TW200804092A - Droplet ejection device and droplet ejection method - Google Patents
Droplet ejection device and droplet ejection method Download PDFInfo
- Publication number
- TW200804092A TW200804092A TW096111763A TW96111763A TW200804092A TW 200804092 A TW200804092 A TW 200804092A TW 096111763 A TW096111763 A TW 096111763A TW 96111763 A TW96111763 A TW 96111763A TW 200804092 A TW200804092 A TW 200804092A
- Authority
- TW
- Taiwan
- Prior art keywords
- liquid
- coating liquid
- storage tank
- coating
- main
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 24
- 239000007788 liquid Substances 0.000 claims abstract description 673
- 239000011248 coating agent Substances 0.000 claims abstract description 349
- 238000000576 coating method Methods 0.000 claims abstract description 349
- 239000002699 waste material Substances 0.000 claims abstract description 40
- 238000005406 washing Methods 0.000 claims abstract description 11
- 238000003860 storage Methods 0.000 claims description 190
- 238000004140 cleaning Methods 0.000 claims description 73
- 239000000758 substrate Substances 0.000 claims description 35
- 239000004973 liquid crystal related substance Substances 0.000 claims description 33
- 125000006850 spacer group Chemical group 0.000 claims description 31
- 239000007789 gas Substances 0.000 claims description 29
- 239000002245 particle Substances 0.000 claims description 24
- 238000012546 transfer Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 14
- 230000006837 decompression Effects 0.000 claims description 13
- 239000004744 fabric Substances 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 7
- 239000007921 spray Substances 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 5
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- 206010036790 Productive cough Diseases 0.000 claims description 3
- 210000003802 sputum Anatomy 0.000 claims description 3
- 208000024794 sputum Diseases 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical group [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 2
- 230000004888 barrier function Effects 0.000 claims 1
- 239000008267 milk Substances 0.000 claims 1
- 210000004080 milk Anatomy 0.000 claims 1
- 235000013336 milk Nutrition 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 210000002784 stomach Anatomy 0.000 claims 1
- 238000009498 subcoating Methods 0.000 claims 1
- 239000002351 wastewater Substances 0.000 claims 1
- 238000007599 discharging Methods 0.000 abstract description 6
- 239000000976 ink Substances 0.000 description 46
- 238000011084 recovery Methods 0.000 description 24
- 230000007246 mechanism Effects 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000011324 bead Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 238000004062 sedimentation Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
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- 238000012545 processing Methods 0.000 description 2
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- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RGCKGOZRHPZPFP-UHFFFAOYSA-N alizarin Chemical group C1=CC=C2C(=O)C3=C(O)C(O)=CC=C3C(=O)C2=C1 RGCKGOZRHPZPFP-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000010808 liquid waste Substances 0.000 description 1
- 235000013372 meat Nutrition 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035935 pregnancy Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/1652—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head
- B41J2/16526—Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head by applying pressure only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/16552—Cleaning of print head nozzles using cleaning fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/18—Ink recirculation systems
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Nozzles (AREA)
Abstract
Description
200804092 九、發明說明： 【發明所屬之技術領域】 法，尤2關於一種噴出液滴之液滴噴出裝置及其運轉方 法’尤，、關於一種滴八於嗜φ /1 體粒子之冷希σ 、、出例如混合並分散有珠粒等固 體粒子之塗布液的液滴噴出裝置及其運轉方法。 【先前技術】 液晶顯示襞置等，爲了將二 定，故將料初也日日 兄收日日基板的間隙維持一 2二：：間隔件配置在上述液晶基板之間。-直以 末，係使置等將㈣件分 = 上，但這種方法六a _ 月长及日日基板 谷易使間隔件分散不均，盔 的間隔維持_定， …沄將液晶基板 疋 夕數間隔件皆會聚在一起，導劲％ - 質量的降低。 释 ¥致顯不 爲了消除這類缺點，近年 液滴喷出法，袒山發出應用噴墨方式的 履屑贺出法，k出了多種技術手 可以大致蔣V乂 4 丁仅右用延種液滴噴出法， τ 乂大致將必要數量的間隔 宕 用具有禝數個噴出口的嗔 右使 、卜机/ΓΊ 1出碩則可同時將間隔件配詈力 複數個預定位置，呈 j㈣仟配置在 具有此棱鬲生産效率等優點。 在通常的喷墨記錄裝置中， 記錄頭之管子的處 、，: “水儲液槽與 慣性力對記錄頭的影變m墨水的 錄裝置（參照下述專利文獻υ。 斤丁之贺墨舌己 此喷墨記錄裝置具有記錄頭單 ⑽與延伸於方向（主掃描 之 =錄頭早疋 101螺合，其中談A )之早70驅動用滾珠螺桿 以p 係與記錄用紙（未圖示）之運送 7 200804092 方向X JLX ’亚利用與該滾珠螺桿1G1平行延伸的兩 請可滑動地獲得支撐。將單元驅動用電動機（未圖： 連接在上述滾珠螺# 1〇1，藉由該電動機之旋轉透過滾 螺桿101可將上述記錄頭單元J⑽往復移動於主掃描方向 Y 〇200804092 IX. Description of the invention: [Technical field to which the invention pertains] The method, in particular, relates to a droplet discharge device for ejecting droplets and a method for operating the same, in particular, a cold σ of a droplet of a φ /1 body particle Further, for example, a droplet discharge device in which a coating liquid of solid particles such as beads is mixed and dispersed, and a method of operating the same are provided. [Prior Art] In order to set the liquid crystal display device, etc., the gap between the substrate and the substrate is maintained at the beginning of the day: the spacer is disposed between the liquid crystal substrates. - Straight to the end, the system will be set to (4) parts = upper, but this method six a _ month long and the daily substrate valley easy to make the spacers unevenly distributed, the interval of the helmet is maintained, the liquid crystal substrate The 疋 数 spacers are all gathered together, the guiding force % - the quality is reduced. In order to eliminate such shortcomings, in recent years, the droplet discharge method, Lushan issued a method of applying inkjet method, and a variety of technical hands can be roughly Jiang V乂4 Ding only right-handed The droplet discharge method, τ 乂 roughly uses the necessary number of intervals to use the right side of the nozzle with a number of nozzles, and the machine can be used to simultaneously arrange the spacers at a plurality of predetermined positions, which is j (four) 仟The configuration has the advantages of having such a production efficiency. In a conventional ink jet recording apparatus, the position of the tube of the recording head, "the water reservoir and the inertia force to the recording head are changed to the ink recording device (refer to the following patent document . The ink jet recording apparatus has a recording head (10) and a paper ball extending in the direction (main scanning = head recording 101, wherein A), 70 drive ball screw, p-type and recording paper (not shown) ) Transportation 7 200804092 Direction X JLX 'Asia utilizes two parallel extensions of the ball screw 1G1 to slidably obtain support. The unit drive motor (not shown: connected to the above ball screw #1〇1 by the motor The rotation of the recording head unit J (10) can be reciprocated in the main scanning direction Y by the rotation of the rolling screw 101.
記錄頭單元100具有板狀的支持構件103,記錄頭1〇4 則固定在該支持構# 103的大致中央部，分別將供給墨水 用副儲液# 1G5配置在較記錄帛1G4更靠對著圖面的右 側，而回收墨水用副儲液槽106則配置在較記錄頭工 罪對著圖面的左側。 上述供給墨水用副儲液槽105,係與延伸於上下方向 之供給墨水用副儲液槽用之滚珠螺桿1〇7螺合，將供給墨 水用副儲液槽用驅動電動機1〇8連接在該滾珠螺桿= 然後藉由上述滾珠螺桿1〇7與驅動電動機1〇8，將供給墨 水用副儲液槽105調整至高於記錄頭1〇4的位置。 上述回收墨水用副儲液槽1〇6係與延伸於上下方向之 回收墨水用副儲液槽用滾珠螺桿1〇9螺合，將回收墨水用 副儲液槽用驅動電動機110連接在該滾珠螺桿1〇9。然後 藉由上述滾珠螺桿109與驅動電動機11〇，將回收墨水用 副儲液槽106調整至低於記錄頭丨〇4的位置。 在印表機主體（未圖示）的下部，設有内含墨水工Η (在彩色印表機的場合，為c、Μ、γ、κ四個顏色的單色 儲液槽）的主儲液槽112,以及通過墨水供給管114將該 墨水111供給至記錄頭單元100上之墨水供給用副儲液槽 8 200804092 105的抑揚用泵H3。 將容納在主儲液槽112中的墨水〗u，藉抑揚用泵j i 3 通過墨水供給管Π4供給至墨水供給用副儲液槽ι〇5。容 納在該墨水供給用副儲液槽〗〇5之墨水通過連通管丨^ $流 向圮錄頭104，其中一部分從記錄頭1〇4成爲液滴噴出至 记錄用紙（未圖示）上形成墨點。將此記錄頭i 〇〇對記錄 用紙相對地進行二維掃描，藉此將資訊記錄在記錄用紙 上。 未噴出的墨水則通過連通管丨i 5流向墨水回收用副儲 液槽106加以儲存，儲存在副儲液槽1〇6的墨水可通過墨 水回收管116返回至主儲液槽112。 —這樣，構成墨水111循環於主儲液槽112—墨水供給 二114 (抑揚用泵113)—墨水供給用副儲液槽〜連通 管115—記錄頭10“連通管ιΐ5—墨水回收用副儲液： 106—墨水回收管116—主儲液槽112之流路的系統。 ⑩ Λ夕卜有關其他噴墨記錄裝置，可列舉例如專利文獻 2〜4 ’又’有關液晶間隔件之喷出裝置，則可列舉 利文獻5,6。 辱 專利文獻1 ·曰本特開2005 — 067134號公報 專利文獻2 ·曰本特開2003 — 165233號公報 專利文獻3 ·曰本特開2003 — 300331號公報 專利文獻4 ·國際公開W02002/90117號公報 專利文獻5·日本特開平05 — 281562號公報 專利文獻6.日本特開平11 一 007028號公報 9 200804092 【發明内容】 上述喷墨記錄襄置，並沒有考慮到塗布液（此 水）之種類等自中途變更時的措施。例如，如前述： 顯示裝置，係將微粒狀間隔件介於兩片液晶基板之間^ 了使此間隔件附著於液晶基板上，故會在液晶顯示裝置： 生產線中’設置應用噴墨記錄裝置 ·之機構的液滴 喷出裝置。 1千） 然而，若在液晶顯示裝置的生產線上變更所製 晶=裝置種類等時，則由於與此相應所使用的間隔件直 径專不同，因而自製造過程，經常會有變更混合分散 隔件之塗布液種類的情形。在這種狀態下，應用上述噴； 之機構的液滴（間隔件)喷出裝置，並無法= 二了塗布液的變更處理’而導致操作複雜、生產效率差等〗 本u之目的在於解決這類現有技術的缺點 =;更換容易之使用方便性良好的液滴喷出裝置及其操 具備：Λ見上述目的，本發明之第—手段，其特徵在於， 匣# /具有内含塗布液之儲液槽； =涂、使上述塗布液成爲液滴喷出至被附著體； 至上^ΪΓ給循環部，以將上述儲液槽中的塗布液供給 部，並使通過該喷頭部之塗布液返回至上述儲 液槽的方式，循環塗布液； 至上述储 200804092 清洗液供給部，透過上述塗布液供給循環部將清洗液 供給上述噴頭部； 廢液排出部，從上述塗布液供給循環部的一部分排出 廢液；以及 聖力切換，使用上述清洗液供給部所供給的清洗液 清洗上述塗布液供給循環部及上述喷頭部時，以加麼氣體 對上述清洗液供給部内進行加遷，又藉由上述塗布液供紙 循環部使塗布液循環時，對上述儲液槽内進行減壓，σ 且將副料槽與主㈣槽連接成使±龍部對上述条 布液供給循環部可以更換。 土 本發明之第二手段，其特徵在於：於上述第一手段中， 在上述ϋ部設有複數個具有上述儲液槽之度，各匿對上述 塗布液供給循環部可切換地並列連接。 π本發明之第三手段，其特徵在於：於上述第一或第二 手&中上述s部係設置在高於上述噴頭部的位置， t述E部具有將塗布液供給至上述噴頭部的主儲液 曰’吳使通過上述噴頭部之塗布液返回的副儲液槽， 上述主儲液槽與副儲液样 , j碎履槽係以上述塗布液供給循環 邠之〃私运用泵之儲液槽間移送管連接， β藉由上述塗布液供給循環部使塗布液循環時，藉上述 壓力切換部將上述副儲液槽 槽之内壓。I m展槽之内屋維持為低於上述主儲液 本發明之第四手段，其特徵在於：於上述第_手段中， 在上述贺項部設有複數個頭’該等複數個頭係藉由頭連接 200804092 管串聯連接。 严明之第五手段，其特徵在於：於上述第一至第四 手奴中，上述塗布液為混合並分散有固體粒子之塗布液。 本發明之第六手段’其特徵在於：於上述第五手段中， 上以被附著體為液晶用基板，上述固體粒子為用以保持兩 片液晶用基板之間隙的間隔件。 本發明之第七手段，其特徵在於，具備： 參 贺’以液滴狀將上述塗布液喷出至被附著體； 嗜二有内含上述塗布液之主儲液槽與使通過上述 、車： 布液返回之副儲液槽，且副儲液槽與主儲液押 連接成可將塗布液自上述副儲液槽移送至主儲液槽 紙至：：=:循環部，以將上述主儲液槽中的塗布液供 、° F，並使通過該噴頭部之塗布液返回至±、f 副儲液槽的方式，循環塗布液； 彳液返日至上迷 清洗液供給部，透過上述 #供給至上述噴頭部； ㈣將清洗液 廢液排出部，從上述塗布 廢液；以及 m、、、口循被部之-部分排出 ^力切換部，使用上述清洗液 環部及上述噴頭,上述塗布液供給循 贾碩邛時，以加壓氣體對上 進行加壓，又藉由上述塗布 二：：-部内 時，切換壓力以料μ、+· + μ 僱椒邛使塗布液循環 壓， 儲液槽内及副儲液槽内進行減 其實施以下步驟： 12 200804092 教I#對卜、+、、主冰"印稽上述壓力切換部以加壓 乳體對上“洗液供給”進行Μ 使 從上述塗布液供給循環部通往 a此使上“洗液 頭邱之、主味广^ a 賀頭部，使通過該喷 :::在:二供給循環部流至上述廢液排出 氣置換爲清洗液； 盾“至上述贺頭部内的空 清洗液•塗布液置換步驟 > 牛职*从 你在該工軋•清洗液置換The recording head unit 100 has a plate-shaped support member 103, and the recording head 1〇4 is fixed to a substantially central portion of the support structure #103, and the supply ink sub-reservoir #1G5 is disposed opposite the recording cassette 1G4. On the right side of the drawing, the secondary ink storage tank 106 for recycling ink is disposed on the left side of the drawing opposite to the recording. The sub-reservoir 105 for supplying ink is screwed to the ball screw 1〇7 for supplying the sub-storage tank for ink which is extended in the vertical direction, and the drive motor 1〇8 for supplying the sub-storage tank for ink supply is connected. The ball screw = then the ink supply sub-tank 105 is adjusted to a position higher than the recording head 1〇4 by the above-described ball screw 1〇7 and the drive motor 1〇8. The sub-reservoir storage tank 1〇6 is screwed to the ball screw 1〇9 for the sub-reservoir for the recovered ink extending in the vertical direction, and the sub-reservoir drive motor 110 for recovering the ink is connected to the ball. Screw 1〇9. Then, the recovered ink sub-tank 106 is adjusted to a position lower than the recording head cymbal 4 by the above-described ball screw 109 and the drive motor 11A. In the lower part of the main body of the printer (not shown), there is a main storage containing ink processing (in the case of a color printer, a monochrome liquid storage tank of four colors: c, Μ, γ, κ) The liquid tank 112 and the ink 111 are supplied to the ink supply sub-tank 8 200804092 105 of the ink supply tank through the ink supply tube 114. The ink **u contained in the main liquid storage tank 112 is supplied to the ink supply sub-tank 〇5 through the ink supply tube 4 through the damper pump j i 3 . The ink contained in the ink supply sub-tank 〇5 flows through the communication pipe $^ to the boring head 104, and a part of the ink is ejected from the recording head 1〇4 to the recording paper (not shown). Ink point. This recording head i is scanned two-dimensionally on the recording paper to record information on the recording paper. The undischarged ink is stored in the ink recovery sub-tank 106 through the communication pipe 丨i 5, and the ink stored in the sub-tank 1〇6 can be returned to the main storage tank 112 through the ink recovery pipe 116. - In this way, the constituent ink 111 is circulated in the main liquid storage tank 112 - the ink supply unit 114 (the pump for suppressing the pump 113) - the ink supply sub-storage tank - the communication tube 115 - the recording head 10 "the communication tube ι 5 - the ink recovery sub-storage Liquid: 106 - ink recovery pipe 116 - a system of flow paths of the main liquid storage tank 112. 