201113456 _ 六、發明說明： 【明戶斤屬支彳，X%頁知^】 發明領域 本發明係有關於一種可搬運工件（應加工之對象物）之 工件搬運台車、工件加工系統、氣體供給系統及氣體供給 方法。 C先前·iiL名好；1 發明背景 舉例言之，製造平面顯示面板時，如專利文獻1〜3所 揭露，係使用可保持複數之玻璃基板(工件），而在沿軌道通 過加熱爐内之同時將玻璃基板之内部空間抽吸成真空’並 封入發光氣體之工件搬運台車。工件搬運台車包含玻璃基 ' 板之抽真空作業所使用之氣缸及可藉氣壓而膨脹以確保氣 密性之氣壓夾盤等，並分別設有可製造其驅動所需之壓縮 空氣之空氣壓縮機。氣壓夾盤若發生排氣混入壓縮空氣 中’則可能損及其功能，而需使用低露點之壓縮空氣。因 此’平面顯示面板製造用之工件搬運台車搭載了設有超級 乾燥器（低露點乾燥器）之空氣壓縮機。 如上所述，工件搬運台車一旦搭載空氣壓縮機，則與 其它搭載機器之間之空間縮小，而有損及維修性之問題。 又’各工件搬運台車一旦搭載空氣壓縮機’則設備成本將 大幅提高。進而，超級乾燥器為排氣而經常放出壓縮空氣， 故為補充壓縮空氣將斷續作動’而持續消耗電力。 專利文獻4之工件檢查裝置中’受搬運之托板設有可藉 201113456 壓縮空氣開關而握持工件之夾盤，托板之壓縮空氣之流路 上設有聯結器。工件檢查裝置可在托板之停止位置上，對 聯結器連接管路而供給或排出壓縮空氣以開關夾盤。 然而’專利文獻1〜3之平面面板之製造設備（工件加工 系統）中’工件搬運台車係在加熱爐中移動之同時消耗壓縮 空氣’故將如專利文獻4之工件檢查装置一般，無法對工件 搬運台車連接管路而自外部供給壓縮空氣。 又’平面顯示面板之製造所使用之工件搬運台車一如 專利文獻1〜3所揭露，亦搭載有將対入面板内之發光氣體 之鋼瓶’ 一旦鋼瓶之餘壓降低，則需人力更換該等鋼瓶， 但人力更換大重量之鋼瓶之作業乃極大之負擔。使用多架 工件搬運台車之生產設備將需要大量更換用之鋼瓶，並須 管理大量之鋼瓶， 亦可考量在平面顯示面板之製造設備中，若於工件搬 運台車之發光氣體之供給配管設置聯結器，並於設備内之 預定位置上對工件搬運台車之聯結器連接外部流路之聯 結器而供給發光氣體’則無須對各工件搬運台車搭載鋼瓶。 然而，使用聯結器時’存在聯結器之開放部分之大氣 將於連接聯結器後殘留於聯結器内部，而混入供給之發光 氣體中。就平面顯示面板而言，發光氣體中即便僅混入少 量空氣，亦將使發光功能顯著降低，而損及產品之功能。 【先行技術文獻】 【專利文獻】 【專利文獻1】特開2002-173331號公報 201113456 【專利文獻2】特開2002-324486號公報 【專利文獻3】特開2005-216830號公報 【專利文獻4】特開平11-295060號公報 【發明内容;3 發明揭示 發明欲解決之課題 有鑑於前述問題點，本發明目的即在提供—種可八氣 體之使用低廉且簡易之工件搬運台車及使用該種工件搬運 台車之工件加工系統。進而，並提供一種可對可朝需要對 象供給氣體之需要流路自可裝卸之外部系統供給氣體而避 免混入空氣之氣體供給系統及氣體供給方法，以及可對消 耗氣體之工件搬運台車供給氣體而避免混入空氣之工件加 工系統。 用以欲解決課題之手段 為解決上述問題，本發明之工件搬運台車包含有：機 器，可消耗氣體；緩衝槽，可儲備氣體；接收流路，可朝 前述緩衝槽供給氣體；及，聯結器，設於前述接收流路中。 依據上述構造，將經聯結器而供入之氣體暫存於緩衝 槽，即足供搬運、加工卫件之期間内之氣體消耗所需。又， 無須就工件搬運台車分別設置壓縮機及氣體鋼瓶等氣體供 給源，故設備成本及管理成本均較少，而工件搬運台車之 有效空間亦可大幅確保。且，經聯結器而連接氣體供給源， 即可簡易補給氣體，故可就製造過程之各週程頻繁地補給 氣體。藉此，即便緩衝槽之容量不大，亦無須提高氣體壓 201113456 力而增加儲備氣體之量，故緩衝槽無須具備較高之财壓性。 又本發明i件搬運台車中，前述可消耗氣體之機 器與前述缓衝槽間亦可設有調節器。 依據上述構造，提高緩衝=壓力而非氣體之使用壓 力，即可使氣體之使用壓力為〜定 亦可於前述接收流路 又，本發明之工件搬運台車中 設有單向閥及開關閥之至少住—。 器之狀態下，緩衝槽氣體 依據上述構造，在卸下聯择 將不致經接收流路而外漏。 系統之第1態様係可使工件搬運 而前述工件搬運台車包含：機 可容置氣體；接收流路，可朝 又，本發明之工件加工 台車循環於封閉之轨條上， 器’可消耗氣體；緩衝槽， 前述緩衝槽供給氣體；及，聯結器，設於前述接收流路中； 前述執條上之前述X件搬運台車之停止位置上，設有可對 前述聯結ϋ連接供給流路，_前述緩侧供給氣體之供 依據上述構造，供給站可對各卫件搬運台車之緩衝槽 儲備至下回停留於供給站為止之消耗量之氣體故工件搬 運台車可在移動之同時消耗氣體。 又，本發明之氣體供給系統包含有：接收流路，經接 收閥而與可«要對象供給氣體之f要流路連接，並設有 接收聯結器；供給流路，經供給_與氣體供給源連接， 並設有可與前述接收聯結器結合之供給聯結器；及排氣 流路’經排氣閥而與前述接收流路或前述供給流路連接； 201113456 在前述接收閥及前述供給閥之封閉狀態下，結合前述接收 聯結器與前述供給聯結器，並進行在前述排氣閥之封閉狀 態下開放前述供給閥，而朝前述接收流路及前述供給流路 中供給氣體，然後封閉前述供給閥，再開放前述排氣閥， 而排出前述接收流路及前述供給流路中之氣體，然後封閉 前述排氣閥之排空處理至少一次，再開放前述供給閥及前 述接收閥，而朝前述需要流路供給氣體。 依據上述構造，可藉1次之排空處理，而按與排氣閥之 相反側之壓力（諸如大氣壓）及氣體源之壓力之比率相等之 比例使接收流路及前述供給流路中之空氣量降低。反覆為 之，則可將接收流路及前述供給流路中之空氣量降至所欲 - 之限度量以下，故可供給氣體而不致就需要流量混入超過 . 限度之空氣。 又，本發明之氣體供給系統中，前述排氣流路亦可藉 前述排氣閥而連接前述接收流路或前述供給流路與真空源。 依據上述構造，1次之排空處理即可按與真空源之真空 壓以及氣體源之壓力之比率相當之較大比例使接收流路及 前述供給流路中之空氣混入量降低，故可減少排空處理之 次數。 又，本發明之氣體供給系統中，亦可在進行前述排空 處理前，開放前述排氣閥而排出前述接收流路及前述供給 流路中之氣體。 依據上述構造，在朝接收流路及前述供給流路中供給 氣體前，先將内部之空氣予以排氣至真空，故可減少為將 201113456 空氣之混人量降至所欲之限度量以下，而藉排空處理自排 氣流路排出之氣體總量，而減少供給氣體之損失。 又，本發明之氣體供給方法包含以下步驟：對經接收 閥而與可«要對象供給氣體之需錢路連接倾有接收 聯，…器之接收w路’以及經供給閥而與氣體供給源連接並 設有可與前述純縣Ε結合之供給龍_之供給流路之 任- ’經㈣^連接職祕；在前祕㈣及前述供 、:閥之封閉狀態下’結合前述接收聯結器與前述供給聯結 器’進订在則述排氣閥之封閉狀態下開放前述供給閥而朝 前述接收流路及前述供給流路巾供給氣體，然後封閉前述 供給閥’再開放前述排氣閥而排出前述接收流路及前述供 給咖路中之氣體，然後封閉前述排氣閥之排空處理至少一 -人，開放刚述供給閥及前述接收閥，而朝前述需要流路供 給氣體。 依據上述方法’可藉重複排空處理，而使接收流路及 則述供給流路中之空氣量降至所欲之限度量以下，以對需 要仙·路供給氣體而不致混入超過限度量之空氣。 又’本發明之工件加工系統之第2態様包含有：工件搬 運〇車，包含可消耗氣體之需要裝置、可朝前述需要裝置供 ’’α氣體之需要流路、經接收閥而與前述需要流路連接並設有 接收聯結器之接收流路’而可保持工件並繞行於封閉之軌條 上’及’供給站，設於前述工件搬運台車之停止位置上，經 供、給閱而與氣體供給源連接，包含設有可與前述接收聯結 器〜合之供給聯結器之供給流路；前述接收流路或前述供 201113456 給流路經排氣閥而與排氣流路連接，在前述接收閥及前述 供給閥之封閉狀態下，結合前述接收聯結器與前述供給聯 結器，進行在前述排氣閥之封閉狀態下開放前述供給閥而 朝前述接收流路及前述供給流路中供給氣體，然後封閉前 述供給閥，再開放前述排氣閥而排出前述接收流路及前述 供給流路中之氣體，然後封閉前述排氣閥之排空處理至少 一次，再開放前述供給閥及前述接收閥，而朝前述需要流 路供給氣體。 依據上述構造，可朝繞行之工件搬運台車之需要流路 自供給站供給氣體。此時，進行排空處理而藉聯結器之裝 卸排出已進入接收流路及前述供給流路之空氣，故供給氣 體將不致混入空氣。 又，本發明之工件加工系統中，前述需要流路亦可設 有可貯留氣體之貯氣槽。 依據上述構造，工件搬運台車可在遠離供給站之位置 上移動同時消耗氣體。 發明效果 依據本發明，由於在工件搬運台車設有可儲備氣體之 緩衝槽，並藉裝卸容易之聯結器而可頻繁地對緩衝槽補給 氣體，故工件搬運台車無須搭載壓縮機等氣體之製造裝置 及氣體鋼瓶等高壓之氣體供給源。因此，可降低工件加工 系統之設備成本及運轉成本。又，重複進行將藉聯結器而 裝卸之接收流路及前述供給流路中之氣體排氣而排出殘留 之空氣之排空處理，則可將接收流路及前述供給流路中殘 201113456 留之空氣量降至所欲之限度量以下，而自可裝卸之外部之 氣體供給源朝需要流路供給氣體，且不致對需要流路混入 超過限度量之空氣。 圖式簡單說明 第1圖係本發明第1實施例之平面顯示面板製造設備之 配置圖。 第2圖係第1圖之面板搬運台車及供給站之概略圖。 第3圖係本發明第2實施例之平面顯示面板製造設備之 面板搬運台車及供給站之概略圖。 第4圖係本發明第3實施例之平面顯示面板製造設備之 面板搬運台車及供給站之概略圖。 第5圖係本發明第4實施例之平面顯示面板製造設備之 配置圖。 第6圖係第5圖之面板搬運台車及封入站之概略圖。 第7圖係本發明第5實施例之平面顯示面板製造設備之 面板搬運台車及封入站之概略圖。 第8圖係本發明第6實施例之平面顯示面板製造設備之 面板搬運台車及封入站之概略圖。 第9圖係本發明第7實施例之平面顯示面板製造設備之 面板搬運台車及封入站之概略圖。 第10圖係本發明第8實施例之平面顯示面板製造設備 之配置圖。 第11圖係第10圖之面板搬運台車及供給站之概略圖。 C實施方式】 10 201113456 較佳實施例之詳細說明用以實施發明之最佳形態 、下就本么明之貫知例，參照圖示力口以說明。第1圖 係本發明第1實施例之平面顯示面板製造設備（工件加工系 統)之配置®。該平面顯示面板製造設備巾，可裝載平面顯 面板用之玻璃基板(工件）*移動之複數卫件搬運台車^將 循環移動於封閉之軌條2上。 軌條2 i 3刀別由直線狀之軌道R所構成之去路與回 路以及。又於去路及回路之兩端，而可使工件搬運台車丄自 去路至回路或⑽至去路進行㈣之輸送裝置丁。 軌條2之去路之大半延伸於可加熱玻璃基板而將内部 空間抽吸成真空之加熱爐3中。加熱爐3後方則設有可對玻 璃基板封入發光氣體之封入站4。 軌條2之回路切丨設有可封止用以供作玻璃基板之真 空排氣及發光氣體封入之流路之排氣管之封閉站5、可自工 件搬運台車1取出麵基板之卸載站6、可為維修而拉出工 件搬運##1·^出站7、可對讀搬運台車丨裝載玻璃基板 之裝載站8、可對工件搬運台車1供給發光氣體及壓縮空氣 之供給站9。 第2圖係顯不停止於供給站9之工件搬運台車1之簡化 後狀況。工件搬運台車1於上部之容置空間内設有可保持玻 璃基板P之複數保持構件1G、分別包含為將玻璃基板p抽吸 成真空以封人發光氣體而可藉氣塵動作之夾盤及氣缸之複 數工作頭（消耗氣體之機器）11。 又’工件搬運台車1於下部之機械空間内，設有可將工 201113456 作頭11抽吸成真空之真空泵12、可儲備發光氣體之氣體緩 衝槽13、可儲備壓縮空氣之空氣緩衝槽14、可依循預定之 程式對工作頭11之元件連接真空泵12、氣體緩衝槽13及空 氣緩衝槽14之分配控制裝置15。 氣體缓衝槽13及空氣緩衝槽14分別於末端設有母型之 聯結器16、17，並連接有單向閥18、19及設有接收閥2〇、 21之接收流路22、23。聯結器16、17於工件搬運台車1之底 面上朝下固定。又，氣體緩衝槽13及空氣緩衝槽14分別經 調節器24、25而朝分配控制裝置15供給氣體及壓縮空氣。 單向閥18、19及接收閥20、21係可阻止自氣體緩衝槽 13及空氣緩衝槽14經接收流路22、23外漏壓縮空氣及發光 氣體者’若封閉能力充分，則採用任一種均可。又，單向 閥18、19及接收閥20、21亦可設於聯結器16、17内部。 又，工件搬運台車1於底面設有由2個轉輪構成之定位 承載構件26。定位承載構件26將接入未圖示之搬運桿，而 亦協助工件搬運台車1之驅動。 供給站9包含發光氣體之氣體鋼瓶27及低露點空氣壓 縮機28 ’並設有可自氣體鋼瓶27及低露點空氣壓縮機28朝 工件搬運台車1之接收流路22、23供給發光氣體及壓縮空氣 之供給流路29、30。供給流路29、30之先端設有可藉氣缸 31、32進行昇降，而與聯結器16、17結合之公型之聯結器 33、34。另，氣體鋼瓶27及低露點空氣壓縮機28亦可設於 遠離供給站9之處，而藉配管朝供給站9供給發光氣體及壓 縮空氣。 12 201113456 供給流路29設有調節器35及供給閥36，僅在聯結器16 與聯結器33結合後乃經供給流路29而朝接收流路22供給預 疋壓力之發光氣體。供給流路30設有供給閥37，僅在聯結 器17與聯結器3 4結合後乃朝接收流路2 3供給壓縮空氣。 又’供給站9設有可藉氣缸38而昇降以卡止工件搬運台 車1之定位承載構件26之定位構件39。 本實施例之平面顯示面板製造設備中，工件搬運台車1 母繞轨條2—周，便停止於供給站9上，並對聯結器16、17 結合聯結器33、34,而對接收流路22、23連接供給流路29、 30，並分別以預定之壓力對氣體緩衝槽13及空氣緩衝槽14 分別供給發光氣體、壓縮空氣。 ¥然’亦可就1周之軌條2設置複數之供給站9，而對空 氣緩衝槽14分2次補給壓縮空氣。又，當壓縮空氣及發光氣 體之消耗量較少時，亦可數周乃補給一次壓縮空氣及發光 氣體。 為對工件搬運台車1之氣體緩衝槽13供給發光氣體，對 聯結器16連接聯結器33後，將於接收流路22及供給流路29 之接收閥20與供給閥36之間封閉空氣。一旦開放接收閥2〇 及供給閥36而朝氣體緩衝槽13供給發光氣體，上述空氣將 流入氣體緩衝槽13，而於氣體緩衝槽13内與供入之發光氣 體混合。因此，宜使接收流路22及供給流路29之接收閥2〇 與供給閥36之間之空間縮小，以相對於丨次可供給之發光氣 體里’使流入接收流路22及供給流路29之空氣量為最小。 進而，聯結器16及聯結器33使用内設有閥部者，而於聯結 13 201113456 益16與聯結1133分離後，使空氣^致進人接收流路22及供 給流路29，則更佳。 又’供給站9雖藉定位構件39而卡止承載構件26以進行 工件搬運台車1之定位，但進而宜使聯結器16、17或聯結器 33、34具備自動對位機構。 氣體緩衝槽13及空氣缓衝槽14凡可供給工件搬運台車 1繞行軌條2 —周期間之顯示面板之製造程序中所消耗之量 之發光氣體及壓縮空氣者即可。因此，氣體緩衝槽13及空 氣緩衝槽14亦可並非容積較大者或高壓者。又，氣體緩衝 槽13及空氣緩衝槽14不需電動機以供給壓縮空氣及發光氣 體’故工件搬運台車1之耗電較少。又，工件搬運台車1中， 氣體緩衝槽13及空氣緩衝槽14不具備動力機構，故維修頻 率亦可不高。 第3圖係顯示本發明第2實施例之平面顯示面板製造設 備之工件搬運台車la及供給站9a者。本實施例之工件搬運 台車1 a構造上在氣體緩衝槽13之接收流路22經排氣閥40而 與真空泵12連接之點上與第1實施例不同。在此，就與第1 實施例相同之元件附以相同標號，而省略重複之說明。 本實施例中，朝工件搬運台車1之氣體緩衝槽13供給發 光氣體時’將於對聯結器16連接聯結器33後，開放接收流 路22之接收閥20及供給流路29之供給閥36之前，先開放排 氣閥40，而藉真空泵12將接收流路22内部之空氣排出，以 免空氣混入氣體緩衝槽13内。 進而’第4圖係顯示本發明第3實施例之平面顯示面板 201113456 製造設備之工件搬運台車lb及供給站9b者。本實施例之構 造在供給站9b設有真空栗41，且供給流路29經排氣閥42而 與真二果41連接之點與第1貫施例不同。在此，亦就與第1 實施例相同之元件附以相同標號，而省略重複之說明。 上述真空果41亦與第2實施例相同，在對接收流路22之 聯結器16連接供給流路29之聯結器33後，開放接收閥20及 供給閥36而朝氣體緩衝槽13供給發光氣體之前，將開放排 氣閥42而將接收流路22及供給流路29之内部抽吸成真空， 以免空氣混入發光氣體内。 本實施例與第2實施例不同，為將接收流路22及供給流 路29内部抽吸成真空，並未使用設於各工件搬運台車lb之 - 真空泵12 ’而於供給站9b設有專用之真空泵41，故可實現 . 高真空而更高度地避免空氣混入發光氣體内。 第5圖係本發明第4實施例之平面顯示面板製造設備 (工件加工系統)之配置圖。該平面顯示面板製造設備係使裝 載平面顯示面板用之玻璃基板（工件）而移動之複數工件搬 運台車51循環移動於封閉之軌條52上。 軌條52包含分別由直線狀之軌道r所構成之去路與回 路’以及設於去路及回路之兩端，而可使工件搬運台車51 自去路至回路或回路至去路進行移動之輸送裝置丁。軌條52 之去路之大半延伸於可加熱玻璃基板而將内部空間抽吸成 真空之加熱爐53中。加熱爐53後方則設有可對玻璃基板封 入發光氣體之封入站54。軌條52之回路上則設有可封止用 以供作玻璃基板之真空排氣及發光氣體封入之流路之排氣 15 201113456 管之封閉站55、可自工件搬運台車51取出玻璃基板之卸載 站56、可為維修而拉出工件搬運台車51之拉出站57、可對 工件搬運台車51裝載玻璃基板之裝載站58 ° 第6圖係顯示停止於封入站54之工件搬運台車51之簡 化後狀況者。工件搬運台車51於上部之容置空間内設有可 保持玻璃基板P之複數保持構件59、可分別將玻璃基板？抽 吸成真空以封入發光氣體之複數工作頭60 ° 又’工件搬運台車51於下部之機械空間内，設有可將 工作頭60抽吸成真空之真空泵61、内設有可依循預定之程 式而朝各工作頭60供給發光氣體之複數之閥部而可與工作 頭60成一體而消耗發光氣體之分配控制裝置（需要裝 置）62。分配控制裝置62與可供給發光氣體之需要流路63連 接’需要流路63則經接收閥64而與可分離之接收流路65連 接。需要流路63設有可使發光氣體減壓之調節器66，而接 收流路65於末端設有母型之接收聯結器67。接收聯結器67 則於工件搬運台車51底面上朝下固定。 又，工件搬運台車51於底面上設有由2個轉輪構成之定 位承載構件68。定位承載構件68將接入未圖示之搬運桿， 而亦協助工件搬運台車51之驅動。 封入站54包含不同種類之發光氣體之氣體鋼瓶（氣體 供給源)69、70。氣體鋼瓶69、70則經單向閥71、72及供給 閥73、74而於末端連接有設有可與工件搬運台車51之接收 聯結器67連接之公型之供給聯結器75之供給流路76。供給 流路7 6則經排氣閥7 7而連接有排氣流路7 8。排氣流路7 8設 16 201113456 有單向閥79 ’ 一端呈大氣開放狀態。供給聯結 〇裔/ 5保持成 可藉氣缸80而昇降之狀態’並依循氣紅80之動作而對接收 聯結器67進行結合及分離。 又，封入站54設有可藉氣缸81之昇降而卡止工件搬運 台車51之定位承載構件68之定位構件82。 本實施例之平面顯示面板製造設備中，工件搬運△車 51停止於封入站54後，對接收聯結器67結合供給聯結器 75，而對接收流路65連接供給流路76，並自氣體鋼瓶的或 70經需要流路63朝分配控制裝置62供給發光氣體。分配控 制裝置62則依循程式而朝各工作頭6〇供給發光氣體，並朝 玻璃基板p封入發光氣體。以下，即詳述朝需要流路63自氣 ' 體鋼瓶69供給發光氣體時之步驟。 ' 首先，在接收流路65之接收閥64、供給流路76之供給 間73、74及排氣閥77已封閉之狀態下，藉氣缸如使供給: 結器75與接收聯結器67結合，並連接接收流路幻與供給流 路76。藉此，接收流路65及供給流路76之内部空間即形成 與大氣隔離之封閉空間。此時，接收流路65及供給流路％ 之内部空間已存在大氣壓（〇.1MPa)2空氣。 接著，開放可對氣體鋼瓶69連接供給流路76之供給閥 73。發光氣體則自氣體鋼瓶69以諸w8Mpa之壓力進行供 給。如此，接收流路65及供給流路76之内部空間將形成充 滿分壓(UMPa之空氣與分壓7.9MPa之發光氣體之狀態。 即，接收流路65及供給流路76之内部之發光氣體中混入有 1.25%之空氣。在接收流路65及供給流路％之内壓足以達到 17 201113456 8MPa之時間内，將供給閥73維持在開放狀態後，再度封閉 供給閥73而自氣體鋼瓶69、70分離接收流路65及供給流路 76。在此，於接收流路65及供給流路76之内壓上昇至8Mpa 後，單向閥71可避免接收流路65及供給流路76内部之空氣 逆流至氣體鋼瓶69側。 其次，在接收閥64及供給閥73、74之封閉狀態下，開 放排氣閥77，接收流路65及供給流路76之内部之發光氣體 即藉本身之壓力而進行排氣。若僅在接收流路65及供給流 路76之内壓大致降低至大氣壓之時間内開放排氣閥77，則 再度封閉排氣閥77。此時，接收流路65及供給流路76之内 部空間内將殘留混入有1.25%之空氣之大氣壓之發光氣 體。此時，接收流路65及供給流路76中之空氣之分壓將為 1.25kPa。又，在此，單向閥79亦可避免大氣逆流而進入供 給流路76。 本發明中，將開放供給閥73而朝接收流路65及供給流 路76供給發光氣體後，再開放排氣閥77而將接收流路65及 供給流路76内部之發光氣體排出之一連串處理稱為排空處 理。本實施例中，係重複3次該排空處理，而將混入於接收 流路6 5及供給流路7 6之内部之發光氣體中之空氣之分壓降 至0.2Pa。 3次之排空處理後，一旦再度開放供給閥73而朝接收流 路65及供給流路76之内部空間供給發光氣體，則接收流路 65及供給流路76内部之發光氣體之空氣之混入率約為 0.024PPM。如上所述，重複排空處理而提高接收流路&及 201113456 供給流路76内部之發光氣體之純度後，再開放接收閥64而 朝需要流路63供給發光氣體，即可避免朝玻璃基板p供給空 氣混入容許限度以上後之發光氣體而產生瑕疵品。 接收流路65及供給流路76之内部之發光氣體内混入之 空氣之濃度（或分壓）每經1次排空處理，將按與來自氣體鋼 瓶69之發光氣體之供給壓力（8Mpa)及排氣流路78之壓力 (大氣壓）之比率（〇.1/8)相等之比例而減少。本實施例中，所 要求的發光氣體之純度不同時，則加以因應而調整排空處 理之重複次數即可。 又，封入站54雖藉定位構件82而卡止承載構件68以進 行工件搬運台車51之定位，但進而宜使接收聯結器67或供 - 給聯結器75具備自動對位機構。又，接收聯結器67及供給 - 聯結器75亦可在任何位置上設成任何形態’舉例言之，亦 可朝橫向支持接收聯結器67於工件搬運台車5丨之側面上。 第7圖係顯示本發明第5實施例之平面顯示面板製造設 備之工件搬運台車513及封入站54a者。另，以下之說明中， 將就與先前已說明之實施例相同之元件附以相同標號，而 省略重複之說明。 本實施例之封入站54a中’排氣流路78於末端設有真空 泵（真空源)83 ’而可將排氣流路78内之氣體抽吸成真空至諸 如lkPa。另，本實施例之工件搬運台車51a之構造與第4實 施例完全相同。 本實施例中，為自封入站54a朝工件搬運台車51供給發 光氣體，而對接收流路65連接供給流路％後，進行上述之 201113456 排空處理之前，將在接收流路65之接收閥64及排氣閥77、 供給流路76之供給閥73、74之封閉狀態下，開放排氣閥77。 因此，藉真空泵83而就接收流路65及供給流路76之内部空 間進行真空排氣後，將再度封閉排氣閥77，而使接收流路 65及供給流路76之内部空間之空氣壓力形成約ikpa之狀 態。藉此，在初始之排空處理時，開放供給閥73而朝接收 抓路65及供給流路76供給發光氣體後之空氣混入率將大幅 降至 125PPM。 接續之排空處理之開放排氣閥7 7而排出接收流路6 5及 供給流路76内敎氣體之程序中，㈣真空細經排氣流 路78而將接收流路65及供給流路76抽吸成真空，故可使接 收流路65及供給流路76内部之空氣分壓降至〇 125pa。因 此，接著開放供給閥73而朝接收流路65及供給流路76供給 發光氣體後，接收流路65及供給流路76内部之發光氣體中 之空氣濃度已降至0.016PPM。故而，本實施例中，僅進 次排空處理，即可使接收流路65及供給流路76内部之發光 氣體中之空氣濃度降至與第4實施例中進行3次排空處理後 者大致相同之程度。 另，本實施例中’混入於接收流路65及供給流路76之 内部之發光氣體中之空氣濃度（或分壓），可藉排空處理前之 接收流路65及供給流路76之抽真空作業，而按與大氣壓及 真空泵8 3之真空壓之比相等之比例予以減少，並藉丨次排空 處理而按與來自氣體鋼瓶69之發光氣體之供給壓力（8Μρ&) 及排氣流路78之壓力即與真空泵83之真空壓（lkpa)之比 20 201113456 (0.001/8)相等之比例予以減少。其結果，本實施例中，亦 可減少排空處理時朝大氣放出之發光氣體之量。 另’不宜朝大氣放出發光氣體時，亦可朝排氣之處理 裝置排放真空泵83之排氣。 第8圖係顯不本發明第6實施例之平面顯示面板製造設 備之工件搬運台車51b及封入站54b者。本實施例中，排氣 閥7 7及排氣流路7 8係與接收流路6 5連接，而非供給流路7 6。 本實施例中，自封入站54b至工件搬運台車51b之發光 氣體之供給與第4貫施例相同，首先，重複進行開放供給閥 73或74而朝接收流路65及供給流路76供給發光氣體，再封 閉供給閥73、74然後開放排氣閥77，將接收流路65及供給 • 流路76之内壓減壓至大氣壓後再封閉排氣閥77之排空處 理。然後，開放供給閥73或74及接收閥64，而朝需要流路 63供給發光氣體，即可使供入需要流路63之發光氣體中之 空氣混入率降至所欲值以下。 第9圖係顯示本發明第7實施例之平面顯示面板製造設 備之工件搬運台車51 c及封入站5如者。本實施例中，排氣 流路78係與為經各工作頭6〇將玻璃基板p抽吸成真空而搭 載於工件搬運台車51之真空泵61之吸入口連接’而可將接 收流路65及供給流路76之内部空間抽吸成真空。另，封入 站54c之構造則與第6實施例之封入站54b相同。 本實施例中，與第5實施例相同，就接收流路65及供給 流路76之内部氣體進行真空排氣，而可藉較少次數之排空 處理，將混入於發光氣體之空氣濃度降低至所欲之程度以 21 201113456 下。當然，必要之排空處理之次數可視氣體鋼瓶69、70之 壓力及真空泵61之排氣能力而為不同之次數。 第10圖係顯示本發明第8實施例之平面顯示面板製造 設備之整體構造者。本實施例之封入站54d不具備氣體鋼 瓶，而無供給發光氣體之能力。本實施例中，代之以於裝 載站58之下游之軌條52上，設有可朝工件搬運台車5Id供給 發光氣體之供給站84。 第11圖則顯示本實施例之工件搬運台車51d及供給站 84之細節。供給站84包含與第4實施例相同構造之氣體鋼瓶 69、70、供給流路76及排氣流路78。本實施例之工件搬運 台車51 d則包含可朝分配控制裝置6 2供給發光氣體之2條需 要流路85、86，需要流路85、86則經接收閥87、88而分別 與接收流路65連接。又，需要流路85、86於調節器89、90 之上游設有緩衝槽91、92。 本實施例中，將於供給站84對需要流路85之緩衝槽91 儲備氣體鋼瓶69所供給之發光氣體，而對需要流路86之緩 衝槽92儲備氣體鋼瓶70所供給之發光氣體。此時，本實施 例中，亦於開放接收閥87、88而供給發光氣體前，重複與 第4實施例相同之排空處理，而使接收流路65及供給流路76 内部殘留之空氣或不作為目標使用之氣體鋼瓶70、69所供 給之發光氣體（不純氣體)之濃度充分降低。 又，一旦自氣體鋼瓶69、70供給發光氣體，則緩衝槽 91、92之内壓將轉為來自氣體鋼瓶69、70之供給壓力之 8MPa。工件搬運台車5Id則沿軌條52前進，一旦到達封入 22 201113456 站54d，則將儲備於緩衝槽91、92之發光氣體藉調節器89、 90而減壓至諸如0.2MPa，再朝已抽吸成真空之玻璃基板p 之内部空間加以供給。 工件搬運台車51d每繞行軌條52—周，均於供給站84供 入發光氣體，故緩衝槽91、92僅須儲備繞行軌條52一周期 間所消耗之量之發光氣體即可。舉例言之，若緩衝槽91、 92以對玻璃基板Ρ供給時之壓力之4〇倍之壓力儲備發光氣 體，則具備工件搬運台車51d可裝載之玻璃基板ρ之全部内 部空間之總和之40分之一以上之容積即可。 又，本實施例之構造亦可如第6實施例般，變形成將排 氣流路78與接收流路65連接，且，亦可如第5實施例及第7 . 實施例般，變形成自排氣流路78進行真空排氣。 - 進而，使用包含緩衝槽91、92之工件搬運台車51d時， 亦可不設可供工件搬運台車51d停止之封入站54d，而在工 件搬運台車51d移動於軌條52上之期間内，朝玻璃基板p供 給發光氣體。藉此，工件搬運台車51d在封入站54d之停止 時間將不致形成妨礙，故可輕易提昇平面顯示面板製造設 備整體之產量。 【圖式簡單說明】 第1圖係本發明第1實施例之平面顯示面板製造設備之 配置圖。 第2圖係第1圖之面板搬運台車及供給站之概略圖。 第3圖係本發明第2實施例之平面顯示面板製造設備之 面板搬運台車及供給站之概略圖。 23 201113456 第4圖係本發明第3實施例之平面顯示面板製造設備之 面板搬運台車及供給站之概略圖。 第5圖係本發明第4實施例之平面顯示面板製造設備之 配置圖。 第6圖係第5圖之面板搬運台車及封入站之概略圖。 第7圖係本發明第5實施例之平面顯示面板製造設備之 面板搬運台車及封入站之概略圖。 第8圖係本發明第6實施例之平面顯示面板製造設備之 面板搬運台車及封入站之概略圖。 第9圖係本發明第7實施例之平面顯示面板製造設備之 面板搬運台車及封入站之概略圖。 第10圖係本發明第8實施例之平面顯示面板製造設備 之配置圖。 第11圖係第10圖之面板搬運台車及供給站之概略圖 【主要元件符號說明】 la、lb…工件搬運台車 10···保持構件 軌條 11…工作頭 加熱爐 12…真空泵 封入站 13…氣體緩衝槽 封閉站 14…空氣緩衝槽 卸載站 15…分配控制裝置 拉出站 16、17…聯結器 裝載站 18、19…單向閥 9a、9b···供給站 20、2l···接收閥 2·· 3" 4.. 5._ 6·· 7·· 24 8" 201113456 22、23…接收流路 61…真空泵 24、25…調節器 62…分配控制裝置 26…定位承載構件 63…需要流路 27…氣體鋼瓶 64…接收閥 28…低露點空氣壓縮機 65···接收流路 29、30…供給流路 66…調節器 31、32…氣缸 67…接收聯結器 33、34…聯結器 68…定位承載構件 35…調節器 69、70…氣體鋼瓶 36、37…供給閥 71、72…單向閥 38…氣缸 73、74…供給閥 39…定位構件 75…供給聯結器 40、42…排氣閥 76···供給流路 4l···真空泵 77…排氣閥 51、51a〜51d".工件搬運台車 78…排氣流路 52…執條 79…單向閥 53…加熱爐 80…氣缸 54、.54a〜54d".封入站 81…氣缸 55…封閉站 82…定位構件 56…卸載站 83…真空泵 57…拉出站 84···供給站 58…裝載站 85、86…需要流路 59…保持構件 87、88…接收閥 60…工作頭 89、90…調節器 25 201113456 91、92…緩衝槽 R…執道 P…玻璃基板 T…輸送裝置 26201113456 _ VI. Description of the invention: [Ming 斤 属 彳 彳 X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X System and gas supply methods. C. The iiL name is good; 1 BACKGROUND OF THE INVENTION For example, when manufacturing a flat display panel, as disclosed in Patent Documents 1 to 3, a glass substrate (workpiece) capable of holding a plurality of sheets is used, and is passed through a heating furnace in a track. At the same time, the internal space of the glass substrate is sucked into a vacuum and the workpiece handling trolley of the luminescent gas is sealed. The workpiece handling trolley includes a cylinder for vacuuming a glass-based plate and a pneumatic chuck that can be expanded by air pressure to ensure airtightness, and is provided with an air compressor capable of manufacturing compressed air required for driving thereof. . If the pneumatic chuck is mixed with compressed air, it may damage its function and use compressed air with low dew point. Therefore, the workpiece handling trolley for manufacturing a flat display panel is equipped with an air compressor equipped with a super drier (low dew point dryer). As described above, when the air transport compressor is mounted on the workpiece transporting carriage, the space between the other and the mounted equipment is reduced, which may impair the maintainability. In addition, the cost of equipment will be greatly increased once the air compressor is installed in each workpiece handling trolley. Further, the super drier is constantly exhausting compressed air for exhaust gas, so that the compressed air is intermittently actuated to continuously consume electric power. In the workpiece inspection apparatus of Patent Document 4, the pallet to be transported is provided with a chuck for holding the workpiece by means of the 201113456 compressed air switch, and a coupling is provided on the flow path of the compressed air of the pallet. The workpiece inspection device can supply or discharge compressed air to switch the chuck to the coupling connection line at the stop position of the pallet. However, in the manufacturing apparatus (workpiece processing system) of the flat panel of Patent Documents 1 to 3, the workpiece conveyance carriage consumes compressed air while moving in the heating