TW200736577A - Visual inspection apparatus - Google Patents

Visual inspection apparatus

Info

Publication number
TW200736577A
TW200736577A TW096106742A TW96106742A TW200736577A TW 200736577 A TW200736577 A TW 200736577A TW 096106742 A TW096106742 A TW 096106742A TW 96106742 A TW96106742 A TW 96106742A TW 200736577 A TW200736577 A TW 200736577A
Authority
TW
Taiwan
Prior art keywords
substrate
macro
inspection apparatus
visual inspection
holding portion
Prior art date
Application number
TW096106742A
Other languages
Chinese (zh)
Inventor
Kiyoshi Ohshiro
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200736577A publication Critical patent/TW200736577A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
    • G01M5/0033—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining damage, crack or wear
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/38—Concrete; Lime; Mortar; Gypsum; Bricks; Ceramics; Glass
    • G01N33/386—Glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Optics & Photonics (AREA)
  • Ceramic Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A visual inspection apparatus 1 of the present invention includes a macro-illumination portion 1 which irradiates a light to a substrate 2, and a substrate holding portion 4 which holds the substrate 2 at a position where the light is irradiated. The substrate holding portion 4 holds the substrate 2 in a manner that the surface 2a of the substrate 2 is substantially perpendicularly held. The macro-illumination portion 1 is mounted on an observation base 3 on which an inspector can observe the reflected or transmitted light from the substrate 2. The macro-illumination portion 1 and the observation base 3 are capable of making a relative movement in two-dimensional direction along the surface of the substrate in a state where the substrate 2 is perpendicularly held in substance by the substrate holding portion 4.
TW096106742A 2006-03-16 2007-02-27 Visual inspection apparatus TW200736577A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006072774A JP2007248292A (en) 2006-03-16 2006-03-16 Visual inspection device

Publications (1)

Publication Number Publication Date
TW200736577A true TW200736577A (en) 2007-10-01

Family

ID=38592758

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096106742A TW200736577A (en) 2006-03-16 2007-02-27 Visual inspection apparatus

Country Status (4)

Country Link
JP (1) JP2007248292A (en)
KR (1) KR20070094471A (en)
CN (1) CN100476518C (en)
TW (1) TW200736577A (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010181254A (en) * 2009-02-05 2010-08-19 Ushio Inc Device for inspecting screen print making
CN101826289B (en) * 2010-05-11 2012-06-27 友达光电股份有限公司 Testing apparatus
CN103250047A (en) * 2010-12-09 2013-08-14 旭硝子株式会社 Method and system for measuring defect in glass ribbon
CN102621149B (en) * 2012-03-21 2015-07-22 深圳市华星光电技术有限公司 Substrate detection device and method
CN102645437A (en) * 2012-04-11 2012-08-22 法国圣戈班玻璃公司 Optical measurement device and optical measurement method
CN104315991B (en) * 2014-10-31 2017-12-15 合肥鑫晟光电科技有限公司 The measurement apparatus and measuring method of the angularity of substrate, touch-screen and preparation method
CN106556607B (en) * 2015-09-30 2019-10-08 苍南县三维电子塑胶有限公司 Identify the device and method of panel surface dust
CN106680289A (en) * 2017-01-25 2017-05-17 江苏东旭亿泰智能装备有限公司 Macroscopic inspection system for glass substrate
TWI673491B (en) * 2017-02-17 2019-10-01 特銓股份有限公司 Light box structure and application of optical inspection equipment
CN108445020B (en) * 2018-01-31 2021-11-09 彩虹显示器件股份有限公司 Glass substrate defect aggregation identification method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5956134A (en) * 1997-07-11 1999-09-21 Semiconductor Technologies & Instruments, Inc. Inspection system and method for leads of semiconductor devices
US7715615B2 (en) * 2002-01-11 2010-05-11 Busse/Sji Corporation Separator sheet handling assembly
JP2004317294A (en) * 2003-04-16 2004-11-11 Shin Etsu Chem Co Ltd Inspection light irradiation apparatus

Also Published As

Publication number Publication date
CN101038377A (en) 2007-09-19
CN100476518C (en) 2009-04-08
KR20070094471A (en) 2007-09-20
JP2007248292A (en) 2007-09-27

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