10 Other inkjet recording apparatuses, for example, Patent Documents 2 to 4' and 'discharge apparatus for liquid crystal spacers For example, Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. 2005- 067 134 Patent Document 2 [Patent Document 4] International Publication No. WO2002/90117, Japanese Patent Application Laid-Open No. Hei No. Hei. No. Hei. No. Hei. No. Hei. Considering measures such as changing the type of the coating liquid (this water) from the middle, for example, as described above, the display device is such that the particulate spacer is interposed between the two liquid crystal substrates, and the spacer is attached to the liquid. On the crystal substrate, the liquid droplet display device of the mechanism for applying the ink jet recording device is installed in the liquid crystal display device: 1. 1000) However, if the crystal type is changed on the production line of the liquid crystal display device In the case of isochronous, since the diameter of the spacer used in the corresponding one is different, the type of the coating liquid of the mixed dispersion spacer is often changed from the manufacturing process. In this state, the mechanism of the above-mentioned spray is applied. The droplet (spacer) ejection device cannot be used to change the processing of the coating liquid, resulting in complicated operation, poor production efficiency, etc. The purpose of the present invention is to solve the disadvantages of the prior art = easy to replace. The present invention is directed to a liquid droplet ejection device and a device thereof, which are characterized in that: 匣# / a liquid storage tank containing a coating liquid; = coating, making the coating liquid The liquid droplets are ejected to the adherend; the upper portion is supplied to the circulation portion to supply the coating liquid supply portion in the liquid storage tank, and the coating liquid passing through the shower head portion is returned to the liquid storage tank The circulating coating liquid is supplied to the cleaning liquid supply unit of the 200804092, and the cleaning liquid is supplied to the head unit through the coating liquid supply and circulation unit; the waste liquid discharge unit discharges the waste liquid from a part of the coating liquid supply circulation unit; When the coating liquid supply circulation unit and the head unit are washed by the cleaning liquid supplied from the cleaning liquid supply unit, the cleaning liquid supply unit is moved in by the addition of the gas, and the coating liquid supply cycle unit is further used. When the coating liquid is circulated, the inside of the liquid storage tank is depressurized, and σ is connected to the main (four) tank so that the ±long portion can be replaced with the strip liquid supply circulation portion. According to a second aspect of the invention, in the first aspect, a plurality of the liquid storage tanks are provided in the crotch portion, and each of the coating liquid supply circulation portions is switchably connected in parallel. The third aspect of the present invention, characterized in that in the first or second hand & the s portion is provided at a position higher than the head portion, and the E portion has a coating liquid supplied to the nozzle portion The main storage liquid 曰 'Wu's sub-reservoir that is returned through the coating liquid of the nozzle portion, the main liquid storage tank and the sub-reservoir sample, and the j-crushing tank is supplied with the above-mentioned coating liquid to the circulation pump. The liquid storage tank transfer pipe is connected, and when the coating liquid is circulated by the coating liquid supply circulation portion, the internal pressure of the auxiliary liquid storage tank is pressed by the pressure switching portion. The fourth means for maintaining the inner chamber of the I m booth is lower than the above-mentioned main storage liquid, characterized in that, in the above-mentioned means, a plurality of heads are provided in the above-mentioned greeting portion, and the plurality of heads are used by The head is connected to the 200804092 tube in series. A fifth method of the invention is characterized in that, in the first to fourth hand slaves, the coating liquid is a coating liquid in which solid particles are mixed and dispersed. According to a fifth aspect of the invention, in the fifth aspect, the adherend is a liquid crystal substrate, and the solid particles are spacers for holding a gap between the two liquid crystal substrates. According to a seventh aspect of the present invention, there is provided a method of: spraying a coating liquid onto a to-be-attached body in a droplet shape; and a main storage tank containing the coating liquid; : the cloth liquid returns to the auxiliary liquid storage tank, and the auxiliary liquid storage tank is connected with the main liquid storage tank to transfer the coating liquid from the auxiliary liquid storage tank to the main liquid storage tank paper to::=: circulation part, to The coating liquid in the main liquid storage tank is supplied, and F is applied, and the coating liquid passing through the head portion is returned to the ± and f auxiliary liquid storage tanks to circulate the coating liquid; the liquid is returned to the upper cleaning liquid supply portion through The above-mentioned # is supplied to the head portion; (4) the cleaning liquid waste liquid discharge portion is supplied from the coating waste liquid; and the m, and the portion of the mouth portion is discharged to the force switching portion, and the cleaning liquid ring portion and the nozzle are used. When the coating liquid is supplied to Jia Shuo, the pressurized gas is pressurized upward, and when the coating is applied to the second::- portion, the pressure is switched to the material μ, +· + μ, and the coating liquid is circulated. The following steps are carried out in the pressure, in the storage tank and in the secondary storage tank: 12 200804092 Teach I# to Bu, +, and Main Ice " The above-mentioned pressure switching unit performs the "washing liquid supply" on the pressurized emulsion, so that the coating liquid is supplied to the circulation unit to a. The head of the washing head Qiu Zhi, the main taste is wide ^ a head, so that the spray through::: in the second supply circulation part to the above waste liquid exhaust gas replaced with cleaning liquid; shield "to the above head Cleaning solution • Coating solution replacement step > Cow job * Replacement from your work and cleaning solution
步驟之後，以上述壓力切換部對上 ^ $主儲液槽内進行加 液從上職·供給循環料往至上述喷 =，亚使通過該喷頭部之塗布液經由塗布液供給循環部 二^述廢液排出部，將存在於上述塗布液供給循環部至 述贺頭部内的清洗液置換爲塗布液；以及 =布液供給循環步驟’係在該清洗液•塗布液置換步 ^之^、’以上述壓力切換部對上述主儲液槽内及副儲液槽 仏進：減壓’使上述主儲液槽内之塗布液從上述塗布液供 給猶環部通往至上述喷頭部，並使通過該噴頭部之塗布液 =回至^述副儲液槽，J在該塗布液之循環中，使塗布液 k上述噴頭部成爲液滴喷出至被附著體。 本發明之第八手段，其特徵在於··係於上述第七手段 中將上述E部設置在高於上述噴頭部的位置， 在上述塗布液供給循環步驟時，以上述壓力切換部將 上述副儲液槽之内壓維持為低於上述主儲液槽之内壓。 本發明之第九手段，其特徵在於，具備： 喷頭部，以液滴狀將塗布液噴出至被附著體； 13 200804092 ιυ，具有内含上述塗布液之主儲液 =之塗布液返回之副儲液槽，且副二 連接成可將塗布液從上述副儲液槽移送至主儲液槽槽 塗布液供給循環部，以將上述主儲㈣Μ 給至上述噴頭部，、，& 2 通過該喷頭部之塗布液返回至上述 4儲液槽的方式，循環塗布液； 供认供給部，透過上述塗布液供給循環部將清洗液 供給至上述贺頭部； 廢液=㈣’從上述塗布液供給循環部的-部分排出 壓力切換部，使用上述清洗液清洗 環部及上述噴頭邻⑯、“一 # 進行加〆， 對上述清洗液供給部内 仃：二又精由上述塗布液供給循環部使塗布液循環 二’切換壓力以對上述主儲液槽内及副儲液槽内進行減 第一'^述E部至少具備具有上述主儲液槽與副儲液槽之 液掸盥：具有上述主儲液槽與副儲液槽之第二E，將副儲 :r:二？液槽連接成使上述第一匣與第二匣對上述塗布 液供給循環部可以切換， η日士、查^ E與第—E所容納之上述塗布液的組成相 冋時，連續實施以下步驟： 布液t給循環步驟，係、將上述第―匿連接在上述塗 r二肉、°循％部’错上述壓力切換部對上述第一 £之主儲 及副儲液槽内進行減壓，使上述主儲液槽内的塗布 200804092 液從上述塗布液供給循環部通往至上述喷頭部，並使通過 邊噴頭部之塗布液返回至上述副儲液槽，且在該塗布液的 循環中使塗布液從上述喷頭部成爲液滴喷出至被附著體； 停止步驟，係在該塗布液供給循環步驟的過程中，若 上述第一匣側的塗布液量變少時，則停止上述塗布液供給 制循％部之從上述第一匣之塗布液的供給循環；After the step, the liquid pressure is supplied to the upper liquid storage tank by the pressure switching unit, and the liquid is supplied from the upper portion and the supply of the circulating material to the spray, and the coating liquid passing through the spray head portion is supplied to the circulation unit via the coating liquid. The waste liquid discharge unit replaces the cleaning liquid present in the coating liquid supply circulation unit to the head portion with a coating liquid; and the = cloth liquid supply circulation step 'in the cleaning liquid/coating liquid replacement step ^, 'the pressure switching portion of the main liquid storage tank and the auxiliary liquid storage tank: depressurization' causes the coating liquid in the main liquid storage tank to be supplied from the coating liquid to the nozzle portion to the nozzle And the coating liquid passing through the head portion is returned to the sub-reservoir, and in the circulation of the coating liquid, the nozzle portion of the coating liquid k is ejected as droplets to the adherend. According to a seventh aspect of the present invention, in the seventh aspect, the E portion is disposed at a position higher than the head portion, and the pressure switching portion is configured by the pressure switching portion when the coating liquid is supplied in a circulation step The internal pressure of the reservoir is maintained below the internal pressure of the main reservoir. A ninth aspect of the present invention, comprising: a head portion that ejects a coating liquid to an adherend in a droplet shape; 13 200804092 ι, a coating liquid having a main stock solution containing the coating liquid = returned a sub-storage tank, and the sub-seconds are connected to transfer the coating liquid from the sub-reservoir to the main liquid storage tank supply liquid supply circulation portion to supply the main storage (four) to the nozzle portion, and & 2 The coating liquid is circulated by returning the coating liquid of the head portion to the four liquid storage tanks; the supply supply unit supplies the cleaning liquid to the head through the coating liquid supply circulation unit; waste liquid = (4) 'from the above The partial discharge pressure switching unit of the coating liquid supply circulation unit uses the cleaning liquid cleaning ring portion and the nozzle head 16 and “one #” to perform the twisting, and the cleaning liquid supply unit is supplied with the coating liquid supply cycle. The portion of the coating liquid is circulated by the two 'switching pressures to reduce the inside of the main liquid storage tank and the auxiliary liquid storage tank. The first part has at least the liquid liquid having the above-mentioned main liquid storage tank and the secondary liquid storage tank: With the above main storage The second E of the tank and the auxiliary liquid storage tank is connected to the sub-storage: r: two liquid tank so that the first crucible and the second crucible can be switched to the coating liquid supply circulation portion, and the n-day, the inspection and the E When the composition of the coating liquid contained in the first-E is opposite to each other, the following steps are continuously carried out: the liquid t is supplied to the recycling step, and the above-mentioned first is connected to the above-mentioned coated second meat, and the % portion is wrong. The switching unit decompresses the first main storage and the sub-storage tank, and applies the coating liquid 200804092 in the main liquid storage tank from the coating liquid supply circulation unit to the nozzle unit, and passes the side The coating liquid of the head portion is returned to the sub-reservoir, and the coating liquid is ejected from the nozzle portion into the adherend during the circulation of the coating liquid; and the stopping step is performed in the coating liquid supply cycle In the process, when the amount of the coating liquid on the first side is reduced, the supply cycle of the coating liquid from the first coating of the coating liquid supply and the % portion is stopped;
a切換步驟，係在該停止步驟後，將上述塗布液供給循 %部的連接從上述第一匣切換至上述第二匣； 塗布液供給循環步驟’係在該切換步驟後，以上述壓 切換部對上述第二E之主儲液槽内及副儲液槽内進行減 ^使上述主儲液槽内之塗布液從上述塗布液供給循環部 、求至上述贺頭部’並使通過該噴頭部之塗布液返回至上 ϋ儲液槽Y且在該塗布液的循環中使塗布液從上述喷頭 邛成為液滴噴出至被附著體。 、、 本發明之第十手段，其特徵在於，具備： =部’以液滴狀將塗布液成爲液滴噴出至被附著體. 匿部，具有内含上述塗布液之主儲附者體， 噴頭部之、冷右y、/ 之主儲液槽與使通過上述 、P之主布液返回之副儲液槽， 連接成可將泠古、六〜 且Μ保液槽與主儲液槽 钱成了將塗布液從上述副儲液槽移送 塗布液供給循環部，以將 ，a 將上迷主儲液样Φ } 回至上述 給至上述噴頭部#展糟中的塗布液供 一， 使通過該贺頭部之塗布汸、只 副儲液槽的方式，循環塗布液； 土布液返 肴洗液供給部，透過上述塗 供給至上述噴頭部； 從仏、.、°循裱部將清洗液 15 200804092 尾液排出部’從上述塗布液供給循環部的一部分排出 廢液；以及 姐堅力刀換，使用上述清洗液清洗上述塗布液供給循 %部及^述喷頭部時，以加壓氣體對上述清洗液供給部内 ，行加壓：又藉由上述塗布液供給循環部使塗布液循環 ^刀換壓力以對上述主儲液槽内與副儲液槽内進行減 • /上述匿部至少具備：具有上述主儲液槽與副儲液槽 之弟一ϋ與具有上述主儲液槽與副儲液槽之第二匿，副儲 液槽與主儲液槽連接成使上述第一s與第二匿對上述塗布 液供給循環部可以切換·， 當上述第一E與第二£中所内含之上述塗布液的組成 不同時，實施以下步驟： 塗布液供給循環步驟，係將上述第一匣連接於上述塗 布液供給循環部，以上述壓力切換部對上述第一匿之主儲 •⑨槽内及副儲液槽内進行減壓，使上述主儲液槽内之塗布 液從上述塗布液供給循環部通往至上述喷頭部，並使通過 該=頭部之塗布液返回至上述副館液槽，且在該塗布液的 循環中使塗布液從上述噴頭邬# 貝貝口丨成爲液滴喷出至被附著體 上； 停止步驟，在該塗布液供給循環步驟的過程中，若上 述第一匣側的塗布液量變少，釗# ^ ^ i T止上述塗布液供給循環 部之從上述第一匣之塗布液的供給循環· 切換步驟，在該停止步驟後，脸u> 便將上述塗布液供給循環 16 200804092 部的連接從上述第一匣切換至上述第二匣； 塗布液排出步驟，在該切換步驟後，藉上述壓力切換 部將加壓氣體從上述塗布液供給循環部通往至上述喷頭 部，以將存在於上述塗布液供給循環部至上述喷頭部内的 塗布液排出； 清洗步驟，在該塗布液排出步驟之後，藉上述壓力切 換部以加壓氣體對上述清洗液供給部内進行加壓，藉此使 上述清洗液從上述塗布液供給循環部冑往至上述喷^ 並將該通過噴頭部的清洗液排出至上述廢液排出部二清 洗上述塗布液供給循環部至上述喷頭部； /月 新的塗布液供給循環步驟，係在該清洗步驟之後，以 上逃壓=切換部對上述第二匿之主儲液槽内及副儲液槽内 進仃減壓，使上述主儲液槽内之新的塗布液從上述塗 供給循環部通往至上述喷頭部，使通過該噴頭部之塗布液 返回至上述副儲液槽’且在該塗布液的循環中使塗布液從 上述噴頭部成爲液滴噴出至被附著體。 立本發明採用如上述之結構，共通使用塗布液供給循淨 部及壓力切換部，故無論塗布液之組成爲相同物 貝退疋組成爲不同物質，匣的更換皆容易，使用方便性良 好.〇 【實施方式】 接著’與圖—起說明本發明之實施形態。圖 實施形態之液滴噴出裝置系統圖，圖2為該液滴噴出壯： 之概略區塊圖。 、衣罝 17 200804092 首先，與圖2 —起說明此液滴 如圖2所示，液滴噴出裝置，從功^衣置之概略結構。 頭部4所構成 換部、1、塗布液供給循環部2、&部3與噴粗刀成由昼力切 大致上如圖所示之連接關係。 上逐匣邵2係設置在 ▼ π 口卩 4之位罟。文， 部2’裝有第一 E5a與第二㈣兩個匿，第一心 =一【5b對裝置本體可以更換（可進行裝卸）。並且，a switching step of switching the connection of the coating liquid supply to the % portion from the first crucible to the second crucible after the stopping step; the coating liquid supply circulation step 'being after the switching step, switching by the above pressure a portion of the main liquid storage tank and the sub-reservoir of the second E are reduced, and the coating liquid in the main liquid storage tank is supplied from the coating liquid to the circulation portion to obtain the moving head portion The coating liquid of the head portion is returned to the upper reservoir Y, and the coating liquid is ejected from the nozzle 邛 into the adherend during the circulation of the coating liquid. According to a tenth aspect of the present invention, there is provided a method of: discharging a liquid droplet to a to-be-attached body in a droplet form, and having a main reservoir body containing the coating liquid; The main liquid storage tank of the nozzle part, the cold right y, / and the sub-reservoir that returns the main cloth liquid through the above, P, can be connected to the old liquid storage tank and the main liquid storage tank The money is transferred from the sub-reservoir to the coating liquid supply circulation portion, so that a, the main storage liquid sample Φ } is returned to the coating liquid supplied to the nozzle portion #1, The coating liquid is circulated by the coating of the head and the sub-tank, and the soil liquid back to the washing liquid supply unit is supplied to the head portion through the coating; the 仏, . Cleaning liquid 15 200804092 The tail liquid discharge unit 'discharges the waste liquid from a part of the coating liquid supply circulation unit; and when the cleaning liquid is used, the cleaning liquid is used to clean the coating liquid supply portion and the nozzle portion. The pressurized gas is pressurized in the cleaning liquid supply unit: by the above The cloth liquid supply circulation unit converts the coating liquid into a pressure to reduce the pressure in the main liquid storage tank and the auxiliary liquid storage tank. / / The above-mentioned hiding portion is provided at least: the brother having the above-mentioned main liquid storage tank and the secondary liquid storage tank And the second storage tank having the main storage tank and the auxiliary liquid storage tank, and the auxiliary liquid storage tank is connected to the main liquid storage tank so that the first s and the second liquid can be switched to the coating liquid supply circulation unit, When the composition of the coating liquid contained in the first E and the second is different, the following step is performed: a coating liquid supply circulation step of connecting the first crucible to the coating liquid supply circulation portion at the pressure The switching unit decompresses the inside of the first storage main tank and the sub-reservoir, and causes the coating liquid in the main liquid storage tank to pass from the coating liquid supply circulation unit to the nozzle unit, and Returning the coating liquid passing through the head portion to the sub-chamber liquid tank, and discharging the coating liquid from the nozzle 邬 #贝贝口丨 to the adherend in the circulation of the coating liquid; During the coating liquid supply cycle step, When the amount of the coating liquid on the first side is small, 钊#^^i T stops the supply cycle/switching step of the coating liquid from the first coating of the coating liquid supply circulation portion, and after the stopping step, the face u> The connection of the coating liquid supply cycle 16 200804092 is switched from the first enthalpy to the second enthalpy; a coating liquid discharge step, after the switching step, the pressurized gas is supplied from the coating liquid through the pressure switching unit. a portion that leads to the shower head portion to discharge the coating liquid present in the coating liquid supply circulation portion to the shower head portion; and a cleaning step of the pressurized gas by the pressure switching portion after the coating liquid discharge step Pressurizing the inside of the cleaning liquid supply unit, the cleaning liquid is supplied from the coating liquid supply circulation unit to the discharge, and the cleaning liquid passing through the head unit is discharged to the waste liquid discharge unit to clean the coating liquid. Supplying the circulation portion to the nozzle portion; a new coating liquid supply circulation step, after the cleaning step, the above escape pressure = switching portion to the second hidden main reservoir The inside of the tank and the auxiliary liquid storage tank are depressurized, and a new coating liquid in the main liquid storage tank is led from the coating supply circulation portion to the shower head portion, and the coating liquid passing through the shower head portion is returned to the above. In the sub-storage tank', the coating liquid is ejected from the nozzle portion into the adherend in the circulation of the coating liquid. According to the above configuration, the coating liquid is supplied to the cleaning portion and the pressure switching portion in common. Therefore, regardless of the composition of the coating liquid, the composition of the same material is different, and the replacement of the crucible is easy, and the convenience of use is good. [Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings. Fig. 2 is a schematic diagram of a droplet discharge device system of the embodiment, and Fig. 2 is a schematic block diagram of the droplet discharge.衣衣罝 17 200804092 First, the liquid droplets will be described with reference to Fig. 2, as shown in Fig. 2, the droplet discharge device is schematically constructed. The changing portion of the head portion 4, the coating liquid supply circulation portion 2, the & portion 3 and the blasting blade are substantially cut as shown in the drawing. The upper 匣 匣 Shao 2 system is set at ▼ π 卩 卩 4 position 罟. In the text, the part 2' is equipped with the first E5a and the second (four) two hidden, the first heart = one [5b can replace the device body (can be loaded and unloaded). and,
