201017354 九、發明說明： 【發明所屬之技術領域】 之量測裴置有關，尤指一 正裝置及其對正方法。 種 本發明係與線性運動轴線 雷射光線與線性運動軸線之_ 【先前技術】 按，電腦數值控制工具機或 ❸ 組裝後，會依-定檢驗標準及程序，對各袖運動 精度檢驗，例如床台之垂直度及單—線性運 ^ 差項等4為增進各線性運動控制轴的定位精度，= -雷射干涉儀進行誤差量測，且量 得幾何誤差項，並將其輪入控制器中即可進=析= 性能之CNC控制器中’更建立有完整之機器幾何誤： 型，對部份或全部之靜_何誤差及熱_誤差，進^ 差補正。 仃誤 然而，在應用雷射干涉儀進行各式幾何誤差的 程中，需先將雷射光軸線與線性運動轴的軸線校正對· 始能進行線性運動軸㈣何誤差量測，惟，驗運動 軸線係為虛擬的空間直線，因此於校正對齊雷射光= 線性運動祕時之難度較高，而具有*㈣正之缺點。 而目前一般使用者的校正程序如下步驟： (1)先將-雷射頭架於可上下左右平移及沿—轉轴上下 左右旋轉調整的三角架上，且雷射頭係可射出一红 5 201017354 色可見之雷射光。 (2) 於線性運動床台或主軸上架設一反射鏡組，以可反 射雷射光至雷射頭之雷射光接收孔中。 (3) 接著驅動線性運動床台運動該線性軸全運動行程， 測試線性運動軸線與雷射光轴線是否在同一軸線上 ，並令所有運動行程中，雷射光係皆可有效反射至 雷射頭之雷射光接收孔中。 參 （4)若雷射光無法有效反射至雷射頭之雷射光接收孔中 ，則調整三角架之位置以改變雷射光轴線。 (5) 調整後，重覆（3)、（4)步驟直到線性運動軸全 行程轴線與雷射光軸線在同一轴線上。 (6) 確認線性運動轴全行程轴線與雷射光轴線在同一轴 線上後，方得進行雷射干涉儀的幾何豸差量測。 上述的（3 )、（ 4 )步称調整方式是用試誤法重複進 _行的’因此將會導致校正時間過長，且若雷射光需要經過 多次折射再與線性運動轴軸線對正時，則使用者就必需有 相當純熟的校正技術與經驗方能完成上述工作。 故，上述習用雷射光軸線與線性運動軸線間的校正對 齊方法，不僅其校正時間過長且校正難度較高，因此如何 ^ 一種具㈣便校正程序之對正裝置及其量測方法 為本發明之所欲解決之重點。 201017354 因而，本發明之解決重點即在於提供一種對正裝置及 其相應之對正方法，並透過此一裝置及相應的簡便校正程 序，而可將虚擬的線性運動軸軸線具體實例化，接著雷射 光軸線即可直觀操作與此一具體實例的轴線對正，以快速 完成校正程序。 【發明内容】 本發明之主要目的，在於提供一種雷射光線與線性運 Ο 動轴線之對正裝置及其對正方法，係可將虛擬的線性運動 轴軸線具體實例化，接著雷射光軸線即可直觀操作與此一 具體實例的抽線對正，以快速完成校正程序。 為達前述之目的，本發明係提供一種雷射光線與線性 運動軸線之對正裝置，其係包含有： 一基座，該基座其中一侧邊係構成一參考平面，而可 與一運動轴線相對，並於該基座上設有一垂直樞轴； • 一 L型直角座，係具有第一段以及一與該第一段相互 垂直之第二段，且於該第一段上係設有一樞接孔，該L型 直角座係以其柩接孔而與該基座上之垂直樞軸相互柩接， 並於該基座與該L型直角座之第二段間設有一彈性體以頂 樓該L型直角座，而該第一段係具有呈相互平行之第一平 面與第二平面，且該第一平面係與該參考平面位在同一側 邊上’一分釐卡係設於該基座一侧上，並恰與該L型直角 座第一平面相互抵接’以可調整該L型直角座之位置； 201017354 一運動轴線實例器，係具有一與該[型直角座第二平 面高精度配合之貼合平面，且於該運動轴線實例器貼合平 面之相對側係依序間隔設置有一第一矩塊、一第二矩塊以 及-第三矩塊，而該運動轴線實例器係置於該基座上且 該運動軸線實例器係以其貼合平面而與該L型直角座之第 -平面相互抵接’並於該第二矩塊與該第三矩塊上係各設 -通孔，且該二通孔之抽線係在同_軸線上，而構成有一 中心軸、線’且該中心軸線亦與該貼合平面相互平行，並於 ❹該第-矩塊之平面上係設有―標定區，且⑽二通孔所構 成之中心軸線係相交於該標定區之交點上； 藉此’當直線行進具彳見性之雷射光通過該運動軸線 實例器上之二通孔，並投射在該標定區之交點上時，即表 示該雷射光與該中心轴線對正。 且利用上述對正裝置所進行之對正方法，係包含有以下 步驟： • a·將該對正裝置基座之參考平面與一線性運動轴線相 對，且以目視方式使該基座的參考平面與線性運動軸 粗略平行，並令該對正裝置係可沿該線性運動軸移 動； b ·取一量表鎖固於一固定座上，並將量表觸針定於該[ 型直角座第一平面上，而後令該對正裝置沿線性運動 軸移動’以使該量表得檢測該第一平面與該線性運動 軸間之差值’並讀取其數值； 8 201017354 c ·調整位於該基座上之分楚卡，以調整該L型直角座之 位置，其調整量與量表所測得的數值相同且方向相 同，此時，該線性運動軸轴線即會與該運動抽線實例 器上之二通孔所形成之中心軸線一致； d ·將一雷射干涉儀架設於一三角架平台上，並以目視方 式調整由該雷射干涉儀所射出的可見性雷射光穿過該 運動轴轴線實例器上的兩通孔，並在標定區的交點上 ❹ 產生光點，則此時，雷射光即與中心轴線及線性運動 轴轴線相互平行； e ·最後將該運動軸轴線實例器由該基座取出，再將一光 學反射鏡組置於該基座上並將其固定，即完成雷射干 涉儀於進行幾何誤差量測前的校正程序。 而本發明之上述及其他目的與優點，不難從下述所選 用實施例之詳細說明與附圖中，獲得深入了解。 當然，本發明在某些另件上’或另件之安排上容許有 所不同，但所選用之實施例’則於本說明書中，予以詳細 說明，並於附圖中展示其構造。 【實施方式】 首先請配合參閱第1圖〜第4圖，圖中所示者為本發 明所選用之第一實施例結構，此僅供說明之用，在專利申 請上並不受此種結構之限制。 本實施例係提供一種雷射光線與線性運動軸線之對正 裝置10，其主要係由一基座11、一 L型直角座21以 201017354 及一運動輛線實例器41所構成，其中^ 該基座1 1，概呈平板狀，而具有一底平面工2、一 頂平面1 3以及四個侧邊，且該基座其中一侧邊係構成一 參考平面14，而該基座1 1沿其頂平面1 3周緣相互彼 鄰之三侧邊上則依序設有一第一支承矩塊丄5、一第二支 承矩塊1 6以及一第三支承矩塊1 7，且該第三支承矩塊 17係與該參考平面14位在同一側邊上，而於該參考平 ❿ 面14之相對侧邊上設有一水平向螺孔1 8，該第二支承 矩塊16上則設有一垂直向螺孔161，並於該頂平面1 3一適當位置處設有一與該頂平面13呈相互垂直之垂直 樞軸1 9。 該L型直角座2 1，請搭配參閱第3圖，其係具有一 長度較長之第一段2 2以及一與該第一段2 2相互垂直且 長度較短之第二段2 3，且於該L型直角座2 1第一段2 Φ 2上係設有一樞接孔2 4，該L型直角座21係以其樞接 2 4孔而與該基座1 1上之垂直樞轴1 9相互樞接，且該 樞接孔2 4係與該垂直樞軸1 9高精度配合，而該第二段 2 3則與該基座1 1第一支承矩塊1 5相對，並於該第一 支承矩塊1 5與該L蜜直角座2 1之第二段2 3上係各設 有一呈相對設置之支承孔1 5 1、2 3 1，以可供裝設由 一支承柱2 5與一彈簧2 6所構成之彈性髏，且該彈簧2 6係套設於該支承柱2 5上’並藉以頂撐該L型直角座2 201017354 1之第二段2 3，而該第一段2 2係具有呈相互平行之第 一平面2 2 1與第二平面2 2 2，該第二段2 3則具有呈 相互平行之第三平面232與第四平面233，且該第一 平面2 2 1係與該參考平面14位在同一側邊上，且於該 第一平面2 2 1上係設有相隔預定間距之第一標線2 7以 及第二標線2 8，而該第二平面2 2 2係與該第四平面2 3 3相互垂直，並於其相交面上設有一圓柱孔2 9，另於 ❹ 該第一平面221上係設有一球體2 2 3，且該L型直角 座2 1第二段2 3之支承孔2 3 1轴心係恰好穿過該球體 2 2 3之中心點，一分釐卡3 1係設於該基座1 1之第三 支承矩塊17上，而該分釐卡3 1前端並恰可與該L型直 角座2 1第一平面22 1上之球體2 2 3相互抵接而呈單 點接觸；藉此，當轉動該分釐卡3 1，即可使該分釐卡3 1前端頂撐該L型直角座2 1上之球體2 2 3，並迫使該 Φ L型直角座2 1可以該垂直樞軸1 9為轴心而進行擺動校 正之動作。 該運動轴線實例器41，請搭配參閱第4圖，其係具 有一與該L型直角座21第二平面222高精度配合之貼 合平面41 1，且於該運動軸線實例器4 1貼合平面4 1 1之相對側係依序間隔設置有一第一矩塊4 2、一第二矩 塊4 3以及一第三矩塊4 4，而該運動轴線實例器4 1係 11 201017354 用以置入於該基座1 1之頂平面1 3上，並位於該L型直 角座21之第二平面222與第四平面233之間，且該 運動轴線實例器4 1係以其貼合平面4 1 1而與該L型直 角座2 1之第二平面2 2 2相互抵接，而該第一矩塊4 2 則與該L型直角座2 1之第四平面23 3相抵接，並因該 L型直角座2 1第二平面222與第四平面233之相交 面上所設之圓柱孔2 9，而可避免當該運動轴線實例器4 ❿ 1置入時發生實體干涉，並於該第二矩塊4 3與該第三矩 塊4 4上係各設有相同直徑之通孔4 3 1、4 4 1，且該 二通孔4 3 1、4 4 1之軸線係在同一轴線上，而構成有 一中心轴線4 5，且該中心軸線45係亦與該運動軸線實 例器4 1之貼合平面4 1 1相互平行，並於該第一矩塊4 2之平面上係設有一十字標定區421，且由該二通孔4 3 1、4 4 1所構成之中心轴線4 5係相交於該十字標定 ύ 區421之交點上；藉此，當直線行進具可見性之雷射光 通過該運動轴線實例器4 1上之二通孔4 3 1、4 4 1， 並投射在該十字標定區42 1之交點上時，即表示該雷射 光與該中心轴線4 5對正。 本發明藉由上述構件所組成之對正裝置，係利用該運 動轴線實例器4 1上之二通孔4 3 1、4 4 1所形成之中 心轴線45，而可將空間上虛擬的線性運動轴轴線具體實 12 201017354 例化，並作為#射練速對正之肖；意即，藉由本 對正裝置1〇’可使該L型直角座21上之第一平面之 1與空間上虛擬的線性運動軸轴線相互平行，如此〜2 2 該-通孔4 3 1、4 4 1所形成之中心軸線4 5即1 擬的線性運動帅線㈣實例化，且_㈣光於虛 直線行進的特性，當雷射光直接穿過該二通孔4 3 l中 4 1時’則此雷射光會在該運動軸線實㈣4 1第〜4 42之十字標定區4 2 1交點上產生光點，而可使技= 員輕易達成線性運動轴轴線與雷射光對正的程序。、人 接著請繼續搭配參閱第5圖〜第7圖所示，其係 運動軸為Χ軸且以床台運動來說明本發明對正裝置味 方法，其係包含有以下步驟： 士正 a ·首先如第2圖所示，係將本發明之對正裝置置於父軸 線性運動之床台（圖中未示）上，並以目視方式使該 基座11的參考平面14與X轴線性運動軸粗略平 行，接著將此該對正裝置1〇鎖固於χ轴線性運動床 台上。 b ·取一量表5 1鎖固於一固定座（軸）52上，並將量 表5 1觸針定於該L型直角座21第一平面221之 第一標線2 7上，而後令該床台沿X軸線性運動，以 使該量表5 1得檢測該第一標線2 7至該第二標線2 13 201017354 8間與該線性運動軸之平行度差值，並讀取其讀值， 如第5圖所示。 c ·調整位於該基座1 1第三支承矩塊1 7上之分釐卡3 1，其調整量與量表51的讀取值相同且方向相同， 則此時，該床台之X轴線性運動軸轴線即會與該運動 軸線實例器4 1上之二通孔4 3 1、4 4 1所形成之 中心軸線4 5 —致。 ❿ d·將一雷射干涉儀61架設於可上下左右平移及旋轉的 三角架平台6 2上，並以目視的方式調整由該雷射干 涉儀61所射出的可見性雷射光穿過該運動轴軸線實 例器4 1上的兩通孔4 3 1、4 4 1，並在十字標定 區4 2 1的交點上產生光點，如第6圖所示，則此時， 雷射光即與中心軸線4 5及X軸線性運動軸轴線相互 平行。 # e ·最後將該運動轴轴線實例器4 1由該基座1 1之頂平 面1 3取出，再將一光學反射鏡組7 1置於該基座1 1之頂平面1 3上並將其固定，如第7圖所示，即完 成雷射干涉儀61於進行幾何誤差量測前的校正程 序。 而若欲將本發明之對正裝置1〇運用至線性運動軸為 X轴或Y軸且為主轴運動時，如第8圖所示，僅需於該基 201017354 座1 1上之水平向螺?L1 8裝設一水平主軸夾持器8 i , 即可使該基座11得與工具機主轴相結合，並使該基座！ 1保持水平，其中該水平主軸夾持器8 ^以型而具有 相互垂直之矩塊，並於其中—矩塊中係n㈣基座i 1上之水平向螺孔1 8相互對應之鎖固螺釘8 2，而使該 水平主軸夾持器81得與該基座11相互結合，且該水平 主軸夾持器8 1另-矩塊上職有—水平主轴紐圓㈣ Φ 3 ’而可供工具機主轴夾持；藉此，如第8圖所示，當該 水平主軸夾持圓枉8 3與-沿X軸線性運動之主轴相接合 時’即可以本發明之對正裝置進行X減性運動之對 正程序。 接著請繼續參閱第9圖，當工具機主轴為Y轴線性運 動時’同樣係以該水平主軸夾持器8 i上之水平主抽 圓柱8 3來與沿Y軸線性運動之主軸相接合，並令該基座 11之參考平面14與γ轴線性運動轴相平行，即^ 發明運用至工具機主軸為γ軸線性運動時之對正程序。 而若欲將本發明之對正裝置運用至線性運動袖為冗轴 且為主軸運動時，如第i Q圖所示，係於該基座i i第二 矩塊16之垂直向螺孔161螺接有—垂直主轴爽持圓: 9 1，以可供2祕性運動之主軸崎，而使該基座工工 係可翻轉9 0度並鎖固於該Z向主轴上，此時僅需 15 201017354 軸下方裝設有一雷射光折射鏡組9 2，以使該雷射干涉儀 6 1所射出之水平雷射光向上折射9 0度，並穿過該運動 轴轴線實例器4 1上的兩通孔4 3 1、4 4 1，而同樣可 將本發明之運用至工具機主轴為Z轴線性運動時之對正程 序。 . 並由以上詳細說明後可知，本發明係利用運動轴線實 例器4 1上之二通孔4 3 1、4 4 1所形成之中心轴線4 5，而可將虛擬的線性運動軸轴線具體實例化，接著雷射 光軸線即可直觀操作與此一具體實例的轴線對正，此一對 正程序係相當簡單且快速，再者，本發明之對正裝置1 0 係可廣泛運用至水平向線性運動床台上，或以X轴、Y軸 、Z軸進行線性運動之工具機主轴上，因此深具進步性及 實用性，而符合專利法之規定，故本案發明人爰依法提出 發明專利申請。 16 201017354 【圖式簡單說明】 第1圖係本發明對正裝置之分解示意圖 第2圖係本發明對正裝置之組合示意圖 第3圖係本發明L型直角座之結構示意圖 第4圖係本發明運動轴線實例器之結構示意圖 第5圖係本發明之使用狀態示意圖，係用以顯示量表 於檢測L型直角座第一平面時之狀態 第6圖係本發明本發明之使用狀態示意圖，係用以顯 © 示當雷射干涉儀射出的可見性雷射光穿過運 動軸軸線實例器上的兩通孔，並在十字標定 區的交點上產生光點時之狀態 第7圖係本發明之使用狀態示意圖，係用以顯示將光 學反射鏡組置於基座上時之狀態 第8圖係本發明之使用狀態示意圖，係用以顯示當本 發明之對正裝置運用至線性運動轴為X轴且 為主軸運動時之狀態 • 第9圖本發明之使用狀態示意圖，係用以顯示當本發 明之對正裝置運用至線性運動轴為Y軸且為 主軸運動時之狀態 第1 0圖本發明之使用狀態示意圖，係用以顯示當本 發明之對正裝置運用至線性運動軸為Z轴且 為主軸運動時之狀態 17 201017354201017354 IX. Description of the invention: The technical field of the invention belongs to the measurement device, especially a positive device and its alignment method. The present invention relates to linear motion axis laser light and linear motion axis. [Prior Art] According to the computer numerical control machine tool or 组装 assembly, the inspection accuracy and test of each sleeve will be tested according to the test standard and procedure. For example, the verticality of the bed and the single-linear motion difference 4 are used to improve the positioning accuracy of each linear motion control axis, and the - laser interferometer performs error measurement, and the geometric error term is measured, and the wheel is rounded. In the controller, the CNC controller can be used to create a complete machine geometry error: type, some or all of the static _ error and thermal _ error, correction error correction. However, in the process of applying various kinds of