TW200746239A - Method and system for high-speed precise laser trimming and scan lens for use therein - Google Patents

Method and system for high-speed precise laser trimming and scan lens for use therein

Info

Publication number
TW200746239A
TW200746239A TW096103196A TW96103196A TW200746239A TW 200746239 A TW200746239 A TW 200746239A TW 096103196 A TW096103196 A TW 096103196A TW 96103196 A TW96103196 A TW 96103196A TW 200746239 A TW200746239 A TW 200746239A
Authority
TW
Taiwan
Prior art keywords
laser
pulse
short
wavelength
reduced
Prior art date
Application number
TW096103196A
Other languages
Chinese (zh)
Other versions
TWI452605B (en
Inventor
Bo Gu
Joseph V Lento
Jonathan S Ehrmann
Bruce L Couch
Yun-Fee Chu
Shepard D Johnson
Original Assignee
Gsi Group Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/376,527 external-priority patent/US20060199354A1/en
Application filed by Gsi Group Corp filed Critical Gsi Group Corp
Publication of TW200746239A publication Critical patent/TW200746239A/en
Application granted granted Critical
Publication of TWI452605B publication Critical patent/TWI452605B/en

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  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

A method, system and scan tens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path, The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fast rise/fall time, pulse-shaped q-switched laser or an ultra-fast laser may be used. Beam shaping optics may be used to generate a flat-top beam profile. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The wavelength is short enough to produce desired short-wavelenigth benefits of small spot size, tight tolerance, high absorption and reduced or eliminated heat-affected zone (HAZ) along the trim path, but not so short so as to cause microcracking. In this way, resistance drift after the trimming process is reduced.
TW096103196A 2006-01-30 2007-01-29 Method and system for high-speed precise laser trimming and scan lens for use therein TWI452605B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US76324206P 2006-01-30 2006-01-30
US11/376,527 US20060199354A1 (en) 2002-03-27 2006-03-15 Method and system for high-speed precise laser trimming and electrical device produced thereby

Publications (2)

Publication Number Publication Date
TW200746239A true TW200746239A (en) 2007-12-16
TWI452605B TWI452605B (en) 2014-09-11

Family

ID=51393378

Family Applications (2)

Application Number Title Priority Date Filing Date
TW096103196A TWI452605B (en) 2006-01-30 2007-01-29 Method and system for high-speed precise laser trimming and scan lens for use therein
TW103105490A TWI504963B (en) 2006-01-30 2007-01-29 Achromatic scan lens

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW103105490A TWI504963B (en) 2006-01-30 2007-01-29 Achromatic scan lens

Country Status (1)

Country Link
TW (2) TWI452605B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI511821B (en) * 2012-12-14 2015-12-11 Kataoka Corp Laser processing machine

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4171871A (en) * 1977-06-30 1979-10-23 International Business Machines Corporation Achromatic unit magnification optical system
US5404247A (en) * 1993-08-02 1995-04-04 International Business Machines Corporation Telecentric and achromatic f-theta scan lens system and method of use
EP1173302B1 (en) * 1999-04-27 2005-04-20 GSI Lumonics Inc. Laser calibration apparatus and method
US6951995B2 (en) * 2002-03-27 2005-10-04 Gsi Lumonics Corp. Method and system for high-speed, precise micromachining an array of devices
US6894843B2 (en) * 2003-05-23 2005-05-17 Foxlink Image Technology Co., Ltd. Optical apparatus for a line scanner system with reduced optical total track
US20060000814A1 (en) * 2004-06-30 2006-01-05 Bo Gu Laser-based method and system for processing targeted surface material and article produced thereby
WO2006067707A2 (en) * 2004-12-21 2006-06-29 Koninklijke Philips Electronics N.V. Optical scanning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI511821B (en) * 2012-12-14 2015-12-11 Kataoka Corp Laser processing machine

Also Published As

Publication number Publication date
TWI452605B (en) 2014-09-11
TW201421104A (en) 2014-06-01
TWI504963B (en) 2015-10-21

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