200923343 九、發明說明： 【發明所屬之技術領域】 旦，^發明係有關於一種具有同軸光束之三自由度光搫 里測抓碩’尤其是指一種具備低成本、高精度特色之 二自由度的光學量測探頭。 【先前技衝】 原子力顯微鏡（atomic force microscope, AFM)是利 用特製的微小探針來偵測探針與樣品表面間的某種交是 作用’然後使用一個具有三軸位移的壓電陶瓷掃描器，使 探針在樣品表面來回掃描偵測，並利用此掃描器的垂直街 調能力及回饋迴路，讓探針與樣品間的交互作用在掃插通 程中保持一定距離（約l(T1()m)，只要紀錄掃描面上每 的垂直微調距離，便可獲得樣品表面的等交互作用圖像， 進而推導出樣品表面特性。 前述原子力顯微鏡的微小探針通常是黏附在懸臂式 的彈筹片上’當探針尖端與樣品表面接近時’因力場而產 生作用力，造成懸臂簧片的微小偏折’此簧片的彈性變形 量，可以利用簧片後方的掃描穿隧顯微鏡【STM】探針所 測得，也町以利用電容感應法、光學偵測法來感測。在掃 描過程中，赞片的偏移訊说可以轉換成電流輸入回饋迴 路，為了讓作用力的訊號保持一定，所以需控制探針在Z 方向的位置。因此針尖原子與樣品表面原子的作用力便會 使探針在蜜直方向移動，而此微調距離右以二維函數儲存 起來便是椽品的表面圖形（surface topography)。因探針 與樣品表面的作用力可以控制在非常微小的量’約在1〇-6 〜牛摘之範圍，因此原子力顯微鏡的解析度可達原子 200923343 尺寸。 而前述以光學偵測法來感測簧片的彈性變形量之方 式，主要係將一雷射光束經透鏡組聚焦於一待測物表面 上，反射後再經透鏡組聚焦，通過一可產生像散之鏡片， 射入置於適當距離之光感測器，並在其上形成光點。當雷 射光在待測物表面投射點之高度產生變化，例如待測物位 置平移，或角度發生偏折時，反射聚焦光束於光感測器上 之光點形狀與位置也發生變化。如第一圖所示，由光感測 器產生之訊號運算後，可得到對焦誤差訊號、X軸角度訊 號（用於偵測待測物以垂直雷射光軸的角度運動）、Y軸角 度訊號（用於偵測待測物以垂直雷射光與X軸的角度運 動），藉此可同時針對雷射光在待測物表面之投射點高度 與兩軸角度偏折變化作非接觸式之精密量測。 然而，上述偵測之方式在實際實施上卻具有如下所列 之缺失： 1. 由於上述之光學偵測法用來偵測待測物之角度與位移 的光感測器皆出於同一個，因此當待測物之角度或位置 產生變化時，該光感測器並無法判斷是角度或位移的變 化，而容易造成位移與角度的誤判。 2. 正因為待測物之角度及位移均是由同一光學感測器進 行偵測，而使角度及位移之光束相互干擾、耦合，造成 在判斷是待測物之角度或位移的變化時更為困難。 【發明内容】 今，發明人即是鑒於上述缺失之處，於是乃一本孜孜 不倦之精神，並藉由其豐富之專業知識及多年之實務經驗 所輔佐，而加以改善，並據此研創出本發明。 200923343 本發明以位移與角度光學感測裝置結合為三自由度 光學量測探頭，其整合量測之方式為經由位移光學感測裝 置與角度光學感測裝置之四象限感測器可分別得出失焦 訊號之s曲線與光之強度變化，再利用失焦曲線之線性區 域與位置，以及光之強變化與角度，呈現一對一之線性關 係，藉以判斷待測物與位移、角度光學感測裝置之相對距 離與角度變化。 本發明為了達到同點量測與同軸光路之設計目的，必 須將角度光學感測裝置之光束打在與位移光學感測裝置 聚焦的同點位置上，所以本發明在透鏡裝置上鑽一圓孔， 使角度光學感測裝置之光束能直接穿過圓孔，引導至位移 光學感測裝置之聚焦點位置上，同時加入一分光裝置於透 鏡裝置與兩光學感測裝置之間，這樣方可將兩光束引進同 點位置與得到同軸光路。由於本發明在透鏡裝置與兩光學 感測裝置之間加入一分光裝置會使返回之兩光束產生重 疊，因此為了防止位移光學感測裝置與角度光學感測裝置 之光束相互干擾彼此的四象限光感測器而造成訊號判斷 錯誤，於是在分光裝置的端面上放置一遮蔽裝置，以阻擋 位移光學感測裝置中間的光束，同時並可遮蔽掉角度光學 感測裝置從量測面反射回來的準直光束。 【實施方式】 為令本發明所運用之技術内容、發明目的及其達成之 功效有更完整且清楚的揭露，茲於下詳細說明之，並請一 併參閱所揭之圖式及圖號： 首先，請參閱第九圖所示，本發明之具有同軸光束之 三自由度光學量測探頭包括：一位移光學感測裝置（1)、 7 200923343 一角度光學感測裝置（2)、一分光裝置（3)及一遮蔽裝置 ⑷。 前述位移光學感測裝置（1)包括有【以下併參第二 圖】：一發光源（11)、一分光鏡（12)、一準直透鏡 (Collimator Lens)(13)、一物鏡（Objective lens)(14)、 一音圈馬達（Voice Coi 1 Motor，簡稱 VCM)(15)、一柱狀 像散透鏡（Cylinderical Lens)(16)及一光感測器（Photo Detector)(17);該發光源（η)為一雷射二極體（Laser Diode)用以發出一光束；該分光鏡〇2)由偏極分光鏡（121) 及四分之一波片（122)所構成，以使該光束極化，且改變 該光束之行進方向；該物鏡（14)的中心處具有一圓形穿孔 y41);而該音圈馬達（15)係與物鏡（14)相連；該光感測 (17)為四象限光感測器⑽扣抓士 ph〇t〇 detector) 〇 _本發明使用之位移光學感測裝置（1)【如第二圖所 ’其聚焦原理為像散法。所謂像散法是指成像時橫向 ς =向的成像位置不同，因此造成像點的失真，利用此一 ^特性做為量測的依據，並結合光感測器（⑺，當物鏡 直焦距與水平焦距不同，則待測物（7)若偏離物 :刖焦面位置時，在光感測器（⑺上之成像光點呈現 於从變化【平面（A)、平面⑹，參第三圖】，當待測物⑺ ^鏡（14)之正焦位置時，成像光點呈現圓形【平面 繼經訊號處理’即四象限之（A+C)-(B+D)，可得失 …误差訊號的S曲線【如第四、五圖】。 r菸Γ本發明之位移光學感測褒置（1)係由雷射二極體 X P源（11)】發射光束，經分光鏡（12)、準直透鏡（13) 200923343 後將雷射光束變成一準直雷射光束，此準直雷射光束再經 過分光裝置（3)及物鏡（14)時，將聚焦於待測物（7)上【請 一併參閱第二、九圖】，且其反射光束再循原路徑經物鏡 (14)、分光裝置（3)、準直透鏡（13)、分光鏡（12)後，穿 越柱狀像散透鏡（16)，而投射至四象限光感測器【光感測 器（17)】上。而該四象限感測器【光感測器（17)】將根據 光點在四個象限上的光分佈情形，輸出一失焦訊號（F〇cus Error Signal)。這個失焦訊號經過運算放大及補償處理 後，推動音圈馬達（15 )，將物鏡（14)推到待測物（7 )可以 在聚焦平面上的位置，達到鎖焦的目的。此時位移光學感 測裝置（1)再根據反射光的強度變化讀取待測物（7 )上的 數位訊號，完成資料存取的動作。 又，該位移光學感測裝置（1)進一步包括一光柵 (Grating)(18) ’係設於發光源（11)與一分光器（12)之 間，用以使該發光源（11)之雷射光束產生繞射現象。 前述之角度光學感測裝置（2)，係與位移光學感測裝 置（1)呈90度夾角設置【以下一併參第六、九圖】，且其 是將第二圖中之位移光學感測裝置（1)中的光柵（18)、物 鏡（14)與音圈馬達（15)拆除。即該角度光學感測裝置（2) 包括有：一發光源（21)、分光鏡（22)、準直透鏡（23)及 光感測器（24)。該發光源（21)為一雷射二極體（Laser Diode)用以發出一雷射光束；該分光鏡（22)由偏極分光鏡 (221)及四分之一波片（222)所構成，以使該光束極化，且 改變該光束之行進方向；該光感測器（24)為四象限光感測 器（four-quadrant photo detector) ° 如第六圖所示，本發明之角度光學感測裝置（2)乃依 200923343200923343 IX. Description of the invention: [Technical field to which the invention belongs] The invention is related to a three-degree-of-freedom optical beam with a coaxial beam. In particular, it refers to a two-degree-of-freedom feature with low cost and high precision. Optical measuring probe. [Previous technology] Atomic force microscope (AFM) uses a special microprobe to detect a certain interaction between the probe and the surface of the sample. Then a piezoelectric ceramic scanner with three-axis displacement is used. The probe is scanned back and forth on the surface of the sample, and the vertical street modulating ability and the feedback loop of the scanner are used to maintain the interaction between the probe and the sample at a certain distance in the sweeping path (about 1 (T1 ( m), as long as the vertical fine-tuning distance on the scanning surface is recorded, an interactive image of the surface of the sample can be obtained, and then the surface characteristics of the sample are derived. The micro-probes of the aforementioned atomic force microscope are usually adhered to the cantilever type. On-chip 'when the tip of the probe is close to the surface of the sample', the force is generated by the force field, causing a slight deflection of the cantilever spring. 