geometric errors to the laser interferometer, it is necessary to first correct the axis of the laser light and the axis of the linear motion axis. The linear motion axis (4) and the error measurement can be performed. The axis is a virtual space line, so it is more difficult to correct the alignment of the laser light = linear motion secret time, and has the shortcoming of * (four). At present, the calibration procedure of the general user is as follows: (1) Firstly, the -head head frame is placed on a tripod that can be moved up and down and left and right along the axis of rotation, and the laser head can emit a red 5 201017354 The visible laser light. (2) A mirror group is placed on the linear motion bed or the main shaft to reflect the laser light to the laser light receiving hole of the laser head. (3) Then drive the linear motion bed to move the linear axis full motion stroke, test whether the linear motion axis and the laser light axis are on the same axis, and make the laser light system effectively reflect to the laser head in all motion strokes. The laser light is received in the hole. Reference (4) If the laser light cannot be effectively reflected into the laser light receiving hole of the laser head, adjust the position of the tripod to change the laser light axis. (5) After adjustment, repeat steps (3) and (4) until the linear motion axis full stroke axis is on the same axis as the laser light axis. (6) After confirming that the linear motion axis full-stroke axis and the laser light axis are on the same axis, the geometric interferometer of the laser interferometer can be measured. The above (3), (4) step adjustment method is repeated by the trial and error method. Therefore, the correction time is too long, and if the laser light needs to be refracted multiple times and then aligned with the axis of the linear motion axis At this time, the user must have quite sophisticated calibration techniques and experience to complete the above work. Therefore, the correction alignment method between the conventional laser light axis and the linear motion axis not only has a long correction time but also has a high correction difficulty, so how to correct the alignment device and the measurement method thereof are the inventions The focus of the solution. 201017354 Thus, the solution of the present invention is to provide a aligning device and its corresponding alignment method, and through the device and the corresponding simple calibration procedure, the virtual linear motion axis can be specifically instantiated, and then The axis of illumination can be intuitively aligned with the axis of this particular example to quickly complete the calibration procedure. SUMMARY OF THE INVENTION The main object of the present invention is to provide a aligning device for a laser beam and a linear motion axis and a method for aligning the same, which can specifically instantiate a virtual linear motion axis, followed by a laser optical axis. The alignment of this specific example can be intuitively operated to quickly complete the calibration procedure. For the purpose of the foregoing, the present invention provides a aligning device for a laser beam and a linear motion axis, comprising: a pedestal, wherein one side of the pedestal forms a reference plane and is movable The axis is opposite and a vertical pivot is disposed on the base; • an L-shaped right angle seat having a first segment and a second segment perpendicular to the first segment, and is attached to the first segment a pivoting hole is provided, the L-shaped right-angled seat is connected to the vertical pivot on the base by the splicing hole thereof, and an elastic is provided between the base and the second section of the L-shaped right-angle seat