201207887 四、 指定代表圖： (一） 本案指定代表圖為：第（2)圖。 (二） 本代表圖之元件符號簡單說明： 20〜放電管； 30〜箔電極； 30K1〜邊緣部； 30K2~邊緣部； 40〜外部電極； 50~介電質； 管軸。 五、 本案若有化學式時，請揭示最能顯示發明特徵的化學式 無。 六、發明說明： 【發明所屬之技術領域】 本發明是關於藉由介電質阻障放電（dieiectrie bai^ier discharge)或是電容耦合型高頻放電而放電發光 的準分子燈、外部電極型螢光燈等的無電極型放電燈，特 別是關於燈的電極構成。 【先前技術】 在一重圓管型的準分子燈中，是藉由長抽的二個同轴 圓管來構成發光部’在發光管内封入高壓氣體，沿著軸向 在内側管内表面與外側管外表面對向設置一對電極。然 後’藉由在電極間施加數千伏特的高頻電壓而放電發光（例 如請參考專利文獻1 )。 201207887 另外，在如外部電極型螢光燈— μ 取妹用早官式構造的 放電燈中，是沿著放電管内部的軸向 j此置考被介電質覆蓋 的帶狀電極’以其與設置在放電管的 • 卜表面的外部電極之 間作放電發光（請參考專利文獻2 )。 【先行技術文獻】 【專利文獻】 【專利文獻1】特開平6-275242號公報 【專利文獻2】特開平η_283579號公報 【發明内容】 【發明所欲解決的問題】 在習知的放電燈中’放電管内部的電極是圓柱狀或薄 板狀’其剖面形狀為圓形或矩形。藉由這樣的剖面形狀， 為了在介電質内的電極與位於放電管外的電極間放電，需 要非常大的電力，燈的點燈起動慢。 若對燈供應大電力’因為覆蓋電極的介電質與電極之 間的熱膨脹差’使電極容易自介電質剝離，而有因為電極 材料曝露於放電空間而有發生電極氧化之虞。 【用以解決問題的手段】 本發明的放電燈是藉由介電質阻障放電、或是電容_ 合型高頻放電等而發光的放電燈，其具有：一放電管，封 入放電氣體’至少一帶狀電極，設於上述放電容器内；以 及至;|電質’破覆上述電極。_電極等的帶狀電極是 埋設於介電質中而未曝露於放電空間。封入於放電空間的 201207887 或是氣等的齒素單體、 氣體為任意，可封人稀有氣體單體 或是函素與稀有氣體的混合氣體。 一個=明：，電極之沿著長邊方向的兩個邊緣的至少 尽度，疋_極中央部。藉此，在此薄的電極邊 緣部分發生電場集中效應’而增強電場強度…果，以 相對較低的輸入電壓仍會在電極間發生放電。 亦可以—個介電質來一同被覆數個電極，另外亦μ 別由ρ的介電質來被覆各個電極。較好為使帶狀電極的 兩個邊緣的厚度薄於電極中央部的厚度，纟電極 點燈起動性。 作為電極形狀者，可適用朝向邊緣而前端銳利化的各 種形狀’但較好為以刀刃形狀作為朝向邊緣部而平滑地變 尖的形狀。藉此，邊緣部分剖面是在軸向成為線狀，可進 -步壓低放電起始電壓；另夕卜，藉由刀刀形狀而難以在與 被覆的介電質的交界部分產生間隙，而不容易發生剝離等。 針對電極配置，可在放電管外部設置一側的電極，亦 可僅在放電管内部構成電極。例如將極性相同的複數個帶 狀電極配置於放電管内，且在放電管外部配置電極。此一 情況，考慮到從全體放電管發射均一的光線，可將複數個 帶狀電極配置為使其寬度方向互相平行的狀態。或者亦可 將複數個帶狀電極配置在相對於放電管軸為對稱的位置。 另一方面，可將極性不同的複數個帶狀電極配置於放 電管内。此一情況’考慮到從全體放電管儘量均一地放射， 亦可將複數個帶狀電極配置在相對於放電管軸為對稱的位 201207887 置。另外，藉由使複數個帶狀電極的寬度方向為同_方向、 也就是相互平行，亦實現全體性的放射。 例如在放電管外部配置電極之燈的情況，為了提高與 電極邊緣部的電場強度，可將帶狀電極同軸性地配置於上 述放電管内，而使電極的寬度方向與放電管内部的徑向一 致。藉此電極邊緣部的延長方向的電場強度最大，而可以 壓低點燈起動電壓。 電極的材質，可由導電性高的金屬或合金來成形。電 2的厚度較好為考慮電流容量、膨脹係數等來訂^，例如 定在20“-5M㈣任意值的範圍^另外電極的寬度 較好為考慮電流容量來訂定’例如較好為定在^。龍 的範圍内。 …放電管的管壁厚度，應具有防止準分子光造成的放電 d化的厚度、另一方面應定在不使放電起 維持電壓上升的厚产以下。如i t 厚度以下例如放電管的管壁厚度是定在 Ο.8.1、的範圍。放電管的内徑，較好是不會因放電 距離短而發生照度不足、另— 方面不會因放電距離長而發 生放電不穩定的情況，例如是 疋疋在8mm〜20mm的範圍内。 介電質可由例如剖面為圓形 田、“ 々圓φ的柱狀介電質所構成，較 好由在使用皿度下的熱膨脹率盥 午〃、電極相近的絕緣材料所構 "電質的厚度是考慮到維持絕緣性 防止放電起始電屢提高的情 方面 的範圍。 权好為足在0.1mm〜2mm 極性與電極不同的其他 /、此罨極的放電距離，是 5 201207887 根據放電氣體的種類、施加電壓等來訂定。為了防止放電 空間狹窄而導致照度不足、另一方面為了防止放電距離長 而導致放電不穩定，可將放電距離定在3 mm〜10 mm的範圍 内。 以帶狀電極的寬度為w、以上述放電管的内徑為d時， 較好為使其比值滿足「1. 6$ d/w$ 13. 4」。若d/w的值小 於1. 6，在放電容器所佔的箔的面積就變大’放電距離則 變短’帶狀電極會遮蔽放電光線而導致照度不足。若d/w 的值大於13. 4，則帶狀電極的寬度小而會有因過電流而造 成過熱、放電距離變長而變得放電不穩定之虞。 【發明功效】 根據本發明，得以提供可提升點燈起動性 '可長時間 維持照度的放電燈。 【用以實施發明的最佳形態】 以下，參照圖式而針對本發明的實施形態作說明。 第1圖疋第一實施形態的放電燈的概略性的平面圖。 第2圖是沿著第1圖的Π—II線的剖面圖。 準分子燈的放電燈10,是具有石英玻璃等的介電材料 構成之剖面為圓形的放電管2〇;在放電管2〇内，封入有 氣等的稀有氣體、或是上述之磁士 a姻θ人 义之稀有亂體的混合氣體作為放 電氣體。放電氣體的封入壓力，β — J八您力，疋定在例如5kPa〜l50kPa。 在放電管2 0的内部，配罟女、儿#伙± 。 1配置有沿著管軸C成帶狀延伸的 201207887 一片箔電極30。箔電極qn扯番# 〇被覆於剖面為大致圓形的柱狀 "電質50 i里。又於電質5〇内而未曝露於放電空間。 箔電極30是在對準介電質 电負的寬度方向中心位置的 狀態下，同軸性地配置於介雷、 ^ "電質50的中心位置。另外，201207887 IV. Designated representative map: (1) The representative representative of the case is: (2). (b) The symbol of the symbol of this representative diagram is simple: 20~ discharge tube; 30~ foil electrode; 30K1~ edge part; 30K2~ edge part; 40~ external electrode; 50~ dielectric; 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention. 6. EMBODIMENT OF THE INVENTION: TECHNICAL FIELD The present invention relates to an excimer lamp and an external electrode type that discharge light by dielectric barrier discharge or capacitive coupling type high frequency discharge. An electrodeless discharge lamp such as a fluorescent lamp is particularly configured as an electrode of a lamp. [Prior Art] In a heavy-duty tube type excimer lamp, a light-emitting portion is formed by two long coaxial tubes that are long-drawn, and a high-pressure gas is sealed in the light-emitting tube, and the inner surface and the outer tube of the inner tube are axially arranged along the axial direction. A pair of electrodes are disposed opposite to the outer surface. Then, the light is discharged by applying a high-frequency voltage of several thousand volts between the electrodes (for example, refer to Patent Document 1). 