此弟一匣5a與第二匣5b，相對上f 並列連接，且可相互㈣。 ^布液供給循環部2 如圖！所示，上述s 5a，5b，分別具有内含喷出前之 主布液的主儲液槽6與塗布液回收用的副儲、夜 «用緩衝儲液槽”。主储液槽6連接有主二夜二： 二:！管8’此主儲液槽用加壓·減壓…過塗布液 =…連接於設在上述壓力切換之主儲液槽用 支吕9。主儲液槽用歧f 9則透過主储液槽 1〇連接於主儲液槽用果U。在從上述第一…：：： 儲液槽用加壓·減壓f 8與從上述第二£ %引 液槽用加壓•減壓f 8的結合部，連接有由三通 = 主儲液槽用切換閥12。 、 儲液槽間移送管13從副儲液槽7向主儲液槽6延 儲液槽間移送用泵14係介於該途中。 ㈢ ’ 在副儲液槽7連接有副儲液槽用加壓·減壓管丨$， 田丨〗儲液槽用加壓·減壓t 15通過塗布液供給循環部2二 接於設在上述壓力切換部丨之副儲液槽用歧管 釗儲液 18 200804092 槽用歧管16則透過副儲液槽用壓力緩衝器I?連接於副儲 液槽用泵1 8。在從上述第一匣5a引出之副儲液槽用加壓· 減壓官15與從上述第二匣51d引出之副儲液槽用加壓•減 壓官15的結合部，連接有由三通閥構成的副儲液槽用切 換閥19。 塗布液供給管20係從主儲液槽6向喷頭部4延伸，在 仗上述第一匣5a引出之塗布液供給管20與上述第二匣5b 引出之塗布液供給管2〇的結合部，連接有由三通閥構成 的匣切換閥21。 k布液回收官22從噴頭部4通過塗布液供給循環部2 延伸^儲液檜7側，在延伸至上述第一匣5a側之塗布液 口收& 22與延伸至上述第二匣讣側之塗布液回收管u 的分支部，i車：&古山― 由二通閥構成的塗布液回收用切換閥 隹上述贺頭部4,四個頭2乜 各頭24a〜24d你益+ /、精由碩連接管39串聯連接 在主儲液槽6的上邮〜 9 ς 4 口疋有利用超音波之液面减測哭 在主儲y揭 主布液26之液面（剩餘量）。 在主儲液槽6與副儲液糨 槽7具有由磁性體（可藉由 加交變磁場自旋）構成 ^# 、备a 見掉口σ 2 7，糟由改變交變磁摄^y 適當調整攪拌器27 U文磁场可 旋轉的授拌作用，可數。亚猎由伴隨之 隔件微粒）的沈降。a防止塗布液26中固體微粒（間 透過清洗液供給管 將h洗液儲液槽29連接在塗布 19 200804092 液供給循環部2,在儲液槽内例如含有異丙醇等清洗液3〇。 清洗液儲液槽29内之清洗液3〇的液面（剩餘量）則由液 面感測器3 1監視。 在上述塗布液回收官22的途中連接有廢液管，該 廢液管32延伸至廢液儲液槽&儲液槽内的廢液量由液 面感測器34監視。 卜由氮氣或空氣等構成的加壓氣體3 5，係通過加壓用歧 吕6藉由各加壓氣體用配管3 7供給至主儲液槽用歧管 9'副儲液槽用歧管16、塗布液供給管2〇及清洗液儲液槽 29側。The younger brother 5a and the second 匣5b are connected side by side with respect to f, and can be mutually (four). ^ cloth supply cycle part 2 as shown! As shown in the above, each of the above-mentioned s 5a, 5b has a main liquid storage tank 6 containing a main cloth liquid before discharge, and a sub-storage and a night buffer storage tank for collecting the coating liquid. The main liquid storage tank 6 is connected. There are two main nights: two:! Tube 8' This main storage tank is pressurized and decompressed... Over-coating liquid =... is connected to the main storage tank provided in the above-mentioned pressure switching. The difference f 9 is connected to the main liquid storage tank U through the main liquid storage tank 1 . In the first ...::: storage tank, the pressure and pressure decompression f 8 and the second The junction of the pressurization and the pressure reduction f 8 of the liquid tank is connected to the three-way=main reservoir control valve 12. The inter-reservoir transfer pipe 13 extends from the sub-tank 7 to the main reservoir 6 The inter-reservoir transfer pump 14 is interposed in the middle. (3) 'The sub-reservoir 7 is connected with a sub-reservoir for pressurization and decompression pipe ,$, and the field sump is pressurized and decompressed. t 15 is connected to the sub-reservoir manifold 钊 reservoir 18 provided in the pressure switching unit 通过 by the coating liquid supply circulation unit 2, 200804092, and the manifold 16 is connected to the sub-storage tank pressure damper I? The pump 1 8 is used for the auxiliary storage tank. The pressurization/decompression officer 15 of the sub-reservoir from the first crucible 5a and the pressurization/decompression officer 15 of the sub-tank drawn from the second crucible 51d are connected by three The sub-reservoir switching valve 19 configured by a valve. The coating liquid supply pipe 20 extends from the main reservoir 6 to the head unit 4, and the coating liquid supply pipe 20 and the second pipe drawn from the first port 5a The joint portion of the coating liquid supply pipe 2〇 drawn from the crucible 5b is connected to the crucible switching valve 21 composed of a three-way valve. The k cloth liquid recovery unit 22 extends from the shower head portion 4 through the coating liquid supply circulation portion 2 a side, a coating liquid port extending to the first side 5a side and a branch portion extending to the second liquid side of the coating liquid recovery pipe u, i car: & Gushan - consisting of a two-way valve The coating liquid recovery switching valve 隹 the above head 4, the four heads 2 heads 24a~24d you benefit + /, fine by the connection tube 39 connected in series in the main reservoir 6 on the mail ~ 9 ς 4疋 There is a liquid level reduction test using ultrasonic waves to cry the liquid level (remaining amount) of the main cloth liquid 26 in the main storage y. The main liquid storage tank 6 and the auxiliary liquid storage tank 7 have The magnetic body (can be spun by adding a magnetic field) ^#, prepare a see the mouth σ 2 7, and change the alternating magnetic resonance ^y to adjust the stirrer 27 U text magnetic field can be rotated, The sedimentation of the particles in the coating liquid 26 prevents the solid particles in the coating liquid 26 from interposing the h washing liquid storage tank 29 through the cleaning liquid supply pipe to the coating 19 200804092 liquid supply circulation unit 2, The liquid storage tank contains, for example, a cleaning liquid such as isopropyl alcohol. The liquid level (remaining amount) of the cleaning liquid 3 in the cleaning liquid storage tank 29 is monitored by the liquid level sensor 31. A waste liquid pipe is connected to the middle of the official 22, and the waste liquid pipe 32 extends to the waste liquid storage tank & the amount of waste liquid in the liquid storage tank is monitored by the liquid level sensor 34. The pressurized gas 35 composed of nitrogen gas or air is supplied to the main liquid storage tank manifold 9' sub-storage manifold by the pressurized gas piping 37 through the pressurizing gas. 16. The coating liquid supply pipe 2 and the cleaning liquid storage tank 29 side.
在上述加壓氣體用配管37與塗布液供給管的結合 π ’设有由三通閥構成的塗布液·清洗液·加壓氣體切換 閥38。另外，在上述加壓氣體用配管^與清洗液供給管 28的結合部’設有由三通閥構成的清洗液·加壓氣體切換 閥40。在上述主錯液槽用歧管9、副儲液槽用歧管^及 加壓用歧管36,分別設有壓力感測器41。 在從上述塗布液供給用㈣閥21 5丨A coating liquid, a cleaning liquid, and a pressurized gas switching valve 38 composed of a three-way valve are provided in the combination π of the pressurized gas piping 37 and the coating liquid supply pipe. Further, a cleaning liquid/pressure gas switching valve 40 composed of a three-way valve is provided in the joint portion of the pressurized gas pipe and the cleaning liquid supply pipe 28. A pressure sensor 41 is provided in each of the main wrong tank manifold 9, the sub-tank manifold, and the pressurizing manifold 36. In the above-mentioned coating liquid supply (four) valve 21 5丨
20與廢液管32的結合部，設有由三通闊構成 廢液切制42。在塗布液供給管2()上之上述塗布液•廢 液切換閥42與喷頭部4之間，設有由二通閥構成的第一 斷路閥43。從喷頭部4引出的塗布液回收管U 液Γ 32㈣合部料，分支歧伸至廢好32側之廢液 側官體44與，伸至塗布液回收用切換閥23側之回收侧管 體45兩條支管。並且’在上述廢液側管體44上設有由二 20 200804092 通閥構成的第二斷路閥46，在回收側管體45上則μ 二通閥構成的第三斷路閥47，如圖所示，從噴頭邹 4的回收管Μ係連接在第二斷路闊46與第三斷路閥 如圖所示，第一 g 5a與第二匿5b，皆以主儲液槽“ 塗布液供給管20一頭24a〜24d—塗布液回收管&副儲 夜才曰7s儲液槽間移送管13 (儲液槽間移送用泵14 )的之 方式形成塗布液26的循環路徑。 第一匠5a與第二E5b皆可對裝置本體進行更換，圖 中49a為主儲液槽6與塗布液供給管2〇的連接部，4外為 主儲液槽6與主儲液槽用加壓•減壓管8的連接部，々％ 為主儲液槽6與儲液槽料送管13出π側的連接部，_ 為副儲液槽7與儲液槽用移送管13入口侧的連接部，恢 為=儲液槽7與副儲液槽用加壓.減壓# 15料接部，術 ^是副儲液槽7與塗布液回收管22料接部。此等連接 °P叫〜情中’係將副儲液槽與主儲液槽連接成上述E 5a A可對裝置本體進行更換。 ’ 、、在第匣5a與第二匣5b的主儲液槽0與副儲液槽7， 曰顧有既疋里的塗布液26。本實施形態之例，係將作為液 、、丁衣置之基板間間隔件所使用之例如由珠粒等構成 球狀間隔件粒子附著至基板上的液滴噴出裝置。 1件粒子的直彳！，雖然依液晶顯示裝置的種類例如 方式或ΤΝ方式而不同，但通常使用2 #瓜〜$以扭左右 為可仗頭24之噴口喷出的直徑。此間隔件粒子以例 21 200804092 士 0.5重里％〜2〇重量％左右的濃度分散於有機液體、水 或有裨液體與水的混合液等分散液中。 本貝轭形悲’係使用混合水舆乙二醇，粘度調整至 10mPa · s左右使其可穩定噴出的分散液中，分散有重 量％直徑爲3.5# m之破璃珠粒者。根據需要，也可以添 加用以良好維持間隔件粒子之分散性的分散劑、或者可將 間隔件粒子接著至基板表面的接著劑等。 _ 下面，說明此液滴喷出裝置的各項操作。首先，說明 使用第一匣5a噴出塗布液26的情形。 (塗布液的填充操作） 於第一匣5a安裝在液滴噴出裝置的狀態，由於在塗布 液供給管20、各頭24a〜24d、頭連接管39及塗布液回收 管22内等存在空氣，因此爲了排出此空氣，首先將空氣 置換成清洗液30。 由於從主儲液槽6至切換閥38之間的塗布液供給管2〇 φ 内還殘留有空氣，因此將切換閥38的A側打開、B側關 閉，切換閥21則維持原狀，將切換閥42的a側關閉、b 側打開，並關閉斷路閥43。另外’將切換閥12的A側打 開，B侧關閉。 然後，使加壓氣體35、通過加壓氣體用配管37、主儲 液槽用歧管9、主儲液槽用加壓•減壓管8而供給至主儲 液槽6内，以提高内壓，利用該内壓使塗布液％流過塗 布液供給管20及廢液管32，藉此將塗布液％填充至其間 (從主儲液槽6至切換閥38之間）之路徑。 22 200804092 因此，打開切換闕40的a 閥38的A ^ Μ . 關閉B側，關閉切換 幻A側、打開b側，打開The junction with the waste liquid pipe 32 is provided with a three-way wide waste liquid cut 42. A first shutoff valve 43 composed of a two-way valve is provided between the coating liquid/waste liquid switching valve 42 and the head unit 4 on the coating liquid supply pipe 2 (). The coating liquid recovery pipe U liquid enthalpy 32 (four) merging material which is taken out from the head portion 4, branches to the waste liquid side body portion 44 on the side of the waste 32, and reaches the recovery side pipe on the side of the coating liquid recovery switching valve 23 Body 45 two branches. And a second shut-off valve 46 composed of two 20 200804092 valves is disposed on the waste liquid side pipe body 44, and a third shut-off valve 47 composed of a μ two-way valve is disposed on the recovery side pipe body 45, as shown in the figure. It is shown that the recovery pipe from the nozzle Zou 4 is connected to the second breaking pipe 46 and the third breaking valve as shown in the figure, the first g 5a and the second hiding 5b are both the main liquid storage tank "coating liquid supply pipe 20 A circulation path of the coating liquid 26 is formed in a manner of forming a coating liquid 26 from the first 24a to the 24d - the coating liquid recovery pipe & the sub-reservoir 7s (the inter-tank transfer pump 14). The second E5b can replace the main body of the device. In the figure, 49a is the connection portion between the main liquid storage tank 6 and the coating liquid supply pipe 2, and the external pressure storage and decompression of the main liquid storage tank 6 and the main liquid storage tank are used. The connection portion of the tube 8 is 连接% the connection portion between the main liquid storage tank 6 and the liquid storage material feed pipe 13 on the π side, and _ is the connection portion between the auxiliary liquid storage tank 7 and the inlet side of the liquid storage tank transfer pipe 13, Revert to = storage tank 7 and sub-reservoir with pressurization. decompression # 15 material joint, surgery ^ is the sub-reservoir 7 and the coating liquid recovery pipe 22 material joint. These connections °P called ~ love In the department The liquid tank is connected to the main liquid storage tank to form the above-mentioned E 5a A, and the main body of the apparatus can be replaced. ', and the main liquid storage tank 0 and the secondary liquid storage tank 7 of the fifth and second crucibles 5a and 5b are incompatible with each other. In the example of the present embodiment, a liquid droplet ejecting apparatus in which spherical spacer particles are adhered to a substrate, such as beads, is used as a spacer between the substrate and the substrate. The diameter of one particle is different depending on the type of liquid crystal display device, for example, or the manner of the liquid crystal display device. However, it is generally used to use 2 #瓜〜$ to twist the left and right to the diameter of the nozzle of the hammer 24. The spacer particle In Example 21, 200804092, a concentration of about 0.5% by weight and about 2% by weight is dispersed in a dispersion such as an organic liquid, water, or a mixed liquid of hydrazine and water. The viscosity is adjusted to about 10 mPa · s to make it stable to be sprayed out, and the glass beads having a weight % of diameter of 3.5 # m are dispersed. If necessary, a dispersion for dispersing the spacer particles can be well maintained. Dispersant, or spacer particles Next, an adhesive or the like to the surface of the substrate. Next, the operation of the liquid droplet ejecting apparatus will be described. First, the case where the coating liquid 26 is ejected using the first crucible 5a will be described. (Filling operation of the coating liquid) 5a is installed in the state of the liquid droplet ejecting apparatus, and air is present in the coating liquid supply pipe 20, the heads 24a to 24d, the head connecting pipe 39, and the coating liquid recovery pipe 22, so that in order to discharge the air, the air is first replaced with The cleaning liquid 30. Since air remains in the coating liquid supply pipe 2〇φ from the main storage tank 6 to the switching valve 38, the A side of the switching valve 38 is opened and the B side is closed, and the switching valve 21 is maintained. In the original state, the a side of the switching valve 42 is closed, the b side is opened, and the shutoff valve 43 is closed. Further, the A side of the switching valve 12 is opened and the B side is closed. Then, the pressurized gas 35, the pressurized gas pipe 37, the main liquid storage tank manifold 9, and the main liquid storage tank pressure/decompression pipe 8 are supplied to the main liquid storage tank 6 to increase the inside. The pressure is applied to the coating liquid supply pipe 20 and the waste liquid pipe 32 by the internal pressure, whereby the coating liquid % is filled in the path therebetween (between the main liquid storage tank 6 and the switching valve 38). 22 200804092 Therefore, open A ^ a of the a valve 38 of the switching 阙40. Close the B side, close the switch phantom A side, open the b side, open
