TW201120405A - Height measurement device having probe and method for using the device to measure height. - Google Patents

Height measurement device having probe and method for using the device to measure height. Download PDF

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Publication number
TW201120405A
TW201120405A TW98142436A TW98142436A TW201120405A TW 201120405 A TW201120405 A TW 201120405A TW 98142436 A TW98142436 A TW 98142436A TW 98142436 A TW98142436 A TW 98142436A TW 201120405 A TW201120405 A TW 201120405A
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Taiwan
Prior art keywords
probe
image
displacement
computer system
height
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TW98142436A
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Chinese (zh)
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TWI383126B (en
Inventor
zheng-xin Cai
De-Guo Zhan
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Jeteazy System Co Ltd
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Priority to TW98142436A priority Critical patent/TW201120405A/en
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Publication of TWI383126B publication Critical patent/TWI383126B/zh

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Abstract

The present invention relates to a height measurement device, which comprises: a fixture having at least one hole. Inside the hole is a probe which can axially move along the hole; an image capturing device for capturing the image of the probe; a computer system having a built-in software program which, based on various images captured by the image capturing device, can determine a shift quantity that the probe moved from one place to another and convert the shift quantity into a shift quantity in the real space; a displayer for displaying the shift quantity determined by the computer system. The computer system can determine the height of an object under test according to the image captured by the image capturing device when the bottom of the probe contacts a reference bottom board and the object under test. The present invention can provide a low-cost and high-efficiency height measurement device because both of the fixture and the probe are inexpensive.

Description

201120405 六、發明說明: 【發明所屬之技術領域】 ’特指以探針配合 高度量測之方法。 本發明係關於一種高度之量測方法 景夕像處理糸統而可同時對多個物體進行 【先前技術】201120405 VI. Description of the invention: [Technical field to which the invention pertains] ‘Specially refers to a method in which a probe is used in conjunction with a high-metric measurement. The present invention relates to a height measuring method, and the image processing system can simultaneously perform a plurality of objects. [Prior Art]

