TW200942827A - Multi-layer probe group and its manufacturing method - Google Patents

Multi-layer probe group and its manufacturing method

Info

Publication number
TW200942827A
TW200942827A TW97112719A TW97112719A TW200942827A TW 200942827 A TW200942827 A TW 200942827A TW 97112719 A TW97112719 A TW 97112719A TW 97112719 A TW97112719 A TW 97112719A TW 200942827 A TW200942827 A TW 200942827A
Authority
TW
Taiwan
Prior art keywords
reinforcement layer
insulation reinforcement
layer
probe group
manufacturing
Prior art date
Application number
TW97112719A
Other languages
Chinese (zh)
Other versions
TWI391670B (en
Inventor
Zhi-Zhong Chen
Original Assignee
Mpi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mpi Corp filed Critical Mpi Corp
Priority to TW97112719A priority Critical patent/TW200942827A/en
Publication of TW200942827A publication Critical patent/TW200942827A/en
Application granted granted Critical
Publication of TWI391670B publication Critical patent/TWI391670B/zh

Links

Abstract

The present invention relates to a multi-layer probe group and its manufacturing method for providing the use of electrical testing, which applies a microfilm process in a substrate to manufacture plural cantilever probes. The multi-layer probe group includes the following: an insulation reinforcement layer which is disposed on the substrate and formed into at least two openings connected to circuits; at least two conductive members which are respectively disposed in the openings of the insulation reinforcement layer, and also covered and supported by the insulation reinforcement layer; at least two cantilever probes of which each respectively has one beam member and one pinpoint member. The beam members are respectively connected with the conductive members, and local surface of at least one beam member is tightly supported and leaned on the insulation reinforcement layer; the pinpoint member is connected to the beam member; the stability of the cantilever probe structure by being tightly supported and leaned on the insulation reinforcement layer will be better.
TW97112719A 2008-04-08 2008-04-08 Multi-layer probe group and its manufacturing method TW200942827A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97112719A TW200942827A (en) 2008-04-08 2008-04-08 Multi-layer probe group and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97112719A TW200942827A (en) 2008-04-08 2008-04-08 Multi-layer probe group and its manufacturing method

Publications (2)

Publication Number Publication Date
TW200942827A true TW200942827A (en) 2009-10-16
TWI391670B TWI391670B (en) 2013-04-01

Family

ID=44868824

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97112719A TW200942827A (en) 2008-04-08 2008-04-08 Multi-layer probe group and its manufacturing method

Country Status (1)

Country Link
TW (1) TW200942827A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112444650A (en) * 2019-08-30 2021-03-05 普罗-2000有限公司 Probe head for testing display panel

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI572867B (en) * 2015-06-05 2017-03-01 Mpi Corp Probe module with feedback test function (2)
US11959941B2 (en) 2021-12-27 2024-04-16 Industrial Technology Research Institute Probe card

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW583395B (en) * 2002-03-13 2004-04-11 Scs Hightech Inc Method for producing micro probe tips
US7640651B2 (en) * 2003-12-31 2010-01-05 Microfabrica Inc. Fabrication process for co-fabricating multilayer probe array and a space transformer
TWI276805B (en) * 2005-11-10 2007-03-21 Mjc Probe Inc Probe of probe card and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112444650A (en) * 2019-08-30 2021-03-05 普罗-2000有限公司 Probe head for testing display panel

Also Published As

Publication number Publication date
TWI391670B (en) 2013-04-01

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees