TW200936921A - Air-operated valve diagnostic method and air-operated valve diagnostic device - Google Patents
Air-operated valve diagnostic method and air-operated valve diagnostic device Download PDFInfo
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- TW200936921A TW200936921A TW97143648A TW97143648A TW200936921A TW 200936921 A TW200936921 A TW 200936921A TW 97143648 A TW97143648 A TW 97143648A TW 97143648 A TW97143648 A TW 97143648A TW 200936921 A TW200936921 A TW 200936921A
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- 238000002405 diagnostic procedure Methods 0.000 title abstract description 9
- 230000008859 change Effects 0.000 claims abstract description 105
- 239000012530 fluid Substances 0.000 claims abstract description 69
- 238000004519 manufacturing process Methods 0.000 claims abstract description 50
- 239000007788 liquid Substances 0.000 claims description 24
- 230000007246 mechanism Effects 0.000 claims description 19
- 238000003745 diagnosis Methods 0.000 claims description 17
- 230000009471 action Effects 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 6
- 238000012544 monitoring process Methods 0.000 claims description 2
- 210000002445 nipple Anatomy 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 19
- 230000008569 process Effects 0.000 abstract description 7
- 230000003252 repetitive effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 13
- 230000007257 malfunction Effects 0.000 description 9
- 238000012423 maintenance Methods 0.000 description 8
- 230000005856 abnormality Effects 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000004519 grease Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 241000234435 Lilium Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 206010036790 Productive cough Diseases 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 239000010977 jade Substances 0.000 description 1
- 210000004185 liver Anatomy 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000006049 ring expansion reaction Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
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- Details Of Valves (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
- Fluid-Driven Valves (AREA)
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Abstract
Description
200936921 九、發明說明: 【發明所屬之技術領域】 本發明,係有關於一種用 之氣壓作動閥的動作狀態的氣 壓作動閥之診斷裝置。 於確認被配置於製造裝置中 歷作動閥之診斷方法以及氣 【先前技術】 止生==產線中’液趙閥發生故障時,必須停 換液體閥。為了防止由更換液體闕所致之生 的^害’必須定期更換零件。㈣闕,係 因為不喜歡金屬零件,當非 存在右μ # 閥的很多情形下,係使用 存在有排氣口等’在閥體 部之門縣a “, ㈣使驅動二氣排出到閥體外 部之閥體。於專利說明#中 閉時使驅動空氣排出到關… 專,在閥體開 斯二軋排出到閥體外部之閥體,在以 係使用氣壓作動閥來說明。 、 ❾ 先前’液體閥之維修中的壽命診斷,有關於往液體闊 夕。p洩漏之異t ’係藉由以檢出部來確認藥液是否洩漏。 在專散獻丨及專敎獻2中,記财設有用於檢 出藥液是否洩漏之檢出部的液體閥。 、,此,說明很接近本發明之專利文獻1»專利文獻i 之流量調整閥,係於形成於流量調整閥20本體22側面之 j裝孔44處,螺合有連接有檢出部(壓力偵知器)之偵知 益塞頭46。沿著偵知器塞頭46軸線方向貫穿之通路52, 係透過形成於連結本體24側面之連通路徑、及形成於200936921 IX. Description of the Invention: [Technical Field] The present invention relates to a diagnostic device for a pneumatically actuated valve in an operating state of a pneumatically actuated valve. In order to confirm the diagnostic method and gas that is placed in the manufacturing device, the valve is operated. [Prior Art] When the liquid valve is malfunctioning in the production line, the liquid valve must be stopped. In order to prevent the damage caused by the replacement of liquid helium, parts must be replaced regularly. (4) 阙, because you do not like metal parts, in many cases where there is no right μ # valve, the use of the exhaust port, etc. 'in the valve body of the county a", (four) to drive the two gas to the valve body External valve body. In the patent specification #, the drive air is discharged to the closed state... The valve body that is discharged to the outside of the valve body by the valve body is rolled, and the pneumatic valve is used to explain. ❾ 'Life diagnosis in the maintenance of the liquid valve, there is a tendency to go to the liquid. The difference in p leakage is determined by the detection department to check whether the liquid leaks. In the special offer and special offer 2, remember A liquid valve for detecting a leaking portion of the chemical liquid is provided. Here, a flow regulating valve which is very close to the patent document 1 of the present invention is disclosed in the body 22 of the flow regulating valve 20 . At the j-hole 44 of the side surface, a detecting and absorbing head 46 to which a detecting portion (pressure detector) is connected is screwed. The passage 52 penetrating in the axial direction of the detecting head 46 is formed through the connecting portion. a communication path on the side of the body 24 and formed on
2097-10151-PF 200936921 連、本體24内邛之第3 口 而與閥本體22内部相連通。 亦即,藉由流體透過第3 口 51導入連通路徑5〇,止 回閥48係往债知器塞頭46位移。而且,在止回閥仏之位 移作用下’通路52内部之流體係被往鎖固螺帽42側按壓。 此時’以壓力偵知器來檢知因為流體流通所產生之壓力變 化波形。藉此,能確認透過之、流體侵入。 【專利文獻1]日本特開2004-1 76828號公報 【專利文獻2】日本特開2004-01 9792號公報 【發明所欲解決的課題】 但是’在記載於專利文獻1之發明中,係僅侷限在自 隔膜U藥液之檢出,此外之故障或故障狀況(由間體開 閉動作所致之磨耗、由藥液之透過氣體所致之0型環膨脹 等所導致之狀況)很難獲知。實際上,在掌握閥體之故障 狀況時,必須將閥體自製造裝置卸下分解來調査。 因此,有不知適當的更換時間,而過度更換閥體以導 致成本增加’或者’直到故障皆尚未更換之問題。 因為以上問題,而期望有一種在液體閥壽命診斷中, 月b掌握作為液體閥之氣壓作動閥的動作狀況,而能診斷至 故障為止的殘餘壽命的手法。 本發明,係為了解決上述課題而研發出者,其目的在 於提供一種氣壓作動閥維修中之動作診斷。 【用於解.決課題的手段】2097-10151-PF 200936921 The third port of the body 24 is connected to the inside of the valve body 22. That is, the fluid is transmitted through the third port 51 to the communication path 5, and the check valve 48 is displaced toward the debtor plug 46. Further, the flow system inside the passage 52 is pressed toward the lock nut 42 side by the displacement of the check valve. At this time, the pressure detecting device detects the pressure change waveform generated by the fluid flow. Thereby, it is possible to confirm the intrusion of fluid through the passage. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2004-176828 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2004-01 9792 (A problem to be solved by the Invention) However, in the invention described in Patent Document 1, only It is difficult to know that it is limited to the detection of the liquid medicine from the diaphragm U, and the fault or fault condition (the wear caused by the opening and closing action of the medium, the 0-ring expansion caused by the gas permeating the liquid) . In fact, when grasping the fault condition of the valve body, it is necessary to remove the valve body from the manufacturing device and investigate it. Therefore, there is a problem that the replacement time is not known, and the valve body is excessively replaced to cause an increase in cost 'or' until the failure has not been replaced. Because of the above problems, it is desirable to have a method of diagnosing the residual life of the malfunction as a function of the operation of the pneumatic valve as the liquid valve in the life diagnosis of the liquid valve. The present invention has been made in order to solve the above problems, and an object thereof is to provide a motion diagnosis in maintenance of a pneumatic actuator. [Means for solving problems]
2097-10151-PF 6 200936921 為了達成上述目的,本發明之為了確認被配設於製造 裝置之氣壓作動閥的動作狀態的氣壓作動閥之診斷方法以 及氣塵作動閥之診斷裝置,係具有下述構成。 (1) 一種氣壓作動閥之診斷方法,用於確認被配設於 製造裝置之氣壓作動閥的動作狀態,其特徵在於具有:第 1工序,當使前述氣壓作動閥設置於前述製造裝置,使操 作流體供給到前述氣壓作動閥之操作口時,或排出操作流 體時’將自前述氣壓作動閥排氣口吸排出之流體壓力加以2097-10151-PF 6 200936921 In order to achieve the above object, a diagnostic method for a pneumatic actuating valve and a diagnostic device for a pneumatic actuating valve for confirming an operating state of a pneumatically actuated valve of a manufacturing apparatus according to the present invention have the following Composition. (1) A method for diagnosing a pneumatic actuating valve for confirming an operating state of a pneumatically actuated valve disposed in a manufacturing apparatus, characterized in that: in the first step, when the pneumatic actuating valve is provided in the manufacturing device, When the operating fluid is supplied to the operation port of the pneumatic actuating valve, or when the operating fluid is discharged, the fluid pressure that is sucked and discharged from the exhaust port of the pneumatic actuating valve is applied.
