TW201114706A

TW201114706A - Scribing wheel and manufacturing method thereof

Info

Publication number: TW201114706A
Application number: TW099136458A
Authority: TW
Inventors: Hiroyoshi Hayashi; Naoko Tomei; Tadanobu Nakano; Mikio Kondo; Masanobu Soyama; Hiroshi Tomimori
Original assignee: Mitsuboshi Diamond Ind Co Ltd
Priority date: 2009-10-29
Filing date: 2010-10-26
Publication date: 2011-05-01
Also published as: KR101258478B1; CN102049813A; KR20120102556A; KR101579817B1; CN102049813B; KR20150089984A; TWI428301B; HK1152271A1; KR20130102516A; KR101611889B1

Abstract

Rotation offset precision of a ridge part is made of high precision in a scribing wheel. The scribing wheel 1A includes: a circular plate shaped wheel main body 2A which is arranged at its center and has a diamond sintered circular ridge within a plane; cylindrical axial portions 4 and 5 having the same axis and arranged at the left side and the right side of the circular plate shaped wheel main body 2A. The left and right end faces of the cylindrical axial portions 4 and 5 are coaxially grounded and have cones 6 and 7. The wheel main body 2A includes a blade front edge portion 3A formed by grounding the ridge part of the circular plate into a predetermined angle.

Description

201114706 六、發明說明：【發明所屬之技術領域】等脆性材料基板之刻劃本發明係關於為了刻劃玻璃板輪及其製造方法。【先前技術】以往在分斷玻璃板或陶究基板等脆性材料基板之μ201114706 VI. Description of the Invention: [Technical Field of the Invention] The characterization of a substrate such as a brittle material The present invention relates to a method for dicing a glass plate and a method of manufacturing the same. [Prior Art] In the past, it was used to break the substrate of a brittle material such as a glass plate or a ceramic substrate.

係先於此等基板沿所欲之線形成刻劃線，其後沿刻劃2 斷。於刻劃使用之刻劃輪有例如專利文獻1 ^ 刀且其外周部分為由兩側被切除為 J，圓板狀 _ , ®狀之异盤珠形狀者。 Γ )係顯示此—例之前視圖。此刻劃輪_係於中心部具有將銷1 0 1做為軸***之貫通孔。此外，於專利文獻2、3、4亦顯示有將軸與_輪本體部一體化而形成之刻劃輪。圖1⑻係顯示此—例之前視圖。劃線輪U0具有冑2個圓錐狀構件底菱形之形狀，兩端部保持於刀輪料具而使用。者之。】面專利文獻1 :曰本專利42丨9945號專利文獻2 :國際公開WO2003/5 1784號公報專利文獻3 :日本實開平4_4G28號公報專利文獻4:日本特開平-223799號公報【發明内容】刀前緣部之厚度與刻劃輪之 [發明欲解決之課題] 然而，在專利文獻1中 3 201114706 厚度相同’且由於必須將銷無偏差地***刻劃輪之中心軸，在刻劃中刻劃輪之軸與銷亦須一纟，故有難以使刃前緣部之厚度變薄之問題。此外’關於將軸與輪之刻劃輪，製造之自由度體化之專利文獻2〜專利文獻4 少，且刀前緣之稜線部分之角度或軸間之距離大故有無法任意選擇刃前緣部厚度之問題。因此’如圖2 (a) (b)所示，不論任何場合，在基板 111實裝有晶片零件112、113之場合無法刻劃基板之晶片零件間之狹窄間隙，必須使晶片零件之間隔加寬，有於分斷後之基板周圍產生多餘空間之缺點。又如圖1(b)所示，刀前緣部之角度α與成為與轴承之接觸部之兩側之錐部之角㈣在專利讀3係被個別規定為α為U0〜130。’点為50〜7〇。。然而α與石之合計值為18(Γ，關於在超過合計。之範圍之組合並未被顯示。此係因為在專利文獻3巾’在將刀前緣部與錐部做為連續之外周面形成後，》刃前緣部與錐部之間形成與外周面之外周同心圓之切除（支持部），故在製造方法上，… 之合計值被限制& 18(Γ。此外，於專利文獻4中，刃前緣 2之基部之角度α與錐部之角度万皆為90。，關於其他角度範圍並未被顯示。此外，刃*緣部之稜線雖被2段研磨^ 但具體之角度並未被顯示。本發明係鑑於此種以往之銷一體型之刻劃輪亦可使刀前附零件之有狹窄部分亦可刻劃問通點而為，以提供即使為緣之厚度變薄，對於基板上，且可以任意之尺寸無偏差 201114706 …精度容易製造之刻劃輪及其製造方法為目的。 [解決課題之手段] 心解決上述課題，本發明之刻劃輪，具備：以於中體:平面内之圓形之稜線之燒結鑽石形成之圓板狀之二柱轴部於2輪本體部之左右以燒結鑽石層同轴形成外側二軸=:具備:於前述圓…之各自之體部之耪^ 之角度之錐部；形成為前述輪本First, the substrate is formed with a scribe line along the desired line, and the trailing edge is scored 2 times. For the scribing of the scribing wheel, for example, there is a patent document 1 ^ knife and the outer peripheral portion thereof is a shape of a disc-shaped bead which is cut into J, a disc-shaped _, ® shape on both sides. Γ ) shows the previous view of this example. At this point, the rower _ has a through hole having a pin 1 0 1 as a shaft inserted in the center portion. Further, Patent Documents 2, 3, and 4 also show a scribing wheel formed by integrating a shaft and a wheel body. Figure 1 (8) shows the previous view of this example. The scribing wheel U0 has a shape of a rhombic shape of two conical members, and both ends are held by the cutter wheel material. Those. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The thickness of the front edge portion of the blade and the scoring wheel [Problems to be solved by the invention] However, in Patent Document 1, 3 201114706 has the same thickness 'and since the pin must be inserted into the central axis of the scoring wheel without deviation, in scribing The shaft and the pin of the scoring wheel are also required to be smashed, so that it is difficult to make the thickness of the leading edge portion of the blade thin. In addition, there are few patent documents 2 to 4 concerning the degree of freedom of manufacture of the wheel and the wheel, and the angle of the ridge line of the leading edge of the blade or the distance between the axes is large, so that the front edge cannot be arbitrarily selected. The problem of the thickness of the edge. Therefore, as shown in Fig. 2 (a) and (b), in any case, when the substrate 111 is provided with the wafer parts 112, 113, the narrow gap between the wafer parts of the substrate cannot be scribed, and the interval between the wafer parts must be increased. Wide, has the disadvantage of creating excess space around the substrate after the break. Further, as shown in Fig. 1(b), the angle α of the leading edge portion of the blade and the angle of the tapered portion on both sides of the contact portion with the bearing (four) are individually defined as α to U0 to 130 in the patent reading 3 system. ‘Point is 50~7〇. . However, the total value of α and stone is 18 (Γ, and the combination of the ranges in excess of the total is not shown. This is because in the patent document 3, the circumference of the blade is continuous with the tapered portion. After the formation, the cut-off (support portion) of the outer peripheral surface of the outer peripheral surface is formed between the leading edge portion and the tapered portion. Therefore, the total value of the manufacturing method is limited to & 18 (Γ. In Document 4, the angle α of the base portion of the blade leading edge 2 and the angle of the tapered portion are both 90. The other angular ranges are not shown. Further, the ridgeline of the edge portion of the blade is polished by two stages. The angle is not shown. The present invention is based on the fact that the conventional pin-integrated scribing wheel can also make the narrow portion of the front part of the knife also scribe the point of intersection to provide a thickness change even if the edge is Thin, on the substrate, and can be arbitrarily sized without deviations 201114706 ... the precision of the easy to manufacture of the scribe wheel and its manufacturing method. [Means for solving the problem] In order to solve the above problems, the scribe wheel of the present invention has: In the middle body: the circular ridgeline in the plane The circular plate-shaped two-column shaft portion formed by the sintered diamond is coaxially formed on the left and right sides of the two-wheel main body portion by the sintered diamond layer to form the outer two-axis=: has a taper portion at an angle of the body of the circle... Formed into the aforementioned wheel

稜線。η之頂角成為既定之角度之刃前緣部。 ^此，前述輪本體部具有至少2段之磨形成前述77 ‘这* 叫且你彳皇研則緣邛之稜線之錐面而形成亦可。引述刀則緣部於稜線形成有既定形狀之槽亦可。此’使前述刀前緣部之厚度為Q4_以下亦可。狀之面:誇成it前述輪本體部之中由構成稜線之-對錐面 Ο。、:成之部分為刀前緣部，前述刃前緣… 工亦可。在此 > 於, 邱义述刀則緣部具有設於輪本體邻中本♦ π …：”之前端之錐面狀部亦可〆、之圓板在此，：：：板部之厚度為〇.4〜Ο.03—之範圍易。面狀之傾斜=本趙部係―部之間具有錐 &此*’前述輪本體部轴部之間連續亦可。之…係使幫曲為與前述圓板在此， W述刀前緣部之赫角度点係下式稜線°P之頂角3與前述錐部之 5 201114706 185°^ α + /5 ^ 290 β ; 棱線部之頂角α係 75 ° ^ a ^170° ; 前述錐部之角度/5係滿足 60° S α:各 12〇。亦可。在此，前述錐部之角度石係滿足下式 90° S α 各 120。亦可。在此，前述輪本體部之外徑D滿足下式 1 mm S D各6mm亦可。在此，前述輪本體部之外徑D滿足下式 1 mm S D $ 2.5mm 亦可。在此，前述輪本體部之外锃〇與前述圓柱軸部之長度c 滿足下式 C<D亦可。第12項之刻劃輪’其中’前述輪枝車i部之長度C滿足下式 1 5、如申請專利範圍本體部之外徑D與前述圓 C<D。 16、如申請專利範圍第13項之刻劃輪，其+，前述輪本體部之外徑D與前述圓柱轴部之長^滿足下式 C<D。马’解決上述課題，本發明之刻劃輪之製造方法，用於以超硬合金形成之圓柱狀構件之—端同軸形成有燒鑽石層之圓柱部之圓柱狀之加工素材；保持前述超硬合之圓柱部分同時使旋轉’以線切割放電加工师结鑽石 201114706 部分形成-對同軸之圓柱軸部與夾於該圓柱軸部之輪本體部；保持前述超硬合金之圓柱部分同時使旋轉，將前述圓柱軸π之各自之外側端部藉由研磨加工而形成為錐面狀；保持前述超硬合金之圓柱部分㈣使旋轉，將前述輪本體部之稜線部研磨成為既定之角度以形成刃前緣部；藉由切斷前述燒結鑽石層與前述超硬合金而被製造。在此於使用則述線切割放電加工之圓柱軸部與輪本體。卩之形成時於前述圓柱軸部之外側同時形成錐部；於前述圓柱軸部之錐部之研磨時係將因線切割放電加工而產生之表面之變質層除去亦可。 [發明之效果] 利用具有此種特徵之本發明之刻劃輪，可藉由適當變更加工線（線切割放電加工機之線之行走執跡（加工部位））與中心轴之距離而任意選擇圓柱軸部之粗度。此外，可任意選擇圓柱軸部之間隔、輪本體部之厚度、刀前緣部之角度。在以往之軸與輪本體部成為一體之側面為菱形形狀之刻劃輪，刀前緣部之錐面之角度、圓柱軸部之錐面之角度或間隔、刀前緣部之外徑雖不能自由設定，但在本發明中此等可分別獨立任意設定。此外，藉由僅研磨需要高精度之圓柱轴端部之錐部與刃前緣部而其他部分則維持放電加工之狀態，可以最少之加工步驟及成本達成所欲之精度之刻劃輪。藉由使刃前緣部之厚度為0·4τηιη以下，可沿實裝有晶片零件等之基板之狹窄線刻劃。此外，若於輪本體部於兩 201114706 度亦可保持充分之可沿實裝有晶片零面形成傾斜部’即使減少刃前緣部之厚強度。因此，藉由減少刃前緣部之厚度件等之基板之狹窄線刻劃。另外’刃前緣部之角度 ^ ^ ώ ...... a 7 π、豕部獨自選擇最適备=度’例如75。〜17G。，藉此水平裂痕或沿刻劃線產生之剝洛不易產i ’可改善對脆性材料之刻劃性能。此外，錐部之角度万可與α獨自設定為適當。田 < 角度，例如60。〜 120 ’與軸承之滑動抵抗變少。此外，亦π描〜4 1亦可獲得於軸承形成之凹陷較淺即可之效果。【實施方式】 (第1實施形態）針對本發明之第丨實施形態之刻劃輪說明。圖3(a)係此刻劃輪之前視圖，圖3(b)係其右側視圖。如此等圖所示，刻劃輪1A於中央具有圓板狀之輪本體部2a，於輪本:部 2A之厚度方向之中央做為刀前緣部3a形成有包含包含於 -平面内之最大圓周之稜線之錐面狀之部分。此外，於輪本體部2A之兩側之側方同軸具有圓枉轴部4及圓才主^ 5。於圓柱軸部4及圓柱軸部5之各自之外側之端部分別妒成有具有相同之傾斜角度之錐部6及錐部7。此刻劃輪Μ 係全部以燒結鑽石形成為一體。 "" 於此實施形態、中係刃前緣部3Α與輪本體㉝2Α之厚户相同，如® 3⑷所示假設其厚度為W1。此厚度wi係例：〇.4麵以下，較理想為〇.3mm未滿，更理想為〇 2脑以下口 201114706 之面垂直之面。如此刀前緣部3 A之側方係於刻劃時對基板一來’即使如圖4(a)(b)所示，實裝有晶片零件122、123，於成為刻劃之對象之基板12 1 將該零件之間之狹窄線上刻劃之際，亦可僅將刃前緣***晶片零件122、123之間進行刻劃。在此，可將刃前緣部3A之稜線部之頂角α在刃前緣部 3Α獨自設定為最適當之角度。例如頂“為π — ?。。，更理想為90。〜150。之範圍。若頂角α為鈍角則對脆性材料之水平裂痕或因刻劃線而產生之_不易產生，可改善刻劃性能。另外錐σΜ、7之角度点可在錐部獨自設定為最適當之角度。在此，角度万為6〇。〜12〇。，較理想為75。〜12〇。，更理想為90。〜120。之絡1¥1 a. _ I圍。右角度万大則與軸承之滑動抵有支丨之傾向j_即使於軸承形成之凹陷較淺亦足夠。但若角度㈣大’ f隙會變大。反之若角度μ小則與轴Ridge line. The apex angle of η becomes the leading edge portion of the blade at a predetermined angle. In this case, the wheel body portion has at least two stages of grinding to form the tapered surface of the ridge line of the aforementioned 77 ‘this* and 彳研研邛. The edge of the knives may be formed by forming a groove having a predetermined shape on the ridge line. This may be such that the thickness of the front edge portion of the blade is Q4_ or less. The surface of the shape: exaggerated into the aforementioned body part of the wheel by the ridge line - the opposite cone surface. ,: The part is the front edge of the knife, the front edge of the blade... Here, the edge of the Qiu Yishu knife has a tapered surface which is located at the front end of the wheel body, which is located at the front end of the wheel ♦ π ...: ", and the circular plate is here, the thickness of the plate portion is 〇 The range of .4~Ο.03- is easy. The inclination of the plane = the part between the part of the Zhao Department and the part of the front part of the body of the wheel is also continuous. Here, the angle of the front edge of the blade is the apex angle 3 of the lower ridge line °P and the above-mentioned taper portion 5 201114706 185 ° ^ α + /5 ^ 290 β ; The angle α is 75 ° ^ a ^ 170 °; the angle /5 of the taper portion satisfies 60 ° S α: 12 各 each. Here, the angle stone of the taper portion satisfies the following formula 90 ° S α In this case, the outer diameter D of the wheel main body portion may satisfy the following formula: 1 mm SD and 6 mm each. Here, the outer diameter D of the wheel main body portion may satisfy the following formula: 1 mm SD $ 2.5 mm. Here, the length c of the outer circumference of the wheel main body portion and the cylindrical shaft portion may satisfy the following formula C<D. The engraving wheel of the twelfth item, wherein the length C of the aforementioned wheeled vehicle i portion satisfies the following formula 1 5, if applying The outer diameter D of the body portion of the patent range and the aforementioned circle C<D. 16. The scribe wheel of the thirteenth article of the patent application, the +, the outer diameter D of the wheel body portion and the length of the cylindrical shaft portion satisfy Formula C<D. Ma's solution to the above problem, the manufacturing method of the scribing wheel of the present invention, for the cylindrical member formed of a superhard alloy to be coaxially formed with a cylindrical portion of a cylindrical portion of a burnt diamond layer Maintaining the aforementioned super-hard cylindrical portion while simultaneously rotating the portion formed by the wire-cut EDM diamond 201114706 - the coaxial cylindrical shaft portion and the wheel body portion sandwiched by the cylindrical shaft portion; maintaining the aforementioned super-hard alloy cylinder At the same time, the rotation is performed, and the outer end portions of the cylindrical axes π are formed into a tapered shape by polishing. The cylindrical portion (4) of the superhard alloy is held to rotate, and the ridge line portion of the wheel main body portion is polished. The angle is formed to form a leading edge portion of the blade; and the sintered diamond layer and the above-mentioned superhard alloy are cut. Here, the cylindrical shaft portion and the wheel body of the wire-cut electric discharge machining are used. The taper portion is formed at the same time on the outer side of the cylindrical shaft portion, and the modified layer on the surface generated by the wire-cut electrical discharge machining may be removed during the polishing of the tapered portion of the cylindrical shaft portion. [Effect of the invention] In the scribe wheel of the present invention having such a feature, the thickness of the cylindrical shaft portion can be arbitrarily selected by appropriately changing the distance between the processing line (the walking trace (machining portion) of the wire of the wire-cut electrical discharge machine) and the central axis. Further, the interval between the cylindrical shaft portions, the thickness of the wheel main portion, and the angle of the front edge portion of the blade can be arbitrarily selected. The conventional side surface of the shaft and the wheel body portion is a rhombic-shaped engraved wheel, and the front edge of the blade is tapered. The angle of the surface, the angle or interval of the tapered surface of the cylindrical shaft portion, and the outer diameter of the front edge portion of the blade cannot be freely set, but in the present invention, these can be independently set arbitrarily. Further, by polishing only the tapered portion and the leading edge portion of the end portion of the cylindrical shaft which requires high precision, the other portions are maintained in a state of discharge processing, and the desired scribe wheel can be achieved with a minimum of processing steps and costs. By making the thickness of the leading edge portion of the blade 0 or less, it is possible to scribe along a narrow line of a substrate on which a wafer member or the like is mounted. Further, if the wheel body portion is sufficiently held at two times 201114706, the inclined portion can be formed along the surface of the wafer, even if the thickness of the leading edge portion of the blade is reduced. Therefore, the narrow line of the substrate is reduced by reducing the thickness of the leading edge portion of the blade. In addition, the angle of the leading edge portion of the blade ^ ^ ώ ...... a 7 π, the 豕 part is selected by the optimum = degree ', for example, 75. ~17G. Thus, the horizontal crack or the delamination caused by the scribe line can improve the scribing performance of the brittle material. In addition, the angle of the taper can be set to be appropriate with α alone. Field < angle, for example 60. ~ 120 ‘with less resistance to sliding of the bearing. In addition, π trace ~ 4 1 can also be obtained by the fact that the depression formed by the bearing is shallow. [Embodiment] (First Embodiment) A description of a scribe wheel according to a third embodiment of the present invention will be described. Fig. 3(a) is a front view of the scribing wheel, and Fig. 3(b) is a right side view thereof. As shown in the figures, the scribing wheel 1A has a disk-shaped wheel body portion 2a at the center, and the blade front edge portion 3a is formed in the center in the thickness direction of the wheel portion 2A to include the largest in-plane. The tapered portion of the ridgeline of the circumference. Further, the bobbin shaft portion 4 and the circle main body 5 are coaxially arranged on the side of both sides of the wheel main body portion 2A. The tapered portion 6 and the tapered portion 7 having the same inclination angle are respectively formed at the respective outer end portions of the cylindrical shaft portion 4 and the cylindrical shaft portion 5. At this point, the rowing rafts are all formed in one piece with sintered diamonds. "" In this embodiment, the middle edge portion 3Α of the middle blade is the same as the thick body of the wheel body 332, and the thickness is W1 as assumed by ® 3(4). This thickness wi is an example: 〇.4 faces or less, preferably 〇.3mm is not full, more preferably 〇 2 below the brain, the face of the face of 201114706 is perpendicular. Thus, the side of the front edge portion 3 A of the blade is attached to the substrate as shown in FIG. 4 (a) and (b), and the wafer parts 122 and 123 are mounted on the substrate to be the object of the marking. 12 1 When the narrow line between the parts is scored, only the leading edge of the blade may be inserted between the wafer parts 122 and 123 for scribing. Here, the apex angle ? of the ridge portion of the blade leading edge portion 3A can be set to the optimum angle at the blade leading edge portion 3? For example, the top "is π - ?.., more preferably 90. ~ 150. The range. If the apex angle α is an obtuse angle, the horizontal crack of the brittle material or the crease caused by the scribe line is not easy to produce, which can improve the scribe In addition, the angle points of the cones σ Μ and 7 can be set to the most appropriate angles in the taper portion. Here, the angle is 6 〇. 〜12 〇., preferably 75. 〜12 〇., more preferably 90. ~120.之络1¥1 a. _ I. The right angle is too large and the bearing slips against the tendency of the support j_ even if the depression formed by the bearing is shallow enough. But if the angle (four) is large 'f The gap will become larger. If the angle μ is small, the axis will be

承之滑動抵抗會變大。相對於此，在本實施形態係藉由形成於圖3顯示之形狀而可獨立設定刃前緣部3A之稜線部之頂角〇與錐部6、7之角度5，可使各自為具體之角度。此外在本實施形態係使α + /5為以下之範圍。 185 0 ^ α + β ^ 290° ·.. (1) 使用藉由於以往之輪之兩側形成圓錐形之外周面來形成相當於圓錐形之+ Μ , <頂點之錐部（々）與相當於圓錐形之底The sliding resistance will become larger. On the other hand, in the present embodiment, the apex angle 棱 of the ridge line portion of the blade leading edge portion 3A and the angle 5 of the tapered portions 6 and 7 can be independently set by the shape shown in Fig. 3, and each can be made specific. angle. Further, in the present embodiment, α + /5 is in the range of the following. 185 0 ^ α + β ^ 290° ·.. (1) Using the conical outer circumference surface formed by the sides of the conventional wheel to form a cone corresponding to the conical shape, &, < vertices of the apex (々) Equivalent to the bottom of the cone

邊刃前緣部（α ) $古、土 _ .. L 。之方法’因製造上之限制而必然〇； +石為 180，無法製造α+Μ18〇。之軸一體型之輪。 201114706 此外，假設刻劃輪度（兩側之錐部呈圓錐形之場合為兩侧之頂：P=:長錐部非呈圓錐形之場合（形成圓錐台之場！=㈣’ 部（與轴承之接觸部或其切線）延長之以==在料之圓錐形之頂點間之距離）以。在此，若。::=兩：以較小之刻劃荷重之刻劃可實現，但若過小則；造較::： ::::因此:…一一下，較理:為=Edge edge front edge (α ) $ ancient, soil _ .. L . The method 'is inevitable due to manufacturing restrictions; + stone is 180, and α + Μ 18 无法 cannot be manufactured. The shaft of the shaft. 201114706 In addition, suppose the scoring wheel (the taper on both sides is conical) is the top of both sides: P =: the long taper is not conical (form the frustum of the field! = (four)' The contact portion of the bearing or its tangential line is extended by == the distance between the apexes of the conical shape of the material. Here, if:::=two: the scribe of the load can be achieved with a small scribe, but If it is too small; make comparison::: :::: Therefore: ... one time, more reasonable: =

以上2.5mm以下。* 卜，为丨'，分 J 在此在以在之刻劃輪因盥保 # :而將距離C維持為固定同時為了減少外使角度石變小，但在本實施形態可將獨自設定。、以往通常為了使α為9〇。以上（万為90。以下、闻 1(b)所示軸支之頂點間之距離而於關係。 D之間隔為以下之Above 2.5mm. * 卜, 丨 ', 分 J Here, at the time of the rounding, the distance C is fixed and the angle is reduced to reduce the angle, but in the present embodiment, it can be set independently. In the past, it was common to make α 9 〇. Above (the ratio is 90. The following is the relationship between the apex of the shaft branch shown in 1(b). The interval between D is the following.

