201000847 九、發明說明： 【發明所屬之技術領域】 本發明，係關於以受光器接收由投光器照射的單色光， 檢測遮蔽該單色光之遮蔽物之邊緣位置之光學式邊緣檢測 裝置及該邊緣檢測裝置所使用之線感測器。 【先前技術】 圖1 〇表示揭示於專利文獻1的習知之邊緣檢測裝置的 構成圖。在圖10中，該邊緣檢測裝置，具備線感測器1〇〇、 投光器1 0 1以及邊緣檢測部i 02。線感測器1 〇〇，在一定 方向上以既定間隔排列有複數個受光元件（像素），接收 由投光Is 10 1照射的單色平行光。投光器1 〇 i ’以與線感 測器1 00的受光面對向配置，具備由雷射二極體（LD)構 成的光源101a、導引單色光（雷射光）的光纖i〇lb、投光 透鏡101c以及控制LD的驅動ic 101d。又，在圖1〇中， 投光部1、受光部2等被收納在筐體内。 在投光器101，由光源l〇la產生的單色光（雷射光）， " 通過光纖101b而被導至投光透鏡l〇lc，由投光透鏡101c 轉換成單色平行光之後，照射到線感測器丨〇〇上。當遮蔽 物〗04通過在投光器丨〇丨與線感測器丨〇〇的受光面之間所 形成的測量空間103時’朝向線感測器丨〇〇照射的單色平 行光被遮蔽。邊緣檢測部1〇2，係由微電腦構成，對線感 測器100的輸出進行解析，對在測量空間丨〇3遮蔽單色平 打光之遮蔽物104在受光元件的排列方向上之邊緣位置進 行檢測。 5 201000847 藉邊緣檢測部1 02進行的遮蔽物1 04之邊緣位置的檢 測，係藉由對在測量空間103因遮蔽物104遮蔽單色平行 光的一部分而產生的、線感測器1 〇〇的全部受光量的變化 或起因於產生在遮蔽物104之邊緣部分的菲涅耳（Fresnel) 繞射的受光圖案（受光量的分布）進行解析來進行。如此， 習知之邊緣檢測裝置，根據線感測器丨〇〇的受光面上的光 强度分布來高精度地檢測遮蔽物1 〇4之邊緣位置。（例如， 参照專利文獻1 ) [專利文獻1]曰本特開2004-177335號公報 【發明内容】 習知之邊緣檢測裝置’由於如上述構成，所以根據線 感測器1〇〇的受光元件上未被照射單色平行光的寬度1〇3a 可以檢測遮蔽物104的位置。但是，有時因線感測器的受 光元件或投光透鏡在製造時的特性偏差等，而在每件製品 上產生雷射光的發光或受光的量、進而在所放射雷射的干 涉圖案會產生偏差。在此，所謂干涉圖案，係指複數個雷 射光在筐體内散射、反射，疊合在一起而產生的圖案。另 外’由於光源101a所輸出的雷射光的發光波長會因周圍温 度而不同，所以，干涉圖案會因周圍温度而變化，被照射 到線感測器100上的單色平行光的圖案產生變化。此外， 由於控制雷射光的驅動ICl〇〇d亦具有温度特性，所以光 源的輸出功因周自溫度而變化。因》這些製造偏差 與周圍温度所引起的各元件特性的變動，纟受光元件輸出 的文光訊號產生變動，從而妨礙檢測精度的提高。特别是， 6 201000847 由於電源投入後經過幾十分鐘，驅動IC 1 OOd因表面温度 上升而發熱’因此導致投光器内部的温度上升，所以從邊 緣檢測裝置的電源投入開始到能穩定而正確地進行測量的 程度需要長時間。 其次’為了保護受光元件避免機械損傷，—般線感測 器100採取與受光元件非接觸地配置透明的保護玻璃的構 k。本來為了使該保護玻璃不對受光特性產生影響，較佳 使用透月度非常咼的玻璃，但是為了降低線感測器1 0 0的 成本，有時採用透明度低的便宜玻璃。因此，存在入射到 保π玻璃上的雷射光發生漫反射與新的干涉，而有使各受 光元件的輸出訊號產生變動的問題。 圖11係表示在圖10中於測量空間1〇3***玻璃等透 明的遮蔽物104時線感測器100的各受光元件的受光量。 如圖11- ( 1 )所示，當對線感測器1〇〇照射雷射光時，受 光兀件則輸出對應於該受光量的訊號。又，作為投光透鏡 101。與光源、i〇la之理想特性’在受光側有時會現以線感 測器100的正中央為中心而呈現弧狀的受光特性。在此， (1 )中，A部分表示有玻璃之邊緣部分。因菲淫 耳％射，在邊緣部分比玻璃表面部分的受光量衰減加大， 所以邊緣檢測部102根據該衰減的情况來判斷為邊緣部 分。 另方面，圖11_(2)係表示因周圍溫度發生變化， 使得雷射光波長及輸出功率產生變化，對線感測器1〇〇的 照射狀態產生變化，受光元件的受光量產生變化。在此， 7 201000847 2圖1K(1)同樣，***玻璃作為遮蔽物1〇4時，/ 刀發生因破璃邊緣所引起的受光量衰減，但有時八部 由空間部分的B部分’亦發生因溫度變化或雷射為自 案的變動所引起的受光量㈣ 干涉圖 部〜定受光量的衰減為基準閾1:行 =斷為在作為自由空間部分的B部分亦存在會 =免這種誤判的方法，而提出根據不存在檢二時 職=最小值來設定既定大小的基準值，並僅將檢測到 :土值以下的受光量的情况判斷為邊緣部分的方法。曰 疋，因肖圍温度持續變〖，受光量亦隨之產生變化1、 在周圍溫度變動的環境下不能採用。另外，另—方面，Μ 有具備利用温度感測器等測量周圍温度，隨著周圍溫声2 變化來可變地設定基準值的功能之方法，但是需要非；: 雜的控制。因此’在實際上存在需要使光源周邊部的周圍201000847 IX. The invention relates to an optical edge detecting device for detecting an edge position of a mask for shielding a monochromatic light by receiving a monochromatic light irradiated by a light projector by a light receiver, and A line sensor used by the edge detecting device. [Prior Art] Fig. 1 is a view showing the configuration of a conventional edge detecting device disclosed in Patent Document 1. In FIG. 10, the edge detecting device includes a line sensor 1A, a light projector 1O1, and an edge detecting unit i02. The line sensor 1 〇〇 has a plurality of light receiving elements (pixels) arranged at a predetermined interval in a certain direction, and receives monochromatic parallel light irradiated by the light projecting Is 10 1 . The light projector 1 〇i' is disposed facing the light receiving surface of the line sensor 100, and includes a light source 101a composed of a laser diode (LD) and an optical fiber i〇lb for guiding monochromatic light (laser light). The light projecting lens 101c and the driving ic 101d of the control LD. Moreover, in FIG. 1A, the light projecting unit 1, the light receiving unit 2, and the like are housed in the casing. In the light projector 101, monochromatic light (laser light) generated by the light source 101a is guided to the light projecting lens llc through the optical fiber 101b, converted into monochromatic parallel light by the light projecting lens 101c, and then irradiated to The line sensor is on the raft. When the mask 04 passes through the measurement space 103 formed between the light projector 丨〇丨 and the light receiving surface of the line sensor ’, the monochrome parallel light that is irradiated toward the line sensor 被 is shielded. The edge detecting unit 1〇2 is constituted by a microcomputer, and analyzes the output of the line sensor 100, and performs the edge position of the shield 104 that shields the monochrome flat light in the measurement space 丨〇3 in the arrangement direction of the light receiving elements. Detection. 5 201000847 The detection of the edge position of the shield 104 by the edge detecting unit 102 is performed by shielding a part of the monochromatic parallel light by the shield 104 in the measurement space 103. The change in the amount of received light or the generation of the Fresnel-receiving light-receiving pattern (distribution of the amount of received light) generated at the edge portion of the shield 104 is performed. Thus, the conventional edge detecting device detects the edge position of the shield 1 〇 4 with high precision based on the light intensity distribution on the light receiving surface of the line sensor 丨〇〇. (Patent Document 1) Japanese Laid-Open Patent Publication No. 2004-177335. SUMMARY OF THE INVENTION The conventional edge detecting device is configured