furnace, so that the workpiece inspection apparatus of Patent Document 4 cannot be used for the workpiece. The trolley is connected to the pipeline to supply compressed air from the outside. In addition, as disclosed in Patent Documents 1 to 3, the workpiece transporting trolley used in the manufacture of the flat display panel is also equipped with a cylinder for illuminating the gas into the panel. Once the residual pressure of the cylinder is lowered, the manpower is required to be replaced. Cylinders, but the manpower to replace large-weight cylinders is a great burden. The production equipment using multiple workpiece handling trolleys will require a large number of replacement cylinders, and a large number of cylinders must be managed. It can also be considered in the manufacturing equipment of the flat display panel. If the illuminating gas supply piping of the workpiece handling trolley is provided with a coupling And, when the coupling of the workpiece conveyance trolley is connected to the coupling of the external flow path and the illuminating gas is supplied to the workpiece conveyance trolley at a predetermined position in the equipment, it is not necessary to mount the cylinder for each workpiece conveyance trolley. However, when the coupler is used, the atmosphere in which the open portion of the coupler is present will remain in the interior of the coupler after being connected to the coupler, and will be mixed into the supplied luminescent gas. In the case of a flat display panel, even if only a small amount of air is mixed in the luminescent gas, the illuminating function is remarkably lowered, and the function of the product is impaired. [PRIOR ART DOCUMENT] [Patent Document 1] JP-A-2002-324486 (Patent Document 3) JP-A-2002-324830 (Patent Document 3) JP-A-2005-216830 (Patent Document 4) Japanese Laid-Open Patent Publication No. Hei 11-295060. The present invention aims to provide a workpiece handling trolley that is inexpensive and simple to use and can use the same. Workpiece processing system for workpiece handling trolley. Further, a gas supply system and a gas supply method capable of supplying a gas to an external system that can be detached from a required flow path for supplying a gas to a desired object, and avoiding the incorporation of air, and a gas supply method for the workpiece conveyance trolley that consumes gas can be provided. Avoid workpiece processing systems that incorporate air. Means for Solving the Problem In order to solve the above problems, the workpiece handling trolley of the present invention comprises: a machine that can consume gas; a buffer tank that can store a gas; a receiving flow path that supplies gas to the buffer tank; and a coupling Provided in the aforementioned receiving flow path. According to the above configuration, the gas supplied through the coupler is temporarily stored in the buffer tank, that is, the gas consumption for the period of transportation and processing of the guard. Further, since it is not necessary to provide a gas supply source such as a compressor and a gas cylinder for the workpiece transporting trolley, the equipment cost and the management cost are small, and the effective space for the workpiece handling trolley can be largely ensured. Further, by connecting the gas supply source via the coupler, the gas can be easily replenished, so that the gas can be frequently supplied for each cycle of the manufacturing process. Therefore, even if the capacity of the buffer tank is not large, it is not necessary to increase the gas pressure 201113456 to increase the amount of the reserve gas, so the buffer tank does not need to have a high financial pressure. Further, in the i-carriage trolley of the present invention, a regulator may be provided between the gas consuming machine and the buffer tank. According to the above configuration, the buffering pressure = pressure instead of the gas use pressure can be used to make the gas use pressure constant or in the above-mentioned receiving flow path. In the workpiece handling trolley of the present invention, a check valve and an on-off valve are provided. At least live. According to the above configuration, the buffer tank gas will not leak through the receiving flow path when the coupling is removed. The first state of the system is that the workpiece can be transported, and the workpiece handling trolley includes: the machine can accommodate the gas; the receiving flow path can be turned, and the workpiece processing trolley of the present invention circulates on the closed rail, the device can consume gas a buffer tank in which the gas is supplied from the buffer tank; and a coupler provided in the receiving flow path; and a stop supply position of the X-piece transport carriage on the strip, the supply passage for connecting the joint According to the above configuration, the supply station can store the gas in the buffer tank of each of the guard transporting trolleys to the consumption of the next stop at the supply station, so that the workpiece transporting trolley can consume the gas while moving. Further, the gas supply system of the present invention includes: a receiving flow path which is connected to a flow path of a supply gas to be supplied by a receiving valve, and is provided with a receiving coupling; a supply flow path, a supply_and a gas supply a source connection, and a supply coupler coupled to the receiving coupling; and an exhaust flow path connected to the receiving flow path or the supply flow path via an exhaust valve; 201113456 in the aforementioned receiving valve and the aforementioned supply valve In the closed state, the receiving coupling and the supply coupling are combined, and the supply valve is opened in a closed state of the exhaust valve, and gas is supplied into the receiving flow path and the supply flow path, and then the foregoing is closed. Supplying the valve, opening the exhaust valve, discharging the gas in the receiving flow path and the supply flow path, and then closing the exhaust valve for at least one time, and then opening the supply valve and the receiving valve, The aforementioned flow path is required to supply gas. According to the above configuration, the receiving flow path and the air in the supply flow path can be made in a ratio equal to the ratio of the pressure on the opposite side of the exhaust valve (such as atmospheric pressure) and the pressure of the gas source by one emptying process. The amount is reduced. In turn, the amount of air in the receiving flow path and the supply flow path can be reduced to a desired amount or less, so that the gas can be supplied without requiring a flow rate to be exceeded. The air of the limit. Moreover, in the gas supply system of the present invention, the exhaust flow path may be connected to the receiving flow path or the supply flow path and the vacuum source by the exhaust valve. According to the above configuration, the primary evacuation treatment can reduce the amount of air mixed in the receiving flow path and the supply flow path by a large ratio corresponding to the ratio of the vacuum pressure of the vacuum source and the pressure of the gas source, thereby reducing the amount of air mixed in the supply flow path. The number of times of emptying. Further, in the gas supply system of the present invention, the exhaust valve may be opened to discharge the gas in the receiving flow path and the supply flow path before the evacuation process. According to the above configuration, the air inside is evacuated to the vacuum before the gas is supplied to the receiving flow path and the supply flow path, so that the amount of the air mixed in 201113456 can be reduced to a desired limit or less. The exhaust gas is used to treat the total amount of gas discharged from the exhaust flow path, thereby reducing the loss of the