201044656 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種音洩咸、、則哭 - θ茂以測斋，尤指一種寬頻音洩感 測器及其製造方法。 【先前技術】 按既有滚珠螺杯裝置主要係利用滚珠與螺桿及螺套 相摩擦的方式5使虫累套可3安冬 系套了相對螺桿產生㈣，既有滾珠螺 样裝置於長時間的使用；^^ t ο 丁』幻便用後，由於螺桿與螺套間相互摩擦的 方式會使其間隙變大，進而讓既有滾珠螺桿裝置於操作時 谷易產生不順暢的作動、滚珠破裂或損壞的現象； $了能預先避免前述讓滾珠螺桿裝置產生毀損的現象 ，目剛已有業者於既有滾珠螺桿裝置的螺套上，裝設—用 以感測滾珠螺桿裝置磨缸橹彡 、目,” “教罝磨耗[月形的音攻感測器，既有音茂感 測益主要透㈣測螺桿與螺套相互摩擦的聲音頻率變化， 〇 來監測螺桿與螺套間的磨損情形，藉以提供-預防滾珠螺 桿裝置毁損的效果； 頂防展珠螺 然而，既有的音茂感測器雖可對於滾珠 毀損監測，但既有的立冲汚、目丨丨。。甘^ ~ 衣置進仃 尤有的曰洩感測為其頻寬不夠寬廣，因此， 在用以監測滾珠螺桿裝置的毀損時，必須先 裝置產生毁損的頻率範 衷珠螺才于 沾立.由, 手靶圍纟“選擇與此頻寬範圍相同201044656 VI. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a sound leaking salt, and then crying - θ 茂 to measure fasting, especially a wide frequency sound leak sensor and a method of manufacturing the same. [Prior Art] According to the existing ball screw cup device, the ball is mainly rubbed with the screw and the screw sleeve 5 to make the insect cover 3 pairs of the winter screw (4), and the ball screw type device is used for a long time. The use of ^^ t ο 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 』 〖 —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— The phenomenon of rupture or damage; the phenomenon that the ball screw device is damaged in the foregoing can be avoided in advance, and it has been installed on the screw sleeve of the existing ball screw device to sense the ball screw device.彡,目,” “Teaching wear [monthly sound attack sensor, both sound and sensation is mainly through (4) measuring the frequency change of the friction between the screw and the screw sleeve, 〇 to monitor the between the screw and the screw Wear situation, to provide - prevent the ball screw device damage effect; top anti-bill snail However, the existing phono sensor can be used for ball damage monitoring, but the existing effluent, witness. . Gan ^ ~ clothing into the 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃 仃By, hand target cofferdam "select the same range as this bandwidth
的音洩感測器進行龄、制由 J 仃廉測使用，不僅在使用上相當不 賭貝夕個頻寬不同的音浅感測器力 間及成本，誠有加以改進之處。子曰加里測所需之時 f發明内容】 4 201044656 …以監測滾珠螺桿裝置毀損的音沒感測 η的缺失及不足，本發明之目的在於提供-種可 準確Υ貞測且節省点太Μ & 4本的見頻曰洩感測器及其製造方法者。 述目的，本發明所運用的技術手段係在於提供 1頻梅測器製造方法，其操作流程包括.Η、 壓jrr作：利用微製程技術製作-波浪形的微米 計—料，並透過光罩對於圓進行 Ο ，糟以於該石夕晶圓上姓刻出所需的結構形狀，於 的矽晶圓上塗佈一聚二甲基矽氧烷，待該聚二甲基 S軋烷成形後相對矽晶圓翻模取出成形的聚二甲基矽氧‘ 、’其中對於成形的聚二甲基石夕氧炫灌人—環氧基樹脂^ 以形成該壓印模具的上蓋，對於.成形的聚二甲基石夕氧貌^ 覆:虫鼠料，待壤料成形後移除成形的聚二甲基石夕氧烧並灌 入％乳基樹脂’再經由加熱的方式將壤料移除後，即可得 到S亥壓印模具的下蓋； ❹ 夕波浪狀壓電薄膜製作：準備一多層的廢電薄膜，將該 夕層的麼電薄膜放置於前述壓印模具製作步驟中所形成的 二：蓋之間，透過壓印模具上、下蓋的壓印形成—波浪 狀的多層壓電薄膜； “偵測頭製作：於一聚二甲基矽氧烷基材、一蠟料、一 被氧基樹脂及一培養皿間形成所需之偵測頭；以及 音茂感測器組裝：準備一結合管’並於該波浪狀多層 :電溥膜的-側面上灌入一環氧基樹月旨作為一背板，將該 偵測頭與該波浪狀多層壓電薄膜的另_側面相結合， 測頭的前端裝設一與結合管相結合的結合板，於結 5 201044656 中心係貫穿有一供偵測頭外露的穿孔，即穿士 ①成本發明音洩 感測器之組裝。 ' 進一步’該多層的壓電薄膜係為一多屏 曰J偏聚二氟厂 烯壓電薄膜，該多層偏聚二氟乙烯壓電薄膜的卞 構係由一偏聚二氟乙烯薄膜及兩分別覆蓋於 曰… 、场聚二氣乙嫌 薄膜頂面及頂面的聚對亞苯基二甲基所組 於 X ’其中於偏聚 二氟乙烯薄膜的頂面及頂面及各聚對亞笑其_ 人 y 土 一曱基的一侧 Ο 面係分別鍍上一銀電極，且於各電極間遠 。 伐有—導電膠帶 再進一步，該多層壓電薄膜係為一具三 二氟乙稀壓電薄膜。 “。構的偏聚 較佳地，在製作偵測頭的步驟中，其係將— :聚二甲基石夕氧烧基材上’將該鋼珠移除後於聚入 氧烷基材上形成一凹槽’於該凹槽内灌入一蠟料：心： -蠟球，將該成形的蠟球自凹槽中取出，並：或 ❹ 設有一均勻分佈的蠟料，將' 皿中 合，於培養皿中灌入-聚二甲^氧=皿中的虫鼠料相結 土夕氧燒藉以形成所φ的分* 型，將該聚二甲基石夕氧院模型與培養皿相分離，再將—二 乳基樹脂灌人該聚二甲切氧烧模型中成形，待該環氧= 樹脂成形後與該聚二曱基矽氧 土 7軋烷核型相分離後，即可得到 所·^的環氧基樹脂偵測頭。 