側，打PI化枝 闕21的A側、關閉B 側打開切換閥42的A侧、關閉Μ 打開斷路閥46，關閉斷路閥47。、了開斷路闕43 ’ 後使加壓氣體h通過加壓氣 、、軎咮、、右妙v t 笑乳體用配管37供給至 β冼液储液槽29内以提高内壓， 淹榉？Qt 利用该内壓使清洗液儲 =内的清洗液30流過清洗液供給管28、加_用 =之—部分、塗布液供給管2〇、各頭一d、頭 連接官39、塗布液回收管22 八 、 -^ pe ^ ^ ^ 口丨刀、廢液管32，藉此 』的空氣置換成清洗液3G。使清洗液3q流過既定時 間，精此以清洗液充滿包含相部4的循環路徑。 接著，打開切換閥42的A側.、關閉b侧，打開斷路 閱43。然後，將加壓氣體35供給至主儲液槽^以提高 内壓’利用該内壓使塗布液26流過塗布液供給管2〇、各 I頭24a〜24d、噴頭連接管39、塗布液回收管Μ的一部 分、廢液管32,藉此將清洗液3〇置換成塗布液％。再關 閉斷路閥46’打開斷路閥47’將塗布液％壓送至回收側 管體45内及延伸至其前邊之副储液槽7的塗布液回收管η 内。由此，結束塗布液26的填充操作，接著進行塗布液％ 的噴出操作。 (塗布液的噴出操作） 如上所述’ ϋ部係設置在高於喷頭部4的位置，使兩 者之間產生水位差。本發明則利用此水位差，將塗布液％ 從記錄頭4喷出時，亦使塗布液26通過上述循環路徑循 23 200804092 %，以抑制塗布液成分的沈降，本實施形態可抑制間隔件 粒子的沈降。 然而，若只將匣部3設置在高於喷頭部4的位置，則 由於上述水位差的影響，並不能很好地維持噴頭噴口處的 彎、液面，故會像習知技術般發生漏液。因此，本發明，係 使主儲液槽6内及副儲液槽7内處於減壓狀態，以能很好 地維持噴頭喷口處的彎液面，且亦適合於可使塗布液％ ^ 循環的條件。 具體而言，係打開塗布液回收用切換閥23的A侧、 關閉B側，關閉第二斷路閥46，打開第三斷路閥47，並 打開主儲液槽用切換閥12與副儲液槽用切換閥19的a側、 關閉B側。然後，驅動主儲液槽用泵丨i與副儲液槽用泵丨8， 通過主儲液槽用加壓•減壓管8與副儲液槽用加壓•減壓 管15,分別使主儲液槽6内與副儲液槽7内處於減壓狀態。 副儲液槽7的内壓係由壓力切換部1進行控制使其總是低 _ 於主儲液槽6的内壓，即使塗布液26的量發生變化，兩 者的_壓力差亦總是維持一定。塗布液26的剩餘量可由液 面感測器25檢測出。 本實施形態如圖1所示，係將喷頭24之噴出面與主儲 液槽6之底面的段差η設定為約700mm，主儲液槽6的内 壓設定為約一8kPa，副儲液槽7的内壓設定為約—1 ikpa， 兩儲液槽6，7的壓力差則設定為約3kPa。主儲液槽6的内 壓隨著主儲液槽6内的塗布液26的量在約土〇.5kPa内變動， 與其受動相對應地控制副儲液槽7的内壓。 24 200804092 又如圖所示，副儲液槽7的液面係由驅動儲液槽間移 送用泵14控制使其總是低於主健液槽6的、液面，利用主 儲液槽6與副儲液槽7的液面差使塗布液26的循 進行。 ：，On the side, the A side of the PI branching unit 21 and the closing side B open the A side of the switching valve 42 and close the opening valve 46 to close the shutoff valve 47. After the opening of the road 阙 43 ′, the pressurized gas h is supplied to the β sputum liquid storage tank 29 through the pressurized gas, 軎咮, and 右 v t 乳 乳 以 以 以 以 以 以 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉 榉Qt uses the internal pressure to cause the cleaning liquid 30 in the cleaning liquid to flow through the cleaning liquid supply pipe 28, the portion to be used, the coating liquid supply pipe 2, the head one d, the head connection officer 39, and the coating liquid. The recovery pipe 22 VIII, -^ pe ^ ^ ^ boring knife, waste liquid pipe 32, thereby replacing the air into the cleaning liquid 3G. The cleaning liquid 3q is allowed to flow through the timing, and the circulation path including the phase portion 4 is filled with the cleaning liquid. Next, the A side of the switching valve 42 is opened, the b side is closed, and the open circuit 43 is opened. Then, the pressurized gas 35 is supplied to the main liquid storage tank to increase the internal pressure. The coating liquid 26 is caused to flow through the coating liquid supply pipe 2, the first heads 24a to 24d, the nozzle connecting pipe 39, and the coating liquid. A part of the tube crucible and the waste liquid tube 32 are recovered, whereby the cleaning liquid 3〇 is replaced with the coating liquid %. The shut-off valve 46' is opened to open the shut-off valve 47', and the coating liquid % is pressure-fed into the recovery-side tube body 45 and into the coating liquid recovery pipe η of the sub-storage tank 7 at the front side. Thereby, the filling operation of the coating liquid 26 is completed, and then the discharging operation of the coating liquid % is performed. (Discharging operation of coating liquid) As described above, the crotch portion is disposed at a position higher than the head portion 4, so that a water level difference is generated between the two. According to the present invention, when the coating liquid % is ejected from the recording head 4 by the water level difference, the coating liquid 26 is also passed through the above-mentioned circulation path 23 200804092% to suppress sedimentation of the coating liquid component, and the spacer particles can be suppressed in this embodiment. Settlement. However, if only the crotch portion 3 is disposed at a position higher than the head portion 4, the bending and liquid level at the nozzle of the nozzle can not be well maintained due to the influence of the above water level difference, so that it occurs like a conventional technique. Leakage. Therefore, the present invention is such that the inside of the main liquid storage tank 6 and the auxiliary liquid storage tank 7 are in a decompressed state, so that the meniscus at the nozzle opening can be well maintained, and is also suitable for circulating the coating liquid. conditions of. Specifically, the A side and the closing B side of the coating liquid recovery switching valve 23 are opened, the second shutoff valve 46 is closed, the third shutoff valve 47 is opened, and the main liquid storage port switching valve 12 and the sub liquid storage tank are opened. Use the a side of the switching valve 19 to close the B side. Then, the pump 丨i for the main storage tank and the pump 丨8 for the auxiliary storage tank are driven, and the pressure/decompression tube 8 for the main storage tank and the pressure/decompression tube 15 for the auxiliary storage tank are respectively used. The inside of the main reservoir tank 6 and the sub-reservoir tank 7 are in a reduced pressure state. The internal pressure of the sub-tank 7 is controlled by the pressure switching unit 1 so as to be always lower than the internal pressure of the main reservoir 6, and even if the amount of the coating liquid 26 changes, the _pressure difference between the two is always Maintain a certain. The remaining amount of the coating liquid 26 can be detected by the liquid level sensor 25. In the present embodiment, as shown in Fig. 1, the step η between the discharge surface of the head 24 and the bottom surface of the main reservoir 6 is set to about 700 mm, and the internal pressure of the main reservoir 6 is set to about 8 kPa. The internal pressure of the tank 7 is set to about -1 ikpa, and the pressure difference between the two storage tanks 6, 7 is set to about 3 kPa. The internal pressure of the main liquid storage tank 6 varies with the amount of the coating liquid 26 in the main liquid storage tank 6 within about 5 kPa, and the internal pressure of the secondary liquid storage tank 7 is controlled in accordance with the movement thereof. 24 200804092 As shown in the figure, the liquid level of the sub-tank 7 is controlled by the pump 14 for driving the inter-tank transfer so as to always be lower than the liquid level of the main sump 6, and the main sump 6 is utilized. The liquid level difference from the sub-tank 7 causes the coating liquid 26 to follow. :,
主儲液槽6内的塗布液26，則利用上述水位差通過塗 布液供給管20供給至喷頭部4，而流入至各噴頭的= 力室，藉由驅動壓電振動器從喷口成為液滴噴出至液晶用 基板48的既定位置上。在此附著在基板上的液滴中，大 致含有既定個數（在本實施形態中爲3〜5個）的間隔件 粒子。此外，於其後將說明喷頭24的内部結構。 未喷出之塗布液26流向下一個喷頭24並將該一部分 喷出，最後未被喷出而殘留下來的塗布液26則通過塗布 液回收管22送至副儲液槽7。副儲液槽7内的塗布液26, 藉由驅動儲液槽間移送用泵14，通過儲液槽間移送管 返回至主儲液槽6。藉由此儲液槽間移送用泵14的旋轉控 制’可以使主儲液槽6與副儲液槽7的液面差η總是維持 在適當值。 未噴出塗布液26時’由於喷頭24的壓電振動器未被 驅動’因此塗布液26僅是穿過各喷頭24a〜24d的内部。 以上述方式，塗布液26無論被喷出時或未被噴出時都 在循環，由於總是處於流動狀態，因而可以抑制塗布液構 成成分，尤其是本實施形態之間隔件粒子的沈降。再者， 由於在本實施形態中，分別在主儲液槽6及副儲液槽7内 旋轉攪拌器27，因而可進一步抑制間隔件粒子的沈降。 25 200804092 (匣的切換操作） 接著，況明從第一匣5a向第二匣5b的切換操作。當 液面感測器25檢測出第一匣5a侧之主儲液槽6的液面低 於規疋的位置蚪，則判斷爲第一匣5 a侧的塗布液26已消 耗。 、田第一 H 5a與第二匣5b之塗布液26為相同組成時， 雖然塗布液26已經填充在包含喷頭部4的循環路徑中， 但在從主儲液槽6至切換閥38b間的塗布液供給管2〇b、 刀換閥23至副儲液槽几的路徑仍殘留有空氣。The coating liquid 26 in the main liquid storage tank 6 is supplied to the head unit 4 through the coating liquid supply pipe 20 by the above-described water level difference, and flows into the force chamber of each head, and becomes a liquid from the nozzle by driving the piezoelectric vibrator. The droplets are ejected to a predetermined position of the liquid crystal substrate 48. The droplets adhering to the substrate here generally contain a predetermined number of spacer particles (3 to 5 in the present embodiment). Further, the internal structure of the head 24 will be described later. The unsprayed coating liquid 26 flows to the next head 24 and ejects the portion, and finally the coating liquid 26 remaining without being ejected is sent to the sub-tank 7 through the coating liquid recovery pipe 22. The coating liquid 26 in the sub-tank 7 is returned to the main storage tank 6 through the inter-tank transfer pipe by driving the inter-tank transfer pump 14. By the rotation control of the inter-reservoir transfer pump 14, the liquid level difference η between the main reservoir 6 and the sub-tank 7 can always be maintained at an appropriate value. When the coating liquid 26 is not ejected, the piezoelectric liquid vibrator of the head 24 is not driven. Therefore, the coating liquid 26 passes only through the inside of each of the heads 24a to 24d. In the above manner, the coating liquid 26 is circulated both when it is ejected or when it is not ejected, and since it is always in a flowing state, it is possible to suppress the composition of the coating liquid, in particular, the sedimentation of the spacer particles of the present embodiment. Further, in the present embodiment, the agitator 27 is rotated in the main reservoir 6 and the sub-tank 7, respectively, so that the sedimentation of the spacer particles can be further suppressed. 25 200804092 (Switching operation of 匣) Next, the switching operation from the first 匣 5a to the second 匣 5b will be described. When the liquid level sensor 25 detects that the liquid level of the main liquid storage tank 6 on the first side 5a side is lower than the gauge position, it is determined that the coating liquid 26 on the first side 5a side has been consumed. When the first liquid H 5a and the second liquid 5b coating liquid 26 have the same composition, although the coating liquid 26 has been filled in the circulation path including the shower head portion 4, it is between the main liquid storage tank 6 and the switching valve 38b. Air remains in the path of the coating liquid supply pipe 2〇b and the knife-replacement valve 23 to the sub-tank.
