200938730 九、發明說明： % 【發明所屬之技術領域】 本案係關於一種流體輸送裝置，尤指一種適用於微幫 浦結構之微液滴流體輸送裝置。 【先前技術】 目前於各領域中無論是醫藥、電腦科技、列印、能源 ❹ 等工業，產品均朝精緻化及微小化方向發展，其中微幫 浦、喷霧器、喷墨頭、工業列印裝置等產品所包含之流體 輸送結構為其關鍵技術，是以，如何藉創新結構突破其技 術瓶頸，為發展之重要内容。 請參閲第一圖A，其係為習知微幫浦結構於未作動時 之結構示意圖，習知微幫浦結構10係包含入口通道13、 微致動器15、傳動塊14、隔層膜12、壓縮室111、基板 11以及出口通道16,其中基板11與隔層膜12間係定義形 成一壓縮室Π1，主要用來儲存液體，將因隔層膜12之形 變影響而使得壓縮室111之體積受到改變。 當一電壓作用在微致動器15的上下兩極時，會產生 一電場，使得微致動器15在此電場之作用下產生彎曲而 向隔層膜12及壓縮室111方向移動，由於微致動器15係 . 設置於傳動塊14上，因此傳動塊14能將微致動器15所 產生的推力傳遞至隔層膜12,使得隔層膜12也跟著被擠 * 壓變形，即如第一圖B所示，液體即可依圖中箭號X之方 6 200938730 向流動，使由入口通道13流入後儲存於壓縮室111内的液 % 體受擠壓，而經由出口通道16流向其他預先設定之空間， 以達到供給流體的目的。 請再參閲第二圖，其係為第一圖A所示之微幫浦結構 之俯視圖，如圖所示，當微幫浦結構10作動時流體之輸 送方向係如圖中標號Y之箭頭方向所示，入口擴流器17 係為兩端開口大小不同之錐狀結構，開口較大之一端係與 入口流道191相連接，而以開口較小之一端與微壓縮室111 ® 連接，同時，連接壓縮室111及出口流道192之擴流器18 係與入口擴流器17同向設置，其係以開口較大的一端連 接於壓縮室111，而以開口較小的一端與出口流道192相 連接，由於連接於壓縮室1Π兩端之入口擴流器17及出口 擴流器18係為同方向設置，故可利用擴流器兩方向流阻 不同之特性，及壓縮室111體積之漲縮使流體產生單方向 之淨流率，以使流體可自入口流道191經由入口擴流器17 Φ 流入壓縮室111内，再由出口擴流器18經出口流道192 流出。 此種無實體閥門之微幫浦結構10容易產生流體大量 回流的狀況，所以爲促使流率增加，壓縮室111需要有較 大的壓縮比，以產生足夠的腔壓，故需要耗費較高的成本 在致動器15上。 ' 因此，如何發展一種可改善上述習知技術缺失之微液 . 滴流體輸送裝置，實為目前迫切需要解決之問題。 7 200938730 【發明内容】 « 本案之主要目的在於提供一種微液滴流體輸送裝 置，俾解決習知技術之微幫浦結構於流體的傳送過程中易 產生流體回流之現象。 為達上述目的，本案之較廣義實施態樣為提供一種微 液滴流體輸送裝置，用以傳送流體，其係包含：閥體座， 其係具有微凸結構；閥體蓋體，其係設置於閥體座上，且 Φ 具有壓力腔室以及微凸結構；閥體薄膜，其係設置於閥體 座及閥體蓋體之間，並具有至少一個閥門結構，每一閥門 結構係分別具有閥片、複數個孔洞以及複數個延伸部；複 數個暫存室，於閥體薄膜與閥體蓋體之間形成第一暫存 室，以及於閥體薄膜與閥體座之間形成第二暫存室；致動 裝置，其係包含致動器以及振動薄膜；其中，當施以操作 頻率小於20Hz於致動裝置之致動器上，致動裝置將致使 壓力腔室體積改變，進而驅動閥開關結構之啟閉作用，以 © 使流經壓力腔室之流體係達到小於lml/min的微液滴流量 傳輸。 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 有各種的變化，其皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 8 200938730 請參閱第三圖，其係為本案第一較佳實施例之流體輸 » 送裝置之結構示意圖，如圖所示，本案之流體輸送裝置20 可適用於醫藥生技、電腦科技、列印或是能源等工業，且 可輸送氣體或是液體，但不以此為限，流體輸送裝置20 主要係由閥體座21、閥體蓋體22、閥體薄膜23、複數個 暫存室、致動裝置24及蓋體25所組成，其中閥體座21、 閥體蓋體22、閥體薄膜23係形成一流體閥座201，且在 閥體蓋體22及致動裝置24之間形成一壓力腔室226，主 ® 要用來儲存流體。 該流體輸送裝置20之組裝方式係將閥體薄膜23設置 於閥體座21及閥體蓋體22之間，並使閥體薄膜23與閥 體座21及闊體蓋體22相對應設置，且在閥體薄膜23與 閥體蓋體22之間形成一第一暫存室，而在閥體薄膜23與 閥體座21之間形成一第二暫存室，並且於閥體蓋體22上 之相對應位置更設置有致動裝置24，致動裝置24係由一 ❺ 振動薄膜241以及一致動器242組裝而成，用以驅動流體 輸送裝置20之作動，最後，再將蓋體25設置於致動裝置 24之上方，故其係依序將閥體座21、閥體薄膜23、閥體 蓋體22、致動裝置24及蓋體25相對應堆疊設置，以完成 流體輸送裝置20之組裝。 其中，閥體座21及閥體蓋體22係為本案流體輸送裝 * 置20中導引流體進出之主要結構，請參閱第四圖並配合 . 第三圖，其中第四圖係為第三圖所示之閥體座的側面結構 示意圖，如圖所示，閥體座21係具有一個入口流道211 9 200938730 以及一個出口流道212，流體係可由外界輸入，經由入口 * 流道211傳送至閥體座21上表面210之一開口 213,並且’ 於本實施例中’閥體薄膜23及閥體座21之間所形成的第 二暫存室即為圖中所示之出口暫存腔215，但不以此為 限，其係由閥體座21之上表面210於與出口流道212相 對應之位置產生部分凹陷而形成，並與出口流道212相連 通，該出口暫存腔215係用以暫時儲存流體，並使該流體 由出口暫存腔215經由一開口 214而輸送至出口通道 212，再流出閥體座21之外。以及，在閥體座21上更具 有複數個凹槽結構’用以供一密封環26(如苐七圖A所示） 設置於其上，於本實施例中，閥體座21係具有環繞開口 213遞邊之凹槽216、218,及環繞於出口暫存腔215週 邊之四槽217。 讀參閱第五圖A並配合第三圖，其中第五圖a係為第 三圖所示之閥體蓋體之背面結構示意圖，如圖所示，閥體 ❹ 蓋座22係具有一上表面220及一下表面228,以及在閥體 蓋座22上亦具有貫穿上表面220至下表面228之入口閥 門通道221及出口閥門通道222，且該入口閥門通道221 係設蓼於與閥體座21之開口 213相對應之位置，而出口 閥門通道222則設置於與閥鱧座21之出口暫存腔215内 之開口 214相對應之位置，並且，於本實施例中，閥體薄 * 膜23及閥體蓋體22之間所形成之第一暫存室即為圖中所 ，示之八口暫存腔223，且不以此為限，其係由閥體蓋體22 之下表面228於與入口閥門通道221相對應之位置產生部 200938730 份凹陷而形成，且其係連通於入口閥門通道221 ° 請參閱第五圖B，其係為第五圖A之剖面結構示意 圖，如圖所示，閥體蓋體22之上表面220係部份凹陷’ 以形成一壓力腔室226，其係與致動裝置24之致動器242 相對應設置，壓力腔室226係經由入口閥門通道221連通 於入口暫存腔223，並同時與出口閥門通道222相連通’ 因此，當致動器242受電壓致動使致動裝置24上凸變形’ 造成壓力腔室226之體積膨脹而產生負壓差，可使流體經 ® 入口閥門通道221流至壓力腔室226内’其後’當施加於 致動器242的電場方向改變後，致動器242將使致動裝置 24下凹變形壓力腔室226收縮而體積減小，使壓力腔室 226與外界產生正壓力差，促使流體由出口閥門通道222 流出壓力腔室226之外，於此同時，同樣有部分流體會流 入入口闕門通道221及入口暫存室223内，然而由於此時 的入口閥門結構231(如第六圖C所示）係為使受壓而關閉 參 的狀態’故該流體不會通過入口閥片231而產生倒流的現 象，至於暫時儲存於入口暫存腔223内之流體，則於致動 器242再受電壓致動，重複使致動裝置24再上凸變形而 增加麼力腔室226體積時，再由入口暫存腔223經至入口 闊門通道221而流入壓力腔室226内，以進行流體的輸送。 另外’閥體蓋體22上同樣具有複數個凹槽結構，以 * 本實施例為例’在閥體蓋座22之上表面220係具有環繞 ， 壓力腔室226而設置之凹槽227 ’而在下表面228上則具 有環繞設置於入口暫存腔223之凹槽224、環繞設置於出 11 200938730 .口閥門通道222之凹槽225以及凹槽229 ’同樣地，上述 凹槽結構係用以供一密封環27(如第七圖A所示）設置於其 中〇 請參閱第六圖A並配合第三圖，其中第六圖a係為第 三圖所示之閥體薄膜之結構示意圖，如圖所示，閥體薄膜 23主要係以傳統加工、或黃光蝕刻、或雷射加工、或電鑄 加工、或放電加工等方式製出，且為一厚度實質上相同之 @ 薄片結構，其上係具有複數個鏤空閥開關，包含第一閥開 關以及第二閥開關，於本實施例中，第一閥開關係為入口 闕門結構231 ’而第二閥開關係為出口閥門結構232，其 中’入口閥門結構231係具有入口閥片2313以及複數個 環繞入口閥片2313週邊而設置之鏤空孔洞2312，另外， 在孔洞2312之間更具有與入口閥X 2313相連接之延伸部 2311，當閥體薄膜23承受一自壓力腔室226傳遞而來向 下之應力時’如第七圖C所示，入口閥門結構231係整個 φ 向下平貼於閥體座21之上，此時入口閥片2313會緊靠凹 槽216上密封環26突出部分，而密封住閥體座21上之開 口 213，且其外圍的鏤空孔洞2312及延伸部2311則順勢 浮貼於閥體座21之上，故因此入口閥門結構231之關閉 作用，使流體無法流出。 而當閥體薄膜23受到壓力腔室226體積增加而產生 . 之吸力作用下，由於設置於閥體座21之凹槽216内的密 , 封環26已提供入口閥門結構231 —預力（Preforce)，因而 入口閥片2313可藉由延伸部2311的支撐而產生更大之預 12 200938730 蓋緊效果，以防止逆流，當因壓力腔室226之負壓而使入 口閥門結構231往上產生位移（如第六圖B所示），此時， 流體則可經由鏤空之孔洞2312由閥體座21流至閥體蓋體 22之入口暫存腔223，並經由入口暫存腔223及入口閥門 通道221傳送至壓力腔室226内，如此一來，入口閥門結 構231即可因應壓力腔室226產生之正負壓力差而迅速的 開啟或關閉，以控制流體之進出，並使流體不會回流至閥 ©體座21上。 同樣地，位於同一閥體薄膜23上的另一閥門結構則 為出口閥門結構232,其中之出口閥片2323、延伸部2321 以及孔洞2322之作動方式均與入口閥門結構231相同， 因而不再贅述，惟出口閥門結構232週邊之密封環26設 置方向係與入口閥門結構231之密封環27反向設置，如 第六圖C所示，因而當壓力腔室226壓縮而產生一推力 時，設置於閥體蓋體22之凹槽225内的密封環27將提供 φ 出口閥門結構232 —預力（Preforce)，使得出口閥片2323 可藉由延伸部2321之支撐而產生更大之預蓋緊效果，以 防止逆流，當因壓力腔室226之正壓而使出口閥門結構232 往下產生位移，此時，流體則可經由鏤空之孔洞2322由 壓力腔室226經閥體蓋體22而流至閥體座21之出口暫存 腔215内，並可經由開口 214及出口流道212排出，如此 * 一來，則可經由出口閥門結構232開啟之機制，將流體自 - 壓力腔室226内洩出，以達到流體輸送之功能。 請參閱第七圖A，其係為本案較佳實施例之流體輸送 13 200938730 裝置之未作動狀態示意圖，於本實施例中，所有的凹槽結 構216、217、218分別設置密封環26，而凹槽224、225、 229内亦分別設置密封環27，其材質係為可耐化性佳之橡 膠材料，且不以此為限，其中，設置於閥體座21上環繞 開口 213之凹槽216内的密封環可為一圓環結構，其厚度 係大於凹槽216深度，使得設置於凹槽216内之密封環26 係部分凸出於閥體座21之上表面210構成一微凸結構， ❹ 參 因而使得貼合設置於閥體座21上之閥體薄膜23之入口間 門結構231之入口閥片2313因密封環26之微凸結構而形 成一向上***，而閥體薄膜23之其餘部分係與閥體蓋體 22相抵頂，如此微凸結構對入口閥門231頂推而產生一預 力（Preforce)作用，有助於產生更大之預蓋緊效果以防止 逆流，且由於密封環26向上***之微凸結構係位於閥體 薄膜23之入口閥門結構231處，故使入口閥門结構231 在未作動時使入口閥片2313與閥體座21之上表=21〇之 間具有一間隙，同樣地，當密封環27設置於環繞出口 門通道222之凹槽225内時，由於其密封環27係抓置於 閥體蓋體22之下表面228，因而該密封帛27吏_ 膜23之出口闕門結構向下凸出而形成-向下***於間^ 蓋體22之微凸結構’此微凸結構僅其方向與形入口 閥門結構231之微凸結構係為反向設置，然能 前述相同，因而不再資述。至於其餘分別設置於凹二 217'218及224'229以及227内之密封環26、== 主要用來分別使閥體座21與閥體薄膜23、閥體薄膜μ與 200938730 閥體蓋體22以及閥體蓋體 合時，防止流體外洩。 22與致動裝置24之間緊密貼 开心於構除了使用凹槽及密封環來搭配 於一些實施例中，閱體座21及闕體蓋 =亦:採用半導體製程，例如:黃絲刻或鑛膜或電 鑄技術，直接在閥體座21及間體蓋體22上形成。200938730 IX. Description of the invention: % [Technical field to which the invention pertains] The present invention relates to a fluid delivery device, and more particularly to a microdroplet fluid delivery device suitable for use in a micro-pull structure. [Prior Art] At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization, among which micro-pull, sprayer, inkjet head, industrial column The fluid transport structure contained in products such as printing devices is its key technology. It is how to break through its technical bottleneck with innovative structure and is an important part of development. Please refer to FIG. 1A , which is a schematic diagram of a conventional micro-pull structure when it is not actuated. The conventional micro-pull structure 10 includes an inlet channel 13 , a microactuator 15 , a transmission block 14 , and a spacer layer . The film 12, the compression chamber 111, the substrate 11 and the outlet channel 16 define a compression chamber Π1 between the substrate 11 and the interlayer film 12, mainly for storing liquid, and the compression chamber is affected by the deformation of the interlayer film 12. The volume of 111 has been changed. When a voltage is applied to the upper and lower poles of the microactuator 15, an electric field is generated, causing the microactuator 15 to bend under the action of the electric field to move toward the interlayer film 12 and the compression chamber 111, due to the slight The actuator 15 is disposed on the transmission block 14, so that the transmission block 14 can transmit the thrust generated by the microactuator 15 to the interlayer film 12, so that the interlayer film 12 is also deformed by being pressed, that is, As shown in Fig. B, the liquid can flow according to the arrow X of the figure X 200938730 in the figure, so that the liquid % body stored