201036691 六、發明說明： ' 【發明所屬之技術領域】 本發明係有關一種有機溶劑降溫核凝回收淨化裝置 及方法，尤指一種量測待淨化廢氣之露點温度與核凝回收 環境之冷凝溫度，進而控制該比例閥調節該核凝冷凝器降 溫程度之設計者。 【先前技術】 按，生活和生產中廣泛應用的有機溶劑，在室溫下易 〇 揮發成氣體，故又名揮發性有機氣體（Vo 1 ati le Organic201036691 VI. Description of the invention: 'Technical field to which the invention pertains>> The present invention relates to an organic solvent cooling and nuclear condensation recovery purification device and method, and more particularly to measuring a dew point temperature of a waste gas to be purified and a condensation temperature of a nuclear condensation recovery environment, The designer of the proportional valve is then adjusted to adjust the temperature of the nuclear condenser. [Prior Art] According to the organic solvent widely used in life and production, it is easily volatilized into a gas at room temperature, so it is also known as volatile organic gas (Vo 1 ati le Organic).
Compounds，VOCs)，而多數的VOCs對人體有一定毒性，必 須加以回收處理；而不同之產業領域所使用之有機溶劑亦 不同，諸如PU(polyurethane，聚氣基甲酸酯）生產業、科 技製造業及鋰電池製造業等產業，所主要使用之各種有機 溶劑，相關之性質係表列於次頁之性質表（表一）；其中， PU生產過程所排放的VOCs，主要來自於降低黏度利於加工 所添加的有機溶劑，包括甲苯（Toluene)、曱基乙基酮 ^ (MEK)、二曱基甲醯胺（DMF)···等；此外，在半導體晶圓廠 及TFT-LCD面板等科技製造業之製程中，將單乙醇胺 (MEA)、二曱基亞颯（DMS0)、丙二醇曱醚乙酯（PGMEA)、環 己酮（ΑΝ0ΝΕ)··.等有機溶劑，應用於諸如光阻剝離液 (stripper)之使用；而鋰電池製造之塗佈機，則必須將氮-甲基四氫吡咯酮（NMP)之廢氣回收。 次按，有機溶劑之物化特性，係低沸點、高飽和蒸汽 壓之有機溶劑易於揮發，但不易於冷凝；反之，高沸點、 201036691Compounds, VOCs), and most VOCs are toxic to the human body and must be recycled. Different organic solvents are used in different industrial fields, such as PU (polyurethane) production, technology manufacturing. Industries and lithium battery manufacturing industries, the various organic solvents used, the relevant properties are listed in the nature table on the next page (Table 1); among them, the VOCs emitted by the PU production process mainly come from the reduction of viscosity. Processing organic solvents, including toluene, mercaptoethyl ketone (MEK), dimercaptomethylamine (DMF), etc.; in addition, in semiconductor fabs and TFT-LCD panels, etc. In the process of technology manufacturing, organic solvents such as monoethanolamine (MEA), dimercaptopurine (DMS0), propylene glycol oxime ether ethyl ester (PGMEA), cyclohexanone (ΑΝ0ΝΕ)··. The use of a stripper; in the case of a coating machine made of a lithium battery, it is necessary to recover the exhaust gas of nitrogen-methyltetrahydropyrrolidone (NMP). Sub-press, the physicochemical properties of organic solvents, low-boiling, high-saturated vapor pressure organic solvents are easy to volatilize, but not easy to condense; conversely, high boiling point, 201036691
低飽和蒸汽壓之有機溶劑則不易於揮發， 而，由該有機溶劑性質表（表一）中可看出 劑多屬中咼沸點、低飽和蒸汽壓之物化特 但易於冷凝；然 ’所列之有機溶 性。 看機溶劑特性性質表（表一） —- 溶劑 分子量 沸點 CC) 活性碳 (吸附材） 脫附難度 蒸汽壓 (20°C mmHg) 水溶性 (20°c ) Toluene 甲苯 (CtH8) 92 111 容易 22. 3 不溶於水 MEK 甲基乙基酮 (CiHsO) 72 80 容易 77. 5 27 〜29g /100g 水 DMF 二甲基甲醯胺 (HC0N(CH3)〇 73 153 困難 2.7 全溶於水 MEA 單乙醇氨 (C2H7NO) 61 171 很困難 &聚合 0. 24 全溶於水 DMS0 二甲基亞颯 (CH3)2S0 78 189 很困難 0. 37 全溶於水 PGMEA 丙二醇甲醚乙酯 (CeHlzOa) 132 146 容易 3. 2 18. 5g /100g 水 AN0NE 環己酮 (ΟδΗΐοΟ) 98 157 很困難 &聚合 3. 38 2.3g/ 100g 水 (微溶） 201036691 NMP 氮-甲基四氫 99 204 很困難 0. 23 全溶於水 0比洛酮 再按，目前相關業者對於VOCs之回收處理，多採就地 裝設冷凝器加以回收處理；此類冷凝回收系統對中高沸點 且全溶於水之有機物質，在正確的設計與操作下才可達到 高的回收效率，而除了所冷凝吸收下來之VOCs可回收純化 再利用外，因為中高沸點難處理VOCs濃度已大幅下降，可 〇 降低下游端廢氣處理設備之負荷及延長吸脫附濃縮設備之 壽命，得以有效提升其整體之處理效率。 