現有技術中用以量測高度的方式,請參見第四圖所 不,其主要使用—感測頭(90),該感測頭具有一本體⑼以 及-主軸(92),其中該本體(91)係固定於_支架㈣上而 該主軸(92)為可相對本體(91)伸縮,其上端連接至本體⑼ 内建的光學及電子系統,而下端用以與受測物體(94)接觸, 當主軸(92)下端與受測物體(94)接觸後,其相對本體州會 產生位移變化’該位移變化即可由光學及電子系統檢出, 再經由連接於本體(91)的一纜線(911)輸出至一顯示器。 使用感測頭(90)固然可達到精確地量測高度的目的, 惟該感測頭(90)内建的光學與電子系統的構造複雜,因此 感測頭(90)的單價昂貴,維護成本也高,若欲同時量測多 個受測物體,便須購置多個感測頭(9〇),如此對使用者而 言更是極大的成本負擔。 【發明内容】 有鑑於上述現有技術中使用的感測頭因單價昂責而造 成使用者成本負擔較大的缺點,本發明期望提供一種成本 低廉且可同時量測多個受測物體的裝置及其使用方法。 為達成上述發明目的’本發明所採用之手段在於提供 一種具有探針之高度量測裝置,其包含有: S-] 3 201120405 一治具,該治具上設有具有相同軸向的至少—通孔. 對應所述通孔數量的探針,通孔内設置有一該探 探針可沿通孔軸向位移; -位移量判讀單元,其具有至少—影像料裝置、至 少-電腦系統及一顯示器,纟中該些影像擷取 探針的影像,並傳輸至直中一 τ擷取 內读w Ί❿该些電腦系統 有軟體程式,可針對影像擷取裝置擁取 舆位移後之料,進行探針在影像上的位移量 器。 真實工間中的位移篁,而後輸出至該顯示 本發明另提供一種使用上述高度量 方法,其步驟包含有: -度之 =供一刖述具有探針之高度量測裝置; 提供-基準底板’其設置於治具下方 接觸於該基準底杯,亚7探針底端 " 再以具有探針之高度量測裝置中& $ 像操取裝置操取探針的影像; U中“ 提供至少一受測物體,受測物體置於 於探針之位置處,並人Λ +展板上對應 像㈣置擷取探:的::底端接觸於受測物體,再以影 接觸:量測裝置中的電腦系統針對探針底端 的影像判讀探針在影::二及探:底端接觸於受測物體時 木針在真實空間中的位移量,再輸出至顯示器。 由上述可知,本發明藉由 其底端接觸於Aa广也 〜像處理之方式判讀探針在 、土準底板以及底端接觸於受測物體時的位移 201120405 量’該位移量即等於受測物體的高度,由於本發明之方法 僅須具備-套位移量判讀單元即可同時判讀多根探針的位 移量,因此在進行高度之量測時具有絕佳的效率,且影像 擷取裝置、電腦系統及顯示器的購買及維護皆相當容易, 治具及探針的費用也相當低廉’是以本發明確實提供了較 之現有技術之感測頭更低成本且更為便利的量測裝置及方 法。 【實施方式】 參見第一圖所示,本發明之具有探針之高度量測裝 置,其包含有: 一治具(10),該治具(10)上設有具有相同軸向的至少一 通孔(11); 對應所述通孔數量的探針(20),所述治具(1〇)之通孔(ιι) 内設置有一該探針(20),探針(20)可沿通孔(11)的軸向位 移; 一位移量判讀單元(30),其具有至少一影像擷取裝置 (4〇)、至少一電腦系統(50)及一顯示器(60),其中該些影像 擷取裝置(40)可為照相機或攝影機,用以擷取探針(2〇)的影 像,並傳輪至其中一電腦系統(5〇),而該些電腦系統(5〇)内 建有軟體程式,該軟體程式可針對影像擷取裝置(4〇)擷取 之探針(20)位移前與位移後之影像,進行探針(2〇)在影像上 的位移量的判讀,並且轉換為探針(2〇)在真實空間中的位 移里’而後輸出至該顯示器(6〇),該顯示器例如可為電腦 勞幕、電視或投影設備》 參見弟二圖所示’使用本發明之高度量測裝置量測高 Γ 201120405 度之方法,其步驟包含有: 提供一具有探針之高度量測裝置; 參見第一圖所示,提供一基準底板(70),其設置於治 具(10)下方,並令探針(20)底端接觸於該基準底板(70),再 以具有探針之高度量測裝置中的影像擷取裝置(40)擷取探 針(20)的影像,該影像輸出至電腦系統(50); 參見第三圖所示,提供至少一受測物體(80),受測物 體(80)置於基準底板(70)上方且位於對應於探針(20)之位置 • 處,並令探針(20)底端接觸於受測物體(80),再以影像擷取 裝置(40)擷取探針(20)的影像,該影像輸出至電腦系統 (50); 電腦系統(50)針對探針(20)底端接觸於基準底板(70)時 的影像以及探針(20)底端接觸於受測物體(80)時的影像判讀 探針(20)在影像上的位移量,並將該位移量轉換為探針(20) 在真實空間中的位移量,再輸出至顯示器(60)。 由於各影像擷取裝置(40)可擷取的影像範圍有限,是 • 以當探針(20)的數量較多時,可使用複數影像擷取裝置 (40),使其分別擷取不同區域的探針(20)的影像,並且可使 用複數電腦系統(50),使其分別接收並處理一影像擷取裝 置(40)所擷取之影像,以增進處理時的效率。 上述探針(20)在真實空間中的位移量即等於受測物體 (80)的高度,由於本發明所使用之影像擷取裝置(40)、電腦 系統(5 0)、電腦系統(50)内建的軟體程式及顯示器(60)的購 入及維護皆相當容易,治具(10)及探針(20)的費用也相當低 廉,是以本發明確實提供了較之現有技術之感測頭更低成 201120405 本、更為便利且高效率的量測裝置及方法 【圖式簡單說明】 第-圖為本發明之具有探針之高度量剛 觸於一基準底板的示意圖。 置中探針接 第二圖為使用本發明之且有撰 高度之流程圖。 〃有探…度量剛裳置量測 第三圖為本發明之具有探針之高度量測裝置 觸於受測物體的示意圖。For the manner of measuring the height in the prior art, please refer to the fourth figure, which mainly uses a sensing head (90) having a body (9) and a spindle (92), wherein the body (91) ) is fixed to the _ bracket (four) and the main shaft (92) is retractable relative to the body (91), the upper end of which is connected to the built-in optical and electronic system of the body (9), and the lower end is for contacting the object to be tested (94). When the lower end of the main shaft (92) is in contact with the object to be tested (94), it will have a displacement change with respect to the body of the body. The displacement change can be detected by the optical and electronic system, and then via a cable connected to the body (91) ( 911) Output to a display. The use of the sensing head (90) can achieve the purpose of accurately measuring the height, but the construction of the optical and electronic system built in the sensing head (90) is complicated, so the unit price of the sensing head (90) is expensive and the maintenance cost is low. It is also high. If you want to measure multiple objects at the same time, you need to purchase multiple sensing heads (9〇), which is a great cost burden for the user. SUMMARY OF THE INVENTION In view of the above-mentioned disadvantages of the sensor head used in the prior art due to the high unit cost, the user has a large cost burden, and the present invention is intended to provide a device that is inexpensive and can simultaneously measure a plurality of measured objects. How to use it. The object of the present invention is to provide a height measuring device with a probe, comprising: S-] 3 201120405 a fixture having at least the same axial direction - a through hole. A probe corresponding to the number of the through holes, wherein the probe is disposed to be axially displaceable along the through hole; - a displacement amount interpretation unit having at least an image material device, at least a computer system, and a In the display, the images of the images are captured by the images, and transmitted to the center of the computer. The computer system has a software program, and the image capturing device can capture the material after the displacement. The displacement gauge of the probe on the image. Displacement in the real workroom, and then output to the display. The present invention further provides a method of using the above-described height amount, the steps of which include: -degree = for a description of the height measuring device having the probe; 'It is placed under the jig to contact the reference bottom cup, the bottom end of the sub 7 probe" and the image of the probe with the probe height measuring device & $ operation device; U in " Providing at least one object to be tested, the object to be tested is placed at