supply gas. Further, the gas supply method of the present invention comprises the steps of: receiving a connection via a receiving valve with a supply line for supplying a gas to a target object, receiving a path of the device, and supplying a valve to the gas supply source Connected and provided with the supply channel of the supply dragon that can be combined with the above-mentioned pure county - - '(4)^ connection secret; in the closed state of the former secret (4) and the above supply: valve, 'in combination with the aforementioned receiving coupling The supply coupling is opened in the closed state of the exhaust valve, and the supply valve is opened to supply the gas to the receiving flow path and the supply flow path, and then the supply valve is closed to reopen the exhaust valve. The gas in the receiving flow path and the supply coffee path is discharged, and then the evacuation process of the exhaust valve is closed to at least one person, and the supply valve and the receiving valve are opened to supply the gas to the required flow path. According to the above method, the amount of air in the receiving flow path and the supply flow path can be reduced to a desired limit or less by repeating the emptying process, so that the supply of gas to the channel is required without being mixed into the limit amount. air. Further, the second aspect of the workpiece processing system of the present invention includes: a workpiece handling brake, a required device for containing a gas, a required flow path for supplying the 'α gas to the required device, a receiving valve, and the aforementioned need The flow path is connected and provided with a receiving flow path of the receiving coupler, and the workpiece can be held and bypassed on the closed rail and the supply station is disposed at the stop position of the workpiece handling trolley, and is supplied and read. Connected to the gas supply source, comprising a supply flow path provided with a supply coupling that can be coupled to the receiving coupling; the receiving flow path or the supply path for the 201113456 is connected to the exhaust flow path via an exhaust valve. In the closed state of the receiving valve and the supply valve, the receiving coupling and the supply coupling are coupled to open the supply valve in a closed state of the exhaust valve, and supply the supply valve to the receiving flow path and the supply flow path. Gas, then closing the supply valve, opening the exhaust valve to discharge the gas in the receiving flow path and the supply flow path, and then closing the exhaust valve The treatment is performed at least once, and the supply valve and the receiving valve are opened again to supply the gas to the required flow path. According to the above configuration, the gas can be supplied from the supply station to the flow path of the bypass workpiece transporting trolley. At this time, the evacuation process is performed, and the air that has entered the receiving flow path and the supply flow path is discharged by the coupling, so that the supplied gas does not mix with the air. Further, in the workpiece processing system of the present invention, the required flow path may be provided with a gas storage tank capable of storing a gas. According to the above configuration, the workpiece handling cart can be moved at a position away from the supply station while consuming gas. Advantageous Effects of Invention According to the present invention, since a buffer tank that can store a gas is provided in a workpiece transporting carriage, and a gas can be frequently supplied to the buffer tank by an easy-to-unload coupling, the workpiece transporting cart does not need to be equipped with a gas such as a compressor. And a high-pressure gas supply source such as a gas cylinder. Therefore, the equipment cost and running cost of the workpiece processing system can be reduced. Further, by repeating the evacuation process of exhausting the air in the receiving flow path and the supply flow path by the coupler and discharging the residual air, the receiving flow path and the supply flow path can be left in 201113456. The amount of air is reduced to below the desired limit, and the gas supply source from the outside of the detachable supply supplies the gas to the required flow path, and does not mix the required amount of air into the flow path. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a configuration diagram of a flat display panel manufacturing apparatus according to a first embodiment of the present invention. Fig. 2 is a schematic view of the panel transporting trolley and the supply station of Fig. 1. Fig. 3 is a schematic view showing a panel transporting trolley and a supply station of a flat display panel manufacturing apparatus according to a second embodiment of the present invention. Fig. 4 is a schematic view showing a panel transporting trolley and a supply station of a flat display panel manufacturing apparatus according to a third embodiment of the present invention. Fig. 5 is a configuration diagram of a flat display panel manufacturing apparatus of a fourth embodiment of the present invention. Figure 6 is a schematic view of the panel handling trolley and the sealing station of Figure 5. Fig. 7 is a schematic view showing a panel transporting trolley and a sealing station of a flat display panel manufacturing apparatus according to a fifth embodiment of the present invention. Fig. 8 is a schematic view showing a panel transporting trolley and a sealing station of a flat display panel manufacturing apparatus according to a sixth embodiment of the present invention. Fig. 9 is a schematic view showing a panel transporting trolley and a sealing station of a flat display panel manufacturing apparatus according to a seventh embodiment of the present invention. Fig. 10 is a configuration diagram of a flat display panel manufacturing apparatus of an eighth embodiment of the present invention. Figure 11 is a schematic view of the panel transport trolley and supply station of Figure 10. C. Embodiments of the present invention will be described in detail with reference to the accompanying drawings. Fig. 1 is a configuration of a flat display panel manufacturing apparatus (workpiece processing system) according to a first embodiment of the present invention. The flat display panel manufacturing equipment towel can be loaded with a glass substrate (workpiece) for a flat display panel*. The moving plurality of guard transport trolleys will be cyclically moved on the closed rail 2. The rail 2 i 3 knife is not connected to the path and the loop formed by the linear track R. At the ends of the way and the circuit, the workpiece handling trolley can be transported from the road to the circuit or (10) to the way (4). The majority of the path of the rail 2 extends over the heating furnace 3 which can heat the glass substrate and draw the internal space into a vacuum. Behind the heating furnace 3, there is provided a sealing station 4 which can enclose a luminescent gas to the glass substrate. The circuit of the rail 2 is provided with a closed station 5 for sealing the exhaust pipe for the vacuum exhaust gas and the illuminating gas sealed flow path of the glass substrate, and an unloading station for taking out the surface substrate from the workpiece handling trolley 1 6. The workpiece handling can be pulled out for maintenance. ##1·^Outbound station 7, the loading station 8 that can load the glass substrate on the transporting carriage, and the supply station 9 that can supply the illuminating gas and the compressed air to the workpiece transporting carriage 1. Fig. 2 shows a simplified state of the workpiece transporting carriage 1 which does not stop at the supply station 9. The workpiece transporting carriage 1 is provided with a plurality of holding members 1G capable of