因此，關閉切換閥12, 19, 21，23, 42的A側、打開B 側，打開切換閥38的A側、關閉B側。然後，使加壓氣 體35通過加壓氣體用配管37、主儲液槽用歧f 9、主儲 夜槽用加壓·減壓官8供給至主儲液槽讣内以提高内壓， ，用^内壓使塗布⑨26流過塗布液供給管鳩及廢液管 仏―出主儲液槽6至切換閥鳩間塗布液供給管咖 内的空氣。其後，打開切換閥42的A側、關閉b側，壓 送到切換閱23至副彳諸、为她n ,,4 4 /夜槽％的路徑。藉此，結束匣的切 換知作。此塗布液26之嘖屮龢从丄从t 〃 , T出動作由於與第一匣5a的情況 目同，因此，省略重覆的說明。 當第一 E 5a盘篦-际 ^ 一 E 5b的塗布液26組成不同時，例 如§改變製造的液晶顯示哭 °。種類，因而塗布液26中的間 ^件粒子（珠粒）的直徑 门 循庐故/-山 同日守，由於在包含噴頭部4的 循％路徑中填充有前一 排除。 土布液26a，因此必須將其完全 26 200804092 爲此，首先關閉切換閥38的A側 '打開B側 切換闊21的A側、關閉B側，打開切換闕42的a侧、 _B側’打開第一斷路闊43及第三斷路闕47,關閉第 一辦路閥4 6，並使切拖pa ) Q老 ㈣“ ”換閥23處於A側打開B側關閉的狀 悲^後，猎由關閉切換閥4〇的A侧、打開B側，使加 塵虱體35通過加壓氣體用配管37壓送至塗布液供給管 20由此，將切換閥38以後的塗布液供給管、各喷頭 2:，、：頭連接管39及至第一…副儲液槽7的 土液回收官22内所殘留的塗布液—_出至副儲液槽 7 〇 其次’使切換闊40以外的閥處於與上述塗布液心排 二同的狀態，打開切換闊Μ的A侧、關閉b側，此 达清洗★ 3〇。藉此’清洗切換閥38以後的塗布液 官2〇、各喷頭24a〜24d、噴頭連接管39及至第 2 =㈣槽7的塗布液时# 22，並將其廢液排出至副 储液槽7。以此方式’在變更塗布液26之種類的場合等時， 將先前所使用龍5之副儲液槽7作爲廢液儲液槽利用。 '方^至7所使用之循環流道之塗布液26a的排 及清洗結束之後，關閉第—^a侧的切換閥38的a側、 打開B侧’打開第二匣5b側的切換閥38的a側、關閉b :，關閉切換閥21的A側、打開B側，關閉切換閥23的 A側、打開B侧。 —通過這些閥的操作，將包含噴頭部4的循環流道連接 至弟二E 5W則’在這種狀態下，進行第二H 5b側之塗布 27 200804092 液26b的填充。由於塗布液勘的噴出動作與上述相同， 因而省略重覆的說明。 圖3為本發明第二實施形態之液滴喷出裝置的*** 圖：在本實施形態中與上述第一實施形態不同之點在於， 各喷頭24a〜24d係利用噴頭連接管39並列連接。 如圖1所示，當各嘴頭24a〜24d爲串聯連接時，具有 可在各噴頭24a〜24d中均转行將清洗液置換成塗布液以 及塗布液之循環的優點。另一方面，如圖”斤示，當各噴 頭24a〜24d爲並列連接時，則具有可在各喷頭24a田〜⑽ 中，增大塗布液的噴出量，並可提高噴出速度。 圖4與圖5為本發明實施形態之液滴喷出裝置的正視 圖與側視圖。 如此等之圖所示，在塗布載台51上敷設並固定有兩條 平行延㈣X軸直線導軌52，於其上並安裝有兩個χ轴 直線導件53。在X軸直線導件53的上方透過载台基座Μ 固定有工作台55。 在工作台55上，使配向面朝上地載置塗布間隔件微粒 (珠粒）的液晶用基板48，並利用例如空氣吸附機構等定 位機構（未圖示）將其固定在工作台55上的既定位置。 支柱56, 56攸塗布載台51的左右兩側面向上方延伸， 在支柱56, 56的上端部架設有導向支持構件57。在導向支 持構件57的前面，兩條平行延伸的γ軸直線導件58固定 在水平方向，Υ軸座59可滑動地被支撐在該γ軸直線導 件58。亚且在γ軸座59上固定有延伸於垂直方向的ζ軸 28 200804092 座60 ’ Z軸直線導件61 (參 則可滑動地被支持在 Z轴座60上。 在上述Y軸座59及Z軸座60卜> m 一 有塗布液噴出媳接Μ ’如圖5所示，搭載 、機構62。此塗布液噴出機 供…搭載在Y軸座59上，塗布液二液 所示，呈古L丄 w收供a相63，如圖4 離中，雖妙2塗布液循環供給部2與昆部3。本實施形 I訂：载兩組主儲液槽6與副儲液槽7的組合作爲 上«部3,，但亦可搭載一組上述組合 作: 布液噴出機構62中的噴頭部 面’- 載在上述Z軸直魂導“ r 、】疋透過賀頭滑塊64搭 釉直線導件61 (Z軸座60)上。 搭載上述液晶用基板48的工作台55，例如可 馬達（未圖示）作爲驅動源往復移動於 52上。搭盤卜汗7 ά丄产 < a孕由置線導軌 達（未圖干)： 的γ軸座59，如可以線性馬 作爲驅動源往復移動於上述γ轴直線導件58 上又搭载上述噴頭部4之Ζ軸直缘導 以線性馬達（夫D ^ 1線¥件61 ’則例如可 60上。 ）作4驅動源往復移動於上述Ζ軸座 亦可如此等之圖所示，將塗布液供 環供給部2、㈣3)設置在高於噴頭部4的位^^循 塗布液從…經塗布液猶環供給部2 二：：， 供給管（例如挣性其）ό扯 然後通過塗布液 ' 〈幻如撓性官）自然地供給至喷頭部4内， 部4内的塗布液利用與£部 、、 態。因此，由於在噴頭部”有可能發 因此係利用未圖示的屋力切換部工將匠部3内控 29 200804092 狀態。 噴頭部4與液晶用基板48的距離，可 上的2減線導件61的位置調*，來進^ 轴座6〇 後，在搭載有液晶用基板48之工 仃適當設定。然 藉由初始所設定的噴出時序，使 滴育出至液晶用基⑯48的職位置，、“成局液 含有既定個數的間隔件微粒。 附者的液滴内 當藉由液晶用基板48的—次往復移 — 要的位置時，則塗布液噴出機構62便在：上必 -個塗布區域。藉由重覆此等動力， 广動至下 液滴附著在液晶用基板48❺整個面上：β隔件微粒的 粒之接著後，料域晶顯示裝 進行間隔件微 R 6 δ岡S炎主 衣置的下—個組裝步驟。 圖6至圖8為表示隨選（〇n demand)型嗔 構圖，圖6為喷頭部的分解立體圖，_ 了為嘖鹿之詳細結 之剖面圖，圖8則為沿圖7Α—Α線上的剖面圖。、部組裝後 於此等圖中，符號71是噴口，72 » . 口板，711 厭： 力室，74是壓力室板，75是節流孔 3疋[ 隔臈，78是過渡器，79是隔膜板，8〇是孔：反’ 77是 板’ 82是共用液體通道，83是外殼，接：是支撐 m啻從紅^ b广 疋接者劑，85是 :電u疋壓電振動器，87是外部電 ::生接著劑’ 89是支持基板，9。是單獨電極，91是：用 電極，92是通孔，93是液體導入管。 疋/、用 此隨選型喷頭部如圖6所示，由嘖〇 士 瑕7 2、壓六它 74、節流板76、隔膜板79、支撐板81 卜风83與壓電致 30 200804092 動器85等構成。 形成有：列複數個噴口 71的喷口板& “3藉由 ^材枓的電_加卫法、不錄鋼材料等的精密壓力加 雷射加工法等來製作。在壓力室…成有個數與上： 贺口 71相應的壓力室7 3，并你 至73並與上述噴口 連通。節流板 ^如圖7所示’形成有連通共用液體通道Μ與上述壓力 ^ 73，用以控制朝壓力室73之液體注入量的節流孔75。 :力室板74與節流板76可利用不錄鋼材料的钕刻加工法 或鎳材料的電_加工法等來製作。 在隔膜板79形成有用以將壓電振動H 86的壓力有效 f遞給壓力室73的隔膜77、與用以去除自共用液體通道 U流入節流孔75之液體中的雜質等的過渡$ 78。隔膜板 79可利用不銹鋼材料的_加卫法或錄材料的輯加工法 等來製作。 支撐板81上形成有孔部8〇，該孔部8〇係用以藉接著 劑Μ固定隔膜77與壓電振動器86時，控制隔膜π之振 動糸統固定端的位置，並且限制從接著位置溢出的枯接劑 在隔膜77上擴散。φ樘姑 n, ^支撐板81，可利用不銹鋼材料的蝕刻 加工法或錄材料的電鑄加工法等來製作。以金屬或 脂所製作的外豸83上，設有共用液體通道82，在此共用 =體通道82連接有上述塗布液供給管2〇或噴頭連接管 從塗布液供給管20或喷頭連接管39供給的塗布液， 在噴頭的共用液體通道82的途中，通過過渡器78依序流 31 200804092 :節流孔75、壓力室73、噴口 71。在單獨電極％與共用 电極91之間施加既定的脈衝電壓’藉此使壓電振動器％ 伸縮，2停止施加脈衝電壓時，則壓電振動器％便返回 至伸縮前的狀態。藉由此種壓電振動$ 86的變形，瞬間 對壓力室73 β的塗布液施加壓力，塗布液便自噴口成爲 液滴附著至液晶用基板上。 圖9為表示噴頭與塗布有間隔件之液晶用彩色濾光片 基板之關係的俯視圖。如圖9所+，+、六s m， 口 9所不，在液晶用彩色濾光片 土板48的表面，秩序地形成有R、g、b畫素翠元％，在 該液晶用彩色濾光片基板48之遮光膜96的交又部分塗布 複數個間隔件97。 如圖9所示’在喷頭24上以P1的間距形成有噴口 71， 相對於此’基板48上所接著之間隔件97的間距P2則依 液晶顯示裝置的種類而不同。因此，調整喷頭Μ的傾斜 角◎，以使喷頭24之噴出間隔與間隔件97的間距p2 一致。 上述實施形態，雖對液晶顯示裝置製造的情況加以說 明，但本發明並不限定於此，例如亦可應用於場致發光件 的製造或印刷含有氧化鈦粒子之累 卞之墨水的印刷電路板 造’使用容易沈降或凝聚之高濃度之電子零件用墨水所製 造的積層陶变電子零件或高頻電子零件之類的電子 製造等其他的技術領域。 、 另外，本發明雖說明喷出混合分散有固體微粒之 液的情況，但本發明並不限定於此 土命 此例如也可以適用於噴 32 200804092 墨n己錄裝置等噴出未含有固體微粒之塗布液的場合。 【圖式簡單說明】 圖1為本發明第一實施形態之液滴噴出裝置的*** 圖。 、、 圖2為该液滴噴出裝置之概略區塊圖。 Θ 為本么明第二實施形態之液滴喷出裝置的系統 圖。 ’、、、 圖4為本發明實施形態之液滴喷出裝置的正視圖。 圖5為該液滴噴出裝置的側視圖。 圖6為本發明實施形態之喷頭部的分解立體圖。 圖7為該噴頭部組裝後的剖面圖。 圖8為圖7Α— Α.線的剖面圖。 圖9為表示噴頭與塗布有間隔件之液晶用彩色滤光片 基板之關係的俯視圖。 圖1 〇為以往所提出之噴墨記錄裝置的說明圖。 【主要元件符號說明】 1 壓力切換部 2 塗布液循環供給部 3 匣部 4 噴頭部 5 匣 5a 第一匣 5b 第二匣 6 主儲液槽 / 33 200804092Therefore, the A side of the switching valves 12, 19, 21, 23, 42 is closed, and the B side is opened, and the A side of the switching valve 38 is opened and the B side is closed. Then, the pressurized gas 35 is supplied to the main liquid storage tank by the pressurized gas piping 37, the main liquid storage tank dislocation f9, and the main storage night tank pressure/decompression officer 8 to increase the internal pressure. The coating 926 is passed through the coating liquid supply pipe 鸠 and the waste liquid pipe 仏 - the main liquid storage tank 6 to the air in the switching valve inter-turn coating liquid supply pipe coffee. Thereafter, the A side and the closing b side of the switching valve 42 are opened, and the pressure is transferred to the path of the switching read 23 to the sub entrant, which is her n, 4 4 / night slot %. In this way, the end of the exchange is known. The operation of the coating liquid 26 and the operation of the T from the 丄 and T are the same as those of the first crucible 5a, and therefore the description of the overlap is omitted. When the composition of the coating liquid 26 of the first E 5a 篦 - ^ ^ E 5b is different, for example, § changes the manufactured liquid crystal display to cry. The type, and thus the diameter of the intergranular particles (beads) in the coating liquid 26, is the same as that in the % path including the nozzle portion 4. The soil cloth 26a is therefore required to be completely 26 200804092. To this end, first turn off the A side of the switching valve 38, open the A side of the B side switching width 21, close the B side, open the a side of the switching port 42, and open the _B side. A broken road wide 43 and a third open circuit 阙 47, close the first road valve 4 6, and cut the pipe pa) Q old (four) "" change valve 23 in the A side open B side closed sorrow ^, hunting by closing The A side of the switching valve 4A and the B side are opened, and the dust removing body 35 is pressure-fed to the coating liquid supply pipe 20 through the pressurized gas pipe 37, whereby the coating liquid supply pipe and the respective nozzles after the switching valve 38 are replaced. 2:,:: the head connecting pipe 39 and the coating liquid remaining in the earth liquid recovery officer 22 of the first ... sub-storage tank 7 - out to the sub-storage tank 7 〇 secondly, the valve other than the switching width 40 is In the same state as the above-mentioned coating liquid core row, the A side of the wide switch is closed, and the b side is closed, which is cleaned by 3 〇. This is to 'clean the coating liquid after the switching valve 38, the nozzles 24a to 24d, the nozzle connecting tube 39, and the coating liquid #22 of the second = (four) tank 7, and discharge the waste liquid to the secondary liquid. Slot 7. In the case where the type of the coating liquid 26 is changed in this manner, the sub-tank 7 of the previously used dragon 5 is used as a waste liquid storage tank. After the discharge and cleaning of the coating liquid 26a of the circulation flow path used by the squares to 7 are completed, the a side of the switching valve 38 on the first side is opened, and the switching valve 38 on the side of the second side 5b is opened. On the a side and the closing b:, the A side of the switching valve 21 is closed, the B side is opened, the A side of the switching valve 23 is closed, and the B side is opened. - By the operation of these valves, the circulation flow path including the head portion 4 is connected to the second E 5W. In this state, the coating of the second H 5b side 27 200804092 liquid 26b is performed. Since the discharge operation of the coating liquid is the same as described above, the description of the repeated is omitted. Fig. 3 is a system diagram of a liquid droplet ejecting apparatus according to a second embodiment of the present invention. In the present embodiment, the first embodiment is different from the first embodiment in that the heads 24a to 24d are connected in parallel by the head connecting pipe 39. As shown in Fig. 1, when the nozzles 24a to 24d are connected in series, there is an advantage that the cleaning liquid can be replaced by the coating liquid and the circulation of the coating liquid in each of the heads 24a to 24d. On the other hand, as shown in the figure, when the respective heads 24a to 24d are connected in parallel, it is possible to increase the discharge amount of the coating liquid in each of the heads 24a to (10), and to increase the discharge speed. Fig. 5 is a front elevational view and a side elevational view of a droplet discharge device according to an embodiment of the present invention. As shown in the figures, two parallel-extend (four) X-axis linear guides 52 are laid and fixed on the coating stage 51. Two boring linear guides 53 are attached to the upper side. The table 55 is fixed to the upper stage of the X-axis linear guide 53 through the stage base 。. On the table 55, the coating interval is placed with the alignment surface facing upward. The liquid crystal substrate 48 of the fine particles (beads) is fixed to a predetermined position on the table 55 by a positioning mechanism (not shown) such as an air suction mechanism. The pillars 56, 56 are coated on the left and right sides of the stage 51. The side faces upwardly, and the upper end portions of the pillars 56, 56 are provided with a guide supporting member 57. In front of the guide supporting member 57, two parallel extending γ-axis linear guides 58 are fixed in the horizontal direction, and the yoke seat 59 is slidable. The ground is supported on the γ-axis linear guide 58. A shaft 28 extending in the vertical direction is fixed to the shaft seat 59. 