the position of the probe, and the corresponding image on the human Λ+ display panel is placed on the display panel: the bottom end is in contact with the object to be measured, and then the image is contacted by the amount: The computer system in the measuring device interprets the probe in the image of the bottom end of the probe: 2 and the probe: the displacement of the wooden needle in the real space when the bottom end contacts the object to be measured, and then outputs it to the display. The invention is capable of interpreting the displacement of the probe at the bottom of the ground, the bottom plate and the bottom end of the object when the bottom end is in contact with the Aa Guangyi~image processing. The displacement amount is equal to the height of the object to be measured. Since the method of the invention only needs to have - The displacement amount interpretation unit can simultaneously interpret the displacement of multiple probes, so it has excellent efficiency in height measurement, and the purchase and maintenance of image capture devices, computer systems and displays are quite easy. The cost of the jig and the probe is also relatively low'. The present invention does provide a measuring device and method which are lower in cost and more convenient than the sensing head of the prior art. [Embodiment] Referring to the first figure The height measuring device with probe of the present invention comprises: a jig (10) having at least one through hole (11) having the same axial direction; corresponding to the through hole a probe (20), the probe (20) is disposed in the through hole (1) of the fixture (1), and the probe (20) is axially displaceable along the through hole (11); The displacement amount interpretation unit (30) has at least one image capturing device (4〇), at least one computer system (50), and a display (60), wherein the image capturing devices (40) can be cameras or cameras To capture the image of the probe (2〇) and transfer it to one of the computer systems (5〇), and the computer system (5〇) has a built-in software program, which can be used for the image capture device (4) to capture the image of the probe (20) before and after the displacement. The interpretation of the amount of displacement of the probe (2〇) on the image is converted into a displacement of the probe (2〇) in real space' and then output to the display (6〇), which may be, for example, a computer screen , TV or projection equipment, see the method of measuring the sorghum 201120405 degrees using the height measuring device of the present invention, the steps of which include: providing a height measuring device with a probe; see the first figure As shown, a reference base plate (70) is provided, which is disposed under the jig (10), and the bottom end of the probe (20) is in contact with the reference base plate (70), and is further in the height measuring device having the probe. The image capturing device (40) captures an image of the probe (20), and the image is output to a computer system (50); as shown in the third figure, at least one object to be measured (80), the object to be measured (80) ) placed above the reference base plate (70) and at a position corresponding to the probe (20) And the bottom end of the probe (20) is in contact with the object to be tested (80), and the image of the probe (20) is captured by the image capturing device (40), and the image is output to the computer system (50); the computer system ( 50) The image interpretation probe (20) displacement on the image when the bottom end of the probe (20) is in contact with the reference bottom plate (70) and the bottom end of the probe (20) is in contact with the object to be tested (80) The amount is converted into the amount of displacement of the probe (20) in real space and output to the display (60). Since the range of images that can be captured by each image capturing device (40) is limited, it is possible to use a plurality of image capturing devices (40) to capture different regions when the number of probes (20) is large. The image of the probe (20) is used, and a plurality of computer systems (50) can be used to receive and process the images captured by the image capture device (40), respectively, to improve processing efficiency. The displacement amount of the probe (20) in the real space is equal to the height of the object to be tested (80), and the image capturing device (40), the computer system (50), and the computer system (50) used in the present invention. The built-in software program and display (60) are relatively easy to purchase and maintain, and the cost of the fixture (10) and the probe (20) is also relatively low. Therefore, the present invention provides a sensing head compared to the prior art. Lower into 201120405 This is a more convenient and efficient measuring device and method [Simplified illustration] The first figure is a schematic diagram of the invention with the height of the probe just touching a reference base plate. Centering the probe The second diagram is a flow chart using the present invention and having a high degree of writing. 〃 〃 ... 度量 度量 度量 度量 度量 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三

