TW201202589A

TW201202589A - Heat insulator and method of manufacturing the same

Info

Publication number: TW201202589A
Application number: TW100104933A
Authority: TW
Inventors: Norihiko Tsuji; Hironori Yagi
Original assignee: Tokyo Electron Ltd
Priority date: 2010-02-16
Filing date: 2011-02-15
Publication date: 2012-01-16
Also published as: JP2011190925A; WO2011102337A1

Abstract

To provide a heat insulator improved in heat insulation to suppress the dissipation of heat from an area to be heat insulated such as the outer wall surface of a processing container to the outside. A metal foil 13 formed of a material such as aluminum which is configured so that the atmosphere of the inside thereof is vacuum is provided, and a resin sheet 16, for example, a polyimide sheet is provided so as to cover the metal foil 13A for vacuum thermal insulation and for suppressing the dissipation of heat from the metal foil 13. The heat transferred from the processing container 1 is reflected by an aluminum layer 33 toward the processing container 1 and when the heat of the processing container 1 cannot be fully reflected and the temperature of the aluminum layer 33 is raised, the dissipation of heat to the outside can be suppressed by laminating the aluminum layer 33 and a resin layer 34 in a heat insulation block 30 from the processing container 1 side in this order.

Description

201202589 六、發明說明：【發明所屬之技術領域】本發明係關於一種用以抑制散熱之隔熱體及該隔熱體之製造方法。【先前技術】用以製造半導體裝置之製造裝置中，有一種藉由例如加熱器來加熱該製造裝置内部的情況。此般製造裝置為了提高加熱器的加熱效率，又為了謀求對操作員之安全性，會沿著例如裝置的外壁面而設置有隔熱體。該隔熱體的配置部位具體而言可舉出有例如製程室（處理容器）的外表面，或藉由加熱器而被加熱之氣體配管及排氣管周圍等升溫至例如180°C〜200°C左右之部位。此般隔熱體的一例舉出有罩型（mantle)隔熱體，其具備有由熱傳導率盡量微小之材料（例如矽石（二氧化矽）玻璃等）所構成之纖維狀玻璃纖維或粉末狀之充填物，以及覆蓋該石夕石玻璃般所設置之例如布材等而構成捆包材之外皮層。然而，該罩型隔熱體由於熱反射率與例如金屬等相比要來的小，當熱量例如從處理容器朝罩型隔熱體散熱時，則罩型隔熱體便會吸熱升溫，而透過該罩型隔熱體將處理容器的熱量散熱至外部° 另一方面，反射熱量的組件已知有例如鋁(A1)等之金屬膜，藉由例如沿著處理容器的外壁面而於罩型 201202589 隔熱體内設置金屬膜，來將例如散熱於處理容器之輻射熱反射至該處理容器。然而，由於金屬膜的熱傳導率係較例如矽石玻璃要高，會因未盡反射至處理容器側之輻射熱而使得金屬膜緩緩升溫，導致會有透過該金屬膜而讓處理容器的熱量散熱至外部之虞。又，較所述罩型隔熱體之隔熱性更高的隔熱體已知有一種在真空區域作為隔熱體使用之真空隔熱體。該真空隔熱體具體而言係疊合2片由樹脂(例如聚乙烯) 等構成之薄膜，並於該等聚乙烯薄膜之間收納有矽石玻璃所構成之纖維或粉末，以將該矽石玻璃之收納區域保持在真空，並將聚乙烯薄膜端面之間於周圍方向加熱至例如數十°C左右來熱溶接(heat seal)。又，為了補償該聚乙烯薄膜之氣體阻絕性，會覆蓋該聚乙烯薄膜來形成例如鋁等之金屬膜而抑制朝真空區域之空氣穿過（leak)。該真空隔熱體被用於例如家庭用電器產品。但是，因聚乙烯薄膜的耐熱溫度為例如100°C左右，故設置該真空隔熱體於所述處理容器等時，會因處理容器的熱量使得例如聚乙烯薄膜的熔融，導致無法維持真空區域而讓隔熱性惡化。又，於真空隔熱體外表面設置金屬膜時，如所述般由於金屬的熱傳導率高，故處理容器的熱量會透過該金屬膜繞回真空隔熱體而散熱至外部。特別是如所述般在處理容器的溫度為高達200°c之高溫時，此般熱量繞回的情況會變大。201202589 VI. Description of the Invention: [Technical Field] The present invention relates to a heat insulator for suppressing heat radiation and a method of manufacturing the heat insulator. [Prior Art] In the manufacturing apparatus for manufacturing a semiconductor device, there is a case where the inside of the manufacturing apparatus is heated by, for example, a heater. In order to improve the heating efficiency of the heater, the manufacturing apparatus is provided with a heat insulator along the outer wall surface of the apparatus, for example, in order to achieve safety for the operator. Specifically, for example, the outer surface of the processing chamber (processing container), or the gas piping heated by the heater and the periphery of the exhaust pipe, etc., are heated up to, for example, 180 ° C to 200. The part around °C. An example of such a heat insulator is a mantle heat insulator comprising a fibrous glass fiber or powder composed of a material having a thermal conductivity as small as possible (for example, vermiculite (cerium oxide) glass). The filling material and the outer layer of the packaging material are formed by covering, for example, a cloth material such as the stone of the Shishi stone. However, since the cover type heat insulator has a small heat reflectance as compared with, for example, a metal or the like, when the heat is radiated from the processing container to the cover type heat insulator, for example, the cover type heat insulator absorbs heat and heats up. The heat of the processing container is radiated to the outside through the cover type heat insulator. On the other hand, the heat reflecting member is known as a metal film such as aluminum (A1), for example, by covering the outer wall surface of the processing container. Type 201202589 A metal film is provided in the heat insulator to reflect, for example, radiant heat radiated from the processing container to the processing container. However, since the thermal conductivity of the metal film is higher than that of, for example, vermiculite glass, the metal film is slowly heated due to the radiant heat that is not reflected to the side of the processing container, so that heat of the processing container is dissipated through the metal film. To the outside. Further, a heat insulating body having a higher heat insulating property than the cover type heat insulating body is known as a vacuum heat insulator used as a heat insulator in a vacuum region. Specifically, the vacuum heat insulator is formed by laminating two sheets of a film made of a resin (for example, polyethylene), and a fiber or powder composed of vermiculite glass is accommodated between the polyethylene films to separate the crucible. The storage area of the stone glass is kept under vacuum, and the end faces of the polyethylene film are heated in the peripheral direction to, for example, several tens of ° C or so to be heat-sealed. Further, in order to compensate for the gas barrier property of the polyethylene film, the polyethylene film is covered to form a metal film such as aluminum to suppress air leakage toward the vacuum region. This vacuum heat insulator is used, for example, in household electrical appliances. However, since the heat-resistant temperature of the polyethylene film is, for example, about 100 ° C, when the vacuum heat insulator is placed in the processing container or the like, the heat of the processing container causes melting of, for example, a polyethylene film, and the vacuum region cannot be maintained. And the insulation is deteriorated. Further, when a metal film is provided on the outer surface of the vacuum heat insulator, since the heat conductivity of the metal is high as described above, the heat of the processing container is radiated to the outside through the metal film around the vacuum heat insulator. In particular, as described above, when the temperature of the processing vessel is as high as 200 ° C, the heat retraction becomes large.

S 4 201202589 專利文獻1、2及非專利文獻1雖有關於真空隔熱體等之記載，但未就所述課題加以檢討。先行技術文獻專利文獻專利文獻1 :日本特開2008-240924 專利文獻2:曰本特開2001-231681 非專利文獻非專利文獻1 :曰本實開平5-16293 【發明内容】本發明有鑑於此般情事，其目的在於提供隔熱性優異之隔熱體及該隔熱體之製造方法。本發明之隔熱體具備有：第1封體，係接合而封閉周緣部之金屬面彼此並讓内部為真空氛圍之金屬箔所構成；隔熱材，係被封入該第1封體内；樹脂片，係設置覆蓋該第1封體。較佳為，該樹脂片係藉由於周緣部將該樹脂片彼此加以封止或將周緣部接合於該封體之周緣部來形成第2封體，該第2封體與該第1封體之間係填充有隔熱材。較佳為，該第1封體係藉由將相互對向之金屬箔彼此之一部份加以接合來於内部相互區隔出氣密之複數區域，該複數區域係各自封入有隔熱材。又，本發明之隔熱體具備有：隔熱塊；熱反射片，係於該隔熱塊内部面向被隔熱區域而設置； 201202589 該熱反射片係由樹脂片與該樹脂片中層積於該被隔熱區域側之金屬層所構成。該隔熱塊較佳係藉由以外皮層彼覆陶瓷材來加以構成。該樹脂片較佳係由聚醯亞胺所構成。本發明隔熱體之製造方法係包含有下述步驟：包覆隔熱材般地配ϊ·金屬箔’於該隔熱材周圍將該金屬箔之金屬面彼此相互壓接；將該等隔熱材及金肩免所處之氛圍保持於真空氛圍’並在該金屬面彼此間產生原子擴散般地藉由加熱該金屬面彼此之接觸部來將金屬面彼此相互接合以形成第1封體；接著’藉由樹脂片來覆蓋該第1封體。較佳為，於形成該第1封體之步驟與藉由樹脂片來覆蓋該第1封體之步驟之間係進行於該第1封體外側配置隔熱材之步驟；藉由該樹脂片來覆蓋該第丨封體之步驟係於該第. \封體外側將該樹脂片周緣部彼此封止之步驟或將該，脂片周緣部接合於該第丨封體周緣部之步驟，藉由亥^驟來將該第1封體外側之隔熱材填充於該樹脂片所構成之第2封體與該第1封體之間。較佳為’將該金屬箔之金屬面彼此相互壓接之步 '係於形成有複數凹部之一側模具裝設一側之金屬箔的步驟、透過各個該一側之金屬箔來讓隔熱材位於該 201202589 =部内之步驟、之後將另側之模具透過該—側之金屬 4上所層積之另側金屬箔而壓接於該一側之模具之步驟；該形成第1封體之步驟係加熱該凹部之各個周緣部之金屬面彼此之接觸部之步驟。 °、依本發明實施形態，由於係設置有樹脂片來覆蓋由使内部成為真空氛圍般之金屬箔所構成之第丨封體’故可以進行真空隔熱並抑制從該第丨封體之散熱’因此可以得到隔熱性優異之隔熱體。又，依本發明其他實施形態，由於在隔熱塊内部面向配隔熱區域設置有於樹脂片及該樹脂片中層積於被隔熱區域之金屬層所構成之熱反射片’故可以藉由金屬層來將來自被隔熱區域之散熱朝被隔熱區域反射，並抑制從金屬層朝外部之散熱’因此可得到隔熱性優異之隔熱體。【實施方式】 ' [第1實施形態] 參照圖1〜圖3 ’就本發明隔熱體之實施形態一例加以說明。首先，簡單就具備有該隔熱體之加熱裝置整體結構加以說明。如圖1所示，該裝置係用以進行於内部收納有圖中未示之基板(例如半導體晶圓（以下稱之為晶圓））以進行例如CVD(Chemical Vapor Deposition)法或 ALD(Atomic Layer Deposition)法之成膜處理，而具備有處理容器1，其係使用圖中未示之加熱器等來將晶圓加熱至700°C左右之被隔熱區域。 7 201202589 處理容器1之例如鋁(A1)等金屬所構成之外壁面如圖1 所示，為了抑制處理容器1朝外部散熱，係從内面側及上面側覆蓋處理容器1般地配置有複數之隔熱體 2。又，處理容器1係連接有用以將處理容器1内部氛圍加以真空排氣之排氣管la，該排氣管la之另端側係透過蝶閥等壓力調整部而連接於真空幫浦（均未圖示）。又，該處理容器1係連接有用以將處理器體(例如成膜氣體)供給至處理容器1内之處理氣體供給管路。另外，此圖1中，係省略處理容器1右側之隔熱體2。隔熱體2係面臨處理容器1外壁面而寬廣地形成為概略板狀。又，隔熱體2内部如圖2所示，係設置有沿著處理容器1壁面配置呈概略箱型之例如矽石（二氧化矽）等之玻璃纖維（纖維）或粉體所構成之充填材 (隔熱材）11，該充填材11之周圍係覆蓋作為第1封體之充填材11而設置有例如厚度〇.〇5mm之紹等所構成之金屬箔13。金屬箔13内部區域之充填材11之收納區域14係保持在真空氛圍。亦即，該收納區域14係相互疊合層積有2片金屬箔13、13,於該等金屬箔13、 13之間收納有充填材11，於圖中未示之真空容器内對金屬箔13、13之周緣部於周圍方向施加壓力並加熱而藉由原子之擴散接合法來接合金屬箔13、13彼此以形成氣密。因此，收納區域14周圍之金屬箔13、13會如圖3概略所示般，由於係在接合部15幾乎無法判別S 4 201202589 Patent Documents 1 and 2 and Non-Patent Document 1 describe the vacuum insulation and the like, but the problems are not reviewed. PRIOR ART DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT 1: JP-A-2008-240924 Patent Document 2: 曰本特开 2001-231681 Non-Patent Document Non-Patent Document 1: 曰本实开平 5-16293 [Description of the Invention] As a general matter, the purpose is to provide a heat insulator excellent in heat insulation and a method of manufacturing the heat insulator. The heat insulator according to the present invention includes: a first sealing body, which is formed by a metal foil that is joined to close the metal surfaces of the peripheral edge portion and has a vacuum atmosphere inside; and the heat insulating material is sealed in the first sealing body; The resin sheet is provided to cover the first envelope. Preferably, the resin sheet is formed by sealing the resin sheets to each other by a peripheral portion or joining a peripheral portion to a peripheral portion of the sealing body to form a second sealing body, the second sealing body and the first sealing body. The insulation is filled between them. Preferably, the first sealing system internally separates a plurality of airtight regions from each other by joining one of the metal foils facing each other, and the plurality of regions are each sealed with a heat insulating material. Further, the heat insulator according to the present invention includes: a heat insulating block; and a heat reflecting sheet which is provided inside the heat insulating block facing the heat insulating region; 201202589 The heat reflecting sheet is laminated on the resin sheet and the resin sheet The metal layer on the side of the heat insulating region is formed. Preferably, the insulating block is constructed by covering the ceramic layer with an outer skin layer. The resin sheet is preferably composed of polyimine. The method for producing a heat insulator according to the present invention includes the steps of: coating a heat insulating material like a metal foil, and pressing the metal faces of the metal foil against each other around the heat insulating material; The hot material and the gold shoulder are kept in a vacuum atmosphere', and the metal surfaces are mutually joined by heating the metal surface to each other to form a first sealing body by heating the metal surface to each other. Then, the first envelope is covered by a resin sheet. Preferably, a step of disposing a heat insulating material outside the first sealing body between the step of forming the first sealing body and the step of covering the first sealing body with a resin sheet; and the resin sheet The step of covering the second sealing body is a step of sealing the peripheral edge portion of the resin sheet on the outer side of the first sealing body or a step of joining the peripheral portion of the resin sheet to the peripheral portion of the second sealing body. The heat insulating material on the outer side of the first sealing body is filled between the second sealing body formed of the resin sheet and the first sealing body. Preferably, the step of "compressing the metal faces of the metal foils to each other" is performed on the metal foil on the side on which the one side of the plurality of recesses is formed, and the metal foil on each of the sides is used to insulate the heat. a step of the material being located in the portion of the 201202589 = portion, and then passing the mold on the other side through the other side metal foil laminated on the metal 4 on the side to be pressed against the mold on the side; the first sealing body is formed The step of heating the contact portions of the metal faces of the respective peripheral portions of the recesses. According to the embodiment of the present invention, since the resin sheet is provided to cover the first sealing member formed of a metal foil having a vacuum atmosphere inside, vacuum insulation can be performed and heat dissipation from the first sealing body can be suppressed. 'Therefore, it is possible to obtain a heat insulator excellent in heat insulation. Further, according to another embodiment of the present invention, the heat-reflecting sheet formed by the metal layer laminated on the resin-insulated area in the resin sheet and the resin sheet is provided in the heat-insulating block inside the heat-insulating block. The metal layer reflects the heat radiation from the heat-insulated area toward the heat-insulated area and suppresses heat radiation from the metal layer to the outside. Therefore, a heat insulator excellent in heat insulation can be obtained. [Embodiment] [First Embodiment] An example of an embodiment of a heat insulator according to the present invention will be described with reference to Figs. 1 to 3'. First, the overall structure of the heating device having the heat insulator will be briefly described. As shown in FIG. 1, the apparatus is configured to internally house a substrate (for example, a semiconductor wafer (hereinafter referred to as a wafer)) (not shown) for performing, for example, CVD (Chemical Vapor Deposition) method or ALD (Atomic). In the film formation process of the layer deposition method, the processing container 1 is provided, and the wafer is heated to a heat-insulating region of about 700 ° C by using a heater or the like (not shown). 7 201202589 The outer wall surface of the processing container 1 is made of a metal such as aluminum (A1). As shown in Fig. 1, in order to prevent the processing container 1 from radiating heat to the outside, the processing container 1 is disposed in a plurality of places from the inner surface side and the upper surface side. Insulator 2. Further, the processing container 1 is connected to an exhaust pipe 1a for evacuating the atmosphere inside the processing container 1, and the other end side of the exhaust pipe 1a is connected to a vacuum pump through a pressure adjusting portion such as a butterfly valve (none of them) Graphic). Further, the processing container 1 is connected to a processing gas supply pipe for supplying a processor body (e.g., a film forming gas) into the processing container 1. Further, in Fig. 1, the heat insulator 2 on the right side of the processing container 1 is omitted. The heat insulator 2 is formed in a wide plate shape so as to face the outer wall surface of the processing container 1. Further, as shown in FIG. 2, the inside of the heat insulator 2 is provided with a glass fiber (fiber) or a powder composed of, for example, vermiculite (cerium oxide) arranged in a rough box shape along the wall surface of the processing container 1. The material (heat insulating material) 11 is provided with a metal foil 13 made of, for example, a thickness of 〇. 5 mm, which is covered with the filling material 11 as the first sealing body. The storage area 14 of the filler 11 in the inner region of the metal foil 13 is maintained in a vacuum atmosphere. In other words, the storage area 14 is formed by laminating two metal foils 13 and 13 on top of each other, and a filler 11 is accommodated between the metal foils 13 and 13, and the metal foil is placed in a vacuum container (not shown). The peripheral portions of 13, 13 are applied with pressure in the peripheral direction and heated to bond the metal foils 13, 13 to each other by atomic diffusion bonding to form airtightness. Therefore, the metal foils 13 and 13 around the storage region 14 are almost indistinguishable from the joint portion 15 as schematically shown in Fig. 3 .

