TW200914791A - Measuring device of 3-dimensional shape - Google Patents
Measuring device of 3-dimensional shape Download PDFInfo
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- TW200914791A TW200914791A TW097135689A TW97135689A TW200914791A TW 200914791 A TW200914791 A TW 200914791A TW 097135689 A TW097135689 A TW 097135689A TW 97135689 A TW97135689 A TW 97135689A TW 200914791 A TW200914791 A TW 200914791A
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- optical path
- path length
- interference fringe
- light
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G01B9/02071—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/08—Optical projection comparators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
Description
200914791 九、發明說明: 【發明所屬之技術領域】 本發明涉及一種使用具有多個頻譜(spectrum)(以 下,以波長進行說明)的寬頻帶光(例如,白色光)的干 涉現象來對被測量物的形狀進行立體測量的三維形狀測量 裝置。特別是關於一種在三維形狀測量裝置中縮短求出産200914791 IX. Description of the Invention: [Technical Field] The present invention relates to an interference phenomenon using wide-band light (for example, white light) having a plurality of spectra (hereinafter, explained by wavelength) A three-dimensional shape measuring device that performs stereoscopic measurement of the shape of the object. In particular, it relates to shortening the production in a three-dimensional shape measuring device.
生干涉條紋的光路長度的時間的技術,所述三維形狀測量 裝置是在使寬頻帶光的一部分入射至遠端具有參考鏡的參 考光路’使寬頻帶光的另-部分人射至遠端具有被測量物 的測篁光路’利用來自參考鏡(反射鏡)及被測量物的各 產生干涉的干涉部(干涉儀)巾,根據使參考光 的任一個的光路長度發生變化而獲得的干 光路長度’來測量被測量物的形狀。 以下現象,即·木夂去現象的形狀測量裝置中利用 得相等時,干涉二會顯雙:的光卿 考光路或相#統的任^^度。纽是說,使」 下’假設使參考光路的桃路長度發生變化(j 路長度發生變化,從而進行2疋,而使測量光路的:i 紋顯示出最大亮度的位置的),將此時產生的干涉4 量:以下稱爲“特定光路長产,,=長度(光路長度的變4 向上的被測量物的位移而t )作爲光路長度的變化〉 在專利文獻1中,根據;。 专間的變化而使光路長名 200914791 發生變化所獲得的干渉#八i 分)、G成分(綠色的頻帶成分(藍色的頻帶成 成分),分別檢測出相對:)及尺成分(紅色的頻帶 位的變化,並將三者的日;長度變化的干涉條紋的相 條紋顯示出最大“的位的光路長度認定爲干涉 定的特定光路長度來進行形狀2光路長度。再根據所認 ==曰4專利特願2。°6·號 量二對較多數量的被測量物實施測 3 Γ有光路長度的可變時間(或者速 度)相機的拍攝時間和拍攝次數等,但 機的拍攝元件所固有的最小曝光時間的制約。、日 利文二:從測,的觀點來考察現有技術。在專 、It况下,是根據干涉光的資料來指定井 =轉出=光路長度,而此時是從干涉:的類 匕貝科轉換成表不干涉光的數位#料,並對時間區域 二長度區域)的資料進行FFT (Fasi FQU# T聊f〇rmation ’快速傅立葉轉換)處理,在頻率區域上分 離成各頻帶成分,並再次在_區域上獲得各解成分的 =涉條紋,求出其相位的一致點。此時,爲了由所獲取的 數位貧料再現干涉條紋,通常必須根據採樣定理等,在想 ^再現的干涉條紋的每i周期至少能獲取3點(^ 資料的重複的獲取時序(timing)轉換成數位資料。 通常,形狀測量裝置中使用干涉法所測量出的干涉條 200914791 紋是藉由其數位資料,以如圖7 路長度的亮賴化而示意性地表;^相對於變化的光 ⑻所示在頻率對振幅的座標 1譜分布如圖7 :⑷的干涉條紋的包絡線寬度;:::斤周知,此時 f峰的亮度值柄1/2時的_ (:如,半值寬: 率的頻帶寬Μ (例如,半值寬:波圖7 W的頻 橫轴的寬度)存在著相關性。因此峰的振幅成爲Μ時的 可以獲得如圖7⑻所示頻帶寬包絡線寬度△卜 頻帶存在A Fc的*nr 、从"卡’從而在下部的 得下述條件,即Λ 条件。也就是說,可以獲 P不會成_率接近0 J流成分 從採樣定理而言,只要採樣頻率Fs^Y 紋中所含的最疋充刀间於干涉條 再現本來的干涉條紋所具=4=:(:)所* 率Fs的降低,會產生混,但隨者該採樣頻 如圖7 (C) 2 象(_g)。也就是說, 晶現象引絲Γ,本麵率成分(實線部分)與混 折返頻率成分(虛線部分)隨著再現的頻率 S t匕頻的情况相同),而如圖7 (D)所示彼此接 … 圖7 (E)所不成爲高低巨變的狀態。 7 ^此’本發明者著眼於接下來的情况。也就是說,如 圖7⑻所示,因爲干涉條紋自身的頻帶特性中存在他 的Γ間^所以藉由選擇採樣頻率Fs,就可以如圖7 (E) 戶^不成,所需的頻率成分與折返頻率成分在頻率上分離開 來的狀^因此’如圖7 (F)所示利用遽波器來去除折返 200914791 ,並且使採樣頻率進一步降 頻率,低相應地伸長,從而可進行再現 丰轴與 U取的話’即使是比滿足 也可以獲得干涉條紋的所 的頻率, 於與採樣頻㈣的降低相地減刀°也就疋說’著眼 現測量時_縮短 應地衫資料獲取次數,從而實 【發明内容】 術。本發明提供一種能縮短測量時間而進行三維測量的技 述目的’必須考察干涉條紋的包絡線寬度 二===广的關係,= 約i所述源的中心波長的周期人的 的干涉條紋的包絡It! 原本的干涉的源。此時A technique for generating the time of the optical path length of the interference fringe, the three-dimensional shape measuring device is such that a portion of the broadband light is incident on the reference light path having the reference mirror at the distal end, and the other portion of the broadband light is incident on the distal end. The measuring light path of the object to be measured is a dry light path obtained by changing the optical path length of any one of the reference lights by using an interference portion (interferometer) towel from the reference mirror (mirror) and the object to be measured. Length 'to measure the shape of the object to be measured. When the following phenomena are used in the shape measuring device of the raft phenomenon, the interference will be double: the degree of Guangqing's light path or phase. New is to say that the "lower" hypothesis changes the length of the peach path of the reference light path (the length of the j path changes, so that 2 疋, and the position of the measuring light path: i grain shows the maximum brightness), this time The amount of interference 4 generated is hereinafter referred to as "specific optical path length production, and = length (the displacement of the object to be measured in the direction 4 of the optical path length and t) is the change in the optical path length." Patent Document 1 is based on In the change of the light path, the number of the light path is changed to 200914791, and the G component (the green band component (the blue band is a component) detects the relative:) and the rule component (red band). The change of the bit, and the phase of the three of the interference stripes of the length change shows that the optical path length of the largest "bit" is determined as the specific optical path length of the interference to determine the optical path length of the shape 2. According to the recognition ==曰4 Patent's special wish 2. °6·Volume 2 to measure a large number of objects to be measured 3 可变The time of the optical path length (or speed) camera shooting time and number of shots, etc., but the camera's shooting components solid The restriction of the minimum exposure time., Riley 2: From the point of view of the test, the existing technology is examined. In the case of special, It is based on the data of the interference light to specify the well = turn out = the length of the optical path, and at this time Interference: The class of 匕 匕 转换 转换 转换 转换 转换 转换 转换 转换 转换 转换 FFT FFT ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( The