200930465 六、發明說明： 【發明所屬之技術領域】 本發明係關於能適當調整塗料移送量，且可提升塗佈膜厚 -精度，並可達裝置構造小巧化的塗佈裝置。 ， 【先前技術】200930465 VI. Description of the Invention: [Technical Field] The present invention relates to a coating apparatus capable of appropriately adjusting the amount of coating material to be transferred, and which can improve the coating film thickness-accuracy and to achieve a compact structure. [Prior Art]
❹ 習知技術中，在要求膜厚精度的電聚顯示面板或液晶面板 等製仏領域及半導體製造領域等所使用的塗職置，已知有 如專利文獻1及2所揭示者。該等專利文獻中，對塗佈裝置 的塗料供應係採用所謂的管件式膜片泵（tube diaph零 卿P)。管件式膜U已知有如專利文獻3所揭示者。在專 利文獻3中有揭示’在筒體内同軸地配置著管件，並在管件 外側形成動作流體空間，並且在管件關流通著屬於移送流 體的光阻液。然後’彻動作流體所產生的加賴而使管件 朝徑向變形’藉此獲得㈣用，便可進行光阻液的移送。 [專利文獻1]日本專利特開2綱_5⑽26號公報 [專利文獻2]日本專利特開瀬號公報 [專利文獻3]日本專利特開2__234589號公報 【發明内容】 (發明所欲解決之問題） 如先前技術舰相對管件麟加㈣料，例如使截面 變=3:向變形為橢圓形狀等，相較於管件内容積 下，利用管件之變形較能獲得栗作用。所以，頗 097145614 4 200930465 難調整流體移送量，特 驻里士 将别係虽適用於要求膜厚均勻化的塗佈 :^膜厚調整極為困難。且，從管件外側施行加壓的形 1旦良確保e件外周圍的動作流體空間，將需要較流體移 -Μ為更絲量的動作舰”，所以，將職流體移送量 不均衡的大型物，且亦有塗佈裝置大型化的問題。 Α發月係有n於上述習知問題*完成，目的在於提供能適 胃調整錄料量，並可提升㈣料精度，且可達裝置構 〇 造小巧化的塗佈裝置。 (解決問題之手段） 本發明的塗佈裝置係具備有：管件、殼體、塗料導入部、 二料土出σ卩及i,而’該管件係於内部進行流體供排而進 行膨脹•收縮；贿體係形成妹容著該f件的歧管；該塗 料導入部係於該殼體上與上述歧管相連通而形成；該塗料吐 出部係於上賴體上與上述歧管錢通㈣成；職係連結 於上述管件’為能使該管件收義將塗料從上述塗料導入部 填充於上述歧管内，或使該管件膨脹而將該歧f内所填充的 塗料從上述塗料吐出部中吐出’而將非㈣性且非揮發性流 體供應給該管件内部、或從該管件内部進行抽取排出。 上述泵係注射栗（syringe pump)，其特徵為其構成為上述 注射果的擠筒（cylinder)連結於上述殼體，並且在上述殼體 上形成使上述歧管與上述擠筒内部相連通的通孔。殼體與注 射泵的擠筒之連結構造係可使二者直接連結，或亦可經由配 097145614 5 200930465 管等連結構件而相連結。此外，通孔係可使歧管與擠筒内部 直接連通，或亦可經由配管等連結構件使二者相連通，而可 為任一方式。 在上述塗料導入部侧，其特徵為設有防止上述歧管内所填 - 充塗料發生逆流的止逆閥。 上述殼體係由模具本體構成，在該模具本體的上述歧管中 内建著上述管件，而上述塗料吐出部係由狹縫狀喷嘴構成。 © (發明效果） 本發明的塗佈裝置係能適當調整塗料移送量，並可提升塗 佈膜厚精度，且可達裝置構造小巧化。 【實施方式】 ❹ 以下’針對本發明塗佈裝置的較佳一實施形態，參照所附 圖式進行詳細說明。本實施形態的塗佈裝置i基本上係如圖 1及圖2所示’具備有：管件2、模具本體4、塗料導入部5、 狹縫狀喷嘴6、及泵7。該管件2係於㈣進料體F供排 而進行膨脹·收縮。該模具本體4係殼體，並形成有收容著 管件2的歧管3。該塗料導人部5係賴具本體$使苴與歧 管3連通_成。該狹縫狀料6係塗料吐出部胁模且 本體4使其與歧管3連通而形成。該泵7係連結於管件、^ 為能使管件2收縮而將塗料P從塗料導人部5填充於歧管3 内，或使管件2膨㈣將歧管3内所填充的塗料p從狹縫狀 喷嘴6中吐出’而將非壓縮性且非揮發性流體管件 097145614 200930465 2内部、或從管件2内部進行抽取排出。 系7係主射果’注射栗7的擠筒12直接連結於模具本體 4,且在模具本體4上有形成連通歧管3與擠筒12内部的通 -孔4a。在塗料導入部5側設有防止在歧管3内所填充之塗 - 料P發生逆流的止逆閥8。 圖1(a)所示係包含塗料抽取時的模具本體側剖面之整體 構&圖圖1(b)所示係圖i(a)中A_A線切剖剖面圖，圖2(a) ©所不係塗料吐出時的模具本體等之侧剖面圖，圖抑）所示 係圖2(a)中B-B線切剖剖面圖。本實施形態的塗佈裝置！ 主要係由下述所構成：在玻璃面板等塗佈對象物X上形成塗 膜並施行塗佈的模具本體4、對模具本體4供應塗料p的供 應系統9、内建設置於模具本體4中的管件2、以及對管件 2進行流體F供^卜的泵7。 模具本體4係利用不錄鋼等金屬材料而形成高剛性。模具 〇本體4係在塗佈對象物X寬度方向上長長的形成，並利用未 圖示的驅動機構在塗佈對象物X的長度方向上驅動移動。在 模具本體4的内部沿長度方向形成巾空_狀歧管3。在歧 g 3的下端與其相連通地形成狹縫狀喷嘴6。狹縫狀喷嘴6 係4乎跨越歧管3長度方向全域，並較該歧管3更朝下方貫 通模具本體4而形成。此外’在模具本體4中貫通形成連通 於歧官3之諸如流通孔等塗料導入部5。 塗料導入部5連接於供應系統9。供應系統9係由下述所 097145614 7 200930465 構成·儲存著塗料p的塗料槽10、一端***於塗料槽10内 且另一端連接於塗料導入部5並具可撓性的管件配管η、 以及止逆閥8。該止逆閥8係設置於相對於模具本體4而靠 - 塗料導入部5側的管件配管11途中，並容許從塗料槽1〇 - 朝歧管3進行塗料ρ流通，但阻止從歧管3内朝塗料槽1〇 的塗料Ρ逆流。止逆閥8最好盡可能靠近塗料導入部5而設 置。 β 在模具本體4的歧管3内部沿長度方向收容著膨脹•收縮 自如的細長管件2。管件2係由柔軟且具可撓性的合成樹脂 材料而形成。管件2係依在一處設有開口部2a的袋形態而 形成。圖示例中，開口部2a係形成於管件2的長度方向一 端侧。管件2的一端側係固定於歧管3的長度方向一端部。 在歧管3的一端部貫通模具本體4而形成通孔4a，在該通 孔4a中插通管件2的開口部2a。管件2的另一端侧固定於 ® 歧管3的長度方向另一端部。管件2藉由進行膨脹而增加内 容積’則使歧管3内空間變狹窄。反之，管件2藉由進行收 縮而減少内容積，則擴大歧管3内空間。 在模具本體4中，於歧管3另一端部側連通著通孔4a並 設置泵7。本實施形態係以注射泵為例示。泵7係由下述所 構成··經由通孔4a連通於管件2開口部2a的擠筒12、在 擠筒12内滑動自如地進行往復移動的活塞13、以及驅動著 活塞13的驅動部14。泵7的擠筒12係直接連結並安裝於 097145614 〇 200930465 模具本體4上。擠筒】2内部係經由開口部2a直接連通於管 件2内部。在藉由活塞13的往復移動而使内容積擴大縮小 的擠筒12内’封入非壓縮性且非揮發性流體f。 - 泵7係利用活塞13的往復移動，而將流體F供應給管件 - 2内部、或從管件2内部抽取排出，藉此便使管件2膨脹· 收縮。活塞13最後退的位置處被設定為管件2的初始收縮 狀態’活塞13最前進的位置處被設定為管件2的最大膨脹 ❹ 狀態。若管件2收縮，歧管3内便呈負壓狀態，藉此便從供 應系統9經由塗料導入部5使塗料P流入並填充於歧管3 内。此外，若管件2膨脹，歧管3内壓力便上升，且由於止 逆閥8之作用，並將歧管3内所填充的塗料P從狹縫狀噴嘴 6中吐出。 管件2的初始收縮狀態係可設定為未對管件2作用任何流 體壓力的自然狀態，亦可設定為管件2内僅殘留某程度流體 © F同時並賦予預壓的狀態，或者亦可設定為從管件2内幾乎 抽出全部流體F而變窄或萎縮的狀態。本實施形態的泵7 雖以注射泵例示，但亦可使用隔片泵（diaPhragm pump)等。 接著，針對本實施形態塗佈裝置1之作用進行說明。首 先，針對待機狀態進行說明，利用泵7朝歧管3内填充塗料 P。如圖1所示，使泵7的活塞13後退移動，而從管件2 内抽取排出非壓縮性且非揮發性的流體F。若抽取流體F， 利用充滿内部的流體F而膨脹的管件2便減少其内容積而收 097145614 9 200930465 縮。若收縮’歧管3内便呈負壓狀態。藉此，塗料p便從供 應系統9經_由塗料導入部5流入並填充於歧管3内。在活塞 13最後退的位置處，管件2將呈初始收縮狀態，此時在歧 - 管3内所填充的塗料量便使用於一次的塗佈作業。 ， 其次’針對塗佈狀態進行說明，利用驅動機構（未圖示） 開始進行模具本體4的驅動移動，若到達塗佈開始位置，便 從狹缝狀噴嘴6中吐出塗料Ρ，而在塗佈對象物X上形成塗 ❹膜。在進行塗佈期間中，泵7的活塞13每次僅些微逐漸前 進。若依此使活塞13前進，擠筒12内的流體f便每次僅些 微供應給管件2内，藉此管件2的内容積便每次少許增加， 所以管件2便每次持續少許膨脹。歧管3内空間便依管件2 膨脹份量變狹窄，藉由依變狹窄所產生的歧管3内壓力上 升’該歧官3内所填充的塗料ρ便從狹縫狀喷嘴6朝塗佈對 象物X吐出，藉此便形成塗膜。此時，藉由止逆閥8的作用， © 防止塗料Ρ經由供應系統9逆流至塗料槽1〇中。 在模具本體4到達塗佈對象物X的塗佈結束位置之段階， 便利用從I 7所供應的趙F使管件2成騎大膨脹狀態， 藉此便結束歧管3内壓力上升，而結束從狹縫狀喷嘴6中的 塗料Ρ吐出。依如上述便完成—次的塗佈作業。在塗佈作業 束後為⑨移往準備進行下—次塗佈的待機狀態，便利用 栗7迅速地抽取排出管件2 _流體F，而成為初始收縮狀 態。藉此依如上述便在歧管3内填充著塗料ρ。 097145614 200930465 而係從内匈對=1,不同於先前技術， ^直2伸膜‘收縮的管件2,⑽依管件2内容積變 量：='_從狹缝狀”6中_ 度方向上此外，管件2係在狹縫狀噴嘴6的長 嘴6長声方ΓΓ地擴大直徑方式進行膨脹，因而狹縫狀喷 進行量將呈均勾，模具本體4長度方向便可 塗佈裝置# #。所以’就要求依均句膜厚進行塗佈的 管理。故Γ 實地進行塗料p吐出量等的調整· 側對管件2:=塗佈膜厚的精度。此外，因為屬於從内 的流體量便ΤΓ 式，因而㈣7朝管件2進行供排 更可抑制至塗料Ρ的最大吐出量以下，俾可使塗佈 ❹ 小巧化。特別係即使將管件2收 部’仍可構成小巧的塗佈裝置卜諸模具本體4内 本實施形態中，藉由在模具本體4的 下二=在模具本體4等之上搭載各_的= 或模具本ρ具本體4進行驅動移動時所發生的振動、 於模且方向的搖晃，7的擠筒12直接連結 ^本體4上，並使泵7經由通孔4a直接 =::::::構成省略該等間的配管當從二 塗料吐出==時’便可排除因配管内容積變化導致 出量發生變動專，因配管所造成的不良影響。若使止 097145614 200930465 逆閥8直接或盡可能靠近地設置於塗料導人部5上，便可幾 乎消除管件2膨脹時塗料p返回供應***9侧的量，藉此亦 可抑制從喷嘴6吐出的塗料量變動。 ' 再者，利用泵7的活塞衝程之發生而馬上產生管件2膨 .脹，便可瞬間從喷嘴6中吐出塗料P，可提升吐出動作的起 動特性。所以，亦可圓滑地進行塗佈控制。 上述實施形態中’雖例示說明在模具本體4内部收納著管 ©件2的構造，但當然亦可如圖3所示，在模具本體4之外另 行設置殼體15，在殼體15中設置上述泵7，並且在殼體15 内所形成的歧管3内内建著管件2，而構成從殼體15中所 形成的塗料導入部5及塗料吐出部16進行塗料p導入•吐 出的單體式塗佈用泵裝置。所以，藉由從該泵裝置朝模具本 體4供應塗料P，便可從該模具本體4的狹缝狀喷嘴6中吐 出塗料P並施行塗佈。圖中，17係具閥控制器的開關閥， ® 18係將殼體15與模具本體4相連接的連接配管α即便此種 構造的塗佈裝置1，當然仍可達與上述實施形態相同的作用 效果。 再者，上述實施形態中，殼體15、與注射泵γ的擠筒12 之連結構造係設為直接連結形式，但亦可經由配管等連接構 件進行連緒。此外’通孔4a係使歧管3與擠筒12内部直接 連通，但亦可經由配管等連結構件使二者連通。 【圖式簡單說明】 097145614 12 200930465 圖1(a)及（b)為表示本發明塗佈裝置之較佳一實施形 態，於抽取時的說明圖。 圖2(a)及（b)為圖1所示塗佈裝置吐出時的說明圖。 - 圖3為本發明塗佈裝置另一實施形態系統圖。 . 【主要元件符號說明】 1 塗佈裝置 2 管件 ❹ 2a 開口部 3 歧管 4 模具本體 4a 通孔 5 塗料導入部 6 狹縫狀喷嘴 7 泵 ❹ 8 止逆閥 9 供應系統 10 塗料槽 11 管件配管 12 擠筒 13 活塞 14 驅動部 15 殼體 097145614 13 200930465 16 塗料吐出部 17 開關閥 18 連接配管 - F 非壓縮性且非揮發性流體 . P 塗料 X 塗佈對象物 ❹ ❹ 097145614 14In the conventional art, those disclosed in Patent Documents 1 and 2 are known for use in the field of manufacturing such as electropolymer display panels or liquid crystal panels, which are required for film thickness accuracy, and in the field of semiconductor manufacturing. In these patent documents, a so-called tube-type diaphragm pump (tube diaph P) is used for the coating supply of the coating device. The tubular film U is known as disclosed in Patent Document 3. It is disclosed in Patent Document 3 that a pipe member is coaxially arranged in a cylinder, and a working fluid space is formed outside the pipe member, and a photoresist liquid belonging to the transfer fluid is passed through the pipe member. Then, the tube is deformed in the radial direction by the addition of the action fluid, thereby obtaining (4), and the transfer of the photoresist can be performed. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. PCT Publication No. JP-A No. Hei. As in the prior art ship, the pipe is added to the pipe (4), for example, the section is changed to 3: the direction is deformed into an elliptical shape, etc., compared with the inner volume of the pipe, the deformation of the pipe member can be used to obtain the chestnut effect. Therefore, quite 097145614 4 200930465 It is difficult to adjust the amount of fluid transfer, and the special syllabus is suitable for coating that requires uniform film thickness: ^ film thickness adjustment is extremely difficult. Moreover, the shape of the pressurization from the outside of the pipe member ensures that the working fluid space around the e-piece is required to be moved to a larger amount of the action ship than the fluid, so that the amount of the fluid to be transferred is unbalanced. There is also a problem that the coating device is enlarged. The hairline is completed in the above-mentioned conventional problem*, and the purpose is to provide a stomach-adjustable recording amount, and to improve (4) material accuracy, and to reach the device structure. The coating device of the present invention is provided with a pipe member, a casing, a paint introduction portion, two materials σ卩 and i, and the pipe member is internally The fluid supply and discharge is performed to expand and contract; the bribe system forms a manifold that accommodates the f-piece; the paint introduction portion is formed on the casing and communicates with the manifold; the paint discharge portion is attached to the The body is connected to the above-mentioned manifold, and the grade is connected to the pipe member, in order to enable the pipe to be filled, the paint is filled into the manifold from the paint introduction portion, or the pipe member is expanded to cause the pipe to expand. The filled paint spits from the above-mentioned paint discharge portion 'The non-(tetra) and non-volatile fluid is supplied to or extracted from the inside of the pipe. The pump is a syringe pump, which is characterized by a cylinder of the above-mentioned injection fruit. Connecting to the casing, and forming a through hole for communicating the manifold with the inside of the squeeze tube on the casing. The connection structure between the casing and the squeeze tube of the injection pump can directly connect the two, or