Cg D…（2) 反之，在本實施形態角度〇及/3之大小益軸部4與圓柱轴部5間之長度關，圓柱關係。心之關係為以下之 C<D... (3) 藉此可抑制刻劃時之偏移。其次針對本實施形態之刻劃輪以之製造方法圖 5A〜圖5D係顯示本實施形態之刻劃輪ia 圖。…顯示素材塊1〇之立體圖，於圓枉形狀=硬合金η之上部一體形成有既定之厚度之燒結鑽石層…此素材塊係例如直徑為伽m，高度為16麵，燒結鑽以 10 201114706 12之厚度為3mm，超硬合金11之厚度為13mm。藉由線切割放電加工平行於此素材塊1 〇之中心抽切取圓柱形之多數構件。藉此如圖5 B所示，可獲得細長之加工素材20例如40〜50根。此加工素材20係使直徑為配合最終之刻劃輪之外控D之徑’例如2.0〜6.5mm，長度為1 6mm 之圓柱狀之構件。且此加工素材20亦由超硬合金層21與燒結鑽石層22構成。 (線切割放電加工）其次於圖5C中’將加工素材20之超硬合金層21之左側部分以夾頭固定並以以一點鏈線顯示之圓柱之中心軸為中心高速使旋轉，以線切割放電加工機放電，如圖5 C所示切取超硬合金層2 1與燒結鑽石層22之部分。在此以加工線30〜39顯示放電加工之軌跡。加工線3〇係對以一點鏈線顯示之圓柱之中心軸以既定之角度切除。加工線3 1係平行於中心軸，加工線32係將錐面狀之線形成為比此稍粗。 φ 加工線33係平行於中心軸’加工線34係於加工線33結束後藉由使徑不同形成錐面狀而被形成之加工線。加工線3 5 係為了於輪本體部2A形成刀前緣部3A之錐面狀部分，加工線3 6亦係具有其相反之傾斜之錐面狀部分。此外，加工線3 7係為了使直徑減少之線，加工線3 8係與加工線3 3對稱且具有相同粗度之平行於中心線之加工線，加工線3 9係具有與加工線3 2對稱之傾斜之加工線。在此加工線3 1〜3 9 係全部在燒結鑽石層22被成形。此外，加工線32、39係被設定為比錐部6、錐部7之斜面稍大，殘留有為了後述之 11 201114706 研磨加工之切屑。此外，加工線35、36、39係被設定為比刀前緣部3A之斜面稍大’殘留有為了後述之研磨加工之切屑。之後在結束線切割放電加工後，如於圖5 D顯示正面之局。卩放大圖般，燒結鑽石層22大致成為刻劃輪1 a之形狀之旋轉體。關於右側面圖係與圖3(b)大致相同。 (粗形狀成形（研磨）步驟）其次針對粗形狀成形（研磨）步驟說明。於線切割放電加工之際由於表面為高溫狀態故會形成加工變質層從表面至内部數十P為變質狀態。因此，在線切割放電加工之狀態下使用時無法維持高精度。特別是於圖3⑷所示之錐部6、錐部7因與軸承直接接觸，故必須除去加工變質層後形成正確之錐面狀面。在此係於沿加工線I%線切割放電加工後再為了增加表面之晶度而進行研磨加工。在研磨步驟係與線切割放電加工時同樣將超硬合金層Η之左側邙央頭固定並以圓柱之中心軸為中心使旋轉，研磨錐面 :表面。藉此研磨加工除去於加工線32、39之成之變質層，可正確形点产 ^ 〜你成左右之圓柱軸部4、圓柱軸部5之刖鳊錐部6、錐部7之錐面狀部分之角度。再對輪本體部2Α之刃前续邮+ 工…,θ 刃則緣找亦進行同樣之研磨加特別疋於圖3(a)所示之刃俞絡邱患夕士 ^ 緣部3Α因與成為刻劃之對玻璃板等直接接觸，故必須形了广土*/ν Α 战正確之面。在此係為了除去於沿加工線35' 36被形成之巧 21 ^ ^ y , Α ν , I質層而將超硬合金層之左側部分以夾頭固定並以圓 < T〜軸為中心使旋轉 12 201114706 進打研磨加工。藉由研磨加工可除去變質層並正確設利之刀前緣部3 A夕痒。τι & «矣μ 1 ^ ^ 之角度。刀刖緣部3Α之角度係如 75。〜17〇。，更理想為9〇。〜15〇。之範圍。疋為 (切斷步驟）藉由刀離於圖5 D中以-點鍵線顯示之超硬合金層2】側之燒結鑽石層22之部分，可如圖3所示獲得輪本體部Μ 及圓柱軸部4、圓柱軸部5之全部由燒結鑽石層22構成之刻劃輪1 A。雖可於此場合研磨切斷後之面以使左右對稱， 4由於錐面狀之更前端部分於使用時會進入軸承之貫通孔，故可如圖6所示將錐部6之前端少許殘留，亦可不= 磨。由於如此元成之刻劃輪1 A係將超硬合金層2 1之左側 '刀以夾頭保持’使旋轉以線切割放電加工或切削加工，故可使輪本體部2Α、圓柱軸部4、圓柱軸部5之轴心正確配合。此外，藉由適當變更加工線33、38與中心軸之距離， φ可任意選擇圓杈軸部4、圓柱轴部5之粗度。圓柱軸部4、圆柱軸。卩5之間隔、輪本體部2Α之厚度可藉由使加工線 34、37之間隔變化任意選擇，刃前緣部3八之寬度可藉由加工線34、37之間隔任意選擇，刀前緣部3八之角度可藉由力工線35、36之角度任意選擇。由於此刻劃輪1Α係將輪本體邛2A與圓柱軸部4、5 一體化，故即使減少刃前緣部 3 A之厚度亦可確保充分之強度。在乂彳主之袖與輪本體成為一體之側面為菱形形狀之刻劃輪，刀前緣部之錐面之角度、圓柱軸部之錐面之角度或 13 201114706 間隔、刃前緣部之角度雖不能自由設定，但在本實施形態此等界可分別獨立任意設定。此外，藉由僅研磨需要高精度之圓柱軸部之錐部與刃前緣部而其他部分則維持放電加工之狀態，可以最少之加：^步驟及成本達成所欲之精度之刻劃輪。 C第2實施形態）其次使用圖7針對本發明之第2實施形態說明。第2 實施形態之刻劃輪1B除輪本體部2B及刃前緣部3β以外與第1實施形態相同。在此刻劃輪1β中，係使輪本體部2B 為如圖7⑷所示成4 2段錐面者。關於其他構造與第】實施形態相同。此外，左右之錐部6、錐部7之研磨與第i實施形態相同。輪本體部2B之研磨只要為靠近刃前緣部化之傾斜部分之左右之斜面之研磨加工即足夠。在此場合可僅以刀前緣部3B適當選擇研磨加工之角度。之後，藉由在錐部6之前端切斷使刻劃輪a完成。Cg D (2) On the other hand, in the present embodiment, the angle between the angle 〇 and /3 and the length of the shaft portion 4 and the cylindrical shaft portion 5 are closed, and the relationship is cylindrical. The relationship between the minds is as follows: C<D... (3) This suppresses the offset at the time of scribing. Next, a manufacturing method of the scribe wheel of the present embodiment is shown in Figs. 5A to 5D showing the scribe wheel ia diagram of the present embodiment. ...showing a three-dimensional view of the material block, forming a sintered diamond layer of a predetermined thickness in the shape of the round shape = the upper part of the hard alloy η. The material block is, for example, gamma in diameter, 16 in height, and sintered in 10 201114706 The thickness of 12 is 3 mm, and the thickness of superhard alloy 11 is 13 mm. Most of the cylindrical members are cut by wire-cut electrical discharge machining parallel to the center of the material block 1 . Thereby, as shown in Fig. 5B, elongate processed material 20 can be obtained, for example, 40 to 50 pieces. The processed material 20 is a cylindrical member having a diameter of, for example, 2.0 to 6.5 mm and a length of 16 mm in conjunction with the final stroke of the wheel. The processed material 20 is also composed of a superhard alloy layer 21 and a sintered diamond layer 22. (Wire-cut EDM) Next, in FIG. 5C, 'the left side portion of the super-hard alloy layer 21 of the processed material 20 is fixed by a chuck and rotated at a high speed centering on the central axis of the cylinder displayed by a chain line to cut the wire. The electric discharge machine discharges, and the portion of the super-hard alloy layer 21 and the sintered diamond layer 22 is cut as shown in Fig. 5C. Here, the trajectories of the electric discharge machining are shown by the processing lines 30 to 39. The processing line 3 is cut at a predetermined angle with respect to the central axis of the cylinder displayed by the dotted line. The processing line 3 1 is parallel to the central axis, and the processing line 32 is formed such that the tapered line is slightly thicker than this. The φ processing line 33 is parallel to the central axis. The processing line 34 is a processing line formed by forming a tapered surface after the processing line 33 is completed. The processing line 3 5 is formed to form a tapered surface portion of the blade leading edge portion 3A in the wheel body portion 2A, and the processing wire 36 also has a tapered portion which is oppositely inclined. Further, the processing line 37 is a line for reducing the diameter, the processing line 38 is a processing line which is symmetrical with the processing line 33 and has the same thickness parallel to the center line, and the processing line 39 has a processing line 3 2 Symmetrical inclined processing line. The processing lines 3 1 to 3 9 are all formed in the sintered diamond layer 22 . Further, the processing lines 32 and 39 are set to be slightly larger than the inclined surfaces of the tapered portion 6 and the tapered portion 7, and the chips for polishing 11 201114706 which will be described later remain. Further, the processing lines 35, 36, and 39 are set to be slightly larger than the slope of the front edge portion 3A of the blade, and the chips for polishing processing to be described later remain. After the end of the wire-cut electrical discharge machining, the front side is shown as shown in Fig. 5D. As in the enlarged view, the sintered diamond layer 22 is substantially a rotating body of the shape of the scoring wheel 1 a. The right side view is substantially the same as FIG. 3(b). (Rough shape forming (grinding) step) Next, the rough shape forming (grinding) step will be described. At the time of wire-cut discharge discharge processing, since the surface is at a high temperature, the work-affected layer is formed from the surface to the inside, and the tens of P is deteriorated. Therefore, high precision cannot be maintained when used in the state of on-line cutting and electric discharge machining. In particular, since the tapered portion 6 and the tapered portion 7 shown in Fig. 3 (4) are in direct contact with the bearing, it is necessary to remove the processed altered layer to form a correct tapered surface. Here, the polishing process is performed after cutting the discharge processing along the processing line I% line to increase the crystallinity of the surface. In the grinding step and the wire-cut electrical discharge machining, the left side of the super-hard alloy layer is fixed and rotated around the central axis of the cylinder, and the tapered surface is polished. Thereby, the polishing layer is removed from the altered layer formed by the processing lines 32 and 39, and the right and left cylindrical shaft portions 4, the tapered portion 6 of the cylindrical shaft portion 5, and the tapered surface of the tapered portion 7 can be accurately formed. The angle of the part. Then, the front of the wheel body 2 is continued to be mailed + work..., and the θ blade edge is also searched for the same grinding, especially for the blade Yulu, Qiu, Yu Xi, and the edge of the blade shown in Fig. 3(a). It becomes a direct contact with the glass plate, etc., so it is necessary to shape the correct surface of the soil*/ν Α. Here, in order to remove the 21 ^ ^ y , Α ν , I layer formed along the processing line 35 ′ 36 , the left portion of the super hard alloy layer is fixed by the chuck and centered on the circle < T 〜 axis Rotate 12 201114706 into the grinding process. The deteriorated layer can be removed by grinding and the front edge portion 3A of the knife is properly set. Τι & «The angle of 矣μ 1 ^ ^. The angle of the edge of the blade is such as 75. ~17〇. More ideally, 9 inches. ~15〇. The scope.疋 (cutting step) by means of a knife from the portion of the sintered diamond layer 22 on the side of the superhard alloy layer 2 shown by the - point key line in Fig. 5D, the wheel body portion can be obtained as shown in Fig. 3 The cylindrical shaft portion 4 and the cylindrical shaft portion 5 are all scribed wheel 1 A composed of a sintered diamond layer 22. In this case, the cut surface may be polished to be bilaterally symmetrical. 4 Since the tapered end portion enters the through hole of the bearing during use, the front end of the tapered portion 6 may be slightly left as shown in FIG. Can also not = grinding. Because of this, the engraving wheel 1 A is the left side of the super-hard alloy layer 2 1 'the knife is held by the chuck', so that the rotation is cut by electric discharge machining or cutting, so that the wheel body portion 2 and the cylindrical shaft portion 4 can be made. The axis of the cylindrical shaft portion 5 is correctly matched. Further, by appropriately changing the distance between the processing lines 33 and 38 and the central axis, φ can arbitrarily select the thickness of the cylindrical shaft portion 4 and the cylindrical shaft portion 5. Cylindrical shaft portion 4, cylindrical shaft. The thickness of the rim 5 and the thickness of the wheel body portion 2 can be arbitrarily selected by changing the interval between the processing lines 34 and 37. The width of the leading edge portion 3 can be arbitrarily selected by the interval of the processing lines 34 and 37. The angle of the portion 3 can be arbitrarily selected by the angle of the working lines 35, 36. Since the wheel body 1 is integrated with the cylindrical shaft portions 4, 5 at this time, even if the thickness of the blade leading edge portion 3 A is reduced, sufficient strength can be secured. The side of the main sleeve and the wheel body is a diamond-shaped engraved wheel, the angle of the tapered surface of the front edge of the knife, the angle of the tapered surface of the cylindrical shaft portion or 13 201114706 interval, the angle of the front edge portion of the blade Although it is not freely configurable, in the present embodiment, these boundaries can be independently set arbitrarily. Further, by grinding only the tapered portion of the cylindrical shaft portion requiring high precision and the leading edge portion of the blade while the other portions are maintained in the state of discharge processing, it is possible to at least add steps and costs to achieve the desired precision of the scribe wheel. C. Second Embodiment) Next, a second embodiment of the present invention will be described with reference to Fig. 7 . The scribe wheel 1B of the second embodiment is the same as the first embodiment except for the wheel main body portion 2B and the blade leading edge portion 3β. At this time, the wheel body 1β is such that the wheel body portion 2B is a 42-sided tapered surface as shown in Fig. 7 (4). The other structures are the same as those of the first embodiment. Further, the polishing of the right and left tapered portions 6 and the tapered portions 7 is the same as that of the first embodiment. It is sufficient that the polishing of the wheel main body portion 2B is performed by grinding the left and right inclined surfaces of the inclined portion near the leading edge portion of the blade. In this case, the angle of the polishing process can be appropriately selected only by the blade leading edge portion 3B. Thereafter, the scoring wheel a is completed by cutting at the front end of the taper portion 6.

此實施形態中係假設輪本體部⑼之厚度為心，刀前緣部3B之厚度為w2b。在此埸人刀‘緣A 亦㈣丄則緣部3B之厚度w2b 亦係例如0.4_以下’較理想4 〇3贿未滿更理相為二了二。立在此Γ由於輪本體部心厚度與刃前二之基Γ 卩3B之厚度可由成為刻劃對象之基板之厚度或零件之實裝對象In this embodiment, it is assumed that the thickness of the wheel body portion (9) is the center, and the thickness of the blade leading edge portion 3B is w2b. In this case, the knives of the knives are the same as the thickness of the edge of the 3B. For example, the thickness of the edge 3B is also below 0.4_, which is more than ideal. The thickness of the base of the wheel body and the thickness of the base Γ3B of the front surface of the blade can be set by the thickness of the substrate to be scribed or the object of the component.

之適用範圍，使…2b更二為了擴大刻劃輪】B 更薄較理想’例如可為0.05mm以此外，刀前緣部3B之厚度w2b之決定’例如為0.03_以上較理相h由所需之強度較理想。在於例如〇.7mm以下 14 201114706 之厚度之由玻·埽上以一’二…队寸脈性苻科稱或之薄基板高密度實裝有微細之零件之場合，使用如上述具有薄刃前緣部之刻劃輪刻劃甚為有效。 (第3實施形態）其次使用圖8針對本發明之第3實施形態說明。第3 實施形態之刻劃輪1C亦除輪本體部2C及刃前緣部3C以外與第1實施形態相同。此刻劃輪lc係使輪本體部Μ為由傾斜部41、4 2成為2 P ·}>处：t 马奴之錐面者。關於其他構造與第丨會The scope of application is such that 2b is more in order to enlarge the scoring wheel. B is thinner and more desirable. For example, it may be 0.05 mm. In addition, the determination of the thickness w2b of the leading edge portion 3B is, for example, 0.03_ or more. The required strength is ideal. In the case where, for example, 厚度.7mm or less 14 201114706 is thicker than the thickness of the substrate on the glass plate, or the thin substrate is densely packed with fine parts, the use of the thin edge leading edge as described above is used. The marking of the division is very effective. (Third Embodiment) Next, a third embodiment of the present invention will be described with reference to Fig. 8 . The scribe wheel 1C of the third embodiment is the same as the first embodiment except for the wheel main body portion 2C and the blade leading edge portion 3C. At this time, the wheel lc is such that the wheel body portion is formed by the inclined portions 41 and 4 2 as 2 P ·}> About other structures and the third meeting

