201024005 六、發明說明： 【發明所屬之技術領域】 本發明係關於加工機具調校刀具之技術領域，尤指一 種利用機具上設置非接觸式量測儀器搭配控制裝置調校刀 具位置達到校刀目的之加工機具及其校刀方法。 【先前技術】 、 超精密加工機具進行工件的車削加工時，被安裝於加 工機具刀座上之刀具尖端位置，是否位於工件驅動主轴之 ❿中心線等高位置，關係著工件加工後的形狀誤差。若無法 快速而精確地將刀具調校至正確位置，如第六圖a〜c所示， 當刀具（d)之尖端高於主轴（e)中心線（c)或低於主轴（e)中心 線（c)時，於刀具（d)對主軸（e)驅動之工件（a)進行加工後， 會造成工件（a)加工後的形狀誤差大，且於工件（a)端部會 產生一突起部（b)(所謂的“肚臍眼，，現象），前述刀具位置 不正確時，不僅易會造成刀具損壞而縮短其使用壽命，且 無法加工出符合設計尺寸精度要求的工件。因此，刀具調 校位置對於超精密加工機之操作使用，為一重要而不可或 缺的步驟。 目前為超精密車削加工機具的刀具調校方式，主要係 採用機外量測方式，即透過接觸式非球面量測儀或非接觸 式干涉儀或工具鏡等來進行刀具調校。這些量測設備雖可 提供高精度的刀具調校功能，但其設備價格昂貴。而且， 透過工具鏡進行刀具高低位置之調校時，仍然會受限於X、 Y軸向之解析度，造成量測上的誤差，影響校刀作業的速 度及精確度。 201024005 至於使用高精度之接觸式非球面量測儀或非接觸式干 涉儀進行刀具高低位置之調校時，雖可精確的量測出^且 於工件加工後之加工面誤差，但因儀器設備價格昂貴，二 般只有大型專業製造廢方具有使用該些儀器設備的能力， 而且，使用該接觸式非球面量測儀或非接觸式干涉儀進行 刀具高低位置之調校時，必須將工件拆下量測後，再架2 機台進行刀具調校，以致有刀具調校作業時間偏長之 •題。 另目刚已知具有快速調校刀具位置功能之技術，概如 我國申請第091205094號「校刀儀」新型專利所揭示者， 該校刀儀係一種可夾持於刀桿上，並直接於工具機上進行 校正刀具位置之作業，使其具有快速調校刀具之功能。惟 其係利用量錶之測定子與刀具之刀刀接觸而進行刀具位置 之調校，由於該校刀儀係屬接觸量測技術，超精密加工機 具係使用單晶鑽石刀具，該單晶鑽石刀具質地相當脆弱， φ 故該校刀儀不適用於此類刀具的調校作業，若採用此校刀 儀調校該單晶鑽石刀具易對刀具造成損毀的情事。 再者’前述校刀儀必須搭配持刀桿之夾頭使用，而不 同直控的刀桿必須配置相對應的夹持頭，使用上不甚方 便’而且該校刀儀被固定後，其量錶的中心無法調整至對 應夾持刀桿之中心位置，造成量測上之誤差，不利於超精 密加工機具的使用。 【發明内容】 本發明之主要目的在於提供一種機上具有非接觸式量 ’則儀器之超精密車削校刀方法及超精密加工機具，希望藉 201024005 此’改善先前超精密加工機 設備價格昂貴，以及接、”調校作業使用之量測 時，且量測誤差高等=式置測方法於調校刀具時操作費 為達前揭目的，士益 本發月所設計之機上具有非接觸式量 測儀器之加工機具，係包括： 一機台； 可被驅動旋轉的主軸，係設於機台上，用以固定工 件及帶動工件旋轉； ❹ ❿ 一可被媒動旋轉之刀具載台，係設於機台上； 一刀座，係設於該刀具載台1以固定刀具； 位置驅動裝置’係設於機台上，並可改變刀座與主 抽於二度空間相對位置； 一影像擷取器，係設於刀具載台上；以及 控制裝置’係電連接影像擷取器，且具有動作控制 程式以及影像分析判斷及運算之處理程式，藉以結合影像 擷取器提供刀具位置調校功能。 本發明另一設計之機上具有非接觸式量測儀器之車削 校刀方法，係使用一部附加有影像擷取器之加工機具直接 於機上進行以下步驟： 提供一犧牲工件，將其裝設於加工機具的工件主軸 上； 粗校刀具位置； 加工該犧牲工件之端面，係旋轉犧牲工件並令刀具對 其加工； 擷取與傳輸加工端面影像，由影像擷取器擷取犧牲工 201024005 件之加工端面之影像並傳輸至控制裝置； 判斷有無誤差目標部位，係由控制裝置依據取得的 像分析犧牲X件加卫端面是否具有誤差目標部位；當判斷 犧牲工件加工端面無誤差目標部位時，即結束刀具^度調 校作業；當判斷犧牲工件加工端面存在有誤差 時，執行以下步驟： ϋ201024005 VI. Description of the Invention: [Technical Field] The present invention relates to the technical field of processing tool adjustment tools, and more particularly to a tool for setting a non-contact measuring instrument with a control device to adjust a tool position to achieve a cutting purpose Processing tools and their method of cutting. [Prior Art] When the ultra-precision machining tool performs the turning of the workpiece, the position of the tool tip mounted on the tool holder is located at the height of the center line of the workpiece drive spindle, which is related to the shape error after the workpiece is machined. . If the tool cannot be quickly and accurately adjusted to the correct position, as shown in Figures 6 a to c, when the tip of the tool (d) is higher than the center line (e) of the spindle (e) or lower than the center of the spindle (e) In the case of line (c), after the tool (d) is machined to the workpiece (a) driven by the spindle (e), the shape error after machining of the workpiece (a) is large, and a workpiece is generated at the end of the workpiece (a). The protrusion (b) (so-called "belly eye, phenomenon"), when the tool position is not correct, not only will the tool damage be shortened, but the life of the tool will be shortened, and the workpiece that meets the design dimensional accuracy requirements cannot be machined. The adjustment position is an important and indispensable step for the operation of ultra-precision machining machines. Currently, the tool adjustment method for ultra-precision turning tools is mainly based on the external measurement method, that is, through the contact aspheric surface. Tool calibration can be performed by measuring instruments or non-contact interferometers or tool mirrors. These measuring instruments provide high-precision tool adjustment, but their equipment is expensive. Moreover, the tool position is used to position the tool. Adjustment , will still be limited by the resolution of the X and Y axes, resulting in errors in measurement, affecting the speed and accuracy of the calibration work. 201024005 As for the use of high-precision contact aspheric measuring instrument or non-contact interference When the instrument adjusts the position of the tool, it can accurately measure the error of the machined surface after the workpiece is processed. However, due to the high price of the equipment, only large professional manufacturing wastes have the use of these instruments. Capability, and, when using the contact aspheric measuring instrument or non-contact interferometer to adjust the tool height position, the workpiece must be removed and measured, and then the machine can be adjusted to have a tool. The problem of adjusting the working time is too long. Another technique is known that has the function of quickly adjusting the position of the tool. For example, if we apply for the new patent of the "Scissor Instrument" No. 091205094, the cutting tool is a kind. It is clamped on the tool holder and directly corrects the position of the tool on the machine tool, so that it has the function of quickly adjusting the tool. However, the instrument is adjusted by the contact of the measuring instrument with the tool of the tool. Since the tool is a contact measuring technology, the ultra-precision processing machine uses a single crystal diamond tool, and the single crystal diamond tool The texture is quite fragile, so the cutter is not suitable for the adjustment of such tools. If this cutter is used to adjust the single crystal diamond tool, it is easy to damage the cutter. Furthermore, the aforementioned knife cutter must be used with the chuck holding the cutter bar, and the different straight control cutter bar must be equipped with the corresponding clamp head, which is not very convenient to use, and the amount is determined after the knife cutter is fixed. The center of the table cannot be adjusted to the center position of the corresponding clamping arbor, which causes measurement error, which is not conducive to the use of ultra-precision processing tools. SUMMARY OF THE INVENTION The main object of the present invention is to provide an ultra-precision turning knives method and an ultra-precision processing tool with a non-contact type on the machine, and it is hoped that by 201024005, it is expensive to improve the previous ultra-precision processing machine. And the connection, the measurement used in the adjustment operation, and the measurement error is high. The type of measurement method is used to adjust the operation cost of the tool. The machine designed by Shiyi this month has a non-contact type. The processing tool of the measuring instrument comprises: a machine table; a spindle that can be driven to rotate, is arranged on the machine table for fixing the workpiece and driving the workpiece to rotate; ❹ ❿ a tool stage that can be rotated by the medium, The system is disposed on the machine table; a tool holder is disposed on the tool stage 1 to fix the tool; the position driving device is disposed on the machine table, and can change the relative position of the tool holder and the main drawing in the second degree space; The picker is disposed on the tool stage; and the control device is electrically connected to the image capture device, and has a motion control program and a processing program for image analysis judgment and calculation, thereby combining the image The tool provides a tool position adjustment function. Another method for turning and calibrating a non-contact measuring instrument on the machine of the present invention is to perform the following steps directly on the machine by using a processing tool with an image picker attached thereto. : providing a sacrificial workpiece and mounting it on the workpiece spindle of the processing tool; roughing the tool position; machining the end surface of the sacrificial workpiece, rotating the sacrificial workpiece and causing the tool to process it; capturing and transmitting the processed end image, by The image capture device captures the image of the processed end face of the victim 201024005 piece and transmits it to the control device; determines whether there is an error target part, and the control device sacrifices the X piece to defend the end face whether there is an error target part according to the obtained image analysis; When the workpiece end face is not damaged, the tool is adjusted. When the workpiece end surface of the sacrificial workpiece is judged to have an error, perform the following steps:
榻取與傳輸誤差目標部位影像，係由影像掏取器棟取 犧牲工件誤差目標部位的影像並傳輸至控制裝置； 汁鼻誤差目標部位尺寸量測值，係'由控制裝置依據取 得的影像計算該誤差目標部位尺寸量測值； 調校刀具高度，係由控制裝置依據該誤差目標部位的 尺寸量測值回饋而調整刀具高度；以及 重回加工該犧牲工件之端面步驟。 本發明藉由前述車削校刀方法及該加工機具之設計， 其特點在於： 1.本發明利用加工機具本身位置控制機構之高精度， 搭配機上附設的影像擷取器以及控制裝置之影像分析，配 合控制機具中刀具與犧牲工件間高精度的位置移動，而能 快速地量測刀具於犧牲工件加工面上的偏差，並回饋調整 刀具移動至正確位置。 2·本發明係利用加工機具原有設備，再附加一具影像 擷取器，以及控制裝置内建影像分析及運算功能之處理程 式，即可達成快速而精確的刀具調整作業，可有效減少量 測儀器之設備成本。 3-本發明除提供刀具調整功能外，尚可應用於工件表 6 201024005 面微結構狀況及結構間距的量測等用途，在無須拆下 的狀態’於機上即可直接確認加工是否符合原設計形狀^件 4.本發明應用於大深度微結構工件加工時， 於換刀的 過程中，也可透過機上直接量測調校之技術手段，協助換 刀時快速對位，減少微結構工件加工錯位的情形。 、 【實施方式】The target image of the target and the transmission error is taken by the image capture device to capture the image of the target portion of the workpiece error and transmitted to the control device; the size measurement value of the target portion of the juice nose error is calculated by the control device based on the acquired image. The error target part size measurement value; adjusting the tool height, the control device adjusts the tool height according to the size measurement value feedback of the error target part; and returns the end face step of processing the sacrificial workpiece. The invention adopts the above-mentioned turning knives method and the design of the processing tool, and the characteristics thereof are as follows: 1. The invention utilizes the high precision of the position control mechanism of the processing machine itself, and the image analysis of the image picker and the control device attached to the machine. In accordance with the high-precision positional movement between the tool and the sacrificial workpiece in the control tool, the deviation of the tool on the machining surface of the sacrificial workpiece can be quickly measured, and the feedback tool can be moved to the correct position. 2. The invention utilizes the original equipment of the processing machine, and then attaches an image capturing device and a processing program for the image analysis and calculation function built in the control device, thereby achieving fast and accurate tool adjustment work, which can effectively reduce the amount Equipment cost of the instrument. 