'The elastic deformation of the reed can be measured by the scanning tunneling microscope behind the reed [STM] The probe measures the sound sensing method and optical detection method to sense. During the scanning process, the offset signal of the film can be converted into current input feedback. In order to keep the signal of the force constant, it is necessary to control the position of the probe in the Z direction. Therefore, the force of the atom of the tip and the atom on the surface of the sample will cause the probe to move in the honey direction, and the fine adjustment distance is right. The dimension function is stored as the surface topography of the product. Because the force of the probe and the surface of the sample can be controlled in a very small amount 'about 1 〇 -6 ~ cattle picking range, so the atomic force microscope analysis The degree reaches the atomic 200923343 size. The above method of sensing the elastic deformation of the reed by optical detection mainly focuses a laser beam on the surface of a test object through the lens group, and then reflects through the lens. Focusing, through a lens that produces astigmatism, into a light sensor placed at an appropriate distance, and forming a light spot thereon. When the laser light is projected on the surface of the object to be tested, the height of the projection point changes, for example, to be measured When the position of the object is translated, or the angle is deflected, the shape and position of the spot on the photosensor are also changed. As shown in the first figure, the signal generated by the photo sensor After calculation, the focus error signal, the X-axis angle signal (used to detect the angle of the object to be measured at the vertical laser axis), and the Y-axis angle signal (for detecting the object to be tested to the vertical laser light and the X-axis) The angular motion) can be used for non-contact precision measurement of the projection point height of the laser light on the surface of the object to be tested and the deflection of the two axes. However, the above detection method has practical implementation. The following are listed as missing: 1. Since the optical detector used to detect the angle and displacement of the object to be tested is the same, when the angle or position of the object to be tested changes, The light sensor cannot judge the change of the angle or the displacement, and is easy to cause the misjudgment of the displacement and the angle. 2. Because the angle and displacement of the object to be tested are detected by the same optical sensor, the angle is made. The beams of the displacement and the mutual interference and coupling make it more difficult to judge the change in the angle or displacement of the object to be tested. SUMMARY OF THE INVENTION Nowadays, the inventor is in the light of the above-mentioned deficiencies, and is thus a tireless spirit, and with the help of his rich professional knowledge and years of practical experience, he has improved and developed the book accordingly. invention. 200923343 The invention combines a displacement and angle optical sensing device into a three-degree-of-freedom optical measuring probe, and the integrated measuring method is respectively obtained by a four-quadrant sensor of the displacement optical sensing device and the angle optical sensing device. The s curve of the out-of-focus signal changes with the intensity of the light, and then uses the linear region and position of the out-of-focus curve, as well as the intensity change and angle of the light, showing a one-to-one linear relationship, thereby judging the object to be tested and the displacement and angle optical sense. The relative distance and angle of the device are varied. In order to achieve the same point measurement and coaxial optical path design, the beam of the angle optical sensing device must be placed at the same point of focus as the displacement optical sensing device, so the present invention drills a circular hole in the lens device. The light beam of the angle optical sensing device can be directly passed through the circular hole and guided to the focus point position of the displacement optical sensing device, and a light splitting device is added between the lens device and the two optical sensing devices, so that two The beam is introduced at the same point position and the coaxial optical path is obtained. Since the present invention adds a light splitting device between the lens device and the two optical sensing devices to cause the two beams to return to overlap, in order to prevent the light beams of the displacement optical sensing device and the angle optical sensing device from interfering with each other four-quadrant light The sensor causes a signal error, so a shielding device is placed on the end face of the beam splitting device to block the beam in the middle of the optical sensing device, and the angle optical sensing device can be shielded from the measuring surface. Straight beam. [Embodiment] For a more complete and clear disclosure of the technical content, the purpose of the invention and the effects thereof achieved by the present invention, the following is a detailed description, and please refer to the drawings and drawings: First, please refer to the ninth figure, the three-degree-of-freedom optical measuring probe with coaxial beam of the present invention comprises: a displacement optical sensing device (1), 7 200923343 one-angle optical sensing device (2), a split light Device (3) and a shielding device (4). The displacement optical sensing device (1) includes [the following reference to the second figure]: a light source (11), a beam splitter (12), a collimator lens (13), an objective lens (Objective) Lens), a voice coil motor (VCM) (15), a cylindrical astigmatic lens (16), and a photo Detector (17); The illuminating source (n) is a laser diode for emitting a light beam; the beam splitter 〇 2) is composed of a polarizing beam splitter (121) and a quarter wave plate (122). To polarize the beam and change the direction of travel of the beam; the objective lens (14) has a circular perforation y41); and the voice coil motor (15) is connected to the objective lens (14); The measurement (17) is a four-quadrant light sensor (10) buckle ph〇t〇detector) 〇 _ the displacement optical sensing device (1) used in the present invention [as shown in the second figure], the focusing principle is astigmatism. The so-called astigmatism method refers to the difference in the imaging position of the lateral ς = direction during imaging, thus causing the distortion of the image point, using this feature as the basis for measurement, combined with the light sensor ((7), when the objective lens is directly focal length and If the horizontal focal length is different, if the object to be tested (7) deviates from the object: the focal plane position, the imaging spot on the photosensor ((7) appears in the change [plane (A), plane (6), reference to the third figure) 】, when the object (7) ^ mirror (14) is in the positive focus position, the imaging spot appears circular [plane followed by signal processing] that is four quadrants (A + C) - (B + D), gains and losses... The S curve of the error signal [such as the fourth and fifth figures] r soot The displacement optical sensing device (1) of the present invention emits a beam from a laser diode XP source (11) through a beam splitter (12) ), the collimating lens (13) 200923343 turns the laser beam into a collimated laser beam. When the collimated laser beam passes through the beam splitting device (3) and the objective lens (14), it will focus on the object to be tested (7). ) [Please refer to the second and ninth diagrams together], and the reflected beam is then followed by the objective lens (14), the spectroscopic device (3), the collimating lens (13), and the spectroscopic beam. After the mirror (12), it passes through the cylindrical astigmatic lens (16) and is projected onto the four-quadrant light sensor [photosensor (17)]. The four-quadrant sensor [photo sensor (17) )] will output a defocus signal (F〇cus Error Signal) according to the light distribution of the light spot in the four quadrants. After the