然而，以一般傳統冷凝法回收VOCs之原理，係利用冷 凍設備先將含VOCs廢氣之溫度冷卻至該有機物質之露點溫 度（飽和溫度）以下，即可達到飽和冷凝之效果；其中，一 般常見之VOCs冷凝系統，主要包含除濕器及VOCs冷凝器 兩項基本設備，裝設除濕器之目的在於將空氣中多餘之水 氣去除，避免在VOCs冷凝區之溫度降至0°C(273K)以下時， q 發生不利於冷凝之結冰效應；再者，決定冷凝器去除VOCs 效能的兩項重要關鍵因素為：（1)冷凝系統需達足夠低温 (-40°C)、（2)廢氣中含較高之 VOCs 濃度（> 10, OOOppmv); 又，冷凝器之處理效能與廢氣線速度的增加呈反比之趨 勢，故延長廢氣之停留時間將可提升去除效率。 因此，由於傳統之冷凝回收法，需以冷凍設備將操作 溫度控制在相當低温以及夠長的停留時間，方能以冷凝機 制去除VOCs，並確保處理後廢氣所含VOCs濃度值達到最 201036691 低；不過，如此之傳統冷凝回收方式，若應用於排放量相 當大而·S濃度僅數十龍百咖⑼，麵ppmv)之產 業，為達到高冷凝效率而須降到極低溫（至少須低於零下2 0 C) ’所需付出之能源耗損及設備維護成本將會相當高。The organic solvent with low saturated vapor pressure is not easy to be volatilized. However, it can be seen from the table of the organic solvent properties (Table 1) that the agent is mostly composed of a medium boiling point and a low saturated vapor pressure, but it is easy to condense; Organic solubility. Table of solvent characteristics of the machine (Table 1) -- Solvent molecular weight boiling point CC) Activated carbon (adsorbed material) Desorption difficulty Vapor pressure (20 ° C mmHg) Water solubility (20 ° C ) Toluene Toluene (CtH8) 92 111 Easy 22 3 insoluble in water MEK methyl ethyl ketone (CiHsO) 72 80 easy 77. 5 27 ~ 29g / 100g water DMF dimethylformamide (HC0N (CH3) 〇 73 153 difficult 2.7 fully soluble in water MEA monoethanol Ammonia (C2H7NO) 61 171 Very difficult & polymerization 0. 24 Totally soluble in water DMS0 Dimethylhydrazine (CH3) 2S0 78 189 Very difficult 0. 37 Totally soluble in water PGMEA Propylene glycol methyl ether ethyl ester (CeHlzOa) 132 146 Easy 3. 2 18. 5g /100g Water AN0NE Cyclohexanone (ΟδΗΐοΟ) 98 157 Very difficult & polymerization 3. 38 2.3g / 100g water (slightly soluble) 201036691 NMP Nitrogen-methyltetrahydro 99 204 Very difficult 0. 23 is completely soluble in water 0 pirone, and the relevant industry is now recycling the VOCs, and collecting the condenser for recycling; High recovery efficiency can be achieved with proper design and operation, except for the cold The absorbed VOCs can be recycled and reused, because the concentration of VOCs in the middle and high boiling point has been greatly reduced, which can reduce the load of the downstream exhaust gas treatment equipment and prolong the life of the suction and desorption equipment, thereby effectively improving the overall processing efficiency. However, the principle of recovering VOCs by the conventional conventional condensation method is to use a freezing device to first cool the temperature of the VOCs-containing exhaust gas to below the dew point temperature (saturation temperature) of the organic substance, thereby achieving the effect of saturated condensation; The VOCs condensing system mainly includes two basic equipments: a dehumidifier and a VOCs condenser. The purpose of installing the dehumidifier is to remove excess water in the air to avoid the temperature in the condensation zone of the VOCs falling below 0 ° C (273 K). At the same time, q has an icing effect that is not conducive to condensation; in addition, two important key factors that determine the effectiveness of the condenser to remove VOCs are: (1) the condensing system needs to reach a sufficient low temperature (-40 ° C), and (2) the exhaust gas Containing higher concentration of VOCs (> 10, OOOppmv); Moreover, the treatment efficiency of the condenser is inversely proportional to the increase of the exhaust gas velocity, so the exhaust gas is prolonged. The residence time will increase the removal efficiency. Therefore, due to the traditional condensation recovery method, it is necessary to control the operating temperature to a relatively low temperature and a long enough residence time in the refrigeration equipment to remove the VOCs by the condensation mechanism and ensure the exhaust gas contained in the treatment. The concentration of VOCs reaches the lowest of 201036691; however, such a traditional condensing recovery method should be applied to industries with a large discharge amount and only a few tens of tens of thousands of tens of thousands of coffee (9), surface ppmv) to achieve high condensing efficiency. To very low temperatures (at least below 20 ° C) The energy consumption and equipment maintenance costs required will be quite high.
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於是’另如第一圖所示，發展出一種降溫核凝回收淨 化裝置包括有：一核凝冷凝器⑽，形成得以產生核 凝作用之低溫環境’俾以將廢氣所含之水氣或/及驗本 身’在經過該核凝冷凝ϋ⑴）之過程中，降溫到低於露點 /皿度的過飽和狀態’而產生核凝作用並冷凝凝結成液膜， 且利用所凝結之液膜，再大量吸收中高沸點且易溶於水之 VOCs、或各種無機鹽煙塵與其他物質化合而成的可溶性微 粒；以及：除霧器(20) ’設置於該核凝冷凝器⑽之下游 端，在一定風速下，將次微米級細微霧或粒之廢氣水氣或/ 及VOCs本身，在經過該核凝冷凝器（1〇)之降溫核凝作用 後’成長為較易處理的微米級或更大的微霧或粒，而滴落 至下方之回收槽（30)收集回收者。但是，由於習知之降溫 核凝回收淨化裝置，並未對其減冷凝1(10)之降溫程度 加以控制’ 75致使回收淨化之品質不穩定；其中，若降溫 程度不足，則產生核凝作用之淨化成效就不彰，反之，若 降Μ程度過頭，遂造成回收之有機溶劑含水率過高，不僅 回收之有機溶劑無法再使用進而產生廢水且耗能。 【發明内容】 ，發明之主要目的，係欲解決先前技術回收淨化品質 不穩定之問題’而具有回收淨化品質 穩定之功效。 本發明之另一目的，則具有提升水溶性有機溶劑藉水 201036691 氣或/及有機溶劑本身降溫核凝吸收淨化之功效。 本發明之又一目的，乃具有節能之功效。 為達上述功效，本發明第一實施例之結構特徵，係包 括有： 一核凝冷凝器，形成得以使廢氣所含之水氣或/及有機 溶劑產生核凝作用之低溫環境； 一除霧器，設置於該核凝冷凝器之下游端； 一回收槽，設置於該核凝冷凝器與該除霧器之下方； 以及 ◎ 一控溫單元，包括有調節該核凝冷凝器降溫程度之比 例閥、擷取待淨化廢氣露點溫度資訊之第一感知器、量測 該核凝冷凝器冷凝溫度之第二感知器與一連接該比例閥、 該第一感知器與該第二感知器之控制器； 藉此，該控制器根據該第一感知器所擷取之待淨化廢 氣露點溫度資訊與該第二感知器所量測之該核凝冷凝器冷 凝溫度，而利用該比例閥調節該核凝冷凝器降溫程度，俾 Q 讓該核凝冷凝器之冷凝溫度低於待淨化廢氣之露點溫度〇 〜10 °c者。 此外，該核凝冷凝器之冷凝溫度低於待淨化廢氣之露 點溫度3〜5 C更佳。另，該比例閥設置於該核凝冷凝器之 冷媒管；該第一感知器為露點溫度計或為乾球溫度計與相 對溼度計之搭配，而設置於該核凝冷凝器之入風端或是產 生待淨化廢氣之機台安裝處；該第二感知器為乾球溫度 計，而設置於該核凝冷凝器之離風端。 201036691 再者，本發明第一回收淨化方法，係包含下列步驟： a. )直接量測待淨化廢氣之露點溫度，或由擷取乾球溫 度與相對溼度而推算出露點溫度； b. )量測核凝回收環境之冷凝溫度； c. )調節核凝回收環境之降溫程度，而令核凝回收環境 之冷凝溫度低於待淨化廢氣之露點溫度0〜10°C(更佳為3 〜5〇C); d. )在步驟c.)所形成之過飽和環境中，讓廢氣中所含 之水氣或/及有機溶劑本身產生降溫核凝作用； 〇 e.)進一步除霧；以及 f.)將有機溶劑之液滴收集回收者。 然而，將廢氣風速控制於約為1. 5m/s以下之層流條件 下冷凝，將廢氣風速控制於約為2. Om/s以上之紊流條件下 除霧。 又，本發明第二實施例之結構特徵，係包括有： 一核凝冷凝器，形成得以產生核凝作用之低溫環境； 一除霧器，設置於該核凝冷凝器之下游端； Q 一回收槽，設置於該核凝冷凝器與該除霧器之下方； 以及 一控溫單元，包括有調節該核凝冷凝器降溫程度之比 例閥、量測該回收槽所回收溶劑含水率之第三感知器與一 連接該比例閥與該第三感知器之控制器； 藉此，該控制器根據該第三感知器所量測之溶劑含水 率，而利用該比例閥調節該核凝冷凝器降溫程度，俾讓該 回收槽所回收溶劑之含水率維持在80%以下（更佳為50% 201036691 以下）者。 又，該比例閥設置於該核凝冷凝器之冷媒管。 另者，本發明第二回收淨化方法，係包含下列步驟： a. )量測所回收溶劑之含水率； b. )調節核凝回收環境之降溫程度，而令所回收溶劑之 含水率維持在80%以下（更佳為50%以下）； c. )在低於待淨化廢氣之露點溫度之過飽和環境中，讓 廢氣中所含之水氣或/及有機溶劑本身產生降溫核凝作用； d. )進一步除霧；以及 〇 e.)將有機溶劑之液滴收集回收者。 然而，將廢氣風速控制於約為1. 5m/s以下之層流條件 下冷凝，將廢氣風速控制於約為2. Om/s以上之紊流條件下 除霧。 【實施方式】 首先，請參閱第二圖所示，本發明回收淨化裝置之第 一實施例，係包括有：一核凝冷凝器（10)，形成得以產生 核凝作用之低溫環境；一除霧器（20)，設置於該核凝冷凝 Ο 器（10)之下游端；一回收槽（30)，設置於該核凝冷凝器（10) 與該除霧器（20)之下方；以及一控溫單元（40a)，包括有調 節該核凝冷凝器（10)降溫程度之比例閥（41)、擷取待淨化 廢氣露點溫度資訊之第一感知器（42)、量測該核凝冷凝器 (10)冷凝溫度之第二感知器（43)與一連接該比例閥（41)、 該第一感知器（42)與該第二感知器（43)之控制器（44a);藉 此，該控制器（44a)根據該第一感知器（42)所擷取之待淨化 廢氣露點溫度資訊與該第二感知器（43)所量測之該核凝冷 201036691 凝器（10)冷凝溫度，而利用該比例閥（41)調節該核凝冷凝 器（10)降溫程度，俾讓該核凝冷凝器（10)之冷凝溫度低於 待淨化廢氣之露點溫度0〜10°C(更佳為3〜5°C)，亦即讓 待淨化廢氣在稍低於露點溫度之回收環境中進行核凝作 用，而可大量回收有機溶劑，且所回收之有機溶劑含水率 低，足堪再使用者。 # 然而，該比例閥（41)可設置於該核凝冷凝器（10)之冷 媒管（11)，而冷媒可為冰水、滷水或冷卻水；該第一感知 器（4 2 )可為露點溫度計或為乾球溫度計與相對溼度計之搭 Ο 配，而設置於該核凝冷凝器（ίο)之入風端或是產生待淨化 廢氣之機台安裝處；該第二感知器（43)可為乾球溫度計， 而設置於該核凝冷凝器（10)之離風端。 因此，茲以實際測試所得之數據說明可達之效果；若 進入之有機溶劑廢氣體體積濃度為300ppmv的水溶性DMF 與廢氣露點溫度為10〜25°C (本實施例之廢氣露點溫度係 隨外氣與曰夜或季節而改變），冷媒為5〜20°C冰水，廢氣 通過該核凝冷凝器（10)流速為1.5m/s之層流流場，除霧器 Q (20)係採用流速為2. 5m/s 5//99%除霧效率之美製Kimre B-GON PP除霧器；當利用本發明之技術特徵，使該核凝冷 凝器（10)之冷凝溫度低於待淨化廢氣之露點溫度0〜10°C 時，DMF有機溶劑冷凝凝核吸收回收效果可穩定達85%以 上，且含水率可控制維持在80%以下；再者，若使該核凝 冷凝器（10)之冷凝溫度低於待淨化廢氣之露點溫度3〜5°C 時，DMF有機溶劑冷凝凝核吸收回收效果可穩定達95%以 上，且含水率可控制維持在50%以下；是故，相較於回收 -10 - 201036691 效果約在30〜95%間（不穩定）且無法控制含水率亦較耗能 之習有技術，實施本發明技術特徵即可獲致顯著地改進效 果。 接著，請再參閱第三圖所示，本發明回收淨化裝置之 第二實施例，乃包括有：一核凝冷凝器（10 )，形成得以產 生核凝作用之低溫環境；一除霧器（20)，設置於該核凝冷 ' 凝器（10)之下游端；一回收槽（30)，設置於該核凝冷凝器 - (10)與該除霧器（20)之下方；以及一控溫單元（40b)，包括 有調節該核凝冷凝器（10)降溫程度之比例閥（41)、量測該 〇 回收槽（30)所回收溶劑含水率之第三感知器（45)與一連接 該比例閥（41)與該第三感知器（45)之控制器（44b);藉此， 該控制器（44b)根據該第三感知器（45)所量測之溶劑含水 率，而利用該比例閥（41)調節該核凝冷凝器（10)降溫程 度，俾讓該回收槽（30)所回收溶劑之含水率維持在80%以 下（更佳為50%以下）。 基於如是之構成，本發明之回收淨化裝置之第一實施 例，係以同時量測待淨化廢氣之露點溫度與核凝回收環境 q 之冷凝溫度，進而計劃控制（Program Control)該比例閥（41) 調節該核凝冷凝器（10)降溫程度；另者，第二實施例則是 以量測所回收溶劑之含水率，進而回授控制（Feedback Control)該比例閥（41)調節該核凝冷凝器（10)降溫程度； 藉此，兩種實施例皆可將該核凝冷凝器（10)之冷凝溫度控 制在稍低於待淨化廢氣之露點溫度以下，讓所回收溶劑之 含水率在預期比率内；是以，具有回收淨化品質穩定且節 能之功效。 -11 - 201036691 紅上户斤过·本發明所揭不之技術手段，確且「新賴性 「進步性」及「可供產業利用」等發明專利要件，祈請么 局惠賜專利，以勵發明，無任德感。 惟，上述所揭露之圖式、說明，僅為本發明之較佳實 施例，大凡熟悉此項技藝人士，依本案精神範疇所作之修 或等效變化，仍應包括本案申請專利範圍内。 Ο 〇 -12 - 201036691 【圖式簡單說明】 第一圖係習知降溫核凝回收淨化裝置之結構說明圖。 第二圖係本發明第一實施例之結構說明圖。 第三圖係本發明第二實施例之結構說明圖。 【主要元件符號說明】 (10)核凝冷凝器 (20)除霧器 (30)回收槽 (40a、40b)控溫單元 (41) 比例閥 (42) 第一感知器 (43) 第二感知器 (44a、44b)控制器 (45)第三感知器 〇 -13 -Thus, as shown in the first figure, a cooling nuclear condensation recovery purification device is developed including: a nuclear condensation condenser (10), which forms a low temperature environment capable of generating nuclear condensation, so as to contain the moisture contained in the exhaust gas or / In the process of passing through the nuclear condensation condensate (1), the temperature is lowered to a supersaturation state below the dew point/dish degree, and nuclear condensation occurs and condenses into a liquid film, and the condensed liquid film is utilized, and then a large amount Soluble particles formed by absorbing mid-high boiling point and water-soluble VOCs, or various inorganic salt soot and other substances; and: demister (20) 'located at the downstream end of the nuclear condenser (10) at a certain wind speed Next, the sub-micron fine mist or particulate exhaust gas or / and VOCs themselves are grown to a more manageable micron or larger after being cooled by the nuclear condensation condenser (1〇). The mist or granules are dropped into the recovery tank (30) below to collect the recycler. However, due to the conventional cooling and nuclear condensation recovery and purification device, the degree of temperature reduction of the condensation reduction 1 (10) is not controlled to cause the quality of the recovery and purification to be unstable; wherein if the degree of temperature reduction is insufficient, nuclear condensation occurs. The effect of purification is not good. On the contrary, if the degree of hail is too high, the water content of the