200906606 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種將含有樹脂之被加工物衝壓之 衝壓設備及包含該衝壓設備之衝壓設備系統。 【先前技術】 例如，藉由將積層有膠片與銅箔之被加工物熱壓合 來製造多層基板時，僅藉由短時間之熱衝壓成形被加工 物而膠片無法完全硬化，且若長期下其被加工物之形狀 及特性會有變化之虞。因此，如日本專利特開 2006-190734號所示，較佳者是更加長時間將藉由熱衝 壓成形之多層基板加熱，將膠片所包含之熱硬化樹脂等 完全硬化來執行安定化之硬化處理。硬化處理係例如將 成形後之夕層基板放入烤箱内予以加熱，或於熱盤間夾 住夕層基板末進行衝壓(硬化衝壓（cure press))。 硬化衝壓係使多層基板接觸於經加熱之熱盤來加 熱，相較於在烤箱進行硬化處理之情況，具有以下優 點：（1)由於熱傳達至多層基板較快，因此能於短時間進 行硬^處理；（2)能防止硬化時多層基板之變形。 ^而，為充分進行熱硬化所需之硬化衝壓之製程時 間，係需要成形衝壓之製程時間的數倍以上之較長時 ± -成形衝壓後藉由同一衝壓設備連續進行硬化 ’會形成長時間佔用比較高價的成形衝壓用之衝 ΐ設？、2此成本會增大。此外’用成形衝壓與硬化衝 £，取適萄的溫度條件不同時，於 化費時間’因此將-台衝壓設備以兩衝壓製 王 疋困難的。又，硬化衝壓不需要較高的衝壓壓 200906606 力，因此能使用比較小型且廉價的衝壓設備。因此，由 於準儀與成形衝壓用衝壓設備不同的其他之硬化衝壓 用衝廣設備較為有利，因此以往係串聯式地連接一段成 形衝麈用衝壓設備與一段硬化衝壓用衝壓設備各一台 來建構衝壓設備系統。 【發明内容】 然而’如上述之硬化衝壓製程係需要比成形衝壓製 程長數倍之製程時間，因此習知的構成中，每單位時間 可製造之多層基板的數量係由硬化衝壓之製程時間加 以支配。因而，成形衝壓用衝壓設備之運轉率可抑制較 低，導入硬化衝壓用衝壓設備之效果並未充分發揮。 用以解決上述課題之方法之一，考慮有藉由相對一 台成形衝壓用衝壓設備使用複數之一段硬化衝壓用衝 壓設備，提高成形衝壓用衝壓設備之運轉率之方法。然 而，該方法係由於為設置複數的硬化衝壓設備需要較寬 的空間，因此有導入硬化衝壓設備之成本優點較低之缺 點。 ' 因此，考慮有使用多段的硬化衝壓用衝壓設備，與 於一-人的硬化衝壓中成形衝壓之被加工物的數量相 同，或將更多數量的被加工物一起一次進行硬化衝壓之 方法。 然而，此時，更需要用以將成形衝壓數次份之被加 =物暫時儲存之儲存架。此外’由於儲存中被加工物之 /m，下降，因此需要更長硬化衝壓時間。再者，藉由成 形ί壓之餘熱’在儲存中未衝壓之狀態（即形狀未管理之 狀態），進行樹脂之硬化，因此多層基板之厚度及形狀有 200906606 產生不均之可能性。 本發明係用以解決上述問題而研創者，其目的在提 供一種硬化製程所花費的時間即使比其前製程之成形 衝壓製程要充分長，亦能高度保持被加工物之每單位日^ 間之製造量之衝壓設備及衝壓設備系統。 、 為達成上述目的，本發明之衝壓設備係具有：以上 下方向配置之第一衝壓盤與第二衝壓盤；至少一個配 在第一衝壓盤與第二衝壓盤之間之中間衝壓盤；寸 第二衝壓盤上下移動的衝M盤驅動手段 = 搬送模式與壓縮模式之控制手段，前述搬送== 前述至少-個中間衝壓盤、第-衝壓盤、及第= 之中鄰接於上下方向之一弟—衝壓盤 斟衡厭般+μ 對衝壓盤，且擴展所選擇之一 可將被加工物搬入/搬出於該-對衝 加BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stamping apparatus for stamping a workpiece containing a resin, and a stamping apparatus system including the stamping apparatus. [Prior Art] For example, when a multilayer substrate is produced by thermocompression bonding a film with a processed material of a copper foil, the processed object is formed by hot stamping only for a short time, and the film cannot be completely hardened, and if it is long-term The shape and characteristics of the workpiece will change. Therefore, as shown in Japanese Laid-Open Patent Publication No. 2006-190734, it is preferable to heat-harden a multilayer substrate which is formed by hot stamping, and to completely harden the thermosetting resin or the like contained in the film to perform the hardening treatment of the stabilization. . For the hardening treatment, for example, the formed substrate is placed in an oven to be heated, or the end of the substrate is sandwiched between hot plates (cure press). The hardened stamping system heats the multilayer substrate in contact with the heated hot plate, and has the following advantages as compared with the hardening treatment in the oven: (1) Since heat is transmitted to the multilayer substrate faster, it can be hard in a short time. ^Processing; (2) It can prevent deformation of the multilayer substrate during hardening. ^, the process time for hardening stamping required for sufficient thermal hardening is required to be several times longer than the processing time of forming stamping. ± - Continuous hardening by the same stamping equipment after forming stamping will form a long time Does it take up a relatively high-priced stamping press for forming stamping? 2, this cost will increase. In addition, when the forming press and the hardening are used, and the temperature conditions are different, it takes a lot of time. Therefore, it is difficult to make the press machine into two presses. Moreover, the hard press stamping does not require a high press pressure of 200906606, so that a relatively small and inexpensive press apparatus can be used. Therefore, since it is advantageous to use other punching and punching equipments which are different from the stamping equipment for forming stamping, it is conventionally connected in series to form one punching equipment for forming punching and one stamping device for hardening stamping. Stamping equipment system. SUMMARY OF THE INVENTION However, as described above, the hardening stamping process requires a process time that is several times longer than the forming press process. Therefore, in the conventional configuration, the number of multilayer substrates that can be manufactured per unit time is determined by the process time of the hardened stamping process. Dominant. Therefore, the operation rate of the press equipment for forming press can be suppressed to be low, and the effect of introducing the press equipment for hard press is not fully exerted. One of the methods for solving the above problems is to improve the operation rate of the press equipment for forming press by using a plurality of punching presses for one-stage hardening presses with respect to one press forming press. However, this method is disadvantageous in that the cost of introducing the hardened press equipment is low because a wide space is required for providing a plurality of hardened press equipment. Therefore, it is considered that there is a method of using a multi-stage punching apparatus for hardening stamping, a method of forming a stamped workpiece in a one-person hardening press, or a method of hardening stamping a larger number of workpieces together. However, at this time, there is a need for a storage rack for temporarily storing the formed stampings for a plurality of times. In addition, since it is lowered by /m of the workpiece in storage, a longer hardening press time is required. Further, since the resin is hardened by the state in which the heat is not pressed during storage (i.e., the shape is unmanaged), the thickness and shape of the multilayer substrate are likely to be uneven in 200906606. The present invention has been made in order to solve the above problems, and an object thereof is to provide a hardening process which takes a time sufficiently longer than a forming process of a pre-process, and can maintain a high degree per unit day of the workpiece. Manufacturing quantity of stamping equipment and stamping equipment systems. In order to achieve the above object, the stamping apparatus of the present invention has: a first punching disc and a second punching disc disposed in the upper direction; at least one intermediate punching disc disposed between the first punching disc and the second punching disc; The driving means for moving the second punching plate up and down = the control means of the conveying mode and the compression mode, the conveying == the at least one intermediate pressing plate, the first pressing plate, and the second one are adjacent to one of the up and down directions Brother—the punching plate 斟 般 + + μ μ 对 冲压 冲压 , 冲压 冲压 冲压 冲压 冲压 μ μ μ μ μ μ μ μ μ μ μ μ μ μ μ μ μ μ
