TW201105953A

TW201105953A - Extraneous matter examination system and its method

Info

Publication number: TW201105953A
Application number: TW98127504A
Authority: TW
Inventors: hong-yi Cai; yan-shuo Sun; Jia-Miao Cai
Original assignee: Taiwan Nano Technology Applic Corp
Priority date: 2009-08-14
Filing date: 2009-08-14
Publication date: 2011-02-16

Abstract

An extraneous matter examination system and its method, which includes a panel holding platform, an equipment holding platform situated at the location adjacent to the panel holding base, at least a pair of straight-line displacement mechanisms disposed to the corresponding side of the equipment holding base and capable of carrying out in mutual parallel displacement along a detection direction, a light-emitting unit, and a light-receiving unit which are separately disposed onto the straight-line displacement mechanisms. A detection light-beam parallel to the detection-standby surface of the target panel is emitted from the light-emitting unit in a preset scanning mode to the detection area of the detection-standby surface of the target panel. The light-receiving unit is to receive and generate a serial detection signal to a control unit, thereby judging the extraneous matter on the detection-standby surface of the target panel.

Description

201105953 六、發明說明：【發明所屬之技術領域】本發明係關於一插種面板檢測系統之設計，特別是關於一種異物檢查系統及其方法。』疋關π 【先前技術】201105953 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to the design of a seed panel inspection system, and more particularly to a foreign matter inspection system and method thereof. 』疋关π [prior art]