201207887 In addition, in a discharge lamp such as an external electrode type fluorescent lamp, which is a premature structure of a sister, it is a strip electrode which is covered by a dielectric material along the axial direction j inside the discharge tube. Discharge luminescence is performed between an external electrode provided on the surface of the discharge tube (refer to Patent Document 2). [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. 6-275242. The electrode inside the discharge tube is cylindrical or thin-shaped, and its cross-sectional shape is circular or rectangular. With such a cross-sectional shape, in order to discharge between the electrode in the dielectric and the electrode located outside the discharge tube, very large electric power is required, and the lighting of the lamp is slow to start. If the lamp is supplied with a large electric power 'because the difference in thermal expansion between the dielectric covering the electrode and the electrode' causes the electrode to be easily peeled off from the dielectric, and the electrode material is exposed to the discharge space, the electrode is oxidized. [Means for Solving the Problem] The discharge lamp of the present invention is a discharge lamp that emits light by dielectric barrier discharge or capacitor-type high-frequency discharge, etc., and has a discharge tube sealed with a discharge gas. At least one strip electrode is disposed in the discharge vessel; and the electrical layer 'breaks the electrode. The strip electrode such as the _electrode is buried in the dielectric and is not exposed to the discharge space. 201207887 enclosed in the discharge space is either a dentate monomer or a gas such as gas, which can seal a rare gas monomer or a mixed gas of a nutrient and a rare gas. One = Ming: At least the end of the two edges of the electrode along the long side, the center of the 疋_ pole. Thereby, an electric field concentration effect occurs at the edge portion of the thin electrode, and the electric field strength is enhanced. As a result, discharge is still generated between the electrodes with a relatively low input voltage. It is also possible to cover a plurality of electrodes together with a dielectric material, and also to cover the respective electrodes by a dielectric material of ρ. It is preferable that the thickness of both edges of the strip electrode is thinner than the thickness of the central portion of the electrode, and the crucible electrode is light-startable. As the shape of the electrode, various shapes ′ which are sharpened toward the edge and sharpened at the tip end can be applied. However, it is preferable that the blade shape is a shape that is smoothly pointed toward the edge portion. Thereby, the cross-section of the edge portion is linear in the axial direction, and the discharge starting voltage can be pressed in a step-by-step manner; in addition, it is difficult to create a gap at the boundary portion with the coated dielectric by the shape of the blade, without It is easy to peel off and the like. For the electrode configuration, one side of the electrode may be disposed outside the discharge tube, or the electrode may be formed only inside the discharge tube. For example, a plurality of strip electrodes having the same polarity are disposed in the discharge tube, and electrodes are disposed outside the discharge tube. In this case, in consideration of emitting uniform light from the entire discharge tube, a plurality of strip electrodes can be arranged in a state in which their width directions are parallel to each other. Alternatively, a plurality of strip electrodes may be disposed at a position symmetrical with respect to the discharge tube axis. On the other hand, a plurality of strip electrodes having different polarities can be disposed in the discharge tube. In this case, it is considered that the entire discharge tube is radiated as uniformly as possible, and a plurality of strip electrodes may be disposed at a position symmetrical with respect to the discharge tube axis 201207887. Further, by making the width directions of the plurality of strip electrodes the same direction, that is, parallel to each other, overall radiation is also achieved. For example, in the case where an electrode lamp is disposed outside the discharge tube, in order to increase the electric field strength with the electrode edge portion, the strip electrode may be coaxially disposed in the discharge tube, and the width direction of the electrode may be aligned with the radial direction inside the discharge tube. . Thereby, the electric field intensity in the extending direction of the edge portion of the electrode is maximized, and the lighting starting voltage can be depressed. The material of the electrode can be formed from a highly conductive metal or alloy. The thickness of the electric 2 is preferably set in consideration of the current capacity, the expansion coefficient, etc., for example, in the range of 20"-5M (four) arbitrary value ^ the width of the other electrode is preferably set in consideration of the current capacity', for example, preferably set at ^. Within the range of the dragon. ... The thickness of the tube wall of the discharge tube should have a thickness that prevents the discharge d-induced by the excimer light, and on the other hand should be below the thick yield that does not cause the discharge to maintain the voltage rise. Such as its thickness For example, the wall thickness of the discharge tube is set in the range of Ο.8.1. The inner diameter of the discharge tube is preferably such that the illuminance is not insufficient due to the short discharge distance, and the discharge is not caused by the long discharge distance. In the case of instability, for example, the crucible is in the range of 8 mm to 20 mm. The dielectric material may be composed of, for example, a columnar dielectric having a circular field and a "circle φ", preferably in the case of using a dish. The thermal expansion rate of the insulating material which is close to the electrode and the thickness of the electric material is a range in which the thickness of the electric power is maintained in consideration of maintaining the insulation and preventing the electric discharge from being started. The weight is preferably 0.1 mm to 2 mm. The polarity of the electrode is different from that of the electrode. The discharge distance of the drain is 5 201207887. It is determined according to the type of the discharge gas, the applied voltage, and the like. In order to prevent the discharge space from being narrow and the illuminance is insufficient, on the other hand, in order to prevent the discharge from being unstable due to the long discharge distance, the discharge distance can be set in the range of 3 mm to 10 mm. When the width of the strip electrode is w and the inner diameter of the discharge tube is d, the ratio is preferably "1.60 d/w$ 13.4". If the value of d/w is less than 1.6, the area of the foil occupied by the discharge vessel becomes larger, and the discharge distance becomes shorter. The strip electrode shields the discharge light and causes insufficient illuminance. When the value of d/w is larger than 13.4, the width of the strip electrode is small, and overheating occurs due to overcurrent, and the discharge distance becomes long and the discharge becomes unstable. [Effect of the Invention] According to the present invention, it is possible to provide a discharge lamp which can improve lighting startability and maintain illumination for a long period of time. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a schematic plan view of a discharge lamp of a first embodiment. Fig. 2 is a cross-sectional view taken along line Π-II of Fig. 1. The discharge lamp 10 of the excimer lamp is a discharge tube having a circular cross section made of a dielectric material such as quartz glass; and a rare gas such as gas or the like is enclosed in the discharge tube 2? A mixed gas of a rare and disorderly body as a discharge gas. The sealing pressure of the discharge gas, β - J eight, your force, for example, 5kPa ~ l50kPa. Inside the discharge tube 20, it is equipped with a niece, a child # ±±. 1 A 201207887 piece of foil electrode 30 extending in a strip shape along the tube axis C is disposed. The foil electrode qn pulls #〇 is covered in a columnar shape with a substantially circular shape "electricity 50i. It is also within 5 电 of the electrolyte and is not exposed to the discharge space. The foil electrode 30 is coaxially disposed at the center of the dielectric element and the electric quantity 50 in a state in which the center of the dielectric charge is aligned in the width direction. In addition,
電質50是與放電管20同軸性妯撕甚m L 釉性地配置。因此，箔電極3 〇是 配置在與放電管20成同軸的The electric mass 50 is disposed coaxially with the discharge tube 20 and is glazed. Therefore, the foil electrode 3 配置 is disposed coaxially with the discharge tube 20
刊日]饥1，而配置在相對於管軸C 為對稱的位置。 如後文所述，邊緣部3〇K1、3〇K2是成為沿㈣電極 30的管軸方向的兩個邊緣，邊緣部謝丨 '繼2是被構成 為刀刀形狀。因此1電極3G的厚度是成為從寬度方向的 中心向邊緣而愈來愈薄，而電極剖面形狀是前端變細變尖 的形狀。在第2圖中，將箱電極3〇的寬度方向定為γ方向、 而將與其直交的方向（厚度方向）定為χ方向。 設置在放電管20的外表面的外部電極40,是將複數 個電極部設置成網狀的構成，並沿著管轴c成螺旋狀並以 既定間隔並列而配置。連接於落電極30 @端部的供電線 70是與設置在外部的電源部（未圖示）連接，而經由供電線 70對放電燈1〇供應電力。 羯電極30、外部電極4〇的極性分別定為陽極、陰極。 一旦對放電燈10供應數千伏特的電壓，在箔電極3〇與外 部電極40之間會發生介電質阻障放電（die〗ectric barner discharge),而放射既定光譜（例如172nm)的準 分子光。 放電管20的軸向長度是定在1〇〇mm 25〇mjj^另一方 201207887 面，放電管20管壁厚度是為了 防止準分子光造成放電管劣 化、以及為了抑制放電起 电起始電壓的上升，定在 0. 8ram-l. 5mm ° 另夕卜，放雷 # 9n^^. 電& 20的内徑是為了防止放電距 離長而造成放電不穩定、放雷 ·. 取電距離短而造成照度不足兩 者，定在8mm〜20mm。 治電極30的厚度，考岸到雷搞—旦冰丨 愿幻電極谷量、製造容易度等、 以及防止因熱膨脹而造成的剝離，定在2〇5〇㈣。另 外，羯的寬度’考慮到電極容量、製造容易度等、還有為 了防止電極面積肥大化造成放 也取狄電光線的阻斷，定在 1. 2mm〜10mm。電極材料是傕用如+ a 疋使用鉬或含鉬的合金等。 M電質50疋由儘量近似於逮 里π似於電極的熱膨脹率的介電材 料（51〇2等）所構成。介雷皙Maa「一 W 50的厚度是考慮維持絕緣性的 極限、防止放電起始電壓的上井，— J丄开’疋在〇. lmm〜2mm。 放電距離也就是介電質+冷 电買50與放電管2〇的内徑的距離 間隔’是考慮到防止照度不〇、 又+疋、以及放電的穩定性，定在 3mm〜l〇mm。另外，若以箔雷搞 冶电極30的寬度為w、以放電管内 徑為d，則以滿足以下條件式沾丑，』 俅件式的形式訂定電極寬度、放電 管内徑。 1. d/w^ 13. 4 ·..〇) 第3圖是將第2圖的雷 固的電極邊緣部附近放大的剖面圖。 但疋，電極、介電質、放電營 从电S的尺寸、相對位置關係則與 第1圖部分不同。 如上所述’泊電極30的邊緣部3〇K1、通2是成為刀 刃形狀。箔電極30是從盲 & 攸莧度方向的中心向著邊緣發生前端The magazine date is hungry and is placed symmetrically with respect to the tube axis C. As will be described later, the edge portions 3 〇 K1, 3 〇 K2 are the two edges along the tube axis direction of the (four) electrode 30, and the edge portion is formed in the shape of a knife. Therefore, the thickness of the first electrode 3G is thinner and thinner from the center to the edge in the width direction, and the cross-sectional shape of the electrode is a shape in which the tip end is tapered. In Fig. 2, the width direction of the case electrode 3A is set to the γ direction, and the direction (thickness direction) orthogonal thereto is defined as the χ direction. The external electrode 40 provided on the outer surface of the discharge tube 20 has a configuration in which a plurality of electrode portions are formed in a mesh shape, and is spirally formed along the tube axis c and arranged in parallel at predetermined intervals. The power supply line 70 connected to the end portion of the drop electrode 30@ is connected to a power supply unit (not shown) provided outside, and supplies electric power to the discharge lamp 1A via the power supply line 70. The polarities of the ytterbium electrode 30 and the external electrode 4 定 are defined as an anode and a cathode, respectively. Once the discharge lamp 10 is supplied with a voltage of several thousand volts, a dielectric barrier discharge occurs between the foil electrode 3A and the external electrode 40, and an excimer that emits a predetermined spectrum (for example, 172 nm) is emitted. Light. The axial length of the discharge tube 20 is set at 1 〇〇mm 25 〇mjj^ the other side 201207887, and the wall thickness of the discharge tube 20 is to prevent deterioration of the discharge tube caused by excimer light, and to suppress the discharge initiation voltage of the discharge. Rise, set at 0. 