It can be connected by a connecting member such as a 097145614 5 200930465 pipe. Further, the through hole can directly connect the manifold to the inside of the squeeze tube, or can be connected via a connecting member such as a pipe, and can be either The paint introduction portion side is characterized in that a check valve for preventing backflow of the charge-filled paint in the manifold is provided. The casing is formed by a mold body, and the manifold is built in the manifold body. In the tube member, the coating material discharge portion is formed by a slit nozzle. © (Effect of the Invention) The coating device of the present invention can appropriately adjust the amount of coating material to be transferred, and can improve the coating film thickness precision. The embodiment of the present invention is described in detail with reference to the accompanying drawings. As shown in Fig. 2, the tube 2, the mold main body 4, the paint introduction unit 5, the slit nozzle 6, and the pump 7 are provided. The tube 2 is expanded and contracted by feeding (four) the feed body F. The mold main body 4 is a casing, and a manifold 3 for accommodating the pipe member 2 is formed. The paint guide portion 5 is connected to the manifold 3 by the main body $. The slit material 6 is a paint discharge portion. The flame mold and the body 4 are formed to communicate with the manifold 3. The pump 7 is coupled to the pipe member, so that the material P can be contracted to fill the paint P from the paint guiding portion 5 in the manifold 3, or the pipe member can be made. 2 (4) The paint p filled in the manifold 3 is discharged from the slit nozzle 6 to extract or discharge the inside of the non-compressible and non-volatile fluid pipe 097145614 200930465 2 or from the inside of the pipe 2. The squeeze tube 12 of the 7-series main shot fruit injection chest 7 is directly coupled to the mold body 4, and a through hole 4a is formed in the mold body 4 to connect the inside of the manifold 3 and the inside of the squeeze tube 12. On the side of the paint introduction portion 5, a check valve 8 for preventing backflow of the coating material P filled in the manifold 3 is provided. Fig. 1(a) shows the overall configuration of the side profile of the mold body when the paint is drawn. Fig. 1(b) shows the cross section of the line A_A in Fig. 1(a), Fig. 2(a) © A side cross-sectional view of the mold body or the like when the paint is not discharged, and a cross-sectional view taken along line BB of Fig. 2(a) is shown. The coating device of this embodiment! Mainly consists of a mold main body 4 in which a coating film is formed on a coating object X such as a glass panel and applied, a supply system 9 for supplying a coating material p to the mold main body 4, and an inner construction placed in the mold main body 4 The pipe member 2 and the pump 7 for supplying the fluid F to the pipe member 2. The mold body 4 is formed into a high rigidity by