The body is in the top floor of the L-shaped right angle seat, and the first section has a first plane and a second plane that are parallel to each other, and the first plane is on the same side as the reference plane. Provided on one side of the base and abutting the first plane of the L-shaped right angle seat to adjust the position of the L-shaped right angle seat; 201017354 a motion axis example device having a type The second plane of the right angle seat is matched with the plane of high precision, and is attached to the example of the motion axis The opposite sides of the plane are sequentially disposed with a first moment block, a second moment block and a third moment block, and the motion axis instance is placed on the base and the motion axis instance is attached thereto Fitting a plane to abut the first plane of the L-shaped right angle seat and providing a through hole on the second moment block and the third moment block, and the drawing line of the two through holes is in the same a central axis, a line ', and the central axis is parallel to the bonding plane, and a "calibration area" is formed on the plane of the first moment block, and (10) a two-way hole is formed The central axis intersects at the intersection of the calibration zone; thereby [when a straight-line progressive laser light passes through a two-way aperture in the motion axis instance and is projected onto the intersection of the calibration zone, ie Indicates that the laser light is aligned with the central axis. And the alignment method performed by using the above-mentioned alignment device comprises the following steps: • a·relating the reference plane of the alignment device base with a linear motion axis, and visually making the reference of the base The plane is roughly parallel to the linear motion axis, and the alignment device can be moved along the linear motion axis; b · a gauge is locked on a fixed seat, and the gauge pin is set at the [right angle seat] On the first plane, the alignment device is then moved along the linear motion axis 'so that the gauge detects the difference between the first plane and the linear motion axis' and reads its value; 8 201017354 c · Adjustment is located The position on the base is adjusted to adjust the position of the L-shaped right angle seat, and the adjustment amount is the same as the value measured by the gauge and the direction is the same. At this time, the linear motion axis axis is extracted with the motion. The center axis formed by the two through holes on the line example device is uniform; d · a laser interferometer is mounted on a tripod platform, and the visible laser light emitted by the laser interferometer is visually adjusted Over the motion axis axis instance Two through holes, and at the intersection of the calibration area, a light spot is generated, at which time the laser light is parallel to the central axis and the linear motion axis axis; e. Finally, the motion axis axis instance is from the base The holder is taken out, and an optical mirror group is placed on the base and fixed, that is, the calibration procedure of the laser interferometer before geometric error measurement is completed. The above and other objects and advantages of the present invention will become more apparent from the detailed description of the embodiments illustrated herein. Of course, the present invention may be varied in some of the components or arrangements of the components, but the selected embodiments are described in detail in the present specification and their construction is shown in the drawings. [Embodiment] First, please refer to FIG. 1 to FIG. 4, which is the structure of the first embodiment selected for the present invention, which is for illustrative