components are separated into bands, and the stripe of each solution component is obtained again in the _ region, and the phase coincidence point is obtained. At this time, in order to reproduce the interference fringe from the acquired digital poor material, it is usually necessary to acquire at least 3 points per μ period of the interference fringe to be reproduced according to the sampling theorem or the like (the repeated acquisition timing of the data) In the form of digital data, generally, the interference fringe 200914791 measured by the interferometry method in the shape measuring device is schematically represented by the digital data of the length of the road as shown in Fig. 7; ^ relative to the changed light (8) The spectrum distribution of the coordinates 1 shown in the frequency versus amplitude is shown in Fig. 7: (4) The envelope width of the interference fringes;::: It is known that the brightness value of the f peak is 1/2 at the time of the handle 1/2 (:, for example, half value Width: The frequency bandwidth of the rate Μ (for example, the half-value width: the width of the horizontal axis of the waveform of Figure 7 W) has a correlation. Therefore, when the amplitude of the peak becomes Μ, the bandwidth of the frequency bandwidth as shown in Fig. 7 (8) can be obtained. The Δb band has *nr of A Fc and the following condition from the "card', so that the 条件 condition is obtained in the lower part. That is, it can be obtained that P does not become close to 0. The stream component is from the sampling theorem. As long as the sampling frequency Fs^Y is included in the pattern Relating the original interference fringes with the =4=:(:)* rate Fs decreases, which will produce a mixture, but the sampling frequency is as shown in Fig. 7(C) 2 (_g). Phenomenon wire, the surface rate component (solid line part) and the mixed foldback frequency component (dashed line part) are the same as the frequency of reproduction S 匕 frequency, and are connected to each other as shown in Fig. 7 (D) 7 (E) does not become a state of high and low changes. 7 ^This 'The present inventors focused on the following situation. That is, as shown in Fig. 7 (8), because of the band characteristics of the interference fringes themselves, there is his time ^ Therefore, by selecting the sampling frequency Fs, as shown in Fig. 7(E), the required frequency component and the folded-back frequency component are separated in frequency. Therefore, 'as shown in Fig. 7(F), 遽The waver is used to remove the foldback 200914791, and the sampling frequency is further reduced in frequency, and the low is correspondingly elongated, so that the reproduction of the rich axis and the U can be performed. Even if the ratio is satisfied, the frequency of the interference fringe can be obtained, and the sampling frequency (4) The reduction of the phase and the reduction of the knife ° also said that 'eyes are measured now _ shortened the ground The number of data acquisitions, and thus the content of the invention. The present invention provides a technical object for shortening the measurement time and performing three-dimensional measurement. It is necessary to examine the relationship of the envelope width of the interference fringe two === wide, = about i The envelope of the center wavelength of the source of the human interference fringe envelope It! The original source of interference.
光源的頻帶寬ΔΡ。、、帛:At如上所述,依賴於該寬頻帶 ,膽。通常,因爲滿足AFThe frequency bandwidth ΔΡ of the light source. , 帛: At, as mentioned above, depends on the broadband, biliary. Usually, because AF is satisfied
C 有空: 三二ί裝:請ί:圍第1項中記载的發明是-種 分支入射到鏡::=)’使所述寬頻帶光 量先路,並使來自所灰去=光路和配置有破測量物的測 述被測量物的昭射r ^考兄的反射光和來自被照射的所 輪出;光路長忒位置的各反射麵亍合波後 又J 1機構(8),使所述參考光路或者所述 200914791 測量光路的任-個的光路長度發生變化 可變機構導致 遞ί ,序對來自所述光路形成部的輪出、隹> ’ ^而獲取含有干涉條紋的干涉條 以仃 構(14),根據從所述拍攝機3出=: 二條紋貝枓’而求出顯示出所述干涉條紋 = 2光路長度’該三維形狀測量裝置根據出“过钽! 光路長度來測量所述被測量物的形狀,出的所述特定 所述拍攝機構拍攝時的所述規 ,成分的輪出中所含的干涉條紋中産 在頻率區域可分離成想要 刀和因所述混疊現象産生的頻率成分的時序,=羊成 (14=述=長度檢測機構具備··干涉條紋資料選擇部 資料,二定 Ο 干涉條紋ff^分產生的新的 的干涉條紋資料,求出顯示 = c),根據所述新 述特定光路長度。 ’…、'L以“紋的特徵值的所 專利====:的發明的構成是,在申請 部將從所述拍攝機構輸紋資料選擇 時序的樣品資料數來進行 ^貝科以基於所述採樣 區域的麵換, 200914791 資i用成分除外,以此來選擇該頻率區域的新的干涉條紋 料的所二採5 ^測。陳該頻率區域的新的干涉條紋資 域的新的干涉條紋資料進行逆二 ί' 間區資料,並根據該時 特徵值的所述==而求出顯示出所述咖^ 專利=====明的構成是,在申請 ^項中載的發种,所謂相對於由所述 先路長度可變機解_所縣路長度的變麵産生所述 ί疊現㈣鱗,是指在顧述寬絲光的大財心波長 设爲λ時,由該光路長度可變機構導致的該光 化超過λ/6的間隔。 爻 申請專利範圍第4項中記載的發_構成是,在申請 專利範圍第1或2項中記載的發明中,所述拍攝機構以固 有的最小曝光時間進行拍攝,且在將所述光路長度可變機 構使所述光路長度發生變化的速度設爲ν時,將所述光路 長度的變化超過λ/ (6ν)的時間間隔作爲所述時序而 拍攝。 申請專利範圍第5項中記載的發明的構成是,在申請 專利範圍第1或2項中記載的發明中,所述光路長度檢測 機構具有波長選擇部(14d),從所述干涉條紋資料選擇部 所選擇的所述新的干涉條紋資料中提取至少兩個波長成 11C Available: Three or two ί:: ί: The invention described in the first item is that the branch is incident on the mirror: :=) 'The broadband light is made first, and the ash is removed = the optical path And the reflected light of the measured object is configured to reflect the measured object and the reflected light from the irradiated body; the reflecting surfaces of the long path of the optical path are combined with the wave and then the J 1 mechanism (8) And causing the optical path length change variable mechanism of the reference optical path or the 200914791 measuring optical path to cause a shifting, 序 > ' ^ to obtain interference fringes from the optical path forming portion The interference fringe is determined by the structure (14), and the interference fringe = 2 optical path length is obtained according to the output from the camera 3 =: two-striped bellows'. The length of the optical path is used to measure the shape of the object to be measured, and the spectroscopic stripe included in the rounding of the component of the photographing mechanism is separated, and the interference fringe contained in the rounding of the component is separated into a desired knife and The timing of the frequency components due to the aliasing phenomenon, = sheep into (14 = description = length check The mechanism includes the interference fringe data selection unit data, and the new interference fringe data generated by the interference fringe ff is divided, and the display = c) is obtained, and the specific optical path length is described based on the description. The invention of the patent of the characteristic value of the pattern ====: is configured such that the application unit selects the number of sample data from the photographing mechanism to select the timing of the pattern data to be based on the surface of the sampling area. For the change of 200914791, the component of the new interference fring material in the frequency region is selected. Chen's new interference fringe data of the new interference fringe region of the frequency region is subjected to the inverse two-zone data, and is obtained according to the == of the characteristic value at that time, and the coffee maker patent === The composition of == Ming is the seed produced in the application, and the so-called (four) scale is generated relative to the variable surface of the length of the road by the variable length machine. When the wavelength of the large fiscal center of Gu Shukuan is set to λ, the photochemicalization caused by the optical path length variable mechanism exceeds the interval of λ/6. The invention described in claim 4, wherein the photographing mechanism performs photographing with an inherent minimum exposure time, and the optical path length is used in the invention described in claim 1 or 2 When the variable mechanism sets the speed at which the optical path length changes to ν, the time interval in which the change in the optical path length exceeds λ/(6 ν) is taken as the timing. The invention according to claim 5, wherein the optical path length detecting means includes a wavelength selecting unit (14d) for selecting from the interference fringe data. Extracting at least two wavelengths into the new interference fringe data selected by the Ministry
U 200914791 f ’所述光路長料算部根據所述提取的至少*個波長成 分的相位差大致成爲零的所述光路長度作爲所述特定光路 長度而求出。 [發明效果] /根據本發明,其構成爲,在産生混疊現象的時序獲取 (採樣)干涉條紋資料,將因該混疊現象産生的無用頻率 成分被去除_量出位移,因此,以産生混疊現象的方式 延長資料獲取時序的期間,也就是說’减少資料獲取次數, 可,少相應的光學處理時間,從而可縮短測量時間。即, =爲主要的測量時間,如果用〔光路長度可變時間+資料 又取次數χ(曝光時間+獲取處料間)〕來絲可以 與為料獲取次數的减少相應地縮短測量時間。 m把上述和其他目的、特徵和優職更明顯 if舉較佳實施例,並配合所關式,作詳細說 听如下。 【實施方式】 使用附圖來說明本發明的實施方式。圖丨是表示第1 :施方式的功能構成的圖。,2是用以說明干涉:紋的 示改變了圖1的光路長度檢測機構後的第2 貝知方式的圖。圖4(A)、圖4(B)、圖4(;c:)、圖4 作ml4 是用以說明圖3的干涉條紋資料選擇部 圖6是用以說明圖3的光路長度可變 ^構=作的圖’圖5表示各頻率成分的干涉條紋,圖6 表不其相位特性。圖7 (A)、圖7 (B)、圖7 (c)、圖 12 200914791 7 (D)、圖 7 (E)、圖 7 、 方式中去除了混叠現象 K卩說明在圖1的實施 圖。另外,圖7⑷象 _、圖7⑺是用以在‘‘背=?、圖7⑼、 明的背景進行說明的圖。 ’7、技術一攔中對本發 第1貫施方式的整體構成】 如上所述,第J實施方式 疋理的時序晚的時序,也就是從2二ί在比滿足採樣 _產生的_分,中,去除因混 理的時序所獲得的干涉條纹同來的在滿足採樣定 的干涉條紋的强度峰值產生的光,將該提取 ί度發生變化直到産生干涉條紋爲止“光路 I)作爲特定光路長度(位移)而求=的先路長度的變化U 200914791 f The optical path length calculating unit obtains the optical path length in which the phase difference of the extracted at least * wavelength components is substantially zero as the specific optical path length. [Effect of the Invention] According to the present invention, the interference fringe data is acquired (sampled) at the timing at which the aliasing phenomenon occurs, and the unnecessary frequency components generated by the aliasing phenomenon are removed and displaced, thereby generating The way of aliasing prolongs the period of data acquisition timing, that is, 'reduces the number of data acquisitions, and can reduce the corresponding optical processing time, thus shortening the measurement time. That is, = is the main measurement time, and if the [optical path length variable time + data acquisition times 曝光 (exposure time + acquisition between materials)] is used, the measurement time can be shortened in accordance with the decrease in the number of acquisitions. m. The above and other objects, features, and merits are more obvious. If the preferred embodiment is used, the details are as follows. [Embodiment] Embodiments of the present invention will be described using the drawings. Fig. 丨 is a diagram showing the functional configuration of the first embodiment. 2 is a diagram for explaining the second known method after the interference: the pattern is changed by the optical path length detecting means of Fig. 1. 4(A), 4(B), 4(;c:), and FIG. 4 are used to explain the interference fringe data selection unit of FIG. 3. FIG. 6 is a view for explaining that the optical path length of FIG. 3 is variable. Figure 5 shows the interference fringes of the respective frequency components, and Figure 6 shows the phase characteristics. Figure 7 (A), Figure 7 (B), Figure 7 (c), Figure 12 200914791 7 (D), Figure 7 (E), Figure 7, the method of removing the aliasing phenomenon K 卩 is illustrated in the implementation of Figure 1 Figure. Further, Fig. 7 (4) and _ and Fig. 7 (7) are diagrams for explaining the background of "back", Fig. 7 (9), and clarification. '7. The overall configuration of the first embodiment of the present invention in the first stop of the technology. As described above, the timing of the late processing of the Jth embodiment is that the timing of the second generation is equal to the _ score of the sampling _. In the same manner, the interference fringe obtained by the timing of the mixing is removed, and the light generated by the peak of the intensity of the sampling interference fringe is removed, and the extraction γ is changed until the interference fringe is generated until the “optical path I” is generated as the specific optical path. Length (displacement) and change in the length of the leading path