operation of the defocus signal is amplified and compensated, the voice coil motor (15) will be pushed. The objective lens (14) is pushed to the position of the object to be tested (7) on the focal plane to achieve the purpose of locking the focus. At this time, the displacement optical sensing device (1) reads the object to be tested according to the intensity change of the reflected light (7). And the digital signal sensing device (1) further includes a grating (18) 'connected to the light source (11) and a beam splitter (12) Between the laser beam source (11) is used to generate a diffraction phenomenon. The angle optical sensing device (2) is disposed at an angle of 90 degrees with the displacement optical sensing device (1) [1 And refer to the sixth and ninth maps, and it is the grating (18) in the displacement optical sensing device (1) in the second figure. The objective lens (14) and the voice coil motor (15) are removed. That is, the angle optical sensing device (2) includes: a light source (21), a beam splitter (22), a collimating lens (23), and light sensing. The light source (21) is a laser diode for emitting a laser beam; the beam splitter (22) is composed of a polarizing beam splitter (221) and a quarter wave. The sheet (222) is configured to polarize the beam and change the direction of travel of the beam; the photo sensor (24) is a four-quadrant photo detector (as shown in the sixth figure) The angle optical sensing device (2) of the present invention is shown in 200923343
據自動視準儀（Auto-col 1 imator)量測原理，自動視準儀 /、主要目的為量測微小角度，進而量測真直度，故又稱準 直儀。第七圖為其量測原理，圖中有一平面反射鏡（10)置 ;光束通路中並與視準透鏡（(]〇11丨111^丨1^16118)(20)的幾 何轴心成正交’將光沿著傳送路線再反射到光源處（30)。 如反射鏡（10)與光線成0之微小角度傾斜時，光從傳送路 線以等於2 6>之角度反射，通過視準透鏡（20)反射光束的 任何部分，將再被集中到與光源處（3〇)相距f* 20大小的 聚焦平面（50)上的焦點（40)位置。繼將檢測出入射光的能 里轉換成光電流的形式，搭配適當的阻抗，可以將之轉換 成電壓值。因此光感測器可以藉著電壓訊號的強弱，判斷 出入射光的位置。如果將同樣的光電材料以均等的四個象 限組合成光感測器’則成為角度光學感測裝置（2)所使用 的四象限感測器。由第八圖可以得知入射光X與γ的位置 與輪出電壓值的關係。分別是： y = + K) K+v2+v3 + v, (3.1) Y= )- K+V2+V3+V4 (3.2) 、上述之角度光學感測裝置（2)係由雷射二極體【發光 2(21)】發射光束’經分紐（22)、準直透鏡⑶）後將雷 署光束變成-準直f射光束，此準直雷射光束再經分光裝 ，並由物鏡(⑷之穿孔⑽)通過投射於待測物⑺上 循二閱第九圖】，而由待測物⑺處反射之反射光束則 、u勿鏡（⑷之穿孔（141)、分光裝置⑶、準直透 10 200923343 鏡（23)、分光鏡（22)後’而投射至四象限光感測器【光感 測器（24)】上。 ~ 箣述之为光裝置（3 )’係架设在位移光學感測裝置（1) 的準直透鏡（13)及物鏡（14)之間，同時與角度光學感測裝 置（2)之光束輸出端相對應。該分光裝置（3)由偏極分光鏡 (31)及四分之一波片（32)構成，以使該光束極化，且改變 該光束之行進方向； 如述之遮蔽裝置（4) ’於此係以一小圓紙片為具體實 施手段，且該遮蔽裝置（4)係設在分光裝置（3)對應位移光 學感測裝置（1)的光束入射端面上，用以阻擋位移光學感 測裝置（1)中間的光束，同時遮蔽角度光學感測裝置（2)從 量測面反射回來的準直光束，防止位移光學感測裝置（1) 與角度光學感測裝置（2)之光束相互干擾彼此的四象限光 感測器【光感測器（17)、（24)】而造成訊號判斷錯誤； 據此，令位移光學感測裝置（1)之發光源（11)發出之 光束經分光鏡（12)、準直透鏡（13)後形成準直光束，此準 直光束在通過分光裝置（3)及物鏡（14)後聚焦於待測物（7) 表面，同時再循原來路徑反射回位移光學感測裝置（1)之 準直透鏡（13)、分光鏡（12)、柱狀像散透鏡（16)聚焦於光 感測器（17)上’以量測待測物（7)表面的位移變化量；而 角度光學感測裝置（2)之發光源（21)光束經分光鏡（22)、 準直透鏡（23)後形成準直光束’再經分光裝置（3)及物鏡 (14)穿孔（141)後聚焦於待測物（7)表面，同時再循原來路 徑反射回角度光學感測裝置（2)之準直透鏡（23)、分光鏡 (22)聚焦於光感測器（24)上’作為待測物（7)表面之兩個 角度的變化量量測。而由於分光裝置在對應位移光學感測 11 200923343 裝置（1)的一面處設有遮蔽裝置（4)，同時在位移光學感測 裝置（1)的物鏡（14)上設有對應該遮蔽裝置的小圓穿孔 (141)，因此可令位移光學感測裝置（1)之準直光束的中心 部位的光源為遮蔽裝置（4)所遮蔽，至於角度光學感測裝 置（2)之準直光束則投射於分光裝置（3)對應遮蔽裝置（4) 之位置處，且由物鏡（14)之穿孔（141)直接通過，其反射 之路徑亦同，因此感測位移之光束及感測角度之光束並不 會相互干擾。 本發明以位移與角度光學感測裝置（1 )、（2)結合研發 為三自由度光學探頭，其整合量測之方式為經由位移光學 感測裝置（1)與角度光學感測裝置（2)可分別得出失焦訊 號之S曲線與光強變化，利用聚焦曲線之線性區域與位 置，以及光強變化與角度，呈現一對一之線性關係，藉以 判斷待測物（7)與位移、角度光學感測裝置（1)、（2)之相 對距離與角度變化。 於本發明之具有同軸光束之三自由度光學量測探頭 之實驗測試時，為方便求得到三自由度光學量測探頭的位 移與角度量測之實驗，本發明利用撓性鉸鍊設計，製作一 個仿鐘擺的槓桿機構用於位移與角度量測上，其中當槓桿 機構角度產生變化也會帶著位移的變化量。實驗中為了確 保雷射功率不隨外界之溫度變化而改變，除了使用自動功 率控制（Aut⑽atic Power Control, APC)回授的電源電路 控制雷射輸出的穩定性外，並將此電源與供給訊號處理電 路之電源獨立分開，如此將可排除因訊號處理電路運作 時，其消耗之電流所造成的電流不穩定性。第九圖即為位 移與角度量測的架設圖。 12 200923343 ^第十圖中本發明將三自由度光學量測探頭量測到的 訊號利用放大器、失焦訊號處理電路與位置感測器電路加 以處理，最後以資料擷取介面卡進行A / D轉換【類比/數 位訊號轉換】，再以電腦讀值，加以記錄。整體量測以電 =為中心，首先將壓電陶瓷線性馬達（PCLM)的平台移至適 當位置’而後每次移動㈣輯推動槓桿機構末端點，到 達定位時，觸發A/D，抓取三自由度光學量測探頭的輸出 訊號與雷射干賴所量_的位移與角度變化值，如此本 發明可以得到三自由度光學量測探頭輸出（fes)的對應 關係，此關係便是S曲線，並得到輸出與角度變化的對^According to the automatic collimator (Auto-col 1 imator) measurement principle, the automatic collimator /, the main purpose is to measure the micro angle, and then measure the true straightness, so it is also called the collimator. The seventh figure is the principle of measurement. There is a plane mirror (10) in the figure; the beam path is positive with the geometric axis of the collimator lens (()〇11丨111^丨1^16118)(20) The intersection 'reflects the light along the transmission path to the light source (30). If the mirror (10) is inclined at a slight angle of 0 to the light, the light is reflected from the transmission path at an angle equal to 2 6 > through the collimating lens (20) Any portion of the reflected beam will be concentrated again to the focus (40) position on the focal plane (50) of the f*20 size from the source (3〇). The energy of the detected incident light is then converted into The form of photocurrent, with the appropriate impedance, can be converted into a voltage value. Therefore, the photosensor can judge the position of the incident light by the strength of the voltage signal. If the same photoelectric material is combined in four quadrants of equalization The photodetector' becomes the four-quadrant sensor used by the angle optical sensing device (2). The relationship between the position of the incident light X and γ and the value of the wheel-out voltage can be seen from the eighth figure. y = + K) K+v2+v3 + v, (3.1) Y= )- K+V2+V3+V4 (3.2), above The optical sensing device (2) is formed by a laser diode [lighting 2 (21)] emitting beam 'passing the beam (22), the collimating lens (3), and then transforming the beam into a collimated beam. The collimated laser beam is then split and then reflected by the objective lens (the perforation (10) of (4) by projecting on the object to be tested (7), and the reflected beam reflected by the object to be tested (7), u Do not mirror ((4) perforation (141), spectroscopic device (3), collimation through 10 200923343 mirror (23), spectroscope (22) and then project to four-quadrant light sensor [photo sensor (24)] ~ The description of the optical device (3) is carried out between the collimating lens (13) of the displacement optical sensing device (1) and the objective lens (14), and the beam of the optical device (2) The output end corresponds to the output end. The spectroscopic device (3) is composed of a polarizing beam splitter (31) and a quarter wave plate (32) to polarize the beam and change the traveling direction of the beam; The device (4) 'is a small circular paper as a specific implementation means, and the shielding device (4) is disposed on the optical separation device corresponding to the optical separation device (3) 1) the incident end face of the light beam is used to block the light beam in the middle of the displacement optical sensing device (1) while shielding the collimated light beam reflected from the measuring surface by the angle optical sensing device (2) to prevent the displacement optical sensing device (1) The four-quadrant light sensor (light sensor (17), (24)) that interferes with each other with the beam of the angle optical sensing device (2) causes a signal judgment error; accordingly, the displacement optical sense is made The light beam emitted by the illumination source (11) of the measuring device (1) passes through the beam splitter (12) and the collimating lens (13) to form a collimated beam, which passes through the beam splitting device (3) and the objective lens (14). Focusing on the surface of the object to be tested (7), and simultaneously reflecting the original path back to the displacement optical sensing device (1), the collimating lens (13), the beam splitter (12), and the columnar astigmatic lens (16) are focused on the light. The sensor (17) is 'measuring the amount of displacement change of the surface of the object to be tested (7); and the beam of the illumination source (21) of the angle optical sensing device (2) is passed through the beam splitter (22), the collimating lens ( 23) After the collimated beam is formed, the spectroscopic device (3) and the objective lens (14) are perforated (141) and then focused on the object to be tested (7). The surface is simultaneously reflected back to the angle optical sensing device (2) by the collimating lens (23) and the beam splitter (22) is focused on the photo sensor (24) as the surface of the object to be tested (7) The amount of change in both angles is measured. And because the spectroscopic device is provided with a shielding device (4) at one side of the corresponding displacement optical sensing 11 200923343 device (1), and at the objective lens (14) of the displacement optical sensing device (1) is provided with a