201027080 六、發明說明： [發明所屬之技術4員域】 本發明係關於一#> 板等之電子零件之導通狀在雜㈣電路^晶面 電子零件之電極或端子接觸且n料性撿查時，與該 之 接觸探針、探針單元及探 ^丁電“嬈之傳送接收 【先前技術】 早711之組裝方法。 以往，在進行本 象之導通狀能撿杳t^積體電路或液晶面板等 與輪出檢查用信號之信號處理ί置=為了課求檢查對象 用收容複數個導電性接觸探針 切電性連接，係操 :，隨著近年來之半導體積體電：:元曰，^ 、細微化的進展，藉由使接觸門‘面板之高積體 可適用於高積體化、細微化之檢曰 1之間距狹窄化，亦 就使接觸探針間之間距狹窄化的技術正進步中。 f依據例如來自外部之荷重而具備可‘=而言，已知有-接觸探針相關的技術。線型之接=曲之彈性的線型之 ，之接觸探針相比較，比較容易細ς十係與使用彈簧之銷 何重時若撓曲之方向不_致，則 ’但當從外部施加 接觸或與被接觸體之接觸而產生相鄰之接觸探針彼此 線型之接觸探針係設法使因荷重不均之虞。因此對於 例如專利文獻1至4)。 之方向一致（參照 其中，在專利文獻1及2中揭示 形成為彎曲之形狀的技術。在專 〜種將探針之形狀 又獻3中揭示有一種將 321634 4 201027080 探針之形狀形成為彎曲成 < 字形之形狀的技術。在專利 獻4中揭示有一種技術，係將直線狀之接觸探針之兩山^ 分別***至2個不同之板的貫通孔後，將一方之板 觸探針之延伸方向正交之方向位移，並對接觸探針备、接 施加初期撓曲，藉此使接觸探針之撓曲方向一致。地 (專利文獻） (專利文獻1)日本特開昭52_155388號公報 (專利文獻2)日本特開2007-113972號公報 (專利文獻3)日本㈣平8_3{)446()號公報 (專利文獻4)日本特開2001-5_2號公報 【發明内容】 (發明所欲解決之課題） 然而 於接觸探針!文獻1至3記載之習知技術中，, 安裝至探針保彎錢彎曲’因此會有將接觸探金 ❹換接觸探針之終復作^日1工夫之問題。此外，進行衰 修。 /是作業亦不谷易，而無法有效率地進行轉 施加初期文獻4記載之習知技術中’在對接觸探: 有探針單元^時必須以高精密度進行位移之板的對位，， 復作業時” 化費時間工夫之問題。而且’在進行1 屬刀解探針單元，因此維修之效率差。 種接觸探二:於亡述問題而，創者’其目的在於提供， 藉由來自夕h '早几及探針單元之組裝方法，其可控$ 之何重而產生撓曲之方向，可容易地進行』 321634 5 201027080 兀化時之組裝，且可有效率地進行單元化後之維修。 (解決課題之手段） 為了要~決上述課題’並達成上述目的，本發明之接 觸探针，係在兩端分別與二個不同之電路構造接觸而將該 二個電路構造予以電性連接之導電性的接觸探針，該接觸 探針之特㈣具備：第丨接觸部，其—端形仏銳形狀之 柱狀；彈性f曲部，從前述第1接觸部之I端沿著前述 2接觸部之長度方向呈柱狀地延伸，與該延伸方向正交 中之至乂個方向的寬度係沿著前述延伸方向而變 2彳面’與前述—個方向正交之方向的寬度係沿著 月，J述延伸方向為固定， 稭由及自外。卩之何重而產生彈性彎 ’連接部，從前述彈性彎曲柚 與連接於前述第i接觸:广换伸之方向的端部，亦即 伸方之端部不同的端部，沿著前述延 门呈柱狀地延伸；臂部，從前述連 向呈板狀地延伸；及第2接觸部，從前述；部：端 之相對於前述第1接觸部之形成尖銳形狀的一端 處的端面朝與該端面正交之方向突出，且复‘山-延 形狀；通過前述第1接觸部之形成尖銳形狀之一开:成次銳 述延伸方向平行的平面，與通過前述―個 ^且與剛 性彎曲部的寬度中之與該方向上之前述第c述彈 足度的差為最大之寬度的中點且與前述延伸邛之最大 面係為不同之平面。 。平行的平 再者，本發明之接觸探針係在前述發明中此 接觸部係設置在前述臂部中之將與前述連’前述第2 磾之邊界作 * 321634 201027080 ' 開始端時之前述臂部的終端之附近。 * 再者，本發明之接觸探針係在前述發明中，前述彈性 彎曲部之前述一個方向的寬度係在每個部位皆比該方向上 之前述第1接觸部之最大寬度為小。 再者，本發明之接觸探針係在前述發明中，前述彈性 彎曲部之包含前述一個方向之寬度的剖面係在前述臂部延 伸側形成凹陷形狀。 再者，本發明之接觸探針係在前述發明中，前述彈性 © 彎曲部之前述一個方向的寬度係在每個部位皆比該方向上 之前述第1接觸部之最大寬度為大。 再者，本發明之接觸探針係在前述發明中，前述彈性 •彎曲部之包含前述一個方向之寬度的剖面係在前述臂部延 伸側形成突出形狀。 再者，本發明之接觸探針係在前述發明中，前述第2 接觸部係設置在前述臂部中之將與前述連接部之邊界作為 @ 開始端時之前述臂部的終端之附近，前述臂部之在前述終 端之附近離前述第1接觸部之尖銳形狀之一端最近的端面 係形成有缺口之錐狀，前述彈性彎曲部之包含前述一個方 向之寬度的剖面係在前述臂部延伸側形成凹陷形狀。 再者，本發明之探針單元係具備：複數個上述任一項 發明中之接觸探針；第1保持具，具有分別供前述連接部 ***並收容前述臂部之複數個第1保持孔；以及第2保持 具，具有分別供前述第1接觸部***之複數個第2保持孔。 再者，本發明之探針單元係在前述發明中，前述第1 7 321634 201027080 俨保掊傷大輕保持具’形成有前述大徑部，·以及小 ’積層在前述大徑保持具，且形成有前述小徑部。 ’本發明之探針單元之組裝方法係上述發明之探 層=第方法，其特徵為具有:保持具積層步驟，積 層:这第1保持具及第2保持具’以使彼此對應之前述第 立 &保持孔連通，接觸探針貫通步騾，以前述第1接 觸。Ρ在刖頭之方式將前述接觸探針從在前述保持具積層步 驟_積層在前述第2保持具之前述第1保持具所具有的前 述複數個第1簡孔之各開σ赌人而貫通前述第 2保持孔’以將前述臂部收容在前述第玉保持孔；以及保 持具位置固定步驟，使在前述接觸探針貫通步驟中分別貫 2有前述複數個接觸探針之前述第J保持具及前述第2保 6具分離’以進行前述第1及第2保持具彼此之對位而固 定在預定之保持具固定構件。 (發明之效果） 根據本發明，由於使藉由來自外部之荷重而彈性蠻曲 之彈性f曲部之預定方向的寬度沿著彈性f曲部之長度方 „並且使沿著彈性，彎曲部之長度方向通過第 1接觸 奴何重仙點的平面偏置成不通過彈性彎曲部之預定方 向之寬度^:化大之部位中之寬度的中點，因此在從外部施 加荷重時’可使沿著寬錢化之方向撓曲。此外，由於設 置，與包含彈性彎曲部之柱狀部分正交之方向廷伸成板狀 ^臂部’ ®此為了收容該臂部而在保持具側設置橫長之保 持孔，而可容易地使接觸探針之排列方向—致，並且容易 321634 8 201027080 探針安裝在探針保持具。此外，在.斥下 時無&刀_針_具’因此拆卸亦容易。因此 元化時之組農=:撓曲之方向，可容易地進行單 【實施方q 有效率地進行單元化後之維修。 稱為=施參：圖說明用以實施本發明之最佳形態(以下 〇 八厚产和此外，圖式係示意性者，應注意各部 刀I讀的_、各部分厚度比轉亦有*實於者不 圖式彼此間當然亦包含彼此的尺寸關係：比率 不同的部分之情形。 (貫施形恶1) 第圖係顯示本發明實施形態1之探針單元之構成的 斜視圖。第！圖所示之探針單元i係在進行半導體積體電 路或液aB面㈣檢查對象之檢查配線圖案的短路或斷線之 有無的導通檢查或進行對檢查對象輸入信號時之動作特性 ❹檢查時，謀求檢查對象與輸出產生檢查用信號之信號處理 裝置之間的電性連接的裝置。具體而言，探針單元工係具 備·複數個導電性之接觸探針2 ’以兩端與分別設置在檢 查對象侧及信號處理裝置侧之電極或端子接觸；及探針保 持具3，用以收容並保持複數個接觸探針2。 第2圖係顯示接觸探針2之構成的斜視圖。第3圖係 顯示接觸探針2及探針保持具3之主要部分構成的局部剖 面圖。該接觸探針2係具有大致L字形之外觀形狀，且具 備：第1接觸部2卜其-端形成线形狀之柱狀；彈性彎 321634 9 201027080 長曲接觸部21之另-端沿著第1接觸部21之 長又方向形成大致柱狀而延 正交之方向中之至少m與該延伸方向（即ζ輪方向） 個方向的x軸方向之寬度係沿著z 而變化，另一方面，與該χ “ 的寬度係沿著延伸方向為固定，藉由來自外部之=:向 祕彎曲，·連接部23,從彈性彎曲部22延伸之ζ轴方 =部，亦即與連接於第】接觸部21之端部不同的端 广者ζ轴方向形成柱狀而延伸；臂部24，從連接部烈 沿著X軸方向形成板狀 第2接觸部25，從臂部 - 中之位於相對於第1接觸部21之尖銳形狀的— 端最遠處的端面朝與該端面正交之方向 成尖銳形狀。 /、則端形 彈性料部22之包含χ軸方向之寬度的剖面係在臂 Μ4延伸側形成圓弧狀凹陷形狀。再者，如第3圖 通過彈性彎曲部22之又軸方向的寬度中之最小寬度（與第 接觸部21之枝狀部分之χ轴方向上之最大寬度r的差為 =大之寬度）的中點M且與z軸平行的平面h，係與通過 第、1接觸部21之尖銳形狀之尖端τ且與z軸平行的平面 為不同之平面，且平面p】係位在比平面h離臂部24更 遠的位置。 具有以上構成之接觸探針2係藉由鎳合金之電鑄所形 成。在形成接觸探針2時，亦可藉由蝕刻、衝壓加工及該 等之組合而形成。此外，就接觸探針2之材質而言，亦可 使用銅、鐵（不鏽鋼）、鎢、鈹系合金等而形成。 321634 10 201027080 接觸探針2之板寬係50 am左右。再者，接觸# 之長度方向之長度係5mm左右。此外，臂部24之寬斤斜2 即與彈性彎曲部22之長度方向平行之方向的寬度^、亦 Am左右。 200 饭置係 接觸部 靖部g|7 在第2圖及第3圖中，第2接觸部25之突出 設置在臂部24中之將與連接部23之邊界作為開始 臂部24的終端之附近，但在本實施形態1中，第2 25之突出位置並未限定於此，只要是臂部24之上 ®可任帛地設;^ 〇 探針保持具3係具有··板狀之第1保持具31，供 探針2之連接部23***且保持臂部24 ;板狀之窠〇、觸 ^ 〇9 ^ ^ 2保持 八’與第1保持具31分離設置，以保持接觸探斜2 第1接觸部21 ;及2個保持具固定構件33、34,分別之 並固又第1保持具31及第2保持具32。第1保持具3工、 第2保持具32係互為平行。第4圖係從第】保持具幻之 ©上方觀看探針保持具3的平面圖。第i保持具31· 分另丨丨5 T 小八,. 至L字剖面形狀，供連接部23***且收容臂部24之 ，數個第1保持孔311。第1保持孔311係具有l字形之 DlJ面，且具有載置並收容臂部24之大徑部311a、及供連 接邻23***之小徑部311b。在形成第丨保持孔311時， 在藉由鑽孔加工等形成作成小徑部3llb之貫通孔後，配合 I °卩24之形狀施以鏜孔加工，藉此形成大徑部311a。複 數2第1保持孔311係在大徑部31 la之長度方向彼此平行 、;^下沿著各個短邊方向形成排列。第1保持孔311之 11 321634 201027080 間距係50至150#m左右。 第2保持具32具有由分別供第！接觸部21***的呈 圓柱狀之複數個第2保持孔32卜第2保持孔321的直徑 係與第1保持孔311之小徑部311b之直獲相等。複數個第 2保持孔321係對應第】保持孔311之小徑部311b的位置 排列形成為—排。如此，髓個第1保持孔311(之小徑部 311b)係朝上下方向與複數個第2保持孔321之任一個連 通，該連通之一對第1保持孔311與第2保持孔321係伴 持接觸探針2。 保持具固;t構件33、34係夾持與排列有第丄保符孔 31Ϊ及第2保持孔321之方向正交的方向之第i保持具⑴ 及第2保持具32之端面，簡定並支持該夾持之端面。 卜具有以上構成之探針保持具3係利用氧化鋁（Ah〇3)、 氮化石夕（Si3N4)等陶£、塑膝樹脂等絕緣性材料所形成。亦 可藉由以絕緣被膜鍍覆金屬科f性材料 探針保持具3。 Μ Λ 一第1圖與第4圖所示之接觸探針2的配置圖案係僅為 例亦即，棟針保持具3之配線圖案係依據檢查對象之 電極或端子之配線㈣而設定者，且可施行適當之設計變 更。 第^圖係顯示使用具有以上構成之探針單元】之檢查 時之狀。如第5圖所示，第！接觸部21係與半導體積 /電路1GG之電極接觸，另—方面，第2接觸部& 係與確立與錢處理電路之電性連接的喊基板之電 321634 12 201027080 極201接觸。配線基板goo係在由聚醯亞胺等所構成之薄 片狀之基材的一方表面，形成有由鎳等所構成之多數條配 線及連接用電極。配線基板2〇〇係在以與第2接觸部25 接觸之方式定位後，藉由以與探針保持具3同樣之材料所 構固定構件別〇及第1保持具31所夾持，且藉由螺絲 固疋等方式固定。此外’亦可在配線基板2GG與第1保持 具31之間設置適當之間隔件。 ❹： 萼曲。卩22之與ζ轴方向平行且通過X轴方向之 最丨見度之中點Μ的平面Pi ’係位在比與通過第1接觸部 21之如端（荷重作用點）了之X軸方向之中心的平面A離臂 邻24更遠的位置，因此藉由第1接觸部21所承受之荷重 彈丨生彎曲’且朝X轴負的方向變形為凹陷形狀。如 此由於接觸探針2係具有僅朝一方向（第5圖之X轴方向） 撓曲之性暂，m 貝 因此可容易地使複數個接觸探針2之撓曲方 向一致。. ® &第5圖中，隨著彈性彎曲部22依來自外部之荷重 而變形’第1接觸部21係朝X轴方向滑動於半導體積體電 路100之電極丨〇1。因此，於電極101由氧化膜所覆蓋， 或巧物附著於電極101之表面時，可刮取該等氧化膜或污 物。 ^ 第6圖係顯示因接觸探針2之彈性彎曲變形而產生之 何重繞曲特性的示意圖。在第6圖中，接觸探針2之荷重 ^曲特性係具有非線形性，隨著撓曲變大，荷重之變化會 變小。右太每 I只施形態1中，調整接觸探針2，俾可在荷重 13 321634 201027080 ===而大幅變化之區域5進行檢查。具體而言， 。周整=對:例如荷重5g產生5。〇_左右之行程。 接者、照第7圖至第9圖說明探針單幻之組裝方 持如第7圖所示’以使彼此對應之第:保 2i在前頭之方切二t厚度方向。然後，以第1接觸部 Μ ^ 探針2從複數個第1保持孔321之 2佯:口孔32〗入’而使接觸探針2貫通第^保持孔311及第 =:—，以將臂部24埋入收容在大徑部仙。結果， 2保•丨πΓ Μ接觸探針2貫通第1保持孔311及第 、、— 且臂部24載置於大徑部311a之狀態。 且31接^如第9圖所示，使第2保持具32從第1保持 :刀。然後’進行第1保持具31及第2保持具32 此對位，並以保持具固㈣件.％予以固定，藉此 1探針早凡1。在第9圖中，雖顯示移動第2保持具32 ’㈣可藉由移動第1保持具31而使第1保持具 31從第2保持具32分離。 依據以上說明之本發明實施形態卜由於使藉由來自 1卜^荷重而彈性管曲之彈性彎曲部22之預定方向的寬 又/口著彈性彎曲部22之長度方向變化，並且使沿著彈性彎 曲部22之長度方向通過第1接觸部2!之荷重作用點τ的 千面偏置成不通過彈性彎曲部22之預定方向之寬度變化 大之部位中之寬度的中點M，因此當從外部施加有荷重時， 可/ 口著寬度變化之方向撓曲。此外，由於設置朝與包含彈201027080 VI. Description of the invention: [Technology 4 member field of the invention] The present invention relates to the conduction of an electronic component such as a board, etc., in the electrode or terminal contact of the electronic component of the (four) circuit, and the n-materiality At the time of inspection, the contact probe, the probe unit, and the probe unit are connected and received. [Prior Art] The assembly method of the early 711. In the past, the conduction mode of the image was performed. Or the signal processing of the liquid crystal panel and the signal for the rotation inspection. =Setting for the inspection object to electrically connect the plurality of conductive contact probes, the operation: With the recent semiconductor semiconductor power:: The progress of the 曰 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The technology is progressing. f According to, for example, the load from the outside, it is known that there is a technique related to the contact probe. The line type is connected to the elastic type of the curve, and the contact probe is compared. It is easier to fine-tune the ten series and use the spring If the direction of the deflection is not the same when the pin is heavy, then 'but when the contact is applied from the outside or the contact with the contacted body, the contact probes of the adjacent contact probes are linearly connected to each other to try to make the load uneven. Therefore, for example, Patent Documents 1 to 4) have the same direction (refer to Patent Documents 1 and 2, which discloses a technique of forming a curved shape. In the special type, the shape of the probe is disclosed in FIG. A technique of forming the shape of the 321634 4 201027080 probe into a shape that is curved into a shape of a glyph. A technique disclosed in Patent 4 discloses that two of the linear contact probes are inserted into two different ones. After the through hole of the plate, the direction in which the one of the plates touches the probe is orthogonal to each other, and the initial deflection is applied to the contact probe, thereby making the deflection direction of the contact probe uniform. Japanese Patent Publication No. 2007-113972 (Patent Document 3) Japanese Patent Application Publication No. H07-155972 (Patent Document 3) Japanese Patent Publication No. Hei. Publication No. 2001-5_2 [Invention Contents (Problems to be Solved by the Invention) However, in the conventional technique described in the contact probes of the documents 1 to 3, the attachment to the probe is bent and bent, so that there is a final contact with the probe for contacting the probe. It is a problem of the work of the day 1. In addition, the aging is carried out. / The work is not easy, and the transfer cannot be performed efficiently. In the conventional technique described in the literature 4, the contact probe is found: It is necessary to carry out the alignment of the displacement plate with high precision, and the problem of time-consuming time during the re-operation. Moreover, the 1-knife solution probe unit is being performed, so the efficiency of maintenance is poor. Contact Detective 2: In the case of a deadly problem, the creator's purpose is to provide, by means of the assembly method of the eve h' early and the probe unit, which can control the direction of the weight and generate the direction of deflection. It is easy to carry out 321634 5 201027080 When it is assembled, it can be efficiently repaired after unitization. (Means for Solving the Problem) In order to achieve the above object, the contact probe of the present invention is electrically connected to two different circuit structures at both ends by two different circuit structures. a conductive contact probe, the contact probe (4) having: a second contact portion having a columnar shape with an acute end shape; and an elastic f curved portion from the I end of the first contact portion along the aforementioned 2 The longitudinal direction of the contact portion extends in a columnar shape, and the width in the direction orthogonal to the extending direction is a width along the extending direction and a width along the direction orthogonal to the aforementioned direction On the moon, the extension direction of J is fixed, straw and from the outside. What is the weight of the elastic bending joint, from the elastic curved pomelo and the end connected to the ith contact: the direction of the wide extension, that is, the end of the extension end, along the aforementioned extension Extending in a columnar shape; the arm portion extending in a plate shape from the connecting direction; and the second contact portion from the end portion of the end portion of the end portion forming the sharp shape with respect to the first contact portion a direction perpendicular to the end surface, and a 'mountain-expansion shape; one of the sharp shapes formed by the first contact portion: a plane perpendicular