TW200741870A - Method and compositions for direct copper plating and filling to form interconnects in the fabrication of semiconductor devices - Google Patents
Method and compositions for direct copper plating and filling to form interconnects in the fabrication of semiconductor devicesInfo
- Publication number
- TW200741870A TW200741870A TW096106492A TW96106492A TW200741870A TW 200741870 A TW200741870 A TW 200741870A TW 096106492 A TW096106492 A TW 096106492A TW 96106492 A TW96106492 A TW 96106492A TW 200741870 A TW200741870 A TW 200741870A
- Authority
- TW
- Taiwan
- Prior art keywords
- copper
- fabrication
- filling
- compositions
- semiconductor devices
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/605—Surface topography of the layers, e.g. rough, dendritic or nodular layers
- C25D5/611—Smooth layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/627—Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US77467506P | 2006-02-21 | 2006-02-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200741870A true TW200741870A (en) | 2007-11-01 |
TWI437638B TWI437638B (zh) | 2014-05-11 |
Family
ID=38038534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096106492A TWI437638B (zh) | 2006-02-21 | 2007-02-26 | 用於半導體元件之製造中直接銅電鍍及填補以形成內連線之方法與組合物 |
Country Status (10)
Country | Link |
---|---|
US (1) | US7579274B2 (zh) |
EP (1) | EP1987177A1 (zh) |
JP (1) | JP5346215B2 (zh) |
KR (1) | KR101360595B1 (zh) |
CN (1) | CN101512048B (zh) |
CA (1) | CA2643018C (zh) |
HK (1) | HK1132768A1 (zh) |
IL (1) | IL193308A (zh) |
TW (1) | TWI437638B (zh) |
WO (1) | WO2007096390A1 (zh) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100808796B1 (ko) * | 2006-10-09 | 2008-03-03 | 동부일렉트로닉스 주식회사 | 전해 도금 방법 |
FR2930785B1 (fr) * | 2008-05-05 | 2010-06-11 | Alchimer | Composition d'electrodeposition et procede de revetement d'un substrat semi-conducteur utilisant ladite composition |
JP5388191B2 (ja) * | 2009-05-26 | 2014-01-15 | Jx日鉱日石金属株式会社 | 貫通シリコンビアを有するめっき物及びその形成方法 |
FR2949121A1 (fr) * | 2009-08-12 | 2011-02-18 | Alchimer | Electrolyte et procede d''electrodeposition de cuivre sur une couche barriere, et substrat semi-conducteur obtenu par un tel procede. |
US20110192462A1 (en) * | 2010-01-03 | 2011-08-11 | Alchimer, S.A. | Solar cells |
US20110162701A1 (en) * | 2010-01-03 | 2011-07-07 | Claudio Truzzi | Photovoltaic Cells |
KR20130108978A (ko) * | 2010-06-11 | 2013-10-07 | 알쉬메 | 구리 도금 조성물 및 이 조성물을 사용한 반도체 기판에서 공동을 충진하기 위한 공정 |
FR2961220B1 (fr) * | 2010-06-11 | 2012-08-17 | Alchimer | Composition d'electrodeposition de cuivre et procede de remplissage d'une cavite d'un substrat semi-conducteur utilisant cette composition |
EP2528089B1 (en) * | 2011-05-23 | 2014-03-05 | Alchimer | Method for forming a vertical electrical connection in a layered semiconductor structure |
CN103426814B (zh) * | 2012-05-24 | 2015-04-01 | 中芯国际集成电路制造(上海)有限公司 | 填充金属的方法 |
FR2995912B1 (fr) | 2012-09-24 | 2014-10-10 | Alchimer | Electrolyte et procede d'electrodeposition de cuivre sur une couche barriere |
TWI478861B (zh) * | 2012-11-22 | 2015-04-01 | Univ Nat Chunghsing | Electrodeposition of copper nanoparticles |
US9349636B2 (en) * | 2013-09-26 | 2016-05-24 | Intel Corporation | Interconnect wires including relatively low resistivity cores |
CN103579101A (zh) * | 2013-11-05 | 2014-02-12 | 复旦大学 | 采用脉冲电镀铜方式实现铜互连的方法 |
KR102312018B1 (ko) | 2013-12-09 | 2021-10-13 | 아베니 | 전기화학적 불활성 양이온을 함유하는 구리 전착 배쓰 |
JP6585434B2 (ja) * | 2014-10-06 | 2019-10-02 | 株式会社荏原製作所 | めっき方法 |
US9758845B2 (en) * | 2014-12-09 | 2017-09-12 | Intel Corporation | Microelectronic substrates having copper alloy conductive route structures |
US10329683B2 (en) | 2016-11-03 | 2019-06-25 | Lam Research Corporation | Process for optimizing cobalt electrofill using sacrificial oxidants |
FR3061601B1 (fr) | 2016-12-29 | 2022-12-30 | Aveni | Solution d'electrodeposition de cuivre et procede pour des motifs de facteur de forme eleve |
KR102056980B1 (ko) | 2017-03-31 | 2019-12-17 | 제이엑스금속주식회사 | 황산구리, 황산구리 용액, 도금액, 황산구리의 제조 방법, 반도체 회로 기판의 제조 방법 및 전자기기의 제조 방법 |
CN110724983B (zh) * | 2019-10-12 | 2022-02-08 | 天津大学 | 一种利用脉冲电沉积法制备纳米铜包覆碳化钨核壳结构粉体的方法 |
US11972973B1 (en) | 2023-10-04 | 2024-04-30 | Chun-Ming Lin | Semiconductor structure and method of manufacturing a semiconductor structure |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5151168A (en) * | 1990-09-24 | 1992-09-29 | Micron Technology, Inc. | Process for metallizing integrated circuits with electrolytically-deposited copper |
TW593731B (en) * | 1998-03-20 | 2004-06-21 | Semitool Inc | Apparatus for applying a metal structure to a workpiece |
US6309969B1 (en) * | 1998-11-03 | 2001-10-30 | The John Hopkins University | Copper metallization structure and method of construction |
JP3271756B2 (ja) * | 1999-03-01 | 2002-04-08 | 日本電気株式会社 | 半導体装置の製造方法 |
US7135404B2 (en) | 2002-01-10 | 2006-11-14 | Semitool, Inc. | Method for applying metal features onto barrier layers using electrochemical deposition |
US20050145499A1 (en) | 2000-06-05 | 2005-07-07 | Applied Materials, Inc. | Plating of a thin metal seed layer |
US20050006245A1 (en) | 2003-07-08 | 2005-01-13 | Applied Materials, Inc. | Multiple-step electrodeposition process for direct copper plating on barrier metals |
JP2002004081A (ja) * | 2000-06-16 | 2002-01-09 | Learonal Japan Inc | シリコンウエハーへの電気めっき方法 |
US20020092673A1 (en) * | 2001-01-17 | 2002-07-18 | International Business Machines Corporation | Tungsten encapsulated copper interconnections using electroplating |
US6464779B1 (en) | 2001-01-19 | 2002-10-15 | Novellus Systems, Inc. | Copper atomic layer chemical vapor desposition |
KR20020092444A (ko) | 2001-02-23 | 2002-12-11 | 가부시키 가이샤 에바라 세이사꾸쇼 | 구리-도금 용액, 도금 방법 및 도금 장치 |
JP4207394B2 (ja) | 2001-03-28 | 2009-01-14 | 株式会社村田製作所 | セラミック電子部品の銅電極形成方法 |
JP2002329682A (ja) | 2001-04-27 | 2002-11-15 | Anelva Corp | Cu薄膜作製方法 |
US6723219B2 (en) | 2001-08-27 | 2004-04-20 | Micron Technology, Inc. | Method of direct electroplating on a low conductivity material, and electroplated metal deposited therewith |
US6664633B1 (en) | 2001-09-10 | 2003-12-16 | Lsi Logic Corporation | Alkaline copper plating |
US6812143B2 (en) | 2002-04-26 | 2004-11-02 | International Business Machines Corporation | Process of forming copper structures |
JP4224434B2 (ja) * | 2004-06-30 | 2009-02-12 | パナソニック株式会社 | 半導体装置及びその製造方法 |
US7438794B2 (en) | 2004-09-30 | 2008-10-21 | Intel Corporation | Method of copper electroplating to improve gapfill |
-
2007
- 2007-02-20 US US11/708,293 patent/US7579274B2/en active Active
- 2007-02-21 KR KR1020087019862A patent/KR101360595B1/ko active IP Right Grant
- 2007-02-21 CN CN2007800054940A patent/CN101512048B/zh active Active
- 2007-02-21 WO PCT/EP2007/051681 patent/WO2007096390A1/en active Application Filing
- 2007-02-21 CA CA2643018A patent/CA2643018C/en not_active Expired - Fee Related
- 2007-02-21 JP JP2008555788A patent/JP5346215B2/ja active Active
- 2007-02-21 EP EP07712279A patent/EP1987177A1/en not_active Withdrawn
- 2007-02-26 TW TW096106492A patent/TWI437638B/zh active
-
2008
- 2008-08-07 IL IL193308A patent/IL193308A/en active IP Right Grant
-
2009
- 2009-11-13 HK HK09110639.7A patent/HK1132768A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP5346215B2 (ja) | 2013-11-20 |
WO2007096390A1 (en) | 2007-08-30 |
TWI437638B (zh) | 2014-05-11 |
US7579274B2 (en) | 2009-08-25 |
KR101360595B1 (ko) | 2014-02-11 |
HK1132768A1 (en) | 2010-03-05 |
JP2009527912A (ja) | 2009-07-30 |
IL193308A (en) | 2013-06-27 |
CA2643018C (en) | 2014-04-22 |
US20070272560A1 (en) | 2007-11-29 |
CN101512048B (zh) | 2011-12-28 |
IL193308A0 (en) | 2009-05-04 |
CA2643018A1 (en) | 2007-08-30 |
EP1987177A1 (en) | 2008-11-05 |
KR20080100813A (ko) | 2008-11-19 |
CN101512048A (zh) | 2009-08-19 |
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