施二態相同。輪本體部2C之研磨只要為靠近刃前緣部3C 之傾斜部分之左右之斜面之研磨加工即足 :c =以刃前緣部3C適當選擇研磨加工之角度。之後2 在錐部6之前端切斷使刻劃輪⑴完成。此實施形態中係假設輪本體部2C之厚度為 ‘ 緣邛3C之厚度為w3b。在 m .^ 在此场合刀刖緣部3C之厚声亦係例如（Μ随以下，較理 ^度州〇.2mm以下。在·酿未滿，更理想為 _ 合由於輪本體部之厚度與刃火心 3C之厚度獨立，故刀前绦早尻與刃則緣部之基板之厚度或零件之實二：之厚度可由成為刻劃對象之適用範圍，使為了擴大刻劃輪1C 乾"厚度w3b更薄較理下。此外，刀前緣部3C之厚片仏 ^ O-OSmm α 決定，例如為〇·〇3—乂上齡之下限係由所需之強度之厚度之由玻璃柘生交理想。在於例如〇.7mm以下上以高密度實裝有微一刀前緣部之刻劃輪刻劃甚為:效之:…使用如上述具有薄 15 201114706 (第4實施形態）其次使用圖9針對本發明之第4實施形態說明。第4 實施形態之刻劃輪1D亦除輪本體部2D及刃前緣部3D以外與第1實施形態相同。此刻劃輪1D係使輪本體部2D為 3段之錐面者。亦即，使用3段之傾斜部43、44取代傾斜部41、42，於中央係形成刃前緣部3D。關於其他構造與第 1貫施形態相同。此外，左右之錐部6 '錐部7之研磨與第 1實施形態相同。輪本體部2D之研磨只要為靠近刃前緣部 3D之彳員斜。卩刀之左右之斜面之研磨加工即足夠。在此場合亦可僅以刀前緣部3D適當選擇研磨加工之角度。之後，藉由在錐部6之前端切斷使刻劃輪lc完成。另外，傾斜部43、 44可係與圓柱軸部4、圓柱軸部5之間及傾斜部μ '料之中央部分形成使f曲為緩斜連續之所胃R面，在此場合線切割放電加工較容易。此實施形態中係假設輪本體部扣之厚度為_，刃前之厚度為w4b。在此場合刀前緣部扣之厚度叫糸例如〇_4職以下，較理想為〇3職未滿，更理想為 .以下。在此場合由於輪本體部2d f 3D之厘；a <厚度與刃刖緣部厚度獨立，故刃前緣部3D之厚度可由之基板之厚度或零件之實裝一J于象The two states are the same. The grinding of the wheel main body portion 2C is a grinding process of the left and right inclined surfaces of the inclined portion near the blade leading edge portion 3C, that is, c: the angle of the grinding process is appropriately selected by the blade leading edge portion 3C. Thereafter 2 is cut at the front end of the tapered portion 6 to complete the scoring wheel (1). In this embodiment, it is assumed that the thickness of the wheel body portion 2C is "the thickness of the edge 3C is w3b. In this case, the thick sound of the edge portion 3C of the blade is also, for example, (the following is the case, it is less than 2 mm below the length of the state.) The thickness of the body of the wheel is more than _ It is independent of the thickness of the blade fire heart 3C, so the thickness of the substrate before the edge of the knife and the edge of the edge of the blade or the thickness of the part 2: the thickness can be applied to the object of the marking, so as to expand the marking wheel 1C dry &quot The thickness w3b is thinner and more reasonable. In addition, the thickness of the front edge portion 3C of the knife is determined by the 仏^ O-OSmm α, for example, the lower limit of the upper age of the 〇·〇3—乂 is the thickness of the glass required by the required strength. It is ideal for the intersection of the 。交 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 The fourth embodiment of the present invention will be described with reference to Fig. 9. The scribing wheel 1D of the fourth embodiment is the same as the first embodiment except for the wheel main body portion 2D and the blade leading edge portion 3D. The main body portion 2D is a three-stage tapered surface, that is, the inclined portions 41 and 42 are replaced by the three-section inclined portions 43 and 44. The blade leading edge portion 3D is formed. The other structure is the same as that of the first embodiment. The polishing of the tapered portion 6' of the left and right taper portions 6 is the same as that of the first embodiment. The grinding of the wheel main body portion 2D is as close as possible to the front edge The edge of the edge 3D is inclined. The grinding of the left and right slopes of the file is sufficient. In this case, the angle of the grinding process can be appropriately selected only by the front edge portion 3D. Thereafter, the end is cut by the taper portion 6 The scribing wheel lc is completed, and the inclined portions 43 and 44 are formed between the cylindrical shaft portion 4 and the cylindrical shaft portion 5, and the central portion of the inclined portion μ is formed so that the f curve is a gentle and continuous continuous stomach R. In this case, it is easy to perform wire-cut electrical discharge machining. In this embodiment, it is assumed that the thickness of the wheel body portion buckle is _, and the thickness of the front edge of the blade is w4b. In this case, the thickness of the front edge of the knife is called 〇, for example, 〇4 Below the job, it is preferable that the job is not full, but it is more desirable. In this case, since the wheel body portion 2d f 3D is a; the thickness is independent of the thickness of the blade edge portion, so the blade leading edge portion 3D The thickness can be determined by the thickness of the substrate or the mounting of the part.

之適用衷在度决疋。為了擴大刻劃輪1D 專已圍’使厚度w4b更薄理相，么丨下。此外— $純理想’例如可為〇.〇5_以卜刀刖緣部3D之厚度w4b之決定，你丨4 * λ 卜限係由所需之強度 J如為0.03mm以上較理邦、。在之厚度之士 ^ ;<彳如〇.7mm以下由破璃板、半導體某杯宣基板專脆性材料構成之薄基板 16 201114706 使用如上述具有薄上以高密度實裝有微細之零件之場入刃前緣部之刻劃輪刻劃甚為有效。 (第5實施形態）The application is inevitable. In order to enlarge the scoring wheel 1D, it has been made to make the thickness w4b thinner. In addition - the "pure ideal" can be, for example, 〇.〇5_ determined by the thickness w4b of the edge of the razor blade 3D, and the 丨4* λ 卜 is limited by the required strength J such as 0.03mm or more. . In the thickness of the person ^; < 彳如〇. 7mm or less thin glass substrate made of glass plate, semiconductor cup of a substrate-specific brittle material 16 201114706 using the above-mentioned thin parts with high density to install fine parts The marking of the front edge of the field into the blade is very effective. (Fifth Embodiment)

其次使用圖H)針對本發明之第5實施形態說明。第$ 實施形態之刻劃輪1E亦僅輪本體部2E及刃前緣部Μ不同’其他部分與第i實施形態相同。纟第5實施形態之刻劃輪1E係如圖10及圖U之局部放大圖所示，刀前緣部π 具有設於料體部2£之中央之圓板部4Q，將其稜線構成為錐面狀之刃前緣者。圓板部40之厚度係刀前緣部3E之厚度，令為w5b。於圓板部40之兩側係設錐面狀之傾斜部a、Next, a fifth embodiment of the present invention will be described using FIG. In the scriber wheel 1E of the first embodiment, only the wheel main body portion 2E and the blade leading edge portion ’ are different. The other portions are the same as those of the i-th embodiment. The scribing wheel 1E of the fifth embodiment is shown in a partially enlarged view of FIG. 10 and FIG. U. The blade leading edge portion π has a disc portion 4Q provided at the center of the material portion 2, and the ridge line is configured as The leading edge of the tapered surface. The thickness of the disk portion 40 is the thickness of the blade leading edge portion 3E, so that it is w5b. A tapered portion a is provided on both sides of the circular plate portion 40,