200804092 seat 60' Z-axis linear guide 61 (the reference is slidably supported on the Z-axis seat 60. In the above-mentioned Y-axis seat 59 and Z-axis seat 60卜> m has a coating liquid ejecting port Μ 'As shown in Fig. 5, the mounting mechanism 62. The coating liquid ejecting machine is mounted on the Y-axis holder 59, and the coating liquid is shown as two liquids. w receives the a-phase 63, as shown in Fig. 4, although the coating liquid circulation supply unit 2 and the Kunming part 3. The present invention is a combination of two sets of the main storage tank 6 and the secondary storage tank 7 as The upper part 3, but can also be equipped with a group of the above-mentioned group cooperation: the nozzle surface of the liquid discharge mechanism 62-- is carried on the Z-axis straight soul guide "r, 疋" through the head slider 64 glazing straight line The guide 61 (Z-axis holder 60) is mounted on the table 55 on which the liquid crystal substrate 48 is mounted, for example, a motor (not shown) can be reciprocated on the 52 as a drive source. The γ-axis seat 59 of the pre-pregnancy guide rail (not shown) can be reciprocally moved to the γ-axis linear guide 58 by a linear horse as a driving source, and the y-axis of the nozzle portion 4 is mounted thereon. The edge guide is a linear motor (the D ^ 1 line ¥ 61 ' can be, for example, 60.). The 4 drive source reciprocates to the above-mentioned shaft seat. The coating liquid can be supplied to the ring supply unit 2 as shown in the figure. (4) 3) is disposed at a position higher than the head portion 4, and the coating liquid is supplied from the coating liquid to the supply unit 2::, the supply tube (for example, earning it) is smashed and then passed through the coating liquid. The sexual officer is naturally supplied to the head portion 4, and the coating liquid in the portion 4 is utilized. Therefore, since the head portion is likely to be emitted, the state of the machine unit 3 is controlled by the house power switching unit (not shown). 29 200804092. The distance between the head unit 4 and the liquid crystal substrate 48, the upper 2 line guides can be used. When the position of the 61 is adjusted, the position of the liquid crystal substrate 48 is appropriately set by the process of mounting the liquid crystal substrate 48. However, the liquid crystal substrate 1648 is immersed by the initial discharge timing. , "The formation liquid contains a predetermined number of spacer particles. When the liquid crystal substrate 48 is reciprocated at a desired position in the droplets of the liquid crystal, the coating liquid ejecting mechanism 62 is required to be a coating region. By repeating these dynamics, the moving to the lower droplets adhere to the entire surface of the liquid crystal substrate 48: after the particles of the β spacer particles are followed by the grain crystal display, the spacer micro R 6 δ The next assembly step of the garment. Fig. 6 to Fig. 8 are diagrams showing the 随n demand type ,, Fig. 6 is an exploded perspective view of the nozzle portion, _ is a detailed sectional view of the elk, and Fig. 8 is along the Α-Α line of Fig. 7. Sectional view. In the drawings, the symbols 71 are nozzles, 72 » . Mouth plate, 711 versatile: force chamber, 74 is the pressure chamber plate, 75 is the orifice 3 疋 [isolation, 78 is the transition, 79 Is the diaphragm plate, 8 〇 is the hole: the reverse '77 is the plate' 82 is the common liquid channel, 83 is the outer casing, the connection is: support m啻 from the red ^ b wide splicer, 85 is: electric u 疋 piezoelectric vibration , 87 is external electricity:: raw adhesive '89 is the support substrate, 9. It is a separate electrode, 91 is: an electrode, 92 is a through hole, and 93 is a liquid introduction tube.疋 /, with this optional nozzle part as shown in Figure 6, by the gentleman 瑕 7, 2 six 74, throttle plate 76, diaphragm plate 79, support plate 81 Bu wind 83 and piezoelectric 30 200804092 actuator 85 and so on. A nozzle plate & "3" in which a plurality of nozzles 71 are formed is formed by a precision pressure plus laser processing method such as a material 枓, a non-recording material, etc. The number and the upper: the corresponding pressure chamber 7 3 of Hekou 71, and you connect to the above-mentioned spout by 73. The throttle plate ^ is formed with a connected common liquid passage and the above-mentioned pressure ^ 73 as shown in FIG. The orifice 75 for controlling the amount of liquid injection into the pressure chamber 73. The force chamber plate 74 and the throttle plate 76 can be produced by an etching process using a non-recording material or an electric processing method of a nickel material. The plate 79 forms a transition $78 for the diaphragm 77 which transfers the pressure of the piezoelectric vibration H86 to the pressure chamber 73, and the impurities and the like for removing the liquid flowing into the orifice 75 from the common liquid passage U. The plate 79 can be produced by a method of tempering or engraving of a stainless steel material, etc. The support plate 81 is formed with a hole portion 8 用以 for fixing the diaphragm 77 and pressing with an adhesive agent. When the electric vibrator 86 is used, the position of the fixed end of the vibrating system of the diaphragm π is controlled, and the position from the subsequent position is restricted. The overflowing agent is diffused on the diaphragm 77. The support plate 81 can be produced by an etching process of a stainless steel material or an electroforming process of a recording material, etc. The outer casing made of metal or grease. 83, a common liquid passage 82 is provided, and the coating liquid supply pipe 2 is connected to the coating liquid supply pipe 2 or the coating liquid supplied from the coating liquid supply pipe 20 or the nozzle connection pipe 39 in the nozzle. In the middle of the shared liquid passage 82, the transition piece 78 is sequentially flown through the transition valve 78: 200804092: the orifice 75, the pressure chamber 73, and the nozzle 71. A predetermined pulse voltage is applied between the individual electrode % and the common electrode 91. When the piezoelectric vibrator % is stretched and the pulse voltage is stopped, the piezoelectric vibrator % is returned to the state before the expansion and contraction. By the deformation of the piezoelectric vibration $86, the application liquid of the pressure chamber 73β is instantaneously applied. When the pressure is applied, the coating liquid adheres to the liquid crystal substrate from the nozzle. Fig. 9 is a plan view showing the relationship between the head and the color filter substrate for liquid crystal coated with the spacer, as shown in Fig. 9, +, 6 sm. , mouth 9 is not, in the LCD On the surface of the color filter soil plate 48, R, g, and b are sequentially formed, and a plurality of spacers 97 are applied to the intersection of the light shielding film 96 of the color filter substrate 48 for liquid crystal. As shown in Fig. 9, the nozzles 71 are formed at a pitch of P1 on the head 24, and the pitch P2 of the spacers 97 on the substrate 48 differs depending on the type of the liquid crystal display device. The inclination angle of the head ◎ is such that the discharge interval of the head 24 coincides with the pitch p2 of the spacer 97. In the above embodiment, the case of manufacturing the liquid crystal display device will be described, but the present invention is not limited thereto, for example It can be applied to the manufacture of electroluminescent devices or the printing of printed circuit boards containing cumbersome inks containing titanium oxide particles. The use of laminated ceramic electronic parts or high frequencies made of high-concentration electronic component inks that are easy to settle or agglomerate. Other technical fields such as electronic manufacturing such as electronic parts. Further, although the present invention describes a case in which a liquid in which solid fine particles are mixed and dispersed is sprayed, the present invention is not limited to this. For example, the present invention can also be applied to the spray 32 200804092. In the case of a coating liquid. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a system diagram of a droplet discharge device according to a first embodiment of the present invention. 2 is a schematic block diagram of the droplet discharge device.为本 A system diagram of a droplet discharge device according to a second embodiment of the present invention. 4 and 4 are front views of the liquid droplet ejecting apparatus according to the embodiment of the present invention. Fig. 5 is a side view of the droplet discharge device. Fig. 6 is an exploded perspective view showing the head portion according to the embodiment of the present invention. Fig. 7 is a cross-sectional view showing the head unit after assembly. Figure 8 is a cross-sectional view of the line 图 - Α. Fig. 9 is a plan view showing the relationship between the head and the color filter substrate for liquid crystal to which the spacer is applied. Fig. 1 is an explanatory view of a conventional ink jet recording apparatus. [Description of main component symbols] 1 Pressure switching unit 2 Coating liquid circulation supply unit 3 Crotch part 4 Nozzle part 5 匣 5a First 匣 5b Second 匣 6 Main sump / 33 200804092
7 副儲液槽 24 主儲液槽用加壓·減壓管 25 主儲液槽用歧管 26 主儲液槽用緩衝器 27 主儲液槽用泵 28 主儲液槽用切換閥 29 儲液槽間移送管 30 儲液槽間移送用泵 31 副儲液槽用加壓·減壓管 32 副儲液槽用歧管 33 副儲液槽用緩衝器 34 副儲液槽用泵 35 副儲液槽用切換閥 36 塗布液供給管 37 塗布液供給管用切換閥 38 塗布液回收管 39 塗布液回收管用切換閥 24a〜d 噴頭 25 液面感測器 46 塗布液 47 攪拌器 48 清洗液供給管 49 清洗液儲液槽 50 清洗液 34 200804092 51 液面感測器 52 廢液管 53 廢液儲液槽 54 液面感測器 55 加壓氣體 56 加壓用歧管 57 加壓氣體用配管 58 塗布液•清洗液•加壓氣體切換閥 • 59 喷頭連接管 60 清洗液•加壓氣體切換閥 61 壓力感測器 62 塗布液•廢液切換閥 63 第一斷路閥 64 廢液侧管體 65 回收側管體 46,47 第二斷路閥 48 液晶用基板 49a〜f 連接部 51 塗布載台 52 X軸直線導執 53 X軸直線導件 54 載台基座 55 工作台 56 支柱 35 2008040927 Sub-storage tank 24 Pressure and decompression tube for main reservoir 25 Manifold for main reservoir 26 Buffer for main reservoir 27 Pump for main reservoir 28 Switching valve for main reservoir 29 Inter-tank transfer pipe 30 Inter-tank transfer pump 31 Sub-reservoir pressurization and decompression pipe 32 Sub-tank manifold 33 Sub-tank buffer 34 Sub-tank pump 35 Deputy The liquid storage tank switching valve 36 The coating liquid supply pipe 37 The coating liquid supply pipe switching valve 38 The coating liquid recovery pipe 39 The coating liquid recovery pipe switching valve 24a to the d nozzle 25 The liquid level sensor 46 The coating liquid 47 The agitator 48 The cleaning liquid supply Tube 49 Cleaning liquid storage tank 50 Cleaning liquid 34 200804092 51 Liquid level sensor 52 Waste liquid pipe 53 Waste liquid storage tank 54 Liquid level sensor 55 Pressurized gas 56 Pressure manifold 57 Pressurized gas piping 58 Coating solution • Cleaning solution • Pressurized gas switching valve • 59 Nozzle connection tube 60 Cleaning liquid • Pressurized gas switching valve 61 Pressure sensor 62 Coating liquid • Waste liquid switching valve 63 First disconnect valve 64 Waste liquid side pipe Body 65 recovery side pipe body 46, 47 49a~f shutoff valve 48 is connected with the liquid crystal portion 51 is coated substrate stage 52 X 53 X axis linear guides execution axis linear guides 54 stage 56 stage strut base 55 35 200 804 092
57 導向支持構件 58 Y軸直線導件 59 Y轴座 60 Z轴座 61 Z轴直線導件 62 塗布液喷出機構 63 塗布液供給箱 64 喷頭滑塊 71 噴口 72 喷出板 73 壓力室 74 壓力室板 75 節流孔 76 節流板 77 隔膜 78 過濾器 79 隔膜板 80 孔部 81 支撐板 82 共用液體通道 83 外殼 84 接著劑 85 壓電致動器 86 壓電振動器 36 200804092 87 外部電極 .88 導電性接著劑 89 支持基板 90 單獨電極 91 共用電極 92 通孔 93 液體導入管 95 晝素單元 96 遮光膜 97 間隔件 100 記錄頭單元 101 單元驅動用滾珠螺桿 102 導執 103 支持構件 1 104 記錄頭 105 供給墨水用副儲液槽 106 回收墨水用副儲液槽 107 滾珠螺桿 108 供給墨水用副儲液槽用驅動電動機 109 回收墨水用副儲液槽用滾珠螺桿 110 回收墨水用副儲液槽用驅動電動機 111 墨水 112 主儲液槽 113 抑揚用栗 37 200804092 114 墨水供給管 115 連通管 116 墨水回收管 Pl，P2 間距57 Guide support member 58 Y-axis linear guide 59 Y-axis seat 60 Z-axis seat 61 Z-axis linear guide 62 Coating liquid discharge mechanism 63 Coating liquid supply tank 64 Nozzle slider 71 Spout 72 Discharge plate 73 Pressure chamber 74 Pressure chamber plate 75 orifice 76 throttle plate 77 diaphragm 78 filter 79 diaphragm plate 80 hole 81 support plate 82 common liquid passage 83 housing 84 follower 85 piezoelectric actuator 86 piezoelectric vibrator 36 200804092 87 external electrode .88 Conductive Adhesive 89 Supporting Substrate 90 Separate Electrode 91 Common Electrode 92 Through Hole 93 Liquid Introducing Tube 95 Alizarin Unit 96 Light Shielding Film 97 Spacer 100 Recording Head Unit 101 Unit Driving Ball Screw 102 Guide 103 Supporting Member 1 104 The recording head 105 is supplied to the ink sub-tank 106. The ink sub-tank 107 is recovered. The ball screw 108 is supplied to the sub-reservoir drive motor 109 for ink. The sub-reservoir ball screw 110 for recovering the ink is used to collect the sub-reservoir for the ink. Slot drive motor 111 Ink 112 Main reservoir 113 Suppression chest 37 200804092 114 Ink Supply pipe 115 communicating the ink recovery tube 116 tubes Pl, P2 spacing
3838
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006107574A JP4828287B2 (en) | 2006-04-10 | 2006-04-10 | Droplet discharge device and operation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200804092A true TW200804092A (en) | 2008-01-16 |
| TWI331092B TWI331092B (en) | 2010-10-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW096111763A TWI331092B (en) | 2006-04-10 | 2007-04-03 | Droplet ejection device and droplet ejection method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4828287B2 (en) |
| KR (1) | KR100898921B1 (en) |
| CN (1) | CN100595071C (en) |
| TW (1) | TWI331092B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5198329B2 (en) * | 2009-03-02 | 2013-05-15 | 大日本スクリーン製造株式会社 | Flow rate setting method and coating apparatus |
| JP5573521B2 (en) * | 2010-09-09 | 2014-08-20 | セイコーエプソン株式会社 | Liquid ejection apparatus and liquid ejection method |
| CN102514379A (en) * | 2011-12-09 | 2012-06-27 | 珠海天威飞马打印耗材有限公司 | Cleaning method of ink-jet printer nozzle and apparatus thereof |
| JP6011610B2 (en) * | 2012-03-14 | 2016-10-19 | コニカミノルタ株式会社 | Image forming apparatus |
| KR102068977B1 (en) * | 2013-10-01 | 2020-01-22 | 세메스 주식회사 | Unit for supplying chemical, Apparatus and Method for treating substrate |
| JP6691768B2 (en) * | 2015-12-17 | 2020-05-13 | 理想科学工業株式会社 | Inkjet printer |
| CN106739530B (en) * | 2016-12-27 | 2018-06-26 | 浙江东山广信数码印花设备有限公司 | It is adapted to the digital decorating machine and control method of different inks |
| US11148932B2 (en) * | 2019-02-06 | 2021-10-19 | Ricoh Company, Ltd. | Liquid supply device, liquid discharge device, and liquid discharge apparatus |
| CN109910441B (en) * | 2019-02-22 | 2020-07-14 | 深圳市越达彩印科技有限公司 | Method for preventing nozzle plug on high-temperature digital glass printer |
| KR102221694B1 (en) * | 2019-06-17 | 2021-03-02 | 세메스 주식회사 | Liquid drop-discharge apparatus |
| DE102021119858A1 (en) * | 2021-07-30 | 2023-02-02 | Koenig & Bauer Ag | Method for changing at least one printing fluid and method for cleaning and/or maintaining a printing fluid supply system and printing machine |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06134990A (en) * | 1992-10-26 | 1994-05-17 | Canon Inc | Ink jet head, ink jet head cartridge and ink jet apparatus |
| JPH10100399A (en) | 1996-09-30 | 1998-04-21 | Anest Iwata Corp | Dot marking device |
| JP4133063B2 (en) * | 2002-07-19 | 2008-08-13 | 芝浦メカトロニクス株式会社 | Solution coating apparatus and supply method |
| JP4457637B2 (en) | 2003-10-24 | 2010-04-28 | ソニー株式会社 | Head cartridge and liquid ejection device |
| JP4337500B2 (en) | 2003-10-24 | 2009-09-30 | ソニー株式会社 | Liquid ejection device |
| JP2005271333A (en) * | 2004-03-24 | 2005-10-06 | Fuji Photo Film Co Ltd | Inkjet recording device |
| JP4647665B2 (en) * | 2005-11-10 | 2011-03-09 | 株式会社アルバック | Coating device, dispersion transfer method |
-
2006
- 2006-04-10 JP JP2006107574A patent/JP4828287B2/en active Active
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2007
- 2007-04-03 TW TW096111763A patent/TWI331092B/en not_active IP Right Cessation
- 2007-04-06 CN CN200710091049A patent/CN100595071C/en not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20070101135A (en) | 2007-10-16 |
| CN100595071C (en) | 2010-03-24 |
| KR100898921B1 (en) | 2009-05-26 |
| CN101054024A (en) | 2007-10-17 |
| TWI331092B (en) | 2010-10-01 |
| JP2007275822A (en) | 2007-10-25 |
| JP4828287B2 (en) | 2011-11-30 |
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