8ram-l. 5mm ° Another eve, put the thunder # 9n ^ ^. The inner diameter of the electric & 20 is to prevent the discharge distance is long and the discharge is unstable, the lightning release ·. The resulting illuminance is insufficient, and it is set at 8mm~20mm. The thickness of the electrode 30 is determined by the shore to the thunder - the hail is expected to be the amount of the electrode, the ease of manufacture, and the prevention of peeling due to thermal expansion, which is set at 2〇5〇 (4). In addition, the width of the crucible is considered to be an electrode capacity, ease of manufacture, etc., and to prevent the electrode area from being enlarged, and to block the dipole light, and set it at 1. 2 mm to 10 mm. The electrode material is used such as + a 疋 using molybdenum or an alloy containing molybdenum. The M-electrode 50 构成 is composed of a dielectric material (51 〇 2, etc.) which is as close as possible to the thermal expansion coefficient of the electrode. Jie Lei Maa "The thickness of a W 50 is considered to maintain the limit of insulation, the upper well to prevent the initial voltage of discharge, - J丄 open '疋在〇. lmm~2mm. Discharge distance is also dielectric + cold electricity to buy The distance between the 50 and the inner diameter of the discharge tube 2' is considered to prevent the illuminance from being smeared, + 疋, and the stability of the discharge, and is set at 3 mm to 1 mm. The width is w, and the inner diameter of the discharge tube is d, so that the following conditions can be satisfied, and the electrode width and the inner diameter of the discharge tube are set in the form of a piece of the case. 1. d/w^ 13. 4 ·..〇) Fig. 3 is an enlarged cross-sectional view showing the vicinity of the edge portion of the electrode of the reticle of Fig. 2. However, the size and relative positional relationship between the electrode, the dielectric, and the discharge slain are different from those in Fig. 1. The edge portions 3〇K1 and 2 of the 'berth electrode 30 are in the shape of a blade. The foil electrode 30 is front-end from the center of the blind &litude direction toward the edge.
S 8 201207887 銳化’其邊緣厚度溥於寬度方向的中心部的厚度τ，邊緣 30Τ1是尖銳形狀。未圖示的邊緣部3〇Κ2亦是同樣的形狀。 藉由這樣的電極形狀，在邊緣3〇T1發生電場集中。也 就是電場強度在邊緣30Τ1附近的區域（請參考虛線ε)成為 最大，此區域因為邊緣30Τ1的尖形而狹窄。這是因為在邊 緣部不尖銳的習知的剖面矩形中，是橫跨其邊緣的全體平 面部分而發生電場集中，也就是電位梯度 potential gradient)變大；但在本實施形態中，邊緣3〇τι 實質上是沿著軸向延伸的線，而只有在邊緣發生電場集中。 另外，猪電極30是與介電質5〇及放電管2〇同軸性地 配置’其寬度方向是沿著徑向。因此，箔電極3〇之邊緣部 3〇1Π、30Κ2與放電f 20的内表面的距離（放電距離）相等。 因此’從放電管20放射出整體性均衡度良好的光線。 第4圖是顯示放電燈的製程。 藉由電阻熔接（resis1：ance 將供電線連接 於'白電極7G’插人於成為介電質覆膜材料的玻璃管60。在 和7 0之後使官内成為真空，之後從外側加埶 覆膜材料60，而命#咖』 ’、、、"电負 ,^ 而與、冶電極70熔接（步驟（1)^另外，亦可 以塗覆介電質的步驟取代。 神在與電極邊緣部相當的玻璃管的位置，形成軸環狀之 算珠形狀封裝部85(步驟（2))。然後，形成一端設 置排氣管、另一迪执 ^ x 设置***口的石英玻璃等的放電管90(步 口斑曾將/電極7〇***放電# 90内’將放電管70的*** ”异珠形狀封裝部85熔接（步驟4)。 201207887 一面將全體加熱’一面經由放電管90的排氣管進行抽 真空’除去不純物。然後’在封入放電氣體之後將排氣管 封裝’在放電管90的外表面配置放電電極95(步驟（5))。 如此根據本實施形態’在放電管20内部被介電質50 被覆的箔電極30是沿著管軸C配置。另外，極性不同的外 部電極40是配置在放電管20的外表面。然後，箔電極30 的邊緣部30K1、30K2是形成為刀刃形狀。 由於電極邊緣部是尖銳的，電場強度會局部性地在電 極邊緣部提高’而以低電壓產生點燈起始時的放電。電極 邊緣部是扮演放電起始的觸發器的角色，即使將燈作長時 間點燈仍會維持照度。 另外，由於電極邊緣部是平滑地在前端銳化，而不容 易在電極與介電質之間產生間隙，即使因為點燈時的熱膨 脹差電極仍不會曝露於放電空間，而免於氧化。 接下來，使用第5圖而針對第二實施形態的放電燈作 說明。在第二實施形態中，是在放電管内部配置極性互異 的二片箔電極。 第5圖是第二實施形態中的放電燈的概略性的剖面 圖。 放電燈100是在放電管120内部具有二片箔電極 130A、130B，其分別被柱狀介電質15〇A、15〇B被覆。箔電 極130A、130B的極性互異，在此處是將荡電極i3〇a定為 陽極、將箔電極130B定為陰極。 另外，鑌電極130A、1 30B是配置在相對於管軸c對稱S 8 201207887 sharpens the thickness τ of the central portion whose edge thickness is greater than the width direction, and the edge 30Τ1 is sharp. The edge portion 3〇Κ2 (not shown) has the same shape. With such an electrode shape, electric field concentration occurs at the edge 3〇T1. That is, the region where the electric field strength is near the edge 30Τ1 (please refer to the broken line ε) becomes the largest, and this region is narrow due to the sharp shape of the edge 30Τ1. This is because in the conventional cross-sectional rectangle in which the edge portion is not sharp, electric field concentration is generated across the entire planar portion of the edge, that is, the potential gradient becomes large; but in the present embodiment, the edge 3〇 Τι is essentially a line extending along the axial direction, and only electric field concentration occurs at the edge. Further, the pig electrode 30 is disposed coaxially with the dielectric 5 〇 and the discharge tube 2 ’ 'the width direction thereof is along the radial direction. Therefore, the distance (discharge distance) between the edge portions 3〇1Π, 30Κ2 of the foil electrode 3〇 and the inner surface of the discharge f 20 is equal. Therefore, light having a good overall balance is emitted from the discharge tube 20. Figure 4 is a diagram showing the process of the discharge lamp. The resistor is welded (resis1: ance to connect the power supply line to the 'white electrode 7G' to be inserted into the glass tube 60 which becomes the dielectric coating material. After the 70's, the inside is made vacuum, and then the outer layer is covered by the outer layer. Membrane material 60, and life #咖』 ',,, " electric negative, ^ and welding, electrode 70 is welded (step (1) ^ In addition, can also be replaced by the step of coating the dielectric. God is at the edge of the electrode The position of the glass tube corresponding to the portion is formed into a ring-shaped bead-shaped encapsulating portion 85 (step (2)). Then, a discharge of quartz glass or the like is provided at one end, and the other is provided with an insertion opening. The tube 90 (the step of the step is inserted into the discharge #90) and the insertion of the discharge tube 70 into the bead-shaped encapsulating portion 85 is welded (step 4). 201207887 One side of the entire heating side is discharged through the discharge tube 90 The gas pipe is evacuated to remove impurities. Then, after the discharge gas is sealed, the exhaust pipe is packaged. The discharge electrode 95 is disposed on the outer surface of the discharge tube 90 (step (5)). Thus, in the discharge tube 20 according to the present embodiment. The foil electrode 30 internally covered by the dielectric 50 is along In addition, the external electrodes 40 having different polarities are disposed on the outer surface of the discharge tube 20. Then, the edge portions 30K1, 30K2 of the foil electrode 30 are formed into a blade shape. Since the edge portion of the electrode is sharp, the electric field strength is Locally increasing at the edge of the electrode and generating a discharge at the beginning of the lighting with a low voltage. The edge of the electrode is the trigger that acts as the starting of the discharge, and the illumination is maintained even if the lamp is turned on for a long time. Since the edge portion of the electrode is smoothly sharpened at the front end, it is not easy to create a gap between the electrode and the dielectric, and the electrode is not exposed to the discharge space due to the thermal expansion difference at the time of lighting, and is prevented from being oxidized. The discharge lamp of the second embodiment will be described with reference to Fig. 5. In the second embodiment, two foil electrodes having different polarities are disposed inside the discharge tube. Fig. 5 is a view showing the second embodiment. A schematic cross-sectional view of a discharge lamp 100. The discharge lamp 100 has two foil electrodes 130A and 130B inside the discharge tube 120, which are respectively covered by columnar dielectrics 15A and 15B. The polarities of A and 130B are different from each other, and here, the swing electrode i3〇a is defined as an anode, and the foil electrode 130B is defined as a cathode. Further, the tantalum electrodes 130A and 1 30B are disposed symmetrically with respect to the tube axis c.