47及48、49。如此即使減少圓板部4〇之厚度州亦由於傾斜部46〜49而強度被維持。此外，左右之錐部6、錐部 7之研磨與第1實施形態相同。輪本體部2E之研磨只要為靠近刃前緣部3E之傾斜部分之左右之斜面之研磨加工即足夠。在此場合亦可僅以刃前緣部3E適當選擇研磨加工之角度。之後，藉由在錐部6之前端切斷使刻劃輪丨E完成。另外，傾斜部46〜49可係與圓柱軸部4、圓柱軸部5之間及傾斜部46與47、48與49之間形成使彎曲為緩斜連續之所謂R面’在此場合線切割放電加工較容易。此實施形態中係假設輪本體部2E之厚度為w5a，刃寸緣部3E之厚度為w5b。在此場合刃前緣部3e夕；1 A 1 w之厚度w5b 亦係例如0.4mm以下，較理想為〇.3mm夫湓，s 衣滿，更理想為 0.2mm以下。在此場合由於輪本體部2E之厚庐盥手度與刀前緣部 3E之厚度獨立，故刃前緣部3E之厚度可由成為刻劃對象之 17 201114706 基板之厚度或零件之實裝密度決定。適用範圍，使厚度w5b更薄較理如大刻劃輪1E之此外，刀前緣部3E之厚度心之^ ^⑽麵以下。 ^ 1'限係由所需之強唐決 …較理想。在於例如二= 以：密度導體基板等脆性材料構成之薄基板上度貫裝有微細之零件之場合，❹如上述且有薄刃月1J緣部之刻劃輪刻劃甚為有效。定之圓板部40，故僅之研磨之程度變化，47 and 48, 49. Thus, even if the thickness of the disc portion 4 is reduced, the strength is maintained by the inclined portions 46 to 49. Further, the polishing of the right and left tapered portions 6 and the tapered portion 7 is the same as that of the first embodiment. It is sufficient that the polishing of the wheel main body portion 2E is a grinding process of the left and right inclined surfaces of the inclined portion near the blade leading edge portion 3E. In this case, the angle of the polishing process can be appropriately selected only by the blade leading edge portion 3E. Thereafter, the scoring rim E is completed by cutting at the front end of the tapered portion 6. In addition, the inclined portions 46 to 49 may be formed between the cylindrical shaft portion 4 and the cylindrical shaft portion 5 and between the inclined portions 46 and 47, 48 and 49 so as to form a so-called R-face in which the bending is gentle and continuous. EDM is easier to process. In this embodiment, it is assumed that the thickness of the wheel main body portion 2E is w5a, and the thickness of the edge portion 3E is w5b. In this case, the blade leading edge portion 3e; the thickness w5b of 1 A 1 w is also, for example, 0.4 mm or less, more preferably 〇.3 mm, and s is full, more preferably 0.2 mm or less. In this case, since the thickness of the wheel main body portion 2E is independent of the thickness of the front edge portion 3E of the blade, the thickness of the blade leading edge portion 3E can be determined by the thickness of the substrate to be scribed, or the mounting density of the component. . The applicable range is such that the thickness w5b is thinner than the large engraved wheel 1E. Further, the thickness of the front edge portion 3E of the blade is below the ^^(10) plane. ^ 1 'Limited by the required strong Tang ... more ideal. For example, in the case where a thin member made of a brittle material such as a density conductor substrate is provided with a fine member, for example, it is effective to perform the scribing of the edge of the thin edge 1J. Since the circular plate portion 40 is fixed, only the degree of grinding varies.

在此實施形態由於設有厚度為— 於圖11顯示之距離d隨刃前緣部3e 刀前緣部3E之厚度W5b不會變化。此外，前述之各實施形態中，如日本專利3〇74143號In this embodiment, since the thickness is set to be - the distance d shown in Fig. 11 does not change with the thickness W5b of the blade leading edge portion 3e of the blade leading edge portion 3e. Further, in each of the foregoing embodiments, such as Japanese Patent No. 3〇74143

或W02007/004所示於刃前緣之稜線部分形成既定形狀之槽亦可。在此槽之既定形狀可例如圖12(a)〜（d)所示為u 字狀、V字狀、鋸齒波狀或矩形狀之槽。此種槽可藉由以研削加工或微細放電、雷射等熱加工形成而於刻劃輪之外周形成既定間隔之突起。在此槽之節距係對應於外徑而為例如20 v m以上，槽之深度係對應於外形而為例如2〜2〇以m。藉由預先形成此種槽’在於玻璃基板等脆性材料基板形成刻劃線時不會滑動’且可使垂直裂痕深入伸展，故刻劃後之分斷較容易。適當選擇此節距、槽之深度可取得對坡璃等基板表面之開始性能、使垂直裂痕深入伸展之性能之平衡。 [產業上之可利用性] 本發明可於刻劃脆性材料基板後分斷之刻劃裝置有用 18 201114706 地使用。【圖式簡單說明】圖1係顯示以往之刻劃輪之例之圖。圖2係顯示使用以往之刻劃輪之基板之刻劃狀態之圖。圖3係本發明之第i實施形態之刻劃輪之前視圖及右側視圖。圖4係顯示使用本實施形態之刻劃輪之基板之刻劃狀馨態之圖。圖5 A係顯示於本實施形態之刻劃輪之製造使用之素材塊10之立體圖。圖5B係顯示從素材塊被切取之加工素材2〇之立體圖。圖5C係顯示加工素材2〇之放電加工之加工線（加工部位）之圖。鲁圖5D係顯示放電加工後之燒結鑽石層之放大圖。圖6係顯示第1實施形態之變形例之圖。圖7係本發明之第2實施形態之刻劃輪之前視圖及右側視圖。圖8係本發明之第3實施形態之刻劃輪之前視圖及右側視圖。圖9係本發明之第4實施形態之刻劃輪之前視圖及右側視圖。圖1〇係本發明之第5實施形態之刻劃輪之前視圖及右 19 201114706 側視圖。圖1 1係本發明之第5實施形態之刻劃輪 < 部放大圖。刀別緣之局圖1 2係顯示本發明之各實施形態之刻槽之一例之局部放大圖。之刀前緣之【主要元件符號說明】 ' IB、1C、ID、1E刻劃輪 12〇Or, as shown in W02007/004, a groove having a predetermined shape may be formed at a ridgeline portion of the leading edge of the blade. The predetermined shape of the groove can be, for example, a U-shaped, V-shaped, sawtooth wave or rectangular groove as shown in Figs. 12(a) to 12(d). Such a groove can be formed by forming a predetermined interval on the outer circumference of the scoring wheel by hot working such as grinding, fine discharge, or laser. The pitch of the groove corresponds to the outer diameter of, for example, 20 v m or more, and the depth of the groove corresponds to the outer shape and is, for example, 2 to 2 Torr in m. Such a groove is formed in advance by the fact that the brittle material substrate such as a glass substrate does not slide when the scribe line is formed, and the vertical crack can be deeply extended, so that the division after the scribe is easier. Appropriate selection of the pitch and the depth of the groove can achieve a balance between the initial performance of the surface of the substrate such as the glass and the deep extension of the vertical crack. [Industrial Applicability] The present invention can be used in the sculpt device after the scribing of the brittle material substrate. [Simple description of the drawing] Fig. 1 is a view showing an example of a conventional marking wheel. Fig. 2 is a view showing a state of scribing of a substrate using a conventional scribing wheel. Fig. 3 is a front view and a right side view of the scribe wheel of the i-th embodiment of the present invention. Fig. 4 is a view showing the scribed state of the substrate using the scribe wheel of the embodiment. Fig. 5A is a perspective view showing the material block 10 used for the manufacture of the marking wheel of the embodiment. Fig. 5B is a perspective view showing the processed material cut from the material block. Fig. 5C is a view showing a processing line (processing portion) of the electric discharge machining of the processing material. Lutu 5D shows an enlarged view of the sintered diamond layer after electrical discharge machining. Fig. 6 is a view showing a modification of the first embodiment. Fig. 7 is a front view and a right side view of the scribe wheel of the second embodiment of the present invention. Fig. 8 is a front view and a right side view of the scribe wheel of the third embodiment of the present invention. Fig. 9 is a front view and a right side view of the scribe wheel of the fourth embodiment of the present invention. Fig. 1 is a front view of a scribe wheel and a right side view of a fifth embodiment of the present invention. Fig. 1 is an enlarged view of a scribe wheel of a fifth embodiment of the present invention. Fig. 1 is a partial enlarged view showing an example of a groove of each embodiment of the present invention. Front edge of the knife [Main component symbol description] 'IB, 1C, ID, 1E scoring wheel 12〇

2A、2B、2C、2D ' 2E 輪本體部 3A、3B、3C、3D、3E 刀前緣部 4、5 圓柱車由部 6 ' 7 錐部 10 素材塊 11、21 超硬合金 12、22 燒結鑽石 20 加工素材 30〜39 加工綠 40 圓板部 4 1 〜49 傾斜部2A, 2B, 2C, 2D ' 2E Wheel body parts 3A, 3B, 3C, 3D, 3E Knife front edge parts 4, 5 Cylindrical car parts 6' 7 Cone part 10 Material blocks 11, 21 Super hard alloy 12, 22 Sintering Diamond 20 processing material 30~39 processing green 40 disc part 4 1 ~ 49 inclined part

