TW200728938A - Supplying apparatus for developing solution - Google Patents
Supplying apparatus for developing solutionInfo
- Publication number
- TW200728938A TW200728938A TW095136736A TW95136736A TW200728938A TW 200728938 A TW200728938 A TW 200728938A TW 095136736 A TW095136736 A TW 095136736A TW 95136736 A TW95136736 A TW 95136736A TW 200728938 A TW200728938 A TW 200728938A
- Authority
- TW
- Taiwan
- Prior art keywords
- developing solution
- developing
- path
- supplying apparatus
- delivers
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G15/00—Apparatus for electrographic processes using a charge pattern
- G03G15/06—Apparatus for electrographic processes using a charge pattern for developing
- G03G15/10—Apparatus for electrographic processes using a charge pattern for developing using a liquid developer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G15/00—Apparatus for electrographic processes using a charge pattern
- G03G15/06—Apparatus for electrographic processes using a charge pattern for developing
- G03G15/08—Apparatus for electrographic processes using a charge pattern for developing using a solid developer, e.g. powder developer
- G03G15/0822—Arrangements for preparing, mixing, supplying or dispensing developer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G2215/00—Apparatus for electrophotographic processes
- G03G2215/06—Developing structures, details
- G03G2215/0602—Developer
- G03G2215/0626—Developer liquid type (at developing position)
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G2215/00—Apparatus for electrophotographic processes
- G03G2215/06—Developing structures, details
- G03G2215/0634—Developing device
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G2215/00—Apparatus for electrophotographic processes
- G03G2215/06—Developing structures, details
- G03G2215/0634—Developing device
- G03G2215/0658—Liquid developer devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
A supplying apparatus is used to at the same time manage the alkalinity and the resin consistency of the developing solution recycled by the developing process of the liquid crystal circuit board and the printed circuit board, and prepare again the developing solution with certain consistency to provide the developing process with the developing solution. The supplying apparatus for developing solution is disposed with a mechanism for providing the solvent of developing solution and a regulating tank(1) for a mechanism for providing new developing solution or dilution water, delivers the after-use developing solution to the recycling path(22) of the regulation tank, delivers the re-regulated developing solution into the supply path(21) of the developing process(8) and the recycling path(22), and has the disposition of a discharging path(23) used to discharge the after-use developing solution delivered by the developing process(8) out of the apparatus. And, the apparatus is built up. When the consumption needs to be re-regulated after the volume of the after-use developing solution recycled in the regulating tank(1) exceeds, the after-use developing solution is discharged from the discharging path (23).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005364396A JP4839820B2 (en) | 2005-12-19 | 2005-12-19 | Developer supply device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200728938A true TW200728938A (en) | 2007-08-01 |
TWI402634B TWI402634B (en) | 2013-07-21 |
Family
ID=38297922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095136736A TWI402634B (en) | 2005-12-19 | 2006-10-03 | The supply device for the developer |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4839820B2 (en) |
KR (1) | KR20070065209A (en) |
TW (1) | TWI402634B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6712415B2 (en) * | 2017-01-23 | 2020-06-24 | 株式会社平間理化研究所 | Developer management device |
JP2018120901A (en) * | 2017-01-23 | 2018-08-02 | 株式会社平間理化研究所 | Development device |
JP7202229B2 (en) * | 2019-03-20 | 2023-01-11 | 株式会社Screenホールディングス | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000062334A (en) * | 1996-12-25 | 2000-10-25 | 나카노 가츠히코 | Patterning chemical liquid centralized controller |
JP3728945B2 (en) * | 1998-10-30 | 2005-12-21 | オルガノ株式会社 | Method and apparatus for recovering and reusing developer from photoresist developer waste |
JP3686822B2 (en) * | 2000-05-19 | 2005-08-24 | 東京エレクトロン株式会社 | Development processing apparatus and development processing method |
JP3894104B2 (en) * | 2002-11-15 | 2007-03-14 | 東京エレクトロン株式会社 | Developing method, developing apparatus, and developer regenerating apparatus |
-
2005
- 2005-12-19 JP JP2005364396A patent/JP4839820B2/en active Active
-
2006
- 2006-10-03 TW TW095136736A patent/TWI402634B/en active
- 2006-10-25 KR KR1020060103878A patent/KR20070065209A/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
TWI402634B (en) | 2013-07-21 |
JP2007171232A (en) | 2007-07-05 |
JP4839820B2 (en) | 2011-12-21 |
KR20070065209A (en) | 2007-06-22 |
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