201107601 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種雙聯式往復泵，藉由以連結軸連 結之一對伸縮囊、隔膜及柱塞等可動分隔構件來形成之一 對泵室交替地重複壓縮程序及膨脹程序，藉此實施泵動 作’且特別有關於一種雙聯式往復泵，以將彈性手段設於 連結軸，減低移送流體之脈動的方式作成。 【先前技術】 藉由以連結軸連結之伸縮囊等可動分隔構件，將一對 密閉空間分隔成泵室及作動室，交替地將作動流體導入至 一對作動室，藉此使連結軸往復作動，使泵室交替的壓縮 及伸長，以這種方式作成的雙聯式往復泵係眾所周知。在 此種泵中，在連結軸之往復移動行程端部，一對吸入閥及 一對吐出閥分別自一泵室側往另一泵室側切換，結果，在 吐出流量上會產生對應行程數之脈動。這種脈動會造成種 種障礙。例如在半導體用途中，會有阻塞在過濾器之粒子 會藉由脈動被壓出而混入下游側、藉由配管之搖動而自接 頭洩漏、洗淨槽之液面會造成波動、將液體往晶圓噴射之 噴嘴尖端會震動，而洗淨效率會降低、液體之慣性阻力增 加而流量不穩定等問題。尤其在半導體、太陽能電池、醫 課題 藥、食品等之製造過程領域中，係成爲非改善不可之重大 〇 [S1 201107601 爲了改善此問題，先前，藉由將螺旋彈簧設在連結軸 之局部’將可動分隔構件在往復移動方向上以彈力的方式 連結’藉此謀求上述脈動之減低的技術係眾所周知（專利 文獻1、2 )。 [先行技術文獻] [專利文獻] [專利文獻1]日本特表平11-5 04 098號公報（第7頁第20 行〜第25行、第1圖） [專利文獻2]WOOO/1 5962(第4頁第37行、〜第5頁第5行、 第1圖） 【發明內容】 [發明所欲解決的課題] 但是，在上述專利文獻1中開示之雙聯式往復泵中， 在一泵室自膨脹程序轉移到壓縮程序之行程終點處，.另一 泵室之膨脹程序會開始，藉由螺旋彈簧之收縮吸收此膨脹 程序開始之延遲，所以與以一對泵室積極地重複壓縮程序 之結束與開始之期間之方式相比較下，有去除脈動效果少 的問題。 又，在開示於專利文獻2之雙聯式往復泵中，泵室之 膨脹程序與壓縮程序之切換時序係以時間來控制，所以運 轉開始後之彈性構件發熱或周圍環境變化等之經時變化或 使行程數改變時，往復運動之相位會慢慢改變，而有泵動 作變得不穩定之問題。 201107601 本發明之目的，係鑑於上述問題點，提供一種雙 往復泵，能達成經常穩定的泵動作，抑制脈動。 [用於解決課題的手段] 本發明之雙聯式往復泵，其特徵在於具有：殻構 在內部沿著軸向形成一對空間；一對可動分隔構件， 述一對空間內分別於軸向變形或移動自如地被配置， 述一對空間分別在軸向分隔成泵室及作動室；連結軸 前述一對可動分隔構件透過伸縮構件伸縮自如地連結 向；吸入閥，設於前述泵室之吸入側，將移送流體導 前述泵室；吐出閥，設於前述泵室之吐出側，將前述 流體自前述泵室吐出；閥機構，用於將作動流體導入 作動室，將前述作動流體自前述作動室排出；位移感孭 分別連續檢出前述一對可動分隔構件之位移；以及 器，依據前述位移感測器之輸出，以一泵室之壓縮程 另一泵室之壓縮程序具有部分重複之重複距離的方式 閥機構，藉此驅動一對可動分隔構件。 在較佳一實施形態中，前述控制器具有設定手段 於設定以前述重複距離相對於前述可動分隔構件全行 度之比例表示之重複率，依據以前述設定手段設定之 重複率之設定値及前述位移感測器之輸出，控制前述 率 0 在其他實施形態中，前述控制器係隨著前述一對 分隔構件行程速度之增加，而使以前述重複距離相對 述可動分隔構件全行程長度之比例表示的重複率增加 聯式 件， 在前 將前 ，將 在軸 引至 移送 前述 丨器， 控制 序與 切換 ，用 程長 前述 重複 可動 於前 〇 [S] .201107601 在其他實施形態中，前述控制器係以利用前述重複距 離相對於前述可動分隔構件全行程長度之比例表示之重複 率維持在比泵動作停止之前述重複率界限値還要少1〜3% 値的方式，驅動前述可動分隔構件。 在其他實施形態中，前述控制器使最佳之前述重複率 定期性地或動態性地改變。 在其他實施形態中，前述連結軸之伸縮構件具有使自 壓縮狀態伸長時之賦勢力緩和之阻尼器。 在其他實施形態中，前述伸縮構件係螺旋彈簧或氣壓 緩衝器。 在其他實施形態中，又具備近接感測器，分別檢出將 前述一對可動分隔構件到達移動行程端部之情形加以。 在其他實施形態中，前述閥機構具有：一對閥體，分 別設於前述一對作動室；以及一對調節器，調整來自作動 流體供給源之作動流體之壓力，而將前述作動流體分別供 給到前述一對閥體。 本發明之其他雙聯式往復泵，其特徵在於具有：泵頭； 一對有底圓筒狀的伸縮囊，以彼此的開口側相向的方式添 設在前述泵頭之兩側，在內部分別形成泵室，同時，在軸 向分別爲可伸縮的；一對有底圓筒狀的缸體，以將前述一 對伸縮囊分別收容在內部的方式相對於前述伸縮囊同軸地 配置，且以在前述一對伸縮囊之間形成作動室，開口部彼 此相向的方式安裝在前述泵頭；一對泵軸，分別沿著前述 201107601 缸體中心軸氣密且滑動自如地貫通前述一對缸體之底部， 各自的一端分別連結在前述一對伸縮囊之各底部；連結 軸’透過伸縮構件在軸向上將前述一對泵軸之另一端彼此 伸縮自如地連結；閥單元，在前述泵室內安裝在前述泵頭， 自移送流體之吸入口將前述移送流體導引至前述泵室，同 時，將前述移送流體自前述泵室往移動流體之吐出口導 引；閥機構，用於使作動流體導入至前述作動室，將前述 作動流體自前述作動室排出；位移感測器，分別連續檢出 前述一對伸縮囊之位移；以及控制器，依據前述位移感測 器之輸出，以一泵室之壓縮程序與另一泵室之壓縮程序具 有部分重複之重複距離的方式切換閥機構，藉此，驅動一 對可動分隔構件。 [發明之效果] 根據本發明，基於位移感測器的連續位移檢出，可以 達成最佳壓縮程序的重複距離之控制，所以可以達成經常 穩定的泵動作，可有效果地抑制脈動。 【實施方式】 以下，參照附圖說明本發明之較佳實施形態。 [第1實施形態] 第1圖係顯示根據本發明第1實施形態的雙聯式往復 泵之剖面圖及其周邊機之圖面。在配置於中央部之泵頭1 兩側，作爲殼構件之有底圓筒狀缸體2a、2b係同軸配置， 在這些缸體內部形成一對空間。在這些空間內，分別同軸 [S] 201107601 配置有底圓筒狀伸縮囊3a、3b。伸縮囊3a ' 3b之開口端被 固定在泵頭1，軸固定板4a、4b固定在底部。伸縮囊3a、 3b構成分隔缸體2a、2b之內部空間的可動分隔構件，將內 側當作泵室5a、5b，將外側當作作動室6a、6b。 同軸延伸之軸7a、7b的一端固定在軸固定板4a、4b。 軸7a' 7b另一端透過密封構件8氣密貫通各缸體2a、2b 底部中心，延伸至缸體2a、2b外側。連結板9a、9b藉由 螺帽10固定在前述軸7a、7b另一端。連結板9a、9b係在 缸體2a、2b之上下位置藉由連結軸11a、lib連結。各連 結軸11a、lib係由軸部12、13及組裝在這些軸部12、13 間且爲壓縮構件之螺旋彈簧14所構成，藉由螺栓15固定 在連結板9a、9b。 在泵頭1上，於面對泵側面之位置設有移送流體之吸 入口 16及吐出口 17，同時，在自吸入口 16至吐出口 17 之位置設有吸入閥18a、18b，自泵室5a、5b至吐出口 17 之路徑上設有吐出閥19a、19b。 在缸體2a、2b底部外壁面安裝近接開關21a、21b。近 接開關21a、21b係檢出伸縮囊3a、3b底部後退到最後情 形者，例如檢出連結板9a、9b內側面接近之情形。又，在 自缸體2a、2b延伸之固定板22a、22b上安裝位移感測器 23a、23b。位移感測器23a ' 23b係檢出與連結板9a、9b 外側面之位移者，較佳可使用例如雷射位移計、MR (磁性 電阻元件）感測器、靜電電容感測器、線性編碼器、高頻 [S】 -10- 201107601 震動型近接位移感測器、光纖式位移感測器等。來自 近接開關21a、21b及位移感測器23a、23b之檢出訊號 至控制器25。 一方面，來自未圖示之空壓機等作動流體源之作 體，例如空氣，係以調節器26a、26b分別被限制在既 力，而供給到電磁閥27a、27b。控制器25輸入近接 2a、21b及位移感測器23a、23b之檢出輸出，依據這 出輸出，控制電磁閥27a、27b之開閉。 接著，說明根據如此構成之本實施形態的雙聯式 泵。 第2圖係用於說明根據本實施形態的泵之動作之 波形圖。 來自空氣源之空氣，係以調節器26a、26b分別被 在既定壓力，然後供給到電磁閥27a、27b。因此，一 室6a、6b之壓力變動不會影響另一作動室6b、6a之壓 所以具有因此產稱的脈動減少效果。而且，調節器並 限於2個，也可以是1個。在此情形下，最好使用精 節器。現在，電磁閥27 a在OFF狀態（排氣狀態），電 27b在ON狀態（空氣導入狀態），泵室5a在膨脹程序 室5b在壓縮程序。此時，吸入閥18a及吐出閥19b係 開，吸入閥1 8b及吐出閥1 9a係成爲閉，所以必須移 液體自吸入口 16導入至栗室5a，自泵室5b透過吐出 吐出。 這些 輸入 動流 定壓 開關 些檢 往復 各部 限制 作動 丨力， 不侷 密調 磁閥 ，泵 成爲 送之 □ 17 [S3 -11 - 201107601 此時，位移感測器23b之輸出隨著連結板9a之分離而 下降。控制器25監視位移感測器23b之輸出，當位移感測 器2 3b之輸出成爲低於既定門檻値THR時，使電磁閥27a 成爲ON狀態，將空氣導入作動室6a。藉此，泵室5a自膨 脹程序切換成壓縮程序。但是，在此時點，空氣持續供給 到另一作動室6b，所以泵室5b也維持在壓縮程序。因此， 吸入閥18a、18b成爲閉，吐出閥19a、19b成爲開，液體自 兩泵室5a、5b吐出。連結軸11a、lib之螺旋彈簧14爲了 吸收此時伸縮囊3a、3b兩端間之尺寸變化而被壓縮。 近接開關21b檢出行程結束時，電磁閥27b切換成空 氣排氣，伸縮囊3b被連結軸11a、lib牽引而開始伸長， 所以泵室5b切換到膨脹程序。將以上動作在左右泵室5a、 5b重複。 在第2圖顯示兩泵室5a、5b —齊成爲壓縮程序之重複 距離PO。如此一來，在一泵室之吐出壓力降低之吐出程序 最終階段前不久，藉由使液體也自另一泵室吐出，能抑制 吐出側之脈動。前述重複距離PO可以藉由位移感測器 23a、23b輸出之門檻値THL、THR之設定値來調整，位移 感測器23a、23b係規定切換時序。更具體而言，在泵起動 時，在往復動作之兩行程端，分別取樣位移感測器23a、23b 之輸出値，依據前述輸出値，以重複距離P〇相對於全行程 長度之比率（以下，稱做「重複率」）來設定。在控制器 25設有未圖示之上述比率之設定手段，可以使用此設定手 段來設定任意之比率。 • 12- 201107601 依據本發明者等之實驗，最佳重複率係依據泵之行程 數、伸縮囊3a、3b之物理特性、螺旋彈簧14之彈簧係數、 供給空氣壓力、供給空氣之供/排氣條件等種種要素而改 變。 例如第3A圖係表示於前述泵往復動作之各行程數之 最佳重複率（％)及吐出側脈動壓力幅度（MPa )之圖表。 而且，在第3A圖也表示有作爲比較例之未重複時之運轉所 致之吐出側脈動壓力幅度。由此圖可知，當行程數增加時， 最好也使最佳重複率增加。當使行程數爲20〜120 ( spm) 時，依據圖表，重複率（％)係11〜29 (%)，但是，這是 特定之供/排氣條件等係特定條件時之結果，當考慮種種條 件時，最好係1 1〜50 ( % )。 根據此實施形態時，藉由位移感測器23a、23b能連續 檢出在連結板9a、9b行程端部之位移，所以能以門檻値 THL、THR之設定自由設定重複率（％)。因此，可達成最 能抑制吐出流體之脈動之最佳設定。又，根據本實施形態， 即使沒有來自吐出液、吸入液壓力感測器之回饋，也可以 選擇最佳之重複率。 [第2實施形態] 在上述實施形態中，雖然未特別言及重複率具有極限 値之點，但是當使重複率過大時，使一可動分隔構件前進 之力會與使另一可動分隔構件前進之力對抗，造成泵動作 停止。以下將泵動作如此停止之重複率稱做「極限重複 率」。 [S] •13- 201107601 在第3B圖顯示在一定條件下各行程數之極限重複 率。爲了不使泵動作停止，不要超過前述極限重複率，而 且最好以將重複率維持在抑制脈動之圖示斜線所示範圍的 方式，控制泵之動作。更佳是維持比極限重複率少數％ (例 如1〜3%)之重複率。上述最佳重複率依據行程數而改變。 在此，在第2實施形態中，依據來自第1圖所示之近 接開關21a、21b及位移感測器23a、23b之檢出訊號，控制 器25監視泵之重複率，在泵運轉中，對應行程數而動態使 重複率改變。 具體而言，在事前關於種種供/排氣條件，事先求出第 3 B圖斜線內之最佳重複率而做成控制表。控制表係藉由2 點校準來求出最佳重複率，也可以藉由插値其他重複率來 求出而做成。而且，在泵運轉中，若自行程數及位移感測 器23a、23b之輸出參照控制表，檢出行程數改變，則控制 成使重複率減少或增加。 藉此，成爲對應行程數之最佳重複率’能使泵低脈動 運轉。 而且，最佳重複.率也有藉由泵或周圍環境之經時變 化、及包含供/排氣條件之運轉條件等而變動。因此，也可 以實施控制表之定期性校準’或者，依據位移感測器23a ' 23b等之輸出之動態校準。 