in the compression chamber 111 after being flowed in through the inlet passage 13 is squeezed, and flows to the other through the outlet passage 16 Pre-set space to achieve the purpose of supplying fluid. Please refer to the second figure, which is a top view of the micro-push structure shown in FIG. A. As shown in the figure, when the micro-push structure 10 is actuated, the direction of fluid transport is indicated by the arrow Y in the figure. In the direction indicated, the inlet diffuser 17 is a tapered structure having different opening sizes at both ends, one end of the larger opening is connected to the inlet flow passage 191, and one end of the smaller opening is connected to the micro compression chamber 111 ® . At the same time, the diffuser 18 connecting the compression chamber 111 and the outlet flow passage 192 is disposed in the same direction as the inlet diffuser 17, and is connected to the compression chamber 111 with a larger opening, and has a smaller opening and an outlet. The flow passages 192 are connected to each other. Since the inlet diffuser 17 and the outlet diffuser 18 connected to both ends of the compression chamber 1 are disposed in the same direction, the flow resistance of the diffuser can be utilized in different directions, and the compression chamber 111 can be utilized. The volumetric expansion causes the fluid to produce a unidirectional net flow rate such that fluid can flow from the inlet flow passage 191 into the compression chamber 111 via the inlet diffuser 17 Φ and out of the outlet flow passage 192 through the outlet flow passage 192. Such a micro-pump structure 10 without a physical valve is prone to a large amount of fluid backflow. Therefore, in order to increase the flow rate, the compression chamber 111 needs to have a large compression ratio to generate sufficient cavity pressure, so that it is expensive. The cost is on the actuator 15. Therefore, how to develop a microfluid that can improve the above-mentioned conventional technology. The drip fluid transport device is an urgent problem to be solved. 7 200938730 [Summary content] « The main purpose of the present invention is to provide a micro-droplet fluid transporting device which solves the phenomenon that the micro-pull structure of the prior art is prone to fluid recirculation during fluid transfer. In order to achieve the above object, a broader aspect of the present invention provides a microdroplet fluid transport device for transporting a fluid, comprising: a valve body seat having a micro-convex structure; a valve body cover body On the valve body seat, and Φ has a pressure chamber and a micro convex structure; a valve body film is disposed between the valve body seat and the valve body cover body, and has at least one valve structure, and each valve structure has a valve piece, a plurality of holes and a plurality of extension portions; a plurality of temporary storage chambers, forming a first temporary storage chamber between the valve body film and the valve body cover body, and forming a second between the valve body film and the valve body seat a staging chamber; an actuating device comprising an actuator and a vibrating membrane; wherein when an operating frequency of less than 20 Hz is applied to the actuator of the actuating device, the actuating device causes the pressure chamber to change in volume and thereby drive The opening and closing action of the valve switch structure is such that the flow system flowing through the pressure chamber reaches a microdroplet flow rate of less than 1 ml/min. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of 8 200938730 Please refer to the third figure, which is a schematic structural view of the fluid delivery device of the first preferred embodiment of the present invention. As shown in the figure, the fluid delivery device 20 of the present invention can be applied to medical technology, computer technology, and columns. Printing or energy industry, and can transport gas or liquid, but not limited thereto, the fluid conveying device 20 is mainly composed of a valve body seat 21, a valve body cover 22, a valve body film 23, and a plurality of temporary storage rooms. The actuating device 24 and the cover body 25 are formed, wherein the valve body seat 21, the valve body cover body 22 and the valve body film 23 form a fluid valve seat 201, and between the valve body cover body 22 and the actuating device 24 A pressure chamber 226 is formed, which is used to store fluid. The fluid transport device 20 is assembled by disposing the valve body film 23 between the valve body seat 21 and the valve body cover 22, and the valve body film 23 is disposed corresponding to the valve body seat 21 and the wide body cover 22, A first temporary storage chamber is formed between the valve body film 23 and the valve body cover 22, and a second temporary storage chamber is formed between the valve body film 23 and the valve body seat 21, and the valve body cover 22 is formed. The corresponding position is further provided with an actuating device 24, which is assembled by a diaphragm 241 and an actuator 242 for driving the fluid transport device 20, and finally, the cover 25 is set. Above the actuating device 24, the valve body seat 21, the valve body film 23, the valve body cover 22, the actuating device 24 and the cover body 25 are sequentially stacked correspondingly to complete the fluid transport device 20 Assembly. The valve body seat 21 and the valve body cover body 22 are the main structures for guiding fluid in and out of the fluid transport device 20 of the present invention, please refer to the fourth figure and cooperate. The third figure, wherein the fourth figure is the third The side structure of the valve body seat shown in the figure, as shown in the figure, the valve body seat 21 has an inlet flow path 211 9 200938730 and an outlet flow path 212, and the flow system can be input from the outside and transmitted through the inlet * flow path 211. An opening 213 to the upper surface 210 of the valve body seat 21, and the second temporary storage chamber formed between the valve body film 23 and the valve body seat 21 in the present embodiment is the outlet temporarily stored in the figure. The cavity 215, but not limited thereto, is formed by a partial depression of the upper surface 210 of the valve body seat 21 at a position corresponding to the outlet flow path 212, and communicates with the outlet flow path 212, and the outlet is temporarily stored. The chamber 215 is configured to temporarily store fluid and transport the fluid from the outlet storage chamber 215 to the outlet passage 212 via an opening 214 and out of the valve body seat 21. And, the valve body seat 21 further has a plurality of groove structures 'for a sealing ring 26 (as shown in FIG. 7A), and in the embodiment, the valve body seat 21 has a surrounding The opening 213 is provided with a groove 216, 218, and a four groove 217 surrounding the periphery of the outlet temporary cavity 215. Referring to FIG. 5A and the third figure, the fifth figure a is a schematic view of the back structure of the valve body cover shown in the third figure. As shown, the valve body cover 22 has an upper surface. The 220 and the lower surface 228, and the valve body cover 22 also has an inlet valve passage 221 and an outlet valve passage 222 extending through the upper surface 220 to the lower surface 228, and the inlet valve passage 221 is disposed adjacent to the valve body seat 21. The opening 213 