3曰見:頁不,°。面板朝向大面積製程發展，尺寸越大價格越疋PM 中越不允許有報廢的狀況’以往在製程檢查上夕採用人工檢视或自動光學檢查（八如〇脱^ Optics Inspection，A0I)設備抽檢的方式。自動光學檢查為工業自動化有效的檢測方法，使用機裔視覺做為檢測標準技術，大量應用kLCD/tft、電晶體與 PCB工業製程上。光學檢查是工業製程中常見的代表性手法 ’利用光學方式取得成品的表面狀態，以影像處理來檢出異物或圖案異^等瑕庇’因為是非接觸式檢查，所以可在中間製程檢查半成品。參閱第1圖，其係顧+羽+ Λ , 不白知之異物檢查系統之示意圖之 —。如圖所示，在習知技術之異物檢查系統_中，-面板承置平口 1上承置有才票的面板ρ，一攝像裝置2垂直配置於標的面板Ρ上方-定攝像高度Η處進行取像，利用侧面光源3 =射光線L通過標的面板Ρ之待檢測面ρι，㈣面抑上只要 ^異物F存在，光線L就會從整個異_向外反射或散射出， a由攝像裝置2接&部分的反射或散射光線，轉換為電力訊號來檢出異物F。 201105953 然而，此種檢測方式，攝像裝置2需要極為接近標的面板P之待檢測面’以提昇檢測精度。但因此攝像裝置2會容易不慎直接或間接碰觸到標的面板p，造成標的面板p的如傷。再者，光源3經長時間的使用後亮度會衰減，而對檢測結果有所影響。一參閱第2圖，其係顯示習知之異物檢查系統之示意圖之一如圖所不，異物檢查系統i〇〇a之光源3由侧面傾斜角度 # 發射光線L，攝像裝置2與標的面板P之待檢測面pi成傾斜角度配置、。面板承置平台！設有運送機才糾，使標的面板p在面板承置平台1上以-預定的運送方向M移動’以掃描檢測整個標的面板P之待檢測面^上之異物F。、士然而，標的面板p在被運送時會產生振動，容易導致檢 =、、"果有誤差’影響檢測精度。掃描檢測整個標的面板p十 /刀耗2 ’且需配置多個攝像裝置2，成本費用相對較高。並且、’當標的面板P愈大時，運送上愈困難、檢測更加不易且 • 檢測時^目對延長、以及更難以避免振動發生。此外，面板承ί平台1上方一般還配置有許多其它相關設備，如靜電清除盗’造成攝像裝置2在配置時會有空間擺設的問題。並且 ’除標的面板Ρ外’這些攝像裝置2、光源3及其它相關設備的承重亦同時由面板承置平台1來負擔。日子-久，會容易使面板承置平台1產生傾斜，影響面板承置平台1的水平精度，且振動問題亦同時會隨時間而逐漸嚴重。【發明内容】 201105953 本發明所欲解決之技術問題鑑於以上所述，習知之異物檢查系統在檢測的精度上有其限制，且檢測時容易直接或間接碰觸到面板，造成損傷。動態掃描式的檢測為了掃描整個面板’需使面板沿檢測方向移動，但移動時所產生的振動卻會造成誤差。並且，隨標的面板愈大，不僅在運送及檢測上更為困難，攝像裝置也需配置多個，提高成本費用及檢測上的難度。再者，攝像裝置、光源及其它相關設備的承重皆由面板承置平台負擔，容易在長期使用後產生傾斜，影響水平精度以及平台及攝像裝置的穩定度，亦是不容忽視的問題所在。緣此，本發明之目的即是提供一種異物檢查系統及其方法，不需近接檢測面板即能在檢測上具有向精度5且結構上擁有良好制振能力，以解決習知技術之問題。本發明解決問題之技術手段本發明為解決習知技術之問題所採用之技術手段係包括一面板承置平台、一設備承置基座、至少一對直線位移機構、一光發射單元、一光接收單元及一控制單元。面板承置平台用以承置標的面板，設備承置基座位在面板承置平台之鄰近位置處，直線位移機構可滑移地配置在設備承置基座之對應側，可沿一檢測方向相互平行地進行位移，以在標的面板之待檢測面上定義出一檢測區。光發射單元設置在其中一直線位移機構之感測器承置座，於一預設掃描模式發射一平行於標的面板之待檢測面之 201105953 檢測光束通過檢測區。光接收單元設置在與光發射單元相對應位置之另一直線位移機構，用以接收檢測光束，產生一序列檢測彳S號’標的面板之待檢測面上存在異物時’光接收單元產生一第一狀態信號，標的面板之待檢測面上未存在異物時’光接收單元產生一第二狀態信號。控制單兀連接光發射單元、光接收單元及直線位移機構，驅動直線位移機構帶動光發射單元及光接收單元，沿著3 See you: Page no, °. The panel is oriented towards a large-area process. The larger the size, the more the price is. The more the PM is not allowed to be scrapped. 'In the past, the manual inspection or automatic optical inspection (eight-times off Optics Inspection, A0I) equipment sampling was performed on the process inspection. the way. Automated optical inspection is an effective method for industrial automation, using machine vision as a standard for inspection, and is widely used in kLCD/tft, transistor and PCB industrial processes. Optical inspection is a common method commonly used in industrial processes. 'Optical methods are used to obtain the surface state of finished products, and image processing is used to detect foreign matter or patterns. Because it is a non-contact inspection, semi-finished products can be inspected in an intermediate process. Referring to Figure 1, it is a schematic diagram of the + feather + Λ, not known as the foreign body inspection system. As shown in the figure, in the foreign matter inspection system of the prior art, the panel slab 1 is provided with a face panel ρ, and a camera device 2 is vertically disposed above the target panel - at a predetermined imaging height Η Take the image, use the side light source 3 = the light ray L through the target panel Ρ the surface to be detected ρι, (4) the surface is suppressed as long as the foreign matter F exists, the light L will be reflected or scattered outward from the whole _, a by the camera The reflected or scattered light of the 2 part & part is converted into a power signal to detect the foreign matter F. 201105953 However, in this detection mode, the image pickup apparatus 2 needs to be in close proximity to the surface to be inspected of the target panel P to improve the detection accuracy. However, it is easy for the camera unit 2 to inadvertently touch the target panel p directly or indirectly, causing damage to the target panel p. Furthermore, the brightness of the light source 3 is attenuated after a long period of use, which has an effect on the detection result. Referring to FIG. 2, which is a schematic diagram showing a conventional foreign matter inspection system, the light source 3 of the foreign matter inspection system i〇〇a emits light L from the side tilt angle #, and the image pickup device 2 and the target panel P The surface to be detected pi is arranged at an oblique angle. Panel mounting platform! The conveyor is rectified so that the target panel p is moved on the panel receiving platform 1 in a predetermined transport direction M to scan and detect the foreign matter F on the surface to be detected of the entire panel P. However, the target panel p will vibrate when it is transported, which will easily lead to the detection of =, and &#; Scanning detects the entire target panel p/tool consumption 2' and requires multiple camera units 2, which is relatively expensive. Moreover, the larger the panel P is, the more difficult it is to transport, the more difficult it is to detect, and the longer it is to detect, and the more difficult it is to avoid vibration. In addition, there are many other related devices generally arranged above the panel platform 1, such as static cleaning, which causes the camera device 2 to have a space during configuration. Moreover, the load-bearing capacities of the image pickup device 2, the light source 3, and other related devices are also burdened by the panel receiving platform 1 at the same time. Days - for a long time, it is easy to cause the panel-mounted platform 1 to tilt, affecting the horizontal accuracy of the panel-mounted platform 1, and the vibration problem will gradually become more serious over time. SUMMARY OF THE INVENTION 201105953 Technical Problem to be Solved by the Invention In view of the above, the conventional foreign matter inspection system has limitations in the accuracy of detection, and it is easy to directly or indirectly touch the panel during detection, causing damage. The dynamic scanning type detection is to move the panel in the detection direction in order to scan the entire panel, but the vibration generated during the movement causes an error. Moreover, the larger the panel with the standard, the more difficult it is to transport and detect, and the camera device needs to be configured multiple times, which increases the cost and the difficulty of detection. Furthermore, the load-bearing capacity of the camera device, the light source and other related equipment is borne by the panel-mounted platform, which tends to cause tilt after long-term use, affecting the horizontal accuracy and the stability of the platform and the camera device, and is also a problem that cannot be ignored. Accordingly, it is an object of the present invention to provide a foreign matter inspection system and method thereof, which can have a precision of 5 on the detection and a good vibration-proof capability in the structure without the need of a proximity detection panel to solve the problems of the prior art. Technical Solution for Solving the Problems According to the present invention, the technical means for solving the problems of the prior art includes a panel receiving platform, a device receiving base, at least one pair of linear displacement mechanisms, a light emitting unit, and a light. A receiving unit and a control unit. The panel receiving platform is used for receiving the standard panel, and the equipment receiving base is located adjacent to the panel receiving platform, and the linear displacement mechanism is slidably disposed on the corresponding side of the equipment receiving base, and can be mutually along a detecting direction The displacement is performed in parallel to define a detection zone on the surface to be detected of the target panel. The light emitting unit is disposed in the sensor holder of the linear displacement mechanism, and emits a detection light parallel to the surface to be detected of the target panel in a predetermined scanning mode. The detection beam passes through the detection area. The light receiving unit is disposed at another position corresponding to the light emitting unit to receive the detecting beam, and generates a sequence of detecting the 彳S number of the panel of the target to be detected on the surface to be detected. The light receiving unit generates a first The state signal, when the foreign object is not present on the surface to be inspected on the target panel, the light receiving unit generates a second state signal. The control unit is connected to the light emitting unit, the light receiving unit and the linear displacement mechanism, and drives the linear displacement mechanism to drive the light emitting unit and the light receiving unit along