段於每次將前述壓加工^前述控制手 既定順序切換前述搬u、至則述搬运模式時’係以 根據本發所選擇之一對衝壓盤。 衝壓盤間空間一面靶—面切換被加工物所搬入之 壓盤間已配置右姑Α仃破加工物之衝壓。亦即，在某衝 搬入另一衝壓=物之狀態下，能將另-被加工物 加工物所搬出 因此，此從衝壓設備將衝壓後之被 比起被加工物之二二間隔，比衝壓時間更縮短。因而， 硬化衝壓）所需時門蹙(/例^"進行被加工物之硬化處理之 衝壓製程)搬送祜:，從則製程（例如被加工物之成形熱 分數量的中間_ ^物之時_隔較短時，只要準備充 壓盤間而開始衝，將被加工物不延遲的送往衝 ，且能高度保持被加工物之每單位時 200906606 間之製造量。 又，更具有將複數的中間衝壓盤及第一衝壓盤之一 固定於既定高度之衝壓盤固定手段，藉由控制前述衝壓 盤固定手段以使衝壓盤保持於位在應擴展高度之空間 之上，益且使第二衝壓盤下降，形成擴展空間之構成亦 可0 在此，例如在複數的中間衝壓盤及第一衝壓盤之側 面形成延伸於大致水平方甸之孔’衝壓盤固定手段係具 有：保持為既定高度之固定部；相對前述固定部構成為 進退自如之桿；用以驅動桿之驅動部，藉由使桿突出於 固定部而***衝壓盤之孔，位在應擴展之空間之上之衝 壓盤係予以固定。 如以上所示，根據本發明’能實現即使衝壓製程所 花費之時間比該前製程要充分長時，亦可高度保持被加 工物之每單位時間之製造量之衝壓設備及衝壓設備系 統0 【實施方式】 以下使用圖式詳細說明本發明之實施形態。第一圖 係本實施形態之衝壓設備系統1之方塊圖。本實施形態 之衝壓設備系統係將積層有CCL(Copper Clad Laminate、於樹脂薄片之單面或兩面形成銅箔者）、銅 箔、膠片之積層體熱壓合以成形多層基板者。本實施形 態之衝壓設備系統係具有：將積層體加熱、加壓以進行 成形之成形熱衝壓設備1〇〇;於成形後之積層體進行硬 化處理之硬化衝壓設備200;以及將藉由硬化處理所獲 得之多層基板冷卻之冷衝壓設備300。此外，本實施形 200906606 態之衝壓設備系統1係具有：用以將藉由成形熱衝壓設 備100成形之積層體搬送至硬化衝壓設備200之一次搬 送設備400 ;以及用以將藉由硬化衝壓設備200進行硬 化處理之積層體搬送至冷衝壓設備之二次搬送設備 500。又，本實施形態之衝壓設備系統1係具備用以控 制系統整體動作之控制設備600。 以下說明本實施形態之成形熱衝壓設備100之特 徵。第二圖係成形熱衝壓設備1〇〇之側視圖，第三圖係 f 第二圖之A_A箭視圖。成形熱衝壓設備100係將積層體 s挾持在配置在下側之固定熱盤與配置在上侧之可 動熱盤120之間進行加壓之設備。固定熱盤11〇及可動 熱盤120係如後述所示，構成為加熱至積層體S之膠片 所含之熱硬化性樹脂之硬化溫度以上之溫度。 在可動熱盤120之上面安裝有頂端平台130。在頂 端平台之上部設有滾珠螺帽132，該滾珠螺帽132係扣 合滾珠螺絲142之下端。滾珠螺絲142之上端係設有使 该滾珠螺絲旋轉之馬達144，藉由透過該馬達144轉動 ( 浪珠螺絲142可使頂端平台13〇及可動熱盤120上下移 動。因而’藉由驅動馬達144,能將積層體S在熱盤11〇、 間進行衝壓。如前述所示，熱盤110、12〇係加熱至 膠片所含之熱硬化性樹脂之硬化溫度以上之溫度，亦即 比未硬化膠片樹脂之玻璃轉移點要高之溫度，因此藉由 在熱盤110、120間衝壓積層體s，膠片樹脂係暫時硬化， ，和膠片鄰接之銅箔或CCL密接。然後，膠片之硬化進 仃到一定程度，使可動熱盤120上升後亦能維持積層體 S之形狀。 本實施形態中’由成形熱衝壓設備100所進行之積 200906606 層體s之衝壓，係在真空容器150之内部進行。真空容 器/SO係設有真空泵156及閥158。藉由關閉閥158 , 然後驅動真空泵156，能使真空容器15〇之内部呈真空 狀態。又，藉由自該狀態開放閥158，可使真空容器15〇 之内部回到大氣壓狀態。 本實施形態中’積層體S係藉由搬送部16〇搬入至 真空谷器150之内部，並且從該處搬出。搬送部16〇係 具有.載體薄膜162;配置在真空容器150之搬送方向（圖 中從右至左方向）之下游侧（圖中左方）之捲筒164;以及 配置在搬送方向上游侧（圖中右方）之退捲筒166。載體薄 膜162係於搬送方向上游側捲繞於退捲筒166，於搬送 方向下游側捲繞於捲筒164,藉由驅動為捲起捲筒164, 士解開退捲筒166 ’能使載體薄膜162移動於搬送方向。 藉由成形熱衝壓設備1〇〇衝壓之前之積層體s，传夢 在比衝壓設備π)〇上游側載置於載體 者作動捲筒164、退捲筒166移動載體薄膜162，而搬 送至真空容器内。又，藉由成形熱衝壓設備1〇〇進行衝 壓後之積層體s，係藉由移動載體薄膜162從真空容器 150之甲搬出至搬送方向下游側。此外，藉由捲筒16°4 及退捲笱166對載體薄膜162賦予張力，以使載體薄膜 162不會因積層體而彎曲。 真空容器150係具有上側部份152與下側部份 上側邛伤152係構成為藉由未顯示於圖之驅動機 才f可上下移動。又，如圖式所示，載體薄膜162係構成 :、、、通過真空谷器150之上側部份152與下側部份154之 間，以及固定熱盤110與可動熱盤12〇之間。使上側部 份152下降時’載體薄膜162之上面及下面分別密接於 200906606 上側部份152與下側部份154,熱盤110、12〇及配置在 其間之積層體s係形成為密閉於真空容器150内。藉由 成开y熱衝壓設備100衝壓積層體S時，將積層體載置於 固疋，盤110之上，關閉真空容器15〇，藉由真空泵156 =真空容器内呈真空狀態，接著驅動可動熱盤120在真 工下衝壓積層體S。此外，在頂端平台13〇之外周侧面 與真空容器15〇之上側部份152之内周側面之間設有襯 塾155 ’防止從兩者之間隙洩漏空氣。 Γ =在熱盤no及120設有未顯示於圖之加熱器，藉由 該加熱器加熱至膠片之硬化溫度以上之既定溫度。又， 在可動熱盤110之表面設有與日本國專利第3847633號 之熱盤外罩同樣之機構。亦即，在比較下薄且柔軟之金 屬板所構成之熱盤表面之背側全面設有内部空間，藉由 將充填於該内部空間之流體加壓，因均一的流體之靜水 壓與熱盤表面之柔軟度，而可以完全均—的溫度及壓力 衝壓積層體s之全面。此外，本實施形態之硬化衝壓設 備中’由於衝壓壓力比較小，非利用油壓而利用氣壓達 ( 成上述功能。以壓力媒體氣體來說，係使用經加熱之乾 空氣或蒸氣。又，衝壓中為將熱盤表面之溫度保持— 定，以壓力媒體氣體經常以一定流量流動於熱盤之内部 空間亦可。藉由該熱盤外罩，可於蝕刻銅箔所形成之微 細且複雜的電路圖案之周圍以樹脂填充於各個角落，參7< 製造之積層基板係獲得極為安定之特性。 接著說明硬化衝壓設備200之構成。第四圖係硬化 衝壓設備200及冷衝壓設備300之側視圖’第五a圖係 第四圖之B-B箭視圖。如圖式所示，硬化衝壓設備係於 上下方向排列有上部熱盤211、第一中間熱盤221、第 200906606 二中間熱盤222、第三中間熱盤223、第四中間熱盤224、 下部熱盤212 ’能於熱盤間最多配置五張積層體s。上 部熱盤211之上配置有頂端定盤231、在下部熱盤212 之下配置有平台定盤232。此外，在平台定盤232下面 安裝有馬達242。在馬達242之旋轉軸係於同軸固定有 延伸於下方之滚珠螺絲244，藉由馬達242能使滾珠螺 絲244旋轉。在滾珠螺絲244之下端安裝有螺帽246。 螺帽246係固定在硬化衝壓設備之設備框202。因而藉 由驅動馬達242，能使平台定盤232上下移動。藉由硬 化衝壓設備200衝壓積層體s時’使平台定盤232上升。 平台定盤232及其上之下部熱盤212上升時，透過下部 熱盤212依序舉起第四中間熱盤224、第三中間熱盤 223、第二中間熱盤222、第一中間熱盤221、上部熱盤 211，最後上部熱盤211之上面會抵接於頂端定盤231 之下面。使馬達作動於從該狀態更使平台定盤232上升 之方向時，在頂端定盤231與平台定盤232之間透過熱 盤211、212、221〜224將積層體s衝壓。 此外，硬化衝壓係不需要大的衝壓壓力，因此上部 熱盤211只要具有一定的重量，則僅要上部熱盤2ιι之 重量即獲得充分的衝壓壓力。此時，如上述所示使上部 熱盤211之上面抵接於頂端定盤231之下面，無須藉由 馬達之驅動力在平台與頂端平台之間進行衝壓。因^， 亦可為在下部熱盤212、中間熱盤221〜224、及上部埶 盤/211全部重疊之時點，停止平台之上升，在該狀態 進仃，化衝壓之構成。根據如上述之構成，平台之移動 時間縮短，且更減輕硬化衝壓所需之馬達之消耗電力。 又，熱盤21卜212、221〜224形成為藉由設在各 12 200906606 熱盤内之未顯示於圖之加熱器予以加熱。因而，配置在 硬化衝壓設備200之熱盤間之積層體s，係藉由在熱盤 間衝壓來予以加熱。 接著，說明在硬化衝壓設備200之熱盤間配置積層 體S、’再從熱盤間將積層體s取出之構成。本實施形態 中，進行硬化處理之前之積層體s形成相對硬化衝壓設 備200之熱盤載置在配置於搬送方向（從第四圖中右至 左方向）上游側（圖中右側）之平台262之上。更具體而 :，將搬送用板P放置在平台262之上，積層體^係藉 -人搬送設備400(第一圖），從載體薄膜162之上移送 至平台262上之搬送用板p之上。 在平台262設有推床252。推床252係形成為藉由 ^不於圖之馬達’沿埋人平台262之頂部之寬度方向 、邻之導執252驅動於搬送方向（從第五A圖中右至 25^。搬送肢P及其上之積層板S鋪由該推床 朝熱盤間推出。亦即，推床252係可移動於 =前所制定之待機位置（圖中實線部)與熱盤之上 之作用位置（圖中虛線部）之間，藉由從待 出。朝作用位置移動，能將搬送用板Ρ從平台262推 職中’形絲缺搬朝板ρ及其上之積 =移動於中間熱盤221〜224與下部熱盤212之中 下邻教i之上方。因此，能使中間熱盤221〜224與 上i相、之二，任意者之上面移動於與平台262之 :二盤211及中間熱盤221 高的預定古声 、问度，保持在比平台上面更充分 的預疋四度。因此’藉由將所期望之熱盤(下部熱盤 13 200906606 212或中間熱盤221〜224)之上面的高度作為平台262 之上面的高度，更將位在該熱盤上之熱盤（上部埶盤211 或中間熱盤221〜224)之下面保持在既定高度，能*** 搬送用板P及積層體S之空間，係於所期望之熱盤之上 面與其上之熱盤之下面之間形成。在該狀態下^由驅 動推床252，能將搬送用板P及其上之積層體s移動於 所期望之熱盤上方。又，此時，在所期望之熱盤間有另 (硬化處理元成）積層體S及搬送用板p，時，該搬送用 f 板P’係藉由透過推床252自上游側移動之搬送用板p， 推出至下游側（圖中左侧）。亦即，藉由驅動推床252，將 硬化處理前之積層體S搬入熱盤間，並且能將硬化處理 後之積層體S自熱盤間取出。此外，搬送用板p之搬送 方向下游側端部係形成為折彎於上方，以推床252推入 熱盤間之搬送用板P與熱盤間之搬送用板P，容易接觸 (亦即，確實推出搬送用板P，）。 自熱盤間推出之搬送用板P，與其上之積層體 ^在硬化_設備之搬送㈣下游側之帶式= I π機構之一次搬送设備5〇〇，搬送至冷衝壓設備之 士部冷卻盤322與下部冷卻盤324之間。接著，上部冷 部盤322下降，在兩冷卻盤之間將積層體s於每一搬送 用板衝壓。此外，在冷卻盤322、324之中，設有冷媒 部水等）循環之管路，且冷卻盤322、324之溫度大致保 1於常溫。因此，在冷卻盤322、324間衝壓積層體s 日:’、將積層體S冷卻。由冷衝壓設備3〇〇所進行之衝壓 =成後，搬送用板P係藉由二次搬送設備5〇〇搬送至下 ，侧。接著’自搬送用板P將積層體S卸除，積層體s 糸移動至下-製程(於表面之銅㈣成配線之製程等卜 14 200906606 又，將積層體s卸除後之搬送用板p，係例如藉由自第 五B圖所乔之搬送方向下游側將搬送用板p搬送至上游 侧之帶式輸送f等之回流手段280，回到平台262(第四 圖、第五A圖）之上。 以下s尤明用以將上部熱盤211及中間熱盤221〜224 保持在既定问度之熱盤保持機構。第六圖係硬化衝壓設 備200之前視圖（第四圖中，自右側觀看者）。此外，於 第六圖，為明確熱盤保持機構，平台262及推床252係 未顯示於圖。 如第六圖所示，在熱盤之寬度方向（圖中水平方向） 兩側，設有具備油壓缸272、及自該油壓缸272突出於 寬度方向内側之桿274之熱盤保持構件27〇。如第四圖 至第六圖所示，在上部熱盤211及中間熱盤221〜224 之各寬度方向兩側面，形成有並列於搬送方向（圖中紙面 垂直方向）之兩對孔Η(亦即，於一個熱盤形成有四個孔 Η) ’因此熱盤保持構件27〇係設四個。 熱盤保持構件270之油壓缸272係藉由固定支柱 =6固定於框202。又，桿274係構成為自油壓缸272 犬出於覓度方向側。桿274係在於***熱盤之孔η之程 度自j壓缸272突出之固定位置（第六圖之狀態）、與退 避至寬度方向外側而不***熱盤之孔1^之退避位置之間 進退自如。桿274係藉由熱盤保持構件27〇之未顯示於 圖之驅動手段，驅動為移動於固定位置與退避位置之 間。此外，驅動手段係使用油壓、空壓或螺線管來驅動 桿 274 〇 6如前述所示，由於熱盤保持構件之油壓缸272係固 定為不會移動，因此驅動平台定盤232使桿274與熱盤 15 200906606 之高度一致，接著將桿274從退避位置驅動至固定位置 時，桿274即***熱盤之孔H。其結果，***桿a%之 熱盤及在δ亥熱盤上之另一熱盤及積層體s係支持在熱般 保持構件270。