較佳地，該結合管係為—内徑4 12_，外 1 5 m m的紹管，該社人-私达 外 、口 σ不為—鋁板，且於鋁板的兩端係 -有讀個用以固定音茂感測器之螺固件。 而藉由上述技術手段所製成之寬頻音线感測器’係包 6 201044656 結合管 读測頭及一結合板 含有一多層壓電薄膜、 其中： 該多層壓電薄膜係呈一波浪 膜於一側面係設有—背板； 構，該多層壓電薄 I。合官係與該多層壓電薄 ㈣測頭係設於該多層麼電薄二板相結合； 以及 ，螟異於背板的一側面； Ο °亥、°板係與結合管相結合而位於俏 該結合板於十心處 ；偵測頭的前端處， 進-步，穿有一供伯測頭外露的穿孔。 δ亥夕層壓電薄膜係為—且_ 氟乙烯壓電薄臈。 八—層結構的偏聚二 # 1^步’該結合管係為_内 15mm的鋁管，今处人… 二為2mm，外徑為 設有複數個用以gj $ i於鋁板的兩端係 一 用以固疋音洩感測器之螺固件。 實施上述技術手段 製造方法可獲得之優點及功效至少 1 '準確發明寬頻 層的壓電薄膜來吝4 L 你了稽由多 専膜來產生較大的電荷量，藉 訊號，使音洩烕測哭7你# 权a的頻率 2、：、。可便準確地對於聲音頻率進行偵測。 模且上 斟本·本發明寬頻音洩感測器，可藉由壓印 /[Μ 多層壓電薄膜進行麗印成形的操作，形 讓歷電薄膜…中該波浪狀的曲折結構係可 '^員或交大，進而加寬其偵測的頻率節$ m爐杰^ #貝夕個頻寬不同的音洩感測器進行使 用，構成—種可節省成本的寬頻Μ感測器者。 7 201044656 【實施方式】 為能詳細瞭解本發明的技術特徵及實用功效，並可依 照說明書的内容來實施，兹進-步以如圖式所示(第… 圖所示)的較佳實施例，詳細說明如后： 八 本毛明所提供寬頻音茂感測器製造方法之操作流 如下所示： Ο Ο Α、壓印模具(1〇)製作：如第二圖所示，主要係利用微 “呈技術製作-波浪形的微米壓印模具(10)，#中係先設 , 卓對於一矽日日® (20)進行黃光微影， 藉以於該石夕晶圓_上钱刻出所需的結構形狀於姓刻後 的石夕晶圓(20)上塗佈-聚二甲基石夕氧烧(p〇_m丨 SN〇x_;PDMS)’待該聚二甲基石夕氧燒成形後相對石夕晶 圓（2〇)翻模取出成形的聚二甲基石夕氧院，其中對於成形的 聚二甲基石夕氧烧灌人-環氧基樹脂（Ερ〇χγ)，藉以形成该 壓印模具⑽的上蓋⑴），對於成形的聚二甲基石夕氧烧包 H料’待蝶料成形後移除成形的聚二甲基石夕氧烧並灌 入環氧基樹脂’再經由加熱的方式將壞料移除後，即可得 到該壓印模具⑽的下蓋(12)，較佳地，形成該壓印模具 (10)上、了盍（11 ’ 12)之材料型號為一由喬越公司所生產 的 EPOXY-EF400 ; Β、波浪狀壓電薄膜(30)製作：如第三及四圖所示， 準備-多層的壓電薄膜(40)，其中該多層的壓電薄膜係為 -多層的偏聚二敗乙烯(PVDF)壓電薄膜，其中該多層偏聚 二氟乙稀壓電薄膜的每一單層結構係由—偏聚二良乙稀薄 膜及兩分別覆蓋於偏聚二敗乙烯薄膜頂面及頂面的聚對亞 201044656 (PVDF)壓電薄膜（30) 苯基二f基㈣ι_)所組成’其中於偏聚二 的頂面及頂面及各聚對亞苯基二，基的一側面係分別錢上 -銀電極，且於各電極間連接有一導電膠帶，較佳地，本 發明係没有-二層的偏聚二氟乙烯塵電薄冑，將該多層偏 聚二就乙婦(PVDFm電薄膜放置於前㈣印模具製作步驟 中所形成的上、下蓋⑴’ 12)之間，透過料模具⑽上 、下盍(”，12)的壓印形成一波浪狀的多層偏聚二氟乙烯The age of the sound damper is used by J 仃 测 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The content of the sub-measurement of the measurement is f] 4 201044656 ... to monitor the loss of the ball screw device and the lack of sensation of the η, the purpose of the present invention is to provide an accurate measurement and save points & 4 of the frequency of the leakage sensor and its manufacturing method. For the purpose of the present invention, the technical means used in the present invention is to provide a method for manufacturing a 1-frequency sensor, the operation of which includes: Η, pressure jrr: using micro-process technology to make - wave-shaped micrometer-material, and through the reticle For the circle, the smear is used to mark the desired structure shape on the Shi Xi wafer, and a polydimethyl siloxane is coated on the ruthenium wafer, and the polydimethyl sane is formed. After that, the formed polydimethyl siloxane is removed from the 矽 wafer, and the poly dimethyl oxime-filled epoxy-based epoxy resin is formed to form the upper cover of the embossing mold. Formed polydimethyl sulphur oxide surface coating: Pesticide material, after the loft is formed, the formed polydimethyl sulphur oxide is removed and poured into the % emulsifiable resin, and the loam is heated by heating. After removal, the lower cover of the S-type imprinting mold can be obtained; ❹ 波浪 状 状 压电 压电 : : : : : : : : : : : : : 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪 波浪The second formed in the middle: between the covers, through the embossing of the upper and lower covers of