5 as described above. As shown in FIGS. 4 and 5, the 'transformation posture unit 10 mainly includes a plurality of support portions 11 (lla to lid), a plurality of positioning handles i3 (13a to 13d), a delivery portion 2A, a swing portion 30, and a pressing portion 35. . A plurality of (four in the present embodiment) support units ii (iia to lld) support the workpiece 3 that is transferred to the transformation posture unit 10. As shown in FIGS. 4 and 5, each of the support portions 11 (11a to 11d) is fixed to a position at which the outer edge portion 4a of the cutting ring 4 of the workpiece 3 can be supported, and does not interfere with the lifting table 21 of the interface portion 20. The location. Further, as shown in Figs. 4 and 5, each of the support portions u (iia to lid) has balls 12 (12a to 12d) which are provided to be freely rotatable at the tip end thereof. Thereby, each of the balls 12 (12a to 12d) can support the workpiece 3 and rotate. Therefore, the position of the workpiece 3 supported by each of the support portions 11 (lla to lid) can be easily and flexibly changed. Here, the workpiece 3 supported by the plurality of support portions 11 (11 a to lid) may be transferred to the conversion posture unit 1 from, for example, a transport robot (not shown). Further, the worker of the substrate breaking device 1 (hereinafter simply referred to as "worker") can also mount the workpiece 3 on the plurality of support portions 11. As shown in Figs. 4 and 5, a plurality of (four in the present embodiment) positioning handles 13 (13a to 13d) are provided adjacent to the corresponding grip claws 23 (23a to 23d). Each of the positioning handles 13 (13a to 13d) advances and retreats along the longitudinal direction of the corresponding arm 26 (26a to 26d) by a moving mechanism (not shown in Fig. 156491.doc 201208996) provided on the base portion 20a. Thereby, each of the grip handles 13 (13 & 13 13 (1) is to make the workpiece 3 (more specific) in such a manner that the position of the workpiece 3 supported by each support portion 11 (11b 11(1) is the desired range. The outer edge portion 4a of the cutting piece 5) is pressed toward the center 21a of the lifting table 21. The workpiece confirmation sensor 15 detects whether the workpiece 3 is supported by the plurality of supporting portions 11. As shown in Fig. 5, the workpiece The green sensor 丨5 is fixed to a position adjacent to the support portion 1b and does not interfere with the elevation table 2 of the delivery unit 20. As the workpiece confirmation sensor 15, for example, non-contact detection can be used. There is a proximity sensor of the workpiece 3. The splicing portion 20 holds the workpiece 3 in a horizontal posture and supported by a plurality of support portions 而且. Moreover, the interface portion 20 is transferred between the transfer unit and the transport unit 5〇 by swinging 3〇 The workpiece 3 is in a standing position. As shown in FIGS. 4 and 5, the delivery unit 20 mainly includes a lifting platform 21, a plurality of gripping claws 23 (23a to 23d), a plurality of adsorption portions 25 (25a to 25d), and a handover. The cylinder 28 is used. As shown in Fig. 5, the lifting platform 21 has a plurality of radially extending from the center 21a to the outside (this embodiment) In the middle, there are four) arms 26 (26a to 26d). The lifting table 21 prevents deformation of the workpiece 3 held by the grip claws 23 and the suction portion 25. A plurality of (four in the present embodiment) grip claws 23 (23a~) 23d) (a plurality of gripping portions) grip the outer edge portion 4a of the workpiece 3 (more specifically, the cutting ring 4) in a posture between the horizontal posture and the standing posture. As shown in FIGS. 4 and 5 The grip claws 23 (23a to 23d) are disposed near the front ends 27 (27a to 27d) of the corresponding arms 26 (26a to 26d). Here, as shown in Fig. 4, the positioning handles 13 (13a to l: 3d) are provided. Near the top end (for 156491.doc

S •12· 201208996 了方便圖示，僅表示定位把手13b之上端附近）分叉。因此，即便各定位把手13(13a~13d)為了對工件3進行定位而進退’各定位把手13(13a〜13d)亦不會與對應之把持爪 23(23a~23d)及吸附部25(25a~25d)形成干擾。而且，當利用各定位把手13( 13a〜13d)以使工件3之位置為所期望之範圍之方式進行定位時，工件3由各把持爪 23(23a 〜23d)圍繞。複數個（本實施形態中為4個）吸附部25(25a〜25d)與各把持爪23(23a〜23d)對應而設置，且吸附工件3(更具體而言為切割環4)之外緣部4a。因此’於複數個定位把手13(13a〜13d)進行定位之後，由複數個吸附部25(25a〜25d)吸附工件3，由此將由複數個支持部ll(lla〜lid)支持之工件3交接給交接部20。如此，各把持爪23(23a〜23d)及各吸附部25(25a〜25d)把持及吸附切割環4。即’脆性材料基板7並不由各把持爪 23(23a〜23d)及各吸附部25(25a〜25d)把持或吸附。因此，交接部20及擺動部30可執行工件3之保持及變換姿勢，而不會對形成於脆性材料基板7上之劃線8(參照圖3)帶來影響。交接用氣缸28將呈立起姿勢之工件3於交接部2〇及搬送單兀50之間進行交接時，使工件3於交接部2〇及搬送單元5〇之間移動。如圖4所示，交接用氣缸28包含主體部28a及拉桿29 » 拉桿29設置成能夠相對於主體部28a進退。如圖4所示，拉桿29之前端固定於升降台21之底面。因此，固定於升降 156491.doc •13- 201208996 台21上之立起姿勢之工件3對應於拉桿29之前進或後退動作而於交接部20與搬送單元50之間移動。擺動部30藉由使交接部2〇以擺動軸3 1為中心擺動，而使由交接部20保持之工件3之姿勢於水平姿勢與立起姿勢之間變換。如圖4及圖5所示，擺動部30主要包含擺動軸31、擺動框32及擺動用氣缸33。擺動軸31用作使交接部20相對於基部20a擺動之中心轴。如圖5所示，擺動軸31可旋轉地由軸承3〇a、3〇b支持（轴支持）。而且’轴承30a、30b分別固定於對應之托架30c、 30d 上》擺動框32係由多片（本實施形態中為3片）板體32 a〜3 2c形成之框體。如圖5所示’於板體32a、32c之間固定有擺動轴 3卜另一方面，於板體32b固定有交接部20之交接用氣缸28。擺動用氣缸33為使交接部20擺動之驅動部。如圖4所示，擺動用氣缸33主要包含主體部3 3a及拉桿34。拉才干3 4 s史置成能夠相對於主體部3 3 a進退。如圖4及圖5所示，主體部33a固定於交接部20之基部2〇a，拉桿34之前端 34a固定於擺動框32之板體32a » 因此，當拉桿34自主體部33a前進時，由把持爪23及吸附部25保持之工件3之姿勢自水平變換姿勢為立起姿勢。另一方面，當拉桿34後退至主體部33&時，由把持爪23及吸附部 25保持之工件3之姿勢自立起變換姿勢為水平姿勢。擠壓部35調整自搬送單元50之固定機構6〇賦予至工件3 之負载。藉此，由固定機構60執行將自交接部2〇交接給搬 15649I.doc -14- 201208996 送單兀50之工件3固定之動作、及將工件3之固定狀態解除之動作。如圖4及圖5所示，擠壓部35主要包含安裝框35a、複數個托架36(36a〜36d)及複數個擠壓用氣缸37(37a〜37d)。安裝框35a及複數個托架36(3 6a〜36d)用於將複數個擠壓用氣缸37(37a〜37d)固定於變換姿勢單元1〇上。如圖2及圖4 所示’安裝框35a形成為框體狀，並固定於基部2〇a。而且，如圖2所示’複數個（本實施形態中為4個）托架36(36a〜36d) 為自安裝框35a之縱板起沿著搬送單元5〇之搬送方向（箭頭 AR1方向）延伸之安裝板。複數個擠壓用氣缸37(37a〜37d)分別將對應之施壓構件 73(73a~73d，參照圖7)壓縮。如圖4及圖5所示，各擠壓用氣虹37(37a〜37d)主要包含複數個拉桿38(38a〜38d)及複數個輥39(39a〜39d)。複數個（本實施形態中為4個）拉桿38(38a〜38d)分別設置成能夠沿著箭頭AR2方向進退。而且，於各拉桿38(38a〜38d) 之前端安裝著對應之輥39(39a〜39d)。因此，當各拉桿38(38a〜38d)前進時，對應之親 39(39a~39d)抵接於各施壓構件73(73a〜73d，參照圖7)，藉此，各施壓構件73(73a〜73d)被壓縮。另一方面，當各拉桿3 8(3 8a~3 8d)後退時，對應之輥 39(39&~39(1)自各施壓構件73(73&〜73(1，參照圖7)離開。藉此，各施壓構件73(73a〜73d)之壓縮狀態被解除。複數個（本實施形態中為4個）輥39(39a〜39d)分別為設置 I56491.doc 201208996 於對應之拉桿38(3 8a〜38d)前端之旋轉體《如圖5所示，各輥 3 9(39a〜39d)設置成能夠以於鉛垂方向（與z軸大致平行之方向’與箭頭AR1方向大致垂直之方向）延伸之旋轉轴為中心旋轉。因此’當於各輥39(39a〜39d)抵接於對應之施壓構件 73(73a〜73d)之狀態下，搬送單元50沿搬送方向（箭頭AR1方向）移動時’各輥39(39a〜39d)以如下方式動作。即，各輥39 一邊將對應之施壓構件73(73a〜73d)壓縮，—邊於對應之施壓構件73(73a〜73d)上沿著搬送方向旋轉。因此，搬送單元 50可維持各輥39(39a〜39d)之壓縮狀態，且沿搬送方向移動。其結果為，即便搬送單元5〇相對於變換姿勢單元1 〇及主體單元40(固定側單元）移動時，亦可維持工件3之解除固定狀態。 ” <3.搬送單元之構成> 圖6及圖7係表示搬送單元5〇之構成之一例之前視圖及後視圖。圖8係表示可動夾持部61(61a〜61c)之構成之一例之前視圖。圖9係自圖8之v_v線觀察之導引爪69(69心附近之剖面圖。圖10係自圖7之w_w線觀察之導引爪的…％)附近之剖面圖。此處，搬送單元50接觸保持工件3之外緣部4a ,並且於執行工件3之授受之交接位置pi()與由分斷單元85執行脆性材料基板7之分斷之分斷位置P20之間搬送立起姿勢之工件3。藉此，能夠抑制包含搬送路徑於内之搬送單元50之設置面積（即搬送單$ 5〇之移動區域尺寸）^因此，能夠減小基板 15649丨.doc 201208996 分斷裝置1之尺寸。如圖6及圖7所示，搬送單―主要包含时台5ι及旋轉口 52此處’本實施形態之搬送單元㈣置成能夠藉由例如未圖示之線性馬達而相對於變換姿勢單元iq、主體單元 40及非接觸保持單元8〇等移動。旋轉台52是相對於固定台51旋轉之圓盤狀之旋轉部。如圖6及圖7所示，旋轉台52自由轉動地嵌入至形成於固定台 51之圓形狀之貫通孔51&中。而且，旋轉㈣具有將工件3 固定之固定機構60。另外，對於固定機構6〇之構成於下文中闡述。固定台51用作安褒例如用以使旋轉台52旋轉之旋轉要素、及用以使固定台51及旋轉台52相對於主體單元4〇行進之行進要素之安裝部。如圖6及圖7所示，固定台51主要包含導塊55、馬達56及皮帶57。如圖6所示，複數個（本實施形態中為6個）導塊乃設置於固疋台51之正面51b。另外，於各導塊55之内部將複數個滾珠（省略圖示）設置成能夠旋轉。而且，各導塊55安裝於對應之導件43、44時，各導塊55内之滾珠（省略圖示）以能夠旋轉之狀態與對應之導件43、44接觸。藉此，當各導塊55沿著對應之導件43、44(即沿著搬送方向（箭頭AR1方向））移動時，各導塊55内之滾珠（省略圖示）於對應之導件43、44上旋轉。因此，固定台5丨能夠沿著導件43、44順利地行進。馬達56係對旋轉台52賦予旋轉力之驅動部。皮帶π將由 156491.doc -17- 201208996 馬達56賦予之旋轉力傳遞至旋轉台52。如圖6所示，皮帶57 捲繞於旋轉台52、及安裝於馬達56之旋轉軸56&前端之馬達用/3輪58上。藉此，若馬達56旋轉，則固定於固定機構6〇之工件3旋轉。張力調整用滑輪59調整賦予至皮帶57之張力。本實施形態中，張力調整用滑輪59之位置（例如2軸方向上之位置）係由未圖示之定位機構來調整。藉此’可容易地消除皮帶57 之鬆弛，並且可容易地調整皮帶57之張力。因此，能夠良好地維持旋轉台52之旋轉狀態。 <3.1.固定機構之構成> 固定機構60將平板狀之工件3以立起姿勢固定。如圖6及圖7所示，固定機構60主要包含複數個夾持部61(61&〜61〇、 62及複數個擠壓部71。複數個夾持部61(61a〜61c)、62將配置於與擠壓部71之間之工件3之外緣部乜夾持。如圖7所示，複數個夾持部 61(61a〜61c)、62分別沿著擠壓框72而設置。另外，以下說明中，將標註符號61(61a〜61〇之夾持部稱為可動夾持部」’將標註符號62之夾持部稱為「固定夹持部」。即，複數個炎持部包含複數個可動夹持部6ι(6ΐ&〜叫及固定夾持部62。再換言之，複數個夾持部中之一部分為複數個可動夾持部61(61a〜61c)，複數個夾持部中之其餘部分為固定夾持部62。複數個（本實施形態、中為3個）可動夹持部6i(6u〜61〇分 156491.doc ,〇S • 12· 201208996 is a convenient illustration, showing only the vicinity of the upper end of the positioning handle 13b). Therefore, even if the positioning handles 13 (13a to 13d) advance and retreat for positioning the workpiece 3, the respective positioning handles 13 (13a to 13d) do not correspond to the corresponding gripping claws 23 (23a to 23d) and the suction portion 25 (25a). ~25d) forms interference. Further, when each of the positioning handles 13 (13a to 13d) is positioned such that the position of the workpiece 3 is within a desired range, the workpiece 3 is surrounded by the respective grip claws 23 (23a to 23d). A plurality of (four in the present embodiment) adsorption portions 25 (25a to 25d) are provided corresponding to the respective grip claws 23 (23a to 23d), and adsorb the outer edge of the workpiece 3 (more specifically, the cutting ring 4). Part 4a. Therefore, after the plurality of positioning handles 13 (13a to 13d) are positioned, the workpiece 3 is sucked by the plurality of adsorption portions 25 (25a to 25d), thereby transferring the workpiece 3 supported by the plurality of support portions 11 (lla to lid). The delivery unit 20 is provided. In this manner, each of the grip claws 23 (23a to 23d) and each of the adsorption portions 25 (25a to 25d) grip and suck the cutting ring 4. That is, the brittle material substrate 7 is not held or adsorbed by the respective grip claws 23 (23a to 23d) and the respective adsorption portions 25 (25a to 25d). Therefore, the joint portion 20 and the swing portion 30 can perform the holding and changing posture of the workpiece 3 without affecting the scribe line 8 (see Fig. 3) formed on the brittle material substrate 7. When the transfer cylinder 28 delivers the workpiece 3 in the standing position between the delivery unit 2 and the transport unit 50, the workpiece 3 is moved between the delivery unit 2 and the transport unit 5A. As shown in Fig. 4, the delivery cylinder 28 includes a main body portion 28a and a pull rod 29. The pull rod 29 is provided to be movable forward and backward with respect to the main body portion 28a. As shown in FIG. 4, the front end of the tie rod 29 is fixed to the bottom surface of the lift table 21. Therefore, the workpiece 3 fixed in the upright position on the table 126491.doc • 13 - 201208996 is moved between the delivery unit 20 and the transport unit 50 in response to the advance or retreat of the tie rod 29 . The swinging portion 30 swings the transfer portion 2A around the swing axis 31, and changes the posture of the workpiece 3 held by the delivery portion 20 between the horizontal posture and the standing posture. As shown in FIGS. 4 and 5, the swing portion 30 mainly includes a swing shaft 31, a swing frame 32, and a swing cylinder 33. The swing shaft 31 serves as a central axis for swinging the joint portion 20 with respect to the base portion 20a. As shown in Fig. 5, the swing shaft 31 is rotatably supported by the bearings 3A, 3B (shaft support). Further, the 'bearings 30a and 30b are respectively fixed to the corresponding brackets 30c and 30d.>> The swing frame 32 is a frame formed of a plurality of (three in the present embodiment) plate bodies 32a to 3 2c. As shown in Fig. 5, the swing shaft 3 is fixed between the plate bodies 32a and 32c. On the other hand, the transfer cylinder 28 for the delivery portion 20 is fixed to the plate body 32b. The swing cylinder 33 is a drive unit that swings the delivery unit 20. As shown in FIG. 4, the swing cylinder 33 mainly includes a main body portion 33a and a tie rod 34. The pull of 3 4 s is set to advance and retreat relative to the main body 3 3 a. As shown in FIGS. 4 and 5, the main body portion 33a is fixed to the base portion 2a of the interface portion 20, and the front end 34a of the tie rod 34 is fixed to the plate body 32a of the swing frame 32. Therefore, when the pull rod 34 is advanced from the main body portion 33a, The posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the horizontal posture to the standing posture. On the other hand, when the tie rod 34 retreats to the main body portion 33 & the posture of the workpiece 3 held by the grip claw 23 and the suction portion 25 is changed from the upright position to the horizontal posture. The pressing portion 35 adjusts the load applied to the workpiece 3 from the fixing mechanism 6 of the conveying unit 50. Thereby, the fixing mechanism 60 performs an operation of fixing the workpiece 3 from the delivery unit 2 to the loading unit 15649I.doc -14-201208996, and an operation of releasing the fixed state of the workpiece 3. As shown in Figs. 4 and 5, the pressing portion 35 mainly includes a mounting frame 35a, a plurality of brackets 36 (36a to 36d), and a plurality of pressing cylinders 37 (37a to 37d). The mounting frame 35a and the plurality of brackets 36 (36a to 36d) are for fixing the plurality of pressing cylinders 37 (37a to 37d) to the switching posture unit 1A. As shown in Fig. 2 and Fig. 4, the mounting frame 35a is formed in a frame shape and fixed to the base portion 2a. Further, as shown in Fig. 2, a plurality of (four in the present embodiment) brackets 36 (36a to 36d) are conveyed in the transport direction of the transport unit 5 from the vertical plate of the mounting frame 35a (in the direction of the arrow AR1). Extended mounting plate. The plurality of pressing cylinders 37 (37a to 37d) respectively compress the corresponding pressing members 73 (73a to 73d, see Fig. 7). As shown in Figs. 4 and 5, each of the pressing surges 37 (37a to 37d) mainly includes a plurality of tie rods 38 (38a to 38d) and a plurality of rollers 39 (39a to 39d). A plurality of (four in the present embodiment) tie rods 38 (38a to 38d) are respectively provided to be able to advance and retreat in the direction of the arrow AR2. Further, corresponding rollers 39 (39a to 39d) are attached to the front ends of the respective tie rods 38 (38a to 38d). Therefore, when each of the tie rods 38 (38a to 38d) advances, the corresponding pro-39 (39a to 39d) abuts against each of the pressing members 73 (73a to 73d, see Fig. 7), whereby the pressing members 73 ( 73a~73d) are compressed. On the other hand, when each of the tie rods 38 (38a to 38d) retreats, the corresponding roller 39 (39&~39(1) is separated from each of the pressing members 73 (73 &~73 (1, see Fig. 7). Thereby, the compression state of each of the pressing members 73 (73a to 73d) is released. A plurality of (four in the present embodiment) rollers 39 (39a to 39d) are respectively provided with I56491.doc 201208996 in the corresponding tie rods 38 ( 3 8a to 38d) Rotating body at the front end "As shown in Fig. 5, each of the rollers 39 (39a to 39d) is provided so as to be substantially perpendicular to the direction of the arrow AR1 in the vertical direction (the direction substantially parallel to the z-axis) The rotation axis of the extension rotates in the center. Therefore, when the respective rollers 39 (39a to 39d) abut against the corresponding pressing members 73 (73a to 73d), the conveying unit 50 is in the conveying direction (in the direction of the arrow AR1). When moving, the respective rollers 39 (39a to 39d) operate as follows. That is, each of the rollers 39 compresses the corresponding pressing members 73 (73a to 73d), and the corresponding pressing members 73 (73a to 73d). The upper portion rotates in the transport direction. Therefore, the transport unit 50 can maintain the compressed state of each of the rollers 39 (39a to 39d) and move in the transport direction. As a result, even if it is moved When the unit 5 is moved relative to the transformation posture unit 1 〇 and the main body unit 40 (fixed side unit), the workpiece 3 can be maintained in a released state. " <3. Configuration of transport unit" Fig. 6 and Fig. 7 show Fig. 8 is a front view showing an example of the configuration of the movable holding portion 61 (61a to 61c). Fig. 9 is a guiding claw 69 viewed from the v_v line of Fig. 8. (a cross-sectional view in the vicinity of 69 hearts. Fig. 10 is a cross-sectional view in the vicinity of ...% of the guide claws viewed from the w_w line of Fig. 7. Here, the conveying unit 50 contacts the outer edge portion 4a of the holding workpiece 3, and is executed The workpiece 3 is conveyed between the transfer position pi() of the workpiece 3 and the break position P20 at which the breaking unit 85 performs the breaking of the brittle material substrate 7. This can suppress the inclusion of the transport path. The installation area of the transport unit 50 (that is, the size of the moving area of the transport order $5〇) ^ Therefore, the size of the substrate 15649丨.doc 201208996 breaking device 1 can be reduced. As shown in Fig. 6 and Fig. 7, the transport order is mainly Included in the timetable 5 ι and the rotary port 52 here The transport unit (4) is placed so as to be movable with respect to the change posture unit iq, the main body unit 40, the non-contact holding unit 8A, etc. by a linear motor (not shown). The turntable 52 is a disk shaped to rotate relative to the fixed table 51. As shown in FIGS. 6 and 7, the turntable 52 is rotatably fitted into the circular through-holes 51 & formed in the fixed table 51. Moreover, the rotation (four) has a fixing mechanism 60 that fixes the workpiece 3. Further, the constitution of the fixing mechanism 6 is explained below. The fixing table 51 is used as an ampoule, for example, a rotating element for rotating the rotary table 52, and a mounting portion for advancing the fixed table 51 and the rotary table 52 with respect to the main unit 4b. As shown in Figs. 6 and 7, the fixing table 51 mainly includes a guide block 55, a motor 56, and a belt 57. As shown in Fig. 6, a plurality of (six in the present embodiment) guide blocks are provided on the front surface 51b of the fixed table 51. Further, a plurality of balls (not shown) are provided inside the respective guide blocks 55 so as to be rotatable. Further, when the respective guide blocks 55 are attached to the corresponding guide members 43, 44, the balls (not shown) in the respective guide blocks 55 are in contact with the corresponding guide members 43, 44 in a rotatable state. Thereby, when each of the guide blocks 55 moves along the corresponding guides 43 and 44 (that is, along the transport direction (arrow AR1 direction)), the balls (not shown) in the respective guide blocks 55 are corresponding to the guides 43. , 44 on the rotation. Therefore, the fixing table 5 can smoothly travel along the guides 43, 44. The motor 56 is a drive unit