:定’將其壓力變化加以憶;帛2工序,當在重複動作 前述氣壓作動閥後,使操作流體供給到前述氣壓作動閥之 操作口時’或排出操作流體時’冑自前述氣壓作動閥排氣 口吸排出之流體壓力加以測定,將其壓力變化加以記憶; 以及第3工序,將以前述第1工序測定之壓力變化與以前 述第2工序測定之壓力變化加以比較,而將前述氣壓作動 閥動作狀態之變化加以確認。 、在此’所謂壓力變化,可以使用壓力變化波形,也可 以使用峰值及壓力變化率等數值。 (2) —種記載於(1)之氣壓作動閥之診斷方法,其 中’月,J述氣壓作動閥係液體闊,比較壓力變化,而藉由前 述氣壓作動閥動作狀態之變化,來判斷是否更換前述氣壓 ^ ()種氣壓作動閥之診斷裝置,用於將被配置於製 =置之氣壓作動閥動作狀態加以監視,而確認前述氣壓 動閥動作狀態之變化,其特徵在於具有:愿力控制機構, 2〇97-i〇i5i-pp 200936921 使操作流體供給到前 使择作、”“ 操作口;開閉機構, 吏刼作抓體供給到前述氣壓作 機構,蔣白铪.+、* 保作口或排瑕·;測定 ' 1处氧壓作動閥排氣口排出# 定;記憶機構,將LV〜 體壓力加以測 憶;以及確認機構’㈣"n J疋結果加以記 裝置而測得且記情在:如壓作動閥設置於前述製造 後測得之…力變:之第1壓力變化,與其 動竹社能嫩 變化加以比較,來確認前述氣屢作動關 動作狀態之變化。 i开動閥 中二:種:栽於(3)之氣壓作動閥之診斷裝置,1 剛述氣壓作動閥係液體間,比較 /、 述氣壓作動閱動作狀態之變化,來 =藉由前 作動閥。 疋否更換則述氣壓 (5) —種記載於(3)或( 置’其中,前述記憶機構,係能區別:=?=珍斷裝 之氣壓作動閥,將測得之其壓力變否=換 訊機構。 乂。己隐’且具有通 【發明效果】 接著,說明心確認被配設於製造裝置之氣壓 的動作狀態的氣壓作動閥之診斷方 斷裝置的作用及效果。 乂及氣壓作動闕之診 作動閥安裝在製造農置,使藥液充滿配管内 後,將%作流體送入氣壓作動閥之操 ^ 内 送入時,藉由減壓閥使壓力被調整到“ n° 4操作流體被 龙判例如〇. 6MPa。袖 之壓力,係在進入操作口之前,以 -整 電磁閥V止。電磁閥,: "Recognize its pressure change; 帛 2 process, when the operating pressure is supplied to the operation port of the pneumatic actuating valve after repeating the operation of the pneumatic actuating valve, or when the operating fluid is discharged, the pneumatic actuating valve The pressure of the fluid discharged from the exhaust port is measured, and the pressure change is memorized. In the third step, the pressure change measured in the first step is compared with the pressure change measured in the second step, and the air pressure is compared. Confirm the change in the operating state of the actuated valve. Here, the pressure change waveform may be used, and a value such as a peak value and a pressure change rate may be used. (2) A method for diagnosing a pneumatic actuating valve according to (1), wherein the month of the pneumatic actuating valve is wide, and the pressure is changed, and the change in the operating state of the pneumatic actuating valve is used to determine whether A diagnosing device for replacing the air pressure () air pressure actuating valve for monitoring the operating state of the pneumatic actuating valve disposed in the system, and confirming the change in the operating state of the pneumatic actuating valve, characterized in that: Control mechanism, 2〇97-i〇i5i-pp 200936921 Supplying the operating fluid to the front, "Operating port"; opening and closing mechanism, feeding the gripper to the aforementioned pneumatic mechanism, Jiang Baizhen. +, * Or sputum ; ; ; ; ; 测定 测定 ; 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧The sensation is as follows: If the pressure actuating valve is set after the above-mentioned manufacturing, the force change: the first pressure change is compared with the dynamic change of the movable bamboo to confirm the change of the gas-operating state. i Start the valve in the second: species: the diagnostic device installed in the pneumatic actuator of (3), 1 just before the air pressure actuated valve system, compare /, the change of the air pressure to read the action state, come = by the action valve.疋 No replacement, the air pressure (5) - is described in (3) or (in the case, the aforementioned memory mechanism, can distinguish: =? = the pressure of the valve, the measured pressure will be changed = The communication mechanism. 乂 己 己 且 且 且 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明阙The diagnosis valve is installed in the manufacturing plant, so that after the liquid is filled into the pipe, when the % fluid is sent into the pneumatic actuating valve, the pressure is adjusted to "n° 4" by the pressure reducing valve. The operating fluid is judged by the dragon, for example, MPa 6 MPa. The pressure of the sleeve is before the inlet of the operating port, and the solenoid valve V is closed.
2097-10151-PF 8 200936921 係以既定時序將操作流體送人操作口。自操作Π進入之操 作流體,係進人操作室内而使氣壓作動_之活塞上昇。 、塞之上昇,排氣室内之空氣係被壓縮而以排氣口排 出自排氣口被排出之空氣的壓力係以第玉壓力摘知器來 測定。將被測定之壓力變化波形當㈣J壓力變化波形而 記憶在控制部内的記憶體。亦即,所謂第1力變化波形, 係在使氣壓作動閥安裝在製造裝置後測得之壓力變化波 形。 、接著,當氣壓作動閥被重複使用後之時點,例如當被 連續使用數m實施保養時,使操作流體送人氣屢作動 閥之操作口。s操作流體被送人時,肖由減壓閥使壓力被 調整到在測定第丨壓力變化波形時相同壓力的Q 6Mpa。被 調整之操作流體,係在進入操作口前,以電磁閥來停止。 電磁閥’係以既料序將操作流體送人。自操作d進入之 操作流體,係進入操作室内❿使氣壓作動閥内之活塞上 幵。藉由活塞之上昇,排氣室内之空氣係被壓縮而以排氣 口排出。自排氣口被排出之空氣的壓力係以第2壓力偵知 器來測定。將被载之麗力變化波形當作帛2壓力變化波 形而記憶在控制部内的記憶體。 將使氣壓作動閥安裝在製造裝置,在使藥液充滿配管 内後加以測定而記憶在記憶體之第丨壓力變化波形,與在 氣壓作動閥被重複使用之時點測得而記憶在記憶體之第2 壓力變化波形,以CPU加以比較,確認在氣壓作動閥是否 無產生異常。而且,當有異常時,將氣壓作動闊加以更換。2097-10151-PF 8 200936921 The operating fluid is delivered to the operating port at a predetermined timing. The operating fluid that enters from the operation , enters the human operating chamber and causes the air pressure to actuate. When the plug rises, the air in the exhaust chamber is compressed, and the pressure of the air discharged from the exhaust port through the exhaust port is measured by a jade pressure picker. The pressure change waveform to be measured is stored in the memory in the control unit as a (four) J pressure change waveform. That is, the first force change waveform is a pressure change waveform measured after the pneumatic actuating valve is attached to the manufacturing apparatus. Then, when the pneumatic actuating valve is repeatedly used, for example, when maintenance is performed for several consecutive uses, the operating fluid is sent to the operating port of the human-operated valve. When the s operating fluid is delivered, the pressure is adjusted by the pressure reducing valve to Q 6 MPa of the same pressure at the time of measuring the second pressure change waveform. The adjusted operating fluid is stopped by a solenoid valve before entering the operating port. The solenoid valve delivers the operating fluid in both order. The operating fluid that enters from operation d enters the operating chamber and causes the piston in the pneumatic actuating valve to slam. By the rise of the piston, the air in the exhaust chamber is compressed and discharged through the exhaust port. The pressure of the air discharged from the exhaust port is measured by a second pressure detector. The loaded Lily change waveform is regarded as the 帛2 pressure change waveform and is stored in the memory in the control unit. The air pressure actuating valve is installed in the manufacturing device, and the pressure change waveform stored in the memory is measured after the chemical liquid is filled in the pipe, and is measured in the memory when the pneumatic actuating valve is repeatedly used. The second pressure change waveform is compared with the CPU to confirm whether there is no abnormality in the pneumatic actuated valve. Moreover, when there is an abnormality, the air pressure is actuated to be replaced.