S 8 201202589 =屬冶13、13間之界面或邊界而加 :二便會被氣密地封止…金加3:於收納區域14係成失古_ — 為真二氧圍，故便仿照充填材u之外面形狀來壓抵於充填材u。何金屬4 13、13外侧為了抑制處理容器】的熱量透過金屬落13傳熱而從該處理容器1朝外部散熱’，便例下夾置該等金屬箔13、13之方式層積例如厚度 =伽瓜之_亞胺等樹之所構成之樹脂片ι6、ι6。 ^Tsolc^ °fW/mK' Η夕拖人λ 树月曰片I6、16於接近例如金屬箔13、接二公==_氣密祕 16之_金屬荡13與樹脂片 . ^瑕1密之氣密區域17係將隔熱材18(例如、之纖維或粉末收納於布材（圖中未示）等之件’或是以沒有收纟驗件之方式配置。該氣密 ^域17係例如成為大氣氛圍。另外，圖3中省略财關於金屬们3外側之隔熱材18或樹脂片：作用=照熱體2之加熱裝置的包，理容器1内收納晶圓，並透過十吕a处理各态丨内真空抽氣，調整排氣管h 加熱器來將晶圓加熱至例如戰 201202589 用處，氣體供給至該晶圓時，⑽表面便會因加熱器的熱里使彳于例如處理氣體分解而形成薄膜。此處’處理容器1外壁面係藉由來自處理容器i 内部之熱量的傳熱而被加熱至例如2GG<t左右。然後，遠熱1會透過/σ著處理容器i外壁面所設置之隔妖體 2而欲朝外部散熱，但如所㈣由於係沿著外壁面配置ίΓΓ:樹脂片16，故朝隔熱體内部之傳熱會 ::舍由樹脂片16内側所設置之隔熱材18，同樣地會妨礙處理容器1朝隔_ 。因此，於隔熱體2内部，處理容器i之熱量的-部分便會透=脂片16及隔熱材18而傳熱至金㈣13/ ^ ’如圖4所示，當處理容器1之熱量到達金心η時」雖會透過金屬帛13、13㈣之收納區域 Η而，進^it傳熱，但由於收納區域14係熱傳導率極低的真工㈣’故收納區域14處幾乎無法傳熱。另一 IS之落13係較隔熱材18等之熱傳導率要更间之輯構成，故自處理容器ι所傳熱來之執量會繞回收納區域14。當處理容器1内 1透k金屬fn 3繞回域如處理容H 1之相反側量，從金物3而欲朝向溫度低的外部 18及:;°片：’由於金射"3外側配置有隔熱材 =二=脂f “朝外部之傳熱便會被 n、n卞 9 6、16彼此之接合部及金屬箔彳之接合部15雖分別升溫至近細。c之溫 201202589 度，但由於樹脂片16及金屬箔13之耐熱性高（樹脂片 16 : 300°C ;金屬箔U : 660°〇，故不會產生熔融^變質。因此，收納區域Η會維持真空氛圍，氣密區域 17則保持大氣氛圍。另外’處理容器1外壁面如所述之圖1所示，係無間隙地配置有隔熱體2，但圖4中係概略地描繪出1個隔熱體2。依上述實施形態，為了抑制由處理容器1(被隔熱區域)朝外部之散熱，係設置有於内部構成真空氛圍般之金屬箔13，並覆蓋金屬箔13般地設置樹脂片ι6，故可以進行真空隔熱並抑制金屬箔13之散熱，從而可獲得隔熱性優異之隔熱體2。又，由於係將耐熱溫度為300。(：之樹脂片16覆蓋金屬箔13周圍般地加以設置，即使如所述般在升溫至 180 C 2〇〇c左右之處理容态1外壁面配置隔熱體2之情況，亦可抑制樹脂片16之熔融或變質等劣化，可抑制處理容器1之熱量透過金屬箔13而繞回到外部。再者、^由於係藉由不會產生氣體穿透或不會因處理容器会二度產生熔融之鋁來形成收納區域14，故可抑制收 =區域14中真空度的降低，從而可長時間維持隔熱再者，由於在金屬箔13與樹脂片16之間的氣 17設置有隔熱材18，故藉由氣密區域17内部間^禮及隔熱材18便可以抑制金屬帛13與樹脂片16 金屬箔熱’從而可抑制處理容器1之散熱。又，由於 $ 13係由富有撓曲性之賴構成，故金屬箔13 201202589 =會破裂而可將收納區域14内保持真空氛圍，並可沿 f處理容器1來配置隔熱體2。所述例中雖係將氣密區域17為大氣氛圍，但亦可例如將氣密區域17内部區域真:抽氣，或在真空容器内收納有該隔熱提2之，態，由將樹脂片16、16彼此之接合部炫接( ’將孔密區域為真空氛^更加提高隔熱性。，為了抑制外部氣體透過樹脂# 16而侵入至 17内’如圖5所示，亦可於樹脂片料地二置用以補償樹脂片16之氣體阻絕性之例： 2助金屬㈣。補助金屬㈣與所述金斤= 樣地係由上下夾置隔熱體2之 13同屬箔21，並藉由於用圍古人i 曰顿Z月确助金向接合料補助金屬_ 2」之周緣部而形成。又，為了抑制處理容卜 I透過該補助金屬H 21、21而繞進至。内之熱助金屬羯21外側設置聚醯亞胺助可在補 22。該等補助金屬㈣與補助樹脂片成樹脂片收納有例如矽石玻璃所構成之隔熱材。間亦可以又，金屬箱13、U彼此於接合部雖散接合法加以接合，但亦可以外部之氣妒’、子之擴接合方法（例如使用電子束等之炫接^會侵入之者，雖金屬箔13與樹脂片16之間設置\接合。再但也可不設置隔熱材1δ而在金屬箱13隔熱枒18, 亞胺來構成樹脂片16。此時，係在例如〃卜，坡覆聚醯屬箔13、13彼此後，於該等金屬箔、二径也接合金、13外側層積S 8 201202589 = The interface or boundary between 13 and 13 is added: 2 will be sealed airtightly... Jin Jia 3: In the storage area 14 is a lost _ _ is a true dioxin, so it is modeled The outer surface of the filling material u is pressed against the filling material u. In order to suppress heat transfer from the processing container 1 to the outside through heat transfer from the processing container 1 to the outside of the metal 4 13 and 13 , the thickness of the metal foils 13 and 13 may be laminated, for example, thickness = Resin tablets ι6, ι6 composed of trees such as gamma. ^Tsolc^ °fW/mK' Η夕拖人λ tree 曰片 I6,16 is close to, for example, metal foil 13, two gongs == _ airtight secret 16 _ metal sway 13 and resin sheet. ^ 瑕 1 密In the airtight region 17, the heat insulating material 18 (for example, a fiber or a powder is stored in a member such as a cloth (not shown) or the like) is disposed so as not to receive the inspection piece. For example, in the air atmosphere, the heat insulating material 18 or the resin sheet on the outer side of the metal 3 is omitted in Fig. 3: the package of the heating device of the heat medium 2 is placed, and the wafer is accommodated in the container 1 and transmitted through the ten Lu a handles the vacuum evacuation in each state, adjusts the exhaust pipe h heater to heat the wafer to the use of, for example, 201202589, when the gas is supplied to the wafer, the surface of the (10) will be caused by the heat of the heater. For example, the process gas is decomposed to form a film. Here, the outer wall surface of the processing vessel 1 is heated to, for example, 2GG<t by heat transfer from the heat inside the processing vessel i. Then, the far heat 1 is transmitted through /σ. The outer wall of the container i is provided with a demon body 2 and is intended to dissipate heat to the outside, but as shown in (4), it is arranged along the outer wall surface. ΓΓ ΓΓ: Resin sheet 16, heat transfer to the inside of the heat insulator:: The heat insulating material 18 provided on the inner side of the resin sheet 16 similarly hinders the processing container 1 from being separated _. Therefore, in the heat insulator 2 Internally, the portion of the heat of the processing container i will pass through the grease sheet 16 and the heat insulating material 18 to transfer heat to the gold (four) 13/ ^ ' as shown in Fig. 4, when the heat of the processing container 1 reaches the gold core η" The heat transfer is carried out through the storage area of the metal crucibles 13, 13 (4). However, since the storage area 14 is a very low thermal conductivity (four), the storage area 14 is almost incapable of transferring heat. The thermal conductivity of the heat insulating material 18 or the like is more complicated, so that the heat transfer from the processing container ι will be wound around the recovery region 14. When the processing container 1 is permeable to the k metal fn 3 For example, the amount of the opposite side of the processing capacity H 1 , from the gold object 3 to the outside of the low temperature 18 and: ° °: "Because of the gold shot" 3 outside the insulation material = two = fat f "passing to the outside The heat is heated to a close by the joint between the joints of n, n卞9, and 16, and the joint portion 15 of the metal foil, respectively. The temperature of c is 201202589 degrees, but The grease sheet 16 and the metal foil 13 have high heat resistance (resin sheet 16 : 300 ° C; metal foil U: 660 ° 〇, so there is no melting and deterioration. Therefore, the storage area 维持 maintains a vacuum atmosphere, and the airtight region 17 In addition, the outer wall surface of the processing container 1 is provided with the heat insulating body 2 as shown in Fig. 1 as shown in Fig. 1, but in Fig. 4, one heat insulating body 2 is schematically drawn. In the embodiment, in order to suppress heat dissipation from the processing container 1 (insulated area) to the outside, a metal foil 13 having a vacuum atmosphere is provided inside, and a resin sheet ι6 is provided so as to cover the metal foil 13, so that vacuum can be performed. The heat insulator 2 is excellent in heat insulation and suppresses heat dissipation of the metal foil 13 . Also, since the heat resistance temperature is 300. (The resin sheet 16 is provided so as to cover the periphery of the metal foil 13, and even if the heat insulator 2 is disposed on the outer wall surface of the processing volume 1 which is heated to about 180 C 2 〇〇c as described above, the resin can be suppressed. The deterioration of the melting or deterioration of the sheet 16 can suppress the heat of the processing container 1 from passing back to the outside through the metal foil 13. Further, since it does not cause gas penetration or is not generated twice by the processing container Since the molten aluminum forms the storage region 14, the reduction in the degree of vacuum in the receiving/receiving region 14 can be suppressed, and the heat insulation can be maintained for a long period of time. Since the gas 17 between the metal foil 13 and the resin sheet 16 is provided with heat insulation. The material 18 can suppress the heat of the metal crucible 13 and the metal foil of the resin sheet 16 by the inner portion of the airtight region 17 and the heat insulating material 18, thereby suppressing heat dissipation of the processing container 1. Further, since the $13 system is rich Since the flexibility is formed, the metal foil 13 201202589 = can be broken to maintain a vacuum atmosphere in the storage area 14, and the heat insulator 2 can be disposed along the f processing container 1. In the example, the airtight area is used. 17 is an atmospheric atmosphere, but it can also be, for example, the inside of the airtight area 17 The area is true: the air is sucked, or the heat insulating material 2 is accommodated in the vacuum container, and the joint between the resin sheets 16 and 16 is spliced (the hole area is a vacuum atmosphere to further improve the heat insulation). In order to prevent the external gas from penetrating into the resin through the resin #16, as shown in Fig. 5, the resin sheet may be placed in the resin sheet to compensate for the gas barrier property of the resin sheet 16. 2 Metal assisting (4). The metal (4) and the gold powder are sampled from the upper and lower sides of the insulator 2, which are the same as the foil 21, and by the use of the surrounding ancient people i 曰 Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Z Further, in order to suppress the treatment, I pass through the auxiliary metal H 21, 21, and the outer side of the heat-assisted metal ruthenium 21 is provided with polyamido amide, which can be supplemented with 22. The auxiliary metal (four) and The resin sheet is made of a resin sheet, and a heat insulating material made of, for example, vermiculite glass is accommodated. The metal tanks 13 and U may be joined to each other by a joint method, but the outer portion may be smashed. The method of expanding and joining (for example, using an electron beam or the like to sneak into it), although the metal foil 13 is provided between the resin sheet 16 and the resin sheet 16. Further, the heat insulating material 1δ may be omitted, and the metal case 13 may be insulated from the yoke 18 to form the resin sheet 16. In this case, for example, the slab is covered. After the bismuth foils 13, 13 are placed behind each other, the metal foils, the two diameters are also joined to the gold, and the outer layers of the 13 are laminated.

