200805116 九、發明說明： 【發明所屬之技術領域】 曰本發明疋關於一種用來感測加速度變化的一種系 ίί 2，。特別是—種用在慣性滑鼠令感測手部運動的系 【先前技術】200805116 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a system ίί 2 for sensing acceleration changes. In particular, a system used in inertial mouse to sense hand movement [Prior Art]
雖然，將感測重力、加速度或慣性的方式應滑鼠之操 θ以取代傳統之機械滾輪滑氣或是現今最為普及的光學滑 =及。但鱗雛缝力滑&侧為易受雜訊干擾 慣Ξίί 除;ί得f應用受到極大限制。此等習知之 原因次力⑺咏之恶法有效操作的原因，約可歸納到下面幾個 ΤΓ、面〕知的慣性滑鼠係將慣性感泪nc、微處理器 路架ϊ路;fe 路及USB介面電路等諸翻立的晶片電 組合成系統模組來感測加速度及處理 ίίΐίϊ^ΐ因為晶片間的連接導線的相對的大 解。。詩，進而影響感測加速度的感測靈敏度及感測 ㈣裝方式，_晶片間 至方面的訊號處理規劃 咸測系統晶片本^^目的便是要提供一種可用於滑鼠的慣性 I體缺失。 ^、上相f知重力或慣性滑鼠所有的諸種 200805116 【發明内容】 本發明的構想是提出一種低寄生電容，高感測靈敏度，高 訊，解析度’抗雜訊干擾，高可靠度，並且是小ϋ積，低成本 的感系統測晶片，以降低傳遞訊號的導線的寄生電容，緩 2壞境雜訊之干擾，提昇感测靈敏度及解析度；另外，並提出 能有效排除雜訊並能精確的將加速度轉換成位移的運算法則。 一、所以本發明提出了一種慣性感測系統晶片，其至少包含了 a，動感^單元，用來感測一加速度並產生一加速度訊號，一 虎士理f兀，將此加速度訊號轉換成相關的一位移訊號，一 虎介面單元’依據一協定來轉換此位移訊號並將之傳送到與 之相連的一設備，一訊號線，用來電連接此等單元並於其等之 ，傳輸至少此等訊號，及一基板，用來設置此等單元及此訊號 線。 根據上述構想，其中此基板是選自一矽基板及一玻璃基 其中之一。 时根據上述構想，其中此運動感測單元包含有一質量塊、一 ，性結構、—阻尼、以及—電容結構，其中此電容結構是由固 足在此基板上的一固定板及設置在此質量塊上的一運動板所 二，用末產生此加速度訊號，並藉此訊號線來傳送此加速度 戒號到此訊號處理單元產生此位移訊號。 根據上述構想，其中此質量塊與定位於此基板上的此彈性 ^構連接’此質量塊具有至少兩個運動自由度，可直線運動於 一X方向及一γ方向，此x方向及此丫方向則是彼此正交。 根據上述構想，其中此質量塊具有至少三個運動自由度， ，可直線運動於此X方向及此Y方向之外，尚可直線運動於 興此兩方向正交的的一z方向。 據上述構想，其中此阻尼是包圍此質量塊的—氣體，此 乳體疋選自-氮氣，-氬氣及一氦氣其中之一，其並具有一阻 尼值(dampingratio)或是一阻尼係數(dampingc〇efficient)，用來 6 200805116 ί 以散耗此質量塊的動能，抑制其震盪，而藉由 改、义此軋體之壓力可改變此阻尼值。 料構想，其巾此電容結構的電性祕是，當此質量 $ ϋ ί Γ此固定板及此運動板間有—固定間隙d。，使此 =構具有了始電容量Cg，而當此f量塊因感測此加速度 此日士 士千n ’此運動板及此固定板間具有一運動間隙d， 結構具有與此位移大小相關的—運動電容量c;此 =1 C。及C的一電容量差Ac、經此訊號處理單元處理而 數位加速度訊號，紐位加速度訊驗處制產生此位 移訊7虎。 述構想，其巾此訊號處理單域包括—電容轉電壓 =CMconverter)、一放大電路(amplifier)、一類比轉數位 迅路(analog to digital Converter; a/D converter)、一位移運算電 路(adisplacementcalculationudt)、一震盪電路及一記憶體電 路，其中此電容量差被傳送到此電容轉電壓電路後，產生 與其相關的一差分電壓Λν，具類比性質的此差分電壓Λν再 經此放大電路放大並經此類比轉數位電路而產生與加速度相 關=此數位加速度訊號，此運算電路則以此震盪電'路所提供的 「日守脈來進行計异而將此數位加速度訊號換算成此位移訊 號，此記憶體電路則至少可存取此數位訊號及此位移訊號。 根據上述構想，其中此運算電路内有一積分運算單元，一 务分運异單元及一狀態估測器(§tateEstimator);其中此積分運 算單元對此加$度訊號相對時間積分兩次得到一估算位移訊 唬，，微分運算單元對此估算位移訊號相對時間微分兩次得到 一估^加速度訊號，此狀態估測器藉比對此數位加速度訊號及 此估异加速度訊號來補償此估算加速度訊號並將之對映成此 位移訊號。 根據上述構想，其中此狀態估測器是一卡爾曼濾波器 (Kalman filter)，其依此數位加速度訊號及此估算加速度訊號間 7 200805116 之差別，以訊號重估原理來濾除一環境雜訊及擾動而將此估算 加速度訊號對映成此位移訊號。 根據上述構想，其中此數位訊號是選自一 PDM (PulseAlthough the way to sense gravity, acceleration or inertia should be the squirrel of the mouse to replace the traditional mechanical roller slippery or the most popular optical slippage nowadays. However, the scales are slippery and the side is susceptible to noise interference. The ί得f application is greatly limited. The reasons for these conventional reasons (7) 咏 咏 恶 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 有效 fe fe fe fe fe fe fe fe fe fe fe fe fe fe fe fe fe fe fe fe fe fe fe And the turned-over wafers such as the USB interface circuit are electrically combined into a system module to sense acceleration and processing ίίΐίϊ^ because of the relatively large solution of the connecting wires between the wafers. . Poetry, which in turn affects the sensing sensitivity and sensing of the sensing acceleration. (4) Mounting method, _ wafer-to-wafer signal processing planning The purpose of the salt-measuring system wafer is to provide an inertial I-body missing for the mouse. ^, the upper phase f knows the gravity or the inertia mouse all kinds of 200805116 [Invention] The present invention is to propose a low parasitic capacitance, high sensing sensitivity, high signal, resolution 'anti-noise interference, high reliability, And it is a small hoarding, low-cost sensing system to measure the chip, to reduce the parasitic capacitance of the wire that transmits the signal, to slow down the interference of the noise, improve the sensitivity and resolution; in addition, it is proposed to effectively eliminate the noise And can accurately convert the acceleration into a displacement algorithm. 1. The present invention therefore provides an inertial sensing system chip that includes at least a dynamic sensing unit for sensing an acceleration and generating an acceleration signal, and converting the acceleration signal into a correlation. a displacement signal, a tiger interface unit 'converts the displacement signal according to a protocol and transmits it to a device connected thereto, a signal line for electrically connecting the units, and the like, transmitting at least such A signal, and a substrate, are used to set up such units and the signal line. According to the above concept, the substrate is one selected from the group consisting of a substrate and a glass substrate. According to the above concept, the motion sensing unit comprises a mass, a structure, a damping, and a capacitor structure, wherein the capacitor structure is a fixed plate fixed on the substrate and disposed in the mass A motion board on the block generates the acceleration signal by using the signal, and the signal line is used to transmit the acceleration signal to the signal processing unit to generate the displacement signal. According to the above concept, wherein the mass is connected to the elastic structure positioned on the substrate, the mass has at least two degrees of freedom of movement, and is linearly movable in an X direction and a γ direction, and the x direction and the 丫The directions are orthogonal to each other. According to the above concept, the mass has at least three degrees of freedom of movement, and is linearly movable outside the X direction and the Y direction, and is linearly movable in a z direction orthogonal to the two directions. According to the above concept, wherein the damping is a gas surrounding the mass, the emulsion is selected from one of - nitrogen, - argon and a helium, and has a damping ratio or a damping coefficient. (dampingc〇efficient), used to 6 200805116 ί to dissipate the kinetic energy of this mass, to suppress its oscillation, and change the damping value by changing the pressure of the rolling body. It is believed that the electrical secret of the capacitor structure is that when the mass is $ ϋ ί Γ there is a fixed gap d between the fixed plate and the moving plate. Therefore, the structure has a starting capacity Cg, and when the