holding the glass substrate P in the accommodating space of the upper portion, and includes chucks for sucking the glass substrate p into a vacuum to seal the human luminescent gas and to be operated by the air dust. A plurality of working heads of a cylinder (a machine that consumes gas) 11. Further, in the mechanical space of the lower part of the workpiece handling trolley 1, a vacuum pump 12 capable of pumping the head 1111 into a vacuum, a gas buffer tank 13 for storing the luminescent gas, and an air buffer tank 14 for storing compressed air are provided. The distribution control device 15 of the vacuum pump 12, the gas buffer tank 13, and the air buffer tank 14 can be connected to the components of the working head 11 in accordance with a predetermined program. The gas buffer tank 13 and the air buffer tank 14 are provided with female couplings 16, 17 at the ends, and the check valves 18, 19 and the receiving flow paths 22, 23 provided with the receiving valves 2, 21 are connected. The couplings 16, 17 are fixed downward on the bottom surface of the workpiece handling carriage 1. Further, the gas buffer tank 13 and the air buffer tank 14 supply gas and compressed air to the distribution control device 15 via the regulators 24 and 25, respectively. The check valves 18 and 19 and the receiving valves 20 and 21 prevent leakage of compressed air and illuminating gas from the gas buffer tank 13 and the air buffer tank 14 through the receiving passages 22 and 23, and if any sealing ability is sufficient, any one of them is used. Yes. Further, the one-way valves 18, 19 and the receiving valves 20, 21 may be provided inside the couplers 16, 17. Further, the workpiece transporting carriage 1 is provided with a positioning bearing member 26 composed of two rotating wheels on the bottom surface. The positioning carrier member 26 is connected to a carrying rod (not shown), and also assists in driving the workpiece handling cart 1. The supply station 9 includes a gas cylinder 27 and a low dew point air compressor 28' for illuminating gas, and is provided with a supply of luminescent gas and compression from the gas cylinder 27 and the low dew point air compressor 28 to the receiving flow paths 22, 23 of the workpiece handling trolley 1. Air supply flow paths 29, 30. The leading ends of the supply passages 29, 30 are provided with male couplings 33, 34 which are movable up and down by the cylinders 31, 32 and combined with the couplings 16, 17. Further, the gas cylinder 27 and the low dew point air compressor 28 may be disposed away from the supply station 9, and the illuminating gas and the compressed air may be supplied to the supply station 9 by the piping. 12 201113456 The supply flow path 29 is provided with a regulator 35 and a supply valve 36, and the illuminating gas of the pre-pressure is supplied to the receiving flow path 22 via the supply flow path 29 only after the coupler 16 is coupled to the coupler 33. The supply flow path 30 is provided with a supply valve 37, and the compressed air is supplied to the receiving flow path 23 only after the coupler 17 is coupled to the coupler 34. Further, the supply station 9 is provided with a positioning member 39 which can be raised and lowered by the air cylinder 38 to lock the positioning carrier member 26 of the workpiece handling carriage 1. In the flat display panel manufacturing apparatus of the present embodiment, the workpiece transporting carriage 1 is wound around the rail 2 from the side of the rail, and stops at the supply station 9, and couples the couplings 33, 34 to the couplings 16, 17 to the receiving flow path. 22, 23 are connected to the supply flow paths 29, 30, and supply the luminescent gas and the compressed air to the gas buffer tank 13 and the air buffer tank 14, respectively, at a predetermined pressure. However, it is also possible to provide a plurality of supply stations 9 for the one-week rail 2, and to supply the compressed air to the air buffer tank 14 times. Further, when the consumption of the compressed air and the luminescent gas is small, the compressed air and the luminescent gas may be replenished for several weeks. In order to supply the luminescent gas to the gas buffer tank 13 of the workpiece transporting carriage 1, and the coupler 16 is connected to the coupler 16, the air is sealed between the receiving valve 20 and the supply valve 29 of the receiving flow path 29 and the supply valve 36. When the receiving valve 2A and the supply valve 36 are opened to supply the luminescent gas to the gas buffer tank 13, the air flows into the gas buffer tank 13, and is mixed with the supplied luminescent gas in the gas buffer tank 13. Therefore, it is preferable to reduce the space between the receiving valve 2 and the supply valve 29 of the receiving flow path 22 and the supply flow path 29 so as to 'inflow into the receiving flow path 22 and the supply flow path with respect to the illuminating gas which can be supplied once. The amount of air in 29 is the smallest. Further, the coupler 16 and the coupler 33 are preferably provided with a valve portion therein, and after the coupling 13 201113456 is separated from the joint 1133, the air is introduced into the person receiving flow path 22 and the supply flow path 29. Further, the supply station 9 locks the carrier member 26 by the positioning member 39 to position the workpiece transporting carriage 1, but it is preferable to provide the couplings 16, 17 or the couplings 33, 34 with an automatic alignment mechanism. The gas buffer tank 13 and the air buffer tank 14 may be supplied to the workpiece transporting carriage 1 by means of the amount of luminescent gas and compressed air consumed in the manufacturing process of the display panel of the rails 2 during the period. Therefore, the gas buffer tank 13 and the air buffer tank 14 may not be larger or higher. Further, the gas buffer tank 13 and the air buffer tank 14 do not require an electric motor to supply compressed air and illuminating gas, so that the workpiece handling cart 1 consumes less power. Further, in the workpiece transporting carriage 1, since the gas buffering tank 13 and the air cushioning tank 14 do not have a power mechanism, the maintenance frequency may not be high. Fig. 3 is a view showing a workpiece transporting carriage la and a supply station 9a of a flat display panel manufacturing apparatus according to a second embodiment of the present invention. The workpiece transporting carriage 1a of the present embodiment is different from the first embodiment in that the receiving passage 22 of the gas buffering tank 13 is connected to the vacuum pump 12 via the exhaust valve 40. Here, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. In the present embodiment, when the illuminating gas is supplied to the gas buffer tank 13 of the workpiece transporting carriage 1, the coupling valve 33 is connected to the coupling 16, and the receiving valve 20 of the receiving flow path 22 and the supply valve 36 of the supply flow path 29 are opened. Previously, the exhaust valve 40 is opened first, and the air inside the receiving flow path 22 is discharged by the vacuum pump 12 to prevent air from being mixed into the gas buffer tank 13. Further, Fig. 4 shows a flat display panel 201113456 of the third embodiment of the present invention, and a workpiece transporting carriage lb and a supply station 9b for manufacturing equipment. In the configuration of the present embodiment, the vacuum pump 41 is provided in the supply station 9b, and the point where the supply flow path 29 is connected to the true fruit 41 via the exhaust valve 42 is different from that of the first embodiment. Here, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will not be repeated. Similarly to the second embodiment, the vacuum fruit 41 is connected to the coupling 33 of the supply flow