又，自位移感測器23a、23b之輸出’即使不做成控制 表，也可以一邊經常尋找「極限重複率」之-1%〜-3% 一 邊運轉。此時，無須來自液體壓力感測器之回饋。 [s] -14- 201107601 [第3實施形態] 第4圖係使用於本發明第3實施形態雙聯式往復泵之 連結軸3 1 a ( 3 1 b )之局部剖面圖* 在第1實施形態中，雖然使用螺旋彈簧14作爲連結軸 1 1 a、1 1 b之伸縮構件，但是在本實施形態中，使用空氣緩 衝器作爲伸縮構件。亦即，連結軸3 1 a ( 3 1 b )係由軸部3 2、 33及結合兩者之空氣緩衝器部34所構成。空氣緩衝器部 34係由安裝在軸部33前端之氣缸體35及安裝在軸部32 前端之活塞36所構成，既定壓力之空氣透過空氣導入口 37 供給到氣缸體3 5。 根據本實施形態，不僅容易設定最佳重複率，也能很 容易設定最佳彈簧壓。又，彈簧壓也可以隨時間改變。 [第4實施形態] 第5圖係使用於本發明第4實施形態雙聯式往復泵之 連結軸41a(41b)之局部剖面圖。 在先前之實施形態中，當一泵室自壓縮程序切換成膨 脹程序時，藉由釋放蓄積在螺旋彈簧14之能量，在吸入側 產生過大的吸入壓力，會有吸入側之脈動增大的可能性。 在此，在本實施形態設有阻尼器，用於使連結軸之伸縮構 件自壓縮狀態伸長時之賦勢力緩和。 此實施形態之連結軸41a ( 41b )具有軸部42、43、組 裝在其間之壓縮時長度縮短之螺旋彈簧44及伸長時長度 縮短之阻尼器用螺旋彈簧45» [S] -15- 201107601 根據本實施形態，當泵室自壓縮程序轉移到膨脹程序 時，阻尼器用螺旋彈簧45抑制泵室之突然膨脹，所以能抑 制吸入側之脈動。 [第5實施形態] 第6圖係使第5圖實施形態進一步變形，使用空氣緩 衝器作爲阻尼器之實例。 在本實施形態中，連結軸51a(51b)由軸部52' 53及 設於其間之緩衝器部54所構成，緩衝器部54藉由螺旋彈 簧55與空氣緩衝器部56之平衡而伸縮。藉由適宜調整自 空氣導入口 57導入空氣緩衝器部56之空氣壓力，能減少 吐出側及吸入側雙方之脈動。 [第6實施形態] 第7圖係表示第5圖實施形態全部藉由空氣緩衝器來 實施之實施形態。 而且，在以下之實施形態中，與先前實施形態相同部 分則賦予相同編號，不再重複說明。 連結軸61a' 61b由軸部62、63及設於前間之空氣緩 衝器部64所構成，空氣緩衝器部64由氣缸體65及活塞66 所構成。藉由自空氣導入口 67、68導入之空缸體65內之 壓力與活塞6 6背面之壓力之平衡，能減少吐出側及吸入側 雙方之脈動。 在本實施形態中，除了第1圖泵中之調節器26a、26b 及電磁閥27a ' 27b，爲了控制空氣緩衝器部64，設置調節 器 28&、281)及電磁閥293'291)。 [S】 -16- .201107601 [第7實施形態] 第8圖係表示第6實施形態變形例之圖面。 本實施形態係藉由止回閥69及低速速度控制器實現 空氣緩衝器部64的活塞66之背面的壓力控制之實例。 在本實施形態中，（當連結軸61a收縮時）事先長時間 自空氣導入口 67供給空氣，將空氣導入至活塞66的背面， 當連結軸6 1 a伸長時’低速速度控制器7〇限制活塞66背 面之空氣排出。藉此，發揮阻尼器之功能。 根據此實施形態’能作成比第6實施形態還要簡單的 構成。 [第8實施形態] 第9圖係顯示根據本發明第8實施形態雙聯式往復泵 之構成之剖面面。 在先前實施形態中，雖然使用伸縮囊作爲可動分隔構 件，但是在本實施形態中，使用活塞作爲可動分隔構件。 在配置於中.央部之泵頭71兩側，同軸配置作爲殼構件 之有底圓筒狀缸體72a、72b，在其等內部形成一對空間。 在這些空間內往復移動自如地分別配置活塞73a、73b。活 塞7 3 a、7 3 b的前端側與泵頭7 1側相向，在與泵頭7 1之間 形成泵室75a、75b。活塞73a、73b基端側形成作動室76a、 76b，軸77a、77b係同軸固定。軸77a、77b之另一端透過 密封構件78分別氣密地貫通缸體72a、72b底部中心，而 延伸至缸體72a、72b外側。 [S] -17- 201107601 在泵頭71，在面對泵側面之位置設置移 口 86及吐出口 87，同時，在自吸入口 86至 之位置設置球狀之吸入閥88a、88b，在自泵 吐出口 87之位置設置吐出閥89a、89b。 其他構成係與第1圖之構成相同。 在此泵中，依據由位移感測器23a、23b 位移檢出，能設定最佳重複率，能有效地抑 [第9實施形態] 第1 0圖係顯示根據本發明第9實施形態 之構成之剖面圖。 在先前實施形態中，雖然使用伸縮囊或 分隔構件，但是在本實施形態中，使用隔膜 構件。 在內部形成有配置於中央部之泵頭之本 側，安裝與本體部91 一同形成空間且作爲 92a、92b。在藉由本體部91與蓋體92a、92b月 安裝隔膜93a、93b，前述隔膜93a、93b將這 隔成泵室95a、95b及作動室96a、96b。隔且 藉由其中央部貫穿本體部91之連結軸94來 94具有作爲伸縮構件之螺旋彈簧97,整體之| 在本體部91設有移送流體之吸入口 107，同時在自吸入口 106至泵室95a、95b 狀吸入閥108a、108b，在自泵室95a、95b至 路徑設置吐出閥109a、109b。 送流體之吸入 泵室 75a、75b 室 75a、75b 至 所致之連續性 制脈動。 雙聯式往復泵 活塞作爲可動 作爲可動分隔 體部91的兩 殼構件之蓋體 ί形成之空間， 些空間分別分 莫 93a 、 93b 係 連結。連結軸 _成伸縮自如。 106及吐出口 之路徑設置球 吐出口 107之 [S] -18" 201107601 而且，在蓋體92a、9 2b設置近接開關Ilia、lllb，前 述近接開關111a、111b面對隔膜93a、93b的背面且檢出隔 膜9 3 a、9 3 b後退至最後之情形。又，在連結軸9 4側面設 置位移感測器1 13a、1 13b，前述位移感測器1 13a、1 13b由 用於檢出連結軸94往復移動方向之位移之線性編碼器所 構成。 其他構成係與第1圖之構成相同。 在此泵中，依據由位移感測器23a、23b所致之連續性 位移檢出，能設定最佳重複率，能有效地抑制脈動》 [第1 0實施形態] 第11圖係顯示根據本發明第10實施形態雙聯式往復 泵之構成之剖面圖。 在第1實施形態中，各連結軸11a、lib具有安裝於軸 部12、13之槪略中間位置之螺旋彈簧14,但是在本實施形 態中，螺旋彈簧14安裝在偏往軸部12側之位置。又，在 吸入口 16未圖示之配管及吐出口 17未圖示之配管，具有 液體壓力感測器1 16、1 17，同時以面對作動室6a、6b的方 式具有空氣壓力感測器127a' 127b及洩漏感測器150a、 150b。而且，位移感測器123a、123b由雷射位移計所構成， 檢出各連結軸11a、lib之位移量。而且，各壓力感測器116、 117、127a、127b之檢出壓力係輸入到控制器25。 根據本實施形態，各連結軸11a、lib之螺旋彈簧14 安裝在偏移之位置’所以可以做成不接觸泵之吸入口丨6及 [S1 -19· 201107601 吐出口 17之配管構造’能謀求整體的小型化，同時使配管 之自由度提高。 又’控制器25不僅取得來自近接開關21a、21b及位 移感測器123a、123b之檢出輸出，也能取得來自各壓力感 測器1 16、1 17、127a、127b之檢出輸出來實施控制，所以 能夠達成例如下述的控制。 亦即’控制器25藉由液體壓力感測器1 16、1 1 7之輸 出’檢出吸入側及排出側之移送流體脈動，能控制重複率， 使得該脈動爲最小。 又，當供給空氣之壓力改變時，最佳重複率也 會改變’但是在本實施形態中，控制器25以空氣壓力感測 器127a、127b監視供給空氣之壓力，可以依據檢出之空氣 壓力控制重複率（％ )。 而且，調節器26.a、26b使用電空調節器，控制器25 控制供給空氣之壓力，藉此，即使與吐出壓力改變無關地 實施將行程數維持一定之流量一定控制時，能對應供給空 氣壓力來改變重複率（％)。 此外，也可以考慮泵各部之溫度變化或經時變化所致 之影響，實施位移感測器123a' 123b之0點補正來運轉泵。 0點補正係可以例如事先以控制器25取得泵起動時之連結 軸11a' lib最大移動時之値，將該値編入控制而運轉，或 者，依據該値定期檢査而運轉。 [S] -20- 201107601 [其他實施形態] 而且，以上之第8及第9實施形態中，爲了防止吐出 側之脈動，當然也可以在連結軸設置如第5圖〜第7圖所 示之阻尼器。 【圖式簡單說明】 第1圖係顯示根據本發明第1〜第3實施形態雙聯式往復 泵之構成之圖面。 第2圖係顯示此泵之動作之波形圖。 第3A圖係顯示相對於此泵之行程數之重複距離之比率及 吐出側脈動壓力之圖表。 第3B圖係顯示相對於此泵之行程數之重複距離之比率範 圍之圖表。 第4圖係根據本發明第4實施形態雙聯式往復泵中之連結 軸之局部剖面圖。 第5圖係根據本發明第5實施形態雙聯式往復泵中之連結 軸之局部剖面圖。 第6圖係根據本發明第6實施形態雙聯式往復泵中之連結 軸之局部剖面圖。 第7圖係顯示根據本發明第7實施形態雙聯式往復泵之構 成之圖面。 第8圖係顯示根據本發明第8實施形態雙聯式往復泵之構 成之圖面。 第9圖係顯示根據本發明第9實施形態雙聯式往復泵之構 [S] -21- 201107601 成之圖面。 式往復栗之 式往復泵之 第1 0圖係顯示根據本發明第1 0實施形態雙 構成之圖面。 第1 1圖係顯示根據本發明第1 1實施形態雙 構成之圖面。 【主要元件符號說明】 1、7 1 泵頭 2a 、 2b 、 72a 、 72b 缸體 3a ' 3b 伸縮囊 4a、4b 軸固定板 5a 、 5b 泵室 6a、6b 作動室 7a' 7b 軸 8 密封構件 9a' 9 b 連結板 10 螺帽 11a、 lib' 31a' 31b、 41a、 41b ' 51a ' 51b ' 94 連結軸 12 ' 13 軸部 14、44、45、55、9 螺旋彈簧 15 螺栓 16、 86、 106 吸入口 17、 87、 107 吐出口 m -22- 201107601 18a、 18b ' 8 8a' 88b、 108a ' 108b 吸 入閥 19a、 19b 、8 9a、 89b、 109a、 109b 吐 出閥 21a、 21b 、111a ' 111b 近 接開關 22a、 22b 固 定板 23a、 23b、： 113a 、 113b 位移感測器 25 控 制器 2 6a' 26b ' 28a ' 28b 調 節器 27a ' 27b ' 2 9a' 29b 電 磁閥 m -23-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double-coupled reciprocating pump, which is formed by a pair of connecting shafts, a pair of movable partition members such as a bellows, a diaphragm and a plunger. The pump chamber alternately repeats the compression program and the expansion program to perform the pump operation, and particularly relates to a double-coupled reciprocating pump, which is constructed by providing an elastic means to the connecting shaft to reduce the pulsation of the transfer fluid. [Prior Art] The movable partition member such as the bellows connected by the connecting shaft separates the pair of sealed spaces into the pump chamber and the operating chamber, and alternately introduces the operating fluid into the pair of operating chambers, thereby reciprocating the connecting shaft A double-coupled reciprocating pump made in this manner is known for alternately compressing and expanding the pump chamber. In such a pump, at the end of the reciprocating stroke of the connecting shaft, the pair of suction valves and the pair of discharge valves are respectively