200914781 九、發明說明： 【發明所屬之技術領域】 >本發明，係關於半導體或醫藥品之產線中所 淨室之空㈣統的改良，特別是非常適合用 門' 效率之潔淨室者。 代开王間 【先前技術】 目刖’在需進行微細加工技術之半導體等 :要求高品質之醫藥品等領域中，需有-個可將空= f埃濃度控制於極低等級之空間，而提供了一種於系餅夭 花板（由建築物之屋頂或 ' 貝次上層板構成，於下方具有格 匡材的天花板)設置有風扇過濾單元 流（層峨非單方向氣流（亂流则淨室。 早方向乳 目前大規模之潔淨室中，一 去用之風…單元卿)…“係採用於塵埃除 叫但因袭置密产之： 濕 用之乾盤管 將乾盤管收納於寡总^ %计η又罝二間。 、、導S (軸）内的方式，若亦考量到％ & 時，即需於潔淨室_ _ i I I难羞卫間 上亦產生空間上/ 間，而生產裝置之配置 溫度控制的缺點。 、田俅得/月净度或 到限制，需因ί產裝置之配置使潔淨室的配置受 提升空間效率、確之潔淨度與溫度調整至適當且可 保短期之施工的空調系統。 [專利文獻1]曰太壯Ba 本特開2002 - 333 180「潔淨室用空調 200914781 先」中為了將潔淨室内部區分成複數個區域來控制溫 Γ„係於天化板部分之供氣流路配置複數個具風扇之乾盤 二早二且將循環空氣用導管(軸)設置於室内。此種配置 “占去大量空間，而有空間效率降低的缺點。 ㈣[專：文獻2]曰本特開2002 — 147812「潔淨室用空調 告^’為了將潔淨室内部區分成複數個控制區域來控 制溫度，係於側方配置供氣流路，於對應各控制區域之位 置配置具風扇之乾盤管單 敗社土 4·旦扣 此種配置下，侧方之供氣流 大里工間，而有空間效率降低的缺點。 [專利文獻3]日本特開·卜124386「潔淨室」中， =循環風量，係就各區域設置短路送風手段(連通 路、導η，使區域内之空氣回流吹送至個別區域用室。在 此種配置下’有#路風量增加使潔淨度降低的缺點。 [專利文獻4]日本特開2001 - 56U0「潔淨室」中，為 了^併設有單方向氣流潔淨區域與非單方向氣流域 之潔淨室減少空氣循環動力能量，係設置垂直垂下的「垂 空間分隔壁，以防止氣流之胤流。在使用許多此 種分隔壁之配置下，古、主< 低的缺點。 …氣不會均-、空間效率亦降 【發明内容】 如上所述，以往之士丄、 式，由於係將乾盤管收納於導營（轴） 内，因此若亦考詈給饮〜 B ； 間，於“"夕、'二間’則須於潔淨室内確保較大空 θ 、 、 配置亦產生空間上的限制，有無法適當 200914781 地進行潔淨度或溫度控制的缺點。 因本發明之主要目的，係諾求 導管且提升空間效率。 門乾盤5之 本發明之另一目的，係接古去# & # 空氣混合率，使供氣溫度=天化板構件之供氣流路之 内成t =…目的，係防止天花板構件上之供氣流路 建杀物外部低之㈣，預防外部空氣侵入且縮小 溫度溼度之不均。 ::决則述课題，本發明之第〗態樣’係提供一種潔 ^ .床係於天化板構件上面設置供氣流路且配 _ “過濾早7C ’自該供氣流路使空氣通過該風扇過濾單 ::向潔淨室吹送清淨空氣，其特徵在於：於潔淨室地面 風扇之乾盤管以誘導回流空氣；自設於該具風扇之 官上部之空氣吹出喷嘴朝向天花板面以噴流方式吹出 梦至内的回流空氣；使該噴流自設於天花板構件之開口 #刀在该供氣流路回流；—邊使清淨空氣再度 用。 再者，本發明之第2態樣，係提供一種潔淨室之空調 ，置’係於天花板構件上面設有供氣流路且配置風扇過遽 早疋，自該供氣流路通過該風扇過濾單元之清淨空氣係被 朝向潔淨室吹送，其特徵在於：於潔淨室地面配置具風扇 之乾盤管以誘導回流空氣；自設於該具風扇之乾盤管上部 之空氣吹出噴嘴朝向天花板面以噴流方式吹出潔淨室内的 回流空氣；使該喷流自設於天花板構件之開口部分往該供 200914781 氣流路回流；-邊使清淨空氣再度循環-邊利用。 亦即本發明之潔、淨室系統中，肖以適當進行潔淨室 整體之潔淨度確保與溫度控制的循環送風，係藉由設置於 系統天花板之風扇過遽單元（FFU)進行，使設置於地面之 空調負荷處理用之具風扇之乾盤管（FDC)露出設置於潔淨 至内，自上部之吹出喷嘴以適當風速（8〜i5m八）吹出喷流。 從潔淨室誘導了-部分回流空氣（已使用之空氣）的喷流， 係形成通過設於上方近處之系統天花板之開口部分而吹入 天花板二的回流路徑。風速取決於天花板高度或吹出局部 的屋力知失。係-不需習知型回流用導管(軸)的系統。 …佳者為’使具風扇之乾盤管(FDc)之風量成為潔淨 至循％風$的7G〜9G%左右，自潔淨室誘導（吸引）一部分 回流空氣。成為喷流之混合空氣通過天花板構件之開口部 刀而衝才里於天化板内之層板’藉此均勻地混合更提升混 合率而成為有利於溫度控制之***。亦#，由於自潔淨室 使一部分作為誘導空氣旁流，與自FDC吹出之吹出風量混 合，因此只要增大旁流即亦可減少FDc之設置台數。 此系統，係利用在天花板内與潔淨室内產生之差壓， 即使不鋪㈣流導管（軸）或「垂設壁」等，亦能在不損宝 其功能的狀態下控制溫度。藉此，FDC能設置在潔淨室内 的任一場所，可解除物理性的限制。 天花板構件係系統天花板時，係使被稱為長方形模板 之長方形板多數相鄰形成。模板尺寸雖可任意對應，但亦 根據具有確保潔淨度之循環風量之風扇過濾單it (FFU)在 200914781 製作上功此上之限制或天花板強度等來決定，為了導入 本系統’其實際之模板尺寸為750xl500mm、或 i〇〇〇xi5〇〇mm等。系統天花板以外之一般天花板亦能以相 同恝法對應。藉由使FDC配合天花板模板之寬度鋪設，可 以系統天花板之模板單位組合複數個來形成回流路徑，提 升空間效率，且對製造裝置之配置限制亦有彈性。 來自潔淨室内之誘導空氣量（旁通量），可根據室内温 度之精度，以FDC之設置容量（台數）來任意設定。 具風扇之乾盤管（FDC)可視必要情形藉由連結同樣之 機種使必要風量模組化（聚集化）來設置。 配管工程亦可藉由配合具風扇之乾盤管（FDC)之尺寸 予以模組化，而能謀求工程之節省。 本發明之空調系統’即使在地下具有抽風室時亦同樣 可建構，不論是單方向流（層流）或非單方向流（亂流）均能適 用。 本發明中’由於係藉由FFU之風扇使空氣自天花板構 件上之供氣流路往潔淨室吹送，因此供氣流路内之氣壓必 然較潔淨室内之氣壓低。只要使用周知之外部空氣處理調 和機例如使系統天花板内產生+ 3〜+ 1 〇Pa、使潔淨室内 產生+ 10〜+ 3〇pa之差壓，自FDC之吹出空氣量即不會 往潔淨室内擴散，而迅速地被導往天花板内。此點，同時 亦可防止天花板構件上之供氣流路内成為較建築物外部低 的負壓’預防外部空氣之侵入’縮小溫度溼度之不均。 本發明之較佳例，係設有自天花板構件之開口部分周 200914781 =淨室内垂下的垂設壁’如此能防止喷流漏出至開口 b本發明之較佳態樣，係使垂設壁之下端較空氣吹出喷 腎之上端更往下方延伸，如此能進一步更確實地防止噴流 漏出至開口部分外。 又，本發明之較佳態樣，於該垂設壁之途中設有貫通 孔，此貫通孔係誘導垂設壁周圍之停滯空氣。 根據本發明可發揮如下效果： (υ由於不需收納具風扇之乾盤管之導管（軸），能將且 風扇之乾盤管設置於潔淨室内的任意位置，因此無配置1 的限制，能提升空間效率。 ⑺不需設置獨立之回流路徑，可謀求增加系統建構上 之弹性、縮短施工期間、以及提升施工品質。 (3)由於喷流係流入天花板構 傲稱忏上之供軋流路，因此能 楗局供氣流路之空氣混合率使供氣溫度穩定化。 ⑷具風扇之乾盤管本體之空氣壓力損失係由内藏風扇 承受，因此能減低風扇過遽單元之空氣壓力損b使天花 板内亦成為正壓。藉此，能防止 化板構件上之供氣流路 内成為負壓，預防外部空顏 工轧之钕入。藉此能縮小溫度溼度 小均。 •八，耶口胆傅取岈，由求 棋板單位配置開口部分或FDC，因此能提高空間效率 以下，參照附圖之實施例進-步詳述本發明。 200914781 【實施方式】 圖1至圖3係表示本發明之第！最佳實施態樣之潔淨 室系統10，圖1係俯視圖，圖2係沿圖丨之線八一 A之縱 截面圖，圖3係沿圖丨之線B—B之縱截面圖。 如圖1所示，此潔淨室系統1〇之天花板構件12，係 將750mmxl5〇〇mm之尺寸之模板相鄰配置縱七列、橫十一 列而構成系統天花板。於此天花板構件12上設置有六個 風扇過濾單元（FFU)14,該部分未安裝模板15。於中央部 ^成根據本發明之開口部分16,此開口部分16亦未安裝 模板1 5 ’其端緣以框材補強而形成。 於圖1之開口部分16下方，如圖2所示，於潔淨室22 之地面13上以一組三台連結之狀態設置有兩組、合計六 ^的具風扇之乾盤管（FDC)18。圖2中，上階層板n與天 1匕構件12之間成為供氣流路20，使通過FFU之潔淨空 氣朝向潔淨室22供應。 工 \ 依據本發明，於FDC18本體上部安裝有吹出用喷嘴 ’在潔淨室内誘導周圍空氣 、 板面使周圍空氣與回流朝向天花 出。 二瑕* 6之混合空氣成為噴流30吹 出。此贺流30係從設於天龙缸姐址 人 又於天化板構件12之開口部分16往 供軋流路20流入。亦即，， 任 杯M M 成為賀流之混合空氣通過天葙 板構件之開口部分而衝撞於 、天化 地現合，更提井… 内之層S U ’藉此均句 此，使而成為有利於溫度控制之系統。如 ，：乳再度循環並加以利用，以提升能量效率。 夺由於自潔淨室22内使回流空氣一部分作為誘導 200914781 空氣旁流，與自FDC吹出之吹出風量混合，因此只要增大 旁流即亦可減少FDC之設置台數。 圖1至圖3所示例中，例如，潔淨室22之高度Η可 設定為約4300mm，FDC之本體部分18之高度F可設定為 1950mm，連結三個FDC成一組後之寬度 W可設定為 2450mm，以配管連接FDC組之配管間隔寬度P可設定為 2510mm，FDC上部之喷嘴24之外徑可設定為500mm，噴 嘴24高度可設定為700mm。 供氣流路20及潔淨室22，係自周知之外部空氣處理 調和機（未圖示）被供應經溫度調節的外部空氣。由於係藉 由FFU之風扇從供氣流路20内往潔淨室22供應空氣，因 此供氣流路内之氣壓必然較潔淨室内之氣壓低。本發明 中，由於係使FDC露出於潔淨室内而設置，因此可藉由風 扇之效果與喷流之吹出作用減少在回流路徑整體之壓力損 失，以防止供氣流路内成為負壓。如此，能預防外部空氣 侵入供氣流路，縮小溫度溼度之不均。 圖4係表示本發明之第2最佳實施態樣之潔淨室系統 40，係於潔淨室22之地面13下方設有充氣室42的例。 自FFU吹出之潔淨空氣，係通過潔淨室22並自地面13之 貫通孔流入充氣室42後，再度被送往潔淨室22。此時， 設置於地面13之具風扇之乾盤管（FDC)18係誘導充氣室42 内之回流空氣26，自喷嘴24朝向天花板面使混合空氣成 為喷流30吹出。此喷流30係從設於天花板構件之開口部 分16往供氣流路20流入。與圖1至圖3之第1實施態樣 12 200914781 =:於二為：流之混合空氣通過天花板構件之開口部分 入率而# /板内之㈣U，藉此均勾地混合，更提升混 有利於溫度控制之系統。如此，使潔淨空氣再 又衣並加以利用’以提升能量效率。 室系ϋπ及圖6係表示本發明之第3最佳實施態樣之潔淨 ' ’係分別與圖2及圖3對應的縱截面圖。圖2所 示之啥、、* , Λ ^ L-J ^ Γ/| 止往'二纟天花板高度特別高的情況下’最好係可防 沿天花：：内漏出。因此’圖5及圖6之實施態樣中，係 :二件12之開口部分16周圍設置往潔淨室22内 圍。垂設壁……二 部分漏出至周 之同度τ，例如可設定為5〇〇mm。垂設壁52 之材料可係樹脂製品或輕量金屬等。 "二及圖8係表示本發明之第4最佳實施態樣之潔淨 係分別與圖2及圖3對應的縱截面圖。圖5所 不之垂Μ 52,雖可防止噴流之—部分漏出至周圍，㈣ 氣吹出喷嘴24之上端至垂設壁U之下端係有相當距離。 因此’圖7及圖8之實施態樣，係使垂設壁進-步往下方 延伸，而構成為垂設壁62之下端延伸至較空氣吹出喷嘴24 下端更下:。藉此’可大致完全防止喷流之一部分漏出至 周圍L又壁62之高度l例如可設定為2〇〇〇mm，往吹出 喷嘴24上之覆蓋部分可設為35〇mm左右。 圖9係表示潔淨室系# 糸、，先50中於垂設壁52周圍產生空 氣渦流’而產生停滯空齑之、m 孔之滯流56, 58的狀態。此種滯流 5 6, 58有可能會造成塵埃之聚集。 13 200914781 圖1 〇係表示用以解決圖9之狀態之第5實施態樣的潔 淨室系統70 ’係於垂設壁52之途中複數處穿射貫通孔54， 而自此等貫通孔54誘導停滯空氣之例。貫通孔54可形成 為圓形或縱長之狹缝狀。 針對垂設壁之效果’在電腦上建構立體模組而進行了 模擬。在垂設壁之高度設為20〇〇mm、500mm、或沒有設 置的三個狀況下，計算了氣流流動產生之溫度分布變化的 結果，可知： (1)即使無垂設壁，可確認乾盤管之處理空氣可順利地 流入至天花板内。潔淨室内之溫度分布，在有垂設壁與無 垂設壁之情形下並無太大差異。 ⑺關於潔淨度方面，在基準並不嚴格的狀況下，將垂 設壁設為5〇〇職左右或無垂設壁，並不會產生實用上的問 題。 。 i 如以上所詳細說明，根據本發明，由於能將具風扇 乾盤管設置於潔淨室内的任意位置，0此無配置上的 制’能提升空間效率。並不需如習知般設置獨立之回流 徑，可謀求增加系統建構上之彈性、縮短施工期間、： 提升施工品質。由於噴流係流入天花板構件上 路？此能提高供氣流路之空氣混合率使供氣溫度穩 :::使天花板内成為較外部空氣高之正壓，預防外部 … '缩小溫度渔度之不均等，其技術效果極為顯著。 【圖式簡單說明】 14 200914781 圖1係顯示本發明第1實施例之潔淨室系統的俯視圖。 圖2係沿圖1之線A — A的縱截面圖。 圖3係沿圖1之線B — B的縱截面圖。 圖4係顯示本發明第2實施例之潔淨室系統的縱截面 圖。 圖5係顯示本發明第3實施例之潔淨室系統的縱截面 圖。 圖6係顯示本發明第3實施例之潔淨室系統的縱截面 圖。 圖7係顯示本發明第4實施例之潔淨室系統的縱截面 圖。 圖8係顯示本發明第4實施例之潔淨室系統的縱截面 圖。 圖9係顯示本發明第3實施例之空氣停滯的縱截面圖。 圖1 0係顯示本發明第5實施例之潔淨室系統的縱截面 圖。 【主要元件符號說明】200914781 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to an improvement of the space (4) of a clean room in a production line of a semiconductor or a pharmaceutical product, particularly a clean room which is very suitable for the door' efficiency. .代代王 [Previous Technology] Sightseeing 'In semiconductors that require microfabrication technology, etc.: In areas requiring high-quality pharmaceuticals, there is a need to control the concentration of air = f angstroms to a very low level. Provided a fan filter unit flow (constructed by the roof of the building or the 'beautiful upper deck, with a coffin underneath the ceiling) is provided with a fan filter unit flow (layer 峨 non-unidirectional air flow (turbulent flow Clean room. In the early stage of the current large-scale clean room, the wind is used...Unit Qing..."" is used in the dust except for the name but the densely produced ones: The dry coils for wet use the dry coils The mode of the oligo total % η 罝 罝 。 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 In the meantime, the shortcomings of the configuration of the production unit are controlled by the temperature control, the Tianjide/month clarity or the limit, and the configuration of the clean room is adjusted by the efficiency of the lifting space, the cleanliness and the temperature to the appropriate temperature. And an air conditioning system that can protect short-term construction. [Patent Document 1] Zhuang Ba Bent open 2002 - 333 180 "Clean room air conditioner 200914781 first" in order to divide the clean room into a plurality of areas to control the temperature Γ 系 系 天 天 天 天 天 天 天 天 天 天 天 天 天 天 天 天 天 天 天 天 系 系 系On the second and second mornings, the circulating air duct (shaft) is placed indoors. This configuration "has taken up a lot of space and has the disadvantage of reduced space efficiency. (4) [Special: Document 2] 曰本特开2002 - 147812" The room air conditioner sue ^' In order to divide the clean room into a plurality of control areas to control the temperature, the air supply path is arranged on the side, and the dry coil with the fan is arranged at the position corresponding to each control area. In the case of this type of arrangement, the air supply to the side is large, and there is a disadvantage that the space efficiency is lowered. [Patent Document 3] In the "Clean Room" of the Japanese Special Edition, 124,386, the circulating air volume is set for each area. Short-circuit air supply means (communication path, conduction η, air recirculation in the area is blown to the individual area chamber. Under such a configuration, there is a disadvantage that the air volume is increased to lower the cleanliness. [Patent Document 4] Japan Special Open 2001 - 56U0 In the clean room, in order to reduce the air circulation power energy in the unidirectional airflow clean area and the non-unidirectional air flow clean room, a vertical hanging wall is provided to prevent the turbulence of the air flow. Under the configuration of such a partition wall, the advantages of the ancient and the main are low. The gas is not uniform, and the space efficiency is also lowered. [Invention] As mentioned above, the conventional gentry and the style are due to the dry coil storage. In the guide camp (axis), therefore, if you want to drink ~ B; between, "" eve, 'two rooms' must ensure a large space in the clean room θ, and the configuration also creates space constraints, there are The shortcomings of cleanliness or temperature control cannot be properly implemented in 200914781. For the main purpose of the present invention, the catheter is sought and the space efficiency is improved. The other purpose of the invention is to prevent the air supply temperature from being changed to the inside of the air supply path of the materializing plate member, and to prevent the ceiling member from being on the air supply path. The air supply path is built to reduce the external temperature (4), prevent external air intrusion and reduce the uneven temperature and humidity. ::Resolve the subject, the first aspect of the present invention provides a clean bed. The bed is placed on the upper part of the Tianhua board to provide an air flow path and is equipped with _ "Filtering early 7C" to allow air to pass through the air supply path. The fan filter sheet:: blowing clean air to the clean room, wherein: the dry coil of the ground fan in the clean room is used to induce return air; the air blowing nozzle disposed on the upper part of the fan is sprayed toward the ceiling surface. The return air in the dream is blown out; the jet is self-installed in the opening of the ceiling member. The knife is recirculated in the air supply path; the clean air is reused. Further, the second aspect of the present invention provides a cleansing The air conditioner of the room is provided with an air flow path on the ceiling member and a fan is disposed too early, and the clean air that passes through the fan filter unit from the air supply passage is blown toward the clean room, and is characterized in that it is cleaned. a dry coil of the fan is arranged on the floor of the room to induce return air; the air blowing nozzle provided from the upper part of the dry coil of the fan is sprayed to the ceiling surface to spray back the clean room The gas is made to be recirculated from the opening portion of the ceiling member to the air flow path for the 200914781; and the clean air is recycled again. In the clean and clean room system of the present invention, Xiao is properly cleaned. The overall cleanliness of the room and the temperature-controlled circulating air supply are performed by a fan over-tank unit (FFU) installed on the ceiling of the system, so that the fan-dried dry coil (FDC) for air-conditioning load processing disposed on the ground is exposed. It is set to be cleaned to the inside, and the jet is blown out from the upper blowing nozzle at an appropriate wind speed (8 to i5 m8). The jet from the clean room - part of the return air (air used) is formed by being placed above The opening part of the ceiling of the system is blown into the return path of the ceiling 2. The wind speed depends on the height of the ceiling or the local power of the blown part. It is a system that does not require a conventional return conduit (shaft). 'The air volume of the fan-dried dry coil (FDc) is cleaned to about 7G to 9G% of the % wind, and a part of the return air is induced (attracted) from the clean room. The opening of the ceiling member and the slab in the slab of the slab is used to uniformly mix and increase the mixing rate to become a system that is advantageous for temperature control. Also #, since the clean room is part of the induced air The flow is mixed with the blown air volume blown out from the FDC, so the number of FDc can be reduced by increasing the bypass flow. This system uses the differential pressure generated in the ceiling and the clean room, even if the flow conduit is not laid (four) The shaft or the "wall" can also control the temperature without damaging its function. Thereby, the FDC can be placed in any place in the clean room, and physical restrictions can be released. When the ceiling member is a ceiling of a system, a rectangular plate called a rectangular formwork is often formed adjacent to each other. Although the template size can be arbitrarily matched, it is also determined according to the limit of the fan filter single (FFU) with the degree of cleanliness to ensure cleanliness, or the ceiling strength, etc., in order to import the system's actual template. The size is 750xl500mm, or i〇〇〇xi5〇〇mm, and the like. The general ceilings outside the system ceiling can also correspond to the same method. By laying the FDC in conjunction with the width of the ceiling formwork, a plurality of formwork units of the system ceiling can be combined to form a return path, which improves space efficiency and flexibility in the configuration of the manufacturing apparatus. The amount of induced air (bypass amount) from the clean room can be arbitrarily set according to the accuracy of the indoor temperature and the set capacity (number of units) of the FDC. The fan-drying coil (FDC) can be set by modularizing (aggregating) the necessary air volume by connecting the same model as necessary. The piping project can also be modularized by matching the size of the fan's dry coil (FDC) to save engineering costs. The air conditioning system of the present invention can be constructed even when there is a plenum in the ground, and can be applied in either unidirectional flow (laminar flow) or non-unidirectional flow (turbulent flow). In the present invention, since the air is blown from the air supply path on the ceiling member to the clean room by the fan of the FFU, the air pressure in the air supply path must be lower than the air pressure in the clean room. As long as the well-known external air treatment blender is used to generate + 3 to + 1 〇 Pa in the ceiling of the system and a differential pressure of + 10 to + 3 〇 pa in the clean room, the amount of air blown from the FDC will not go to the clean room. Spread and quickly lead to the ceiling. At this point, it is also possible to prevent the inside of the air supply passage on the ceiling member from becoming a lower negative pressure than the outside of the building, and to prevent the intrusion of the outside air to reduce the unevenness of the temperature and humidity. A preferred embodiment of the present invention is provided with an opening portion of the ceiling member 200914781 = a hanging wall that hangs down in the clean room. Thus, it is possible to prevent the jet from leaking to the opening b. The lower end extends downward more than the upper end of the air-spraying kidney, so that the jet can be prevented from leaking out to the outside of the opening portion more reliably. Further, in a preferred aspect of the present invention, a through hole is provided in the middle of the hanging wall, and the through hole induces stagnant air around the hanging wall. According to the present invention, the following effects can be obtained: (υ Since the duct (shaft) of the dry coil having the fan is not required to be stored, the dry coil of the fan can be placed at any position in the clean room, so there is no limitation of the configuration 1 Improve space efficiency. (7) It is not necessary to set a separate return path, which can increase the flexibility of system construction, shorten the construction period, and improve the construction quality. (3) Because the jet flow system flows into the ceiling structure, it is proud of the feeding and rolling flow path. Therefore, the air mixing rate of the air supply path can be stabilized to stabilize the air supply temperature. (4) The air pressure loss of the dry coil body with the fan is received by the built-in fan, thereby reducing the air pressure loss of the fan over-tank unit. The inside of the ceiling also becomes a positive pressure. This prevents the inside of the air supply passage on the slab member from becoming a negative pressure, thereby preventing the smear of the external slabs. This reduces the temperature and humidity. The invention is carried out by arranging the opening portion or the FDC by the board unit, so that the space efficiency can be improved. The present invention will be described in detail with reference to the embodiments of the accompanying drawings. 200914781 [Embodiment] FIG. 3 is a view showing a clean room system 10 of the preferred embodiment of the present invention, FIG. 1 is a plan view, FIG. 2 is a longitudinal sectional view taken along line A of the figure, and FIG. 3 is a line along the line of the figure. Longitudinal section view of B-B. As shown in Fig. 1, the ceiling member 12 of the clean room system is a system ceiling with a template of 750 mm x 15 mm in size arranged adjacent to seven columns and eleven columns. The ceiling member 12 is provided with six fan filter units (FFUs) 14 which are not provided with the template 15. The central portion is formed with the opening portion 16 according to the present invention, and the opening portion 16 is also not provided with the template 15' The end edge is formed by reinforcing the frame material. Below the opening portion 16 of Fig. 1, as shown in Fig. 2, two sets of six joints are arranged on the floor 13 of the clean room 22 in a state of a set of three joints. A fan-equipped dry coil (FDC) 18. In Fig. 2, an air supply path 20 is provided between the upper layer n and the sky 1 member 12, so that the clean air passing through the FFU is supplied toward the clean room 22. , in the upper part of the FDC18 body, a blowing nozzle is installed to induce ambient air and board surface in the clean room. The surrounding air and the recirculation are directed toward the smallpox. The mixed air of the second 瑕*6 is blown out by the jet 30. This hoist 30 is from the opening portion 16 of the Tianlong slab member 12 to the feeding and rolling flow path. 20 inflow. That is, the cup MM becomes the mixed air of the confession, and it collides with the opening part of the scorpion plate member, and it is combined with the naturalization, and the inner layer SU' It becomes a system that is conducive to temperature control. For example, the milk is recirculated and used to improve energy efficiency. The part of the return air from the clean room 22 is used to induce the airflow of the 200914781 air, which is mixed with the blown air volume blown from the FDC. Therefore, as long as the sidestream is increased, the number of FDCs can be reduced. In the example shown in FIG. 1 to FIG. 3, for example, the height Η of the clean room 22 can be set to about 4300 mm, the height F of the body portion 18 of the FDC can be set to 1950 mm, and the width W of the three FDCs can be set to 2450 mm. The piping interval width P of the FDC group connected to the pipe can be set to 2510 mm, the outer diameter of the nozzle 24 at the upper portion of the FDC can be set to 500 mm, and the height of the nozzle 24 can be set to 700 mm. The air supply path 20 and the clean room 22 are supplied with temperature-regulated outside air from a well-known external air treatment mixer (not shown). Since the fan is supplied from the supply air passage 20 to the clean room 22 by the fan of the FFU, the air pressure in the air supply passage is inevitably lower than that in the clean room. In the present invention, since the FDC is exposed in the clean room, the pressure loss of the entire return path can be reduced by the effect of the fan and the blow-off action of the jet flow, thereby preventing the inside of the supply flow path from becoming a negative pressure. In this way, it is possible to prevent outside air from intruding into the air supply path and to reduce uneven temperature and humidity. Fig. 4 is a view showing a clean room system 40 according to a second preferred embodiment of the present invention, in which an plenum 42 is provided below the floor 13 of the clean room 22. The clean air blown from the FFU passes through the clean room 22 and flows into the plenum 42 from the through hole of the floor 13, and is sent to the clean room 22 again. At this time, the fan-dried dry coil (FDC) 18 provided on the floor 13 induces the return air 26 in the plenum 42 to blow the mixed air into the jet 30 from the nozzle 24 toward the ceiling surface. This jet flow 30 flows from the opening portion 16 provided in the ceiling member to the supply air passage 20. The first embodiment of FIG. 1 to FIG. 3 12 200914781 =: The second is: the mixed air of the flow passes through the opening portion of the ceiling member and the #4 / (4) U in the board, thereby uniformly mixing and lifting the mixture. A system that facilitates temperature control. In this way, clean air is reused and utilized to increase energy efficiency. The room system ϋπ and Fig. 6 are longitudinal cross-sectional views corresponding to Figs. 2 and 3, respectively, showing a clean '' of the third preferred embodiment of the present invention. The 啥,,*, Λ ^ L-J ^ Γ/| shown in Fig. 2 is best to prevent the ceiling from being high in the height of the ceiling. Therefore, in the embodiment of Figs. 5 and 6, the opening portion 16 of the two pieces 12 is disposed around the clean room 22. The wall is ... the two parts leak out to the same degree τ of the week, for example, it can be set to 5 〇〇 mm. The material of the hanging wall 52 may be a resin product or a lightweight metal or the like. "2 and Fig. 8 are longitudinal cross-sectional views corresponding to Figs. 2 and 3, respectively, showing the cleaning system of the fourth preferred embodiment of the present invention. The drooping 52 of Fig. 5 prevents the jet from leaking to the surroundings, and (4) the upper end of the air blowing nozzle 24 is at a considerable distance from the lower end of the vertical wall U. Therefore, in the embodiment of Figs. 7 and 8, the vertical wall is further extended downward, and the lower end of the vertical wall 62 is extended to be lower than the lower end of the air blowing nozzle 24. By this, it is possible to substantially prevent a part of the jet from leaking to the periphery L and the height l of the wall 62 can be set to, for example, 2 〇〇〇 mm, and the covering portion to the blowing nozzle 24 can be set to about 35 〇 mm. Fig. 9 is a view showing a state in which the clean room system # 糸, the air vortex ' is generated around the vertical wall 52 in the first 50, and the m-hole stagnation flow 56, 58 is generated. This stagnation of 5, 58 may cause dust to accumulate. 13 200914781 Fig. 1 shows that the clean room system 70' of the fifth embodiment for solving the state of Fig. 9 is formed in the plurality of through-holes 54 in the middle of the vertical wall 52, and is induced from the through holes 54. An example of stagnating air. The through hole 54 may be formed in a circular or longitudinal slit shape. The effect of the vertical wall effect was simulated by constructing a stereo module on a computer. In the three conditions in which the height of the vertical wall is set to 20 〇〇 mm, 500 mm, or not set, the result of the temperature distribution change caused by the flow of the air flow is calculated, and it is known that: (1) the dry wall can be confirmed even if the wall is not provided. The processing air of the coil can smoothly flow into the ceiling. The temperature distribution in the clean room is not much different in the case of a wall and a wall. (7) Regarding the cleanliness, in the case where the standard is not strict, the vertical wall is set to be about 5 or less, and there is no practical problem. . i As explained in detail above, according to the present invention, since the fan dry coil can be placed at any position in the clean room, the system of no configuration can improve the space efficiency. It is not necessary to set an independent return path as is conventional, and it is possible to increase the flexibility of the system construction, shorten the construction period, and improve the construction quality. Since the jet stream flows into the ceiling member? This can improve the air mixing rate of the air supply path to stabilize the air supply temperature. ::: Make the ceiling become a positive pressure higher than the outside air, and prevent the external ... 'reduce the unevenness of the temperature and the technical effect is extremely remarkable. BRIEF DESCRIPTION OF THE DRAWINGS 14 200914781 FIG. 1 is a plan view showing a clean room system according to a first embodiment of the present invention. Figure 2 is a longitudinal sectional view taken along line A - A of Figure 1. Figure 3 is a longitudinal sectional view taken along line B - B of Figure 1. Fig. 4 is a longitudinal sectional view showing a clean room system according to a second embodiment of the present invention. Fig. 5 is a longitudinal sectional view showing a clean room system according to a third embodiment of the present invention. Fig. 6 is a longitudinal sectional view showing a clean room system according to a third embodiment of the present invention. Fig. 7 is a longitudinal sectional view showing a clean room system of a fourth embodiment of the present invention. Fig. 8 is a longitudinal sectional view showing a clean room system of a fourth embodiment of the present invention. Fig. 9 is a longitudinal sectional view showing the air stagnation of the third embodiment of the present invention. Fig. 10 is a longitudinal sectional view showing a clean room system of a fifth embodiment of the present invention. [Main component symbol description]
10, 40, 50, 60, 70 潔淨室系統 12 天花板構件 13 地面 14 FFU 16 開口部分 18 FDC 15 200914781 20 供氣流路 22 潔淨室 24 吹出喷嘴 26 回流空氣 30 喷流 52, 62 垂設壁 54 貫通孔 1610, 40, 50, 60, 70 Clean room system 12 Ceiling member 13 Floor 14 FFU 16 Opening part 18 FDC 15 200914781 20 Air supply path 22 Clean room 24 Blowing out nozzle 26 Return air 30 Spray 52, 62 Vertical wall 54 Hole 16