200907314 九、發明說明： 【發明所屬之技術領域】 本發明係有關冷陰極電離真空計，特別是有關可更換 陽極的冷陰極電離真空計。 【先前技術】 通常，在有關高真空狀態之氣體壓力計測用真空計方 面，經常是使用冷陰極電離真空計（CCG)，此冷陰極電離 : 真空計係有彭寧真空計、磁電真空計（magnetron vacuum gage)、倒置型磁電真空計（inverse type magnetron vacuum gage)等各種式樣者。 有關此冷陰極電離真空計的構成，茲以彭寧真空計 (Penning vacuum gage)為例並依據第五圖作說明。 如圖所示，此冷陰極電離真空計21係被安裝於腔室 30的彭寧真空計，且此真空計21係具有箱體(enclosure)22 内的陰極23及被筒狀的陰極23所包圍的棒狀陽極24、箱 1' 體22外側的磁氣手段(磁石25a及25b)、和對前述陽極24 施加電壓用的電源（直流電源)26、以及測定在陽極24流通 的電流之電流計2 7。 此外，前述腔室30、箱體22及陰極23係被接地 (ground) ° 茲針對此冷陰極電離真空計21的動作及原理作簡單 說明。 首先，依自然輻射等而在陰極23與陽極24之空間生 6 200907314 成初期電子（initial electron)，該電子係進行像是捲繞磁石 25a、25b之磁場磁力線的螺旋運動，最後被陽極24所捕 獲並收集。此時，該電子與氣體碰撞並生成電離離子。接 著，將此電離離子收集於陽極24，利用電流計27測定其 電流值，再從該電流值測定壓力。 但是，在此冷陰極電離真空計中，有時就算是對陰極 與陽極之間施加高電壓也不產生放電現象，又，就算有產 生放電，還是會有施予冷陰極電離真空計高電壓的時刻與 放電後電流開始流通的時刻之間發生時間延遲的情況。而 該延遲係依氣體的壓力而改變，以標準的真空計而言，在 l(T3Pa的壓力下是數秒，而在l(T8Pa的壓力下是數個小時。 如此一來，在低壓力下之放電開始時的延遲係難以許容的 長度、且妨礙進行有效測定。 又，以往的冷陰極電離真空計，因為被連接在電源上 的連接器與陽極是一體形成的，所以在陽極因放電而消耗 時，每個連接器皆須更換，具有所謂更換費用極高的課題。 此課題藉由使陽極對連接器螺接並安裝成裝卸自如就可解 決。 然而，在棒狀陽極的一端上形成有與連接器螺接的螺 紋部時，必需使前述螺紋部侧與連接器螺接，而造成陽極 難以安裝。 本發明者們針對上述課題銳意檢討的結果，了解到在 陽極的表面形成有凹凸時，比起陽極的表面是平滑時還容 易產生放電，且施予冷陰極電離真空計高電壓的時刻與放 7 200907314 電後電流開始流通的時刻之間的時間延 二由以螺紋部的螺谷形成前述凹凸就可解:: 文農方向性的問題，遂完成本發明。 1%極之 【發明内容】 之目的為提供一種冷陰極電離真空計，其乃如 5刖处，谷易產生放電，且施予冷降命 /、 的時刻與放電後電泣、_ π包一二計高電壓 更n二 的時刻之間的時間延遲小， 更極4方向性的問題，可容易更換陽極。 直空;:ί:上述二騎作成之有關本發明的冷陰極電離 、nt係具備.一同狀的陰極；—榛肤^ 筒狀的陰極之内部空間;及：配f在前述 陰極間的電場大致正交的磁場，在述陽極和 凹凸W配晋^ 前端部形成有凹凸部，前述200907314 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to cold cathode ionization vacuum gauges, and more particularly to cold cathode ionization vacuum gauges for replaceable anodes. [Prior Art] Generally, in the vacuum gauge for gas gauges in high vacuum state, a cold cathode ionization vacuum gauge (CCG) is often used. This cold cathode ionization: vacuum gauge has a Penning vacuum gauge and a magnetoelectric vacuum gauge ( Magnetron vacuum gage), inverted type magnetron vacuum gage and other types of models. The composition of this cold cathode ionization vacuum gauge is taken as an example of a Penning vacuum gage and is illustrated in accordance with the fifth figure. As shown, the cold cathode ionization gauge 21 is mounted on a Penning vacuum gauge in a chamber 30, and the vacuum gauge 21 has a cathode 23 in an enclosure 22 and a cathode 23 in a cylindrical shape. The surrounding rod-shaped anode 24, the magnetic gas means (the magnets 25a and 25b) outside the tank 1' body 22, the power source (DC power source) 26 for applying a voltage to the anode 24, and the current for measuring the current flowing through the anode 24 Count 2 7. Further, the chamber 30, the casing 22, and the cathode 23 are grounded. The operation and principle of the cold cathode ionization gauge 21 will be briefly described. First, according to natural radiation or the like, in the space between the cathode 23 and the anode 24, 6200907314 is an initial electron, which performs a spiral motion of the magnetic field lines of the magnetic field of the wound magnets 25a, 25b, and finally is carried by the anode 24 Capture and collect. At