switched from one pump chamber side to the other pump chamber side, and as a result, a corresponding stroke number is generated in the discharge flow rate. The pulse. This pulsation can cause various obstacles. For example, in semiconductor applications, particles that are clogged in the filter are pushed out by the pulsation and mixed into the downstream side, and leaking from the joint by the shaking of the pipe, the liquid level of the washing tank is caused to fluctuate, and the liquid is crystallized. The tip of the nozzle of the circular jet vibrates, and the cleaning efficiency is lowered, the inertial resistance of the liquid is increased, and the flow rate is unstable. Especially in the manufacturing process of semiconductors, solar cells, medical subjects, foods, etc., it is a major non-improvement [S1 201107601 In order to improve this problem, previously, by placing the coil spring on the part of the connecting shaft] A technique in which the movable partition member is elastically coupled in the reciprocating direction is known as a technique for reducing the pulsation (Patent Documents 1 and 2). [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Patent Publication No. 11-5 04 098 (page 7, line 20 to line 25, first figure) [Patent Document 2] WOOO/1 5962 (Page 4, line 37, page 5, line 5, and Fig. 1) [Problem to be Solved by the Invention] However, in the double-coupled reciprocating pump disclosed in Patent Document 1, A pump chamber is transferred from the expansion program to the end of the stroke of the compression program. The expansion procedure of the other pump chamber begins. The contraction of the coil spring absorbs the delay of the start of the expansion procedure, so it is actively repeated with a pair of pump chambers. Compared with the method of the end of the compression process, there is a problem that the pulsation effect is small. Further, in the double-coupled reciprocating pump disclosed in Patent Document 2, the switching sequence of the expansion program and the compression program of the pump chamber is controlled by time, so that the elastic member generates heat or changes in the surrounding environment after the start of the operation. Or when the number of strokes is changed, the phase of the reciprocating motion is slowly changed, and the pump operation becomes unstable. 201107601 The object of the present invention is to provide a double reciprocating pump in view of the above problems, which can achieve a constantly stable pump operation and suppress pulsation. [Means for Solving the Problem] The double-coupled reciprocating pump of the present invention is characterized in that: a shell structure forms a pair of spaces along the axial direction inside; a pair of movable partition members, respectively, in a pair of spaces in the axial direction The pair of spaces are respectively axially partitioned into a pump chamber and an operation chamber, and the pair of movable partition members are coupled to each other through the telescopic member; the suction valve is disposed in the pump chamber. a suction fluid guiding the pump chamber; a discharge valve disposed on a discharge side of the pump chamber to discharge the fluid from the pump chamber; and a valve mechanism for introducing an actuating fluid into the operating chamber, the actuating fluid being from the foregoing Exhaust chamber discharge; displacement sensation continuously detects the displacement of the pair of movable partition members; and according to the output of the displacement sensor, the compression program of one pump chamber has a partial repetition of the compression program of the pump chamber The valve mechanism is repeated in a distance manner, thereby driving a pair of movable partition members. In a preferred embodiment, the controller has a setting means for setting a repetition rate represented by a ratio of the repetition distance to a full extent of the movable partitioning member, and setting a repetition rate set by the setting means, and the foregoing The output of the displacement sensor controls the rate of 0. In other embodiments, the controller is represented by a ratio of the repetition distance to the full stroke length of the movable partition member as the stroke speed of the pair of partition members increases. The repetition rate is increased by the joint member. Before the front, the shaft will be guided to the transfer device, and the control sequence and switching will be repeated. The above-mentioned repetition can be moved to the front 〇 [S]. 201107601 In other embodiments, the foregoing control The device drives the movable partition member in such a manner that the repetition rate expressed by the ratio of the repeating distance to the full stroke length of the movable partition member is maintained at 1 to 3% less than the repetition rate limit 泵 of the pump operation stop. . In other embodiments, the controller causes the optimal repetition rate to be changed periodically or dynamically. In another embodiment, the telescopic member that connects the shaft has a damper that moderates the biasing force when the self-compressing state is extended. In still another embodiment, the telescopic member is a coil spring or a pneumatic shock absorber. In another embodiment, a proximity sensor is further provided, and the case where the pair of movable partition members reach the end of the moving stroke is detected. In another embodiment, the valve mechanism includes: a pair of valve bodies respectively disposed in the pair of actuating chambers; and a pair of adjusters that adjust pressure of the actuating fluid from the actuating fluid supply source to supply the actuating fluids separately To the aforementioned pair of valve bodies. Another double-coupled reciprocating pump according to the present invention is characterized in that: a pump head; a pair of bottomed cylindrical bellows are attached to both sides of the pump head so as to face each other on the opening side, respectively Forming a pump chamber and simultaneously retracting in the axial direction; a pair of bottomed cylindrical cylinders are disposed coaxially with respect to the bellows in such a manner that the pair of bellows are respectively housed inside, and An operation chamber is formed between the pair of bellows, and the opening is attached to the pump head; the pair of pump shafts are airtight and slidably penetrate the pair of cylinders along the central axis of the 201107601 cylinder a bottom end of each of the pair of bellows is coupled to each other; the connecting shaft' transmits the other end of the pair of pump shafts to each other in the axial direction through the telescopic member; and the valve unit is installed in the pump chamber In the pump head, the transfer fluid is guided from the suction port of the fluid to the pump chamber, and the transfer fluid is guided from the pump chamber to the discharge port of the moving fluid; a mechanism for introducing an actuating fluid into the actuating chamber, discharging the actuating fluid from the actuating chamber; a displacement sensor continuously detecting displacements of the pair of bellows; and a controller according to the displacement sensor The output switches the valve mechanism in such a manner that the compression process of one pump chamber and the compression process of the other pump chamber have a partially repeated repeating distance, thereby driving a pair of movable partition members. [Effect of the Invention] According to the present invention, since the continuous displacement detection by the displacement sensor can control the repetition distance of the optimum compression program, it is possible to achieve a constantly stable pump operation and effectively suppress the pulsation. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. [First Embodiment] Fig. 1 is a cross-sectional view showing a double-coupled reciprocating pump according to a first embodiment of the present invention and a peripheral view thereof. The bottomed cylindrical cylinders 2a and 2b as the shell members are coaxially disposed on both sides of the pump head 1 disposed at the center, and a pair of spaces are formed inside the cylinders. In these spaces, the bottom cylindrical bellows 3a, 3b are arranged coaxially [S] 201107601, respectively. The open end of the bellows 3a' 3b is fixed to the pump head 1, and the shaft fixing plates 4a, 4b are fixed to the bottom. The bellows 3a, 3b constitute a movable partition member that partitions the internal space of the cylinders 2a, 2b, and the inner side is referred to as pump chambers 5a, 5b, and the outer side is referred to as operating chambers 6a, 6b. One ends of the coaxially extending shafts 7a, 7b are fixed to the shaft fixing plates 4a, 4b. The other end of the shaft 7a' 7b penetrates the center of the bottom of each of the cylinders 2a, 2b through the sealing member 8 and extends to the outside of the cylinders 2a, 2b. The webs 9a, 9b are fixed to the other ends of the shafts 7a, 7b by nuts 10. The connecting plates 9a and 9b are connected to the upper and lower positions of the cylinders 2a and 2b by connecting shafts 11a and 11b. Each of the coupling shafts 11a and 11b is composed of the shaft portions 12 and 13 and a coil spring 14 which is assembled between the shaft portions 12 and 13 and is a compression member, and is fixed to the coupling plates 9a and 9b by bolts 15. In the pump head 1, a suction port 16 and a discharge port 17 for transferring fluid are provided at a position facing the side of the pump, and suction valves 18a and 18b are provided at a position from the suction port 16 to the discharge port 17, and the pump chamber is provided. Discharge valves 19a and 19b are provided on the path from 5a and 5b to the discharge port 17. The proximity switches 21a and 21b are attached to the outer wall surface of the bottom of the cylinders 2a and 2b. The proximity switches 21a and 21b detect that the bottom of the bellows 3a, 3b has retreated to the last condition, for example, the inner side surfaces of the connecting plates 9a and 9b are detected to be close to each other. Further, displacement sensors 23a and 23b are attached to the fixing plates 22a and 22b extending from the cylinders 2a and 2b. The displacement sensors 23a' 23b detect the displacements of the outer sides of the connecting plates 9a, 9b, and preferably use, for example, a laser displacement meter, an MR (magnetic resistance element) sensor, an electrostatic capacitance sensor, and linear coding. High frequency [S] -10- 201107601 Vibration type proximity displacement sensor, fiber type displacement sensor, etc. The detection signals from the proximity switches 21a, 21b and the displacement sensors 23a, 23b are supplied to the controller 25. On the other hand, a body such as air from an air compressor such as an air compressor (not shown) is regulated by the regulators 26a and 26b to be supplied to the solenoid valves 27a and 27b. The controller 25 inputs the detection outputs of the proximity 2a, 21b and the displacement sensors 23a, 23b, and controls the opening and closing of the solenoid valves 27a, 27b in accordance with this output. Next, a duplex pump according to the present embodiment configured as above will be described. Fig. 2 is a waveform diagram for explaining the operation of the pump according to the embodiment. The air from the air source is supplied to the solenoid valves 27a, 27b by the regulators 26a, 26b, respectively, at a predetermined pressure. Therefore, the pressure fluctuation of the one chambers 6a, 6b does not affect the pressure of the other operating chambers 6b, 6a, so that the pulsation reducing effect is thus known. Further, the regulator is limited to two or one. In this case, it is best to use a finer. Now, the solenoid valve 27a is in the OFF state (exhaust state), the electric 27b is in the ON state (air introduction state), and the pump chamber 5a is in the expansion program 5b in the compression program. At this time, the suction valve 18a and the discharge valve 19b are opened, and the suction valve 18b and the discharge valve 19a are closed. Therefore, the liquid must be introduced from the suction port 16 into the chest chamber 5a, and the discharge is discharged from the pump chamber 5b. These input moving current constant pressure switches check the reciprocating parts to limit the operating force, and do not close the magnetic valve, the pump becomes the delivery □ 17 [S3 -11 - 201107601 At this time, the output of the displacement sensor 23b follows the connecting plate 9a The separation is reduced. The controller 25 monitors the output of the displacement sensor 23b. When the output of the displacement sensor 23b becomes lower than the predetermined threshold THR, the solenoid valve 27a is turned ON, and air is introduced into the operating chamber 6a. Thereby, the pump chamber 5a is switched from the expansion program to the compression program. However, at this point, air is continuously supplied to the other operating chamber 6b, so the pump chamber 5b is also maintained in the compression process. Therefore, the suction valves 18a and 18b are closed, the discharge valves 19a and 19b are opened, and the liquid is discharged from the two pump chambers 5a and 5b. The coil springs 14 that connect the shafts 11a and 11b are compressed in order to absorb dimensional changes between both ends of the bellows 3a and 3b. When the proximity switch 21b detects the end of the stroke, the solenoid valve 27b is switched to the air exhaust, and the bellows 3b is pulled by the connecting shafts 11a and 11b to start the expansion, so that the pump chamber 5b is switched to the expansion program. The above operation is repeated in the left and right pump chambers 5a, 5b. In Fig. 2, the two pump chambers 5a, 5b are aligned to form a repeating distance PO of the compression program. As a result, the pulsation on the discharge side can be suppressed by discharging the liquid from the other pump chamber shortly before the final stage of the discharge process in which the discharge pressure of the pump chamber is lowered. The above-described repetition distance PO can be adjusted by the setting thresholds of the thresholds THL and THR output from the displacement sensors 23a and 23b, and the displacement sensors 23a and 23b define the switching timing. More specifically, at the time of pump start, the output 値 of the displacement sensors 23a, 23b are respectively sampled at the two stroke ends of the reciprocating motion, and the ratio of the repetition distance P 〇 to the full stroke length is based on the output 値 (hereinafter , called "repetition rate") to set. The controller 25 is provided with a setting means of the above-described ratio (not shown), and the setting means can be used to set an arbitrary ratio. • 12-201107601 According to experiments by the inventors, the optimum repetition rate is based on the number of strokes of the pump, the physical characteristics of the bellows 3a, 3b, the spring coefficient of the coil spring 14, the supply air pressure, and the supply/exhaustion of the supply air. Conditions such as conditions change. For example, Fig. 3A is a graph showing the optimum repetition rate (%) of each stroke of the pump reciprocating motion and the pulsation pressure amplitude (MPa) of the discharge side. Further, in Fig. 3A, the discharge side pulsation pressure amplitude due to the operation at the time of non-repetition as a comparative example is also shown. As can be seen from the figure, when the number of strokes is increased, it is preferable to increase the optimum repetition rate. When the number of strokes is 20 to 120 (spm), the repetition rate (%) is 11 to 29 (%) according to the graph, but this is the result of specific conditions such as supply/exhaust conditions, when considering When various conditions are used, it is preferable to be 1 1 to 50 (%). According to this embodiment, the displacement of the end portions of the connecting plates 9a and 9b can be continuously detected by the displacement sensors 23a and 23b. Therefore, the repetition rate (%) can be freely set by the setting of the thresholds THL and THR. Therefore, an optimum setting that most suppresses the pulsation of the discharge fluid can be achieved. Further, according to the present embodiment, the optimum repetition rate can be selected without feedback from the discharge liquid or the suction liquid pressure sensor. [Second Embodiment] In the above-described embodiment, the point where the repetition rate has a limit is not particularly mentioned. However, when the repetition rate is too large, the force for advancing a movable partition member and the other movable partition member are advanced. Force confrontation, causing the pump to stop. The repetition rate in which the pump operation is stopped as described below is referred to as "limit repetition rate". [S] •13- 201107601 In Figure 3B, the limit repetition rate for each stroke is shown under certain conditions. In order not to stop the pump operation, the above-described limit repetition rate should not be exceeded, and it is preferable to control the operation of the pump in such a manner that the repetition rate is maintained within the range indicated by the oblique line of the pulsation. More preferably, the repetition rate is maintained at a fractional % of the ultimate repetition rate (e.g., 1 to 3%). The above optimal repetition rate varies depending on the number of strokes. Here, in the second embodiment, the controller 25 monitors the repetition rate of the pump based on the detection signals from the proximity switches 21a and 21b and the displacement sensors 23a and 23b shown in Fig. 1, and during the pump operation, The repetition rate is dynamically changed corresponding to the number of strokes. Specifically, the control table is prepared by determining the optimum repetition rate in the oblique line of the 3rd B chart in advance for various supply/exhaust conditions. The control table is obtained by 2-point calibration to determine the optimal repetition rate, or it can be obtained by inserting other repetition rates. Further, in the pump operation, if the number of the strokes and the outputs of the displacement sensors 23a and 23b refer to the control table, and the number of detected strokes is changed, the control is made to reduce or increase the repetition rate. Thereby, the optimum repetition rate of the corresponding number of strokes enables the pump to operate at a low pulsation. Further, the optimum repetition rate varies depending on the time change of the pump or the surrounding environment, the operating conditions including the supply/exhaust conditions, and the like. Therefore, it is also possible to carry out periodic calibration of the control table' or dynamic calibration based on the output of the displacement sensors 23a' 23b and the like. Further, even if the output of the displacement sensors 23a and 23b is not a control table, it is possible to operate at -1% to -3% of the "limit repetition rate". At this point, there is no need to return from the liquid pressure sensor. [s] -14-201107601 [Third Embodiment] Fig. 4 is a partial cross-sectional view showing a connecting shaft 3 1 a ( 3 1 b ) of a double-coupled reciprocating pump according to a third embodiment of the present invention. In the embodiment, the coil spring 14 is used as the elastic member that connects the shafts 1 1 a and 1 1 b. However, in the present embodiment, an air damper is used as the elastic member. That is, the connecting shaft 3 1 a ( 3 1 b ) is composed of the shaft portions 3 2, 33 and the air damper portion 34 combining the two. The air damper portion 34 is composed of a cylinder block 35 attached to the tip end of the shaft portion 33 and a piston 36 attached to the tip end of the shaft portion 32. The air of a predetermined pressure is supplied to the cylinder block 35 through the air introduction port 37. According to this embodiment, it is possible to easily set the optimum spring pressure without easily setting the optimum repetition rate. Also, the spring pressure can also change over time. [Fourth Embodiment] Fig. 5 is a partial cross-sectional view showing a connecting shaft 41a (41b) of a double-coupled reciprocating pump according to a fourth embodiment of the present invention. In the previous embodiment, when a pump chamber is switched from the compression program to the expansion program, by releasing the energy accumulated in the coil spring 14, an excessive suction pressure is generated on the suction side, and there is a possibility that the pulsation on the suction side increases. Sex. Here, in the present embodiment, a damper for easing the biasing force when the telescopic member of the connecting shaft is extended from the compressed state is provided. The connecting shaft 41a (41b) of this embodiment has the shaft portions 42, 43 and the coil spring 44 whose length is shortened during compression during assembly, and the coil spring for the damper which is shortened in length when extended 45» [S] -15- 201107601 In the embodiment, when the pump chamber is transferred from the compression program to the expansion program, the damper suppresses the sudden expansion of the pump chamber by the coil spring 45, so that the pulsation on the suction side can be suppressed. [Fifth Embodiment] Fig. 6 is a view showing a further modification of the embodiment of Fig. 5, in which an air buffer is used as an example of a damper. In the present embodiment, the connecting shaft 51a (51b) is constituted by the shaft portion 52'53 and the damper portion 54 provided therebetween, and the damper portion 54 is expanded and contracted by the balance between the coil spring 55 and the air damper portion 56. By appropriately adjusting the air pressure introduced into the air damper portion 56 from the air introduction port 57, the pulsation of both the discharge side and the suction side can be reduced. [Sixth embodiment] Fig. 7 is a view showing an embodiment in which all of the embodiments of Fig. 5 are implemented by an air buffer. In the following embodiments, the same portions as those in the previous embodiment are denoted by the same reference numerals and the description thereof will not be repeated. The connecting shaft 61a' 61b is composed of a shaft