corresponds to the position, and the outlet valve passage 222 is disposed at a position corresponding to the opening 214 in the outlet temporary chamber 215 of the valve seat 21, and, in the present embodiment, the valve body is thin* the membrane 23 The first temporary storage chamber formed between the valve body cover 22 and the valve body cover 22 is shown as an eight-port temporary storage chamber 223, and is not limited thereto, and is a lower surface 228 of the valve body cover body 22. The position generating portion 200938730 corresponding to the inlet valve passage 221 is formed by being recessed, and is connected to the inlet valve passage 221 °. Please refer to FIG. 5B, which is a cross-sectional structural view of FIG. It is shown that the upper surface 220 of the valve body cover 22 is partially recessed to form a pressure. The chamber 226 is disposed corresponding to the actuator 242 of the actuating device 24, and the pressure chamber 226 is in communication with the inlet temporary chamber 223 via the inlet valve passage 221 and simultaneously communicates with the outlet valve passage 222. The actuator 242 is actuated by voltage to cause the actuator device 24 to be convexly deformed, causing the volume of the pressure chamber 226 to expand to create a negative pressure differential that allows fluid to flow through the inlet valve passage 221 into the pressure chamber 226. 'When the direction of the electric field applied to the actuator 242 is changed, the actuator 242 will cause the lowering deformation pressure chamber 226 of the actuating device 24 to contract and reduce the volume, causing the pressure chamber 226 to create a positive pressure difference with the outside world. The fluid exits the pressure chamber 226 from the outlet valve passage 222. At the same time, some of the fluid also flows into the inlet and outlet passages 221 and the inlet chamber 223, however, due to the inlet valve structure 231 (e.g., the sixth) Fig. C shows a state in which the state of the parameter is closed to be pressed, so that the fluid does not flow backward through the inlet valve piece 231, and the fluid temporarily stored in the inlet temporary chamber 223 is in the actuator. 242 is subject to voltage Movable, the actuating means 24 is repeated again when the convex deformation is increased it forces the volume of the chamber 226, and then from the inlet buffer cavity 223 through the gate width to the inlet passage 221 flows into the pressure chamber 226, for delivery of fluid. In addition, the valve body cover 22 also has a plurality of groove structures. The present embodiment is exemplified by the fact that the upper surface 220 of the valve body cover 22 has a groove 227 which is surrounded by the pressure chamber 226. On the lower surface 228, there is a groove 224 disposed around the inlet temporary storage cavity 223, a groove 225 disposed around the outlet 11 200938730, the valve passage 222, and a groove 229'. Similarly, the groove structure is used for A sealing ring 27 (shown in FIG. 7A) is disposed therein. Please refer to FIG. 6A and cooperate with the third drawing. FIG. 6 is a schematic structural view of the valve body film shown in FIG. As shown, the valve body film 23 is mainly produced by conventional processing, or yellow etching, laser processing, electroforming, or electric discharge machining, and is a @sheet structure having substantially the same thickness. The upper system has a plurality of hollow valve switches, including a first valve switch and a second valve switch. In this embodiment, the first valve opening relationship is the inlet door structure 231 ' and the second valve opening relationship is the outlet valve structure 232. Where the 'inlet valve structure 231 has The valve piece 2313 and a plurality of hollow holes 2312 disposed around the periphery of the inlet valve piece 2313, and further having an extension portion 2311 connected to the inlet valve X 2313 between the holes 2312, when the valve body film 23 is subjected to a self-pressure chamber When the chamber 226 transmits the downward stress, as shown in FIG. 7C, the inlet valve structure 231 is entirely φ flatly attached to the valve body seat 21, and the inlet valve piece 2313 is sealed against the groove 216. The ring 26 protrudes from the opening 213 of the valve body seat 21, and the hollow hole 2312 and the extension portion 2311 of the outer periphery thereof are floated on the valve body seat 21, so that the closing of the inlet valve structure 231, Keep the fluid out of the flow. When the valve body film 23 is subjected to the suction of the pressure chamber 226, due to the suction provided in the groove 216 of the valve body seat 21, the seal ring 26 has provided the inlet valve structure 231 - Preforce (Preforce) Therefore, the inlet valve piece 2313 can generate a larger pre- 12 200938730 capping effect by the support of the extension portion 2311 to prevent backflow, and the inlet valve structure 231 is displaced upward due to the negative pressure of the pressure chamber 226. (As shown in FIG. 6B), at this time, the fluid can flow from the valve body seat 21 to the inlet temporary storage chamber 223 of the valve body cover 22 via the hollow hole 2312, and through the inlet temporary storage chamber 223 and the inlet valve. The passage 221 is transferred into the pressure chamber 226, so that the inlet valve structure 231 can be quickly opened or closed in response to the positive and negative pressure difference generated by the pressure chamber 226 to control the ingress and egress of fluid and prevent the fluid from flowing back to the fluid. Valve © body seat 21. Similarly, the other valve structure on the same valve body film 23 is the outlet valve structure 232, wherein the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the inlet valve structure 231, and thus will not be described again. However, the sealing ring 26 around the outlet valve structure 232 is disposed in a direction opposite to the sealing ring 27 of the inlet valve structure 231, as shown in FIG. 6C, and thus is set when the pressure chamber 226 is compressed to generate a thrust. The seal ring 27 in the recess 225 of the valve body cover 22 will provide a φ outlet valve structure 232 - Preforce, such that the outlet valve plate 2323 can be provided with a greater pre-tightening effect by the support of the extension 2321. In order to prevent backflow, when the outlet valve structure 232 is displaced downward due to the positive pressure of the pressure chamber 226, at this time, the fluid can flow from the pressure chamber 226 through the valve body cover 22 through the hollow hole 2322 to the pressure chamber 226. The outlet of the valve body seat 21 is temporarily stored in the cavity 215 and can be discharged through the opening 214 and the outlet flow path 212. Thus, the fluid can be drained from the pressure chamber 226 via the mechanism of the opening of the outlet valve structure 232. Out In order to achieve delivery of the functional fluid. Please refer to FIG. 7A, which is a schematic diagram of the unactuated state of the fluid delivery 13 200938730 device of the preferred embodiment of the present invention. In this embodiment, all the groove structures 216, 217, 218 are respectively provided with a sealing ring 26, and A sealing ring 27 is also disposed in the recesses 224, 225, and 229, and is made of a rubber material which is excellent in chemical resistance, and is not limited thereto. The recess 216 is disposed on the valve body seat 21 around the opening 213. The inner sealing ring can be a ring structure having a thickness greater than the depth of the groove 216, so that the sealing ring 26 disposed in the groove 216 protrudes from the upper surface 210 of the valve body seat 21 to form a micro convex structure. The inlet valve piece 2313 of the inlet door structure 231 of the valve body film 23 which is disposed on the valve body seat 21 thus forms an upward bulge due to the micro-convex structure of the sealing ring 26, and the rest of the valve body film 23 The part is abutted against the valve body cover 22, such that the micro-convex structure pushes the inlet valve 231 to generate a pre-force effect, which contributes to a greater pre-covering effect to prevent backflow, and due to the sealing ring 26 uplifted micro-convex structure At the inlet valve structure 231 of the valve body film 23, the inlet valve structure 231 has a gap between the inlet valve piece 2313 and the upper surface of the valve body seat 21 when the valve body 231 is not actuated, and similarly, when the sealing ring When the sealing ring 27 is gripped on the lower surface 228 of the valve body cover 22, the sealing ring 27 of the film 23 is disposed downwardly in the recess 225 surrounding the outlet door passage 222. Protruding to form a micro-convex structure that bulges downwardly from the cover body 22. This micro-convex structure is only disposed in the opposite direction to the micro-convex structure of the shape-inlet valve structure 231, but the foregoing is the same, and thus no longer Capital statement. The remaining seal rings 26, = are respectively disposed in the recesses 217'218 and 224'229 and 227, respectively, for mainly making the valve body seat 21 and the valve body film 23, the valve body film μ and the 200938730 valve body cover 22, respectively. And when the valve body cover is combined, the fluid is prevented from leaking out. 22 and the actuating device 24 are closely attached to the use of the groove and the sealing ring to be used in some embodiments, the reading body 21 and the body cover = also: using a semiconductor process, such as: yellow wire or mine The film or electroforming technique is formed directly on the valve body seat 21 and the interbody cover body 22.
請同時參閱第七圖A、B、C，如圖所示，當蓋體& 致動裝置24、閥體蓋體22、閥體薄膜23、密封環％以及 閥體座21彼此對應組裝設置後，閥體座21上之開口 213 係與閥體薄膜23上之入口閥門結構231以及閥體蓋體22 上之入口閥門通道221相對應，且閥體座21上之開口 214 則與閥體薄膜23上之出口閥片232以及閥體蓋體22上之 出口閥門通道222相對應，並且，由於密封環26設置於 凹槽216内，使得閥體薄膜23之入口閥門結構231微凸 起於閥體座21之上’並藉由位於凹槽216内之密封環26 頂觸閥體薄膜23而產生一預力（(Preforce)作用’使得入口 閥門結構231在未作動時則與閥體座21之上表面210形 成一間隙，同樣地，出口閥門結構232亦藉由將密封環27 設至於凹槽225中的相同方式與閥體蓋體22之下表面228 形成一間隙。 當以一電壓驅動致動器242時，致動裝置24產生彎 曲變形，如第七圖B所示，致動裝置24係朝箭號a所指 之方向向上彎曲變形，使得壓力腔室226之體積增加，因 而產生一吸力，使閥體薄膜23之入口閥門結構231、出口 15 200938730 閥門結構232承受一向上之拉力，並使已具有一預力 (Preforce)之入口閥門結構231之入口閥片2313迅速開啟 (如第六圖B所示），使液體可大量地自閥體座21上之入口 通道211被吸取進來，並流經閥體座21上之開口 213、閥 體薄膜23上之入口閥門結構231之孔洞2312、閥體蓋體 22上之入口暫存腔223、入口閥片通道221而流入壓力腔 室226之内，此時，由於閥體薄膜23之入口閥門結構23卜 出口閥門結構232承受該向上拉力’故位於另一端之出口 ® 閥門結構232係因該向上拉力使得位於閥體薄膜23上之 出口閥片2323密封住出口閥門通道222,而使得出口閥門 結構232關閉，因而流體逆流。 當致動裝置24因電場方向改變而如第七圖C所示之 箭號b向下彎曲變形時’則會壓縮壓力腔室226之體積， 使得壓力腔室226對内部之流體產生一推力’並使闕體薄 膜23之入口閥門结構231、出口閥門結構232承受一向下 ❿推力，此時，設置於凹槽225内之密封環27上出口閥門 結構232的出口閥片2323其可迅速開啟（如第六圖C所 示），並使液體瞬間大量宣洩，由壓力腔室226經由閥體蓋 體22上之出口閥通道222、閥體薄膜23上之出口閥門 結構232之孔洞23之2、閥體座21上之出口暫存腔215、 開口 214及出口通道212而流出流體輪送裝置20之外， * 因而完成流體之傳輸過程，同樣地，此時由於入口閥門結 - 構231係承受該向卞之推力，因而使得入口閥片2313密 封住開口 213，因而關閉入口閥門結構231，使得流體不 16 200938730 a 逆流’並且’藉由入口閥門結構231及出口閥門結構232 配合設置於閥體座21及閥體蓋體22上之凹槽216、225 内的密封環26、27之設計’可使流體於傳送過程中不會 產生回流的情形，達到高效率之傳輸。 本案之流體輸送裝置之閥體薄膜的入口間門結構及 出口閥門結構的實施態樣並不僅侷限於第三圖及第六圖A 所示之入口閥門結構231及出口閥門結構232的型態，亦 0 可使用具有相同厚度’相同材料，但是剛性不同的閥”結 構，其中，閥門結構的剛性取決於閥門結構的外觀型態、 所包含之延伸部的寬度及數量，並配合控制致動裝置24 之震動頻率來調整流體的流量，請參閲第八圖Α〜Ε，其 係為本案較佳實施例之閥門結構之結構示意圖，如第八圖 A所示，閥門結構81具有閥片811、環繞閥片811週邊而 設置之鏤空孔洞812’以及在孔洞812之間更分別具有與 閥片811相連接之延伸部813，於本實施例中閥片811為 ❹一圓形結構’孔洞812的數量可為3，至於，延伸部813 的數量為3且其形狀可呈現直線型態，但上述閥片811形 狀、孔洞812以及延伸部813的數量及形狀並不以此為限。 請再參閱第八圖B ’於一些實施例中，閥門結構82 同樣具有閥片821、孔洞822以及延伸部823，至於閥片 821、孔洞822以及延伸部823之間的連接關係係於上述 • 相同’因此不在述贅述，於本實施例中，閥片821為一圓 ' 形結構，孔洞822的數量可為3，至於，延伸部823的數 量為3且其形狀可呈現切線型態，但閥片821形狀、孔洞 17 200938730 % 822以及延伸部823的數量及形狀並不以此為限。 請再參閱第八圖C，於一些實施例中，閥門結構83 同樣具有閥片831、孔洞832以及延伸部833 ’至於閥片 831、孔洞832以及延伸部833之間的連接關係係於上述 相同，因此不在述贅述，於本實施例中，閥片831為一圓 形結構，孔洞832的數量可為4，至於，延伸部833的數 量為4且其形狀可呈現S形型態，但閥片831、孔洞832 以及延伸部833的數量及形狀並不以此為限。 請再參閱第八圖D，於一些實施例中，閥門結構84 同樣具有閥片841、孔洞842以及延伸部843 ’至於閥片 841、孔洞842以及延伸部843之間的連接關係係於上述 相同，因此不在述贅述，於本實施例中，閥片841為一類 似圓形結構且其周圍具有齒狀結構8411，孔洞842的數量 可為3 ’至於，延伸部843的數量為3且其形狀可呈現直 線型態，但閥片841形狀、孔洞842以及延伸部843的數 ⑩ 量及形狀並不以此為限。 請再參閱第八圖E，於一些實施例中，閥門結構85 同樣具有閥片851、孔洞852以及延伸部853，至於閥片 851、孔洞852以及延伸部853之間的連接關係係於上述 相同’因此不在述贅述，於本實施例中，閥片851為一類 似圓形結構且其周圍具有齒狀結構8511，孔洞852的數量 可為3 ’至於，延伸部853的數量為3且其形狀可呈現切 ' 線型態’但閥片851形狀、孔洞852以及延伸部853的數 量及形狀並不以此為限。 18 200938730 當然，本案之流體輸送裝置之閥體薄膜上所適用之閥 門結構的實施態樣並不僅限於第八圖A〜E所揭露的型 態，亦可由其它的變化，只要是使用具有相同厚度，相同 材料，但是剛性不同的閥門結構均為本案所保護之範圍。 致動裝置24内之致動器242係為一壓電板，可採用 高壓電係數之錯鈦酸鉛(PZT)系列的壓電粉末製造而成其 中致動器242的厚度可介於1〇〇/zm至5〇〇//m之間，較 ❹佳厚度為I50 # m至250 # m，揚氏係數係為1〇〇至 150GPa ’且不以此為限。而致動器242的材質可為一單層 金屬所構成或是可為金屬材料上貼附一層高分子材料所 構成之雙層結構。 而貼附致動器242之振動薄膜241之厚度可為1〇〇仁 m至300/zm，較佳厚度為100私m至25〇//ιη，亦可為1〇 以m至200# m ’較佳厚度為20// m至100以m，其揚氏係 數可介於60〜300Gpa。振動薄膜241其材質可為一單層金 ❹ 屬所構成，例如不銹鋼材料，其楊氏係數係為240Gpa，厚 度可介於30#m至80#m’或是200// m至250y m，例 如銅’其楊氏係數係為lOOGpa，厚度係介於30//m至80 β m，或是200 # m至250 "m，且不以此為限。 另外，於本實施例中，閥體座21以及閥體蓋體22之 材質係可採用熱塑性塑膠材料，例如聚碳酸酯樹酯 (Polycarbonate PC)、聚諷（Polysulfone，PSF)、ABS 樹脂 (Acrylonitrile Butadiene Styrene)、縱性低密度聚乙烯 (LLDPE)、低密度聚乙烯(LDPE)、高密度聚乙烯(HDPE)、 200938730 聚丙稀(PP)、聚苯硫醚(Polyphenylene Sulfide，PPS)、對位 性聚苯乙烯（SPS)、聚苯醚（PPO)、聚縮醛 (Polyacetal，POM)、聚對苯二甲酸二丁酯（PBT)、聚偏氟乙 烯(PVDF)、乙烯四氟乙烯共聚物(ETFE)、環狀烯烴聚合物 (COC)等熱塑性塑膠材料，但不以此為限。 於本實施例中，閥體蓋體22之壓力腔室226之深度 係介於10//m至300//m之間，直徑可介於10~ 30mm或 是3~ 20mm之間，且不以此為限。 〇 而閥體薄膜23可以傳統加工或黃光蝕刻或雷射加工 或電鑄加工或放電加工等方式製出，其材質可為任何耐化 性佳之有機高分子材料或金屬，當閥體薄膜23採用該高 分子材料，其彈性係數為2~ 20 Gpa，例如聚亞醯胺 (Polyimide，PI)，其彈性係數，即楊氏係數（E值）可為 lOGPa，當閥體薄膜23採用金屬材料時，例如鋁、鋁合金、 錄、鎳合金、銅、銅合金或不鏽鋼等金屬材料，其楊氏係 ❹ 數係為2~240GPa。至於閥體薄膜23之厚度係為一致，且 可介於10私m至50//m，最佳者為21em至40//m，其 楊氏係數可為2~ 240GPa。另外，於本實施例中，閥體薄 膜23所包含之入口閥門結構231及出口閥門結構232的 延伸部2311、2321的數量必須大於2、寬度可介於10〜 500# m、形狀可為如第八圖a〜E所示之直線型態、切線 • 型態或是S形型態，但不以此為限，且延伸部2311、2321 所在位置之兩同心圓的直徑範圍，其内徑/外徑範圍可為： 2mm/3mm、2.2mm/3.5mm、3mm/5mm、4mm/6mm、 20 200938730 4mm/7mm或是4mm/8mm ’但不以此為限。至於，入口閥 片2313及出口閥片2323的直徑大小範圍可介於2〜4mm。 ❹Please refer to the seventh figure A, B, and C at the same time. As shown in the figure, when the cover & actuating device 24, the valve body cover 22, the valve body film 23, the sealing ring % and the valve body seat 21 are assembled correspondingly with each other, Thereafter, the opening 213 in the valve body seat 21 corresponds to the inlet valve structure 231 on the valve body membrane 23 and the inlet valve passage 221 on the valve body cover 22, and the opening 214 on the valve body seat 21 is connected to the valve body. The outlet valve piece 232 on the film 23 and the outlet valve passage 222 on the valve body cover 22 correspond to each other, and since the seal ring 26 is disposed in the groove 216, the inlet valve structure 231 of the valve body film 23 is slightly convex. Above the valve body seat ' and by the seal ring 26 located in the groove 216, the valve body film 23 is contacted to generate a pre-force (preforce action) such that the inlet valve structure 231 is in contact with the valve body seat when not in operation The upper surface 210 of the 21 forms a gap. Similarly, the outlet valve structure 232 also forms a gap with the lower surface 228 of the valve body cover 22 in the same manner as the sealing ring 27 is disposed