as described above, and therefore is based on the light receiving element of the line sensor 1 The position of the mask 104 can be detected by the width 1〇3a of the unilluminated monochromatic parallel light. However, depending on the characteristics of the light-receiving element of the line sensor or the light-emitting lens at the time of manufacture, the amount of light emitted or received by the laser light may be generated on each product, and the interference pattern of the emitted laser may be A deviation occurs. Here, the interference pattern refers to a pattern in which a plurality of pieces of laser light are scattered and reflected in a casing and are superposed. Further, since the light-emitting wavelength of the laser light output from the light source 101a varies depending on the ambient temperature, the interference pattern changes due to the ambient temperature, and the pattern of the monochromatic parallel light irradiated onto the line sensor 100 changes. Further, since the driving IC1〇〇d for controlling the laser light also has a temperature characteristic, the output power of the light source changes due to the temperature from the periphery. Because of these manufacturing variations and fluctuations in the characteristics of the respective components caused by the ambient temperature, the illuminating signal output from the light receiving element fluctuates, thereby impeding the improvement of the detection accuracy. In particular, 6 201000847 After a few tens of minutes have elapsed after the power is turned on, the driver IC 100 d generates heat due to an increase in the surface temperature, thus causing the temperature inside the emitter to rise, so that the power can be stably and accurately measured from the power supply of the edge detecting device. The degree will take a long time. Next, in order to protect the light-receiving element from mechanical damage, the line sensor 100 adopts a configuration k in which a transparent protective glass is disposed in contact with the light-receiving element. Originally, in order to prevent the protective glass from affecting the light-receiving characteristics, it is preferable to use a glass having a very high transparency. However, in order to reduce the cost of the line sensor 100, a cheap glass having a low transparency may be used. Therefore, there is a problem that the laser light incident on the π-glass is diffusely reflected and newly interfered, and the output signals of the respective light-receiving elements are changed. Fig. 11 is a view showing the amount of light received by each of the light receiving elements of the line sensor 100 when the transparent mask 104 such as glass is inserted into the measurement space 1〇3 in Fig. 10 . As shown in Fig. 11-(1), when the line sensor 1 is irradiated with laser light, the receiving element outputs a signal corresponding to the amount of received light. Further, it is used as the light projecting lens 101. The ideal characteristic of the light source and the i 〇la may be an arc-shaped light receiving characteristic centering on the center of the line sensor 100 on the light receiving side. Here, in (1), the portion A indicates the edge portion of the glass. Since the amount of light received by the edge portion is larger than that of the glass surface portion due to the fluorescein shot, the edge detecting portion 102 determines the edge portion based on the attenuation. On the other hand, Fig. 11 (2) shows that the laser light wavelength and the output power change due to changes in the ambient temperature, and the irradiation state of the line sensor 1 变化 changes, and the amount of light received by the light receiving element changes. Here, 7 201000847 2 Fig. 1K (1) Similarly, when the glass is inserted as the shield 1〇4, the amount of light received by the edge of the glass is attenuated, but sometimes the portion B of the space portion is also The amount of light received due to temperature changes or laser fluctuations (4) The attenuation of the interference pattern to the received light amount is the reference threshold 1: Line = broken is also present in the B portion as the free space part = Free In the method of erroneously judging, it is proposed to set a reference value of a predetermined size based on the absence of the second time value = minimum value, and to determine only the case where the amount of received light below the soil value is detected as the edge portion.曰 疋, because the temperature of the Xiaowei continues to change, the amount of received light changes accordingly. 1. It cannot be used in an environment where the ambient temperature changes. On the other hand, there is a method of measuring the ambient temperature by a temperature sensor or the like, and variably setting the reference value as the ambient temperature 2 changes, but it is necessary to control the noise. Therefore, there is actually a need to surround the periphery of the light source.