that applies a rotational force to the turntable 52. The belt π transmits the rotational force imparted by the motor 56 to the rotary table 52 by the 156491.doc -17-201208996 motor 56. As shown in Fig. 6, the belt 57 is wound around a rotary table 52 and a motor/3 wheel 58 attached to the front end of the rotary shaft 56 & Thereby, when the motor 56 rotates, the workpiece 3 fixed to the fixing mechanism 6A rotates. The tension adjusting pulley 59 adjusts the tension applied to the belt 57. In the present embodiment, the position of the tension adjusting pulley 59 (e.g., the position in the two-axis direction) is adjusted by a positioning mechanism (not shown). Thereby, the slack of the belt 57 can be easily eliminated, and the tension of the belt 57 can be easily adjusted. Therefore, the rotation state of the rotary table 52 can be maintained well. <3.1. Configuration of Fixing Mechanism> The fixing mechanism 60 fixes the flat workpiece 3 in the standing posture. As shown in FIG. 6 and FIG. 7, the fixing mechanism 60 mainly includes a plurality of clamping portions 61 (61 & 61 61, 62 and a plurality of pressing portions 71. The plurality of clamping portions 61 (61a to 61c), 62 will The outer edge portion of the workpiece 3 disposed between the pressing portion 71 is sandwiched. As shown in Fig. 7, a plurality of holding portions 61 (61a to 61c) and 62 are provided along the pressing frame 72, respectively. In the following description, the reference numeral 61 (the nip portion of 61a to 61〇 is referred to as a movable nip portion) 'the nip portion denoted by the reference numeral 62 is referred to as a "fixed nip portion". That is, a plurality of inflammatory holding portions A plurality of movable clamping portions 6ι (6ΐ&~called and fixed clamping portions 62. In other words, one of the plurality of clamping portions is a plurality of movable clamping portions 61 (61a to 61c), and a plurality of clamping portions The rest of the parts are fixed clamping portions 62. A plurality of (three in this embodiment, three in the middle) movable clamping portions 6i (6u~61〇 156491.doc, 〇

S 201208996 別於相對於擠壓框72接近或離開之方向進退。如圖7及圖8 所示，各可動夾持部61 (61 a〜6 lc)主要包含抵接部63、轉動板64、施壓構件66、可動導件67(67a〜67c)及導弓丨爪 69(69a〜69c)。此處，可動夾持部61a〜61c具有彼此相同之硬體構成。因此’以下僅對可動夾持部61a之硬體構成進行說明。抵接部63係由例如金屬成形之球狀體，且安裝於轉動板 64上。轉動板64是以轉動軸64a為中心轉動之板體。例如，旋轉致動器41(41a)之搖桿42(42a)(參照圖1及圖2)擺動，搖才干42(42a)抵接於對應之夾持部6i(61a)之抵接部63時，轉動板64以轉動軸64a為中心向箭頭ri方向轉動。連桿65為連接轉動板64及可動導件67(67a)之寬度較窄之板體。連桿65之一端利用轉動軸65a而與轉動板64連動連結，且連桿65之另一端利用轉動軸65b而與可動導件67(67a) 連動連結。施壓構件66由彈簧等彈性構件形成。如圖8所示，施壓構件66之一端66a固定於可動側之轉動板64上，施壓構件66之另一端66b.固定於固定側之強化板64b。藉此，若轉動板64 沿箭頭R1方向轉動，則施壓構件66對轉動板64向與箭頭Μ 方向相反之方向施壓。可動導件67(67a)為平板狀之可動構件。可動導件67向相對於擠Μ框72接近或離開之方向進退，由此來調整工件3 之固定狀態。即’利用旋轉致動器41(41a)使搖桿42(42a)擺動，使轉動 156491.doc •19· 201208996 板64沿箭頭R1方向轉動時，可動導件67(67a)向自擠壓框72 離開之方向移動。藉此’可動導件67(67〇成為炎持解除狀態。另一方面，當利用旋轉致動器41(41a)使搖桿42(42a)回到擺動則之位置’由於施壓構件66之施壓力轉動板64向與箭頭R1方向相反之方向轉動時，可動導件67(67&)向接近於擠壓框72之方向移動。藉此，可動導件67(67玨)成為其與擠壓框72之間能夾持工件3之狀態。如此°又置於主體單元40之複數個旋轉致動器 41(41a〜41c)用作驅動部（第1驅動部），使複數個夾持部 61(61a〜61c)、62中之一部分（複數個可動夾持部61a〜6lc)向相對於擠壓框72接近或離開之方向進退。如圖8所示，缺口 6〇a係形成於可動導件”之擠壓框72側之凹口。此處，當於變換姿勢單元1〇之交接部2〇與搬送單兀5〇之間交接工件3時，把持爪23(23a)可配置於由缺口 6〇a 形成之空間（例如間隙75(75a))中（參照圖8及圖丨丨至圖i3)。因此，於交接工件3時，能夠有效防止把持爪23(23a)與可動導件67(67a)相干擾。複數個（本實施形態中為兩個）導引爪69(69a)與可動導件 67(67a)及擠壓框72協作，從而夾持工件3。如圖8所示，導引爪69(69a)於沿著對向之擠壓框72之輪廓線之方向上離開而安裝於可動導件67(673)上。而且，如圖9所示，以導引爪 69(69a)之階差面60b位於可動導件67(67a)之下端面之更下方之方式，將導引爪69(69a)安裝於可動導件67(67a) 156491.docS 201208996 does not advance or retreat in the direction of approaching or leaving relative to the crush frame 72. As shown in FIGS. 7 and 8, each of the movable clamping portions 61 (61 a to 6 lc) mainly includes an abutting portion 63, a rotating plate 64, a pressing member 66, a movable guiding member 67 (67a to 67c), and a guide bow. Claws 69 (69a to 69c). Here, the movable holding portions 61a to 61c have the same hard body configuration. Therefore, only the hardware configuration of the movable grip portion 61a will be described below. The abutting portion 63 is formed of, for example, a metal-formed spherical body and is attached to the rotating plate 64. The rotating plate 64 is a plate body that rotates around the rotating shaft 64a. For example, the rocker 42 (42a) of the rotary actuator 41 (41a) swings (see FIGS. 1 and 2), and the rocker 42 (42a) abuts against the abutment portion 63 of the corresponding clamping portion 6i (61a). At this time, the rotating plate 64 is rotated in the direction of the arrow ri around the rotating shaft 64a. The link 65 is a plate body having a narrow width connecting the rotating plate 64 and the movable guide 67 (67a). One end of the link 65 is coupled to the rotating plate 64 by the rotating shaft 65a, and the other end of the link 65 is coupled to the movable guide 67 (67a) by the rotating shaft 65b. The pressing member 66 is formed of an elastic member such as a spring. As shown in Fig. 8, one end 66a of the pressing member 66 is fixed to the movable side rotating plate 64, and the other end 66b of the pressing member 66 is fixed to the reinforcing side reinforcing plate 64b. Thereby, when the rotating plate 64 is rotated in the direction of the arrow R1, the pressing member 66 presses the rotating plate 64 in a direction opposite to the direction of the arrow Μ. The movable guide 67 (67a) is a flat movable member. The movable guide 67 advances and retreats in a direction approaching or departing from the squeezing frame 72, thereby adjusting the fixed state of the workpiece 3. That is, the rocker 42 (42a) is swung by the rotary actuator 41 (41a) to rotate the 156491.doc • 19·201208996 plate 64 in the direction of the arrow R1, and the movable guide 67 (67a) is directed toward the self-squeezing frame. 72 Move in the direction of leaving. Thereby, the movable guide 67 (67〇 becomes the inflammatory holding state. On the other hand, when the rocker 42 (42a) is returned to the swing position by the rotary actuator 41 (41a), the pressing member 66 is used. When the pressing rotary plate 64 is rotated in a direction opposite to the direction of the arrow R1, the movable guide 67 (67 &) moves in a direction close to the pressing frame 72. Thereby, the movable guide 67 (67玨) becomes the same The state in which the workpiece 3 can be clamped between the press frames 72. The plurality of rotary actuators 41 (41a to 41c) placed in the main body unit 40 are used as the drive portion (the first drive portion) to make a plurality of clamps. One of the portions 61 (61a to 61c) and 62 (the plurality of movable holding portions 61a to 6lc) advances and retreats in a direction approaching or away from the pressing frame 72. As shown in Fig. 8, the notch 6〇a is formed in The recess of the movable guide member on the side of the pressing frame 72. Here, when the workpiece 3 is transferred between the transfer portion 2A of the change posture unit 1 and the transfer unit 5, the grip claw 23 (23a) is configurable. In the space formed by the notch 6〇a (for example, the gap 75 (75a)) (refer to FIG. 8 and FIG. 9 to FIG. i3), therefore, when the workpiece 3 is transferred, there is The grip claw 23 (23a) is prevented from interfering with the movable guide 67 (67a). A plurality of (two in the present embodiment) guide claws 69 (69a) cooperate with the movable guide 67 (67a) and the press frame 72. Thereby, the workpiece 3 is clamped. As shown in Fig. 8, the guiding claw 69 (69a) is attached to the movable guide 67 (673) by being separated in the direction of the contour line of the opposing pressing frame 72. As shown in FIG. 9, the guide claw 69 (69a) is attached to the movable guide in such a manner that the step surface 60b of the guide claw 69 (69a) is located below the lower end surface of the movable guide 67 (67a). 67(67a) 156491.doc

S •20· 201208996 上。因此，如圖9所示，藉由可動導件67(67a)之下端面60c、導引爪69(69a)之階差面6〇b及擠壓框72之對向面60d與工件 3接觸，而實現可動夾持部61(61a)及擠壓部71對工件3之夾持》如圖7所示，固定夾持部62固定於擠壓框72附近。如圖7 所不’固定夾持部62主要包含固定導件68及導引爪69(69(1)。固定導件68為平板狀之固定構件。即，固定導件68與可動導件67(67a〜67c)不同，不於相對於擠壓框72接近或離開之方向上進退，而是固定於旋轉台52上。藉此’能夠以固定夾持部62之位置為基準容易地執行工件3相對於固定機構6〇之定位。因此，藉由使用複數個可動夾持部61(61a〜61c)及固定夾持部62而能夠良好地將工件3 夾持及夾持解除。如圖7所不，缺口 68a係形成於固定導件68之擠壓框72側之凹口。此處，當於變換姿勢單元10之交接部20與搬送單元50之間交接工件3時，把持爪23(23d)可配置於由缺口 68a 形成之空間（例如間隙75(75d))中（參照圖7及圖i 1至圖13)。因此，於乂接工件3時，能夠有效防止把持爪23(23句與固定導件68相干擾。複數個（本貫把形態中為兩個）導引爪69(㈣)盘固定導件 68及擠壓框72協作，從而失持工件3。如圖7所示，導引爪 69(69d)於固疋導件68上沿著對向之擠壓框η之輪廓線之方向上離開而安裝。而且’如圖1〇所示，以導引爪咐㈣之 156491.doc -21· 201208996 階差面60b位於比固定導件68之側端面68b更靠擠壓框72側之方式’將導引爪69(69d)安裝於固定導件68上。因此，如圖9所示，藉由固定導件68之側端面68b、導引爪69(69d)之階差面60b及擠壓框72之對向面60d與工件3接觸，而實現固定夾持部62及擠壓部71對工件3之夾持。擠壓部71藉由於與可動夾持部61(61a〜61c)及固定夾持部 62之間夾持工件3而擠壓工件3之外緣部4a。如圖7所示，擠壓部71主要包含擠壓框72及複數個施壓構件73(73a〜73d) ^ 如圖6及圖7所示，擠壓框72形成為環狀（更具體而言為矩形環狀）’且安裝於旋轉台52之中央附近。如圖9及圖10所示擠壓框7 2自工件3之第2主面3 b側擠壓工件3之外緣部 4a ° 複數個（本實施形態中為4個）施壓構件73(73a〜73d)由彈簧等彈性構件形成。如圖7所示，各施壓構件73(73 a〜73幻與擠壓框72之四個角部中之對應之角連結。此處’若各施壓構件73(73a〜73d)自對應之擠壓用氣缸 37(37a〜37d)(參照圖4及圖5)受到自圖7之紙面之正面朝向背面之方向（即與箭頭AR2方向相反之方向）之力，則各施壓構件73(73a〜73d)被壓縮。即，擠壓部35之擠壓用氣缸 37(37a〜3 7d)用作為向對應之施壓構件73(73a〜73d)賦予壓縮力之驅動部（第2驅動部）。另一方面’當拉桿38(3 8&〜3 8(1)後退、輥39(39&〜39〇1)自對應之施壓構件73(73 a〜73 d)離開時，各施壓構件73(73a〜73d) 對擠壓框72施壓箭頭AR2方向（施壓方向）之施壓力。 •22- 156491.docS •20· 201208996. Therefore, as shown in Fig. 9, the lower end surface 60c of the movable guide 67 (67a), the step surface 6〇b of the guiding claw 69 (69a), and the opposite surface 60d of the pressing frame 72 are in contact with the workpiece 3. Further, the movable holding portion 61 (61a) and the pressing portion 71 are held by the workpiece 3. As shown in Fig. 7, the fixed holding portion 62 is fixed to the vicinity of the pressing frame 72. As shown in Fig. 7, the fixed holding portion 62 mainly includes a fixed guide 68 and a guiding claw 69 (69 (1). The fixed guide 68 is a flat fixing member. That is, the fixed guide 68 and the movable guide 67 are provided. (67a to 67c) are different from each other, and are not advanced or retracted in the direction of approaching or departing from the pressing frame 72, but are fixed to the rotary table 52. Thereby, the workpiece can be easily executed with reference to the position of the fixed holding portion 62. 3 Positioning with respect to the fixing mechanism 6〇. Therefore, by using the plurality of movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62, the workpiece 3 can be satisfactorily clamped and clamped. The notch 68a is formed in a recess on the side of the pressing frame 72 of the fixed guide 68. Here, when the workpiece 3 is transferred between the interface 20 of the change posture unit 10 and the transport unit 50, the grip claw 23 is grasped ( 23d) can be disposed in a space formed by the notch 68a (for example, the gap 75 (75d)) (refer to Fig. 7 and Figs. 1 to 13). Therefore, when the workpiece 3 is spliced, the grip claw 23 can be effectively prevented (23) The sentence interferes with the fixed guide 68. The plurality of (the two in the form) the guiding claw 69 ((4)) the disk fixing guide 68 and the squeeze The frame 72 cooperates to lose the workpiece 3. As shown in Fig. 7, the guide claw 69 (69d) is mounted on the solid guide 68 in the direction of the contour of the opposing pressing frame n. As shown in FIG. 1A, the guide claws of the guide claws (four) 156491.doc -21·201208996 step faces 60b are located closer to the side of the pressing frame 72 than the side end faces 68b of the fixed guides 68. 69 (69d) is attached to the fixed guide 68. Therefore, as shown in Fig. 9, by the side end face 68b of the fixed guide member 68, the step face 60b of the guide claw 69 (69d), and the pair of the pressing frame 72 The facing surface 60d is in contact with the workpiece 3, and the clamping of the workpiece 3 by the fixed clamping portion 62 and the pressing portion 71 is achieved. The pressing portion 71 is caused by the movable clamping portion 61 (61a to 61c) and the fixed clamping portion 62. The outer edge portion 4a of the workpiece 3 is pressed by sandwiching the workpiece 3. As shown in Fig. 7, the pressing portion 71 mainly includes a pressing frame 72 and a plurality of pressing members 73 (73a to 73d). As shown in Fig. 7, the pressing frame 72 is formed in a ring shape (more specifically, a rectangular ring shape) and is mounted near the center of the rotary table 52. As shown in Figs. 9 and 10, the frame 7 2 is pressed from the workpiece 3. The second main surface 3 b side is pressed against the workpiece 3 The outer edge portion 4a ° is plural (four in the present embodiment) pressing members 73 (73a to 73d) are formed of elastic members such as springs. As shown in Fig. 7, each pressing member 73 (73 a to 73) The corresponding corners of the four corners of the pressing frame 72 are connected. Here, if each of the pressing members 73 (73a to 73d) is from the corresponding pressing cylinder 37 (37a to 37d) (refer to Figs. 4 and 5) The pressing members 73 (73a to 73d) are compressed by the force from the front side of the paper surface of Fig. 7 toward the back side (i.e., the direction opposite to the direction of the arrow AR2). In other words, the pressing cylinders 37 (37a to 37d) of the pressing portion 35 serve as driving portions (second driving portions) for applying a compressive force to the corresponding pressing members 73 (73a to 73d). On the other hand, when the tie rods 38 (3 8 & 〜 3 8 (1) are retracted, and the rollers 39 (39 & 〜 39 〇 1) are separated from the corresponding pressing members 73 (73 a to 73 d), the pressing members are respectively pressed. 73 (73a to 73d) applies pressure to the pressing frame 72 in the direction of the arrow AR2 (pressure direction). • 22-156491.doc

S 201208996 藉此，工件3因受到來自各施壓構件73(73a〜73d)之施壓力而被可動夾持部61(61a~61c)及固定夾持部62與擠壓框72炎持。其結果為’使工件3被固定於固定機構6〇上。如此，固定機構60上之工件3之固定狀態由變換姿勢單元 10之擠壓用氣缸37(37a〜37d)(第2驅動部）及主體單元4〇之旋轉致動器41(41&~41<:)(第1驅動部）來進行調整。即’藉由搬送單元50之固定機構60、變換姿勢單元1〇之擠壓用氣缸37(37a〜37d)及主體單元4〇之旋轉致動器 41(41a〜41c)，執行對成為搬送對象之工件3之固定。因此’本實施形態中，亦將變換姿勢單元1〇、主體單元 40及搬送單元50統稱為「搬送系統」。 <3.2.工件之固定方法> 圖11至圖13係用以說明由固定機構60對工件3之固定步驟及解除固定步驟之後視圖。此處，對將呈立起姿勢之工件3固定於固定機構60上之步驟進行說明。另外，該固定步驟是藉由控制單元90控制變換姿勢單元 10、主體單元40、搬送單元50中所包含之各要素之動作來實現。而且，開始正式固定步驟之前，使搬送單元5〇移動至交接位置Ρ10之解除位置Pll(參照圖2)，工件3由各吸附部 25(25a〜25d)吸附保持。正式固定步驟中，首先利用擺動部30使交接部2〇移動（擺動）。藉此’由交接部20保持之工件3為立起姿勢，同時使工件3移動至搬送單元50之固定機構60附近。 156491.doc •23- 201208996 其次，使設置於主體單元40之複數個旋轉致動器 41(41a〜41c)(參照圖2)動作，且使各搖桿42(42a〜42c)擺動。藉此，使各可動夾持部61(61a~61c)之可動導件67(67a〜67c) 向自擠壓框72離開之方向移動。繼而’使複數個擠壓用氣缸37(37a〜37d)動作，從而各拉桿38(38a〜38d)自氣缸主體前進。藉此，各施壓構件 73(73a〜73d)被對應之輥39(39a〜39d)壓縮，擠壓框72向與各施壓構件73(73a〜73d)之施壓方向（箭頭AR2方向）相反之方向移動。繼而’使搬送單元50自交接位置P10之解除位置pn移動至固定位置P12(參照圖1及圖2)。藉此，各擠壓用氣缸 37(37a〜37d)前端之輥39(39a~39d)將對應之施壓構件 73(73a~73d)壓縮，且施壓構件73(73a〜73d)上旋轉。因此，搬送單元50於已使擠壓框72自工件3離開之狀態下沿著搬送方向移動。繼而，於擠壓框72自工件3離開了之狀態下，工件3之外緣部4a抵接於固定導件68之側端面68b(圖10)。繼而’於工件3之外緣部4a抵接於固定導件68之側端面 68b(圖1〇)之狀態下，使旋轉致動器41(41a〜41c)動作，從而對應之搖桿42(42a〜42c)回到擺動前之位置》藉此’各可動夾持部61(61a〜61c)之可動導件67(67a〜67c) 向接近於擠壓框72之方向移動。因此，工件3之外緣部4a抵接於各可動導件67(67a〜67c)。繼而’於工件3之外緣部4a抵接於各可動夾持部 61 (61 a〜61c)及固定夾持部62之狀態下，使各擠壓用氣缸 156491.docS 201208996 Thereby, the workpiece 3 is pressed by the movable holding portions 61 (61a to 61c) and the fixed holding portion 62 and the pressing frame 72 by the pressing force from the pressing members 73 (73a to 73d). As a result, the workpiece 3 is fixed to the fixing mechanism 6A. In this manner, the fixed state of the workpiece 3 on the fixing mechanism 60 is changed by the pressing cylinders 37 (37a to 37d) (second driving portion) of the switching posture unit 10 and the rotary actuator 41 of the main body unit 4 (41 &~41<lt ;:) (1st drive unit) to make adjustments. In other words, the fixing mechanism 60 of the conveying unit 50, the pressing cylinders 37 (37a to 37d) of the posture changing unit 1A, and the rotary actuators 41 (41a to 41c) of the main unit 4〇 perform the transfer target. The workpiece 3 is fixed. Therefore, in the present embodiment, the conversion posture unit 1A, the main body unit 40, and the transport unit 50 are collectively referred to as a "transport system". <3.2. Method of Fixing Workpiece> Figs. 11 to 13 are views for explaining a step of fixing the workpiece 3 by the fixing mechanism 60 and a step of releasing the fixing step. Here, the procedure of fixing the workpiece 3 in the standing posture to the fixing mechanism 60 will be described. Further, this fixing step is realized by the control unit 90 controlling the actions of the elements included in the transformation posture unit 10, the main body unit 40, and the transport unit 50. Then, before the start of the main fixing step, the transport unit 5 is moved to the release position P11 (see Fig. 2) of the transfer position Ρ10, and the workpiece 3 is sucked and held by each of the adsorption units 25 (25a to 25d). In the formal fixing step, first, the swing portion 30 is used to move (spend) the delivery portion 2〇. Thereby, the workpiece 3 held by the delivery unit 20 is in the standing posture, and the workpiece 3 is moved to the vicinity of the fixing mechanism 60 of the transport unit 50. 156491.doc • 23-201208996 Next, a plurality of rotary actuators 41 (41a to 41c) (see FIG. 2) provided in the main unit 40 are operated, and the respective rockers 42 (42a to 42c) are swung. Thereby, the movable guides 67 (67a to 67c) of the movable gripping portions 61 (61a to 61c) are moved in the direction away from the pressing frame 72. Then, the plurality of pressing cylinders 37 (37a to 37d) are operated, and the respective levers 38 (38a to 38d) are advanced from the cylinder main body. Thereby, each of the pressing members 73 (73a to 73d) is compressed by the corresponding rollers 39 (39a to 39d), and the pressing frame 72 is directed to the pressing members 73 (73a to 73d) (direction of the arrow AR2). Move in the opposite direction. Then, the transport unit 50 is moved from the release position pn of the delivery position P10 to the fixed position P12 (see Figs. 1 and 2). Thereby, the rollers 39 (39a to 39d) at the tips of the respective pressing cylinders 37 (37a to 37d) compress the corresponding pressing members 73 (73a to 73d), and the pressing members 73 (73a to 73d) rotate. Therefore, the transport unit 50 moves in the transport direction in a state where the press frame 72 has been separated from the workpiece 3. Then, in a state where the pressing frame 72 is separated from the workpiece 3, the outer edge portion 4a of the workpiece 3 abuts against the side end surface 68b of the fixed guide 68 (Fig. 10). Then, in a state where the outer edge portion 4a of the workpiece 3 abuts against the side end surface 68b of the fixed guide 68 (FIG. 1A), the rotary actuator 41 (41a to 41c) is operated to correspond to the rocker 42 ( 42a to 42c) returning to the position before the swinging" The movable guides 67 (67a to 67c) of the respective movable holding portions 61 (61a to 61c) are moved in the direction close to the pressing frame 72. Therefore, the outer edge portion 4a of the workpiece 3 abuts against each of the movable guides 67 (67a to 67c). Then, in the state where the outer edge portion 4a of the workpiece 3 abuts against each of the movable nip portions 61 (61 a to 61c) and the fixed nip portion 62, the respective squeezing cylinders 156491.doc