corresponding shielding device. a small circular perforation (141), so that the light source at the center of the collimated beam of the displacement optical sensing device (1) can be shielded by the shielding device (4), and the collimated beam of the angular optical sensing device (2) Projected at the position of the spectroscopic device (3) corresponding to the shielding device (4), and directly passed through the perforation (141) of the objective lens (14), the path of the reflection is also the same, thus sensing the beam of displacement and the beam of the sensing angle Does not interfere with each other. The invention is developed as a three-degree-of-freedom optical probe by combining the displacement and angle optical sensing devices (1) and (2), and the integrated measuring method is a displacement optical sensing device (1) and an angular optical sensing device (2). The S-curve and intensity variation of the out-of-focus signal can be obtained separately, and the linear region and position of the focus curve, as well as the change and angle of the light intensity, are used to present a one-to-one linear relationship, thereby judging the object to be tested (7) and displacement. The relative distance and angle of the angular optical sensing devices (1) and (2). In the experimental test of the three-degree-of-freedom optical measuring probe with coaxial beam of the present invention, in order to conveniently obtain the experiment of displacement and angle measurement of the three-degree-of-freedom optical measuring probe, the present invention utilizes a flexible hinge design to produce a The lever mechanism of the pendulum pendulum is used for displacement and angular measurement, and the change in the angle of the lever mechanism also carries the amount of change in displacement. In the experiment, in order to ensure that the laser power does not change with the external temperature change, in addition to using the automatic power control (Aut (10)atic Power Control, APC) feedback power circuit to control the stability of the laser output, and the power and supply signal processing The power supply of the circuit is separated independently, which will eliminate the current instability caused by the current consumed by the signal processing circuit. The ninth figure is the erection diagram of the displacement and angle measurement. 12 200923343 ^In the tenth figure, the signal measured by the three-degree-of-freedom optical measuring probe is processed by the amplifier, the out-of-focus signal processing circuit and the position sensor circuit, and finally the interface card is used for A/D. Convert [analog/digital signal conversion], and then read the value by computer and record it. The overall measurement is centered on electricity = first, the platform of the piezoelectric ceramic linear motor (PCLM) is first moved to the appropriate position' and then each time the movement (four) is pushed to push the end point of the lever mechanism, when the positioning is reached, the A/D is triggered, and the three are captured. The output signal of the optical measurement probe of the degree of freedom and the displacement and angle change of the amount of the laser ray, so that the present invention can obtain the correspondence of the output of the three-degree-of-freedom optical measurement probe (fes), and the relationship is the S curve. And get the output and angle change pairs ^
關係。第十—圖為三自由度光學量測探頭實驗量測得到Z 軸之S曲線’第十―圖與第十三圖為三自由度光學量測探 頭實驗量騎到X轴與γ㈣度經過正規化電_ 結果。 u 本發明以光學反射鏡為例，對此表面進行多次的量 =找出實際的祕區，並計算出其斜率，騎對應參數。 曰四、十五、十六圖為本發明量測s曲線與χ、Y轴角 2測共9次的結果，分別取其中位移為一的區域與 = 的區域放大加以分析。表卜表2與表3 =弟十四、十五、十六圖中各9組數據的分析結果， -中表1之斜率是指每-微米的距離對應的量測電壓值， 與表3之斜率是指每—㈣度對應出的量測正規化 二準差則是一量測誤差的指標，若由原始數據 準^料…線性回知的直線相比，以其誤差量的電壓值標 準差乘切騎斜_舰，縣糾可得 的實際位置標準差數值。經計算後，2軸具有28 8ij= 13 200923343 置標準差數值；X與Y軸分別具有1.79/z rad與1.52//rad 的角度標準差數值。 經由以上的實施說明，可知本發明之具有同軸光束之 三自由度光學量測探頭至少具有如下所列之各項優點： 1. 本發明之三自由度光學量測探頭係利用一自由度位移 光學感測裝置及二自由度角度光學感測裝置組構而 成，而光學聚焦量測方式具有極高位移解析度與極高角 度量測解析度，且不易受到環境因素影響〔例如：容電 雜訊（triboelectric noise)、電磁干擾、濕度、溫度 變化…等〕之光學量測特性，藉以量測出待測物的三自 由度運動。 2. 本發明之裝置構造採用分光鏡的設計，使位移光學感測 裝置與角度光學感測裝置發出之光源形成一同軸光 束，可於同一量測位置作量測。 3. 本發明之物鏡利用鑽孔的方式，使一自由度之位移光學 感測裝置之光束經由聚焦物鏡未穿孔部分，聚焦於待測 物表面，用以量測待測物表面的位移變化量，而二自由 度之角度光學感測裝置之光束則穿透過聚焦物鏡穿孔 部分，直接將光束投射至待測物表面，作為待測物表面 之兩個角度的變化量量測，同時利用設在分光裝置上的 遮蔽裝置遮蔽位移光學感測裝置準直光束的中間部份 及角度光學感測裝置自待測物表面反射而回之光束，以 避免感測位移之光束及感測角度之光束相互干擾，確實 達到於同一量測位置作三自由度量測之目的。 綜上所述，本發明實施例確能達到所預期之使用功 效，又其所揭露之具體構造，不僅未曾見諸於同類產品 14 200923343 中，亦未曾公開於申請前，誠已完全符合專利法之規定與 要求，爰依法提出發明專利之申請，懇請惠予審查，並賜 准專利，則實感德便。 15 200923343 【圖式簡單說明】 第一圖：現有技術之光路架構示意圖 第二圖：本發明之位移光學感測裝置内部結構示意圖 第三圖：本發明之位移光學感測裝置採用之像散法原 理示意圖 第四圖：本發明之位移光學感測裝置之四象限感測器 的訊號處理示意圖 第五圖：本發明之位移光學感測裝置之四象限感測器 的S-曲線 第六圖：本發明之角度光學感測裝置内部結構示意圖 第七圖：本發明之角度光學感測裝置採用之自動視準 儀之原理示意圖 第八圖：本發明之角度光學感測裝置其聚焦光點於四 象限光感測器與輸出電壓之關係圖 第九圖：本發明之光學感測探頭架構示意圖 第十圖：本發明之光學感測探頭於進行位移及角度量 測時的架設示意圖 第Η—圖：本發明之光學感測探頭在Ζ軸的實驗量測 之S曲線圖 第十二圖：本發明之光學感測探頭在X軸正規化的角 度實驗量測結果曲線圖 第十三圖：本發明之光學感測探頭在Υ軸正規化的角 度實驗量測結果曲線圖 第十四圖：本發明之光學感測探頭在Ζ軸S曲線的線 性區放大圖 第十五圖：本發明之光學感測探頭在X軸角度偏擺量 16 200923343 測的線性區放大圖 第十六圖：本發明之光學感測探頭在γ軸角度偏擺量 測的線性區放大圖 【參照附表】 附表一：本發明之光學感測探頭在Z軸系統的量測誤 差 附表二：本發明之光學感測探頭在X軸系統的量測誤 差 附表三：本發明之光學感測探頭在Y轴系統的量測誤 差 【主要元件符號說明】 (1) 位移光學感測裝置 (11) 發光源 (12) 分光鏡 (121) 偏極分光鏡 (122) 四分之一波片 (13) 準直透鏡 (14) 物鏡 (141) 穿孔 (15) 音圈馬達 (16) 柱狀像散透鏡 (17) 光感測器 (18) 光栅 (2) 角度光學感測裝置 (21) 發光源 (22) 分光鏡 (221) 偏極分光鏡 (222) 四分之一波片 (23) 準直透鏡 (24) 光感測器 (10) 反射鏡 (20) 視準透鏡 (30) 光源處 (40) 焦點 (50) 聚焦平面 (3) 分光裝置 (31) 偏極分光鏡 (32) 四分之一波片 (4) 遮蔽裝置 (7) 待測物 17 200923343 平面 (A) 平面 （B) (C) 平面 18relationship. The tenth-figure is the three-degree-of-freedom optical measurement probe experimental measurement to obtain the Z-axis S-curve. The tenth-th and thirteenth-th is the three-degree-of-freedom optical measurement probe. The experimental amount rides to the X-axis and γ (four) degrees. Power _ results. u In the present invention, an optical mirror is taken as an example, and the surface is subjected to multiple times = the actual secret area is found, and the slope is calculated, and the corresponding parameters are riding. The fourth, fifteen, and sixteenth graphs are the results of the measurement of the s curve and the χ and Y-axis angles of the present invention for 9 times, and the regions in which the displacement is one and the region with the = are amplified and analyzed. Table 2 and Table 3 = analysis results of 9 sets of data in the fourteenth, fifteenth, and sixteenth drawings, - the slope of Table 1 refers to the measured voltage value corresponding to the distance per micrometer, and Table 3 The slope is the measurement corresponding to each (four) degree. The normalized two-quasi-differential is an indicator of the measurement error. If the original data is linearly known, the voltage value is the error value. The standard deviation is multiplied by the slanting _ ship, the actual position standard deviation value available for county correction. After calculation, the 2 axes have 28 8ij = 13 200923343 standard deviation values; the X and Y axes have angle standard deviation values of 1.79/z rad and 1.52//rad, respectively. Through the above implementation description, it can be seen that the three-degree-of-freedom optical measuring probe with coaxial beam of the present invention has at least the following advantages: 1. The three-degree-of-freedom optical measuring probe of the present invention utilizes a degree of freedom displacement optical The sensing device and the two-degree-of-freedom angle optical sensing device are combined, and the optical focusing measurement method has extremely high displacement resolution and extremely high angle measurement resolution, and is not easily affected by environmental factors (for example: capacitance and electrical interference) The optical measurement characteristics of triboelectric noise, electromagnetic interference, humidity, temperature change, etc., to measure the three-degree-of-freedom motion of the object to be tested. 2. The device structure of the present invention adopts a design of a beam splitter, so that the displacement optical sensing device and the light source emitted by the angle optical sensing device form a coaxial beam, which can be measured at the same measurement position. 