f-quantity block senses the acceleration, the sunshield thousand n' has a moving gap d between the moving plate and the fixed plate, and the structure has the displacement Related - sports capacity c; this = 1 C. And a capacitance difference Ac of C, processed by the signal processing unit and the digital acceleration signal, the button acceleration detection system produces this bit of the mobile 7 tiger. The conception of the signal processing single field includes - capacitance to voltage = CMconverter), an amplifier circuit, analog to digital converter (a/D converter), a displacement operation circuit (adisplacementcalculationudt a oscillating circuit and a memory circuit, wherein the difference in capacitance is transmitted to the capacitor-to-voltage circuit, and a differential voltage Λν associated therewith is generated, and the analog voltage Λν of analogy is amplified by the amplifying circuit According to the analog-to-digital circuit, the acceleration-related = the digital acceleration signal is generated, and the operation circuit converts the digital acceleration signal into the displacement signal by using the "day-defense pulse" provided by the oscillation circuit. The memory circuit can access at least the digital signal and the displacement signal. According to the above concept, the operation circuit has an integral operation unit, a service division unit and a state estimator (§tateEstimator); The integral operation unit adds the $degree signal to the time integral twice to obtain an estimated displacement signal, and the differential operation unit pairs The estimated displacement signal is differentiated twice from the time to obtain an estimated acceleration signal. The state estimator compensates the estimated acceleration signal by the digital acceleration signal and the estimated acceleration signal and maps the estimated acceleration signal to the displacement signal. According to the above concept, the state estimator is a Kalman filter, and according to the difference between the digital acceleration signal and the estimated acceleration signal 7 200805116, the signal revaluation principle is used to filter out an environmental noise. And the disturbance is used to map the estimated acceleration signal to the displacement signal. According to the above concept, the digital signal is selected from a PDM (Pulse)
Density Modulation)訊號及一 PWM (Pulse Width Modulation)訊 號其中之一。 根據上述構想’其中此訊號介面單元是選自一 USB介面， 一串接埠介面(如RS232)，一平行埠介面，一 IEEE1394介面， 一藍芽(bluetooth)傳輸介面，及一紅外線傳輸介面其中之一； 此協定是選自一 USB訊號傳輸協定，一串接埠偉給'，， 平行蜂傳輸協定…丨哪測傳輸協定 紅外線傳輸協定其中之一；此設備是選自一電腦，一微電腦 晶片，一顯示螢幕，及一訊號輸入輸出裝置，如一鍵盤其中之 --- 〇 A根雙上述構想，其中此訊號線具有一幾何尺寸，即其包 斷面高度及—長度’藉定義此幾何尺寸來限制 晶 此吼號、、泉之與此尺寸相關的一寄生電容量， 片的-感測解析度及-感測靈敏度。 岐升此糸、、、先 運動述構1 ’其ί包含有—_外殼，用來將承載有此 ί元、此訊號介面單元及此訊號線 ，，封ϋ其中；此封裝外殼並具有―導_ n b 力:速度:减及此娜減傳送到此設備或是接㈣此設備傳 的一訊號；此外，此封裝外殼還具有一全屬 : 波雜訊干擾。· 、-頁i屬板用來抑制-電磁 解本案得藉由下侧式及詳細說明，俾得以讓讀者更深入了 【實施方式】 〜本案所提出的慣性滑鼠運動感測系統晶片 充分瞭解’並使得熟習本技藝之人士可以= 〜成。另外，雖然本案是以用於慣性滑鼠的運動感 200805116 片為實施例，然本案之實施並不受限於滑鼠之應用，也適用於 其他慣性測量的領域。 請參，第一圖二第一圖(A)是根據本發明的一運動感測單 元的具體實施例的示意圖，此運動感測單元1〇包括了 一質量 塊100、一彈性結構11 〇、一阻尼12〇、以及一電容結 構130。