using a metal material such as no steel. The mold body 4 is formed to be long in the width direction of the application object X, and is driven to move in the longitudinal direction of the application object X by a drive mechanism (not shown). A towel empty manifold 3 is formed in the longitudinal direction inside the mold body 4. A slit-like nozzle 6 is formed in communication with the lower end of the g 3 . The slit-like nozzle 6 is formed across the entire longitudinal direction of the manifold 3 and is formed to penetrate the mold body 4 downward from the manifold 3. Further, a paint introduction portion 5 such as a flow hole that communicates with the occupant 3 is formed in the mold body 4. The paint introduction unit 5 is connected to the supply system 9. The supply system 9 is composed of the following 097145614 7 200930465, a paint tank 10 storing the paint p, a pipe fitting η having one end inserted into the paint tank 10 and having the other end connected to the paint introduction portion 5 and having flexibility, and Counter valve 8. The check valve 8 is provided in the middle of the pipe fitting 11 on the side of the paint introduction portion 5 with respect to the mold main body 4, and allows the paint ρ to flow from the paint tank 1〇 to the manifold 3, but prevents the slave pipe 3 from flowing. The paint inside the coating tank is countercurrent to the coating. The check valve 8 is preferably disposed as close as possible to the paint introduction portion 5. The inside of the manifold 3 of the mold body 4 accommodates the elongated tubular member 2 which is expandable and contractible in the longitudinal direction. The tube member 2 is formed of a soft and flexible synthetic resin material. The pipe member 2 is formed in the form of a bag in which the opening portion 2a is provided. In the illustrated example, the opening portion 2a is formed on one end side in the longitudinal direction of the pipe member 2. One end side of the pipe member 2 is fixed to one end portion of the longitudinal direction of the manifold 3. A through hole 4a is formed through the mold body 4 at one end portion of the manifold 3, and the opening 2a of the pipe member 2 is inserted into the through hole 4a. The other end side of the pipe member 2 is fixed to the other end portion of the longitudinal direction of the ® manifold 3. The increase in the internal volume by the tube member 2 by expansion causes the space inside the manifold 3 to be narrowed. On the contrary, the tube 2 reduces the internal volume by contracting, thereby expanding the space inside the manifold 3. In the mold body 4, a through hole 4a is communicated with the other end side of the manifold 3, and a pump 7 is provided. In the present embodiment, a syringe pump is exemplified. The pump 7 is composed of a barrel 12 that communicates with the opening 2a of the tube 2 via the through hole 4a, a piston 13 that reciprocates in the barrel 12, and a driving unit 