檢測方向進行同步位移，並接收光接收單元所產生之第一狀態信號及第二狀態信號’據以判斷出標的面板之待檢測面上的異物。在本發明之較佳實施例中，直線位移機構之感測器承置座更結合有位調整座。設備承置基座係為—剛性阻尼基座，其可設有二對直線位移機構，且其中—對直線位移機構之檢射向與另-對直線㈣機構之檢射向相互垂直。標的面板可為玻璃板。此外光毛射單TL包括-雷射二極體及至少一聚焦鏡 ::雷射二極體發射雷射光束，經由聚焦鏡片聚焦成平行之檢測光束通過檢測區。光接收罝；A , ^ u 叹早7^包括一光接收元件及至少光束通過#錢片後集光於光接收元件。在異物檢查方法上更包括因應標的面板之待檢測面，在檢測前調即光發射單元及光接異物時，配合直線位移機構之位之局度，以及在判斷苒之位置’進-步判斷異物之方位。本發明對照先前技術之功效 201105953 經由本發明所採用之技術手段，光發射單元及光接收單元利用直線位移機構進行同步直線位移而自側面掃描標的面板’在檢測時與標的面板間可保持一定距離而不相互接觸’檢測速度比起運送標的面板有大幅的提升。在檢測精度上’直線位移機構可配合近接開關、光學尺，保持同步直線位移時的精確定位。並透過定位調整座動態調整光發射單元及光接收單元之高度，以因應標的面板厚度尺寸之不同，調 φ 整精度可達數μιη之等級，亦可輔助初次裝機時之現場精密定位。再者’光發射單元及光接收單元因設在設備承置基座上’設備承置基座為剛性阻尼基座，能有效抑制光發射單元及光接收單元在位移時的振動，減少檢測誤差。且整體架構上採獨立外掛系統方式運作，設備承置基座與面板承置平台間相互獨立，故在設置時無需變更原有面板承置平台及其運作程序，使面板承置平台不會有在長期承重使用下的問題， • 更同時使光發射單元、光接收單元與面板承置平台間的振動不會互相傳遞，提升檢測精度。本發明所採用的具體實施例，將藉由以下之實施例及附呈圖式作進—步之說明。【實施方式】 ^閱第3 ®、第4圖及第5圖，其係顯示本發明較佳實施例之立體圖、本發明較佳實施例之側視示意圖及本發明較佳只紅例之上視示意圖。如圖所示，本發明之異物檢查系 201105953 » 1 統100b包括一面板承置平台1、一設備承置基座4、至少一對直線位移機構5a、5b、一光發射單元6a、一光接收單元 6b及一控制單元7。面板承置平台1用以承置標的面板P，標的面板p為玻璃板。設備承置基座4設在一基礎結構c上，並位在面板承置平台1之鄰近位置處，與面板承置平台丨間相互獨立。设備承置基座4設有至少一對相互平行且以一檢測方 φ 向I延伸之導引結構41a、41b，分別位在面板承置平台j 之對應側，導引結構41a、41b在本實施例中為滑軌。另外，設備承置基座4在本實施例中更包括有至少一定位調整板 42，結合在導引結構41a、41b侧緣，用於加強固定整個設備承置基座4’並同時定位出一對導引結構41a、4ib間的距離W，以配合不同大小的標的面板p作距離的調整。直線位移機構5a、5b可滑移地結合於設備承置基座4之導引結構41a、41b，在對應的直線位移機構5&、％間定義為一檢測區A。配合參閱第6圖’各直線位移機構5a、5b包括有-滑塊51a、51b及一感測器承置座仏、迅，滑塊51&、训可受驅動而沿檢測方向1進行位移。在本實施例中，直線位移機構5a更結合有—定位調整座仏，包括有至少一個調節各方向的調整桿531 a知2?小 _至）—可受調節而微動位移的微調座體 532a(第 7 圖），IU- μ 口）逯過刼作各個調整桿531a來調節微 °周座體532>a,各方向的位置，以因應標的面板P之待檢測面P1也沈是可配合;^的面板p的厚度，調整感測器承置 201105953 座52a之高度。在實際應用時，上述之設備承置基座4、導引結構41a、 41b及直線位移機構兄、％是採獨立的可分離式設計。配合不同設備檢測時，各組成構件可因應原設備既有面板承置平台的規格及設置環境條件，以外掛方式設置，與既有機台設備組成本發明之異物檢查系統。故無需變更既有機台設備之設計或更換整組機台，在產業利用上具極佳之適用性及可實施性。光發射單元6a設置在其中一直線位移機構5a之感測器承置座52a，光發射單元6a發射一高於標的面板P之待檢測面P1 —預定光束檢測高度D的檢測光束B通過標的面板P之待檢測面P1上之檢測區A。光接收單元6b設置在與光發射單元6a相對應位置之另一直線位移機構5b之感測器承置座52b，光發射單元6a 所發射之檢測光束B通過檢測區A後由光接收單元6b予以接收’產生一序列之檢測信號S。控制單元7連接光發射單元6a、光接收單元6b及直線位移機構5a、5b，控制單元7經由一驅動裝置71驅動直線位移機構5a、5b帶動光發射單元6a及光接收單元讣以檢測方向I進行同步位移，並接收光接收單元6b所產生之檢測信號S，據以判斷出標的面板p之待檢測面ρι上的異物 F。在實際應用時，可於直線位移機構5a、％配合近接開關與光學尺在檢測方向I作精確定位’補償光發射單元以及光接收單元6b間的對位誤差以降低檢測時的誤判。 201105953 參閱第8圖及第9圖，其係顯示光發射單元和光接收單元檢測異物之示意圖。如圖所示，光發射單元6a包括一雷射二極體61a及至少一聚焦鏡片62a、63a。雷射二極體 61a發射雷射光束B0，經由聚焦鏡片62a、63a聚焦成平行之檢測光束B通過檢測區A。光接收單元6b.包括一光接收元件61b及至少一集光鏡片62b，檢測光束B通過集光鏡片62b後集光於光接收元件 61b。由於檢測光束B經過異物F時會產生陰影Z，陰影Z 大小的改變會影響檢測光束B被光接收元件61b接收時之光量，亦即接收的光亮度，光接收元件61b基於接收之檢測光束B之光量改變產生檢測信號S輸出。當存在異物F時，光接收單元6b之光接收元件61b產生一第一狀態信號S1，未存在異物F時，光接收單元6b之光接收元件61 b則產生一第二狀態信號S2。控制單元7即是接收第一狀態信號S1 及第二狀態信號S2，據以判斷出標的面板P之待檢測面P1 上的異物F。參閱第10圖，其係顯示本發明較佳實施例之控制流程圖，並同時配合前述第3圖至第9圖對本發明較佳實施例之控制流程作一說明如下。首先，將標的面板P定位承置於面板承置平台1 (步驟 101)，再因應標的面板P之待檢測面P1，配合標的面板P 的厚度，透過定位調整座53a調節光發射單元6a及光接收單元6b之高度（步驟102)。之後由光發射單元6a於一預設掃描模式發射平行於標的面板P之待檢測面P1之檢測光束 201105953 =過彳的之彳^ρι至繼單 )可猎此同時先將光發射單元㈣光接收單元6b ;驟對位以降低誤判，射單元6a可早；0 6b予以及因應不同檢㈣求來調節其掃描方式：β °°域掃插 5 =控制單元7經由驅動裝置71驅動直線位移機構心％帶動該光發射單⑽及光接收單元处沿檢測方The detecting direction is synchronously displaced, and the first state signal and the second state signal generated by the light receiving unit are received to determine the foreign matter on the surface to be detected of the target panel. In a preferred embodiment of the invention, the sensor housing of the linear displacement mechanism is further coupled to a position adjustment mount. The equipment receiving base is a rigid damping base, which can be provided with two pairs of linear displacement mechanisms, and wherein - the detection of the linear displacement mechanism and the detection of the other-pair linear (four) mechanism are perpendicular to each other. The target panel can be a glass panel. In addition, the light singular single TL includes a laser diode and at least one focusing mirror::the laser diode emits a laser beam which is focused through a focusing lens into a parallel detection beam passing through the detection zone. The light receiving 罝; A , ^ u sighs 7^ includes a light receiving element and at least the light beam passes through the #钱片 and collects light on the light receiving element. In the foreign matter inspection method, the surface to be inspected corresponding to the target panel is further included, and the position of the position of the linear displacement mechanism and the position of the position of the linear displacement mechanism are determined before the detection, that is, when the light emitting unit and the optical foreign object are connected, The orientation of the foreign body. According to the technical means adopted by the present invention, the light emitting unit and the light receiving unit perform synchronous linear displacement using a linear displacement mechanism and scan the target panel from the side to maintain a certain distance from the target panel during detection. Without touching each other' the detection speed is greatly improved compared to the panel that carries the target. In the detection accuracy, the linear displacement mechanism can be used with the proximity switch and the optical scale to maintain precise positioning when the linear displacement is synchronized. The height of the light-emitting unit and the light-receiving unit is dynamically adjusted through the positioning adjustment seat, and the precision of the φ can be adjusted to a level of several μm depending on the thickness of the panel, which can also assist in the precise positioning of the field during the initial installation. Furthermore, the 'light-emitting unit and the light-receiving unit are provided on the equipment receiving base.' The equipment receiving base is a rigid damping base, which can effectively suppress the vibration of the light-emitting unit and the light-receiving unit during displacement, and reduce the detection error. . The whole structure is operated by a separate external system. The equipment receiving base and the panel mounting platform are independent of each other. Therefore, it is not necessary to change the original panel mounting platform and its operating procedures during installation, so that the panel mounting platform does not have In the case of long-term load-bearing use, • The vibration between the light-emitting unit, the light-receiving unit and the panel-mounted platform is not transmitted to each other at the same time, and the detection accuracy is improved. The specific embodiments of the present invention will be described by the following examples and accompanying drawings. [Embodiment] FIG. 3, FIG. 4 and FIG. 5 are a perspective view showing a preferred embodiment of the present invention, a side view of a preferred embodiment of the present invention, and a preferred example of the present invention. See the schematic. As shown in the figure, the foreign body inspection system 201105953 of the present invention includes a panel receiving platform 1, a device receiving base 4, at least one pair of linear displacement mechanisms 5a, 5b, a light emitting unit 6a, and a light. The receiving unit 6b and a control unit 7. The panel receiving platform 1 is used to support the target panel P, and the target panel p is a glass panel. The equipment receiving base 4 is disposed on a base structure c and is located adjacent to the panel receiving platform 1 and is independent of the panel receiving platform. The device receiving base 4 is provided with at least one pair of guiding structures 41a, 41b which are parallel to each other and extend in a detecting direction φ I, respectively located on the corresponding side of the panel receiving platform j, and the guiding structures 41a, 41b are In this embodiment, it is a slide rail. In addition, the device receiving base 4 further includes at least one positioning adjusting plate 42 in the embodiment, and is coupled to the side edges of the guiding structures 41a, 41b for reinforcing and fixing the entire device receiving base 4' and simultaneously positioning. The distance W between the pair of guiding structures 41a, 4ib is adjusted to match the size of the target panel p of different sizes. The linear displacement mechanisms 5a, 5b are slidably coupled to the guiding structures 41a, 41b of the apparatus receiving base 4, and are defined as a detecting area A between the corresponding linear displacement mechanisms 5 & Referring to Fig. 6, each of the linear displacement mechanisms 5a, 5b includes a slider 51a, 51b and a sensor mounting seat, and the slider 51&, the slider 51&, can be driven to be displaced in the detection direction 1. In this embodiment, the linear displacement mechanism 5a is further coupled with a positioning adjustment seat, including at least one adjustment rod 531 for adjusting each direction, and a fine adjustment seat 532a that can be adjusted and slightly displaced. (Fig. 7), IU-μ port) 逯各个各个各个各个 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 531 The thickness of the panel p is adjusted to the height of the 201105953 seat 52a. In practical applications, the above-mentioned equipment receiving base 4, guiding structures 41a, 41b and the linear displacement mechanism brother, % are independent and separable design. When combined with different equipment testing, each component can be set in an external connection according to the specifications and setting environmental conditions of the original panel-mounted platform, and the organic