此質量塊1〇〇是藉由此彈性結構11〇而被定位 並懸浮在此基板101上，被彈性結構11〇所定位的此質 量塊100會隨著被感測的加速度a而沿著彼此相互正交 的X方向，Y方向上進行直線運動而產生位移，此彈性 結構110則類似彈簧一般隨著此質量塊1〇〇的運動位移 而變形，此阻尼120則是包圍著此質量塊1〇〇的一種氣 體，這種氣體可以是I氣，氬氣或是氦氣，此阻尼120 ^阻尼效應可以散耗此質量& i⑽的動能，抑制其振 ，；而此阻尼效應則會隨著包似質量塊1〇〇的氣體壓 ί、軍叙疋板1310及設置在此質量塊100上的 π ίί ΐ ® 1320 c: “，而此電容結構130則具有-初始 構13^的’當感受加速度時’此電容結 構130的運動板132〇會跟隨 動，使得此固定板1310乃、軍壬者此貝里塊1〇〇而一同運 始間隙d0變成一運動間隙d板^20間的間隙由此初 量則由此初始電容量c。變成結構13G的電容 運動電容量c。 成/、感測加速度相關的一 讓本系統晶片感測能力且有效的做法，此舉不僅 刀又相铸而發生的偏移可被大幅的 200805116 修正，更因此讓整個訊號對映的運算軟體的規劃變成可行且 效率。 /、 第二圖是此訊號處理單元的一架構示意圖。此訊號處理單 兀20包含了一電容轉電壓電路(Ct〇Vc〇nverter)施、一放大 電路(amplifo) 2〇2、一類比轉數位電路(anal〇g协出娜 converter; A/D converter) 2〇3、一位移運算電路_恤_邮 CalCuht1〇nunit)2〇4、一震盪電路2〇5及一記憶體電路2〇6。 虎處理單το的運作方式是，此初始電容量及此運動電 容量C之差的-電容量差Λ(：被傳送到此電容轉電壓電路2〇ι 產生與其_的-差分電壓Λν，具紙性質的此差分電 壓Δν再經姐大電路2〇2放大並經該類比轉數位電路2〇3而 產生與加速度相關的此數位加速度訊號DAS，此運算電路2〇5 此震|電路施所提供的—雜來進行計算而將此數位加 速度訊號DAS換算成-位移訊號DDS。糾，此記憶體電路 204則可存取此數位力口速度訊號DAS及此位移訊號。 第三圖是此位料算電路的—架構示賴。此位移運 路205包含了一積分運算單元2〇51，一微分運算單元2〇52, 以及一狀，估測态2053。此位移運算電路2〇5的運作方式是， -方面’ f i個的此數位加速度訊號DAS被存放在此記憶體 ，路204 ’而*另-方面’第i個的此數位加速度訊號das則 疋被輸入到此積分運异單S 2〇51 ’在對時間做兩次積分之後將 加速度β轉換成-位移X，即：=0祕2 ,因而生成一假定位移訊 號（Fictitious DisPlacement Signal)FDS，此假定位移訊號再經 由此微分運算單元2052對時間微分兩次後，即α = ☆，而產生 dt2 -估算加速度訊號EAS。此狀態估測器2G53則對此估算加速 度訊號EAS與被記存在記憶體電路2〇5巾的第}個數位加速度 訊號DAS進行比對’用來補償修正此假定位移喊fds而對 10 200805116 映出一數位位移訊號DDS。此位移運算電路205的運作方式還 可以是，一方面第i-Ι個或是第i+1個數位加速度訊號DAS被 存放到此記憶體電路，藉此狀態估測器2503來跟由第i個數 ，加速度訊號DAS所生成的此估算加速度訊號EAS比對，而 最終對映出一數位位移訊號DDS。 曰至於本發明的此狀態估測器2053的一較佳具體實施例則 ，一卡爾曼濾波器(Kalman Filter)，它可以依據此數位加速度訊 ，DAS及此估算加速度訊號EAS間之差別，以訊號重估原理 來濾除或補償，一環境雜訊及其他擾動源對此數位加速度訊號 DAS所造成的偏差影響，而將此數位加速度訊號dAs對映成 此數位位移訊號DDS。 二口另外，此數位加速度訊號DAS及此數位位移訊號DDS的 訊號格式可以是一脈衝密度調變訊號（PulseDensity Modulatlon;pDM)，或是一脈衝寬度調變訊號㈣^.她 Modulation; PWM)。這兩種數位訊號格式也可經由一習知的電 路技術而轉換成一類比電壓訊號。 0 一請再參閱第二圖，此數位位移訊號〇1^藉由此訊號介面 單兀邓被傳送到與此訊號處理單元2〇相連接的一外部設備 /未不ΐ )/根據本發明的一較佳具體實施例，本發明的此訊 V，單元30可以是一 USB介面，一串接埠介面(如RS232)， 平行埠;ι面，一IEEE1394 介面，一藍芽(bluetooth)傳輸介 面二或疋一紅外線傳輸介面。另外，用來配合此等傳輸介面的 通訊協定或是訊號傳輸協定則是一 USB訊號傳輸協定，一串 ，，，輸協定，一平行埠傳輸協定，一 ffiEE1394傳輸協定， 二監芽傳輸協定，或是一紅外線傳輸協定。至於，與此處理單 =〇電連接的此外部設備（未示出）則是一電腦，一微電腦 曰曰片、’一具微電腦晶片的裝置，或是一顯示螢幕等。 為減緩雜訊干擾此系統晶片的操作性能，除了上述的軟體 计异上的設想賴之外，硬體上的配置更—並考慮，藉軟硬體 200805116 之規劃設収配__乘，使 度，高感測解析度，及穩定性。 硬體上的設計，主要是在減低寄生電容的群， 容的主要來源之-就是與此感測單元電連接的此等導^^ 以’在此依據現實半_或微機電製程的能力，來限定此 線，-幾何尺寸，即感測單元的一斷面寬度及一斷面高度^ 限定在小於次微米的尺度，至於此號線的_長度則必 ^小於mo^2微米的尺度。本發明即是藉由絲此等幾何乂 來限制此峨狀與其尺寸相_—寄生電 升 此系統晶片的-感測解析度及一感測錄度。咖7徒升 夕除Ιϊί發明的此系統晶片的封裝架構及其整體電磁干擾 之防s又方式’則請參閱第四圖Α及第_Β。第四圖 3、，先曰曰片封，構中，一個至少承載了感測單元1〇，訊號處理 m’ r單元3G ’以及複數個訊號線4g的基板· f封裝在由一複合物材質所構成的一外殼50中。在此基板101 4G至少電連接感測單★1G，訊號處理單元20 而其寄生電容量已因被指定之幾何尺寸而 疋’ f減少上述被連接單元因殘餘電容所造成的干擾。 50 ί 1Γ /?單元3㈣崎數懈接導線7G與設置在外殼 =曰=⑽電連接，藉此將系統晶片產生的訊號，至 V疋~數位位移减傳輸到與之相連接的一設備（未示出）。 # ί丨是i艮據本發明的此系統晶片的一封裝架構具體 、=例，側，思圖L此視圖清楚的表示了，此至少承載了感 4=1 1’戒號處-單兀20 ’訊號介面單元30 ’以及訊號線 板〇1上覆蓋了一金屬蓋3〇0，用來遮蔽上述諸單元及 ’而固定在基板1〇1上的金屬蓋3〇〇更藉由一焊接導線 ―队至丨封&外殼5〇的導線架6〇上的一接地腳位GND，藉 此排除雜訊，減緩電磁干擾。 12 200805116 測系敕、硬體的規劃設計及搭配，本發明的運動咸 訊的干ί5^的影響及外部電磁^ 轉換成位移訊號。有效、快逮亚精確的的將感測加逮度訊號 性之具產業實用性與競爭 飾，之人士任施匠思而為諸般修 11 了 專利靶圍所欲保護者。 