the imprinting mold - wave Multilayer piezoelectric film; "detection head production: forming a desired detection head between a polydimethyl oxyalkylene material, a wax material, an anodic resin and a culture dish; and a sensation of sound Detector assembly: preparing a bonding tube 'and pouring an epoxy tree as a backing plate on the side of the wavy multilayer: electro-film, the detecting head and the wavy multilayer piezoelectric film In addition, the front side of the probe is provided with a bonding plate combined with the combined tube, and a central end of the junction 5 201044656 is provided with a perforation for detecting the exposed head, that is, the wearing of the speaker 1 cost invention of the sound leakage sensor Assembly. 'Further' the multi-layer piezoelectric film is a multi-screen 曰J-dispersed difluoro olefin piezoelectric film, and the bismuth structure of the multi-layered polyvinylidene fluoride piezoelectric film is composed of a polyvinylidene fluoride film. And the two are covered with 曰..., the poly-p-phenylene dimethyl group on the top surface and the top surface of the film, and the top surface and top surface of the polytetrafluoroethylene film. The opposite side of the 对 亚 笑 _ _ 镀 镀 镀 镀 镀 镀 镀 镀 镀 镀 镀 镀 镀Between electrodes have distal cutting -. Still further conductive tape, the multilayer piezoelectric thin-film is a piezoelectric film thirty-two fluoro ethylene. ". Preferably, in the step of fabricating the detecting head, it is formed on the polydimethyl oxalate substrate, and the steel ball is removed and then formed on the oxyalkylene material. The groove 'fills a wax into the groove: heart: - wax ball, the formed wax ball is taken out of the groove, and: or ❹ is provided with a uniformly distributed wax, and the dish is combined, Into the culture dish, the polydimethyl oxo = the worm in the dish is hydrated to form the φ of the φ, and the polydimethyl schistosomiasis model is separated from the culture dish. And then forming the di-milk-based resin into the polydimethylene oxide model, and after the epoxy=resin is formed and separated from the polyfluorenyl bauxite 7 alkane nucleus, The epoxy resin detection head of the ^. Preferably, the combined pipe system is a pipe having an inner diameter of 4 12 _ and an outer diameter of 15 mm, and the member of the member is not allowed to be an aluminum plate, and is attached to both ends of the aluminum plate - for reading To fix the screw of the sound sensor. The wide-band sound line sensor made by the above-mentioned technical means's package 6 201044656 combined with the tube reading probe and a bonding board comprises a multilayer piezoelectric film, wherein: the multilayer piezoelectric film is a wave film The back side is provided with a backing plate; the multilayer piezoelectric thin I. The squad and the multi-layer piezoelectric thin (four) probe are combined with the multi-layer two-electrode thin plate; and, different from the one side of the back plate; the Ο °, the ° plate and the combined tube are located The combination should be at the center of the