organic solvent recovered will be too high, and not only the recovered organic solvent can be reused, but also waste water and energy consumption. SUMMARY OF THE INVENTION The main object of the invention is to solve the problem of instability of the prior art recovery and purification quality, and to have the effect of stabilizing the purification quality. Another object of the present invention is to enhance the effect of the water-soluble organic solvent by means of water, 201036691 gas or / and organic solvent itself, cooling, nuclear condensation absorption and purification. Another object of the present invention is to have an energy saving effect. In order to achieve the above-mentioned effects, the structural features of the first embodiment of the present invention include: a nuclear condensation condenser to form a low temperature environment for causing nuclear gas or/and an organic solvent contained in the exhaust gas to undergo nuclear condensation; , disposed at a downstream end of the nuclear condensation condenser; a recovery tank disposed under the nuclear condensation condenser and the mist remover; and ◎ a temperature control unit, including adjusting the temperature of the nuclear condensation condenser a proportional valve, a first sensor for extracting the dew point temperature information of the exhaust gas, a second sensor for measuring the condensation temperature of the nuclear condenser, and a first proportional sensor, the first sensor and the second sensor The controller is configured to adjust the condensation temperature of the exhaust gas to be purified by the first sensor and the condensation temperature of the nuclear condenser measured by the second sensor, and adjust the The degree of cooling of the nuclear condensation condenser, 俾Q allows the condensation temperature of the nuclear condensation condenser to be lower than the dew point temperature of the exhaust gas to be purified 〇~10 °c. Further, the condensation temperature of the nuclear condensation condenser is preferably 3 to 5 C lower than the dew point temperature of the exhaust gas to be purified. In addition, the proportional valve is disposed in the refrigerant tube of the nuclear condensation condenser; the first sensor is a dew point thermometer or a combination of a dry bulb thermometer and a relative humidity meter, and is disposed at an inlet end of the nuclear condenser or The machine installation site for generating the exhaust gas to be purified; the second sensor is a dry bulb thermometer and is disposed at the windward end of the nuclear condenser. 201036691 Furthermore, the first recovery and purification method of the present invention comprises the following steps: a.) directly measuring the dew point temperature of the exhaust gas to be purified, or deriving the dew point temperature by drawing the dry bulb temperature and the relative humidity; b. Measuring the condensation temperature of the nuclear recovery environment; c.) adjusting the temperature of the nuclear condensation recovery environment, and letting the condensation temperature of the nuclear condensation recovery environment be lower than the dew point temperature of the exhaust gas to be purified by 0 to 10 ° C (more preferably 3 to 5) 〇C); d.) in