TW200722275A - Manufacturing method of A 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface - Google Patents

Manufacturing method of A 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface

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Publication number
TW200722275A
TW200722275A TW094144564A TW94144564A TW200722275A TW 200722275 A TW200722275 A TW 200722275A TW 094144564 A TW094144564 A TW 094144564A TW 94144564 A TW94144564 A TW 94144564A TW 200722275 A TW200722275 A TW 200722275A
Authority
TW
Taiwan
Prior art keywords
centrifugal force
lens array
micro lens
manufacturing
controlled
Prior art date
Application number
TW094144564A
Other languages
Chinese (zh)
Other versions
TWI287504B (en
Inventor
Pin Han
Hsih-Arng Yang
Meng-Yu Wu
Ming-Chi Tsou
Original Assignee
Nat Univ Chung Hsing
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Univ Chung Hsing filed Critical Nat Univ Chung Hsing
Priority to TW94144564A priority Critical patent/TWI287504B/en
Publication of TW200722275A publication Critical patent/TW200722275A/en
Application granted granted Critical
Publication of TWI287504B publication Critical patent/TWI287504B/en

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Abstract

This invention relates to a manufacturing method of a 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface. It includes (1) preparing step, (2) lithography processing step, (3) centrifugal force applying step, and (4) product finishing step. Based on the adjustment of centrifugal force, the curvature and focus of lens can be controlled. Also, by using the electroforming or the like as well as the 3-D micro lithography technology, it can apply on a non-planar 3-D surface of a product. Therefore, it can apply on mass production for micro lens array on a large surface. It can make a non-planar 3-D micro lens array. The entire process is stable. And, it has the advantages of low-cost production equipments.
TW94144564A 2005-12-15 2005-12-15 Manufacturing method of a 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface TWI287504B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94144564A TWI287504B (en) 2005-12-15 2005-12-15 Manufacturing method of a 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94144564A TWI287504B (en) 2005-12-15 2005-12-15 Manufacturing method of a 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface

Publications (2)

Publication Number Publication Date
TW200722275A true TW200722275A (en) 2007-06-16
TWI287504B TWI287504B (en) 2007-10-01

Family

ID=39201669

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94144564A TWI287504B (en) 2005-12-15 2005-12-15 Manufacturing method of a 3-D micro lens array with predetermined surface curvature controlled by centrifugal force surface

Country Status (1)

Country Link
TW (1) TWI287504B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI606919B (en) * 2015-12-17 2017-12-01 國立臺灣科技大學 Method for manufacturing microlens array and mold thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI456743B (en) * 2009-09-08 2014-10-11 United Microelectronics Corp Method for fabricating image sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI606919B (en) * 2015-12-17 2017-12-01 國立臺灣科技大學 Method for manufacturing microlens array and mold thereof

Also Published As

Publication number Publication date
TWI287504B (en) 2007-10-01

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MM4A Annulment or lapse of patent due to non-payment of fees