path 29 to the coupling 16 of the receiving flow path 22, and then the receiving valve 20 and the supply valve 36 are opened to supply the luminescent gas to the gas buffer tank 13. Previously, the exhaust valve 42 was opened to draw the inside of the receiving flow path 22 and the supply flow path 29 into a vacuum to prevent air from being mixed into the luminescent gas. This embodiment differs from the second embodiment in that the inside of the receiving flow path 22 and the supply flow path 29 is evacuated, and the vacuum pump 12' provided in each of the workpiece transporting carts lb is not used. The vacuum pump 41 can be realized. The high vacuum prevents the air from being mixed into the luminescent gas. Fig. 5 is a configuration diagram of a flat display panel manufacturing apparatus (workpiece processing system) according to a fourth embodiment of the present invention. The flat display panel manufacturing apparatus circulates and moves the plurality of workpiece transport carriages 51 moving on the closed rails 52 by moving the glass substrates (workpieces) for the flat display panel. The rail 52 includes an outward path and a return path which are respectively constituted by linear rails r, and a conveying device which is provided at both ends of the outward path and the circuit to move the workpiece handling carriage 51 from the way to the circuit or the circuit to the way. Most of the outward path of the rail 52 extends into the heating furnace 53 which can heat the glass substrate and draw the internal space into a vacuum. A sealing station 54 for enclosing the luminescent gas to the glass substrate is provided behind the heating furnace 53. The circuit of the rail 52 is provided with an exhaust gas 15 for sealing the flow path for vacuum evacuation and luminescent gas sealing of the glass substrate. The closed station 55 of the 201113456 tube can be taken out from the workpiece handling trolley 51. The unloading station 56, the drawing station 57 that can pull out the workpiece handling cart 51 for maintenance, and the loading station that can load the glass substrate to the workpiece transporting cart 51 are shown. FIG. 6 shows the workpiece handling cart 51 stopped at the sealing station 54. Simplify the situation. The workpiece transport carriage 51 is provided with a plurality of holding members 59 for holding the glass substrate P in the upper accommodation space, and the glass substrates can be separately provided. a plurality of working heads 60° which are vacuumed to enclose the luminescent gas, and a workpiece handling trolley 51 in the lower mechanical space, a vacuum pump 61 for drawing the working head 60 into a vacuum, and a program for following the schedule On the other hand, each of the working heads 60 is supplied with a plurality of valve portions of the luminescent gas, and is integrated with the working head 60 to consume the illuminating gas distribution control device (required device) 62. The distribution control device 62 is connected to the required flow path 63 to which the luminescent gas can be supplied. The required flow path 63 is connected to the detachable receiving flow path 65 via the receiving valve 64. The required flow path 63 is provided with a regulator 66 for decompressing the luminescent gas, and the receiving flow path 65 is provided with a female receiving coupling 67 at the end. The receiving coupler 67 is fixed downward on the bottom surface of the workpiece handling carriage 51. Further, the workpiece transporting carriage 51 is provided with a positioning bearing member 68 composed of two rotating wheels on the bottom surface. The positioning carrier member 68 is connected to a carrying rod (not shown) and also assists in driving the workpiece handling cart 51. The sealing station 54 contains gas cylinders (gas supply sources) 69, 70 of different types of luminescent gases. The gas cylinders 69, 70 are connected at their ends to the supply flow path of the male supply coupling 75 which is connectable to the receiving coupling 67 of the workpiece handling carriage 51 via the check valves 71, 72 and the supply valves 73, 74. 76. The supply flow path 76 is connected to the exhaust flow path 78 via the exhaust valve 77. Exhaust flow path 7 8 set 16 201113456 There is a check valve 79 ′ one end is open to the atmosphere. The supply coupling 〇 / 5 is maintained in a state in which the cylinder 80 can be moved up and down </ RTI> and the receiving coupler 67 is combined and separated in accordance with the action of the blush 80. Further, the sealing station 54 is provided with a positioning member 82 that can lock the positioning carrier member 68 of the workpiece handling carriage 51 by the elevation of the cylinder 81. In the flat display panel manufacturing apparatus of the present embodiment, after the workpiece handling XY vehicle 51 is stopped at the sealing station 54, the coupling coupler 75 is supplied to the coupling coupler 67, and the supply flow path 76 is connected to the receiving flow path 65, and the gas cylinder is connected to the gas cylinder. The 70 or 70 is required to supply the luminescent gas to the distribution control device 62 via the flow path 63. The distribution control device 62 supplies the luminescent gas to each of the working heads 6 in accordance with the program, and encloses the luminescent gas toward the glass substrate p. Hereinafter, the procedure for supplying the luminescent gas from the gas cylinder 69 to the required flow path 63 will be described in detail. First, in a state where the receiving valve 64 of the receiving flow path 65, the supply spaces 73, 74 of the supply flow path 76, and the exhaust valve 77 are closed, the supply of the knotter 75 is combined with the receiving coupler 67 by the cylinder. And the receiving flow path magic and supply flow path 76 is connected. Thereby, the internal space of the receiving flow path 65 and the supply flow path 76 forms a closed space which is isolated from the atmosphere. At this time, there is already atmospheric pressure in the internal space of the receiving flow path 65 and the supply flow path % (〇. 1 MPa) 2 air. Next, the supply valve 73 for connecting the supply flow path 76 to the gas cylinder 69 is opened. The luminescent gas is supplied from the gas cylinder 69 at a pressure of w8 MPa. Thus, the internal space of the receiving flow path 65 and the supply flow path 76 will form a full charge (UMPa air and partial pressure 7. 9MPa luminescent gas state. That is, the luminescent gas inside the receiving channel 65 and the supply channel 76 is mixed. 25% of the air. After the internal pressure of the receiving flow path 65 and the supply flow path % is sufficient to reach 17 201113456 8 MPa, the supply valve 73 is maintained in an open state, and the supply valve 73 is closed again to separate the receiving flow path 65 from the gas cylinders 69 and 70. The flow path 76 is supplied. Here, after the internal pressure of the receiving flow path 65 and the supply flow path 76 rises to 8 MPa, the check valve 71 can prevent the air inside the receiving flow path 65 and the supply flow path 76 from flowing back to the side of the gas cylinder 69. Next, in the closed state of the receiving valve 64 and the supply valves 73, 74, the exhaust valve 77 is opened, and the illuminating gas inside the receiving flow path 65 and the supply flow path 76 is exhausted by the pressure of itself. When the exhaust valve 77 is opened only when the internal pressure of the receiving flow path 65 and the supply flow path 76 is substantially lowered to the atmospheric pressure, the exhaust valve 77 is closed again. At this time, the inner space of the receiving flow path 65 and the supply flow path 76 is mixed with 1. 25% of the atmospheric pressure of the air. At this time, the partial pressure of the air in the receiving flow path 65 and the supply flow path 76 will be 1. 