S 12 201202589 樹脂片16。再者，雖係覆蓋金屬箔13般地來配置樹脂片16,亦可如圖6所示，將樹脂片16彼此之間分離’而接合樹脂片16及金屬箔13之周緣部彼此。此般分離樹脂片16、16彼此之間之方法，具體而言係在例如接合金屬.治13、13彼此後，於周圍方向覆蓋^人部15附近般地塗布遮蔽材。接著，於金屬箔η表面披覆樹脂片16，接著將遮蔽材剝離。藉由此般將樹脂片16、16分離之方式’該等樹脂片16、16間之傳熱便會被抑制，便可更加提高隔熱性。 … 又，關於隔熱體2，雖係藉由金屬箔13而氣密地保持於收納區域14，但亦可如圖7所示，取代金屬箔 13而藉由樹脂片16來保持於真空氛圍。此時Y充填材η外側係設有樹脂片16、16’該等樹脂片16、16 ，藉由熱熔接(熱封）來形成所述之接合部15。又，覆 $該樹脂片16般地由内侧依序形成有用以補償樹脂 ^16之氣體阻絕性的金屬13,及用以抑制該金屬 V白13之散熱的補助樹脂片22。 [第2實施形態] 接著’參照圖8就本發明隔熱體之第2實施形態如故It朗。純熱體係例如纖維狀或粉體狀之例 :夕等所構成之塊本體31於表面覆蓋有例如體。、==之外皮層(抽包材)32而構成罩型隔熱叫隔Τ 1及外Μ32 _成隔熱塊 ‘、、、體2)，該隔熱塊30係構成為例如概略箱型。 13 2〇12〇2589 為隔熱塊30内部係收納有由例如聚醯亞胺片所構成之樹脂層34、以及於該樹脂層34以例如蒸鍍來加以形成之金屬層（鋁層33)所加以構成之熱反射片35。鋁層33係用以將處理容器丨内之熱量朝處理容器1反射’樹脂層34係在處理容器1之熱量未盡反射而使得該麵層33升溫時，用以抑制熱量朝外部散熱。該熱反射片35係位於隔熱塊3〇厚度方向之概略中央位置，亦即由厚度方向兩側以幾乎相同厚度之塊本體31加以爽置而配置於隔熱塊3〇内。然後，以該熱反射片 35對向於處理容器1般地來酕置隔熱塊30。該等鋁層及樹脂層34之膜厚分別為例如〇.05mm、〇.〇5mm。另外’熱反射片35的層積方法可以為將樹脂層34披覆於鋁層33表面，或將該等鋁層33及樹脂層34個別形成為片狀再相互接著亦可。該第2實施形態在如戶述般對晶圓進行加熱處理而使得處理容器1外壁面升溫至例如20(TC左右時， X處理谷器1之熱量雖會欲傳熱至隔熱塊30内，但藉由鄰接於外壁面之外皮層32及塊本體31使得朝隔熱塊31内之傳熱被加以抑制。然後，當處理容器1之熱量的一部分到達熱反射片35時，如圖9所示，該熱量的大部份會藉由鋁層33而朝處理容器1側反射。然後’未盡朝處理容器1側反射之熱量導致鋁層33逐漸升溫時，由於鋁層33的熱傳導率高，故該熱量會欲朝向處理容器1外側之塊本體31傳熱。但是，由於該鋁 201202589 層33與塊本體31之間係設置有熱傳導率較鋁層33要小的樹脂層34，故如圖1 〇所示’會因樹脂層34而抑制朝塊本體31之散熱。即使有少量由處理容器1透過樹脂層34傳熱至該塊本體31 ’由於該塊本體31係如所述般地由矽石玻璃所構成，故對外部之散熱會被抑制。 ‘、、、θ 該第2實施形態由於係在隔熱塊30内部依序由處理容器1側層積鋁層33及樹脂層34，故可藉由铭層 33將來自處理容器1之熱量朝處理容器1反射，又，即使在未盡將處理容器丨之熱量反射而導致鋁層兕升溫的情況，可抑制因樹脂層34而朝外部之散熱。因此，可獲得隔熱性優異之隔熱體。從而，與僅以例如習用的矽石纖維等所構成之罩型隔熱體相比，可以讓隔熱塊3〇(塊本體31)更薄。 /圖U及圖12係顯示第2實施形態之變形例。圖 11係例，於隔熱塊3〇内，將熱反射片％設置於接近處理容器1側之外皮層32之區域。該熱反射片35中，係於處理容n丨侧配置|8層33，於外韻置樹脂層 34藉由★此般在接近發熱源(處理容器1)之部位設置熱反射片^ 35，可以更加地抑制朝外部之散熱。又，圖 12係例τ於隔熱塊3G内，在接近遠離處理容器！側之外^ 32之位置g己置熱反射片％。該例中，紹層 33及扣十月曰層>34亦分別配置在處理容器1側及外側。以上之第1及第2實施形態雖係於處理容器1外 15 201202589 壁面設置複數之隔熱體，但如圖13所示，亦可由上方覆蓋處理容器1般地使用下面有開口之概略箱型之隔熱體。具體而言，係沿著例如處理容器丨外壁面之5 個面（上面及侧面）各面配置各隔熱體，藉由丨個（1片），熱體（隔熱體2或隔熱塊3〇)來構成各面，並藉由該等5個隔熱體以例如接著各隔熱體周緣部彼此來成為下面有開口的箱型。即使是此般隔熱材，亦可以獲得所述各實施形態之作用及效果。又，關於所述之排氣管la，在為了抑制處理容器 1所排氣之氣體因冷卻而產生之生成物附著在排氣管 la内壁而以加熱器（圖中未示）來加熱排氣管la的情況，亦可覆蓋被隔熱區城(排氣管la)般地來設置隔熱體。此時如圖14所示，係將例如沿著排氣管ia配置的環狀隔熱體於圓周方向分割為2個，而藉由所述各實施形態之隔熱體2或隔熱塊30來構成各隔熱體。此時隔熱材的分割數亦可為3個以上，或可例如將隔熱材形成為略短栅狀，而將隔熱體一面側沿著排氣管la 之長度方向仿照外周面般地將隔熱體2複數地併排於排氣管la的圓周方向。該圖14中參考符號lb係設置於排氣管la與隔熱材之間的例如鋁所構成之塊體，參考符號lc係用以連接隔熱體彼此之例如黏著帶體。又，即使在處理容器1内加熱例如供給處理氣體之處理氣體供給管的情況，該處理氣體供給管周圍亦可以設置本發明之隔熱體。S 12 201202589 Resin sheet 16. Further, the resin sheet 16 is disposed so as to cover the metal foil 13, and as shown in Fig. 6, the resin sheets 16 may be separated from each other to bond the peripheral portions of the resin sheet 16 and the metal foil 13 to each other. The method of separating the resin sheets 16 and 16 from each other is specifically, for example, bonding the metal, the treatment 13, and 13 to each other, and then coating the masking material in the vicinity of the surrounding portion 15 in the surrounding direction. Next, the resin sheet 16 is coated on the surface of the metal foil η, and then the masking material is peeled off. By separating the resin sheets 16 and 16 as a result, the heat transfer between the resin sheets 16 and 16 is suppressed, and the heat insulating property can be further improved. Further, the heat insulator 2 is hermetically held in the housing region 14 by the metal foil 13, but may be held in a vacuum atmosphere by the resin sheet 16 instead of the metal foil 13 as shown in Fig. 7 . . At this time, the resin sheets 16, 16' such resin sheets 16, 16 are provided on the outer side of the Y filler η, and the joint portion 15 is formed by heat welding (heat sealing). Further, the metal sheet 13 for compensating for the gas barrier property of the resin 166 is sequentially formed from the inner side of the resin sheet 16, and the auxiliary resin sheet 22 for suppressing the heat dissipation of the metal V white 13 is formed. [Second Embodiment] Next, a second embodiment of the heat insulator of the present invention will be described with reference to Fig. 8. In the case of a pure heat system such as a fibrous or powder form, the block body 31 constituted by the eve or the like is covered with, for example, a body. And == outer skin layer (pumping material) 32 to form a cover type heat insulation called Τ 1 and outer Μ 32 _ into a heat insulating block ', body 2), and the heat insulating block 30 is configured, for example, as a rough box type . 13 2〇12〇2589 is a resin layer 34 composed of, for example, a polyimide film, and a metal layer (aluminum layer 33) formed by vapor deposition on the resin layer 34, for example, inside the heat insulating block 30. The heat reflecting sheet 35 is constructed. The aluminum layer 33 is for reflecting the heat in the processing container crucible toward the processing container 1. The heat of the resin layer 34 in the processing container 1 is not reflected enough to raise the surface layer 33, and the heat is prevented from being radiated to the outside. The heat reflecting sheet 35 is placed at a substantially central position in the thickness direction of the heat insulating block 3, that is, the block body 31 having almost the same thickness on both sides in the thickness direction is placed in the heat insulating block 3A. Then, the heat insulating sheet 30 is placed in the same manner as the processing container 1 by the heat reflecting sheet 35. The film thicknesses of the aluminum layer and the resin layer 34 are, for example, 〇.05 mm, 〇.〇5 mm, respectively. Further, the method of laminating the heat-reflecting sheet 35 may be to apply the resin layer 34 to the surface of the aluminum layer 33, or to form the aluminum layer 33 and the resin layer 34 individually into a sheet shape and then to adhere to each other. In the second embodiment, when the wafer is subjected to heat treatment as in the case of the household, and the temperature of the outer wall surface of the processing container 1 is raised to, for example, 20 (about TC), the heat of the X-treated barrage 1 is intended to be transferred to the heat insulating block 30. However, by the skin layer 32 and the block body 31 adjacent to the outer wall surface, heat transfer into the heat insulating block 31 is suppressed. Then, when a part of the heat of the processing container 1 reaches the heat reflecting sheet 35, as shown in FIG. As shown, most of the heat is reflected toward the processing container 1 side by the aluminum layer 33. Then, the heat of the aluminum layer 33 is gradually increased due to the heat which is not reflected toward the side of the processing container 1, due to the thermal conductivity of the aluminum layer 33. Therefore, the heat is to be transferred to the block body 31 outside the processing container 1. However, since the aluminum 201202589 layer 33 and the block body 31 are provided with a resin layer 34 having a thermal conductivity lower than that of the aluminum layer 33, As shown in FIG. 1A, heat dissipation to the block body 31 is suppressed by the resin layer 34. Even if a small amount of heat is transferred from the processing container 1 through the resin layer 34 to the block body 31', the block body 31 is as described above. The ground is made up of meteorite glass, so the heat dissipation to the outside will be suppressed. In the second embodiment, since the aluminum layer 33 and the resin layer 34 are sequentially laminated from the processing container 1 side inside the heat insulating block 30, the processing container 1 can be used by the inscription layer 33. The heat is reflected toward the processing container 1, and even when the heat of the processing container is not reflected, the temperature of the aluminum layer is increased, and heat dissipation to the outside due to the resin layer 34 can be suppressed. In addition, the heat insulating block 3 (the block body 31) can be made thinner than the cover type heat insulator made of, for example, conventional vermiculite fibers. / U and FIG. A modification of the second embodiment. Fig. 11 shows an example in which the heat reflecting sheet % is disposed in a region close to the outer layer 32 of the processing container 1 in the heat insulating block 3A. The heat reflecting sheet 35 is processed. In the case of the outer layer of the resin layer 34, the heat-reflecting sheet 35 is provided in a portion close to the heat source (processing container 1), so that heat dissipation to the outside can be further suppressed. Fig. 12 is a diagram τ in the heat insulating block 3G, and is placed closer to the side away from the processing container! The heat-reflecting sheet %. In this example, the layer 33 and the layer of the occluded layer are also disposed on the side of the processing container 1 and the outside. The first and second embodiments described above are outside the processing container 1 15 201202589 Although a plurality of heat insulators are provided on the wall surface, as shown in Fig. 13, a heat insulating body of a rough box type having an opening may be used in the same manner as the upper processing container 1. Specifically, for example, the outer wall surface of the processing container is used. Each of the five faces (top and side) is provided with a heat insulator, and each of the faces is formed by one (one piece), a hot body (insulator 2 or a heat insulating block 3), and by these For example, the five heat insulators are formed into a box shape having an opening on the lower surface of each of the heat insulators. Even in such a heat insulating material, the actions and effects of the respective embodiments can be obtained. In addition, in the exhaust pipe 1a, the product generated by the cooling of the gas exhausted from the processing container 1 is adhered to the inner wall of the exhaust pipe 1a, and the exhaust gas is heated by a heater (not shown). In the case of the tube la, it is also possible to provide a heat insulator in the same manner as the insulated area city (exhaust pipe la). At this time, as shown in FIG. 14, for example, the annular heat insulator disposed along the exhaust pipe ia is divided into two in the circumferential direction, and the heat insulator 2 or the heat insulating block 30 of each of the above embodiments is used. To form each insulation. In this case, the number of divisions of the heat insulating material may be three or more, or the heat insulating material may be formed into a slightly short grid shape, for example, and the one side of the heat insulator may be shaped along the outer peripheral surface along the longitudinal direction of the exhaust pipe 1a. The heat insulator 2 is plurally arranged side by side in the circumferential direction of the exhaust pipe 1a. The reference numeral lb in Fig. 14 is a block body composed of, for example, aluminum between the exhaust pipe la and the heat insulating material, and the reference symbol lc is for connecting the heat insulating bodies to each other, for example, an adhesive tape body. Further, even in the case where the processing gas is supplied to the processing gas in the processing container 1, for example, the heat insulating body of the present invention can be provided around the processing gas supply pipe.

