TW200746928A - Apparatus and method for generating atmospheric-pressure plasma - Google Patents
Apparatus and method for generating atmospheric-pressure plasmaInfo
- Publication number
- TW200746928A TW200746928A TW096113054A TW96113054A TW200746928A TW 200746928 A TW200746928 A TW 200746928A TW 096113054 A TW096113054 A TW 096113054A TW 96113054 A TW96113054 A TW 96113054A TW 200746928 A TW200746928 A TW 200746928A
- Authority
- TW
- Taiwan
- Prior art keywords
- antennas
- pressure plasma
- frequency power
- circuit
- generating atmospheric
- Prior art date
Links
Landscapes
- Plasma Technology (AREA)
Abstract
An apparatus for generating atmospheric-pressure plasma is provided with substrates (2, 22); antennas (3, 17, 26, 38) arranged on the substrates (2, 22); discharge tubes (4, 18, 28, 37) arranged in the vicinity of the antennas (3, 17, 26, 38); a high-frequency power supply (8) for supplying VHF-band high-frequency power to the antennas (3, 17, 26, 38); and a matching circuit (7) which inputs high frequency from the high-frequency power supply (8) and adjusts the reflection waves. A phase circuit (6) is connected between the matching circuit (7) and the antennas (3, 17, 26, 38). The circuit constant of the phase circuit (6) is so set as to have a position, at which the current amplitude of a standing wave is maximum, or a position, at which the voltage amplitude of the standing wave is minimum, in the vicinity of the antennas (3, 17, 26, 38).
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005281984 | 2005-09-28 | ||
JP2006129193A JP4458066B2 (en) | 2006-05-08 | 2006-05-08 | Atmospheric pressure plasma generator and atmospheric pressure plasma processing apparatus |
JP2006260602A JP5103846B2 (en) | 2005-09-28 | 2006-09-26 | Microplasma jet generating apparatus and method |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200746928A true TW200746928A (en) | 2007-12-16 |
Family
ID=57914595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096113054A TW200746928A (en) | 2005-09-28 | 2007-04-13 | Apparatus and method for generating atmospheric-pressure plasma |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200746928A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI503884B (en) * | 2009-10-26 | 2015-10-11 | Applied Materials Inc | Dual mode inductively coupled plasma reactor with adjustable phase coil assembly |
-
2007
- 2007-04-13 TW TW096113054A patent/TW200746928A/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI503884B (en) * | 2009-10-26 | 2015-10-11 | Applied Materials Inc | Dual mode inductively coupled plasma reactor with adjustable phase coil assembly |
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