3- In addition to the tool adjustment function, the present invention can be applied to the surface of the workpiece table 6 201024005, the surface microstructure condition and the measurement of the structure spacing, etc., and it is possible to directly confirm whether the processing conforms to the original in the state without the need to be removed. Design shape ^ 4. When the invention is applied to the processing of large-depth microstructured workpieces, in the process of tool change, the technical means of direct measurement and adjustment can be directly assisted by the machine to assist in the rapid alignment of the tool change and reduce the microstructure. The case where the workpiece is misaligned. [Embodiment]
本發明係包含一種機上具有非接觸式量測儀器之車削 校刀方法以及一種機上具有非接觸式量測儀器之加工機 具，所述車削校刀方法係使用該機上具有非接觸式量測儀 器之加工機具於機上直接進行刀具位置的調校步驟。 如第一、二圖所示，所述機上具有非接觸式量測儀器 之加工機具主要係包括一機台⑴、—可被驅動$轉的主軸 (2)、一可被驅動旋轉的刀具載台（3)、一刀座（句一位置 驅動裝置（5)、一影像操取器（6)以及一控制裝置（？），其中 前述之機台（1)尚可進一步於其底部裝設數組除振裝置 (1〇)，並以該數組除振裝置（10)安裝於地面上，或架設於 一基座（11)上。 叹、 該可被驅動旋轉的主軸（2)係設於機台（1)上於本較 佳實施例中，該主轴(2)係連接一主軸旋轉驅動組件(2〇)， 且該主轴（2)端部包含一工件固定器（21)，用以固定工件， 使工件及主軸（2)可被驅動旋轉，該主轴旋轉驅動組件㈣ 尚可進一步具有分度定位功能之驅動機構者。 該可被驅動旋轉之刀具載台（3)係設於機台（1)上位 於該主轴（2)—側，於本較佳實施例中’該刀具載台（3)係 連接一旋轉驅動組件（30)，使該刀*载台（3)可被驅動旋 7 201024005 轉。 該刀座（4)係設於該刀具載台（3)上，提供車削刀具（9) 等固設定位其上。 該位置驅動裝置（5)係設於機台（1)上，並可改變刀座（4) 與主轴（2)於三度空間相對位置，於本較佳實施例中，該位 置驅動裝置（5)係包括一 X轴向位移驅動組件（5〇)、一 γ轴 * 向位移親動組件（51)以及一 Z轴向位移驅動組件（52)，該 X轴向位移驅動組件（50)可設於機台（1)上，該X軸向位移 籲驅動組件（50)包含一可被驅動沿X軸向移動之父軸向移動 台（501)，該Y軸向位移驅動組件（51)設於該X軸向移動台 (501)上，該γ軸向位移驅動組件（51)包含一可被驅動沿γ 軸向移動之Y軸向移動台（511)，該γ轴向移動台（511)供 驅動主軸（2)之主軸旋轉驅動組件（2〇)裝設其上；該z轴向 位移驅動組件（52)設於該機台（1)上位於X軸向位移驅動組 件（50)的一侧，該z轴向位移驅動組件（52)包含一可被驅 藝動沿z轴向移動之z軸向移動台（521)，該2：軸向移動台（521) 供連接刀具載台（3)之旋轉驅動組件（3〇)設置其上，藉此， 使該位置驅動裝置（5)可以改變刀座（4)與主軸（2)於三度空 間相對位置。 該影像擷取器（6)係設於刀具載台（3)上，且具有物件 放大及影像梅取的功能。 該控制裝置（7)係電連接影像擷取器（6)，於本實施例 中’該控制震置（7)係為一電腦，並具有動作控制程式，用 以驅動别述主轴（2)、刀座（4)以及改變主軸⑺與刀座⑷間 的相對位置，該控制裝置⑺且包含影像分析判斷及運算之 201024005 處理程式，藉以結合該影像擷取器（6)提供刀具（9)位置調 校功能。所述控制裝置⑺尚包括一顯示器(7〇)，用以顯示 該影像擷取器（6)所擷取之影像晝面。 如第一、二、三圖所示，本發明車削校刀方法係使用 一組附加有影像擷取器之加工機具直接於機上來進行，所 述加T機具可如上述加工機具設計，其實施步驟係包括： 提供一犧牲工件（8)裝設於加工機具中的主軸上， 其係令犧牲工件（8)固定於主軸（2)端部的工件固定器（21) 對加工機具進行粗校刀具位置，其係利用位置驅動裝 置⑼令刀具(9)之刀刀端部接近犧牲工件其中可利用目 測方式進行刀具位置的判斷； 驅動加工機具之主軸(2)帶動犧牲工件(8)旋轉，及人 =具幅近犧牲工件（8)並對其端面加工出球面加工: 面，待停止後，令刀具（9)遠離犧牲工件（8) · 由影像擷取器(6)擁取犧牲工件(8)之加工端 及傳輪至控制裝置（7)，由控制裝 乂像 析判斷犧牲工件（8)加工端 刀 —扣^ 有誤差目標部位（80U仫 —犬起部，即肚臍眼，如第五圖所示者）； 係 當判斷犧牲工件（8)加工端面| ep Λ,. 磲面無誤差目標部位（8〇)睡 =束刀具(9)高度調校作業；當判斷犧牲工件(8)加二 面存在有誤差目標部位(80)時，即執行以下步驟：端 由影像擷取器（6)擷取犧牲工 *ιτ , 丨卞、0^加工端面的誤装〇 禚部位的影像，並傳送至控制裝置； '差目The present invention relates to a turning knives method with a non-contact measuring instrument on board and a processing tool having a non-contact measuring instrument on the machine, the turning knives method using a non-contact type on the machine The processing tool of the measuring instrument directly performs the adjustment step of the tool position on the machine. As shown in the first and second figures, the processing tool having the non-contact measuring instrument on the machine mainly comprises a machine (1), a spindle (2) that can be driven to rotate, and a tool that can be driven to rotate. a stage (3), a holder (a sentence position driving device (5), an image manipulation device (6), and a control device (?), wherein the aforementioned machine (1) can be further installed at the bottom thereof An array vibration-removing device (1〇) is mounted on the ground by the array vibration-damping device (10) or mounted on a base (11). The sigh, the spindle (2) that can be driven to rotate is attached to In the preferred embodiment, the spindle (2) is coupled to a spindle rotation drive assembly (2), and the spindle (2) end includes a workpiece holder (21) for The workpiece is fixed, and the workpiece and the spindle (2) can be driven to rotate. The spindle rotation drive assembly (4) can further have a driving mechanism for indexing and positioning. The tool carrier (3) that can be driven to rotate is attached to the machine. The table (1) is located on the side of the main shaft (2). In the preferred embodiment, the tool carrier (3) is connected to a rotary drive. The moving assembly (30) enables the knife* stage (3) to be driven to rotate 7 201024005. The holder (4) is attached to the tool stage (3) to provide a setting of the turning tool (9) The position driving device (5) is disposed on the machine table (1), and can change the relative position of the tool holder (4) and the main shaft (2) in a three-dimensional space. In the preferred embodiment, the position The position driving device (5) comprises an X-axis displacement drive assembly (5〇), a γ-axis* displacement displacement assembly (51) and a Z-axis displacement drive assembly (52), the X-axis displacement drive The assembly (50) can be disposed on the machine table (1), the X-axis displacement drive assembly (50) includes a parent axial movement table (501) that can be driven to move along the X-axis, the Y-axis displacement A driving assembly (51) is disposed on the X-axis moving table (501), and the γ-axis displacement driving assembly (51) includes a Y-axis moving table (511) that can be driven to move along the γ-axis, the γ An axial moving table (511) is mounted on the spindle rotating drive assembly (2〇) of the driving spindle (2); the z-axis displacement driving assembly (52) is disposed on the machine (1) in the X-axis Displacement drive One side of the assembly (50), the z-axis displacement drive assembly (52) includes a z-axis moving table (521) movable in the z-axis, the 2: axial moving table (521) A rotary drive unit (3) for connecting the tool stage (3) is disposed thereon, whereby the position drive unit (5) can change the relative position of the seat (4) and the main shaft (2) in three degrees. The image picker (6) is disposed on the tool stage (3) and has the function of object enlargement and image capture. The control device (7) is electrically connected to the image picker (6), and is implemented in the present embodiment. In the example, the control (7) is a computer and has an action control program for driving the spindle (2), the holder (4), and changing the relative position between the spindle (7) and the holder (4). The control device (7) includes a 201024005 processing program for image analysis determination and calculation, and the tool (9) position adjustment function is provided in combination with the image capture device (6). The control device (7) further includes a display (7〇) for displaying the image plane captured by the image capture device (6). As shown in the first, second and third figures, the turning tool setting method of the present invention is carried out directly on the machine using a set of processing tools with an image picker, which can be designed as described above. The steps include: providing a sacrificial workpiece (8) mounted on a spindle in the processing tool, the workpiece holder (21) fixed to the end of the spindle (2) at a sacrificial workpiece (8) for roughing the processing tool The position of the