S •24· 201208996 37(37a~37d)動作，從而使各拉桿38(38a〜38d)後退。藉此’未受到由各擠壓用氣缸37(37a〜37d)賦予至對應之施壓構件73(73a~73d)之壓縮力，擠壓框72向各施壓構件73 之施壓方向移動。繼而，如圖9及圖1〇所示，可動導件 67(67a~67c)及固定導件68之階差面60b與擠壓框72之對向面60d之距離變窄。因此，工件3夾於可動夾持部61 (61 a〜61 c)及固定夾持部62 與擠壓部71之間’立起姿勢之工件3由固定機構6〇固定。即，根據正式固定步驟’可將立起姿勢之工件3良好地固定於固定機構60上。繼而，於工件3由固定機構60固定之狀態下，解除各吸附部25(25a〜25d)之吸附狀態。藉此，交接部2〇對工件3之保持狀態得以解除，工件3之固定步驟完成。 <3.3.工件之解除固定方法> 此處，一邊參照圖11至圖13，一邊說明對藉由固定機構 60而以立起姿勢固定之工件3解除該工件3之固定狀態之步驟。另外，該解除步驟與工件3之固定步驟同樣地是藉由控制單元90控制變換姿勢單元1〇、主體單元4〇、搬送單元5〇中所包含之各要素之動作來實現。而且，開始正式解除步驟之前，搬送單元5〇移動至交接位置P10之固定位置P12(參照圖2)，工件3由固定機構6〇固定。正式解除步驟中，首先將由固定機構6〇固定之工件3被各 15649J.doc -25- 201208996 吸附部25(25a〜25d)吸附。藉此，工件3於固定於固定機構60 之狀態下由交接部20保持。其次，於工件3之外緣部4a抵接於複數個可動夾持部 61(6 la〜61c)及固定夾持部62之狀態下，使複數個擠壓用氣缸37(37a~37d)(第2驅動部）動作，從而各拉桿38(38a〜38d) 自氣缸主體前進。藉此，各施壓構件73(73a〜73d)被對應之輥39(39a〜39d) 壓縮’使擠壓框72向與各施壓構件73(73a〜73d)之施壓方向 (箭頭AR2方向）相反之方向移動。而且，如圖9及圖1〇所示，可動導件67(67a〜67c)及固定導件68之階差面60b與擠壓框 72之對向面60d之距離擴大。因此，固定機構6〇對立起姿勢之工件3之固定被解除’工件3由交接部2 0之各吸附部 25(25a〜25d)吸附保持。如此’擠壓部35之各擠壓用氣缸37(37a〜37d)壓縮對應之施壓構件73(73a〜73d) ’由此可解除工件3之固定狀態。繼而’於工件3之外緣部4a抵接於複數個可動夾持部 61(61a〜61c)及固定夾持部62之狀態下，使複數個旋轉致動器41(4la〜41c)(第1驅動部）動作，從而使各搖桿42(42a〜42c) 擺動。藉此，使各可動夾持部61 (61 a〜61 c)之可動導件 67(67a〜67c)向自擠壓框72離開之方向移動。繼而’使搬送單元50自交接位置pi〇之固定位置p12移動至解除位置Pll(參照圖1及圖2)。藉此，各擠壓用氣缸 37(37a〜37d)前端之輥39(39a〜39d)將對應之施壓構件 73(73a〜73d)壓縮，且於施壓構件73(73a〜73d)上旋轉。因 -26· 156491.docS • 24· 201208996 37 (37a to 37d) operates to retract each of the tie rods 38 (38a to 38d). Thereby, the compression force applied to the corresponding pressing members 73 (73a to 73d) by the respective pressing cylinders 37 (37a to 37d) is not moved, and the pressing frame 72 is moved in the pressing direction of each pressing member 73. Then, as shown in Figs. 9 and 1B, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is narrowed. Therefore, the workpiece 3 is sandwiched between the movable holding portions 61 (61 a to 61 c) and the workpiece 3 in the upright position between the fixed holding portion 62 and the pressing portion 71 by the fixing mechanism 6 . That is, the workpiece 3 in the standing posture can be satisfactorily fixed to the fixing mechanism 60 in accordance with the formal fixing step'. Then, in a state where the workpiece 3 is fixed by the fixing mechanism 60, the adsorption state of each of the adsorption portions 25 (25a to 25d) is released. Thereby, the holding state of the workpiece 3 by the delivery portion 2 is released, and the fixing step of the workpiece 3 is completed. <3.3. Method of releasing the workpiece> Here, the step of releasing the fixed state of the workpiece 3 by the fixing mechanism 60 in the standing position by the fixing mechanism 60 will be described with reference to Figs. 11 to 13 . Further, this release step is realized by the control unit 90 controlling the operations of the elements included in the conversion posture unit 1A, the main unit unit 4, and the transport unit 5 in the same manner as the fixing step of the workpiece 3. Then, before the official release step is started, the transport unit 5 moves to the fixed position P12 of the delivery position P10 (see Fig. 2), and the workpiece 3 is fixed by the fixing mechanism 6?. In the main release step, the workpiece 3 fixed by the fixing mechanism 6 is first adsorbed by the respective adsorption portions 25 (25a to 25d) of 15649J.doc -25 - 201208996. Thereby, the workpiece 3 is held by the delivery portion 20 in a state of being fixed to the fixing mechanism 60. Next, in a state in which the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable holding portions 61 (6 la to 61 c) and the fixed nip portion 62, a plurality of pressing cylinders 37 (37a to 37d) are formed ( The second drive unit operates to advance the respective rods 38 (38a to 38d) from the cylinder main body. Thereby, each of the pressing members 73 (73a to 73d) is compressed by the corresponding rollers 39 (39a to 39d) to press the pressing frame 72 toward the pressing members 73 (73a to 73d) (arrow AR2 direction). ) Move in the opposite direction. Further, as shown in Figs. 9 and 1B, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is enlarged. Therefore, the fixing mechanism 6 固定 the fixing of the workpiece 3 in the standing posture is released. The workpiece 3 is sucked and held by the respective adsorption portions 25 (25a to 25d) of the delivery portion 20. Thus, the respective pressing cylinders 37 (37a to 37d) of the pressing portion 35 compress the corresponding pressing members 73 (73a to 73d)', whereby the fixed state of the workpiece 3 can be released. Then, in a state in which the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62, a plurality of rotary actuators 41 (4a to 41c) are formed. The 1 drive unit operates to swing the respective rockers 42 (42a to 42c). Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61 a to 61 c) are moved in the direction away from the pressing frame 72. Then, the transport unit 50 is moved from the fixed position p12 of the transfer position pi to the release position P11 (see Figs. 1 and 2). Thereby, the rollers 39 (39a to 39d) at the tips of the respective pressing cylinders 37 (37a to 37d) compress the corresponding pressing members 73 (73a to 73d) and rotate on the pressing members 73 (73a to 73d). . Because -26· 156491.doc

S 201208996 此’搬送單元50於已使擠壓框72自工件3離開之狀態下沿著搬送方向移動。而且，於擠壓框72自工件3離開了之狀態下’工件3之外緣部4a自固定導件68之側端面68b(圖10)離開。如此’根據正式解除步驟，能夠良好地解除由固定機構60固定之工件3之固定狀態。繼而’由擺動部30使交接部20移動（擺動），藉此由交接部20保持之工件3自搬送單元5〇之固定機構6〇離開。而且，工件3自固定機構60離開之後，使複數個擠壓用氣缸 37(37a〜37d)之拉桿38(38a〜38d)後退，由此擠壓框72向施壓方向（箭頭AR2方向）移動，工件3之解除固定步驟完成。 <4.非接觸保持單元之構成> 圖14係表示非接觸保持單元80之構成之一例之前視圖。此處，非接觸保持單元80將如上所述般由搬送單元50接觸保持之工件3之第1主面3 a輔助性地非接觸保持。如圖14所示，非接觸保持單元80主要包含安裝台81、複數個第i吸引部83及複數個第2吸引部84。此處，本實施形態中，亦將符號83之「第1吸引部」與符號84之「第2吸引部84」統稱為「吸引部」。即，複數個吸引部包含複數個第1吸引部83及複數個第2吸引部84。安裝台81以與行進至分斷位置P20為止之搬送單元5〇對向之方式設置。如圖2所示，安裝台81固定於主體單元切上。而且’如圖1及圖14所示，安裝台81之鉛垂面8ia用作安裝複數個第1吸引部83及複數個第2吸引部84之安裝面。 ***孔81 b為於鉛垂方向（與Z軸平行之方向）延伸之貫通 15649l.doc •27- 201208996 長孔’且形成於安裝台81之中央附近。第1分斷棒86經由插入孔81b到達工件3之第i主面3a。如圖1及圖14所示，複數個吸引部（複數個第1吸引部83及複數個第2吸引部84)設置於安裝台81之鉛垂面81a上。複數個吸引部吸引對向之立起姿勢之工件3之第1主面3a，藉此’以非接觸狀態保持工件3。此處，本實施形態中，作為複數個第1吸引部83及複數個第2吸引部84亦可使用伯努利吸盤。如圖14所示，複數個（本實施形態中為12個）第i吸引部83 於沿著形成於安裝台81上之***孔81 b之長度方向兩側之狀態下’設置於安裝台81之鉛垂面81 a上。各第1吸引部83 由例如伯努利吸盤構成。藉此，能夠藉由各第1吸引部83 吸引對向之工件3而將工件3以非接觸狀態保持。如圖14所示’複數個（本實施形態中為12個）第2吸引部84 於自兩側夾持複數個第1吸引部83之狀態下，設置於安裝台 81之鉛垂面81a上。各第2吸引部84與第1吸引部83同樣地由例如伯努利吸盤構成。藉此，各第2吸引部84與第1吸引部 83同樣地吸引對向之工件3，由此能夠將工件3以非接觸狀態保持。此處，如圖14所示，各第1吸引部83之直徑小於各第2吸引部84之直徑。而且，如圖14所示，複數個第1吸引部83 中相鄰接之第1吸引部83彼此之間隔D1 (第1間隔）小於複數個第2吸引部84中相鄰接之第2吸引部84彼此之間隔D2(第2 間隔）。 • 28- I56491.docS 201208996 This 'transport unit 50 moves in the transport direction in a state where the press frame 72 has been separated from the workpiece 3. Further, the outer edge portion 4a of the workpiece 3 is separated from the side end surface 68b (Fig. 10) of the fixed guide 68 in a state where the pressing frame 72 is separated from the workpiece 3. Thus, according to the official release step, the fixed state of the workpiece 3 fixed by the fixing mechanism 60 can be satisfactorily released. Then, the transfer portion 20 is moved (oscillated) by the swing portion 30, whereby the workpiece 3 held by the delivery portion 20 is separated from the fixing mechanism 6 of the transfer unit 5A. After the workpiece 3 is separated from the fixing mechanism 60, the plurality of pressing cylinders 37 (37a to 37d) of the pressing cylinders 37 (37a to 38d) are retracted, whereby the pressing frame 72 is moved in the pressing direction (arrow AR2 direction). The lifting step of the workpiece 3 is completed. <4. Configuration of Non-contact Holding Unit> Fig. 14 is a front view showing an example of the configuration of the non-contact holding unit 80. Here, the non-contact holding unit 80 assists the non-contact holding of the first main surface 3a of the workpiece 3 which is held and held by the transport unit 50 as described above. As shown in Fig. 14, the non-contact holding unit 80 mainly includes a mounting table 81, a plurality of i-th attracting portions 83, and a plurality of second attracting portions 84. Here, in the present embodiment, the "first suction portion" of the symbol 83 and the "second suction portion 84" of the symbol 84 are collectively referred to as "suction portion". That is, the plurality of suction portions include a plurality of first suction portions 83 and a plurality of second suction portions 84. The mounting table 81 is disposed to face the transport unit 5A that has traveled to the breaking position P20. As shown in Fig. 2, the mounting table 81 is fixed to the main unit and cut. Further, as shown in Figs. 1 and 14, the vertical surface 8ia of the mounting table 81 serves as a mounting surface for mounting a plurality of first suction portions 83 and a plurality of second suction portions 84. The insertion hole 81b is a through hole 15649l.doc •27-201208996 extending in the vertical direction (the direction parallel to the Z axis) and is formed near the center of the mounting table 81. The first breaking bar 86 reaches the i-th main surface 3a of the workpiece 3 via the insertion hole 81b. As shown in Figs. 1 and 14, a plurality of suction portions (a plurality of first suction portions 83 and a plurality of second suction portions 84) are provided on the vertical surface 81a of the mounting table 81. The plurality of suction portions attract the first main surface 3a of the workpiece 3 that is in the upright position, thereby holding the workpiece 3 in a non-contact state. Here, in the present embodiment, a Bernoulli chuck can be used as the plurality of first suction portions 83 and the plurality of second suction portions 84. As shown in FIG. 14, a plurality of (12 in the present embodiment) i-th attraction portions 83 are provided on the mounting table 81 along the two sides in the longitudinal direction of the insertion holes 81b formed in the mounting table 81. The vertical plane 81 a. Each of the first suction portions 83 is constituted by, for example, a Bernoulli chuck. Thereby, the workpiece 3 can be held in a non-contact state by sucking the opposing workpiece 3 by each of the first suction portions 83. As shown in Fig. 14, the plurality of (12 in the present embodiment) second attracting portions 84 are provided on the vertical surface 81a of the mounting table 81 in a state in which the plurality of first attracting portions 83 are sandwiched from both sides. . Similarly to the first suction portion 83, each of the second suction portions 84 is constituted by, for example, a Bernoulli chuck. As a result, each of the second suction portions 84 attracts the workpiece 3 in the same direction as the first suction portion 83, whereby the workpiece 3 can be held in a non-contact state. Here, as shown in Fig. 14, the diameter of each of the first suction portions 83 is smaller than the diameter of each of the second suction portions 84. Further, as shown in FIG. 14, the interval D1 (first interval) between the adjacent first suction portions 83 of the plurality of first suction portions 83 is smaller than the second attraction adjacent to the plurality of second suction portions 84. The portions 84 are spaced apart from each other by D2 (second interval). • 28- I56491.doc

S 201208996 如此，複數個第1吸引部83比複數個第2吸引部84更密集地配置。藉此，能夠更切實地將***孔8lb附近之工件3(換言之’第1分斷棒86附近之工件3)非接觸保持。因此，能夠良好地執行脆性材料基板7之分斷。 <5.分斷單元之構成> 圖1 5係表示分斷單元8 5之構成之一例之俯視圖。此處，分斷單元85將由搬送單元50及非接觸保持單元80形成保持狀態之脆性材料基板7沿著劃線8分斷。如圖1 5所示，分斷單元85主要包含第1分斷棒86及複數個第2分斷棒87。第1分斷棒86以經由***孔8lb到達搬送單元50側之方式進退。如圖14及圖15所示，第1分斷棒86沿著安裝台81之插入孔81b於一個方向（***孔81b之長度方向，Z軸方向）（以下簡稱為「延伸方向」）延伸。複數個（本實施形態中為2根）第2分斷棒87夾持由搬送單元5 0保持之工件3而設置於第1分斷棒8 6之相反側。各第2 分斷棒87於與第1分斷棒86平行之方向（Z軸方向）延伸。此處，如圖15所示’搬送方向（箭頭AR1方向）上之複數個第2分斷棒87僅隔開所期望之距離D3而配置。而且，如圖！ 5 所示，第2分斷棒87、第1分斷棒86及第2分斷棒87沿著自交接位置P10朝向分斷位置P20之方向（Y軸負方向）而依序配置。而且，第1分斷棒86自形成有劃線8之第2主面儿之相反側之第1主面3a側起（於此情形時，第i分斷棒86抵接於切割片 5)沿著劃線8賦予負載。 156491.doc -29· 201208996 即，負載係自形成有劃線8之第2主面3b之相反側之第1 主面3a賦予至割線8。目此，能夠良好且切實地執行沿著劃線8之脆性材料基板7之分斷。第1進退驅動部86a藉由對第1分斷棒86賦予驅動力，使第 1分斷棒86於進退方向（箭頭AR6方向，參照圓15)進退。例如，第1進退驅動部86a於第i分斷棒86之延伸方向與劃線8 大致平行之狀態下使第！分斷棒86向又軸負方向移動，由此使第1分斷棒86接近於脆性材料基板7之第2主面3a。第2進退驅動部87a藉由對複數個第2分斷棒打賦予驅動力，使複數個第2分斷棒87於進退方向（箭頭AR6方向，參照圖15)進退。例如，第2進退驅動部87a於複數個第2分斷棒 87之延伸方向與劃線8大致平行之狀態下使複數個第2分斷棒87向X軸正方向移動，由此使複數個第2分斷棒接近於脆性材料基板7之第2主面3 b。如此’當利用第1及第2進退驅動部86a、87a使第1及第2 分斷棒86、87進退時，則脆性材料基板7會被該等第丨及第2 为斷棒86、87夾持。其結果為，呈立起姿勢之脆性材料基板7沿著劃線8被分斷。即’利用基板分斷裝置1執行之分斷處理中，第1及第2 分斷棒86、87之接近於脆性材料基板7之方向（進退方向（箭頭AR6方向）），均為相對於重力方向（乙軸負方向）大致垂直。藉此’重力對第1及第2分斷棒86、87之影響相同。因此，無需針對第1及第2分斷棒86、87之每一個採取用以減輕重力景々響之措施，便可良好地將脆性材料基板7分斷。 -30- 156491.docIn the case of S 201208996, the plurality of first suction portions 83 are arranged more densely than the plurality of second suction portions 84. Thereby, the workpiece 3 (in other words, the workpiece 3 in the vicinity of the first breaking bar 86) in the vicinity of the insertion hole 8lb can be more reliably held in contact. Therefore, the breaking of the brittle material substrate 7 can be performed satisfactorily. <5. Configuration of Breaking Unit> Fig. 1 is a plan view showing an example of the configuration of the breaking unit 85. Here, the breaking unit 85 divides the brittle material substrate 7 which is held in the holding state by the conveying unit 50 and the non-contact holding unit 80 along the scribe line 8. As shown in Fig. 15, the breaking unit 85 mainly includes a first breaking bar 86 and a plurality of second breaking bars 87. The first breaking bar 86 advances and retreats so as to reach the side of the conveying unit 50 via the insertion hole 81b. As shown in Fig. 14 and Fig. 15, the first breaking bar 86 extends in one direction (the longitudinal direction of the insertion hole 81b, the Z-axis direction) (hereinafter simply referred to as "extension direction") along the insertion hole 81b of the mounting table 81. The plurality of (two in the present embodiment) second breaking bars 87 are placed on the opposite side of the first breaking bar 86 by sandwiching the workpiece 3 held by the conveying unit 50. Each of the second breaking bars 87 extends in a direction (Z-axis direction) parallel to the first breaking bars 86. Here, as shown in Fig. 15, the plurality of second breaking bars 87 in the conveying direction (the direction of the arrow AR1) are disposed only by the desired distance D3. And, as shown! As shown in Fig. 5, the second breaking bar 87, the first breaking bar 86, and the second breaking bar 87 are sequentially arranged in the direction from the intersection position P10 toward the breaking position P20 (the Y-axis negative direction). Further, the first breaking bar 86 is from the side of the first main surface 3a on the opposite side to the second main surface on which the scribe line 8 is formed (in this case, the i-th breaking bar 86 abuts against the cutting piece 5) The load is given along the scribe line 8. 156491.doc -29·201208996 That is, the load is applied to the secant line 8 from the first main surface 3a on the opposite side to the second main surface 3b on which the scribe line 8 is formed. Therefore, the breaking of the brittle material substrate 7 along the scribe line 8 can be performed satisfactorily and reliably. The first advance/reverse drive unit 86a applies a driving force to the first breaking bar 86, and advances and retreats the first breaking bar 86 in the advancing and retracting direction (in the direction of the arrow AR6, referring to the circle 15). For example, the first advance/retract drive unit 86a makes the first state in a state in which the extension direction of the i-th break bar 86 is substantially parallel to the scribe line 8! The breaking bar 86 is moved in the negative direction of the axis, whereby the first breaking bar 86 is brought close to the second main surface 3a of the brittle material substrate 7. The second advance/retract drive unit 87a applies a driving force to the plurality of second breaking bars, and advances and retracts the plurality of second breaking bars 87 in the advancing and retracting direction (in the direction of the arrow AR6, see Fig. 15). For example, the second advance/retract drive unit 87a moves the plurality of second breaking bars 87 in the positive X-axis direction in a state in which the extending direction of the plurality of second breaking bars 87 is substantially parallel to the scribe line 8, thereby making a plurality of The second breaking bar is close to the second main surface 3b of the brittle material substrate 7. When the first and second breaking bars 86 and 87 are moved forward and backward by the first and second advancing and retracting driving units 86a and 87a, the brittle material substrate 7 is broken by the first and second breaking bars 86 and 87. Clamping. As a result, the brittle material substrate 7 in the standing posture is broken along the scribe line 8. In other words, in the breaking process performed by the substrate breaking device 1, the directions of the first and second breaking bars 86 and 87 close to the brittle material substrate 7 (the advancing and retracting direction (arrow AR6 direction)) are all relative to gravity. The direction (the negative direction of the B-axis) is approximately vertical. Thereby, the influence of gravity on the first and second split bars 86, 87 is the same. Therefore, it is not necessary to take measures for reducing the gravity of the first and second breaking bars 86, 87, and the brittle material substrate 7 can be well cut. -30- 156491.doc

S 201208996 <6.本實施形態之基板分斷裝置之優點> 如上所述，本貫施形態之基板分斷裝置1中，當脆性材料基板7被保持於搬送早元50(保持單元）之情形時，第1及第2 分斷棒86、87配置於以立起姿勢保持之脆性材料基板7之兩主面3 a、3 b側。此處，與本貫施形態不同，對如下情況進行研究：第j 及第2分斷棒配置於脆性材料基板之上下方，使第1及第2 分斷棒分別自脆性材料基板之上側及下側接近。於此情形時，第1及第2分斷棒接近於脆性材料基板之方向與重力方向所成之角刀別約為〇0(deg)、180o(deg)。即，重力對第1 及第2分斷棒之影響不同。其結果為，於未對重力之影響進订任何調整之情形時，會產生自第〗及第2分斷棒賦予至脆性材料基板之負載不同之問題。其次，如本實施形態，對如下情況進行研究：使第1及第 2分斷棒86、87分別自以立起姿勢保持之脆性材料基板7之兩主面3a、3b側接近。於此情形時，第1及第2分斷棒86、 87接近於脆性材料基板7之方向與重力方向所成之角皆約為 90o(deg)。藉此，重力對第1及第2分斷棒86、87之影響相同。因此， ’’’、需針對第1及第2分斷棒86、87之每一個採取用以減輕重力衫響之措施’便可良好地將脆性材料基板7分斷。而且，根據本實施形態之基板分斷裝置丨及其固定機構 6〇工件3之外緣部4a由可動夾持部61 (61a〜61c)及固定夾持 P 62與擠壓部71良好地失持。因此，可良好地將立起姿勢 I56491.doc -31 . 201208996 之工件3固定。而且，本實施形態之基板分斷裝置〖及其變換姿勢單元中，搬送單元50之固定機構60藉由自變換姿勢單元ι〇之擠 2 35賦予之負載而執行工件3之固定及工件3之解除固定即搬送單元50不需要用以執行工件3之固定及工件3 之解除固定之要素，從而無需將與該要素相關之配管及配線配置於移動側（搬送單元5G)與固定側（例如變換姿勢單元等）之間。因此’藉由使用變換姿勢單元1〇而可提高行進時之搬送單元50之安全性及維護時之作業人員之作業效率。而且，藉由本實施形態之基板分斷裝置⑸現之搬送系統 :’借助來自設置於主體單元4Q及變換姿勢單元ig(固定側單元）上之複數個旋轉致動器^^““卜^第丨驅動部丨及複數個擠壓用氣缸37(37a〜37d)(第2驅動部）之驅動力，執行工件3之固定及工件3之解除固定。即，搬送單元50不需要用以執行工件3之固定及工件3之解除固定之驅動部（第1及第2驅動部），從而無需將與該要素相關之配管及配線配置於移動側（搬送單元5〇)與固定側（變換姿勢單元10及主體單元40)之間。因此，可提高行進時之搬送單元50之安全性及維護時之作業人員之作業效率。進而，本實施形態之基板分斷裝置丨及藉由該基板分斷裝置1實現之保持裝置不僅由搬送單元5〇之固定機構6〇將: 件3之外緣部4a接觸保持，亦可藉由非接觸保持單元將工件3之主面（更具體而言為第1主面3a)非接觸保持。因此，即 156491.doc 32· 201208996 便於因工件3之特性而纟法將除了工件3之外緣部牝以外 (例如工件之主面3 a、3b)接觸保持之情形時’亦可藉由搬送單元50(保持單元）及非接觸保持單元8〇而將工件3良好地保持。 <7·變形例> 以上，已對本發明之實施形態進行了說明，但本發明並不限定於上述實施形態，而可進行各種變形。 (1) 本實施形態中，說明了可動導件67(67a〜67c)及導引爪69(69a〜69c)如圖8及圖9所示相互獨立而構成，但並不限定於此。例如，可動導件67(67a)及導引爪69(69a)亦可形成為一體。 (2) 另外，本實施形態中，說明了搬送單元5〇相對於變換姿勢單元10及主體單元40而移動，但並不限定於此。例如亦可為變換妥勢單元10及主體單元40相對於搬送單元 5 0而移動。如此，各單元10、40及50之移動方式只要使搬送單元5〇相對於變換姿勢單元10及主體單元4〇(固定側單元）而相對性地移動即可。 (3) 另外，本實施形態中’變換姿勢單元1〇之工件確認感測器15(參照圖4及圖5)於升降台21附近僅設置—個，但工件確認感測器15之個數並不限定於此。亦可於升降台2 t附近設置複數個（兩個以上）工件確認感測器15。【圖式簡單說明】圖1係表示本發明之實施形態中之基板分斷裝置之構成 15649I.doc -33· 201208996 之一例之前視圖；圖2係表示本發明之實施形態中之基板分斷裝置之構成之一例之後視圖；圖3係表不工件之構成之一例之前視圖；圖4係表示變換姿勢單元之構成之一例之側視圖；圖5係表示變換姿勢單元之構成之一例之俯視圖；圖6係表示搬送單元之構成之一例之前視圖；圖7係表示搬送單元之構成之一例之後視圖；圖8係表示可動夾持部之構成之一例之前視圖；圖9係自圖8之V_v線觀察之導引爪附近之剖面圖；圖10係自圖7之W-W線觀察之導引爪附近之剖面圖； _係用以說明固定機構對卫件之固定步驟及解除固定步驟之後視圖；圖12係用以說明固定機構對工件之固定步驟及解除固定步驟之後視圖；圖3係用以說a月固疋機構對工件之固定步驟及解除固定步驟之後視圖；圖U係表示非接觸保持單元之構成之-例之前視圖；及圖15係表示分斷單元之構成之—例之俯視圖。【主要元件符號說明】S 201208996 <6. Advantages of the substrate breaking device of the present embodiment> As described above, in the substrate cutting device 1 of the present embodiment, the brittle material substrate 7 is held in the transport early element 50 (holding unit) In this case, the first and second breaking bars 86 and 87 are disposed on the two main faces 3 a and 3 b of the brittle material substrate 7 held in the standing posture. Here, unlike the present embodiment, the following cases are studied: the jth and the second breaking bars are disposed above and below the brittle material substrate, and the first and second breaking bars are respectively from the upper side of the brittle material substrate and The lower side is close. In this case, the angle between the first and second breaking bars close to the direction of the brittle material substrate and the direction of gravity is about 〇0 (deg) and 180 (deg). That is, gravity has different effects on the first and second split bars. As a result, when any adjustment is not made to the influence of gravity, there arises a problem that the load applied to the brittle material substrate from the first and second breaking bars is different. Then, in the present embodiment, the first and second breaking bars 86 and 87 are brought close to each other on the two main faces 3a and 3b of the brittle material substrate 7 held in the standing posture. In this case, the angle between the first and second breaking bars 86, 87 in the direction close to the brittle material substrate 7 and the direction of gravity is about 90 (deg). Thereby, the influence of gravity on the first and second split bars 86, 87 is the same. Therefore, the brittle material substrate 7 can be satisfactorily cut by taking measures for reducing the heavy-duty response for each of the first and second breaking bars 86 and 87. Further, according to the substrate cutting device 本 and its fixing mechanism 6 of the present embodiment, the outer edge portion 4a of the workpiece 3 is favorably lost by the movable nip 61 (61a to 61c) and the fixed nip P 62 and the pressing portion 71. hold. Therefore, the workpiece 3 in the standing posture I56491.doc -31 . 201208996 can be satisfactorily fixed. Further, in the substrate cutting device of the present embodiment, the fixing mechanism 60 of the conveying unit 50 performs the fixing of the workpiece 3 and the workpiece 3 by the load given by the pressing of the posture unit 135. The unremovable transport unit 50 does not need to perform the fixation of the workpiece 3 and the release of the workpiece 3, and it is not necessary to arrange the piping and the wiring related to the element on the moving side (the transport unit 5G) and the fixed side (for example, changing Between posture units, etc.). Therefore, by using the change posture unit 1〇, the safety of the transport unit 50 during traveling and the work efficiency of the operator at the time of maintenance can be improved. Further, the substrate cutting device (5) of the present embodiment has a transfer system: 'by a plurality of rotary actuators provided from the main body unit 4Q and the change posture unit ig (fixed side unit) ^"" The driving force of the 丨 driving unit 丨 and the plurality of pressing cylinders 37 (37a to 37d) (second driving unit) is performed to fix the workpiece 3 and release the workpiece 3. In other words, the transport unit 50 does not need to be configured to perform the fixing of the workpiece 3 and the drive unit (the first and second drive units) for releasing the workpiece 3, and it is not necessary to arrange the piping and the wiring related to the element on the moving side (transport) The unit 5 is connected to the fixed side (the transformation posture unit 10 and the main body unit 40). Therefore, it is possible to improve the safety of the transport unit 50 during traveling and the work efficiency of the worker during maintenance. Further, the substrate cutting device 本 of the present embodiment and the holding device realized by the substrate breaking device 1 are not only brought into contact with the outer edge portion 4a of the member 3 by the fixing mechanism 6 of the conveying unit 5, but also The main surface of the workpiece 3 (more specifically, the first main surface 3a) is held in contact by the non-contact holding unit. Therefore, 156491.doc 32· 201208996 facilitates the transfer of the outer edge of the workpiece 3 (for example, the main faces 3 a, 3b of the workpiece) due to the characteristics of the workpiece 3 The unit 50 (holding unit) and the non-contact holding unit 8 are used to hold the workpiece 3 well. <7. Modifications> The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments, and various modifications can be made. (1) In the present embodiment, the movable guides 67 (67a to 67c) and the guide claws 69 (69a to 69c) are configured to be independent of each other as shown in Figs. 8 and 9, but are not limited thereto. For example, the movable guide 67 (67a) and the guiding claw 69 (69a) may be integrally formed. (2) In the present embodiment, the transport unit 5A has been described as moving relative to the change posture unit 10 and the main unit 40, but the present invention is not limited thereto. For example, the conversion unit 10 and the main unit 40 may be moved relative to the transport unit 50. As described above, the movement of each of the units 10, 40, and 50 may be such that the transport unit 5 is relatively moved with respect to the change posture unit 10 and the main unit 4 (fixed side unit). (3) In the present embodiment, the workpiece confirmation sensor 15 (see FIGS. 4 and 5) of the "change posture unit 1" is provided only in the vicinity of the elevation table 21, but the number of the workpiece confirmation sensors 15 is set. It is not limited to this. A plurality of (two or more) workpiece confirmation sensors 15 may also be provided near the elevator 2 t. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front view showing an example of a substrate breaking device according to an embodiment of the present invention, 15649I.doc-33·201208996; FIG. 2 is a view showing a substrate breaking device according to an embodiment of the present invention; FIG. 3 is a front view showing an example of a configuration of a transformation posture unit; FIG. 5 is a side view showing an example of a configuration of a transformation posture unit; 6 is a front view showing an example of a configuration of a transport unit; Fig. 7 is a rear view showing an example of a configuration of a transport unit; Fig. 8 is a front view showing an example of a configuration of a movable grip portion; Fig. 9 is a view taken from line V_v of Fig. 8. FIG. 10 is a cross-sectional view of the vicinity of the guiding claw viewed from the WW line of FIG. 7; FIG. 10 is a view showing the fixing step of the fixing mechanism and the post-fixing step; FIG. It is used to explain the fixing step of the fixing mechanism to the workpiece and the view after the lifting step; FIG. 3 is a diagram for explaining the fixing step and the fixing step of the fixing mechanism to the workpiece. View; FIG noncontact U series of units constituting the holding - view prior embodiment; and FIG. 15 are diagrams of the configuration of the breaking unit - the top view. [Main component symbol description]