從該狀態使平台定盤232下降時，^ 之熱盤自桿274所***之熱盤分開，於兩熱盤間形成空 間。 接著說明一次搬送設備400。第七圖係一次搬送設 備400、及位在其搬送方向之前後之載體薄膜162與= r 台262之側視圖。一次搬送設備4〇〇係具有：橫跨^送 方向之導軌410;自該導軌410垂下可移動於 162上與平台262上之間之可動框·;以及自^框 420垂下之複數的真空墊430。 真空墊430係與未顯示於圖之真空泵連接，藉由驅 動該真空泵，能吸引位在真空墊43〇之吸引口周圍之 物。因而，使可動框420移動於載體薄膜162上之積層 =S之上，接著驅動真空泵，則積層體s係被吸引至真 空墊430而被舉起。接著，在該狀態下將可動框42〇移 ( 動至下游側之平台162之上，在該位置停止真空泵，則 積層體S自真空墊430分開，移往至平台162上之搬送 用板P之上。因此，積層體s係從成形熱衝壓設備1〇〇 上移動至硬化衝壓設備2〇〇上。 _以下說明藉由以上所說明之衝壓設備系統1之積層 體s之成形順序。第八圖係顯示以硬化衝壓設備2〇〇(第 四圖）所進行之硬化處理之順序的流程。此外，該流程之 處理係藉由衝壓設備系統1之控制設備6〇〇(第一圖）控 .制馬達242(第四圖）及熱盤保持手段27〇(第五a圖、第 六圖）來執行。又，本實施形態中’成形熱衝壓設備1〇〇(第 16 200906606 二圖）之積層體s之衝壓時間係五分鐘，每五分鐘藉由一 次搬送設備400，將成形完之積層體s送往 ^ 備200之平台262(第四圖）。 本流程一開始先執行步驟S1。步驟S1中，硬化衝 壓設備200之平台定盤232下降使第四中間熱盤224與 熱盤保持構件270(第六圖）之高度一致。接著，使熱盤^ 持構件270之桿274移動至固定位置而嵌入第四中間熱 盤224之孔Η。接著，再使平台定盤232下降使下部熱 盤211之上面與平台262之上面之高度一致。此時，在 下部熱盤211之上面與第四中間熱盤224之下面之間形 成空間。然後，驅動推床252使平台262上之積層體s 移動至該空間。接著，前進至步驟S2。 步驟S2中’使平台定盤232上升，使下部熱盤211 上之積層體S抵接於第四中間熱盤224，接著，使熱般 保持構件270之桿274移動至退避位置，自第四中'間= 盤224之孔Η取出。接著，再使平台定盤232上升，藉 由頂端定盤231與平台定盤232，透過熱盤將積層體§ 衝壓約五分鐘。接著，前進至步驟S3。 步驟S3中，硬化衝壓設備2〇〇之平台定盤232下 降使第三中間熱盤223與熱盤保持構件27〇(第六圖）之 高度一致。接著，使熱盤保持構件27〇之桿274移動至 固定位置而嵌入第三中間熱盤223之孔Η。接著，再使 平台定盤232下降使第四中間熱盤224之上面與平台 262之上面之高度一致。此時，在第四中間熱盤之 上面與第三中間熱盤223之下面之間形成空間。然後， 驅動推床252使平台262上之積層體s移動至該空間。 接著，前進至步驟S4。 17 200906606 步驟S4中，使平台定盤232上升，使第四中間熱 盤224上之積層體S抵接於第三中間熱盤223，接著， 使熱盤保持構件270之桿274移動至退避位置，自第三 中間熱盤223之孔Η取出。接著，再使平台定盤232上 升’藉由頂端定盤231與平台定盤232，透過熱盤將積 層體S衝壓約五分鐘。接著，前進至步驟S5。 步驟S5中’硬化衝壓設備200之平台定盤232下 降使第二中間熱盤222與熱盤保持構件270(第六圖）之 面度一致。接著’使熱盤保持構件270之桿274移動至 固定位置而嵌入第二中間熱盤222之孔Η。接著，再使 平台定盤232下降使第三中間熱盤223之上面與平台 262之上面之高度一致。此時，在第三中間熱盤223之 上面與第二中間熱盤222之下面之間形成空間。然後， 驅，推床252使平台262上之積層體s移動至該空間。 接著，前進至步驟S6。 步驟S6中，使平台定盤232上升，使第三中間熱 223上之積層體S抵接於第二中間熱盤222，接著， 使熱盤保持構件270之桿274移動至退避位置，自第二 :間，i 222之孔Η取出。接著，再使平台定盤232上 声體定盤231與平台定盤232，透過熱盤將積 層體s衝壓約五分鐘。接著，前進至步驟s7。 隊估二驟S7中，硬化衝壓設備200之平台定盤232下 $弟—中間熱盤221與熱盤保持構件27〇(第六圖）之 致。接著，使熱盤保持構件270之桿274移動至 ㈡=入第一中間熱盤221之孔H。接著= 降使第二中間熱盤222之上面與平台 之n度一致。此時，在第二中間熱盤222之 18 200906606 上面與第一中間熱盤221之下面之間形成空間。然後， 驅動推床252使平台262上之積層體S移動至該空間。 接著’前進至步驟S8。 步驟S8中，使平台定盤232上升，使第二中間熱 盤222上之積層體s抵接於第一中間熱盤221 ’接著， 使熱盤保持構件270之桿274移動至退避位置，自第一 中間熱盤221之孔η取出。接著，再使平台定盤232上 升，藉由頂端定盤231與平台定盤232，透過熱盤將積 層體s衝壓約五分鐘。接著，前進至步驟S9。 步驟S9中，硬化衝壓設備2〇〇之平台定盤232下 降使上部熱盤211與熱盤保持構件270(第六圖）之高度 一致。，著，使熱盤保持構件270之桿274移動至固定 位置而嵌入上部熱盤211之孔H。接著，Each time the above-described press processing is performed, the aforementioned control hand is switched in the predetermined order, and when the transfer mode is described, the stamping disk is selected according to one of the present inventions. In the space between the punching discs, the target-surface switching is carried out by the workpiece. The stamping of the right acupuncture is arranged between the pressure plates. In other words, in the state where a certain punch is moved into another stamping object, the workpiece to be processed can be carried out. Therefore, the stamping device is separated from the workpiece by the stamping device. The time is shorter. Therefore, when the hardening press is required, the threshold (or example) is carried out by the stamping process of the hardened material to be processed, and the process is performed (for example, the middle of the amount of heat of forming of the workpiece) When the time interval is short, the rinsing is started as soon as the charging plate is prepared, and the workpiece is sent to the rush without delay, and the manufacturing amount of 200,906,606 per unit time of the workpiece can be maintained at a high level. a plurality of intermediate punching discs and one of the first punching discs fixed to the stamping disc fixing means at a predetermined height, by controlling the pressing disc fixing means to keep the punching disc in a space above the height to be expanded, and The two stamping discs are lowered, and the formation of the expansion space can also be 0. Here, for example, in the middle of the plurality of intermediate punching discs and the first punching disc, a hole extending to the substantially horizontal square is formed. The stamping disc fixing means has a predetermined a fixing portion of the height; a rod that is movable forward and backward with respect to the fixing portion; and a driving portion for driving the rod, which is inserted into the hole of the pressing plate by protruding the rod to the fixing portion, and is located in a space to be expanded The stamping plate is fixed. As shown above, according to the present invention, it is possible to achieve a high degree of manufacturing of the workpiece per unit time even if the time taken for the stamping process is sufficiently longer than the previous process. [Embodiment] The embodiment of the present invention will be described in detail below with reference to the drawings. The first drawing is a block diagram of the press equipment system 1 of the present embodiment. The press equipment system of the present embodiment is laminated with CCL. (Copper Clad Laminate, a copper foil formed on one side or both sides of a resin sheet), a laminate of copper foil and film, which are thermocompression bonded to form a multilayer substrate. The press equipment system of the present embodiment has a structure in which a laminate is heated. a hot stamping apparatus 200 that pressurizes for forming, a hardening press apparatus 200 that performs hardening treatment on a laminated body after forming, and a cold stamping apparatus 300 that cools a multilayer substrate obtained by hardening treatment. The stamping apparatus system 1 of the embodiment of the type 200006606 has a structure for conveying a laminate formed by the forming hot stamping apparatus 100 to a hard The primary transfer device 400 of the chemical press apparatus 200 and the secondary transfer apparatus 500 for transporting the laminated body which is hardened by the hardening press apparatus 200 to the cold press apparatus. Moreover, the press apparatus system 1 of this embodiment is equipped with The control device 600 for controlling the overall operation of the system. The following describes the features of the hot stamping press 100 of the present embodiment. The second figure is a side view of the forming hot stamping device 1A, the third figure f A_A of the second figure