TW200951521A - Method for forming light waveguide - Google Patents

Method for forming light waveguide

Info

Publication number
TW200951521A
TW200951521A TW98108408A TW98108408A TW200951521A TW 200951521 A TW200951521 A TW 200951521A TW 98108408 A TW98108408 A TW 98108408A TW 98108408 A TW98108408 A TW 98108408A TW 200951521 A TW200951521 A TW 200951521A
Authority
TW
Taiwan
Prior art keywords
forming
clad layer
core
layer
resin
Prior art date
Application number
TW98108408A
Other languages
Chinese (zh)
Other versions
TWI457625B (en
Inventor
Masatoshi Yamaguchi
Tomoaki Shibata
Atsushi Takahashi
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Publication of TW200951521A publication Critical patent/TW200951521A/en
Application granted granted Critical
Publication of TWI457625B publication Critical patent/TWI457625B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

A method for forming light waveguide, includes: a process of hardening a resin for forming a clad layer formed on a substrate to form a lower clad layer, a process of laminating a resin film for forming a core layer on the lower clad layer to form the core layer, a process of exposing and developing the core layer to form a core pattern, and a process of hardening the resin for forming the clad layer in which the core pattern is embedded to form an upper clad layer. The aforementioned method characterized in that the process of forming the core layer using a roll laminator to hot press the resin for forming the core layer on the lower clad layer, and the process of forming the upper clad layer using a flat-type laminator to perform hot press in reduced pressure ambiance. This invention provides a method to produce a light waveguide having a uniform core portion with well productivity.
TW098108408A 2008-03-18 2009-03-16 Method for forming light waveguide TWI457625B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008070130 2008-03-18

Publications (2)

Publication Number Publication Date
TW200951521A true TW200951521A (en) 2009-12-16
TWI457625B TWI457625B (en) 2014-10-21

Family

ID=41090826

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098108408A TWI457625B (en) 2008-03-18 2009-03-16 Method for forming light waveguide

Country Status (4)

Country Link
JP (1) JPWO2009116421A1 (en)
CN (1) CN101971065A (en)
TW (1) TWI457625B (en)
WO (1) WO2009116421A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI633348B (en) * 2016-09-21 2018-08-21 中華學校財團法人中華科技大學 Polymer optical wavelength filter element with surface relief Bragg grating structure and manufacturing method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9535216B2 (en) 2013-09-27 2017-01-03 Panasonic Intellectual Property Management Co., Ltd. Optical waveguide dry film, and optical waveguide manufacturing method and optical waveguide using optical waveguide dry film

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2004095093A1 (en) * 2003-04-23 2006-07-13 太陽インキ製造株式会社 Optical waveguide, opto-electric hybrid board, and method for manufacturing the opto-electric hybrid board
US20070172181A1 (en) * 2004-02-25 2007-07-26 Kansai Paint Co., Ltd. Curable resin composition for optical waveguide, curable dry film for optical waveguide, optical waveguide and method for forming core part for optical waveguide
JP4810887B2 (en) * 2004-06-07 2011-11-09 パナソニック電工株式会社 Epoxy resin film, optical waveguide, photoelectric composite substrate, optical communication module
JPWO2007091596A1 (en) * 2006-02-08 2009-07-02 日立化成工業株式会社 Flexible optical waveguide and optical module
EP2045629B1 (en) * 2006-07-25 2013-09-04 Hitachi Chemical Company, Ltd. Resin composition for optical waveguide, resin film for optical waveguide, and optical waveguide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI633348B (en) * 2016-09-21 2018-08-21 中華學校財團法人中華科技大學 Polymer optical wavelength filter element with surface relief Bragg grating structure and manufacturing method thereof

Also Published As

Publication number Publication date
WO2009116421A1 (en) 2009-09-24
CN101971065A (en) 2011-02-09
TWI457625B (en) 2014-10-21
JPWO2009116421A1 (en) 2011-07-21

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees