200815953 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種自動多焦點對準（auto multi-focus align)者，更具體而言，係關於一種在利用 有探測器（Probe )之大型平板顯示器（FPD : Flat Panel Display)系統中進行精密對準之自動多焦點對準裝置及 其方法。 【先前技術】 通常，在利用探測器測定液晶基板時，為使探測器 之探針與液晶基板之電極準確地接觸，必須準確地對準 (alignment)液晶基板之位置。 先前，多焦點方式之對準系統係利用使光路不同而 使聚焦位置變化之WD ( Working Distance，動作距離） 轉換裝置及CCD ( Charge Coupled Device，感光輕合元 件）攝影機來進行多焦點對準的。 亦即，藉由在光學上使光路（PASS)不同而使焦點 位置變化，其意味著藉由光學系統來確定WD。 因此，於利用先前之光學系統而實現多焦點對準 時，由於係藉由光學系統來確定WD，因此缺乏靈活性， 必須採用特性多樣之複數個系統，這些系統有因透鏡間 之器具上之平坦誤差而導致焦點位置難以準確地對 準、以及必須僅使用訂製之非普通遠心透鏡之缺點。 又，由於近年來平板顯示器之大型化，在利用有探 5 200815953 測器之系統中要求精密之對準系統，但就大型化所帶來 之檢查系統之問題而言，難以根據英对及機種之變更來 進行探測器組塊（Probe Block)之更換，並且由於大型 英吋而導致探測器組塊之數量急遽增加，裝備之更換品 大型且較重，故而無法對應尺寸來進行更換，而難以藉 由先前之利用有光學系統之多焦點對準系統來對應如 此之平板顯示器之大型化所帶來之檢查系統之問題。 【發明内容】 因此，本發明係為了解決上述先前之多焦點對準系 統，所產生之諸般問題’以實現大型化之平板顯示器檢 査系統之精密對準。 X之目的在於提供一種在利用有探測| (Probe) (FVD： Flat Panel Display 系統中進行精密對準之自動多焦點對準裝置及其方法 1. 穿置另一目的在於提供一種自動多焦點對譯 ^之自玻璃對準以外，亦可實現針對探濟 ΓΛ r 準 。本發明也可對應根據應用200815953 IX. Description of the Invention: [Technical Field] The present invention relates to an auto multi-focus aligner, and more particularly to a large-scale use of a probe (Probe) An automatic multi-focus aligning device and method thereof for precise alignment in a flat panel display (FPD) system. [Prior Art] In general, when the liquid crystal substrate is measured by a detector, in order to accurately contact the probe of the probe with the electrode of the liquid crystal substrate, it is necessary to accurately align the position of the liquid crystal substrate. Conventionally, the multifocal alignment system performs multifocal alignment using a WD (Working Distance) conversion device and a CCD (Charge Coupled Device) camera that change the focus position by different optical paths. . That is, the focus position is changed by optically making the optical path (PASS) different, which means that the WD is determined by the optical system. Therefore, when multifocal alignment is achieved by using the prior optical system, since the WD is determined by the optical system, there is a lack of flexibility, and a plurality of systems having various characteristics must be employed, which are due to the flatness of the instruments between the lenses. The error results in difficulty in accurately aligning the focus position and the necessity of using only custom non-ordinary telecentric lenses. In addition, due to the large-scale flat panel display in recent years, a precise alignment system is required in a system using the probe 5200815953. However, it is difficult to check the system due to the large-scale inspection system. The change is made to replace the probe block, and the number of detector blocks is rapidly increased due to the large size of the inch. The replacement of the equipment is large and heavy, so it is difficult to replace the size. The problem of the inspection system brought about by the enlargement of such a flat panel display has been met by the prior multifocal alignment system using an optical system. SUMMARY OF THE INVENTION Accordingly, the present invention has been made in order to solve the above-described problems of the above-described multifocal alignment system, in order to achieve precise alignment of a large-sized flat panel display inspection system. The purpose of X is to provide an automatic multifocal alignment device and its method for precise alignment in a FVD: Flat Panel Display system. 1. Another purpose is to provide an automatic multifocal pair. In addition to the glass alignment, it can also be achieved for the purpose of exploration. The invention can also be applied according to the application.
