TW200951401A - Correcting device, correction method and its controlling device - Google Patents
Correcting device, correction method and its controlling deviceInfo
- Publication number
- TW200951401A TW200951401A TW098112480A TW98112480A TW200951401A TW 200951401 A TW200951401 A TW 200951401A TW 098112480 A TW098112480 A TW 098112480A TW 98112480 A TW98112480 A TW 98112480A TW 200951401 A TW200951401 A TW 200951401A
- Authority
- TW
- Taiwan
- Prior art keywords
- defects
- residual
- unit
- laser
- dmd
- Prior art date
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Laser Beam Processing (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The present invention aims to automatically and accurately detect residual defects. Based on the glass substrate defect image captured by an image pick-up unit, an image processing unit is employed to detect defects and identify location and range of the defects. A laser oscillator outputs laser light for correcting the detected defects. Using a DMD (digital mirror device) unit, the laser light undergoes spatial light modulation to irradiate the defects. A laser shape control unit drives the driver that drives the DMD unit to output control signals according to the output data from the image processing unit. A residual defect detection unit acquires height information relevant to the height of the glass substrate within the range of the defects. According to the height information, presence of residual defects that require further correction after the defects have been corrected is evaluated. When the presence of residual defects is confirmed, laser irradiation is carried out on the residual defects in the same way as the laser irradiation on the defects.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008111278A JP2009262161A (en) | 2008-04-22 | 2008-04-22 | Correcting apparatus, correcting method, control device, and program |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200951401A true TW200951401A (en) | 2009-12-16 |
Family
ID=41281260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW098112480A TW200951401A (en) | 2008-04-22 | 2009-04-15 | Correcting device, correction method and its controlling device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2009262161A (en) |
CN (1) | CN101564795A (en) |
TW (1) | TW200951401A (en) |
Cited By (1)
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---|---|---|---|---|
TWI512687B (en) * | 2013-03-22 | 2015-12-11 | Screen Holdings Co Ltd | Labeling method, labeling apparatus and defect inspecting apparatus |
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JP2011191411A (en) * | 2010-03-12 | 2011-09-29 | Aisin Seiki Co Ltd | Device and method for correcting defect |
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JPH0518728A (en) * | 1991-07-12 | 1993-01-26 | Ricoh Co Ltd | Surface inspection apparatus |
JP2000275530A (en) * | 1999-03-24 | 2000-10-06 | Olympus Optical Co Ltd | Confocal microscope |
JP2002066771A (en) * | 2000-08-16 | 2002-03-05 | Toshiba Corp | Laser system |
JP2005274256A (en) * | 2004-03-24 | 2005-10-06 | Sumitomo Metal Mining Co Ltd | Surface inspection method |
-
2008
- 2008-04-22 JP JP2008111278A patent/JP2009262161A/en active Pending
-
2009
- 2009-04-15 TW TW098112480A patent/TW200951401A/en unknown
- 2009-04-21 CN CNA2009101309740A patent/CN101564795A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI512687B (en) * | 2013-03-22 | 2015-12-11 | Screen Holdings Co Ltd | Labeling method, labeling apparatus and defect inspecting apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP2009262161A (en) | 2009-11-12 |
CN101564795A (en) | 2009-10-28 |
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