【圖式簡單說明】 示意電賊實施綱縣感測單元 -架圖是根據本發曰⑽—具體實施例的訊號處理單元的 -架根據本發明的一具體實施例的位移運算電路的 片封裳 片封裂 第是根據本發明的一 例 架構之上視示意圖；及 凡曰曰 據本發㈣—具體料例的系統晶 13 200805116 【主要元件符號說明】 10 運動感测單元 2052 100 質量塊 2053 110 彈性結構 206 120 阻尼 DAS 130 電容結構 FDS 1310 固定板 EAS 1320 運動板 DDS a 加速度 30 X 位移 40 20 訊號處理單元 50 201 電容轉電壓電路 60 202 放大電路 70 203 類比轉數位電路 101 204 位移運算電路 300 205 震盪電路 GND 2051 積分運算單元 微分運算單元 狀態估測器 記憶體電路 數位加速度訊號 假定位移訊號 估算加速度訊號 數位位移訊號 訊號介面單元 訊號線 外殼 導線架 焊接導線 基板 金屬蓋 接地One of the Density Modulation signals and a PWM (Pulse Width Modulation) signal. According to the above concept, the signal interface unit is selected from a USB interface, a serial interface (such as RS232), a parallel interface, an IEEE1394 interface, a Bluetooth transmission interface, and an infrared transmission interface. One of the protocols is selected from a USB signal transmission protocol, a string of connections to the ',, parallel bee transmission protocol... 丨 Which one of the transmission protocol infrared transmission protocols; this device is selected from a computer, a microcomputer A chip, a display screen, and a signal input/output device, such as a keyboard, wherein the 讯A root has the above concept, wherein the signal line has a geometric dimension, that is, its package section height and length - by defining the geometry The size limits the parasitic capacitance associated with this size, the spring, and the sensing-sensitivity and sensitivity of the slice. Soaring this,, and first motion description 1 'the ί contains the -_ shell, which is used to carry the ί, the signal interface unit and the signal line, and seal it; the package has ― Guide _ nb Force: Speed: minus this signal transmitted to the device or connected to (4) the device; in addition, the package also has a full: wave noise interference. ·, - Page i is used to suppress - electromagnetic solution This case can be further explained by the lower side and detailed description. [Embodiment] ~ The inertial mouse motion sensing system chip proposed in this case is fully understood 'And make people who are familiar with this skill can = ~ into. In addition, although the case is based on the motion sense 200805116 for the inertia mouse, the implementation of this case is not limited to the application of the mouse, but also applies to other areas of inertial measurement. Please refer to FIG. 2 is a schematic diagram of a specific embodiment of a motion sensing unit according to the present invention. The motion sensing unit 1 includes a mass 100 and an elastic structure 11 . A damping 12 〇, and a capacitor structure 130. The mass 1〇〇 is positioned and suspended on the substrate 101 by the elastic structure 11〇, and the mass 100 positioned by the elastic structure 11〇 will follow each other along with the sensed acceleration a The X direction in the mutually orthogonal direction and the linear motion in the Y direction generate displacement, and the elastic structure 110 is deformed similarly to the spring displacement of the mass 1〇〇, and the damping 120 surrounds the mass 1 a gas of helium, which may be I gas, argon gas or helium gas. The damping 120 ^ damping effect can dissipate the kinetic energy of this mass & i(10) to