S 1 基板分斷裝置 3 工件 3 a 第1主面 3b 第2主面 156491.doc -34- 201208996 4 4a 4b 5 7 8 9 10 ll(lla〜lid) 12(12a~12d) 13(13a~13d) 15 20 20a 21 21a 23(23a~23d) 25(25a〜25d) 26(26a〜26d) 27(27a〜27d) 28 28a 29 30 切割環外緣部開口切割片脆性材料基板劃線電子零件變換姿勢單元支持部滾珠定位把手工件確認感測器交接部基部升降台中心把持爪吸附部支臂前端交接用氣缸主體部拉桿擺動部 156491.doc -35- 201208996 30a、30b 軸承 30c ' 30d 托架 31 擺動轴 32 擺動框 32a〜32c 板體 - 33 擺動用氣缸 . 33a 主體部 34 拉桿 34a 前端 35 擠壓部 35a 安裝框 36(36a 〜36d) 托架 37(37a〜37d) 擠壓用氣缸 38(38a~38d) 拉桿 39(39a 〜39d) 輥 40 主體單元 41(41a 〜41c) 旋轉致動器 42(42a〜42c) 搖桿 43 ' 44 導件 ^ 50 搬送單元 51 固定台 51a 貫通孔 51b 正面 52 旋轉台 156491.doc -36-S 1 substrate breaking device 3 workpiece 3 a first main surface 3b second main surface 156491.doc -34- 201208996 4 4a 4b 5 7 8 9 10 ll(lla~lid) 12(12a~12d) 13(13a~ 13d) 15 20 20a 21 21a 23(23a~23d) 25(25a~25d) 26(26a~26d) 27(27a~27d) 28 28a 29 30 Cutting ring outer edge opening cutting piece brittle material substrate marking electronic parts Transformation posture unit support portion Ball positioning handle Workpiece confirmation sensor delivery portion Base lifting platform Center gripping claw adsorption portion Arm front end delivery cylinder body portion Pull rod swinging portion 156491.doc -35- 201208996 30a, 30b Bearing 30c ' 30d Frame 31 swinging shaft 32 swinging frame 32a to 32c plate body - 33 swinging cylinder. 33a main body portion 34 tie rod 34a front end 35 pressing portion 35a mounting frame 36 (36a to 36d) bracket 37 (37a to 37d) 38 (38a to 38d) Pull rod 39 (39a to 39d) Roller 40 Main unit 41 (41a to 41c) Rotary actuator 42 (42a to 42c) Rocker 43 '44 Guide member 50 50 Transfer unit 51 Fixing table 51a Through hole 51b front 52 rotary table 156491.doc -36-

Q 201208996 60 60a、68a 60b 60c 60d 61(61a〜61c) 、 62 63 64 65 66 、 73(73a~73d) 67(67a〜67c) 68 69(69a~69d) 71 72 75(75a~75d) 80 81 81a、81b 83 84 85 86 86a 固定機構缺口階差面下端面對向面炎持部抵接部轉動板連桿施壓構件可動導件固定導件導引爪擠壓部擠壓框間隙非接觸保持單元安裝台 ***孔第1吸引部第2吸引部分斷單元第1分斷棒第1進退驅動部 156491.doc -37- 201208996 87 第2分斷棒 87a 第2進退驅動部 90 控制單元 91 唯讀記憶體 91a 程式 92 隨機存取記憶體 93 中央處理單元 AR1、AR2、AR3 箭頭 D1 ' D2 間隔（第1及第2間隔） P10 交接位置 Pll 解除位置 P12 固定位置 P20 分斷位置 s 156491.doc -38-Q 201208996 60 60a, 68a 60b 60c 60d 61 (61a~61c), 62 63 64 65 66, 73 (73a~73d) 67(67a~67c) 68 69(69a~69d) 71 72 75(75a~75d) 80 81 81a, 81b 83 84 85 86 86a Fixing mechanism Notch step face Lower end face opposite face inflammation Abutment part Rotating plate link Pressure member Moving guide Fixed guide Guide pin Extrusion part Pressing frame gap Non Contact holding unit mounting table insertion hole 1st suction portion 2nd suction partial breaking unit 1st breaking bar 1st advancing and retracting driving unit 156491.doc -37- 201208996 87 2nd breaking bar 87a 2nd advancing and retracting driving unit 90 Control unit 91 Read-only memory 91a Program 92 Random access memory 93 Central processing unit AR1, AR2, AR3 Arrow D1 ' D2 Interval (1st and 2nd interval) P10 Handover position Pll Release position P12 Fixed position P20 Break position s 156491. Doc -38-

Claims

201208996 七、申請專利範圍： κ _種@定機構’其特徵在於，其仙立起姿勢固定平板狀之工件者，且包含： (a)擠壓部，其擠壓上述工件之外緣部；及 ()複數個夾持部’其各自夹持配置於與上述擠壓部之間之上述工件之上述外緣部；上述擠壓部包含： (a_i)環狀之擠壓框；及 ()施⑧構件，其藉由對上述㈣框賦予施壓力而將上述工件之上述外緣部固定於上述擠麼框與各夾持部之間；且土述複數個夾持部之各個沿著上述擠難而設置。 2.如請求項1之固定機構，其中上述複數個夹持部中之一部分 . τ ^ 〇丨刀為向相對於上述擠壓框接近或離開之方向進退之可動夾持部。 3 ·如請求項2之固定機構，其中上述複數個灸持部中之其餘部分為固定於上述擠壓框附近之固定夾持部。 4·如請求項1之固定機構，其中上述工件包含：環狀體，其於平板之中央形成有開口；口之方式安片材體，其以覆蓋上述環狀體之上述門裝；及脆性材料基板，其以位於上述開口上之方式貼附於上 156491.doc 201208996 述片材體。 5. 一種工件之固定方法其特微在於，其係將平板狀之工件固疋於固定機構者，上述固定機構包含：擠屋部，其擠壓上述工件之外緣部；及複數個夾持部，宜冬自忐 , /、各自夾持配置於與上述擠壓部之間之上述工件之上述外緣部；上述擠壓部包含·· 環狀之擠壓框；及施壓構件，其藉由對上述擠愿框賦予施虔力而將上述工件之上述外緣部固定於上述擠愿框與各夾持部之間；上述複數個夾持部包含：可動夾持部，其向相對於上述擠麗框接近或離開之方向進退；及固定夾持部，其固定於上述擠壓框附近；上述複數個夾持部之各個沿著上述擠壓框而設置·且上述工件之固定方法包含下述步驟： a)使上述工件呈立起姿勢#銘叙$ 巧女男亚移勤至上述固定機構附近； b) 使各可動夾持部向自±述擠遂框離開之方向移動； c) 使上述擠壓框向與由上述施壓構件對上述擠壓框施壓之施壓方向相反之方向移動； d) 藉由使上述固定夾持部相對於上述工件相對性地移動，將上述工件之上述外緣部抵接於上述固定失持部； 156491.doc 201208996 e) 於執行上述步驟d)之後，使各可動夾持部向接近於上述擠壓框之方向移動，藉此將上述工件之上述外緣部抵接於各可動夾持部；及 f) 於執行上述步驟e)之後，使上述擠壓框向上述施壓方向移動，藉此使立起姿勢之上述工件由上述固定機構固定。 6. —種工件之解除固定方法，其特徵在於，其係解除被固定於固定機構之平板狀之工件之固定者；且上述固定機構包含：擠壓部，其擠壓上述工件之外緣部；及複數個夾持部，其各自夾持配置於與上述擠壓部之間之上述工件之上述外緣部；上述擠壓部包含：環狀之擠壓框；及施壓構件，其藉由對上述擠壓框賦予施壓力而將上述工件之上述外緣部固定於上述擠壓框與各夾持部之間；上述複數個夾持部包含：可動夾持部，其向相對於上述擠壓框接近或離開之方向進退；及固定失持部’其固定於上述擠壓框附近；且上述工件之解除固定方法包含下述步驟： a)於上述工件之上述外緣部抵接於上述複數個可動夾持。卩及上述固定夾持部之狀態下，使上述擠壓框向與由上述施壓構件對上述擠壓框施壓之施壓方向相反之方 156491.doc 201208996 向移動，而;i字由上述固定機構對上述工件之固定解除； b)於上述工件之上述外緣部抵接於上述固定夾持部之狀態下，於執行上述步驟a)之後，使各可動夾持部向自上述擠壓框離開之方向移動； C)藉由使上述固定夾持部相對於上述工件相對性地移動’而使上述工件之上述外緣部自上述固定夾持部離開；及 d)使上述工件自上述固定機構離開。 156491.doc201208996 VII. Patent application scope: κ _ species@定机构' is characterized in that it is fixed in the form of a flat-shaped workpiece, and includes: (a) a pressing portion that presses the outer edge portion of the workpiece; And () a plurality of clamping portions each sandwiching the outer edge portion of the workpiece disposed between the pressing portion; the pressing portion comprising: (a_i) an annular pressing frame; and () a member 8 that fixes the outer edge portion of the workpiece between the extrusion frame and each of the clamping portions by applying a pressure to the frame (4); and each of the plurality of clamping portions is described above It is difficult to set up. 2. The fixing mechanism of claim 1, wherein one of the plurality of clamping portions is a movable gripping portion that advances and retreats in a direction approaching or departing from the pressing frame. 3. The fixing mechanism of claim 2, wherein the remaining portion of the plurality of moxibustion portions is a fixed nip fixed to the vicinity of the extrusion frame. 4. The fixing mechanism of claim 1, wherein the workpiece comprises: an annular body having an opening formed in a center of the flat plate; and a mouth sheet body covering the door of the annular body; and brittleness The material substrate is attached to the sheet body of the above 156491.doc 201208996 in such a manner as to be located on the opening. 5. A fixing method of a workpiece, which is characterized in that a flat-shaped workpiece is fixed to a fixing mechanism, and the fixing mechanism comprises: a squeezing portion that presses an outer edge portion of the workpiece; and a plurality of clamping portions And the outer edge portion of the workpiece disposed between the pressing portion and the pressing portion; the pressing portion includes an annular pressing frame; and a pressing member; The outer edge portion of the workpiece is fixed between the urging frame and each of the nip portions by applying a urging force to the urging frame; the plurality of nip portions include: a movable clamping portion that faces oppositely And advancing and retreating in a direction in which the squeezing frame approaches or exits; and a fixed nip portion fixed in the vicinity of the squeezing frame; each of the plurality of nip portions being disposed along the pressing frame and fixing the workpiece The method includes the following steps: a) causing the workpiece to be in a standing position. #明叙$ Qiao female male is moving to the vicinity of the fixing mechanism; b) moving each movable clamping portion away from the frame; c) making the above extrusion frame The pressure applying member presses the pressing frame in a direction opposite to the pressing direction; d) abutting the outer edge portion of the workpiece by relatively moving the fixed clamping portion relative to the workpiece After the step d) is performed, the movable clamping portions are moved in a direction close to the pressing frame, thereby abutting the outer edge portion of the workpiece After the step e) is performed, the pressing frame is moved in the pressing direction, whereby the workpiece in the standing posture is fixed by the fixing mechanism. 6. A method for releasing a workpiece, which is characterized in that a fixing member of a flat workpiece fixed to a fixing mechanism is released; and the fixing mechanism includes: a pressing portion that presses an outer edge portion of the workpiece And a plurality of clamping portions each sandwiching the outer edge portion of the workpiece disposed between the pressing portion; the pressing portion comprising: an annular pressing frame; and a pressing member The outer edge portion of the workpiece is fixed between the pressing frame and each of the clamping portions by applying a pressing force to the pressing frame; the plurality of clamping portions include: a movable clamping portion that faces the above And the fixing and holding portion is fixed to the vicinity of the pressing frame; and the method for releasing the workpiece includes the following steps: a) contacting the outer edge portion of the workpiece The above plurality of movable clampings. In the state of the fixed nip portion, the pressing frame is moved toward the opposite side of the pressing direction of the pressing member by the pressing member 156491.doc 201208996, and the i word is The fixing mechanism releases the fixing of the workpiece; b) in a state where the outer edge portion of the workpiece abuts against the fixed clamping portion, after performing the step a), the movable clamping portions are pressed from the extrusion Moving in a direction in which the frame is moved; C) moving the outer edge portion of the workpiece away from the fixed clamping portion by relatively moving the fixed clamping portion relative to the workpiece; and d) causing the workpiece to be The fixing mechanism left. 156491.doc