The forming hot stamping apparatus 100 is a device for holding the laminated body s between the fixed hot plate disposed on the lower side and the movable hot plate 120 disposed on the upper side. The fixed hot plate 11 and the movable hot plate 120 are fixed. As will be described later, the temperature is set to be higher than the curing temperature of the thermosetting resin contained in the film of the laminated body S. A top platform 130 is mounted on top of the movable hot plate 120. A ball nut 132 is attached to the upper portion of the top end platform, and the ball nut 132 is fastened to the lower end of the ball screw 142. The upper end of the ball screw 142 is provided with a motor 144 for rotating the ball screw, and is rotated by the motor 144 (the bead screw 142 can move the top end platform 13 and the movable hot plate 120 up and down. Thus, by the drive motor 144 The laminated body S can be pressed between the hot plates 11 and as described above, the hot plates 110 and 12 are heated to a temperature higher than the hardening temperature of the thermosetting resin contained in the film, that is, less than hardened. The glass transition point of the film resin is high, so the film resin is temporarily hardened by pressing the laminated body s between the hot plates 110 and 120, and is closely adhered to the copper foil or CCL adjacent to the film. Then, the film is hardened. To a certain extent, the shape of the laminated body S can be maintained even after the movable hot plate 120 is raised. In the present embodiment, the stamping of the layer 906606 by the forming hot stamping apparatus 100 is performed inside the vacuum container 150. The vacuum vessel/SO system is provided with a vacuum pump 156 and a valve 158. By closing the valve 158 and then driving the vacuum pump 156, the inside of the vacuum vessel 15 can be vacuumed. Further, by opening the valve 158 from this state, The inside of the vacuum chamber 15 is returned to the atmospheric pressure state. In the present embodiment, the "layered body S" is carried into the inside of the vacuum damper 150 by the conveying unit 16 and is carried out therefrom. The conveying unit 16 has a carrier. Film 162; reel 164 disposed on the downstream side (left side in the drawing) of the vacuum container 150 (to the left in the drawing); and unwinding disposed on the upstream side (right side in the drawing) in the conveying direction The carrier film 162 is wound around the unwinding cylinder 166 on the upstream side in the conveyance direction, wound around the reel 164 on the downstream side in the conveyance direction, and unwound by the winding reel 164 by the drive. The carrier film 162 can be moved in the transport direction. By forming the laminated body s before the stamping of the hot stamping apparatus 1 , the dream is carried on the carrier side of the punching device π) 作 on the carrier 164, the unwinding cylinder The carrier film 162 is moved 166 and transported into a vacuum container. Further, the laminated body s which has been pressed by the forming hot stamping apparatus 1 is carried out by moving the carrier film 162 from the arm of the vacuum container 150 to the downstream side in the conveying direction. Further, the carrier film 162 is biased by the reel 16° 4 and the unwinding 笱 166 so that the carrier film 162 is not bent by the laminate. The vacuum container 150 has an upper portion 152 and a lower portion. The upper side 152 is configured to be movable up and down by a driving machine not shown in the drawing. Further, as shown in the figure, the carrier film 162 is constructed by:, between the upper portion 152 and the lower portion 154 of the vacuum damper 150, and between the fixed heat plate 110 and the movable heat plate 12A. When the upper portion 152 is lowered, the upper surface and the lower surface of the carrier film 162 are respectively adhered to the upper portion 152 and the lower portion 154 of the 200906606, and the hot plates 110, 12 and the laminated body s disposed therebetween are formed to be sealed in a vacuum. Inside the container 150. When the laminated body S is pressed by the hot-pressing apparatus 100, the laminated body is placed on the solid plate, the disk 110 is closed, and the vacuum container 15 is closed. The vacuum pump 156 = the vacuum container is in a vacuum state, and then the drive is movable. The hot plate 120 presses the laminated body S under the actual work. Further, a lining 155' is provided between the outer peripheral side of the top end platform 13 与 and the inner peripheral side of the upper portion 152 of the vacuum vessel 15 防止 to prevent leakage of air from the gap between the two. Γ = heaters not shown in the figure are provided in the hot plates no and 120, and the heater is heated to a predetermined temperature above the hardening temperature of the film. Further, a mechanism similar to that of the hot plate cover of Japanese Patent No. 3847633 is provided on the surface of the movable heat plate 110. That is, the back side of the surface of the hot plate formed by comparing the thin and soft metal plate is provided with an internal space, and by pressurizing the fluid filled in the internal space, the hydrostatic pressure and heat of the uniform fluid are uniform. The softness of the surface of the disc, and the uniformity of the pressure and pressure can be completely uniform. Further, in the hardening press apparatus of the present embodiment, since the press pressure is relatively small, the air pressure is not utilized by the hydraulic pressure (the above function is used. In the case of the pressure medium gas, the heated dry air or steam is used. In order to maintain the temperature of the surface of the hot plate, the pressure medium gas may flow at a certain flow rate to the inner space of the hot plate. The hot plate cover can be used to etch the fine and complicated circuit formed by the copper foil. The periphery of the pattern is filled with resin at each corner, and the manufactured laminated substrate is highly stable. Next, the constitution of the hardened press apparatus 200 will be described. The fourth figure is a side view of the hardened