ten hearts; at the front end of the detection head, step-by-step, wearing a perforation for the exposed probe. The Δ 亥 layer piezoelectric film is — and — fluoroethylene piezoelectric thin 臈. The eight-layer structure of the segregation two #1^step' the combined tube system is _ inner 15mm aluminum tube, the current person... two for 2mm, the outer diameter is provided with a plurality of ends for the gj $ i on the aluminum plate A screw for fixing the sound leak sensor. The advantages and effects of the above-mentioned technical means of manufacturing can be at least 1 'Accurately inventing the piezoelectric film of the broadband layer to 吝 4 L. You have to use a multi-film to generate a large amount of charge, and the signal is used to make the sound emission test Cry 7 you #权a frequency 2, :,. It is possible to accurately detect the sound frequency. The upper and lower side of the present invention, the broadband sound leakage sensor of the present invention can be embossed/[Μ multilayer piezoelectric film for the operation of the lithographic forming, and the wavy zigzag structure can be formed in the electric film... ^ Member or Jiaotong University, and then widen the frequency of its detection. $ m furnace Jie ^ #贝夕 a different bandwidth of the sound sensor for use, constitute a cost-saving broadband Μ sensor. 7 201044656 [Embodiment] In order to understand the technical features and practical effects of the present invention in detail, and in accordance with the contents of the specification, the preferred embodiment of the present invention is shown in the figure (shown in the figure). The detailed description is as follows: The operation flow of the manufacturing method of the broadband microphone sensor provided by Yakumoto Maoming is as follows: Ο Ο Α, imprinting mold (1〇) production: as shown in the second figure, mainly used Micro "made by technology - wavy micron imprinting mold (10), #中中先, Zhuo for a day of the day (20) yellow light lithography, by the Shi Xi wafer _ on the money carved out The required structural shape is coated on the Shixi wafer (20) after the surname is engraved - polydimethyl oxime (p〇_m丨SN〇x_; PDMS) 'to be treated with polydimethyl sulphur After the firing, the formed dimethyl dimethyl oxidizer is removed from the Xi Shi wafer (2 〇), wherein the formed polydimethyl gangue oxygen is filled with human-epoxy resin (Ερ〇χγ). By forming the upper cover (1) of the imprinting mold (10), and removing the formed polydimethylene for the formed polydimethyl sulphur oxide package H material After the oxygen is burned and poured into the epoxy resin and the bad material is removed by heating, the lower cover (12) of the imprinting mold (10) is obtained. Preferably, the imprinting mold is formed (10). The material model of Shangyu (11 '12) is EPOXY-EF400 produced by Qiao Yue Company; Β, wavy piezoelectric film (30) is produced: as shown in the third and fourth figures, preparation - multi-layer The piezoelectric film (40), wherein the multilayer piezoelectric film is a multi-layered polycondensed ethylene (PVDF) piezoelectric