in the recess 225. When the actuator 242 is driven, the actuating device 24 produces a bending deformation, as shown in the seventh figure. As shown in B, the actuating device 24 is bent upwardly in the direction indicated by the arrow a, so that the volume of the pressure chamber 226 is increased, thereby generating a suction force, such that the inlet valve structure 231 of the valve body film 23, the outlet 15 200938730 valve The structure 232 is subjected to an upward pulling force and causes the inlet valve piece 2313 of the inlet valve structure 231 having a pre-force to be quickly opened (as shown in FIG. 6B) so that the liquid can be largely supplied from the valve body seat 21. The upper inlet passage 211 is sucked in and flows through the opening 213 on the valve body seat 21, the hole 2312 of the inlet valve structure 231 on the valve body film 23, the inlet temporary chamber 223 on the valve body cover 22, and the inlet valve. The sheet passage 221 flows into the pressure chamber 226. At this time, since the inlet valve structure 23 of the valve body film 23 and the outlet valve structure 232 are subjected to the upward pulling force, the outlet valve structure 232 at the other end is due to the upward pulling force. The outlet valve plate 2323 located on the valve body membrane 23 seals the outlet valve passage 222 such that the outlet valve structure 232 is closed and the fluid is reversed. When the actuation device 24 changes direction due to the electric field, as shown in FIG. When the arrow b is bent downward, 'the volume of the pressure chamber 226 is compressed, so that the pressure chamber 226 generates a thrust to the internal fluid' and the inlet valve structure 231 and the outlet valve structure 232 of the body film 23 are subjected to a downward thrust, at this time, the outlet valve piece 2323 of the outlet valve structure 232 disposed on the seal ring 27 in the recess 225 can be quickly opened (as shown in FIG. 6C), and the liquid is instantaneously vented. The pressure chamber 226 passes through the outlet valve passage 222 on the valve body cover 22, the hole 23 of the outlet valve structure 232 on the valve body membrane 23, the outlet temporary chamber 215 on the valve body seat 21, the opening 214 and the outlet passage. 212 and out of the fluid transfer device 20, thus completing the fluid transfer process, and likewise, since the inlet valve junction 231 is subjected to the thrust of the thrust, the inlet valve piece 2313 seals the opening 213, The inlet valve structure 231 is thus closed such that the fluid does not countercurrently 'and' the recesses 216, 225 that are disposed on the valve body seat 21 and the valve body cover 22 by the inlet valve structure 231 and the outlet valve structure 232. The rings 26 and 27 seal design 'in the fluid can transfer process does not produce reflux case, to achieve high transmission efficiency. The embodiment of the inlet door structure and the outlet valve structure of the valve body film of the fluid delivery device of the present invention is not limited to the types of the inlet valve structure 231 and the outlet valve structure 232 shown in the third and sixth figures. Also 0 can use a valve of the same thickness 'the same material, but different stiffness' structure, wherein the rigidity of the valve structure depends on the appearance of the valve structure, the width and number of extensions included, and with the control of the actuator The vibration frequency of 24 is used to adjust the flow rate of the fluid. Please refer to FIG. 8A, which is a schematic structural view of the valve structure of the preferred embodiment of the present invention. As shown in FIG. 8A, the valve structure 81 has a valve piece 811. The hollow hole 812' disposed around the periphery of the valve plate 811 and the extending portion 813 connected to the valve piece 811 are respectively disposed between the holes 812. In the embodiment, the valve piece 811 has a circular structure of the hole 812. The number of the extending portions 813 is 3, and the shape thereof can be linear, but the shape and shape of the valve piece 811, the holes 812, and the extending portion 813 are not Referring again to FIG. 8B, in some embodiments, the valve structure 82 also has a valve plate 821, a hole 822, and an extension portion 823. The connection relationship between the valve piece 821, the hole 822, and the extension portion 823 is as described above. In the present embodiment, the valve piece 821 has a circular '-shaped structure, and the number of the holes 822 can be three. As for the number of the extending portions 823, the shape of the extending portion 823 is three and the shape can be tangential, but The shape of the valve plate 821, the number of holes 17 200938730 % 822, and the number of extensions 823 are not limited thereto. Referring again to FIG. 8C, in some embodiments, the valve structure 83 also has a valve plate 831, a hole 832. The connection relationship between the extension portion 833' and the valve piece 831, the hole 832, and the extension portion 833 is the same as described above, and therefore, the description will not be repeated. In the present embodiment, the valve piece 831 has a circular structure, and the number of the holes 832 4, as for the number of the extensions 833 is 4 and the shape thereof can be S-shaped, but the number and shape of the valve piece 831, the hole 832 and the extension 833 are not limited thereto. Figure D, in some real In the embodiment, the valve structure 84 also has the valve piece 841, the hole 842 and the extending portion 843 '. The connection relationship between the valve piece 841, the hole 842 and the extending portion 843 is the same as above, and therefore will not be described in detail. The valve piece 841 has a circular structure and has a toothed structure 8411 around it. The number of the holes 842 may be 3'. As for the number of the extensions 843 is 3 and the shape thereof can be linear, the valve piece 841 The shape, the hole 842, and the number and shape of the extension 843 are not limited thereto. Referring again to FIG. 8E, in some embodiments, the valve structure 85 also has a valve plate 851, a hole 852, and an extension 853. The connection relationship between the valve piece 851, the hole 852 and the extending portion 853 is the same as that described above. Therefore, in the present embodiment, the valve piece 851 has a circular structure and has a toothed structure 8511 around it. The number of holes 852 may be 3 '. As for the number of extensions 853 being 3 and the shape thereof may take a 'line shape', the number and shape of the valve piece 851, the hole 852, and the extension 853 are not limit. 18 200938730 Of course, the embodiment of the valve structure applied to the valve body film of the fluid conveying device of the present invention is not limited to the type disclosed in the eighth drawing A to E, and may be changed by other factors as long as the same thickness is used. The same material, but the valve structure with different rigidity is the scope protected by this case. The actuator 242 in the actuating device 24 is a piezoelectric plate, which can be fabricated by using a piezoelectric powder of high-voltage electric coefficient lead-lead titanate (PZT) series, wherein the thickness of the actuator 242 can be between 1 〇〇 / zm to 5 〇〇 / / m, better than the thickness of I50 # m to 250 # m, Young's coefficient is 1 〇〇 to 150GPa 'and not limited to this. The material of the actuator 242 may be a single layer of metal or a double layer structure in which a layer of polymer material is attached to the metal material. The thickness of the vibrating film 241 attached to the actuator 242 may be from 1 to 300/zm, preferably from 100 to 25 Å, or from 1 to 200 Å. 'The preferred thickness is 20//m to 100 m, and the Young's modulus can be between 60 and 300 GPa. The vibrating film 241 may be made of a single layer of a metal ruthenium, such as a stainless steel material, having a Young's modulus of 240 GPa and a thickness ranging from 30 #m to 80 #m' or 200//m to 250 ym. For example, copper has a Young's coefficient of lOOGpa, a thickness of 30//m to 80 β m, or 200 #m to 250 "m, and is not limited thereto. In addition, in the embodiment, the material of the valve body seat 21 and the valve body cover 22 can be made of a thermoplastic plastic material, such as polycarbonate (Polycarbonate PC), Polysulfone (PSF), ABS resin (Acrylonitrile). Butadiene Styrene), LLDPE, LDPE, HDPE, 200938730 Polypropylene (PP), Polyphenylene Sulfide (PPS), Polystyrene (SPS), polyphenylene oxide (PPO), polyacetal (POM), polybutylene terephthalate (PBT), polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene copolymer (ETFE), thermoplastic polymer materials such as cyclic olefin polymer (COC), but not limited to this. In this embodiment, the pressure chamber 226 of the valve body cover 22 has a depth of between 10//m and 300/m, and the diameter may be between 10 and 30 mm or between 3 and 20 mm. This is limited to this. The valve body film 23 can be produced by conventional processing or yellow etching or laser processing or electroforming or electric discharge machining, and the material thereof can be any organic polymer material or metal with good chemical resistance, when the valve body film 23 The polymer material has a modulus of elasticity of 2-20 Gpa, such as Polyimide (PI), and the elastic coefficient, that is, the Young's modulus (E value) can be 10 GPa, and the valve body film 23 is made of a metal material. In the case of a metal material such as aluminum, aluminum alloy, nickel, alloy, copper, copper alloy or stainless steel, the Young's number is 2 to 240 GPa. The thickness of the valve body film 23 is uniform and may range from 10 private to 50/m, preferably from 21 to 40/m, and the Young's modulus may be from 2 to 240 GPa. In addition, in this embodiment, the number of the extensions 2311, 2321 of the inlet valve structure 231 and the outlet valve structure 232 included in the valve body film 23 must be greater than 2, the width may be between 10 and 500 # m, and the shape may be as The linear form, the tangent line type or the S-shaped type shown in the eighth figure a to E, but not limited thereto, and the diameter range of the concentric circles of the position where the extending portions 2311 and 2321 are located, the inner diameter thereof The outer diameter range can be: 2mm/3mm, 2.2mm/3.5mm, 3mm/5mm, 4mm/6mm, 20 200938730 4mm/7mm or 4mm/8mm 'but not limited to this. As for the inlet valve piece 2313 and the outlet valve piece 2323, the diameter may range from 2 to 4 mm. ❹
於一些實施例中，爲了因應流速可達到一般1〜 60ml/min的流量流體傳輸需求，可於致動裝置24之致動 器242上施予大於5Hz的操作頻率，並配合以下條件： 致動器242之厚度約為^至500 // m之剛性特 性’較佳厚度為15〇私m至25〇 β m，楊氏係數約為 100-150Gpa’至於材料可為單層金屬或是由金屬材料與高 分子材料所構成之雙層結構。 以及振動薄膜241之厚度為1〇〇// m至3〇〇以m之間， 較佳厚度為l〇〇#m至25〇Αΐη，楊氏係數為6〇_3〇〇GPa , 其材質可為一單層金屬所構成，例如不錄鋼材料，其楊氏 係數係為240Gpa，厚度係介於2〇〇//111至25〇#m，例如 銅金屬材料’其楊氏係數係為1G()Gpa，厚度係介於2叫 m至250/zm，但不以此為限。 該壓力腔室226之深度係介於1〇鋒至⑽㈣之 間，直經介於之間。閥體座21以及 之材質係可採用隸性㈣㈣，且 厚度係一致。 閥體薄膜23上之入口閥門結構2 232之厚度為1心m至50" m，較佳厚出〇閥門結構 以m，揚氏係數為2~240Gpa，可為高分子 以m主叫 料’閥體薄膜23採用該高分子材料 材料或金屬材 具彈性係叙 GPa’例如聚亞酿胺(Polyimide，Pi)，其彈 、致為2 '、*係數為i〇Gpa， 21 200938730 閥體薄膜23亦可採用金屬材料，例如鋁、鋁合金、錄、 鎳合金、銅、銅合金或不鏽鋼等金屬材料，其揚氏係數係 為 2~ 240Gpa。 以及，閥體薄膜23所包含之入口閥門結構231及出 口闊門結構232的延伸部2311、2321的數量必須大於2、 寬度可介於10〜500/zm、形狀可為如第八圖A〜E所示之 直線型態、切線型態或是S形型態，但不以此為限，且延 ❹伸部2311、2321所在位置之兩同心圓的直徑範圍，其内 徑/外徑範圍可為：2mm/3mm、2.2mm/3.5mm、3mm/5mm、 、4mm/7mm或是4mm/8mm，但不以此為限。至 於，入口閥片2313及出口閥片2323的直徑大小範圍可介 於2〜4mm。該閥體薄膜23的預力作用結構為密封環。 由上述致動器242、振動薄膜241、壓力腔室226及 闊體薄膜23等相關參數條件搭配，則可獎動閥體薄膜23 之入口閥門結構231及出口閥門結構232進行啟閉作用， _ 驅使流體進行單向流動，並使流經壓力腔室226的流體能 達到每分鐘Γ60ιη1的流量輸出，並使得將流體吸入流體 輸送裝置内部之吸力可小於2〇kPa，而將流體由流體輸送 裝置内部推出的壓力可小於5〇kpa。 於一些實施例中’爲了因應流速可達到大於6〇ml/min 的大流量流體傳輸需求’可於致動裝置24之致動器242 上施予大於30Hz的操作頻率，並配合以下條件： 致動器242之厚度約為loo# m至5〇〇# m之剛性特 性，較佳厚度為150以m至25〇 " m，楊氏係數約為 22 200938730 HKMSGGpa’至於材料可為單層金屬或是*金屬材料斑高 分子材料所構成之雙層結構。 以及振動薄膜241之厚度為1〇〇//111至3〇 較佳厚度為100//m至250am，楊氏係數為6〇 3〇〇Gpa， 其材質可為一單層金屬所構成，例如不銹鋼材料，其楊氏 係數係為240Gpa，厚度係介於2〇〇以m至25 i 銅金屬材料，其楊氏係數係為1〇〇Gpa，厚度係介於 m至250/zm，但不以此為限。 、 該壓力腔室226之深度係介於1〇//111至3㈨瓜之 間，直經介於ΗΓ 30mm之間。闕體座21以 = 之材質係可採賴塑性塑膠材料，且_蓋體^ 胃 厚度係一致。 閥體薄膜23上之入口閥門結構231、 ❹ 232之厚度為，較佳厚度為^閾門= 从m，揚氏係數為：T240Gpa，可為高八 1以m至40 料，閥體薄膜23採用該高分子材料间材料或金屬材 Gpa ’例如聚亞醯胺(Polyimide，π)，其、性係數為：Γ 20 闕體薄膜23亦可採用金屬材料，例如叙生係數為lOGpa’ 鎳合金、銅、銅合金或不鏽鋼等金屬材、鋁合金、鎳、 為2~240Gpa。 科’其楊氏係數係 以及，閥體薄膜23所包含之入口 口閥門結構232的延伸部2311、2321閩門結構231及出 寬度可介於10〜500#m、形狀可為如量必須大於2、 直線型態、切線型態或是8形型態，V圈八〜E所示之 —不以此為限，且延 23 200938730 伸部2311、2321所在位置之兩同心圓的直徑範圍，其内 控/外徑範圍可為：2mm/3mm、2.2mm/3.5mm、3mm/5mm、 4mm/6mm、4mm/7mm或是4mm/8mm，但不以此為限。至 於，入口閥片2313及出口閥片2323的直徑大小範圍可介 於2〜4mm »該閥體薄膜23的預力作用結構為密封環。 由上述致動器242、振動薄膜241、壓力腔室226及 閥體薄膜23等相關參數條件搭配，則可驅動閥體薄膜23 ❹ 之入口閥門結構231及出口閥門結構232進行啟閉作用， 驅使流體進行單向流動，並使流經壓力腔室226的流體能 達到每分鐘60ml以上的大流量輸出，並使得將流體吸入 流體輸送裝置内部之吸力可大於2〇kPa，而將流體由流體 輸送裝置内部推出的壓力可大於3〇kPa。 於一些實施例中，爲了因應流速小於lml/min的微液 滴流量流體傳輸需求，可於致動裝置24之致動器242上 施予小於20Hz的操作頻率，並配合以下條件： ❷ 致動器242之厚度約為5〇〇厂m之剛性特 性，較佳厚度為15〇从m至25〇仁m ,揚氏係數約為 100-150Gpa’至於材料可為單層金屬或是由金屬材料與高 分子材料所構成之雙層結構。 以及振動薄膜241之厚度為10#111至200#m之間’ 較佳厚度為20#m至loo^m，楊氏係數為6〇_3〇〇GPa， 其材質可為一單層金屬所構成，例如不銹鋼材料，其楊氏 係數係為240Gpa，厚度係介於3〇#m至8〇//m，例如銅 金屬材料，其楊氏係數係為lOOGpa，厚度係介於30//m 24 200938730 至80/z m，但不以此為限。 該壓力腔室226之深度係介於lo^m至300/zm之 間’直徑介於3~ 20mm之間。閥體座21以及閥體蓋體22 之材質係可採用熱塑性塑膠材料，且閥體蓋體22之整體 厚度係一致。 閥體薄膜23上之入口閥門結構231、出口閥門結構 232之厚度為lOem至50#m ’較佳厚度為2l#m至40 ❻ #m，楊氏係數為2~240Gpa，可為高分子材料或金屬材 料，閥體薄膜23採用該高分子材料，其彈性係數為2~20In some embodiments, an operating frequency greater than 5 Hz may be applied to the actuator 242 of the actuator 24 in response to a flow rate fluid delivery requirement of typically 1 to 60 ml/min in response to the flow rate, in conjunction with the following conditions: The thickness of the device 242 is about ^ to 500 // m. The preferred thickness is preferably 15 〇 private m to 25 〇 β m, and the Young's modulus is about 100-150 Gpa. The material may be a single layer of metal or a metal. A two-layer structure composed of a material and a polymer material. And the thickness of the vibrating film 241 is between 1 〇〇//m and 3 〇〇m, preferably l〇〇#m to 25〇Αΐη, and the Young's coefficient is 6〇_3〇〇GPa, the material thereof It can be composed of a single layer of metal, such as a non-recorded steel material, with a Young's modulus of 240 GPa and a thickness of 2 〇〇//111 to 25 〇 #m. For example, a copper metal material has a Young's coefficient of 1G () Gpa, the thickness is between 2 and 250 / zm, but not limited to this. The depth of the pressure chamber 226 is between 1 〇 and (10) (4), between the straight passes. The body of the valve body 21 and the material can be made of the same (4) and (4), and the thickness is the same. The thickness of the inlet valve structure 2 232 on the valve body film 23 is 1 center m to 50 " m, preferably thicker than the valve structure in m, the Young's coefficient is 2~240 Gpa, and the polymer can be called m material. The valve body film 23 is made of the polymer material or the metal material, and the elastic material is called GPA', such as polyimide (Pi), and the bomb is 2', the coefficient is i〇Gpa, 21 200938730. 