portion 62, 63 and an air buffer portion 64 provided at the front, and the air damper portion 64 is composed of a cylinder block 65 and a piston 66. By the balance between the pressure in the hollow cylinder 65 introduced from the air introduction ports 67 and 68 and the pressure on the back surface of the piston 66, the pulsation of both the discharge side and the suction side can be reduced. In the present embodiment, in addition to the regulators 26a and 26b and the solenoid valves 27a' to 27b in the pump of Fig. 1, regulators 28 & 281) and solenoid valves 293' 291 are provided for controlling the air damper portion 64. [S] -16-.201107601 [Embodiment 7] Fig. 8 is a view showing a modification of the sixth embodiment. In the present embodiment, an example of pressure control of the back surface of the piston 66 of the air damper portion 64 is realized by the check valve 69 and the low speed controller. In the present embodiment, (when the connecting shaft 61a is contracted) air is supplied from the air introduction port 67 for a long period of time, and air is introduced to the back surface of the piston 66. When the connecting shaft 61 a is extended, the low speed controller 7 is limited. The air on the back of the piston 66 is exhausted. Thereby, the function of the damper is exerted. According to this embodiment, it can be made simpler than the sixth embodiment. [Embodiment 8] Fig. 9 is a cross-sectional view showing the configuration of a double-coupled reciprocating pump according to an eighth embodiment of the present invention. In the previous embodiment, although the bellows is used as the movable partition member, in the present embodiment, the piston is used as the movable partition member. On both sides of the pump head 71 disposed at the center portion, the bottomed cylindrical cylinders 72a and 72b which are the shell members are coaxially disposed, and a pair of spaces are formed inside thereof. The pistons 73a and 73b are disposed to reciprocately move in these spaces. The front end sides of the pistons 7 3 a and 7 3 b face the pump head 7 1 side, and the pump chambers 75a and 75b are formed between the piston heads 7 1 and the pump heads 7 1 . The base ends of the pistons 73a and 73b form the operating chambers 76a and 76b, and the shafts 77a and 77b are coaxially fixed. The other ends of the shafts 77a and 77b are airtightly passed through the center of the bottom of the cylinders 72a and 72b through the sealing member 78, and extend to the outside of the cylinders 72a and 72b. [S] -17- 201107601 In the pump head 71, the transfer port 86 and the discharge port 87 are provided at a position facing the side of the pump, and at the same time, spherical suction valves 88a, 88b are provided at positions from the suction port 86. The discharge valves 89a and 89b are provided at the position of the pump discharge port 87. The other components are the same as those of Fig. 1. In this pump, the optimum repetition rate can be set based on the displacement detection by the displacement sensors 23a and 23b, which can effectively suppress the ninth embodiment. The tenth embodiment shows the configuration according to the ninth embodiment of the present invention. Sectional view. In the prior embodiment, a bellows or a partition member is used, but in the present embodiment, a diaphragm member is used. The inner side of the pump head disposed at the center portion is formed inside, and the space is formed together with the main body portion 91 as 92a and 92b. The diaphragms 93a and 93b are attached by the main body portion 91 and the lid bodies 92a and 92b, and the diaphragms 93a and 93b divide the pump chambers 95a and 95b into the pump chambers 95a and 95b and the operating chambers 96a and 96b. A coil spring 97 as a telescopic member is provided by a coupling shaft 94 having a central portion penetrating through the main body portion 94, and the body portion 91 is provided with a suction port 107 for transferring fluid, and at the same time from the suction port 106 to the pump The suction valves 108a and 108b are in the form of chambers 95a and 95b, and the discharge valves 109a and 109b are provided in the path from the pump chambers 95a and 95b. The fluid is sucked into the pump chamber 75a, 75b by the chambers 75a, 75b to the continuous pulsation. The double-coupled reciprocating pump has a space in which the piston is formed as a cover body of the two-shell member of the movable partition body 91, and the spaces are connected by the respective 93a and 93b. The connecting shaft _ is flexible. 106 and the path of the discharge port are provided with the ball discharge port 107 [S] -18 " 201107601 Further, the proximity switches Ilia and 11b are provided in the lid bodies 92a and 92b, and the proximity switches 111a and 111b face the back surfaces of the diaphragms 93a and 93b. It is detected that the diaphragms 9 3 a, 9 3 b are retracted to the last condition. Further, displacement sensors 1 13a and 1 13b are provided on the side surface of the connecting shaft 94, and the displacement sensors 1 13a and 1 13b are constituted by linear encoders for detecting the displacement of the connecting shaft 94 in the reciprocating direction. The other components are the same as those of Fig. 1. In this pump, based on the continuous displacement detection by the displacement sensors 23a and 23b, the optimum repetition rate can be set, and the pulsation can be effectively suppressed. [10th embodiment] The 11th figure shows the A cross-sectional view showing the configuration of a double-coupled reciprocating pump according