Pi^cat叫而轉換之娜，可根據χ、γ平面:入 方位視％ (F〇V : Field Of View)之繳几、 王 變化而進行自動卞敗 夂及對準鍵位置 最小化要求而進行自動計算，並且可自之 及模式以建立資料庫。 自動對應多種尺寸 為了達成上述目的，本發明之「自動多焦點對準裝 200815953 置」之第一實施例包含： 、多個CCD攝影機’其等拍攝覆蓋對準標記之全方 位視場（FQV)的對準用黑白影像； 次主機’其具有分別對應上述多個CCD攝影機之位 置育訊’並且根據動作變化及過程變化而自動控制對 攝影機之位置及聚焦之高度； 攝難置控制部，其根據由上述主機所提供之攝 之位置歧，而使上述多個對準用CCD攝影機移 對準=獲取部，其獲取由上述⑽攝影機所拍攝之 部’其_自上述影像獲取部所提取 準衫像，獲得對準位置資訊； 1 馬達㈣部，其㈣上述f彡像㈣ 準位置資訊’產生馬達控制信號;以& “出之對 馬達，其對應由上述馬達控制部所產生之馬達控 、=號’使上述多個CCD攝影機選擇性地上下移^、 進行精密對準。 ’以 ^上述第-實施狀賴在於，影像獲取部 4訊框記憶體，其儲存自上述CCD 3内 準影像中獲取之對準影像。 y/、自攝之對 上述第-實施狀影像mf料上料 所獲取之多個對準影像中之至少兩個以上進行組合^ 200815953 獲得對準位置資訊。 擇性ίίΓ實施例之馬達係可使上…攝影機選 擇性地上下精密移動之步進馬達。 ^機透 根據如上所述之本發之一 個以上系統，可實現精密對準；：二，错由使用兩 藉由採用馬達，可對應多隹點，：且山、二3Mm以上）， 光學系統，而可使㈣^ 且_之特殊 因此之遠心透鏡（TeleCe耐 在開發時間，之限制、情形相比， 而當採用多個系統時，亦且;=广方面有利。 受器具上之平挺… 可分別控制各個位置，不 點。、、之影響，而可實現精密聚焦之優 =争亦具有可藉由主機程式而實現焦點位置之自動 :更，可容易地對應*〜變化及構造變更，= "自㈣準讀合構造探卿线。本發明 叶有之二聚焦系統及三聚焦系統，並於系統設 口十日守&供靈活性，玉金 作，從而可提高生產Γ統相比可自動構成所有動 :、、、—達成上述目的，本發明之「自動多焦點對準裝 置」之第二實施例包含： 、多個CCD攝影機’其拍攝覆蓋對準標記之全方位 視場（FOV)的對準用黑白影像； 主Ί具有分別針對上述多個ccd攝影機之位 貝訊’亚且根據動作變化及過程變化而自動控制對準 200815953 攝影機之位置及聚焦（WD)之高度； 攝影機位置控制部，其根據由上述主機所提供之攝 衫機位置貧訊，而使上述多個對準用⑽攝影機移動; 對準=獲取部，其獲取由上述咖攝f彡機所拍攝之 影_讀部，其㈣自上料像餘料提取之 準衫像’獲得對準位置資訊； =達控制部，其根據上述影像㈣部·讀出之對 率位置貝訊，產生馬達控制信號； 。馬達’其對應由上述馬達控制部所產生之 號，使上述多個CCD攝影機選擇性妯卜 工^ 行精密對準； ^機、擇性地上下移動，以進 對準制部’其根據由上述影像判讀部所判讀出之 置貝汛，產生平臺控制信號；以及 臺㈣ 臺，其對應由上述平臺控制部所產生之平 ，使上述多_ CCD攝影機選擇性地左右移 動’以進行精密對準。 憶體上自實::]:Γ象獲取部更包…^ 獲取之對= 攝影機所拍攝之對準影像中 所獲二第::::像之:_ 獲得對準位置至少兩個以上進行組合，而 200815953 上述第二實_之馬達為步進馬達。 個以=如上所述之本發明之第二實施例，藉由使用兩 们以上糸統，可實現精密對準 藓由救田i、去 4 L又· μιη以上)， 馬達，可對應多焦點，並且無需對準用之特殊 L“、、先’而可使用通常所用之遠心透鏡㈤e C_ic 二，因此與❹既有之特殊光學㈣之情形相比， = l*WD之限制、空間限制、費用方面有利。 為：木夕個系統時’亦具有可分別控制各個位置，不 之平L誤差等之影響，而可實現精密聚焦之優 ^又，！具有可^由主機程式而實現錢位置之自動 又I奋易地對應W〇rk SamP變化及構造變更，也可 :用於&心自動對準及複合構造探測器系統。本發明 計有之—聚焦系統及三聚焦系統，並於系統設 二、线，且與既有系統相比可自動構成所有動 作，從而可提高生產性。 法 為了達成上述目的，本發明之「自動多焦點對準方 包含： =認可否變更動作（WORK)幅度； 上述Ϊ認之結果為可變更動作幅度時，根據系統 、、、。動计异對準攝影機之位置變更值，以變更對準攝 影機之位置； ^ _於變更上述對準攝影機之位置之後或者未變更動 作幅度％ ’自對準攝影機獲取影像並進行財、判讀， 200815953 算出對準位置值；以及 根據上述算出之對康办¥ ^ 對準位置值而使超精密平臺移 動，以進行對準。 至秒 上述「自動多焦點對準方法 ._ _ ^ ® ^ φ 」之^异對準攝影機之 哭、二二驟中，所根據之系統結構須考慮探測 料ίΓί 、對準鍵、對準台、虛擬標記、 /、^…構、攝影機系統等系統構成要素。 上述自動多焦點對準方法」之對準位置值之計算 之步驟中，係將所獲取之多個對準影像中之至少兩個: 上進行組合而計算對準位置資訊。 根據本發明，藉由使用兩個以上系統 對準（精密度：3_以上），葬由搡用民、圭見精在 上；错由知用馬達，可對應多 —m無需對準用之特殊光學系統，而可使用通常 斤用之m心透鏡（TeleCentdeLens)，因此與使用既有 :特殊光學系統之情形相比，在開發時間、·之限制、 工間限制、費用方面有利。而當採用多個系統時，亦具 有可分別控制各個位置，不受器具上之平坦誤差等之影 響，而可實覌精密聚焦之優點。 〜 又’亦具有可藉由主機程式而實現焦點位置之 又，可容易地對應Work Samp變化及構造變更。本發 月也可自動對應包含目標標記（Target Mark)於2D上 j位置變更在内之聚焦位置變化。本發明可應用於探測 杰自動對準及複合構造探測器系統 ，可取代既有之二聚 11 200815953 焦系統及三聚;t系統’並㈣統設計時提供f活性，且 與既有系統相比可自動構成所有動作，從而可提高生產 性0 【實施方式】 以下藉由隨附圖<，對本發明之較佳實施例詳細說 明如下。在說明本發明之前預先陳明，#判斷為與相關 周知功能或結構有關之具體說明會多餘地使本發明之 要旨不明確時，則省略與之相關之詳細說明。 第1圖係本發明之「自動多焦點對準裝置」之第一 實，例之概略結構w，第2 w係「自動多焦點對準震置」 之第一實施例之詳細結構圖。 ，處’符號m、122、121 + N係表示作為用以拍 攝覆盍對準標記之全方位視場（FQv)之對準用黑白影 像之對準攝影機的多個CCD攝影機符號⑺係表示^ 有分別針對上述多個CCD攝影機121〜121 + N之位置 資訊，並且㈣動作變化及過程變化而自龍制對準攝 影機之位置及聚焦之高度的主機’符號18〇係表示根據 由上述主機17G所提供之攝影機之位置資訊，而使上述 多個對準用⑽攝影機121〜121 + _動之攝影機位 置控制部。 符號140係表示用以獲取由上述ccd 館存自上述CCD攝影機所拍攝之對準影像★獲取之對 12 200815953 準影像的内部訊框記憶體。 付遽15 0係表示判讀自旦 之對準影像㈣得對㈣=讀縣部刚所提取 是，i將由上、貧之影像判讀部。較佳的 ^ 取部所獲得之 至少兩個以上進杆έ日人野半〜像肀之 上進仃組合，而獲得對準位 符號160係表干妒垆山L , 貝Λ 仔表不根據由上述影像判讀 出之對準位置資訊而產生卩15G所仏貝 部。狄嘹11Λ / 座生馬達控制彳自號之馬達控制Pi^cat is called the conversion of the Na, according to the χ, γ plane: Into the orientation of the % (F〇V: Field Of View), the automatic change and the alignment key position minimum requirements Automated calculations are made and patterns can be used to build a database. Automatically corresponding to a plurality of sizes In order to achieve the above object, the first embodiment of the "automatic multifocal alignment device 200815953" of the present invention comprises: omnidirectional field of view (FQV) of a plurality of CCD cameras Aligning with a black-and-white image; the secondary host 'having a positional communication corresponding to the plurality of CCD cameras respectively> and automatically controlling the height of the position and focus of the camera according to the movement change and the process change; the camera control unit is based on Positioning the plurality of alignment CCD cameras by the above-mentioned host, and aligning the plurality of alignment CCD cameras with the acquisition unit, and acquiring the portion captured by the camera (10), which is extracted from the image acquisition unit Obtaining the position information; 1 motor (four), (4) the above-mentioned image (four) quasi-position information 'generating motor control signal; to & "out of the motor, corresponding to the motor control generated by the motor control unit, The 'number' allows the plurality of CCD cameras to be selectively moved up and down to perform precise alignment. The above-described first embodiment is based on the image acquisition unit 4 frame. a memory that stores the aligned image obtained from the quasi-image in the CCD 3. y/, at least two of the plurality of aligned images obtained by loading the image of the first-implement image mf Perform the combination ^ 200815953 to obtain the alignment position information. The motor of the embodiment can be used to selectively move the stepper motor up and down precisely. The machine is based on one or more systems of the present invention as described above. To achieve precise alignment;: Second, the use of two by using a motor, can correspond to multiple points, and: mountain, two more than 3Mm), optical system, and can make (four) ^ and _ special special telecentric lens (TeleCe Resistant to development time, limitations, situations, and when using multiple systems, also; = wide aspect is beneficial. By the flat on the appliance ... can control each position separately, not point, ,, the impact, and The advantage of precision focusing can be achieved. The content of the focus position can be automatically activated by the host program: more, it can easily correspond to *~changes and structural changes, = "from (four) quasi-reading structure exploration line. The invention Ye Yizhi The coke system and the three-focus system are provided in the system for ten days of observing & for flexibility, jade gold, so that the production system can automatically improve all the movements compared to the production system: ,, - to achieve the above purpose, the present invention A second embodiment of the "automatic multi-focus aligning device" includes: a plurality of CCD cameras that capture an omnidirectional field of view (FOV) alignment black-and-white image covering the alignment mark; the main Ί has a plurality of ccd for the plurality of ccd The position of the camera is automatically controlled by the position and focus (WD) of the 200815953 camera according to the change of motion and process; the camera position control unit is based on the position of the camera provided by the host. And the plurality of alignment (10) cameras are moved; the alignment=acquisition portion acquires the shadow-reading portion photographed by the above-mentioned coffee machine, and (4) obtains the pattern from the top-loading image Aligning the position information; = reaching the control unit, which generates a motor control signal based on the position (4) of the image (4) and the reading position of the image. The motor 'corresponds to the number generated by the motor control unit, so that the plurality of CCD cameras are selectively aligned precisely; the machine moves up and down selectively to advance the alignment portion' The image interpretation unit determines that the platform control signal is generated, and the platform control signal is generated, and the table (four) is corresponding to the level generated by the platform control unit, and the multi-CCD camera is selectively moved left and right to perform precise pairing. quasi. Recalling the self-reality::]: The image acquisition department is more packaged...