equipment constitutes the foreign object inspection system of the present invention. Therefore, it is not necessary to change the design of the organic equipment or replace the entire set of machines, and it has excellent applicability and implementability in industrial utilization. The light emitting unit 6a is disposed in the sensor housing 52a of the linear displacement mechanism 5a, and the light emitting unit 6a emits a detection beam B1 of the to-be-detected surface P1 of the target panel P, which has a predetermined beam detection height D, through the target panel P. The detection area A on the detection surface P1. The light receiving unit 6b is disposed at the sensor receiving seat 52b of the other linear displacement mechanism 5b corresponding to the light emitting unit 6a, and the detecting beam B emitted from the light emitting unit 6a passes through the detecting area A and is then received by the light receiving unit 6b. Receiving 'generates a sequence of detection signals S. The control unit 7 is connected to the light emitting unit 6a, the light receiving unit 6b and the linear displacement mechanisms 5a, 5b. The control unit 7 drives the linear displacement mechanisms 5a, 5b via a driving device 71 to drive the light emitting unit 6a and the light receiving unit 讣 to detect the direction I. The synchronous displacement is performed, and the detection signal S generated by the light receiving unit 6b is received, thereby determining the foreign matter F on the surface to be detected ρ of the target panel p. In practical applications, the linear displacement mechanism 5a, % can be used to accurately position the proximity switch and the optical scale in the detection direction I to compensate for the alignment error between the light emitting unit and the light receiving unit 6b to reduce false positives during detection. 201105953 Referring to Figures 8 and 9, a schematic diagram showing the detection of foreign matter by the light-emitting unit and the light-receiving unit is shown. As shown, the light emitting unit 6a includes a laser diode 61a and at least one focusing lens 62a, 63a. The laser diode 61a emits the laser beam B0, and is focused by the focusing lenses 62a, 63a into parallel detection beams B passing through the detection area A. The light receiving unit 6b includes a light receiving element 61b and at least one light collecting lens 62b, and the detecting light beam B is collected by the light collecting lens 62b and collected by the light receiving element 61b. Since the detection beam B passes through the foreign matter F, a shadow Z is generated, and the change in the size of the shadow Z affects the amount of light when the detection beam B is received by the light receiving element 61b, that is, the received light luminance, and the light receiving element 61b is based on the received detection beam B. The change in the amount of light produces a detection signal S output. When the foreign matter F is present, the light receiving element 61b of the light receiving unit 6b generates a first state signal S1, and when the foreign matter F is absent, the light receiving element 61b of the light receiving unit 6b generates a second state signal S2. The control unit 7 receives the first state signal S1 and the second state signal S2 to determine the foreign matter F on the surface P1 to be detected of the target panel P. Referring to Fig. 10, there is shown a control flow diagram of a preferred embodiment of the present invention, and the control flow of the preferred embodiment of the present invention is described below in conjunction with the foregoing Figs. 3 to 9. Firstly, the target panel P is positioned and placed on the panel receiving platform 1 (step 101), and then the light emitting unit 6a and the light are adjusted through the positioning adjusting seat 53a according to the thickness of the target panel P in response to the surface P1 of the target panel P to be detected. The height of the receiving unit 6b (step 102). Then, the light emitting unit 6a emits a detection beam 201105953 parallel to the to-be-detected surface P1 of the target panel P in a predetermined scanning mode, and then the light emitting unit (four) is lighted at the same time. Receiving unit 6b; aligning the bit to reduce the misjudgment, the shooting unit 6a can be early; 0 6b and adjusting the scanning mode according to different detections (4): β °° domain sweeping 5 = control unit 7 driving linear displacement via driving device 71 The mechanism core drives the light emission unit (10) and the light receiving unit along the detection side