U 以下的說明中,在使測量光路 時’有時將產生干涉條紋的光路長度(==二 時的光路長度的變化C稱爲 ' 長又,/、表示該被測量物的形狀的位移。 的夕η,爲了引奸涉,光源1使用具有遍及寬頻帶 ^個波長成分且出射相干性(⑺hereney)較低的光的白 色光源。準直透鏡(collimator lens) 2將來自光源^的白 色,(寬頻f光)聚光後送向分光鏡(beam印1出打)3。 分光鏡3將白色光的方向轉換後送向物鏡4。物鏡4使白 色光成爲平行光後送向分光鏡5 (光路形成部)。分光鏡5 13 200914791 將從物鏡4接收的白色光向兩個方向分支,其中 =量絲送向被測量物7 (將從分光鏡5向被測量物^ 光路作爲測量光路),另一個則作' “將從分先鏡5向參考鏡6的先:爲作參爲 分光鏡5與參考鏡6之間是固定的,也就是說,Ϊ 考光路的光路長度設爲一定的固定長产。 夕 而^可以用半透明反射鏡(half‘)來代替分光鏡5 測量光_構絲,_自色絲_麟被測量物 、又面上的想要測1的所需的照射範圍。 被測量物7安裝在作爲姐長度可變機構 Ο 8上。壓電部8由壓電元件構成,在來自光ς』 ί Γ的f構16:指不Τ ’使被測量物7相對於ΧΥ平面(二 方向、、、!*:正父的面)而向ζ軸方向(圖1的紙面的上下 _光路==二從而以規妓度來對測量光 -方=外:㈣’作爲本發明的使光路長度發生變化的可U In the following description, when the optical path is measured, the optical path length at which the interference fringes are generated (the change C of the optical path length at the time of == 2) is referred to as 'long and /, and indicates the displacement of the shape of the object to be measured. In the case of the eve η, the light source 1 uses a white light source having light having a wide wavelength band and a wavelength of coherence ((7) hereney). The collimator lens 2 will be white from the light source ^, (Broadband f light) condensed and sent to the beam splitter (beam print 1) 3. The beam splitter 3 converts the direction of the white light and sends it to the objective lens 4. The objective lens 4 makes the white light into parallel light and then sends it to the beam splitter 5 (Light path forming portion). Beam splitter 5 13 200914791 The white light received from the objective lens 4 is branched in two directions, wherein = the amount of the wire is sent to the object to be measured 7 (the light path from the beam splitter 5 to the object to be measured is used as the measuring beam path) ), the other is ''from the first mirror 5 to the reference mirror 6 first: for the reference between the beam splitter 5 and the reference mirror 6 is fixed, that is, the optical path length of the optical path is set to Certain fixed long-term production. Even the sun can use a semi-transparent mirror (half Instead of the spectroscope 5, the light _ wire is measured, the _ self-color ray is measured, and the desired irradiation range on the surface is desired to be measured 1. The object to be measured 7 is mounted as a variable length mechanism. 8. The piezoelectric portion 8 is composed of a piezoelectric element, and the f-construction from the aperture 16 16 : : : : : : 使 使 使 使 使 使 使 使 使 使 使 使 使 使 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( In the direction of the x-axis (the upper and lower sides of the paper surface of Fig. 1 = the optical path == two, the measurement light - square = outer: (four)" is used as the optical path length of the present invention.
St =續的可變’且使可變速度成爲固定,從而進 一一下述的相機等的資料獲取時序相比,也可以 呈細小的階梯狀而變化。 光路控制機構16的控制下’使測量 度可變機構)。另外,這裡是使參考光路的 又*疋而使測量光路的光路長度發生變化來進行說 200914791 了生成干涉條紋,也可以是如下的構成:將壓電 的光路長度可變。使測里先路固疋’而使參考光路 從參考鏡6以及被測量物7分別反射 下,有時稱爲“返回光,,)由八#铲5、隹>人/巴九1以 9的作用下絲平行域私成像透鏡 此時,在來自光路長度控制機構16的指示下 制量光路的統長度發生變㈣ 時的時間間隔),相機10對返回光進行拍攝, ί回=生Γ干涉條紋(實際上,所述拍攝只是對返回光 光:干U其中包含了隨後展現拍攝資料時出現的返回 t干涉條紋,所以表述爲“拍攝干涉條紋,,)。所= •J的干涉條紋被存儲在記憶體13中。此 if路的構歧·白色光同時照射被測量物7 所以拍攝到與來自照射範圍的 置、即與來自相I、、目丨丨县Μ #里γ 、、射位 Μ门丄二要的置(以下’稱爲“測量位置,’) 的返回光相對應的干涉條紋。 置1置) 所述的二:f圖1的光學系統的變形’也可以構成如下 物二;二:在和參考光路上分別配置 於圖!的光:=在!上的位置’所以本發明並不限 相=但是,以下按照圖1來說明。 相機10的拍攝時序及記憶體 尹的資料哺辦序,《由姐妓 15 200914791 出也就疋說,光路長度控制機構以規定的速度對壓電 部8發出光路長度的可變指示,另一方面,生成規定時間 間隔的時序信號並發送給相機1〇及記憶體u,在此時序 獲取資料。即’相機1〇及記憶體13在該時序信號的時序, 返回光的拍攝資料(成爲表示返回光的亮度的 rSt = continuous variable ' and the variable speed is fixed, so that the data acquisition timing of the camera or the like described later can be changed in a small step shape. Under the control of the optical path control mechanism 16, the measurement variable mechanism is made. In addition, in this case, the optical path length of the measurement optical path is changed by the reference optical path, and the interference fringe is generated in 200914791, and the optical path length of the piezoelectric element may be changed. The reference beam path is reflected from the reference mirror 6 and the object to be measured 7, respectively, and is sometimes referred to as "return light," by eight #铲5, 隹> people/巴九1 The action of 9 is the lower parallel field private imaging lens. At this time, the time interval when the system length of the optical path is changed (four) under the instruction from the optical path length control mechanism 16 is taken, and the camera 10 takes a picture of the return light. Γ Interference fringes (actually, the shooting is only for returning light: the dry U contains the returning t interference fringes that appear when the photographic material is subsequently displayed, so it is expressed as "shooting interference fringes,"). The interference fringes of = J are stored in the memory 13. The configuration of the if road and the white light simultaneously illuminate the object to be measured 7 so that the image is taken from the range of the illumination range, that is, from the phase I, the target Μ 里 in the 丨丨 里, and the Μ Μ 丄Set the interference fringes corresponding to the return light (hereinafter referred to as "measurement position, '). Set the second: f The deformation of the optical system of Figure 1 can also constitute the following two; The reference light path is respectively arranged in the light of the picture: = the position on the !', so the present invention is not limited to the phase. However, the following description will be made with reference to Fig. 1. The shooting timing of the camera 10 and the data feeding order of the memory Yin, In the meantime, the optical path length control mechanism gives a variable indication of the optical path length to the piezoelectric portion 8 at a predetermined speed, and generates a timing signal of a predetermined time interval and transmits it to the camera 1 . And the memory u, the data is acquired at this timing. That is, 'the camera 1 〇 and the memory 13 are at the timing of the timing signal, and the photographed data of the light is returned (becomes the brightness indicating the return light)
L =而言’寬頻帶光的干涉肢具錢卿光的中心 m的重複周期。在獲取該λ/2周期的波形並進 二 防止混疊現象的産生,通常在該周期中要 金;:;枓’所以必須在比心3)更早的重雜 本發明中,因爲是在產生混最 _晚的時_隔的控制信號發送構16將比 13,在該控制錢的時序獲取資料。^ f ω及記憶體 在對墨電部8進行錢驅動㈣^長度㈣機構16 _早的時間間隔的時序信號,時’生成比 長度的可變指示。 ㈣—部8發出光路 結果,記憶體13將該時序信梦L = the repetition period of the center m of the interferometric limb of the broadband light. Obtaining the waveform of the λ/2 period and preventing the generation of the aliasing phenomenon, usually in the period of gold;:; 枓 'so must be in the invention earlier than the heart 3), because it is generating The mixed_most late_interval control signal transmission structure 16 will be compared to 13, and the data is acquired at the timing of the control money. ^ f ω and memory In the case where the ink-electric portion 8 is subjected to a money drive (four) length (four) mechanism 16 _ early time interval timing signal, a variable indication of the ratio length is generated. (4) - Part 8 emits an optical path, and memory 13 dreams of the timing
Uddress )而存儲了拍攝資料。這些u ^間,作爲地址 地址方向)表示光路長度方向(z ^方,行進方向(即 軸方向)。此時,將該 r ύ 200914791 ^ (Xn;,;P iX;;IP) ° 應㈣方U素:與置^ 中所存儲的㈣,藉由接 in機=13 的處理而獲得的干涉條紋的一例。机錢理機構20 算機^處理機構2G具備光路長度檢測機構叫位移運 如圖1所不,光路長度檢測機構14由干咔鉻妗 擇部W、光路長度計算部14c構成。料選 =(細,外)的資料,並:量位 換成頻率區域的資料。這樣,如圖7 (Ε^某,)而轉 因混疊現象產生的頻率成分(圖7 (E()存在 來=干涉條紋_率成本 :分離,將混疊現象産生賴率成 並取f干涉條紋的成分(圖7⑻實線部 =而分離 頻率資料選擇部w使 在遵照採樣i:==:=:尺還原成 所 ==所謂的頻率率 此時的干涉條紋的資料)。錢冲异部…(圖2是 17 200914791 另外,在圖2的干涉條紋的波形中,作 特徵值的干涉航的大致中央的波峰位 路的光路長度與測量光路的光路長度變得 ^兄而 二,干涉條紋的波長是由作爲寬頻=要兄辛: 各波長σ成所$作’此波長是這些頻帶的大致古 ^的1/2。而且,圖2的白色光的干涉條紋向光路長度=向 的擴展,也就是干涉條紋的包絡制寬 ^ ^ 色光的相干性的程度(相干(c〇h議ce)長度;白 區域的頻率成分的寬度AF。相干性越低(相 tfA越長)、即^越大,則寬度^會變得越窄(參照 圖7 (Β))。如果將干涉條紋的頻率成分的 最高頻率設爲Fh,則頻率成分的寬度AF滿足 (λ/2)〕<Fh,而且,如果使寬度AF减小(使相干性 好(使相干長度變短)),則干涉條紋的振 固定而波峰會消失,因此’以使干涉條紋的寬度△= 可把握干涉條紋的峰值的程度的方式,來決定寬度 例如,以下進行示意性說明,如果以使寬度AF低於最高 頻率Fh/2的方絲決定光源1的頻帶寬,壯圖7 (E) 所示’雜後的頻帶區域中的右半部分被分成干涉條紋的 實頻率成分’而左半部分被分成因混疊現象産生的頻率成 分(折,頻率成分),且可藉由將Fh/2設爲截止(cut) 頻率的尚通濾波器(highpass fnter)而僅提取干涉條紋的 實頻率成分。即’獲得已將無用成分即折返成分除外的頻 率數成分。 18 200914791 成分3、^檢14對已將因混疊現象産生的頻率 換成時二二二夕的實頻率成分進行逆砰了處理後轉 度=;Γ:決定此位置的光 =色置(或*波峰的位置”),是指 “二=:亮f置(振:)㈣最大(以下,稱爲 干y 07相神上的位置,圖2中,播鉍3 、+. .B,真止 f (2#" : ^ 1 W疋光路長度可__ 時間咖進行拍攝時的時間軸方向;^用相機1G以規疋 記拍攝資料是在存儲於 η . 铃序(採樣時序)而被存儲的(圖2 賴起來而連續表現的圖),所以光路 有 =:料干涉:資:=接收與干涉條 :有時振幅的極大點與包絡線的波;致= = =性’、因而也可以根據前後的振幅的極大 "9 鼻來求出包絡線的波峰位置。例如,作爲 攝資料而求出干涉條紋的波峰的方法,有如 變^招—I路長度階段性地變化’並根據對應每個所述 長度所拍攝的離散的拍攝資料,來進行 沾石、、纽=理二利用數位式高通據波器從拍攝資料所獲得 次料貝料中將直流成分除外。將成爲交流成分的 貝厂1 w❿進仃整流。彻使tb整流後的重複成分低 19 200914791 的重<成分予以通過的數位式低通滤波器來進行積分,計 算出干涉條紋的包絡線資料。即,進行通常的包絡線檢波。 此時,根據波峰位置的精細度的要求,在整流後的重複成 ^之間例如以平方特性來進行内插’並對内插後的重複成 分進行積分而求出包絡線資料。求出成爲此包絡線資料的 波峰的位置4外,如日本專利特開平9_318329號公報中 =記載的’信號處理機構2G也可以姻離散處理來求出波 位置’而不管拍攝資料的時序(時間間隔)和干涉條紋 的周期如柯。 位,運算機構I5根據圖2的例如測量位置(Xm,γρ) 巧定波長ti和以相同方式求出的基準測量位置(xs, 置的、疋波長tS之差ts—U而求出相對於基準測量位 置的測1值的被測量物的形狀的 測量範_各卿彳H卩被射物7的 度,也就是各敎統長Γ餘的料位置的光路長 [第2實施方式]Uddress) and stored the shooting data. These u ^, as the address address direction) indicate the optical path length direction (z ^ square, the traveling direction (ie, the axial direction). At this time, the r ύ 200914791 ^ (Xn;,; P iX;; IP) ° should (4) Square U: An example of the interference fringe obtained by the processing of (4) stored in the device, by the processing of the machine = 13. The machine mechanism 20 computer has a path length detecting mechanism called the displacement operation. In Fig. 1, the optical path length detecting means 14 is composed of a dry chrome removing portion W and an optical path length calculating portion 14c. The material of the = (fine, outer) material is selected, and the amount is changed to the data of the frequency region. As shown in Fig. 7 (Ε^,), the frequency component due to the aliasing phenomenon (Fig. 7 (E() exists = interference fringe _ rate cost: separation, the aliasing phenomenon is generated and the f interference fringe is taken The component (Fig. 7 (8), the solid line part = and the separation frequency data selection unit w makes the data of the interference fringe at the time of the frequency ============================================================ ... (Fig. 2 is 17 200914791 In addition, in the waveform of the interference fringe of Fig. 2, the approximate value of the interference of the characteristic values The length of the optical path of the peak position of the central wave and the length of the optical path of the measuring optical path become the same. The wavelength of the interference fringe is determined by the width of the interference fringe: the wavelength of each wavelength σ is 'this wavelength is the approximate frequency of these bands. 