S 16 201202589 戶斤述充填材11及塊本體31雖係以石夕石玻璃為例加以説明，但亦可使用例如玻螭纖維、聚胺酯泡沫塑料等。又，金屬箔13及鋁層33亦可為鋁以外之不銹鋼或錄等。再者，樹脂片16及樹脂層34除聚醯亞胺以外亦玎為耐熱性高之樹脂，可為耐熱溫度(熔融溫度) 為例如200 C以上之例如聚苯咪唑（PBI)、聚醚醚酮 (PEEK)、PAI聚醯胺•醯亞胺、聚苯硫喊(pps)等。所述第1實施形態之隔熱體(真空隔熱體)2係如所述般形成為概略板狀，故外表面適合對平面之發熱部位(被隔熱區域）進行施工（貼附）。另一方面，發熱部位之外表面形狀係對應於裝置或隔熱體2之設置部位而有各種樣態’例如所述排氣管la之外表面為曲面形狀，而處理容器1之上下四邊則形成為角部(稜線）。又，在處理谷器1設置有排氣管1 a用之凸緣(排氣埠）等之突起物的情況，需要避開該突起物來設置隔熱體 2。此時，如所述般，可對應於發熱部位外表面之形狀來調整隔熱體2之大小及形狀或各種配置方法，但藉由1種類(形狀及大小）之隔熱體2來對應於各種形狀外表面之方式來預先提高泛用性，在成本上為有利的。因此，關於所述板狀之隔熱體2，較佳係可以彎折或彎曲般，進一步地形成有用以避開突起物之缺口或開口部。、但是，該隔熱體2由於係在真空氛圍之收納區域 14填充有充填材11，而充填材n為緊密堅固地結合 17 201202589 j態’故難以f曲。又，將收納區域i4為大氣氛圍 3導致隔熱體2之隔熱性能降低，故無法對收納區域 14形成缺口或開口部。於該處，關於能容易彎折或彎 ^進一步地能將收納區域14保持於真空氛圍來於隔，、、、體2形成缺口或開口部之隔熱體2則於以下說明。首先，就該隔熱體2之概略外觀加以說明。如圖 ^〜圖18所示，隔熱體2係於平面（圖15之X-Y方向）氣密地區隔為複數之圓柱狀區域。亦即，於概略矩形之層積片51上係縱橫矩陣狀地配置有突出呈圓柱狀 3，區域(分割區域)5〇 ’各區隔區域5〇係形成有收 =域14(參㈣18)。如圖2所示，所述第1實施形 <占之隔熱體2雖於金屬箔13與樹脂片16之間設置有隔熱材18,但本例中，係以層積有該等金屬· ^及樹脂片16之情況為例加以說明。因此，層積片51如 =概略所示，係由上方側（或下方側)層積該等樹脂片/:金屬馆13、13及樹脂片16之狀態。又，各區隔區域5G如圖17所示，係於周圍方向錐狀雖狀地） ^自形成從層積片51朝上方延伸之前端側角部。本例中，各區隔區域50如圖Π所示，從層積片51起之高度尺寸h A 5mm、直徑尺寸R為20mm。又 = 區，50、50間之分離尺寸〇為例如5mm。另外°，° : 屬箔13及樹脂片16之尺寸係誇張地加以繪厚。、層積片51之膜厚為例如〇.2mm左右由於具有可撓性’故鄰接之區隔區域5〇彼此能上下左右地^自 201202589 運動。然後，該實施形態之隔熱體2即使在域50相互獨立地運動時，或該等區隔區域50中其中 m綠料ϋ 51 _時’仍可維持各收納 14為真空氛圍。 Μ，參照圖19〜圖23 ’就該隔熱體2之製造方法加以說明H如圖19(a)〜(e)所示，係相對於厚度尺寸為例如0.5mm左右之薄板(平板)或薄膜狀之金屬板(例如鋁所構成），利用金屬板41下方側及上方側所分別配置之第1模具61及第2模具62進行延壓加工來延壓金屬板41以形成金屬落13。然後，將金屬箔13由模具61、62取出，金屬箔 13如圖20所示，外面形狀及内面形狀會分別仿照第、模具61之凹部55的凹面及第2模具62之凸部的凸面形狀，於複數個位置由金屬落13朝下方成型有突出之突出部57。各突出部57的下端面内周面及外周面之彎曲部會橫跨周圍方向而形成為緩坡狀(R狀），又，厚度尺寸係例如〇.〇5mm左右。又，突出部57、57間之區域會藉由該成型而於水平方向變的平坦，又，藉由模具61、62來薄薄地延壓而成為厚度尺寸為舍)如 0.05mm。另外，圖2〇係將金屬板41之一部份裁切放大之圖示。接著，如圖19(d)及圖20所示，於對應各突出部 57之配關樣而格子狀地形成有複數開口部—之例如不銹鋼所構成的第3模具63上載置(裝設)金屬箔n 19 201202589 以讓突出部57分別收納於開口部63a内。接著，如圖 19(d)所示，於各突出部57内填充矽石等所構成之玻璃纖維或粉末來作為充填材。然後，各自填塞突出部 7之上面開口區域（充填材11之收納區域)般地來載置厚度尺寸為〇.〇5mm左右之平板狀金屬箔42(例如鋁所構成）。藉由該等金屬箔13及金屬箔42，便會成為包覆各充填材11之狀態。接著，如圖21所示，在用以於真空氛圍中進行加熱處理之真空室71内，將該等第 3模具63、金屬箔13、充填材11及金屬箔42搬入並載置於加熱台72。圖21中之元件符號73為加熱器，元件符號74為真空排氣管路。然後，設定真空室71内為真空氛圍，並由金屬箔 42之上方側將下面由平坦之例如不鏽鋼所構成之第4 模具64朝金屬箔42加壓以使得金屬箔13、42相互壓接。又，藉由加熱台72讓金屬箔13及金屬箔42之接觸部（突出部57、57間之區域)加熱至例如600〜700°C 左右。然後，將該加熱處理及加壓處理進行例如12小時左右時，如圖22所示，會產生金屬箔41(13)及金屬箔42之接觸部間的原子擴散，而於接觸部幾乎無法判別界面或邊界般地使得該等金屬箔13及金屬箔42擴散接合。因此，各突出部57會如圖23所示，於填充有充填材11之内部區域(收納區域14)會成為真空氛圍下，於周圍方向個別氣密地封止。另外。圖21中，用以將第4模具64朝下方加壓的加壓機構則省略圖示。S 16 201202589 The description of the filling material 11 and the block body 31 is exemplified by Shishishi glass, but for example, glass fiber, polyurethane foam or the like can be used. Further, the metal foil 13 and the aluminum layer 33 may be stainless steel other than aluminum or recorded. Further, the resin sheet 16 and the resin layer 34 may be a resin having high heat resistance in addition to polyimide, and may be, for example, polyphenylimidazole (PBI) or polyether ether having a heat-resistant temperature (melting temperature) of, for example, 200 C or more. Ketone (PEEK), PAI polyamine, quinone imine, polyphenylene sulfide (pps), etc. Since the heat insulator (vacuum heat insulator) 2 of the first embodiment is formed into a substantially plate shape as described above, the outer surface is suitable for construction (attaching) of the heat generating portion (insulated area) of the flat surface. On the other hand, the outer surface shape of the heat generating portion has various states corresponding to the installation portion of the device or the heat insulator 2 'for example, the outer surface of the exhaust pipe 1a has a curved shape, and the upper and lower sides of the processing container 1 are Formed as a corner (ridge line). Further, in the case where the processing barn 1 is provided with a projection such as a flange (exhaust port) for the exhaust pipe 1a, it is necessary to provide the heat insulator 2 while avoiding the projection. In this case, as described above, the size and shape of the heat insulator 2 or various arrangement methods can be adjusted in accordance with the shape of the outer surface of the heat generating portion, but the heat insulator 2 of one type (shape and size) corresponds to the heat insulator 2 The manner in which the outer surfaces of various shapes are used to improve the versatility in advance is advantageous in terms of cost. Therefore, it is preferable that the plate-shaped heat insulator 2 can be bent or bent to further form a notch or an opening for avoiding the projection. However, the heat insulator 2 is filled with the filler 11 in the storage region 14 in a vacuum atmosphere, and the filler n is tightly and firmly bonded to the state of 201202589. Further, since the storage area i4 is the atmospheric atmosphere 3, the heat insulating performance of the heat insulator 2 is lowered, so that the storage area 14 cannot be formed with a notch or an opening. In this case, the heat insulator 2 which can be easily bent or bent to further maintain the storage region 14 in a vacuum atmosphere to form a notch or an opening in the body 2 will be described below. First, the outline appearance of the heat insulator 2 will be described. As shown in Fig. 18 to Fig. 18, the heat insulator 2 is in a plane (in the X-Y direction of Fig. 15), and the airtight region is divided into a plurality of cylindrical regions. In other words, in the rectangular rectangular laminated sheet 51, a columnar shape is arranged in a vertical and horizontal matrix, and a region (divided region) 5〇' each of the partition regions 5 is formed with a receiving field 14 (see (four) 18). . As shown in FIG. 2, in the first embodiment, the heat insulator 2 is provided with a heat insulating material 18 between the metal foil 13 and the resin sheet 16, but in this example, these layers are laminated. The case of the metal·^ and the resin sheet 16 will be described as an example. Therefore, the laminated sheet 51 is in a state in which the resin sheets /: the metal galleys 13 and 13 and the resin sheet 16 are laminated from the upper side (or the lower side) as schematically shown. Further, as shown in Fig. 17, each of the partition regions 5G is formed in a tapered shape in the peripheral direction. ^ The front end side corner portion is formed to extend upward from the laminated sheet 51. In this example, each of the partition regions 50 has a height dimension h A 5 mm and a diameter dimension R of 20 mm from the laminated sheet 51 as shown in Fig. 。. Also = zone, the separation size of 50, 50 is 例如 for example 5mm. Further, °, °: the size of the foil 13 and the resin sheet 16 are exaggeratedly thick. The film thickness of the laminated sheet 51 is, for example, about 2 mm, because it has flexibility. Therefore, the adjacent partition regions 5 〇 can move up and down and left and right from 201202589. Then, the heat insulator 2 of this embodiment maintains the storage compartment 14 in a vacuum atmosphere even when the domains 50 move independently of each other, or in the compartments 50. Referring to Fig. 19 to Fig. 23, a description will be given of a method for manufacturing the heat insulator 2, as shown in Figs. 19(a) to 19(e), which is a thin plate (plate) having a thickness of, for example, about 0.5 mm or In the film-shaped metal plate (for example, aluminum), the first metal mold 61 and the second metal mold 62, which are disposed on the lower side and the upper side of the metal plate 41, are subjected to a rolling process to laminate the metal plate 41 to form the metal fall 13 . Then, the metal foil 13 is taken out from the molds 61 and 62. As shown in Fig. 20, the metal foil 13 has an outer shape and an inner surface shape which respectively follow the concave shape of the concave portion 55 of the first mold 61 and the convex shape of the convex portion of the second mold 62. A protruding portion 57 is formed by the metal fall 13 at a plurality of positions. The curved portion of the inner peripheral surface and the outer peripheral surface of the lower end surface of each of the protruding portions 57 is formed in a gentle slope shape (R shape) across the peripheral direction, and the thickness is, for example, about 5 mm. Further, the region between the protruding portions 57 and 57 is flattened in the horizontal direction by the molding, and is thinly stretched by the dies 61 and 62 to have a thickness of, for example, 0.05 mm. In addition, Fig. 2 is a diagram in which one portion of the metal plate 41 is cut and enlarged. Then, as shown in FIG. 19(d) and FIG. 20, a third mold 63 made of, for example, stainless steel in which a plurality of openings are formed in a lattice shape corresponding to the matching of the respective protruding portions 57 is placed (mounted). The metal foil n 19 201202589 is such that the protruding portions 57 are housed in the opening portion 63a. Then, as shown in Fig. 19 (d), each of the protruding portions 57 is filled with a glass fiber or powder composed of vermiculite or the like as a filling material. Then, a flat metal foil 42 (for example, aluminum) having a thickness of about mm5 mm is placed in the upper opening region (the storage region of the filler 11) of each of the plugging portions 7. The metal foil 13 and the metal foil 42 are in a state of covering each of the fillers 11. Next, as shown in FIG. 21, in the vacuum chamber 71 for performing heat treatment in a vacuum atmosphere, the third mold 63, the metal foil 13, the filler 11 and the metal foil 42 are carried in and placed on the heating table. 72. Reference numeral 73 in Fig. 21 is a heater, and reference numeral 74 is a vacuum exhaust line. Then, the vacuum chamber 71 is set to have a vacuum atmosphere, and the fourth mold 64 made of a flat, for example, stainless steel, is pressed from the upper side of the metal foil 42 toward the metal foil 42 so that the metal foils 13, 42 are pressed against each other. Further, the contact portion of the metal foil 13 and the metal foil 42 (the region between the protruding portions 57, 57) is heated by the heating stage 72 to, for example, about 600 to 700 °C. Then, when the heat treatment and the pressure treatment are performed for, for example, about 12 hours, as shown in FIG. 22, atomic diffusion between the contact portions of the metal foil 41 (13) and the metal foil 42 occurs, and it is almost impossible to distinguish at the contact portion. The metal foil 13 and the metal foil 42 are diffusion bonded by an interface or a boundary. Therefore, as shown in Fig. 23, each of the protruding portions 57 is hermetically sealed in the peripheral direction in a vacuum atmosphere in the inner region (the storage region 14) filled with the filler 11. Also. In Fig. 21, the pressing mechanism for pressing the fourth mold 64 downward is omitted.

