TW200722275A - Manufacturing method of A 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface - Google Patents
Manufacturing method of A 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surfaceInfo
- Publication number
- TW200722275A TW200722275A TW094144564A TW94144564A TW200722275A TW 200722275 A TW200722275 A TW 200722275A TW 094144564 A TW094144564 A TW 094144564A TW 94144564 A TW94144564 A TW 94144564A TW 200722275 A TW200722275 A TW 200722275A
- Authority
- TW
- Taiwan
- Prior art keywords
- centrifugal force
- lens array
- micro lens
- manufacturing
- controlled
- Prior art date
Links
Landscapes
- Micromachines (AREA)
Abstract
This invention relates to a manufacturing method of a 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface. It includes (1) preparing step, (2) lithography processing step, (3) centrifugal force applying step, and (4) product finishing step. Based on the adjustment of centrifugal force, the curvature and focus of lens can be controlled. Also, by using the electroforming or the like as well as the 3-D micro lithography technology, it can apply on a non-planar 3-D surface of a product. Therefore, it can apply on mass production for micro lens array on a large surface. It can make a non-planar 3-D micro lens array. The entire process is stable. And, it has the advantages of low-cost production equipments.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94144564A TWI287504B (en) | 2005-12-15 | 2005-12-15 | Manufacturing method of a 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94144564A TWI287504B (en) | 2005-12-15 | 2005-12-15 | Manufacturing method of a 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200722275A true TW200722275A (en) | 2007-06-16 |
TWI287504B TWI287504B (en) | 2007-10-01 |
Family
ID=39201669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94144564A TWI287504B (en) | 2005-12-15 | 2005-12-15 | Manufacturing method of a 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI287504B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI606919B (en) * | 2015-12-17 | 2017-12-01 | 國立臺灣科技大學 | Method for manufacturing microlens array and mold thereof |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI456743B (en) * | 2009-09-08 | 2014-10-11 | United Microelectronics Corp | Method for fabricating image sensor |
-
2005
- 2005-12-15 TW TW94144564A patent/TWI287504B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI606919B (en) * | 2015-12-17 | 2017-12-01 | 國立臺灣科技大學 | Method for manufacturing microlens array and mold thereof |
Also Published As
Publication number | Publication date |
---|---|
TWI287504B (en) | 2007-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |