200946218 九、發明說明： 【發明所屬之技術領域】 / 本發明涉及一種液體混合裝置，尤其涉及一種結構簡 -單、混合效率高之微流體混合裝置。 【先前技術】 於化學、生物等領域中，微流體系統（microfluidic system)得到越來越多之應用，如體積小至幾個微升、奈升， 甚至皮升之微量流體之傳輸、成分分析及化學反應等。於 ❹實際應用中，常常需要快速、有效地混合兩種或多種微量 液體。 於微通道中，由於流體流動之雷諾數（流體流動中慣 性力與黏性力比值）很低，屬層流狀態，流體之混合過程 係通過流體分子之自由擴散進行之，基於自由擴散之混合 過程係極其緩慢，因此，流體達到充分混合就需要較長之 混合時間和較長之混合通道。這顯然不能滿足要求快速反 應、高效分析之現代生物、化學領域應用之需要。 針對這個問題，很多學者進行了廣泛之研究，並提出 了各種不同形式、基於不同原理之微流體混合器，大致可 分為主動式混合器和被動式混合器兩種。被動式混合器結 構簡單，但需要較長之混合通道，且混合過程不可控；主 動式混合器結構複雜，較短之通道便可達到好的混合效 果，且混合過程可控。 一種超聲波微流體混合器（參見ultrasonic micromixer for microfluidic system, Micro Electro Mechanical Systems, 200946218 2000. MEMS 2000, 23-27 Jan. 2000, Pages 80 - 85)通過 超聲波之振動使微流體混合。該超聲波微流體混合器通過 蝕刻玻璃並結合矽形成通道，然後於矽上形成一個薄膜 層，利用黏結於薄膜上之壓電陶瓷驅動薄膜以擾動通道内 之微流體實現混合目的。超聲波微流體混合器雖然於一定 程度上提高微流體混合之效果，惟，需要較長之混合通道 和混合時間。 【發明内容】 ® 有鑒於此，有必要提供一種結構簡單、混合效率高之 微流體混合裝置。 一種微流體混合裝置，包括基座、設置於該基座上之 表面波產生單元和複數垂直分佈於該基座上之柱體，該柱 體頂端具有容納微流體之凹槽。 與先前技術相比，本發明實施例之微流體混合裝置之 通過表面波產生單元產生之表面波於基座上之傳播過程 @中，使柱體隨著波形之傳播發生振動，使得容納於凹槽内 之微流體快速混合，從而使得微流體混合裝置之結構簡 單、混合效率高。 【實施方式】 下面將結合附圖對本發明作進一步詳細說明。 如圖1及圖2所示，本發明第一實施例之微流體混合 裝置10包括基座11、複數柱體12、第一電極13和第二電 極14。 基座11呈長方體形狀，其由壓電材料製成，如砷化鍺 200946218 (G〇As )、銳鐘酸（ι/μ?〇3 )、组鐘酸（hTiiCb )或石英（quartz ) 等。 ' 複數柱體12垂直且呈陣列式設置於基座11之中間部 — 位，每一個柱體12遠離基座11之一端具有一個凹槽121。 凹槽121用來容納要混合之兩種或多種微流體。柱體12可 為圓柱體、三棱柱、五棱柱等柱體形狀。柱體12可與基座 11 一體成型，亦可通過黏結等方式固定於基座11上。柱體 12與基座11之材料可相同，亦可不同，除壓電材料外，柱 ®體12還可由金屬或者金屬氧化物製成，如鐵、銅、銘、鋅、 氧化鋅（Ζ/ιΟ )、氧化銅（ΟίΟ )等。 於基座11之表面且於柱體12之兩侧分別設置第一電 極13和第二電極14。第一電極13和第二電極14為梳狀電 極（interdigital transducers，IDT)結構，第一電極 13 具有 相互交叉之輸入端131和輸出端132，第二電極14具有相 互交叉之輸入端141和輸出端142。 φ 於第一電極13和第二電極14上施加相同之電壓或電 流訊號，輸入端131、141會將該訊號轉變為表面聲波 (surface acoustic wave，SAW )，通過基座11傳導至輸出端 132和142。該表面聲波於基座11上之傳播過程中，於柱 體12處，兩個表面聲波相遇發生波之疊加，產生共振，容 納於凹槽121内之微流體於共振之作用下快速混合進而發 生反應。 當然，電極之個數並不限於本實施例之兩個，可於基 座11上設置一個電極，電極產生之表面聲波於基座11表 200946218 面傳播過程中，使得位於表面聲波傳播路徑上之柱體12發 生震動，從而使容納於凹槽121内之微流體混合；亦可設 置更多個電極。 ' 如圖3所示，本發明第二實施例之微流體混合裝置20 與微流體混合裝置10結構基本相同，包括基座21和設置 於基座21上之柱體22，其不同在於：柱體22之兩侧分別 設置有一個表面波探針15,表面波探針15可產生表面波並 將表面波傳播到基座21上，於柱體12處兩個波形相遇發 ®生波之疊加，產生共振，容納於凹槽221内之微流體於共 振之作用下快速混合進而發生反應。 綜上所述，本發明確已符合發明專利之要件，遂依法 提出專利申請。惟，以上所述者僅為本發明之較佳實施方 式，自不能以此限制本案之申請專利範圍。舉凡熟悉本案 技藝之人士援依本發明之精神所作之等效修飾或變化，皆 應涵蓋於以下申請專利範圍内。 β【圖式簡單說明】 圖1係本發明第一實施例微流體混合裝置之示意圖。 圖2係圖1中ΙΙ-ΙΙ線截面示意圖。 圖3係本發明第二實施例微流體混合裝置之示意圖。 【主要元件符號說明】 微流體混合裝置 10、20 基座 11、21 柱體 12 ' 22 第一電極 13 200946218 第二電極 14 凹槽 121 輸入端 131 輸出端 132 表面波探針 15 221 141 142200946218 IX. Description of the invention: [Technical field to which the invention pertains] / The present invention relates to a liquid mixing device, and more particularly to a microfluidic mixing device having a simple structure and high mixing efficiency. [Prior Art] In the fields of chemistry, biology, etc., microfluidic systems are used more and more, such as small volume to a few microliters, nanoliters, and even micro-fluid transfer and composition analysis. And chemical reactions. In practical applications, it is often necessary to mix two or more traces of liquid quickly and efficiently. In the microchannel, the Reynolds number of the fluid flow (the ratio of the inertial force to the viscous force in the fluid flow) is very low, which is a laminar flow state, and the mixing process of the fluid is carried out by the free diffusion of the fluid molecules, based on the mixture of free diffusion. The process is extremely slow, so a fluid mixing time requires a longer mixing time and a longer mixing channel. This obviously does not meet the needs of modern biological and chemical applications that require rapid response and efficient analysis. In response to this problem, many scholars have conducted extensive research and proposed various types of microfluidic mixers based on different principles, which can be roughly divided into active mixers and passive mixers. The passive mixer has a simple structure, but requires a long mixing channel, and the mixing process is uncontrollable; the active mixer has a complicated structure, a short channel can achieve a good mixing effect, and the mixing process is controllable. An ultrasonic microfluidic mixer (see ultrasonic micromixer for microfluidic system, Micro Electro Mechanical Systems, 200946218 2000. MEMS 2000, 23-27 Jan. 2000, Pages 80-85) microfluidic mixing by vibration of ultrasonic waves. The ultrasonic microfluidic mixer forms a channel by etching the glass and bonding the crucible, and then forming a thin film layer on the crucible, and the piezoelectric ceramic driving film bonded to the film is used to disturb the microfluid in the channel for mixing purposes. Ultrasonic microfluidic mixers, while increasing the effect of microfluidic mixing to a certain extent, require longer mixing channels and mixing times. SUMMARY OF THE INVENTION In view of the above, it is necessary to provide a microfluidic mixing device having a simple structure and high mixing efficiency. A microfluidic mixing device comprising a base, a surface wave generating unit disposed on the base, and a plurality of cylinders vertically disposed on the base, the top end of the cylinder having a groove for containing a microfluid. Compared with the prior art, the surface wave generated by the surface wave generating unit of the microfluidic mixing device of the embodiment of the present invention propagates in the propagation process on the susceptor, causing the column to vibrate as the waveform propagates, so that it is accommodated in the concave The microfluids in the tank are rapidly mixed, so that the microfluidic mixing device has a simple structure and high mixing efficiency. [Embodiment] Hereinafter, the present invention will be further described in detail with reference to the accompanying drawings. As shown in Figs. 1 and 2, the microfluidic mixing device 10 of the first embodiment of the present invention comprises a susceptor 11, a plurality of columns 12, a first electrode 13, and a second electrode 14. The susceptor 11 has a rectangular parallelepiped shape and is made of a piezoelectric material such as arsenic arsenide 200946218 (G〇As), oleic acid (ι/μ?〇3), group nicotinic acid (hTiiCb) or quartz (quartz). . The plurality of cylinders 12 are vertically and arranged in an array in the middle portion of the susceptor 11, and each of the cylinders 12 has a recess 121 away from one end of the susceptor 11. The groove 121 is for accommodating two or more kinds of microfluids to be mixed. The column 12 may have a cylindrical shape such as a cylinder, a triangular prism, or a pentagonal prism. The column 12 may be integrally formed with the base 11 or may be fixed to the base 11 by bonding or the like. The material of the column 12 and the susceptor 11 may be the same or different. In addition to the piezoelectric material, the column body 12 may be made of metal or metal oxide such as iron, copper, indium, zinc, zinc oxide (Ζ/ Ο), copper oxide (ΟίΟ), etc. The first electrode 13 and the second electrode 14 are disposed on the surface of the susceptor 11 and on both sides of the column 12. The first electrode 13 and the second electrode 14 are of an interdigital transducers (IDT) structure, the first electrode 13 has an input end 131 and an output end 132 that intersect each other, and the second electrode 14 has an input end 141 and an output that cross each other. End 142. φ applies the same voltage or current signal to the first electrode 13 and the second electrode 14. The input terminals 131, 141 convert the signal into a surface acoustic wave (SAW), which is conducted through the pedestal 11 to the output terminal 132. And 142. During the propagation of the surface acoustic wave on the susceptor 11, at the column 12, the two surface acoustic waves meet to form a superposition of waves, and resonance occurs, and the microfluids accommodated in the groove 121 are rapidly mixed under the action of resonance to occur. reaction. Of course, the number of electrodes is not limited to two in the embodiment, and an electrode may be disposed on the susceptor 11, and the surface acoustic wave generated by the electrode is in the surface propagation process of the susceptor 11 in the surface of the surface of the surface of the acoustic wave, so that it is located on the surface acoustic wave propagation path. The column 12 vibrates to mix the microfluids contained in the recess 121; more electrodes may be provided. As shown in FIG. 3, the microfluidic mixing device 20 of the second embodiment of the present invention has substantially the same structure as the microfluidic mixing device 10, and includes a base 21 and a column 22 disposed on the base 21, the difference being: the column A surface wave probe 15 is disposed on each side of the body 22, and the surface wave probe 15 can generate a surface wave and propagate the surface wave to the base 21. At the column 12, the two waveforms meet each other. Resonance is generated, and the microfluids accommodated in the recess 221 are rapidly mixed under the action of resonance to react. In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the present invention are intended to be included within the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a microfluidic mixing device according to a first embodiment of the present invention. Figure 2 is a schematic cross-sectional view of the ΙΙ-ΙΙ line in Figure 1. Figure 3 is a schematic illustration of a microfluidic mixing device in accordance with a second embodiment of the present invention. [Main component symbol description] Microfluid mixing device 10, 20 Base 11, 21 cylinder 12 ' 22 First electrode 13 200946218 Second electrode 14 Groove 121 Input end 131 Output end 132 Surface wave probe 15 221 141 142