to the direction in which the extending directions are parallel, and the rigidity The difference between the width of the curved portion and the aforementioned c-thickness in the direction is the midpoint of the largest width and is different from the maximum surface of the extended ridge. . In the parallel invention, the contact probe of the present invention is the above-mentioned arm when the contact portion is provided in the arm portion and is at the beginning of the boundary of the aforementioned second 作 321634 201027080 ′. Near the terminal of the ministry. In the above aspect of the invention, the contact probe according to the invention is characterized in that the width of the elastic bending portion in the one direction is smaller than the maximum width of the first contact portion in the direction at each portion. Further, in the contact probe of the present invention, the cross section of the elastic bending portion including the width in the one direction is formed in a concave shape on the side of the arm extension. Further, in the contact probe according to the invention, in the first aspect of the invention, the width of the elastic portion of the curved portion in the one direction is larger at each portion than the maximum width of the first contact portion in the direction. Further, in the contact probe according to the present invention, the cross section of the elastic bending portion including the width in the one direction is formed in a protruding shape on the side of the arm extension. Further, in the contact probe of the present invention, the second contact portion is provided in the vicinity of a terminal end of the arm portion when the boundary between the arm portion and the connection portion is the @ start end, An end surface of the arm portion which is closest to one end of the sharp shape of the first contact portion is formed in a tapered shape in a vicinity of the terminal end, and a cross section of the elastic bending portion including the width in the one direction is a side of the arm extending side. A concave shape is formed. Furthermore, the probe unit of the present invention includes: a plurality of contact probes according to any one of the above inventions; and a first holder having a plurality of first holding holes for inserting and accommodating the arm portions; And the second holder has a plurality of second holding holes into which the first contact portions are inserted. Further, in the probe unit of the present invention, the first 7 321 634 201027080 俨 掊 大 大 大 大 大 大 大 ' 大 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The aforementioned small diameter portion is formed. The method of assembling the probe unit of the present invention is the method according to the invention described above, characterized in that the method includes a step of holding a layer of a holder, and stacking: the first holder and the second holder to correspond to each other The vertical & holding hole is in communication, and the contact probe penetrates the step to the first contact. In the manner of the hoe, the contact probe is connected to the gamma player of the plurality of first simple holes included in the first holder of the second holder. The second holding hole ′ is configured to receive the arm portion in the first jade holding hole and the holder position fixing step, and to perform the first J holding of the plurality of contact probes in the contact probe penetrating step And the second protection 6 separations' are fixed to the predetermined holder fixing member by aligning the first and second holders with each other. (Effects of the Invention) According to the present invention, since the width of the predetermined direction of the elastic f-curved portion which is elastically bent by the load from the outside is along the length of the elastic f-curved portion, and along the elastic portion, the curved portion is The length direction is offset by the plane of the first contact slave weight point to the width of the predetermined direction that does not pass through the elastic bending portion: the midpoint of the width in the enlarged portion, so that the width can be made wide when the load is applied from the outside In addition, due to the provision, the direction orthogonal to the columnar portion including the elastic bending portion is formed into a plate-like arm portion', which is arranged to be horizontally long on the holder side in order to accommodate the arm portion. Keeping the holes, the orientation of the contact probes can be easily made, and it is easy to install the probes on the probe holders. In addition, there is no & knife_needle_with the disassembly Therefore, it is easy to use the grouping == direction of deflection, which can be easily performed. [The implementation of the unit q is efficient and unitized after maintenance. It is called 施 参: The figure shows the most used to implement the invention. Good form (the following is eight thick In addition, the drawings are schematic, it should be noted that each part of the knife I read _, the thickness ratio of each part also has * the actual pattern does not contain each other, of course, also includes the size relationship of each other: the case of different ratios. (FIG. 1 is a perspective view showing a configuration of a probe unit according to Embodiment 1 of the present invention. The probe unit i shown in Fig. is a semiconductor integrated circuit or a liquid aB surface (four) inspection object. When the conduction check of the short circuit or the disconnection of the wiring pattern is checked or the operation