this time, the electron collides with the gas and generates ionized ions. Next, the ionized ions are collected on the anode 24, and the current value is measured by an ammeter 27, and the pressure is measured from the current value. However, in this cold cathode ionization vacuum gauge, sometimes even if a high voltage is applied between the cathode and the anode, no discharge phenomenon occurs, and even if a discharge is generated, there is a time when the high voltage of the cold cathode ionization gauge is applied. A time delay occurs between the time when the current begins to flow after discharge. The delay varies depending on the pressure of the gas. In the case of a standard vacuum gauge, it is a few seconds under the pressure of T3Pa, and several hours under the pressure of T8Pa. Thus, under low pressure The delay at the start of discharge is difficult to allow for the length of the capacitor, and the conventional cold cathode ionization vacuum gauge is formed by integrally connecting the connector connected to the power source to the anode. When it is consumed, each connector must be replaced, which has the problem of extremely high replacement cost. This problem can be solved by screwing and mounting the anode to the connector. However, it is formed on one end of the rod anode. When there is a threaded portion that is screwed to the connector, it is necessary to screw the side of the screw portion to the connector, and it is difficult to mount the anode. The inventors of the present invention have found that the surface of the anode has irregularities on the surface of the anode. When the surface of the anode is smooth, it is easy to generate a discharge, and the high voltage of the cold cathode ionization gauge is applied, and the current starts to flow after the discharge of the power of 200907314. The time delay between the moments is solved by forming the aforementioned concavities and convexities by the spiral valleys of the threaded portions: The problem of the directionality of the cultivator is completed by the invention. 1% of the contents of the invention is to provide a cold cathode ionization. A vacuum gauge, which is like 5 ,, the valley is prone to discharge, and the time delay between the time when the cold drop is given, and the time after the electric shock, _ π 包 1-2, and the high voltage are n, More extreme 4-directionality problem, the anode can be easily replaced. Straight space;: ί: The cold cathode ionization and nt system of the present invention are the same as the cathode of the present invention; And an internal space; and a magnetic field in which an electric field between the cathodes is substantially orthogonal to each other, and an uneven portion is formed at a tip end portion of the anode and the uneven portion
凹凸4仏配置在陰極的筒内之空間。 I i. 以L t ’因為在陽極的前端部分形成有凹凸部，所 與:電==二施予冷陰極電離真空計高電塵的時刻 率地進行測定。一通的時刻之間的時間延遲小，可有效 在此，前逑凹凸都命 成螺紋部，可依螺紋 而t文=為宜。如此，藉由形 電離真空計：$上S的所作成之有關本發明的冷陰極 腔室連通的空間；二棒：狀的陰極，設置在與測定壓力用 +狀的陽極，配置在前述筒狀的陰極之 8 200907314 内部空間；及一磁性手段，形成與前述陽極和陰極間的電場 大致正交的磁場，在前述陽極和陰極間引起放電；其特徵 為，前述陽極的兩端形成有螺紋部，前述陽極之一端的螺 紋部係與連接器電氣連接，同時另一端的螺紋部係配置在 陰極的筒内之空間。 如此一來，因為在前述陽極的兩端形成有螺紋部，所 以藉由將形成在任一端的螺紋部螺接於連接器，可將陽極 安裝於連接器，能解除陽極安裝方向之限制。 而且，陽極之另一端部的螺紋部因為被配置在陰極之 筒内的空間，所以容易產生放電，且施予冷陰極電離真空 計高電壓的時刻與放電後電流開始流通的時刻之間的時間 延遲小。 在此，係以被形成在前述陽極之兩端的螺紋部之長度 是相同尺寸，且在前述兩端之螺紋部上形成有相同螺距之 螺紋者較佳。 此外，在形成於前述陽極兩端的螺紋部之長度是不同 的場合，係以任一個螺紋部都形成為至少超過與連接器螺 接的螺紋部之長度者為宜。 又，較佳為，前述陽極的全長是28mm以上30mm以 下，且其前端部形成有3mm以上10mm以下的螺紋部。 依據本發明之冷陰極電離真空計，係可獲得所謂容易 產生放電，且施予冷陰極電離真空计南電壓的時刻與放電 後電流開始流通的時刻之間的時間延遲小的效果。 又，依據本發明之冷陰極電離真空計，係可獲得所謂 9 200907314 陽極安裝無方向性， 可各易更換陽極之效果 【實施方式】 1針f本發明之實施形態，茲依據第-圖至第-Η爽# 況明。在此，第一 R_ 乐一圖來作 4 h 圖係頒示本發明所涉及的冷陰極 空计之概略構成圖，第— 離真 離真空計之陽極的側弟一圖的冷陰極電 或與該構件相當的構件丫夕’與弟五圖所示構件相同 說明。 勺構件，係賦予相同的符號並省略其詳細 —所，步及的冷陰極電離真空計丨 =前述陽極之前端部形成有屬凹凸 ：= 在陽極5的兩娜成有螺紋部心 所示安裝在*-圖 ^ _ Τ'又〇丨（未圖不）。而且，陽極5係對連 =電氣連接。-方面，陽極5的另—端之螺紋部％係 =引入端子(feedthrough;電流導入端子）13而配置在陰 極23之筒内的空間。 此陽極5及陰極23係S?罟Α γ <Β* ο Λ 1 π J你配置在相體22内，此箱體22内 ^ 緣7及安裝於前述凸緣7之作為補助壓力感測器 在二皿尼真空計（Pl脑gage)8。此外，第—圖中，符號7a 你固定前述凸緣7用的螺絲。 又别述連接為6係透過電路基板3C、3b、3a而與連 妾器9b屯氣連接。再者’此連接器外雖未圖式，但係與 10 200907314 以在同樣是被連接 上，爯去义+ ;用以對前述陽極5施加電壓的電源26 工丹有’刚述雷、、、 的電流之電流計U 6係被連接於以測定在陽極5流通 上。 此外，此箱辦1 被接地。此外，^係經由陰極板4而連接在基板3c並 件10所保持 寺電路基板3a、3b、3M系由基板保持構 破收納在外殼2内。 又，此外殼2沾j 還 而 符 設置有開關9a〃、、背面，除了前述的連接器9b以外 且，圖中的符號u，顯不電源⑽—0FF用的LED9c 號12係連接電路^接電路基板3a、3b之連接器 再者，#m 土板^、3c之連接器。 丹者針對前述陪 如圖所示，陽柘 茲依據第二圖來詳述。 度A、B係形成為相端形成有螺紋部5a、％，其長 5b的螺紋係形成相 、。又，被形成在此螺紋部5a、 如此 的螺距。 %、5b的長“在3成在前述陽極5的兩端之螺紋部 將陽極5安裝於連接哭6目，尺了、且其螺距是相同時，在 若將螺紋部5a、51W·/ +時’陽極5之安裝並無方向性， 地安裝。 者螺接於連接器6即可，故可容易 又开/成在前述陽極5 形成在連接器6上 累、.文邛5a、5b形成為比 5確實地安裳於連接=部（未圖示）長度還要長，以將陽極 度A、B是二 =5兩端的螺紋部5a、5b之長 任_紋部5a、5_需要具有至少 200907314 可與連接器6螺接用的足夠長度。 具體而言，當被形成在連接器上的螺紋部是3mm時， 前述陽極5全長L係以28mm以上30mm以下，且其前端 部形成有3mm以上10mm以下的螺紋部5a、5b者為宜。 又，在螺紋部5a、5b的螺距方面係以1.6mm左右為宜。 此外，在上述實施形態，因為派藍尼真空計8是補助 壓力感測器，所以並不一定要設置。 (第一實施形態） 接著，在第一圖所示的冷陰極電離真空計中使用各種 1¼極來進行放電貫驗。 首先，使用以鉬作為材質而作成直徑1.6mm的陽極。 作為陽極，係準備複數根全長L是27mm、28mm、 29mm、30mm、及3 1 mm的陽極，在與陽極的連接器連接 之端部上，形成有與連接器連接用的螺距1.6mm、長度3mm 的螺紋部。又，在陽極的另一端部上未形成有螺紋部的場 合，係形成螺距1.6mm之長度3mm、5mm、10mm的螺紋 部。此外，前述螺紋部係由ISO公制螺紋所形成。 將如此形成的陽極裝設在冷陰極電離真空計中進行放 電實驗。此放電實驗為，腔室内的壓力設為5.〇xlO-6Pa， 對陽極施加3KV的電壓，測定從各個電壓施加時一直到放 電開始時為止的時間。在此，從電壓施加起算經過5分鐘 之後仍不開始放電的場合，當成不產生放電。而且，對各 陽極施行該放電貫驗5次。 此外，此冷陰極電離真空計之陰極的材質為SUS304， 12 200907314 係使用其内徑為28mm者來進行實驗。 以下的表1係顯示放電實驗的結果 【表1The concavities and convexities are arranged in the space inside the cylinder of the cathode. I i. Since L t ' is formed with a concavo-convex portion at the tip end portion of the anode, it is measured at a timing at which electric charge ==2 is applied to the high-temperature dust of the cold cathode ionization gauge. The time delay between the moments of one pass is small, and it is effective here that the front and the back bumps are all made into the threaded portion, and the thread can be used according to the thread. Thus, by the shape ionization vacuum gauge: the space formed by the upper S is related to the space of the cold cathode chamber of the present invention; the cathode of the two rods is disposed at the anode with the pressure of the measurement, and is disposed in the cylinder Shaped cathode 8 