14 that drives the piston 13. . The barrel 12 of the pump 7 is directly joined and mounted on the mold body 4 of 097145614 〇 200930465. The inner portion of the squeeze tube 2 is directly communicated with the inside of the tube 2 via the opening portion 2a. The non-compressible and non-volatile fluid f is enclosed in the inside of the squeeze tube 12 in which the inner volume is expanded and contracted by the reciprocating movement of the piston 13. - The pump 7 utilizes the reciprocating movement of the piston 13 to supply the fluid F to the inside of the tubular member 2 or to the discharge from the inside of the tubular member 2, whereby the tubular member 2 is expanded and contracted. The position at which the piston 13 is finally retracted is set to the initial contraction state of the pipe member 2. The position at which the piston 13 is most advanced is set to the maximum expansion state of the pipe member 2. When the pipe member 2 is contracted, the inside of the manifold 3 is in a negative pressure state, whereby the paint P is introduced from the supply system 9 through the paint introduction portion 5 and filled in the manifold 3. Further, when the pipe member 2 is expanded, the pressure in the manifold 3 rises, and due to the action of the check valve 8, the paint P filled in the manifold 3 is discharged from the slit-like nozzle 6. The initial contraction state of the pipe member 2 can be set to a natural state in which no fluid pressure is applied to the pipe member 2, and can also be set to a state in which only a certain amount of fluid © F remains in the pipe member 2 and is preloaded, or can be set as A state in which the entire fluid F is almost drawn out of the tube 2 and narrowed or shrunk. The pump 7 of the present embodiment is exemplified by a syringe pump, but a diaphragm pump or the like may be used. Next, the action of the coating device 1 of the present embodiment will be described. First, the standby state will be described, and the paint P is filled into the manifold 3 by the pump 7. As shown in Fig. 1, the piston 13 of the pump 7 is moved backward, and an uncompressible and non-volatile fluid F is withdrawn from the tubular member 2. If the fluid F is withdrawn, the tubular member 2 which is expanded by the internal fluid F is reduced in its internal volume and is reduced by 097145614 9 200930465. If it shrinks, the inside of the manifold 3 is in a negative pressure state. Thereby, the coating material p flows from the supply system 9 through the paint introduction portion 5 and is filled in the manifold 3. At the position where the piston 13 is finally retracted, the tube member 2 will be in an initial contraction state, at which time the amount of the coating filled in the manifold 3 is used for one coating operation. Next, the description will be given of the application state, and the driving movement of the mold main body 4 is started by a drive mechanism (not shown). When the application