film, wherein each single layer structure of the multilayer polyvinylidene fluoride piezoelectric film It consists of a poly-Ethylene film and two polysilicon films 201044656 (PVDF) piezoelectric film (30) phenyl di-f-group (tetra) ι_) covering the top and top surfaces of the poly-ethylene film. Wherein the top surface and the top surface of the segregation two and each side of the polyparaphenylene group are respectively charged with a silver electrode, and a conductive tape is connected between the electrodes. Preferably, the present invention does not -Second layer of polyvinylidene fluoride dust thin, the multilayer is segregated two on the woman (PVDFm electric film placed in the front (four) printing mold production steps Between the upper and lower covers (1)' 12) formed in the middle, the embossing of the upper and lower jaws (", 12) of the material mold (10) forms a wavy multilayer polytetrafluoroethylene.
C、偵測頭(50)製作：請配合參看如第五圖所示，將 -鋼珠置入-聚二甲基矽氧烷基材上，將該鋼珠移除後於 聚二甲基矽氧烷基材上形成一凹#，於該凹槽内灌入一蠟 料使其形成-蠟球’將該成形的蠟球自凹槽中取出，並於 -培養皿中設有一均勻分佈的蠟料，將該蠟球與培養皿中 的壤料相結合’於培養皿中灌人—聚二甲基妙氧烧藉以形 成所需的模型，將該聚二曱基矽氧院模型與培養並相分離 ，再將一環氧基樹脂灌入該聚二甲基矽氧烷模型中成形， 待該環氧基樹脂成形後與該聚二甲基矽氧烷模型相分離後 ’即可得到所需的環氧基樹脂偵測頭（5〇);以及 〇、音洩感測器組裝：如第六圖所示，準備一結合管 (60) ’並於该波浪狀多層偏聚二氟乙烯壓電薄膜（3〇)的一 側面上灌入一環氧基樹脂作為一背板，較佳地，該背板係 為—杳越公司所生產的EPOXY-EF400，將該偵測頭（50) 與該波浪狀多層偏聚二氟乙烯壓電薄膜（3〇)的另一側面相 ^合’於積測頭（5〇)的前端裝設一與結合管（60)相結合的 結合板（70) ’於結合板（7〇)的中心係貫穿有一供偵測頭（5〇) 9 201044656 卜路的穿孔(71)’即完成本發明音洩感測器之組裝，較佳 地’遠結合官（60)係為—内徑為12咖，外徑為議的 铭管’該結合板⑽係為-純，且於紹板的兩端係設有 硬數個用以固定音洩感測器之螺固件(72)。 、藉由上述的技術手段，本發明係寬頻音液感測器不僅 °透過夕層的壓電薄膜（4〇)來產生較大的電荷量，藉以提 供杈大的頻率訊號，使音洩感測器可準確地對於聲音頻率 Ο Ο 夕j貞貝1J J'可藉由壓印模具（10)上、下蓋（11，12)對於 ^層麗電薄膜（4Q)進行壓印成形的料，形成波浪狀的多 層壓電薄膜（3〇)，其中該波浪狀的曲折結構係可讓壓電薄 :)的/、振頻域變大’進而加寬其彳貞測的頻率範圍，讓使 者不而再購貝多個頻寬不同的音戌感測器進行使用，構 一種可準確偵測且節省成本的寬頻音浪感測器及其製造 方法者。 、上所述’僅是本發明的較佳實施例，並非對本發明 :任：形式上的限制，任何所屬技術領域中具有通常知識 -不脫離本發明所提技術方案的範圍内，利用本發 、，揭丁技術内各所作出局部更動或修飾的等效實施例， =未脱離本發明的技術方案内纟，均仍屬於本發明 方案的範圍内。 【圖式簡單說明】 。_係、本發明寬頻音茂感㈨器製造方法之操作流程 第^圖係本發明形成壓印模具之操作流程示意圖。 口係本發明多層壓電薄膜之側視示意圖。 201044656 第四圖係本發明形成波浪狀多層壓電薄膜之操作流 示意圖。 第五圖係本發明形成偵測頭之操作流程示意圖。 第六圖係本發明寬頻音洩感測器之立體分解示意圖。 【主要元件符號說明】 (10) 壓印模具 (11) 上蓋 (12) 下蓋 〇 (20)矽晶圓 (30)波浪狀壓電薄膜 (40)多層壓電薄膜 (5 0)偵測頭 (60)結合管 (70)結合板 '(71)穿孔 (72)螺固件C. Detection head (50) production: Please refer to the figure as shown in the fifth figure, put the steel ball on the polydimethyl oxirane, remove the steel ball and then use the polydimethyl oxime Forming a concave # on the alkyl material, filling a wax into the groove to form a wax ball, removing the formed wax ball from the groove, and providing a uniformly distributed wax in the culture dish In the same way, the wax ball is combined with the loess in the culture dish to fill the culture dish - polydimethyl oxymethane to form the desired model, and the polydioxan oxime model is cultured and Phase separation, and then an epoxy resin is poured into the polydimethyl siloxane model to form, after the epoxy resin is formed and separated from the polydimethyl siloxane model, Required epoxy resin detection head (5 〇); and 〇, sound bleed sensor assembly: as shown in the sixth figure, prepare a combined tube (60) 'and the wavy