200907314 internal space; and a magnetic means forming a magnetic field substantially orthogonal to the electric field between the anode and the cathode, causing a discharge between the anode and the cathode; characterized in that both ends of the anode are formed with threads The threaded portion of one end of the anode is electrically connected to the connector, and the threaded portion at the other end is disposed in a space inside the barrel of the cathode. In this manner, since the screw portion is formed at both ends of the anode, the anode can be attached to the connector by screwing the screw portion formed at either end to the connector, and the restriction of the anode mounting direction can be released. Further, since the screw portion of the other end portion of the anode is disposed in the space inside the cylinder of the cathode, discharge is likely to occur, and the time delay between the timing at which the high voltage of the cold cathode ionization gauge is applied and the time at which the current starts to flow after discharge is delayed. small. Here, the length of the threaded portion formed at both ends of the anode is the same size, and it is preferable that the thread having the same pitch is formed on the threaded portions of the both ends. Further, in the case where the lengths of the screw portions formed at both ends of the anode are different, it is preferable that either of the screw portions is formed to at least exceed the length of the screw portion screwed to the connector. Further, it is preferable that the entire length of the anode is 28 mm or more and 30 mm or less, and a screw portion having a length of 3 mm or more and 10 mm or less is formed at the tip end portion. According to the cold cathode ionization vacuum gauge of the present invention, it is possible to obtain a so-called discharge which is easy to generate, and the time delay between the timing at which the cold cathode ionization gauge south voltage is applied and the timing at which the discharge current starts to flow are small. Moreover, according to the cold cathode ionization vacuum gauge of the present invention, the so-called 9 200907314 anode mounting non-directionality can be obtained, and the effect of each anode can be easily changed. [Embodiment] One embodiment of the present invention is based on the first embodiment. The first - Η 爽 # 况明. Here, the first R_ 乐图 is used as a 4h diagram to present a schematic configuration diagram of the cold cathode empty gauge according to the present invention, and the cold cathode electrical energy of the anode of the vacuum meter is The member equivalent to this member is the same as the member shown in the fifth figure. The scoop member is given the same reference numeral and the detailed description thereof is omitted. The step of the cold cathode ionization vacuum gauge is as follows: the front end of the anode is formed with a concavity and convexity: = the mounting of the anode of the anode 5 is shown by the threaded portion. In *-图^ _ Τ' and 〇丨 (not shown). Moreover, the anode 5 is connected to the electrical connection. On the other hand, the thread portion % of the other end of the anode 5 is a space in which the terminal (feedthrough) 13 is introduced and placed in the cylinder of the cathode 23. The anode 5 and the cathode 23 are S?罟Α γ <Β* ο Λ 1 π J. You are disposed in the phase body 22, and the inner edge 7 of the casing 22 and the flange 7 are attached to the flange 7 as auxiliary pressure sensing. The device is in a two-piece vacuum gauge (Pl brain gage) 8. In addition, in the first figure, the symbol 7a fixes the screw for the aforementioned flange 7. Further, the connection is made 6 to the circuit boards 3C, 3b, and 3a, and is connected to the connector 9b. In addition, although the connector is not illustrated, it is connected to 10 200907314, and is connected to the power supply 26 for applying voltage to the anode 5. The current galvanometer U 6 is connected to measure the flow on the anode 5 . In addition, this box office 1 is grounded. Further, the gate circuit board 3 is connected to the substrate 3c via the cathode plate 4, and the temple circuit boards 3a, 3b, and 3M are held by the substrate and are housed and housed in the casing 2. Further, the outer casing 2 is provided with a switch 9a and a rear surface, and the symbol u in the figure, the symbol u in the figure, and the LED 9c No. 12-series connection circuit for the power supply (10) - 0FF are connected. The connector of the circuit board 3a, 3b, and the connector of the #m earth plate ^, 3c. The Dan is shown in the figure above, and Yangshuo is detailed in the second figure. The degrees A and B are formed such that the thread ends 5a and % are formed at the end, and the threads of the length 5b form a phase. Further, the thread portion 5a is formed in such a pitch. The length of % and 5b "when the anode 5 is attached to the screw portion of the both ends of the anode 5 at 30%, and the pitch is the same, the thread portion 5a, 51W·/ + When the anode 5 is installed without directionality, it is installed in the ground. It can be screwed to the connector 6, so that it can be easily opened/closed at the anode 5 formed on the connector 6, and the files 5a, 5b are formed. It is necessary to lengthen the length of the joint portion (not shown) to be longer than 5, so that the anode degrees A and B are the lengths of the thread portions 5a and 5b at the ends of the two=5, and the length of the thread portions 5a and 5b is required. It has a sufficient length to be screwed to the connector 6 at least 200907314. Specifically, when the threaded portion formed on the connector is 3 mm, the entire length L of the anode 5 is 28 mm or more and 30 mm or less, and the front end portion thereof is formed. It is preferable that the thread portions 5a and 5b of 3 mm or more and 10 mm or less are used. Further, the pitch of the screw portions 5a and 5b is preferably about 1.6 mm. Further, in the above embodiment, the Delany vacuum gauge 8 is a subsidy. The