TW200725953A - Soft piezoelectric plate structure and synthetic method - Google Patents

Soft piezoelectric plate structure and synthetic method

Info

Publication number
TW200725953A
TW200725953A TW094147328A TW94147328A TW200725953A TW 200725953 A TW200725953 A TW 200725953A TW 094147328 A TW094147328 A TW 094147328A TW 94147328 A TW94147328 A TW 94147328A TW 200725953 A TW200725953 A TW 200725953A
Authority
TW
Taiwan
Prior art keywords
plate structure
synthetic method
piezoelectric plate
electrode layer
soft piezoelectric
Prior art date
Application number
TW094147328A
Other languages
Chinese (zh)
Other versions
TWI290778B (en
Inventor
Syh-Yuh Cheng
Horng-Yi Chang
Ching-Iuan Sheu
Yi-Huey Wang
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW94147328A priority Critical patent/TWI290778B/en
Publication of TW200725953A publication Critical patent/TW200725953A/en
Application granted granted Critical
Publication of TWI290778B publication Critical patent/TWI290778B/en

Links

Landscapes

  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

A soft piezoelectric plate structure and synthetic method thereof is provided. The soft piezoelectric plate structure is composed of a substrate, a bottom electrode layer, a piezoelectric film and a surface electrode layer. The bottom electrode layer is on the substrate. The piezoelectric film is on the substrate and the bottom electrode layer. The piezoelectric film has a continuous piezoelectric phase. The surface electrode layer is on the piezoelectric film.
TW94147328A 2005-12-29 2005-12-29 Soft piezoelectric plate structure and synthetic method TWI290778B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94147328A TWI290778B (en) 2005-12-29 2005-12-29 Soft piezoelectric plate structure and synthetic method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94147328A TWI290778B (en) 2005-12-29 2005-12-29 Soft piezoelectric plate structure and synthetic method

Publications (2)

Publication Number Publication Date
TW200725953A true TW200725953A (en) 2007-07-01
TWI290778B TWI290778B (en) 2007-12-01

Family

ID=39327589

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94147328A TWI290778B (en) 2005-12-29 2005-12-29 Soft piezoelectric plate structure and synthetic method

Country Status (1)

Country Link
TW (1) TWI290778B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399337B (en) * 2009-12-21 2013-06-21 Univ Nat Cheng Kung Method for manufacturing nano-sensor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI393279B (en) * 2009-12-07 2013-04-11 Nat Univ Chung Hsing High pressure electrical properties of lead zirconate titanate silicon dioxide flexible film and its preparation method
TWI406639B (en) * 2010-04-21 2013-09-01 私立中原大學 Security umbrella

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399337B (en) * 2009-12-21 2013-06-21 Univ Nat Cheng Kung Method for manufacturing nano-sensor

Also Published As

Publication number Publication date
TWI290778B (en) 2007-12-01

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