to a tenth embodiment of the invention. In the first embodiment, each of the connecting shafts 11a and 11b has a coil spring 14 attached to a slightly intermediate position between the shaft portions 12 and 13. However, in the present embodiment, the coil spring 14 is attached to the side of the shaft portion 12 position. Further, the piping (not shown) of the suction port 16 and the piping (not shown) of the discharge port 17 have the liquid pressure sensors 1 16 and 1 17 and have air pressure sensors in such a manner as to face the operating chambers 6a and 6b. 127a' 127b and leakage sensors 150a, 150b. Further, the displacement sensors 123a and 123b are constituted by a laser displacement meter, and the displacement amounts of the respective connection shafts 11a and 11b are detected. Moreover, the detection pressure of each of the pressure sensors 116, 117, 127a, 127b is input to the controller 25. According to the present embodiment, the coil springs 14 of the connecting shafts 11a and 11b are attached to the offset position. Therefore, it is possible to make the suction port 不6 and the [S1 -19· 201107601 discharge port 17 piping structure] that are not in contact with the pump. The overall miniaturization increases the degree of freedom of piping. Further, the controller 25 can obtain not only the detection outputs from the proximity switches 21a and 21b and the displacement sensors 123a and 123b but also the detection outputs from the pressure sensors 1 16 , 1 17 , 127 a , and 127 b . Control, so that the following control can be achieved, for example. That is, the controller 25 detects the pulsation of the fluid on the suction side and the discharge side by the output of the liquid pressure sensors 1 16 and 117, and can control the repetition rate so that the pulsation is minimized. Further, when the pressure of the supplied air is changed, the optimum repetition rate is also changed. However, in the present embodiment, the controller 25 monitors the pressure of the supplied air by the air pressure sensors 127a and 127b, which can be based on the detected air pressure. Control the repetition rate (%). Further, the regulators 26.a and 26b use the electro-pneumatic regulator, and the controller 25 controls the pressure of the supply air, whereby the air can be supplied correspondingly even if the flow rate constant is maintained regardless of the discharge pressure change. Pressure to change the repetition rate (%). Further, the influence of the temperature change of each part of the pump or the influence of the change over time may be considered, and the zero point correction of the displacement sensor 123a' 123b is performed to operate the pump. For the zero point correction system, for example, the controller 25 can obtain the maximum movement of the connecting shaft 11a' lib at the time of pump start, and the 値 can be controlled to operate, or can be operated according to the 値 periodic inspection. [S] -20-201107601 [Other Embodiments] Further, in the eighth and ninth embodiments described above, in order to prevent the pulsation on the discharge side, it is needless to say that the connection shaft is provided as shown in Figs. 5 to 7 . Damper. [Brief Description of the Drawings] Fig. 1 is a view showing the configuration of a double-coupled reciprocating pump according to the first to third embodiments of the present invention. Figure 2 shows the waveform of the action of this pump. Fig. 3A is a graph showing the ratio of the repetition distance to the number of strokes of the pump and the pulsation pressure on the discharge side. Figure 3B is a graph showing the range of ratios of the repeat distances relative to the number of strokes of the pump. Fig. 4 is a partial cross-sectional view showing a coupling shaft in a double-coupled reciprocating pump according to a fourth embodiment of the present invention. Fig. 5 is a partial cross-sectional view showing a coupling shaft in a double-coupled reciprocating pump according to a fifth embodiment of the present invention. Figure 6 is a partial cross-sectional view showing a coupling shaft in a double-coupled reciprocating pump according to a sixth embodiment of the present invention. Fig. 7 is a view showing the construction of a double-coupled reciprocating pump according to a seventh embodiment of the present invention. Fig. 8 is a view showing the construction of a double-coupled reciprocating pump according to an eighth embodiment of the present invention. Fig. 9 is a view showing the construction of a double-coupled reciprocating pump according to a ninth embodiment of the present invention [S] - 21 - 201107601. Fig. 10 shows a cross-sectional view of a reciprocating pump of the reciprocating pump type according to the tenth embodiment of the present invention. Fig. 1 is a view showing a double configuration according to the eleventh embodiment of the present invention. [Main component symbol description] 1, 7 1 Pump head 2a, 2b, 72a, 72b Cylinder 3a ' 3b Bellows 4a, 4b Shaft fixing plate 5a, 5b Pump chamber 6a, 6b Actuating chamber 7a' 7b Shaft 8 Sealing member 9a ' 9 b Link plate 10 Nuts 11a, lib' 31a' 31b, 41a, 41b ' 51a ' 51b ' 94 Connecting shaft 12 ' 13 Shafts 14, 44, 45, 55, 9 Coil springs 15 Bolts 16, 86, 106 Suction port 17, 87, 107 Discharge port m -22- 201107601 18a, 18b ' 8 8a' 88b, 108a ' 108b Suction valves 19a, 19b, 8 9a, 89b, 109a, 109b Discharge valves 21a, 21b, 111a ' 111b Proximity Switch 22a, 22b fixing plate 23a, 23b,: 113a, 113b displacement sensor 25 controller 2 6a' 26b ' 28a ' 28b regulator 27a ' 27b ' 2 9a' 29b solenoid valve m -23-