1/2 of ^. Moreover, the extension of the interference fringes of white light of Fig. 2 to the optical path length = direction, that is, the envelope width of the interference fringes ^ ^ the degree of coherence of the color light (coherent (c〇h ce) length The width of the frequency component of the white region AF. The lower the coherence (the longer the phase tfA), that is, the larger the ^, the narrower the width ^ (see Fig. 7 (Β)). If the frequency component of the interference fringe is The highest frequency is set to Fh, and the width AF of the frequency component satisfies (λ/2)] < Fh, and if the width AF is made small (to make the coherence good (to make the coherence length shorter)), the interference fringe Since the vibration is fixed and the peak disappears, the width is determined so that the width Δ of the interference fringe can be grasped to the extent that the peak of the interference fringe can be grasped. For example, the following description will be schematically made, so that the width AF is lower than the maximum frequency Fh/ The square wire of 2 determines the frequency bandwidth of the light source 1, and the figure 7 (E) shows that the right half of the band region after the impurity is divided into the real frequency component of the interference fringe and the left half is divided into the frequency component (folding, frequency component) generated by the aliasing phenomenon, and can be Fh/2 is set to the high pass fnter of the cut frequency, and only the real frequency component of the interference fringe is extracted. That is, 'the frequency component which excludes the unnecessary component, that is, the folded component, is obtained. 18 200914791 Component 3 And 14 checks that the frequency generated by the aliasing phenomenon has been replaced by the real frequency component of the second and second nights, and the degree of rotation = Γ: determines the position of the light = color (or * peak Position "), refers to "two =: bright f set (vibration:) (four) maximum (hereinafter, called the dry y 07 phase of the god position, in Figure 2, broadcast 铋 3, +. .B, true stop f ( 2#" : ^ 1 W The length of the light path can be __ The time axis direction when the time is taken; ^The camera 1G is used to store the data stored in the η. Bell sequence (sampling timing) and stored. (Figure 2 is a graph of continuous performance), so the optical path has =: material interference: capital: = receiving and interference bar: sometimes amplitude The maximum point and the wave of the envelope; the == = sex', so the peak position of the envelope can also be found from the amplitude of the front and back amplitudes. For example, as a method of obtaining a peak of an interference fringe as a photographing material, there is a case where the length of the I path is changed stepwise, and the scattered photographing data corresponding to each of the lengths is used to perform the dipping stone, New = Li 2 uses the digital high-pass volute to remove the DC component from the secondary material obtained from the photographed data. The beijing plant that will become the AC component will be rectified. The repeating component after the rectification of tb is reduced by the digital low-pass filter through which the weight component of 200914791 is passed, and the envelope data of the interference fringe is calculated. That is, normal envelope detection is performed. At this time, according to the request for the fineness of the peak position, interpolation is performed between the rectified repetitions, for example, by the square characteristic, and the interpolated repetitive components are integrated to obtain the envelope data. In addition to the position 4 of the peak of the envelope data, the signal processing means 2G described in the Japanese Patent Laid-Open Publication No. Hei 9-318329 can also determine the wave position by the discrete processing regardless of the timing of the captured data (time). Interval) and the period of the interference fringes such as Ke. The bit, the arithmetic unit I5 determines the wavelength ti according to the measurement position (Xm, γρ) of FIG. 2 and the reference measurement position (xs, the difference ts-U between the 疋 wavelengths tS) obtained in the same manner. The measurement range of the shape of the object to be measured, which is the value of the measured value of the reference measurement position, is the degree of the light path length of the material position of each of the remaining points, that is, the light path length of the material position of each of the remaining lengths [second embodiment]
根據圖3、圖4(A)、園4广〇、 (D)、圖 4(E)及n f ()、圖 4(C)、圖 4 I )及圖5來進行說明(1中,岡4 r a、、 圖4⑻、圖4(C)、圖4⑼上、4'p圖4⑷ 明動作原理的的圖)。圖 Θ (E)疋用以祝 Ϊ=:Γ的先路長二 ==;:的 實"方式中將圖1的錢處理機構20替換=信 20 200914791 號處理機構20a,進而使圖5的相機10成爲彩色相機。因 此’圖1中’光源1是在遍及寬頻帶的多個波長成分中含 有至少兩個波的波長頻帶的成分的光源,這裡,例如使用 含有紅、綠各色的波長頻帶的光源。也可以將紅、綠各色 的波長的光加以合成而使用。信號處理機構20a以外的其 他的構成、動作、時序等與圖i相同。以下,對信號處理 機構20a進行說明。3, FIG. 4 (A), garden 4, (D), 4 (E) and nf (), FIG. 4 (C), FIG. 4 I) and FIG. 5 (1) 4 ra, Fig. 4 (8), Fig. 4 (C), Fig. 4 (9), 4'p Fig. 4 (4) Fig. 4). Figure Θ (E) Ϊ Ϊ Γ Γ Γ Γ Γ = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = The camera 10 becomes a color camera. Therefore, the light source 1 in Fig. 1 is a light source containing a component of a wavelength band of at least two waves in a plurality of wavelength components in a wide frequency band. Here, for example, a light source having a wavelength band of red and green colors is used. It is also possible to combine and use light of wavelengths of red and green. Other configurations, operations, timings, and the like other than the signal processing unit 20a are the same as those in Fig. i. Hereinafter, the signal processing unit 20a will be described.
一圖3中,干涉條紋資料選擇部14e與圖丨的干涉條紋 貧料選擇部14a基本上相同,但由於所述干涉條紋資料選 擇部14e也疋本發明的主要構成之一,所以使用圖4(A)、 圖4 (B)、圖4 (C)、圖4 (D)、圖4 (E)來說明。 干涉條紋資料選擇部14e是在相機1〇或記憶體13如上所 述=起混疊現象的採樣時序(比λ/6長的期_時序)獲 取貝料’、所以將來自記紐13的時間區域資料藉由In FIG. 3, the interference fringe data selecting unit 14e is basically the same as the interference fringe lean selecting unit 14a of the drawing. However, since the interference fringe data selecting unit 14e is also one of the main components of the present invention, FIG. 4 is used. (A), Fig. 4 (B), Fig. 4 (C), Fig. 4 (D), and Fig. 4 (E) will be described. The interference fringe data selection unit 14e is a sampling timing (the period_time longer than λ/6) of the camera 1 or the memory 13 as described above = the time of the aliasing, so the time from the counter 13 is obtained. Regional data
FFT 而轉換成頻率區域#料,職除因所述混疊現象産生的無 ,刀乂獲取干/步條紋的頻率成分,並發送給波長選擇 葬由Ί二條紋貝料選擇部…彻濾'波11,來選擇且保留 而將處於前-個^中色的^^㈣)以^所需的資料, ⑼^的無用成分予以去除。然後使圖4 m (圖4 (E)的灰色區域所示的右半部 刀)而縣’並發送給波長選擇部14d。 200914791 ^ 使用圓4來進行全盤的原理性的說明。 長成分的干涉條紋,是料从^ 序T0 (比所述λ/6ν早的時序)進 ::的-例。圖4⑻是轉換成圖4⑷ = f料。而且,此時,藉由遽波器來選擇左半部= 加以利用。如本發明所示,例如,如 貝枓並 =T。的一半處且在產生混疊現象的心二 貧料’則可取代圖4⑷而獲得圖 時左右分布發生 ==象而出現在圖4(d)的左=右= :二本來的干涉條紋的成分則出現在圖4 4⑻_率轴相比位^且’圖4 (D)的頻率軸與圖 此,採樣頻率的關係上成爲-半。因 υ 卞波形相同,所以只要利用渡 == :所示改變比例尺,就可 來相: ⑻的左半部分的解齡㈣料。。錢仔的圖4 以下對時序關係進行具體說明 10的基於採樣定理的採樣時序το的二:=目機 中爲2倍)的時序所達成的樣 。(所述圖4(c) 干涉條紋資料藉由FTT處理而轉=將時間區域的 如果將基於採樣定理的採樣成區域資料’在且 π斤的樣品資料數設爲η 22 200914791 時,則m=n/x,且相應地頻率數軸上的刻度作縮小處理。 即如上所述以分頻的形態來表示。因此,干涉條紋資料 選擇部14e在改變圖4⑼的頻率轴的比例尺,並如圖4 ⑻所示與基於採樣定理的頻率軸(與® 4 (B)相同) =地進行處理時,將進行FFT處理時所處理的樣品資料 數设爲m個’除此以外,僅對(η) /χThe FFT is converted into a frequency region #料, the job is removed due to the aliasing phenomenon, the blade acquires the frequency component of the dry/step stripe, and is sent to the wavelength selection funnel by the second fringe material selection section...filtering' Wave 11, to select and retain the ^^(4) in the first - middle color, to remove the unnecessary components of (9)^. Then, Fig. 4 m (the right half of the knife shown in the gray area of Fig. 4 (E)) is sent to the wavelength selecting portion 14d. 200914791 ^ Use circle 4 for a full explanation of the principle. The interference fringes of the long component are obtained from the sequence T0 (times earlier than the λ/6ν) into the ::. Figure 4 (8) is converted into Figure 4 (4) = f material. Moreover, at this time, the left half = is used by the chopper to be utilized. As shown in the present invention, for example, such as Bellow and T. At the half of the heart and in the case of the aliasing phenomenon, the left and right distributions appear in Fig. 4(4) instead of Fig. 4(4). The left and right sides of Fig. 4(d) appear: the interference fringes of the original two The composition appears in Figure 4 4 (8) _ rate axis compared to the bit ^ and 'the frequency axis of Figure 4 (D) and the figure, the sampling frequency is - half. Since the υ 卞 waveform is the same, as long as the scale is changed by using the == :, you can come to the phase: (8) The solution to the age of the left half (four). . Figure 4 below shows the timing relationship. The sampling timing based on the sampling theorem is the same as the timing of the sampling timing το2 = 2 times in the target machine. (Fig. 4(c) When the interference fringe data is converted by the FTT processing, if the time zone is sampled into the region data based on the sampling theorem, and the number of sample data of π jin is set to η 22 200914791, then m =n/x, and the scale on the frequency number axis is correspondingly reduced. That is, it is expressed in the form of frequency division as described above. Therefore, the interference fringe data selecting portion 14e changes the scale of the frequency axis of Fig. 4 (9), and as shown in the figure 4 (8) When the frequency axis (same as ® 4 (B)) is used for the processing based on the sampling theorem, the number of sample data processed during FFT processing is set to m ', except for (η) ) /χ