purposes only, and is not subject to such a structure in patent application. The limit. The embodiment provides a aligning device 10 for laser light and linear motion axis, which is mainly composed of a pedestal 11 and an L-shaped right angle seat 21, which are composed of 201017354 and a moving line example device 41. The base 1 1 is substantially flat, and has a bottom plane 2, a top plane 13 and four sides, and one side of the base forms a reference plane 14, and the base 1 1 A first supporting moment block 丄5, a second supporting moment block 16 and a third supporting moment block 177 are sequentially disposed on three sides adjacent to each other along the top surface of the top plane 1 3 and the third supporting moment block 173 The supporting moment block 17 is disposed on the same side of the reference plane 14 , and a horizontal screw hole 18 is disposed on the opposite side of the reference flat surface 14 , and the second supporting moment block 16 is provided with a The screw hole 161 is vertically oriented, and a vertical pivot 19 perpendicular to the top plane 13 is disposed at an appropriate position of the top plane 13. The L-shaped right angle seat 2 1, please refer to FIG. 3, which has a first section 2 2 having a longer length and a second section 2 3 which is perpendicular to the first section 2 2 and has a short length. And a pivot hole 24 is disposed on the first segment 2 Φ 2 of the L-shaped right angle seat 2 1 , and the L-shaped right angle seat 21 is pivotally connected to the vertical hole of the base 1 1 The shafts 1 9 are pivotally connected to each other, and the pivoting holes 24 are matched with the vertical pivots 19 with high precision, and the second segments 23 are opposite to the first supporting moments 15 of the base 1 1 , and The first supporting moment block 15 and the second section 23 of the L honey right angle seat 2 1 are respectively provided with a supporting hole 1 5 1 , 2 3 1 disposed oppositely for mounting by a support The column 25 is elastically formed by a spring 26, and the spring 26 is sleeved on the support column 25 and is supported by the second segment 2 3 of the L-shaped right angle seat 2 201017354 1 The first section 2 2 has a first plane 2 2 1 and a second plane 2 2 2 which are parallel to each other, and the second section 2 3 has a third plane 232 and a fourth plane 233 which are parallel to each other, and the The first plane 2 2 1 is on the same side as the reference plane 14 And the first plane 2 2 1 is provided with a first marking line 27 and a second marking line 8 8 separated by a predetermined interval, and the second plane 2 2 2 and the fourth plane 2 3 3 are mutually Vertically, a cylindrical hole 2 is formed on the intersecting surface thereof, and a spherical body 2 2 3 is disposed on the first plane 221, and the supporting hole 2 3 of the second segment 2 3 of the L-shaped right angle seat 2 1 The 1 axis center just passes through the center point of the sphere 2 2 3 , and a centimeter card 3 1 is disposed on the third support moment block 17 of the base 1 1 , and the front end of the centimeter card 3 1 is just The ball 2 2 3 on the first plane 22 1 of the L-shaped right angle seat 2 1 abuts against each other to form a single point contact; thereby, when the centring card 3 1 is rotated, the front end of the centimeter card 3 1 can be made The ball 2 2 3 on the L-shaped right angle seat 2 1 is supported, and the Φ L-shaped right angle seat 2 1 is forced to perform the oscillation correcting operation by the vertical pivot 1 9 being the axis. The motion axis example device 41, please refer to FIG. 4, which has a fitting plane 411 which is matched with the second plane 222 of the L-shaped right angle seat 21 with high precision, and is attached to the motion axis example device 4 1 The opposite side of the plane 4 1 1 is sequentially provided with a first moment block 4 2, a second moment block 43 and a third moment block 4 4, and the motion axis example device 4 1 is used for 11 201017354 So as to be placed on the top plane 13 of the base 1 1 and between the second plane 222 and the fourth plane 233 of the L-shaped right angle seat 21, and the motion axis example device 4 1 is attached thereto And the second plane 2 2 2 of the L-shaped right angle seat 2 1 abuts against the plane 4 1 1 , and the first moment block 4 2 abuts the fourth plane 23 3 of the L-shaped right angle seat 2 1 And because the cylindrical hole 2 9 provided on the intersection surface of the second plane 222 and the fourth plane 233 of the L-shaped right angle seat 2 1 can avoid physical interference when the motion axis example device 4 ❿ 1 is placed And the second rectangular block 43 and the third rectangular block 4 4 are respectively provided with through holes 4 3 1 , 4 4 1 of the same diameter and the axes of the two through holes 4 3 1 , 4 4 1 On the same axis, and A central axis 45 is formed, and the central axis 45 is also parallel to the conforming plane 4 1 1 of the moving axis example device 4 1 , and a cross calibration is arranged on the plane of the first rectangular block 42 a region 421, and a central axis 4 5 formed by the two through holes 4 3 1 , 4 4 1 intersects at an intersection of the cross calibration region 421; thereby, the linear light having visibility is passed through When the two through holes 4 3 1 , 4 4 1 on the moving axis example device 4 1 are projected on the intersection of the cross calibration area 42 1 , the laser light is aligned with the central axis 45 . The alignment device consisting of the above-mentioned components utilizes the central axis 45 formed by the two through holes 4 3 1 , 4 4 1 of the moving axis example device 4 1 to be spatially virtual The linear motion axis axis is actually 12, 201017354 is instantiated, and is used as the #射速速方向; that is, the first plane on the L-shaped right angle seat 21 can be made by the alignment device 1〇' The axes of the virtual linear motion axes are parallel to each other, such that the central axis 4 5 formed by the through holes 4 3 1 , 4 4 1 is instantiated, and the _ (four) light is instantiated. The characteristic of the imaginary straight line travel, when the laser light directly passes through the two through holes 4 3 l 4 1 'the laser light will be generated at the intersection of the moving axis (4) 4 1 to 4 42 cross calibration area 4 2 1 The light spot allows the technician to easily achieve a linear motion axis alignment with the laser light. Then, please continue to refer to the figures 5 to 7 as shown in Fig. 5, which is a method in which the motion axis is a Χ axis and the bed movement is used to illustrate the aligning method of the present invention, which includes the following steps: First, as shown in Fig. 2, the alignment device of the present invention is placed on a bed of parental linear motion (not shown), and the reference plane 14 and the X-axis of the susceptor 11 are visually made. The axes of motion are roughly parallel, and the alignment device 1〇 is then locked to the χ axial motion table. b. Take a gauge 5 1 and lock it on a fixing base (shaft) 52, and set the stylus 51 1 to the first marking 2 7 of the first plane 221 of the L-shaped right angle seat 21, and then Having the bed move along the X axis such that the gauge 51 detects the difference in parallel between the first reticle 27 and the second reticle 2 13 201017354 8 and the linear motion axis, and reads Take the reading as shown in Figure 5. c. adjusting the centimeter card 3 1 located on the third supporting moment block 17 of the base 1 1 , the adjustment amount is the same as the reading value of the gauge 51 and the direction is the same, then the X axis of the bed is at this time The linear axis of motion axis coincides with the central axis 4 5 formed by the two through holes 4 3 1 , 4 4 1 of the motion axis instance 4 1 . ❿ d· erecting a laser interferometer 61 on a tripod platform 62 that can be translated and rotated up and down, left and right, and visually adjusting the visible laser light emitted by the laser interferometer 61 through the movement The two through holes 4 3 1 , 4 4 1 on the shaft axis example device 4 1 generate a light spot at the intersection of the cross calibration area 4 2 1 , as shown in Fig. 6, at this time, the laser light is centered The axis 45 and the axis of the X-axis motion axis are parallel to each other. #e· Finally, the motion axis axis example device 4 1 is taken out from the top plane 13 of the base 1 1 , and an optical mirror group 7 1 is placed on the top plane 13 of the base 1 1 and Fix it, as shown in Fig. 7, to complete the calibration procedure of the laser interferometer 61 before performing the geometric error measurement. However, if the alignment device of the present invention is to be applied to the linear motion axis as the X-axis or the Y-axis and is the spindle motion, as shown in FIG. 8, only the horizontal snail on the base of the base 201017354 is required. ?L1 8 is equipped with a horizontal spindle holder 8 i , so that the base 11 can be combined with the machine tool spindle and the base can be made! 1 maintaining a level, wherein the horizontal spindle holder 8 has a rectangular block which is perpendicular to each other, and a locking screw corresponding to the horizontal screw holes 18 on the base n 1 of the n (four) base in the rectangular block 8 2, so that the horizontal spindle holder 81 is coupled with the base 11, and the horizontal spindle holder 8 1 has a horizontal-axis spindle (four) Φ 3 ' The main shaft is clamped; thereby, as shown in Fig. 8, when the horizontal main shaft grips the circular ring 8 3 and engages with the main shaft of the X-axis linear motion, the X-subtraction of the alignment device of the present invention can be performed. The alignment of the movement. Then, please refer to FIG. 9 again, when the machine tool main shaft is in the Y-axis linear motion, the same is performed by the horizontal main drawing cylinder 8 3 on the horizontal spindle holder 8 i and the main shaft moving along the Y-axis. And the reference plane 14 of the pedestal 11 is parallel to the gamma axis motion axis, that is, the invention applies to the alignment procedure when the machine tool spindle is γ-axis motion. If the alignment device of the present invention is to be applied to the linear motion sleeve as a redundant axis and is a spindle motion, as shown in the i-th Q, the vertical rectangular hole 161 of the second moment block 16 of the base ii is screwed. Connected with - vertical spindle cooling circle: 9 1, for the 2 secret movement of the spindle, so that the base engineering system can be flipped 90 degrees and locked on the Z-axis, only need 15 201017354 A laser light refractor set 9 2 is mounted under the shaft to refract the horizontal laser light emitted by the laser interferometer 61 upward by 90 degrees and pass through the motion axis axis instance 4 1 The two through holes 4 3 1 , 4 4 1 can also be applied to the alignment procedure when the machine tool spindle is in the Z-axis motion. As can be seen from the above detailed description, the present invention utilizes the central axis 4 5 formed by the two through holes 4 3 1 , 4 4 1 on the motion axis example device 4 to provide