TW200736577A - Visual inspection apparatus - Google Patents
Visual inspection apparatusInfo
- Publication number
- TW200736577A TW200736577A TW096106742A TW96106742A TW200736577A TW 200736577 A TW200736577 A TW 200736577A TW 096106742 A TW096106742 A TW 096106742A TW 96106742 A TW96106742 A TW 96106742A TW 200736577 A TW200736577 A TW 200736577A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- macro
- inspection apparatus
- visual inspection
- holding portion
- Prior art date
Links
- 238000011179 visual inspection Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 10
- 238000005286 illumination Methods 0.000 abstract 3
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
- G01M5/0033—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining damage, crack or wear
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/38—Concrete; Lime; Mortar; Gypsum; Bricks; Ceramics; Glass
- G01N33/386—Glass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nonlinear Science (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Aviation & Aerospace Engineering (AREA)
- Optics & Photonics (AREA)
- Ceramic Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A visual inspection apparatus 1 of the present invention includes a macro-illumination portion 1 which irradiates a light to a substrate 2, and a substrate holding portion 4 which holds the substrate 2 at a position where the light is irradiated. The substrate holding portion 4 holds the substrate 2 in a manner that the surface 2a of the substrate 2 is substantially perpendicularly held. The macro-illumination portion 1 is mounted on an observation base 3 on which an inspector can observe the reflected or transmitted light from the substrate 2. The macro-illumination portion 1 and the observation base 3 are capable of making a relative movement in two-dimensional direction along the surface of the substrate in a state where the substrate 2 is perpendicularly held in substance by the substrate holding portion 4.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006072774A JP2007248292A (en) | 2006-03-16 | 2006-03-16 | Visual inspection device |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200736577A true TW200736577A (en) | 2007-10-01 |
Family
ID=38592758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096106742A TW200736577A (en) | 2006-03-16 | 2007-02-27 | Visual inspection apparatus |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2007248292A (en) |
KR (1) | KR20070094471A (en) |
CN (1) | CN100476518C (en) |
TW (1) | TW200736577A (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010181254A (en) * | 2009-02-05 | 2010-08-19 | Ushio Inc | Device for inspecting screen print making |
CN101826289B (en) * | 2010-05-11 | 2012-06-27 | 友达光电股份有限公司 | Testing apparatus |
CN103250047A (en) * | 2010-12-09 | 2013-08-14 | 旭硝子株式会社 | Method and system for measuring defect in glass ribbon |
CN102621149B (en) * | 2012-03-21 | 2015-07-22 | 深圳市华星光电技术有限公司 | Substrate detection device and method |
CN102645437A (en) * | 2012-04-11 | 2012-08-22 | 法国圣戈班玻璃公司 | Optical measurement device and optical measurement method |
CN104315991B (en) * | 2014-10-31 | 2017-12-15 | 合肥鑫晟光电科技有限公司 | The measurement apparatus and measuring method of the angularity of substrate, touch-screen and preparation method |
CN106556607B (en) * | 2015-09-30 | 2019-10-08 | 苍南县三维电子塑胶有限公司 | Identify the device and method of panel surface dust |
CN106680289A (en) * | 2017-01-25 | 2017-05-17 | 江苏东旭亿泰智能装备有限公司 | Macroscopic inspection system for glass substrate |
TWI673491B (en) * | 2017-02-17 | 2019-10-01 | 特銓股份有限公司 | Light box structure and application of optical inspection equipment |
CN108445020B (en) * | 2018-01-31 | 2021-11-09 | 彩虹显示器件股份有限公司 | Glass substrate defect aggregation identification method |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5956134A (en) * | 1997-07-11 | 1999-09-21 | Semiconductor Technologies & Instruments, Inc. | Inspection system and method for leads of semiconductor devices |
US7715615B2 (en) * | 2002-01-11 | 2010-05-11 | Busse/Sji Corporation | Separator sheet handling assembly |
JP2004317294A (en) * | 2003-04-16 | 2004-11-11 | Shin Etsu Chem Co Ltd | Inspection light irradiation apparatus |
-
2006
- 2006-03-16 JP JP2006072774A patent/JP2007248292A/en not_active Withdrawn
-
2007
- 2007-02-27 TW TW096106742A patent/TW200736577A/en unknown
- 2007-03-08 KR KR1020070022943A patent/KR20070094471A/en not_active Application Discontinuation
- 2007-03-15 CN CNB2007100876896A patent/CN100476518C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101038377A (en) | 2007-09-19 |
CN100476518C (en) | 2009-04-08 |
KR20070094471A (en) | 2007-09-20 |
JP2007248292A (en) | 2007-09-27 |
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