S 20 201202589 然後，將該等一體化之金屬箔41(13)及金屬箔42 浸潰到例如樹脂所構成之液體中，從液體取出後進行乾燥或加熱處理。藉由該處理，如圖18所示，於金屬 v备13及金屬箔42表面會形成例如〇〇5mm左右之樹脂片16、16，如所述之圖15所示，便得到型成有複數個區隔區域50之隔熱體2。因此，各區隔區域50 與所述第1實施形態所說明之隔熱體2一樣，會形成有藉由金屬箔13(金屬箔13、42)所加以氣密地封止之收納區域14。該樹脂片16亦可貼附例如膜狀之樹脂片16以取代進行浸潰到樹脂所構成之液體中及熱處理。圖18中，連接各區隔區域5〇一端側（上方側）之部位（金屬箔13、金屬箔42及樹脂片16、16)的所述層積片51係形成為例如膜厚為〇2mm左右，例如以平面(X-Y面）所觀之時的一邊尺寸分別為例如20mm 之正方形。由於此般層積片51係薄膜狀，故各區隔區域50會維持各收納區域14之真空氛圍，並可各自獨立移動地藉由層積片51來加以支撐。接著，就沿著所述排氣管la外表面配置該隔熱體 2之情況加以說明。此處，以平面觀看隔熱體2時之朝向區隔區域50前端側之面為表面’朝向層積片51 側之面為内面時，如圖24所示，係沿著排氣管1&之外周面)及排氣官1&之長度方向將隔熱體捲繞於卜氣笞1 a以使得隔熱體2之表面側面臨排氣管1 a侧， W1202589 即各區隔區域5〇使用例如耐熱帶著。之前端部係接觸排氣管la。然後，幻等將隔熱體2之端部彼此相互接且右由於係如所述般地將各區隔區域5G以相互 51中之加以支撐’故該等區隔區域隔沐體2日# 1 照排氣管1a外周面配置有 f，胃抑制例如延壓或壓縮時之應力的產。因此’會抑制例如金屬薄13巾之銷孔或龜裂的產 ’而維持收納區域14之真空氛圍（隔熱性能）。又， =於各區隔區域50中個別地形成收納區域14，轉收納區域14例如其中—個金屬们3形成有銷而回復至大氣氛圍，也幾乎不會影響到其他收納區 5 故隔熱體2整體幾乎可以維持隔熱性能。再者，由於各區隔區域5G係形成為概略圓筒狀，又，區隔區域50刖端部之角部係形成為緩坡狀而可抑制對於金屬vg 13之銳利（尖銳）面之形成，故可抑制對金屬箔u 之部分的應力集中’並進一步地抑制銷孔或龜裂的產生。又再者，由排氣管la觀之層積片51係較區隔區域50要位於更外側位置，故可以抑制㈣氣管u 透過層積片51朝外部之散熱。另外，即使金屬箔i3 形成有銷孔等’由則緖蓋金職13般轉成有樹脂片16,故亦有藉由樹脂片16來維持收納區域抖之真空氛圍的情況。此時，在所述f 1實施形態之隔熱豸2(未設置有S 20 201202589 Then, the integrated metal foil 41 (13) and the metal foil 42 are immersed in a liquid composed of, for example, a resin, taken out from the liquid, and then dried or heat-treated. By this treatment, as shown in FIG. 18, resin sheets 16, 16 having a thickness of, for example, about 5 mm are formed on the surface of the metal v and the metal foil 42 as shown in Fig. 15, and the pattern is obtained in plural. Insulation 2 of the compartment 50. Therefore, in each of the partition regions 50, as in the heat insulator 2 described in the first embodiment, the storage region 14 which is hermetically sealed by the metal foil 13 (metal foils 13, 42) is formed. The resin sheet 16 may be attached with, for example, a film-like resin sheet 16 instead of being impregnated into a liquid composed of a resin and heat-treated. In Fig. 18, the laminated sheet 51 connecting the portions (the metal foil 13, the metal foil 42, and the resin sheets 16, 16) on the one end side (upper side) of each of the partition regions 5 is formed, for example, to have a film thickness of 〇. A size of about 2 mm, for example, when the plane (XY plane) is viewed, is a square of, for example, 20 mm. Since the laminated sheets 51 are in the form of a film, the respective compartments 50 maintain the vacuum atmosphere of each of the storage areas 14, and can be supported by the laminated sheets 51 independently of each other. Next, the case where the heat insulator 2 is disposed along the outer surface of the exhaust pipe 1a will be described. Here, when the surface of the front end side of the partitioning area 50 when the heat insulating body 2 is viewed in plan is the inner surface of the surface side toward the side of the laminated sheet 51, as shown in Fig. 24, it is along the exhaust pipe 1& The outer circumferential surface) and the longitudinal direction of the exhausting officer 1& are wound around the heat insulating body 1 a such that the surface side of the heat insulating body 2 faces the side of the exhaust pipe 1 a, and W1202589 is the divided area 5 〇 Use, for example, a heat resistant belt. The front end contacts the exhaust pipe la. Then, the ends of the heat insulator 2 are connected to each other and the right side is supported by the respective partitions 5G in the mutual 51 as described above. 1 The f is disposed on the outer peripheral surface of the exhaust pipe 1a, and the stomach suppresses, for example, the stress at the time of pressure expansion or compression. Therefore, the vacuum atmosphere (heat insulation performance) of the storage region 14 is maintained by suppressing, for example, the production of pin holes or cracks of the thin metal foil. Further, the storage area 14 is individually formed in each of the compartments 50, and the metal storage unit 3 is formed with a pin and returns to the atmosphere, and the insulation area is hardly affected. The body 2 can maintain almost the same thermal insulation performance. Further, since each of the partition regions 5G is formed in a substantially cylindrical shape, the corner portions of the end portions of the partition regions 50 are formed in a gentle slope shape, and formation of a sharp (sharp) surface for the metal vg 13 can be suppressed. Therefore, stress concentration on a portion of the metal foil u can be suppressed and the occurrence of pin holes or cracks can be further suppressed. Further, since the laminated sheet 51 viewed from the exhaust pipe is located at a further outer position than the partitioned region 50, it is possible to suppress the heat dissipation of the air pipe u through the laminated sheet 51 to the outside. In addition, even if the metal foil i3 is formed with a pin hole or the like, the resin sheet 16 is converted into the resin sheet 16, so that the resin sheet 16 can maintain the vacuum atmosphere of the storage area. At this time, in the thermal insulation 豸 2 of the f 1 embodiment (not provided

S 22 201202589 複數之區隔區域50的情況）中，於縱使彎折或彎曲也不會於金屬箔13形成銷孔等般地來將金屬箔13之厚度為例如15mm左右時，也有該金屬箔13之剛性提高 (強度提高）而難以彎曲的情況。因此，藉由將隔熱體2 氣密地區隔為複數之區隔區域5〇，由於可以在金屬箔 13之膜厚較薄的狀態下來抑制銷孔的產生，故可以維持隔熱體2之隔熱性能並使得隔熱體丨能容易彎折或彎曲。此處，在排氣管la外周捲繞隔熱體2時，於隔熱體la長度較排氣管1&之圓周尺寸或長度尺寸(排氣管 la之延伸f向尺寸）要短的情況，係將複數隔熱體2貼附於排氣f la外面’而使⑽述之耐熱帶65將該等隔熱體2、2彼此加以接著。另—方面，在隔熱體2之長度尺寸較誠管la之各尺寸要長的情況，係裁切隔熱體2中之區隔區域5G、5G間之區域，_如圖16 所示A-A線中的層積片5卜此般地即使以中途部位來裁切隔熱體2的情況，藉由避開各收納區域14來裁切隔熱體2 ’便⑥保持各區隔區域％之真空氛圍並維持隔熱性°此時’如圖14所示，亦可於排氣管la及隔熱體2之間配置塊體15。另外，圖％巾，係概略地顯示區隔區域5 〇、5 0間之配置間隔及層積片51。所述區隔區域50、50間之分離尺寸D過大(過度分離)會使得真空氛圍之收納區域14、14相互分㈣度而導致隔熱性能降低，故較佳為1()mm以下。又， 23 201202589 分離尺寸D過小（過於接近）會難以對應於曲率較大的曲面’亦即使得隔熱體2難以彎曲，故較佳為例如5mm 以上。該分離尺寸D雖會因發熱部位而有所不同，但 =如以所述排氣管la為例說明時，在排氣管u之外徑尺寸為〇50mm的情況，較佳為5mm〜1〇mm，在φ 〇〇mm的情況，較佳為左右。再者，關於層積片51至區隔區域5〇之高度尺寸h及區隔區域 50之直徑尺寸R，較佳為例如h為5mm〜i〇mm，r為 20mm〜40mm左右（參看圖17)。又’如圖25所示’亦可覆蓋處理容器1之上下四邊的角部般地來配置隔熱體2。此種情況，亦可維持各區隔區域50中之收納區域14的真空氛目，即在抑制金屬箔13中之銷孔等發生的狀態下，沿著處理容器 1的外面來貼附隔熱體2。再者’在處理容器1外面形成有突起物之用以連接所述排氣官la之凸緣(排氣部)75的情況，亦可將隔熱體1之一部分切除來對應該凸緣75之大小及形狀。錄情況如圖2 6所示，藉由切除隔熱體2中的一個或複數個區隔區域5G來形成開口部66 ,便可以保持開口 4 66周圍之收納區域14的真空氛圍。因此，如圖 27及圖28所示’便可以避開凸緣75來配置隔熱體2。另外’圖27中係省略Υ方向之隔熱體2，又，圖28 中係省略層積片51。如此一來’由於可對應於各種形狀之發熱部位、In the case of the case of the plurality of the partition regions 50, the metal foil may have a thickness of, for example, about 15 mm, even if the metal foil 13 is formed into a pin hole or the like, even if it is bent or bent. The rigidity of 13 is increased (the strength is increased) and it is difficult to bend. Therefore, by insulating the heat insulator 2 into a plurality of partition regions 5, the occurrence of the pin holes can be suppressed in a state where the thickness of the metal foil 13 is thin, so that the heat insulator 2 can be maintained. Insulation and the insulation can be easily bent or bent. Here, when the heat insulator 2 is wound around the outer circumference of the exhaust pipe la, the length of the heat insulator 1a is shorter than the circumferential dimension or the length dimension of the exhaust pipe 1& (the extension of the exhaust pipe la is f dimension). The plurality of heat insulators 2 are attached to the outside of the exhaust gas f la ', and the heat-resistant belts 65 described in (10) are connected to each other. On the other hand, in the case where the length dimension of the heat insulator 2 is longer than the respective dimensions of the tube la, the area between the partitions 5G and 5G in the heat insulator 2 is cut, as shown in Fig. 16A. In the case of the laminated sheet 5 in the line, even if the heat insulator 2 is cut in the middle portion, the heat insulator 2 is cut by avoiding each of the storage regions 14 and the remaining area is kept at %. In the vacuum atmosphere, the heat insulating property is maintained. At this time, as shown in FIG. 14, the block 15 may be disposed between the exhaust pipe 1a and the heat insulator 2. Further, the figure % towel schematically shows the arrangement interval between the partition areas 5 〇 and 50 and the laminated sheet 51. If the separation dimension D between the compartments 50 and 50 is too large (over-separation), the storage areas 14 and 14 of the vacuum atmosphere are divided into four degrees to cause a decrease in thermal insulation performance, and therefore it is preferably 1 () mm or less. Further, 23 201202589 It is difficult for the separation dimension D to be too small (too close) to correspond to a curved surface having a large curvature, that is, the insulator 2 is difficult to bend, and therefore it is preferably 5 mm or more. The separation dimension D may vary depending on the heat generating portion. However, when the exhaust pipe 1a is taken as an example, when the outer diameter of the exhaust pipe u is 〇50 mm, it is preferably 5 mm to 1 mm. 〇mm, in the case of φ 〇〇 mm, it is preferably left and right. Further, regarding the height dimension h of the laminated sheet 51 to the partitioning region 5〇 and the diameter dimension R of the partitioning region 50, it is preferable that, for example, h is 5 mm to i〇mm, and r is about 20 mm to 40 mm (see FIG. 17). ). Further, as shown in Fig. 25, the heat insulator 2 may be disposed so as to cover the corners of the lower four sides of the processing container 1. In this case, the vacuum atmosphere of the storage area 14 in each of the compartments 50 can be maintained, that is, the heat insulation can be attached along the outer surface of the processing container 1 while suppressing the occurrence of pin holes or the like in the metal foil 13. Body 2. Further, in the case where the protrusion (the exhaust portion) 75 of the exhausting member la is formed on the outer surface of the processing container 1, a part of the heat insulating body 1 may be partially cut off to correspond to the flange 75. The size and shape. As shown in Fig. 26, the opening portion 66 is formed by cutting one or a plurality of the partition regions 5G of the heat insulator 2, so that the vacuum atmosphere of the storage region 14 around the opening 4 66 can be maintained. Therefore, as shown in Figs. 27 and 28, the heat insulator 2 can be disposed away from the flange 75. Further, in Fig. 27, the heat insulator 2 in the Υ direction is omitted, and in Fig. 28, the laminated sheet 51 is omitted. As a result, it can correspond to heat-generating parts of various shapes.

S 24 201202589 具體而言為曲面或彎曲部甚至突起物的形成面，來適 ^ 1種類（大小及形狀)之隔熱體2,故不需要對應發熱，位之種類來製造隔熱體2，因此隔熱體2便能獲得咼泛用性而有利於成本。另外，雖已說明本例之開口 P 66但亦可取代該開口部66，例如由隔熱體2之側邊去除一個或複數個區隔區域50般地來置入缺口。又’如所述範例之說明般，亦可在金屬箔13與樹月曰片16之間設置隔熱材18。此種情況如圖29所示，係在金屬板41及金屬箔42周圍配置隔熱材18，並覆蓋該等金屬板41、金屬箔42及隔熱材18般地來配置例如薄膜狀之樹脂片16、16’並接著樹脂片16、16 之周緣部彼此。此種情況之隔熱材18係橫跨各區隔區域50來加以配置。又，如圖30所示，亦可於各區隔區域5〇之間藉由树知片16來區隔隔熱材18。如此般在區隔隔熱材 1'時，係將金屬箱13、13彼此擴散接合後，例：於所述第3模具63(圖21)之表面塗布樹脂液，並於該第 3模具63之開口部63a(收納有突出部57之區域)各自收納隔熱材18以使得開口部6 3 a的深度尺寸為例如一半左右。然後，於開口部63a、63a之間藉由水平面從下方侧支撐突出部57、57間之區域般地將突出部57 各自收納於第3模具63之個別開口部63。然後，藉由將該等隔熱體1及第3模具6 3加熱，使得第3模^ 63表面之樹脂液硬化，以連接各突出部57周圍之金 25 201202589 屬箔13(金屬箔42)及樹脂膜(樹脂片i6)，並於各突出部57及樹脂片16之間收納隔熱材18。因此，便依各區隔區域50來區隔出隔熱材18。接著，於隔熱體2 上方側亦使用同樣之模具（圖中未示）來進行樹脂液的塗布、隔熱材18之收納吉加熱處理，藉以得到如圖 3〇所示之隔熱體2。圖30之隔熱體2如所述般在切除一個或複數個區隔區域50時，係藉由以例如圖3〇之 B-B線來加以裁切，而維持各收納區域之真空气圍，並可抑制隔熱材18之外漏或飛散。所述例中，雖係將區隔區域5〇配成呈格子狀，但亦可如圖31所示，配置呈千鳥狀(相互不同）。又，區隔區域50除了概略圓筒狀外，亦可如圖32所示般地為概略箱型。再者，如圖33所示，亦可設置底面及上面形狀為三角形之三角柱狀之區隔區域5〇，並將2個區隔區域50、50以側面彼此相互接近而對向般地來加以配製，而於複數個位置處設置以該等2個為一組之區隔區域50。然後，於該等一組而相互接近之區隔區域50、50彼此之對向面併排呈一列，並於層積片51 上並列複數之區隔區域50，來相對於該列之直交方向 (圖33中之箭頭所示方向）將隔熱體2更容易彎折。另外，圖32及圖33中，係部份裁切地顯示隔熱體2。又，藉由複數區隔區域50來構成隔熱體2時，雖係使用第1模具61及第2模具62來形成突出部57，但亦可不使用此般模具61、62，而於概略平板狀之金S 24 201202589 Specifically, it is a surface of a curved surface, a curved portion, or even a projection, and the heat insulator 2 of a type (size and shape) is used. Therefore, it is not necessary to produce a heat insulator 2 in accordance with the type of heat. Therefore, the heat insulator 2 can obtain versatility and is advantageous for cost. Further, although the opening P 66 of the present embodiment has been described, it is also possible to replace the opening portion 66, and for example, the notch is removed by removing one or a plurality of the partition regions 50 from the side of the heat insulator 2. Further, as described in the above description, a heat insulating material 18 may be provided between the metal foil 13 and the tree slab 16 . In this case, as shown in FIG. 29, a heat insulating material 18 is disposed around the metal plate 41 and the metal foil 42, and a resin such as a film is disposed so as to cover the metal plate 41, the metal foil 42, and the heat insulating material 18. The sheets 16, 16' are followed by the peripheral portions of the resin sheets 16, 16. In this case, the heat insulating material 18 is disposed across the respective compartments 50. Further, as shown in Fig. 30, the heat insulating material 18 may be partitioned by the tree 16 between the respective partition regions 5?. When the heat insulating material 1' is partitioned as described above, after the metal cases 13 and 13 are diffused and joined to each other, for example, a resin liquid is applied to the surface of the third mold 63 (FIG. 21), and the third mold 63 is applied to the third mold 63. The opening portion 63a (the region in which the protruding portion 57 is housed) accommodates the heat insulating material 18 such that the depth of the opening portion 633a is, for example, about half. Then, the projections 57 are housed in the respective openings 63 of the third die 63 in the region between the projections 57, 57 from the lower side by the horizontal plane between the openings 63a and 63a. Then, by heating the heat insulator 1 and the third mold 63, the resin liquid on the surface of the third mold 63 is hardened to connect the gold 25 201202589 foil 13 (metal foil 42) around each of the projections 57. And a resin film (resin sheet i6), and the heat insulating material 18 is accommodated between each protrusion part 57 and the resin sheet 16. Therefore, the heat insulating material 18 is partitioned by the respective compartments 50. Next, the same mold (not shown) is used on the upper side of the heat insulator 2 to apply the resin liquid and heat the storage material 18, thereby obtaining the heat insulator 2 as shown in FIG. . The heat insulator 2 of FIG. 30, when the one or more partition regions 50 are cut off as described above, is cut by, for example, the BB line of FIG. 3 to maintain the vacuum envelope of each storage area, and It is possible to suppress leakage or scattering outside the heat insulating material 18. In the above example, the partition regions 5 are arranged in a lattice shape, but as shown in Fig. 31, they may be arranged in a thousand birds (different from each other). Further, the partitioned area 50 may have a substantially cylindrical shape as shown in Fig. 32. Further, as shown in FIG. 33, a bottom surface and a triangular prism-shaped partition region 5' having a triangular shape may be provided, and the two partition regions 50, 50 may be adjacent to each other to face each other. The preparation is performed, and the compartments 50 in the group of the two are disposed at a plurality of positions. Then, the mutually adjacent sections 50, 50 adjacent to each other are arranged side by side in a row, and the plurality of compartments 50 are juxtaposed on the laminated sheet 51 to be orthogonal to the column ( The direction indicated by the arrow in Fig. 33) makes it easier to bend the insulator 2. Further, in Figs. 32 and 33, the heat insulator 2 is partially cut. Further, when the heat insulator 2 is configured by the plurality of partition regions 50, the first mold 61 and the second mold 62 are used to form the protruding portion 57. However, the molds 61 and 62 may not be used, and the flat plate may be used. Gold