characteristic ❹ when the input signal is input to the inspection target is performed, the device for electrically connecting the inspection target and the signal processing device that outputs the inspection signal is obtained. Specifically, the probe unit system includes a plurality of conductive contact probes 2 ′ which are in contact with electrodes or terminals respectively provided on the inspection target side and the signal processing device side, and a probe holder 3 . For accommodating and holding a plurality of contact probes 2. Fig. 2 is a perspective view showing the configuration of the contact probe 2. Fig. 3 is a partial cross-sectional view showing the main components of the contact probe 2 and the probe holder 3. The contact probe 2 has a substantially L-shaped outer shape and has a columnar shape in which the first contact portion 2 is formed in a line shape at its end; an elastic bend 32136 9 201027080 another end edge of the long curved contact portion 21. The width of the first contact portion 21 in the direction in which the length of the first contact portion 21 is substantially columnar and orthogonal, and the width in the x-axis direction of the direction of the extending direction (ie, the direction of the wheel) varies along z, and On the one hand, the width of the χ" is fixed along the extending direction, and the y-axis portion of the connecting portion 23 extends from the elastic bending portion 22, that is, the connection In the end portion of the contact portion 21, the end portion of the contact portion 21 is formed in a columnar shape and extends in the z-axis direction. The arm portion 24 forms a plate-shaped second contact portion 25 from the connecting portion in the X-axis direction, from the arm portion - The end face located at the farthest end with respect to the sharp shape of the first contact portion 21 has a sharp shape in a direction orthogonal to the end surface. Further, the cross section of the end-shaped elastic material portion 22 including the width in the z-axis direction is formed in an arc-shaped concave shape on the extending side of the arm Μ4. Further, as shown in Fig. 3, the minimum width of the width in the axial direction of the elastic bending portion 22 (the difference from the maximum width r in the z-axis direction of the branch portion of the contact portion 21 is = the width of the large width) The plane h of the midpoint M and parallel to the z-axis is a plane different from the plane passing through the sharp tip τ of the first contact portion 21 and parallel to the z-axis, and the plane p] is located away from the plane h The arm 24 is further away. The contact probe 2 having the above configuration is formed by electroforming of a nickel alloy. When the contact probe 2 is formed, it can also be formed by etching, press working, and the like. Further, the material of the contact probe 2 may be formed by using copper, iron (stainless steel), tungsten, a lanthanum alloy or the like. 321634 10 201027080 The width of the contact probe 2 is about 50 am. Furthermore, the length of the contact # is about 5 mm in length. Further, the width 2 of the arm portion 24, that is, the width in the direction parallel to the longitudinal direction of the elastic bending portion 22, is also about Am. In the second and third figures, the second contact portion 25 is protruded from the boundary between the arm portion 24 and the connecting portion 23 as the terminal end of the starting arm portion 24. In the first embodiment, the protruding position of the 2nd 25th is not limited thereto, and the above-mentioned arm portion 24 may be provided with a sturdy position; the 〇 probe holder 3 has a plate shape. The first holder 31 is inserted into the connecting portion 23 of the probe 2 and holds the arm portion 24; the plate-shaped cymbal, the contact 〇9 ^ ^ 2 holds the octagonal portion and is separated from the first holder 31 to maintain the contact probe. The first contact portion 21 and the two holder fixing members 33 and 34 are slanted, and the first holder 31 and the second holder 32 are respectively secured. The first holder 3 and the second holder 32 are parallel to each other. Fig. 4 is a plan view of the probe holder 3 viewed from the top of the illusion ©. The i-th holder 31 is divided into a plurality of first holding holes 311 which are inserted into the connecting portion 23 and accommodate the arm portion 24 in the L-shaped cross-sectional shape. The first holding hole 311 has a l-shaped D1J surface, and has a large diameter portion 311a on which the arm portion 24 is placed and housed, and a small diameter portion 311b into which the connection portion 23 is inserted. When the second holding hole 311 is formed, the through hole formed into the small diameter portion 3llb is formed by drilling or the like, and then the boring process is performed in accordance with the shape of the I 卩 24 to form the large diameter portion 311a. The plurality of first holding holes 311 are arranged parallel to each other in the longitudinal direction of the large diameter portion 31 la, and are arranged in the respective short side directions. The first holding hole 311 11 321634 201027080 The pitch is about 50 to 150 #m. The second holder 32 has a separate supply for the first! The plurality of second holding holes 32 in the cylindrical shape in which the contact portion 21 is inserted is the diameter of the second holding hole 321 which is equal to the diameter of the small diameter portion 311b of the first holding hole 311. The plurality of second holding holes 321 are arranged in a row corresponding to the position of the small diameter portion 311b of the first holding hole 311. In this manner, the first holding hole 311 (the small diameter portion 311b) of the medulla is connected to any one of the plurality of second holding holes 321 in the vertical direction, and one of the communication is connected to the first holding hole 311 and the second holding hole 321 The contact probe 2 is attached. The t members 33 and 34 hold the end faces of the i-th retainer (1) and the second holder 32 in a direction orthogonal to the direction in which the second retainer hole 31 and the second holding hole 321 are arranged, and are simple. And support the end face of the clamp. The probe holder 3 having the above configuration is formed of an insulating material such as alumina (Ah〇3), nitrite (Si3N4), or the like. The probe holder 3 can also be plated with a metal-based material by an insulating coating.配置 Λ The arrangement pattern of the contact probe 2 shown in Figs. 1 and 4 is merely an example. The wiring pattern of the pin holder 3 is set according to the wiring (4) of the electrode or terminal of the inspection object. Appropriate design changes can be made. Fig. 4 shows the state of the inspection using the probe unit having the above configuration. As shown in Figure 5, the first! The contact portion 21 is in contact with the electrode of the semiconductor product / circuit 1GG, and the second contact portion is in contact with the electrode 321634 12 201027080 which is electrically connected to the money processing circuit. The wiring board goo is formed on a surface of a sheet-like substrate made of polyimide or the like, and a plurality of wirings and connecting electrodes made of nickel or the like are formed. The wiring board 2 is positioned so as to be in contact with the second contact portion 25, and is fixed by the same member as the probe holder 3 and held by the first holder 31, and borrowed. It is fixed by screws, etc. Further, an appropriate spacer may be provided between the wiring board 2GG and the first holder 31. ❹: 萼曲. The plane Pi' of the 卩22 which is parallel to the ζ axis direction and passes through the most visibility of the X-axis direction is located at the X-axis direction which is the same as the end of the first contact portion 21 (loading point) Since the plane A of the center is farther from the arm 24, the load due to the first contact portion 21 is bent and deformed into a concave shape in the negative direction of the X-axis. Therefore, since the contact probe 2 has a property of being deflected only in one direction (the X-axis direction of Fig. 5), the m-shell can easily make the deflection directions of the plurality of contact probes 2 uniform. In the fifth diagram, the elastic bending portion 22 is deformed in accordance with the load from the outside. The first contact portion 21 is slid in the X-axis direction to the electrode 丨〇1 of the semiconductor integrated circuit 100. Therefore, when the electrode 101 is covered by the oxide film or the object is attached to the surface of the electrode 101, the oxide film or the dirt can be scraped off. ^ Fig. 6 is a view showing the characteristics of the rewinding due to the elastic bending deformation of the contact probe 2. In Fig. 6, the load characteristics of the contact probe 2 are non-linear, and as the deflection becomes larger, the change in load becomes smaller. In the right mode, the contact probe 2 is adjusted for each of the I modes, and the 俾 can be inspected in the region 5 where the load is greatly changed by 13 321634 201027080 ===. in particular, . Weekly = Pair: For example, a load of 5g produces 5. 〇 _ left and right. According to Fig. 7 to Fig. 9, the assembly of the probe phantoms is as shown in Fig. 7 to make the corresponding ones: the 2i is cut in the thickness direction of the front side. Then, the first contact portion Μ ^ probe 2 is inserted from the 2 佯: port 32 of the plurality of first holding holes 321 and the contact probe 2 is passed through the second holding hole 311 and the =: - The arm portion 24 is buried in the large-diameter portion. As a result, the 2 丨 丨 Γ Γ contact probe 2 penetrates the first holding hole 311 and the first, and the arm portion 24 is placed on the large diameter portion 311a. And 31, as shown in Fig. 9, the second holder 32 is held from the first holder: the knife. Then, the first holder 31 and the second holder 32 are aligned, and held in a fixed (four) piece. The first probe is fixed by one. In Fig. 9, the first holder 32 is moved to separate the first holder 31 from the second holder 32 by moving the first holder 32' (4). According to the embodiment of the present invention described above, the length direction of the wide/oral elastic bending portion 22 in the predetermined direction of the elastic bending portion 22 by the elastic tube is changed by the elastic load, and the elastic direction is made along the elastic The longitudinal direction of the curved portion 22 is offset by the thousand surface of the load point τ of the first contact portion 2! so as not to pass through the midpoint M of the width in the portion where the width of the elastic bending portion 22 changes greatly in the predetermined direction, and thus When a load is applied to the outside, the direction of the width change can be flexed. In addition, due to the setting and the inclusion of bombs