suppress its vibration; and this damping effect will follow The gas pressure of the mass is 1 〇〇, the military slab 1310, and the π ίί ΐ ® 1320 c: ", and the capacitor structure 130 has an initial configuration of 13 ^" When the acceleration is felt, the motion plate 132 of the capacitor structure 130 will follow, so that the fixed plate 1310 and the sergeant block 1 〇〇 together and the gap d0 becomes a motion gap d plate ^20 The gap of this initial amount is thus the initial capacitance c. 13G's Capacitive Motor Capacitance c. It is an effective method for sensing the acceleration of the system. It is not only the offset of the knife but also the offset that can be corrected by the large 200805116. The planning of the operating software for the entire signal mapping becomes feasible and efficient. /, The second figure is a schematic diagram of the architecture of the signal processing unit. The signal processing unit 20 includes a capacitor-to-voltage circuit (Ct〇Vc〇nverter) Amplifier circuit (amplifo) 2〇2, an analog-to-digital circuit (anal〇gconductor converter; A/D converter) 2〇3, a displacement operation circuit_shirt_mail CalCuht1〇nunit) 2〇4 , a oscillating circuit 2 〇 5 and a memory circuit 2 〇 6. The operation mode of the tiger processing single τ ο is the difference between the initial capacitance and the difference of the moving capacitance C - the capacitance difference : (: is transmitted to the capacitor The voltage-converting circuit 2〇 generates a differential voltage Λν with its _, and the differential voltage Δν of the paper property is amplified by the sister circuit 2〇2 and generated by the analog-to-digital circuit 2〇3 to generate the acceleration-related digit Acceleration signal DAS, this operation circuit 2 5 This vibration|circuit is provided by the circuit to calculate and convert the digital acceleration signal DAS into a displacement signal DDS. The memory circuit 204 can access the digital force velocity signal DAS and the displacement signal. The third figure is the architecture of the bit calculation circuit. The displacement path 205 includes an integral operation unit 2〇51, a differential operation unit 2〇52, and a shape, estimated state 2053. This displacement The operation circuit 2〇5 operates in such a way that the digital acceleration signal DAS of the aspect is stored in the memory, and the digital acceleration signal das of the i-th is input. At this point, the integral operation S 2〇51 'converts the acceleration β to the -displacement X after two integrations with time, ie: =0 secret 2, thus generating a Fictitious DisPlacement Signal FDS, this assumption After the displacement signal is further differentiated by the differential operation unit 2052 twice, that is, α = ☆, and dt2 - the estimated acceleration signal EAS is generated. The state estimator 2G53 compares the estimated acceleration signal EAS with the ninth digital acceleration signal DAS recorded in the memory circuit 2 〇 5 to compensate for the correction of the assumed displacement shout fds and to 10 200805116 A digital displacement signal DDS is output. The operation of the shift operation circuit 205 may be such that, on the one hand, the i-th or i+1th digital acceleration signal DAS is stored in the memory circuit, whereby the state estimator 2503 follows the ith The number, the estimated acceleration signal EAS generated by the acceleration signal DAS is compared, and finally a digital displacement signal DDS is mapped. As a preferred embodiment of the state estimator 2053 of the present invention, a Kalman filter can be used to determine the difference between the digital acceleration, the DAS, and the estimated acceleration signal EAS. The signal revaluation principle filters out or compensates, and an environmental noise and other disturbance sources affect the deviation caused by the digital acceleration signal DAS, and the digital acceleration signal dAs is mapped into the digital displacement signal DDS. In addition, the digital acceleration signal DAS and the digital displacement signal DDS may be a pulse density modulation signal (PulseDensity Modulatlon; pDM) or a pulse width modulation signal (4) ^. Modulation; PWM). These two digital signal formats can also be converted to a similar type of voltage signal via a conventional circuit technique. 0 Please refer to the second figure again, the digital displacement signal 传送1^ is transmitted to the external device connected to the signal processing unit 2〇 by the signal interface interface /1// according to the present invention In a preferred embodiment, the unit 30 of the present invention can be a USB interface, a serial interface (such as RS232), parallel 埠; ι, an IEEE1394 interface, and a Bluetooth transmission interface. Second or second infrared transmission interface. In addition, the communication protocol or signal transmission protocol used to match these transmission interfaces is a USB signal transmission protocol, a string, an exchange protocol, a parallel transmission protocol, a ffiEE1394 transmission protocol, and a second supervision transmission protocol. Or an infrared transmission protocol. As for the external device (not shown) connected to the processing unit, it is a computer, a microcomputer chip, a device for a microcomputer chip, or a display screen. In order to alleviate the interference of the noise processing of the system chip, in addition to the above-mentioned software-based assumptions, the hardware configuration is more important, and considering the use of the software and hardware 200805116 to make the __ multiply Degree, high sensing resolution, and stability. The design on the hardware is mainly to reduce the parasitic capacitance group. The main source of the capacitance is the connection with the sensing unit, which is based on the actual semi- or micro-electromechanical process capability. To define the line, the geometric dimension, that is, the width of a section of the sensing unit and the height of a section are limited to a scale smaller than the sub-micron, and the length of the line to the length of the line must