multilayer polytetrafluoroethylene One side of the piezoelectric film (3〇) is filled with an epoxy resin as a back sheet. Preferably, the back sheet is EPOXY-EF400 produced by the company. The detecting head (50) is coupled with the other side of the wavy multilayer polytetrafluoroethylene piezoelectric film (3〇). The front end of the measuring head (5〇) is provided with a bonding tube (60). The combined binding plate (70) 'through the center of the bonding plate (7〇) has a through hole (71) for the detecting head (5〇) 9 201044656 卜路, that is, the assembly of the sound absorbing sensor of the present invention is completed. Preferably, the 'distance combined with the official (60) is - the inner diameter is 12 coffee, the outer diameter is the negotiable tube of the discussion. The binding plate (10) is - pure, and the hard plates are provided at both ends of the plate. A screw (72) for fixing the sound damper sensor. According to the above technical means, the wide-frequency liquid liquid sensor of the present invention not only generates a large amount of electric charge through the piezoelectric film (4 〇) of the eclipse layer, thereby providing a large frequency signal and making the sound scent The detector can accurately align the sound frequency with the sound frequency Ο Ο 贞 j贞 1J J' can be embossed by the upper and lower covers (11, 12) of the imprinting mold (10) Forming a wavy multilayer piezoelectric film (3〇), wherein the wavy zigzag structure can make the piezoelectric thin:), and the frequency domain becomes larger, thereby widening the frequency range of the speculation, so that The messenger not only purchases a plurality of sound sensors with different bandwidths, but also constructs a wide-band sound wave sensor that can accurately detect and save cost and a manufacturing method thereof. The above description is only a preferred embodiment of the present invention, and is not intended to limit the invention: any form: limitation, any general knowledge in the technical field, without departing from the scope of the present invention. The equivalent embodiments of the local modifications or modifications made in the prior art, without departing from the technical solutions of the present invention, are still within the scope of the present invention. [Simple description of the diagram]. _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ A schematic side view of a multilayer piezoelectric film of the present invention. 201044656 The fourth figure is a schematic diagram of the operation flow of the wavy multilayer piezoelectric film of the present invention. The fifth figure is a schematic diagram of the operation flow of the present invention to form a detection head. The sixth figure is a perspective exploded view of the wideband sound leak sensor of the present invention. [Main component symbol description] (10) Impression mold (11) Upper cover (12) Lower cover 〇 (20) 矽 Wafer (30) Wavy piezoelectric film (40) Multi-layer piezoelectric film (50) Detection head (60) Bonding tube (70) combined with plate '(71) perforated (72) screw