U 321634 201027080 ft弓曲β 22之柱狀部分正交之方向延伸成板狀的臂部2心 因此為了收容該臂部24而在探針保持具3側形成橫長之第 1保持孔311，可容易地使接觸探針2之排列方向一致，並 且可容易地將接觸探針2安裝在探針保持具3。此外，在 拆下接觸探針2時無須分解探針保持具3，因此拆卸亦容 易。因此，可控制藉由來自外部之荷重而產生撓曲之方向， 可容易地進行單元化時之组裝，且可有效率地進行單元化 後之維修。 ❹再者’依據本實施形態卜藉由娜彈性彎曲部Μ之 形狀絲度的變化、及臂部24之形狀等，可實現具有所希 望之荷重撓曲特性的接觸探針。 (實施形態1之變形例）. ❹ 弟10圖軸示本實施形態i之第丨變形例之接觸探 針之構成圖。第10 _示之接職針4係具備第丨接觸部 4卜彈性彎曲部42、連接部43、臂部24及第2接觸部45。 其中，彈性f曲部42係在x軸方向臂部44延伸之側形成 凹陷’在該X軸方向寬度變小之中央部附近係具有均一之 寬度。除了在此說明之彈性彎曲部42以外的接觸探針4 之構成係與接觸探針2之構成相同。在接觸探針4中， 過彈性彎曲部42之x轴方向的寬度中之最小寬度的中點 且與z軸平行的平面p3,係與通過第上接觸部ο之 形狀之尖端Tl且與z軸平行的平面？4為不同之平面， 面P3係位在比平面P,離臂部44更遠的位置。 第11圖係顯示本實施形態i之第2變形例之接_ 321634 15 201027080 2之構朗。第u圖所示之接觸探針5係具 =彈性變曲部52、連接部53、臂部54及第2接觸 ’、彈搜f曲部52係在X軸方向中與臂部54延伸之側 為相反的側形成有凹陷的㈣狀。因此 情形時’當從外部施加荷重時’彈，㈣曲部5二=2 的中心部會朝第"圖中之又軸正方向撓曲。除了 之=性弯曲部52以外的接觸探針5之構成係與接觸探針2 之構成相同。在接觸探針5中，通過彈性f曲部52之又 f方向的寬度中之最小寬度的中點吣且與z軸平行的平面 5’係與通過第i接觸部51之尖銳形狀之尖端τ2且盘2軸 ^的平面Ρ6為不同之平面，料面&係位在比平面& 離潫部54更遠的位置。 ^ 12圖係顯示本實施形態之第3變形例之接觸探針 冓成的圖。第12圖所示之接觸探針6係具備第 性彎曲部62、伽3、臂部64及第2接觸部65: =中’彈性蠻曲部62係在χ軸方向中臂部64延伸之側突 /且長度方向之中心部的寬度係比第1接觸部的最大 見度大。此時’通過彈性-曲部62之X轴方向的寬产中之 最大寬度的中點M3且與z軸平行的平面p7，係、與通^第卜 接觸部Η之尖銳形狀之尖端L且與z轴平行的平面㈣ 不同之平面，且平面P7係位在比平面P8離臂部24較近的 位置i此，當從外部賴聰針6絲荷重時，彈性 曲部62係朝x軸正方向撓曲。再者，在第12圖所 形時，探針保持具如之第1保持具35之第！保持孔351 321634 16 201027080 的直徑與第2保持具36之第2保持孔361的直徑係比彈性 彎曲部62之最大徑大。 依據以上說明之本實施形態！之第i至第3變形例， 與上述實施形態1同樣地，可控制藉由來自外部之荷重而 產生撓曲之方向，可容易地進行單元化時之組裝，且可 效率地進行單元化後之維修。 (實施形態2) ❹ 第13圖係顯示本發明實施形態2之接觸探針之構 圖。第13圖所示之接觸探針7係具備第1接觸部η、彈 性¥曲部72、連接部73、臂部74及第2接觸部乃，且且 有^致L字形之外觀形狀。除了臂部74之外的接觸探針、7 之構成係與上述實施形態1的接觸探針2之構成相同。 =部74係具有在以與連接部73之邊界作為開始端時 之附近最接近第1接觸部71之前端的端面、亦即第 ❹ 觸3=1有缺口之斜面部％，且形成錐形狀。第2接 山1、土糸°又置在臂部74之上端面（距第1接觸部71之前 端最退之端面）的終端。 寬产中’通過彈性f曲部72之X軸方向的 最小寬度的中點仏且與2軸平行的 接觸部71之尖銳形狀之尖端恤 24更遠°的位置之+面’且平面P9係位在比平面⑽臂部 第14圖係顯示使用具有以上構成之 查時之狀態的圖。在篦u廟士 干u<檢 圖在第14圖中，彈性彎曲部巧係除了承 321634 17 201027080 受來自半導體積體電路100之荷重，亦承受來自配線基板 200之荷重而變形。具體而言，當對第2接觸部75施加因 與配線基板200之電極201接觸而產生的荷重時，臂部74 會朝第14圖中之順時針方向旋轉，且斜面部％之底面會 接近大徑部311a之底面。因此，彈性f曲部72係藉由^ 1接觸部71及第2接觸部75所承受之荷重而產生彈性彎 曲，且朝X軸負方向變形成更加凹陷形狀。如此，接觸探 針7不僅會因第！接觸部71所承受之荷重而產生彈性彎曲 變形’亦會因第2接觸部75所承受之荷重而產生彈性弯曲 變形，因此當施加與前述實施形態i相同之荷重時，會產 生更大之彈性彎曲變形。 依據以上說明之本發明實施形態2，由於臂部74形 錐形狀，故當第2接觸部75從外部承受荷重時會產生力 ^而可使彈性彎曲部72變形。因此’除了與上述實施形 悲1相同之效果以外，可使施加有荷重弧時之行程變得更 在本貫施形態2巾’可適當地變更彈性彎曲部之形 佳為作4 2 t ’有鑑於臂部74之形狀，較 7重時彈性彎曲部朝遠離臂部74之方向 以^料細說明作為用以實施本㈣之最佳形態的 貫施形悲1、2，但本發明· jf # ώ u + ’、 者。‘ 發Μ非由上述2個實施形態所限定 第15圖係顯示構成本發明其他實施形態之探針單元 321634 18 201027080 之探針保持具之主要部分構成的圖。 持具8係具有：板狀之第】保持具8] 圖所不之探針保 接部23***且保持臂部24 ;及 供接觸探針2之逹 第1保持具81分離設置，以保持接具82，與 2】。第1保持具8】及第2保持具犯 ^第！接觸部 定構件33、34(參照第】圖）所固定。、糟由2個保持具固 第1保持具81係在厚度方向積展 第3保持具83及第4保持具δ4而开/刀/形成板狀之 係具有：呈L字剖面形狀，供接觸探針保持具 且收容其臂部24之第1保持孔Μ =接4 23*** 有：分別朝第3保持具83之厚度方 保持孔811係具 t及分別朝第4保持具84之厚=^複數個大徑部 徑部83!小且與大# ^ =貫通’直裡比大 伴持孔总曰士 運通之妓數個小握部841。第i 保持孔8U係具有L字形剖面形狀 1第」 部***且收容該臂部24。複數個第=二接 複數個第1保掊別qi1 m 1保持孔811係與 第2保技百 同樣地排列形成（參照第4圖）。 '、寺/、82係具有分別供第i 的複數個第2保持細。第二 應小徑部隐之位⑽m-排爾魏821係對 到上具有以上構成之接觸探針8的情形時，亦可得 到上述相同之效果。此 丌了侍 保持孔811係由2個…，成子剖面形狀之第1U 321634 201027080 The columnar portion of the ft bow β 22 extends in the direction perpendicular to the plate-shaped arm portion 2, so that the first holding hole 311 is formed horizontally on the probe holder 3 side in order to accommodate the arm portion 24, The alignment directions of the contact probes 2 can be easily made uniform, and the contact probes 2 can be easily mounted on the probe holder 3. Further, it is not necessary to disassemble the probe holder 3 when the contact probe 2 is removed, so that the disassembly is also easy. Therefore, the direction in which the deflection is generated by the load from the outside can be controlled, the assembly at the time of unitization can be easily performed, and the unitized maintenance can be performed efficiently. Further, according to the present embodiment, a contact probe having a desired load deflection characteristic can be realized by a change in the shape of the elastic portion of the elastic bending portion and the shape of the arm portion 24. (Modification of the first embodiment). Fig. 10 is a view showing a configuration of a contact probe according to a modification of the first embodiment of the present embodiment. In the tenth aspect, the receiving needle 4 includes a second contact portion 4, an elastic bending portion 42, a connecting portion 43, an arm portion 24, and a second contact portion 45. Here, the elastic f-curved portion 42 is formed to have a concave portion on the side where the x-axis direction arm portion 44 extends, and has a uniform width in the vicinity of the central portion where the width in the X-axis direction is small. The configuration of the contact probe 4 other than the elastic bending portion 42 described herein is the same as that of the contact probe 2. In the contact probe 4, the midpoint of the minimum width among the widths of the elastically curved portion 42 in the x-axis direction and the plane p3 parallel to the z-axis are the tips T1 and z passing through the shape of the upper contact portion ο A plane parallel to the axis? 4 is a different plane, and the plane P3 is located farther than the arm portion 44 than the plane P. Fig. 11 is a view showing the configuration of the second modification of the first embodiment _ 321634 15 201027080 2 . The contact probe 5 with the elastic deformation portion 52, the connecting portion 53, the arm portion 54, and the second contact ', and the elastic portion 52 are extended in the X-axis direction and the arm portion 54. The opposite side is formed with a concave (four) shape. Therefore, in the case of 'when the load is applied from the outside', the center portion of the (4) curved portion 5 = 2 will be deflected in the positive direction of the axis in the figure. The configuration of the contact probe 5 other than the neutral curved portion 52 is the same as that of the contact probe 2. In the contact probe 5, the center point 最小 of the smallest width among the widths of the elastic f-curved portion 52 in the f direction and the plane 5' parallel to the z-axis are