pressure sensor is not necessarily provided. (First embodiment) Next, the cold cathode electric power shown in the first figure In the vacuum gauge, various 11⁄4 poles were used for the discharge test. First, an anode having a diameter of 1.6 mm was prepared using molybdenum as a material. As the anode, the full length L was prepared to be 27 mm, 28 mm, 29 mm, 30 mm, and 3 1 mm. The anode is formed with a thread portion having a pitch of 1.6 mm and a length of 3 mm for connection to the connector at the end connected to the connector of the anode. Further, when the other end portion of the anode is not formed with a thread portion, A thread portion having a pitch of 1.6 mm and a length of 3 mm, 5 mm, and 10 mm is formed. Further, the thread portion is formed by an ISO metric thread. The anode thus formed is mounted in a cold cathode ionization gauge to perform a discharge test. The pressure in the chamber was set to 5. 〇 xlO-6Pa, and a voltage of 3 kV was applied to the anode, and the time from the application of each voltage until the start of discharge was measured. Here, after 5 minutes from the application of the voltage, it is not When the discharge is started, no discharge is generated. Further, the discharge is performed five times for each anode. Further, the cathode of the cold cathode ionization gauge is made of SUS304, 12 20090731. 4 The system was tested using an inner diameter of 28 mm. Table 1 below shows the results of the discharge test [Table 1
前端螺 前端螺 —__ 前端螺 紋部長 紋部長 紋部長 度3mm 度5 m m 度 — 1 〇mm 全長 △ Δ Δ 2 7mm 未放電 未放電 未放電 2次 ---- 2次 1次 全長 ◎ 〇 * ◎ 2 8mm 全長 〇 〇 1 2 9 m m — — ~ ------ 全長 Ο 〇 ----- 〇 3 0mm 全長 〇 〇 〇1 3 1 m m ) — ——-丨 前 螺 端無 紋力U 工 X XFront end screw front end screw___ Front end thread length pattern length 3mm degree 5 mm degree - 1 〇mm Full length △ Δ Δ 2 7mm Undischarged, undischarged, undischarged 2 times---- 2 times 1 time full length ◎ 〇* ◎ 2 8mm Full length 〇〇1 2 9 mm — — ~ ------ Full length Ο 〇----- 〇3 0mm Full length 〇〇〇1 3 1 mm ) — ——- Front screw end without grain force U XX
XX
X 電的場人。又，土犯刀〇佼，5分鐘以内未產生放 琢口 又’ △係表示在5次的放雷 後，5八浐u *女 人幻万文^^驗中，電壓施加 H内產生放電的場合、及未產生放電的場合。 〇係表不在4分鐘以内產生放電的場合 鐘以内產4兹雷沾+日人 恭表不在2分 電的：電的一 ◎係表示在1分鐘以内產生放 由該表I可了解，可認定在陽極的前端部形成有螺紋 13 200907314 部的場合，相較於陽極前端部未形成有螺紋部的場合，係 較容易產生放電。又，在前述陽極的全長L是28mm以上 31 mm以下，且其前端部形成有3mm以上10mm以下的螺 紋部之場合，認定在4分鐘以内會產生放電。 (第二實施形態） 又，利用第一實施形態所使用的陽極來驗證壓力-輸出 電壓特性。 在陽極方面，乃與第一實施形態同樣地，係作成直徑 1.6mm且以鉬為材質的陽極。又，陽極的全長L設為 27mm、28mm、29mm、30mm、及 31mm，在與陽極的連 接器連接的端部，形成有與連接器連接用的螺距1.6mm、 長度3mm之螺紋部，並在陽極的另一端部，形成螺距1.6mm 且長度3mm的螺紋部。此外，前述螺紋部係由ISO公制螺 紋所形成。 把如此形成的陽極裝設在第三圖所示的冷陰極電離真 空計1以驗證壓力-輸出電壓特性。在此，腔室30内的基 準壓力係由未圖式的壓力計作測定，又、在電源方面係使 用3KV的直流電源，並以電流測定電路測定陰極23的電 流。該測定電流被輸入到對數放大器（log amplifier)，並將 對數放大器的電壓輸出（V)之結果與基準壓力（Pa)的結果予 以圖表化，調查其關係。並將其結果顯示在第四圖。 此外，第四圖中，係顯示符號A是全長31 mm的陽極， 符號B是全長30mm的陽極，符號C是全長29mm的陽極， 符號D是全長28mm的陽極，而符號E是全長27mm的陽 14 200907314 極之場合。 如第四圖所示般，在全長27mm的陽極時（符號E的場 合），在點b，可知相對於基準壓力之輸出電壓並不穩定， 具有分散的部分。又，在全長31 mm的陽極之場合（符號A 的場合），在點a，可知相對於基準壓力之輸出電壓並不穩 定，具有分散的部分。在使用此種陽極進行測定時，因為 無法獲得適當的壓力值，所以並不理想。 一方面，全長28mm至30mm的陽極係可獲得相對於 基準壓力之輸出電壓穩定，而可由輸出電壓獲得適當的壓 力值。 