the supersaturated environment formed in step c.), the water vapor or/and the organic solvent contained in the exhaust gas itself is subjected to a cooling nuclear condensation; 〇e.) further defogging; and f. The droplets of the organic solvent are collected by the recycler. However, the exhaust gas wind speed is controlled to be condensed under a laminar flow condition of about 1.5 m/s or less, and the exhaust gas wind speed is controlled to be defrosted under a turbulent flow condition of about 2. Om/s or more. Moreover, the structural features of the second embodiment of the present invention include: a nuclear condensation condenser to form a low temperature environment capable of generating nuclear condensation; a mist eliminator disposed at a downstream end of the nuclear condensation condenser; Q1 a recovery tank disposed under the nuclear condenser and the mist eliminator; and a temperature control unit including a proportional valve for adjusting the temperature of the nuclear condenser, and measuring the moisture content of the solvent recovered by the recovery tank a third sensor and a controller connecting the proportional valve and the third sensor; thereby, the controller adjusts the nuclear condenser by using the proportional valve according to the solvent moisture content measured by the third sensor The degree of cooling is such that the water content of the solvent recovered in the recovery tank is maintained below 80% (more preferably 50% below 201036691). Further, the proportional valve is disposed in the refrigerant pipe of the nuclear condenser. In addition, the second recovery and purification method of the present invention comprises the following steps: a.) measuring the moisture content of the recovered solvent; b. adjusting the degree of temperature reduction of the nuclear condensation recovery environment, and maintaining the moisture content of the recovered solvent at 80% or less (more preferably 50% or less); c.) in a supersaturated environment lower than the dew point temperature of the exhaust gas to be purified, the water vapor or/and the organic solvent contained in the exhaust gas itself is subjected to cooling nuclear coagulation; . ) further defogging; and 〇e.) collecting droplets of organic solvent to the recycler. However, the exhaust gas wind speed is controlled to be condensed under a laminar flow condition of about 1.5 m/s or less, and the exhaust gas wind speed is controlled to be defrosted under a turbulent flow condition of about 2. Om/s or more. [Embodiment] First, referring to the second figure, the first embodiment of the recovery and purification apparatus of the present invention comprises: a nuclear condensation condenser (10), forming a low temperature environment capable of generating nuclear coagulation; a mister (20) disposed at a downstream end of the nuclear condensation condenser (10); a recovery tank (30) disposed below the nuclear condenser (10) and the mist eliminator (20); a temperature control unit (40a) includes a proportional valve (41) for adjusting the degree of temperature reduction of the nuclear condenser (10), a first sensor (42) for extracting information on the dew point temperature of the exhaust gas to be purified, and measuring the nuclear