the tip τ2 of the sharp shape passing through the ith contact portion 51. Moreover, the plane Ρ6 of the disk 2 axis is a different plane, and the material plane & is located farther than the plane & Fig. 12 is a view showing the formation of a contact probe according to a third modification of the embodiment. The contact probe 6 shown in Fig. 12 includes a first bending portion 62, a gamma 3, an arm portion 64, and a second contact portion 65: = Medium 'elastic bending portion 62 is extended in the arm axis direction in the arm portion 64 The width of the side protrusion/center portion in the longitudinal direction is larger than the maximum visibility of the first contact portion. At this time, the plane p7 passing through the midpoint M3 of the maximum width of the wide width in the X-axis direction of the elastic-curved portion 62 and parallel to the z-axis is the tip L of the sharp shape of the contact portion of the contact portion The plane parallel to the z-axis (4) is a different plane, and the plane P7 is located closer to the arm portion 24 than the plane P8. Here, when the load is from the outer Lucong 6 filament, the elastic curved portion 62 is toward the x-axis. The direction is flexed. Further, in the case of Fig. 12, the probe holder has the first holder 35 as in the first holder! The diameter of the holding hole 351 321634 16 201027080 and the diameter of the second holding hole 361 of the second holder 36 are larger than the maximum diameter of the elastic bending portion 62. According to the embodiment described above! In the first to third modifications, as in the first embodiment, the direction in which the deflection is generated by the load from the outside can be controlled, and the assembly can be easily performed, and the unitization can be performed efficiently. Maintenance. (Embodiment 2) Fig. 13 is a view showing the configuration of a contact probe according to Embodiment 2 of the present invention. The contact probe 7 shown in Fig. 13 includes the first contact portion η, the elastic bending portion 72, the connecting portion 73, the arm portion 74, and the second contact portion, and has an L-shaped outer shape. The configuration of the contact probes other than the arm portion 74 is the same as that of the contact probe 2 of the first embodiment. The = portion 74 has a tapered surface portion which is closest to the front end of the first contact portion 71 in the vicinity of the boundary with the connecting portion 73 as the start end, i.e., the first contact 31 = notched, and has a tapered shape. The second joint 1 and the soil 糸 are placed at the end of the upper end surface of the arm portion 74 (the end surface which is the most retracted from the front end of the first contact portion 71). In the wide production, the midpoint of the minimum width in the X-axis direction of the elastic f-curved portion 72 and the sharp-shaped distal end of the contact portion 71 parallel to the two-axis portion are further away from the + face ' and the plane P9 The figure shown in Fig. 14 of the arm of the plane (10) shows a state in which the state of the above-described configuration is used. In Fig. 14, the elastic bending portion is deformed by the load from the semiconductor integrated circuit 100 in addition to the load from the semiconductor integrated circuit 100. Specifically, when a load due to contact with the electrode 201 of the wiring substrate 200 is applied to the second contact portion 75, the arm portion 74 rotates clockwise in FIG. 14 and the bottom surface of the slope portion is close to The bottom surface of the large diameter portion 311a. Therefore, the elastic f-curved portion 72 is elastically bent by the load received by the contact portion 71 and the second contact portion 75, and is deformed into a more concave shape in the negative X-axis direction. In this way, the contact probe 7 will not only be due to the first! The elastic bending deformation caused by the load applied to the contact portion 71 also causes elastic bending deformation due to the load applied to the second contact portion 75. Therefore, when the same load as that of the above-described embodiment i is applied, a greater elasticity is generated. Bending deformation. According to the second embodiment of the present invention described above, since the arm portion 74 has a tapered shape, when the second contact portion 75 receives the load from the outside, a force is generated and the elastic bending portion 72 can be deformed. Therefore, in addition to the same effect as the above-described embodiment, the stroke when the load arc is applied can be made more in the present embodiment. The shape of the elastic bending portion can be appropriately changed as 4 2 t ' In view of the shape of the arm portion 74, the elastic bending portion is closer to the direction away from the arm portion 74 than the weight of the arm portion 74, and is described as the best form for carrying out the fourth aspect of the present invention. Jf # ώ u + ', who. The hairpin is not limited by the above two embodiments. Fig. 15 is a view showing a configuration of a main part of a probe holder constituting the probe unit 321634 18 201027080 of another embodiment of the present invention. The holder 8 has a plate-shaped first holder 8] the probe holding portion 23 of the figure is inserted and held by the arm portion 24; and the first holder 81 for the contact probe 2 is separately disposed to maintain Pickers 82, and 2]. The first holder 8] and the second holder are committed ^第! The contact portion members 33 and 34 (see Fig.) are fixed. The two retaining