TW200743906A - Roller module for microstructure thin film imprint - Google Patents

Roller module for microstructure thin film imprint

Info

Publication number
TW200743906A
TW200743906A TW095118401A TW95118401A TW200743906A TW 200743906 A TW200743906 A TW 200743906A TW 095118401 A TW095118401 A TW 095118401A TW 95118401 A TW95118401 A TW 95118401A TW 200743906 A TW200743906 A TW 200743906A
Authority
TW
Taiwan
Prior art keywords
thin film
roller
microstructure
roller module
microstructure thin
Prior art date
Application number
TW095118401A
Other languages
Chinese (zh)
Other versions
TWI322927B (en
Inventor
Wen-Lang Lai
Fuh-Yu Chang
Jung-Kang Peng
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW095118401A priority Critical patent/TWI322927B/en
Priority to US11/634,876 priority patent/US20070271791A1/en
Priority to JP2007130355A priority patent/JP2007313894A/en
Publication of TW200743906A publication Critical patent/TW200743906A/en
Application granted granted Critical
Publication of TWI322927B publication Critical patent/TWI322927B/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023Microembossing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49544Roller making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49544Roller making
    • Y10T29/49547Assembling preformed components

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

A roller module for microstructure thin film imprint is disclosed. The roller module includes a roller having a round surface, and a metal mold with a thin film layer having a microstructure thin film imprint pattern. The metal mold is able to be connected with the roller by using magnetic force or vacuum. Therefore, the microstructure thin film imprint pattern transfers into a microstructure thin film by rolling the roller, and the drawbacks of prior art are overcome accordingly.
TW095118401A 2006-05-24 2006-05-24 Roller module for microstructure thin film imprint TWI322927B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW095118401A TWI322927B (en) 2006-05-24 2006-05-24 Roller module for microstructure thin film imprint
US11/634,876 US20070271791A1 (en) 2006-05-24 2006-12-07 Rolling mold for microstructured film imprinting
JP2007130355A JP2007313894A (en) 2006-05-24 2007-05-16 Rolling mold for transcribing fine structural thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095118401A TWI322927B (en) 2006-05-24 2006-05-24 Roller module for microstructure thin film imprint

Publications (2)

Publication Number Publication Date
TW200743906A true TW200743906A (en) 2007-12-01
TWI322927B TWI322927B (en) 2010-04-01

Family

ID=38748189

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095118401A TWI322927B (en) 2006-05-24 2006-05-24 Roller module for microstructure thin film imprint

Country Status (3)

Country Link
US (1) US20070271791A1 (en)
JP (1) JP2007313894A (en)
TW (1) TWI322927B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI752844B (en) * 2021-03-10 2022-01-11 光群雷射科技股份有限公司 Transfer roller and manufacturing method thereof

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JP5951928B2 (en) 2007-09-06 2016-07-13 スリーエム イノベイティブ プロパティズ カンパニー Light guide with light extraction structure to provide area control of light output
WO2009032815A1 (en) * 2007-09-06 2009-03-12 3M Innovative Properties Company Tool for making microstructured articles
US9440376B2 (en) 2007-09-06 2016-09-13 3M Innovative Properties Company Methods of forming molds and methods of forming articles using said molds
JP2011501209A (en) * 2007-10-11 2011-01-06 スリーエム イノベイティブ プロパティズ カンパニー Color confocal sensor
JP5524856B2 (en) * 2007-12-12 2014-06-18 スリーエム イノベイティブ プロパティズ カンパニー Method for manufacturing a structure with improved edge clarity
TW200932662A (en) * 2008-01-18 2009-08-01 Univ Nat Taiwan Roller with microstructure, mold and manufacturing method thereof
JP5801558B2 (en) 2008-02-26 2015-10-28 スリーエム イノベイティブ プロパティズ カンパニー Multi-photon exposure system
KR101433292B1 (en) 2009-02-17 2014-08-22 더 보드 오브 트러스티즈 오브 더 유니버시티 오브 일리노이 Methods for fabricating microstructures
KR101037903B1 (en) * 2010-12-09 2011-05-30 한국기계연구원 Method for fabricating roll for roll printing/roll imprinting
PL2540487T3 (en) * 2011-06-29 2015-12-31 Hueck Rheinische Gmbh Pressed sheet or continuous ribbon with a sandwich structure, Process to manufacture such pressed sheet or continuous ribbon and Process to manufacture punched material using such pressed sheet or continuous ribbon
TW201325884A (en) * 2011-12-29 2013-07-01 Hon Hai Prec Ind Co Ltd Pressing roller for producing optical film and manufacturing method of the press roller

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US3496866A (en) * 1968-03-29 1970-02-24 Paper Converting Machine Co Magnetic plate cylinder
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI752844B (en) * 2021-03-10 2022-01-11 光群雷射科技股份有限公司 Transfer roller and manufacturing method thereof

Also Published As

Publication number Publication date
JP2007313894A (en) 2007-12-06
US20070271791A1 (en) 2007-11-29
TWI322927B (en) 2010-04-01

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