如同以上，從放電特性的觀點，前述陽極的全長係以 28mm以上31 mm以下者為較佳，另一方面，若是從壓力-輸出電壓特性的觀點而言，前述陽極的全長係以28mm以 上30mm以下者為較佳。 因此，經針對兩者作考慮之後，係以前述陽極的全長 是28mm以上30mm以下、且其前端部形成有3mm以上 10mm以下的螺紋部者較佳。 惟，以上所述，僅為本發明最佳之一的具體實施形態 之詳細說明與圖式’惟本發明之特徵並不侷限於此，並非 用以限制本發明，本發明之所有範圍應以下述之申請專利 範圍為準，凡合於本發明申請專利範圍之精神與其類似變 化之實施形態，皆應包含於本發明之範齊中，任何熟悉該 項技藝者在本發明之領域内，可輕易思及之變化或修飾皆 可涵蓋在以下本案之專利範圍。 15 200907314 【圖式簡單說明】 · 第一圖係顯示本發明所涉及的冷陰極電離真空計 略構成圖。 ,第—圖係被運用在第一圖的冷陰極電離真空計之陽極 的側視圖。 概略^圖係用以說明輸出電壓相對於基準壓力之剛定的X electric field people. In addition, the soil is smashed, and the sputum is not produced within 5 minutes. The △ system indicates that after 5 times of mine clearance, the 5 浐u * woman phantoms ^ ^ test, the voltage is applied to generate a discharge in H Occasionally, and where no discharge occurs. When the 〇 表 不在 不在 产生 产生 产生 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日 日When the thread 13 is in the front end portion of the anode, and the portion of the thread 13 200907314 is formed, the discharge is more likely to occur than when the threaded portion is not formed at the tip end portion of the anode. In addition, when the total length L of the anode is 28 mm or more and 31 mm or less, and the tip portion is formed with a thread portion of 3 mm or more and 10 mm or less, it is considered that discharge occurs within 4 minutes. (Second Embodiment) Further, the pressure-output voltage characteristics were verified by the anode used in the first embodiment. In the same manner as in the first embodiment, the anode was made of an anode having a diameter of 1.6 mm and made of molybdenum. Further, the total length L of the anode is set to 27 mm, 28 mm, 29 mm, 30 mm, and 31 mm, and a screw portion having a pitch of 1.6 mm and a length of 3 mm for connection to the connector is formed at an end portion connected to the connector of the anode. The other end of the anode was formed with a thread portion having a pitch of 1.6 mm and a length of 3 mm. Further, the aforementioned thread portion is formed by ISO metric threads. The thus formed anode was mounted on the cold cathode ionization vacuum gauge 1 shown in Fig. 3 to verify the pressure-output voltage characteristics. Here, the reference pressure in the chamber 30 is measured by a pressure gauge not shown, and a 3 KV DC power source is used for the power source, and the current of the cathode 23 is measured by a current measuring circuit. The measurement current is input to a log amplifier, and the result of the logarithmic amplifier voltage output (V) and the reference pressure (Pa) are plotted to investigate the relationship. And the results are shown in the fourth picture. Further, in the fourth figure, the symbol A is an anode having a total length of 31 mm, the symbol B is an anode having a total length of 30 mm, the symbol C is an anode having a total length of 29 mm, the symbol D is an anode having a total length of 28 mm, and the symbol E is a positive length of 27 mm. 14 200907314 Extreme occasion. As shown in the fourth figure, in the case of an anode having a total length