3. The objective lens of the present invention utilizes a drilling method to cause a beam of a degree of freedom displacement optical sensing device to focus on the surface of the object to be tested via the unperforated portion of the focusing objective for measuring the amount of displacement change of the surface of the object to be tested. The beam of the two-degree-of-freedom angle optical sensing device penetrates through the perforated portion of the focusing objective, directly projects the beam onto the surface of the object to be tested, and measures the change of the two angles of the surface of the object to be tested, and simultaneously The shielding device on the spectroscopic device shields the intermediate portion of the collimated beam of the displacement optical sensing device and the beam that is reflected from the surface of the object to be measured by the angle optical sensing device, so as to avoid the beam of the sensed displacement and the beam of the sensing angle The interference does indeed reach the same measurement position for the purpose of three-free measurement. In summary, the embodiments of the present invention can achieve the expected use efficiency, and the specific structure disclosed therein has not been seen in the similar products 14 200923343, nor has it been disclosed before the application, and has completely complied with the patent law. The provisions and requirements, 提出 legally filed an application for an invention patent, pleaded for review, and granted a patent, it is really sensible. 15 200923343 [Simple description of the diagram] First diagram: schematic diagram of the optical path architecture of the prior art. Second diagram: Schematic diagram of the internal structure of the displacement optical sensing device of the present invention. Third diagram: the astigmatism method adopted by the displacement optical sensing device of the present invention Schematic diagram of the fourth figure: Schematic diagram of signal processing of the four-quadrant sensor of the displacement optical sensing device of the present invention. FIG. 5: S-curve of the four-quadrant sensor of the displacement optical sensing device of the present invention. Schematic diagram of the internal structure of the angle optical sensing device of the present invention. FIG. 7 is a schematic diagram of the principle of the automatic collimator used in the angle optical sensing device of the present invention. FIG. 8 is an angle optical focusing device of the present invention. The relationship between the quadrant photosensor and the output voltage is shown in the figure. FIG. 9 is a schematic view showing the structure of the optical sensing probe of the present invention. FIG. 10 is a schematic diagram showing the erection of the optical sensing probe of the present invention during displacement and angle measurement. : S-th graph of the experimental measurement of the optical sensing probe of the present invention on the x-axis. Figure 12: The angle of the optical sensing probe of the present invention normalized on the X-axis Experimental measurement result graph Fig. 13: Curve of the experimental measurement result of the optical sensing probe of the present invention at the normal axis of the yaw axis Fig. 14: Linearity of the optical sensing probe of the present invention in the S axis S curve 15th view of the enlarged view of the optical sensing probe of the present invention in the X-axis angular yaw amount 16 200923343 Measured linear region enlarged view 16th view: The optical sensing probe of the present invention is measured at the γ-axis angle yaw Magnified view of the linear region [refer to the attached table] Table 1: Measurement error of the optical sensing probe of the present invention in the Z-axis system. Table 2: Measurement error of the optical sensing probe of the present invention in the X-axis system Three: Measurement error of the optical sensing probe of the present invention in the Y-axis system [Description of main components] (1) Displacement optical sensing device (11) Light source (12) Beam splitter (121) Polarizing beam splitter (122) Quarter-wave plate (13) Collimating lens (14) Objective lens (141) Perforation (15) Voice coil motor (16) Columnar astigmatic lens (17) Light sensor (18) Grating (2) Angle Optical sensing device (21) Light source (22) Beam splitter (221) Polarizing beam splitter (222) Four One Wave Plate (23) Collimating Lens (24) Light Sensor (10) Mirror (20) Sight Lens (30) Light Source (40) Focus (50) Focus Plane (3) Splitter (31) Polarizing beam splitter (32) Quarter wave plate (4) Shading device (7) Object to be tested 17 200923343 Plane (A) Plane (B) (C) Plane 18