press apparatus 200 and the cold stamping apparatus 300. The fifth a diagram is a BB arrow view of the fourth figure. As shown in the figure, the hardening stamping apparatus is arranged with an upper hot plate 211, a first intermediate hot plate 221, a second intermediate heat exchanger 222, and a second intermediate heat plate 221, a third. The intermediate hot plate 223, the fourth intermediate hot plate 224, and the lower hot plate 212' can be configured with a maximum of five laminated bodies s between the hot plates. The upper hot plate 211 is provided with a top fixed plate 231, A platform platen 232 is disposed below the lower hot plate 212. Further, a motor 242 is mounted below the platform platen 232. The rotating shaft of the motor 242 is coaxially fixed with a ball screw 244 extending downwardly, by a motor 242. The ball screw 244 can be rotated. A nut 246 is attached to the lower end of the ball screw 244. The nut 246 is fixed to the equipment frame 202 of the hardened stamping apparatus. Thus, by driving the motor 242, the platform platen 232 can be moved up and down. When the laminated body s is pressed by the hardening press apparatus 200, the platform fixed plate 232 is raised. When the platform fixed plate 232 and the upper and lower portions of the hot plate 212 are raised, the fourth intermediate hot plate 224 is sequentially lifted through the lower hot plate 212. The three intermediate hot plate 223, the second intermediate hot plate 222, the first intermediate hot plate 221, the upper hot plate 211, and the upper portion of the upper upper hot plate 211 abut against the underside of the top end plate 231. The motor is actuated from this state. When the direction of the platform platen 232 is increased, the laminated body s is punched between the top plate 231 and the table plate 232 through the hot plates 211, 212, 221 to 224. In addition, the hardened press system does not require a large press pressure. So the upper part As long as the disk 211 has a certain weight, a sufficient pressing pressure is obtained only by the weight of the upper hot plate 2 ιι. At this time, as shown above, the upper surface of the upper hot plate 211 is abutted under the top end plate 231, without borrowing Pressing between the platform and the top platform by the driving force of the motor. Therefore, the rise of the platform may be stopped when the lower hot plate 212, the intermediate hot plates 221 to 224, and the upper plate/211 are all overlapped. In this state, the composition of the press is formed. According to the above configuration, the movement time of the stage is shortened, and the power consumption of the motor required for the hard press is further reduced. Further, the hot plate 21, 212, 221 to 224 are formed to be borrowed. It is heated by a heater not shown in the figure provided in each of the 12 200906606 hot plates. Therefore, the laminated body s disposed between the hot plates of the hardened press apparatus 200 is heated by pressing between the hot plates. Next, a configuration will be described in which the laminated body S is placed between the hot plates of the hard press apparatus 200, and the laminated body s is taken out from between the hot plates. In the present embodiment, the laminated body s before the hardening treatment is formed on the hot plate placed on the hardened press apparatus 200 on the upstream side (the right side in the drawing) disposed in the transport direction (from the right to the left in the fourth drawing). Above. More specifically, the transporting plate P is placed on the platform 262, and the laminated body is transported from the carrier film 162 to the transporting plate p on the platform 262 by the human-transporting device 400 (first drawing). on. A pusher bed 252 is provided on the platform 262. The pusher bed 252 is formed to be driven in the transport direction by the direction of the top of the buried platform 262 by the motor of the figure, and the guide 252 is driven in the transport direction (from the right of the fifth A to the right). And the laminated board S of the upper layer is pushed out from the hot plate to the hot plate. That is, the push bed 252 can be moved to the standby position (the solid line in the figure) and the upper position on the hot plate. Between (the dotted line in the figure), by moving from the standby position to the action position, the transporting plate can be pushed from the platform 262, and the product of the wire is moved toward the plate ρ and the product is moved to the intermediate heat. The disks 221 to 224 and the lower hot plate 212 are positioned above the lower side of the lower heat plate 212. Therefore, the intermediate hot plates 221 to 224 and the upper i phase and the second are movable on the platform 262: the second disk 211 And the intermediate hot plate 221 is high in predetermined ancient sound and questioning, and is kept at a full pre-twist four degrees above the platform. Therefore, by using the desired hot plate (lower hot plate 13 200906606 212 or intermediate hot plate 221~ The height above the 224) is the height above the platform 262, and will be placed on the hot plate on the hot plate (the upper plate 211 or the middle) The lower surface of the disks 221 to 224) is held at a predetermined height, and the space in which the transfer plate P and the laminated body S can be inserted is formed between the upper surface of the desired hot plate and the lower surface of the hot plate thereon. In this state, ^ By driving the pusher 252, the transporting plate P and the laminated body s thereon can be moved over the desired hot plate. Further, at this time, there is another (hardened processing element) laminated body between the desired hot plates. In the case of the S and the transporting plate p, the transporting f-plate P' is pushed out to the downstream side (the left side in the figure) by the transporting plate p that has moved from the upstream side through the pusher 252. That is, by driving In the pusher 252, the laminated body S before the hardening treatment is carried into the hot plate, and the laminated body S after the hardening treatment can be taken out