TW200746928A - Apparatus and method for generating atmospheric-pressure plasma - Google Patents

Apparatus and method for generating atmospheric-pressure plasma

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Publication number
TW200746928A
TW200746928A TW096113054A TW96113054A TW200746928A TW 200746928 A TW200746928 A TW 200746928A TW 096113054 A TW096113054 A TW 096113054A TW 96113054 A TW96113054 A TW 96113054A TW 200746928 A TW200746928 A TW 200746928A
Authority
TW
Taiwan
Prior art keywords
antennas
pressure plasma
frequency power
circuit
generating atmospheric
Prior art date
Application number
TW096113054A
Other languages
Chinese (zh)
Inventor
Masashi Matsumori
Shigeki Nakatsuka
Takanori Ichiki
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2006129193A external-priority patent/JP4458066B2/en
Priority claimed from JP2006260602A external-priority patent/JP5103846B2/en
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Publication of TW200746928A publication Critical patent/TW200746928A/en

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  • Plasma Technology (AREA)

Abstract

An apparatus for generating atmospheric-pressure plasma is provided with substrates (2, 22); antennas (3, 17, 26, 38) arranged on the substrates (2, 22); discharge tubes (4, 18, 28, 37) arranged in the vicinity of the antennas (3, 17, 26, 38); a high-frequency power supply (8) for supplying VHF-band high-frequency power to the antennas (3, 17, 26, 38); and a matching circuit (7) which inputs high frequency from the high-frequency power supply (8) and adjusts the reflection waves. A phase circuit (6) is connected between the matching circuit (7) and the antennas (3, 17, 26, 38). The circuit constant of the phase circuit (6) is so set as to have a position, at which the current amplitude of a standing wave is maximum, or a position, at which the voltage amplitude of the standing wave is minimum, in the vicinity of the antennas (3, 17, 26, 38).
TW096113054A 2005-09-28 2007-04-13 Apparatus and method for generating atmospheric-pressure plasma TW200746928A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005281984 2005-09-28
JP2006129193A JP4458066B2 (en) 2006-05-08 2006-05-08 Atmospheric pressure plasma generator and atmospheric pressure plasma processing apparatus
JP2006260602A JP5103846B2 (en) 2005-09-28 2006-09-26 Microplasma jet generating apparatus and method

Publications (1)

Publication Number Publication Date
TW200746928A true TW200746928A (en) 2007-12-16

Family

ID=57914595

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096113054A TW200746928A (en) 2005-09-28 2007-04-13 Apparatus and method for generating atmospheric-pressure plasma

Country Status (1)

Country Link
TW (1) TW200746928A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI503884B (en) * 2009-10-26 2015-10-11 Applied Materials Inc Dual mode inductively coupled plasma reactor with adjustable phase coil assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI503884B (en) * 2009-10-26 2015-10-11 Applied Materials Inc Dual mode inductively coupled plasma reactor with adjustable phase coil assembly

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