S 10 201207887 的位置，寬度方向均與Y軸平行。箔電極13〇a、i3〇B的兩 個邊緣部’是與第一實施形態同樣成為刀刀形狀。藉由這 樣的電極配置，會產生相對於放電管2G對稱的放電發光， 而從全體放電管20放射光線。 · 第6圖是第三實施形態的放電燈的概略性的剖面圖。 在第三實施形態中，是在放電管内配置複數個落電極。 放電燈200是在放電管21〇内，沿著χ、γ軸二次元排 列9個羯電極埋設介電f 22〇A〜22〇c。各箱電極的寬度方 向是朝向Y軸方向。在放電f 21G的外表面，配置極性不 同的外部電極25G。藉由這樣的電極的對稱配置，會從全 體放電管均一地放射光線。 第7圖是針對第四實施形態的放電燈來作說明。放電 :300是在放電管31。内具有3個荡電極埋設介電質㈣， 其是配置成一行。在剖面為矩形的放電燈3〇〇的兩側，配 置極性不同的外部電極350。藉由這樣的電極配置構成， 會從放電管的下方照射光線。 ^介電質亦可以是剖面圓形以外的形狀’例如只要是與 羯電極成同軸性的配置關係的形式來被覆羯電極即可，電 極邊緣部並未受限於刀刃形狀’只要是成為厚度薄於寬度 方向的中央部之形狀’而使電場集中發生的形狀即可。: 外’亦可以是僅有一侧的電極邊緣部的前端銳化。還有 電極的形狀是寬度不均㈣齒狀、介電f的中心位置^ 電極的中心位置未對準而配置等， 〇，白 ，、要°又疋使電場集中發 生的位置即可。另夕卜，相對於放電f的軸向扭轉電極箱的 11 201207887 寬度方向+ > 成為螺旋狀的箔電極，只要將使電極箔與介電 質剝離的屋# 辱度方向的應力分散即可。 作為放電方式者，亦可適用相對低電壓的電容耦合型 (靜電雷交并丨、_*· )向頻放電方式的燈，來取代可以沿著放電空 間的轴而穩定地發生均—的放電之上述的介電質阻障放電 ' 子燈例如以用於掃描器光源等的外部電極型螢光燈 來作為相對低電壓的電容耦合型（靜電電壓型）高頻放電方 式的燈。電容耦合型高頻放電方式的情況，藉由將電源部 的最’、’ς邛为作為LC共振電路，可容易地施加高電壓。 【實施例] 針對相當於第一實施形態的實施例的放電燈作說明。 放電管的軸向長度定為3〇〇龍、管壁厚度定為lmm、内徑定 為12.8mm，剖面圓形的介電質厚度在與箔電極的寬度為平 行的方向中疋為lmm'在與箔電極的厚度為平行的方向中 定為1.5 mm’放電距離定為5 mm。箔電極的厚度定為2〇^m、 寬度定為1· 5mm。若以放電管的内徑為d、箔電極的寬度為 w，其比值d/w為8.5。 封入Xe氣體作為放電氣體’在施加電壓6.5kV、氣壓 47kPa下進行點燈試驗。在放射172nm的光譜的光線的燈 的點燈動作持續2500小時之時’照度可得到90%的維持率。 【圖式簡單說明】 第1圖是第一實施形態的放電燈的概略性的平面圖。 第2圖是沿著第1圖的11一 11線的剖面圖。The position of S 10 201207887 is parallel to the Y axis. The two edge portions ' of the foil electrodes 13A and i3B are formed into a blade shape as in the first embodiment. With such an electrode arrangement, discharge luminescence symmetrical with respect to the discharge tube 2G is generated, and light is emitted from the entire discharge tube 20. Fig. 6 is a schematic cross-sectional view showing a discharge lamp of a third embodiment. In the third embodiment, a plurality of drop electrodes are disposed in the discharge tube. The discharge lamp 200 is provided with dielectrics f 22 〇 A to 22 〇 c in the discharge tube 21 , along the χ and γ-axis secondary elements. The width direction of each of the box electrodes is oriented in the Y-axis direction. On the outer surface of the discharge f 21G, external electrodes 25G having different polarities are disposed. With such a symmetrical arrangement of the electrodes, light is uniformly emitted from the entire discharge tube. Fig. 7 is a view showing a discharge lamp of a fourth embodiment. Discharge: 300 is in the discharge tube 31. There are 3 swash electrodes embedded in the dielectric (4), which are arranged in a row. External electrodes 350 having different polarities are disposed on both sides of the discharge lamp 3A having a rectangular cross section. With such an electrode arrangement, light is radiated from the lower side of the discharge tube. The dielectric material may be a shape other than a circular cross section. For example, the electrode may be covered as long as it is in a coaxial relationship with the tantalum electrode, and the electrode edge portion is not limited to the blade shape 'as long as it is thick. The shape of the central portion in the width direction is thinner than the shape of the center portion in the width direction. The outer portion may also be sharpened at the front end of the electrode edge portion having only one side. Further, the shape of the electrode is a width unevenness (4) tooth shape, a center position of the dielectric f, a center position of the electrode is misaligned, and the like, and 〇, white, and a position where the electric field is concentrated. In addition, the axial