TW200728938A - Supplying apparatus for developing solution - Google Patents

Supplying apparatus for developing solution

Info

Publication number
TW200728938A
TW200728938A TW095136736A TW95136736A TW200728938A TW 200728938 A TW200728938 A TW 200728938A TW 095136736 A TW095136736 A TW 095136736A TW 95136736 A TW95136736 A TW 95136736A TW 200728938 A TW200728938 A TW 200728938A
Authority
TW
Taiwan
Prior art keywords
developing solution
developing
path
supplying apparatus
delivers
Prior art date
Application number
TW095136736A
Other languages
Chinese (zh)
Other versions
TWI402634B (en
Inventor
Kenji Sugimoto
Ryouta Tanahashi
Original Assignee
Mitsubishi Chem Eng Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chem Eng Corp filed Critical Mitsubishi Chem Eng Corp
Publication of TW200728938A publication Critical patent/TW200728938A/en
Application granted granted Critical
Publication of TWI402634B publication Critical patent/TWI402634B/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00—Apparatus for electrographic processes using a charge pattern
    • G03G15/06—Apparatus for electrographic processes using a charge pattern for developing
    • G03G15/10—Apparatus for electrographic processes using a charge pattern for developing using a liquid developer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00—Apparatus for electrographic processes using a charge pattern
    • G03G15/06—Apparatus for electrographic processes using a charge pattern for developing
    • G03G15/08—Apparatus for electrographic processes using a charge pattern for developing using a solid developer, e.g. powder developer
    • G03G15/0822—Arrangements for preparing, mixing, supplying or dispensing developer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G2215/00—Apparatus for electrophotographic processes
    • G03G2215/06—Developing structures, details
    • G03G2215/0602—Developer
    • G03G2215/0626—Developer liquid type (at developing position)
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G2215/00—Apparatus for electrophotographic processes
    • G03G2215/06—Developing structures, details
    • G03G2215/0634—Developing device
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G2215/00—Apparatus for electrophotographic processes
    • G03G2215/06—Developing structures, details
    • G03G2215/0634—Developing device
    • G03G2215/0658—Liquid developer devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

A supplying apparatus is used to at the same time manage the alkalinity and the resin consistency of the developing solution recycled by the developing process of the liquid crystal circuit board and the printed circuit board, and prepare again the developing solution with certain consistency to provide the developing process with the developing solution. The supplying apparatus for developing solution is disposed with a mechanism for providing the solvent of developing solution and a regulating tank(1) for a mechanism for providing new developing solution or dilution water, delivers the after-use developing solution to the recycling path(22) of the regulation tank, delivers the re-regulated developing solution into the supply path(21) of the developing process(8) and the recycling path(22), and has the disposition of a discharging path(23) used to discharge the after-use developing solution delivered by the developing process(8) out of the apparatus. And, the apparatus is built up. When the consumption needs to be re-regulated after the volume of the after-use developing solution recycled in the regulating tank(1) exceeds, the after-use developing solution is discharged from the discharging path (23).
TW095136736A 2005-12-19 2006-10-03 The supply device for the developer TWI402634B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005364396A JP4839820B2 (en) 2005-12-19 2005-12-19 Developer supply device

Publications (2)

Publication Number Publication Date
TW200728938A true TW200728938A (en) 2007-08-01
TWI402634B TWI402634B (en) 2013-07-21

Family

ID=38297922

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095136736A TWI402634B (en) 2005-12-19 2006-10-03 The supply device for the developer

Country Status (3)

Country Link
JP (1) JP4839820B2 (en)
KR (1) KR20070065209A (en)
TW (1) TWI402634B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6712415B2 (en) * 2017-01-23 2020-06-24 株式会社平間理化研究所 Developer management device
JP2018120901A (en) * 2017-01-23 2018-08-02 株式会社平間理化研究所 Development device
JP7202229B2 (en) * 2019-03-20 2023-01-11 株式会社Ｓｃｒｅｅｎホールディングス SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000062334A (en) * 1996-12-25 2000-10-25 나카노 가츠히코 Patterning chemical liquid centralized controller
JP3728945B2 (en) * 1998-10-30 2005-12-21 オルガノ株式会社 Method and apparatus for recovering and reusing developer from photoresist developer waste
JP3686822B2 (en) * 2000-05-19 2005-08-24 東京エレクトロン株式会社 Development processing apparatus and development processing method
JP3894104B2 (en) * 2002-11-15 2007-03-14 東京エレクトロン株式会社 Developing method, developing apparatus, and developer regenerating apparatus

Also Published As

Publication number Publication date
TWI402634B (en) 2013-07-21
JP2007171232A (en) 2007-07-05
JP4839820B2 (en) 2011-12-21
KR20070065209A (en) 2007-06-22

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