TW200725785A - Displaced wafer detection systems - Google Patents
Displaced wafer detection systemsInfo
- Publication number
- TW200725785A TW200725785A TW094147624A TW94147624A TW200725785A TW 200725785 A TW200725785 A TW 200725785A TW 094147624 A TW094147624 A TW 094147624A TW 94147624 A TW94147624 A TW 94147624A TW 200725785 A TW200725785 A TW 200725785A
- Authority
- TW
- Taiwan
- Prior art keywords
- pod
- unified pod
- wafer detection
- detection systems
- wafers
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/40—Robotics, robotics mapping to robotics vision
- G05B2219/40562—Position and orientation of end effector, teach probe, track them
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45031—Manufacturing semiconductor wafers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Human Computer Interaction (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A displaced wafer detection system comprises a unified pod, an pod opener, a horizontal transmission robot, and a sensor. The unified pod encloses a plurality of wafers in a first position. The pod opener opens the unified pod. The horizontal transmission robot carries the wafers from the unified pod to a second position. When one of the wafers reaches the second position, the sensor detects if any wafer slips during wafer transmission from the unified pod.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094147624A TW200725785A (en) | 2005-12-30 | 2005-12-30 | Displaced wafer detection systems |
US11/444,500 US20070154291A1 (en) | 2005-12-30 | 2006-06-01 | Displaced wafer detection systems |
KR1020060055841A KR100780085B1 (en) | 2005-12-30 | 2006-06-21 | Displaced wafer detection systems |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094147624A TW200725785A (en) | 2005-12-30 | 2005-12-30 | Displaced wafer detection systems |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200725785A true TW200725785A (en) | 2007-07-01 |
Family
ID=38224588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094147624A TW200725785A (en) | 2005-12-30 | 2005-12-30 | Displaced wafer detection systems |
Country Status (3)
Country | Link |
---|---|
US (1) | US20070154291A1 (en) |
KR (1) | KR100780085B1 (en) |
TW (1) | TW200725785A (en) |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4987407A (en) * | 1988-04-22 | 1991-01-22 | Asq. Boats, Inc. | Wafer interleaving with electro-optical safety features |
JPH04186862A (en) * | 1990-11-21 | 1992-07-03 | Tokyo Electron Sagami Ltd | Equipment for detecting substrate |
KR100213991B1 (en) * | 1994-05-23 | 1999-08-02 | 히가시 데쓰로 | Probe test apparatus |
US5870488A (en) * | 1996-05-07 | 1999-02-09 | Fortrend Engineering Corporation | Method and apparatus for prealigning wafers in a wafer sorting system |
US5706201A (en) * | 1996-05-07 | 1998-01-06 | Fortrend Engineering Corporation | Software to determine the position of the center of a wafer |
JPH10107122A (en) * | 1996-10-01 | 1998-04-24 | Tokyo Electron Ltd | Device for carrying in cassette for substrate to be processed |
US6224312B1 (en) * | 1996-11-18 | 2001-05-01 | Applied Materials, Inc. | Optimal trajectory robot motion |
KR100252041B1 (en) * | 1997-10-30 | 2000-04-15 | 윤종용 | Apparatus for detecting loading status of wafer in carrier and method therefor |
JP3590517B2 (en) | 1998-01-21 | 2004-11-17 | 株式会社 日立インダストリイズ | Wafer detection device in cassette |
US6368040B1 (en) * | 1998-02-18 | 2002-04-09 | Tokyo Electron Limited | Apparatus for and method of transporting substrates to be processed |
JP2001060615A (en) | 1999-08-20 | 2001-03-06 | Rorze Corp | Wafer recognition device in wafer transfer device |
JP4246420B2 (en) * | 2000-09-14 | 2009-04-02 | 平田機工株式会社 | FOUP opener and FOUP opener mapping method |
KR20020032702A (en) * | 2000-10-26 | 2002-05-04 | 윤종용 | Apparatus for holding in check drop of wafer adapted to semiconductor fabrication equipment |
KR100481178B1 (en) * | 2002-09-03 | 2005-04-07 | 삼성전자주식회사 | Substrate existence inspection apparatus |
US7255524B2 (en) * | 2003-04-14 | 2007-08-14 | Brooks Automation, Inc. | Substrate cassette mapper |
KR20050049988A (en) * | 2003-11-24 | 2005-05-27 | 삼성전자주식회사 | Apparatus for detecting a wafer in a transfer chamber of semiconductor fabrication |
TWI397969B (en) * | 2005-07-11 | 2013-06-01 | Brooks Automation Inc | Process apparatus with on-the-fly workpiece centering |
-
2005
- 2005-12-30 TW TW094147624A patent/TW200725785A/en unknown
-
2006
- 2006-06-01 US US11/444,500 patent/US20070154291A1/en not_active Abandoned
- 2006-06-21 KR KR1020060055841A patent/KR100780085B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20070154291A1 (en) | 2007-07-05 |
KR20070072329A (en) | 2007-07-04 |
KR100780085B1 (en) | 2007-11-29 |
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