23 can also be made of metal materials, such as aluminum, aluminum alloy, recording, nickel alloy, copper, copper alloy or stainless steel and other metal materials, the Young's coefficient is 2 ~ 240Gpa. The number of the extensions 2311 and 2321 of the inlet valve structure 231 and the outlet gate structure 232 included in the valve body film 23 must be greater than 2, the width may be 10 to 500/zm, and the shape may be as shown in FIG. The linear type, tangential type or S-shaped type shown by E, but not limited thereto, and the diameter range of the two concentric circles of the position where the extension portions 2311 and 2321 are located, the inner diameter/outer diameter range Can be: 2mm / 3mm, 2.2mm / 3.5mm, 3mm / 5mm, 4mm / 7mm or 4mm / 8mm, but not limited to this. As a result, the inlet valve piece 2313 and the outlet valve piece 2323 may have a diameter ranging from 2 to 4 mm. The pre-action structure of the valve body film 23 is a seal ring. By the combination of the above-mentioned actuator 242, the diaphragm 241, the pressure chamber 226, and the wide-body film 23, the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 can be opened and closed, _ Driving the fluid in a one-way flow, and allowing the fluid flowing through the pressure chamber 226 to reach a flow output of Γ60 ηη1 per minute, and allowing the suction of the fluid into the fluid delivery device to be less than 2 kPa, and the fluid from the fluid delivery device The internal pressure can be less than 5〇kpa. In some embodiments, 'a large flow fluid delivery requirement of greater than 6 〇 ml/min may be achieved in response to a flow rate'. An operating frequency greater than 30 Hz may be applied to the actuator 242 of the actuator 24 in conjunction with the following conditions: The thickness of the actuator 242 is about loo# m to 5 〇〇 # m, and preferably has a thickness of 150 m to 25 〇" m, and a Young's modulus of about 22 200938730 HKMSGGpa'. The material may be a single layer of metal. Or a double-layer structure composed of a metal material plaque polymer material. The vibrating film 241 has a thickness of 1 〇〇//111 to 3 〇, preferably has a thickness of 100//m to 250 am, and a Young's modulus of 6〇3〇〇Gpa, and the material thereof can be composed of a single layer of metal, for example, Stainless steel material with a Young's coefficient of 240 Gpa and a thickness of 2 to 25 μm of copper metal. The Young's coefficient is 1〇〇Gpa and the thickness is between m and 250/zm, but not This is limited to this. The depth of the pressure chamber 226 is between 1 〇//111 and 3 (nine) melons, and the straight line is between ΗΓ30 mm. The body of the body 21 is made of plastic material, and the thickness of the body is the same. The thickness of the inlet valve structure 231, ❹ 232 on the valve body film 23 is preferably a thickness of ^ threshold gate = from m, and the Young's modulus is: T240 Gpa, which can be a height of eight to one m to 40, and the valve body film 23 The material of the polymer material or the metal material Gpa 'such as polyimide (π), the coefficient of which is: Γ 20 阙 body film 23 can also be made of a metal material, for example, the coefficient of birth is lOGpa' nickel alloy Metal materials such as copper, copper alloy or stainless steel, aluminum alloy and nickel are 2 to 240 GPa. The 'the Young's coefficient system and the extension portion 2311, 2321 of the inlet valve structure 232 included in the valve body film 23 may have a width Between 10 and 500 #m, and the shape may be greater than 2, linear type, tangential type or 8-shaped type, V circle 8 ~ E - not limited to this, and extended 23 200938730 extension 2311, 2321 position of the concentric circle diameter range, The internal control/outer diameter range may be: 2mm/3mm, 2.2mm/3.5mm, 3mm/5mm, 4mm/6mm, 4mm/7mm or 4mm/8mm, but not limited thereto. As a result, the inlet valve piece 2313 and the outlet valve piece 2323 may have a diameter ranging from 2 to 4 mm. The pre-action structure of the valve body film 23 is a seal ring. By the combination of the above-mentioned actuator 242, the diaphragm 241, the pressure chamber 226 and the valve body film 23, the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 can be driven to open and close, and drive The fluid flows in one direction, and the fluid flowing through the pressure chamber 226 can reach a large flow output of more than 60 ml per minute, and the suction force for drawing the fluid into the fluid delivery device can be greater than 2 kPa, and the fluid is transported by the fluid. The pressure introduced inside the device can be greater than 3 kPa. In some embodiments, an operating frequency of less than 20 Hz can be applied to the actuator 242 of the actuator 24 in response to a microdroplet flow fluid delivery requirement of less than 1 ml/min, with the following conditions: 致 Actuation The thickness of the 242 is about 5 〇〇 factory m. The preferred thickness is 15 〇 from m to 25 〇 m m, and the Young's modulus is about 100-150 Gpa'. The material may be a single layer of metal or a metal material. A two-layer structure composed of a polymer material. And the thickness of the vibrating film 241 is between 10#111 and 200#m. The preferred thickness is 20#m to loo^m, and the Young's coefficient is 6〇_3〇〇GPa. The material can be a single layer metal. The composition, for example, a stainless steel material has a Young's modulus of 240 GPa and a thickness of 3 〇#m to 8 〇//m, such as a copper metal material, the Young's modulus is 100 GPa, and the thickness is 30//m. 24 200938730 to 80/zm, but not limited to this. The pressure chamber 226 has a depth ranging from lo^m to 300/zm and a diameter between 3 and 20 mm. The material of the valve body seat 21 and the valve body cover 22 can be made of a thermoplastic plastic material, and the overall thickness of the valve body cover 22 is uniform. The thickness of the inlet valve structure 231 and the outlet valve structure 232 on the valve body film 23 is lOem to 50#m'. The preferred thickness is 2l#m to 40 ❻ #m, and the Young's modulus is 2~240Gpa, which can be a polymer material. Or a metal material, the valve body film 23 is made of the polymer material, and the modulus of elasticity is 2-20.
Gpa’例如聚亞醯胺(p〇iyimide，PI)，其彈性係數為1〇Gpa， 閥體薄膜23亦可採用金屬材料，例如鋁、鋁合金、鎳、 鎳合金、銅、銅合金或不鏽鋼等金屬材料，其揚氏係數係 為 r 240Gpa。 以及’閥體薄膜23所包含之入口閥門結構231及出 口閥門結構232的延伸部2311、2321的數量必須大於2、 ❹ 寬度可介於〜500私m、形狀可為如第八圖A〜E所示之 直線型態、切線型態或是S形型態，但不以此為限，且延 伸部2311、2321所在位置之兩同心圓的直徑範圍，其内 徑/外徑範圍可為：2mm/3mm、2.2mm/3.5mm、3mm/5mni、 4mm/6mm、4mm/7mm或是4mm/8mm，但不以此為限。至 於，入口閥片2313及出口閥片2323的直徑大小範圍可介 於2〜4mm。該閥體薄膜23的預力作用結構可為密封環， 或是採用半導體製程，例如：黃光钱刻或錢膜或電鱗技 術，直接在閥體座21及閥體蓋體22上所形成之微凸結構。 25 200938730 由上述致動器242、振動薄膜241、壓力腔室226及 閥體薄膜23等相關參數條件搭配’則可驅動閥體薄膜23 之入口閥門結構231及出口閥門結構232進行啟閉作用， 驅使流體進行單向流動，並使流經壓力腔室226的流體能 達到每分鐘lml的微液滴流量輸出，並使得將流體吸入流 體輸送裝置内部之吸力可小於20kPa，而將流體由流體輸 送裝置内部推出的壓力可小於30kPa。 _ 綜上所述，本案之流體傳輸裝置20可經由致動裝置 24之驅動，且閥體薄膜23及其上一體成形之入口閥門結 構231可配合設置於閥體座21之凹槽216内的軟性密封 環26’使入口閥門結構231開啟而將流體輸送至壓力腔室 226 ’再因致動裝置24改變壓力腔室226之體積，因而使 出口閥門結構232配合設置於閩體蓋體22上之凹槽225 内之軟性密封環27而開啟，以使流體輸送至壓力腔室226 之外，由於壓力腔室226於體積漲縮的瞬間可產生流體吸 ❹力與推力，配合閥體薄膜23上之閥門結構其迅速的開合 反應，使得故可使流體達到一般流量、大流量或是微液滴 之傳輸’並有效阻擋流體之逆流。 综上所述，本案之流體輸送裝置係適用於微幫浦結 構，主要由閥體座、閥體薄膜、閥體蓋體、振動薄膜及致 動器堆疊而成，其係藉由致動裝置之壓電致動，使得壓力 腔室之體積改變，進而開啟或關閉成形於同一閥體薄膜上 之入口/出口閥門結構，配合軟性密封環及設置於閥體座或 間體蓋體上之凹；’而進行流體之輸送，由於本案之流體 26 200938730 輸送裝置係可輸送氣體及流體，不僅有極佳之流率與輸出 壓力，可於初始狀態自我汲取液體，更具有高精度控制 性，且因其可輸送氣體，因此於流體輸送過程更可排除氣 泡，以達到高效率之傳輸。 另外，藉由控制致動裝置之致動器上施予的操作頻 率，並搭配其它組件的不同條件，即可使得流體輸送裝置 可因應需求達到一般流量、大流量或是微液滴之傳輸。 ©是以，本案之微液滴流體輸送裝置極具產業之價值， 爰依法提出申請。 