a virtual linear motion axis. The line is specifically instantiated, and then the laser light axis can be intuitively operated to align with the axis of the specific example. The pair of positive programs is relatively simple and fast. Furthermore, the alignment device of the present invention can be widely used. On the horizontal linear motion bed, or the X-axis, Y-axis, Z-axis linear motion of the machine tool spindle, so it is profound and practical, and in line with the provisions of the Patent Law, so the inventor of this case File an invention patent application. 16 201017354 [Simplified illustration of the drawings] Fig. 1 is a schematic exploded view of the alignment device of the present invention. Fig. 2 is a schematic view showing the combination of the alignment device of the present invention. Fig. 3 is a schematic view showing the structure of the L-shaped right angle seat of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 5 is a schematic view showing the state of use of the present invention, showing a state in which the gauge is used to detect the first plane of the L-shaped right-angled seat. FIG. 6 is a schematic view showing the state of use of the present invention. , is used to display the visible laser light emitted by the laser interferometer through the two through holes on the moving axis axis example device, and the state when the light spot is generated at the intersection of the cross calibration area, the seventh picture is BRIEF DESCRIPTION OF THE DRAWINGS The state of use of the invention is used to show the state when the optical mirror group is placed on the pedestal. FIG. 8 is a schematic view showing the state of use of the present invention for displaying the alignment device of the present invention applied to the linear motion axis. The state of the X-axis and the state of the spindle movement. FIG. 9 is a schematic view showing the state of use of the present invention for displaying when the alignment device of the present invention is applied to the linear motion axis as the Y-axis and is the spindle motion. The first state using the state of FIG 10 a schematic view of the present invention, when the system of the present invention for displaying a state of the timing means to use the linear motion axis and the Z-axis motion of the spindle 17 201 017 354
【主要元件符號說明】 對正裝置10 底平面1 2 參考平面14 支承孔1 5 1、2 3 1 垂直向螺孔161 水平向螺孔18 L型直角座2 1 第一平面2 2 1 球體2 2 3 第三平面2 3 2 極接孔2 4 彈簧2 6 第二標線2 8 分釐卡3 1 貼合平面41 1 十字標定區4 2 1 第三矩塊4 4 中心軸線4 5 固定座5 2 三角架平台6 2 基座1 1 頂平面1 3 第一支承矩塊15 第二支承矩塊16 第三支承矩塊17 垂直樞軸1 9 第一段2 2 第二平面2 2 2 第二段2 3 第四平面2 3 3 支承柱2 5 第一標線2 7 圓柱孔2 9 運動轴線實例器4 1 第一矩塊4 2 第二矩塊4 3 通孔 4 3 1、4 4 1 量表5 1 雷射干涉儀61 光學反射鏡組71 18 201017354[Main component symbol description] Alignment device 10 Bottom plane 1 2 Reference plane 14 Support hole 1 5 1、 2 3 1 Vertical screw hole 161 Horizontal screw hole 18 L-shaped right angle seat 2 1 First plane 2 2 1 Sphere 2 2 3 3rd plane 2 3 2 pole hole 2 4 spring 2 6 second marking 2 8 centimeter card 3 1 fitting plane 41 1 cross calibration zone 4 2 1 third moment block 4 4 central axis 4 5 fixing seat 5 2 Tripod platform 6 2 Base 1 1 Top plane 1 3 First support moment 15 Second support moment 16 Third support moment 17 Vertical pivot 1 9 First paragraph 2 2 Second plane 2 2 2 Two segments 2 3 Fourth plane 2 3 3 Support column 2 5 First marking 2 7 Cylindrical hole 2 9 Motion axis example device 4 1 First moment block 4 2 Second moment block 4 3 Through hole 4 3 1 , 4 4 1 Scale 5 1 Laser Interferometer 61 Optical Mirror Set 71 18 201017354
水平主轴夾持器81 鎖固螺釘82 水平主轴夾持圓柱8 3 垂直主軸夾持圓柱9 1 雷射光折射鏡組9 2 19Horizontal spindle holder 81 Locking screw 82 Horizontal spindle clamping cylinder 8 3 Vertical spindle clamping cylinder 9 1 Laser light refractor set 9 2 19