be smaller than the dimension of mo^2 micrometers. In the present invention, the geometry of the system is limited by the geometry of the filaments. The sensing resolution and the sensing level of the system wafer are limited. Please refer to the fourth figure and the _Β for the package architecture of this system chip and its overall electromagnetic interference prevention s. In the fourth figure, a sputum film is sealed, and a substrate/f package carrying at least the sensing unit 1 〇, the signal processing m' r unit 3G ′ and the plurality of signal lines 4 g is packaged in a composite material. It is constructed in a casing 50. The substrate 101 4G is electrically connected to at least the sensing unit ★1G, the signal processing unit 20 and its parasitic capacitance has been reduced by the specified geometric size 疋'f to reduce the interference caused by the residual capacitance of the connected unit. 50 ί 1Γ /? Unit 3 (4) The number of wires 7G is connected to the outer casing = 曰 = (10), thereby transmitting the signal generated by the system chip to the V 疋 ~ digital displacement to a device connected to it ( Not shown). # 丨 丨 丨 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此The 20' signal interface unit 30' and the signal line board 〇1 are covered with a metal cover 3〇0 for shielding the above-mentioned units and the metal cover 3 fixed to the substrate 1〇1 by a soldering Wire-to-seal to a grounding pin GND on the lead frame 6 of the housing 5〇, thereby eliminating noise and mitigating electromagnetic interference. 12 200805116 The planning and design of the system and the hardware, the influence of the motion and the external electromagnetic conversion of the invention are converted into displacement signals. The effective and fast-acquisition of the sensory and catch-up signal of the industry's practicality and competition, and the people who have tried to repair and protect the patent target. BRIEF DESCRIPTION OF THE DRAWINGS A schematic diagram of a displacement computing circuit according to an embodiment of the present invention is illustrated in accordance with the present invention (10). The cover sheet is a top view of an example of the structure according to the present invention; and the system crystal 13 according to the present invention (4) - specific material example 200805116 [Major component symbol description] 10 motion sensing unit 2052 100 mass 2053 110 Elastic structure 206 120 Damping DAS 130 Capacitor structure FDS 1310 Fixing plate EAS 1320 Moving plate DDS a Acceleration 30 X Displacement 40 20 Signal processing unit 50 201 Capacitance turn voltage circuit 60 202 Amplifying circuit 70 203 Analog-to-digital circuit 101 204 Displacement arithmetic circuit 300 205 Oscillation Circuit GND 2051 Integral Operation Unit Differential Operation Unit State Estimator Memory Circuit Digital Acceleration Signal Assumed Displacement Signal Estimation Acceleration Signal Digital Displacement Signal Signal Interface Element Signal Line Housing Conductor Welding Wire Base Metal Cover Ground
1414