from the hot plate. Further, the downstream end portion of the conveying plate p in the conveying direction is formed into a folded portion. When the push plate 252 is pushed into the transfer plate P between the hot plate and the transfer plate P between the hot plates, the push plate 252 is easily contacted (that is, the transfer plate P is surely pushed out). Using the plate P, one of the belts on the downstream side of the hardening_equipment (four) laminated body = I π mechanism The conveyance device 5 is conveyed to between the cooling unit 322 of the cold-pressing apparatus and the lower cooling tray 324. Then, the upper cold-disc 322 is lowered, and the laminated body s is transported between the two cooling trays. In addition, a cooling pipe is provided in the cooling plates 322 and 324, and the temperature of the cooling plates 322 and 324 is substantially maintained at a normal temperature. Therefore, the laminated body s is pressed between the cooling plates 322 and 324: ', and the laminated body S is cooled. After the press is performed by the cold press equipment 3, the transport plate P is transported to the lower side by the secondary transfer apparatus 5〇〇. Then, the self-transporting plate P removes the laminated body S, and the laminated body s 糸 moves to the lower-process (the process of wiring the copper (4) on the surface, etc. 14 200906606, and the transfer plate after the laminated body s is removed In the reflow means 280 such as the belt conveyance f conveyed to the upstream side from the downstream side in the conveyance direction of the fifth drawing, the returning means 280 is returned to the stage 262 (fourth, fifth, and fifth The above s is particularly intended to maintain the upper hot plate 211 and the intermediate hot plates 221 to 224 in a predetermined hot plate holding mechanism. The sixth figure is a front view of the hardened punching device 200 (in the fourth figure, In addition, in the sixth figure, in order to clarify the hot plate holding mechanism, the platform 262 and the push bed 252 are not shown in the figure. As shown in the sixth figure, in the width direction of the hot plate (horizontal direction in the figure) On both sides, a hot plate holding member 27A having a hydraulic cylinder 272 and a rod 274 protruding from the hydraulic cylinder 272 in the width direction inner side is provided. As shown in the fourth to sixth figures, the upper hot plate is provided. 211 and the two sides of each of the intermediate hot plates 221 to 224 in the width direction are formed side by side in the conveying direction (Fig. Two pairs of holes in the vertical direction of the paper surface (that is, four holes are formed in one hot plate). Therefore, the hot plate holding member 27 is provided with four. The hydraulic cylinder 272 of the hot plate holding member 270 is borrowed. The rod 274 is fixed from the hydraulic cylinder 272 to the side of the twist direction. The rod 274 is fixed by the j cylinder 272 so as to be inserted into the hole η of the hot plate. The position (the state of the sixth figure) is retractable from the retracted position of the hole 1^ which is retracted to the outside in the width direction without being inserted into the hot plate. The rod 274 is driven by the hot plate holding member 27 not shown in the figure. Means, the driving is to move between the fixed position and the retracted position. Further, the driving means uses the oil pressure, the air pressure or the solenoid to drive the rod 274 〇6 as shown above, due to the hydraulic cylinder 272 of the hot plate holding member. It is fixed so as not to move, so the driving platform fixing plate 232 makes the rod 274 coincide with the height of the hot plate 15 200906606, and then when the rod 274 is driven from the retracted position to the fixed position, the rod 274 is inserted into the hole H of the hot plate. , insert the rod a% hot plate and the other on the δHai hot plate A hot plate and a laminate s support the heat retaining member 270. When the platform platen 232 is lowered from this state, the hot plate is separated from the hot plate inserted by the rod 274 to form a space between the two hot plates. The primary transfer device 400 will be described. The seventh drawing is a side view of the primary transfer device 400 and the carrier film 162 and the = r stage 262 before and after the transport direction. The primary transfer device 4 has a cross-feed direction. a guide rail 410; a movable frame suspended from the guide rail 410 and movable between the upper portion and the platform 262; and a plurality of vacuum pads 430 suspended from the frame 420. The vacuum pad 430 is connected to a vacuum pump not shown in the drawing. By driving the vacuum pump, it is possible to attract objects located around the suction opening of the vacuum pad 43. Therefore, when the movable frame 420 is moved over the laminate =S on the carrier film 162, and then the vacuum pump is driven, the laminated body s is attracted to the vacuum pad 430 and lifted up. Next, in this state, the movable frame 42 is moved (moved to the platform 162 on the downstream side, and when the vacuum pump is stopped at this position, the laminated body S is separated from the vacuum pad 430 and moved to the transfer plate P on the stage 162. Therefore, the laminated body s is moved from the forming hot stamping apparatus 1 to the hardening press apparatus 2. The following describes the forming sequence of the laminated body s of the press equipment system 1 described above. The eight figure shows the flow in the order of hardening treatment by the hardened stamping equipment 2 (fourth figure). Further, the processing of this process is by the control apparatus 6 of the stamping equipment system 1 (first figure) The control motor 242 (fourth diagram) and the hot plate holding means 27 (the fifth and sixth figures) are executed. Further, in the present embodiment, the "forming hot stamping apparatus 1" (16th 200906606) The lamination time of the laminated body s is five minutes, and the formed laminated body s is sent to the platform 262 of the preparation 200 (fourth figure) by the transfer apparatus 400 every five minutes. The flow begins with the steps first. S1. In step S1, the platform of the hardening stamping apparatus 200 is fixed. The lowering of 232 causes the fourth intermediate hot plate 224 to coincide with the height of the hot plate holding member 270 (Fig. 6). Then, the rod 274 of the hot plate holding member 270 is moved to a fixed position to be inserted into the hole of the fourth intermediate hot plate 224. Then, the platform platen 232 is lowered to make the upper surface of the lower heat plate 211 coincide with the height of the upper surface of the platform 262. At this time, a space is formed between the upper portion of the lower heat plate 211 and the lower portion of the fourth intermediate heat plate 224. Then, the pusher bed 252 is driven to move the laminated body s on the stage 262 to the space. Then, the process proceeds to step S2. In step S2, 'the platform platen 232 is raised to bring the laminated body S on the lower hot plate 211 into contact. In the fourth intermediate hot plate 224, the rod 274 of the heat retaining member 270 is then moved to the retracted position, and is taken out from the hole of the fourth intermediate portion 224. Then, the platform platen 232 is raised again, by The top fixing plate 231 and the platform fixing plate 232 press the laminated body § through the hot plate for about five minutes. Then, proceeding to step S3. In step S3, the hardening punching device 2's platform fixing plate 232 is lowered to make the third intermediate heat The disk 223 and the hot plate holding member 27 (Fig. 6) The height is the same. Then, the rod 274 of the hot plate holding member 27 is moved to the fixed position to be inserted into the hole of the third intermediate heat plate 223. Then, the platform platen 232 is lowered to make the upper surface of the fourth intermediate heat plate 224 The height of the upper surface of the platform 262 is uniform. At this time, a space is formed between the upper surface of the fourth intermediate heat plate and the lower surface of the third intermediate heat plate 223. Then, the push bed 252 is driven to move the laminated body s on the platform 262 to the Then, the process proceeds to step S4. 17 200906606 In step S4, the platform platen 232 is raised, the layered body S on the fourth intermediate hot plate 224 is brought into contact with the third intermediate hot plate 223, and then the hot plate is held. The rod 274 of the member 270 is moved to the retracted position and taken out from the aperture of the third intermediate hot plate 223. Next, the platform platen 232 is raised again. By the top plate 231 and the plate plate 232, the laminated body S is punched through the hot plate for about five minutes. Next, the process proceeds to step S5. In step S5, the stage platen 232 of the hardened press apparatus 200 is lowered to match the surface of the second intermediate hot plate 222 with the hot plate holding member 270 (Fig. 6). Then, the rod 274 of the hot plate holding member 270 is moved to a fixed position to be inserted into the hole of the second intermediate heat plate 222. Next, the platform platen 232 is lowered to match the upper surface of the third intermediate heat plate 223 with the height of the upper surface of the platform 262. At this time, a space is formed between the upper surface of the third intermediate heat plate 223 and the lower surface of the second intermediate heat plate 222. Then, the pusher 252 pushes the laminated body s on the platform 262 to the space. Next, the process proceeds to step S6. In step S6, the platform fixed plate 232 is raised, the laminated body S on the third intermediate heat 223 is brought into contact with the second intermediate hot plate 222, and then the rod 274 of the hot plate holding member 270 is moved to the retracted position. Two: In between, the hole of i 222 is taken out. Next, the sound plate fixing plate 231 and the plate fixing plate 232 are placed on the table fixing plate 232, and the laminated body s is punched through the hot plate for about five minutes. Next, the process proceeds to step s7. In the second step S7, the platform of the hardened stamping apparatus 200 is fixed at 232. The intermediate hot plate 221 and the hot plate holding member 27 (Fig. 6) are caused. Next, the rod 274 of the hot plate holding member 270 is moved to (2) = the hole H of the first intermediate hot plate 221. Then = lowering the upper surface of the second intermediate hot plate 222 to coincide with the n degree of the platform. At this time, a space is formed between the upper surface of the second intermediate hot plate 222 18 200906606 and the lower surface of the first intermediate hot plate 221 . Then, the pusher bed 252 is driven to move the laminated body S on the platform 262 to the space. Then, the process proceeds to step S8. In step S8, the platform fixed plate 232 is raised, and the laminated body s on the second intermediate hot plate 222 is brought into contact with the first intermediate hot plate 221'. Then, the rod 274 of the hot plate holding member 270 is moved to the retracted position. The hole η of the first intermediate hot plate 221 is taken out. Next, the platform platen 232 is lifted again, and the layered body s is punched through the hot plate by the top plate 231 and the plate plate 232 for about five minutes. Next, the process proceeds to step S9. In step S9, the platform platen 232 of the hardened press apparatus 2 is lowered to match the height of the upper hot plate 211 and the hot plate holding member 270 (sixth figure). Then, the rod 274 of the hot plate holding member 270 is moved to the fixed position to be inserted into the hole H of the upper hot plate 211. then,
议下降使第一中間熱盤221之上面與平 之尚度一致。此時，在第一中間熱盤221之上面與上部 熱盤211之下面之間形成空間。然後，驅動推床之^使 平口 262上之積層體s移動至該空間。接著，前進至步 =驟sio中’使平台定盤232上升，使第一中間敎 層體s抵接於上部熱盤21卜接著’使熱 211、之2之桿W移動至退避位置，自上部熱盤 L Η取出。接著，再使平台定盤232上升， 2 = ί f1與ί台f盤232，透過熱盤將積層體“ i、，勺五为鐘。接著，前進至步驟s 1工。 夕叙二驟sn中，判斷是否反覆執行上述步驟sl〜sl〇 之輸入手動=判斷係根據未顯示於圖 菜者之扣不來進行亦可，或藉由判斷以 19 200906606 α十數器紀錄之反覆次數是否到達預先設定之次數來進 行亦可。反復動作時(步驟S11 :是；)係回到步驟S1，不 反覆動作時（步驟S11 :否）係結束流程。 反覆動作時’再次以所執行之步驟S1，於下部熱盤 2+12與第四中間熱盤224之間之空間導入新的積層體s 時，到此為止在該空間之積層體s係從空間被推出，藉 由二次搬送設備500移送至冷衝壓設備3〇〇。 藉由以上之慣例，一張積層體s係藉由五次，亦即 約二十五分鐘硬化衝壓設備2〇〇加以衝壓。另一方面， 硬化衝壓設備2〇〇係能將導入新的積層體s之同時，將 硬化處理完成之積層體S取出之處理每隔約五分鐘實 鉍。因此，本實施形態中，相對一張積層體s能進行充 分的時間之硬化處理，並且每隔約五分鐘能將積層體送 出至冷衝壓設備300。 此外，本實施形態中’將硬化衝壓設備2〇〇之中間 熱盤之數量設為四個，相對五張積層體能同時進行硬化 處理。然而’本發明並未限定於該構成。例如，硬化處 理所花費的時間變更長時，係使用具備更多中間熱盤之 硬化衝壓設備。 又’本實施形態中’硬化衝壓設備200之熱盤211、 212、221〜224、及成形衝壓設備ι〇〇之熱盤u〇、129 ’ 係藉由設在各熱盤内之電熱加熱器予以加熱，但亦可為 使熱盤内所加熱之熱媒（油等）循環之構成。此外，本實 施形態之電熱加熱器方式係無產生油煙之虞，因此能在 清淨室内使用。 【圖式簡單說明】 20 200906606 第一圖係本發明實施形態之衝壓設備系統之方塊 圖。 第二圖係本發明實施形態之成形熱衝壓設備之側 視圖。 第三圖係第二圖之A-A箭視圖。 第四圖係本發明實施形態之硬化衝壓設備及冷衝 壓設備之側視圖。 第五A圖係第四圖之B-B箭視圖。 第五B圖係表示第四圖之B-B箭視圖中所加之回流 手段。 第六圖係本發明實施形態之硬化衝壓設備之前視 圖。 第七圖係本發明實施形態之一次搬送設備之側視 圖。 第八圖係表示本發明實施形態之硬化衝壓設備之 動作流程。 【主要元件符號說明】 1 衝壓設備系統 100 成形熱衝壓設備 110 固定熱盤 120 可動熱盤 130 頂端平台 132 滾珠螺帽 142,244滚珠螺絲 144,242 馬達 150 真空容器 152 上側部分 21 200906606 154 下側部分 155 襯墊 156 真空泵 158 閥 160 搬送部 162 載體薄膜 164 捲筒 166 退捲筒 200 硬化衝壓設備 202 硬化衝壓設備之設備框 211 上部熱盤 212 下部熱盤 221 第一中間熱盤 222 第二中間熱盤 223 第三中間熱盤 224 第四中間熱盤 231 頂端定盤 232 平台定盤 246 螺帽 252 推床 262 平台 270 熱盤保持手段(構件） 272 油壓缸 274 桿 276 固定支柱 280 回流手段 300 冷衝壓設備 322 上部冷卻盤 324 下部冷卻盤 22 200906606 400 —次搬送設備 410 導軌 420 可動框 430 真空墊 500 二次搬送設備 600 控制設備 S 積層體 Η 孔 Ρ, Ρ’搬送用板The lowering of the first intermediate hot plate 221 is consistent with the flatness. At this time, a space is formed between the upper surface of the first intermediate hot plate 221 and the lower surface of the upper hot plate 211. Then, the pusher bed is driven to move the laminated body s on the flat opening 262 to the space. Then, proceeding to step = step sio, 'the platform platen 232 is raised, the first intermediate layer body s is brought into contact with the upper heat plate 21, and then the rods W of the heat 211, 2 are moved to the retracted position. The upper hot plate L is removed. Then, the platform fixed plate 232 is raised again, 2 = ί f1 and 台 table f disk 232, and the laminated body "i, the spoon five is the clock through the hot plate. Then, proceed to step s 1 work. In the determination, whether to repeatedly perform the above steps sl~sl〇 input manual=determination may be performed according to the deduction of the person not shown in the figure, or by judging whether the number of repetitions of the record of 19 200906606 α-number is reached The number of times may be set in advance. When the operation is repeated (step S11: YES;), the process returns to step S1, and when the operation is not repeated (step S11: NO), the flow ends. When the operation is repeated, the step S1 is executed again. When a new laminated body s is introduced into the space between the lower hot plate 2+12 and the fourth intermediate hot plate 224, the laminated body s in the space is pushed out from the space until the secondary transfer device 500 is pushed out. Transfer to cold stamping equipment 3. By the above convention, a laminated body s is stamped by five times, that is, about twenty-five minutes of hardening stamping equipment. On the other hand, hardened stamping equipment 2 The lanthanide system will be able to introduce a new layered body while The process of taking out the laminated body S after the completion of the treatment is performed every five minutes. Therefore, in the present embodiment, the laminated body s can be hardened for a sufficient period of time, and the laminated body can be formed every about five minutes. In the present embodiment, the number of the intermediate hot plates of the hardened press equipment 2 is set to four, and the five laminated bodies can be simultaneously hardened. However, the present invention is not limited to For example, when the time required for the hardening treatment is changed for a long period of time, a hardened press apparatus having a plurality of intermediate hot plates is used. In the present embodiment, the hot plates 211, 212, 221 to 224 of the hardened press apparatus 200 are used. And the forming press equipment 〇〇 〇〇 hot plate u〇, 129 ' is heated by an electric heater installed in each hot plate, but can also circulate the heat medium (oil, etc.) heated in the hot plate In addition, since the electrothermal heater system of the present embodiment does not generate soot, it can be used in a clean room. [Simplified description of the drawings] 20 200906606 The first embodiment is an embodiment of the present invention. A block diagram of a stamping equipment system. The second drawing is a side view of a forming hot stamping apparatus according to an embodiment of the present invention. The third drawing is an AA arrow view of the second drawing. The fourth drawing is a hardening stamping apparatus and a cold embodiment of the present invention. A side view of the stamping apparatus. Fig. 5A is a BB arrow view of the fourth figure. Fig. 5B is a view showing a reflow means added to the BB arrow view of the fourth figure. The sixth figure is a hardening press apparatus of an embodiment of the present invention. The seventh embodiment is a side view of a primary conveying apparatus according to an embodiment of the present invention. The eighth drawing shows the operation flow of the hardening press apparatus according to the embodiment of the present invention. [Description of Main Components] 1 Stamping Equipment System 100 Forming Hot Stamping Device 110 Fixed hot plate 120 Movable hot plate 130 Top platform 132 Ball nut 142, 244 Ball screw 144, 242 Motor 150 Vacuum container 152 Upper side portion 21 200906606 154 Lower side portion 155 Pad 156 Vacuum pump 158 Valve 160 Transfer portion 162 Carrier film 164 Reel 166 Unwinding Cartridge 200 Hardening Stamping Equipment 202 Equipment Box 211 for Hardening Stamping Equipment Upper Hot Plate 212 Hot plate 221 First intermediate hot plate 222 Second intermediate hot plate 223 Third intermediate hot plate 224 Fourth intermediate hot plate 231 Top plate 232 Platform plate 246 Nut 252 Push bed 262 Platform 270 Hot plate holding means (component 272 Hydraulic cylinder 274 Rod 276 Fixed post 280 Reflow means 300 Cold stamping equipment 322 Upper cooling plate 324 Lower cooling plate 22 200906606 400 - Secondary transfer device 410 Guide rail 420 Moving frame 430 Vacuum pad 500 Secondary transfer device 600 Control device S Stacking Body Ρ hole, Ρ 'transport plate