25kPa. Further, here, the check valve 79 can also prevent the atmosphere from flowing back into the supply flow path 76. In the present invention, after the supply valve 73 is opened and the illuminating gas is supplied to the receiving channel 65 and the supply channel 76, the exhaust valve 77 is opened, and the illuminating gas in the receiving channel 65 and the supply channel 76 is discharged in series. It is called emptying processing. In this embodiment, the evacuation process is repeated three times, and the partial pressure of the air mixed in the luminescent gas inside the receiving flow path 65 and the supply flow path 7.6 is reduced to 0. 2Pa. After the venting process is performed three times, the illuminating gas is supplied to the internal space of the receiving channel 65 and the supply channel 76, and the air of the illuminating gas inside the receiving channel 65 and the supply channel 76 is mixed. The rate is about 0. 024PPM. As described above, the evacuation process is repeated to increase the purity of the luminescent gas in the receiving channel & and the 201113456 supply channel 76, and then the receiving valve 64 is opened to supply the luminescent gas to the required channel 63, thereby avoiding the glass substrate. The p-supply air is mixed with the luminescent gas after the allowable limit or more to produce a defective product. The concentration (or partial pressure) of the air mixed in the illuminating gas inside the receiving flow path 65 and the supply flow path 76 is subjected to the emptying process, and the supply pressure (8 MPa) of the luminescent gas from the gas cylinder 69 is The ratio of the pressure (atmospheric pressure) of the exhaust flow path 78 (〇. 1/8) Reduced by equal proportions. In the present embodiment, when the purity of the required luminescent gas is different, the number of repetitions of the venting treatment may be adjusted accordingly. Further, although the sealing station 54 locks the carrier member 68 by the positioning member 82 to position the workpiece transport carriage 51, it is preferable that the receiving coupler 67 or the feed coupling 75 be provided with an automatic registration mechanism. Further, the receiving coupler 67 and the supply-coupler 75 may be provided in any form at any position. For example, the receiving coupling 67 may be supported laterally on the side of the workpiece handling carriage 5''. Fig. 7 is a view showing a workpiece transporting carriage 513 and a sealing station 54a of a flat display panel manufacturing apparatus according to a fifth embodiment of the present invention. In the following description, the same components as those of the previously described embodiments are denoted by the same reference numerals, and the description thereof will be omitted. In the sealing station 54a of the present embodiment, the exhaust gas flow path 78 is provided with a vacuum pump (vacuum source) 83' at the end to draw the gas in the exhaust gas flow path 78 to a vacuum of, for example, 1 kPa. Further, the configuration of the workpiece transport carriage 51a of the present embodiment is completely the same as that of the fourth embodiment. In the present embodiment, the illuminating gas is supplied to the workpiece transporting carriage 51 by the self-sealing inbound station 54a, and the supply flow path is connected to the receiving flow path 65, and then the receiving valve at the receiving flow path 65 is performed before the above-described 201113456 emptying process. In the closed state of the exhaust valve 77 and the supply valves 73 and 74 of the supply flow path 76, the exhaust valve 77 is opened. Therefore, after evacuating the internal space of the receiving flow path 65 and the supply flow path 76 by the vacuum pump 83, the exhaust valve 77 is closed again, and the air pressure of the internal space of the receiving flow path 65 and the supply flow path 76 is made. Form a state of about ikpa. As a result, at the time of the initial evacuation process, the air supply rate after the supply valve 73 is opened and the illuminating gas is supplied to the receiving grip 65 and the supply passage 76 is greatly reduced to 125 PPM. In the subsequent process of discharging the open exhaust valve 7 7 and discharging the gas in the receiving flow path 65 and the supply flow path 76, (4) vacuuming the exhaust flow path 78 to receive the flow path 65 and the supply flow path. Since the suction is 76, the partial pressure of the air inside the receiving flow path 65 and the supply flow path 76 can be reduced to 〇125pa. Therefore, after the supply valve 73 is opened and the luminescent gas is supplied to the receiving channel 65 and the supply channel 76, the concentration of the luminescent gas in the receiving channel 65 and the supply channel 76 has dropped to zero. 016PPM. Therefore, in the present embodiment, the air concentration in the illuminating gas inside the receiving flow path 65 and the supply flow path 76 can be reduced to the third venting process in the fourth embodiment only by performing the emptying process. The same degree. Further, in the present embodiment, the air concentration (or partial pressure) of the luminescent gas mixed in the inside of the receiving flow path 65 and the supply flow path 76 can be received by the receiving flow path 65 and the supply flow path 76 before the emptying process. The vacuuming operation is reduced by a ratio equal to the ratio of the atmospheric pressure and the vacuum pressure of the vacuum pump 83, and the supply pressure (8Μρ&) and the exhaust gas from the gas cylinder 69 are exhausted by the evacuation process. The ratio of the pressure of the flow path 78 to the vacuum pressure (lkpa) of the vacuum pump 83 is 20 201113456 (0. 001/8) The proportion of equals is reduced. As a result, in the present embodiment, the amount of the luminescent gas emitted to the atmosphere during the evacuation treatment can also be reduced. Further, when it is not appropriate to discharge the luminescent gas into the atmosphere, the exhaust of the vacuum pump 83 may be discharged toward the exhaust gas treatment device. Fig. 8 is a view showing a workpiece transporting carriage 51b and a sealing station 54b of the flat display panel manufacturing apparatus of the sixth embodiment of the present invention. In the present embodiment, the exhaust valve 7 7 and the exhaust flow path 78 are connected to the receiving flow path 65 instead of the supply flow path 76. In the present embodiment, the supply of the luminescent gas from the self-sealing station 54b to the workpiece transporting carriage 51b is the same as that of the fourth embodiment. First, the supply valve 73 or 74 is repeatedly opened to supply the light to the receiving channel 65 and the supply channel 76. The gas is reclosed to the supply valves 73 and 74, and then the exhaust valve 77 is opened, and the internal pressure of the receiving flow path 65 and the supply/flow path 76 is reduced to atmospheric pressure, and then the evacuation process of the exhaust valve 77 is closed. Then, the supply valve 73 or 74 and the receiving valve 64 are opened, and the illuminating gas is supplied to the required flow path 63, so that the air mixing rate of the luminescent gas supplied to the required flow path 63 can be reduced to a desired value or lower. Fig. 9 is a view showing a workpiece transporting carriage 51c and a sealing station 5 of a flat display panel manufacturing apparatus according to a seventh embodiment of the present invention. In the present embodiment, the exhaust flow path 78 is connected to the suction port of the vacuum pump 61 mounted on the workpiece transport carriage 51 via the respective working heads 6 to vacuum the glass substrate p, and the receiving flow path 65 and the receiving flow path 