members 1 hold the third holder 83 and the fourth holder δ4 in the thickness direction, and open/blade/form a plate shape: an L-shaped cross-sectional shape for contact The first holding hole Μ of the probe holder and accommodating the arm portion 24 thereof is inserted into the thickness of the third holder 83 to hold the hole 811 and the thickness of the fourth holder 84 respectively. ^ A plurality of large-diameter portion 83! Small and large #^ = through the straight-to-big ratio with a large number of small grips 841. The i-th holding hole 8U has an L-shaped cross-sectional shape. The first portion is inserted and accommodates the arm portion 24. A plurality of the second and second plurality of first guards qi1 m 1 holding holes 811 are arranged in the same manner as the second proof (see Fig. 4). The ', the temple, and the 82 series have a plurality of second holdings for the i-th. The same effect can be obtained when the second small-diameter portion (10) m-the weier 821 is in contact with the contact probe 8 having the above configuration. This 丌 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持
個直孔（大徑部831、小彳H 成，因此可容易地料孔加工。 ⑴所構 321634 19 201027080 如此，本發明係可包含在此未記載之各種實施形態等 者，在不脫離由申請專利範圍所特定之技術思想的範圍 内，可進行各種設計變更等。 (產業上之可利用性） 本發明係適用進行液晶面板或半導體積體電路等之電 子零件之導通狀態檢查或動作特性檢查時。 【圖式簡單說明】 第1圖係顯示本發明實施形態1之探針單元之構成的 斜視圖。 第2圖係顯示本發明實施形態1之接觸探針之構成的 斜視圖。 第3圖係顯示本發明實施形態1之探針單元之主要部 分構成的斜視圖。 第4圖係顯示探針保持具之上表面之構成的平面圖。 第5圖係顯示本發明實施形態1之探針單元之主要部 分檢查時之狀態圖。 第6圖係顯示本發明實施形態1之接觸探針之荷重撓 曲特性圖。 第7圖係顯示在本發明實施形態1之探針單元之組裝 方法中，要將探針***探針保持具積層體之步驟概要圖。 第8圖係顳示在本發明實施形態1之探針單元之組裝 方法中，將探針***到探針保持具積層體之狀態圖。 第9圖係顯示在本發明實施形態1之探針單元之組裝 方法中，要將第1保持具與第2保持具分離之步驟概要圖。 20 321634 201027080 第10圖係_ 觸探針之構成圖。 示本發明實施形態1之第 變形例之接 圖係_示本發明實形態丨 觸探針之構成I Λ 第圖係齟-丄 〇 觸探針之構成圈轉發明實施形態1之第3變形例之去 圓。第13圖係，示本發明實施形態2之接觸探針之如 部分檢查時之I:;本發明實施形態2之探針單元之主， 第15圖係顯示構成本發明另一實施形態之探針天 心的探針保持具之主要部分構成圖。 【主要元件符號說明】 1 探針單元 接觸探針 探針保持具 第1接觸部 彈性彎曲部 接觸部 臂部 第2接觸部 第1保持具 第2保持具 保持具固定構件 2、4、5、6、7 _ .3、3 a、8 21、41、51、61、 22 、 42 、 52 、 62 、 72 23 、 43 、 53 、 63 、 73 24、44、54、64、74 25 、 45 、 55 ' 65 、 75 31、35、81 32 、 36 、 82 33、34 321634 21 201027080 74a 斜面部 83 第3保持具 · 84 第4保持具 100 半導體積體電路 101 ' 201 電極 200 配線基板 300 固定構件 311 ' 351 ' 811 311a 、 831 第1保持孔 大徑部 © 311b 、 841 小徑部 321 > 361 > 821 第2保持孔 22 321634Since the straight holes (the large diameter portion 831 and the small diameter H are formed, the hole processing can be easily performed. (1) The configuration is 321634 19 201027080. Thus, the present invention can include various embodiments not described herein, and the like. Various design changes and the like can be made within the scope of the technical idea of the patent application. (Industrial Applicability) The present invention is applicable to conducting state inspection or operating characteristics of an electronic component such as a liquid crystal panel or a semiconductor integrated circuit. [Brief Description of the Drawings] Fig. 1 is a perspective view showing a configuration of a probe unit according to Embodiment 1 of the present invention. Fig. 2 is a perspective view showing a configuration of a contact probe according to Embodiment 1 of the present invention. 3 is a perspective view showing a configuration of a main part of a probe unit according to Embodiment 1 of the present invention. Fig. 4 is a plan view showing a configuration of an upper surface of a probe holder. Fig. 5 is a view showing Embodiment 1 of the present invention. The state diagram of the main part of the needle unit is inspected. Fig. 6 is a diagram showing the load deflection characteristic of the contact probe according to the first embodiment of the present invention. Fig. 7 is a view showing the embodiment of the present invention. In the method of assembling the probe unit of the first embodiment, a schematic diagram of the step of inserting the probe into the probe holder with the laminated body is shown in Fig. 8. Fig. 8 is a view showing the assembly method of the probe unit according to the first embodiment of the present invention. A state diagram in which the needle is inserted into the probe holder laminate. Fig. 9 is a schematic view showing a procedure for separating the first holder from the second holder in the method of assembling the probe unit according to the first embodiment of the present invention. 20 321634 201027080 Fig. 10 is a configuration diagram of a touch probe. The connection diagram showing a modification of the first embodiment of the present invention shows the configuration of the touch probe of the actual embodiment of the present invention. The configuration of the touch probe is changed to the third modification of the first modification of the first embodiment. Fig. 13 is a view showing the partial inspection of the contact probe according to the second embodiment of the present invention. The main part of the probe unit, Fig. 15 is a view showing the main part of the probe holder constituting the probe center of another embodiment of the present invention. [Main element symbol description] 1 Probe unit contact probe probe holder First contact portion elastic bending portion contact portion arm portion 2 contact portion first holder second holder holder fixing members 2, 4, 5, 6, 7 _ .3, 3 a, 8 21, 41, 51, 61, 22, 42 , 52 , 62 , 72 23 , 43 , 53 , 63 , 73 24 , 44 , 54 , 64 , 74 25 , 45 , 55 ' 65 , 75 31 , 35 , 81 32 , 36 , 82 33 , 34 321634 21 201027080 74a Inclined face 83 3rd holder 84 fourth holder 100 semiconductor integrated circuit 101' 201 electrode 200 wiring board 300 fixing member 311 '351 '811 311a, 831 first holding hole large diameter portion © 311b, 841 small diameter portion 321 > 361 > 821 Second holding hole 22 321634