S 26 201202589 f板41上的複數區域處點設充填材n。此時，係氣岔地區隔δ玄等充填材u之點設區域般地藉由第3模具 63上面來從下方側支撐點設區域周圍之金屬板4卜以於金屬板41上方層積金屬箱42。然後，於真空氛圍中^藉由從料金騎41及金職42之上方側將第 3模具63之上下替換之其他模具，來加壓點設區域周，之金屬,42的下方側。然後，與所述範例相同地，藉由進仃加壓處理及加熱處理，便能接合該等金屬板 41及金屬箔42之接觸面。此處參知圖34，就所述第i實施形態中隔熱體 2之製造方法加以簡單說明。與未使用所述模具μ、 62之情況相同地，於概略平板上之金屬板4ι(金屬箱充填材1卜於該充填材n上方層積金屬箱 (金屬洎13)。然後，藉由金屬板41及金屬箔42來，，充填材11般地’將充填材u周圍之金屬板41及金屬羯42的金屬面彼_互接觸，於衫氛圍接觸面施加壓力，並加熱接觸面。如此一纟，斑所述乾例相同地藉由進行加壓處理及加熱處理 ^引起園子擴散，而制第丨實施雜之隔熱^接 =中’參考符號81及82分別為橫跨隔熱體2周圍下方側支撑接觸面之模具，及從上方側朝下方力 =接由模具81所支撐之支撐面的模具，參考符號為加熱藉由模具8卜82所夾置之區域的加熱部。又，在連接複數區隔區域50時，雖係使用由金屬 27 201202589 :13,樹脂片16(詳細而言為金屬板4i、金屬洛匕樹月曰片16、16)所構成之層積片51，但亦可藉由樹月曰材來連接該等複數之區隔區域50。具體而言如圖34 所說明般，係製作複數個未言5:有區隔區域5G之隔熱體 2，然後，如以下說明般，使用兩個圖％及圖％所示之連接用模具9〇而平面地連接複數個該等隔熱體2。該連接用模具90係於複數他置處例如以格子狀地配置有用以收納隔熱體2之凹部，該凹部Μ之寬度尺寸係&定為凹部91所收納之隔熱體2端部會從凹部91外緣略為朝外側伸出例如加爪左右即凹部w ^間的區域巾係由崎來支禮隔熱體 2。又，該等凹 4 91 91間形成為水平之部位的水平部％係縱橫地將連接用模具90的上面加以區隔般地形成有線狀的溝槽93 β亥溝槽93係各自連通，並於連接用模具9〇側面朝向連接用模具90的外側開口。」後將^熱體2收納於凹部91般地將複數隔熱體2併排於連接用模具9〇上，並如圖π所示，將該等隔熱體2之端部位於溝槽93的上方位置。接著，從連接Π90上所載置之該等隔熱體2的上方側在與用模具上下交替的狀態下將其他連接用搵I 90、90 Ιϋί後，藉由固定具（圖中未示)將連接用、由：纳於’笼Γ ’以使得隔熱體2從上方側及下方側被，納於料連接用模具％、9()中之、9卜接著’將該連接用模具9〇、9〇浸潰到樹脂液中，則樹S 26 201202589 The filling area n is set at a plurality of areas on the f plate 41. At this time, the metal plate 4 around the point-providing region is supported from the lower side by the upper surface of the third die 63, and the metal is stacked above the metal plate 41. Box 42. Then, in the vacuum atmosphere, the other molds which are replaced by the upper and lower portions of the third mold 63 from the upper side of the metal gold 41 and the gold metal 42 are pressed to set the lower side of the metal, 42 of the area. Then, in the same manner as the above-described example, the contact faces of the metal plates 41 and the metal foils 42 can be joined by the pressurizing treatment and the heat treatment. Referring to Fig. 34, a method of manufacturing the heat insulator 2 in the first embodiment will be briefly described. As in the case where the molds μ and 62 are not used, the metal plate 4 ι on the schematic plate (the metal case filling material 1 is laminated on the metal case (metal iridium 13) over the filling material n. Then, by metal In the case of the plate 41 and the metal foil 42, the metal material 41 around the filling material u and the metal surface of the metal crucible 42 are brought into contact with each other, and pressure is applied to the contact surface of the shirt atmosphere, and the contact surface is heated. At the same time, the dry case of the spot is similarly caused by the pressure treatment and the heat treatment to cause the garden to spread, and the third layer of the heat insulation is connected. 2 a mold for supporting the contact surface on the lower side, and a mold for supporting the support surface supported by the mold 81 from the upper side to the lower side, and the reference numeral is a heating portion for heating the region sandwiched by the mold 8 82. When the plurality of compartments 50 are connected, a laminate sheet 51 composed of a metal 27 201202589:13, a resin sheet 16 (in detail, a metal plate 4i, a metal eucalyptus mooncake 16 and 16) is used. However, the plurality of compartments 50 may also be connected by a tree moon coffin. As described in FIG. 34, a plurality of insulating bodies 2 having a partition 5G are formed, and then, as described below, two connecting molds shown in FIG. A plurality of the heat insulators 2 are connected to each other in a plane. The connection mold 90 is disposed in a plurality of places, for example, in a lattice shape, and is configured to accommodate a concave portion of the heat insulator 2, and the width dimension of the concave portion is & The end portion of the heat insulator 2 accommodated in the recessed portion 91 is slightly protruded outward from the outer edge of the recessed portion 91, for example, the area between the claws and the recessed portion w^ is a sacred insulation insulator 2. The horizontal portion % formed in the horizontal portion between the recesses 4 91 91 is formed by linearly separating the upper surface of the connecting mold 90 into a linear groove 93. The β-channel 93 is connected to each other and connected. The side surface of the mold 9 is opened toward the outside of the connection mold 90. After that, the heat insulator 2 is housed in the concave portion 91, and the plurality of heat insulators 2 are arranged side by side on the connection mold 9〇, as shown in FIG. The ends of the insulators 2 are located above the grooves 93. Then, they are placed on the connection Π90. The upper side of the heat insulator 2 is connected to the upper and lower sides of the mold, and the other joints are used for 连接I 90, 90 Ιϋ, and then connected by a fixture (not shown). Γ 'In order to allow the heat insulator 2 to be received from the upper side and the lower side, the material is connected to the molds %, 9 (), and then the connection molds 9 〇 and 9 〇 are immersed in the resin liquid. Tree

S 28 201202589 月曰液便會由連接用模具9Q的側面側流通至溝槽％内以連接相互鄰接之隔熱體2、2的端部間。將連接用模具90、90從樹脂液取出，讓樹脂液不會由溝槽 93排出（阻s連接祕具9G侧面之溝槽93的開口部) 並進行乾燥或加熱處理，將連接用模具90、90取下後’便可得到藉由樹脂材95使得相互之端部彼此平面地連接之複數個隔熱體2。此時，使用樹脂材95來平面地連接之隔熱體2如圖38所示，亦可以與所述區隔區域5〇為相同之形狀者二又，接合所述金屬绪13、13彼此之方法雖係以加熱該等金屬箔13、13之接觸部並加壓之方法為例來力口以說明，但亦可以為在真空氛圍中以電子束等照射^ 觸部來接合之熔接法。 $ 此處，關於收納區域14為真空氛圍之第丨實施形態的隔熱體2雖係區隔為複數之區隔區域5〇，但所述第2實施形態之罩型隔熱體亦可以同樣地區隔為複數之區隔區域50。以下便就此般罩型隔熱體之製造方法一例加以說明。首先，如圖39(a)所示，仿照例如第' 模具61表面（複數凹部55)來設置所述之外皮層32 , 並透過外皮層32將例如纖維狀或粉體狀之例如石夕石玻璃寺所構成之塊本體31收納於各個凹部$ $内。接著如同圖39(b)所示，填塞各個凹部55般地配置例如薄膜狀之鋁層33而將鋁層33下面與外皮層32上面（四部55、55間之區域)加以接著。 29 201202589 又，如圖39(c)所示，與上述圖39(a)同樣地，使具^第1模具61為相同結構之模具7〇，透過沿著模 =0之凹部55所配置之外皮層32將塊本體31收納 :各個凹部55内’並覆蓋各個凹部55般地配置所述之鋁層33。然後，同樣地接著鋁層33下面與外皮層 32上面。 ' /妾著’如圖40所示，將鋁層33、33彼此相互對向般地反轉例如第1模具61之上下，並將樹脂層34 5於該等鋁層33、33之間。然後，將該等鋁層33、 =月曰層~34及鋁層33彼此相互接著而形成熱反射片、5。接著’於罩型隔熱體周圍接著外皮層32、32彼此，並將第1模具61及模具7〇取下，藉以得到區隔為複數區隔區域50之罩型隔熱體。該罩型隔熱體亦係與所述真空隔熱體（隔熱體2)同樣地係可自由彎曲並於區隔區域50、50間係可分離之結構。另外，該等圖39 及圖40中，亦係誇張地描繪熱反應片35之厚度尺寸。本國際申請案係分別基於2010年2月16曰及 2010年8月2日分別提出申請之日本特願2010-031665 號及2010-173861號而主張優先權’並引用其全部内容於此。【圖式簡單說明】圖1係具備本發明隔熱體之加熱裝置一例之立體圖。圖2係顯示隔熱體第1實施形態一例之剖面圖。 201202589 圖3係顯不隔熱體之放大剖面圖。圖4係顯示加熱裝置中作用之一例之剖面圖。圖5係顯示隔熱體之其他例之剖面圖。圖6係顯示隔熱體之其他例之剖面圖。圖7係顯示隔熱體之其他例之剖面圖。圖8係顯示隔熱體第2實施形態一例之剖面圖。圖9係顯示隔熱體中作用之一例之剖面圖。圖1〇係顯示隔熱體中作用之一例之剖面圖。圖11係顯示第2實施形態中其他例之剖面圖。圖12係顯示第2實施形態中其他例之剖面圖。圖13係顯示加熱裝置其他例之剖面圖。圖14係顯示隔熱體所適用之配管一例之概略圖。圖15係顯示本發明其他實施形態之隔熱體之立體圖。圖16係顯示其他實施形態之隔熱體之平面圖。圖17係顯示其他實施形態之隔熱體之側面圖。圖18係顯示其他實施形態之隔熱體之剖面圖。 '圖l9(a)〜(d)係顯示其他實施形態隔熱體之製造方法一例之剖面圖。圖20係顯示其他實施形態隔熱體之製造方法— 例之立體圖。圖21係顯示其他實施形態隔熱體之製造方法〜例之剖面圖。圖22係顯示其他實施形態隔熱體之製造方法— 31 201202589 例之剖面放大圖。圖23係顯示其他實施形態隔熱體之製造方法一例之剖面圖。圖24(a)、（b)係顯示設置有本發明隔熱體之排氣管一例之剖面圖。圖25係設置有本發明隔熱體之加熱裝置之部分剖面放大圖。圖26係顯示其他實施形態隔熱體之製造方法一例之立體圖。圖27係顯示其他實施形態隔熱體之製造方法一例之剖面放大圖。圖28係顯示其他實施形態隔熱體之製造方法一例之放大平面圖。圖29係顯示其他實施形態隔熱體之製造方法一例之剖面圖。圖30係顯示其他實施形態隔熱體之製造方法一例之剖面圖。圖31係顯示本發明其他實施形態隔熱體之平面圖。圖32係顯示本發明其他實施形態隔熱體之立體圖。圖33係顯示本發明其他實施形態隔熱體之立體圖。圖34係顯示第1實施形態隔熱體之製造方法一例S 28 201202589 The liquid sputum flows from the side surface side of the joining mold 9Q into the groove % to connect the ends of the heat insulating bodies 2 and 2 adjacent to each other. The connecting molds 90 and 90 are taken out from the resin liquid, and the resin liquid is not discharged from the grooves 93 (the opening of the groove 93 on the side surface of the tip 9G is blocked) and dried or heat-treated, and the joining mold 90 is used. After the 90 is removed, a plurality of heat insulators 2 having the ends of the resin members 95 connected to each other in a plane can be obtained. At this time, as shown in FIG. 38, the heat insulator 2 which is planarly connected by using the resin material 95 may be joined to the metal shells 13, 13 in the same shape as the partition area 5'. The method is described by taking a method of heating the contact portions of the metal foils 13, 13 and pressing them as an example. However, the method may be a welding method in which a contact portion is irradiated with an electron beam or the like in a vacuum atmosphere. Here, the heat insulator 2 according to the third embodiment in which the storage region 14 is a vacuum atmosphere is divided into a plurality of partition regions 5, but the cover type heat insulator according to the second embodiment may have the same The area is divided into a plurality of compartments 50. Hereinafter, an example of a method of manufacturing the cover type heat insulator will be described. First, as shown in Fig. 39 (a), the outer skin layer 32 is provided in the form of, for example, the surface of the 'mold 61' (the plurality of concave portions 55), and the outer skin layer 32 is, for example, a fibrous or powdery type such as Shi Xishi. The block body 31 formed of the glass temple is housed in each recessed portion $$. Then, as shown in Fig. 39 (b), for example, a film-like aluminum layer 33 is placed in the same manner as the respective recesses 55, and the lower surface of the aluminum layer 33 and the upper surface of the outer layer 32 (the region between the four portions 55 and 55) are followed. 29 201202589 Further, as shown in FIG. 39(c), in the same manner as in the above-described FIG. 39(a), the first mold 61 has the same configuration of the mold 7, and is transmitted through the concave portion 55 of the mold =0. The outer skin layer 32 houses the block body 31 in the inside of each of the recesses 55 and arranges the aluminum layer 33 so as to cover the respective recesses 55. Then, the underside of the aluminum layer 33 and the upper surface of the outer skin layer 32 are similarly followed. As shown in Fig. 40, the aluminum layers 33 and 33 are reversely opposed to each other, for example, the upper surface of the first mold 61, and the resin layer 34 is interposed between the aluminum layers 33 and 33. Then, the aluminum layer 33, the ruthenium layer - 34, and the aluminum layer 33 are mutually connected to each other to form heat-reflecting sheets, 5. Next, the outer skin layers 32 and 32 are placed around the cover type heat insulator, and the first mold 61 and the mold 7 are removed, whereby a cover type heat insulator partitioned into the plurality of partition regions 50 is obtained. The cover type heat insulator is also freely bendable in the same manner as the vacuum heat insulator (heat insulator 2) and is separable between the partition regions 50 and 50. In addition, in these FIGS. 39 and 40, the thickness dimension of the thermal reaction sheet 35 is also exaggerated. The present application is based on Japanese Patent Application No. 2010-031665 and No. 2010-173861, the entire contents of which are hereby incorporated by reference. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an example of a heating apparatus including a heat insulator of the present invention. Fig. 2 is a cross-sectional view showing an example of the first embodiment of the heat insulator. 201202589 Figure 3 shows an enlarged cross-sectional view of the uninsulated body. Fig. 4 is a cross-sectional view showing an example of the action in the heating device. Fig. 5 is a cross-sectional view showing another example of the heat insulator. Fig. 6 is a cross-sectional view showing another example of the heat insulator. Fig. 7 is a cross-sectional view showing another example of the heat insulator. Fig. 8 is a cross-sectional view showing an example of a second embodiment of the heat insulator. Fig. 9 is a cross-sectional view showing an example of the action in the heat insulator. Fig. 1 is a cross-sectional view showing an example of the action in the heat insulator. Fig. 11 is a cross-sectional view showing another example of the second embodiment. Fig. 12 is a cross-sectional view showing another example of the second embodiment. Fig. 13 is a cross-sectional view showing another example of the heating device. Fig. 14 is a schematic view showing an example of a pipe to which a heat insulator is applied. Fig. 15 is a perspective view showing a heat insulator according to another embodiment of the present invention. Fig. 16 is a plan view showing a heat insulator of another embodiment. Fig. 17 is a side view showing the heat insulator of another embodiment. Fig. 18 is a cross-sectional view showing the heat insulator of another embodiment. Fig. 19 (a) to (d) are cross-sectional views showing an example of a method for producing a heat insulator of another embodiment. Fig. 20 is a perspective view showing an example of a method of manufacturing a heat insulator according to another embodiment. Fig. 21 is a cross-sectional view showing a method of manufacturing a heat insulator according to another embodiment. Fig. 22 is a cross-sectional enlarged view showing a method of manufacturing a heat insulator of another embodiment - 31 201202589. Fig. 23 is a cross-sectional view showing an example of a method of manufacturing a heat insulator according to another embodiment. Fig. 24 (a) and (b) are cross-sectional views showing an example of an exhaust pipe provided with the heat insulator of the present invention. Fig. 25 is a partially enlarged sectional view showing a heating device provided with the heat insulating body of the present invention. Fig. 26 is a perspective view showing an example of a method of manufacturing a heat insulator according to another embodiment. Fig. 27 is an enlarged cross-sectional view showing an example of a method for producing a heat insulator according to another embodiment. Fig. 28 is an enlarged plan view showing an example of a method of manufacturing a heat insulator according to another embodiment. Fig. 29 is a cross-sectional view showing an example of a method of manufacturing a heat insulator according to another embodiment. Fig. 30 is a cross-sectional view showing an example of a method of manufacturing a heat insulator according to another embodiment. Figure 31 is a plan view showing a heat insulator according to another embodiment of the present invention. Figure 32 is a perspective view showing a heat insulator according to another embodiment of the present invention. Figure 33 is a perspective view showing a heat insulator according to another embodiment of the present invention. Fig. 34 is a view showing an example of a method of manufacturing the heat insulator according to the first embodiment;