65 can be The internal space of the supply flow path 76 is drawn into a vacuum. Further, the structure of the sealing station 54c is the same as that of the sealing station 54b of the sixth embodiment. In the present embodiment, as in the fifth embodiment, the internal gas of the receiving flow path 65 and the supply flow path 76 is evacuated, and the air concentration mixed in the luminescent gas can be lowered by a small number of evacuation processes. The degree to the desired level is 21 201113456. Of course, the number of necessary emptying processes may be different depending on the pressure of the gas cylinders 69, 70 and the exhaust capacity of the vacuum pump 61. Fig. 10 is a view showing the overall construction of a flat display panel manufacturing apparatus of an eighth embodiment of the present invention. The sealing station 54d of this embodiment does not have a gas cylinder and has no ability to supply luminescent gas. In the present embodiment, instead of the rail 52 downstream of the loading station 58, a supply station 84 for supplying illuminating gas to the workpiece transporting carriage 5Id is provided. Fig. 11 shows details of the workpiece handling carriage 51d and the supply station 84 of the present embodiment. The supply station 84 includes gas cylinders 69, 70, a supply flow path 76, and an exhaust flow path 78 having the same structure as that of the fourth embodiment. The workpiece transport carriage 51d of the present embodiment includes two required flow paths 85, 86 that can supply the illuminating gas to the distribution control device 62, and the required flow paths 85, 86 are respectively connected to the receiving flow path via the receiving valves 87, 88. 65 connections. Further, the flow paths 85 and 86 are required to be provided with buffer grooves 91 and 92 upstream of the regulators 89 and 90. In the present embodiment, the supply station 84 stores the luminescent gas supplied from the gas cylinder 69 for the buffer tank 91 requiring the flow path 85, and stores the luminescent gas supplied from the gas cylinder 70 for the buffer tank 92 requiring the flow path 86. At this time, in the present embodiment, the same evacuation process as in the fourth embodiment is repeated until the illuminating gas is supplied by opening the receiving valves 87 and 88, and the air remaining in the receiving flow path 65 and the supply flow path 76 or The concentration of the luminescent gas (impurity gas) supplied from the gas cylinders 70, 69 which are not used as targets is sufficiently lowered. Further, when the luminescent gas is supplied from the gas cylinders 69, 70, the internal pressure of the buffer tanks 91, 92 is converted to 8 MPa from the supply pressure of the gas cylinders 69, 70. The workpiece handling trolley 5Id advances along the rail 52. Once it reaches the enclosure 22 201113456 station 54d, the luminescent gas stored in the buffer tanks 91, 92 is decompressed to a temperature such as 0 by the regulators 89, 90. 2 MPa is supplied to the internal space of the glass substrate p which has been vacuumed. The workpiece transport carriage 51d is supplied with illuminating gas at the supply station 84 every winding rail 52-week, so that the buffer tanks 91, 92 only need to store the amount of luminescent gas that is consumed in a cycle around the rail 52. For example, when the buffer grooves 91 and 92 store the luminescent gas at a pressure four times the pressure at which the glass substrate Ρ is supplied, the total internal space of the glass substrate ρ that can be loaded by the workpiece transport carriage 51d is 40 minutes. More than one volume can be used. Further, the structure of the present embodiment can be changed to connect the exhaust gas flow path 78 to the receiving flow path 65 as in the sixth embodiment, and can also be as in the fifth embodiment and the seventh embodiment. As in the embodiment, it is formed into a vacuum exhaust from the exhaust flow path 78. Further, when the workpiece transporting carriage 51d including the buffer tanks 91 and 92 is used, the sealing station 54d for stopping the workpiece transporting carriage 51d may not be provided, and the workpiece transporting carriage 51d may be moved toward the glass during the movement of the workpiece transporting carriage 51d. The substrate p is supplied with a luminescent gas. Thereby, the stop time of the workpiece transport carriage 51d at the sealing station 54d is not hindered, so that the overall output of the flat display panel manufacturing apparatus can be easily improved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a configuration diagram of a flat display panel manufacturing apparatus according to a first embodiment of the present invention. Fig. 2 is a schematic view of the panel transporting trolley and the supply station of Fig. 1. Fig. 3 is a schematic view showing a panel transporting trolley and a supply station of a flat display panel manufacturing apparatus according to a second embodiment of the present invention. 23 201113456 Fig. 4 is a schematic view showing a panel transporting trolley and a supply station of a flat display panel manufacturing apparatus according to a third embodiment of the present invention. Fig. 5 is a configuration diagram of a flat display panel manufacturing apparatus of a fourth embodiment of the present invention. Figure 6 is a schematic view of the panel handling trolley and the sealing station of Figure 5. Fig. 7 is a schematic view showing a panel transporting trolley and a sealing station of a flat display panel manufacturing apparatus according to a fifth embodiment of the present invention. Fig. 8 is a schematic view showing a panel transporting trolley and a sealing station of a flat display panel manufacturing apparatus according to a sixth embodiment of the present invention. Fig. 9 is a schematic view showing a panel transporting trolley and a sealing station of a flat display panel manufacturing apparatus according to a seventh embodiment of the present invention. Fig. 10 is a configuration diagram of a flat display panel manufacturing apparatus of an eighth embodiment of the present invention. Fig. 11 is a schematic view of the panel transporting trolley and the supply station of Fig. 10 [Description of main components] la, lb... workpiece transporting carriage 10···maintaining member rails 11...working head heating furnace 12...vacuum pump sealing station 13 ...gas buffer tank closing station 14...air buffer tank unloading station 15...distribution control device pull-out station 16,17...coupler loading station 18,19...check valve 9a, 9b···supply station 20, 2l··· Receiving valve 2·· 3" 4. . 5. _ 6·· 7·· 24 8" 201113456 22, 23...receiving flow path 61...vacuum pump 24,25...regulator 62...distribution control device 26...positioning bearing member 63...requires flow path 27...gas cylinder 64...receiving valve 28...low dew point air compressor 65··receiving flow path 29,30...supply flow path 66...regulator 31,32...cylinder 67...receiving coupler 33,34...coupling 68...positioning bearing member 35...regulator 69, 70... gas cylinders 36, 37... supply valves 71, 72... check valves 38... cylinders 73, 74... supply valves 39... positioning members 75... supply couplings 40, 42... exhaust valves 76··· supply flow Road 4l···vacuum pump 77...exhaust valve 51, 51a~51d". Workpiece handling trolley 78...Exhaust flow path 52...Performance bar 79...One-way valve 53...Heating furnace 80...Cylinder 54. 54a~54d". Enclosure station 81...cylinder 55...closed station 82...positioning member 56...unloading station 83...vacuum pump 57...extraction station 84···supply station 58...loading station 85,86...requires flow path 59...holding members 87,88... Receiving valve 60...working head 89,90...regulator 25 201113456 91,92...buffer tank R...executing P...glass substrate T...conveying device 26