start position is reached, the paint Ρ is discharged from the slit nozzle 6 and coated. A coating film is formed on the object X. During the coating process, the piston 13 of the pump 7 is only slightly advanced at a time. If the piston 13 is advanced in this way, the fluid f in the squeeze barrel 12 is only slightly supplied into the tubular member 2 at a time, whereby the internal volume of the tubular member 2 is slightly increased each time, so that the tubular member 2 continues to expand a little at a time. The space inside the manifold 3 is narrowed according to the expansion amount of the pipe member 2, and the pressure inside the manifold 3 due to the narrowing is increased. The paint ρ filled in the cavity 3 is applied from the slit nozzle 6 toward the object to be coated. X is discharged, whereby a coating film is formed. At this time, by the action of the check valve 8, the paint Ρ is prevented from flowing back into the paint tank 1 through the supply system 9. When the mold main body 4 reaches the step of the coating end position of the application object X, it is convenient to use the spring F supplied from I 7 to make the tube 2 into a large-swelling state, thereby ending the pressure rise in the manifold 3 and ending. It is discharged from the paint Ρ in the slit nozzle 6. The coating operation is completed as described above. After the coating operation, 9 is moved to the standby state in which the next coating is to be performed, and the discharge tube 2_fluid F is quickly extracted by the pump 7 to be in an initial contraction state. Thereby, the paint ρ is filled in the manifold 3 as described above. 097145614 200930465 And from the internal Hungary pair = 1, different from the prior art, ^ straight 2 stretch film 'contracted pipe 2, (10) according to the tube 2 internal volume variable: = '_ from the slit shape 6 in the _ degree direction The pipe member 2 is expanded by expanding the diameter of the long nozzle 6 of the slit nozzle 6, and the amount of the slit-like spray is uniformly hooked, and the apparatus body 4 can be coated with the device ## in the longitudinal direction. Therefore, it is required to carry out the application of the coating according to the film thickness of the average sentence. Therefore, the adjustment of the amount of the material p to be discharged, etc., and the accuracy of the thickness of the coating film 2: = the thickness of the coating film. ΤΓ , 因而 因而 因而 因而 因而 因而 因而 因而 因而 因而 管 管 管 管 管 管 管 朝 朝 朝 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管 管In the present embodiment, in the present embodiment, the vibration generated during the driving movement of the lower part of the mold main body 4 on the mold main body 4 or the mold main body 4 or the mold main body 4 is driven. And the direction of the shaking, 7 of the barrel 12 directly connected to the body 4, and the pump 7 Directly through the through hole 4a =:::::: omitting the piping in the room, when discharging from the two paints ==', it is possible to eliminate the variation in the amount of the pipe due to the change in the internal volume of the pipe, and the adverse effects due to the piping If the 097145614 200930465 check valve 8 is placed directly or as close as possible to the paint guide 5, the amount of the paint p returned to the supply system 9 side when the pipe 2 is expanded can be almost eliminated, thereby suppressing the slave nozzle 6 In addition, when the piston stroke of the pump 7 occurs, the pipe 2 is swollen and expanded, and the paint P can be ejected from the nozzle 6 instantaneously, thereby improving the starting characteristics of the discharge operation. In the above-described embodiment, the structure in which the tube member 2 is housed in the mold main body 4 is exemplified. However, as shown in FIG. 3, the housing 15 may be separately provided outside the mold main body 4. The pump 7 is provided in the casing 15, and the pipe member 2 is built in the manifold 3 formed in the casing 15, and the paint introduction portion 5 and the paint discharge portion 16 formed in the casing 15 are formed. Paint p introduction / spit out of the monolithic coating The cloth pump device is used. Therefore, by supplying the paint P from the pump device to the mold main body 4, the paint P can be discharged from the slit nozzle 6 of the mold body 4 and applied. In the figure, the 17-series valve The switching valve of the controller, the 18-connecting connecting pipe α connecting the casing 15 and the mold main body 4, of course, can achieve the same operational effects as those of the above-described embodiment even in the coating device 1 having such a configuration. In the embodiment, the connection structure between the casing 15 and the squeeze tube 12 of the syringe pump γ is a direct connection type, but it may be connected via a connecting member such as a pipe. Further, the through hole 4a is such that the manifold 3 is squeezed. The inside of the cylinder 12 is directly connected to each other, but the two may be connected via a connecting member such as a pipe. BRIEF DESCRIPTION OF THE DRAWINGS 097145614 12 200930465 Figs. 1(a) and (b) are explanatory views showing a preferred embodiment of the coating apparatus of the present invention at the time of extraction. 2(a) and 2(b) are explanatory views when the coating device shown in Fig. 1 is discharged. - Figure 3 is a system diagram of another embodiment of the coating apparatus of the present invention. [Description of main component symbols] 1 Coating device 2 Tube ❹ 2a Opening 3 Manifold 4 Mold body 4a Through hole 5 Paint introduction part 6 Slit nozzle 7 Pump ❹ 8 Check valve 9 Supply system 10 Paint tank 11 Pipe fittings Piping 12 Extrusion 13 Piston 14 Drive 15 Housing 097145614 13 200930465 16 Paint discharge unit 17 On-off valve 18 Connection piping - F Non-compressible and non-volatile fluid. P Coating X Coating object ❹ 097145614 14