of 27 mm (the sign of the symbol E), at the point b, it is understood that the output voltage with respect to the reference pressure is unstable and has a dispersed portion. Further, in the case of an anode having a total length of 31 mm (in the case of the symbol A), at the point a, it is understood that the output voltage with respect to the reference pressure is not stabilized and has a dispersed portion. When the measurement is carried out using such an anode, it is not preferable because an appropriate pressure value cannot be obtained. On the one hand, an anode system having a total length of 28 mm to 30 mm can obtain an output voltage stable with respect to a reference pressure, and an appropriate pressure value can be obtained from an output voltage. As described above, from the viewpoint of discharge characteristics, the total length of the anode is preferably 28 mm or more and 31 mm or less. On the other hand, from the viewpoint of pressure-output voltage characteristics, the total length of the anode is 28 mm or more and 30 mm. The following are preferred. Therefore, it is preferable that the entire length of the anode is 28 mm or more and 30 mm or less, and the tip end portion is formed with a thread portion of 3 mm or more and 10 mm or less. However, the above description of the preferred embodiments of the present invention is only one of the preferred embodiments of the present invention. The features of the present invention are not limited thereto, and are not intended to limit the present invention. The scope of the patent application is subject to the scope of the present invention, and any one skilled in the art can be included in the scope of the present invention. Any changes or modifications that are easily thought of can be covered in the scope of the patents in this case below. 15 200907314 [Brief Description of the Drawings] The first drawing shows a schematic configuration of a cold cathode ionization vacuum gauge according to the present invention. The first figure is a side view of the anode of the cold cathode ionization vacuum gauge used in the first figure. The schematic ^ diagram is used to illustrate the output voltage relative to the reference pressure.
特性圖 弟五圖係 圖。 顯示以往的冷陰極電離真空計 【主要元件符 1 銳說明】 2 令陰極電離真空計 3a 外殼 3b 電路基板 3c 電路基板 4 電路基板 5 陰極板 5a 陽極 5b 螺紋部 6 螺紋部 7 連接器 7a 凸緣 8 螺絲 派藍尼真空計 之概略構成 16 200907314 9a 開關 9b 連接器 9c LED 10 基板保持構件 11 連接器 12 連接器 22 箱體 23 陰極 25a 磁石 25b 磁石 26 電源 27 電流計 30 腔室Characteristic diagram The fifth figure of the brother. The conventional cold cathode ionization vacuum gauge is shown [main component 1 sharp description] 2 cathode ionization vacuum gauge 3a outer casing 3b circuit substrate 3c circuit substrate 4 circuit substrate 5 cathode plate 5a anode 5b screw portion 6 screw portion 7 connector 7a flange 8 Screw-Plani vacuum gauge schematic composition 16 200907314 9a switch 9b connector 9c LED 10 substrate holding member 11 connector 12 connector 22 box 23 cathode 25a magnet 25b magnet 26 power supply 27 galvanometer 30 chamber