利用值爲G的資料來進行補充(〇填充(padding))處理。 =對樣品資料數變少而空白的n —m的頻率區域利用〇 的^來進行填充。另外,從理論上而言,由於頻率轴比 小了 因而也可以不改變樣品資料數,而將 …軸上的刻度換讀成父倍來處理。而且,由所述附 1 資料數與鮮軸的隱即使在魏的實施方式 圖3中 ^ >長選擇部14d接收從干涉條紋資料選擇部 分== 神區域的資料’並藉由遽波器而將頻率 八這:1相孤Μ、成分、綠色⑹成分、紅色⑻成 +Γ述各似分魏給光路長料算部⑷。 iiLt f Θ,在接㈣各個成分錢行逆傅 =轉換所得的時間區域的干涉條紋資料中,B相位計】 ° fl、G相位計算部14f2、R相位計算部邮m八束 =所符合的成分的相位變化(例如,藉由正交解^求出 各相位變化(縱軸)。而且,如圖 U、軸)的所述 機構14f4蔣娇、+、-您〇、\ τ ’光路長度決定 機構_將财二種成分的她—致料路長度決定爲 23 200914791Supplementation (padding) processing is performed using data having a value of G. = The frequency region of the blank n-m is reduced by the number of sample data and is filled with 〇. In addition, theoretically, since the frequency axis ratio is small, the number of sample data can be changed without changing the scale of the sample, and the scale on the axis can be read as a parent multiple. Further, from the embodiment of the attached data number and the fresh axis, even in the embodiment of Fig. 3, the long selection portion 14d receives the data from the interference fringe data selection portion == the god region' and uses the chopper And the frequency of eight: 1 phase, 成分, composition, green (6) component, red (8) into + narration, each of which is divided into Wei to the light path long calculation unit (4). iiLt f Θ, in the interference fringe data of the time zone obtained by the inverse quadrature conversion of each component, the B phase meter] ° fl, the G phase calculating unit 14f2, and the R phase calculating unit mail m eight bundles = the component to be matched Phase change (for example, by orthogonal solution ^ to find each phase change (vertical axis). Moreover, as shown in Figure U, axis), the mechanism 14f4 Jiang Jiao, +, - you 〇, \ τ 'light path length determines Institutions _ will be the two ingredients of her - the length of the road is determined to be 23 200914791
此時,因爲資料是離散的, 二路長度的情况下,使用如 在所述構成中,信號處理機構20、20a 控制機構16可由巾央處理H (Centrai pro CPU)及記憶體構成。 、20a以及光路長度 il processing unit 5 上所述由於可在産生混疊現象的時序獲取資料而 f 11行,量,所以可减少資料獲取的次數。因此,作爲主要At this time, since the data is discrete, in the case of the two-way length, as in the above configuration, the signal processing means 20, 20a control means 16 can be constituted by the central processing H (Centrai pro CPU) and the memory. , 20a and optical path length il processing unit 5 As described above, since the data can be acquired at the timing of the aliasing phenomenon, the number of times of data acquisition can be reduced. Therefore, as the main
' ㈣量時間’如果用〔光路長度可變時間+資料獲取次數X (曝光時間+獲取處理時間)〕來表示,則可以與資料獲 取次數的减少相應地縮短測量時間。 雖然本發明已以較佳實施例揭露如上,然其並非用以 限定本發明,任何熟習此技藝者,在不脫離本發明之精神 和範圍内,當可作些許之更動與潤飾,因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 U 圖1是表示第1實施方式的功能構成的圖。 圖2是用以說明干涉條紋的圖。 圖3是表示改變了圖1的光路長度檢測機構後的第2 . 實施方式的圖。 圖 4(A)、圖 4(B)、圖 4(C)、圖 4(D)、圖 4 (E)是用以說明圖3的干涉條紋資料選擇部的動作的圖。 圖5是用以說明圖3的光路長度決定機構的動作的 圖,表示各頻率成分的干涉條紋。 24 200914791 圓6是用以說明圖3的光路長度決定機構的動作的 圖’表示各頻率成分的相位特性。 圖 7(A)、圖 7(β)、圖 7(C)、圖 7(D)、圖 7 (E)、圖7⑺是用以說明在第〗實施方式中 =象的影響而求出干涉條紋的動作” ⑷、圖7W、圖7(〇、圖7(D) 圖7 =是用以在“背景技術,,一欄中對本發明的背景進行 【主要元件符號說明】 1 光源. 2 準直透鏡 3 分光鏡 4 物鏡 5 分光鏡 6 參考鏡 7 被測量物 8 壓電部 9 成像透鏡 1〇 相機 13 記憶體 14 林長度檢測機構 14a、14e干涉條紋___ 14c 光路長度計算 14d 波長選擇部 25 200914791 14、14f 14fl 14f2 14flm 14f4 15 16 18 20、20a 光路長度計算部 B相位計算部 G相位計算部 R相位計算部 光路長度決定機構 位移運算機構 光路長度控制機構 用戶界面 信號處理機構 26'(4) Quantity time' If it is expressed by [Light path length variable time + data acquisition time X (exposure time + acquisition processing time)], the measurement time can be shortened in accordance with the decrease in the number of times the data is acquired. While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS U FIG. 1 is a view showing a functional configuration of a first embodiment. FIG. 2 is a view for explaining interference fringes. Fig. 3 is a view showing a second embodiment after the optical path length detecting mechanism of Fig. 1 is changed. 4(A), 4(B), 4(C), 4(D), and 4(E) are views for explaining the operation of the interference fringe data selecting unit of Fig. 3. Fig. 5 is a view for explaining the operation of the optical path length determining means of Fig. 3, showing interference fringes of respective frequency components. 24 200914791 The circle 6 is for explaining the operation of the optical path length determining means of Fig. 3, and the phase characteristic of each frequency component is shown. 7(A), 7(β), 7(C), 7(D), 7(E), and 7(7) are for explaining the influence of the image in the first embodiment. "Stripe action" (4), Fig. 7W, Fig. 7 (〇, Fig. 7(D) Fig. 7 = is used to describe the background of the invention in the background art, [the main component symbol description] 1 light source. 2 Straight lens 3 Beam splitter 4 Objective lens 5 Beam splitter 6 Reference mirror 7 Object to be measured 8 Piezoelectric part 9 Imaging lens 1 〇 Camera 13 Memory 14 Lin length detecting mechanism 14a, 14e Interference fringe ___ 14c Optical path length calculation 14d Wavelength selection section 25 200914791 14, 14f 14fl 14f2 14flm 14f4 15 16 18 20, 20a Optical path length calculation unit B Phase calculation unit G Phase calculation unit R Phase calculation unit Optical path length determination mechanism Displacement calculation mechanism Optical path length control mechanism User interface signal processing mechanism 26
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