2097-10151-PF 92097-10151-PF 9
200936921 *如’將第i a力變化波形與第2/1力變化波 據加以比較’當其具有5%左右之差異時就當作測定誤差。 差值在10%以上且20%以下時,當作警告。當差 %以上時,則當作異常狀態。 可以判斷是否有異常,能在故障前將氣壓作動閥加以 更換。因A,能消除在未達更換時間就更換氣壓作動閥之 情形,氣壓作動閥之更換頻率會減少,所以,能 氣壓作動閥之費用。 例如,當初期狀態之開閥速度與現在時點之開閥逮度 對照時# 10%以上之差異時,可判斷活I 13《4乍動性: 已經降低。在此其情形下,有可能彈簧腐蝕、活塞桿咬死 或橡膠製0型環膨脹,所以,需更換氣壓作動閥。 又,將初期狀態最大排氣口壓力及排氣口壓力之變化 率,與現在時點之最大排氣口壓力及排氣口壓力之變化率 加以對比,當有1 〇%以上之差異時,可判斯致動器部内部 已產生空亂 漏。在此情形下,推定〇型環已產生磨耗., 所以需更換氣壓作動閥。 又’將初期狀態最大排氣口壓力及開閥速度,與現在 時點之最大排氣口壓力及開閥速度加以對比,當有丨0 %以 上之差異時,可判斷活塞產生作動不良而閥無法全開,或 者’有產生咬死。在此情形下,可以推定0型環膨脹、潤 滑脂用盡或彈簧產生腐蝕,所以需更換氣壓作動閥。 如此一來’使已故障之氣壓作動閥在保養時發現而加 以更換,所以,能在氣壓作動,閥發生故障之前加以更換, 2097-1O151-PF 10 200936921 又,無須更換之氣壓作動閥可以不更換而繼續使用。 停止 藉此,藉由掌握氣麗作動閥作動不良之前兆,能事先 預防因為氣壓作動閥故障而導致的製造裝置停纟或生產線 ———±丄在診斷氣壓作動閥時,當卸下輸入口及輸出口時, 必須將生產線内之配管全部洗淨,詩洗淨之時間及成本 會很多。在此,當使用本發明時’無須將氣壓作動閥本體 之輸入口及輸出口自製造裝置卸下,僅回接操作流體用管 © 體即可測定,所以,無須繁雜手續即可測定,而且,無須 洗淨配管内部,所以能降低成本。 … 關於本發明之作用及效果,雖然說明過使操作流體供 給到操作口之情形,但是,使操作流體自操作口排出之情 形,也可獲得相同的作用及效果。 【實施方式】 (第1實施形態) 接著’參照圖面來說明本發明之配設於製造裝置的氣 壓作動閥之診斷方法以及氣壓作動閥之診斷聚置 i eg —貫施 形態。 第1圖係表示氣壓作動閥診斷裝置構成之方塊圖。 第2圖係表示作為診斷對象之氣壓作動閥構造的剖面 圖。 第3圖係表示氣壓作動閥診斷裝置控制部之方塊圖 第4圖係使用在氣壓作動閥診斷之氣壓作動闕岭斷測 2097-10151-PF 11 200936921 定裝置40的外觀圖。 依據第1圖來說明配設於製造裝置的氣壓作動閥之診 斷方法以及氣壓作動閥之診斷裝置的構成。 控制部1,係與第i壓力偵知器2、第2壓力偵知器3、 電磁閥5及交流插座9相連接。自交流插座9可獲得電源。 控制部1係控制第1壓力偵知器2、第2壓力偵知器3及 電磁閥5。可以藉由下述第3圖之方塊圖來說明控制方法。 減壓閥6係透過操作口側空氣配管i 1B而與電磁閥$ © 相連結。自電磁閥5延伸的操作口侧空氣配管丄u係可連 結到氣壓作動閥1 〇之操作口 7。氣壓作動閥丨〇内部之構 造係以第2圖中之氣壓作動閥1〇剖面圖來說明。氣壓作動 閥1 〇之排氣口 8係透過排氣口側空氣配管i 2連結到第丄 壓力偵知器2。第2壓力偵知器3,係連接在連結電磁閥5 與操作口 7之操作口側空氣配管ua中途。 直流電源4,係與第〗壓力偵知器2、第2壓力偵知器 3、電磁閥5及交流插座9相連接。 ❿ 、第2圖係表示作為診斷對象之氣壓作動閥1 〇的剖面 圖。 氣壓作動閥10’係由致動器部23及本體24所構成。 在本體24形成有輸入口 I?及輸出口 a。 在致動器部23形成有操作口 7及排氣口 8。操作口 7 左端部係與操作室22相連通。又,排氣口 8左端部係與排 氣室21相連通。在致動器部23内部處,略呈圓柱形狀之 活塞13係可往上下方向滑動地被保持。.藉由活塞13被分200936921 * If 'the i-a force change waveform is compared with the 2/1 force change wave', it is regarded as a measurement error when it has a difference of about 5%. When the difference is 10% or more and 20% or less, it is used as a warning. When the difference is more than %, it is regarded as an abnormal state. It can be judged whether there is an abnormality and the pneumatic actuating valve can be replaced before the malfunction. Because of A, it is possible to eliminate the situation in which the pneumatic actuating valve is replaced when the replacement time is not reached, and the frequency of replacement of the pneumatic actuating valve is reduced, so that the cost of the pneumatic actuating valve can be reduced. For example, when the valve opening speed in the initial state is different from the valve opening degree at the current time point by #10% or more, it can be judged that the activity I 13 "4 turbulence: has been lowered. In this case, there is a possibility that the spring is corroded, the piston rod is bitten, or the rubber 0-ring is inflated, so the pneumatic actuating valve needs to be replaced. In addition, the rate of change of the maximum exhaust port pressure and the exhaust port pressure in the initial state is compared with the change rate of the maximum exhaust port pressure and the exhaust port pressure at the current time point, and when there is a difference of 1% or more, An empty leak has occurred inside the actuator unit. In this case, it is presumed that the 〇-ring has generated wear. Therefore, the pneumatic actuating valve needs to be replaced. In addition, the maximum vent pressure and valve opening speed in the initial state are compared with the maximum vent pressure and valve opening speed at the current time. When there is a difference of 丨0% or more, it can be judged that the piston is malfunctioning and the valve cannot be Fully open, or 'have a bite. In this case, it is presumed that the 0-ring is inflated, the grease is used up, or the spring is corroded, so the pneumatic actuating valve needs to be replaced. In this way, 'the faulty pneumatic actuating valve is found and replaced during maintenance. Therefore, it can be replaced before the air pressure is actuated and the valve fails. 2097-1O151-PF 10 200936921 Again, the pneumatic actuating valve does not need to be replaced. Replace and continue to use. By stopping this, it is possible to prevent the manufacturing device from stopping or the production line due to the malfunction of the pneumatic actuating valve by grasping the premise of the operation of the pneumatic actuating valve—±丄 when the pneumatic actuating valve is diagnosed, when the input port is removed When the output port is used, all the piping in the production line must be cleaned, and the time and cost of poetry washing will be many. Here, when the present invention is used, it is not necessary to remove the input port and the output port of the pneumatic actuator body from the manufacturing apparatus, and it is possible to measure only by returning the operating fluid tube, so that it can be measured without complicated procedures, and There is no need to clean the inside of the piping, so it can reduce costs. Regarding the action and effect of the present invention, although the case where the operating fluid is supplied to the operation port has been described, the same action and effect can be obtained by discharging the operating fluid from the operation port. [Embodiment] (First Embodiment) Next, a diagnosis method of a pneumatically actuated valve provided in a manufacturing apparatus of the present invention and a diagnostic accumulation of a pneumatic actuating valve will be described with reference to the drawings. Fig. 1 is a block diagram showing the construction of a pneumatic actuator diagnostic apparatus. Fig. 2 is a cross-sectional view showing the structure of a pneumatic actuator valve to be diagnosed. Fig. 3 is a block diagram showing the control unit of the pneumatic actuated valve diagnostic device. Fig. 4 is a view showing the appearance of the fixed device 40 using the air pressure actuating break test at the air pressure actuating valve diagnosis 2097-10151-PF 11 200936921. The configuration of the diagnostic method of the pneumatic actuation valve and the pneumatic actuation valve of the pneumatic actuator according to the manufacturing apparatus will be described with reference to Fig. 1. The control unit 1 is connected to the i-th pressure detector 2, the second pressure detector 3, the electromagnetic valve 5, and the AC outlet 9. Power is available from the AC outlet 9. The control unit 1 controls the first pressure detector 2, the second pressure detector 3, and the solenoid valve 5. The control method can be explained by the block diagram of Fig. 3 below. The pressure reducing valve 6 is connected to the solenoid valve $ © through the operation port side air pipe i 1B. The operation port side air pipe 丄u system extending from the solenoid valve 5 can be connected to the operation port 7 of the air pressure actuating valve 1 。. The internal structure of the pneumatic actuating valve is illustrated by the cross-sectional view of the pneumatic actuating valve 1 in Fig. 2. Pneumatic actuation valve 1 排气 Exhaust port 8 is connected to the 压力 pressure detector 2 through the exhaust port side air pipe i 2 . The second pressure detector 3 is connected in the middle of the operation port side air piping ua that connects the electromagnetic valve 5 and the operation port 7. The DC power source 4 is connected to the first pressure detector 2, the second pressure detector 3, the solenoid valve 5, and the AC outlet 9. ❿ and Fig. 2 are sectional views showing the pneumatic actuating valve 1 作为 as a diagnosis target. The pneumatic actuating valve 10' is composed of an actuator portion 23 and a body 24. An input port I? and an output port a are formed in the body 24. An operation port 7 and an exhaust port 8 are formed in the actuator portion 23. The left end of the operation port 7 is in communication with the operation room 22. Further, the left end portion of the exhaust port 8 communicates with the exhaust chamber 21. Inside the actuator portion 23, the piston 13 having a substantially cylindrical shape is slidably held in the vertical direction. By the piston 13 is divided
2097-10151-PF 12 200936921 及排氣至21。在活塞〗3之最大外周部分安 2〇。在活塞13下部中央部安裝有第2〇型 第3圖係表示控制部1之方塊圖。 ㈣t控Γ1包含有議、職32及記憶體33。在控 制部1,係連接有第1厭 雷磁門… 器2、第2壓力摘知器3、 電磁閥5及交流插座9。2097-10151-PF 12 200936921 and exhaust to 21. In the largest outer peripheral part of the piston 〖3, 2 〇. A second type is attached to a central portion of the lower portion of the piston 13. Fig. 3 is a block diagram showing the control unit 1. (4) t control Γ 1 contains discussion, job 32 and memory 33. The control unit 1 is connected to a first anti-throttle magnetic device 2, a second pressure extractor 3, a solenoid valve 5, and an AC outlet 9.
片糸表示氣壓作動閥診斷測定裝置4 〇的正視圖。 s在氣Μ作動閥診斷敎裝置4G之上方部分,係具有液 晝面41下方部分係具有數字鍵42。在氣麗作動間診斷 測定裝置4G上端處,設有連接到第!壓力❹器2之連接 端子43、及連接到第2壓力偵知器3之連接端子以。在液 晶畫面41左上部分係顯示氣壓作動閥之識別號碼45及曰 期時間46。在右下部份係顯示壓力波形數據47。 接著,說明用於確認被配置於製造裝置中之氣壓作動 ❹ 隔成操作室2 2 裝有第10型環 環25。 閥的動作狀態的氣壓作動閥之診斷方法以及氣壓作動閥之 診斷裝置的作用。 以氣壓作動閥診斷裝置來實施壽命診斷,主要係生產 線整備負責人在實施保養時的作業。剛開始時,測定排氣 口侧壓力’係在製造裝置組裝在工廠後實施。與組裝前相 比較下,在組裝後使藥液充滿配管内之狀態下,閥體之開 閉速度會變慢,所以在組裝後必須測定。 在致動器部2 3之操作口 7及排氣口 8,安裝操作口側 空氣配管11A及排氣口側空氣配管12。此時,輪入口 I? 2097-10151-PF 13 200936921 及輸出口 18可自 18流通有藥液,Λ J 在輸入口 17及輸出口 止生產線,在卸二下^入口17及輸出口㈣’必須停 所以,會有因為 己官内會被/τ染而清淨度會降低, 4再度洗淨而很花費時間及成本的問題。 本體24的:入據本發明’無由製造裝置卸下氣壓作動閥 且了減少因為不需要洗淨的成本。 ❹ ❹ 因為測定氣壓作動閥10之第 氣壓作動本體24後,生產線之整備變化=,’在女裝 接到第4圖氣屡作動閥診斷測 ;、:吏: =連接…,安裝在連接到_動之閥== 操作口側空氣配管11Α;使連 操作口 7之 接端子43,安裝在連接到排氣π 8之排氣口力^知器2的連 而且,使操作流體流到操作 ==管12。 通操作流體時,操作流體會流到氣屢作:配管…。當流 作流體’係一邊看著 動閥10。流動之操 遌有者第2壓力偵知器3,一 之未圖示旋备使其成為既定屢力(例如"肝:):閥6 常,當操作口侧Μ力不是既定心_ 為通 力變化波形與第2壓力變化波形,也矣吏魏較第1屢 口側·力是否成為既定壓力,係以第力:差異;操作 一定。 係,机動以使壓力達到 是否達到既定壓力,係在氣壓作 之液晶畫面41以曲線來顯示, 9測疋裝置40 机通操作流體之.氣壓作The sheet 糸 indicates a front view of the pneumatic actuation valve diagnostic measuring device 4 。. s In the upper portion of the pneumatic valve actuation diagnosis device 4G, the lower portion of the liquid helium surface 41 has a numeric key 42. At the upper end of the 4G of the diagnostic test device, there is a connection to the first! The connection terminal 43 of the pressure cooker 2 and the connection terminal connected to the second pressure detector 3 are provided. The identification number 45 of the pneumatic actuating valve and the expiration time 46 are displayed in the upper left portion of the liquid crystal screen 41. The pressure waveform data 47 is displayed in the lower right portion. Next, a description will be given of a description of the air pressure operation for arranging the arrangement in the manufacturing apparatus to be partitioned into the operation chamber 2 2 and the 10th type ring 25 is attached. The diagnosis method of the pneumatic actuating valve in the operating state of the valve and the function of the diagnostic device of the pneumatic actuating valve. The life diagnosis is carried out with a pneumatic actuation valve diagnostic device, mainly for the operation of the person in charge of the production line during maintenance. At the beginning, the measurement of the pressure on the exhaust port side was carried out after the manufacturing apparatus was assembled in the factory. In the state in which the chemical liquid is filled in the pipe after assembly, the opening and closing speed of the valve body is slowed, so it is necessary to measure it after assembly. The operation port side air pipe 11A and the exhaust port side air pipe 12 are attached to the operation port 7 and the exhaust port 8 of the actuator unit 23. At this time, the wheel inlet I? 2097-10151-PF 13 200936921 and the output port 18 can be circulated with liquid medicine from 18, Λ J at the input port 17 and the output port stop production line, at the unloading port 2 and the outlet port (4) It must be stopped, there will be problems because the degree of cleanliness will be lowered because of the smell in the official, and it will take time and cost to clean again. The body 24 is incorporated in accordance with the present invention. The pneumatic actuator is not removed by the manufacturing apparatus and the cost of cleaning is not required. ❹ ❹ After measuring the pressure of the pneumatic actuator 10 to actuate the body 24, the change of the production line =, 'In the women's clothing received the fourth figure gas repeatedly actuated valve diagnostic test;,: 吏: = connect..., installed in the connection _ moving valve == operating port side air pipe 11 Α; connecting terminal 43 of the operating port 7 is installed in the connection of the exhaust port force sensor 2 connected to the exhaust gas π 8 and allowing the operating fluid to flow to the operation == tube 12. When the fluid is operated, the operating fluid will flow to the gas repeatedly: piping... When the fluid is flowing, the valve 10 is viewed. The flow of the second pressure detector 3, one of which is not shown to make it a predetermined force (for example, "liver:): valve 6 often, when the operation port side force is not a fixed center _ The KONE change waveform and the second pressure change waveform are also compared with the first repeated side of the force. The force is a predetermined pressure, and the force is the difference: the operation is constant. System, maneuvering to achieve the pressure to reach the predetermined pressure, the liquid crystal picture 41 in the air pressure is displayed as a curve, 9 the measuring device 40 is used to operate the fluid.
2097-1015J-PF 14 200936921 動閥ίο的識別號碼45及日期時間46係以液晶晝面41來 顯示。 使操作流體透過減壓閥6來達到既定壓力後,使操作 口側空氣配管11内之操作流體排氣。而且再度,使既定壓 力之操作流體流到操作口侧空氣配管u。操作流體,係通 過電磁閥5再通過操作口侧空氣配管11A,而被送到操作 口側7。電磁㈤5,係、以既定時序使操作流體供給到操作口 7 ° ❹ 為了供給操作流體,使第4圖之氣壓作動閥診斷測定 裝置40的測定開關48為⑽。當成為0N時,電磁閥5係 以既定時序被打開’操作流體係通過操作口侧线配管nA 而被:給到操作口 7。自操作口了進入之操作流體係進入 操乍至2 2 it入操作至22之操作流體係往上推壓活塞j 3。 被往上推麼時’在排氣室21内之空氣會被麗縮。 在排氣室21内被壓縮之空氣係自排氣口 8被壓出。 壓力摘知器2’係將自排氣口8通過排氣口側空 氣配管12而排出之处盗从& # 氣的排虱口侧壓力加以測定,使壓力 變化波形數據記憶在記憶體33。 將以第1壓力偵知器? B n m 氣壓力當作第丨壓力變化波:第2壓力偵知器3測得之空 係被記憶在控制部i内的’而且f 1 Μ力變化波形, 5圖所示之曲線。記憶體;3:係二中。具體說來,成為第 的各第1遷力變化波形。因:“記憶全部氣壓作動間102097-1015J-PF 14 200936921 The identification number 45 of the valve ίο and the date and time 46 are displayed on the LCD screen 41. After the operating fluid is passed through the pressure reducing valve 6 to reach a predetermined pressure, the operating fluid in the operation port side air pipe 11 is exhausted. Further, again, the operating fluid of a predetermined pressure is caused to flow to the operation port side air pipe u. The operating fluid is sent to the operation port side 7 through the solenoid valve 5 through the operation port side air pipe 11A. Electromagnetic (5) 5, the operating fluid is supplied to the operating port at a predetermined timing. 7 ° ❹ In order to supply the operating fluid, the measuring switch 48 of the pneumatic actuating valve diagnostic measuring device 40 of Fig. 4 is (10). When it is 0N, the solenoid valve 5 is opened at a predetermined timing. The operation flow system is supplied to the operation port 7 through the operation port side line pipe nA. The operating flow system entering from the operating port enters the operating flow system that is operated to 22 and pushes the piston j 3 upward. When pushed up, the air in the exhaust chamber 21 will be shrunk. The air compressed in the exhaust chamber 21 is forced out from the exhaust port 8. The pressure extractor 2' measures the pressure from the discharge port side of the &# gas from the exhaust port 8 through the exhaust port side air pipe 12, and stores the pressure change waveform data in the memory 33. . Will be the first pressure detector? B n m gas pressure is used as the second pressure change wave: the air measured by the second pressure detector 3 is stored in the control unit i and the f 1 force change waveform, the curve shown in Fig. 5 . Memory; 3: Department II. Specifically, it becomes the first first migration force change waveform. Because: "Memory all air pressure between 10
差,第! ·壓力變化波形也有所;麼作動閱係各動作具有參 2097-10151-PF 15 200936921 接著’說明將氣麗作動Μ 10安裝在製造裝置後,例如 在運轉數萬次後,測定氣壓作動閥10第2壓力變化波形之 情形。 自製造裝置卸下操作口 7及排氣口 8,安裝操作口侧 空氣配管11及排氣口側空氣配管12。此時,也可以不自 製造裝置卸下輸入口 17及輸出口 18。在輸入口 17及輸出 口 18流入有藥液,當卸下輪入口 1?及輸出口㈣,必須 ⑩停止生產線’在卸下時’配管内會被污染而清淨度會降低, 所以,會有因為再度洗淨而报花費時間及成本的問題。在 此’如本發明所述,當不自絮袢 目Ik裝置卸下氣壓作動閥10本 體24之輸入口 17及輸出口 而你拍,6 士 而能測疋%,就能不費力地 實施測疋’而且’因為無須洗淨,所以能降低成本。 為了測定氣壓作動閥1()第2壓力變化波形,在 壓:動閥H)本體24後’生產線的整備負責 到第4圖氣壓作動閥診斷測定裝置 之運接 〇 的連接端子44,安裝在連接到氣壓作動閥1n力偵知器3 媒从, 七&作動閥1 〇操作口 7之 操作口側空氣配管11A;使連接到第i壓力偵知器2 接端子43,安裝在連接到排氣口 8之 、連 芦氣口側空氲配誉1 而且,使操作流體流到操作口側空氣配。 之操作流體,係調整減壓閥6其 -s 。流動 0鳥)。因為通常,當不是既定壓H既U力(例如 1壓力變化波形與第2壓力變化波形 即使欲比較第 操作口側麼力是否成為既定壓力,係以;、法判疋差異。 來喊認。在此之既定I力,,係在測定第 屡力#知器3 m力變化波形時,Poor, number! ·The pressure change waveform is also there; the action of each system has the parameter 2097-10151-PF 15 200936921 Next, the description will be performed after the manufacturing device is installed, for example, after tens of thousands of operations, the air pressure actuating valve 10 is measured. The case of the second pressure change waveform. The operation port 7 and the exhaust port 8 are removed from the manufacturing apparatus, and the air port 11 and the exhaust port side air pipe 12 are attached to the operation port side. At this time, the input port 17 and the output port 18 may not be removed from the manufacturing apparatus. When the input port 17 and the output port 18 are filled with the chemical liquid, when the wheel inlet 1 and the output port (4) are removed, the production line must be stopped 10. When the pipe is unloaded, the pipe will be contaminated and the degree of cleaning will be lowered. Because of the time of washing again, it is a matter of time and cost. Here, as described in the present invention, when the input port 17 and the output port of the body 24 of the air pressure actuating valve 10 are removed from the apparatus, the 6k can be measured and the 疋% can be measured without difficulty. Measure 'and' because it does not need to be cleaned, so it can reduce costs. In order to measure the second pressure change waveform of the air pressure actuating valve 1 (), after the pressure: the moving valve H) of the main body 24, the maintenance line of the production line is responsible for the connection terminal 44 of the transport valve of the pneumatic actuating valve diagnostic measuring device of Fig. 4, installed in Connected to the pneumatic actuating valve 1n force detector 3 medium slave, seven & actuating valve 1 〇 operating port 7 operating port side air pipe 11A; making connection to the i th pressure detector 2 terminal 34, installed in the connection The exhaust port 8 is connected to the reed port side and is also provided with the operating fluid flowing to the operating port side. The operating fluid is adjusted to the pressure reducing valve 6 -s. Flow 0 birds). Usually, when it is not the predetermined pressure H and the U force (for example, if the pressure change waveform and the second pressure change waveform are to be compared with each other, the force is determined to be a predetermined pressure, and the difference is determined by the method. In this case, the I force is determined by measuring the 3 m force variation waveform of the first force.
2097^]〇15]-PF 16 200936921 事先使既疋麼力記憶在控制部1記憶體Μ,將自第1壓力 變化波形之測定時記憶的既定壓力有5%以内之誤差當作 谷許祀圍。因為第1壓力變化波形之既定壓力也有誤差, 所以,當將第1壓力變化波形完全以〇 6MPa為基準,來考 慮第2壓力變化波形測定時之既定壓力時,誤差會變得报 大。 是否達到既定壓力,係在氣壓作動閥診斷測定裝置初 之液晶畫面41以曲線來顯示。又,流通操作流體之氣壓作 動閥10的識別號碼45及日期時間46係以液晶晝面41 顯示。 在本實施例中,雖然將既定壓力當作0.6 MPa,但是, 對應工廠内之供給操作流體的遂力,既定麼力係可以任意 f 〇.5MPa或〇.4 MPa設定。減壓闕6’係雖然能減麼,但 是’無法提高壓力。如第5圖所示,操作口侧壓力係一直 流動直到壓力成一定為止。 〇 冑過減㈣6而成既定壓力的操作流體,係通過電磁 闊5再通過操作口側空氣配管11A,而被送到操作口侧7。 電磁閥5 ’係錢定時序使操作流體供給到操作口 7 供給操作流體’使第4圖之氣壓作動閥診斷測定裝置4 測定開關48在既定時序為⑽。當成為⑽時,電磁閥 被打開,操作流體係通過操作口側空氣配管iu而被供^ 到操作π ^自操作α 7進人之操作流體係進人操作 進入操作至22之操作流體係往上推壓活塞13。當活2097^]〇15]-PF 16 200936921 The memory of the control unit 1 is stored in the memory of the control unit 1 in advance, and the error within 5% of the predetermined pressure stored in the measurement of the first pressure change waveform is taken as Wai. Since the predetermined pressure of the first pressure change waveform also has an error, when the first pressure change waveform is completely based on 〇 6 MPa, the error is increased when the predetermined pressure at the time of measuring the second pressure change waveform is taken into consideration. Whether or not the predetermined pressure is reached is displayed on the liquid crystal screen 41 at the beginning of the pneumatic actuation valve diagnostic measuring device. Further, the identification number 45 and the date and time 46 of the air pressure actuating valve 10 through which the operating fluid is circulated are displayed on the liquid crystal face 41. In the present embodiment, although the predetermined pressure is regarded as 0.6 MPa, the predetermined force can be set at any f 〇 5 〇 or 〇 . 4 MPa in accordance with the force of the supply operating fluid in the factory. Although the decompression 阙 6' system can be reduced, it is 'the pressure cannot be increased. As shown in Fig. 5, the pressure on the operation port side continues until the pressure is constant.操作 胄 胄 ( (4) 6 The operating fluid of a predetermined pressure is sent to the operation port side 7 through the electromagnetic vent 5 and then through the operation port side air pipe 11A. The solenoid valve 5' is supplied with the operating fluid to the operating port 7 to supply the operating fluid. The air pressure actuating valve diagnostic measuring device 4 of Fig. 4 determines that the switch 48 is at the predetermined timing (10). When it becomes (10), the solenoid valve is opened, and the operating flow system is supplied to the operation π through the operation port side air pipe iu. The operation flow system from the operation α 7 enters the operation flow system into the operation flow system of operation 22 The piston 13 is pushed up. When living
被往上推壓時,在排氣室21内之空氣會被壓縮。在排氣室 2097-10151-PF 17 200936921 21内被壓縮之空氣 乳係自排氣口 8被壓出。 第1壓力福知Λ 氣配管12而排出之V’係將自排氣口8通過排氣口側空 <二氣的排氣口侧壓力加以測定,# m 士 變化波形數據記愔/i H力 保匕隱在記憶體33。 將以第1壓六他4 全刀彳貞知器2及第2壓力偵知器3測 氣壓力當作第2壓力轡作 ^ 〇 _ , 二 i刀燹化波形。而且,第2壓力變化波形,When pushed upward, the air in the exhaust chamber 21 is compressed. The compressed air in the exhaust chamber 2097-10151-PF 17 200936921 21 is extruded from the exhaust port 8. The V' which is discharged by the first pressure Fukuichi gas pipe 12 is measured from the exhaust port side 8 through the exhaust port side air < the exhaust gas side pressure of the second gas, and the #m士变化 waveform data is recorded /i H Force protection is hidden in memory 33. The first pressure hexa-4 full knife finder 2 and the second pressure finder 3 are used as the second pressure ^ 〇 _ , and the second 燹 燹 波形 waveform. Moreover, the second pressure change waveform,
係被記隐在控制部1内的記憶體33 +。記憶體33,係铲 °己隐全部氣壓作動閥10的各第2壓力變化波形。因為氣壓 :作具有參差,第2壓力變化波形也有所不同。 將排氣口 8中之第2壓力變化波形與第1壓力變化波 形以CPU31來比較。 第1壓力變化波形之操作口側壓力及排氣口側壓力之 壓力波形’係以第5圖來表示。排氣口側壓力之變化,係 注意看排氣口側壓力之Η,所以將Η放大成第7圖來表示^ 第6 ( A)圖係排氣口中之壓力變化波形示意圖,其表 示如何對照壓力波形數據。在第6 (A)圖中,軸橫之7係 表示時間。縱軸之P係表示排氣口壓力。Pa係表示最大壓 力,Ta係Pa中之時間。Tb係具有離開Ta之既定時間差。 Pb係Tb時之壓力》k係表示排氣口之壓力變化波形。具體 說來,k= ( Pb-Pa) / ( Tb-Ta)。 與第1壓力變化波形之pa、Pa/Ta及k相比較,藉由 與第2壓力變化波形之Pa、Pa/Ta及k的變化,可判斷被 推定之狀態。Pa係表示排氣口最大壓力,Pa/Ta係表示開 閥逮度,k係表示排氣口壓力之變化.率。因為判斷多數的 2097-10151-pf 18 200936921 閥體’使第1壓力變化波形與第2壓力變化波形數據化, 而能較容易進行比較,所以較不費時間。又,能利用此數 據來判疋異常或警告等,結果,能更簡單而順利地實施 診斷。 例如’比較第i壓力變化波形與第2壓力變化波形之 數據,在5%左右之差值係當作測定誤差。當差值在大於 10%且小於20%時當作警告。當差值在大於2〇%時當作異 ❺ 常狀態。而且,當差值在大於5%且小於10%時,雖然尚 可使用’但是需要注意而下次再注意,或者,在下次保養 之前實施追加點檢。 在第6(B)圖中,pa係表示排氣口最大壓力。當第2 壓力變化波形之Pa與第i壓力變化波形之以有1〇%以上 之差異時,可推定活塞13作動不良’或者,致動器部有洩 漏。在第6 (B)圖中,pa/Ta係表示開閥速度。現在時點 變化壓力之Pa/Ta,係當與第1壓力變化波形之Pa/Ta有 ❹大於10%之差異時,可推定開閥速度已經降低。在第6(b) 圖中,k係表示排氣口壓力變化率。當第2壓力變化波形 之k與第1壓力變化波形之k有大於之差異時,可推 定致動器部有空氣洩漏。 第2壓力變化波形之類型,係具體表示於第8圖、第 9圖、第10圖及第11圖。 當測定第2壓力變化波形時,排氣口侧壓力,係當表 示於第7圖之初期狀態排氣口壓力,對應Ta之Tal,對應 .Tb之Tbl ’對應Pa之pai ’對應pb之Pbl,與第1壓力變. 2097-10151-PF 19 200936921 化波形之差異在5%以内時,如第丨2圖所示,可判定氣壓 作動閥無異常。 ^ 接著,當實施排氣口側壓力之測定時,如第8圖所示, 當對應Pa/Ta之Pa2/Ta2與對應初期狀態Pa/Ta之 有大於10%之差異時,如g 12圖所示,在對照壓力變化 數據後,可判斷活塞13之作動性能正在降低。可推測已經 產生以下3點。第1,可認為因為透過之藥液而第2〇型環 ⑩ 25已經膨脹而活塞13之滑動阻力已經增加。第2,因為彈 簧14已經腐蝕,可認為彈簧14被壓縮之動作變慢。第3, 因為潤滑脂已經用盡,可認為活塞13之滑動阻力已經增 加。如有以上3點而不加以處理,氣壓作動閥也無法發揮 既定能力之虞’所以必須更換氣壓作動閥1〇。 接著’當測定排氣口側壓力時,如第9圖所示,係超 過測定水準。因此,對應初期狀態Pal/Tal的部分,係在 第9圊中,無法測定Pa,所以與初期狀態相比較下,有時 〇 會有1 〇%以上之差異。又,因為無法測定Pa,所以也無法 測疋k,如第12圖所示,在與壓力波形數據對照後,與 及k之差異有時會大於丨,所以,與初期狀態比較時, 有時會有大於10%之差異。結果,因為第1〇型環2〇已經 磨耗,〇型環已經無法發揮密封效果,所以,可認為在致 動器部23内部已經產生空氣洩漏。因此,將氣壓作動閥 1 0加以更換。 接著,當測定排氣口侧壓力時,如第1 〇圖所示,當對 應Pa之Pa4係與對旄初期狀態Pa之Pal有大於10%之差It is hidden in the memory 33 + in the control unit 1. The memory 33 is a second pressure change waveform of all the pneumatic pressure actuating valves 10. Because the air pressure: has a stagger, the second pressure change waveform also differs. The second pressure change waveform in the exhaust port 8 is compared with the first pressure change waveform by the CPU 31. The pressure waveform of the operation port side pressure and the exhaust port side pressure of the first pressure change waveform is shown in Fig. 5. The change of the pressure on the exhaust port side is to pay attention to the pressure on the side of the exhaust port, so the Η is enlarged to the 7th figure to show the waveform of the pressure change in the exhaust port of the 6th (A) figure, which shows how to compare Pressure waveform data. In the 6th (A) diagram, the 7th axis of the axis represents time. P on the vertical axis indicates the exhaust port pressure. The Pa system represents the maximum pressure and the time in the Ta system Pa. The Tb system has a predetermined time difference from leaving Ta. The pressure at the time of Pb Tb"k represents the pressure change waveform of the exhaust port. Specifically, k = ( Pb-Pa) / ( Tb-Ta). The estimated state can be determined by the change of Pa, Pa/Ta, and k of the second pressure change waveform as compared with the first pressure change waveforms pa, Pa/Ta, and k. The Pa system indicates the maximum pressure of the exhaust port, the Pa/Ta system indicates the valve opening degree, and the k system indicates the change in the pressure at the exhaust port. Since it is judged that a large number of 2097-10151-pf 18 200936921 valve bodies "data" the first pressure change waveform and the second pressure change waveform, it is easier to compare, and therefore it takes less time. Moreover, this data can be used to determine an abnormality or a warning, and as a result, the diagnosis can be performed more easily and smoothly. For example, 'the data of the i-th pressure change waveform and the second pressure change waveform are compared, and the difference of about 5% is taken as the measurement error. Used as a warning when the difference is greater than 10% and less than 20%. When the difference is greater than 2〇%, it is treated as an abnormal state. Moreover, when the difference is more than 5% and less than 10%, although it is still usable, it is necessary to pay attention and pay attention next time, or perform an additional check before the next maintenance. In the sixth (B) diagram, pa is the maximum pressure at the exhaust port. When the difference between the Pa of the second pressure change waveform and the i-th pressure change waveform is 1% or more, it is estimated that the piston 13 is malfunctioning or the actuator portion is leaking. In the sixth (B) diagram, the pa/Ta system indicates the valve opening speed. The current time point Pa/Ta of the change pressure is estimated to be lower than the difference of Pa/Ta of the first pressure change waveform by more than 10%. In the sixth (b) diagram, k is the exhaust port pressure change rate. When there is a difference between k of the second pressure change waveform and k of the first pressure change waveform, it is estimated that there is air leakage in the actuator portion. The types of the second pressure change waveforms are specifically shown in Fig. 8, Fig. 9, Fig. 10, and Fig. 11. When the second pressure change waveform is measured, the pressure on the exhaust port side is expressed as the exhaust port pressure in the initial state of Fig. 7, corresponding to the Tal of Ta, and the Tbl of the corresponding Tb 'corresponds to the pa of the Pa' corresponding to the Pb of the pb. , and the first pressure change. 2097-10151-PF 19 200936921 When the difference between the waveforms is less than 5%, as shown in Fig. 2, it can be determined that there is no abnormality in the pneumatic actuator. ^ Next, when measuring the pressure on the exhaust port side, as shown in Fig. 8, when the Pa2/Ta2 corresponding to Pa/Ta and the corresponding initial state Pa/Ta are greater than 10%, such as g 12 As shown, after comparing the pressure change data, it can be judged that the actuation performance of the piston 13 is decreasing. It can be speculated that the following three points have been generated. First, it can be considered that the second 〇 ring 10 25 has expanded and the sliding resistance of the piston 13 has increased because of the permeated liquid. Second, since the spring 14 has been corroded, the action of the spring 14 being compressed is considered to be slow. Third, since the grease has been used up, it is considered that the sliding resistance of the piston 13 has increased. If the above three points are not treated, the pneumatic actuating valve will not be able to perform the established capacity. Therefore, the pneumatic actuating valve must be replaced. Then, when the pressure on the exhaust port side is measured, as shown in Fig. 9, the measurement level is exceeded. Therefore, the portion corresponding to the initial state Pal/Tal is in the ninth ,, and Pa cannot be measured. Therefore, compared with the initial state, there may be a difference of 1% or more. Moreover, since it is impossible to measure Pa, it is impossible to measure 疋k. As shown in Fig. 12, after comparing with the pressure waveform data, the difference between the sum and k may be larger than 丨, so when compared with the initial state, sometimes There will be more than 10% difference. As a result, since the first 〇-shaped ring 2〇 has been worn out, the 〇-shaped ring has no effect of sealing, and therefore, it is considered that air leakage has occurred inside the actuator unit 23. Therefore, the pneumatic actuating valve 10 is replaced. Next, when the pressure on the exhaust port side is measured, as shown in Fig. 1, when the Pa4 corresponding to Pa and the Pal in the initial state of Pa are greater than 10%, the difference is greater than 10%.
2097-10151-PF 20 200936921 異,而且,對應Pa/Ta之Pa4/Ta4係與對應初期狀態Pa/Ta 之Pal/Tal有大於1〇%之差異時,如第12圖所示,在對 照壓力波形數據後,可判斷作動性能已經降低。如第12圖 所不,在對照壓力波形數據後,可判斷因為作動不良而無 法完全開閥。結果,第20型環25係藉由透過之藥液而膨 脹,可認為會妨礙活塞13順利上昇。又,因為彈簧14已 經腐蝕,可認為會妨礙順利上昇。又,因為潤滑脂已經用 盡’可以認為會妨礙順利上昇1此,必須更換氣壓作動 閥10。 接著,當測定排氣口側壓力時,如第丨丨圖所示,如第 11圖所不,當對應Pa之Pa5係與對應初期狀態Pa之 有大於ίο%之差異,而且,對應Pa/Ta之Pa5/Ta5係與對 應初期狀態Pa/Ta之Pal/Tai有大於10%之差異時,如第 12圖所示,在對照壓力波形數據後,可判斷作動性能已經 降低。如第12圖所示,在對照壓力波形數據後,可判斷因 為咬死而無法完全開闕。結果,因為異物混入致動器部23 内所以在活塞13上昇時會產生阻力,可認為會妨礙活塞 13順利上昇。又,因為彈簧14已經腐蝕,所以在活塞13 上昇%會產生阻力,可認為會妨礙活塞丨3順利上昇。又, 因為潤滑脂已經用盡’所以在活塞i 3上昇時會產生阻力, 可認為會妨礙活塞13;嗔利上#。因此,必須更換氣壓作動 閥10。 在第1實施形態中,雖然說明過當使操作流體供給到 氣壓作動閥時,將被排出之空氣壓力變化加以測定,但是,2097-10151-PF 20 200936921 is different, and the Pa4/Ta4 system corresponding to Pa/Ta has a difference of more than 1%% from the Pal/Tal corresponding to the initial state Pa/Ta, as shown in Fig. 12, in the control pressure After the waveform data, it can be judged that the actuation performance has been lowered. As shown in Fig. 12, after comparing the pressure waveform data, it can be judged that the valve cannot be completely opened due to malfunction. As a result, the 20th type ring 25 is swollen by the permeated chemical liquid, and it is considered that the piston 13 is prevented from rising smoothly. Also, since the spring 14 has been corroded, it is considered to hinder a smooth rise. Also, since the grease has been used up, it can be considered that it will hinder the smooth rise. Therefore, the air pressure actuating valve 10 must be replaced. Next, when the pressure on the exhaust port side is measured, as shown in Fig. 11, as shown in Fig. 11, when the Pa5 system corresponding to Pa has a difference larger than ίο% from the corresponding initial state Pa, and corresponding to Pa/ When the Pa5/Ta5 system of Ta has a difference of more than 10% from the Pal/Tai corresponding to the initial state Pa/Ta, as shown in Fig. 12, after the pressure waveform data is compared, it can be judged that the actuation performance has been lowered. As shown in Fig. 12, after comparing the pressure waveform data, it can be judged that it cannot be completely opened due to seizure. As a result, since the foreign matter is mixed into the actuator portion 23, a resistance is generated when the piston 13 rises, and it is considered that the piston 13 is prevented from rising smoothly. Further, since the spring 14 has been corroded, a resistance rises in the piston 13 by a large amount, and it is considered that the piston 丨3 is prevented from rising smoothly. Moreover, since the grease has been used up, resistance is generated when the piston i 3 rises, which is considered to hinder the piston 13; Therefore, the pneumatic actuating valve 10 must be replaced. In the first embodiment, it has been described that when the operating fluid is supplied to the pneumatic actuating valve, the change in the air pressure to be discharged is measured.
2097-10151-PF2097-10151-PF
❹ 200936921 在使操作流體自氣壓作動閥排㈣,將被排出之空氣的壓 力變化加以測定,也能實施同樣的診斷。 圖係表示排出操作流體時之排氣口 8中之壓力波 形數據對照示意圖。第13圖係與第6圖相對應。僅在以閉 閥速度Pc/Td來取***閥速度之點有所不同。 第η圖係表示排氣時之麼力波形對照示意圖。第 圖係與第12圖相對應。 雖然省略詳細說明,但是,當操作流體被排出時,即 ㈣㈣氣σ 8 a力波形,也能與供給 操作流體同樣地’實施氣M作動閥之動作診斷。 以上’使是否異常能在錢作動閥1{)充分稼動之狀態 下實施判定,藉此’能在故陳前更換氣麼作動閥。藉此, 藉由掌握氣塵作動閥作動不良之前兆,能事先預防因為氣 壓作動閥故障而導致的製造裝置停止或生產線停止。 另外’能消除在未達更換時間就更換氣壓作動閥之情 形,氣壓作動閥之更換頻率會減少,所以,能減少更換氣 壓作動閥之費用。 又,在診斷氣壓作動閥時’當卸下輸入口及輸出口時, 必須將生產線内之配管全部洗淨,用於洗淨之時間及成本 會报多。在此’當使用本發明時’無須將氣魔作動閥本體 之輸入口及輸出口自製造裝置卸下,僅回接操作流體用管 體即可载,所以’無須繁雜手續即可敎,而且,無須 洗淨配管内部,所以能降低成本。 (第2實施形態) * 2097-10151-PF 22 200936921❹ 200936921 The same diagnosis can be performed by measuring the pressure change of the air to be discharged from the air operated valve row (4). The figure shows a comparison of the pressure waveform data in the exhaust port 8 when the operating fluid is discharged. Figure 13 corresponds to Figure 6. The point at which the valve opening speed is replaced by the closing valve speed Pc/Td differs only. The nth figure shows a schematic diagram of the force waveform when exhausting. The figure corresponds to Figure 12. Although the detailed description is omitted, when the operating fluid is discharged, that is, the (four) (four) gas σ 8 a force waveform, the operation diagnosis of the gas M actuating valve can be performed in the same manner as the supply of the operating fluid. In the above, it is judged whether or not the abnormality can be fully activated in the state in which the money actuating valve 1{) is fully moved, thereby making it possible to change the gas before the accident. Thereby, by grasping the premise that the dust actuating valve is malfunctioning, it is possible to prevent the manufacturing apparatus from being stopped or the production line from being stopped due to the malfunction of the pneumatic actuating valve. In addition, it is possible to eliminate the situation in which the pneumatic actuating valve is replaced when the replacement time is not reached, and the frequency of replacement of the pneumatic actuating valve is reduced, so that the cost of replacing the pneumatic actuating valve can be reduced. In addition, when diagnosing the pneumatic actuating valve, when the input port and the output port are removed, all the pipes in the production line must be cleaned, and the time and cost for washing will be reported. Here, when the present invention is used, it is not necessary to remove the input port and the output port of the gas-mousing valve body from the manufacturing device, and only the operating fluid can be loaded with the pipe body, so that the process can be carried out without complicated procedures. There is no need to clean the inside of the piping, so it can reduce costs. (Second Embodiment) * 2097-10151-PF 22 200936921
❹ ,使判定必須更換之氣壓作動閥ίο的識別號碟及測定 之壓力變化波形’事先記憶在控制部i内之記憶體33。而 且’回應來自整備負責人的要求,藉由使這4b數據可傳送 到個人電腦’㉟回收積存的數據。積存的數據係通常製 造業者需實驗數萬次才能獲得的f貴數據。該數據無須自 打實驗,製造業者能在本發明使用者通常的使用結果獲得 數據,所以,能減少實施實驗所需的費用。又能自本發 明之全部使用者獲得數據,所以,能比自行實驗獲得更多 數據,其為非常有效的收集數據的機構。 (1)如上所詳述,當使用用於確認本實施例氣壓作動 閥10之動作狀態的氣壓作動閥診斷方法時,其為一種用於 確認被配設於製造裝置之氣壓作動閥10的動作狀態的氣 壓作動閥診斷方法,其特徵在於具有:第i工序,當使前 述氣壓作動閥1〇設置於製造裝置,使操作流體供給到氣壓 作動閥10之操作口 7時’或排出操作流體時,將自氣壓作 動閥1 〇排氣口 8吸排出之流體壓力加以測定,將其壓力變 化加以記憶;第2工序’當在重複動作氣壓作動閥1〇後, 使操作流體供給到氣壓作動閥10之操作口 7時,或排出操 作々IL體時,將自氣磨作動閥1〇排氣口 8吸排出之流體壓力 加以測定,將其壓力變化加以記憶;以及第3工序,將以 第1工序測定之壓力變化與以第2工序測定之壓力變化加 以比較’而將氣壓作動閥1 〇動作狀態之變化加以確認;所 以’藉由掌握氣壓作動閥1〇作動不良之前兆,能事先預防 因為氣壓作動閱故障而導致的製造裝置停止或生產線停 2097-10151-pf 23 200936921 止0 又’在診斷氣壓作動閥10時,當卸下輸入口及輸出口 時,必須洗淨所以报費時間,又,用於洗淨之成本會报多。 在此,當冑用本發明_,無須將氣麼作動閥本體之輸入口 =輸出口自製造裝置卸τ,僅回接操作流體用管體即可測 定,所以,無須繁雜手續即可測定,而且,無須洗淨配管 内部’所以能降低成本。 ❿ (2)在記載於⑴之氣壓作動閥診斷方法中,氣壓 作動閥係液體閥,藉由比較壓力變化而由氣壓作動間 10之動作狀態變化來判斷是否需更換氣壓作動閥10,所 以’藉由掌握氣壓作動閥1G作動不良之前兆,能事先預防 因為氣壓作動閥故障而導致的製造裝置停止或生 止。 又’在診斷氣壓作動閥10時’當卸下輸入口及輸出D 時’必須洗淨所以报費時間’又’用於洗淨之成本會很多。 在此,當制本發料,無㈣U作動閥本體之輸入口 及輸出口自製造裝置却了’僅回接操作流體用管體即可叫 疋’所以’無須繁雜手績即可測定’而且,無須洗 内部’所以能降低成本。 ⑺而且’用於將配設於製造裝置之氣壓作動 監視,而確認氣壓作動閱10的動作狀態變❹ The memory disk 33 in the control unit i is previously stored in the identification disk of the air pressure actuating valve ίο and the pressure change waveform measured. And, in response to the request from the person in charge of the maintenance, the data can be recovered by transferring the 4b data to the personal computer. The accumulated data is the expensive data that the manufacturer usually needs to experiment with tens of thousands of times. The data does not require self-testing, and the manufacturer can obtain data in the usual use results of the user of the present invention, so that the cost of implementing the experiment can be reduced. Data can be obtained from all users of the present invention, so that more data can be obtained than self-experiment, which is a very effective organization for collecting data. (1) As described in detail above, when the air pressure actuating valve diagnosis method for confirming the operating state of the air pressure actuating valve 10 of the present embodiment is used, it is an operation for confirming the air pressure actuating valve 10 disposed in the manufacturing apparatus. The state air pressure valve diagnostic method is characterized in that: in the i-th step, when the air pressure actuating valve 1 is placed in the manufacturing device to supply the operating fluid to the operation port 7 of the air pressure actuating valve 10, or when the operating fluid is discharged The fluid pressure from the pneumatic actuating valve 1 〇 exhaust port 8 is measured and the pressure change is memorized; the second step 'when the pneumatic actuating valve is repeatedly operated, the operating fluid is supplied to the pneumatic actuating valve When the operation port 7 of 10 is operated, or when the operation of the 々IL body is performed, the fluid pressure that is sucked and discharged from the air priming valve 1 〇 exhaust port 8 is measured, and the pressure change is memorized; and the third step is The pressure change measured in the first step is compared with the pressure change measured in the second step, and the change in the operating state of the pneumatic actuating valve 1 加以 is confirmed; therefore, by grasping the pneumatic actuating valve 1〇Before the malfunction, it is possible to prevent the manufacturing device from stopping or the production line stop due to the malfunction of the air pressure. 2097-10151-pf 23 200936921 Stop 0 and 'When the pneumatic pressure valve 10 is diagnosed, when the input port and output are removed At the time of the mouth, it is necessary to wash the time, so the time for the cleaning will be reported. Here, when the present invention is used, it is not necessary to remove the input port of the valve body from the manufacturing device = the output port is removed from the manufacturing device, and only the pipe body for the operating fluid can be measured, so that it can be measured without complicated procedures. Moreover, there is no need to clean the inside of the piping, so the cost can be reduced. (2) In the air pressure actuating valve diagnostic method described in (1), the air pressure actuating valve liquid valve determines whether the air pressure actuating valve 10 needs to be replaced by a change in the operating state of the air pressure actuating 10 by comparing the pressure changes, so that ' By grasping the premise that the pneumatic actuating valve 1G is malfunctioning, it is possible to prevent the manufacturing device from being stopped or stopped due to the malfunction of the pneumatic actuating valve. Further, when the air pressure actuating valve 10 is diagnosed, when the input port and the output D are removed, 'there must be washed, so the time for paying the bill' is also a lot of cost for washing. Here, when the original material is produced, the input port and the output port of the (4) U actuating valve body are self-manufactured, but the pipe can only be called back to the operating fluid, so that it can be measured without complicated performance. There is no need to wash the interior' so it can reduce costs. (7) Further, it is used to monitor the air pressure operation of the manufacturing device, and the operation state of the air pressure reading 10 is changed.
Si:具有:壓力控制機構,使操作流體供给 …操作口 7;開閉機構,使操作流 到氣屋作動閥1G之操作σ7或排氣;岐機構,將 2097-10151-PF 24 200936921 排氣口 8排出之流體壓力加 , 將以測定機構測得之測 、…己隐機構 腺# M m ^ 疋果加以記愫,·以及確認機構, 將使氣壓作動閥1 〇設置於锢、生祐要 嬸谨之盆W 又置於製造裝置而測得且記憶在記憶 機構之第】屋力變化,與其後測得之第 較’來確認氣壓作動閥1〇 力變化加以比 動作狀I、之變化;所以,藉由裳 握氣愿作動閥作動不良藉由掌 貼妖暗兆 事先預防因為氣壓作動 閥故障而導致的製造裝置停止或生產線停止。 又’在診斷氣愿作動閥】〇時,當卸下輸入口及輸出口 :此以很f時間,又,用於洗淨之成本會很多。 及輸出ΓίΓ發明時,無須將氣M作動閥本體之輸入口 —j 製造裝置卸下,僅回接操作流體用管體即可測 疋’所以,無須繁雜手續即可測定, 内部,所以能降低成本。 無須洗淨配管 :4)而且,在記載於(3)之氣壓作動閥診斷裝置中, 氣壓作動閥10係液體閥,藉由比較壓力變+ ..Ίη ^ ^ 平乂盈刀變化而由氣壓作動 紙態變化來判斷是否需更換氣壓作動閥10, Π氣握氣壓作動閥作動不良之前死,能事先預防 止。 ③等致的製造襞置停止或生產線停 又2診斷氣壓作動閥10時,當卸下輸人口 :必,淨所以很費時間,又,用於洗淨之成本會很多。 在此 4使用本發明時,無領赋名 拜㈣“壓作動閥本體之輸入口 τ自製造装置却下,僅回接操作流體用管體即可測 疋’所以,無須繁雜手續即可測定,而且,無須洗淨配管Si: has: a pressure control mechanism that supplies the operating fluid to the operating port 7; an opening and closing mechanism that causes the operation to flow to the operation of the gas house actuation valve 1G σ7 or exhaust; the 岐 mechanism, the 2097-10151-PF 24 200936921 vent 8 The fluid pressure of the discharge is added, and the measured value measured by the measuring mechanism, the hidden body gland # M m ^ is recorded, and the confirmation mechanism is set, and the pneumatic actuating valve 1 〇 is set to 锢, 生佑要婶 之 盆 又 又 又 又 又 又 又 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆Therefore, by the slap in the air, the valve is not operative, and the manufacturing device is stopped or the production line is stopped due to the malfunction of the pneumatic actuating valve. In addition, when the valve is diagnosed, the input port and the output port are removed: this takes a very f time, and the cost for cleaning is much higher. And the output ΓίΓInvention, it is not necessary to remove the input port of the gas M valve body. cost. There is no need to clean the pipe: 4) Moreover, in the pneumatic actuator valve diagnostic device described in (3), the pneumatic actuating valve 10 is a liquid valve, and the pressure is changed by the pressure change + ..Ίη ^ ^ Actuate the paper state change to determine whether it is necessary to replace the air pressure actuating valve 10, and the helium gas gripping valve is dead before the actuating valve is actuated, and can be prevented in advance. 3, etc. The manufacturing device is stopped or the production line is stopped. When the pneumatic pressure actuating valve 10 is diagnosed, when the population is removed, it is necessary. The net is very time consuming, and the cost for washing is much higher. When the present invention is used in this case, there is no such thing as a name. (4) "The input port τ of the valve body is pressed from the manufacturing device, and only the pipe body for the operating fluid can be tested." Therefore, it can be measured without complicated procedures. Moreover, there is no need to clean the piping
2097-10151-PF 25 200936921 内部’所以能降低成本。 (5)而且’在記載於(3)或(4)之氣壓作動閥診斷 裝置中’記憶機構’係能區別已判斷過是否需要更換之氣 壓作動閥1 0,將測得之其壓力變化加以記憶,且具有通訊 機構’所以,能回收積存之數據,能滅少用於實施實驗所 需之費用。又,能自本發明之全部使用者獲得數據,所以, 能比自行實驗獲得更多數據,其為非常有效的收集數據的 機構。 而且,本發明,係不侷限於上述實施形態,而可作種 種應用。 例如’操作流體,係並不偶限於空氣,也可以使用氮 氣。 【圖式簡單說明】 第1圖係表示氣壓作動閥診斷裝置構成之方塊圖。 ⑩ 第2圖係表示作為診斷對象之氣壓作動閥構造的剖面 圖。 第3圖係表示氣壓作動閥診斷裝置控制部之方塊圖。 第4圖係使用在氣壓作動閥診斷之氣壓作動閥診斷測 定裝置40的外觀圖。 第5圖係表示操作口壓力及排氣口壓力。 第6圖(A)、(B)係表示壓力波形數據對照之示意圖。 第7圖係表示排氣口側壓力之第丨壓力變化波形的示 意圖。 .2097-10151-PF 25 200936921 Internal 'So it can reduce costs. (5) And 'the 'memory mechanism' in the pneumatic actuated valve diagnostic device described in (3) or (4) is capable of distinguishing whether or not the pneumatic actuating valve 10 that has been determined to be replaced is used, and the measured pressure change is applied. Memory, and has a communication mechanism', so it is possible to recover the accumulated data, which can reduce the cost of implementing the experiment. Further, since data can be obtained from all users of the present invention, it is possible to obtain more data than self-experiment, which is a very effective mechanism for collecting data. Further, the present invention is not limited to the above embodiment, and can be applied to various applications. For example, the operating fluid is not limited to air, and nitrogen gas may also be used. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing the configuration of a pneumatic actuator valve diagnostic device. 10 Fig. 2 is a cross-sectional view showing the structure of a pneumatic actuator valve to be diagnosed. Fig. 3 is a block diagram showing a control unit of the pneumatic actuated valve diagnostic device. Fig. 4 is an external view of a pneumatic pressure actuating valve diagnostic measuring device 40 which is diagnosed by a pneumatic actuated valve. Figure 5 shows the operating port pressure and exhaust port pressure. Fig. 6 (A) and (B) are views showing a comparison of pressure waveform data. Fig. 7 is a view showing a ninth pressure change waveform of the pressure on the exhaust port side. .
2097-10151-PF 26 200936921 2壓力變化波形(1 ) 2壓力變化波形(2 ) 2壓力變化波形(3 ) 第8圖係表示排氣口側壓力之 的示意圖。 第9圖係表示排氣口側壓力之第 的示意圖。 第10圖係4示排4口側壓力 的示意圖。 昂 ❹ 的示ΪΓ。圖係表示排氣口侧壓力之第2壓力變化波形⑷ 第12圖係表示堡力波形對照之示意圖。 第13圖(A)、(B)係表示排出操作流體時之排氣口 8中 之壓力波形數據對照示意圖。 第14圖係表不排出操作流體時之排氣。8中之壓力波 形對照示意圖。 【主要元件符號說明】 1 控制部 2 第1壓力偵知器 3 第2壓力偵知器 5 電磁閥 6 減壓閥 7 操作口 8 排氣口 9 交流插座 1〇 氣壓作動閥 2〇97-ΐ〇ΐ5Γ-ρρ 272097-10151-PF 26 200936921 2 Pressure change waveform (1) 2 Pressure change waveform (2) 2 Pressure change waveform (3) Fig. 8 is a view showing the pressure on the exhaust port side. Fig. 9 is a view showing the first stage of the pressure on the exhaust port side. Fig. 10 is a schematic view showing the pressure on the 4-port side. Ang's demonstration. The figure shows the second pressure change waveform of the pressure on the exhaust port side (4) Fig. 12 is a schematic view showing the comparison of the wave force waveform. Fig. 13 (A) and (B) are views showing a comparison of pressure waveform data in the exhaust port 8 when the operating fluid is discharged. Figure 14 is a diagram showing the exhaust gas when the operating fluid is not discharged. A schematic diagram of the pressure waveform in 8 . [Description of main components] 1 Control unit 2 1st pressure detector 3 2nd pressure detector 5 Solenoid valve 6 Pressure reducing valve 7 Operation port 8 Exhaust port 9 AC socket 1 〇 Pneumatic actuating valve 2〇97-ΐ 〇ΐ5Γ-ρρ 27
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JP2002005334A (en) * | 2000-06-20 | 2002-01-09 | Nichigi Engineering Co Ltd | Anomaly detector for diaphragm valve device |
JP3411980B2 (en) * | 2000-10-25 | 2003-06-03 | 日本原子力発電株式会社 | Abnormality diagnosis and deterioration prediction method and device in valve device |
JP2002174358A (en) * | 2000-12-08 | 2002-06-21 | Smc Corp | Solenoid valve with failure diagnostic function |
JP2002323402A (en) * | 2001-04-26 | 2002-11-08 | Tomoe Tech Res Co | Detector of valve leakage, method, actuator for valve driving and program |
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JP2004019792A (en) * | 2002-06-17 | 2004-01-22 | Advance Denki Kogyo Kk | Transmission gas discharge structure of diaphragm valve |
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JP2007522563A (en) * | 2004-02-05 | 2007-08-09 | ローズマウント インコーポレイテッド | Diagnosis method of emergency shut-off valve using pressure transmitter |
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