TW200746239A - Method and system for high-speed precise laser trimming and scan lens for use therein - Google Patents
Method and system for high-speed precise laser trimming and scan lens for use thereinInfo
- Publication number
- TW200746239A TW200746239A TW096103196A TW96103196A TW200746239A TW 200746239 A TW200746239 A TW 200746239A TW 096103196 A TW096103196 A TW 096103196A TW 96103196 A TW96103196 A TW 96103196A TW 200746239 A TW200746239 A TW 200746239A
- Authority
- TW
- Taiwan
- Prior art keywords
- laser
- pulse
- short
- wavelength
- reduced
- Prior art date
Links
Landscapes
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
A method, system and scan tens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path, The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fast rise/fall time, pulse-shaped q-switched laser or an ultra-fast laser may be used. Beam shaping optics may be used to generate a flat-top beam profile. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The wavelength is short enough to produce desired short-wavelenigth benefits of small spot size, tight tolerance, high absorption and reduced or eliminated heat-affected zone (HAZ) along the trim path, but not so short so as to cause microcracking. In this way, resistance drift after the trimming process is reduced.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US76324206P | 2006-01-30 | 2006-01-30 | |
US11/376,527 US20060199354A1 (en) | 2002-03-27 | 2006-03-15 | Method and system for high-speed precise laser trimming and electrical device produced thereby |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200746239A true TW200746239A (en) | 2007-12-16 |
TWI452605B TWI452605B (en) | 2014-09-11 |
Family
ID=51393378
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096103196A TWI452605B (en) | 2006-01-30 | 2007-01-29 | Method and system for high-speed precise laser trimming and scan lens for use therein |
TW103105490A TWI504963B (en) | 2006-01-30 | 2007-01-29 | Achromatic scan lens |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103105490A TWI504963B (en) | 2006-01-30 | 2007-01-29 | Achromatic scan lens |
Country Status (1)
Country | Link |
---|---|
TW (2) | TWI452605B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI511821B (en) * | 2012-12-14 | 2015-12-11 | Kataoka Corp | Laser processing machine |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4171871A (en) * | 1977-06-30 | 1979-10-23 | International Business Machines Corporation | Achromatic unit magnification optical system |
US5404247A (en) * | 1993-08-02 | 1995-04-04 | International Business Machines Corporation | Telecentric and achromatic f-theta scan lens system and method of use |
EP1173302B1 (en) * | 1999-04-27 | 2005-04-20 | GSI Lumonics Inc. | Laser calibration apparatus and method |
US6951995B2 (en) * | 2002-03-27 | 2005-10-04 | Gsi Lumonics Corp. | Method and system for high-speed, precise micromachining an array of devices |
US6894843B2 (en) * | 2003-05-23 | 2005-05-17 | Foxlink Image Technology Co., Ltd. | Optical apparatus for a line scanner system with reduced optical total track |
US20060000814A1 (en) * | 2004-06-30 | 2006-01-05 | Bo Gu | Laser-based method and system for processing targeted surface material and article produced thereby |
WO2006067707A2 (en) * | 2004-12-21 | 2006-06-29 | Koninklijke Philips Electronics N.V. | Optical scanning device |
-
2007
- 2007-01-29 TW TW096103196A patent/TWI452605B/en active
- 2007-01-29 TW TW103105490A patent/TWI504963B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI511821B (en) * | 2012-12-14 | 2015-12-11 | Kataoka Corp | Laser processing machine |
Also Published As
Publication number | Publication date |
---|---|
TWI452605B (en) | 2014-09-11 |
TW201421104A (en) | 2014-06-01 |
TWI504963B (en) | 2015-10-21 |
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