温度穩定，而不得不採用昂貴且大規模的系統構築 題。 W 如此，習知之邊緣檢測裝置，因雷射光波長與輸出功 率因周圍温度而變化，各受光元件輸出的受光訊號不同， 而存在對裝置的性能產生不良影響的問題。另外，還存在 因線感測器的受光元件或投光透鏡在製造時的特性偏差 等’每件製品的雷射光發光或受光量產生偏差，對裝置的 性月b產生不良影響的問題。此外，在便宜的線感測器，在 入射到線感測器的保護玻璃的雷射光發生漫反射與新的干 涉’使各受光元件輸出的受光訊號所產生變動的程度增 8 201000847 大所以在進行尚精度之邊緣檢測時無法使用便宜的線 感測器。 本發明是為解决如上述問題而提出者，其目的在於提 供一種邊緣檢測裝置，可減小測量空間内的周圍温度變動 或構成之各零件的製造偏差之影響，能容易避免遮蔽物之 邊緣部分的誤檢測。 本發明之邊緣檢測裝置’具備：投光部，由產生單色 光的雷射光源、將來自該雷射光源的單色光轉換為單色平 行光的投光透鏡、以及放射該平行單色光的投光窗所構 成；受光部’由與該投光窗對向設置的受光窗、將從該受 光窗射入的該單色平行光在既定範圍内進行擴散的光擴散 元件、以及線感測器所構成，該線感測器係在一方向上以 既定間距將複數個用於接收該擴散單色光的受光元件排列 而成；檢測部，對該線感測器的受光量分布進行解析，檢 測存在於該單色平行光的光路上之遮蔽物在該受光元件的 排列方向上之邊緣位置。 此外’在本發明之邊緣檢測裝置，該光擴散元件係視 該遮蔽物的種類而變化的該遮蔽物的透射率來選擇濁产而 使用。 在本發明之邊緣檢測裝置，較佳係該光擴散元件的蜀 度為50%以下。 在本發明之邊緣檢測裝置，在該線感測器的受光元件 上具備保護用玻璃’該光擴散元件黏接於該保護用玻璃 上。 9 201000847 根據本發明之邊緣檢測裝置，由於具備：投光部由產 生單色光的雷射光源、將來自該雷射光源的單色光轉換爲 單色平行光的投光透鏡、放射該平行單色光的投光窗所構 成；受光部，由與該投光窗對向設置的受光窗、將從該受 光窗射入的該單色平行光在既定範圍内擴散的光擴散元 件線感測器所構成’该線感測器係在一方向上以既定間 距將複數個用於接收該擴散單色光的受光元件排列而成； 以及檢測部，對該線感測器的受光量分布進行解析，檢測 存在於該單色平行光的光路上之遮蔽物在該受光元件的排 列方向上之邊緣位置，所以具有下述效果：即使在雷射光 波長或輸出功率因周圍溫度的變化而變化的情況下，來自 受光元件的輸出訊號亦不會產生急劇變化，另外，即使在 線感測益的雙光儿件或投光透鏡在製造時存在特性偏差的 情：下1能對邊緣檢測部供應穩定的輸出訊號，能防止 將沒有遮蔽物的空間部分誤檢測爲邊緣部分的情況。 此外，根據本發明，還 物的透射率來選擇該光擴散 來自受光元件的輸出訊號不 遮蔽物的種類改變，亦能對 號0 有如下效果··由於配合該遮蔽 元件的濁度（模糊度），所以 會產生偏差與急劇變化，即使 邊緣檢測部供應穩定的輸出訊 此外’根據本發明，右士π π <田 的、，声机 下效果：藉由將光擴散元件 的濁度《又置為50%以下，來自 ..„ 尤件的輸出訊號不會產 生偏差，、‘议劇變化，能對邊续仏⑴* 垆廿… 测部供應穩定的輸出訊 儿’亚且還以確地檢測玻璃等透明體之邊緣部分。 10 201000847 此外，根據本發明，有如下效果：藉由在線感測器元 件的受光元件上具備保護用玻璃，使光擴散元件黏接於該 保護用玻璃，能去除因保護用破璃所引起的雷射光漫反射 或新的干涉圖案的㈣，能使用便宜的線感測器。 【實施方式】 圖1係纟示本發明之實施形態之邊緣檢測裝置的構成 圖。該邊緣檢測裝置，具備投光部i、受光部2以及邊緣 檢測部3。投光部i，係與受光部2之受光窗23的受光面 對向配置’並具備由雷射二極體（ld )構成的光源、 制光源1 0的驅動Ic丨i、投光透鏡12以及投光窗1 3。 又光透鏡12透過投光窗i 3，對受光部2的線感測器2 i的 央P放射由光源1〇產生的單色光。又，在此所謂的單 t光係私具有使用工業生產的雷射二極體與光纖所能獲 寸私度的波長分布特性的光。又’投光窗i 3為透明玻璃。 _又光。卩2具備受光窗23、光擴散元件22以及線感測 、卜 /線感'則器21具有在一定方向上以既定間距排列的 複數個又光疋件（像素），接收由投光部1照射的單色光。 又光Hi 23因具有與光源1〇的單色光波長匹配的濾 波器功能，你： 所以’此緩和干涉光對線感測器21的影響。The temperature is stable and it has to be expensive and large-scale system construction. In this case, the conventional edge detecting device has a problem that the wavelength of the laser light and the output power vary depending on the ambient temperature, and the light receiving signals output from the respective light receiving elements are different, which adversely affects the performance of the device. In addition, there is a problem that the light-receiving element of the line sensor or the characteristic deviation of the light-emitting lens at the time of manufacture, etc., varies depending on the amount of laser light emitted or the amount of light received by each of the products, which adversely affects the performance month b of the device. In addition, in the inexpensive line sensor, the diffuse reflection and the new interference of the laser light incident on the protective glass of the line sensor increase the degree of variation of the received light signal output from each light receiving element by 8 201000847, so Cheap line sensors cannot be used for edge detection with precision. The present invention has been made to solve the above problems, and an object thereof is to provide an edge detecting device which can reduce the influence of ambient temperature variation in a measurement space or manufacturing variations of constituent components, and can easily avoid edge portions of a shield. Misdetection. The edge detecting device of the present invention includes: a light projecting portion, a laser light source that generates monochromatic light, a light projecting lens that converts monochromatic light from the laser light source into monochromatic parallel light, and emits the parallel monochrome a light projecting window of light; a light-receiving element that is diffused in a predetermined range by a light-receiving window that is disposed opposite the light-projecting window, and that emits the monochromatic parallel light that is incident from the light-receiving window a line sensor is configured by arranging a plurality of light-receiving elements for receiving the diffused monochromatic light at a predetermined interval in a direction; and detecting a portion, the light-receiving amount distribution of the line sensor is performed The analysis detects the edge position of the shield existing on the optical path of the monochromatic parallel light in the direction in which the light receiving elements are arranged. Further, in the edge detecting device of the present invention, the light diffusing element is selected for use depending on the transmittance of the shielding which varies depending on the type of the shielding. In the edge detecting device of the present invention, it is preferable that the light diffusing element has a twist of 50% or less. In the edge detecting device of the present invention, the light-receiving element of the line sensor is provided with a protective glass. The light-diffusing element is bonded to the protective glass. 9 201000847 According to the edge detecting device of the present invention, the light projecting unit includes a laser light source that generates monochromatic light, a light projecting lens that converts monochromatic light from the laser light source into monochromatic parallel light, and emits the parallel light. a light-emitting window having a monochromatic light; the light-receiving portion having a light-receiving element that is diffused in a predetermined range by a light-receiving window provided to face the light-emitting window and the light-receiving light incident from the light-receiving window The detector is configured to arrange a plurality of light-receiving elements for receiving the diffused monochromatic light at a predetermined interval in a direction; and a detecting portion for performing a light-receiving amount distribution of the line sensor Analytically detecting the edge position of the shield existing on the optical path of the monochromatic parallel light in the direction in which the light receiving elements are arranged, and therefore having an effect of changing the wavelength of the laser light or the output power due to changes in the ambient temperature. In this case, the output signal from the light-receiving element does not change sharply. In addition, even if the in-line sensing double-light member or the projection lens has characteristic deviation during manufacturing: Supply stable output signal edge detecting unit, it is possible to prevent the space portion is not erroneously detected as an obstacle edge portion. Further, according to the present invention, the transmittance of the object is selected to change the type of the output signal from the light-receiving element without shielding, and the following effect can be obtained for the number 0. · Due to the turbidity (fuzziness) of the shielding element ), so there will be deviations and sharp changes, even if the edge detection unit supplies a stable output signal. In addition, according to the present invention, the right π π < Tian, the sound machine under the effect: by the turbidity of the light diffusion element It is set to 50% or less, and the output signal from .. „ 件 不会 不会 不会 不会 不会 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The edge portion of the transparent body such as glass is reliably detected. 10 201000847 Further, according to the present invention, there is an effect that the light-transmitting element of the in-line sensor element is provided with a protective glass, and the light diffusing element is adhered to the protective glass. (4) which can remove the diffuse reflection of the laser light or the new interference pattern caused by the glass for protection, and can use an inexpensive line sensor. [Embodiment] FIG. 1 is a view showing an embodiment of the present invention. A configuration of the edge detecting device includes a light projecting unit i, a light receiving unit 2, and an edge detecting unit 3. The light projecting unit i is disposed facing the light receiving surface of the light receiving window 23 of the light receiving unit 2 A light source composed of a laser diode (ld), a drive Ic丨i for the light source 10, a light projecting lens 12, and a light projecting window 13. The light lens 12 passes through the light projecting window i3 and is applied to the light receiving unit 2 The central P of the line sensor 2 i emits monochromatic light generated by the light source 1 又. Moreover, the so-called single t-light system has the advantage of using the industrially produced laser diode and optical fiber. The wavelength distribution characteristic of the light. The 'projection window i 3 is a transparent glass. _Break. 卩 2 has a light receiving window 23, a light diffusing element 22, and a line sensing, a line/line sense' 21 has a certain direction a plurality of optical elements (pixels) arranged at a predetermined pitch receive the monochromatic light irradiated by the light projecting portion 1. The light Hi 23 has a filter function matching the wavelength of the monochromatic light of the light source 1 ,, : So 'this eases the effect of the interference light on the line sensor 21.
邊緣檢測部3，具備A/D轉換部31、處理器32以及 顯示部33。Am μ A 出之受光-杜 1將由受光部2的線感測器21輸 几牛的輪出訊號從類比值轉換為數位值。處理器 ▲ A/D轉換部3丨數位轉換之線感測器21的輸出訊 號進行解柄 檢測在測量空間4遮蔽單色平行光的一部分 201000847 之遮敝物5在受光元件的排列大a L * ' 钾夕J方向上之邊緣位置。顯示部 3 3係顯不處理益3 2的檢測法黑 J揿判…果。又，A/D轉換部3 1及/ 或處理器32亦可以設置在 於受光部2與邊緣檢測部3 性能增强’可延長配線距離 測部3設置在受光部2内。 丈光部2内。在此情况下，由 之間為數位通訊，所以抗雜訊 。此外，亦可以將整個邊緣檢 圖2係表示線感測器21的各受光元件的受光量。横軸 為各受光元件的位置，縱軸為所接收的單色光的强度（受 光里）。測I空間4為投光窗1 3與受光窗〗4之間的空間， 在遮蔽物5為不透明體的情况下，當遮蔽測量空間4時， 被遮敝之部分5a的受光元件的受光量幾乎為〇。在邊緣檢 測。卩3，根據線感測器2 1的受光元件的排列長度2丨a與被 遮蔽部分5a的比例，來計算判斷遮蔽物5之邊緣部分的位 置又，在玻璃及膠片之類的透明物體（透明體）的情况 下，被遮蔽之部分5a的受光元件的受光量不會變為〇,但 與遮蔽物5完全未進入的狀態相比為受光量減少的狀態。 又，關於減少的比例’係取決於遮蔽物5的透明度等。 圖3係表示邊緣部分的檢測所使用的菲埋耳繞射之說 明圖。因菲涅耳繞射所引起的光强度分布，如圖3所示， 在邊緣位置附近急劇上升，隨著遠離邊緣位置而邊振盪邊 收縮。此外，當利用因單色平行光的菲涅耳繞射所引起的 線感測器21的受光面上的光强度分布來檢測遮蔽物5之 邊緣部分的位置時，需要預先高精度地求出光强度分布特 性’有關本特性的高精度的近似方法，已揭示於日本特開 12 201000847 2004-177335 號公報。 在受光部2 ’由於在受光窗23與線感測器之間設 置光擴散元件22 ’藉此將透過光擴散元件22的單色光以 既定擴散寬度進行擴散’而照射到線感測器21上，所以 能實現本發明之線感測器21的輸出訊號的穩定化。即， 藉由將光擴散元件22設置在線感測器21的前面，輸入受 光7C件的單色光被擴散，並從多方向照射到各受光元件 上所以义光里穩又，又，另一方面，可以將平行的單色 光照射到遮蔽物5，將其邊緣部分的菲涅耳繞射輸入線感 測器2 1。而且，理所當然，由於將經擴散的雷射光照射到 遮蔽物5上而不會引起菲涅耳繞射，所以無法將光擴散元 件22例如貼設在投光窗13的表面來使用。另外，光擴散 兀件22 ’考慮耐久性等而選擇薄膠片狀或板狀者等。具體 而言，可以使用透明性塑料或磨砂玻璃等，特别是在聚對 苯二甲酸乙二醇酯（PET)等基材上施以塗布處理後的光擴散 膠片比较有效。透過光擴散元件22後的單色光以既定擴 散寬度被擴散’並被照射到線感測器2丨上。 此外，線感測器的受光元件所接收的受光量等特性， 會因光擴散元件22的濁度（濕度或模糊度）的不同而異。 在此ϋ( Haze )是根據擴散透過光相對於全部光線透 過光的比例而求出者’會受到光擴散元件22纟面的粗糙 度影響’以百分比（％ )表示。4係表示因濁度的不同 所引起的受光量分布輸出的差異。_ 4⑴表示未設置 光擴散元# 22的狀態下各受光元件的受光量分布，因單 13 201000847 色光的干涉圖案而導致單色光未均句地照射於各受光元 件，產生±20%以上的受光量的偏差。特别是因干涉，以每 幾十個元件為單位在受光量分布上產生波動。因此’在圖 4- (2)係設置有濁度為5〇%的光擴散元件22的情况下之 受光量分布，去除了每幾十個元件所發生的受光量分布的 波動。此外，圖4- ( 3 )係設置有濁度為9〇%的光擴散元 件22的情况下之受光量分布，相鄰的每個元件的受光量 ^ 偏差亦被抑制，從而能獲得更穩定的受光量分布。此係由 於藉由在入射線感測器21之前設置光擴散元件22，雷射 光被擴散，對受光元件照射經擴散的雷射光單色光，且由 於照射來自複數個方向的單色光，因此亦減小干涉圖案的 影響。另外，即使單色光的波長因周圍温度而產生變化而 使干涉圖案發生改變，由於單色光的變化被限定，因此僅 止於微量的受光量變化，從而可以構成不會受到周圍温度 影響之邊緣檢測裝置。 I 圖5係表示因周圍温度所引起的受光量的變動。以未 於測罝空間4***遮蔽物5時各元件的受光量為基準量 LOO ’試著使周圍溫度產生變化。在圖所示的習知之邊 緣檢測裝置，如圖5_ ( i )所示，因單色光的波長變化所 引起的干涉圖案的變動，產生土2〇%左右的受光量的變動。 另方面’圖5_(2)為設置有濁度為90%的光擴散元件22 的情况’即使周圍温度產生變化，受光量的變動亦幾乎未 考X生。特别是，越是***濁度大的光擴散元件22，單色光 的擴散越大，單色光的波長變動越强。 14 201000847 在此’圖6係表示設置濁度為90%的擴散元件22，於 測量空間4***不透明體的遮蔽物5時的受光量。與圖1〇 所示之習知的未使用光擴散元件22的檢測裝置同樣，產 生菲！耳繞射’能毫無問題地檢測遮蔽物5之邊緣部分。 另一方面，圖7係表示於測量空間4***有如玻璃般 的透明體之遮蔽物5時的受光量。圖7_ ( 1 )係圖1 〇所示 的習知之邊緣檢測裝置，5a是***有玻璃的部分，5b是没 有遮蔽物5的自由空間。在此情况下，因菲涅耳繞射而在 邊、.彖。卩刀產生如5c般大的受光量的衰減，根據該衰減能够 檢測邊緣的位置。例如，在® 7· ( 1 )，當設判斷為邊緣 的受光量的變動閱值為〇.5日夺，由於***有玻璃的部分h 的丈光ΐ (換算值）的衰減為〇8左右，所以能正確地檢 測邊緣部分。 在此，在設置有濁度為9〇%的光擴散元件22的情况 下如圖7 (2)所示因邊緣所引起的受光量變動 «非常小。此係藉由㈣散元#22而使單色光的擴散 多㈣經擴散的單色光從各方向人射到受光元件， 從而變為如同設置有據波器的狀態之故。由於只要是不透 明體，因遮蔽物5 & _ 丨起的遮光部分明確，所以能正確地 進订邊緣檢測，但，Ε 一 一方面’在遮蔽物5為透明體的情 况下’邊緣部分的菲 1月 行1〇 ，甚一菲涅耳繞射效果減小，就會產生無法進 仃正確之邊緣檢冽的問題。 因此，本發明/ + 來解决該問題的事實：認、出藉由降低光擴散元件的濁度值 圖7_ ( 3 )係表示配置有濁度為5〇0/。 201000847 時的受光量，雖然與圖7-(。所示的没 Μ =元件22 H兄相比因邊緣所W的衰減猶微減 切;邊緣的判斷閾值設4 〇.6,就能够充分檢測 =:。又，由於***有玻璃的“部分藉光擴散元件22 =广戶斤以受光量的衰減小且穩定，並且因周圍温 又弓1起的自由空間5b部分的受光量的變動亦少，所以 =提4緣判斷㈣值，可以充分地進行邊緣部分的檢 :、又’當遮蔽物5為透明度高的玻璃與非常薄的膠片時， 選擇更小濁度的光擴散元件22車交為有效。另一方面，當 遮蔽物5為如刀口邊緣等不透明體時，濁度越高受光量^ 變動越小，越能進行穩定的測量。如此，光擴散元件U 配合遮蔽# 5的透射率來選擇濁度使収為有效。如果光 擴散元件的濁度為50%以下，則能兼顧透明體之邊緣部分 的正確檢測與各受光元件的受光量的穩定，故更佳。 圖8係表示線感測器21與光擴散元件22的構成之一 例。線感測器21係、藉由在-方向上以㈣間距排列的複 數個受光元件2H來接收單色光，在離受光元件上數瓜瓜 的位置配置用於保護受光元件避免灰塵污染等的保護用玻 璃212。各位置關係如圖9所示，配置成使線感測器u位 於X光窗23之下。在此’由於將光擴散元件22黏接到保 叹用玻徊212上，觉光元件211與光擴散元件22的位置 關係被固定，所以能抑制受光量分布特性的變動。此外， 由於越將光擴散元件22靠近受光元件211越能够避免因 擴散所引起之邊緣部分的菲淫耳繞射的衰減降低，所以較 16 201000847 佳係越靠近越好。此外，從私 卩制早色光的漫反射與干涉的 角度考慮’保護用破璃212沿古立，^ 又有限制，較佳係採用透明的 玻璃，但由於線感测器21的 幻成•本會升尚，所以一般採用 透明度低的玻璃。但，藉由將 秸田將本發明之光擴散元件22配 置在丈光窗23與保護用玻璃 , 1 2之間，亚進一步與線感 測器2 1的保護用玻璃2】9卖卜 -r7 接’能够獲得減輕雷射光的 漫反射或干涉的效果。又，將 — 將先擴散το件22設置在保護 用玻璃212與受光元件211之間亦有同樣的效果。另外， 光擴散元件與保護用玻璃的黏接，例如利用光學零件用的 黏接劑等具有透光性的黏接劑進行。 如上述般，藉由實施本發明，即使在雷射光波長與輸 出功率因周圍温度的變化而變化的情况下，來自受光元件 :輸出訊號亦不會產生急劇變化，另夕卜，即使線感測器的 受光元件或投光透鏡在製造時存在特性偏差的情况下，亦 能：邊緣檢測部供應穩定的輸出訊號，具有可防止將没有 T蔽物的空間部分誤檢測為邊緣部分的效果。此外，作為 人要效果，在去除因光源附近的驅動1C所引起的發熱之 p曰上亦具有效果，且具有能縮短從電源投入到可進行測 里為止的穩定時間的效果。作為另一個次要效果，能去除 因線感測器的保護用玻璃所引起的雷射光漫反射與新的干 ’y圖案的影響’具有能使用便宜的線感測器的效果。 【圖式簡單說明】 圖1係表示本發明之實施形態丨之邊緣檢測裝置的構 成圖。 17 201000847 圖2係表示實施形態1之線感測器的各受光元 光量。 午的受 圖3係邊緣部分的檢測所使用的菲涅耳繞 圖。 <說明 11)〜（3)係說明 乂 tr、j 各文光元件的受光量分布圖。 圖5-(1)、（2)係說明因周圍温度所 動。 〜〜又祀®的變 圖6係表示***有不透明體的遮蔽物時的受光量。 量。圖7·⑴〜(3)係表示***有透明體的遮蔽物時的受光 ® ^ 卞的構成圖。 圖^ 表示線感測器與光擴散元件的位置關係圖。 圖"：知之邊緣檢測裝置的構成圖。 件的受光量分布(。)係說明習知之邊緣檢測裝置的各受光元 【主要元件符號說明】 投光部 受光部 邊緣檢測部 測量空間 4 201000847 12 投光透鏡 13 投光窗 21 線感測器 211 受光元件 212 保護用玻璃 22 光擴散元件 23 受光窗 31 A/D轉換部 32 處理器 33 顯示部 100 線感測器 101 投光器 101a 光源 101b 光纖 101c 投光透鏡 lOld 驅動1C 102 邊緣檢測部 103 測量空間 104、 104a 、 104b 105 受光元件 遮蔽物 19The edge detecting unit 3 includes an A/D converter unit 31, a processor 32, and a display unit 33. The Am μ A received light-du 1 converts the round-out signal from the line sensor 21 of the light receiving unit 2 from the analog value to the digital value. The processor ▲ A/D conversion unit 3 丨 digitally converts the output signal of the line sensor 21 to perform the stalk detection. In the measurement space 4, a part of the monochromatic parallel light 201000847 is concealed. The arrangement of the concealer 5 in the light receiving element is large. * 'The position of the edge in the K-J direction. The display unit 3 3 shows that the detection method of the benefit 3 2 is judged. Further, the A/D converter 3 1 and/or the processor 32 may be provided in the light-receiving unit 2 and the edge detecting unit 3 to enhance the performance. The extendable wiring distance measuring unit 3 is provided in the light-receiving unit 2. Inside the Department of Light. In this case, there is digital communication between the two, so anti-noise. Further, the entire edge detection map 2 may indicate the amount of light received by each of the light receiving elements of the line sensor 21. The horizontal axis is the position of each light-receiving element, and the vertical axis is the intensity of the received monochromatic light (in the light). The measurement I space 4 is a space between the light projecting window 13 and the light receiving window 4, and when the shielding object 5 is an opaque body, when the measurement space 4 is shielded, the light receiving amount of the light receiving element of the concealed portion 5a is received. Almost awkward. At the edge of the test.卩3, according to the ratio of the arrangement length 2丨a of the light-receiving element of the line sensor 21 to the shaded portion 5a, the position of the edge portion of the mask 5 is calculated, and a transparent object such as glass or film is In the case of the transparent body, the amount of light received by the light-receiving element of the shielded portion 5a does not become 〇, but the amount of received light is reduced as compared with the state in which the shield 5 does not enter at all. Further, the ratio of reduction ' depends on the transparency of the shield 5 and the like. Fig. 3 is an explanatory view showing the burying of the horns used for the detection of the edge portion. The light intensity distribution caused by Fresnel diffraction, as shown in Fig. 3, rises sharply near the edge position, and oscillates as it moves away from the edge position. Further, when the position of the edge portion of the shield 5 is detected by the light intensity distribution on the light receiving surface of the line sensor 21 caused by the Fresnel diffraction of the monochromatic parallel light, it is necessary to obtain a high precision in advance. The light intensity distribution characteristic 'a high-precision approximation method for this characteristic is disclosed in Japanese Laid-Open Patent Publication No. Hei. No. 12 201000847 No. 2004-177335. The light-receiving portion 2' is irradiated to the line sensor 21 by providing the light diffusing element 22' between the light-receiving window 23 and the line sensor, thereby diffusing the monochromatic light transmitted through the light diffusing element 22 by a predetermined diffusion width. Therefore, the stabilization of the output signal of the line sensor 21 of the present invention can be achieved. That is, by arranging the light diffusing element 22 in front of the line sensor 21, the monochromatic light input to the light receiving unit 7C is diffused and irradiated from the multiple directions to the respective light receiving elements, so that the light is stabilized and, on the other hand, Parallel monochromatic light can be irradiated to the shield 5, and Fresnel of the edge portion thereof is diffracted into the line sensor 21. Further, as a matter of course, since the diffused laser light is irradiated onto the shield 5 without causing Fresnel diffraction, the light diffusing element 22 cannot be attached to the surface of the light projecting window 13 for use. Further, the light-diffusing element 22' is selected in the form of a thin film or a plate in consideration of durability or the like. Specifically, a transparent plastic or frosted glass or the like can be used, and in particular, a light-diffusing film after coating treatment is applied to a substrate such as polyethylene terephthalate (PET). The monochromatic light transmitted through the light diffusing element 22 is diffused 'with a predetermined diffusion width' and is irradiated onto the line sensor 2''. Further, characteristics such as the amount of received light received by the light receiving element of the line sensor may vary depending on the turbidity (humidity or blur degree) of the light diffusing element 22. Here, Haze is expressed as a percentage (%) based on the ratio of the diffused transmitted light to the light passing through the entire light, which is affected by the roughness of the surface of the light diffusing element 22. The 4 series indicates the difference in the output of the received light amount due to the difference in turbidity. _ 4 (1) indicates the light-receiving amount distribution of each of the light-receiving elements in a state where the light-diffusing element # 22 is not provided, and the monochromatic light is not uniformly applied to each of the light-receiving elements due to the interference pattern of the single 13 201000847 color light, and ±20% or more is generated. The deviation of the amount of received light. In particular, due to interference, fluctuations in the amount of received light are generated in units of several tens of components. Therefore, the light-receiving amount distribution in the case where the light diffusing element 22 having a haze of 5 % is provided in Fig. 4-(2) removes fluctuations in the light-receiving amount distribution which occurs every several tens of elements. Further, Fig. 4-(3) is a light-receiving amount distribution in the case where the light diffusing element 22 having a haze of 9% is provided, and the deviation of the received light amount of each adjacent element is also suppressed, so that it is more stable. The amount of light received. This is because the laser light is diffused by the light diffusing element 22 before the radiation sensor 21 is incident, the diffused laser light monochromatic light is irradiated to the light receiving element, and since the monochromatic light from a plurality of directions is irradiated, The effect of the interference pattern is also reduced. Further, even if the wavelength of the monochromatic light changes due to the ambient temperature and the interference pattern is changed, since the change of the monochromatic light is limited, only a small amount of received light amount is changed, so that it can be configured not to be affected by the ambient temperature. Edge detection device. I Fig. 5 shows the variation in the amount of received light due to the ambient temperature. The amount of light received by each element when the shield 5 is not inserted into the test space 4 is used as a reference amount LOO' to try to change the ambient temperature. As shown in Fig. 5 (i), the conventional edge detecting device shown in Fig. 5 shows a variation in the amount of received light of about 2% by the fluctuation of the interference pattern due to the change in the wavelength of the monochromatic light. On the other hand, Fig. 5 (2) shows a case where the light diffusing element 22 having a haze of 90% is provided. Even if the ambient temperature changes, the variation in the amount of received light is hardly measured. In particular, the more the light diffusing element 22 having a large turbidity is inserted, the larger the diffusion of the monochromatic light is, and the larger the wavelength variation of the monochromatic light is. 14 201000847 Here, Fig. 6 shows the amount of light received when the diffusing element 22 having a haze of 90% is placed and the shield 5 of the opaque body is inserted into the measurement space 4. In the same manner as the conventional detecting device using the light diffusing element 22 shown in Fig. 1A, phenanthrene is produced! The ear diffraction can detect the edge portion of the shield 5 without any problem. On the other hand, Fig. 7 shows the amount of light received when the shield 5 of a transparent body such as glass is inserted into the measurement space 4. Fig. 7 (1) shows a conventional edge detecting device shown in Fig. 1A, 5a is a portion into which glass is inserted, and 5b is a free space without a covering 5. In this case, due to Fresnel diffraction, on the side, 彖. The file produces an attenuation of the amount of received light as large as 5c, and the position of the edge can be detected based on the attenuation. For example, in ® 7· ( 1 ), when the change in the amount of received light that is judged as the edge is 〇.5, the attenuation of the ΐ (converted value) of the portion h in which the glass is inserted is 〇8 or so. , so the edge part can be detected correctly. Here, in the case where the light diffusing element 22 having a haze of 9% is provided, the amount of received light due to the edge as shown in Fig. 7 (2) is extremely small. This is because the (4) scatter element #22 diffuses the monochromatic light. (4) The diffused monochromatic light is emitted from the directions to the light-receiving element, and becomes like the state in which the arbitrator is disposed. As long as it is an opaque body, the edge detection can be correctly performed because the shielding portion of the shielding 5 & _ is clear, but one side is 'in the case where the shielding 5 is a transparent body' When the Philippines went on a trip in January, even if the Fresnel diffraction effect was reduced, there would be problems in that it could not enter the correct edge inspection. Therefore, the present invention solves the problem by recognizing the fact that the turbidity value of the light diffusing element is lowered. Fig. 7_(3) shows that the turbidity is 5 〇 0 /. The amount of light received at 201000847, although it is slightly reduced by the attenuation of the edge W compared to the element 22 H brother shown in Figure 7-(; the threshold of the edge is set to 4 〇.6, it can be fully detected = In addition, the "partial borrowing light diffusing element 22 = wide households inserted with glass has a small attenuation and a stable attenuation, and the amount of light received by the free space 5b portion due to the ambient temperature is also small. Therefore, if the value of (4) is judged, the edge portion can be fully inspected: and when the mask 5 is a glass with high transparency and a very thin film, the light diffusing element 22 with a smaller turbidity is selected as the vehicle. On the other hand, when the shield 5 is an opaque body such as a knife edge, the higher the turbidity, the smaller the variation of the light amount, and the more stable the measurement can be performed. Thus, the light diffusing element U is matched with the transmittance of the mask #5. When the haze of the light diffusing element is 50% or less, the correct detection of the edge portion of the transparent body and the stabilization of the amount of light received by each of the light receiving elements can be achieved, and therefore it is more preferable. The line sensor 21 and the light diffusing element 22 are constructed For example, the line sensor 21 receives monochromatic light by a plurality of light-receiving elements 2H arranged at a (four) pitch in the − direction, and is disposed at a position away from the light-receiving element to protect the light-receiving element from dust pollution. The protective glass 212 is used. The positional relationship is as shown in FIG. 9, and is arranged such that the line sensor u is located below the X-ray window 23. Here, the light diffusing element 22 is adhered to the glass plate 212 for the sigh. Since the positional relationship between the light-guiding element 211 and the light-diffusing element 22 is fixed, fluctuations in the light-receiving amount distribution characteristics can be suppressed. Further, as the light-diffusing element 22 is brought closer to the light-receiving element 211, the edge portion due to diffusion can be prevented. The attenuation of the Philippine lure is reduced, so it is better to be closer to the 16 201000847. In addition, from the perspective of diffuse reflection and interference of the early-color light of the private system, the protection of the broken glass 212 along the Gu Li, ^ also The limitation is preferably that transparent glass is used, but since the illusion of the line sensor 21 is increased, the glass having low transparency is generally used. However, the light diffusing element 22 of the present invention is disposed by the straw field. In the light Between the window 23 and the protective glass, 1 2, and further, the protective glass 2] 9 of the line sensor 2 1 can be used to reduce the diffuse reflection or interference of the laser light. - The same effect can be obtained by providing the first diffusion member 22 between the protective glass 212 and the light-receiving element 211. The adhesion between the light-diffusing element and the protective glass is, for example, an adhesive for optical parts. The optical adhesive is carried out. As described above, by implementing the present invention, even when the wavelength of the laser light and the output power change due to changes in the ambient temperature, the output signal from the light-receiving element does not change abruptly. In addition, even if the light-receiving element or the light-emitting lens of the line sensor has a characteristic deviation at the time of manufacture, the edge detecting unit can supply a stable output signal, and can prevent the space portion without the T-mask from being mistaken. Detected as the effect of the edge portion. Further, as a human effect, it is effective in removing heat generated by the drive 1C in the vicinity of the light source, and has an effect of shortening the settling time from the power supply to the time when the measurement can be performed. As another secondary effect, it is possible to remove the influence of the diffuse reflection of the laser light and the new dry y pattern caused by the protective glass of the line sensor, which has the effect of being able to use an inexpensive line sensor. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the construction of an edge detecting device according to an embodiment of the present invention. 17 201000847 Fig. 2 is a view showing the amount of light received by each of the line sensors of the first embodiment. The afternoon of Figure 3 is a Fresnel diagram used for the detection of the edge portion. <Description 11) to (3) A description will be given of the light-receiving amount distribution map of each of the 文tr and j elements. Figure 5-(1) and (2) show the movement due to ambient temperature. Change of ~~祀® Figure 6 shows the amount of light received when a shield with an opaque body is inserted. the amount. Fig. 7 (1) to (3) are diagrams showing the configuration of the light receiving light + ^ 时 when the shield of the transparent body is inserted. Figure ^ shows the positional relationship between the line sensor and the light diffusing element. Figure ": A diagram of the structure of the edge detection device. The light-receiving amount distribution of the device is used to describe each light-receiving element of the conventional edge detecting device. [Main component symbol description] Light-emitting portion light-receiving portion edge detecting portion measurement space 4 201000847 12 Projection lens 13 Projection window 21 Line sensor 211 light receiving element 212 protective glass 22 light diffusing element 23 light receiving window 31 A/D converting unit 32 processor 33 display unit 100 line sensor 101 light projector 101a light source 101b optical fiber 101c light projecting lens lOld drive 1C 102 edge detecting unit 103 measurement Space 104, 104a, 104b 105 light-receiving element shield 19