2020

Claims

201114706 申請專利範圍：七種刻劃輪，具備：以中心具有、，之於前述輪本體部左右以燒結鑽石層 J軸形成稜線之燒結鑽石形成之圓板狀輪本體部.平面内之圓形部；之圓杜軸其特徵在於，具備：於前述圓柱軸部之各自之外侧端度之錐部；以及门輛形成為既定角以别述輪本體部之稜線部頂角為既之刀前緣部。度之方式形成 2、如申請專利範圍第i項之刻劃輪體部具有至少2段之錐面，係僅研；’前述輪本稜線之錐面而形成。則述刀前緣部之 3、如申請專利範圍第i項之刻劃輪，其中、、彖部於稜線形成有既定形狀之槽。、則述刀前 4、如申請專利範圍第μ之刻劃緣部之厚度係設為〇.4_以下。、中則述刀則 5、如申請專利範圍第丨項之刻复义輪本體部中由構成稜線 "八，没則述邻，〜㈣線t冑錐狀面構成之部分為刀前緣月1J述刀前緣部之厚度設為〇〇3mm以上。 6、如申請專利範圍第1 緣邱且士 $之刻畫輪，其中，前述刀前錐狀部。、圓板。卩、前述圓板部前端之 7、如申請專利範圍第6項之刻劃輪，其中，前述圓板 21 10項之刻劃輪，其中，前述錐項之刻劃輪，其中 201114706 部之厚度設在(Μ〜〇.〇3mm之範圍。 8、如申請專利範圍第！項之刻體部在與前述圓桂軸部之間具有錐狀之：：中’ 〇 , 士 ^ ^火之傾斜部。 9、如“專利範，項之刻則輪本體部之傾斜部成與前述圓挺其中速 10、如巾請專利範圍p項之”輪Λ中前緣線部頂角α與前述雜部之角度… 185 ^ + β S 290 ° ；棱線部之頂角α為 75。g a g 17〇〇 ; 月，J述錐部之角度/3滿足 60° ^ α 各 ΐ2〇β。 11、如申請專利範圍第部之角度yS滿足下式 90。$ α 各 120。。 12、如申請專利範圍第10或11 月J述輪本體部之外徑D滿足下式 ImmS 6mm。 & 13、如申請專利範圍第1〇或u項之刻劃輪引述輪本體部之外徑D滿足下式 IrnmS 2·5ηιηι。 ^ 14、如申請專利範圍第ι〇或u項之刻劃輪前述輪本體部之外徑D與前述圓杈軸部之長度^ C<D。前述輪本係使前述續。，前述刃下式，其中，其中’ 滿足下式 22 201114706 第丨2項之刻劃輪，其中，前述輪柱軸部之長度C滿足下式 1 5、如申請專利範圍本體部之外徑D與前述圓 C<D。 16、如申請專利範圍第13項之刻劃輪，其+，前述輪本體部之外徑D與前述圓柱軸部之長度^足下式 C<D。 1 7、一種刻劃輪之製造方法，其係： •纟用在以超硬合金形成之圓柱狀構件之一端同軸形成有燒結鑽石層之圓柱部之圓柱狀加工素材；保持前述超硬合金之圓柱部分同時使旋轉，以線切割電加工於燒結鑽石層部分形成一對同軸之圓柱軸部與夾於该圓柱軸部之輪本體部；保持前述超硬合金之圓柱部分同時使旋轉，將前述圓車由部之各自之外側端部藉由研磨加工而形成為錐狀；保持前述超硬合金之圓柱部分同時使旋轉，將前述輪 # 體部之稜線部研磨成既定角度以形成刃前緣部；藉由切斷前述燒結鑽石層與前述超硬合金而製造。 18、如申請專利範圍第17項之刻劃輪之製造方法，其中’於使用前述線切割放電加工之圓柱軸部與輪本體部之形成時’於前述圓柱軸部之外側同時形成錐部；於前述圓柱軸部之錐部之研磨時’將因線切割放電加工而產生之表面變質層除去。 23201114706 Patent application scope: Seven kinds of engraving wheels, which are: a circular plate-shaped wheel body portion formed by a sintered diamond having a ridge line formed by a J-axis of a sintered diamond layer on the left and right sides of the wheel body. The round shaft is characterized by: a tapered portion at an outer end of each of the cylindrical shaft portions; and a door formed at a predetermined angle so that the apex angle of the wheel body portion is the same as the front Edge. The method of forming a degree is as follows: 2. The scribe wheel body of the i-th aspect of the patent application has at least two tapered surfaces, which are only ground; and the tapered surface of the wheel ridge is formed. The front edge portion of the knives is the scriber wheel of the item i of the patent application scope, wherein the ridge portion is formed with a groove having a predetermined shape on the ridge line. In the case of the knife, the thickness of the edge portion is set to 〇.4_ or less. In the case of the knife, the knife is 5. If the scope of the patent application is the second item, the ridge line is formed in the body part of the reciprocating wheel, and the part is the front edge of the cone. The thickness of the front edge portion of the blade is set to 〇〇3 mm or more. 6. For example, if the patent application scope is 1st, Qiu Qiu Shi, the etched wheel of the knives, the front cone of the knife. ,Circular plate.卩, the front end of the circular plate portion, the scriber wheel of the sixth aspect of the patent application, wherein the circular plate 21 is a scribe wheel of the above-mentioned cone, wherein the thickness of the scribe wheel of the cone item, the thickness of the 201114706 portion It is located in the range of (Μ~〇.〇3mm. 8. If the body part of the patent application scope is inscribed with a cone between the shaft and the shaft of the round:: ''', 士^^火之斜9. For example, if the patent is in the patent, the inclination of the body of the wheel is the same as that of the above-mentioned round, and the speed is 10, such as the scope of the patent, the apex angle α of the front edge of the rim and the aforementioned miscellaneous The angle of the part... 185 ^ + β S 290 ° ; the apex angle α of the ridge line is 75. gag 17〇〇; month, the angle of the taper / 3 satisfies 60 ° ^ α ΐ 2 〇 β. The angle yS of the first part of the patent application scope satisfies the following formula 90. $ α each 120. 12. If the patent application range is 10 or 11th, the outer diameter D of the wheel body portion satisfies the following formula ImmS 6mm. & 13, such as The outer diameter D of the wheel body portion of the wheel of the wheel of the first or the second paragraph of the patent application scope satisfies the following formula IrnmS 2·5ηιηι. ^ 1 4. The length of the outer diameter D of the wheel body portion and the length of the aforementioned circular shaft portion ^ C<D as claimed in the patent specification range ι〇 or u. The aforementioned wheel system is continued as described above. Wherein the scribe wheel of the following formula 22 201114706 item 2, wherein the length C of the wheel column portion meets the following formula 15. The outer diameter D of the body portion of the patent application range and the aforementioned circle C< D. 16. The scriber wheel of claim 13 of the patent scope, wherein +, the outer diameter D of the wheel body portion and the length of the cylindrical shaft portion are the following formula C < D. 17. Manufacturing of a scribe wheel The method is: • a cylindrical processing material in which a cylindrical portion of a sintered diamond layer is coaxially formed at one end of a cylindrical member formed of a super-hard alloy; and the cylindrical portion of the super-hard alloy is maintained while rotating, and is cut by wire Electroforming in the portion of the sintered diamond layer to form a pair of coaxial cylindrical shaft portions and a wheel body portion sandwiched between the cylindrical shaft portions; maintaining the cylindrical portion of the super-hard alloy while rotating, and respectively arranging the outer side ends of the circular vehicle Grinding Forming a taper shape; maintaining the cylindrical portion of the superhard alloy while rotating, grinding the ridge portion of the body of the wheel to a predetermined angle to form a leading edge portion; by cutting the aforementioned sintered diamond layer and the aforementioned super 18. The method of manufacturing a scriber wheel according to claim 17, wherein 'on the side of the cylindrical shaft portion when the cylindrical shaft portion and the wheel body portion are formed by using the wire cutting electric discharge machining described above At the same time, a tapered portion is formed; when the tapered portion of the cylindrical shaft portion is polished, the surface-degraded layer generated by wire-cut electrical discharge machining is removed. twenty three