S 32 201202589 之剖面圖。圖35(a)、（b)係製造本發明其他實施形態隔熱體時所使用之模具之概略圖。圖36係製造本發明其他實施形態隔熱體時所使用之模具之概略圖。圖37係顯示其他實施形態隔熱體製造方法一例之剖面放大圖。圖38係顯示其他實施形態隔熱體製造方法一例之側面圖。圖39(a)〜(c)係顯示第2實施形態隔熱體之製造方法一例之剖面圖。圖40係顯示第2實施形態隔熱體之製造方法一例之剖面圖。【主要元件符號說明】 1 處理容器 la排氣管 lb塊體 lc黏著帶體 11充填材 13金屬箔 14收納區域 15接合部 16樹脂片 17氣密區域 18隔熱材 2隔熱體 21補助金屬箔 22補助樹脂片 30隔熱塊 31塊本體 32外皮層 33鋁層 34樹脂層 35熱反射片 33 201202589 41金屬板 42金屬箔 50區隔區域 51層積片 55凹部 57突出部 61 ' 62 ' 63、64 、70、81、82、90 模具 63a、66 開口部 65耐熱帶 71真空室 72加熱台 73加熱器 74真空排氣管路 75凸緣 83加熱部 91凹部 92水平部 93溝槽 95樹脂材Sectional view of S 32 201202589. Fig. 35 (a) and (b) are schematic views of a mold used in the production of a heat insulator according to another embodiment of the present invention. Fig. 36 is a schematic view showing a mold used in the production of a heat insulator according to another embodiment of the present invention. Fig. 37 is an enlarged cross-sectional view showing an example of a method for producing a heat insulator according to another embodiment. Fig. 38 is a side view showing an example of a method for producing a heat insulator according to another embodiment. Fig. 39 (a) to (c) are cross-sectional views showing an example of a method of manufacturing the heat insulator of the second embodiment. Fig. 40 is a cross-sectional view showing an example of a method of manufacturing the heat insulator of the second embodiment. [Main component symbol description] 1 Processing container la exhaust pipe lb block lc adhesive tape body 11 filling material 13 metal foil 14 storage area 15 joint portion 16 resin sheet 17 airtight region 18 heat insulating material 2 heat insulator 21 subsidy metal Foil 22 Substituted Resin Sheet 30 Insulation Block 31 Block Body 32 Skin Layer 33 Aluminum Layer 34 Resin Layer 35 Heat Reflecting Sheet 33 201202589 41 Metal Plate 42 Metal Foil 50 Interval Area 51 Laminated Sheet 55 Concave 57 Projection 61 '62 ' 63, 64, 70, 81, 82, 90 Mold 63a, 66 Opening 65 Heat-resistant belt 71 Vacuum chamber 72 Heating station 73 Heater 74 Vacuum exhaust line 75 Flange 83 Heating portion 91 Concavity 92 Horizontal portion 93 Groove 95 Resin material

34 S34 S

Claims

201202589 七、申請專利範圍： 1. 一種隔熱體，係具備有：第1封體，係接合而封閉周緣部之金屬面彼此並讓内部為真空氛圍之金屬箔所構成；隔熱材，係被封入該第1封體内；樹脂片，係設置覆蓋該第1封體。 2. 如申請專利範圍第1項之隔熱體，其中該樹脂片係藉由於周緣部將該樹脂片彼此加以封止或將周緣部接合於該第1封體之周緣部來形成第2封體；該第2封體與該第1封體之間係設填充有隔熱材。 3. 如申請專利範圍第1或2項之隔熱體，其中該第 1封體係藉由將相互對向之金屬箔彼此之一部份加以接合來於内部相互區隔出氣密之複數區域；該複數區域亦係各自封入有隔熱材。 4. 一種隔熱體，係具備有：隔熱塊；熱反射片，係於該隔熱塊内部面向被隔熱區域而設置；該熱反射片係由樹脂片與該樹脂片中層積於該被隔熱區域側之金屬層所構成。 5. 如申請專利範圍第4項之隔熱體，其中該隔熱塊係藉由以外皮層彼覆陶瓷材來加以構成。 6. 如申請專利範圍第1、2、4及5項中任一項之隔熱體，其中該樹脂片係由聚醯亞胺所構成。 35 201202589 7. 一種隔熱體之製造方法，係包含有下述步驟：包覆隔熱材般地配置金屬箔，於該隔熱材周園將該金屬箔之金屬面彼此相互壓接；將該等隔熱材及金屬箔所處之氛圍保持於真空氛圍，並在該金屬面彼此間產生原子擴散般地藉由加熱該金屬面彼此之接觸部來將金屬面彼此相互接合以形成第1封體；接著’藉由樹脂片來覆蓋該第1封體。 8. 如申請專利範圍第7項之隔熱體之製造方法，其中係於形成該第1封體之步驟與藉由樹脂片來覆蓋該第1封體之步驟之間進行於該第丨封體外側配置隔熱材之步驟；藉由該樹脂片來覆蓋該第丨封體之步驟係於該第 1封體外側將該樹脂片周緣部彼此封止之步驟或將該樹脂片周緣部接合於該第〗封體周緣部之步驟，藉由δ亥步驟來將該第1封體外側之隔熱材填充於該樹脂片所構成之第2封體與該第丨封體之間。 9.如申請專利範圍第7或8項之隔熱體之製造方法，其中將該金屬箔之金屬面彼此相互壓接之步驟係於形成有複數凹部之一側模具裝設一側之金屬落的步驟、透過各個該一側之金屬箱來讓隔熱材位於該凹部内之步驟、之後將另側之模具透過该—側之金屬箔上所層積之另側金屬箔而壓接於 S 36 201202589 該一側之模具之步驟；該形成第1封體之步驟係加熱該凹部之各個周緣部之金屬面彼此之接觸部之步驟。201202589 VII. Patent application scope: 1. A heat insulator, which is provided with: a first sealing body which is formed by a metal foil which is joined to close the metal surfaces of the peripheral portion and has a vacuum atmosphere inside; The first sealing body is sealed; and the resin sheet is provided to cover the first sealing body. 2. The heat insulator of claim 1, wherein the resin sheet is formed by sealing the resin sheets to each other by a peripheral portion or joining a peripheral portion to a peripheral portion of the first envelope to form a second seal. A heat insulating material is interposed between the second sealing body and the first sealing body. 3. The heat insulator according to claim 1 or 2, wherein the first sealing system internally separates the airtight plurality of regions by joining one of the mutually opposite metal foils; The plurality of areas are also each sealed with a heat insulating material. 4. A heat insulator comprising: a heat insulating block; a heat reflecting sheet disposed inside the heat insulating block facing the insulated area; the heat reflecting sheet being laminated on the resin sheet and the resin sheet It is composed of a metal layer on the side of the heat insulating region. 5. The heat insulator of claim 4, wherein the heat insulating block is formed by coating the ceramic material with the outer skin layer. 6. The heat insulator according to any one of claims 1, 2, 4 and 5, wherein the resin sheet is composed of polyimine. 35 201202589 7. A method for producing a heat insulator comprising the steps of: arranging a metal foil like a heat insulating material, and pressing the metal surfaces of the metal foil against each other; The atmosphere in which the heat insulating material and the metal foil are placed is maintained in a vacuum atmosphere, and the metal surfaces are joined to each other by heating the contact portions of the metal surfaces by atomic diffusion between the metal surfaces to form the first one. Sealing; then 'covering the first envelope with a resin sheet. 8. The method of manufacturing a heat insulator according to claim 7, wherein the step of forming the first envelope is performed between the step of forming the first envelope and the step of covering the first envelope with a resin sheet. a step of disposing a heat insulating material on the outer side of the body; and the step of covering the second sealing body by the resin sheet is a step of sealing the peripheral edge portion of the resin sheet outside the first sealing body or joining the peripheral edge portion of the resin sheet In the step of the peripheral portion of the first sealing body, the heat insulating material on the outer side of the first sealing body is filled between the second sealing body formed by the resin sheet and the first sealing body by a step of arranging. 9. The method of manufacturing a heat insulator according to claim 7 or 8, wherein the step of crimping the metal faces of the metal foil to each other is performed on a side of the mold mounting side on which one of the plurality of recesses is formed. a step of passing the heat insulating material in the recess through the metal case on each side, and then passing the other side mold through the other side metal foil laminated on the metal foil on the side to be pressed against the S 36 201202589 The step of the mold on one side; the step of forming the first envelope is a step of heating the contact portions of the metal faces of the respective peripheral portions of the concave portion.