direction of the electrode case with respect to the discharge f 11 201207887 width direction + > becomes a spiral foil electrode, as long as the electrode foil and the dielectric peeled off the stress in the disgrace direction . As a discharge method, a relatively low-voltage capacitive coupling type (electrostatic cross-conformation, _*·)-to-frequency discharge type lamp can be applied instead of a uniform discharge that can be stably generated along the axis of the discharge space. The above-described dielectric barrier discharge lamp is used as a relatively low-voltage capacitive coupling type (electrostatic voltage type) high-frequency discharge lamp, for example, as an external electrode type fluorescent lamp for a scanner light source or the like. In the case of the capacitive coupling type high-frequency discharge method, a high voltage can be easily applied by using the most "power" of the power supply unit as the LC resonance circuit. [Embodiment] A discharge lamp corresponding to the embodiment of the first embodiment will be described. The axial length of the discharge tube is set to 3 〇〇, the wall thickness is set to lmm, the inner diameter is set to 12.8 mm, and the dielectric thickness of the circular cross section is 1 mm in the direction parallel to the width of the foil electrode. The discharge distance was set to 1.5 mm in a direction parallel to the thickness of the foil electrode. The thickness of the foil electrode was set to 2 〇 ^ m and the width was set to 1 · 5 mm. If the inner diameter of the discharge tube is d and the width of the foil electrode is w, the ratio d/w is 8.5. The Xe gas was sealed as a discharge gas. A lighting test was performed at an applied voltage of 6.5 kV and a gas pressure of 47 kPa. When the lighting operation of the lamp that emits light of a spectrum of 172 nm continues for 2,500 hours, the illuminance can be maintained at 90%. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic plan view of a discharge lamp according to a first embodiment. Fig. 2 is a cross-sectional view taken along line 11-11 of Fig. 1.
S 12 201207887 第3圖是將第2圖的電極邊緣部附近放大的剖面圖。 第4圖是顯示放電燈的製程。 第5圖是第二實施形態中的放電燈的概略性的剖面 ^ 〇 第6圖是第三實施形態的放電燈的概略性的剖面圖。 第7圖是針對第四實施形態的放電燈來作說明。 【主要元件符號說明】 1 〇〜放電燈； 20〜放電管； 3 0〜箔電極； 3 0 K1 ~邊緣部； 3 0 K 2〜邊緣部； 3 0 T1〜邊緣； 40〜外部電極； 50~介電質； 60〜玻璃管（介電質覆膜材料） 70〜箔電極； 80~供電線； 85〜算珠形狀封裝部； 90〜放電管； 95〜放電電極； 10 0〜放電燈； 120〜放電管； 130A〜箔電極； 130B~箔電極； 150A〜柱狀介電質； 1 50B〜柱狀介電質； 200〜放電燈； 21 0〜放電管； 2 2 0 A〜箔電極埋設介電質； 2 2 0 B〜箔電極埋設介電質； 2 2 0 Ο箔電極埋設介電質； 250〜外部電極； 300〜放電燈； 310 ~•放電管； 13 201207887 320〜箔電極埋設介電質； C〜管轴； 350〜外部電極； E〜虛線。S 12 201207887 Fig. 3 is an enlarged cross-sectional view showing the vicinity of the electrode edge portion of Fig. 2; Figure 4 is a diagram showing the process of the discharge lamp. Fig. 5 is a schematic cross-sectional view of a discharge lamp in a second embodiment. Fig. 6 is a schematic cross-sectional view showing a discharge lamp according to a third embodiment. Fig. 7 is a view showing a discharge lamp of a fourth embodiment. [Main component symbol description] 1 〇~discharge lamp; 20~discharge tube; 3 0~foil electrode; 3 0 K1 ~ edge portion; 3 0 K 2~ edge portion; 3 0 T1 to edge; 40 to external electrode; ~ dielectric; 60 ~ glass tube (dielectric coating material) 70 ~ foil electrode; 80 ~ power supply line; 85 ~ bead shape encapsulation; 90 ~ discharge tube; 95 ~ discharge electrode; 10 0 ~ discharge lamp 120~ discharge tube; 130A~foil electrode; 130B~foil electrode; 150A~columnar dielectric; 1 50B~columnar dielectric; 200~discharge lamp; 21 0~discharge tube; 2 2 0 A~foil Electrode buried dielectric; 2 2 0 B~ foil electrode buried dielectric; 2 2 0 Ο foil electrode buried dielectric; 250~ external electrode; 300~ discharge lamp; 310 ~• discharge tube; 13 201207887 320~ foil Electrode buried dielectric; C~ tube axis; 350~ external electrode; E~ dashed line.
14 S14 S