tool is determined by the position driving device (9) so that the end of the knife of the tool (9) approaches the sacrificial workpiece, wherein the position of the tool can be determined by visual inspection; the spindle of the machining tool (2) drives the sacrificial workpiece (8) to rotate, And person = the workpiece near the sacrificial workpiece (8) and the spherical machining of the end face: face, after the stop, the tool (9) away from the sacrificial workpiece (8) · the image picker (6) to grab the sacrificial workpiece (8) The machining end and the transfer wheel to the control device (7), the sacrificial workpiece is judged by the control assembly image analysis (8) The machining end knife-bucking ^ There is an error target part (80U 仫 - the dog's starting part, that is, the belly button, As shown in the fifth figure); Workpiece (8) machining end face | ep Λ,. No error target area (8〇) sleep = beam cutter (9) height adjustment operation; when it is judged that the sacrificial workpiece (8) plus two sides have error target parts (80 When performing the following steps: the image capture device (6) captures the image of the misplaced part of the end face by the image capture device (6) and transmits it to the control device;
由控制裝置依據取得的影德八k L R “象分析言十算㈣差目標部位 201024005 (8〇)(犬起部）尺寸的量測值(D)，於本實施例 標部位_尺寸„突起部之㈣_值；例中，誤差目 由控制裝置（7)以内建處理程式依據誤 的量測值回饋而進行刀具（9)高度調整；q 部位尺寸 於刀具(9)高度調整後，重回加工該犧牲 =與犧牲工件(8)端面影像以及判斷犧牲工件(8面)加 ^面有無誤差目標部位，直至判斷犧牲工件⑻加工端面 …誤差目標部位時，結束刀具（9)高度調校作業。 前述之車削校刀方法中，於此擷取與傳輸加工端面影 像步驟前，更可進-步包含影像擷取器（6)對焦該犧牲工件 (8)之加工端面之步驟，係改變該影像擷取器（6>與犧牲工 工 件（8)的相對位置，使該影像擷取器（6)清晰地對焦犧牲 件（8)之加 工端面0 刖述之車削校刀方法中，於擷取與傳輸誤差目標部位 (8〇)影像步驟前，更包含影像摘取器（6)對焦該犧牲工件⑻ 之誤差目標部位（80)之步驟，係改變該影像擷取器（6)與犧 牲工件（8)的相對位置，使該影像擷取器（6)清晰地對焦犧 牲工件（8)之誤差目標部位。 本發明利用前述之加工機具以及校刀方法設計，也可 應用於工件表面微結構狀況及結構間距的量測等用途，並 在無須拆下工件的狀態下，於機上即可直接確認工件之加 工是否符合原設計；另一方面，尚可應用於大深度微結構 工件加工作業，於換刀的過程中，也可透過機上直接量測 調校之技術手段，協助刀具更換後，能使刀具快速對位， 進而減少微結構工件加工錯位的情形。如第四圖所示，本 201024005 發明亦可應用於成形有内凹曲折加工面之工件（A)，於換刀 時’刀具（B)於加該曲折加工面之對準用途。 據上所述，本發明所設計之機上具有非接觸式量測儀 器之車削校刀方法及加工機具，確可為超精密加工作業提 供了項叹備成本低，且能快速而高精密度地調校刀具於 正確位置之校刀方式及加工機具，是故，本發明確為一項 極具產業利用價值之實用發明。 【圖式簡單說明】 第一圖係本發明加工機具之一較佳實施例之立體示意 圖。 第二圖係本發明加工機具較佳實施.例之實施狀態參考 圖。 第三圖係本發明車削校刀方法之實施流程圖。 第四圖係本發明亦可應用於刀具與曲折凹面的對位實 施例圖。 第五圖係犧牲工件加工存在有誤差目標部位之平面示 意圖。 第六圖A〜C係習用加工機具於刀具位於不同高度位 置處，令工件端部產生不同加工面之平面示意圖。 【主要元件符號說明】 (1)機台 （10)除振裝置 ου基座 (20)主軸旋轉驅動組件 (2)主軸 (21)工件固定器 11 201024005 (3)刀具載台 (30)旋轉驅動組件 (4)刀座 (5)位置驅動裝置 (50) X軸向位移驅動組件 (501)X軸向移動台 (51) Y轴向位移驅動組件 (511)Υ軸向移動台 (52) Ζ轴向位移驅動組件 參 (521)Ζ軸向移動台 (6) 影像擷取器 (7) 控制裝置 (70)顯示器 (8) 犧牲工件 (9) 刀具 (8a)工件 (Α)工件 (D)量測值 ⑻工件 ® (b)突起部（肚臍眼） (C)刀具 (B)刀具 12According to the measured value (D) of the size of the target position 201024005 (8〇) (dog-up part) of the target image calculated by the control device, in the present embodiment, the target portion _ size „protrusion (4) _ value; in the example, the error device is controlled by the control device (7) with the built-in processing program based on the erroneous measurement value feedback; the q part size is adjusted after the height of the tool (9), Back to the machining of the sacrificial = the sacrificial workpiece (8) end face image and the sacrificial workpiece (8 faces) plus the surface of the error surface, until the sacrificial workpiece (8) machining end face ... error target part, the end of the tool (9) height adjustment operation. In the above-mentioned turning tool cutting method, before the step of capturing and transmitting the end face image, the step of including the image capturing device (6) focusing on the processing end face of the sacrificial workpiece (8) may be further performed, and the image is changed. The relative position of the picker (6> and the victim workpiece (8) is such that the image picker (6) clearly focuses on the machining end face of the sacrificial member (8). And the step of transmitting the error target portion (8〇) image step, further comprising the step of the image picker (6) focusing on the error target portion (80) of the sacrificial workpiece (8), changing the image picker (6) and the sacrificial workpiece The relative position of (8) enables the image picker (6) to clearly focus on the error target portion of the sacrificial workpiece (8). The present invention utilizes the aforementioned processing tool and the tool setting method, and can also be applied to the surface microstructure of the workpiece. For the measurement of the condition and the structure spacing, and in the state without removing the workpiece, it is possible to directly confirm whether the machining of the workpiece conforms to the original design on the machine; on the other hand, it can be applied to the processing of large-depth microstructured workpieces. In the change of the knife In the process, the technical means of direct measurement and adjustment can be directly assisted by the machine to assist the tool to be quickly repositioned after the tool is replaced, thereby reducing the misalignment of the microstructured workpiece. As shown in the fourth figure, the invention of 201024005 is also It can be applied to a workpiece (A) formed with a concave meandering surface, and the tool (B) is used for the alignment of the tortuous working surface during the tool change. According to the above, the machine designed by the present invention has a non- The contact cutting method and processing tool of the contact measuring instrument can provide a low sighing cost for the ultra-precision machining operation, and can quickly and accurately adjust the cutting tool and the processing tool in the correct position. Therefore, the present invention is indeed a practical invention with great industrial utilization value. [Brief Description] The first drawing is a perspective view of a preferred embodiment of the processing tool of the present invention. The second drawing is the processing of the present invention. The third embodiment is a flow chart of the implementation of the turning tool setting method of the present invention. The fourth figure is also applicable to the alignment example of the tool and the meandering concave surface. The fifth figure is a schematic diagram of the plane of the workpiece with the error in the workpiece machining. The sixth figure A~C is a schematic diagram of the machining tool at different height positions, so that the workpiece end produces different machining planes. DESCRIPTION OF SYMBOLS (1) Machine table (10) Vibration elimination device ου Base (20) Spindle rotation drive assembly (2) Spindle (21) Workpiece holder 11 201024005 (3) Tool stage (30) Rotary drive unit (4) Tool holder (5) position drive unit (50) X-axis displacement drive assembly (501) X-axis movement table (51) Y-axis displacement drive assembly (511) Υ Axial movement table (52) Ζ Axial displacement Drive component reference (521) Ζ axial movement table (6) image capture device (7) control device (70) display (8) sacrificial workpiece (9) tool (8a) workpiece (Α) workpiece (D) measurement (8) Workpiece® (b) Projection (belly eye) (C) Tool (B) Tool 12