第四圖為現有技術中用於量測高度的感測頭。 【主要元件符號說明】The fourth figure is a sensing head used in the prior art for measuring height. [Main component symbol description]

(1〇)治具 (20)探針 (40)影像擷取裝置 (60)顯示器 (80)受測物體 (90)感測頭 (92)主轴 (94)受測物體 (11)通孔 (3〇)位移量判讀單元 (5〇)電腦系統 (7〇)基準底板 (91)本體 (93)支架 (911)纜線 7(1〇) Fixture (20) Probe (40) Image capture device (60) Display (80) Object to be measured (90) Sensor head (92) Spindle (94) Object (11) through hole ( 3〇) Displacement amount interpretation unit (5〇) computer system (7〇) reference base plate (91) body (93) bracket (911) cable 7

Claims (1)

201120405 七、申請專利範圍: 1'種具有探針之高度量測裝置,其包含有: 八該具上叹有具有相同轴向的至少一通孔; ”對應所述通孔數量的探針,通孔内設置有一該探針, 麵針可沿通孔轴向彳立移; -位移量判讀單元’其具有至少—影㈣取裝置、至 1電腦系統及一顯示器,其中該些影像擷取裝置可擷取 探針的影像’並傳輸至其中—電腦***,而該些電腦系統 有車人體程式τ針對影像擷取裝置摘取之探針位移前 、位移後之%像’進行探針在影像上的位移量的判讀,並 ^轉換為探針在真實空間中的位移量,而後輪出至該顯示 法=種使用具有探針之高度量測裝置量測高度之方 去’其步驟包含有: 量測如申請專利範^ 1項所述之具有探針之高度 接觸:供一基準底板’其設置於治具下方,並令探針底端 像揭取裝置擷取探針的影像有探針之w裝置中的影 於探Γ至少:受測物體’受測物體置於基準底板上對應 像柙敢之位置处’並令探針底端接觸於受測物體,再以馬 像擷取農置擷取探針的影像; 丹乂〜 2探針之高度量測裝置中的電腦系統針對 妾:於基準底板時的影像以及探針底端接觸 = 的衫像判讀探針在影像上的彳 、物體時 像上的位移置’並將該位移量轉換為 201120405 探針在真實空間中的位移量,再輸出至顯示器 八、圖式:(如次頁)201120405 VII. Patent application scope: 1' kind height measuring device with probes, comprising: eight at least one through hole having the same axial direction; "probe corresponding to the number of the through holes, a probe is disposed in the hole, and the face needle can be vertically moved along the through hole; the displacement amount interpretation unit has at least a shadow (four) taking device, a computer system and a display, wherein the image capturing device The image of the probe can be captured and transmitted to the computer system, and the computer system has a vehicle body program τ for the image capturing device to extract the probe before and after the displacement of the image The interpretation of the displacement amount is converted to the displacement amount of the probe in the real space, and the rear wheel is output to the display method = the height of the probe is measured using the height measuring device of the probe. : Measure the height contact with the probe as described in the application of the patent specification: for a reference substrate, which is placed under the fixture, and the image of the probe at the bottom end of the probe is extracted from the probe. Shadow in the device of the needle At least: the object to be tested is placed on the reference base plate at a position corresponding to the image of the dagger and the bottom end of the probe is in contact with the object to be measured, and then the image of the probe is taken by the horse image. The computer system of the Tanjong ~ 2 probe height measuring device is aimed at: the image on the reference base plate and the contact image of the bottom end of the probe = the displacement of the probe on the image, the displacement on the image Set ' and convert the displacement to the amount of displacement of the 201120405 probe in real space, and then output to the display eight, the pattern: (such as the next page)
TW98142436A 2009-12-11 2009-12-11 Height measurement device having probe and method for using the device to measure height. TW201120405A (en)

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TWI383126B TWI383126B (en) 2013-01-21

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Publication number Priority date Publication date Assignee Title
DE4007502A1 (en) * 1990-03-09 1991-09-12 Zeiss Carl Fa METHOD AND DEVICE FOR CONTACTLESS MEASUREMENT OF OBJECT SURFACES
GB9515311D0 (en) * 1995-07-26 1995-09-20 3D Scanners Ltd Stripe scanners and methods of scanning
CN1205847C (en) * 1998-02-27 2005-06-08 松下电器产业株式会社 Component recognizing method and apparatus
US7115890B2 (en) * 2003-11-18 2006-10-03 Applied Materials, Inc. Method and apparatus for inspecting a sample having a height measurement ahead of a focal area
TWI237687B (en) * 2004-04-13 2005-08-11 Chien Hui Chuan Computer control measuring center
EP1911338A1 (en) * 2005-08-02 2008-04-16 Matsushita Electric Industrial Co., Ltd. Electronic component mounter and mounting method

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