本案得由熟習此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 ❹ 27 200938730 【圖式簡單說明】 第一圖A :其係為習知微幫浦結構於未作動時之結構示意 圖。 第一圖B:其係為第一圖A於作動時之結構示意圖。 第二圖：其係為第一圖A所示之微幫浦結構之俯視圖。 第三圖：其係為本案第一較佳實施例之流體輸送裝置之結 Ο 構示意圖。 第四圖：其係為第三圖所示之閥體座側面結構示意圖。 第五圖A:其係為第三圖所示之閥體蓋體之背面結構示意 圖。 第五圖B :其係為第五圖A之剖面結構示意圖。 第六圖：其係為第三圖所示之閥體薄膜結構示意圖。 第七圖A :其係為本案較佳實施例之流體輸送裝置之未作 動狀態示意圖。 φ 第七圖B :其係為第七圖A之壓力腔室膨脹狀態示意圖。 第七圖C:其係為第七圖B之壓力腔室壓縮狀態示意圖。 第八圖A〜E:其係為本案較佳實施例之閥門結構之結構示 意圖。 【主要元件符號說明】 微幫浦結構：10 基板：11 壓縮室：111 隔層膜：12 28 200938730 凹槽：216、217、218、 壓力腔室：226 ❿ 入口閥門結構：231 入口間月· 2313 閥門結構：81、82、83、 84 入口通道：13 微致動器：15 入口擴流器：17 流動方向：X、Y 流體輸送裝置：20 閥體座：21 閥體薄膜：23 蓋體：25 致動器：242 出口流道：192、212 上表面：210、220 下表面：228 入口閥門通道：221 傳動塊：14 出口通道：16 出口擴流器：18 方向：a、b 流體閥座：201 閥體蓋體：22 致動裝置：24 振動薄膜：241 入口流道：191、211 開口 ： 213、214 出口暫存腔：215 入口暫存腔：223 出口閥門通道：222 224、225、227、229 密封環：26、27、28 出口閥門結構：232 出口閥片：2323 孔洞：2312、2322 閥片：81卜82卜83卜84卜851 孔洞：812、822、832、842、852 延伸部：2311、2321、813、823、833、843、853 齒狀結構：8411、8511 29Gpa' such as polyamidamine (PI), which has a modulus of elasticity of 1 〇 Gpa, and the valve body film 23 can also be made of a metal material such as aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy or stainless steel. For metal materials, the Young's coefficient is r 240Gpa. And the number of the extensions 2311, 2321 of the inlet valve structure 231 and the outlet valve structure 232 included in the valve body film 23 must be greater than 2, 宽度 the width may be between -500 and m, and the shape may be as shown in the eighth figure A to E. The linear type, the tangential type or the S-shaped type shown, but not limited thereto, and the diameter range of the two concentric circles of the position where the extending portions 2311, 2321 are located, the inner diameter/outer diameter range may be: 2mm/3mm, 2.2mm/3.5mm, 3mm/5mni, 4mm/6mm, 4mm/7mm or 4mm/8mm, but not limited to this. As a result, the inlet valve piece 2313 and the outlet valve piece 2323 may have a diameter ranging from 2 to 4 mm. The pre-action structure of the valve body film 23 can be a sealing ring or a semiconductor process, such as a yellow light or a money film or a scale technology, formed directly on the valve body seat 21 and the valve body cover 22. Micro-convex structure. 25 200938730 The inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 can be driven to open and close by the above-mentioned actuator 242, diaphragm 241, pressure chamber 226 and valve body film 23 and the like. The fluid is driven to flow in one direction, and the fluid flowing through the pressure chamber 226 can reach a microdroplet flow output of 1 ml per minute, and the suction force for drawing the fluid into the fluid delivery device can be less than 20 kPa, and the fluid is transported by the fluid. The pressure introduced inside the device can be less than 30 kPa. In summary, the fluid transfer device 20 of the present invention can be driven by the actuating device 24, and the valve body film 23 and the integrally formed inlet valve structure 231 can be fitted in the recess 216 of the valve body seat 21. The soft seal ring 26' opens the inlet valve structure 231 to deliver fluid to the pressure chamber 226' and then changes the volume of the pressure chamber 226 by the actuating device 24, thereby engaging the outlet valve structure 232 with the body cover 22 The soft sealing ring 27 in the recess 225 is opened to allow fluid to be delivered outside the pressure chamber 226. Since the pressure chamber 226 can generate fluid suction force and thrust at the moment of volume expansion, the valve body film 23 is engaged. The valve structure has a rapid opening and closing reaction, so that the fluid can reach a general flow rate, a large flow rate or the transmission of micro droplets' and effectively block the reverse flow of the fluid. In summary, the fluid conveying device of the present invention is applicable to a micro-pump structure, which is mainly composed of a valve body seat, a valve body film, a valve body cover body, a vibration film and an actuator, which are driven by the actuating device. The piezoelectric actuation causes the volume of the pressure chamber to change, thereby opening or closing the inlet/outlet valve structure formed on the same valve body film, with the soft sealing ring and the concave surface disposed on the valve body seat or the body cover body. 'The fluid is transported, because the fluid 26 200938730 conveyor in this case can transport gas and fluid, not only has excellent flow rate and output pressure, but also self-capture liquid in the initial state, and has high precision controllability, and Because it can transport gas, it can eliminate bubbles in the fluid transport process to achieve high efficiency transmission. In addition, by controlling the frequency of operation imparted to the actuator of the actuator, and in conjunction with the different conditions of other components, the fluid delivery device can be delivered to a typical flow rate, large flow rate, or microdroplet in response to demand. © Yes, the micro-droplet fluid delivery device in this case is of great industrial value and is submitted according to law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. ❹ 27 200938730 [Simple description of the diagram] Figure A: This is a schematic diagram of the structure of the conventional micro-pull structure when it is not actuated. First figure B: It is a schematic diagram of the structure of the first figure A when it is actuated. Second figure: It is a top view of the micro-push structure shown in the first figure A. Fig. 3 is a schematic view showing the structure of the fluid transporting device of the first preferred embodiment of the present invention. Figure 4: It is a schematic view of the side structure of the valve body seat shown in the third figure. Fig. 5A is a schematic view showing the structure of the back surface of the valve body cover shown in the third figure. Figure 5B is a schematic cross-sectional view of the fifth Figure A. Figure 6: It is a schematic diagram of the structure of the valve body film shown in the third figure. Figure 7A is a schematic view showing the unactuated state of the fluid delivery device of the preferred embodiment of the present invention. φ Figure 7B: This is a schematic diagram of the expansion state of the pressure chamber of Figure 7A. Figure 7C is a schematic view showing the compression state of the pressure chamber of Figure 7B. Eighth Figs. A to E: are structural illustrations of the valve structure of the preferred embodiment of the present invention. [Main component symbol description] Micro-pull structure: 10 Substrate: 11 Compression chamber: 111 Interlayer film: 12 28 200938730 Groove: 216, 217, 218, Pressure chamber: 226 入口 Inlet valve structure: 231 Entrance month · 2313 Valve construction: 81, 82, 83, 84 Inlet channel: 13 Microactuator: 15 Inlet diffuser: 17 Flow direction: X, Y Fluid delivery: 20 Body seat: 21 Body film: 23 Cover :25 Actuator: 242 Outlet runner: 192, 212 Upper surface: 210, 220 Lower surface: 228 Inlet valve passage: 221 Drive block: 14 Outlet channel: 16 Outlet diffuser: 18 Direction: a, b Fluid valve Block: 201 Body cover: 22 Actuator: 24 Vibrating membrane: 241 Inlet runner: 191, 211 Opening: 213, 214 Outlet chamber: 215 Inlet chamber: 223 Outlet valve channel: 222 224, 225 , 227, 229 Sealing ring: 26, 27, 28 Outlet valve structure: 232 Outlet valve: 2323 Hole: 2312, 2322 Valve: 81 Bu 82 83 83 Bu 851 Hole: 812, 822, 832, 842, 852 Extension: 2311, 2321, 813, 823, 833, 843, 853 Toothed structure: 8 411, 8511 29