7平行地進行同步位移（步驟⑽）。雖然在本實施例中\ 線位移機構5a、5b，但亦可在設備承置基座q 對直線位移機構5aH、5d(第n圖），其中直線位移機構5a、5b之檢測方向η與另-對直線位移機構之檢測方向係相互垂直，在此步驟巾係_二對直線位移機構5a、5b、5e、5d各帶動光發射單元6a、6e及光接收單元 6b、6d沿各對直線位移機構之檢測方相互平行地進行同步位移。在位移時，由光接收單元6b接收通過標的面板p之待檢測面P1之檢測光束B後，產生一序列檢測信號s，當標的面板P之待檢測面P1上存在異物F時，光接收單元讣產生一第一狀態信號S1，標的面板P之待檢測面P1上未存在異物F時，光接收單元6b產生一第二狀態信號S2，第一狀態信號S1與該第二狀態信號S2之間具有一預設的光亮度誤差容許值AS(步驟1〇5)。光亮度誤差容許值AS用以界定異物F的容許大小，當異物F的尺寸大到一定程度，其所造成的光量改變，亦即光亮度因異物F所造成誤差值，超出光亮度誤差容許值AS時，才會被視為有存在異物F，在 -11 - 201105953 光冗度誤差容許值之内則被視為未存在異物f。控制單元7接收光接收單元补所產生之第一狀態信號 si及第二狀態信號S2，據以判斷出標的面板p之待檢測面 P1上的異物F(步驟106)，更可以配合直線位移機構之位置，判斷出標的面板P之待檢測面P1上的異物F之方位（判斷方位之詳細原理可參閱第11圖及第12圖）。參閱第11圖，其係顯示本發明另一實施例之上視示意 # 圖。如圖所示，設備承置基座4設有二對相互平行之導引二構41a、41b、41c、41d，且其中一對導引結構41a、41b之檢測方向11與另一對導引結構41c、41d之檢測方向12相互垂直。導引結構41a、41b、41c、41d分別結合有直線位移機構a 5b 5c、5d，及成對的光發射單元如和光接收單元6b與成對的光發射單元&和光接收單元6d，由光發射單元6a、6C分別發射之檢測光卜B2通過檢測區A，以檢測異物F。 • 參㈣12圖，其係顯示以二檢測光束檢測異物之示意圖。在實際應料，利用二檢測光束m、B2同時進行異物 F檢測，其效果可進-步朗異物F的方位及形狀^在實施上，可在判斷出檢測到異物F時，利用直線位移機構^、 5b、5c、5d的位置反推得出異物F在標的面板？上兩個方向的位置，而定位出其方位。i本、万位再者，利用遮光陰影造成的光量改變即可求得異物F麵財__，加上湘檢測光束m、B2檢測發現有異物？時的妙與結束位置即可求得異物F在兩個方向的寬度W1、W2，進而從面積及寬度W1、 -12 - 201105953 W2推’出異物F各尺寸參數以至於整體形狀。由以上之實施例可知’本發明所提供之異物檢查系統確具產業上之利用價值，故本發明業已符合於專利之要件。准以上之敘述僅為本發明之較佳實施例說明，凡精於此項技藝者當可依據上述之說明而作其它種種之改良，惟這些改變仍屬於本發明之發明精神及以下所界定之專利範圍中。【圖式簡單說明】第1圖係顯示習知之異物檢查系統之示意圖之一；第2圖係顯示習知之異物檢查系統之示意圖之二；第3圖係顯示本發明較佳實施例之立體圖；第4圖係顯示本發明較佳實施例之側視示意圖；第5圖係顯示本發明較佳實施例之上視示意圖；第6圖係顯示直線位移機構結合導引結構之立體圖；第7圖係顯示定位調整座之立體圖；第8圖及第9圖係顯示級射單元和光接收單元檢測異物之示意圖；第10圖係顯示本發明較佳實施例之控制流程圖；第11圖係顯示本發明另一實施例之上視示意圖；第12圖係顯示以二檢測光束檢測異物之示意圖。【主要元件符號說明】 100 ' 100a > 100b 異物檢查系統 1 面板承置平台 -13 - 2011059537 Synchronous displacement is performed in parallel (step (10)). Although in the present embodiment, the linear displacement mechanisms 5a, 5b can also be used to mount the base q to the linear displacement mechanisms 5aH, 5d (Fig. n), wherein the detection directions η of the linear displacement mechanisms 5a, 5b and the other - the direction of detection of the linear displacement mechanism is perpendicular to each other, and in this step, the two pairs of linear displacement mechanisms 5a, 5b, 5e, 5d respectively drive the light-emitting units 6a, 6e and the light-receiving units 6b, 6d to be displaced along each pair of straight lines The detecting sides of the mechanism are synchronously displaced in parallel with each other. When the light receiving unit 6b receives the detection beam B of the surface to be detected P1 of the target panel p, a sequence of detection signals s is generated. When the foreign object F is present on the surface P1 of the target panel P, the light receiving unit When the first state signal S1 is generated, and the foreign object F is not present on the to-be-detected surface P1 of the target panel P, the light receiving unit 6b generates a second state signal S2, between the first state signal S1 and the second state signal S2. There is a preset lightness error tolerance AS (step 1〇5). The brightness error tolerance value AS is used to define the allowable size of the foreign matter F. When the size of the foreign matter F is large to a certain extent, the amount of light caused by the change is small, that is, the brightness value caused by the foreign matter F exceeds the allowable value of the brightness error. In the case of AS, it is considered to be the presence of foreign matter F, and within the tolerance of -11 - 201105953 light redundancy error, it is considered that there is no foreign matter f. The control unit 7 receives the first state signal si and the second state signal S2 generated by the light receiving unit, and determines the foreign matter F on the surface P1 to be detected of the target panel p (step 106), and can further cooperate with the linear displacement mechanism. At the position, the orientation of the foreign matter F on the surface P1 to be inspected of the target panel P is judged (refer to FIGS. 11 and 12 for the detailed principle of determining the orientation). Referring to Figure 11, there is shown a top view of another embodiment of the present invention. As shown in the figure, the apparatus receiving base 4 is provided with two pairs of mutually parallel guiding structures 41a, 41b, 41c, 41d, and the detecting direction 11 and the other pair guiding of the pair of guiding structures 41a, 41b The detection directions 12 of the structures 41c, 41d are perpendicular to each other. The guiding structures 41a, 41b, 41c, 41d are respectively combined with the linear displacement mechanisms a 5b 5c, 5d, and the pair of light emitting units such as the light receiving unit 6b and the pair of light emitting units & and the light receiving unit 6d, by the light The detection light B2 emitted by the emission units 6a, 6C respectively passes through the detection area A to detect the foreign matter F. • Refer to (4) 12, which shows a schematic diagram of detecting foreign matter with two detection beams. In the actual application, the second detection beam m, B2 can be used to simultaneously detect the foreign matter F, and the effect can be further advanced. The orientation and shape of the foreign matter F can be implemented. When the foreign matter F is detected, the linear displacement mechanism can be used. The position of ^, 5b, 5c, 5d is reversed to get the foreign object F in the target panel? Position the top two directions and position them. i, 10,000, and again, the amount of light caused by shading shadows can be used to obtain foreign matter F. __, plus the detection of light beams m, B2 detected foreign objects? At the time and the end position, the widths W1 and W2 of the foreign matter F in both directions can be obtained, and the size parameters of the foreign matter F can be pushed out from the area and the width W1, -12 - 201105953 W2 to the overall shape. It can be seen from the above embodiments that the foreign matter inspection system provided by the present invention has industrial use value, and therefore the present invention has been in conformity with the requirements of the patent. The above description is only for the preferred embodiment of the present invention, and those skilled in the art can make other improvements according to the above description, but these changes still belong to the inventive spirit of the present invention and the following definitions. In the scope of patents. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a conventional foreign matter inspection system; FIG. 2 is a schematic view showing a conventional foreign matter inspection system; FIG. 3 is a perspective view showing a preferred embodiment of the present invention; 4 is a side view showing a preferred embodiment of the present invention; FIG. 5 is a top view showing a preferred embodiment of the present invention; and FIG. 6 is a perspective view showing a linear displacement mechanism in combination with a guiding structure; A perspective view showing a positioning adjustment seat; FIGS. 8 and 9 are schematic diagrams showing the detection of foreign matter by the emission unit and the light receiving unit; FIG. 10 is a control flow chart showing a preferred embodiment of the present invention; A top view of another embodiment of the invention; Fig. 12 is a schematic view showing the detection of foreign matter by two detection beams. [Main component symbol description] 100 ' 100a > 100b foreign object inspection system 1 panel mounting platform -13 - 201105953

11 運送機構 2 攝像裝置 3 光源 4 設備承置基座 41a、41b、41c、41d 導引結構 42 定位調整板 5a、5b、5c、5d 直線位移機構 51a、51b 滑塊 52a、52b 感測器承置座 53a 定位調整座 531a 調整調整桿 532a 微調座體 6a 光發射單元 6b 光接收單元 6c 光發射單元 6d 光接收單元 61a 雷射二極體 61b 光接收元件 62a、63a 聚焦鏡片 62b 集光鏡片 7 控制單元 71 驅動裝置 A 檢刺區 B、B1、B2 檢測光束 -14 - 20110595311 transport mechanism 2 camera device 3 light source 4 equipment receiving base 41a, 41b, 41c, 41d guiding structure 42 positioning adjustment plate 5a, 5b, 5c, 5d linear displacement mechanism 51a, 51b slider 52a, 52b sensor bearing Rack 53a Positioning adjustment seat 531a Adjustment adjustment lever 532a Fine adjustment seat 6a Light emitting unit 6b Light receiving unit 6c Light emitting unit 6d Light receiving unit 61a Laser diode 61b Light receiving element 62a, 63a Focusing lens 62b Light collecting lens 7 Control unit 71 drive device A spur zone B, B1, B2 detection beam-14 - 201105953

BO 雷射光束 C 基礎結構 D 光束檢測高度 F 異物 H 攝像高度 I 、 11 、 12 檢測方向 L 光線 M 運送方向 P 標的面板 PI 待檢測面 S 檢測信號 SI 第一狀態信號 S2 第二狀態信號 W 距離 W1 ' W2 寬度 z 陰影 △ s 光亮度誤差容許值 -15 -BO Laser beam C Infrastructure D Beam detection height F Foreign object H Camera height I, 11, 12 Detection direction L Light M Transport direction P Target panel PI To be detected surface S Detection signal SI First state signal S2 Second state signal W Distance W1 ' W2 Width z Shadow △ s Brightness error tolerance -15 -

Claims

201105953 • » 七、申請專利範圍· 1. 一種異物檢查系統，用以對一標的面板之待檢測面進行異物檢測，該系統包括：一面板承置平台，用以承置該標的面板；一設備承置基座，位在該面板承置平台之鄰近位置處；至少一對直線位移機構，可滑移地配置在該設備承置基座之對應側，該直線位移機構可沿一檢測方向相互平 ® 行地進行位移，以在該標的面板之待檢測面上定義出一檢測區；至少一光發射單元，設置在其中一直線位移機構，該光發射單元於一預設掃描模式發射一平行於該標的面板之待檢測面之檢測光束通過該檢測區；至少一光接收單元，設置在與該光發射單元相對應位置之另一直線位移機構，該光發射單元所發射之檢測光束通過該檢測區後由該光接收單元予以接收，產生一 ® 序列檢測信號，該標的面板之待檢測面上存在異物時，該光接收單元產生一第一狀態信號，該標的面板之待檢測面上未存在異物時，該光接收單元產生一第二狀態信號；一控制單元，連接該光發射單元、該光接收單元及該直線位移機構，該控制單元驅動該直線位移機構帶動該光發射單元及光接收單元，沿著該檢測方向進行同步位移，並接收該光接收單元所產生之第一狀態信號及 -16 - 201105953 第二狀態信號的異物。據以列斷出該標的面板之待檢測面上 :申'^專利乾圍第！項所述之異物檢查系統，其中該直之^移機構更結合有—定位調整座，以因應該標的面板待檢測面’調整該感測ϋ承置座之高度。 •如申請專利範圍第i項所述之異物檢查系統，其中該設備承置基座係設有二對直線位移機構，該其中一對直線位移機構之檢測方向與該另一對直線位移機構之檢測方向係相互垂直。 4·如申請專利範圍第1項所述之異物檢查系統，其中該光發射單元包括一雷射二極體及至少一聚焦鏡片，該雷射二極體發射雷射光束，經由該聚焦鏡片聚焦成平行之檢 ’則光束通過該檢測區。如申請專利範圍第1項所述之異物檢查系統，其中該光接收單元包括一光接收元件及至少一集光鏡片，該檢測光束通過該集光鏡片後集光於該光接收元件。 6·如申請專利範圍第1項所述之異物檢查系統，其中該標的面板係為玻璃板。 -17 - 201105953 * « 如申明專利圍第1項所述之異物檢查系統，其中該設備承置基座係為一剛性阻尼基座。種異物檢查方法，係藉由一異物檢查系統對一標的面板之待檢測面進行異物檢測，該異物檢查系統包括一面板承置平台、一位在該面板承置平台之鄰近位置處之設備承置基座、至少一對可滑移地配置在該設備承置基座 • 之對應側之直線位移機構，至少一設置在其中一直線位移機構之級射單元、至少—設置在與該光發射單元相對應位置之另一直線位移機構之光接收單元，該方法包括下列步驟： (a) 將一標的面板定位承置於該面板承置平台； (b) 由該光發射單元於一預設掃描模式發射平行於該標的面板之待檢測面之檢測光束通過標的面板之待檢 ^ 測面至該光接收單元； (0驅動該直線位移機構帶動該光發射單元及光接收單元沿一預設的檢測方向相互平行地進行同步位移； (d)由該光接收單元接收該通過標的面板之待檢測面之檢測光束後，產生一序列檢測信號，當該標的面板之待檢測面上存在異物時，該光接收單元產生一第一狀態栺號，該標的面板之待檢測面上未存在異物時，該光接收單元產生一第二狀態信號，該第一狀態信號與該第二狀態信號之間具有一預設的光亮度誤差容許 201105953 (e)依據該光接收單元所產生之第一狀態信號及第二狀態信號，據以判斷出該標的面板之待檢測面上的異物。 9·如申請專利範圍第8項所述之異物檢查方法，其中步驟 (a)之後，更包括因應該標的面板之待檢測面，調節該光發射單元及光接收單元之高度之步驟。 1〇·如申請專利範圍第8項所述之異物檢查方法，其中步驟 (e)中t包括配合該對直線位移機構之位置，判斷出該標的面板之待檢測面上的異物之方位。201105953 • » VII. Patent application scope 1. A foreign object inspection system for detecting foreign objects on a surface to be inspected on a target panel. The system includes: a panel mounting platform for receiving the target panel; The susceptor is disposed adjacent to the panel receiving platform; at least one pair of linear displacement mechanisms are slidably disposed on corresponding sides of the device receiving base, and the linear displacement mechanism can mutually move along a detecting direction The plane is displaced to define a detection area on the surface to be detected of the target panel; at least one light emitting unit is disposed in the linear displacement mechanism, and the light emitting unit emits a parallel in a predetermined scanning mode The detection beam of the surface to be detected of the target panel passes through the detection area; at least one light receiving unit is disposed at another position corresponding to the light emitting unit, and the detection beam emitted by the light emitting unit passes through the detection area After receiving by the light receiving unit, a ® sequence detection signal is generated, and a foreign object exists on the surface to be detected of the target panel The light receiving unit generates a first state signal, and the light receiving unit generates a second state signal when the foreign object is not present on the surface to be detected of the target panel; a control unit is connected to the light emitting unit, and the light receiving unit a unit and the linear displacement mechanism, the control unit drives the linear displacement mechanism to drive the light emitting unit and the light receiving unit, synchronously shift along the detecting direction, and receive the first state signal generated by the light receiving unit and -16 - 201105953 Foreign matter of the second status signal. According to the column to break out the surface of the target panel to be tested: Shen '^ patent dry circumference! The foreign matter inspection system of the present invention, wherein the straight-moving mechanism further incorporates a positioning adjustment seat to adjust the height of the sensing bead holder according to the panel to be inspected. The foreign body inspection system according to the invention of claim 1, wherein the equipment receiving base is provided with two pairs of linear displacement mechanisms, wherein the detection direction of the pair of linear displacement mechanisms and the other pair of linear displacement mechanisms The detection directions are perpendicular to each other. 4. The foreign matter inspection system of claim 1, wherein the light emitting unit comprises a laser diode and at least one focusing lens, the laser diode emitting a laser beam, and focusing through the focusing lens In parallel, the beam passes through the detection zone. The foreign matter inspection system of claim 1, wherein the light receiving unit comprises a light receiving element and at least one collecting lens, and the detecting beam passes through the collecting lens and collects light on the light receiving element. 6. The foreign matter inspection system of claim 1, wherein the target panel is a glass panel. -17 - 201105953 * « The foreign body inspection system of claim 1, wherein the equipment receiving base is a rigid damping base. The foreign matter inspection method performs foreign object detection on a surface to be inspected of a target panel by a foreign matter inspection system, and the foreign matter inspection system includes a panel receiving platform and a device bearing at a position adjacent to the panel receiving platform. a base, at least one pair of linear displacement mechanisms slidably disposed on a corresponding side of the apparatus receiving base, at least one of the firing units disposed in the linear displacement mechanism, at least - disposed in the light emitting unit a light receiving unit of another linear displacement mechanism corresponding to the position, the method comprising the following steps: (a) placing a target panel on the panel receiving platform; (b) the light emitting unit is in a predetermined scanning mode a detection beam that emits a surface to be detected parallel to the target panel passes through the to-be-detected surface of the target panel to the light receiving unit; (0 drives the linear displacement mechanism to drive the light emitting unit and the light receiving unit along a predetermined detection The directions are synchronously displaced in parallel with each other; (d) after the light receiving unit receives the detection beam passing through the surface to be detected of the target panel, a sequence of detection signals, when there is a foreign object on the surface to be detected of the target panel, the light receiving unit generates a first state nickname, and when the foreign object of the target panel is not detected, the light receiving unit generates a first a second state signal, the first state signal and the second state signal having a predetermined brightness error tolerance 201105953 (e) according to the first state signal and the second state signal generated by the light receiving unit, Judging the foreign matter on the surface to be inspected on the target panel. 9. The foreign matter inspection method according to Item 8 of the patent application, wherein after step (a), the light is adjusted according to the surface to be inspected of the panel to be marked The method of detecting the height of the transmitting unit and the light receiving unit. The method for checking the foreign matter according to item 8 of the patent application, wherein the step (e) includes the position of the pair of linear displacement mechanisms, and the panel of the target is determined. The orientation of the foreign object on the detection surface.

η·如申請專利範圍第8項所述之異物檢查方法，其中該設備承置基座配置有二對直線位移機構，該其中—對直 3移機構之檢測方向與該另—對直線位移機構之檢測 =相互垂直’步_中係驅動該二對直線 ^動該級射單元及光接收單^沿該各對直線位移機構之檢測方相互平行地進行同步位移。η. The foreign matter inspection method according to Item 8 of the patent application, wherein the equipment receiving base is provided with two pairs of linear displacement mechanisms, wherein the detection direction of the straight 3-shift mechanism and the other-to-linear displacement mechanism Detecting = mutually perpendicular 'step _ middle drive the two pairs of straight lines and the light receiving unit is synchronously displaced parallel to each other along the detection sides of the pair of linear displacement mechanisms.