condensation a second sensor (43) for condensing the temperature of the condenser (10) and a controller (44a) connecting the proportional valve (41), the first sensor (42) and the second sensor (43); The controller (44a) is configured according to the dew point temperature information of the exhaust gas to be purified by the first sensor (42) and the nuclear condensation of the second sensor (43). Condensing the temperature, and using the proportional valve (41) to adjust the degree of cooling of the nuclear condenser (10), so that the nuclear condenser (10) is cold The condensation temperature is lower than the dew point temperature of the exhaust gas to be purified by 0 to 10 ° C (more preferably 3 to 5 ° C), that is, the nuclear gas to be purified is subjected to nuclear coagulation in a recovery environment slightly lower than the dew point temperature, and may be in a large amount. The organic solvent is recovered, and the recovered organic solvent has a low water content, which is sufficient for the user. However, the proportional valve (41) may be disposed in the refrigerant tube (11) of the nuclear condenser (10), and the refrigerant may be ice water, brine or cooling water; the first sensor (42) may be The dew point thermometer is arranged for the dry bulb thermometer and the relative humidity meter, and is disposed at the inlet end of the nuclear condenser or the machine installation where the exhaust gas to be purified is generated; the second sensor (43) It can be a dry bulb thermometer and is disposed at the off-air end of the nuclear condenser (10). Therefore, the data obtained by the actual test is used to illustrate the effect of the accessibility; if the organic solvent exhaust gas having a volume concentration of 300 ppmv is introduced, the water-soluble DMF and the exhaust gas dew point temperature are 10 to 25 ° C (the dew point temperature of the exhaust gas in this embodiment is Outside air and day and night or season change), the refrigerant is 5~20 °C ice water, the exhaust gas passes through the nuclear condensation condenser (10), the flow velocity is 1.5m/s laminar flow field, the defogger Q (20) The utility model adopts a US-made Kimre B-GON PP defogger with a flow rate of 2.5 m/s 5//99% defogging efficiency; when the technical feature of the invention is utilized, the condensation temperature of the nuclear condensation condenser (10) is lower than When the dew point temperature of the exhaust gas to be purified is 0~10 °C, the absorption and recovery effect of the DMF organic solvent condensation condensate can be stabilized by more than 85%, and the water content can be controlled to be maintained below 80%; further, if the nuclear condenser is made (10) When the condensation temperature is lower than the dew point temperature of the exhaust gas to be purified by 3~5 °C, the absorption and recovery effect of the DMF organic solvent condensation condensate can be stabilized by more than 95%, and the water content can be controlled to be maintained below 50%; Compared to recycling -10 - 201036691 The effect is between 30 and 95% (unstable) and uncontrollable The water content is also more energy consuming, and the technical features of the present invention can be achieved to achieve significant improvements. Next, referring to the third figure, the second embodiment of the recovery and purification apparatus of the present invention includes: a nuclear condensation condenser (10) to form a low temperature environment capable of generating nuclear condensation; and a mist eliminator ( 20) disposed at a downstream end of the nuclear condensation condenser (10); a recovery tank (30) disposed under the nuclear condensation condenser - (10) and the mist eliminator (20); The temperature control unit (40b) includes a proportional valve (41) for adjusting the degree of temperature reduction of the nuclear condenser (10), and a third sensor (45) for measuring the moisture content of the solvent recovered by the recovery tank (30). a controller (44b) connecting the proportional valve (41) and the third sensor (45); thereby, the controller (44b) determines a solvent moisture content according to the third sensor (45), The proportional valve (41) is used to adjust the degree of cooling of the nuclear condenser (10), and the water content of the solvent recovered in the recovery tank (30) is maintained at 80% or less (more preferably 50% or less). Based on the configuration, the first embodiment of the recovery and purification apparatus of the present invention simultaneously measures the dew point temperature of the exhaust gas to be purified and the condensation temperature of the nuclear condensation recovery environment q, thereby further controlling the proportional valve (41). Adjusting the degree of temperature drop of the nuclear condenser (10); in addition, the second embodiment is to measure the moisture content of the recovered solvent, and then feedback control (41) to adjust the nuclear condensation The degree of cooling of the condenser (10); thereby, in both embodiments, the condensation temperature of the nuclear condenser (10) can be controlled to be slightly lower than the dew point temperature of the exhaust gas to be purified, so that the moisture content of the recovered solvent is Within the expected ratio; it has the effect of stable and clean quality and energy saving. -11 - 201036691 Red on the household, the technical means not exposed by the invention, and the invention patents such as "progressive" and "available for industrial use", please pray for the patent to Invented, no sense of morality. However, the drawings and descriptions disclosed above are only preferred embodiments of the present invention, and those skilled in the art, which are subject to the spirit of the present invention, should be included in the scope of the patent application. Ο 〇 -12 - 201036691 [Simple description of the diagram] The first diagram is a structural explanatory diagram of the conventional cooling and nuclear condensation recovery and purification device. The second drawing is a structural explanatory view of the first embodiment of the present invention. The third drawing is a structural explanatory view of a second embodiment of the present invention. [Main component symbol description] (10) Nuclear condensation condenser (20) Defogger (30) Recovery tank (40a, 40b) Temperature control unit (41) Proportional valve (42) First sensor (43) Second sensing (44a, 44b) controller (45) third perceptron 〇-13 -