^ The pair is obtained = the two images obtained in the alignment image captured by the camera:::: like: _ Get at least two or more alignment positions Combination, and 200815953 The second real motor is a stepping motor. According to the second embodiment of the present invention as described above, by using two or more systems, precise alignment can be achieved by saving the field i, going to 4 L and μm or more, the motor can correspond to the multi-focus. And there is no need to align the special L ", first" to use the commonly used telecentric lens (5) e C_ic II, so compared with the case of the special optical (4), = l * WD limit, space limit, cost In terms of advantages, it is: in the case of a wooden system, it also has the effect of separately controlling each position, not affecting the L error, etc., and can achieve the precision of the focus, and has the ability to realize the position of the money by the host program. Automatically and in response to W〇rk SamP changes and structural changes, can also be used for & cardiac automatic alignment and composite structure detector system. The present invention has a focus system and a three-focus system, and the system By setting two lines, and automatically constructing all the actions compared with the existing system, the productivity can be improved. In order to achieve the above object, the "automatic multifocal alignment side of the present invention includes: = approval no change action (WORK) Amplitude When the result of the change is that the operation range can be changed, the position of the camera is changed according to the position change value of the system, the camera, or the camera; ^ _ after changing the position of the camera or not changed Action amplitude % 'The self-aligned camera acquires the image and performs the financial and interpretation. In 200815953, the alignment position value is calculated; and the ultra-precision platform is moved according to the above-mentioned calculated position value for the position of the CAM. The second "automatic multifocal alignment method._ _ ^ ® ^ φ " is the same as the crying of the camera, the second and second steps, the system structure to be considered must consider the probe ίΓί, the alignment key, the alignment table, System components such as virtual tags, /, ^..., camera systems. In the step of calculating the alignment position value of the automatic multifocal alignment method described above, at least two of the acquired plurality of alignment images are combined to calculate the alignment position information. According to the present invention, by using two or more systems for alignment (precision: 3_ or more), the funeral is used by the people, and the others are in the upper; the wrong motor is used, and the multi-m is not required to be used for alignment. The optical system can be used with a conventionally used m-core lens (TeleCentdeLens), and thus is advantageous in terms of development time, limitations, inter-work restrictions, and costs as compared with the case where a special optical system is used. When multiple systems are used, it is also possible to control each position separately, without being affected by flat errors on the appliance, and the advantages of precise focusing can be achieved. ~ also has a focus position that can be achieved by the host program, and can easily respond to Work Samp changes and structural changes. This month's month can also automatically respond to changes in the focus position including the target mark (Target Mark) on the 2D j position change. The invention can be applied to the detection of the automatic alignment and composite structure detector system, which can replace the existing dimerization 11 200815953 coke system and trimerization; the t system and the (four) system design provide f activity, and the existing system phase The ratio can automatically constitute all the actions, thereby improving the productivity. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the description of the present invention, it is to be noted that the detailed description relating to the related functions or the structure will be unnecessarily obscured by the detailed description of the present invention. Fig. 1 is a detailed structural view showing a first embodiment of the "automatic multifocal alignment device" of the present invention, a schematic configuration w, and a second embodiment of the "automatic multifocal alignment". , where the symbols m, 122, 121 + N indicate a plurality of CCD camera symbols (7) that are used as alignment cameras for aligning the omnidirectional field of view (FQv) of the overlay alignment marks. For the position information of the plurality of CCD cameras 121 to 121 + N, and (4) the change of the operation and the process change, the host 'symbol 18' indicating the position of the camera and the height of the focus from the dragon is indicated by the host 17G. The position information of the camera is provided, and the plurality of aligning cameras (10) 121 to 121 + _ move the camera position control unit. Reference numeral 140 denotes an internal frame memory for acquiring a pair of 12 200815953 pseudo images obtained by the ccd library stored in the aligned image captured by the CCD camera.付遽15 0 is the interpretation of the self-identified image (4). (4) = Read by the county department. Yes, i will be from the upper and the poor image interpretation department. Preferably, at least two of the rods obtained by the picking section are in the middle of the έ 野 〜 〜 肀 肀 肀 肀 肀 肀 肀 肀 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准The alignment position information read out from the above image is used to generate the 卩15G. Di 嘹 11Λ / seat motor control 彳 self-numbered motor control
’糸表不對應由上述馬達控制部160所產生 备 號而使上述多㈤CCD攝影機選擇性地上下移 精密對準之馬達，較佳的是，其具備可使上述 CC'攝影機選擇性地上下精密移動之步進馬達。 符號 131 係表示 LED (light_emitting di〇de，發光 二極體）照明，符號132係表示遠心透鏡。 如上所述而構成之本發明之較佳第一實施例中，主 機Π0具有針對各個對準攝影機121〜12l + N2位置資 訊，並且將根據動作（WORK)變化及過程變化而自動 控制對準攝影機之位置及聚焦（WD)之高度之控制資 訊提供給攝影機位置控制部180,利用如此之控制資 訊’藉由攝影機位置控制部18〇來自動控制Ccd攝影 機121〜121 + N之位置。 藉由上述動作，對準攝影機即CCD攝影機移動至 對準位置，但由於此時CCD攝影機之控制並非精密控 制，故而與其說是準確之對準位置，不如將其視為接近 13 200815953 封平位置之位置。 影機移動至對=^進行精密之控制動作，以使對準攝 亦即’影像獲取部14〇# + N所拍攝 ：40獲取由對準攝影機⑵〜⑵ 體中，再藉由影 用影像，並儲存至内部訊框記憶 之對準用fM象谁 5〇將儲存於該訊框記憶體中 換而3=倾合’而算出準確之對準位置資訊。 個對準部15G㈣存於餘記憶體中之多 影像進行組合，㈣同之對準攝影機之 二 =攝，機%對::置,訊’馬達控制部 制麻* 攝機精密地移動至對準位置之控 ⑽進行動:對應如此之控制動作，馬達亦即步進馬達 動至對準位置’。使對準攝影機（CCD攝影機）準確地移 使用用步進馬達11G使對準攝影機移動可直接 絲、絲等之輪送方法 此省略詳細說明。 心万忐，因 弟3 ®係本發明之「自動多焦點對準裝 ⑼例之概略結構圖，第弟一 之第二實施例之詳細結構圖。 一磧準裝置」 攝覆=準==、232、231+N係表示作為用以拍 十卓軚圮之全方位視場（F0V)之對準用黑白影 14 200815953 像之對準攝影機的CCD攝影機，符號3〇〇係表示具有 分別針對上述多個CCD攝影機231〜231 + N2位置資 Λ並且根據動作變化及過程變化而自動控制對準攝影 機之位置及聚焦（WD)之高度的主機（HOST)，符號 ::係表示根據由上述主機3〇〇所提供之攝影機之位： 貝訊’而使上述多個對準用CCD攝影機231〜23ι + Ν 矛夕動之攝影機位置控制部。 又’符號25G係表示用以獲取由上述⑽攝影機 =1〜231 + N所拍攝之對準影像之影像獲取部，其更包 自上述CCD攝影機所拍攝之對準影像中獲取之 子準影像的内部訊框記憶體。 又’符號260係表示判讀自上述影像獲取部⑽所 好的!1對準影像而獲得對準位置資訊之影像判讀部，較 中由上述影像獲取部所獲得之多個對準影像 夕兩個以上進行組合，而獲得對準位置資訊。 又’符號27G係表示根據由上述 判讀出之對進办¥次 七貝⑷260所 之對丰位置魏而產生馬達控制信 生】二符號2 2 0係表示對應由上述馬達控制部咖所： :控制信號而使上述多個CCD攝 ㈣以進行精密對準之馬達，較佳的是，二二 述CCD攝影機遴摆从a L ，、具備可使上 5 精密移動之步進馬達。 付號280係表示根據由上 + 判讀出之對準位置資訊而產生平、臺二:匈^ 卞至控制信號之平臺控 15 200815953 制邛’/符唬210係表示對應由上述平臺控制部28〇所產 生之平$控制k號而使上述多個CCD攝影機選擇性地 上下私動以進行精密對準之超精密平臺。 符號241係表示led照明，符號242係表示遠心 透鏡。 如上所述而構成之本發明之較佳第二實施例中，主 機300具有針對各個對準攝㈣231〜別以之位置資 訊，並且將根據動作（㈣RK)變化及過程變化而自動 控:對準攝影機之位置及聚焦（wd)之高度之控制資 訊提^給攝影機位置控制部29〇，利用如此之控制資 Λ ’藉由攝影機位置控岳丨丨 機加〜231 + Ν之位置心290來自動控制C⑶攝影 、…藉由上4動作，對準攝景彡機即CCD攝影機移動至 =二由!此時CCD攝影機咖 對準位置之確之對準位置’不如將其視為接近 因此，必須再次進行精密之控 影機移動至對準位置。 動作以使對準攝 因此’影像獲取部25G獲取 + N所拍攝之黑 +攝办機231〜231 體中，再藉由影像#|丨^ 儲存至内部訊框記憶 之對準用影像進行#人料於該_記憶體中 換而言之，影像二:；而鼻出準確之對準位置資訊。 像^部遍將儲存於難記憶體令之多 16 200815953 個對準用影像中的至少兩個以上 影像進行組合，而獲取對準位置資訊。攝影機之 根據如上所述而獲得之對準 進行用以使對準攝& 、§ ，馬達控制部 制動作，並且對^^ 動至對準位置之控 ，進行動作使㈣作，馬達切步進馬達 動至對準位置。 影機（CCD攝影機）準確地移 使用月bf利用步進馬達22G使對準攝影機移動可直接 使用周知之利料條及小絲、 = 此省略詳細說明。 予乏翰达方法，因 讀出臺控制部280根據由影像判讀部⑽所判 由如此 ^訊，使超精密平臺210左右移動，藉 之超精密平臺210之移動，可實現CCD攝旦^ 之精密對準。此處可知，由於 ：二， 史狀认知4 辦心機1係固定 :起精密平臺210上，故而其 之移動方向相同之方向上移動。 十至210 第5=表示本發明之自動多焦點對準方法之流程 圖S表不步驟（Step )。 如此處所示’於步驟S101中，確認可否變更動作 /:〇RK)幅度，當可變更動作幅度時，移至步驟S103， 根據糸統結構而自料算對準攝職之位置變更值。此 處’為了計算對钱影機之位置變更值，須考慮探測器 (p叫探測器基底(Probe base)、接觸(〜_)、 17 200815953 對準鍵（AHgnkey)、對準台⑺㈤纽小虛擬標記 (Virtua〗 Mark )、測點結構、攝影機系統等系統構成要 素，而自動計算攝影機之位置變更值。 繼而，於步驟S105中，利用上述算出之對準攝影 機之位置變更值，來變更對準攝影機之位置。 於變更對準攝影機之位置之後或者未變更動作幅 度時，如步驟S1G7般’自對準攝影機獲取對準影像， 再於步驟S1G9中，將上述獲取之對準影像儲存於内部 訊框記憶體中，於步驟Slu中，判讀儲存於上述内部 訊框記憶體中之對準影像而算出對準位置值。此處，對 準位置值之計算，係賴存於訊框記，It體巾之多個對準 用影像中的至少兩個以上不同之對準攝影機之影像進 行組合，而計算出對準位置資訊。 繼而，於步驟S113及步驟8115中，根據上述算出 之對準位置值，使超精密平臺移動以進行對準。 本發明並不限定於上述特定之較佳實施例，在不脫 離申請專·圍巾所申請之本發明之要旨之前提下，具 有本發明所屬之技術領域之通常知識者當皆可實施多、 種變形，且如此之變更一、 又文叼屬於申睛專利範圍所記載之範 【圖式簡單說明】 一實施 例發明之自動多焦點_置之第 18 200815953 第2圖係本發明之自動多焦點對準裝置之第一實施 例之詳細結構圖。 第3圖係本發明之自動多焦點對準裝置之第二實施 例之概略結構圖。 第4圖係本發明之自動多焦點對準裝置之第二實施 例之詳細結構圖。 第5圖係表示本發明之自動多焦點對準方法之流程 圖。 【主要元件符號說明】 121 > 231 CCD 攝影機 110 、 220 步進馬達 140 、 250 影像獲取部 150 、 260 影像判讀部 170 ^ 270 馬達控制部 210 超精密平臺 280 平臺控制部 19The 糸 不 不 不 不 选择性 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 选择性 马达 马达 马达 CC CC CC CC CC Moving stepper motor. Symbol 131 denotes an LED (light_emitting diode) illumination, and symbol 132 denotes a telecentric lens. In the preferred first embodiment of the present invention constructed as described above, the host Π0 has position information for each of the alignment cameras 121 to 12l + N2, and the alignment camera will be automatically controlled according to WORK changes and process changes. The control information of the position and the height of the focus (WD) is supplied to the camera position control unit 180, and the position of the Ccd cameras 121 to 121 + N is automatically controlled by the camera position control unit 18 using such control information. By the above operation, the CCD camera is moved to the alignment position, but since the control of the CCD camera is not precisely controlled at this time, it is not so close to the position of 13 CCD 15 The location. The camera moves to the opposite =^ to perform precise control actions so that the alignment is also taken by the 'image acquisition unit 14〇# + N: 40 is acquired by the alignment camera (2) to (2), and then by the image And storing the alignment to the internal frame memory using fM like 5〇 will be stored in the frame memory and 3=tiling' to calculate accurate alignment position information. The aligning part 15G(4) combines the multiple images stored in the remaining memory, (4) the same as the camera 2 = camera, the machine % pair:: set, the motor control unit produces the hemp* camera moves precisely to the pair The control of the quasi-position (10) is carried out: corresponding to such a control action, the motor, that is, the stepping motor is moved to the aligned position'. The alignment camera (CCD camera) is accurately moved. The method of moving the alignment camera by the stepping motor 11G to directly move the wire, the wire, etc., will not be described in detail. In the heart of the world, the brother 3 ® is the schematic structure diagram of the "automatic multifocal alignment device (9) example of the present invention, and the detailed structure diagram of the second embodiment of the second brother. "One device" Photograph = quasi == 232, 231+N denotes a CCD camera which is used as an alignment camera for omnidirectional field of view (F0V) for the omnidirectional field of view (F0V), and the symbol 3 表示 indicates that it has A plurality of CCD cameras 231 to 231 + N2 position resources and automatically control a host (HOST) that aligns the position of the camera and the height of the focus (WD) according to the change of the motion and the process, the symbol: indicates that the host 3 is摄影The position of the camera provided by 〇〇 贝 贝 而 而 而 而 上述 上述 上述 上述 上述 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 对准 231 231 231 231 231 。 。 。 Further, the symbol 25G indicates an image acquiring unit for acquiring an aligned image captured by the above (10) camera = 1 to 231 + N, which is further included in the inside of the sub-image obtained from the aligned image captured by the CCD camera. Frame memory. Further, the symbol 260 indicates an image interpretation unit that obtains the alignment position information obtained by the image acquisition unit (10) and obtains the alignment position information, and the plurality of alignment images obtained by the image acquisition unit are two. The above is combined to obtain alignment information. Further, the symbol 27G indicates that the motor control signal is generated based on the position of the opposite of the position of the seventh-order (4) 260, which is read by the above-mentioned judgment. The second symbol 2 2 0 indicates that the motor control unit corresponds to: It is preferable that the plurality of CCDs are photographed (four) to precisely align the motor. Preferably, the CCD camera is tilted from a L and has a stepping motor that can precisely move the upper 5 . The payout number 280 indicates that the platform control 15 is generated according to the alignment position information read by the upper + judgment: the Hungarian ^ 卞 to the control signal 15 200815953 邛 ' / 唬 210 indicates that the platform control unit 28 corresponds to The ultra-precision platform in which the above-mentioned plurality of CCD cameras are selectively moved up and down to perform precise alignment with the flat k control k number generated. Symbol 241 represents LED illumination and symbol 242 represents telecentric lens. In a preferred second embodiment of the present invention constructed as described above, the host computer 300 has position information for each of the alignments (23) 231 and will be automatically controlled according to the action ((iv) RK) change and process variation: alignment The control information of the position of the camera and the height of the focus (wd) is given to the camera position control unit 29, using such a control resource 'automatically by the camera position control Yuelu machine plus ~231 + 位置 position heart 290 Control C (3) photography, ... by the action of the upper 4, aligning the camera, that is, the CCD camera moves to = two by! At this time, the CCD camera is aligned with the position of the position is not as close as it is, therefore, Perform the precision camera again to the aligned position. The action is such that the image capturing unit 25G acquires the black + camera 231 to 231 captured by + N, and then stores the image to the alignment of the internal frame memory by the image #|丨^# In the _memory, in other words, the image 2:; and the nose is accurately aligned with the position information. The image will be stored in a difficult memory. 16 200815953 At least two or more images in the alignment image are combined to obtain the alignment information. The alignment of the camera according to the above is performed to make the alignment control, the §, the motor control unit operate, and the control of the alignment position is performed, and the operation is performed (4), and the motor is stepped. The motor moves to the aligned position. The camera (CCD camera) is accurately moved. Using the stepping motor 22G to move the alignment camera by using the stepper motor 22G, it is possible to directly use the well-known strip and the small wire, and the detailed description is omitted. According to the method of the reading stage control unit 280, the ultra-precision platform 210 is moved to the left and right according to the judgment by the image interpretation unit (10), and the movement of the ultra-precision platform 210 can realize the precision of the CCD camera. alignment. Here, it can be seen that, because of the second, the history of the heart machine 1 is fixed: the precision platform 210 is moved, so that the movement direction is the same. Ten to 210 5= indicates the flow of the automatic multifocal alignment method of the present invention. Fig. S shows the step (Step). As shown here, in step S101, it is confirmed whether or not the action /: 〇 RK) amplitude can be changed. When the operation range can be changed, the process proceeds to step S103, and the position change value of the alignment job is calculated based on the system configuration. Here, in order to calculate the position change value of the money camera, the detector must be considered (p called probe base, contact (~_), 17 200815953 alignment key (AHgnkey), alignment table (7) (5) The system component such as the virtual mark (Virtua) Mark, the measuring point structure, and the camera system is automatically calculated, and the position change value of the camera is automatically calculated. Then, in step S105, the position change value of the aligned camera is used to change the pair. Position of the camera: After changing the position of the camera or changing the range of motion, the self-aligning camera acquires the alignment image as in step S1G7, and in step S1G9, the acquired alignment image is stored inside. In the frame memory, in step Slu, the alignment image stored in the internal frame memory is interpreted to calculate an alignment position value. Here, the calculation of the alignment position value is performed in the frame. The plurality of alignment images of the It towel are combined with the images of at least two different alignment cameras in the image to calculate the alignment position information. Then, in steps S113 and 81 In the fifteenth aspect, the ultra-precision stage is moved for alignment based on the calculated alignment position value. The present invention is not limited to the specific preferred embodiment described above, and does not deviate from the gist of the invention applied for by the application scarf. Heretofore, those who have ordinary knowledge in the technical field to which the present invention pertains can implement various modifications, and such changes are also described in the scope of the patent application scope [a brief description of the drawings] EMBODIMENT OF THE INVENTION Automated Multifocal _ 18th 200815953 Fig. 2 is a detailed structural view of the first embodiment of the automatic multifocal aligning apparatus of the present invention. Fig. 3 is the first embodiment of the automatic multifocal aligning apparatus of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 4 is a detailed structural view of a second embodiment of the automatic multifocal alignment device of the present invention. Fig. 5 is a flow chart showing the automatic multifocal alignment method of the present invention. Main component symbol description] 121 > 231 CCD camera 110, 220 stepping motor 140, 250 image acquisition unit 150, 260 image interpretation unit 170 ^ 270 motor control unit 210 ultra-precision Stage control unit 19 280